JP5340804B2 - UV decomposition equipment - Google Patents

Description

  The present invention relates to an ultraviolet decomposition apparatus that decomposes organic substances contained in waste liquid by irradiating ultraviolet rays.

  In the semiconductor device manufacturing process, a plurality of regions are partitioned by dividing lines called streets arranged in a lattice pattern on the surface of a semiconductor wafer having a substantially disk shape, and ICs, LSIs, etc. are divided into the partitioned regions. Form a device. Then, by cutting along the semiconductor wafer male treat, the region where the device is formed is divided to manufacture individual semiconductor devices.

  In addition, optical device wafers in which gallium nitride compound semiconductors are stacked on the surface of a sapphire substrate are also divided into optical devices such as individual light emitting diodes (LEDs) and laser diodes (LDs) by cutting along the streets. Widely used in various electrical equipment.

  Cutting along the streets of the above-described semiconductor wafer, optical device wafer or the like is usually performed by a cutting device called a dicer. This cutting apparatus includes a chuck table for holding a workpiece such as a semiconductor wafer, a cutting means having a cutting blade for cutting the workpiece held on the chuck table, and supplying cutting water to the cutting blade. Cutting water supply means.

  The cutting blade is cooled by supplying the cutting water to the rotating cutting blade by the cutting water supplying means, and the cutting operation is performed while supplying the cutting water to the cutting portion of the workpiece by the cutting blade.

  On the other hand, prior to cutting a workpiece such as a semiconductor wafer by a cutting device, the back surface of the workpiece is ground to a predetermined thickness by a grinding device and then processed to a predetermined thickness, and then cut by the cutting device and divided into individual devices. The

  The grinding apparatus includes a chuck table for holding a workpiece, a grinding means on which a grinding wheel having a grinding wheel for grinding the workpiece held on the chuck table is rotatably mounted, and grinding water to the grinding wheel. Grinding water supply means for supplying is provided, and the workpiece can be ground to a desired thickness with high accuracy.

  By the way, cutting waste or grinding waste generated by cutting or grinding silicon or a gallium nitride compound semiconductor is mixed in the cutting water supplied at the time of cutting by the cutting device or the grinding water supplied at the time of grinding by the grinding device. The

  Since processing waste liquid mixed with cutting waste made of semiconductor material contaminates the environment, after removing cutting waste or grinding waste using a waste liquid treatment device, it is reused or discarded as processing water (for example, Japanese Patent Laid-Open No. 2004-230527).

  These waste liquid treatment apparatuses also include a mechanism for irradiating the waste liquid with ultraviolet rays in order to decompose the organic substances contained in the waste liquid, and further, it is necessary to replace the ultraviolet lamp that irradiates the ultraviolet rays.

Japanese Patent Laid-Open No. 2004-230527

  Thus, generally, ultraviolet rays for decomposing organic substances have a very short wavelength (for example, 185 nm), and generate ozone when irradiated into the air. Since ultraviolet rays and ozone having a very short wavelength adversely affect the human body, a safety device is required to prevent the ultraviolet lamp from operating at a position where it can irradiate the human body with ultraviolet rays when replacing the ultraviolet lamp.

  The present invention has been made in view of the above points, and an object of the present invention is to provide an ultraviolet decomposition apparatus equipped with a safety mechanism capable of safely replacing an ultraviolet lamp.

According to the present invention, there is an ultraviolet decomposition apparatus for decomposing an organic substance contained in waste liquid by ultraviolet irradiation, the waste liquid container formed of a material that blocks ultraviolet rays, and a waste liquid container installed in the waste liquid container with a gap. An ultraviolet lamp container made of a material that transmits light, a pump for flowing waste liquid into a space between the waste liquid container and the ultraviolet lamp container, and a part of the ultraviolet lamp container, An ultraviolet lamp carry-in / out port that allows the ultraviolet lamp container to allow the ultraviolet lamp to be taken in and out; a closed position that is pivotally attached to the waste liquid container and inhibits the ultraviolet lamp from being taken into and out of the ultraviolet lamp container; A cover that can be selectively positioned between the ultraviolet lamp container and an open position that allows the ultraviolet lamp to be taken in and out; a power source; and the power source and the ultraviolet lamp. And a switch for selectively energizing the ultraviolet lamp to the power supply to emit light, and an electric circuit in which the power supply, the switch and the ultraviolet lamp are connected in series, and the cover is positioned in the open position. An interlock mechanism that shuts off the electrical circuit when connected and connects the electrical circuit when the cover is positioned in the closed position, and a lamp side having one end connected to the ultraviolet lamp. A power supply side connector connected to the power source and selectively engageable with the power supply side connector, the power supply side connector comprising: a cord; a lamp side connector connected to the other end of the lamp side cord; Is arranged so as to be located inside the cover when the cover is positioned at the closed position, and the length of the lamp side cord is determined when the lamp side connector and the power source side connector are engaged. The ultraviolet Lamp ultraviolet degradation apparatus characterized by being set to a length which can not be positioned to the cover in the closed position when not in a state of being accommodated in the ultraviolet lamp container is provided.

  According to the present invention, since the interlock mechanism does not operate when the cover is open, it is possible to provide an ultraviolet decomposing apparatus equipped with a safety mechanism that can safely replace the ultraviolet lamp without illuminating the ultraviolet lamp. .

It is a perspective view of the processing waste liquid processing apparatus provided with the ultraviolet decomposition device of the present invention. It is a longitudinal cross-sectional view of the ultraviolet decomposition device which concerns on embodiment of this invention in the state from which the ultraviolet lamp is taken out from the ultraviolet lamp container. It is a longitudinal cross-sectional view of the ultraviolet decomposition device in the state where the ultraviolet lamp is accommodated in the ultraviolet lamp container. It is an electric circuit diagram of an ultraviolet decomposition device. It is a figure which shows the electric current path | route of the ultraviolet decomposition device of the state which closed the cover.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, there is shown a perspective view of a processing waste liquid treatment apparatus 2 equipped with an ultraviolet decomposition apparatus according to an embodiment of the present invention. Reference numeral 4 denotes a frame of the processing waste liquid treatment apparatus 2. FIG. 1 shows a state in which each panel that is attached to the frame 4 and constitutes the housing of the processing waste liquid treatment apparatus 2 is omitted.

  The processing waste liquid treatment apparatus 2 includes a waste liquid tank 6 that stores the processing waste liquid, and a waste liquid feed pump 8 that supplies the processing waste liquid stored in the waste liquid tank 6. Processing waste liquid sent from a processing waste liquid sending means provided in a processing apparatus such as a cutting apparatus (not shown) is introduced into the waste liquid tank 6 via a pipe (not shown). A waste liquid feed pump 8 that feeds processing waste liquid is disposed above the waste liquid tank 6.

  The processing waste liquid fed by the waste liquid feed pump 8 is sent to the waste liquid filtering device 10 through a pipe (not shown) made of a flexible hose. The waste liquid filtering apparatus 10 includes a fresh water receiving pan 12 and a first filter 14 a and a second filter 14 b disposed on the fresh water receiving pan 12. The first filter 14 a and the second filter 14 b are detachably mounted on the fresh water receiving pan 12.

  The processing waste liquid introduced into the first filter 14a or the second filter 14b is filtered by the first filter 14a or the second filter 14b, and the cutting waste mixed in the processing waste liquid is supplemented and purified into fresh water, and the fresh water receiver is received. It flows out into the bread 12.

  The fresh water receiving pan 12 is connected to the fresh water storage tank 18 by a pipe 16 made of a flexible hose, and the fresh water flowing out to the fresh water receiving pan 12 is sent to the fresh water storage tank 18 through the pipe 16 made of a flexible hose and stored therein. .

  The fresh water stored in the water storage tank 18 is fed by a fresh water feed pump 54 (see FIG. 2) and sent to the pure water generator 20 through a pipe (not shown). The pure water generator 20 includes a support base 22, a partition plate 24 erected on the support base 22, an ultraviolet decomposition device 26 disposed on the support base 22 on the rear side of the partition plate 24, and a partition plate 24. First and second ion exchange devices 28a and 28b each provided with an ion exchange resin disposed on the front support 22 and a precision filter 30 disposed on the support 22 on the rear side of the partition plate 24 are provided. doing.

  The fresh water fed by the fresh water feed pump 54 is introduced into the ultraviolet decomposition device 26, where the organic matter contained in the fresh water is decomposed and sterilized by being irradiated with ultraviolet rays. The fresh water obtained by decomposing organic matter in the ultraviolet decomposition device 26 is introduced into the first ion exchange device 28a or the second ion exchange device 28b. The first ion exchange device 28a and the second ion exchange device 28b are used by being switched by an electromagnetic opening / closing valve (not shown).

  The fresh water introduced into the first ion exchange device 28a or the second ion exchange device 28b is purified to pure water after the ions are exchanged. The purified water purified by ion exchange of fresh water may contain fine substances such as resin waste of ion exchange resin constituting the first ion exchange device 28a and the second ion exchange device 28b. For this reason, pure water purified by ion exchange of clean water is introduced into the precision filter 30 and the fine filter 30 supplements fine substances such as resin waste mixed in the pure water.

  The pure water purified by the pure water purifying device 20 is sent to the pure water temperature adjusting device 32 through a pipe (not shown). The pure water sent to the pure water temperature adjusting device 32 is adjusted to a predetermined temperature (for example, 23 ° C.) here, and sent to a machining fluid supply device equipped in a processing device such as a cutting device (not shown) via a pipe. .

  Reference numeral 34 denotes a controller for controlling the processing waste liquid treatment apparatus 2, and the controller 34 has an operation panel 36 for inputting processing information such as waste liquid processing start information. The operation panel 36 is provided with an input unit 38 for inputting processing information and the like, and a display 40 for displaying processing information by the controller 34.

  Next, the ultraviolet decomposition apparatus 26 according to the embodiment of the present invention will be described in detail with reference to FIGS. Referring to FIG. 2, there is shown a longitudinal sectional view of the ultraviolet decomposition device 26 in a state where the ultraviolet lamp 66 is taken out from the ultraviolet decomposition device 26.

  The ultraviolet decomposition device 26 includes a waste liquid container 42 made of a material that blocks ultraviolet rays. The waste liquid container 42 has a waste liquid introduction port 44, a waste liquid discharge port 46, and an insertion port 48 for the ultraviolet lamp container 50.

  The ultraviolet lamp container 50 is installed in the waste liquid container 42 with a gap, and is made of a material that transmits ultraviolet light. A waste liquid storage chamber 52 is defined between the waste liquid container 42 and the ultraviolet lamp container 50.

  By driving the pump 54, waste liquid (clear water in the description of FIG. 1) is introduced into the waste liquid storage chamber 52 through the waste liquid introduction port 44 as indicated by the arrow A, and the waste liquid treated by the ultraviolet irradiation is indicated by the arrow B. As shown in FIG.

  The ultraviolet lamp container 50 has an ultraviolet lamp loading / unloading port 52a that allows the ultraviolet lamp to be taken in and out. The waste liquid container 42 is equipped with a power supply side connector (outlet) 56 connected to a power supply. The waste liquid container 42 is further mounted with a female connector 58 constituting an interlock mechanism 65 adjacent to the power supply side connector 56.

  A cover 60 is rotatably attached to the waste liquid container 42 by a hinge 62. The cover 60 is in the closed position shown in FIG. 3 where the insertion / extraction of the ultraviolet lamp 66 into / from the ultraviolet lamp container 50 is inhibited, and the cover 60 shown in FIG. It can be selectively positioned between positions. The cover 60 is provided with a male connector 64 that constitutes an interlock mechanism 65.

  The ultraviolet lamp 66 is connected to a lamp side connector (plug) 70 via a lamp side cord 68. The ultraviolet lamp 66 has a large-diameter portion 67 having an outer diameter slightly smaller than the inner diameter of the insertion port 48 of the ultraviolet lamp container 50 formed in the waste liquid container 42.

  As shown in FIG. 3, the ultraviolet lamp 66 is accommodated in the ultraviolet lamp container 50, the lamp-side connector 70 is fitted into the power-side connector 56, and the cover 60 is closed to close the male-side connector 64 of the interlock mechanism 65. Is fitted to the female connector 58, an electric circuit including a power source 72 and a switch 74 as shown in FIGS. 4 and 5 is formed. The power source 72 and the switch 74 are disposed on the operation panel 36 shown in FIG.

  Therefore, when a switch 74 provided on the operation panel 36 is turned on, a closed circuit is formed, and the ultraviolet lamp 66 is turned on to irradiate ultraviolet rays. The ultraviolet light passes through an ultraviolet lamp container 50 formed of a material that transmits ultraviolet light, and is irradiated to the waste liquid in the waste liquid storage chamber 52, and the organic matter contained in the waste liquid is decomposed by ultraviolet irradiation.

  As is clear from the current path shown in FIG. 5, the waste liquid container 42 has a circuit for connecting the power supply side connector 56 to the power supply, and the power supply side connector 56 is a female connector of the interlock mechanism 65. Circuitry for connection to 58 is patterned. The cover 60 is patterned with a circuit for connecting the male connector 64 of the interlock mechanism 65 to the negative electrode of the power source 72.

  The length of the lamp side cord 68 is such that when the lamp side connector 70 and the power source side connector 56 are fitted together, the cover 60 is not in the state in which the ultraviolet lamp 66 is housed in the ultraviolet lamp container 50. It is set to a length that cannot be positioned at the closed position shown in FIG.

  This is because the lamp-side cord 68 is sandwiched between the cover 60 and the waste liquid container 42 when the lamp-side cord 68 is long when the cover 60 is closed without accommodating the ultraviolet lamp 66 in the ultraviolet lamp container 50. Since the interlock mechanism 65 may operate in this state, it is set from the viewpoint of completely preventing such a fear.

  In the ultraviolet decomposition apparatus 26 of the present embodiment, since the interlock mechanism 65 is provided, the ultraviolet lamp 66 is accommodated in the ultraviolet lamp container 50 and the lamp-side connector 70 is fitted to the power-side connector 56, so Even if the switch 74 is turned on with the cover 60 open, the interlock mechanism 65 is not connected, so a closed circuit is not formed, and the ultraviolet lamp 66 is not accidentally turned on with the cover 60 open.

  In order to turn on the ultraviolet lamp 66, it is necessary to close the cover 60 and connect the interlock mechanism 65 to form a closed circuit. For example, when the ultraviolet lamp 66 is replaced, the ultraviolet lamp 66 is used. It is possible to reliably prevent the human body from operating at a position where it can irradiate ultraviolet rays, and to provide a safety mechanism that can safely replace the ultraviolet lamp.

2 Processing waste liquid treatment device 26 Ultraviolet decomposition device 36 Operation panel 42 Waste liquid container 50 Ultraviolet lamp container 52 Waste liquid storage chamber 54 Pump 56 Power supply side connector 58 Female connector 60 Cover 64 Male connector 65 Interlock mechanism 66 Ultraviolet lamp 68 Lamp Side cord 70 Lamp side connector 72 Power supply 74 Switch

Claims (1)

An ultraviolet decomposition device that decomposes organic matter contained in waste liquid by ultraviolet irradiation,
A waste liquid container made of a material that blocks ultraviolet rays;
An ultraviolet lamp container installed in the waste liquid container with a gap and formed of a material that transmits ultraviolet light; and
A pump for flowing the waste liquid into a space between the waste liquid container and the ultraviolet lamp container;
An ultraviolet lamp loading / unloading port provided in a part of the ultraviolet lamp container and allowing the ultraviolet lamp container to be taken in and out of the ultraviolet lamp;
A closed position pivotably attached to the waste liquid container and hindering the insertion and removal of the ultraviolet lamp into the ultraviolet lamp container; and an open position allowing the ultraviolet lamp to be taken in and out of the ultraviolet lamp container A cover selectively positionable between,
Power supply,
A switch connected to the power source and the ultraviolet lamp and selectively energizing the power source to emit the ultraviolet lamp;
The power supply, the switch, and the ultraviolet lamp are installed on an electric circuit connected in series, and when the cover is positioned at the open position, the electric circuit is shut off, and the cover is positioned at the closed position. An interlock mechanism that connects the electric circuit to form a closed circuit when
A lamp-side cord having one end connected to the ultraviolet lamp;
A lamp-side connector connected to the other end of the lamp-side cord;
A power supply side connector connected to the power supply and selectively engageable with the lamp side connector;
Comprising
The power supply side connector is disposed so as to be positioned inside the cover when the cover is positioned in the closed position;
The length of the lamp side cord is such that when the lamp side connector and the power source side connector are engaged, the cover is positioned in the closed position unless the ultraviolet lamp is housed in the ultraviolet lamp housing. An ultraviolet decomposing apparatus characterized in that it is set to a length that cannot be used.

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