JP5342364B2 - Power supply mechanism and vacuum processing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a power feeding mechanism capable of applying an RF power to a substrate holder by using an RF power source and, at the same time, applying a DC pulse to the substrate holder by using a DC power source of a simple structure. <P>SOLUTION: The power feeding mechanism 110 includes: a rotation shaft 11 electrically connected to the substrate holder 12; a first power transmission brush 21 to which a high frequency power of a high frequency power source 31 is applied; and a second power transmission brush 22 to which a DC voltage of a DC power source 33 is applied. Therein, by rotation of the rotation shaft 11, the application of high frequency power to the rotation shaft 11 caused by sliding between the first power transmission brush 21 and the rotation shaft 11, and the application of DC voltage to the rotation shaft 11 caused by intermittent sliding between the second power transmission brush 22 and the rotation shaft 11 are performed. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a power feeding mechanism and a vacuum processing apparatus.

  In order to form a functional thin film of a semiconductor element or an optical element, a vacuum film forming method such as ion plating or sputtering is often used. In such a vacuum film forming method, a technique is often used in which a substrate holder supported by a rotating shaft is rotated to thereby make a thin film deposited on the substrate on the substrate holder uniform.

  Further, in the ion plating apparatus, a direct current (DC) voltage is applied to the rotating shaft in a superimposed manner with respect to the high frequency (RF) power for plasma formation, thereby stabilizing the direct current component (self bias) of the RF power. A technique is known (see, for example, Patent Document 1).

  However, in the ion plating apparatus described in Patent Document 1, for example, when an insulating thin film is formed on a substrate by drawing particles having a positive charge into the substrate, the surface of such a thin film has a positive charge. Charge up phenomenon occurs due to. Then, various inconveniences occur due to the charge-up voltage. For example, an insulating thin film may cause dielectric breakdown due to a charge-up voltage.

  Therefore, a method for neutralizing positive charges charged on the surface of the thin film by using a DC pulse power source capable of outputting a pulsed DC voltage has been proposed (for example, see Patent Document 2).

Japanese Patent Publication No. 1-48347 JP 2001-262324 A

  However, the ion plating apparatus described in Patent Document 2 requires a special DC pulse power source that outputs a pulsed DC voltage.

  Therefore, the inventors of the present invention use a DC power supply having a simple structure instead of the DC pulse power supply by devising a mechanical contact between the power supply system of the ion plating apparatus and the rotating shaft connected to the substrate holder. However, a power supply mechanism that can apply a DC pulse to the substrate holder has been devised. In particular, the present inventors have focused on the existence of a rotation mechanism in which the substrate holder is rotated by a rotation shaft.

  The present invention has been made in view of such circumstances, and applies RF power to a substrate holder using an RF power source and applies a DC pulse to the substrate holder using a DC power source having a simple structure. An object of the present invention is to provide a power feeding mechanism capable of performing the above.

  Another object of the present invention is to provide a vacuum processing apparatus having such a power feeding mechanism.

In order to solve the above problems, the present invention provides a rotating shaft electrically connected to a substrate holder,
A first power transmission brush to which a high-frequency power of a high-frequency power source is applied; and a second power transmission brush to which a DC voltage of a DC power source is applied.
Application of the high-frequency power to the rotating shaft by sliding between the first power transmission brush and the rotating shaft and rotation between the second power transmitting brush and the rotating shaft by rotation of the rotating shaft. Provided is a power feeding mechanism in which the DC voltage is applied to the rotating shaft by a normal sliding.

  With the above configuration, high-frequency power can be applied to the substrate holder using a high-frequency power source, and a DC pulse can be applied to the substrate holder using a DC power source having a simple structure.

  That is, plasma formation in the vicinity of the substrate holder, stabilization of RF power self-bias, and neutralization of charges charged on the surface of the thin film on the substrate can be performed.

  In particular, in the power feeding mechanism of the present invention, the DC pulse can be applied to the substrate holder using a DC power source having a simple structure instead of the conventional DC pulse power source by making good use of the rotation of the rotating shaft. Therefore, the power feeding mechanism of the present invention has an advantageous effect compared with the conventional example that the charge charged on the surface of the thin film can be neutralized using a simple power supply system.

  Note that sliding between the first power transmission brush and the rotating shaft may also be performed intermittently.

  Further, in the power feeding mechanism of the present invention, the arc-shaped first power transmission brush and the arc-shaped second power transmission brush may be arranged such that their end faces face each other to constitute a pair of power transmission brushes.

  In the power supply mechanism of the present invention, the rotating shaft may include a columnar main body and a power receiving unit provided in the main body. And the said power receiving part may take the connection state between the said 1st power transmission brush and the connection state between the 2nd power transmission brush based on the rotation around the central axis of the said main-body part.

  In the power supply mechanism of the present invention, when the pair of power transmission brushes is viewed from the direction in which the central axis of the main body extends, a virtual circle along the inner surface of the pair of power transmission brushes is coaxial with the main body of the rotating shaft. The power receiving unit at a position deviated from the central axis of the main body part performs a circular motion around the central axis based on rotation around the central axis of the main body part, The side surface of the power receiving unit may slide on the inner surface of the pair of power transmission brushes.

  The power supply mechanism of the present invention may include a pair of annular insulating plates that sandwich the pair of power transmission brushes.

  Thereby, the pair of power transmission brushes can be appropriately retained.

  In addition, the power feeding mechanism of the present invention may include an insulating member that fills a gap between an end surface of the first power transmission brush and an end surface of the second power transmission brush.

  Thereby, the pair of power transmission brushes can be appropriately retained.

  The second power transmission brush may be divided into a plurality of sub-brushes insulated from each other, and the DC voltages having different polarities may be applied to adjacent sub-brushes.

  Thus, in the power feeding mechanism of the present invention, by utilizing the rotation of the rotating shaft, a DC power source having a simple structure can be used instead of the conventional DC pulse power source, and a DC negative voltage pulse and a DC positive voltage can be generated. Pulses can be applied alternately to the substrate holder. Therefore, the power feeding mechanism of the present invention has an advantageous effect compared with the conventional example that the charge charged on the surface of the thin film can be neutralized using a simple power supply system.

  Further, the present invention is supported by the above power feeding mechanism, a high frequency power source that outputs the high frequency power to the power feeding mechanism, a DC power source that outputs the DC voltage to the power feeding mechanism, and a rotating shaft of the power feeding mechanism. Provided is a vacuum processing apparatus comprising a vacuum chamber in which a substrate holder is disposed, and an evaporation source facing the substrate holder.

  With the above configuration, high-frequency power can be applied to the substrate holder using a high-frequency power source, and a DC pulse can be applied to the substrate holder using a DC power source having a simple structure.

  According to the present invention, it is possible to obtain a power feeding mechanism that can apply RF power to a substrate holder using an RF power source and can apply a DC pulse to the substrate holder using a DC power source having a simple structure.

  Further, according to the present invention, a vacuum processing apparatus having such a power feeding mechanism can be obtained.

It is the figure which showed one structural example of the vacuum processing apparatus provided with the electric power feeding mechanism of 1st Embodiment of this invention. FIG. 2 is a perspective view of the power feeding mechanism of FIG. 1. It is the figure which looked at the electric power feeding mechanism of FIG. 1 from the direction where the central axis of a main-body part is extended. It is the figure which showed the example of 1 structure of the electric power feeding mechanism of 2nd Embodiment of this invention. It is a figure used for description of the structure of the electric power feeding mechanism by the 1st modification of this invention.

  Hereinafter, a first embodiment and a second embodiment of the present invention will be described with reference to the drawings.

(First embodiment)
FIG. 1 is a diagram illustrating a configuration example of a vacuum processing apparatus including the power supply mechanism according to the first embodiment of the present invention. 1 also includes a block diagram of a power supply system of the power feeding mechanism 110.

  In addition, although an ion plating film-forming apparatus is described here as an example of the vacuum processing apparatus 100, it is not limited to this. For example, a sputtering film forming apparatus may be used as the vacuum processing apparatus 100.

  As shown in FIG. 1, the vacuum processing apparatus 100 includes a power supply mechanism 110 that can apply high frequency (RF) power and direct current (DC) negative voltage to the substrate holder 12, and an RF power supply 31 that outputs the RF power to the power supply mechanism 110. And a DC power source 33 that outputs the DC negative voltage to the power feeding mechanism 110, and a grounded vacuum chamber 13 in which the substrate holder 12 is disposed.

  The conductive rotating shaft 11 of the power feeding mechanism 110 is electrically connected to a substrate holder 12 that can hold a substrate (not shown).

  The rotation of the main body 11 </ b> A of the rotating shaft 11 makes an electrical connection between the power receiving unit 11 </ b> B of the rotating shaft 11 and the terminal 31 </ b> A of the RF power supply 31 using the first power transmission brush 21, and RF power to the rotating shaft 11. Is applied. Similarly, due to the above rotation, electrical connection between the power receiving unit 11B of the rotating shaft 11 using the second power transmission brush 22 and the terminal 33A (negative voltage side terminal) of the DC power source 33 is also made, and the rotation shaft 11 is connected to the rotating shaft 11. A DC negative voltage is also applied.

  In addition, the detailed structure of the 1st power transmission brush 21, the 2nd power transmission brush 22, and the rotating shaft 11 is mentioned later.

  Further, as shown in FIG. 1, the terminal 31A of the RF power supply 31 is connected to the first power transmission brush 21 via the matching circuit 30 for impedance matching, and the other terminal 31B is grounded. The terminal 33A of the DC power source 33 is connected to the second power transmission brush 22 via the low-pass filter 32, and the other terminal 33B (plus voltage side terminal) is grounded.

  As shown in FIG. 1, the rotating shaft 11 of the power supply mechanism 110 penetrates through the wall hole of the vacuum chamber 13 and extends from the outside (in the atmosphere) of the vacuum chamber 13 to the inside (in vacuum) of the vacuum chamber 13. The substrate holder 12 is supported at the tip of the rotating shaft 11.

  Further, the vacuum processing apparatus 100 includes a rotation mechanism 120 that can transmit a rotational force to the main body 11 </ b> A of the rotation shaft 11.

  The rotating mechanism 120 holds the motor 18A that generates the rotational force, the pulley 18D and the belt 18C for transmitting the rotational force to the rotating shaft 11, and the main body 11A of the rotating shaft 11 in a rotatable state. Rotary bearing 18B.

  However, each of these members 18A, 18B, 18C, 18D is merely an example, and the rotation mechanism 120 is configured by various conventional means that can rotate the body 11A of the rotating shaft 11 while keeping the inside of the vacuum chamber 13 airtight. it can. Therefore, description of the detailed structure of the rotation mechanism 120 is omitted here.

  Further, the vacuum processing apparatus 100 includes a high-frequency heating evaporation source 16 (hereinafter, abbreviated as “evaporation source 16”) that can evaporate a material for forming a thin film on a substrate.

  The evaporation source 16 is opposed to the substrate holder 12 and includes a container 15 for storing an evaporation material placed in a vacuum chamber 13, a high-frequency coil 14 and a power source 17 used for heating the material.

  However, each of these members 14, 15, and 17 is merely an example, and the evaporation source 16 can be heated and melted by using various conventional means that can evaporate the material in the vacuum chamber 13 by heating and melting the material. Can be configured. For example, in heating the material of the evaporation source 16, a resistance heating method or an electron beam heating method may be used. Therefore, the detailed description of the evaporation source 16 is also omitted here.

  Next, the electrical connection structure of the power feeding mechanism 110, which is a characteristic part of the vacuum processing apparatus 100 of the present embodiment, will be described with reference to the drawings.

  FIG. 2 is a perspective view of the power feeding mechanism of FIG. FIG. 3 is a view of the power feeding mechanism of FIG. 1 as viewed from the direction in which the central axis of the main body extends.

  In FIG. 2, the first power transmission brush 21 and the second power transmission brush 22 are separated from the power receiving unit 11 </ b> B of the rotating shaft 11 so as to facilitate understanding of the electrical connection structure of the power supply mechanism 110. Although shown, when the power feeding mechanism 110 is used, the inner surface 50A of the power transmission brush pair 50 contacts the side surface 11C of the power reception unit 11B so that the power reception unit 11B can configure an electrical connection with the power transmission brush pair 50. .

  First, the structure on the power transmission side of the power feeding mechanism 110 will be described.

  As shown in FIGS. 2 and 3, the first power transmission brush 21 and the second power transmission brush 22 are arranged so that the end faces thereof face each other, thereby constituting a pair 50 of power transmission brushes. For example, a known carbon brush may be used as the first power transmission brush 21 and the second power transmission brush 22.

  Each of the first power transmission brush 21 and the second power transmission brush 22 has a virtual annular conductive plate in the radial direction as shown in FIG. 3 when viewed from the direction in which the central axis 200 of the main body 11A extends. About half of this is cut off to form a substantially semicircular arc shape (more precisely, the length is slightly smaller than half of the entire circumference). For this reason, in the pair 50 of power transmission brushes, a pair of gaps S is formed between the end surface of the first power transmission brush 21 and the end surface of the second power transmission brush 22, thereby ensuring mutual insulation. However, in this case, it is necessary to provide an appropriate fixing member for fixing the power transmission brush pair 50.

  Therefore, in the power supply mechanism 110 of the present embodiment, as an example of a fixing member of the power transmission brush pair 50, a pair of annular insulating plates 23 and 24 sandwiching the power transmission brush pair 50 are disposed as shown in FIG. ing. Thereby, each of the 1st power transmission brush 21 and the 2nd power transmission brush 22 of the pair 50 of power transmission brush is appropriately hold | maintained by the insulating plates 23 and 24, ensuring mutual insulation. In order to facilitate understanding of the electrical connection structure of the power feeding mechanism 110, the insulating plates 23 and 24 in FIG. 2 are represented by imaginary lines, and the insulating plates 23 and 24 are not shown in FIG.

  Next, the structure on the power receiving side of the power feeding mechanism 110 will be described.

  As shown in FIG. 2, the rotating shaft 11 of the power supply mechanism 110 includes a columnar main body 11A and a power receiving unit 11B provided at a part (here, an end) of the main body 11A. Here, the power receiving unit 11 </ b> B is formed integrally with the main body unit 11 </ b> A and has a rectangular bar shape extending in the direction of the central axis 200. However, the corners of the side surface 11C that functions as the sliding surface of the power receiving unit 11B are chamfered.

  With the above configuration, the power receiving unit 11B moves (here, circular motion) based on the rotation around the central axis 200 of the main body 11A, thereby connecting the first power transmission brush 21 and the first power transmission brush 21. The connection state between the two power transmission brushes 22 can be taken.

  Specifically, in the power supply mechanism 110 of the present embodiment, when the power transmission brush pair 50 is viewed from the direction in which the central axis 200 of the main body portion 11A extends, as illustrated in FIG. 3, along the inner surface 50A of the power transmission brush pair 50. The virtual circle 300 can be drawn coaxially with the main body portion 11 </ b> A of the rotating shaft 11. Then, the power receiving unit 11B is arranged in a radially deviated manner from the central axis 200 of the main body unit 11A so that the side surface 11C of the power receiving unit 11B of the rotating shaft 11 contacts the inner surface 50A of the pair 50 of power transmission brushes. .

  Therefore, when the main body portion 11A of the rotating shaft 11 rotates around the central axis 200, the power receiving portion 11B at a position deviated from the central axis 200 of the main body portion 11A is centered on the central shaft 200 based on the rotation of the main body portion 11A. Perform a circular motion. Then, the side surface 11C of the power receiving unit 11B can slide on the inner surface 50A of the pair 50 of power transmission brushes.

  While the side surface 11C of the power reception unit 11B slides intermittently on the inner surface 50A of the first power transmission brush 21, electrical connection between the power reception unit 11B (rotary shaft 11) and the first power transmission brush 21 can be established. In this case, RF power can be applied to the substrate holder 12 (see FIG. 1).

  In addition, while the side surface 11C of the power reception unit 11B slides intermittently on the inner surface 50A of the second power transmission brush 22, the power reception unit 11B (rotary shaft 11) and the second power transmission brush 22 can be electrically connected. . In this case, a DC negative voltage can be applied to the substrate holder 12 (see FIG. 1).

  In this manner, the electric power receiving unit 11B of the rotating shaft 11 can be periodically connected to the second power transmission brush 22 by the rotation of the main body 11A of the rotating shaft 11 at a constant period. Therefore, in the power feeding mechanism 110 according to the present embodiment, a rectangular pulse of a DC negative voltage can be applied to the substrate holder 12 using the DC power supply 33 having a simple structure based on the rotation period.

  The period of the rectangular pulse may be appropriately set depending on the rotation period (rotational speed) of the main body 11A, the shape of the second power transmission brush 22 (for example, the length of the inner surface 50A of the second power transmission brush 22), and the like. Thus, while forming a thin film on the substrate of the substrate holder 12 by the ion plating method, a desired rectangular pulse is applied to the substrate holder 12 so that the positive charge charged on the surface of the thin film on the substrate is appropriately neutralized. Can be applied.

  That is, while a rectangular pulse of DC negative voltage is applied to the substrate holder 11, the evaporation material charged positively by the action of plasma can be positively drawn to the substrate side. On the other hand, the positive charge charged on the surface of the thin film on the substrate can be neutralized by the electrons in the plasma while the rectangular pulse is not applied.

  In addition, the power receiving unit 11B of the rotating shaft 11 can be periodically connected to the first power transmission brush 21 by rotating the rotating shaft 11 at the main body 11A at a constant cycle. Therefore, in the power feeding mechanism 110 of the present embodiment, RF power can be intermittently applied to the substrate holder 12 based on the rotation period. Thereby, the plasma by RF electric power can be formed in the appropriate place in the vacuum chamber 13.

  The application time of the RF power may be appropriately set depending on the rotation period (rotation speed) of the main body 11A, the shape of the first power transmission brush 21 (for example, the length of the inner surface 50A of the first power transmission brush 21), and the like. . Accordingly, desired RF power can be applied to the substrate holder 12 so that the electrical connection between the power receiving unit 11B and the first power transmission brush 21 is cut for a short time that does not cause the plasma generated by the RF power to disappear.

  Next, an operation example of the vacuum processing apparatus 100 of this embodiment will be outlined.

  First, the substrate is set on the substrate holder 12 in the vacuum chamber 13, the evaporation material is stored in the container 15 of the evaporation source 16, and the inside of the vacuum chamber 13 is brought to a predetermined degree of vacuum by an exhaust device (not shown). Depressurized.

  Next, by driving the motor 18 </ b> A of the rotation mechanism 120, the main body portion 11 </ b> A of the rotation shaft 11 rotates with the substrate holder 12 at a constant period.

  In addition, the power supply mechanism 110 supplies power to the substrate holder 12 by operating the RF power supply 31 and the DC power supply 33 while introducing the discharge gas (argon gas) into the vacuum chamber 13.

  In the evaporation source 16, the material in the container 15 is subjected to high frequency induction heating using the high frequency coil 14 and the power source 17, and the material is evaporated.

  Then, the vaporized material positively charged by the ionizing action with the plasma is attracted to the substrate by the electric field generated by the RF power self-bias (negative voltage), so that a dense thin film made of the material is applied to the substrate. Strongly attached.

  At this time, while the side surface 11C of the power receiving unit 11B slides intermittently on the inner surface 50A of the first power transmission brush 21 due to the rotation of the main body 11A of the rotating shaft 11 at a constant cycle, the RF power to the substrate holder 12 is reduced. Application is performed, whereby plasma in the vicinity of the substrate holder 12 is appropriately formed.

  Moreover, while the side surface 11C of the power receiving unit 11B slides intermittently on the inner surface 50A of the second power transmission brush 22 due to the rotation of the main body 11A of the rotating shaft 11 at a constant cycle, the DC negative voltage applied to the substrate holder 12 is reduced. A rectangular pulse is applied, and thereby the RF power self-bias is kept stable.

  Furthermore, while the rectangular pulse is not applied to the substrate holder 12, the positive charge charged on the surface of the thin film on the substrate of the substrate holder 12 can be appropriately neutralized.

  As described above, the power supply mechanism 110 of the present embodiment includes the rotating shaft 11 that is electrically connected to the substrate holder 12, the first power transmission brush 21 to which the RF power of the RF power supply 31 is applied, and the DC of the DC power supply 33. A second power transmission brush 22 to which a voltage is applied.

  And in the electric power feeding mechanism 110 of this embodiment, to the rotating shaft 11 by the intermittent sliding between the 1st power transmission brush 21 and the rotating shaft 11 (power receiving part 11B) by rotation of the main-body part 11A of the rotating shaft 11. And the DC voltage is applied to the rotating shaft 11 by intermittent sliding between the second power transmission brush 22 and the rotating shaft 11 (power receiving unit 11B). Can be formed, the RF power self-bias can be stabilized, and the positive charge charged on the surface of the thin film on the substrate can be neutralized.

  In particular, in the power supply mechanism 110 of the present embodiment, a DC power supply 33 having a simple structure can be used instead of the conventional DC pulse power supply by making good use of the rotation of the main body 11A of the rotating shaft 11 at a constant rotation cycle. In use, a rectangular pulse of a DC negative voltage can be applied to the substrate holder 12. Therefore, the power supply mechanism 110 according to the present embodiment has an advantageous effect compared with the conventional example in which the positive charge charged on the surface of the thin film can be neutralized using a simple power supply system.

(Second Embodiment)
FIG. 4 is a diagram illustrating a configuration example of the power feeding mechanism according to the second embodiment of the present invention. 4A is a view of the power feeding mechanism as viewed from the direction in which the central axis of the main body extends, and FIG. 4B is a block diagram illustrating a power supply system of the power feeding mechanism.

  In the vacuum processing apparatus of the present embodiment, the configuration other than the power feeding mechanism 110A and its power supply system is the same as the configuration of the vacuum processing apparatus 100 of the first embodiment. Therefore, description of the configuration common to both may be omitted.

  In the power feeding mechanism 110A of the present embodiment, as shown in FIG. 4A, the second power transmission brush 122 has a plurality of arcuate shapes (here, four) that are insulated from each other (exactly, the length is the entire length). It is divided into sub-brushes 122A, 122B, 122C and 122D having a sub-arc shape smaller than half of the circumference.

  The second power transmission brush 122 and the first power transmission brush 21 as an assembly of such sub brushes 122A, 122B, 122C, and 122D are arranged so that their end faces face each other, thereby constituting a pair 150 of power transmission brushes. .

  In the power feeding mechanism 110 </ b> A of this embodiment, when the power transmission brush pair 150 is viewed from the direction in which the central axis 200 of the main body portion 11 </ b> A extends, the virtual circle 400 along the inner surface 50 </ b> B of the power transmission brush pair 150 is It can be drawn coaxially with the part 11A. Then, the power receiving unit 11B is arranged in a radially offset manner from the central axis 200 of the main body 11A so that the side surface 11C of the power receiving unit 11B of the rotating shaft 11 contacts the inner surface 50B of the pair 50 of power transmission brushes. .

  Therefore, when the main body part 11A rotates around the central axis 200, the power receiving part 11B at a position deviated from the central axis 200 of the main body part 11A causes a circular motion around the central axis 200 based on the rotation of the main body part 11A. I do. Then, the side surface 11C of the power receiving unit 11B can slide on the inner surface 50B of the pair 50 of power transmission brushes.

  Further, as shown in FIG. 4B, the negative voltage side terminal of the DC power supply 133 is connected to the sub brush 122A via the low pass filter 132, and the positive voltage side terminal of the DC power supply 133 is grounded. Further, the positive voltage side terminal of the DC power source 233 is connected to the sub brush 122B via the low pass filter 232, and the negative voltage side terminal of the DC power source 233 is grounded. Further, the negative voltage side terminal of the DC power source 333 is connected to the sub brush 122C via the low pass filter 332, and the positive voltage side terminal of the DC power source 333 is grounded. Further, the positive voltage side terminal of the DC power source 433 is connected to the sub brush 122D via the low pass filter 432, and the negative voltage side terminal of the DC power source 433 is grounded.

  In this way, DC voltages having different polarities are applied to the adjacent sub brushes 122A, 122B, 122C, and 122D.

  Note that the terminals of the RF power source 31 are connected to the first power transmission brush 21 via the matching circuit 30 in the same manner as the power supply mechanism 110 of the first embodiment.

  With the above configuration, the power receiving unit 11B of the rotating shaft 11 is periodically rotated with the second power transmission brush 122 (sub-brushes 122A, 122B, 122C, 122D) due to the rotation of the rotating shaft 11 in the main body portion 11A. You can make an electrical connection.

  Therefore, in the power supply mechanism 110A of this embodiment, a DC power source 33 having a simple structure is used to alternately apply a DC negative voltage rectangular pulse and a DC positive voltage rectangular pulse to the substrate holder 12 based on the rotation period. can do.

  Note that the period of the rectangular pulse may be appropriately set according to the rotation period (rotational speed) of the main body 11A and the shape of the second power transmission brush 122 (for example, the number of divisions of the second power transmission brush 122). Thus, while forming a thin film on the substrate of the substrate holder 12 by the ion plating method, a desired rectangular pulse is applied to the substrate holder 12 so that the positive charge charged on the surface of the thin film on the substrate is appropriately neutralized. Can be applied.

  That is, while a rectangular pulse of DC negative voltage is applied to the substrate holder 11, the evaporation material charged positively by the action of plasma can be positively drawn to the substrate side. On the other hand, while the DC positive voltage rectangular pulse is applied, electrons in the plasma can be actively drawn to the substrate side, so that the positive charge charged on the surface of the thin film on the substrate can be neutralized by the electrons.

  As described above, in the power feeding mechanism 110A of the present embodiment, the second power transmission brush 122 is divided into a plurality of sub brushes 122A, 122B, 122C, and 122D that are insulated from each other, and the adjacent sub brushes 122A, 122B, 122C, and 122D. DC voltages having different polarities are applied to each other.

  In the power feeding mechanism 110 </ b> A of the present embodiment, application of RF power to the rotating shaft 11 due to intermittent sliding between the first power transmission brush 21 and the rotating shaft 11 is performed by the rotation of the main body portion 11 </ b> A of the rotating shaft 11. And DC voltage is applied to the rotating shaft 11 by intermittent sliding between the second power transmission brush 122 and the rotating shaft 11, thereby generating plasma in the vicinity of the substrate holder 12 and RF power self. It is possible to stabilize the bias and neutralize the positive charge charged on the surface of the thin film on the substrate.

  In particular, in the power supply mechanism 110A of the present embodiment, a DC power supply 33 having a simple structure can be used instead of the conventional DC pulse power supply by making good use of the rotation of the main body 11A of the rotating shaft 11 at a constant rotation cycle. The rectangular pulse of DC negative voltage and the rectangular pulse of DC positive voltage can be alternately applied to the substrate holder 12. Therefore, the power supply mechanism 110A according to the present embodiment has an advantageous effect compared to the conventional example in which the positive charge charged on the surface of the thin film can be neutralized using a simple power supply system.

(First modification)
In the power supply mechanism 110 of the first embodiment (the same applies to the power supply mechanism 110A of the second embodiment), the power transmission brush pair 50 is held by sandwiching the power transmission brush pair 50 between the annular insulating plates 23 and 24. Is illustrated.

  However, the holding structure of the power transmission brush pair 50 is not limited to this. For example, as shown in FIG. 5, an insulating member 25 that fills the gap between the end face of the first power transmission brush 21 and the end face of the second power transmission brush 22 is arranged, so that the pair 50 of power transmission brushes is held. You may comprise.

  In the power feeding mechanism of the present modification, when the power transmission brush pair 50 is viewed from the direction in which the central axis 200 (see FIG. 2) of the main body 11A (see FIG. 2) extends, the inner surface 50C of the power transmission brush pair 50 is aligned. A virtual circle can be drawn coaxially with the main body 11 </ b> A of the rotating shaft 11. Therefore, the power receiving unit 11B (see FIG. 2) at a position deviated from the central axis 200 of the main body part 11A of the rotary shaft 11 performs a circular motion around the central axis 200 based on the rotation around the central axis 200. Accordingly, the side surface 11C (see FIG. 3) of the power receiving unit 11B can slide on the inner surface 50C of the pair 50 of the power transmission brush.

(Second modification)
In the power supply mechanism 110A of the second embodiment, the example in which the second power transmission brush 122 is divided has been described, but the present invention is not limited to this. The first power transmission brush 21 may be divided together with the division of the second power transmission brush 122.

  With the above configuration, the substrate holder 12 is rotated by the rotation of the main body portion 11A of the rotary shaft 21 by a combination of appropriate arrangements between the arc-shaped sub brush of the first power transmission brush and the arc-shaped sub brush of the second power transmission brush. Various forms of RF power and DC voltage can be applied.

  For example, RF power or DC voltage can be applied by rotating the main body 11A, such as DC plus voltage → DC minus voltage → RF power → DC plus voltage → DC minus voltage → RF power.

(Third Modification)
In the power supply mechanism 110 of the first embodiment (the same applies to the power supply mechanism 110A of the second embodiment), the rotating shaft 11 in which the power receiving unit 11B and the main body unit 11A are integrated is illustrated, but the present invention is not limited thereto. Absent.

  For example, the power receiving portion 11B is embedded in an insulating cylindrical member having the same shape as the main body portion 11A so that only the side surface 11C of the power receiving portion 11B is exposed, and both are fastened by using appropriate fixing means (such as screwing). May be.

(Fourth modification)
In the power supply mechanism 110 of the first embodiment (the same applies to the power supply mechanism 110A of the second embodiment), an evaporating material charged with a positive charge is illustrated. However, depending on the type of evaporating material, a negative charge is charged by the action of plasma. There are materials. The techniques described herein can also be applied to such materials.

  However, when a thin film made of a negatively charged material is formed on a substrate using an ion plating method, the voltage of the DC power source described above has a reverse polarity.

(5th modification)
In the power supply mechanism 110 of the first embodiment (the same applies to the power supply mechanism 110A of the second embodiment), between the first power transmission brush 21 and the rotary shaft 11, between the second power transmission brush 22 and the rotary shaft 11, Although the example of sliding intermittently via the power receiving unit 11B of the rotating shaft 11 has been described, the present invention is not limited thereto.

  At least by intermittently sliding between the second power transmission brush 22 and the rotating shaft 11, a DC pulse can be applied to the substrate holder using a DC power source with a simple structure, and a thin film using a simple power source system There is an advantageous effect compared with the conventional example that the positive charge charged on the surface can be neutralized. That is, the main body portion 11A of the rotating shaft 11 may also function as a power receiving portion, and the first power transmission brush 21 and the rotating shaft 11 may always be slid through the main body portion 11A.

  According to the present invention, it is possible to obtain a power feeding mechanism that can apply RF power to a substrate holder using an RF power source and can apply a DC pulse to the substrate holder using a DC power source having a simple structure.

  Therefore, the present invention can be used as a power feeding mechanism of an ion plating apparatus, for example.

11 Rotating shaft 11A Body portion 11B Power receiving portion 11C Side surface 12 Substrate holder 13 Vacuum tank 14 High-frequency coil 15 Container 16 Evaporation source 17 Power source 18A Motor 18B Rotary bearing 18C Belt 18D Pulley 21 First power transmission brush 22, 122 Second power transmission brush 23, 24 Insulating plate 25 Insulating member 30 Matching circuit 31 RF power supply 31A, 31B RF power supply terminal 32, 132, 232, 332, 432 Low pass filter 33, 133, 233, 333, 433 DC power supply 33A, 33B DC power supply terminal 50, 150 Power transmission brush pair 50A, 50B, 50C Inner surface 100 Vacuum processing device 110 Power feeding mechanism 120 Rotating mechanism 122A, 122B, 122C, 122D Sub brush 200 Central axis 300, 400 Virtual circle

Claims (9)

A rotating shaft electrically connected to the substrate holder;
A first power transmission brush to which high-frequency power of a high-frequency power source is applied;
A second power transmission brush to which a DC voltage of a DC power supply is applied;
With
Application of the high-frequency power to the rotating shaft by sliding between the first power transmission brush and the rotating shaft and rotation between the second power transmitting brush and the rotating shaft by rotation of the rotating shaft. A power feeding mechanism in which the DC voltage is applied to the rotating shaft by sliding.   The power feeding mechanism according to claim 1, wherein sliding between the first power transmission brush and the rotating shaft is intermittently performed.   3. The power feeding mechanism according to claim 2, wherein the arc-shaped first power transmission brush and the arc-shaped second power transmission brush are arranged such that their end faces face each other to constitute a pair of power transmission brushes. The rotating shaft includes a columnar main body, and a power receiving unit provided in the main body,
The power receiving unit can take a connection state with the first power transmission brush and a connection state with the second power transmission brush based on rotation around the central axis of the main body unit. The power feeding mechanism described in 1. When the pair of power transmission brushes is viewed from the direction in which the central axis of the main body part extends, a virtual circle along the inner surface of the pair of power transmission brushes can be drawn coaxially with the main body part of the rotating shaft,
The power receiving unit at a position deviated from the central axis of the main body performs a circular motion around the central axis based on rotation around the central axis of the main body, so that the side surface of the power receiving unit is The power feeding mechanism according to claim 4, wherein the power feeding mechanism slides on an inner surface of a pair of power transmission brushes.   The power feeding mechanism according to claim 5, further comprising a pair of annular insulating plates sandwiching the pair of power transmission brushes.   The power feeding mechanism according to claim 5, further comprising an insulating member that fills a gap between an end surface of the first power transmission brush and an end surface of the second power transmission brush.   The power supply according to any one of claims 1 to 7, wherein the second power transmission brush is divided into a plurality of sub-brushes insulated from each other, and the adjacent sub-brushes are applied with the DC voltage having different polarities. mechanism. A power feeding mechanism according to any one of claims 1 to 8,
A high-frequency power source for outputting the high-frequency power to the power feeding mechanism;
A DC power supply that outputs the DC voltage to the power supply mechanism;
A vacuum chamber in which a substrate holder supported by a rotating shaft of the power feeding mechanism is disposed;
An evaporation source facing the substrate holder;
A vacuum processing apparatus comprising:

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