JP5282138B2 - Actuator control device, control method, and actuator drive time measurement method - Google Patents

Abstract

An actuator control device controls an actuator having an attached sensor, said actuator causing reciprocating motion of a movable section between a first drive end at which the detection sensor is attached, and a second drive end. Said device contains: a drive duration measurement section that measures a forward-path drive duration, being the duration from the start of the movement of the movable section toward the first drive end, until a detection signal is output by the detection sensor; an intermediate duration measurement section that moves the movable section positioned at the first drive end toward the second drive end, reverses the movement direction of the movable section at the point in time at which a first intermediate drive duration elapses, said first intermediate drive duration starting from the start of the movement of the movable section toward the second drive end, and measures a second intermediate drive duration starting from the reversal of the movement direction and lasting until the detection signal is output by the detection sensor; and a drive duration computation section that on the basis of the formula below, computes and outputs a return-path drive duration, being the duration needed for the movable section positioned at the first drive end to move to the second drive end. (Return-path drive duration) = (Forward-path drive duration) × (First intermediate drive duration) / (Second intermediate drive duration)

Description

  The present invention provides a control device and a control method for controlling an actuator that reciprocates a movable portion between a first drive end and a second drive end, and a movable portion between the first drive end and the second drive end. The present invention relates to a method of measuring an operation time, that is, an actuator drive time.

  In order to manufacture a substrate on which electronic components are mounted, a printing process in which solder is printed on the electrodes formed on the substrate on which the electronic components are mounted by a printing device, and the components are mounted on the surface on which the solder is printed by a surface mounter. And a reflow process for passing the substrate on which the component is mounted to a reflow furnace are executed in this order. In particular, each of the printing apparatus and the surface mounter is provided with a standby position for waiting the substrate and a work position for performing a predetermined process on the substrate. Then, the substrate transfer device provided in each apparatus carries in the substrate from the standby position to the work position in order to execute a predetermined process, and unloads the substrate from the work position in order to transfer the substrate to the next process. Are executed. An actuator such as an air cylinder is used as a drive source for a stopper that has a function of stopping the substrate at a standby position or a clamper that has a function of holding the substrate. For example, Patent Document 1 describes a technique in which a lever is rotated by operation of an air cylinder to stop a stopper while preventing conveyance of a substrate.

JP 2001-15995 A

  Many air cylinders are used in printing devices and surface mounters, but the operator can manually adjust the speed of the air cylinder by operating the speed controller (speed control valve) connected to each air cylinder. ing. For this reason, when the driving speed varies, there may be a problem that the substrate being transported is pushed up, a problem that tact loss is caused by having extra time, and the like.

  Here, the driving speed of the air cylinder, that is, the forward drive time required for the piston rod of the air cylinder to move from the forward end to the backward end and the backward drive time required to move from the backward end to the forward end are accurately determined. If it can be obtained, the driving speed of the air cylinder can be adjusted with high accuracy based on them, and variations in driving speed can be suppressed. Further, by periodically obtaining the driving time, it is possible to grasp the change with time of the air cylinder, and it is possible to readjust the driving speed of the air cylinder based on them. Furthermore, it is possible to manage the occurrence of an abnormality in the air cylinder, the replacement time, and the like by changing the driving time.

  Thus, the driving time of the air cylinder is very useful information. Therefore, detection sensors that detect that the piston rod is positioned at the forward end and the backward end are attached to both ends of the air cylinder, and the forward drive time and the backward pass side are detected using detection signals output from these two detection sensors. It is conceivable to measure the driving time. However, attaching two detection sensors to each air cylinder is one of the main factors that increase the cost of the apparatus.

  This invention is made in view of the said subject, and provides the technique which derives | leads-out both the forward path side drive time and the return path side drive time of the actuator which reciprocates movable parts, such as an air cylinder, by one detection sensor. With the goal.

  The first aspect of the present invention is movable between the first drive end and the second drive end with a detection sensor that detects that the movable portion is positioned at the first drive end and outputs a detection signal. An actuator control apparatus and control method for controlling an actuator with a sensor that reciprocates a part, and is configured as follows to achieve the above object.

  The actuator control apparatus moves the movable part located at the second drive end toward the first drive end, and starts from the start of the movement of the movable part to the first drive end until the detection sensor outputs a detection signal. A drive time measuring unit for measuring the forward drive time and a movable part located at the first drive end are moved toward the second drive end, and the forward drive time from the start of movement of the movable part to the second drive end. When the shorter first intermediate drive time elapses, the moving direction of the movable part is reversed, and the second intermediate drive time is measured from the reversal of the moving direction until the detection sensor outputs a detection signal. And the return path side drive time required for the movable part located at the first drive end to move to the second drive end is expressed by the following equation: (return path drive time) = (forward path side drive time) × (first intermediate drive) Time) / (second intermediate drive time) It is characterized in that it comprises a drive time calculating unit which calculate and output.

  In addition, in this actuator control method, the movable portion located at the second drive end is moved toward the first drive end, and the detection sensor outputs a detection signal from the start of movement of the movable portion toward the first drive end. A step of measuring the forward path side drive time until the movement, moving the movable part located at the first drive end toward the second drive end, and starting the movement of the movable part toward the second drive end, the forward path side drive A step of stopping the movement of the movable part when the first intermediate drive time shorter than the time has elapsed and positioning the movable part at an intermediate position between the first drive end and the second drive end; and a movable located at the intermediate position Measuring the second intermediate drive time from the start of moving the movable part to the first drive end until the detection sensor outputs the detection signal, and the first drive Return path required for the movable part located at the end to move to the second drive end And a step of calculating and outputting the drive time based on the following formula: (return path side drive time) = (forward path side drive time) × (first intermediate drive time) / (second intermediate drive time) It is said.

  Furthermore, a second aspect of the present invention is a method for measuring the driving time of an actuator that reciprocates a movable part between a first driving end and a second driving end. In order to achieve the above object, the second driving end A step of measuring a forward drive time required for the movable portion to move from the second drive end to the first drive end by detecting that the movable portion located at the first drive end has moved to the first drive end. And the movable portion located at the first drive end is moved toward the second drive end for a first intermediate drive time shorter than the forward drive time and positioned at an intermediate position between the first drive end and the second drive end. And a second intermediate drive required for the movable part to move from the intermediate position to the first drive end by detecting by the detection sensor that the movable part located at the intermediate position has moved to the first drive end. The step of measuring time and the movable part located at the first drive end are the second The return drive time required to move to the moving end is calculated based on the following equation: (return drive time) = (forward drive time) × (first intermediate drive time) / (second intermediate drive time) It is characterized by providing the process to obtain.

  In the invention thus configured (actuator control device, control method, and actuator drive time measurement method), the detection sensor detects that the movable part starting from the second drive end has moved to the first drive end. Thus, the forward drive time is actually measured. On the other hand, it is impossible to actually measure the return path side drive time only by the detection sensor.

Here, when an arbitrary position between the first drive end and the second drive end, that is, an intermediate position is set, the time required for the movable part to reciprocate between the first drive end and the intermediate position, That is, the first intermediate drive time and the second intermediate drive time can be obtained accurately. These ratios are equal to the time required for the movable part to reciprocate between the first drive end and the second drive end, that is, the ratio of the forward drive time and the return drive time, and the following proportional expression: (Outward drive time): (Second intermediate drive time) = (Return drive time): (First intermediate drive time)
Is established. Therefore, the following formula (return path side drive time) = (forward path side drive time) × (first intermediate drive time) / (second intermediate drive time)
Based on this, the return-side drive time is accurately calculated. As described above, the forward drive time and the return drive time are accurately derived using one detection sensor.

  Further, it is desirable to display the forward drive time and the return drive time on the display unit, and this display enables various controls and widens the range of actuator control. For example, when a speed controller is connected to the actuator with sensor, the drive speed of the actuator with sensor can be adjusted by the speed controller at the time of initial setting or maintenance of the actuator with sensor. When adjusting the drive speed of the actuator with sensor in this way, the latest forward drive time measured by the drive time measurement unit is displayed while moving the movable part back and forth between the first drive end and the second drive end. When the display content of the display unit is updated as described above, the operator can appropriately adjust the driving speed on the forward path side by operating the speed controller while viewing the display content.

  The same applies to the return side. That is, the drive time while reciprocating the movable portion between the intermediate position (the position where the movable portion is moved from the first drive end to the second drive end side for the first intermediate drive time) and the first drive end. When the display section is updated so that the latest driving time calculated by the calculation section is displayed, the operator can adjust the driving speed on the return path appropriately by operating the speed controller while viewing the display contents. Can do.

  Furthermore, the storage unit stores the reference range of the forward path side drive time and the backward path side drive time in which proper operation of the sensor-equipped actuator is guaranteed, and the forward path side drive time and the drive time calculation unit measured by the drive time measurement unit calculate When at least one of the inbound drive times determined exceeds the reference range, an abnormality occurrence determination unit that determines that an abnormality has occurred in the actuator with sensor and an abnormality occurrence determination unit determine that an abnormality has occurred. And a notifying unit for notifying abnormality of the actuator with sensor may be provided. As described above, the abnormality of the actuator can be detected at an early stage based on the forward drive time and the backward drive time. As the notification unit, for example, a display unit can be used, and it is possible to accurately notify an operator or the like by displaying that an abnormality has occurred in the sensor-equipped actuator.

  As described above, not only the forward drive time but also the backward drive time can be accurately derived by one detection sensor.

It is a figure which shows one Embodiment of the control apparatus of the actuator concerning this invention. It is a flowchart which shows the operation | movement outline | summary of the control apparatus shown in FIG. It is a flowchart which shows adjustment of an outward path side drive speed. It is a flowchart which shows adjustment of a return path side drive speed. It is a flowchart which shows adjustment of a return path side drive speed. It is a figure which shows typically the relationship between an outward path side drive time, 1st intermediate | middle time, 2nd intermediate drive time, and a return path side drive time.

  In a substrate processing system for mounting electronic components on a substrate, substrate processing devices such as a printing machine, a printing inspection machine, a surface mounting machine, and a mounting inspection machine are arranged side by side along the conveyance path, and each substrate processing apparatus conveys the substrate. A desired process is performed on the substrate transported along the path according to the processing program. For example, in the surface mounter, the substrate transfer mechanism is controlled by a control device that controls the entire apparatus, and the substrate is transferred to a predetermined target position and stopped. At this time, the control device may drive the air cylinder to stop the substrate by positioning the substrate stopper on the substrate conveyance path. Further, another air cylinder may be driven in accordance with a control command from the control device to clamp and fix the substrate at the target position. Then, an electronic component such as an IC (Integrated Circuit) supplied from a component supply unit such as a tape feeder is mounted on the substrate at the target position. In addition, after the component mounting is completed, the air cylinder is driven and controlled by the control device, the clamp release and the stopper retreat are executed, and the board unloading preparation is completed, and then the board unloading is performed. As described above, in the substrate processing apparatus, a large number of air cylinders are used. In this embodiment, the control apparatus controls the air cylinder based on a detection signal output from a single detection sensor attached to the air cylinder. doing. Hereinafter, the configuration and operation of the control device according to the present embodiment will be described in detail with reference to the drawings.

  FIG. 1 is a diagram showing an embodiment of an actuator control apparatus according to the present invention. The control device 1 controls a substrate processing apparatus such as a printing machine or a surface mounter, and drives the air cylinder 2 with a sensor as one operation for executing substrate processing in accordance with a program. Operate stoppers and board clamps. In this air cylinder 2 with a sensor, as shown in the figure, a piston rod 22 is reciprocally provided in a cylinder tube 21 extending in the X direction. In the cylinder tube 21, a head cover 23a is attached to the rear end portion, and a rod cover 23b is attached to the tip end portion. An air supply source 24, which is a pressure supply source, is connected to the head cover 23a and the rod cover 23b via a switching valve 25, and the switching valve 25 is actuated in response to a switching command from the control device 1, whereby the piston The rod 22 is driven in the X direction. In the present embodiment, the (+ X) direction side of the driving end of the piston rod 22 is referred to as a “first driving end”, and the (−X) direction side is referred to as a “second driving end”. An operation for driving from the second driving end to the first driving end is referred to as “forward path side driving”, and an operation for driving from the first driving end to the second driving end is referred to as “return path side driving”.

  In the present embodiment, the detection sensor 26 is attached only to the side end of the cylinder tube 21 on the (+ X) direction side, and the detection signal is detected by detecting that the piston rod 22 is positioned at the first drive end. Output to the control device 1.

  Further, a speed controller (common name: “Speakon”) 28a is inserted in a pipe 27a that forms a pneumatic circuit by connecting the switching valve 25 and the head cover 23a, and also connects the switching valve 25 and the rod cover 23b. A speed controller 28b is inserted in the piping 27b constituting the pneumatic circuit. Therefore, an operator or the like manually operates the speed controllers 28a and 28b, so that the forward drive speed and the return drive speed of the piston rod 22 can be varied.

  The control device 1 includes a memory 11 that stores the above-described program and various data, a CPU (Central Processing Unit) 12 that drives and controls the sensor-equipped air cylinder 2 based on the program and detection signals, and an input / output I / F 13. And a display / operation unit 14 such as a touch panel. The memory 11, the CPU 12, and the input / output I / F 13 are housed in the control box 15, and various signals and data can be exchanged with each other via the bus 16. Further, the input / output I / F 13 is electrically connected to the display / operation unit 14, the switching valve 25, and the detection sensor 26. The CPU 12 receives a detection signal from the detection sensor 26 via the input / output I / F 13 according to a program stored in the memory 11 in advance, and sends a switching command and a display command to the switching valve 25 and the display / operation unit 14, respectively. By outputting, the operation described below is executed. Hereinafter, the drive time derivation process, the drive speed adjustment process, and the abnormality detection process of the sensor-equipped air cylinder 2 by the control device 1 will be described in detail with reference to FIGS. 2 to 6.

  FIG. 2 is a flowchart showing an outline of the operation of the control device shown in FIG. FIG. 3 is a flowchart showing adjustment of the forward drive speed. 4 and 5 are flowcharts showing the adjustment of the return path side driving speed. Further, FIG. 6 is a diagram schematically showing the relationship among the forward drive time, the first intermediate time, the second intermediate drive time, and the backward drive time. The control device 1 controls the air cylinder 2 with a sensor in accordance with a program stored in the memory 11 in advance, thereby adjusting the forward drive speed, adjusting the return drive speed, detecting an abnormality in the air cylinder 2, and the like. Run.

  In this embodiment, as shown in FIG. 3, the CPU 12 of the control device 1 gives a switching command, more specifically a rod advance command, to the switching valve 25 via the input / output I / F 13 (step S11). The piston rod 22 moves to the (−X) direction side. Then, it waits for a predetermined time sufficient for the piston rod 22 to move from the first drive end to the second drive end (step S12). As a result, the piston rod 22 is positioned at the second drive end when a predetermined time elapses, regardless of the position at which the piston rod 22 is positioned at the start of adjustment of the forward drive speed. (Upper broken line area in FIG. 3).

  In this way, with the piston rod 22 positioned at the second drive end, the CPU 12 gives a switching command, more specifically a rod retraction command, to the switching valve 25. As a result, movement of the piston rod 22 in the (+ X) direction is started (step S13). At this timing, the CPU 12 resets the count value of the forward drive time TA to zero, then starts counting and starts measuring the forward drive time TA (step S14). Then, when the piston rod 22 moves back to the first drive end and a detection signal is output from the detection sensor 26 (“YES” in step S15), the CPU 12 stops counting and receives the forward drive time TA. And the forward drive time TA is acquired from the count value at that time. Further, the CPU 12 writes the acquired value in the memory 11 as the latest forward drive time TA, and displays the forward drive time TA on the display / operation unit 14 as shown in the lower broken line area in FIG. The latest value acquired as described above is rewritten (step S17). Thus, in this embodiment, the piston rod 22 is moved from the second drive end to the first drive end, and the movement of the piston rod 22 to the first drive end is detected, that is, the detection sensor 26 is turned on. Thus, the outward drive time TA is actually measured. Therefore, it is possible to accurately measure the outward drive time TA.

In the next step S18, the CPU 12 determines whether or not the adjustment of the forward drive speed by the operator or the like has been completed. That is, when the forward drive time TA displayed on the display / operation unit 14 is a predetermined value, the operator or the like touches an adjustment end button displayed on the display / operation unit 14, for example, an adjustment end operation. On the other hand, while the operation is not performed, the CPU 12 does not determine that the adjustment is finished, and returns to step S11 to repeat a series of operations. During this repetition, the operator or the like operates the speed controllers 28a and 28b to perform the forward drive speed, and the forward drive time TA displayed on the display / operation unit 14 also changes accordingly. For this reason, the operator can operate the speed controllers 28a and 28b while looking at the forward drive time TA displayed on the display / operation unit 14, so that the forward drive time TA can be set to a predetermined value. The outward drive speed is (the outward drive speed) = (distance between the first drive end and the second drive end) / (the outward drive time TA).
Adjusted to This forward drive speed adjustment processing is normally executed at the time of shipment of the apparatus or maintenance. Then, after confirming that the adjustment end operation has been performed, the next step S2 proceeds.

  In step S2, the return-side drive speed adjustment process shown in FIGS. 4 and 5 is executed. In this adjustment process, the CPU 12 measures the forward drive time TA in the same manner as steps S11 to S16 described above (steps S201 to S206). Here, when the time from the adjustment process of the forward path side drive speed to the adjustment process of the backward path side drive speed is short and the forward path side drive speed does not fluctuate even when the adjustment of the backward path side drive speed starts, the forward path side drive time It is not necessary to measure TA. However, immediately before executing the next step S207, it is necessary to position at least the piston rod 22 at the first drive end as shown by the broken line region in FIG.

  In the next step S207, a rod advance command is given to the switching valve 25 in order to move the piston rod 22 located at the first drive end to the (−X) direction side, that is, the second drive end side. As a result, the movement of the piston rod 22 in the (−X) direction is started. After that, when the first intermediate drive time TB that is shorter than the forward drive time TA has elapsed (“YES” in step S208), the CPU 12 gives a rod retraction command to the switching valve 25 to change the movement direction of the piston rod 22. Inverted (step S209). That is, when the first intermediate drive time TB has elapsed, as shown in the upper broken line area in FIG. 5, the piston rod 22 stops moving at an intermediate position between the first drive end and the second drive end, and then (+ X) Start moving in the direction. In the present embodiment, the first intermediate drive time TB is stored in the memory 11 in advance, but the first intermediate drive time TB is calculated by subtracting a predetermined value from the forward drive time TA, and the value is calculated as It may be used.

  Simultaneously with this movement reversal, the CPU 12 resets the count value of the second intermediate drive time TC to zero, and then starts counting and starts measuring the second intermediate drive time TC (step S210). Then, when the piston rod 22 moves backward to the first drive end and a detection signal is output from the detection sensor 26 (“YES” in step S211), the CPU 12 stops counting and receives the second intermediate drive time. The measurement of TC is ended, and the second intermediate drive time TC is acquired from the count value at that time (step S212). Further, the CPU 12 writes the acquired value in the memory 11 as the latest second intermediate drive time TC.

The first intermediate drive time TB is a set value, and the forward drive time TA and the second intermediate drive time TC are values accurately measured by using the detection sensor 26. For any of the values TA, TB, and TC In addition, the CPU 12 can obtain it accurately. Here, in addition to these three types of drive times TA, TB, and TC, the mutual relationship of the drive times including the unacquired return path drive time TD is schematically shown in FIG. Among these, the ratio between the intermediate drive times TB and TC is the time required for the movable part to reciprocate between the first drive end and the second drive end, that is, the ratio between the forward drive time and the return drive time. Equally, the following proportional expression (outward drive time TA): (second intermediate drive time TC) = (return pass side drive time TD): (first intermediate drive time TB)
Is established. Therefore, the following formula (return path side drive time TD) = (forward path side drive time TA) × (first intermediate drive time TB) / (second intermediate drive time TC)
Based on this, it is possible to accurately calculate the return-side drive time TD. Therefore, in this embodiment, in the next step S213, the CPU 12 calculates the return path side driving time TD based on the above equation.

  Subsequently, the CPU 12 writes the calculated return path driving time TD in the memory 11 and displays the return path driving time TD on the display / operation unit 14 as shown in the lower broken line area in FIG. Thus, the calculated value is rewritten (step S214). As described above, in this embodiment, not only the forward drive time TA but also the backward drive time TD can be accurately derived using one detection sensor 26.

Further, in the return path side drive speed adjustment process, similar to the forward path side drive speed adjustment process, the process returns to step S207 and the series of steps is repeated until the speed adjustment by the operator or the like is completed (“YES” in step S215). It is. That is, when the return path driving time TD displayed on the display / operation unit 14 is a predetermined value, the operator or the like touches an adjustment end button displayed on the display / operation unit 14, for example, an adjustment end operation. On the other hand, while the operation is not performed, the CPU 12 does not determine that the adjustment is finished, and returns to step S207 to repeat a series of operations. During this repetition, the operator or the like operates the speed controllers 28a and 28b to perform the return path driving speed, and the return path driving time TD displayed on the display / operation unit 14 also changes accordingly. As described above, the operator can operate the speed controllers 28a and 28b while viewing the return path driving time TD displayed on the display / operation unit 14, so that the return path driving time TD can be set to a predetermined value. The return-side drive speed is (return-side drive speed) = (distance between the first drive end and the second drive end) / (return-side drive time TD).
Adjusted to

  Thus, when the return path side drive speed adjustment process is completed, the abnormality detection process of the air cylinder 2 is executed. As shown in FIG. 2, this abnormality detection process is executed at a predetermined detection timing (step S3), and is performed based on the measured value of the forward drive time TA and the calculated value of the return drive time TD. Is called. The forward drive time TA is measured in the same manner as steps S11 to S16 in the forward drive speed adjustment process and steps S201 to S206 in the return drive speed adjustment process. Further, the return-side drive time TD is calculated in the same manner as steps S207 to S213 in the return-side drive speed adjustment process.

  Then, the CPU 12 determines whether or not the forward drive time TA and the backward drive time TD thus determined are within the drive time reference range in which proper operation of the air cylinder 2 is guaranteed (step S6). This “reference range” is obtained in advance by experiments or the like and is stored in the memory 11. If the drive times TA and TD are within the above ranges, it is determined that the air cylinder 2 is operating normally, and the process returns to step S3. On the other hand, when the drive times TA and TD are out of the above ranges, it can be seen that the air cylinder 2 has changed over time and there is a possibility that an abnormality will occur. Therefore, the CPU 12 displays the fact on the display / operation unit 14 to notify the operator or the like (step S7). Therefore, an operator or the like can determine whether or not maintenance is necessary based on the display content, and inputs the determination result through the display / operation unit 14.

  Upon receiving this input, the CPU 12 returns to step S1 and starts speed adjustment when it is determined by the operator or the like that maintenance is necessary. On the other hand, if it is determined that maintenance is not necessary, the process returns to step S3 and waits for the next measurement timing.

  As described above, according to the present embodiment, the forward drive time TA and the backward drive time TD can be accurately derived using one detection sensor 26.

  Further, since the forward drive time TA and the return drive time TD are displayed on the display / operation unit 14, the drive speed of the air cylinder 2 is adjusted by the speed controllers 28a and 28b at the time of initial setting or maintenance of the air cylinder 2. can do. In particular, since the piston rod 22 is reciprocated between the first drive end and the second drive end, the display content of the display / operation unit 14 is updated so as to display the latest forward drive time TA. The operator or the like can appropriately adjust the driving speed on the forward path side by operating the speed controllers 28a and 28b while viewing the display contents.

  The same applies to the return side. That is, since the piston rod 22 is reciprocated between the intermediate position and the first drive end, the display content of the display / operation unit 14 is updated so as to display the latest return path drive time TD. An operator or the like can appropriately adjust the driving speed on the return path side by operating the speed controllers 28a and 28b while viewing the displayed content. On the return path side, since it is necessary to reversely move the piston rod 22 at the intermediate position before reaching the second drive end, the drive speed of the piston rod 22 when moving from the first drive end to the intermediate position is determined by the speed controller. It is preferable to set a low value in advance by 28a and 28b.

  Furthermore, it is possible to detect an abnormality in the air cylinder 2 at an early stage based on the forward drive time TA and the return drive time TD, and to display it on the display / operation unit 14, An accurate notification can be made.

  As described above, in the present embodiment, the CPU 12 functions as the “driving time measuring unit”, “intermediate time measuring unit”, “driving time calculating unit”, and “abnormality occurrence determining unit” of the present invention. The display / operation unit 14 corresponds to the “display unit” and “notification unit” of the present invention. The piston rod 22 corresponds to the “movable part” of the present invention. The memory 11 corresponds to the “storage unit” of the present invention.

  The present invention is not limited to the above-described embodiments, and various modifications other than those described above can be made without departing from the spirit of the present invention. For example, in the above embodiment, the speed controller 28a, 28b is operated to adjust the driving speed of the piston rod 22 so that the return path side driving time TD becomes a predetermined value. However, the speed may be adjusted as follows. . That is, the first intermediate drive time TB is gradually increased, and when the second intermediate drive time becomes constant, the speed controllers 28a and 28b are operated so that the second intermediate drive time becomes a predetermined value. The driving speed of the piston rod 22 may be adjusted.

  In the above embodiment, the head cover 23a side of the air cylinder 2 is referred to as a “first drive end” and the rod cover 23b side is referred to as a “second drive end”. However, the head cover 23a side and the rod cover 23b side are referred to as “first drive ends”, respectively. The case of “second drive end” and “first drive end” is exactly the same as in the above embodiment.

  In the above-described embodiment, the display / operation unit 14 displays the fact that an abnormality has been detected and notifies the operator or the like. However, the “notification unit” of the present invention is limited to the display / operation unit 14. Instead of this, other notification means such as voice or light may be used.

  Furthermore, in the above-described embodiment, the case where the substrate processing apparatus controls the sensor-equipped air cylinder 2 that drives the substrate stopper, the substrate stopper, etc. has been described. It is not limited, A movable part is attached between the 1st drive end and the 2nd drive end in the state where the detection sensor which detects that a movable part is located in the 1st drive end, and outputs a detection signal is attached. It can be applied to an actuator with a sensor that reciprocally moves.

DESCRIPTION OF SYMBOLS 1 ... Control apparatus 2 ... Air cylinder with a sensor 11 ... Memory (memory | storage part)
12 ... CPU (drive time measurement unit, intermediate time measurement unit, drive time calculation unit, abnormality occurrence determination unit)
14 ... Display / operation part 22 ... Piston rod (movable part)
26 ... Detection sensors 28a, 28b ... Speed controller TA ... Outward drive time TB ... First intermediate drive time TC ... Second intermediate drive time TD ... Return pass drive time

Claims (9)

A sensor for reciprocating the movable portion between the first drive end and the second drive end in a state where a detection sensor for detecting that the movable portion is positioned at the first drive end and outputting a detection signal is attached. An actuator control device for controlling an attached actuator,
The forward drive from the start of movement of the movable part to the first drive end until the detection sensor outputs a detection signal by moving the movable part located at the second drive end toward the first drive end A driving time measuring unit for measuring time;
The movable portion located at the first drive end is moved toward the second drive end, and the first intermediate drive time shorter than the forward drive time from the start of the movable portion movement to the second drive end. An intermediate time measuring unit for reversing the moving direction of the movable part at the time of elapse and measuring a second intermediate driving time from the reversal of the moving direction until the detection sensor outputs a detection signal;
The return path side drive time required for the movable part located at the first drive end to move to the second drive end is expressed by the following equation:
(Return path drive time) = (forward path drive time) × (first intermediate drive time) / (second intermediate drive time)
And a drive time calculation unit that calculates and outputs the output based on the control unit.   The actuator control device according to claim 1, further comprising: a display unit that displays the forward drive time measured by the drive time measurement unit. 3. The actuator control device according to claim 2, wherein a speed controller is connected to the sensor-equipped actuator, and the drive speed of the sensor-equipped actuator is adjusted by the speed controller at the time of initial setting or maintenance of the sensor-equipped actuator. ,
The drive time measurement unit repeatedly measures the forward drive time while reciprocating the movable unit between the first drive end and the second drive end when adjusting the drive speed of the sensor-equipped actuator. And
The said control part is a control apparatus of the actuator which updates a display content so that the newest outward drive time measured by the said drive time measurement part may be displayed.   The actuator control device according to claim 1, further comprising a display unit that displays the return path side driving time calculated by the driving time calculating unit. 5. The actuator control device according to claim 4, wherein a speed controller is connected to the sensor-equipped actuator, and the drive speed of the sensor-equipped actuator is adjusted by the speed controller at the time of initial setting or maintenance of the sensor-equipped actuator. ,
The drive time calculating unit moves the movable unit from the first drive end to the second drive end side during the first intermediate drive time when adjusting the drive speed of the sensor-equipped actuator; Reciprocally calculating the return-side drive time while reciprocating the movable part with one drive end,
The said control part is a control apparatus of the actuator which updates a display content so that the newest return side drive time calculated by the said drive time calculation part may be displayed. A storage unit for storing a reference range of the forward path side driving time and the backward path side driving time in which proper operation of the actuator with sensor is guaranteed;
When at least one of the forward drive time measured by the drive time measurement unit and the return drive time calculated by the drive time calculation unit exceeds the reference range, an abnormality occurs in the sensor-equipped actuator. An abnormality occurrence determination unit that determines that
2. The actuator control device according to claim 1, further comprising: a notification unit configured to notify the abnormality of the actuator with sensor when the abnormality occurrence determination unit determines that an abnormality has occurred.   The actuator control device according to claim 6, wherein the notification unit is a display unit that displays that an abnormality has occurred in the actuator with sensor. A sensor for reciprocating the movable portion between the first drive end and the second drive end in a state where a detection sensor for detecting that the movable portion is positioned at the first drive end and outputting a detection signal is attached. An actuator control method for controlling an attached actuator,
The forward side from the start of moving the movable part to the first drive end until the detection sensor outputs a detection signal by moving the movable part located at the second drive end toward the first drive end Measuring the drive time; and
A first intermediate drive time shorter than the forward drive time from the start of the movement of the movable part to the second drive end by moving the movable part located at the first drive end toward the second drive end The movement of the movable part is stopped when the time elapses, and the movable part is positioned at an intermediate position between the first drive end and the second drive end;
The second intermediate drive from the start of movement of the movable part to the first drive end until the detection sensor outputs a detection signal by moving the movable part located at the intermediate position toward the first drive end. Measuring time;
The return path side drive time required for the movable part located at the first drive end to move to the second drive end is expressed by the following equation:
(Return path drive time) = (forward path drive time) × (first intermediate drive time) / (second intermediate drive time)
And a step of calculating and outputting based on the method. A method for measuring the drive time of an actuator that reciprocates a movable part between a first drive end and a second drive end,
The movable portion moves from the second drive end to the first drive end by detecting that the movable portion located at the second drive end has moved to the first drive end by a detection sensor. Measuring the forward drive time required for
The movable portion positioned at the first drive end is moved toward the second drive end for a first intermediate drive time shorter than the forward drive time, and the first drive end and the second drive end are moved. A step of positioning at an intermediate position;
By detecting that the movable part located at the intermediate position has moved to the first drive end by the detection sensor, a first time required for the movable part to move from the intermediate position to the first drive end is detected. 2 measuring the intermediate drive time;
The return path side drive time required for the movable part located at the first drive end to move to the second drive end is expressed by the following equation:
(Return path drive time) = (forward path drive time) × (first intermediate drive time) / (second intermediate drive time)
A method for measuring the driving time of an actuator, comprising the step of calculating and obtaining based on

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