JP5270399B2 - Magnetic pulse compression circuit and pulse power supply device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To miniaturize a saturable reactor by satisfying a voltage time product necessary for a pulse applied to a load, by satisfying an inductance condition that a rising time of the pulse applied to the load is shortened, and by reducing a cross section of a core, in the saturable reactor which constitutes a magnetic switch of a magnetic pulse compression circuit. <P>SOLUTION: In setting an inductance before saturation of the voltage-divided saturable reactor of the magnetic pulse compression circuit, the composite inductance of the inductance of the saturable reactor and the equivalent inductance of a choke coil of a reset circuit is set sufficiently smaller than the inductance before saturation necessary for the magnetic switch of the magnetic pulse compression circuit, and thus, the saturable reactor necessary for the magnetic switch can further be miniaturized compared with the case that the inductance is set by only the inductance of the voltage-divided saturable reactor, and by setting the inductance of the saturable reactor necessary for the magnetic switch to a smaller value, the cross section of the saturable reactor is reduced, and the size of the saturable reactor is reduced. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a pulse power supply device that generates a high-voltage, narrow-width pulse and a magnetic pulse compression circuit used for the pulse power supply device, and more particularly to miniaturization of a saturable reactor used for magnetic pulse compression.

  For power sources used for lithography light sources, ozone generators, water treatment, etc., high voltage, large current and narrow pulses are required.

  In a pulse power supply, for example, energy is transferred by transferring capacity between two capacitors of equal capacitance connected by inductance, and energy is transferred from a capacitor discharge circuit having a relatively large inductance to a capacitor discharge circuit having a small inductance. Thus, a capacitance transfer circuit that performs pulse compression is known, and a capacitance transfer circuit that transfers energy while increasing or decreasing the voltage by changing the ratio of the two capacitor capacities is also known.

  In addition, since a large current flows instantaneously in a circuit used in a pulse power supply device, it is difficult to turn on and off the circuit with only a semiconductor switch element, and a magnetic switch that performs pulse compression using a magnetic switch of a saturable reactor instead of or in combination. A pulse compression circuit or the like is known (see Non-Patent Document 1).

  In addition, a configuration in which a magnetic reset circuit is provided for a saturable reactor that constitutes a magnetic switch when a repetitive pulse is generated is known. The magnetic reset circuit increases the voltage time product until the next magnetic switch operation by flowing a reverse excitation current through the core of the saturable reactor and performing a magnetic reset after the magnetic switch operation. Downsizing and pulse compression are possible (see Patent Documents 1 and 2).

  In this magnetic reset circuit, a configuration is known in which a choke coil is provided to suppress an induced current generated when a magnetic switch of a saturable reactor is operated. An excessive current flows due to a voltage induced before the choke coil is saturated. The reset circuit is protected by limiting the induced current flowing by the voltage induced in the reset winding applied to the saturable reactor.

JP 2007-104797 A Japanese Patent Laid-Open No. 3-177060 Japanese Patent No. 3605896 Japanese Unexamined Patent Publication No. 7-5938

EEText High Voltage Pulse Power Engineering Editor Hidenori Akiyama Publisher Ohm Co., P93-P100

  In the magnetic pulse compression circuit described above, the energy transfer time is proportional to the square root of the product of the inductance of the saturable reactor and the capacitance of the capacitor. Therefore, in order to shorten the rise time of the pulse in the magnetic pulse compression circuit, the saturable reactor The inductance after saturation is required to be small.

  On the other hand, although a high voltage is applied to the saturable reactor, a voltage-time product (V · t product) having a large voltage and time is required in order not to saturate for a time sufficiently longer than the energy transfer time.

  The voltage time product (V · t product) is expressed by the product (N · ΔB · A) of the cross-sectional area A of the core, the number N of turns of the coil, and the magnetic flux density ΔB when transitioning from unsaturated to saturated. In the equation of the product of the cross-sectional area A and the number of turns N of the core, ΔB is determined by the ferromagnetic material of the core of the saturable reactor, so A · N is based on the product of the voltage V applied to the load and the time width. Determined.

The saturable reactor SL ₁ having the circuit configuration in the prior art shown in FIG. 7 has a saturable reactor in order to satisfy the condition that the voltage time product (V · t product) is large and the inductance after saturation is small. It is necessary to reduce the number of turns N and design a large cross-sectional area A of the core.

  Further, the transformer TR shown in FIG. 7 has a problem that the core used in the normal transformer has a residual magnetic flux and cannot satisfy the voltage-time product required at the time of pulse output of the next cycle.

  In order to solve this problem of residual magnetic flux, it is known to provide a reset circuit that resets the magnetic flux of the core. A specific example of a transformer equipped with a reset circuit is a saturable transformer using a saturable core.

Here, since the saturable core has a very high magnetic permeability, the mutual inductance of the saturable transformer shows a high value. At this time, the saturable reactor SL ₁ shown in FIG. 7 must bear all applied voltages during the pulse compression operation. Therefore, it is necessary to select a sufficiently large inductance value for the saturable reactor SL ₁ before saturation with respect to the mutual inductance of the saturable transformer. At the same time, it is necessary to have a voltage-time product that does not saturate for a time sufficiently longer than the energy transfer time of the magnetic pulse compression circuit.

Furthermore, in order to shorten the pulse rise time in the magnetic pulse compression circuit, the saturation inductance of the saturable reactor SL ₁ must be small.

  Therefore, when the voltage-time product of the saturable reactor is increased and the inductance after saturation is decreased, there is a problem that the cross-sectional area increases and the size increases.

  On the other hand, the choke coil provided in the magnetic reset circuit for resetting the saturable reactor is set based on the induced voltage generated in the saturable reactor after the saturable reactor is designed.

  Therefore, the present invention solves the above-mentioned conventional problems, and the saturable reactor constituting the magnetic switch in the magnetic pulse compression circuit satisfies the voltage time product required for the pulse applied to the load, and the pulse to be applied The purpose is to satisfy the inductance condition of shortening the rise time and to further reduce the size of the saturable reactor.

  The present invention includes two aspects: an aspect of a magnetic pulse compression circuit and an aspect of a pulse power supply device including the magnetic pulse compression circuit.

  The present invention reduces the inductance of the saturable reactor by using the choke coil provided in the reset circuit for resetting the saturable reactor of the magnetic pulse compression circuit in the magnetic pulse compression circuit, thereby reducing the size of the saturable reactor. And

  The present invention utilizes the fact that the inductance of the choke coil provided in the reset circuit acts as an inductance by the transformer action by the reset winding when the reset circuit side is viewed from the magnetic pulse compression circuit side. The equivalent inductance of the saturable reactor of the magnetic pulse compression circuit is expressed as a combined inductance in which the inductance of the saturable reactor and the inductance projected on the magnetic pulse compression circuit side of the choke coil of the reset circuit are connected in parallel. The equivalent inductance of the choke coil is represented by a value obtained by multiplying the inductance of the choke coil by the square of the turn ratio of the reset winding.

  In the magnetic pulse compression circuit of the present invention, in setting the inductance of the saturable reactor for voltage division, by setting the combined inductance of the inductance of the saturable reactor for voltage division and the equivalent inductance of the choke coil of the reset circuit, The inductance value required for the magnetic switch of the magnetic pulse compression circuit can be set small, and the inductance is set to be smaller than that in the case where it is set only by the inductance of the saturable reactor. As a result, the inductance of the saturable reactor required for the magnetic switch can be set to a small value, and the cross-sectional area of the saturable reactor required for the magnetic switch is reduced to reduce the size.

  The magnetic pulse compression circuit according to the present invention is a magnetic pulse compression circuit that compresses the current discharged from the charging capacitor by the magnetic switch operation of the saturable reactor and flows the pulse current, and can be configured in two configurations.

  The first configuration of the magnetic pulse compression circuit of the present invention is applied to a configuration in which the voltage applied to the saturable reactor constituting the magnetic switch is increased by connecting a saturable reactor for voltage division to the load in parallel. The reset winding is applied to each of the saturable reactor constituting the magnetic switch of the magnetic pulse compression circuit and the saturable reactor for voltage division, and the reset circuit is connected through the reset winding. It is a configuration.

  The magnetic pulse compression circuit of the first configuration includes a reset circuit that resets the saturable reactor of the magnetic pulse compression circuit from a saturated state to an unsaturated state, and this reset circuit connects a choke coil between the reset winding and the DC power supply. To do.

  In the first configuration, the magnetic pulse compression circuit is connected in parallel to the load between the first saturable reactor connected in series between the charging capacitor and the load, and between the first saturable reactor and the load. And a second saturable reactor.

  Here, the equivalent inductance of the first saturable reactor is set by a combined impedance formed by equivalently connecting the first saturable reactor of the magnetic pulse compression circuit and the choke coil of the first reset circuit in parallel. The equivalent inductance of the second saturable reactor is set by a combined impedance formed by equivalently connecting the second saturable reactor of the magnetic pulse compression circuit and the choke coil of the second reset circuit in parallel. .

  In this inductance setting, the inductance of the second saturable reactor is set to a value smaller than the inductance value that satisfies the voltage-time product required for the magnetic switch.

  Further, the voltage division ratio between the first saturable reactor and the second saturable reactor is determined by the inductance of the choke coil of the first reset circuit and the inductance of the choke coil of the second reset circuit.

  According to this first configuration, the inductance of the saturable reactor for voltage division is set by the parallel combined impedance formed by equivalently connecting the saturable reactor of the magnetic pulse compression circuit and the choke coil of the reset circuit in parallel. By reducing the parallel combined impedance, the inductance can be reduced by setting the inductance of the saturable reactor on the magnetic switch side of the magnetic pulse compression circuit to be small.

  The second configuration of the magnetic pulse compression circuit according to the present invention is a configuration in which a pulse transformer is used as a saturable reactor for voltage division in the first configuration described above.

  The magnetic pulse compression circuit of the second configuration is connected in parallel to the load between the first saturable reactor connected in series between the charging capacitor and the load, and the first saturable reactor and the load. And a pulse transformer composed of a saturable reactor.

  Here, the equivalent inductance of the first saturable reactor is set by a combined impedance formed by equivalently connecting the first saturable reactor of the magnetic pulse compression circuit and the choke coil of the first reset circuit in parallel. The equivalent inductance of the pulse transformer is set by a combined impedance formed by equivalently connecting the pulse transformer of the magnetic pulse compression circuit and the choke coil of the second reset circuit in parallel.

  In this inductance setting, the mutual inductance of the pulse transformer is set to a value smaller than the inductance value that satisfies the voltage-time product required for the magnetic switch.

  The voltage division ratio between the first saturable reactor and the pulse transformer is determined by the inductance of the choke coil of the first reset circuit and the inductance of the choke coil of the second reset circuit.

  According to the second configuration, similarly to the first configuration, the mutual inductance of the voltage dividing pulse transformer is formed by equivalently connecting the pulse transformer of the magnetic pulse compression circuit and the choke coil of the reset circuit in parallel. It is possible to reduce the inductance value by setting the inductance of the saturable reactor on the magnetic switch side of the magnetic pulse compression circuit to be small by setting the parallel synthetic impedance to be small.

  An aspect of the pulse power supply device of the present invention is a pulse power supply device that supplies a pulse having a high voltage and a narrow current width to a load, and includes a charging capacitor charged by a DC power supply and a magnetic pulse compression circuit of the present invention. The magnetic pulse compression circuit can have the two configurations described above.

  According to the aspect of the present invention, the cost can be reduced by downsizing the core of the saturable reactor used in the magnetic pulse compression circuit.

  Further, according to the aspect of the present invention, since the reset circuit side has a lower voltage than the magnetic pulse compression circuit side, the voltage division can be adjusted at a low voltage by the inductance of the choke coil on the reset circuit side. Processing becomes easy and costs can be reduced.

  As described above, according to the pulse power supply device and the magnetic pulse compression circuit of the present invention, in the saturable reactor constituting the magnetic switch of the magnetic pulse compression circuit, the voltage time product necessary for the pulse applied to the load is satisfied, In addition, the inductance condition of shortening the rise time of the pulse to be applied is satisfied, and further, the saturable reactor can be reduced in size.

It is a figure for demonstrating the outline of the 1st structure of the pulse power supply device and magnetic pulse compression circuit of this invention. It is a figure represented to the equivalent circuit of the magnetic pulse compression circuit of the 1st structure of this invention. It is a figure for demonstrating the outline of the 2nd structure of the pulse power supply device and magnetic pulse compression circuit of this invention. It is a figure showing the equivalent circuit of the magnetic pulse compression circuit of the 2nd structure of this invention. It is a signal diagram of the pulse power supply device of the present invention. It is an operation | movement figure of the magnetic pulse compression circuit of the 1st structure of this invention. It is a figure which shows one structural example of the prior art of the magnetic pulse compression circuit which performs pulse compression using the magnetic switch of a saturable reactor.

First configuration shown in FIG. 1 of the present invention, the magnetic pulse compression circuit, by parallel connection of a saturable reactor SL _b voltage voltage-dividing the load, the saturable reactor constituting a magnetic switch unsaturation a structure used in the configuration to increase the voltage applied to the SL _a, saturable reactors SL a constituting the magnetic switch of the magnetic pulse compression _circuit, and a reset winding for each of the saturable reactors SL _b voltage voltage-dividing In this configuration, a reset circuit is connected via the reset winding.

[First configuration example]
First, a first configuration example of the pulse power supply device and the magnetic pulse compression circuit of the present invention will be described. FIG. 1 is a diagram for explaining an outline of a first configuration of a pulse power supply device and a magnetic pulse compression circuit according to the present invention, and FIG. 2 is an equivalent diagram of the magnetic pulse compression circuit 4a shown in FIG. .

In FIG. 1, a pulse power supply device 1A of the present invention compresses a pulse generation circuit 3 connected to a charger 2, a pulse width of a pulse generated by the pulse generation circuit 3, and loads a compressed narrow pulse current. 5 includes a magnetic pulse compression circuit 4a to be supplied to 5 and reset circuits 6a, 6b and 6c. Reset circuit 6a, a saturable reactor SL _P of the pulse generating circuit 3 is reset from saturation in unsaturated state, the reset circuit 6b is unsaturated state saturable reactor SL _a magnetic pulse compression circuit 4a from a saturated state reset, the reset circuit 6c resets the saturable reactor SL _b of the magnetic pulse compression circuit 4a from a saturated state to an unsaturated state.

FIG. 2 shows an equivalent circuit equivalently representing the magnetic pulse compression circuit 4a of FIG. In the equivalent circuit shown in FIG. 2, the inductance of the pre-saturation of the saturable reactor SL _a and _{L 11,} are the inductance of the previous saturation of the saturable reactor SL _b and _{L 21.}

The saturable reactor SL _a, winding constituting the winding and the reset circuit 6b constituting the circuit of the magnetic pulse compression circuit 4a is applied, also the circuit of the magnetic pulse compression circuit 4a in the saturable reactor SL _b Since the windings constituting the reset circuit 6c and the windings constituting the reset circuit 6c are applied, the transaction is performed between the saturable reactor winding and the reset circuit winding.

The inductance L ₁₀₁ of the choke coil L _cb of the reset circuit 6b and the inductance L ₁₀₂ of the choke coil L _cc of the reset circuit 6c are respectively converted inductance L ₁₁₁ (= L ₁₀₁ · n ₁ ² ) when viewed from the magnetic pulse compression circuit 4a side. , L ₁₁₂ (= L ₁₀₂ · n ₂ ² ). Accordingly, the impedance of the saturable reactor SL _a can be represented by the combined impedance _{L 1} of the impedance _{L 11} of the saturable reactor SL _a itself and in terms of inductance _{L 111,} impedance of the saturable reactor SL _b is saturable reactor It can be represented by a combined impedance L ₂ of the impedance L ₁₂ of the SL _b itself and the converted inductance L ₁₁₂ .

Pulse generation circuit 3, to the charger 2, a circuit for a saturable reactor SL _P and the pulse transformer PT ₁ and the semiconductor switch SW are connected in series, and connected in parallel with the capacitor C _P. After initial charging of the capacitor C _P by the charger 2 by ON control of the semiconductor switch SW, and supplies the pulse current from the capacitor C _P to the pulse transformer PT _1. The saturable reactor SL _p reduces the switching loss of the semiconductor switch SW by changing from the unsaturated state to the saturated state after the semiconductor switch SW is turned on.

The charging capacitor C ₀ is charged with high voltage via the pulse transformer PT ₁ by the pulse current generated by the pulse generation circuit 3. During this charging, the saturable reactor SL _a is in the unsaturated state. The saturable reactor SL _a operates as a magnetic switch by changing from the unsaturated state to the saturated state by the charging voltage of the charging capacitor C ₀ , and generates a narrow pulse voltage compressed by magnetic pulses in the saturable reactor SL _b .

  In order to use it repeatedly as a saturable reactor, reset control is required to increase the voltage-time product until the next magnetic switch operation. In the reset control, after the magnetic switch operation, a reverse excitation current is supplied to the core of the saturable reactor to perform magnetic reset.

2, in terms of inductance _{L 111} saturable reactors SL _a uses the turn ratio _{n 1} of the reset winding and the main winding of the inductance _{L 101} and the saturable reactor SL _a choke coil _{L cb} of the reset circuit 6b And
L ₁₁₁ = n ₁ ² · L ₁₀₁
It is represented by

Thus, the combined inductance of the saturable reactor SL _a shown in FIG. 2 _{L 1} is a saturable reactor SL L a parallel circuit connection of the saturation and the previous impedance _{L 11} and converted inductance _{L 111} saturable reactors SL _a of _{a 1} = L ₁₁ // L ₁₁₁
It becomes.

Also, in terms of inductance _{L 112} saturable reactors SL _b shown in FIG. 2, the reset circuit 6c of the choke coil _{L cc} inductance _{L 102} and the saturable reactor SL _b turns ratio of the reset winding and the main winding _{n 2} Using,
L ₁₁₂ = n ₂ ² · L ₁₀₂
It becomes.

Thus, the synthesis of the saturable reactor SL _b shown in FIG. 2 the inductance _{L 2} is saturable reactors SL parallel _b saturation before and impedance _{L 21} and converted inductance _{L 112} saturable reactors SL _b circuit connection from L ₂ = L ₂₁ // L ₁₁₂
It becomes.

Here, the saturable reactor SL _a saturable reactor SL _b may divide the voltage Vc of the charging capacitor _{C 0.}

When the saturable reactor SL _a and the saturable reactor SL _b is not saturated, the voltage _{V SLa} applied to the saturable reactor SL _a by this partial pressure,
V _SLa = (L ₁ / (L ₁ + L ₂ )) · V _C
It is represented by

On the other hand, the voltage V _SLb applied to the saturable reactor SL _b is:
V _SLb = (L ₂ / (L ₁ + L ₂ )) · V _C
It is represented by

  Here, since the width of the pulse to be compressed by the magnetic pulse compression circuit is proportional to the square root of the product of the inductance at the time of saturation and the capacitor, it is required that the inductance is small in order to compress the pulse width.

  On the other hand, the inductance is proportional to the product of the cross-sectional area of the core and the square of the number of turns. Further, the magnetic switch characteristic of the saturable reactor depends on the inductance value at the time of saturation due to the characteristic of the core. That is, in order to satisfy the voltage / time product required by the magnetic switch and reduce the inductance L, it is necessary to reduce the number of turns and increase the cross-sectional area. When this cross-sectional area is increased, there arises a problem that the size of the saturable reactor increases.

In order to perform magnetic pulse compression in the saturable reactor SL _a and the saturable reactor SL _b , the combined impedance L ₁ of the saturable reactor SL _a and the inductance L ₁ and L ₂ before saturation the combined impedance _{L 2} of the saturable reactors SL _b,
L ₁ >> L ₂
It is necessary to select so that

Further saturable reactor SL _a is the L ₁₂ inductance after saturation, in order to be able to efficiently supply the pulse power to the load, the impedance L ₁₂ after saturation with synthetic impedance L _2,
L ₁₂ << L ₂
It is necessary to select so that

At this time, from the relationship of L ₂ = L ₂₁ // L ₁₁₂ , the combined inductance L ₂ of the saturable reactor SL _b is obtained by effectively using the converted inductance L ₁₁₂ to the saturable reactor SL _b of the choke coil L _cc. The required value can be selected.

_Further, L 1 ₌ the relation _{L 11} // _{L 111,} also selects the converted inductance _{L 112} saturable reactors SL _b for the combined impedance L ₁ saturable reactors SL _a satisfies the relationship _L 1 »L ₂ Can be made smaller.

  Therefore, the voltage division ratio between the saturable reactor constituting the magnetic switch and the saturable reactor for voltage division can be determined by the inductance of the choke coil of the reset circuit connected to the saturable reactor for voltage division.

In the equivalent circuit 4a ′ of the pulse compression circuit shown in FIG. 2, the necessary condition between the combined impedance L1 and the combined impedance L2 is L ₁ >> L ₂ .

The condition of L ₁ >> L ₂ can be selected by L ₁ = kL ₂ using an arbitrary coefficient k, and the relationship between L ₁ = L ₁₁ // L ₁₁₁ and L ₂ = L ₂₁ // L ₁₁₂ is obtained. It is possible to use L ₁₁ // L ₁₁₁ = k (L ₂₁ // L ₁₁₂ ).

Here, for example, when effectively utilizing the inductance L ₁₀₂ of the saturable impedance L _cc in the reset circuit 6c, was selected by the combined impedance L ₂ is dependent on the conversion inductance L ₁₁₂ as viewed from the magnetic pulse compression circuit side, combined inductance L ₂ can be a small inductance compared to the case where there is no conversion inductance L ₁₁₂ .

Therefore, the inductance value of L ₁ = L ₁₁ // L ₁₁₁ that satisfies L ₁ = kL ₂ can be reduced, and the inductance of L ₁₁ is reduced here.

Thus, by utilizing the choke coil L ₁₀₂ of the reset circuit 6c, it is possible to reduce the size of the saturable reactor.

According to the embodiment of the present invention, by reducing the inductance of the saturable reactor SL _a, to reduce the size of the saturable reactor, you are possible to reduce the cost by reducing the amount of core forming the saturable reactor .

  Further, according to the embodiment of the present invention, the voltage division can be adjusted by the inductance of the choke coil on the reset circuit side, and the reset circuit side has a lower voltage than the magnetic pulse compression circuit side. Since pressure adjustment is possible, insulation processing is facilitated and costs can be reduced.

[Second configuration example]
Next, a second configuration example of the pulse power supply device and the magnetic pulse compression circuit of the present invention will be described. The second configuration shown in Figure 3 is configured to include a pulse transformer PT ₂ in place of the saturable reactor SL _b voltage voltage-dividing the first configuration described above.

  Next, a second configuration example of the pulse power supply device and the magnetic pulse compression circuit of the present invention will be described. FIG. 3 is a diagram for explaining the outline of the second configuration of the pulse power supply device and the magnetic pulse compression circuit of the present invention, and FIG. 4 is an equivalent diagram of the magnetic pulse compression circuit 4b of FIG.

In FIG. 3, a pulse power supply device 1B of the present invention compresses a pulse generation circuit 3 connected to a charger 2 and a pulse width of a pulse generated by the pulse generation circuit 3, and loads a compressed narrow pulse current. 5 includes a magnetic pulse compression circuit 4b and reset circuits 6a, 6b and 6d. Reset circuit 6a, a saturable reactor SL _P of the pulse generating circuit 3 is reset from saturation in unsaturated state, the reset circuit 6b is unsaturated state saturable reactor SL _a magnetic pulse compression circuit 4b from saturation reset, the reset circuit 6d is a saturable reactor of the pulse transformer PT ₂ resets the saturated state to the unsaturated state.

FIG. 4 shows an equivalent circuit 4b ′ that equivalently represents the magnetic pulse compression circuit 4b of FIG. In the equivalent circuit shown in FIG. 4, a saturable reactor SL _a before saturation inductance and L _11, the mutual inductance of the presaturation pulse transformer PT ₂ is set to M _1.

The saturable reactor SL _a, winding constituting the winding and the reset circuit 6b constituting the circuit of the magnetic pulse compression circuit 4b is applied, also, the pulse transformer PT ₂ of the magnetic pulse compression circuit 4b in the saturable reactor Since the winding constituting the above circuit and the winding constituting the reset circuit 6d are applied, the transaction is performed between the saturable reactor winding of the pulse transformer and the winding of the reset circuit.

The inductance L ₁₀₁ of the choke coil L _cb of the reset circuit 6b and the inductance L ₁₀₃ of the choke coil L _cd of the reset circuit 6d are respectively converted inductances L ₁₁₁ (= L ₁₀₁ · n ₁ ² ) when viewed from the magnetic pulse compression circuit 4b side. , L ₁₁₃ (= L ₁₀₃ · n ₃ ² ). Accordingly, the impedance of the saturable reactor SL _a can be represented by the combined impedance _{L 1} of the impedance _{L 11} of the saturable reactor SL _a itself and in terms of inductance _{L 111,} impedance of the pulse transformer PT ₂ is of the pulse transformer PT It can be expressed by a combined impedance L ₃ of the mutual inductance M _{1 of 2} and the converted inductance L ₁₁₃ .

The configuration using the pulse transformer PT2 of the _second configuration can be selected similarly to the first configuration.

4, in terms of inductance _{L 111} saturable reactors SL _a uses the turn ratio _{n 1} of the reset winding and the main winding of the inductance _{L 101} and the saturable reactor SL _a choke coil _{L cb} of the reset circuit 6b And
L ₁₁₁ = n ₁ ² · L ₁₀₁
It is represented by

Thus, the combined inductance of the saturable reactor SL _a shown in FIG. 4 _{L 1} is a saturable reactor SL L a parallel circuit connection of the saturation and the previous impedance _{L 11} and converted inductance _{L 111} saturable reactors SL _a of _{a 1} = L ₁₁ // L ₁₁₁
It becomes.

Further, the converted inductance L ₁₁₃ of the pulse transformer PT ₂ shown in FIG. 4 uses the inductance L ₁₀₃ of the choke coil L _cd of the reset circuit 6 d and the turn ratio n ₃ of the reset winding and the main winding of the pulse transformer PT _2. And
L ₁₁₃ = n ₃ ² · L ₁₀₃
It becomes.

Thus, the combined inductance _{L 3} of the pulse transformer PT ₂ shown in FIG. 4, L ₃ = _{M 1} a parallel circuit connection of the converted inductance _{L 113} of saturated previous mutual impedance _{M 1} and the pulse transformer PT ₂ // _{L 113}
It becomes.

Here, the saturable reactor SL _a pulse transformer PT ₂ is dividing the voltage Vc of the charging capacitor _{C 0.}

When the saturable reactor SL _a and the pulse transformer PT ₂ is not saturated, the voltage _{V SLa} applied to the saturable reactor SL _a by this partial pressure,
V _SLa = (L ₁ / (L ₁ + L ₃ )) · V _C
It is represented by

On the other hand, the voltage _{V PT2} to be applied to the pulse transformer PT ₂ is
V _PT2 = (L ₃ / (L ₁ + L ₃ )) · V _C
It is represented by

Further, the saturable reactor SL _a and the pulse transformer PT _2, the performing magnetic pulse compression, between the inductance _{L 1} and _{L 3} before these saturated, the combined impedance _{L 1} and the pulse of the saturable reactor SL _a the combined impedance _{L 3} of the transformer PT,
L ₁ >> L ₃
It is necessary to select so that

Further saturable reactor SL _a is the L ₁₂ inductance after saturation, in order to be able to efficiently supply the pulse power to the load, the impedance L ₁₂ after saturation with synthetic impedance L _3,
L ₁₂ << L ₃
It is necessary to select so that

At this time, from the relationship of L ₃ = M ₁ // L ₁₁₃ , the combined inductance L ₃ of the pulse transformer PT ₂ is required by effectively using the converted inductance L ₁₁₃ of the choke coil L _{cd to} the pulse transformer PT ₂ . Can be selected.

_Further, from the relationship of _{L 1 = L 11 // L 111} , by also selecting a conversion inductance _{L 113} of the pulse transformer PT ₂ for the combined impedance L ₁ saturable reactors SL _a satisfies the relationship _L 1 »L ₃ Can be small.

  Therefore, the voltage division ratio between the saturable reactor constituting the magnetic switch and the voltage dividing pulse transformer can be determined by the inductance of the choke coil of the reset circuit connected to the voltage dividing pulse transformer.

[Example of operation]
FIG. 5 shows a signal diagram of the configuration example shown in FIGS. 1 and 3, and voltages V1, V2, V3, and V4 correspond to voltages V1, V2, V3, and V4 in FIGS. FIG. 6 shows an operation diagram in the unsaturated state (FIG. 6A) and an operation diagram in the saturated state (FIG. 6B).

Section A in the signal diagram of FIG. 5 and FIG. 6 Operation Figure (a) is a saturable reactor SL _a constituting the magnetic switch indicates an unsaturated state.

When this saturable reactor SL _a is in the unsaturated state, the applied voltage is divided by the combined impedance L ₁ and the synthetic impedance L _2.

In this unsaturated state, the voltage V _SLa applied to the saturable reactor SL _a is applied to the saturable reactor SL _b between the synthetic impedance L ₁ and the synthetic impedance L ₂ under the condition of L ₁ >> L _2. It becomes larger than the voltage _VSLb . V3 in FIG. 5C and V4 in FIG. 5D show this relationship.

Section B in the signal diagram of FIG. 5, and 6 operation diagram of (b) is a saturable reactor SL _a constituting the magnetic switch indicates the saturation.

When the saturable reactor SL _a is in the saturated state, the saturable reactor SL _a because no transformer action, the applied voltage is divided by the combined impedance L ₂ the impedance L ₁₂ after saturation.

In this saturation state, the saturable reactor SL _b is placed between the saturable reactor impedance L ₁₂ and the combined impedance L ₂ as shown in section B of FIG. 5 (d) under the condition of L ₁₂ << L ₂ . The voltage V _SLb applied to the voltage increases rapidly, and a pulse current is supplied to the load.

  The present invention is not limited to the embodiments described above. Various modifications can be made based on the spirit of the present invention, and these are not excluded from the scope of the present invention.

  The pulse power supply device and magnetic pulse compression circuit of the present invention can be applied not only to a film forming apparatus but also to a processing apparatus field using plasma such as a sputtering apparatus or an ashing apparatus.

1A, 1B Pulse power supply device 2 Charger 3 Pulse generation circuits 4a, 4b Magnetic pulse compression circuits 4a ', 4b' Equivalent circuit of magnetic pulse compression circuit 5 Loads 6a, 6b, 6c, 6d Reset circuit

Claims (10)

A magnetic pulse compression circuit that compresses a current discharged from a charging capacitor by a magnetic switch operation of a saturable reactor and flows a pulse current,
A reset circuit for resetting the saturable reactor of the magnetic pulse compression circuit from a saturated state to an unsaturated state;
The reset circuit connects a choke coil between a reset winding and a DC power source,
By setting the equivalent inductance of the saturable reactor for voltage division of the magnetic pulse compression circuit by the parallel composite impedance of the saturable reactor of the magnetic pulse compression circuit and the choke coil of the reset circuit, and reducing the parallel composite impedance The magnetic pulse compression circuit is characterized in that the inductance of the saturable reactor on the magnetic switch side of the magnetic pulse compression circuit is set small. A magnetic pulse compression circuit that compresses a current discharged from a charging capacitor by a magnetic switch operation of a saturable reactor and flows a pulse current,
A reset circuit for resetting the saturable reactor of the magnetic pulse compression circuit from a saturated state to an unsaturated state;
The reset circuit connects a choke coil between a reset winding and a DC power source,
The magnetic pulse compression circuit includes a first saturable reactor connected in series between the charging capacitor and the load, and a second connected in parallel to the load between the first saturable reactor and the load. With a saturable reactor,
The equivalent inductance of the second saturable reactor is set by a parallel combined impedance of the second saturable reactor of the magnetic pulse compression circuit and the choke coil of the second reset circuit,
The inductance of the saturable reactor on the magnetic switch side of the magnetic pulse compression circuit is set to be small by reducing the parallel combined impedance of the second saturable reactor and the choke coil of the second reset circuit. Magnetic pulse compression circuit.   The voltage division ratio between the first saturable reactor and the second saturable reactor is determined by the inductance of the choke coil of the first reset circuit and the inductance of the choke coil of the second reset circuit. Item 3. The magnetic pulse compression circuit according to Item 2. A magnetic pulse compression circuit that compresses a current discharged from a charging capacitor by a magnetic switch operation of a saturable reactor and flows a pulse current,
A reset circuit for resetting the saturable reactor of the magnetic pulse compression circuit from a saturated state to an unsaturated state;
The reset circuit connects a choke coil between a reset winding and a DC power source,
The magnetic pulse compression circuit includes a first saturable reactor connected in series between the charging capacitor and a load;
A pulse transformer connected in parallel to the load between the first saturable reactor and the load;
The equivalent inductance of the pulse transformer is set by a parallel combined impedance of the pulse transformer of the magnetic pulse compression circuit and the choke coil of the second reset circuit,
The inductance of the saturable reactor on the magnetic switch side of the magnetic pulse compression circuit is set small by reducing the parallel combined impedance of the pulse transformer of the magnetic pulse compression circuit and the choke coil of the second reset circuit. Magnetic pulse compression circuit.   5. The voltage division ratio between the first saturable reactor and the pulse transformer is determined by the inductance of the choke coil of the first reset circuit and the inductance of the choke coil of the second reset circuit. Magnetic pulse compression circuit. A pulse power supply device that supplies a pulse of high voltage and narrow current width to a load,
A charging capacitor charged with a DC power supply;
A magnetic pulse compression circuit for supplying a pulse current compressed from the charging capacitor to a load by a magnetic switch operation of a saturable reactor;
A reset circuit for resetting the saturable reactor of the magnetic pulse compression circuit from a saturated state to an unsaturated state;
The reset circuit connects a choke coil between a reset winding and a DC power source,
By setting the equivalent inductance of the saturable reactor for voltage division of the magnetic pulse compression circuit by the parallel composite impedance of the saturable reactor of the magnetic pulse compression circuit and the choke coil of the reset circuit, and reducing the parallel composite impedance A pulse power supply device, wherein the inductance of the saturable reactor on the magnetic switch side of the magnetic pulse compression circuit is set small. A pulse power supply device that supplies a pulse of high voltage and narrow current width to a load,
A charging capacitor charged with a DC power supply;
A magnetic pulse compression circuit for supplying a pulse current compressed from the charging capacitor to a load by a magnetic switch operation of a saturable reactor;
A reset circuit for resetting the saturable reactor of the magnetic pulse compression circuit from a saturated state to an unsaturated state;
The reset circuit connects a choke coil between a reset winding and a DC power source,
The magnetic pulse compression circuit includes a first saturable reactor connected in series between the charging capacitor and a load;
A second saturable reactor connected in parallel with the load between the first saturable reactor and the load;
The equivalent inductance of the second saturable reactor is set by a parallel combined impedance of the second saturable reactor of the magnetic pulse compression circuit and the choke coil of the second reset circuit,
The inductance of the saturable reactor on the magnetic switch side of the magnetic pulse compression circuit is set to be small by reducing the parallel combined impedance of the second saturable reactor and the choke coil of the second reset circuit. Pulse power supply.   The voltage division ratio between the first saturable reactor and the second saturable reactor is determined by the inductance of the choke coil of the first reset circuit and the inductance of the choke coil of the second reset circuit. Item 8. The pulse power supply device according to Item 7. A pulse power supply device that supplies a pulse of high voltage and narrow current width to a load,
A charging capacitor charged with a DC power supply;
A magnetic pulse compression circuit for supplying a pulse current compressed from the charging capacitor to a load by a magnetic switch operation of a saturable reactor;
A reset circuit for resetting the saturable reactor of the magnetic pulse compression circuit from a saturated state to an unsaturated state;
The reset circuit connects a choke coil between a reset winding and a DC power source,
The magnetic pulse compression circuit includes a first saturable reactor connected in series between the charging capacitor and a load;
A pulse transformer connected in parallel to the load between the first saturable reactor and the load;
The equivalent inductance of the pulse transformer is set by a parallel combined impedance of the pulse transformer of the magnetic pulse compression circuit and the choke coil of the second reset circuit,
The inductance of the saturable reactor on the magnetic switch side of the magnetic pulse compression circuit is set small by reducing the parallel combined impedance of the pulse transformer of the magnetic pulse compression circuit and the choke coil of the second reset circuit. Magnetic pulse power supply device.   The voltage division ratio between the first saturable reactor and the pulse transformer is determined by the inductance of the choke coil of the first reset circuit and the inductance of the choke coil of the second reset circuit. The pulse power supply device described.

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