JP5307648B2 - Vacuum valve - Google Patents

Vacuum valve Download PDF

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JP5307648B2
JP5307648B2 JP2009147668A JP2009147668A JP5307648B2 JP 5307648 B2 JP5307648 B2 JP 5307648B2 JP 2009147668 A JP2009147668 A JP 2009147668A JP 2009147668 A JP2009147668 A JP 2009147668A JP 5307648 B2 JP5307648 B2 JP 5307648B2
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side end
end plate
guide
movable side
movable
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JP2011003502A (en
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真一 三木
聡 越智
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Mitsubishi Electric Corp
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この発明は、真空バルブに関し、特にその組立構造に関するものである。   The present invention relates to a vacuum valve, and more particularly to an assembly structure thereof.

図4は、従来の真空バルブを示す側面断面図である。図において、絶縁容器21の両端に、固定側端板22と可動側端板23がろう付けされて固着され、固定側端板22には固定電極棒24が、可動側端板23にはベローズ25を介して可動電極棒26がろう付け接合されて真空容器が形成されている。更に、固定電極棒24には固定電極27が、可動電極棒26には可動電極28がろう付け接合されて互いに同軸上に対向して配置されている。そして、可動電極棒26の移動を案内するための樹脂ガイド29が、可動側端板23に固着されたねじ穴付きのガイド取付板30に、ねじによって固定されている。
また、絶縁容器21の内面及びベローズ25を覆うように、シールド31,32が配置されている。
樹脂ガイド29は、固定電極27と可動電極28を、図には示されていない操作機構によって開閉する際に、固定電極棒24と可動電極棒26の軸を合わせながら可動電極棒を摺動させる機能を有している(例えば、特許文献1参照)。
FIG. 4 is a side sectional view showing a conventional vacuum valve. In the figure, a fixed side end plate 22 and a movable side end plate 23 are brazed and fixed to both ends of an insulating container 21, a fixed electrode rod 24 is fixed to the fixed side end plate 22, and a bellows is fixed to the movable side end plate 23. A movable electrode rod 26 is brazed and joined via 25 to form a vacuum vessel. Furthermore, a fixed electrode 27 is brazed to the fixed electrode rod 24, and a movable electrode 28 is brazed to the movable electrode rod 26, and they are arranged coaxially facing each other. A resin guide 29 for guiding the movement of the movable electrode rod 26 is fixed to a guide mounting plate 30 with a screw hole fixed to the movable side end plate 23 by screws.
In addition, shields 31 and 32 are disposed so as to cover the inner surface of the insulating container 21 and the bellows 25.
The resin guide 29 slides the movable electrode rod while aligning the axes of the fixed electrode rod 24 and the movable electrode rod 26 when the fixed electrode 27 and the movable electrode 28 are opened and closed by an operation mechanism not shown in the drawing. It has a function (for example, refer patent document 1).

特開平9−320412号公報(第4頁、図1)JP-A-9-320412 (page 4, FIG. 1)

特許文献1に示されたような従来の真空バルブでは、樹脂ガイド29はねじ止めする構造であるため、真空を保持する可動側端板23に加えて、ねじ穴を有するガイド取付板30を設ける必要があった。このため、部品点数が増えるという問題があった。また、ガイド取付板30はねじ止め強度を確保するために十分な厚さが必要であり、さらに可動側端板23への固定強度にも留意する必要があるため、構造設計が煩雑になるという問題点もあった。また、ねじ止め工程でのねじ止め作業、小さいねじの管理、ねじトルクの管理は手間がかかり、ねじ止め不良が発生する要因となっていた。   In the conventional vacuum valve as shown in Patent Document 1, since the resin guide 29 is structured to be screwed, a guide mounting plate 30 having a screw hole is provided in addition to the movable side end plate 23 that holds the vacuum. There was a need. For this reason, there was a problem that the number of parts increased. Further, the guide mounting plate 30 needs to have a sufficient thickness to secure the screwing strength, and also needs to pay attention to the fixing strength to the movable side end plate 23, so that the structural design becomes complicated. There was also a problem. In addition, screwing work in the screwing process, management of small screws, and screw torque management are time-consuming and cause screwing defects.

この発明は上記のような問題点を解消するためになされたもので、可動側端板とガイドとの取付において、部品点数を削減し、取付を簡単にした真空バルブを得ることを目的とする。   The present invention has been made to solve the above-described problems, and an object of the present invention is to obtain a vacuum valve that reduces the number of parts and makes the mounting simple in mounting the movable side end plate and the guide. .

この発明の真空バルブは、円筒状の絶縁容器の両端面に固定側端板と可動側端板とが気密に接合されて構成された真空容器の内部に、接離可能な固定電極部及び可動電極部が配置され、真空容器からベローズを介して導出される可動電極部の可動電極棒を軸方向に案内するガイドが、可動側端板に取り付けられた真空バルブにおいて、ガイドは、可動電極棒が貫通する円筒部と可動側端板に取り付けられるつば部とを有し、可動側端板は、中央部にガイドの円筒部が挿通される貫通穴を有し、貫通穴の内周の複数箇所に可動電極棒の導出方向に突出する係止部が形成されており、ガイドのつば部に設けられた係合穴に係止部が嵌合されて、ガイドが可動側端板に固定されているものである。   The vacuum valve according to the present invention includes a fixed electrode portion that can be contacted and separated, and a movable electrode inside a vacuum vessel that is configured by hermetically bonding a fixed side end plate and a movable side end plate to both end faces of a cylindrical insulating container. In a vacuum valve in which an electrode portion is arranged and a guide for guiding a movable electrode rod of a movable electrode portion led out from a vacuum vessel through a bellows in an axial direction is attached to a movable side end plate, the guide is movable electrode rod And a flange portion attached to the movable side end plate. The movable side end plate has a through hole through which the cylindrical portion of the guide is inserted in the center portion, and a plurality of inner peripheries of the through holes. A locking portion that protrudes in the lead-out direction of the movable electrode rod is formed at the location, and the locking portion is fitted into an engagement hole provided in the collar portion of the guide, so that the guide is fixed to the movable side end plate. It is what.

この発明の真空バルブによれば、絶縁容器の可動側に設けられた可動側端板と、可動電極棒を軸方向に案内するガイドとを備えた真空バルブにおいて、ガイドは、可動電極棒が貫通する円筒部と可動側端板に取り付けられるつば部とを有し、可動側端板は、中央部にガイドの円筒部が挿通される貫通穴を有し、貫通穴の内周の複数箇所に可動電極棒の導出方向に突出する係止部が形成されており、ガイドのつば部に設けられた係合穴に係止部を嵌合させて、ガイドを可動側端板に固定するようにしたので、可動側端板とガイドとの取付において、部品点数が削減でき、ねじ留め等の締結作業を必要とせず、取付を簡単に行える真空バルブを得ることができる。   According to the vacuum valve of the present invention, in the vacuum valve provided with the movable side end plate provided on the movable side of the insulating container and the guide for guiding the movable electrode rod in the axial direction, the guide penetrates the movable electrode rod. The movable side end plate has a through hole through which the cylindrical portion of the guide is inserted, and is provided at a plurality of locations on the inner periphery of the through hole. A locking part protruding in the lead-out direction of the movable electrode rod is formed, and the locking part is fitted into an engagement hole provided in the collar part of the guide so that the guide is fixed to the movable side end plate. Therefore, the number of parts can be reduced in mounting the movable side end plate and the guide, and a vacuum valve that can be easily mounted without requiring a fastening operation such as screwing can be obtained.

この発明の実施の形態1による真空バルブの側面断面図である。It is side surface sectional drawing of the vacuum valve by Embodiment 1 of this invention. 図1の可動側端板の平面図である。It is a top view of the movable side end plate of FIG. この発明の実施の形態2による真空バルブの側面断面図である。It is side surface sectional drawing of the vacuum valve by Embodiment 2 of this invention. 従来の真空バルブの構造を示す側面断面図である。It is side surface sectional drawing which shows the structure of the conventional vacuum valve.

実施の形態1.
以下、実施の形態1による真空バルブを図に基づいて説明する。
図1において、真空バルブは、セラミックなどの絶縁材料で円筒状に形成された絶縁容器1と、絶縁容器1の一方の開放端に設けられた固定側端板2と、他方の開放端に設けられた可動側端板3とで構成された真空容器を備えている。真空容器の内部には、固定側端板2に固定された固定電極棒4と、その先端に固着された固定電極5とから成る固定電極部と、可動側端板3にベローズ6を介して移動可能に設けられた可動電極棒7と、その先端に固着された可動電極8とからなる可動電極部とが、同一軸線上に対向配置されている。可動電極部が軸線上を移動することで、固定電極部に接離可能に構成されている。
Embodiment 1 FIG.
Hereinafter, the vacuum valve according to the first embodiment will be described with reference to the drawings.
In FIG. 1, a vacuum valve is provided in an insulating container 1 formed in a cylindrical shape with an insulating material such as ceramic, a fixed end plate 2 provided at one open end of the insulating container 1, and provided at the other open end. A vacuum vessel constituted by the movable side end plate 3 is provided. Inside the vacuum vessel, there are a fixed electrode portion composed of a fixed electrode rod 4 fixed to the fixed side end plate 2 and a fixed electrode 5 fixed to the tip thereof, and a bellows 6 on the movable side end plate 3 via a bellows 6. A movable electrode portion 7 composed of a movable electrode rod 7 provided so as to be movable and a movable electrode 8 fixed to the tip of the movable electrode rod 7 is disposed opposite to each other on the same axis. The movable electrode part is configured to be able to contact and separate from the fixed electrode part by moving on the axis.

絶縁容器1と両端板2,3との接合は、絶縁容器1の両端にメタライズ層を形成しておき、両端板2,3を当接させて、ろう付けにより気密に固着される。また、ベローズ6と可動電極棒7、及び、ベローズ6と可動側端板3とも、ろう付けにより気密に接合されている。
ベローズ6は、例えば、薄いステンレス板で蛇腹状に作製されており、絶縁容器1の内部を気密を保ちながら可動電極棒7が動くことを可能にするものである。
また、絶縁容器1の内側には、シールド9が取り付けられており、遮断時に両電極5,8から発生する金属蒸気が絶縁容器1の内面に付着するのを防止し、沿面絶縁耐圧を維持する役目を担っている。
The insulating container 1 and the two end plates 2 and 3 are joined to each other by forming a metallized layer on both ends of the insulating container 1 and bringing the both end plates 2 and 3 into contact with each other and brazing. Further, the bellows 6 and the movable electrode rod 7, and the bellows 6 and the movable side end plate 3 are also airtightly joined by brazing.
The bellows 6 is made, for example, in a bellows shape with a thin stainless steel plate, and allows the movable electrode rod 7 to move while keeping the inside of the insulating container 1 airtight.
Further, a shield 9 is attached to the inside of the insulating container 1 to prevent the metal vapor generated from the electrodes 5 and 8 from adhering to the inner surface of the insulating container 1 at the time of interruption, and to maintain the creeping withstand voltage. It plays a role.

可動側端板3には、可動電極棒7が軸方向に移動するのを案内するための絶縁部材からなるガイド10が取り付けられている。
また、固定側端板2及び可動側端板3の材料としては、例えば、Fe−Ni−Co合金やステンレス鋼等の薄板が使用される。
A guide 10 made of an insulating member for guiding the movable electrode rod 7 to move in the axial direction is attached to the movable side end plate 3.
Moreover, as a material of the fixed side end plate 2 and the movable side end plate 3, for example, a thin plate such as an Fe—Ni—Co alloy or stainless steel is used.

上記のように構成された真空バルブは、閉極状態では可動電極棒7が、図示しない駆動装置によって駆動され、図で上方向に移動し、固定電極5と可動電極8とが接触する。また、開極状態では可動電極棒7が下方向に移動して、固定電極5から可動電極8が離れるように開閉動作する。
この発明は、ガイド10の取付に特徴を有するので、以下、この取付部について詳細に説明する。図2は、図1の可動側端板3を底面側から見た平面図である。図2も参照しながら説明する。なお、図1は図2の矢視B−Bから見た断面を示している。
In the vacuum valve configured as described above, in the closed state, the movable electrode rod 7 is driven by a driving device (not shown) and moves upward in the figure, so that the fixed electrode 5 and the movable electrode 8 are in contact with each other. Further, in the open state, the movable electrode rod 7 moves downward and opens and closes so that the movable electrode 8 is separated from the fixed electrode 5.
Since the present invention is characterized by the mounting of the guide 10, the mounting portion will be described in detail below. FIG. 2 is a plan view of the movable side end plate 3 of FIG. 1 viewed from the bottom surface side. This will be described with reference to FIG. FIG. 1 shows a cross section viewed from the direction of arrows BB in FIG.

ガイド10は、可動電極棒7が軸方向に移動するのを案内するための、可動電極棒7の直径より僅かに大きい内径を有する円筒部10aと、可動側端板3に取り付けられるための、円筒部10aの一端側に設けられたつば部10bとを備えている。
一方、可動側端板3には、中央部にガイド10の円筒部10aが挿通される貫通穴3aを有し、その貫通穴3aの内周に、例えば、120°間隔で3箇所、可動電極棒7の導出方向に向けて突出する係止部3bが形成されている。
The guide 10 is attached to the movable side end plate 3 and the cylindrical portion 10a having an inner diameter slightly larger than the diameter of the movable electrode rod 7 for guiding the movable electrode rod 7 to move in the axial direction. And a collar portion 10b provided on one end side of the cylindrical portion 10a.
On the other hand, the movable side end plate 3 has a through hole 3a through which the cylindrical portion 10a of the guide 10 is inserted in the center, and the movable electrode has, for example, three movable electrodes at 120 ° intervals on the inner periphery of the through hole 3a. A locking portion 3b that protrudes in the direction in which the rod 7 is led out is formed.

係止部3bを更に詳しく説明する。図1に示すように、係止部3bは、弾性を有する帯状部材より成り、先端に折返し部が形成された鉤状突起である。鉤状突起を可動側端板3と同一部材から製作するには、例えば、可動側端板3の貫通穴3aの内周に、図2に破線で示すように、更に中心側に向かって伸びた帯状部を形成しておき、帯状部を絶縁容器1との接合側とは反対側に直角に折り曲げ、更にその端部を外側に鋭角に折り返して折返し部を形成すればよい。このように、可動側端板3と共に1枚の金属板で構成する場合は、プレス加工で形成することが可能である。
なお、係止部3bを、可動側端板3とは別部材で製作し、ろう付け又は溶接等で接合しても良い。
また、図2では、係止部3bを3箇所設けた場合を説明したが、3箇所に限定するものでは無く、複数箇所であれば良い。
The locking portion 3b will be described in more detail. As shown in FIG. 1, the locking portion 3 b is a hook-shaped protrusion that is made of an elastic band member and has a folded portion formed at the tip. In order to manufacture the hook-shaped protrusion from the same member as the movable side end plate 3, for example, the inner side of the through hole 3a of the movable side end plate 3 is further extended toward the center side as indicated by a broken line in FIG. A band-shaped portion may be formed in advance, the band-shaped portion may be bent at a right angle to the side opposite to the side joined to the insulating container 1, and the end may be folded outward at an acute angle to form a folded portion. Thus, when it comprises with one metal plate with the movable side end plate 3, it can form by press work.
In addition, the latching | locking part 3b may be manufactured with a member different from the movable side end plate 3, and may be joined by brazing or welding.
Moreover, although FIG. 2 demonstrated the case where the three latching | locking parts 3b were provided, it is not limited to three places, What is necessary is just two or more places.

係止部3bと対応する位置にあるガイド10のつば部10bには、矩形状の係合穴10cを設けている。係合穴10cは、係止部3bの折返し部が弾性をもって挿入できる大きさに形成されている。すなわち、矩形状の係合穴10cの短辺寸法が、図1のT寸法より小さく形成されている。   A rectangular engaging hole 10c is provided in the collar portion 10b of the guide 10 at a position corresponding to the locking portion 3b. The engagement hole 10c is formed in such a size that the folded portion of the locking portion 3b can be inserted with elasticity. That is, the short side dimension of the rectangular engagement hole 10c is smaller than the T dimension in FIG.

ガイド10の可動側端板3への組付けは、可動側端板3の係止部3bへガイド10の係合穴10cを合わせ、折返し部の弾性を利用して押し込む。このとき、折返し部の折り返し角度A(図1参照)が大きくなり、ガイド10のつば部10b上面が可動側端板3の下面に当接するまで押し込んだ挿入端で、折返し部が係合穴10cから露出してその先端側がもとの形状に復元して開き、これによってガイド10が可動側端板3に固定される。この状態が、図1である。なお、図からも分かるように、折返し部の折り返された先端と可動側端板3の下面との間隔は、ガイド10のつば部10bの厚さとほぼ同じになるように、折返し部の寸法を決めている。
このように、可動側端板3とガイド10とを、ガイド10の係合穴10cに可動側端板3の係止部3bを嵌め合わせる構造としたため、取付は、単にガイド10を可動側端板3に圧入するだけで良く、ねじ留め式に比べて、ねじ止め作業が不要となる。
For assembling the guide 10 to the movable side end plate 3, the engaging hole 10 c of the guide 10 is aligned with the engaging portion 3 b of the movable side end plate 3 and pushed in by utilizing the elasticity of the folded portion. At this time, the turn-back angle A (see FIG. 1) of the turn-up portion is increased, and the turn-up portion is the engagement hole 10c at the insertion end pushed in until the upper surface of the collar portion 10b of the guide 10 contacts the lower surface of the movable side end plate 3. The guide 10 is fixed to the movable side end plate 3 by being restored from its original shape and opened in its original shape. This state is shown in FIG. As can be seen from the figure, the dimension of the folded portion is set so that the distance between the folded end of the folded portion and the lower surface of the movable side end plate 3 is substantially the same as the thickness of the collar portion 10b of the guide 10. I have decided.
As described above, the movable side end plate 3 and the guide 10 are structured such that the engaging portion 3b of the movable side end plate 3 is fitted into the engagement hole 10c of the guide 10, so that the mounting is simply performed by attaching the guide 10 to the movable side end. It is only necessary to press-fit into the plate 3, and screwing work is not necessary as compared with the screwing type.

以上のように、実施の形態1の真空バルブによれば、絶縁容器の可動側端板に可動電極棒を軸方向に案内するガイドを備えた真空バルブにおいて、ガイドは、可動電極棒が貫通する円筒部と可動側端板に取り付けられるつば部とを有し、可動側端板は、中央部にガイドの円筒部が挿通される貫通穴を有し、貫通穴の内周の複数箇所に可動電極棒の導出方向に突出する係止部が形成されており、ガイドのつば部に設けられた係合穴に係止部を嵌合させて、ガイドを可動側端板に固定するようにしたので、可動側端板とガイドとの取付において、部品点数が削減でき、ねじ留め等の締結作業を必要とせず、取付を簡単に行える真空バルブを得ることができる。このため、小さいねじの管理や、ねじトルクの管理といった煩雑な作業な無くなり、組立作業が簡単となる。
また、部品点数が削減され、構造の簡略化を図ることができる。
As described above, according to the vacuum valve of the first embodiment, in the vacuum valve provided with the guide for guiding the movable electrode rod in the axial direction on the movable side end plate of the insulating container, the guide is penetrated by the movable electrode rod. The movable side end plate has a cylindrical portion and a flange portion that is attached to the movable side end plate. The movable side end plate has a through hole through which the cylindrical portion of the guide is inserted in the central portion, and is movable at a plurality of locations on the inner periphery of the through hole. A locking part protruding in the lead-out direction of the electrode rod is formed, and the locking part is fitted into an engagement hole provided in the collar part of the guide so that the guide is fixed to the movable side end plate. Therefore, in mounting the movable side end plate and the guide, the number of parts can be reduced, and a vacuum valve that can be easily mounted without requiring fastening work such as screwing can be obtained. For this reason, complicated operations such as management of small screws and screw torque are eliminated, and assembly work is simplified.
Further, the number of parts can be reduced and the structure can be simplified.

また、可動側端板の内周に設けられた係止部は、弾性を有する帯状部材より成り、先端に折返し部が形成された鉤状突起であり、鉤状突起がガイドの係合穴に圧入され、係合穴から露出した折返し部が元の形状に復元することにより、ガイドが可動側端板に固定されるように構成したので、ガイドの可動側端板への組み付け作業は、ガイドを可動側端板へ圧入するだけで良く、簡単に組立を行うことができる。   Further, the engaging portion provided on the inner periphery of the movable side end plate is a hook-shaped protrusion made of an elastic band-shaped member and having a folded portion formed at the tip, and the hook-shaped protrusion is formed in the engagement hole of the guide. Since the guide is fixed to the movable side end plate by restoring the original shape of the folded portion that is press-fitted and exposed from the engagement hole, the guide is assembled to the movable side end plate. Is simply press-fitted into the movable side end plate, and can be easily assembled.

また、可動側端板と係止部とを、1枚の金属板から形成したので、係止部を接合する工程を必要とせずに、プレス加工等での製作が可能となり、製作が簡単となる。   In addition, since the movable side end plate and the locking portion are formed from a single metal plate, it is possible to manufacture by pressing or the like without the need to join the locking portion, and the manufacturing is simple. Become.

実施の形態2.
図3は、この発明の実施の形態2による真空バルブの構造を示す側面断面図である。(a)はガイドの組付け途中を示し、(b)は組立完了状態を示す。実施の形態1の図1と同等部分は同一符号を付して説明は省略し、相違点を主に説明する。相違点は、可動側端板3とガイド10の取付部の構造である。
Embodiment 2. FIG.
3 is a side sectional view showing the structure of a vacuum valve according to Embodiment 2 of the present invention. (A) shows the middle of the assembly of the guide, and (b) shows the assembled state. Parts equivalent to those in FIG. 1 of the first embodiment are denoted by the same reference numerals, description thereof is omitted, and differences will mainly be described. The difference is the structure of the mounting portion between the movable side end plate 3 and the guide 10.

可動側端板3は、中央側に、ガイド10の円筒部10aの外径より大きい内径の貫通穴3aを有し、その内周に、例えば、120°間隔で3箇所、可動電極棒7の導出方向に突出する係止部3cが形成されているのは、図1及び図2と同等であるが、本実施の形態の係止部3cは、図3(a)に示すように、図1及び図2とは異なり、先端に折返し部が形成されてなく、帯状の係止板である。
ガイド10は実施の形態1の図1とほぼ同形であるが、矩形状をした係合穴10cの短辺側寸法は、係止板が入ればよいので、係止板の板厚より僅かに大きい程度でよい。
The movable side end plate 3 has a through hole 3a having an inner diameter larger than the outer diameter of the cylindrical portion 10a of the guide 10 on the center side. The locking portion 3c that protrudes in the lead-out direction is formed in the same manner as in FIGS. 1 and 2, but the locking portion 3c of the present embodiment is shown in FIG. Unlike 1 and FIG. 2, the folded portion is not formed at the tip, and is a belt-like locking plate.
The guide 10 has substantially the same shape as that of FIG. 1 of the first embodiment. However, the dimension of the short side of the rectangular engagement hole 10c is slightly larger than the thickness of the locking plate, as long as the locking plate is inserted. A large degree is sufficient.

図3(a)の状態からの組立は、(b)示すように、係合穴10cよりはみ出た係止部3c(係止板)の先端側を、工具等を使用してガイド10の外周側に向けて直角に折り曲げ、ガイド10に固定する。この状態が図3(b)である。このように、ガイド10の固定は、先端部を折り曲げるだけで良いので、図1の場合と同様に、煩雑なねじ止め作業が不要になる。
図1の形状と比較すれば、組立時に先端部の折り曲げの工数は増えるが、図1の場合に必要であった、折返し部の先端と可動側端板の下面との間隔を、ガイドのフランジ部の厚さに合わせる寸法管理が必要なくなる。
As shown in FIG. 3B, the assembly from the state of FIG. 3A is performed by using a tool or the like on the front end side of the locking portion 3c (locking plate) protruding from the engagement hole 10c. It is bent at a right angle toward the side and fixed to the guide 10. This state is shown in FIG. In this way, the guide 10 can be fixed only by bending the tip, so that a complicated screwing operation is not required as in the case of FIG.
Compared with the shape of FIG. 1, the number of man-hours for bending the tip portion during assembly increases. However, the gap between the tip of the folded portion and the lower surface of the movable side end plate, which was necessary in the case of FIG. No need for dimensional control to match the thickness of the part.

なお、係止部3cは、実施の形態1の場合と同様に、可動側端板3と同一部材で構成すれば、プレス加工等で製作できるので簡単であが、別部材として溶接又はろう付けで固着しても良い。
また、係止部3cは、3箇所設けた場合で説明したが、3箇所に限定するものではなく複数箇所あればよい。
As in the case of the first embodiment, the engaging portion 3c is simple because it can be manufactured by pressing or the like if it is made of the same member as the movable side end plate 3, but it is welded or brazed as a separate member. It may be fixed with.
Moreover, although the latching | locking part 3c demonstrated in the case where three places were provided, it is not limited to three places, What is necessary is just two or more places.

以上のように、実施の形態2の真空バルブによれば、可動側端板の内周に設けられた係止部は、可動電極棒の導出方向に突出させた帯状の係止板であり、係止板がガイドの係合穴に挿入され、係止板の先端側がガイドの外周に向けて直角に折り曲げられて、ガイドが可動側端板に固定されるように構成したので、可動側端板にガイドを固定する場合に、煩雑なねじ止め作業を必要とせず、組立を簡単に行うことができる。また、実施の形態1と比較して、可動側端板の係止部の寸法管理が容易となる。   As described above, according to the vacuum valve of the second embodiment, the locking portion provided on the inner periphery of the movable side end plate is a band-shaped locking plate that protrudes in the direction in which the movable electrode rod is led out. Since the locking plate is inserted into the engagement hole of the guide and the distal end side of the locking plate is bent at a right angle toward the outer periphery of the guide, the guide is fixed to the movable side end plate. When the guide is fixed to the plate, no complicated screwing work is required, and assembly can be easily performed. Moreover, compared with Embodiment 1, the dimension management of the latching | locking part of a movable side end plate becomes easy.

1 絶縁容器 2 固定側端板
3 可動側端板 3a 貫通穴
3b,3c 係止部 4 固定電極棒
5 固定電極 6 ベローズ
7 可動電極棒 8 可動電極
9 シールド 10 ガイド
10a 円筒部 10b つば部
10c 係合穴。
DESCRIPTION OF SYMBOLS 1 Insulation container 2 Fixed side end plate 3 Movable side end plate 3a Through-hole 3b, 3c Locking part 4 Fixed electrode rod 5 Fixed electrode 6 Bellows 7 Movable electrode rod 8 Movable electrode 9 Shield 10 Guide 10a Cylindrical portion 10b Collar portion 10c Hole.

Claims (4)

円筒状の絶縁容器の両端面に固定側端板と可動側端板とが気密に接合されて構成された真空容器の内部に、接離可能な固定電極部及び可動電極部が配置され、前記真空容器からベローズを介して導出される前記可動電極部の可動電極棒を軸方向に案内するガイドが、前記可動側端板に取り付けられた真空バルブにおいて、
前記ガイドは、前記可動電極棒が貫通する円筒部と前記可動側端板に取り付けられるつば部とを有し、前記可動側端板は、中央部に前記ガイドの前記円筒部が挿通される貫通穴を有し、前記貫通穴の内周の複数箇所に前記可動電極棒の導出方向に突出する係止部が形成されており、前記ガイドの前記つば部に設けられた係合穴に前記係止部が嵌合されて、前記ガイドが前記可動側端板に固定されていることを特徴とする真空バルブ。
A fixed electrode portion and a movable electrode portion that can be contacted and separated are disposed inside a vacuum vessel that is configured by airtightly bonding a fixed side end plate and a movable side end plate to both end faces of a cylindrical insulating container, In the vacuum valve attached to the movable side end plate, a guide for guiding the movable electrode rod of the movable electrode portion led out from the vacuum vessel through the bellows in the axial direction,
The guide has a cylindrical portion through which the movable electrode rod penetrates and a collar portion attached to the movable side end plate, and the movable side end plate penetrates through the cylindrical portion of the guide through a central portion. Locking portions that have holes and project in the lead-out direction of the movable electrode rod are formed at a plurality of locations on the inner periphery of the through-hole, and the engagement holes provided in the flange portions of the guides A vacuum valve, wherein a stop is fitted, and the guide is fixed to the movable side end plate.
請求項1記載の真空バルブにおいて、
前記可動側端板の内周に設けられた前記係止部は、弾性を有する帯状部材より成り、先端に折返し部が形成された鉤状突起であり、前記鉤状突起が前記ガイドの前記係合穴に圧入され、前記係合穴から露出した前記折返し部が元の形状に復元することにより、前記ガイドが前記可動側端板に固定されるように構成されていることを特徴とする真空バルブ。
The vacuum valve according to claim 1.
The locking portion provided on the inner periphery of the movable side end plate is a hook-like protrusion made of an elastic band-like member and having a folded portion formed at the tip, and the hook-like protrusion is the engagement of the guide. The vacuum is characterized in that the guide is fixed to the movable side end plate by restoring the original shape of the folded portion exposed to the engagement hole and exposed from the engagement hole. valve.
請求項1記載の真空バルブにおいて、
前記可動側端板の内周に設けられた前記係止部は、前記可動電極棒の導出方向に突出させた帯状の係止板であり、前記係止板が前記ガイドの前記係合穴に挿入され、前記係止板の先端側が前記ガイドの外周に向けて直角に折り曲げられて、前記ガイドが前記可動側端板に固定されるように構成されていることを特徴とする真空バルブ。
The vacuum valve according to claim 1.
The locking portion provided on the inner periphery of the movable side end plate is a band-shaped locking plate that protrudes in the lead-out direction of the movable electrode rod, and the locking plate is formed in the engagement hole of the guide. A vacuum valve, wherein the guide is fixed to the movable side end plate by being inserted and bent at a right angle toward the outer periphery of the guide.
請求項1〜請求項3のいずれか1項に記載の真空バルブにおいて、
前記可動側端板と前記係止部は、1枚の金属板から形成されていることを特徴とする真空バルブ。
The vacuum valve according to any one of claims 1 to 3,
The vacuum valve characterized in that the movable side end plate and the locking portion are formed of a single metal plate.
JP2009147668A 2009-06-22 2009-06-22 Vacuum valve Active JP5307648B2 (en)

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