JP5268753B2 - Method for manufacturing element constituting gas detection device - Google Patents
Method for manufacturing element constituting gas detection device Download PDFInfo
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- JP5268753B2 JP5268753B2 JP2009089705A JP2009089705A JP5268753B2 JP 5268753 B2 JP5268753 B2 JP 5268753B2 JP 2009089705 A JP2009089705 A JP 2009089705A JP 2009089705 A JP2009089705 A JP 2009089705A JP 5268753 B2 JP5268753 B2 JP 5268753B2
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Abstract
Description
この発明は、ガスに感応する検知素子と、環境温度を補正するための補償素子と組み合わせてガス検出装置を構成するそれぞれの素子を製造する方法に関する。 The present invention relates to a method of manufacturing each element constituting a gas detection device in combination with a sensing element sensitive to gas and a compensation element for correcting an environmental temperature.
ガス検出装置は、検知素子と補償素子とをブリッジ接続などで組み合わせて環境温度の変化を補正しつつ検知素子の抵抗変化を検出してガス濃度を測定するように構成されている。
このような素子の製造方法としては、活性アルミナ粉末に水性無機バインダと純水を混合してペースト状にし、これを白金コイルの周囲に塗布したのち500〜800℃に加熱して担体をコイルに固着するのが一般的であるが、センサ素子の大きさの精密な制御が困難で、製造歩留りの低下を招いていた。その結果、熱容量や表面積(熱放出の大きさ)等に関わり、センサ温度(センサのブリッジ出力のゼロ点)等の特性のばらつきに影響するという問題がある。
The gas detection device is configured to measure a gas concentration by detecting a resistance change of the detection element while correcting a change in environmental temperature by combining the detection element and the compensation element by a bridge connection or the like.
As a method for producing such an element, an aqueous inorganic binder and pure water are mixed with activated alumina powder to form a paste, which is applied around a platinum coil and then heated to 500 to 800 ° C. to form a carrier as a coil. Although it is generally fixed, it is difficult to precisely control the size of the sensor element, resulting in a decrease in manufacturing yield. As a result, there is a problem that variations in characteristics such as the sensor temperature (the zero point of the bridge output of the sensor) are affected by the heat capacity, the surface area (the magnitude of heat release), and the like.
このような問題を解消するために、特許文献1に見られるように球状凹面を有する容器に予め白金コイルを設置し、次いでペースト状物を注入して球状に形成する工程を含む検知素子の製造方法が提案されている。
In order to solve such a problem, as shown in
しかしながら、ペースト状の塊をヒータに押し付けて形成する関係上、ヒータに形成すべき塊の形状がヒータに対して断面形状で半球状となり、塊の表面に平面部と球面部との異なる形状が存在し、表面温度に大きなばらつきが生じやすいという問題がある。 However, because the paste-like lump is pressed against the heater and formed, the lump shape to be formed on the heater is hemispherical in cross-sectional shape with respect to the heater, and the surface of the lump has different shapes of a flat portion and a spherical portion. There exists a problem that it exists and it is easy to produce a big variation in surface temperature.
本発明はこのような問題に鑑みてなされたものであって、その目的とするところは表面形状が均質な塊をヒータに形成できるガス検出装置用素子の製造方法を提案することである。 The present invention has been made in view of such problems, and an object of the present invention is to propose a method for manufacturing an element for a gas detection device capable of forming a mass having a uniform surface shape on a heater.
このような課題を達成するために本発明においては、塊状物を構成する材からなる粉末を液に混合した溶液を、表面が撥水性を有する板状体に滴下して液粒を形成する工程と、中央部にコイル部を有するヒータの前記コイル部を前記液粒に浸漬する工程と、前記ヒータのコイル部に前記液粒を付着させた状態で前記板状体から引き上げる工程と、前記コイル部の液粒の液分を揮散させて前記コイル部に前記粉末の塊を形成させる工程と、前記塊を焼成する工程と、を備える。 In order to achieve such a problem, in the present invention, a step of forming a liquid particle by dropping a solution obtained by mixing a powder made of a material constituting a lump into a liquid onto a plate-like body having a water-repellent surface. And a step of immersing the coil portion of the heater having a coil portion in the center portion in the liquid particle, a step of pulling up the plate body with the liquid particle attached to the coil portion of the heater, and the coil And a step of volatilizing the liquid part of the liquid part to form a lump of the powder in the coil part, and a step of firing the lump.
本発明によれば、表面形状が均質で、体積が一定な塊をヒータに容易に形成することができる。 According to the present invention, a lump having a uniform surface shape and a constant volume can be easily formed in the heater.
基材となる粉末、例えば電気絶縁性を有する活性アルミナ粉末と、可燃性ガスを酸化させるための触媒となる酸化触媒用の粉末、例えば白金黒の粉末とを水に分散させて水溶液を調製する。
一方、白金線を所要の形状、例えば中央部にコイル部1aを有し、その両端に直線部1b、1bを有する形状に形成したヒータ1を用意する。
An aqueous solution is prepared by dispersing a powder as a base material, for example, an activated alumina powder having electrical insulation, and an oxidation catalyst powder as a catalyst for oxidizing a combustible gas, such as platinum black powder, in water. .
On the other hand, a
次に表面に疎水処理が施された板状体2を用意し、板状体2の表面に所定量、つまり1つの液粒となる程度の規定量の溶液を滴下して液粒3を形成させる。
Next, a plate-
板状体の液粒3にヒータ1のコイル部1aを押し付けてコイル部1aを液粒中に埋没させ、コイル部1aに溶液を十分に馴染ませる。
The coil portion 1a of the
ついでヒータ1の直線部1b、1bを持ち、板状体から離すように上げると、コイル部1aに液粒3が付着した状態で板状体2から放れる。なお、引き上げた時点でヒータ1に微小な振動をを加えると、液粒3がコイル部1aの側にスムーズに移動して確実にコイル部1aを包み込む。
Next, when the
もとより板状体2よりもコイル部1aの親水性が高いため、液は表面張力により球状となってコイル部1aを包みこむように液粒3’となる。
Naturally, the hydrophilicity of the coil part 1a is higher than that of the plate-
この状態で液粒3’の水分を揮散させると、液粒中の活性アルミナと白金黒との混合体がコイル部1aを包み込むように断面円形の塊となる。 When the moisture in the liquid droplet 3 'is volatilized in this state, the mixture of activated alumina and platinum black in the liquid particle becomes a mass having a circular cross section so as to wrap around the coil portion 1a.
なお、好ましくは、ヒータ1の両端の直線部1bを水平に維持してコイル部1aの中心線を中心とし、液粒に無理な遠心力が作用しない程度の速度で回転させると、基材や触媒を構成する粉末が均質にコイル部を中心とするように固まる。
Preferably, when the straight portion 1b at both ends of the
最後にこの塊をヒータ1とともに焼成に適した温度で焼成すると、コイル部1aに酸化触媒を含有した断面円形状の塊、つまり感応部が完成する。
Finally, when this lump is fired together with the
なお、上述の実施例においては板状体の表面に液粒を形成させているが、図2に示したように所定の容積、つまりヒータ1のコイル部1aを包皮できる程度の容積を備えた凹所2aを板状体2に形成し、少なくともこの凹所2aの表面を撥水加工する。
In the above-described embodiment, liquid droplets are formed on the surface of the plate-like body. However, as shown in FIG. 2, a predetermined volume, that is, a volume that can cover the coil portion 1a of the
この凹所2aに上述した溶液を規定量滴下し、この凹所2aにヒータ1のコイル部1a浸漬させ、十分に馴染んだ状態でコイルを引き上げると、コイル部1aに付着した溶液は、表面張力によりコイル部1aに球状に付着する。
When a prescribed amount of the above-described solution is dropped into the recess 2a, the coil portion 1a of the
また、上述の実施例では粉体に含まれる酸化触媒により可燃性ガスを酸化触媒により酸化させてヒータ1の温度上昇に伴う抵抗変化を検出するガス検知素子を対象として説明したが、可燃性ガスの有無に関係なく周囲の温度をヒータの抵抗として検出するための補償素子の製造にも同様に適用できることはいうまでもない。
すなわち、可燃性ガスに対する酸化触媒作用を有しない粉末を水に分散させて水溶液を調製し、この水溶液を上述の工程によりヒータ1のコイル部1aに焼成すればよい。
Further, in the above-described embodiment, the gas detection element that detects the resistance change accompanying the temperature rise of the
That is, it is only necessary to prepare an aqueous solution by dispersing powder that does not have an oxidation catalytic action for the flammable gas in water and firing this aqueous solution on the coil portion 1a of the
これにより、可燃性ガスに反応する素子と同一形状の補償用素子を容易に製作することができる。 Thereby, the compensation element having the same shape as the element that reacts with the combustible gas can be easily manufactured.
1 ヒータ
1a コイル部
2 板状体
3 液粒
1 Heater 1a
Claims (5)
からなるガス検出装置を構成する素子の製造方法。 A step of dropping a solution obtained by mixing a powder made of a material constituting a lump into a liquid onto a plate-like body having a water-repellent surface to form a liquid particle, and the coil portion of the heater having a coil portion at the center portion A step of immersing the liquid particles in the liquid particles, a step of pulling up the liquid particles from the plate in a state in which the liquid particles are attached to the coil portions of the heater, and volatilizing the liquid particles in the coil portions. Forming a lump of the powder, and baking the lump,
A manufacturing method of an element constituting a gas detection device comprising:
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JP2009089705A JP5268753B2 (en) | 2009-04-02 | 2009-04-02 | Method for manufacturing element constituting gas detection device |
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JP5268753B2 true JP5268753B2 (en) | 2013-08-21 |
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JPS61167850A (en) * | 1985-01-21 | 1986-07-29 | Fuji Electric Co Ltd | Apparatus for producing gas sensor |
JPH08256524A (en) * | 1995-03-20 | 1996-10-08 | Tokimec Inc | Seed film |
JP3589771B2 (en) * | 1996-01-24 | 2004-11-17 | 麒麟麦酒株式会社 | How to make alginate gel spheres |
JPH11132984A (en) * | 1997-10-24 | 1999-05-21 | Fuji Electric Co Ltd | Method for manufacturing detection element for gas sensor |
JP4784219B2 (en) * | 2005-09-13 | 2011-10-05 | 富士電機株式会社 | Gas sensing element for gas sensor and manufacturing method of temperature compensation element |
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