JP5292290B2 - Aging board for semiconductor laser - Google Patents

Aging board for semiconductor laser Download PDF

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JP5292290B2
JP5292290B2 JP2009519331A JP2009519331A JP5292290B2 JP 5292290 B2 JP5292290 B2 JP 5292290B2 JP 2009519331 A JP2009519331 A JP 2009519331A JP 2009519331 A JP2009519331 A JP 2009519331A JP 5292290 B2 JP5292290 B2 JP 5292290B2
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semiconductor laser
laser element
pressing
socket
elastic
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JPWO2008153178A1 (en
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信明 岸
信久 新井
一郎 松尾
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Chichibu Fuji Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/0014Measuring characteristics or properties thereof
    • H01S5/0021Degradation or life time measurements

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  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
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  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)

Abstract

Provided is an aging board by which a can-type package (semiconductor laser element) is brought into contact with a heat sink and electricity is carried to a socket, with a simple structure with high accuracy. A holding member (7) is provided with an elastic pressing surface section (10) which presses a can-type package (100). Thus, separate members, such as a spring, an attaching screw and a rubber washer, are eliminated, and the semiconductor laser element (100) can be fixed by the simple structure with high accuracy.

Description

本発明は、例えばCDやDVDなどの各種光ディスクに対する情報の記録、再生等に使用される半導体レーザ素子を、所定の条件下で駆動させ評価試験を行う半導体レーザ用エージングボードに関する。   The present invention relates to an aging board for a semiconductor laser that performs an evaluation test by driving a semiconductor laser element used for recording and reproducing information on various optical disks such as CD and DVD under predetermined conditions.

多数の半導体レーザ素子を搭載し所定の条件下で駆動させて評価試験を行うエージングボードとして、例えば特許文献1,2等に記載された試験用ボード等がある。
この種試験用ボード等は、端部にエッジコンタクト部を備えた配線基板上に複数のソケットを固定し、夫々のソケットに半導体レーザ素子を装着し、試験装置のコネクタにエッジコンタクト部を接続して試験を行うようになっている。
半導体レーザ素子には各種構造のものがあるが、特許文献1,3,4等に開示されたCAN型パッケージが汎用的な半導体レーザ素子として一般に用いられている。
As an aging board on which a large number of semiconductor laser elements are mounted and driven under predetermined conditions to perform an evaluation test, for example, there are test boards described in Patent Documents 1 and 2 and the like.
In this type of test board, a plurality of sockets are fixed on a wiring board having an edge contact portion at the end, a semiconductor laser element is mounted on each socket, and the edge contact portion is connected to a connector of a test apparatus. The test is done.
There are various types of semiconductor laser elements, but a CAN type package disclosed in Patent Documents 1, 3, 4 and the like is generally used as a general-purpose semiconductor laser element.

実開平7−2933号公報Japanese Utility Model Publication No. 7-2933 特開平10−260220号公報JP-A-10-260220 特開2006−324524号公報JP 2006-324524 A 特開2006−338848号公報JP 2006-338848 A

ところで、CAN型パッケージを被試験体とするエージングボードは、これに対応可能な構造であることは言うまでもない。   Incidentally, it goes without saying that an aging board having a CAN type package as a device under test has a structure that can cope with this.

例えば、配線基板の一面側に、CAN型パッケージが装着されるソケットを複数配設し、各ソケットを覆うように放熱板を設置すると共に、ソケットに装着されたCAN型パッケージがソケット上側から押えられる押え板を各ソケットごとに設けたものが知られている。押え板は、スプリングと取付ネジによりソケット又は配線基板に固定されていて、その中心部位にはCAN型パッケージの頭部(キャップ部)が遊挿される孔(中心孔)が開いており、キャップ部下端のステム部外縁を押圧するようになっている。
このような構造のエージングボードにおいては、ソケットの数(エージングボードにおける被試験体の数)だけ押え板と、各押え板ごとのスプリング、取付ネジが必要であり、組立てが面倒でコスト高になる等の問題がある。また、取付ネジの位置ずれやスプリングの弾発力に誤差が生じた場合、押え板による被試験体の押圧に偏荷重が生じ、ソケットに対する電気的導通や放熱板に対する接触が不安定になる虞れがある。
For example, a plurality of sockets to which CAN-type packages are attached are arranged on one side of the wiring board, and a heat sink is installed to cover each socket, and the CAN-type packages attached to the sockets are pressed from the upper side of the sockets. One having a press plate for each socket is known. The holding plate is fixed to the socket or the wiring board by a spring and a mounting screw, and a hole (center hole) into which the head (cap portion) of the CAN type package is loosely inserted is opened at the center portion. The stem part outer edge of a lower end is pressed.
In an aging board having such a structure, as many pressing plates as the number of sockets (the number of test objects in the aging board), springs and mounting screws for each pressing plate are required, and the assembly is cumbersome and expensive. There are problems such as. In addition, if there is an error in the displacement of the mounting screw or the spring force of the spring, an unbalanced load may be generated in the pressing of the DUT by the presser plate, resulting in unstable electrical continuity with the socket or contact with the heat sink. There is.

前記した問題を解消する為に、押え板の中心孔にゴムなどの弾性材からなるワッシャを介在させたものも知られているが、放熱、押え荷重等による劣化や剥離が生じ、頻繁にワッシャを交換等しなければならないという問題がある。   In order to solve the above-mentioned problems, it is known that a washer made of an elastic material such as rubber is interposed in the center hole of the presser plate. However, deterioration and peeling due to heat dissipation, presser load, etc. occur, and the washer is frequently used. There is a problem that must be exchanged.

本発明はこのような従来事情に鑑みてなされたもので、その目的とする処は、放熱板に対する被試験体(半導体レーザ素子)の接触、ソケットに対する被試験体の電気的導通などを、簡素な構造で精度良くなすことができるエージングボードを提供することにある。また本発明は、CAN型パッケージの評価試験に好適に用いられるエージングボードの提供を目的とする。また、本発明は、被試験体(半導体レーザ素子)の設置数が多くなり、各被試験体同士の設置ピッチが狭くなった場合であっても、放熱板に対する被試験体の接触、ソケットに対する被試験体の電気的導通などを、簡素な構造で精度良くなすことができるエージングボードを提供する。さらに本発明は、放熱のための通風構造を備えたエージングボードを提供する。   The present invention has been made in view of such a conventional situation, and the purpose of the present invention is to simplify the contact of the device under test (semiconductor laser element) with the heat sink, the electrical conduction of the device under test with respect to the socket, and the like. An object of the present invention is to provide an aging board that can be made with a simple structure and high accuracy. Another object of the present invention is to provide an aging board that is suitably used for an evaluation test of a CAN type package. Further, according to the present invention, even when the number of devices to be tested (semiconductor laser elements) is increased and the installation pitch between the devices to be tested becomes narrow, the contact of the devices to be tested with respect to the heat sink and the socket Provided is an aging board capable of accurately conducting electrical continuity of a device under test with a simple structure. Furthermore, this invention provides the aging board provided with the ventilation structure for heat radiation.

以上の目的を達成するために本発明は、配線基板の一面側に、半導体レーザ素子が装着されるソケットと、該ソケットに近接して設置された放熱板を備えると共に、前記ソケットに装着された半導体レーザ素子を固定する押え部材を有し、前記半導体レーザ素子を駆動させて評価試験を行う半導体レーザ用エージングボードであって、
前記押え部材が、弾性変形可能に部分的に薄肉状とされた弾性押圧面部を有し、前記ソケットに装着された半導体レーザ素子を前記弾性押圧面部によって前記配線基板方向へ押圧するよう形成したことを特徴とする。
In order to achieve the above object, the present invention comprises a socket to which a semiconductor laser element is mounted on one surface side of a wiring board, and a heat radiating plate installed in the vicinity of the socket, and is mounted on the socket. A semiconductor laser aging board having a holding member for fixing a semiconductor laser element and performing an evaluation test by driving the semiconductor laser element,
The pressing member has an elastic pressing surface portion that is partially thinned so as to be elastically deformable, and is formed so as to press the semiconductor laser element mounted on the socket toward the wiring board by the elastic pressing surface portion. It is characterized by.

このような構成によれば、押え部材自体が被試験体(半導体レーザ素子)の押圧作用を発揮するので、スプリングや取付ネジ、ゴム製ワッシャなどの別部材が不要となり、簡素な構造で精度良く半導体レーザ素子を押圧することができる。   According to such a configuration, since the pressing member itself exerts the pressing action of the device under test (semiconductor laser element), there is no need for separate members such as a spring, a mounting screw, and a rubber washer, and a simple structure with high accuracy. The semiconductor laser element can be pressed.

前記弾性押圧面部は、その押圧力によって、ソケットに対する半導体レーザ素子の電気的導通、及び/又は、放熱板に対する半導体レーザ素子の接触が、均等に精度良く成され、その状態が維持されるよう形成することが好ましい。   The elastic pressing surface portion is formed so that the electrical continuity of the semiconductor laser element with respect to the socket and / or the contact of the semiconductor laser element with the heat sink is made evenly and accurately by the pressing force, and the state is maintained. It is preferable to do.

被試験体としての半導体レーザ素子がCAN型パッケージである場合、前記弾性押圧面部は、前記押え部材における前記ソケットと対峙する面に凹設された凹部と、該凹部の中心に形成されたCAN型パッケージ通孔の外周にあるCAN型パッケージのステム部を押圧する半導体レーザ素子押圧片からなることが好ましい。
また、前記弾性押圧面部と前記放熱板との間に、前記半導体レーザ素子の径方向へのずれを防止する弾性部材を介在させると良く、前記凹部に前記弾性部材が収容されていると好ましい。さらに、前記弾性部材が熱伝導性に優れる材質であると良い。
When the semiconductor laser device as the device under test is a CAN type package, the elastic pressing surface portion includes a concave portion provided in a surface facing the socket in the pressing member, and a CAN type formed in the center of the concave portion. It is preferable to comprise a semiconductor laser element pressing piece that presses the stem portion of the CAN type package on the outer periphery of the package through-hole .
Further, an elastic member for preventing the semiconductor laser element from shifting in the radial direction may be interposed between the elastic pressing surface portion and the heat radiating plate, and it is preferable that the elastic member is accommodated in the concave portion. Furthermore, the elastic member may be made of a material having excellent thermal conductivity.

また、前記弾性押圧面部が、前記押え部材における前記ソケットと対峙する面に固定された板状部材に形成されていても良い。
この場合、弾性押圧面部が板状部材に形成されているので、押え部材に対する取り付け位置、大きさ、押圧強度などの自由度が増す。よって、被試験体(半導体レーザ素子)の設置数が多くなり、各被試験体同士の設置ピッチが狭くなった場合であっても、放熱板に対する被試験体の接触、ソケットに対する被試験体の電気的導通などを、簡素な構造で精度良くなすことができる。
Further, the elastic pressing surface portion may be formed on a plate-like member fixed to a surface of the pressing member facing the socket.
In this case, since the elastic pressing surface portion is formed on the plate-like member, the degree of freedom such as the attachment position, size, and pressing strength with respect to the pressing member is increased. Therefore, even when the number of devices to be tested (semiconductor laser elements) is increased and the installation pitch between the devices to be tested is narrowed, contact of the devices to be tested with respect to the heat sink, Electrical continuity and the like can be accurately performed with a simple structure.

前記板状部材の中心に半導体レーザ素子押圧片を備え、該半導体レーザ素子押圧片の周囲に、弾性変形可能に薄肉状とされた前記弾性押圧面部と、放熱用の放熱面部とが形成されていると好ましい。
この場合、板状部材が、押圧部材と放熱部材の二つの機能を有する。
A semiconductor laser element pressing piece is provided at the center of the plate-shaped member, and the elastic pressing surface portion that is thinned so as to be elastically deformable and a heat radiating surface portion for heat dissipation are formed around the semiconductor laser element pressing piece. It is preferable.
In this case, the plate-like member has two functions of a pressing member and a heat radiating member.

前記弾性押圧面部が、前記半導体レーザ素子押圧片を中心として互いに対称となる位置に形成されていると良い。この場合、前記ソケットに対する前記半導体レーザ素子の電気的導通、及び/又は、前記放熱板に対する該半導体レーザ素子の接触のための押圧力が、該半導体レーザ素子に対し均等に働くようになる。   It is preferable that the elastic pressing surface portions are formed at positions that are symmetrical with each other about the semiconductor laser element pressing piece. In this case, the electrical continuity of the semiconductor laser element with respect to the socket and / or the pressing force for the contact of the semiconductor laser element with the heat radiating plate is equally applied to the semiconductor laser element.

押え部材自体に被試験体(半導体レーザ素子)の押圧作用を発揮させるために、前記押え部材における前記ソケットと対峙する面に凹部または溝部が凹設され、該凹部または溝部の中に、前記板状部材が一または複数、収容状態で取り付けられているとさらに好ましい。   In order to cause the pressing member itself to exert the pressing action of the device under test (semiconductor laser element), a recess or a groove is formed in the surface of the pressing member facing the socket, and the plate is placed in the recess or the groove. More preferably, one or a plurality of shaped members are attached in the accommodated state.

放熱作用を向上させるために、前記溝部が、前記押え部材の長手方向の一端側から他端側まで貫通状に形成されていると良い。また、前記貫通状の溝部内を放熱用の通風路とするための強制通風手段を別途備えると好ましい。前記板状部材が、熱伝導性に優れる材質からなるとさらに好ましい。
さらに、この場合、弾性押圧面部と押え部材の間に伝熱性弾性部材が挟持されるように配してもよい。このようにすると、構造は少々複雑になるが、被試験体である半導体レーザ素子の発熱を放散するのに、半導体レーザ素子→弾性押圧面部→伝熱性弾性部材→押え部材と伝熱の経路が新たに追加されるため、熱の放散効率が飛躍的に向上する。したがって、特に、最近のレーザ素子の高出力化の要請に伴い、発熱量も大きくなっているので、このような高出力レーザ素子を試験する場合に、特に好ましい。
In order to improve the heat dissipation action, the groove is preferably formed in a penetrating shape from one end side to the other end side in the longitudinal direction of the pressing member. Further, it is preferable that a forced ventilation means for making the inside of the penetrating groove part a ventilation path for heat dissipation is additionally provided. More preferably, the plate-like member is made of a material having excellent thermal conductivity.
Further, in this case, the heat transfer elastic member may be sandwiched between the elastic pressing surface portion and the pressing member. In this way, the structure becomes a little complicated, but in order to dissipate the heat generated by the semiconductor laser element, which is the device under test, the semiconductor laser element → the elastic pressing surface portion → the heat transfer elastic member → the holding member and the heat transfer path Because it is newly added, the heat dissipation efficiency is dramatically improved. Accordingly, the amount of heat generated is particularly increased with the recent demand for higher output of laser elements, which is particularly preferable when testing such high output laser elements.

前記ソケットは、配線基板に対し一つ設けられる場合もあるし、複数設けられる場合もある。前記押え部材は、一又は複数のソケットに装着された各半導体レーザ素子の固定に対応し得るよう形成される。   One socket may be provided for the wiring substrate, or a plurality of sockets may be provided. The pressing member is formed so as to correspond to fixing of each semiconductor laser element mounted in one or a plurality of sockets.

本発明に係るエージングボードは、各種タイプの半導体レーザ素子に対応させて構成することができるが、特に、CAN型パッケージの半導体レーザ素子に好適に用いることができる。   The aging board according to the present invention can be configured so as to correspond to various types of semiconductor laser elements, and in particular, can be suitably used for a semiconductor laser element of a CAN type package.

本発明に係る半導体レーザ用エージングボードは以上説明したように構成したので、放熱板に対する半導体レーザ素子の接触、ソケットに対する半導体レーザ素子の電気的導通などを、簡素な構造で精度良くなすことができ、特に、CAN型パッケージの評価試験に好適に用いることができるなど、多くの効果を奏する。   Since the semiconductor laser aging board according to the present invention is configured as described above, the contact of the semiconductor laser element to the heat sink, the electrical conduction of the semiconductor laser element to the socket, etc. can be accurately performed with a simple structure. In particular, there are many effects such as being able to be suitably used for an evaluation test of a CAN type package.

以下、本発明の実施形態の数例を図面に基づき説明する。
図1〜図3に示す第一例のエージングボード1は、四角形状の配線基板2と、この配線基板2の上側に、ビス等の固定手段3により配線基板2との間に所定の隙間をあけて固定された放熱用の金属板4と、該金属板4の上面に縦横に配列して装着した多数のソケット5と、複数のソケット5に対応して設置された放熱板6と、各ソケット5に装着された半導体レーザ素子(CAN型パッケージ)100を固定する押え部材7を有し、端部に設けた接続部8に試験装置のコネクタ(不図示)を接続して、所定の条件化で半導体レーザ素子100を駆動させ評価試験を行うよう構成されている。
Hereinafter, several examples of embodiments of the present invention will be described with reference to the drawings.
The aging board 1 of the first example shown in FIGS. 1 to 3 has a predetermined gap between the rectangular wiring board 2 and the wiring board 2 by fixing means 3 such as screws on the upper side of the wiring board 2. A heat-dissipating metal plate 4 that is opened and fixed, a large number of sockets 5 that are arranged vertically and horizontally on the upper surface of the metal plate 4, a heat-radiating plate 6 that is installed in correspondence with the plurality of sockets 5, A holding member 7 for fixing a semiconductor laser element (CAN type package) 100 mounted on the socket 5 is provided, and a connector (not shown) of a test apparatus is connected to a connecting portion 8 provided at an end portion, and predetermined conditions are satisfied. Thus, the semiconductor laser device 100 is driven to perform an evaluation test.

本例の半導体レーザ素子100は、例えばCDやDVD等に記録されたデジタル情報を読み取るCAN型パッケージとしての光レーザダイオードモジュールであって、図3中に示すように、レーザ発光素子などが搭載されたステム部101の上面側をキャップ102で覆うと共に、下面側に突出する複数の端子103が、ソケット5内の中継用コンタクトピン8と接触して電気的に導通するようになっている。   The semiconductor laser device 100 of this example is an optical laser diode module as a CAN type package that reads digital information recorded on, for example, a CD or a DVD, and includes a laser light emitting device or the like as shown in FIG. The upper surface side of the stem portion 101 is covered with a cap 102, and a plurality of terminals 103 protruding to the lower surface side are brought into electrical contact with the relay contact pins 8 in the socket 5.

ソケット5は、上面に前記端子103の差込孔9を備えた略筒状のケース内に中継用コンタクトピン8を所要数備えたもので、各中継用コンタクトピン8は、配線基板2に形成された配線(不図示)中の所定箇所と電気的に導通するよう、配線基板2に植設されている。   The socket 5 is provided with a required number of relay contact pins 8 in a substantially cylindrical case provided with the insertion holes 9 for the terminals 103 on the upper surface, and each relay contact pin 8 is formed on the wiring board 2. The wiring board 2 is implanted so as to be electrically connected to a predetermined location in the wiring (not shown).

放熱板6は、適宜間隔をおいて直列状に設置された複数(本例では5個)のソケット5を被覆可能な長さを備えた逆U字形のコア部6aの左右側面にフィン6bを多段状に備えたもので、コア部6aの上面に、前記差込孔9と連通する差込孔6cを備え、半導体レーザ素子100のステム部101がコア部6a上面に接触して放熱がなされるようになっている。   The heat radiating plate 6 has fins 6b on left and right side surfaces of an inverted U-shaped core portion 6a having a length capable of covering a plurality of (5 in this example) sockets 5 arranged in series at appropriate intervals. It is provided in multiple stages, and has an insertion hole 6c communicating with the insertion hole 9 on the upper surface of the core portion 6a, and the stem portion 101 of the semiconductor laser element 100 contacts the upper surface of the core portion 6a to radiate heat. It has become so.

押え部材7は、所望の金属材料などにより、前記放熱板6を上方から被覆可能な底面開放の長尺箱形状に形成され、その上面部が弾性押圧面部10となっている。
弾性押圧面部10は、押え部材7の上面部を弾性変形可能に部分的に薄肉状とすることで押圧力を発揮し、ソケット5に装着された半導体レーザ素子100を配線基板2方向へ押圧して、前記端子103と中継用コンタクトピン8の電気的導通、及び、放熱板6に対する前記ステム部101の接触を確実ならしめる。
本例では、押え部材7の上面部における前記ソケットと対峙する部位に凹部10aを凹設して、弾性変形可能な程度の肉厚を有する薄肉面部(弾性変形面部)10bを形成し、且つ、前記凹部10aの中心に、前記差込孔6c、9と連通する通孔10cを設けて、この通孔10cから、ソケット5に装着された半導体レーザ素子100のキャップ102が突出するようになっている。また、通孔10cの開口縁は下方に延出し、ソケット5に装着された半導体レーザ素子100のステム部101外周に当接する押圧片10dとなっている。
The holding member 7 is formed of a desired metal material or the like into a long box shape with an open bottom surface that can cover the heat radiating plate 6 from above, and an upper surface portion thereof is an elastic pressing surface portion 10.
The elastic pressing surface portion 10 exerts a pressing force by making the upper surface portion of the pressing member 7 partially thin so that it can be elastically deformed, and presses the semiconductor laser element 100 mounted on the socket 5 toward the wiring board 2. Thus, the electrical connection between the terminal 103 and the relay contact pin 8 and the contact of the stem 101 with the heat sink 6 are ensured.
In this example, a concave portion 10a is formed in a portion facing the socket on the upper surface portion of the presser member 7 to form a thin surface portion (elastic deformation surface portion) 10b having a thickness that can be elastically deformed, and A through hole 10c communicating with the insertion holes 6c, 9 is provided at the center of the recess 10a, and the cap 102 of the semiconductor laser device 100 mounted on the socket 5 protrudes from the through hole 10c. Yes. Further, the opening edge of the through hole 10 c extends downward and serves as a pressing piece 10 d that comes into contact with the outer periphery of the stem portion 101 of the semiconductor laser element 100 mounted on the socket 5.

押え部材7は、ビスなどの固定手段(不図示)により放熱板6に固定され、押圧片10dの下端が前記ステム部101に当接すると共に、薄肉面部(弾性変形面部)10bの弾性変形力(押圧力)が働いて、前記した如く、半導体レーザ素子100を配線基板2方向へ押圧して、前記端子103と中継用コンタクトピン8の電気的導通、及び、放熱板6に対する前記ステム部101の接触が確実になる。   The pressing member 7 is fixed to the heat radiating plate 6 by a fixing means (not shown) such as a screw, the lower end of the pressing piece 10d abuts on the stem portion 101, and the elastic deformation force (elastic deformation surface portion) 10b of the thin surface portion (elastic deformation surface portion) 10b. As described above, the semiconductor laser element 100 is pressed in the direction of the wiring board 2 to electrically connect the terminal 103 and the relay contact pin 8, and the stem 101 against the heat sink 6. Contact is ensured.

前記した凹部10a、薄肉面部10bの形状は、図4(a)に示すような円形状としても良いし、(b)に示すような四角形状としても良い。   The shape of the concave portion 10a and the thin surface portion 10b described above may be a circular shape as shown in FIG. 4A or a rectangular shape as shown in FIG.

また、図5(a)〜(c)に示すように、押え部材7の上面部における前記ソケットと対峙する部位に前記した凹部10a、薄肉面部(弾性変形面部)10b、通孔10cを設けると共に、通孔10cの周囲の薄肉面部(弾性変形面部)10bを、ソケット5に装着された半導体レーザ素子100のステム部101外周に当接する押圧面としても良い。
この場合も、凹部10a、薄肉面部10bの形状は、(b)に示すような円形状としても良いし、(c)に示すような四角形状としても良い。
Further, as shown in FIGS. 5A to 5C, the concave portion 10a, the thin-walled surface portion (elastically deformed surface portion) 10b, and the through-hole 10c are provided in a portion of the upper surface portion of the pressing member 7 facing the socket. The thin surface portion (elastically deformed surface portion) 10b around the through hole 10c may be a pressing surface that comes into contact with the outer periphery of the stem portion 101 of the semiconductor laser element 100 mounted on the socket 5.
Also in this case, the shape of the concave portion 10a and the thin surface portion 10b may be a circular shape as shown in (b) or a quadrangular shape as shown in (c).

さらに、前述したそれぞれの例において、図6に示すように、薄肉面部10b又はその周囲に開口11を形成し、薄肉面部10bの弾性変形力を適宜に設定することもできる。
開口11は、(a)に示すような四角形状としたり、(b)に示すような放射状とするなど、任意に形成することができる。
Furthermore, in each example mentioned above, as shown in FIG. 6, the opening 11 can be formed in the thin surface part 10b or its circumference | surroundings, and the elastic deformation force of the thin surface part 10b can also be set suitably.
The openings 11 can be arbitrarily formed, for example, in a rectangular shape as shown in (a) or in a radial shape as shown in (b).

図7〜図10には、前記した実施形態において、弾性押圧面部10と放熱板の間に、半導体レーザ素子100の径方向へのずれを防止する弾性部材20を介在させた例を示す。
すなわち、この例では、前記した放熱板6の上に板状の上側放熱板6’をさらに備えると共に、弾性押圧面部10の凹部10a内に、ステム部101の外周に当接して半導体レーザ素子100の径方向へのずれを防止する板バネからなる弾性部材20を収容している。弾性部材20は熱伝導性に優れる材質、例えば銅合金などの金属材料からなるものが好ましい。
この例によれば、板バネ20により、ソケット5に装着した半導体レーザ素子100の径方向へのずれが防止され、より高精度な評価試験を行うことができ、且つ、板バネ20によって、より効率的に放熱効果を得ることができるなど、多くの利点がある。
7 to 10 show an example in which the elastic member 20 for preventing the semiconductor laser element 100 from shifting in the radial direction is interposed between the elastic pressing surface portion 10 and the heat radiating plate in the above-described embodiment.
That is, in this example, a plate-like upper heat radiating plate 6 ′ is further provided on the heat radiating plate 6, and the semiconductor laser element 100 is in contact with the outer periphery of the stem portion 101 in the recess 10 a of the elastic pressing surface portion 10. The elastic member 20 which consists of a leaf | plate spring which prevents the shift | offset | difference to the radial direction is accommodated. The elastic member 20 is preferably made of a material having excellent thermal conductivity, for example, a metal material such as a copper alloy.
According to this example, the leaf spring 20 prevents the semiconductor laser device 100 attached to the socket 5 from being displaced in the radial direction, and a more accurate evaluation test can be performed. There are many advantages, such as an efficient heat dissipation effect.

尚、この例のように、押え部材7を板状としたり、上側の放熱板6’として板状放熱板を採用することは適宜選択することができる。   Note that, as in this example, it is possible to appropriately select that the pressing member 7 has a plate shape, or that a plate-like heat sink is employed as the upper heat sink 6 '.

次に、前記した弾性押圧面部10が板状部材30に形成されている例について説明する。   Next, an example in which the above-described elastic pressing surface portion 10 is formed on the plate member 30 will be described.

図11、図12に示す例の弾性押圧面部10は、押え部材7におけるソケット5と対峙する面に固定された板状部材30に形成されている
板状部材30は、放熱性(熱伝導性)に優れた金属材料からなり、その一部を弾性変形可能に薄肉状とすることで押圧力を発揮し、ソケット5に装着された半導体レーザ素子100を配線基板2方向へ押圧して、前記端子103と中継用コンタクトピン8の電気的導通、及び、放熱板6に対する前記ステム部101の接触を確実ならしめるよう形成されている。
The elastic pressing surface portion 10 of the example shown in FIGS. 11 and 12 is formed on a plate-like member 30 fixed to the surface of the holding member 7 that faces the socket 5. The plate-like member 30 has a heat dissipation property (thermal conductivity). ), A part of which is made thin so as to be elastically deformable, exerting a pressing force, and pressing the semiconductor laser element 100 mounted on the socket 5 in the direction of the wiring board 2, It is formed so as to ensure electrical continuity between the terminal 103 and the relay contact pin 8 and the contact of the stem portion 101 with the heat sink 6.

板状部材30の中心には、通孔10fと、その開口縁に半導体レーザ素子押圧片10dが形成されており、この押圧片10dの周囲に、弾性変形可能に薄肉状とされた弾性押圧面部10と、放熱用の放熱面部10gなどが連続状に形成されている。   A through hole 10f is formed at the center of the plate-like member 30 and a semiconductor laser element pressing piece 10d is formed at the opening edge thereof. Around the pressing piece 10d, an elastic pressing surface portion which is thinned so as to be elastically deformable. 10 and a heat radiation surface portion 10g for heat radiation are formed in a continuous manner.

この例の弾性押圧面部10、10は、半導体レーザ素子押圧片10dを中心として、互いに左右対称となる位置に形成されている。そして、ソケット5に対する半導体レーザ素子100の電気的導通が確実に行われると共に、放熱板6に対する半導体レーザ素子100の接触のための押圧力が、半導体レーザ素子100に対し均等に働くようになっている。   The elastic pressing surface portions 10 and 10 in this example are formed at positions that are symmetrical to each other about the semiconductor laser element pressing piece 10d. Then, the electrical conduction of the semiconductor laser element 100 to the socket 5 is surely performed, and the pressing force for the contact of the semiconductor laser element 100 to the heat radiating plate 6 works equally to the semiconductor laser element 100. Yes.

弾性押圧面部10、10の外側には、板状部材30を、押え部材7にビス31で固定し一体化させるためのビス孔32を備えた取付け面部10hが連続状に形成されている。   On the outside of the elastic pressing surface portions 10, 10, a mounting surface portion 10 h having a screw hole 32 for fixing the plate-like member 30 to the holding member 7 with the screw 31 and integrating them is formed continuously.

押え部材7におけるソケット5と対峙する面には溝部40が凹設されており、この溝部40の中に、前記した板状部材30が複数、適宜間隔毎に、収容状態で取り付けられている。   A groove portion 40 is formed in the surface of the pressing member 7 that faces the socket 5, and a plurality of the plate-like members 30 are attached to the groove portion 40 in an accommodated state at appropriate intervals.

溝部40は、押え部材7の長手方向の一端側から他端側まで貫通状に形成され、放熱用の通風路を構成している。
なお、図示は省略するが、貫通状の溝部40内を放熱用通風路としてより効果的に機能させるために、強制通風手段を別途備えるとさらに好ましい。
The groove portion 40 is formed in a penetrating shape from one end side to the other end side in the longitudinal direction of the pressing member 7 and constitutes a ventilation path for heat dissipation.
In addition, although illustration is abbreviate | omitted, in order to make the inside of the penetration-shaped groove part 40 function more effectively as a ventilation path for heat radiation, it is still more preferable to provide a forced ventilation means separately.

このような構成によれば、押え部材7自体が半導体レーザ素子(被試験体)100の押圧作用を発揮するので、前述の実施形態例と同様に、簡素な構造で精度良く半導体レーザ素子100を押圧することができる。さらに、弾性押圧面部10が板状部材30に形成されているので、押え部材7に対する取り付け位置、大きさ、押圧強度などの自由度が増す。よって、半導体レーザ素子(被試験体)100の設置数が多くなり、各被試験体100、100同士の設置ピッチが狭くなった場合であっても対応可能であるなどの利点がある。   According to such a configuration, since the pressing member 7 itself exerts the pressing action of the semiconductor laser element (device under test) 100, the semiconductor laser element 100 can be precisely and accurately configured with a simple structure as in the above-described embodiment. Can be pressed. Furthermore, since the elastic pressing surface portion 10 is formed on the plate-like member 30, the degree of freedom such as the attachment position, size, and pressing strength with respect to the pressing member 7 is increased. Therefore, there are advantages that the number of semiconductor laser elements (devices under test) 100 to be installed is increased, and that it is possible to cope with even when the installation pitch between the devices under test 100 and 100 becomes narrow.

さらに、この場合、図11および図13に示すように、弾性押圧面部10dと押え部材7の間に伝熱性弾性部材50が挟持されるように配してもよい。   Furthermore, in this case, as shown in FIGS. 11 and 13, the heat transfer elastic member 50 may be sandwiched between the elastic pressing surface portion 10 d and the pressing member 7.

このようにすると、構造は少々複雑になるが、被試験体である半導体レーザ素子100の発熱を放散するのに、半導体レーザ素子100→弾性押圧面部10d→伝熱性弾性部材50→押え部材7と伝熱の経路が新たに追加されるため、熱の放散効率が飛躍的に向上する。したがって、特に、最近の半導体レーザ素子の高出力化の要請に伴い、発熱量も大きくなっているので、このような高出力レーザ素子を試験する場合に、特に好ましい。   In this way, the structure is a little complicated, but in order to dissipate the heat generated by the semiconductor laser device 100, which is the device under test, the semiconductor laser device 100 → the elastic pressing surface portion 10d → the heat transfer elastic member 50 → the holding member 7 Since a new heat transfer path is added, the heat dissipation efficiency is dramatically improved. Therefore, the amount of heat generated is particularly increased with the recent demand for higher output of semiconductor laser elements, which is particularly preferable when testing such high output laser elements.

また、この場合に、図13に示すように、弾性押圧面部10dと伝熱性弾性部材50の間の接触および伝熱性弾性部材50と押え板7の間の接触が面接触となり、その面がなるべく広い面積となるように伝熱性弾性部材50の形状と配置を決定するとよい。この方が、熱伝導面積が増加するため効率がよく、また、接触面積も増加するため応力の集中も防止できる。たとえば、図13に示すような、中央部分が円柱状の空洞を有する平たい円柱のような形状のものを、この空洞部分が通孔10fと一致するように配置してもよい。   Further, in this case, as shown in FIG. 13, the contact between the elastic pressing surface portion 10d and the heat transfer elastic member 50 and the contact between the heat transfer elastic member 50 and the holding plate 7 become surface contact, and the surface should be as much as possible. The shape and arrangement of the heat conductive elastic member 50 may be determined so as to have a large area. This is more efficient because the heat conduction area increases, and the contact area also increases, so stress concentration can be prevented. For example, as shown in FIG. 13, a shape like a flat cylinder having a cylindrical cavity at the center may be arranged so that the cavity coincides with the through hole 10f.

さらに、伝熱性弾性部材50としては、素材はゴムやシリコンなどを用いることができ、市販の熱伝導シートやいわゆるゴムワッシャを用いてもよい。この場合の熱伝導性能としては、例えば、熱伝導率が5[J/s・m・K]のものなどを用いることができる。熱伝導率は高い方が望ましいが、伝熱弾性部材40は、弾性押圧面部10と押え部材7に挟まれて、被試験体を更に適度な圧力で確実に固定する機能も有するため、適度な弾性すなわち、クッション性を有する限度で、熱伝導率が高いものが好ましい。   Furthermore, as the heat conductive elastic member 50, rubber, silicon, or the like can be used as a material, and a commercially available heat conductive sheet or a so-called rubber washer may be used. As the heat conduction performance in this case, for example, one having a heat conductivity of 5 [J / s · m · K] can be used. Although higher heat conductivity is desirable, the heat transfer elastic member 40 is sandwiched between the elastic pressing surface portion 10 and the pressing member 7 and also has a function of securely fixing the device under test with an appropriate pressure. A material having high heat conductivity is preferable as long as it has elasticity, ie, cushioning properties.

なお、[発明が解決しようとする課題]のところで述べた課題について付け加えると、押え板の中心にゴムなどの弾性剤からなるワッシャを介在させたものは、放熱、押さえ荷重等による劣化や剥離が生じ、交換を頻繁に必要となるという欠点を挙げたが、これは、特に、押え板とワッシャなどとの接触面積が小さく、特に線接触に近くなると、顕著になる欠点であるが、上記のように、なるべく接触面積を多く取ることにより、克服できるものである。   In addition, in addition to the problem described in [Problems to be Solved by the Invention], a thing in which a washer made of an elastic agent such as rubber is interposed in the center of the press plate is deteriorated or peeled off due to heat dissipation, pressing load, etc. The above-mentioned disadvantage is that frequent replacement is required, and this is a disadvantage that becomes noticeable especially when the contact area between the presser plate and the washer is small, especially when it comes close to line contact. Thus, it can be overcome by taking as much contact area as possible.

図13、図14に前記した板状部材30の変形例を示す。これらの例における板状部材30’、30”において、前述の板状部材と同様の構成部分については図中に前記と同一の符号を付し、重複する説明は省略する。   FIG. 13 and FIG. 14 show a modification of the plate member 30 described above. In the plate-like members 30 ′ and 30 ″ in these examples, the same components as those of the plate-like member described above are denoted by the same reference numerals as those described above, and redundant description is omitted.

以上、本発明の実施形態の数例を図面を参照して説明したが、本発明は図示例に限定されるものではなく、特許請求の範囲に記載された技術的思想の範疇において種々の変更が可能であることは言うまでもない。   The embodiments of the present invention have been described above with reference to the drawings. However, the present invention is not limited to the illustrated examples, and various modifications can be made within the scope of the technical idea described in the claims. It goes without saying that is possible.

本発明に係るエージングボードの実施形態の一例を示す平面図。The top view which shows an example of embodiment of the aging board which concerns on this invention. 図1に示すエージングボードの正面図で、一部切欠して表す。It is a front view of the aging board shown in FIG. 図2の要部拡大図。The principal part enlarged view of FIG. 押え部材の底面図で、(a)は凹部が円形の場合、(b)は凹部が四角形の場合を示す。In the bottom view of the pressing member, (a) shows a case where the concave portion is circular, and (b) shows a case where the concave portion is square. 押え部材の変形例を示し、(a)は要部の縦断面図、(b)は凹部が円形の場合の底面図、(c)は凹部が四角形の場合の底面図を示す。The modification of a pressing member is shown, (a) is a longitudinal cross-sectional view of the principal part, (b) is a bottom view when the recess is circular, and (c) is a bottom view when the recess is square. 押え部材の変形例を示し、(a)は凹部に四角形状の開口を設けた場合の底面図、(b)は凹部に放射状の開口を設けた場合の底面図を示す。The modification of a pressing member is shown, (a) is a bottom view when a rectangular opening is provided in the recess, and (b) is a bottom view when a radial opening is provided in the recess. 弾性押圧面部と放熱板の間に弾性部材を介在させた例を示す要部の拡大縦断面図。The expanded longitudinal cross-sectional view of the principal part which shows the example which interposed the elastic member between the elastic press surface part and the heat sink. 図7の要部拡大図。The principal part enlarged view of FIG. 図7の要部を底面側から見た斜視図で、半導体レーザ素子を省略して示す。FIG. 9 is a perspective view of the main part of FIG. 7 as viewed from the bottom side, with the semiconductor laser element omitted. 図7の要部を底面側から見た斜視図。The perspective view which looked at the principal part of FIG. 7 from the bottom face side. 弾性押圧面部が板状部材に形成されている例の要部拡大断面図。The principal part expanded sectional view of the example in which the elastic press surface part is formed in the plate-shaped member. 図11の板状部材を底面側からみた図。The figure which looked at the plate-shaped member of FIG. 11 from the bottom face side. 板状部材の変形例であり、あわせて伝熱性弾性部材が配された場合の状態を示すもので、(a)は平面図、(b)は正面図。It is a modification of a plate-shaped member, and shows the state when a heat conductive elastic member is arranged together, (a) is a plan view and (b) is a front view. 板状部材の変形例を示し、(a)は平面図、(b)は正面図。The modification of a plate-shaped member is shown, (a) is a top view, (b) is a front view.

符号の説明Explanation of symbols

1:エージングボード
2:配線基板
5:ソケット
6,6’:放熱板
7:押え部材
10:弾性押圧面部
10a:凹部
10b:薄肉面部
10d:押圧片
20:板バネ(弾性部材)
30:板状部材
50:伝熱性弾性部材
10g:放熱面部
100:半導体レーザ素子(CAN型パッケージ)
101:ステム部
102:キャップ部
DESCRIPTION OF SYMBOLS 1: Aging board 2: Wiring board 5: Socket 6,6 ': Heat sink 7: Holding member 10: Elastic pressing surface part 10a: Recessed part 10b: Thin wall part 10d: Pressing piece 20: Leaf spring (elastic member)
30: Plate-like member 50: Thermally conductive elastic member 10g: Heat radiation surface portion 100: Semiconductor laser device (CAN type package)
101: Stem portion 102: Cap portion

Claims (7)

配線基板の一面側に、半導体レーザ素子が装着されるソケットと、該ソケットに近接して設置された放熱板を備えると共に、前記ソケットに装着された半導体レーザ素子を固定する金属材料からなる押え部材を有し、前記半導体レーザ素子を駆動させて評価試験を行う半導体レーザ用エージングボードであって、
前記押え部材が、弾性変形可能に部分的に薄肉状とされた弾性押圧面部を有し、該弾性押圧面部は、前記押え部材における前記ソケットと対峙する面に凹設された凹部と、該凹部に形成された半導体レーザ素子押圧片からなり、該半導体レーザ素子押圧片により前記ソケットに装着された半導体レーザ素子の外周を前記配線基板方向へ押圧するよう形成したことを特徴とする半導体レーザ用エージングボード。
On one surface side of the wiring board, there is provided a socket to which the semiconductor laser element is mounted, and a heat dissipation plate installed in the vicinity of the socket, and a pressing member made of a metal material for fixing the semiconductor laser element mounted on the socket A semiconductor laser aging board for performing an evaluation test by driving the semiconductor laser element,
The pressing member has an elastic pressing surface portion that is partially thinned so as to be elastically deformable, and the elastic pressing surface portion includes a concave portion provided in a surface facing the socket in the pressing member, and the concave portion A semiconductor laser aging comprising: a semiconductor laser element pressing piece formed on the semiconductor laser element, wherein the semiconductor laser element pressing piece presses the outer periphery of the semiconductor laser element mounted on the socket toward the wiring board. board.
前記弾性押圧面部の半導体レーザ押圧片による押圧によって、前記ソケットに対する前記半導体レーザ素子の電気的導通、及び/又は、前記放熱板に対する該半導体レーザ素子の接触が維持されるよう形成したことを特徴とする請求項1記載の半導体レーザ用エージングボード。 The semiconductor laser device is formed such that the electrical continuity of the semiconductor laser device with respect to the socket and / or the contact of the semiconductor laser device with the heat sink is maintained by pressing the elastic pressing surface portion with a semiconductor laser pressing piece. The aging board for a semiconductor laser according to claim 1. 前記弾性押圧面部と前記放熱板との間に、前記半導体レーザ素子の径方向へのずれを防止する弾性部材を介在させたことを特徴とする請求項1または2記載の半導体レーザ用エージングボード。 The elastic pressing surface portion and between said radiating plate, said claim 1 or 2 semiconductor laser for aging board wherein it is interposed an elastic member for preventing displacement in the radial direction of the semiconductor laser element. 前記凹部に前記弾性部材が収容されていることを特徴とする請求項記載の半導体レーザ用エージングボード。 4. The semiconductor laser aging board according to claim 3 , wherein the elastic member is accommodated in the recess. 前記弾性部材が熱伝導性に優れる材質からなることを特徴とする請求項または記載の半導体レーザ用エージングボード。 Claim 3 or 4 Aging board for a semiconductor laser according the elastic member is characterized in that it consists of a material having excellent thermal conductivity. 前記ソケットを複数備えると共に、前記押え部材が複数のソケットに装着された各半導体レーザ素子の固定に対応し得るよう形成されていることを特徴とする請求項1〜のいずれか記載の半導体レーザ用エージングボード。 Together with the provided with a plurality of sockets, the semiconductor laser according to claim 1 to 5, characterized in that the pressing member is formed so that may correspond to a fixed semiconductor laser chips mounted on a plurality of sockets Aging board for. 被試験体としての半導体レーザ素子がCAN型パッケージであることを特徴とする請求項1〜のいずれか記載の半導体レーザ用エージングボード。 Claim 1-6 aging board for a semiconductor laser according to any one of, wherein the semiconductor laser element as the test object is a CAN-type package.
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JP2010122181A (en) * 2008-11-21 2010-06-03 Daitron Technology Co Ltd Pressing plate and inspection device using the same
US8811439B2 (en) 2009-11-23 2014-08-19 Seminex Corporation Semiconductor laser assembly and packaging system
JP2011253967A (en) * 2010-06-02 2011-12-15 Chichibu Fuji Co Ltd Aging board for semiconductor laser device
JP5485801B2 (en) * 2010-06-02 2014-05-07 株式会社秩父富士 Aging board for semiconductor laser elements
JP2012156233A (en) * 2011-01-25 2012-08-16 Seiko Epson Corp Light source device and projector
JP7386435B2 (en) * 2019-03-28 2023-11-27 パナソニックIpマネジメント株式会社 Wiring board and its manufacturing method

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