JP5268753B2 - Method for manufacturing element constituting gas detection device - Google Patents

Method for manufacturing element constituting gas detection device Download PDF

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JP5268753B2
JP5268753B2 JP2009089705A JP2009089705A JP5268753B2 JP 5268753 B2 JP5268753 B2 JP 5268753B2 JP 2009089705 A JP2009089705 A JP 2009089705A JP 2009089705 A JP2009089705 A JP 2009089705A JP 5268753 B2 JP5268753 B2 JP 5268753B2
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powder
heater
liquid
lump
coil part
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JP2010243226A (en
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晴一 大谷
隆二 朝田
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Riken Keiki KK
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Riken Keiki KK
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing the element used in a gas detector wherein a lump having a homogenous surface shape is fixed to a heater. <P>SOLUTION: The method for manufacturing the element used in the gas detector includes: the step of forming a liquid particle 3 by dripping a solution, which is prepared by mixing powder composed of a material constituting a lumpy matter with a liquid, on a platelike member 2 of which the surface has water repellency; the step of immersing the coil part 1a of the heater 1, which has the coil part 1a provided to the central part thereof, in the liquid particle 3; the step of drawing up the coil part 1a of the heater 1 from the platelike member 2 in a state that the liquid particle 3 is adhered to the coil part 1a of the heater 1; the step of volatilizing the liquid component of the liquid particle of the coil part 1a to form a powder lump to the coil part 1a; and the step of baking the lump. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

この発明は、ガスに感応する検知素子と、環境温度を補正するための補償素子と組み合わせてガス検出装置を構成するそれぞれの素子を製造する方法に関する。   The present invention relates to a method of manufacturing each element constituting a gas detection device in combination with a sensing element sensitive to gas and a compensation element for correcting an environmental temperature.

ガス検出装置は、検知素子と補償素子とをブリッジ接続などで組み合わせて環境温度の変化を補正しつつ検知素子の抵抗変化を検出してガス濃度を測定するように構成されている。
このような素子の製造方法としては、活性アルミナ粉末に水性無機バインダと純水を混合してペースト状にし、これを白金コイルの周囲に塗布したのち500〜800℃に加熱して担体をコイルに固着するのが一般的であるが、センサ素子の大きさの精密な制御が困難で、製造歩留りの低下を招いていた。その結果、熱容量や表面積(熱放出の大きさ)等に関わり、センサ温度(センサのブリッジ出力のゼロ点)等の特性のばらつきに影響するという問題がある。
The gas detection device is configured to measure a gas concentration by detecting a resistance change of the detection element while correcting a change in environmental temperature by combining the detection element and the compensation element by a bridge connection or the like.
As a method for producing such an element, an aqueous inorganic binder and pure water are mixed with activated alumina powder to form a paste, which is applied around a platinum coil and then heated to 500 to 800 ° C. to form a carrier as a coil. Although it is generally fixed, it is difficult to precisely control the size of the sensor element, resulting in a decrease in manufacturing yield. As a result, there is a problem that variations in characteristics such as the sensor temperature (the zero point of the bridge output of the sensor) are affected by the heat capacity, the surface area (the magnitude of heat release), and the like.

このような問題を解消するために、特許文献1に見られるように球状凹面を有する容器に予め白金コイルを設置し、次いでペースト状物を注入して球状に形成する工程を含む検知素子の製造方法が提案されている。   In order to solve such a problem, as shown in Patent Document 1, the manufacture of a sensing element including a step of pre-installing a platinum coil in a container having a spherical concave surface and then injecting a paste-like material into a spherical shape A method has been proposed.

しかしながら、ペースト状の塊をヒータに押し付けて形成する関係上、ヒータに形成すべき塊の形状がヒータに対して断面形状で半球状となり、塊の表面に平面部と球面部との異なる形状が存在し、表面温度に大きなばらつきが生じやすいという問題がある。   However, because the paste-like lump is pressed against the heater and formed, the lump shape to be formed on the heater is hemispherical in cross-sectional shape with respect to the heater, and the surface of the lump has different shapes of a flat portion and a spherical portion. There exists a problem that it exists and it is easy to produce a big variation in surface temperature.

特開平11-132984JP-A-11-132984

本発明はこのような問題に鑑みてなされたものであって、その目的とするところは表面形状が均質な塊をヒータに形成できるガス検出装置用素子の製造方法を提案することである。   The present invention has been made in view of such problems, and an object of the present invention is to propose a method for manufacturing an element for a gas detection device capable of forming a mass having a uniform surface shape on a heater.

このような課題を達成するために本発明においては、塊状物を構成する材からなる粉末を液に混合した溶液を、表面が撥水性を有する板状体に滴下して液粒を形成する工程と、中央部にコイル部を有するヒータの前記コイル部を前記液粒に浸漬する工程と、前記ヒータのコイル部に前記液粒を付着させた状態で前記板状体から引き上げる工程と、前記コイル部の液粒の液分を揮散させて前記コイル部に前記粉末の塊を形成させる工程と、前記塊を焼成する工程と、を備える。   In order to achieve such a problem, in the present invention, a step of forming a liquid particle by dropping a solution obtained by mixing a powder made of a material constituting a lump into a liquid onto a plate-like body having a water-repellent surface. And a step of immersing the coil portion of the heater having a coil portion in the center portion in the liquid particle, a step of pulling up the plate body with the liquid particle attached to the coil portion of the heater, and the coil And a step of volatilizing the liquid part of the liquid part to form a lump of the powder in the coil part, and a step of firing the lump.

本発明によれば、表面形状が均質で、体積が一定な塊をヒータに容易に形成することができる。   According to the present invention, a lump having a uniform surface shape and a constant volume can be easily formed in the heater.

図(a)〜(c)は、それぞれ本発明の製造方法の一実施例を説明する図である。Drawing (a)-(c) is a figure explaining one example of the manufacturing method of the present invention, respectively. 図(a)、(b)は、それぞれ本発明の製造方法の他の実施例を説明する図である。Figures (a) and (b) are diagrams for explaining another embodiment of the production method of the present invention.

基材となる粉末、例えば電気絶縁性を有する活性アルミナ粉末と、可燃性ガスを酸化させるための触媒となる酸化触媒用の粉末、例えば白金黒の粉末とを水に分散させて水溶液を調製する。
一方、白金線を所要の形状、例えば中央部にコイル部1aを有し、その両端に直線部1b、1bを有する形状に形成したヒータ1を用意する。
An aqueous solution is prepared by dispersing a powder as a base material, for example, an activated alumina powder having electrical insulation, and an oxidation catalyst powder as a catalyst for oxidizing a combustible gas, such as platinum black powder, in water. .
On the other hand, a heater 1 is prepared in which a platinum wire is formed in a required shape, for example, a coil portion 1a at the center and linear portions 1b and 1b at both ends.

次に表面に疎水処理が施された板状体2を用意し、板状体2の表面に所定量、つまり1つの液粒となる程度の規定量の溶液を滴下して液粒3を形成させる。   Next, a plate-like body 2 whose surface is subjected to hydrophobic treatment is prepared, and a predetermined amount, that is, a prescribed amount of solution that is about one liquid droplet is dropped onto the surface of the plate-like body 2 to form a liquid particle 3 Let

板状体の液粒3にヒータ1のコイル部1aを押し付けてコイル部1aを液粒中に埋没させ、コイル部1aに溶液を十分に馴染ませる。   The coil portion 1a of the heater 1 is pressed against the liquid droplet 3 of the plate-like body so that the coil portion 1a is buried in the liquid particle, and the coil portion 1a is sufficiently adapted to the solution.

ついでヒータ1の直線部1b、1bを持ち、板状体から離すように上げると、コイル部1aに液粒3が付着した状態で板状体2から放れる。なお、引き上げた時点でヒータ1に微小な振動をを加えると、液粒3がコイル部1aの側にスムーズに移動して確実にコイル部1aを包み込む。   Next, when the heater 1 has the straight portions 1b and 1b and is lifted away from the plate-like body, it is released from the plate-like body 2 with the liquid particles 3 attached to the coil portion 1a. When minute vibration is applied to the heater 1 at the time of pulling up, the liquid particles 3 smoothly move toward the coil portion 1a and securely enclose the coil portion 1a.

もとより板状体2よりもコイル部1aの親水性が高いため、液は表面張力により球状となってコイル部1aを包みこむように液粒3’となる。   Naturally, the hydrophilicity of the coil part 1a is higher than that of the plate-like body 2, so that the liquid becomes spherical due to surface tension and becomes liquid droplets 3 'so as to wrap around the coil part 1a.

この状態で液粒3’の水分を揮散させると、液粒中の活性アルミナと白金黒との混合体がコイル部1aを包み込むように断面円形の塊となる。   When the moisture in the liquid droplet 3 'is volatilized in this state, the mixture of activated alumina and platinum black in the liquid particle becomes a mass having a circular cross section so as to wrap around the coil portion 1a.

なお、好ましくは、ヒータ1の両端の直線部1bを水平に維持してコイル部1aの中心線を中心とし、液粒に無理な遠心力が作用しない程度の速度で回転させると、基材や触媒を構成する粉末が均質にコイル部を中心とするように固まる。   Preferably, when the straight portion 1b at both ends of the heater 1 is kept horizontal and is rotated around a center line of the coil portion 1a at a speed at which excessive centrifugal force does not act on the liquid particles, The powder composing the catalyst is uniformly hardened so as to center on the coil portion.

最後にこの塊をヒータ1とともに焼成に適した温度で焼成すると、コイル部1aに酸化触媒を含有した断面円形状の塊、つまり感応部が完成する。   Finally, when this lump is fired together with the heater 1 at a temperature suitable for firing, a lump having a circular cross section containing the oxidation catalyst in the coil part 1a, that is, the sensitive part is completed.

なお、上述の実施例においては板状体の表面に液粒を形成させているが、図2に示したように所定の容積、つまりヒータ1のコイル部1aを包皮できる程度の容積を備えた凹所2aを板状体2に形成し、少なくともこの凹所2aの表面を撥水加工する。   In the above-described embodiment, liquid droplets are formed on the surface of the plate-like body. However, as shown in FIG. 2, a predetermined volume, that is, a volume that can cover the coil portion 1a of the heater 1 is provided. The recess 2a is formed in the plate-like body 2, and at least the surface of the recess 2a is water-repellent processed.

この凹所2aに上述した溶液を規定量滴下し、この凹所2aにヒータ1のコイル部1a浸漬させ、十分に馴染んだ状態でコイルを引き上げると、コイル部1aに付着した溶液は、表面張力によりコイル部1aに球状に付着する。   When a prescribed amount of the above-described solution is dropped into the recess 2a, the coil portion 1a of the heater 1 is immersed in the recess 2a, and the coil is pulled up in a sufficiently familiar state, the solution adhering to the coil portion 1a To adhere to the coil portion 1a in a spherical shape.

また、上述の実施例では粉体に含まれる酸化触媒により可燃性ガスを酸化触媒により酸化させてヒータ1の温度上昇に伴う抵抗変化を検出するガス検知素子を対象として説明したが、可燃性ガスの有無に関係なく周囲の温度をヒータの抵抗として検出するための補償素子の製造にも同様に適用できることはいうまでもない。
すなわち、可燃性ガスに対する酸化触媒作用を有しない粉末を水に分散させて水溶液を調製し、この水溶液を上述の工程によりヒータ1のコイル部1aに焼成すればよい。
Further, in the above-described embodiment, the gas detection element that detects the resistance change accompanying the temperature rise of the heater 1 by oxidizing the combustible gas by the oxidation catalyst by the oxidation catalyst contained in the powder has been described, but the combustible gas has been described. Needless to say, the present invention can also be applied to the manufacture of a compensation element for detecting the ambient temperature as the resistance of the heater regardless of the presence or absence of the above.
That is, it is only necessary to prepare an aqueous solution by dispersing powder that does not have an oxidation catalytic action for the flammable gas in water and firing this aqueous solution on the coil portion 1a of the heater 1 by the above-described steps.

これにより、可燃性ガスに反応する素子と同一形状の補償用素子を容易に製作することができる。   Thereby, the compensation element having the same shape as the element that reacts with the combustible gas can be easily manufactured.

1 ヒータ
1a コイル部
2 板状体
3 液粒
1 Heater 1a Coil part 2 Plate body 3 Liquid particle

Claims (5)

塊状物を構成する材からなる粉末を液に混合した溶液を、表面が撥水性を有する板状体に滴下して液粒を形成する工程と、中央部にコイル部を有するヒータの前記コイル部を前記液粒に浸漬する工程と、前記ヒータのコイル部に前記液粒を付着させた状態で前記板状体から引き上げる工程と、前記コイル部の液粒の液分を揮散させて前記コイル部に前記粉末の塊を形成させる工程と、前記塊を焼成する工程と、
からなるガス検出装置を構成する素子の製造方法。
A step of dropping a solution obtained by mixing a powder made of a material constituting a lump into a liquid onto a plate-like body having a water-repellent surface to form a liquid particle, and the coil portion of the heater having a coil portion at the center portion A step of immersing the liquid particles in the liquid particles, a step of pulling up the liquid particles from the plate in a state in which the liquid particles are attached to the coil portions of the heater, and volatilizing the liquid particles in the coil portions. Forming a lump of the powder, and baking the lump,
A manufacturing method of an element constituting a gas detection device comprising:
前記粉末が、電気絶縁性を有する材料の粉末と、可燃性ガスの酸化触媒の粉末との混合物により構成されている請求項1に記載のガス検出装置を構成する素子の製造方法。 2. The method of manufacturing an element constituting the gas detection device according to claim 1, wherein the powder is composed of a mixture of a powder of a material having electrical insulation and a powder of an oxidation catalyst for combustible gas. 前記粉末が、電気絶縁性を有する材料の粉末により構成されている請求項1に記載のガス検出装置を構成する素子の製造方法。 2. The method for manufacturing an element constituting the gas detection device according to claim 1, wherein the powder is made of powder of a material having electrical insulation. 前記コイル部の液粒の液分を揮散させて前記コイル部に基材となる粉末からなる塊を形成させる工程において、前記コイル部を中心とするように回転させることを特徴とする請求項1ないし請求項3のいずれかに記載のガス検出装置を構成する素子の製造方法。 2. The step of volatilizing a liquid component of the coil part to form a lump made of powder as a base material in the coil part, wherein the coil part is rotated around the coil part. 4. A method of manufacturing an element constituting the gas detection device according to claim 3. 前記板状体に表面が撥水加工された所定容積の凹所が形成されている請求項1乃至請求項3のいずれかに記載のガス検出装置を構成する素子の製造方法。 4. The method for manufacturing an element constituting the gas detection device according to claim 1, wherein a recess having a predetermined volume whose surface is water repellent is formed in the plate-like body.
JP2009089705A 2009-04-02 2009-04-02 Method for manufacturing element constituting gas detection device Expired - Fee Related JP5268753B2 (en)

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JPS61167850A (en) * 1985-01-21 1986-07-29 Fuji Electric Co Ltd Apparatus for producing gas sensor
JPH08256524A (en) * 1995-03-20 1996-10-08 Tokimec Inc Seed film
JP3589771B2 (en) * 1996-01-24 2004-11-17 麒麟麦酒株式会社 How to make alginate gel spheres
JPH11132984A (en) * 1997-10-24 1999-05-21 Fuji Electric Co Ltd Method for manufacturing detection element for gas sensor
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