JP5285381B2 - Super abrasive tool - Google Patents

Super abrasive tool Download PDF

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JP5285381B2
JP5285381B2 JP2008259226A JP2008259226A JP5285381B2 JP 5285381 B2 JP5285381 B2 JP 5285381B2 JP 2008259226 A JP2008259226 A JP 2008259226A JP 2008259226 A JP2008259226 A JP 2008259226A JP 5285381 B2 JP5285381 B2 JP 5285381B2
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layer
protective layer
bond layer
abrasive grains
superabrasive tool
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JP2010089177A (en
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豊明 安井
勇哉 紺野
泰路 菊池
秀彰 有澤
清隆 中川
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Mitsubishi Heavy Industries Ltd
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本発明は、めっき法により超硬質砥粒をNi系のボンド層で固着した超砥粒工具に関する。   The present invention relates to a superabrasive tool in which superhard abrasive grains are fixed with a Ni-based bond layer by a plating method.

研削加工等に使用される超砥粒工具は、例えば、電気Niめっきや無電解Ni−Pめっきや無電解Ni−Bめっき等のようなめっき法によって、S45CやS25C等の炭素鋼等からなる基材にボンド層(めっき層)を形成してダイヤモンドやcBN等からなる超硬質砥粒を固着することにより、製造されている。   Superabrasive tools used for grinding and the like are made of carbon steel such as S45C and S25C by plating methods such as electric Ni plating, electroless Ni-P plating, and electroless Ni-B plating. It is manufactured by forming a bond layer (plating layer) on a substrate and fixing super hard abrasive grains made of diamond, cBN, or the like.

特開昭63−221978号公報JP-A-63-221978 特開2001−001266号公報JP 2001-001266 A

前述したようなNi系のボンド層で超硬質砥粒を固着した超砥粒工具においては、当該ボンド層の硬度が低いことから(Hv約150〜550)、研削加工等の際に発生した切屑が当該ボンド層と接触することにより、当該ボンド層が摩耗して、当該ボンド層から超硬質砥粒が脱落してしまい、寿命が短くなってしまうという問題があった。   In the superabrasive tool in which superhard abrasive grains are fixed with the Ni-based bond layer as described above, the hardness of the bond layer is low (Hv about 150 to 550), and thus chips generated during grinding and the like are generated. However, contact with the bond layer causes wear of the bond layer, and the super hard abrasive grains fall off from the bond layer, resulting in a problem that the life is shortened.

さらに、研削加工等のときにS45C等のような炭素鋼からなる被研削体と上記ボンド層とが接触すると、当該被研削体に焼き付きを生じて、当該被研削体の表面粗さが粗くなってしまい、品質低下を引き起こす場合があった。   Further, when the object to be ground made of carbon steel such as S45C and the bond layer come into contact with each other during grinding, the object to be ground is seized, and the surface roughness of the object to be ground becomes rough. In some cases, the quality deteriorates.

このようなことから、本発明は、めっき法により超硬質砥粒をNi系のボンド層で固着したものであっても、長寿命化を図ることができると共に被研削体の品質低下を防止することができる超砥粒工具を提供することを目的とする。   For this reason, the present invention can extend the life and prevent the quality of the object to be ground from being deteriorated even if the super hard abrasive grains are fixed by the Ni-based bond layer by a plating method. An object of the present invention is to provide a superabrasive tool that can be used.

前述した課題を解決するための、第一番目の発明に係る超砥粒工具は、めっき法により超硬質砥粒をNi系のボンド層で固着した超砥粒工具において、前記ボンド層及び前記超硬質砥粒の表面を覆うように設けられたダイヤモンドライクカーボンからなる保護層と、前記ボンド層と前記保護層との間及び前記超硬質砥粒を覆うように設けられた前記保護層と当該超硬質砥粒との間に設けられて、Ti、又は、Cr及びTiの少なくとも一方の金属の窒化物、炭化物、炭窒化物のうちの少なくとも一つの化合物からなる中間層とを備えていることを特徴とする。 To solve the problems described above, the superabrasive tool according to the first-th invention, by plating the superabrasive tool superhard abrasive grains were fixed with a bond layer of Ni-based, the bond layer and the greater A protective layer made of diamond-like carbon provided so as to cover the surface of the hard abrasive grains, the protective layer provided between the bond layer and the protective layer and so as to cover the super hard abrasive grains, and the super Provided with an intermediate layer made of at least one compound of nitride, carbide, and carbonitride of at least one metal of Ti or Cr and Ti. Features.

番目の発明に係る超砥粒工具は、第一番目の発明おいて、前記ボンド層の下方に下地層を備えていることを特徴とする。 Superabrasive tool according to the second invention, Oite the first th invention is characterized in that it comprises a base layer below the bond layer.

本発明に係る超砥粒工具によれば、ボンド層よりも高い硬度を有する保護層を当該ボンド層の表面を覆うように設けたことから、研削加工等の際に発生した切屑と保護層とが接触しても、当該保護層が高耐摩耗性を有して非常に摩耗しにくいので、ボンド層から超硬質砥粒が脱落してしまうことを大幅に抑制できると共に、研削加工等のときに炭素鋼からなる被研削体と保護層とが接触しても、当該被研削体に焼き付きを生じることがないので、当該被研削体の表面粗さが粗くなってしまうことを防止できる。その結果、長寿命化を図ることができると共に被研削体の品質低下を防止することができる。   According to the superabrasive tool according to the present invention, since a protective layer having a hardness higher than that of the bond layer is provided so as to cover the surface of the bond layer, chips generated during grinding and the like, the protective layer, Even if they come into contact with each other, the protective layer has high wear resistance and is very difficult to wear. Even if the object to be ground made of carbon steel and the protective layer come into contact with each other, seizure does not occur in the object to be ground, so that it is possible to prevent the surface roughness of the object to be ground from becoming rough. As a result, the service life can be extended and the quality of the object to be ground can be prevented from deteriorating.

本発明に係る超砥粒工具の実施形態を図面に基づいて説明するが、本発明は図面に基づいて説明する以下の実施形態のみに限定されるものではない。   Embodiments of a superabrasive tool according to the present invention will be described with reference to the drawings. However, the present invention is not limited only to the following embodiments described with reference to the drawings.

[主な実施形態]
本発明に係る超砥粒工具の主な実施形態を図1に基づいて説明する。図1は、超砥粒工具の要部の概略構成図である。
[Main embodiments]
A main embodiment of a superabrasive tool according to the present invention will be described with reference to FIG. FIG. 1 is a schematic configuration diagram of a main part of a superabrasive tool.

図1に示すように、S45CやS25C等の炭素鋼等からなる基材11上には、Niめっきからなる下地層12(厚さ:約0.5〜5μm)が設けられている。この下地層12上には、Ni系めっきからなるボンド層13が設けられている。このボンド層13には、ダイヤモンドやcBN等からなる超硬質砥粒14(平均粒径:約50〜300μm)が先端側を露出(約30〜40%)させるように植設されている。そして、上記ボンド層13及び上記超硬質砥粒14上には、当該ボンド層13及び当該超硬質砥粒14を覆うようにして中間層15(約0.1〜0.5μm)が設けられている。この中間層15上には、保護層16(約0.1〜2.0μm)が設けられている。   As shown in FIG. 1, a base layer 12 (thickness: about 0.5 to 5 μm) made of Ni plating is provided on a base material 11 made of carbon steel such as S45C or S25C. On this underlayer 12, a bond layer 13 made of Ni-based plating is provided. In the bond layer 13, ultra-hard abrasive grains 14 (average particle diameter: about 50 to 300 μm) made of diamond, cBN, or the like are implanted so that the tip side is exposed (about 30 to 40%). And on the said bond layer 13 and the said super-hard abrasive grain 14, the intermediate | middle layer 15 (about 0.1-0.5 micrometer) is provided so that the said bond layer 13 and the said ultra-hard abrasive grain 14 may be covered. Yes. A protective layer 16 (about 0.1 to 2.0 μm) is provided on the intermediate layer 15.

前記ボンド層13(Hv150〜550程度)は、前記超硬質砥粒14を前記基材11に対して固定するために設けられるものであって、電気Niめっきや無電解Ni−Pめっきや無電解Ni−Bめっき等のようなめっき法によって形成されるNi系めっき層であるが、「ワット浴」(硫酸ニッケルと塩化ニッケルとホウ酸との水溶液)や「スルファミン酸ニッケル浴」(スルファミン酸ニッケルとホウ酸との水溶液)を用いた電気めっきによって形成されるめっき層であると、厚い厚さでも比較的短時間で効率よく形成できると共に、内部に加わる応力を小さくすることができるため、非常に好ましい。   The bond layer 13 (about Hv 150 to 550) is provided to fix the superhard abrasive grains 14 to the base material 11, and includes electric Ni plating, electroless Ni—P plating, and electroless. It is a Ni-based plating layer formed by a plating method such as Ni-B plating. The plating layer formed by electroplating using an aqueous solution of boric acid and boric acid can be formed efficiently in a relatively short time even with a thick thickness, and the stress applied to the inside can be reduced. Is preferable.

前記下地層12は、前記基材11と前記ボンド層13との密着性を高めるために設けられるものであって、当該密着性を高める材質であれば特に限定されるものではないが、「ウッド浴」(塩化ニッケルと塩酸との水溶液)を用いた電気めっきによって形成されるNiめっき層であると、電解の際に基材11の表面に多量に発生する水素ガスにより当該基材11の表面が還元雰囲気となって、当該基材11の表面の酸化物が還元されながら当該基材11の表面に形成されることから、当該基材11の表面との密着性が高くなって、非常に好ましい。   The base layer 12 is provided to improve the adhesion between the base material 11 and the bond layer 13 and is not particularly limited as long as it is a material that improves the adhesion. When the Ni plating layer is formed by electroplating using a “bath” (an aqueous solution of nickel chloride and hydrochloric acid), the surface of the substrate 11 is generated by hydrogen gas generated in a large amount on the surface of the substrate 11 during electrolysis. Becomes a reducing atmosphere, and the oxide on the surface of the base material 11 is formed on the surface of the base material 11 while being reduced. Therefore, the adhesion to the surface of the base material 11 is increased, preferable.

前記保護層16は、前記ボンド層13よりも高い硬度(Hv1000以上)を有するものであって、ダイヤモンドライクカーボン(Diamond Like Carbon:DLC)等の硬質炭素材料からなり、ダイヤモンド構造(立方晶)とグラファイト構造(六方晶)との中間的な結晶構造を有する、すなわち、炭素を主成分として水素を若干含みながらダイヤモンド結合(SP3結合)とグラファイト結合(SP2結合)との両結合を有するアモルファス構造を有している。このような保護層16は、スパッタリング法、プラズマCVD法、イオン化蒸着法等によって容易に形成することができる。このとき、内部の水素濃度をできるだけ低くすると(少なくとも20原子%以下)、硬度をさらに高くすることができ、SiやCrやTi等の金属成分を含有させると(約1〜5原子%)、内部の応力を緩和して、剥離性を大きく低下させることができるので、非常に好ましい。 The protective layer 16 has a higher hardness (Hv1000 or more) than the bond layer 13, and is made of a hard carbon material such as diamond like carbon (DLC), and has a diamond structure (cubic crystal). An amorphous structure having an intermediate crystal structure with a graphite structure (hexagonal crystal), that is, having both bonds of diamond bonds (SP 3 bonds) and graphite bonds (SP 2 bonds) with carbon as a main component and some hydrogen. It has a structure. Such a protective layer 16 can be easily formed by sputtering, plasma CVD, ionized vapor deposition or the like. At this time, if the internal hydrogen concentration is made as low as possible (at least 20 atomic% or less), the hardness can be further increased, and if a metal component such as Si, Cr or Ti is contained (about 1 to 5 atomic%), Since internal stress can be relieved and releasability can be reduced significantly, it is very preferable.

前記中間層15は、前記ボンド層13よりも高い硬度(Hv700以上)を有すると共に前記保護層よりも高い靱性を有するものであって、Cr及びTiの少なくとも一方の金属、又は、当該金属の窒化物、炭化物、炭窒化物のうちの少なくとも一つの化合物からなり、スパッタリング法、プラズマCVD法、イオン化蒸着法等によって、CrやTiの金属の蒸着層(Hv約700)や、これら金属の窒化物や炭化物や炭窒化物の蒸着層(Hv1500以上)として設けることができる。   The intermediate layer 15 has higher hardness (Hv 700 or more) than the bond layer 13 and higher toughness than the protective layer, and is at least one metal of Cr and Ti, or nitridation of the metal Of metal, carbide, carbonitride, and by sputtering method, plasma CVD method, ionized vapor deposition method, etc., a deposited layer of Cr or Ti metal (Hv about 700) or nitride of these metals Or a deposited layer of carbide or carbonitride (Hv 1500 or more).

つまり、本実施形態に係る超砥粒工具10は、めっき法により超硬質砥粒14をNi系のボンド層13で固着した超砥粒工具10において、前記ボンド層13及び前記超硬質砥粒14の表面を覆うように設けられて当該ボンド層13よりも高い硬度を有する保護層16と、前記ボンド層13及び前記超硬質砥粒14と前記保護層16との間に設けられて当該ボンド層13よりも高い硬度を有すると共に当該保護層16よりも高い靱性を有する中間層15と、前記ボンド層13の下方に設けられた下地層12とを備えているのである。 That is, the superabrasive tool 10 according to the present embodiment is the superabrasive tool 10 in which the superhard abrasive 14 is fixed by the Ni-based bond layer 13 by a plating method, and the bond layer 13 and the superhard abrasive 14. The protective layer 16 is provided so as to cover the surface of the adhesive layer and has a hardness higher than that of the bond layer 13, and is provided between the bond layer 13, the superhard abrasive grains 14, and the protective layer 16. The intermediate layer 15 having a hardness higher than 13 and having a toughness higher than that of the protective layer 16, and the base layer 12 provided below the bond layer 13 are provided.

このような本実施形態に係る超砥粒工具10の製造方法を次に説明する。   Next, a method for manufacturing the superabrasive tool 10 according to this embodiment will be described.

まず、前処理工程として、基材11において超硬質砥粒14を設ける必要のない箇所にマスキング剤を塗布して乾燥させたら、アルカリ水溶液中に浸漬して脱脂処理した後に水洗し、塩酸水溶液中に浸漬処理して活性化処理した後に水洗する。   First, as a pretreatment step, when a masking agent is applied to a portion of the substrate 11 where it is not necessary to provide the super hard abrasive grains 14 and dried, the substrate 11 is immersed in an alkaline aqueous solution, degreased, washed with water, and then in a hydrochloric acid aqueous solution. After immersing in and activating, it is washed with water.

次に、上記基材11を「ウッド浴」(塩化ニッケルと塩酸との水溶液)中(pH1.5以下)で電気めっきしてNiめっき層の下地層12を形成した後に水洗したら、当該基材11を「ワット浴」(硫酸ニッケルと塩化ニッケルとホウ酸との水溶液)中(pH4.5)で超硬質砥粒14と共に電気めっきしてNi系めっき層のボンド層13を介して超硬質砥粒14の先端側を露出させるように当該超硬質砥粒14を基材11の所定箇所に固着させた後に水洗し、乾燥させる。   Next, the base material 11 is electroplated in a “wood bath” (an aqueous solution of nickel chloride and hydrochloric acid) (pH 1.5 or less) to form an undercoat layer 12 of the Ni plating layer, and then washed with water. 11 is electroplated together with superhard abrasive grains 14 in a “watt bath” (aqueous solution of nickel sulfate, nickel chloride and boric acid) (pH 4.5), and superhard abrasives are bonded via a Ni-based plating layer bond layer 13. The superhard abrasive grain 14 is fixed to a predetermined portion of the substrate 11 so that the tip end side of the grain 14 is exposed, and then washed with water and dried.

続いて、上記基材11に対してスパッタリング法等によりCr等をターゲットにしてCrN等の中間層15を前記ボンド層13及び前記超硬質砥粒12の表面に形成した後、当該基材11に対してスパッタリング法等によりグラファイト等をターゲットにしてダイヤモンドライクカーボン等の保護層16を上記中間層15の表面に形成することにより、超砥粒工具10を得ることができる。   Subsequently, an intermediate layer 15 such as CrN is formed on the surface of the bond layer 13 and the super hard abrasive grains 12 by using Cr or the like as a target with respect to the base material 11, and then on the base material 11. On the other hand, the superabrasive tool 10 can be obtained by forming a protective layer 16 of diamond-like carbon or the like on the surface of the intermediate layer 15 using graphite or the like as a target by sputtering or the like.

このような本実施形態に係る超砥粒工具10においては、ボンド層13よりも高い硬度(Hv1000以上)を有する保護層16を当該ボンド層13の表面を覆うように設けたことから、研削加工等の際に発生した切屑と保護層16とが接触しても、当該保護層16が高耐摩耗性を有して非常に摩耗しにくいので、ボンド層13から超硬質砥粒12が脱落してしまうことを大幅に抑制できると共に、研削加工等のときに炭素鋼からなる被研削体と保護層16とが接触しても、当該被研削体に焼き付きを生じることがないので、当該被研削体の表面粗さが粗くなってしまうことを防止できる。   In the superabrasive tool 10 according to this embodiment, since the protective layer 16 having a higher hardness (Hv1000 or more) than the bond layer 13 is provided so as to cover the surface of the bond layer 13, the grinding process is performed. Even if the chips generated in the event of contact with the protective layer 16 are in contact with each other, the protective layer 16 has high wear resistance and is very difficult to wear, so that the super hard abrasive grains 12 fall off from the bond layer 13. In addition, when the object to be ground made of carbon steel and the protective layer 16 come into contact with each other during grinding, the object to be ground is not seized. The surface roughness of the body can be prevented from becoming rough.

したがって、本実施形態に係る超砥粒工具10によれば、長寿命化を図ることができると共に被研削体の品質低下を防止することができる。   Therefore, according to the superabrasive tool 10 according to the present embodiment, it is possible to extend the life and prevent the quality of the object to be ground from being deteriorated.

また、ボンド層13よりも高い硬度(Hv700以上)を有すると共に保護層16よりも高い靱性を有する中間層15を当該ボンド層13と当該保護層16との間に設けたことから、当該保護層16の割れや剥離を大幅に防止することができる。   Further, since the intermediate layer 15 having a higher hardness (Hv 700 or higher) than the bond layer 13 and a toughness higher than the protective layer 16 is provided between the bond layer 13 and the protective layer 16, the protective layer 16 can be greatly prevented from cracking or peeling.

なぜなら、ダイヤモンドライクカーボンからなる保護層16は、硬度が高くて脆く、Ni系めっき層からなるボンド層13は、硬度が低くて軟らかいことから、研削加工等の際に応力が加わって、ボンド層13に歪を生じてしまうと、当該歪に保護層16が追従できずに割れや剥離を生じてしまう可能性があるものの、上記中間層15を設けることにより、研削加工等の際に応力が加わっても、当該中間層15がバッファとなって、上記保護層16の割れや剥離が防止されるようになるからである。   This is because the protective layer 16 made of diamond-like carbon has a high hardness and is brittle, and the bond layer 13 made of a Ni-based plating layer has a low hardness and is soft. If the strain is generated in 13, the protective layer 16 cannot follow the strain and may crack or peel off. However, by providing the intermediate layer 15, stress is applied during grinding or the like. Even if added, the intermediate layer 15 becomes a buffer, so that the protective layer 16 is prevented from being broken or peeled off.

[他の実施形態]
なお、前述した実施形態においては、スパッタリング法等により前記中間層15をボンド層13と保護層16との間及び保護層16と超硬質砥粒14との間に設けた超砥粒工具10の場合について説明したが、他の実施形態として、例えば、図2に示すように、めっき法を適用して、Crめっき層の中間層25を、保護層16と超硬質砥粒14との間に設けることなく、ボンド層13と保護層16との間のみに設けた超砥粒工具20であっても、前述した実施形態の場合と同様な作用効果を得ることができる。
[Other Embodiments]
In the above-described embodiment, the superabrasive tool 10 in which the intermediate layer 15 is provided between the bond layer 13 and the protective layer 16 and between the protective layer 16 and the superhard abrasive grain 14 by a sputtering method or the like. Although the case has been described, as another embodiment, for example, as shown in FIG. 2, an intermediate layer 25 of a Cr plating layer is applied between the protective layer 16 and the superhard abrasive grains 14 by applying a plating method. Even if it is the superabrasive tool 20 provided only between the bond layer 13 and the protective layer 16 without providing, the effect similar to the case of embodiment mentioned above can be acquired.

また、前述した実施形態においては、下地層12及び中間層15,25を設けた超砥粒工具10,20の場合について説明したが、他の実施形態として、例えば、研削条件等の各種条件によっては、図3に示すように、下地層12を省略した超砥粒工具30(図3A参照)や、中間層15,25を省略した超砥粒工具40(図3B参照)や、下地層12及び中間層15,25を省略した超砥粒工具50(図3C参照)を適用することも可能である。   In the above-described embodiment, the case of the superabrasive tools 10 and 20 provided with the base layer 12 and the intermediate layers 15 and 25 has been described. However, as another embodiment, for example, depending on various conditions such as grinding conditions. 3, the superabrasive tool 30 (see FIG. 3A) in which the underlayer 12 is omitted, the superabrasive tool 40 in which the intermediate layers 15 and 25 are omitted (see FIG. 3B), the underlayer 12 It is also possible to apply a superabrasive tool 50 (see FIG. 3C) in which the intermediate layers 15 and 25 are omitted.

また、前述した実施形態においては、超硬質砥粒14の先端側の表面にも保護層16が設けられている場合について説明したが、本発明はこれに限らず、少なくともボンド層の表面を覆うように保護層が設けられていれば、前述した実施形態の場合と同様な作用効果を得ることができる。   In the embodiment described above, the case where the protective layer 16 is also provided on the surface of the super hard abrasive grain 14 is described. However, the present invention is not limited to this, and at least covers the surface of the bond layer. Thus, if the protective layer is provided, the same effect as the case of embodiment mentioned above can be acquired.

本発明に係る超砥粒工具は、長寿命化を図ることができると共に被研削体の品質低下を防止することができるので、金属加工産業等において、極めて有益に利用することができる。   Since the superabrasive tool according to the present invention can extend the life and prevent the quality of the object to be ground from being deteriorated, it can be used extremely beneficially in the metalworking industry and the like.

本発明に係る超砥粒工具の主な実施形態の要部の概略構成図である。It is a schematic block diagram of the principal part of main embodiment of the superabrasive tool which concerns on this invention. 本発明に係る超砥粒工具の他の実施形態の要部の概略構成図である。It is a schematic block diagram of the principal part of other embodiment of the superabrasive tool which concerns on this invention. 本発明に係る超砥粒工具のさらに他の実施形態の要部の概略構成図である。It is a schematic block diagram of the principal part of further another embodiment of the superabrasive tool which concerns on this invention.

符号の説明Explanation of symbols

10,20,30,40,50 超砥粒工具
11 基材
12 下地層
13 ボンド層
14 超硬質砥粒
15,25 中間層
16 保護層
10, 20, 30, 40, 50 Superabrasive tool 11 Base material 12 Underlayer 13 Bond layer 14 Superhard abrasive 15, 25 Intermediate layer 16 Protective layer

Claims (2)

めっき法により超硬質砥粒をNi系のボンド層で固着した超砥粒工具において、
前記ボンド層及び前記超硬質砥粒の表面を覆うように設けられたダイヤモンドライクカーボンからなる保護層と、
前記ボンド層と前記保護層との間及び前記超硬質砥粒を覆うように設けられた前記保護層と当該超硬質砥粒との間に設けられて、Ti、又は、Cr及びTiの少なくとも一方の金属の窒化物、炭化物、炭窒化物のうちの少なくとも一つの化合物からなる中間層と
を備えていることを特徴とする超砥粒工具。
In superabrasive tools in which super hard abrasive grains are fixed with a Ni-based bond layer by plating,
A protective layer made of diamond-like carbon provided so as to cover the surface of the bond layer and the ultra-hard abrasive grains ;
Ti, or at least one of Cr and Ti, provided between the bond layer and the protective layer and between the protective layer provided to cover the superhard abrasive grains and the superhard abrasive grains. A superabrasive tool comprising: an intermediate layer made of at least one compound selected from the group consisting of metal nitrides, carbides, and carbonitrides .
請求項に記載の超砥粒工具において、
前記ボンド層の下方に下地層を備えている
ことを特徴とする超砥粒工具。
The superabrasive tool according to claim 1 ,
A superabrasive tool comprising a base layer below the bond layer.
JP2008259226A 2008-10-06 2008-10-06 Super abrasive tool Expired - Fee Related JP5285381B2 (en)

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TWI772171B (en) * 2021-09-08 2022-07-21 明志科技大學 Protective film and protective film stack for chemical mechanical polishing pad dressers

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KR101920564B1 (en) 2017-07-03 2018-11-20 김성규 Method of manufacturing a cutting tool
CN113001418B (en) * 2021-01-28 2024-01-26 广东朗旗新材料科技有限公司 Ceramic bond of superhard abrasive tool, superhard abrasive tool and preparation method of superhard abrasive tool
CN114905419B (en) * 2022-03-24 2024-03-19 长沙中海瑞超硬材料技术有限公司 Cutting sheet with protective layer and preparation method thereof

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US7201645B2 (en) * 1999-11-22 2007-04-10 Chien-Min Sung Contoured CMP pad dresser and associated methods
JP2001210613A (en) * 2000-01-27 2001-08-03 Allied Material Corp Pad conditioner for cmp
JP4512737B2 (en) * 2005-04-27 2010-07-28 国立大学法人長岡技術科学大学 Ultrasonic vibration processing equipment
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JP2008155362A (en) * 2006-12-01 2008-07-10 Shinshu Univ Electrodeposited diamond tool and manufacturing method for the same
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI772171B (en) * 2021-09-08 2022-07-21 明志科技大學 Protective film and protective film stack for chemical mechanical polishing pad dressers

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