JP5276489B2 - Substrate processing apparatus, graph drawing cycle determination method and graph drawing method in substrate processing apparatus - Google Patents

Description

  The present invention relates to a substrate processing apparatus used for processing a substrate, a graph drawing period determination method and a graph drawing method in the substrate processing apparatus. Examples of substrates to be processed include semiconductor wafers, liquid crystal display substrates, plasma display substrates, FED (Field Emission Display) substrates, optical disk substrates, magnetic disk substrates, magneto-optical disk substrates, photo A mask substrate is included.

  A substrate processing apparatus used for manufacturing a semiconductor device or the like is provided with a computer, and the state of each part is monitored by the computer at all times during operation. For example, during processing on a substrate, data such as a flow rate of a chemical solution supplied to the substrate is collected by a computer at a constant data collection period. When an abnormality occurs such that the flow rate of the chemical solution falls below a predetermined threshold value, an alarm is output, or the process is urgently stopped when dangerous. As a result, deterioration of the processing quality for the substrate is prevented, and the substrate processing apparatus is prevented from falling into a dangerous state.

  The substrate processing apparatus is provided with an operation panel including a display. Data such as the flow rate of the chemical solution acquired at a constant data collection cycle is displayed as a graph on the display of the operation panel. This graph is redrawn (updated) every time data is acquired by the computer. Thereby, the user of the substrate processing apparatus can check the current state of the substrate processing apparatus in real time by looking at the graph displayed on the display.

JP 11-118528 A

  However, when redrawing a graph, newly acquired data is compared with data acquired in the past to determine the optimal graph axis drawing range (scale), which consumes a lot of computer resources. May be. If a large amount of computer resources is spent on redrawing the graph, there is a shortage of free resources for data acquisition, alarm output, and emergency stop control, and real-time performance of these operations may be impaired.

  An object of the present invention is to provide a substrate processing apparatus, a graph drawing cycle determination method and a graph drawing method in the substrate processing apparatus, which can prevent the occurrence of insufficient free resources.

The substrate processing apparatus according to claim 1 for achieving the above object, a display for displaying data input from a computer, data acquisition means for acquiring predetermined data at a constant data acquisition cycle, and the data acquisition a data buffer for temporarily storing acquired the data is by means, based on the resource usage of the computer that realizes at least the data acquisition unit periodically determines which determines the period for reading the data from said data buffer And a graph drawing means for reading the data from the data buffer at a cycle determined by the cycle determining unit and drawing a graph showing a temporal change of the data on the display.
The substrate processing apparatus according to claim 2, a display, a data acquisition unit that acquires predetermined data at a constant data acquisition cycle, a data buffer that temporarily stores the data acquired by the data acquisition unit, Based on at least one of the CPU usage rate, the memory usage rate, the unused memory capacity, and the number of processes being processed by the CPU, as the resource usage status of the computer realizing the data acquisition means, A period determining means for determining a period for reading the data, and a graph drawing means for reading the data from the data buffer at a period determined by the period determining means and drawing a graph showing a temporal change of the data on the display Including.
The substrate processing apparatus according to claim 3, a display, a data acquisition unit that acquires predetermined data at a constant data acquisition cycle, a data buffer that temporarily stores the data acquired by the data acquisition unit, A period determining means for determining a period for reading the data from the data buffer based on at least a use state of a resource of the computer realizing the data acquiring means so as to become longer when a vacant resource of the computer is reduced; and Graph drawing means for reading out the data from the data buffer at a cycle determined by the cycle determining means and drawing a graph showing temporal changes in the data on the display.

  In this substrate processing apparatus, predetermined data is acquired at a constant data acquisition cycle by the data acquisition means. The acquired data is temporarily stored in the data buffer. The cycle for reading data from the data buffer is determined based on at least the use status of the resources of the computer that implements the data acquisition means. Then, the data is read from the data buffer at the determined cycle, and a graph showing the time change of the data is drawn on the display.

  A graph is not drawn every time data is acquired, but is drawn at a cycle determined based on the use status of computer resources, so that a shortage of free resources can be prevented. That is, when there are few free resources on the computer, the graph drawing cycle is set to a long cycle, so that the resources used for graph drawing can be reduced and free resources can be increased. Occurrence of resource shortage can be prevented.

The substrate processing apparatus according to claim 4, a display, a data acquisition unit that acquires predetermined data at a constant data acquisition cycle, a data buffer that temporarily stores the data acquired by the data acquisition unit, Based on the use status of the resources of the computer that implements at least the data acquisition means, the period determination means for determining the period for reading the data from the data buffer, and the period determined by the period determination means from the data buffer It includes a graph drawing means for reading the data and drawing a graph showing a change in the data over time on the display, and an operation unit operated by the user so that the user inputs a user setting cycle. The cycle determining means sets a system setting cycle according to the usage status of the computer resource, compares the system setting cycle with the user setting cycle input from the operation unit, and the user setting cycle is greater than the system setting cycle. If it is long, the user setting cycle is determined as the cycle for reading data from the data buffer. If the user setting cycle is equal to or less than the system setting cycle, the system setting cycle is determined as the cycle for reading data from the data buffer .

When the user set cycle is longer than the system set cycle, the graph is drawn on the display at the user set cycle set by the user. When the user set cycle is less than the system set cycle, the graph is drawn at the system set cycle. Therefore, it is possible to prevent a shortage of available computer resources for drawing a graph.
The graph drawing cycle determination method according to claim 5 is a method for determining a cycle for drawing a graph showing a temporal change of predetermined data on a display in a substrate processing apparatus including a computer, wherein the resource use of the computer is used. Set in the system setting cycle setting step for setting the system setting cycle according to the situation, the user setting cycle acquisition step for acquiring the user setting cycle input by the operation of the operation unit by the user, and the system setting cycle setting step Comparing the system setting period and the user setting period acquired in the user setting period acquisition step, and when the user setting period is longer than the system setting period, the user setting period is a period for drawing the graph And the user set cycle is less than or equal to the system set cycle Includes a period determining step of determining the system configuration cycle period to draw the graph on the display.

  According to this graph drawing cycle determination method, the system setting cycle is set according to the usage status of the computer resources. Further, a user setting cycle input by the operation of the operation unit by the user is acquired. Then, the system setting period and the user setting period are compared, and when the user setting period is longer than the system setting period, the user setting period is determined as a period for drawing the graph, and the user setting period is equal to or less than the system setting period. In this case, the system setting period is determined as a period for drawing the graph on the display.

Therefore, when the user setting cycle is longer than the system setting cycle, the graph drawing cycle is set to the user setting cycle set by the user, and when the user setting cycle is equal to or less than the system setting cycle, the graph drawing is performed. Therefore, it is possible to prevent the available resources of the computer of the image forming apparatus from being insufficient for drawing the graph.
Graph drawing method according to claim 6, in the substrate processing apparatus comprising a computer for displaying and inputting data to the display, a method for drawing a graph showing a time change in the predetermined data to the display, the data A data acquisition step for acquiring the data at a constant data acquisition cycle, a data buffer step for temporarily storing the data acquired in the data acquisition step in a data buffer, and the use status of the resources of the computer, A cycle determining step for determining a cycle for reading the data from the data buffer; and a graph drawing step for reading the data from the data buffer at a cycle determined in the cycle determining step and drawing the graph on the display. .
The graph drawing method according to claim 7 is a method of drawing a graph showing a time change of predetermined data on a display in a substrate processing apparatus including a computer, wherein the data is acquired at a constant data acquisition cycle. An acquisition step; a data buffer step for temporarily storing the data acquired in the data acquisition step in a data buffer; and a CPU usage rate, a memory usage rate, and a memory unused status as the resource usage status of the computer Based on either the capacity and the number of processes being processed by the CPU, a cycle determining step for determining a cycle for reading the data from the data buffer, and a cycle determined in the cycle determining step, the cycle from the data buffer Read data and draw the graph on the display And a graph drawing step.
The graph drawing method according to claim 8 is a method of drawing a graph showing a temporal change of predetermined data on a display in a substrate processing apparatus including a computer, wherein the data is acquired at a constant data acquisition cycle. An acquisition step, a data buffer step for temporarily storing the data acquired in the data acquisition step in a data buffer, and a cycle for reading the data from the data buffer, based on resource usage of the computer, A period determining step for determining that the free space of the computer becomes longer, and a graph drawing for reading the data from the data buffer and drawing the graph on the display at a period determined in the period determining step Steps.

  According to this graph drawing method, predetermined data is acquired at a constant data acquisition cycle. The acquired data is temporarily stored in the data buffer. The cycle for reading data from the data buffer is determined based on the usage status of the computer resources. Then, the data is read from the data buffer at the determined cycle, and a graph showing the time change of the data is drawn on the display.

  A graph is not drawn every time data is acquired, but is drawn at a cycle determined based on the use status of computer resources, so that a shortage of free resources can be prevented. That is, when there are few free resources on the computer, the graph drawing cycle is set to a long cycle, so that the resources used for graph drawing can be reduced and free resources can be increased. Occurrence of resource shortage can be prevented.

The graph drawing method according to claim 9 is a method for drawing a graph showing a temporal change of predetermined data on a display in a substrate processing apparatus including a computer, wherein the data is acquired at a constant data acquisition cycle. An acquisition step, a data buffer step for temporarily storing the data acquired in the data acquisition step in a data buffer, and a cycle for reading the data from the data buffer are determined based on a usage status of the computer resource A cycle determining step, a graph drawing step of reading the data from the data buffer at a cycle determined in the cycle determining step, and drawing the graph on the display, and a system according to a resource usage situation of the computer System settings for setting the setting interval Further comprising a period setting step, a user setting cycle acquisition step of acquiring user setting period inputted by operating the operation unit by the user. In the cycle determination step, the system setting cycle set in the system setting cycle setting step is compared with the user setting cycle acquired in the user setting cycle acquisition step, and when the user setting cycle is longer than the system setting cycle, The user setting cycle is determined as a cycle for reading data from the data buffer, and when the user setting cycle is equal to or less than the system setting cycle, the system setting cycle is determined as a cycle for reading data from the data buffer .
11. The substrate processing apparatus according to claim 10, wherein the substrate processing apparatus is used for processing a substrate, a display, data acquisition means for acquiring predetermined data at a constant data acquisition cycle, and the data acquisition means. The data acquisition from the data buffer based on a data buffer that temporarily stores the data acquired at the fixed data acquisition cycle and a resource usage of a computer that implements at least the data acquisition means A period determining means for determining a period for reading out the data acquired at a period; and reading out the data acquired at the constant data acquisition period from the data buffer at a period determined by the period determining means; A graph showing the time change of the data acquired in the data acquisition cycle of Demarcating and a graph drawing means.
12. The graph drawing method according to claim 11, wherein a substrate processing apparatus including a computer is a method for drawing a graph showing a temporal change of predetermined data on a display, wherein the data is acquired at a constant data acquisition cycle. A data buffer step for temporarily storing the data acquired at the fixed data acquisition period in the data acquisition step in a data buffer, and from the data buffer based on the resource usage status of the computer. A cycle determining step for determining a cycle for reading the data acquired at a constant data acquisition cycle, and the data acquired at the constant data acquisition cycle from the data buffer at a cycle determined at the cycle determination step. Read the data acquired at the fixed data acquisition cycle. The graph showing the time change of data and a graph drawing step of drawing on the display.

  When the user set cycle is longer than the system set cycle, the graph is drawn on the display at the user set cycle set by the user. When the user set cycle is less than the system set cycle, the graph is drawn at the system set cycle. Therefore, it is possible to prevent a shortage of available computer resources for drawing a graph.

FIG. 1 is a block diagram showing a configuration of a main part of a substrate processing apparatus according to an embodiment of the present invention. FIG. 2 is a flowchart for explaining a method of determining a graph drawing period in the drawing period adjusting unit shown in FIG. FIG. 3 is a table showing an example of a system setting cycle according to the CPU usage rate.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a block diagram showing a configuration of a main part of a substrate processing apparatus according to an embodiment of the present invention.
The substrate processing apparatus 1 is installed in a semiconductor device manufacturing factory or the like, and is used for processing a substrate such as a semiconductor wafer. The processing method in the substrate processing apparatus 1 is not particularly limited, and may be a single-wafer type that processes substrates one by one or a batch type that processes a plurality of substrates at once. When the single wafer type is adopted, the substrate processing apparatus 1 includes, for example, a substrate holding mechanism for holding a substrate, a robot for delivering one substrate to the substrate holding mechanism, and the like. When the batch method is adopted, the substrate processing apparatus 1 includes, for example, a substrate holding mechanism that collectively holds a plurality of substrates, a processing tank that collectively holds the substrates held by the substrate holding mechanism, and the like. Processing for the substrate includes cleaning processing for cleaning the substrate, etching processing for removing a thin film on the surface of the substrate, heat treatment for heating / cooling the substrate, film formation processing for forming a film on the surface of the substrate, and the like. Is exemplified. In the following description, it is assumed that the substrate processing apparatus 1 performs a single wafer cleaning process in which a single substrate is accommodated in a processing chamber and the substrate is cleaned using a chemical solution and pure water.

The substrate processing apparatus 1 includes a computer 2, an operation panel 3 disposed at a position where the user can operate, and an alarm lamp 4 disposed at a position where the user can visually recognize.
The computer 2 includes a CPU, a memory, and the like as a hardware configuration. A part of the storage area of the memory is used as a data buffer 21 for temporarily storing data.

  The operation panel 3 is provided with a display 31 and an input device (not shown) for pressing a button on the screen displayed on the display 31 or inputting a numerical value. The display 31 displays (draws) a graph showing a time change of each data described later. The user can input the graph drawing cycle on the display 31 to the computer 2 as the user setting cycle UT by operating the input device.

The substrate processing apparatus 1 also includes a function processing unit that is realized by the computer 2 executing a program. The function processing unit includes a data collection unit 22, a gas leak monitoring unit 23, an emergency stop control unit 24, a chemical flow rate monitoring unit 25, an alarm output unit 26, a CPU usage rate calculation unit 27, a drawing cycle adjustment unit 28, and a graph drawing. A processing unit 29 is included.
The data collection unit 22 receives data such as the flow rate and temperature of the chemical solution supplied to the substrate, the exhaust flow rate from the processing chamber, and the like from the sensors disposed in each part of the substrate processing apparatus 1 at a certain data collection cycle DT (for example, 100 msec). The data collection unit 22 stores the collected data in the data buffer 21, inputs the exhaust flow rate data to the gas leak monitoring unit 23, and inputs the chemical flow rate data to the chemical flow rate monitoring unit 25.

The gas leakage monitoring unit 23 constantly monitors the exhaust flow rate data input from the data collection unit 22. The gas leakage monitoring unit 23 determines that a gas leakage from the processing chamber or the exhaust piping connected to the processing chamber has occurred when the flow rate of the exhaust gas from the processing chamber falls below a predetermined flow rate. An emergency stop command signal is input to the stop control unit 24.
The emergency stop control unit 24 urgently stops the operation of each unit of the substrate processing apparatus 1 in response to the input of the emergency stop command signal from the gas leak monitoring unit 23.

The chemical liquid flow rate monitoring unit 25 constantly monitors the chemical liquid flow rate data input from the data collecting unit 22. Then, when the flow rate of the chemical solution supplied to the substrate falls below a predetermined flow rate, the chemical solution flow rate monitoring unit 25 determines that an abnormality has occurred in the chemical solution supply system, and sends an alarm output signal to the alarm output unit 26. input.
In response to the input of the alarm output signal from the chemical liquid flow rate monitoring unit 25, the alarm output unit 26 stops the supply of the chemical liquid to the substrate and turns on the alarm lamp 4.

The CPU usage rate calculation unit 27 calculates a CPU usage rate, which is an example of the resource usage status of the computer 2, and inputs the calculated CPU usage rate to the drawing cycle adjustment unit 28.
In addition to the CPU usage rate from the CPU usage rate calculation unit 27, the user setting cycle UT that is input by the user operating the operation panel 3 is input to the drawing cycle adjustment unit 28 via the memory. Yes. The drawing cycle adjustment unit 28 determines a graph drawing cycle (graph drawing cycle) GT on the display 31 of the operation panel 3 based on the CPU usage rate and the user setting cycle UT. A specific method for determining the graph drawing period GT will be described in detail later. Then, the drawing cycle adjustment unit 28 reads the data stored in the data buffer 21 for each graph drawing cycle GT and inputs the read data to the graph drawing processing unit 29. That is, each data collected by the data collection unit 22 during one cycle of the graph drawing cycle GT is stored in the data buffer 21, and the drawing cycle adjustment unit 28 stores 1 stored in the data buffer 21. Each data for the period is input to the graph drawing processing unit 29.

  Since there is a limit to the amount of data that can be stored in the data buffer 21, the data amount collected by the data collection unit 22 during one cycle of the graph drawing cycle GT is stored in the data buffer 21. It is not set to a long period that exceeds the maximum possible data amount. Therefore, when the user setting cycle UT is set to such a long cycle, the setting is invalidated.

  When data is input from the drawing cycle adjustment unit 28, the graph drawing processing unit 29 compares the input data with data input in the past, and determines the optimal graph axis drawing range (scale). Then, a graph showing the time change of the data is drawn on the display 31 at the optimum scale. In addition, as a display form of the graph, the user may operate the input device of the operation panel 3 to switch the screen of the display 31 so that the graph of each data may be displayed one by one or all the data. May be displayed together on one screen of the display 31.

FIG. 2 is a flowchart showing a method of determining a graph drawing period in the drawing period adjustment unit 28. FIG. 3 is a table showing an example of a system setting cycle according to the CPU usage rate.
When the power of the substrate processing apparatus 1 is turned on, the data collection period DT is acquired (step S1).
Further, the user setting period UT input from the operation panel 3 is acquired (step S2). The acquisition of the user setting cycle UT means that the user setting cycle UT input from the operation panel 3 and stored in the memory is read from the memory.

Further, the CPU usage rate is acquired from the CPU usage rate calculation unit 27 (step S3).
Then, a system setting cycle ST corresponding to the CPU usage rate is calculated (step S4).
Specifically, as shown in FIG. 3, when the CPU usage rate is 0% or more and less than 20%, the system setting cycle ST = DT × 10 is calculated by multiplying the data collection cycle DT by 10. . When the CPU usage rate is 20% or more and less than 30%, the system setting cycle ST = DT × 20 is calculated by multiplying the data collection cycle DT by 20. When the CPU usage rate is 30% or more and less than 50%, the system setting cycle ST = DT × 50 is calculated by multiplying the data collection cycle DT by 50. When the CPU usage rate is 50% or more, the system setting cycle ST = DT × 100 is calculated by multiplying the data collection cycle DT by 100.

  For example, when the data collection cycle DT is 100 msec and the CPU usage rate is 0% or more and less than 20%, the system setting cycle ST is calculated as 1 sec (= 1000 msec), and the CPU usage rate is 20% or more. When it is less than 30%, the system setting cycle ST is calculated as 2 sec (= 2000 msec), and when the CPU usage rate is 30% or more and less than 50%, the system setting cycle ST is 5 sec (= 5000 msec). When the CPU usage rate is 50% or more, the system setting cycle ST is calculated as 10 sec (= 10000 msec).

Subsequently, the user setting period UT and the system setting period ST are compared, and it is determined whether or not the user setting period UT is longer than the system setting period ST (step S5).
When the user setting period UT is longer than the system setting period ST (YES in step S5), the user setting period UT is determined as the graph drawing period GT (step S6).
On the other hand, when the user setting period UT is equal to or shorter than the system setting period ST (NO in step S5), the system setting period ST is determined as the graph drawing period GT (step S7).

When the graph drawing period GT is thus determined, the load monitoring timer is reset (step S8). Then, timing by the load monitoring timer is newly started. The load monitoring timer can be constituted by, for example, a RAM counter provided in the memory of the computer 2 and an oscillator that generates a clock.
When the time measured by the load monitoring timer reaches a predetermined time (for example, 60 sec), a timer event occurs. When a timer event occurs (YES in step S9), the user setting period UT and the CPU usage rate are reacquired (steps S2 and S3), and the graph drawing period GT is determined again (steps S4 to S7). When the graph drawing period GT is determined again, the load monitoring timer is once reset and then restarted.

Between the determination of the graph drawing period GT and the occurrence of a timer event, it is repeatedly checked whether or not the power of the substrate processing apparatus 1 has been turned off (step S10), and when the power is turned off, this graph drawing period GT. The process for determining is completed.
As described above, in the substrate processing apparatus 1, data such as a chemical flow rate is acquired by the data collection unit 22 at a constant data collection cycle DT. The acquired data is temporarily stored in the data buffer 21. The graph drawing cycle GT that coincides with the cycle for reading data from the data buffer 21 is determined based on the CPU usage rate, which is an example of the resource usage status of the computer 2. Then, data is read from the data buffer 21 at the determined graph drawing cycle GT, and a graph showing the time change of the data is drawn on the display 31 of the operation panel 3.

  A graph is not drawn every time data is acquired, but a graph is drawn at a graph drawing period GT determined based on the CPU usage rate of the computer 2, so that a shortage of free resources can be prevented. . That is, when the computer 2 has few free resources, the graph drawing cycle GT is set to a long cycle, so that the resources used for drawing the graph can be reduced and free resources can be increased. Occurrence of resource shortage can be prevented.

  Specifically, when determining the graph drawing period GT, a system setting period ST corresponding to the CPU usage rate of the computer 2 is calculated. Further, the user setting cycle UT input by the user operating the operation panel 3 is acquired. Then, the system setting period ST and the user setting period UT are compared, and if the user setting period UT is longer than the system setting period ST, the user setting period UT is determined as the graph drawing period GT, and the user setting period UT Is less than or equal to the system setting cycle ST, the system setting cycle ST is determined as the graph drawing cycle GT.

  Therefore, when the user setting period UT is longer than the system setting period ST, the graph drawing period GT can be set as the user setting period UT desired by the user, and the user setting period UT is equal to or less than the system setting period ST. In this case, since the graph drawing cycle GT is set to the system setting cycle ST, it is possible to prevent the free resources of the computer 2 from being insufficient for drawing the graph. As a result, the resources of the computer 2 can be used for data acquisition, alarm output, and emergency stop control, and real-time performance of these operations can be ensured.

As mentioned above, although one Embodiment of this invention was described, this invention can also be implemented with another form.
For example, the CPU usage rate is taken up as an example of the usage status of the computer resource. Other examples of the usage status of the resource include the usage rate of the memory (physical memory) of the computer and the unused capacity of the memory. it can. The number of processes being processed by the CPU also indirectly indicates the resource usage status.

Further, an example in which the system setting cycle is set to an integer multiple of the data collection cycle has been described, but the system setting cycle may not be an integer multiple of the data collection cycle as long as it is longer than the data collection cycle.
In addition, various design changes can be made within the scope of matters described in the claims.

DESCRIPTION OF SYMBOLS 1 Substrate processing apparatus 2 Computer 3 Operation panel (operation part)
21 Data buffer 22 Data collection unit (data acquisition means)
28 Drawing cycle adjusting unit (cycle determining means)
29 Graph drawing processing unit (graph drawing means)
31 display

Claims (11)

A substrate processing apparatus used for processing a substrate,
A display for displaying data input from a computer ;
Data acquisition means for acquiring predetermined data at a constant data acquisition cycle;
A data buffer for temporarily storing the data acquired by the data acquisition means;
Based on the usage of the resource computer realizing at least the data acquisition unit, a period determining means for determining a period for reading the data from said data buffer,
A substrate processing apparatus, comprising: a graph drawing unit that reads the data from the data buffer at a cycle determined by the cycle determination unit and draws a graph indicating a temporal change of the data on the display.   A substrate processing apparatus used for processing a substrate,
  Display,
  Data acquisition means for acquiring predetermined data at a constant data acquisition cycle;
  A data buffer for temporarily storing the data acquired by the data acquisition means;
  Based on at least one of the CPU usage rate, the memory usage rate, the unused memory capacity, and the number of processes being processed by the CPU, as the resource usage status of the computer realizing the data acquisition means, Period determining means for determining a period for reading the data;
  A substrate processing apparatus, comprising: a graph drawing unit that reads the data from the data buffer at a cycle determined by the cycle determination unit and draws a graph indicating a temporal change of the data on the display.   A substrate processing apparatus used for processing a substrate,
  Display,
  Data acquisition means for acquiring predetermined data at a constant data acquisition cycle;
  A data buffer for temporarily storing the data acquired by the data acquisition means;
  A period determining means for determining a period for reading the data from the data buffer based on at least a use state of a resource of the computer realizing the data acquiring means so as to become longer when a vacant resource of the computer is reduced;
  A substrate processing apparatus, comprising: a graph drawing unit that reads the data from the data buffer at a cycle determined by the cycle determination unit and draws a graph indicating a temporal change of the data on the display. A substrate processing apparatus used for processing a substrate,
Display,
Data acquisition means for acquiring predetermined data at a constant data acquisition cycle;
A data buffer for temporarily storing the data acquired by the data acquisition means;
A period determining means for determining a period for reading the data from the data buffer, based on at least a use situation of a resource of a computer realizing the data acquiring means;
Graph drawing means for reading the data from the data buffer at a cycle determined by the cycle determining means, and drawing a graph showing a temporal change of the data on the display;
In which the user inputs the user setting period, and a manipulation portion to be operated by the user,
The cycle determining means determines a system setting cycle according to the usage status of the computer resource, compares the system setting cycle with a user setting cycle input from the operation unit, and the user setting cycle is When longer than the system setting period, the user setting period is determined as a period for reading the data from the data buffer, and when the user setting period is equal to or less than the system setting period, the system setting period is determining from the data buffer to the period for reading the data, the substrate processing apparatus. In a substrate processing apparatus comprising a computer, a method for determining a cycle for drawing a graph showing a time change of predetermined data on a display,
A system setting cycle setting step for setting a system setting cycle according to the use status of the computer resource;
A user setting cycle acquisition step for acquiring a user setting cycle input by an operation of the operation unit by the user;
When the system setting period set in the system setting period setting step and the user setting period acquired in the user setting period acquisition step are compared, and the user setting period is longer than the system setting period, A cycle determining step of determining a user set cycle as a cycle for drawing the graph and determining the system set cycle as a cycle for drawing the graph on the display when the user set cycle is equal to or less than the system set cycle. And a graph drawing cycle determination method. In the substrate processing apparatus comprising a computer for displaying and inputting data to the display, a method for drawing a graph showing a time change in the predetermined data to the display,
A data acquisition step of acquiring the data at a constant data acquisition cycle;
A data buffer step of temporarily storing the data acquired in the data acquisition step in a data buffer;
A period determining step for determining a period for reading the data from the data buffer, based on a use state of the resource of the computer;
A graph drawing method including: a graph drawing step of reading the data from the data buffer at a cycle determined in the cycle determining step and drawing the graph on the display.   In a substrate processing apparatus provided with a computer, a method for drawing a graph showing a temporal change of predetermined data on a display,
  A data acquisition step of acquiring the data at a constant data acquisition cycle;
  A data buffer step of temporarily storing the data acquired in the data acquisition step in a data buffer;
  The cycle for reading the data from the data buffer is determined based on any one of the CPU usage rate, the memory usage rate, the unused memory capacity, and the number of processes being processed by the CPU as the resource usage status of the computer. A cycle determining step to perform,
  A graph drawing method including: a graph drawing step of reading the data from the data buffer at a cycle determined in the cycle determining step and drawing the graph on the display.   In a substrate processing apparatus provided with a computer, a method for drawing a graph showing a temporal change of predetermined data on a display,
  A data acquisition step of acquiring the data at a constant data acquisition cycle;
  A data buffer step of temporarily storing the data acquired in the data acquisition step in a data buffer;
  A period determining step for determining a period of reading the data from the data buffer based on a use state of the resource of the computer so as to become longer when a vacancy of the resource of the computer decreases;
  A graph drawing method including: a graph drawing step of reading the data from the data buffer at a cycle determined in the cycle determining step and drawing the graph on the display. In a substrate processing apparatus provided with a computer, a method for drawing a graph showing a temporal change of predetermined data on a display,
A data acquisition step of acquiring the data at a constant data acquisition cycle;
A data buffer step of temporarily storing the data acquired in the data acquisition step in a data buffer;
A period determining step for determining a period for reading the data from the data buffer, based on a use state of the resource of the computer;
A graph drawing step of reading the data from the data buffer at a cycle determined in the cycle determining step, and drawing the graph on the display;
A system setting cycle setting step for setting a system setting cycle according to the use status of the computer resource;
And a user setting cycle acquisition step of acquiring user setting period inputted by operating the operation unit by the user,
In the period determining step, the system setting period set in the system setting period setting step is compared with the user setting period acquired in the user setting period acquiring step, and the user setting period is more than the system setting period. If it is long, the user setting cycle is determined as a cycle for reading the data from the data buffer. If the user setting cycle is equal to or less than the system setting cycle, the system setting cycle is transferred from the data buffer to the data. The graph drawing method , which is determined by the period for reading out.   A substrate processing apparatus used for processing a substrate,
  Display,
  Data acquisition means for acquiring predetermined data at a constant data acquisition cycle;
  A data buffer for temporarily storing the data acquired at the constant data acquisition cycle by the data acquisition means;
  A period determining means for determining a period for reading out the data acquired at the constant data acquisition period from the data buffer, based on at least a use situation of a computer resource realizing the data acquiring means;
  Reading the data acquired at the constant data acquisition cycle from the data buffer at a cycle determined by the cycle determination means, and a graph showing a time change of the data acquired at the constant data acquisition cycle A substrate processing apparatus including a graph drawing means for drawing on a display.   In a substrate processing apparatus provided with a computer, a method for drawing a graph showing a temporal change of predetermined data on a display,
  A data acquisition step of acquiring the data at a constant data acquisition cycle;
  A data buffer step for temporarily storing the data acquired in the data acquisition step at the constant data acquisition cycle in a data buffer;
  A period determining step for determining a period for reading out the data acquired at the constant data acquisition period from the data buffer, based on a use state of the computer resource;
  Reading the data acquired at the constant data acquisition cycle from the data buffer at the cycle determined in the cycle determination step, the graph showing the time change of the data acquired at the constant data acquisition cycle A graph drawing method including a graph drawing step of drawing on the display.

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