JP5267755B1 - Laser processing apparatus and laser processing method - Google Patents

Abstract

A laser processing apparatus and a laser processing method capable of improving the roughness of a cut surface in a laser cutting process using a laser transmitted by an optical fiber. A laser processing apparatus according to the present invention includes at least one laser oscillator that emits a laser beam, a plurality of optical fibers that transmit the emitted laser beam, and a laser beam emitted from the optical fiber. At least one optical element for condensing and irradiating the surface of the processing material, and at the output end of the optical fiber, the output ends of the plurality of optical fibers are arranged in one or a plurality of annular shapes, and at least the outermost periphery The laser beam transmitted by the plurality of optical fibers arranged in an annular shape has linearly polarized light, and the polarization direction of the linearly polarized laser beam emitted from the emission ends of the plurality of optical fibers is the outermost periphery. It is aligned in a radial direction with the center of the ring.

Description

  The present invention relates to a laser processing apparatus and a laser processing method.

  With the development of laser oscillators, a laser processing technique that uses a laser to remove a material, perform a bonding process, or perform surface modification has been widely used. In particular, laser cutting technology, which is a type of technology for processing metal materials using high-power lasers, has various advantages such as no post-processing steps, automation, and high-speed cutting. Used for cutting materials.

A conventional laser processing apparatus will be briefly described below.
FIG. 24 is an explanatory diagram for explaining a conventional laser processing apparatus used for cutting a steel plate. In the conventional laser processing apparatus 900, a CO ₂ laser oscillator 901 using CO ₂ gas as a laser medium is often used as a laser oscillator. The laser beam LB emitted from the CO ₂ laser oscillator 901 is transmitted through an optical path provided in the main body 903 and the processing head 905 of the laser processing apparatus 900, and is focused and irradiated onto the surface of the steel sheet S that is a material to be processed. The

Specifically, as shown in FIG. 24, the laser beam LB having a wavelength of 10.6 μm emitted from the CO ₂ laser oscillator 901 is reflected and transmitted by mirrors 907a to 907d provided on the optical path, and processed by the machining head 905. The light is condensed on the surface of the steel sheet by a condensing lens 909 provided inside the steel plate. The steel sheet S that has absorbed the laser beam LB is heated and melted by the energy of the laser beam LB. An assist gas such as oxygen or an inert gas is sprayed from a nozzle provided at the tip of the processing head 905 in the direction coaxial with the laser beam LB, so that the molten steel is below the workpiece (Z-axis negative in FIG. 24). Direction side).

The laser processing apparatus 900 continuously melts and eliminates the workpiece material by scanning the condensing point of the laser beam LB in the XY plane while irradiating the laser beam LB. As a result, the material to be processed located on the scanning line of the laser beam LB and in the vicinity of the scanning line is removed, and finally the material to be processed is cut. Here, the portion from which the material to be processed is removed by irradiation with the laser beam LB is called a cut kerf or simply a kerf. Further, the polarization of the laser beam emitted from the CO ₂ laser oscillator 901 is usually circularly polarized so that the workability can be kept uniform even when the work material is cut in all directions on the XY plane. Is done.

  Further, the scanning in the X-axis direction in the laser processing apparatus 900 is realized by the main body 903 of the laser processing apparatus 900 moving on the guide rail 911 with the laser oscillator and the processing head. Further, scanning in the Y-axis direction in the laser processing apparatus 900 is realized by moving a processing head 905 including a mirror 907d, a condensing lens 909, a nozzle for spraying assist gas, and the like.

  FIG. 25A is a top view when the state of the vicinity of the condensing point of the laser beam LB is enlarged from above the steel plate S, and FIG. 25B is a cut along the center line of the kerf 921 shown in FIG. 25A. FIG.

  One laser beam LB condensed from above is absorbed by the forefront portion (hereinafter also referred to as kerf front) 923 of the kerf, as shown in FIGS. 25A and 25B. The material is melted by the laser beam LB being absorbed by the material to be processed, and the kerf front 923 moves in the cutting progress direction. Further, as shown in FIG. 25B, the position of the kerf front on the lower surface of the work material is delayed from the position of the kerf front on the upper surface. Therefore, an inclined kerf front surface 925 is formed on the kerf front. As shown in FIG. 25B, the melted material (for example, molten steel) flows down the kerf front surface 925 by the force of an assist gas (not shown) supplied coaxially with the laser beam LB, and moves downward from the lower surface of the material. And eliminated. This phenomenon occurs continuously by scanning the condensing point of the laser beam LB, and a kerf 921 is formed.

  As schematically shown in FIGS. 25A and 25B, after the laser beam LB passes and the kerf 921 is formed, the streak 927 remains on the side surface of the kerf in a direction perpendicular to the cutting direction. . The structure of the streak has predetermined irregularities and roughness (roughness). This roughness is an important index for evaluating the quality of the cut surface in laser cutting, and there is a demand for minimizing this roughness value.

On the other hand, in recent years, in the field of high-power laser processing, solid lasers having wavelengths in the vicinity of 1 μm (about 0.5 μm to 2 μm, hereinafter referred to as 1 μm band) such as fiber lasers and disk lasers. Increased output is gaining attention. These lasers, the result of the laser beam than the CO ₂ laser with a wavelength of 10.6μm conventionally used minutely can condensing, since the heating of the material to be processed at higher energy density is possible, high-speed machining Is suitable. In addition, these lasers having a wavelength of 1 μm band have a feature that transmission using an optical fiber is possible.

As described with reference to FIG. 24, in the laser processing apparatus using the CO ₂ laser, when the focused laser beam is scanned, the drive including the laser oscillator body is driven because the laser beam needs to be reflected and transmitted by the mirror. Was necessary, and a large-scale mechanical device was necessary. On the other hand, in the case of a laser with a wavelength of 1 μm that can be transmitted by an optical fiber, the laser oscillator can be removed from the processing apparatus body and the laser beam can be transmitted by an optical fiber without using a mirror. The manufacturing cost of the device part can be reduced. Further, since the oscillator of the CO ₂ laser has an oscillator configuration in which a laser medium is disposed between two resonators, periodic resonator alignment adjustment work is required, while a fiber laser or a disk laser. Since the alignment adjustment of the resonator is practically unnecessary, there is an advantage that the operating rate of the laser processing apparatus can be improved. As described above, the merit of introducing a fiber laser or a disk laser into a laser processing apparatus is extremely large.

However, regarding the cutting of thick steel plates having a thickness of about 4 mm or more, there is a problem that the cutting quality obtained with a laser having a wavelength of 1 μm band is lower than the level of cutting quality obtained with a CO ₂ laser. For example, the following non-patent document 1 reports a comparison result of cutting a stainless steel plate with a disk laser and a CO ₂ laser. When the thickness is 6 mm, the cutting surface roughness by the disk laser is the cutting surface roughness by the CO ₂ laser. It is shown to be extremely inferior to Due to the problem of the cut surface quality, the current situation is that the CO ₂ laser is continuously used in the cutting of the thick steel plate by the laser, and the advantages of the laser having the wavelength of 1 μm band described above cannot be enjoyed.

As a proposal for improving the roughness in cutting using a laser having a wavelength of 1 μm, the following Patent Document 1 points out that the beam quality of a normal laser beam is good in a CO ₂ laser, and then the wavelength of 1 μm. If a laser with good beam quality (Beam Parameter Product: BPP, also called beam parameter product) is used in the band, the cutting quality can be improved. However, as disclosed in Non-Patent Document 1, it has been clarified that even when a fiber laser or a disk laser having good beam quality is used, the cut surface quality does not reach that of a CO ₂ laser. This suggests that the difference in the laser beam wavelength of 1 μm band and 10 μm greatly changes the cutting phenomenon, and the knowledge of cutting using a conventional CO ₂ laser is applied to cutting with a laser of 1 μm wavelength. It also shows the complexity of the problem, which is difficult to do.

  On the other hand, it is possible to control the spatial intensity distribution of a laser beam by using a plurality of laser beams having a wavelength of 1 μm transmitted by an optical fiber, and this spatial intensity distribution control method can be applied to laser cutting. Has been studied.

For example, Patent Document 2 below discloses a technique for obtaining an intensity distribution in which circular laser beams are arranged in a ring shape by arranging a plurality of laser beams in a ring shape. This technology has a sharp rise in the laser intensity distribution at the outer edge of the laser beam, and has a certain effect on the roughness control when cutting steel sheets using assist gas mainly composed of oxygen gas. . However, it is difficult to provide a roughness equivalent to that of a CO ₂ laser with respect to cutting using a gas mainly composed of an inert gas such as nitrogen gas or argon gas, which is mainly used for stainless steel, as an assist gas. Yes, it does not show a sufficient effect.

  Patent Document 3 below proposes a technique in which at least one melt discharge beam is arranged behind the main laser beam that mainly generates melting in order to assist melt discharge. As disclosed in Patent Document 3, the basic idea of this technique is that the surface of the melt is evaporated by irradiation of the melt discharge beam, and the melt is discharged by a high pressure obtained as a reaction force of evaporation. To make it smoother. By facilitating the discharge of the melt, it is possible to improve cutting ability such as cutting speed and cutting thickness. However, regarding the cut surface quality, the portion determined by the main laser beam for melting generation is large except for the deep portion near the lower surface of the material where the action of the melt discharge beam appears, which is significantly larger than that of a normal single beam. Quality improvement was not obtained. Also, with this technology, the spatial intensity distribution of the laser beam focused on the material surface becomes asymmetric, so in order to ensure uniform cutting characteristics in all directions, the space of the laser beam according to changes in the cutting direction A precise mechanism for rotating the intensity distribution is required, and the apparatus is disadvantageous in that it is complicated.

Special table 2009-525189 Japanese Patent No. 4505190 Special table 2010-508149 gazette

P. A. Hilton, “Cutting Stainless Steel Disc and CO2 Lasers”, Proceedings of LAMP2009-the 5th International Congress on Laser Advanced Materials, 9

  As described above, in realizing laser processing (particularly, laser cutting processing) using a laser having a wavelength of 1 μm transmitted through an optical fiber, development of a technique capable of improving the cutting surface roughness. Was sought after.

  Therefore, the present invention has been made in view of the above problems, and an object of the present invention is to improve the roughness of the cut surface in a laser cutting process using a laser transmitted by an optical fiber. It is an object of the present invention to provide a laser processing apparatus and a laser processing method.

  In order to solve the above problems, according to an aspect of the present invention, a laser beam emitted from a laser oscillator is guided, and the surface of the material to be processed is focused and irradiated to process the material to be processed. A laser processing apparatus comprising: at least one laser oscillator that emits the laser beam; a plurality of optical fibers that transmit the emitted laser beam; and the laser beam emitted from the optical fiber that is to be processed At least one optical element for condensing and irradiating the surface of the material, and at the exit end of the optical fiber, the exit ends of the plurality of optical fibers are arranged in one or more annular shapes, The laser beam transmitted by the plurality of optical fibers arranged in the annular shape on the outer periphery has linearly polarized light, and is a straight line emitted from the emission ends of the plurality of optical fibers. The polarization direction of the laser beam of light, the laser processing apparatus is provided which is aligned in the radial direction center of the ring of the outermost basis.

  In the laser processing apparatus, one more optical fiber may be disposed at the center of the ring.

  Outgoing ends of the plurality of optical fibers are arranged in a plurality of annular shapes sharing the center, and in the optical fiber arranged in the annular shape inside the outermost ring, A laser beam having a polarization whose polarization direction is aligned in a radial direction with respect to the center of the laser beam may be transmitted.

  Outgoing ends of the plurality of optical fibers are arranged in a plurality of annular shapes sharing the center, and in the optical fiber arranged in the annular shape inside the outermost ring, the non-polarized light is provided. The laser beam may be transmitted.

  The at least one optical element includes a collimation lens that converts a laser beam emitted from the optical fiber into parallel light, and a condenser lens that collects the parallel light emitted from the collimation lens. Also good.

  The plurality of optical fibers are connected to a collimator fixing holder in which a plurality of collimators having the collimation lens are arranged in one or a plurality of annular shapes, and the condenser lens is a spherical lens having spherical aberration Or it is an aspherical lens which has a predetermined curved surface, The said laser beam inject | emitted from the said condensing lens may be condensed and irradiated on the surface of the said to-be-processed material.

  The collimator disposed in the outermost annular shape may be disposed to be inclined radially outward or inward with respect to the central axis direction of the ring of the collimator fixing holder. .

  Between the collimator fixing holder and the condenser lens, the laser beam emitted from the collimator is radially outward or inward with respect to the central axis direction of the ring of the collimator fixing holder. A wedge that inclines to may be provided.

  The laser oscillator may be a fiber laser or a disk laser.

  The direction of linearly polarized light of the laser beam transmitted by the plurality of optical fibers arranged on the outermost ring is changed in the same rotational direction between the adjacent laser beams. The angle formed by the directions of the linearly polarized light of the two laser beams may be within 60 °.

  Six or more optical fibers may be disposed on the outermost ring.

  In order to solve the above problem, according to another aspect of the present invention, a laser beam emitted from a laser oscillator is guided, and the surface of the material to be processed is condensed and irradiated, thereby the material to be processed A laser processing method of transmitting at least one laser beam emitted from at least one laser oscillator through a plurality of optical fibers, and condensing and irradiating the surface of the material to be processed with the laser beam. The optical element condenses and irradiates the surface of the material to be processed with the laser beam emitted from each of the optical fibers, and the emission ends of the plurality of optical fibers are 1 at the emission end of the optical fiber. Alternatively, the laser beam transmitted by the plurality of optical fibers disposed in the annular shape at least on the outermost circumference has linearly polarized light. The polarization direction of the plurality of the laser beam of the linearly polarized light emitted from the exit end of the optical fiber, the laser processing method are aligned in the radial direction center of the ring of the outermost basis is provided.

  In the laser processing method, one more optical fiber may be disposed at the center portion of the ring.

  Outgoing ends of the plurality of optical fibers are arranged in a plurality of annular shapes sharing the center, and in the optical fiber arranged in the annular shape inside the outermost ring, A laser beam having a polarization whose polarization direction is aligned in a radial direction with respect to the center of the laser beam may be transmitted.

  Outgoing ends of the plurality of optical fibers are arranged in a plurality of annular shapes sharing the center, and in the optical fiber arranged in the annular shape inside the outermost ring, the non-polarized light is provided. The laser beam may be transmitted.

  The at least one optical element includes a collimation lens that converts a laser beam emitted from the optical fiber into parallel light, and a condenser lens that collects the parallel light emitted from the collimation lens. Also good.

  The plurality of optical fibers are connected to a collimator fixing holder in which a plurality of collimators having the collimation lens are arranged in one or a plurality of annular shapes, and the condenser lens is a spherical lens having spherical aberration Or it is an aspherical lens which has a predetermined curved surface, The said laser beam inject | emitted from the said condensing lens may be condensed and irradiated on the surface of the said to-be-processed material.

  The collimator disposed in the outermost annular shape may be disposed to be inclined radially outward or inward with respect to the central axis direction of the ring of the collimator fixing holder. .

  Between the collimator fixing holder and the condenser lens, the laser beam emitted from the collimator is radially outward or inward with respect to the central axis direction of the ring of the collimator fixing holder. A wedge that inclines to may be provided.

  The laser oscillator may be a fiber laser or a disk laser.

  The direction of linearly polarized light of the laser beam transmitted by the plurality of optical fibers arranged on the outermost ring is changed in the same rotational direction between the adjacent laser beams. The angle formed by the directions of the linearly polarized light of the two laser beams may be within 60 °.

  Six or more optical fibers may be disposed on the outermost ring.

  As described above, according to the present invention, the emission ends of a plurality of optical fibers are arranged in one or a plurality of annular shapes, and are transmitted by a plurality of optical fibers arranged in at least the outermost annular shape. The beam has linear polarization, and the polarization directions of the linearly polarized laser beams emitted from the emission ends of the plurality of optical fibers are aligned in a radial direction with respect to the center of the outermost ring. It becomes possible to improve the roughness of the cut surface.

It is explanatory drawing for demonstrating the formation mechanism of a cut surface roughness. It is explanatory drawing for demonstrating the polarization direction of a laser beam. It is explanatory drawing for demonstrating the laser processing apparatus which concerns on the 1st Embodiment of this invention. It is explanatory drawing for demonstrating the processing head with which the laser processing apparatus which concerns on the same embodiment is provided. It is explanatory drawing for demonstrating the polarization direction of the laser beam in the laser processing apparatus which concerns on the same embodiment. It is explanatory drawing which showed an example of the structure of the optical fiber termination | terminus part which can align the direction of the linearly polarized light of a beam spot easily radially. It is explanatory drawing for demonstrating the polarization direction of the laser beam in the laser processing apparatus which concerns on the 1st Embodiment of this invention. It is explanatory drawing for demonstrating the processing head with which the laser processing apparatus which concerns on the same embodiment is provided. It is explanatory drawing for demonstrating the polarization direction of the laser beam in the laser processing apparatus which concerns on the same embodiment. It is explanatory drawing for demonstrating the polarization direction of the laser beam in the laser processing apparatus which concerns on the same embodiment. It is explanatory drawing for demonstrating the modification of the laser processing apparatus which concerns on the same embodiment. It is explanatory drawing for demonstrating the modification of the laser processing apparatus which concerns on the same embodiment. It is explanatory drawing for demonstrating the modification of the laser processing apparatus which concerns on the same embodiment. It is explanatory drawing for demonstrating the modification of the laser processing apparatus which concerns on the same embodiment. It is explanatory drawing for demonstrating the modification of the laser processing apparatus which concerns on the same embodiment. It is explanatory drawing for demonstrating the modification of the laser processing apparatus which concerns on the same embodiment. It is explanatory drawing for demonstrating the modification of the laser processing apparatus which concerns on the same embodiment. FIG. 3 is an explanatory diagram for explaining the machining head according to the first embodiment. It is the graph which showed the measurement result of the roughness of a kerf side part. FIG. 6 is an explanatory diagram for explaining a machining head according to a second embodiment. It is the graph which showed the measurement result of the roughness of a kerf side part. FIG. 10 is an explanatory diagram for explaining a machining head according to a third embodiment. It is the graph which showed the measurement result of the roughness of a kerf side part. It is explanatory drawing for demonstrating the conventional laser processing apparatus. It is explanatory drawing for demonstrating the kerf at the time of steel plate cutting. It is explanatory drawing for demonstrating the kerf at the time of steel plate cutting.

  Exemplary embodiments of the present invention will be described below in detail with reference to the accompanying drawings. In addition, in this specification and drawing, about the component which has the substantially same function structure, duplication description is abbreviate | omitted by attaching | subjecting the same code | symbol.

(Regarding the formation mechanism of cut surface roughness and knowledge obtained by elucidating the mechanism)
Prior to the description of the laser processing apparatus and laser processing method according to the embodiment of the present invention, the formation mechanism of the cut surface roughness found by the present inventors will be described.

As described above, regarding the examination of the solution to the problem that the cutting surface roughness obtained by cutting a thick steel plate using a laser having a wavelength of 1 μm band does not reach the cutting surface roughness obtained by the CO ₂ laser, No progress has been made. As one background to which such a solution study does not proceed, there is a problem that the formation mechanism of roughness is not fully understood.

In other words, regarding basic examinations related to the improvement of laser cutting technology, knowledge about the cutting ability such as the maximum cutting speed and the thickness that can be cut has been accumulated including the mechanism, but regarding the formation of roughness, the conventional CO ₂ laser There was little progress in understanding the phenomenon, including in the case of cutting processing using. In addition, as described above, the difference in laser beam wavelength of 1 μm band and 10 μm greatly changes the cutting phenomenon, so the knowledge of cutting using a conventional CO ₂ laser is applied to cutting with a laser of wavelength 1 μm band. I can't do it. For these reasons, in order to improve the roughness when cutting using a laser of 1 μm band, it is necessary to advance understanding of the process of forming roughness in cutting using a laser in this wavelength region.

  In this regard, as a result of careful research, the present inventors have succeeded in obtaining important knowledge regarding the formation mechanism of cut surface roughness generated by laser cutting using a laser having a wavelength of 1 μm. I came to find an improvement plan. Below, the formation mechanism of the cut surface roughness found by the present inventor will be specifically described with reference to FIG. 1 with reference to FIG.

  First, the present inventors pursued the mechanism of roughness formation in steel sheet cutting using a laser with a wavelength of 1 μm band through observation experiments. As a result, it was clarified that the flow of molten steel flowing down the side part of the kerf front is discontinuous. Conventionally, the molten steel flow at the kerf front has been believed to be continuous, as shown in FIG. 25B. However, as shown in FIG. 1, as a result of observation experiments by the present inventors, it has been found that the molten steel actually slides down the side portion 15 of the kerf front 11 discontinuously in the form of droplets.

  More specifically, the steel sheet that has absorbed the laser beam LB is heated and melted by the energy of the laser beam LB to form droplets. The kerf front surface 13 is formed as the droplets are removed downward by the assist gas. When the laser beam LB is scanned, a flow of molten steel sliding occurs on the kerf front surface 13, and the steel plate is cut to form the kerf 10.

  On the other hand, also in the side portion 15 of the kerf front corresponding to the outer edge portion of the laser beam LB, the steel material absorbs the laser beam LB, so that the steel material is melted on the steel plate surface on the Z-axis positive direction side and becomes droplets. In this process, heat conduction occurs from the droplet to the solid part near the kerf side, and as a result, the solid part is melted. Such a phenomenon is repeated while the liquid droplet slides down the side portion 15 of the kerf front, and the side portion 15 of the kerf front has a streak such that the portion where the liquid droplet has passed becomes the groove portion 17. , Formed periodically. It was found that this streak becomes the cut surface roughness.

  As a result of intensive studies based on this roughness formation mechanism, the inventors focused on controlling the polarization state of the focused laser beam, and as schematically shown in FIG. 2, to the side portion 15 of the kerf front, By irradiating a laser beam that is polarized in a direction perpendicular to the side portion 15 of the kerf front (in other words, irradiating the side portion 15 with a p-polarized laser beam), the cut surface quality is improved. I found that it can be improved. The following can be considered as this reason. That is, by selecting the polarized light in the direction perpendicular to the side portion 15, the absorption rate of the laser beam to the side portion 15 is improved and the temperature of the flowing droplet is increased, but at the same time, the viscosity of the droplet is decreased. As a result, the flow-down speed of the droplet is improved, and the droplet slides down the side portion 15 in a shorter time. As a result, it is considered that the amount of heat transfer from the side portion 15 to the solid portion is reduced and the roughness is reduced.

  Here, Patent Document 3 discloses a method of using linearly polarized light for a main laser beam that generates melting or a laser beam that discharges a melt, but the purpose of using linearly polarized light in Patent Document 3 is as follows. It should be noted that this is a smooth elimination of the melt and, unlike the improvement of the cut surface quality, which is the object of the present invention, there is also a difference in the preferred polarization direction.

Incidentally, it is well known that the absorption rate of a laser beam depends on the wavelength of the laser beam. The reason why the quality obtained by cutting using a 1 μm band laser in the conventional method is not as good as that of a CO ₂ laser with a wavelength of 10.6 μm is due to the difference in the phenomenon that the laser beam is absorbed by the kerf front. It is guessed that.

  The simplest method for irradiating polarized light in a direction perpendicular to the side portion 15 is a method using a single polarized light for one laser beam as shown in FIG. However, in this method, when it becomes necessary to cut in all directions on the XY plane, it is not always possible to obtain polarized light in a direction perpendicular to the side portion 15. To solve this problem, the present inventors have used circularly polarized laser beams emitted from a plurality of optical fibers to obtain circularly polarized light in a direction perpendicular to the side portion with respect to all directions in the XY plane. The inventors have conceived a method in which the laser beams are arranged in a ring and the polarizations of the respective laser beams are aligned radially with respect to the center of the ring, and the present invention described below has been reached.

(First embodiment)
<Overall configuration of laser processing equipment>
Below, the laser processing apparatus and the laser processing method which concern on the 1st Embodiment of this invention are demonstrated in detail, referring FIGS. 3-10.

  First, the overall configuration of the laser processing apparatus 100 according to the present embodiment will be described with reference to FIG. FIG. 3 is an explanatory diagram showing the overall configuration of the laser processing apparatus 100 according to the present embodiment.

  As shown in FIG. 3, a laser processing apparatus 100 according to this embodiment includes a laser oscillator 101, an optical fiber 103, a laser processing apparatus main body (hereinafter also simply referred to as a main body) 105, a processing head 107, And a guide rail 109.

  The laser oscillator 101 is used for performing laser processing such as cutting on a material to be processed (for example, the steel sheet S shown in FIG. 3), and has a wavelength of 1 μm band (about 0.5 μm to 2 μm, more preferably, A laser beam LB of about 1 μm to 1.1 μm corresponding to a typical laser wavelength of a fiber laser or a disk laser is emitted. As will be described later, in the laser processing apparatus 100 according to the present embodiment, at least one laser oscillator 101 is installed in the laser processing apparatus 100 in order to transmit the laser beam LB using a plurality of optical fibers 103. Moreover, the laser oscillator 101 for the number of the optical fibers 103 to be used may be installed.

  As the laser oscillator 101 according to the present embodiment, any laser oscillator can be used as long as it can emit a wavelength of about 0.5 μm to 2 μm capable of optical fiber transmission. As such a laser oscillator 101, a fiber laser, a disk laser, an Nd: YAG laser, or the like can be used. In the laser processing apparatus 100 according to the present embodiment, the laser beam LB only needs to have the wavelength of the 1 μm band before being guided to the optical fiber 103, and the harmonics of a known laser oscillator as the laser beam LB. It is also possible to use waves. In the narrow wavelength band as described above, the difference in absorption depending on the wavelength is slight, and the mechanism for improving the cut surface roughness as described above is common, and all wavelengths belonging to the above wavelength band are included. Thus, the effect according to the present embodiment can be obtained.

  Further, as described in detail below with reference to FIG. 5, in the laser processing apparatus 100 according to the present embodiment, a plurality of optical fibers 103 are bundled in an annular shape, and a circular laser beam emitted from each optical fiber 103. The spots (hereinafter also simply referred to as beam spots) are arranged in an annular shape. As will be described in detail later, since the plurality of circular beam spots are focused on the surface of the material to be processed through the condensing optical system, the circular laser beam spots are distributed in an annular shape on the surface of the material to be processed. Will do. At this time, the beam diameter defined by the circumscribed circle of the circular beam spot arranged on the outermost virtual ring on the surface of the material to be processed has a desirable range (for example, a level of 0.1 mm to 1 mm) in laser cutting. It is preferable that Therefore, the diameter (spot diameter) of each circular laser beam spot focused on the surface of the work material is preferably 0.3 mm or less. Here, the beam diameter defined by the circumscribed circle of the beam spot of the laser beam group is a diameter that effectively acts in laser cutting, and hereinafter, the beam defined by the circumscribed circle of the beam spot of the laser beam group. The diameter is referred to as the effective diameter D of the laser beam group. Note that the beam spot on the surface of the workpiece does not necessarily have a strictly circular shape. For example, the beam diameter with respect to the radial direction with respect to the center of the ring and a direction perpendicular to the radial direction (that is, the circumference of the ring). The beam spot may have an elliptical shape with a different beam diameter with respect to (direction).

In order to obtain the spot diameter as described above, the beam quality (BPP) expressed as the product (r ₀ × θ) of the beam waist radius r ₀ and the full width at half maximum θ of the beam divergence angle is 15 mm · mrad. The following is preferable. The value of the beam quality (BPP) is a constant value depending on the laser oscillator 101 to be used, but there is a limit to the value that can be taken by the full width at half maximum θ of the beam divergence angle for transmission by an optical fiber. Therefore, by reducing the value of the beam quality, the core diameter of the optical fiber through which the beam is transmitted can be reduced. This means that the spot diameter at the end portion of the optical fiber can be reduced. As a result, the spot diameter at the surface of the work material can also be reduced as will be described in detail later. In the current laser technology, it can be said that a fiber laser or a disk laser capable of realizing beam quality in this range is a suitable laser in the laser processing apparatus 100 according to the present embodiment.

  The laser beam LB emitted from the laser oscillator 101 may be a continuous wave or a pulse wave.

  The optical fiber 103 transmits the laser beam LB emitted from the laser oscillator 101 to the processing head 107 provided in the main body 105. In the laser processing apparatus 100 according to the present embodiment, as described in detail below, at least a part of the optical fiber 103 provided in the laser processing apparatus 100 (in order to perform laser processing using a linearly polarized laser beam ( More specifically, a polarization maintaining fiber (PMF) is used for the optical fiber 103) connected to the processing head 107 described later.

  A method for transmitting the linearly polarized laser beam LB to the processing head 107 using a plurality of optical fibers 103 and a method for arranging the linearly polarized laser beam will be described in detail below.

  The laser processing apparatus main body 105 is provided with a processing head 107 for condensing and irradiating the surface of the material to be processed with the laser beam LB. The apparatus main body 105 can freely move along the guide rail 109 in the X direction shown in FIG. Can be moved to.

  The processing head 107 is installed so as to be movable in the Y direction shown in FIG. 3 with respect to the apparatus main body 105, and a circular laser beam having linearly polarized light transmitted by a plurality of optical fibers 103. LB is focused on the surface of the work material. Further, the processing head 107 sprays an assist gas using an inert gas such as nitrogen gas or argon gas or an oxygen gas on the surface of the work material in the direction coaxial with the laser beam LB.

  The detailed configuration of the machining head 107 will be described in detail below.

  The overall configuration of the laser processing apparatus 100 according to the present embodiment has been described above with reference to FIG.

<About the configuration of the machining head>
Next, the detailed configuration of the processing head 107 provided in the laser processing apparatus 100 according to the present embodiment will be described with reference to FIGS. 4 to 10, and the laser oscillator 101, the optical fiber 103, and the processing head 107. The relationship will be described in detail.

  In the following, an example in which eight fiber lasers capable of emitting linearly polarized laser beams are used as the laser oscillator 101 and the laser beam LB is transmitted to the processing head 107 by the eight optical fibers 103 will be described as an example. , Explain. However, the form of the laser processing apparatus 100 described below is merely an example, and the configuration of the laser processing apparatus 100 according to the present embodiment is not limited to the following.

  Below, the structure of the processing head 107 which concerns on this embodiment is demonstrated, referring FIGS. 4-7. FIG. 4 is an explanatory view showing the processing head according to the present embodiment, and FIGS. 5 and 7 are explanatory views for explaining the polarization direction of the laser beam in the laser processing apparatus according to the present embodiment. FIG. 6 is an explanatory view showing an example of the configuration of the optical fiber terminal portion that can easily align the linearly polarized light directions of the beam spots radially.

  As illustrated in FIG. 4, the machining head 107 according to the present embodiment is a centrally symmetric part including a cylindrical portion 121 and a nozzle 123.

  A plurality of optical fibers 103 are fixed to one end portion of the cylindrical portion 121 (the end portion on the Z axis positive direction side in FIG. 3) via an optical fiber fixing holder 125. Further, in the processing nozzle 107, a condensing optical system for condensing and irradiating the surface of the material to be processed with a laser beam LB emitted from each optical fiber 103 fixed to the optical fiber fixing holder 125 as a laser beam group. A system 127 is provided.

  Further, an assist gas supply port 133 for supplying an assist gas into the nozzle 123 is provided in the nozzle 123 located below the cylindrical portion 121 (on the Z axis negative direction side in FIG. 3). Assist gases such as oxygen gas, nitrogen gas, and argon gas supplied from the assist gas supply port 133 are jetted downward from the opening provided in the lower portion of the nozzle 123 in the same direction as the laser beam group. Due to the action of the assist gas, the molten steel that is generated on the kerf front surface and the side portion of the kerf front and flows down in the thickness direction of the steel sheet is quickly eliminated.

  The optical fiber fixing holder 125 is provided with through holes corresponding to the number of the optical fibers 103, and each of the plurality of optical fibers 103 is fixed to these through holes. Here, the through holes provided in the optical fiber fixing holder 125 are arranged in one or more annular shapes. Further, when the through holes are arranged in a plurality of annular shapes, the respective annular rings are arranged concentrically so as to share the center of the circle. Moreover, it is preferable that the through holes provided on the circumference of the ring are arranged at equal intervals so that adjacent through holes do not contact each other.

  In the example shown in FIG. 4, since the eight optical fibers 103 are used to transmit the laser beams LB emitted from each of the eight fiber lasers, the optical fiber fixing holder 125 includes eight optical fibers 103. The through holes are provided on the ring so as to be equidistant from each other.

  In each of the through holes provided in the optical fiber fixing holder 125, a terminal portion opposite to the laser oscillator 101 side of the optical fiber 103 is inserted and fixed. Here, in the processing head 107 according to the present embodiment, a linearly polarized laser beam is transmitted through the optical fiber 103 fixed to the optical fiber fixing holder 125. As shown in FIG. 5, at least in the outermost through hole, the outermost through hole is arranged in the polarization direction of the linearly polarized laser beam transmitted through each optical fiber 103 fixed to the through hole. It is aligned radially with the center of the virtual circle being used as a reference. In other words, as shown in FIG. 5, at least in the outermost through holes, the direction of the linearly polarized light corresponding to these through holes is between the linearly polarized laser beams transmitted by the adjacent optical fibers. When the center of the ring is used as a reference, the rotation direction is the same (ie, clockwise or counterclockwise). In order to realize the polarization state as described above for the plurality of laser beams as a whole, the direction of the linearly polarized light transmitted by the optical fiber 103 is the direction as shown in FIG. Thus, the optical fiber 103 is fixed after the installation direction of the optical fiber 103 is adjusted.

  FIG. 6 shows an example of the configuration of an optical fiber terminal portion that can easily perform alignment for obtaining radial linearly polarized light. As shown in FIG. 6, a notch having a plane perpendicular to the direction of linearly polarized light, for example, is processed at the end of the optical fiber. By machining a through-hole having a similar shape in the optical fiber fixing holder 125, the direction of linearly polarized light of the beam spot arranged in an annular shape can be easily aligned radially. In FIG. 6, the case where the notch portion is provided in the optical fiber terminal portion so as to be perpendicular to the direction of the linearly polarized light has been described, but the relative direction of the notch portion with respect to the direction of the linearly polarized light is described. Is not particularly limited as long as it can be used as a mark for alignment between the optical fiber 103 and the optical fiber fixing holder 125.

  Moreover, in order to ensure the uniformity of processing when processing the workpiece material along an arbitrary direction, the power of the laser beam emitted from each optical fiber 103 can be adjusted to be uniform. preferable.

  Note that, for example, a non-added silica glass fiber having no core is preferably fused as an end cap to the end portion of the optical fiber 103 fixed to the optical fiber fixing holder 125. By fusing such an end cap, the power density of the laser beam at the glass end surface where the laser beam is emitted from the optical fiber into the air is reduced, and damage to the glass end surface can be prevented. It becomes possible. Such an end cap may be fused to the output end of each optical fiber 103, or one end cap common to the optical fiber fixed to the optical fiber fixing holder 125 is provided. Also good.

  A laser beam group composed of laser beams LB emitted from the emission end of the optical fiber 103 fixed to the optical fiber fixing holder 125 is condensed by the condensing optical system 127 and irradiated onto the surface of the work material. That is, the condensing optical system 127 provided in the processing head 107 has a function of forming an image of the intensity distribution (pattern) of the laser beam at the end of the optical fiber 103 on the surface of the processing material. Therefore, the laser beam group emitted from the end of the optical fiber fixing holder 125 into the air has an intensity distribution such that circular beam spots are evenly arranged on the ring as shown in FIG. In the case where it has, the intensity distribution of the laser beam group on the surface of the material to be processed also has circular beam spots arranged in an annular shape as shown in FIG. 5, and the direction of each linearly polarized light becomes radial. It will be a thing.

  In the processing head 107 shown in FIG. 4, as an example of such a condensing optical system, a collimation lens 129 that makes a laser beam group emitted while diverging from an optical fiber 103 into parallel light, and a laser that becomes parallel light. And a condensing lens 131 for condensing the beam group on the surface of the material to be processed. In the example shown in FIG. 4, the condensing optical system 127 is formed by two optical elements (lenses), which are a collimation lens 129 and a condensing lens 131. However, the condensing optical system 127 has at least one optical element. It is only necessary to have an element (lens), and the condensing optical system may be formed by three or more lens groups. Further, each of the collimation lens 129 and the condenser lens 131 may be a lens group including a plurality of optical elements (lenses). Here, the lens used for the condensing optical system may be a spherical lens or an aspherical lens.

  In this embodiment, as shown in FIG. 5, the effective diameter of the laser beam group is defined by the circumscribed circle of the circular beam spot located on the outermost periphery. The effective diameter D of the laser beam group on the surface of the work material is used as the condensing optical system 127 to the diameter d of the circumscribed circle of the circular beam spot arranged in an annular shape at the end of the optical fiber. This value is multiplied by the imaging magnification determined by the focal length and the installation position of the condenser lens group. Looking at each beam spot arranged in an annular shape, a value obtained by multiplying the spot diameter at the end of the optical fiber given by the core diameter of the optical fiber by the imaging magnification described above is the spot on the workpiece surface. It becomes the diameter.

The beam diameter (that is, the effective diameter of the laser beam group) D on the surface of the workpiece material is preferably about 0.1 to 1 mm. Generally, the beam diameter increases as the thickness of the workpiece material increases. Will be selected. Therefore, in the present embodiment, the imaging magnification of the condensing optical system 127 is selected so that a desired beam diameter is obtained. As shown in FIG. 4, the collimation lens 129 and the condensing lens 131 are provided between the terminal end of the bundled optical fibers (that is, the end of the optical fiber fixing holder 125) and the condensing point on the surface of the work material. When installed, the effective diameter D of the laser beam group on the surface of the work material is equal to the diameter d of the circumscribed circle of the circular beam spot arranged in an annular shape at the end of the optical fiber fixing holder 125, and the collimation lens. the focal length _{f 1} of 129, the focal length _{f 2} of the condenser lens 131, with, can be expressed as equation 101 below.

  As shown in FIG. 5, among the circular beam spots arranged in one or a plurality of annular shapes, at least the circular beam spot located on the outermost circumference has radial linearly polarized light, so that any processing direction (cutting) Even when the direction) is selected, a laser beam having polarized light in a direction substantially perpendicular to the side portion 15 is incident on the side portion 15 of the kerf front. As a result, the absorptance of the laser beam with respect to the liquid droplet flowing down the side portion 15 of the kerf front is increased as compared with a normal non-polarized laser beam. As a result, the temperature of the droplet rises and the viscosity decreases, and the drop speed of the droplet increases as the viscosity decreases, so the amount of heat transfer from the side portion to the solid portion decreases, and the cut surface becomes rough. The degree is reduced.

  Note that the direction of the linearly polarized light shown in FIG. 5 does not have to be completely radial, and the direction of the linearly polarized light of the circular beam spot irradiated on the side portion 15 and the direction perpendicular to the side portion 15 The angle formed with (that is, the direction perpendicular to the cutting progress direction) may be within 30 degrees. If the angle between the direction of linearly polarized light and the direction perpendicular to the side portion 15 is within 30 degrees, the absorptivity of the laser beam with respect to the liquid droplet flowing down the side portion 15 is irradiated with the laser beam in the non-polarized state. Therefore, the effect according to this embodiment can be obtained.

  When considering processing (for example, cutting) in an arbitrary direction, the direction of linearly polarized light of the circular beam spot irradiated on the side portion 15 and the direction perpendicular to the cutting progress direction (the method of the side portion 15) In order to always keep the angle formed with the (linear direction) within 30 degrees, the angle difference between the directions of linearly polarized light in adjacent circular beam spots may be set within 60 degrees. Hereinafter, this reason will be described with reference to FIG.

  In FIG. 7, two beam spots P and Q adjacent to each other are extracted from a plurality of circular beam spots arranged in an annular shape on the outermost periphery, and the extracted beam spots P and Q are illustrated together with the directions of the respective linearly polarized lights. Yes.

Consider a cutting process in a direction D _P perpendicular to the direction of linearly polarized light of the beam spot P. At this time, the direction of the linearly polarized light of the beam spot P irradiated on the side portion 15 is completely perpendicular to the cutting progress direction, and the reduction effect of the cutting surface roughness according to the present embodiment is maximized. . Similarly, also in the case where the cutting process is performed in the direction _DQ perpendicular to the direction of the linearly polarized light of the beam spot Q, the cutting surface roughness reduction effect according to the present embodiment is maximized.

Here, considering that to the cutting direction is gradually changed from D _P to D _Q. At this time, it become the beam spot P to be irradiated to the side portion 15, the orientation of the linear polarization of Q is most deviated from the direction perpendicular to the cutting direction, just two equal parts the vector D _P and the vector D _Q angle of direction (i.e., D _R direction in FIG. 7) it is time to cut. The maximum deviation angle in this case is given by a value obtained by dividing the angle difference between the directions of linearly polarized light of the beam spots P and Q (angle α shown in FIG. 7) by 2. From the above explanation, if the angle difference in the direction of linearly polarized light between two adjacent beam spots existing on the ring is within 60 degrees, the side portion The angle between the direction of linearly polarized light of the circular beam spot irradiated to the direction 15 and the direction perpendicular to the cutting progress direction can always be within 30 degrees, and the cut surface roughness according to this embodiment can be reduced. It turns out that an effect is acquired. Further, considering the number of optical fibers for realizing this state, it can be seen that it is preferable to install six or more optical fibers that are values obtained by dividing 360 degrees by 60 degrees.

[Modification]
As described above, in the laser processing apparatus 100 according to the present embodiment, a plurality of circular beam spots are arranged in one or a plurality of annular shapes, and each of the beam spots in the annular ring located on the outermost periphery is arranged. The direction of linearly polarized light is aligned radially, and the laser power of the beam spots arranged in an annular shape is uniform. Here, the laser processing apparatus 100 according to the present embodiment can be realized in various different forms other than those shown in FIGS.

  For example, FIG. 4 shows an example in which eight optical fibers 103 are bundled by the optical fiber fixing holder 125 and each of the eight optical fibers is connected to eight independent laser oscillators 101. However, as shown in FIG. 8, the optical fiber 103 can be branched and used so that the number of laser oscillators can be reduced. Here, some modifications can be considered for the apparatus configuration as shown in FIG.

  As one of the above-described modifications, a fiber laser that emits a linearly polarized laser beam is used, and the optical fiber 103 provided on the downstream side of the fiber laser is all polarization-maintaining fibers, and the branch shown in FIG. A configuration in which the couplers A and B are both couplers capable of maintaining the plane of polarization can be given. As another modification, there is a configuration in which a fiber laser that emits a non-polarized laser beam is used, and an optical fiber for non-polarization and a polarization maintaining fiber are used in combination. That is, the branching coupler A shown in FIG. 8 is a non-polarizing 1: 1 branching coupler, and a normal non-polarizing optical fiber is used from the fiber laser to the branching coupler B shown in FIG. Transmit a polarized laser beam. Thereafter, a coupler that branches an unpolarized beam into two linearly polarized beams having equal power is used as the branching coupler B, and a fiber that is downstream from the branching coupler B is a polarization-maintaining fiber. The beam is transmitted to the optical fiber fixing holder 125.

  By the way, in cutting using a laser beam, the required laser power is determined by the volume of material per unit time melted and removed as a cutting kerf in a first approximation. For this reason, when the same cutting speed is selected, it is necessary to increase the input laser power as the thickness of the material to be cut increases. However, as is generally known for commercially available fiber lasers and the like, the quality of the laser beam emitted from the laser oscillator deteriorates as the power of the laser beam increases. There is a tendency that problems such as inability to occur occur. From such a background, in the laser processing apparatus and laser processing method according to the present embodiment using a plurality of laser beams, when increasing the total input power in order to increase the cutting thickness, the power is small but the laser beam There may be a direction that uses a large number of laser beams with good quality to increase the total input power while maintaining the overall beam quality.

  As a modification of increasing the number of laser beams as described above, as shown in FIG. 9, in addition to the beam spot arranged in an annular shape, a beam spot C may be further arranged at the center of the annular ring. . The beam spot C located at the center of the ring is hardly absorbed by the side portion 15 of the kerf front and contributes solely to the melting and removal of the substantially central portion of the kerf front surface in the steel plate thickness direction. Therefore, the polarization state of the beam spot C located at the center of the ring is not limited, and either non-polarized light or linearly polarized light along a predetermined direction may be used. However, it is preferable that the characteristics of the laser beam as a whole be symmetrical with respect to the central axis if the uniformity of the finish when cutting in all directions is desired. In order to make the characteristics of the laser beam symmetric with respect to the central axis, it is preferable to arrange a non-polarized laser beam at the center of the ring, and a circularly polarized laser beam may be arranged. In this way, by further disposing the beam spot C at the center of the group of beam spots arranged in an annular shape, it becomes possible to improve the cutting speed and cut a thicker workpiece.

  As another modification for increasing the number of laser beams, as shown in FIG. 10, circular beam spots may be arranged in multiple annular shapes sharing the center. At this time, it is preferable to arrange the circular beam spots forming the multiple circular rings so as to have central axis symmetry. In addition, in the plurality of circular beam spots, a circular beam spot disposed on the circular ring adjacent to the circular ring is positioned between two circular beam spots adjacent to each other on the same circular ring. If the staggered arrangement is used, the beam diameter defined by the circumscribed circle of the circular beam spot located on the outermost periphery can be reduced.

  Here, each of the circular beam spots arranged on the outermost ring has linearly polarized light, and as illustrated in FIG. 5, the direction of the linearly polarized light is based on the center of the ring. Are arranged in a radial pattern. Further, as shown in FIG. 10, the circular beam spot arranged on the circular ring located inside the outermost circular ring has linearly polarized light radially aligned with the center of the circular ring as a reference. Or a non-polarized state. In general, when cutting at low speed, only the outermost beam tends to be irradiated to the kerf side, but as the cutting speed is increased, the inner beam is also irradiated to the kerf side, and the rate of contribution to cutting processing increases. Come on. Therefore, as shown in FIG. 10, the beam spot located inside the outermost ring is also linearly polarized linearly with respect to the center of the ring, so that a predetermined thickness can be obtained. Even when cutting at a high speed near the limit, the energy of the laser beam can be efficiently absorbed by the side portion of the kerf front.

  In the form as shown in FIG. 10, the total input laser power can be greatly increased, and the focused beam diameter defined as the circumscribed circle of the beams arranged in the outermost circle can be increased. Thereby, the width | variety of the kerf formed is expanded and the removal of a molten material can be made easier. As a result, it is possible to cut a material having a large thickness while improving the cut surface roughness.

  As shown in FIG. 10, a circular beam spot is arranged on a plurality of circular rings sharing the center, and then, as shown in FIG. 9, a further circular beam spot C is formed at the center of the circular ring. May be arranged.

FIG. 11 shows still another modification of the laser processing apparatus according to the present embodiment.
In this modification, the seven laser beams are transmitted to the machining head by seven independent optical fibers respectively connected to the seven laser oscillators 101. In this modification, a collimator fixing holder 153 formed by bundling seven independent collimators 151 is used instead of the optical fiber fixing holder 125 shown in FIG. The seven laser beams emitted from the seven optical fiber exits are converted into parallel light by seven independent collimators 151 provided in the collimator fixing holder 153, respectively. These collimators 151 are composed of a collimation lens, and have a function of converting a laser beam emitted from an optical fiber with a certain divergence angle into a parallel laser beam by the collimation lens.

  Here, in the collimator fixing holder 153 shown in FIG. 11, the six collimators 151 are arranged on the same circular ring, and the remaining one collimator 151 is arranged at the center of the circular ring. . A linearly polarized laser beam is transmitted to the six collimators 151 arranged in an annular shape from the laser oscillator 101 that emits the six linearly polarized laser beams via the six polarization-preserving optical fibers. Further, a non-polarized laser beam is transmitted from a laser oscillator 101 that emits a single non-polarized laser beam to one optical fiber disposed at the center of the ring.

  A total of seven laser beams emitted from each collimator 151 enter the condenser lens 131 and are condensed at the processing point. By using the method described below, as shown in FIG. 12, the laser beams emitted from the six collimators 151 arranged in an annular shape are arranged on the circular ring, and the non-polarized laser beam is converted into the circular ring. It can be condensed so that it may line up in the center of the. In this case, by adjusting the direction of the linearly polarized light of the six laser beams arranged on the ring, the direction of the linearly polarized light of the six optical fibers at the condensing point can be made radial with respect to the center. .

  The configuration shown in FIGS. 11 and 12 uses basically the same number of collimators 151 as the number of laser beams. For example, the method shown in FIG. Compared with a method of collecting and gripping the end portion in a very narrow area of less than about 1 mm, this modification has an advantage that it is easy to manufacture.

  Here, in the embodiment of the present invention, as shown in FIG. 12, a plurality of laser beams are arranged in an annular shape having a certain radius e, and the diameters of the plurality of laser beams are desired beam diameters (for example, It is desirable that the minimum beam diameter be obtained at the focus position. Hereinafter, various methods will be described in which a plurality of parallel laser beams are incident on one condenser lens as described above, and the condensed beams are arranged in an annular shape as shown in FIG.

  First, consider a case where a normal spherical lens is used as the condenser lens 131. Assuming that the spherical lens to be used is ideally a lens having no aberration, the focus position of the parallel incident laser beam overlaps one point (in other words, the radius e = 0). However, as is well known, since spherical lenses are accompanied by spherical aberration, the focal points do not completely overlap as shown in FIG. 13 due to the influence of this spherical aberration. , And can be arranged in an annular shape having a certain radius e.

  At this time, the distance L between the condenser lens 131 and the surface of the object to be cut is the distance at which the laser beam located at the center (for example, the laser beam B in FIG. 13) becomes the focus position and has the minimum beam diameter. Is set, the laser beam positioned in an annular shape (for example, laser beams A and C in FIG. 13) slightly deviates from the focus position and the beam diameter expands due to the influence of spherical aberration. When the influence on the cutting performance and quality resulting from the deviation of the laser beams arranged in an annular shape from the focus position can be tolerated, the effects of the present invention can be obtained by implementing the arrangement as shown in FIGS. Is possible.

  Here, the distance L between the condensing lens 131 and the surface of the object to be cut does not necessarily have to be set so that the laser beam located at the center becomes the focus position, and the distance L may be increased or decreased. . By controlling the increase / decrease of the distance L, it is possible to adjust the distance between the central beam spot and each laser beam spot arranged on the ring (that is, the size of the radius e in FIG. 12).

  Further, if the condenser lens 131 is an aspherical lens having a predetermined curved surface without using a normal spherical lens, the focus positions of all laser beams arranged in the center and in an annular shape are designed by designing the curved surface of the lens surface. It is possible to freely control the radius e of the ring.

  Here, the condensing state of the laser beam as shown in FIG. 12 can also be obtained by slightly changing the incident angle of the parallel laser beam to the condensing lens 131 from the vertical.

  First, as shown in FIG. 14, the angle of the collimator 151 disposed in an annular shape is inclined radially outward with respect to the central axis direction of the annular shape of the collimator fixing holder 153. By fixing each collimator 151 to be arranged, the radius e can be adjusted according to the inclination angle of the collimator 151 (for example, the angle φ in FIG. 14). In this case, the condensing lens 131 can be a spherical lens, an aspherical lens, or the like.

  Further, as shown in FIG. 15, the laser beam emitted from the collimator 151 is directed to the central axis direction of the ring of the collimator fixing holder 153 on the optical path between the collimator 151 and the condenser lens 131. By disposing the wedges 155 that are inclined radially outward, the incident angle of the parallel beam with respect to the condensing lens 131 can be slightly shifted from the vertical, and the processing point is located away from the central axis. The beam spot can be condensed.

  The incident angle of the parallel laser beam on the condenser lens 131 is not necessarily the direction away from the central axis of the collimator fixing holder 153 as shown in FIGS. 14 and 15 (in other words, the collimator fixing holder 153 It is not necessary to make the angle inclined radially outward with respect to the central axis direction of the ring.

  For example, as shown in FIG. 16, the collimator 151 is moved in a direction approaching the central axis of the collimator fixing holder 153 (in other words, radially inward with respect to the central axis direction of the ring of the collimator fixing holder 153). By tilting, a plurality of laser beams can be condensed on the ring. The same applies to the wedge 155. For example, as shown in FIG. 17, the laser beam emitted from the collimator 151 is inclined radially inward with respect to the central axis direction of the ring of the collimator fixing holder 153. As such, a wedge 155 may be provided.

  Here, it goes without saying that there are various possibilities for realizing the modified example of the present embodiment by combining the above-described methods.

  As described above, in another modification of the present embodiment described with reference to FIGS. 11 to 17, a plurality of parallel laser beams emitted from a plurality of collimators have a beam diameter of about several millimeters. In 131, the center axis (optical axis) of each laser beam arranged on the ring is separated from the center axis of the ring by about 5 mm or more. Therefore, when the light is condensed from the condensing lens 131 onto the surface of the work material, the optical axis of each laser beam arranged in an annular shape is slightly inclined with respect to the central axis of the ring.

  On the other hand, in the first example of the present embodiment shown in FIGS. 4 and 8, the distance between the optical axis of each laser beam arranged in an annular shape and the central axis of the annular shape is about 1 mm or less in the condenser lens 131. It has become. This is because the effective diameter D of the laser beam group on the surface of the work material is set to about 1 mm or less suitable for laser cutting, in the optical fiber fixing holder 125 having the relationship of the effective diameter D and (Equation 101). This is because the diameter d of the circumscribed circle of the circular beam spot arranged in an annular shape is preferably about 1 mm or less. Since the distance between the optical axis of each laser beam arranged in a ring and the central axis of the ring is small, the laser beam arranged on the ring also has a state where the optical axis is almost parallel to the central axis of the ring It is transmitted with.

  This is the only substantial difference between the modification of the present embodiment and the optical system of the first example, and the present invention is such that the polarization directions of a plurality of laser beams arranged on the ring are aligned in a radial direction. The essential parts of are common. Therefore, also in the modified example of the present embodiment, the same effect as that of the first example of the present embodiment can be obtained with respect to the improvement of the cut surface roughness.

  In the embodiment of the present invention described above, the outputs of the laser beams emitted from the plurality of optical fibers may not be uniform. In order to obtain the same cutting quality when cutting in all directions, it is desirable that the outputs of any two laser beams arranged on the same ring are the same, but two laser beams arranged on different rings have the same output. The outputs do not have to be the same. In the above description, an example in which the focus position of one or a plurality of laser beams is adapted to the surface of the cutting object has been shown. However, such a focus position is set inside the cutting object or above and below the cutting object. It is also possible.

  The laser processing apparatus and the laser processing method according to this embodiment have been described in detail above with reference to FIGS.

  Next, an example of the laser processing apparatus and the laser processing method according to the embodiment of the present invention will be described in detail with reference to FIGS. Below, in order to confirm the effect of the laser processing apparatus and laser processing method concerning the embodiment of the present invention, the result of the experiment which actually carried out the trial manufacture of the laser processing apparatus is explained concretely. In addition, the Example shown below was shown in order to demonstrate the laser processing apparatus and laser processing method which concern on embodiment of this invention concretely, Comprising: The laser processing apparatus and laser which concern on embodiment of this invention The processing method is not limited to the examples shown below.

<Example 1>
As shown in FIG. 4, a laser is produced by a method in which a plurality of laser beams emitted from a fiber laser having linearly polarized light are independently transmitted through a single polarization-maintaining fiber and bundled at a terminal portion. In addition, a condensing optical system composed of a collimation lens and a condensing lens and a nozzle having an assist gas supply port were arranged to form a laser processing apparatus. In addition, a two-dimensional scanning stage (not shown) is disposed at the lower part of the laser processing apparatus, the test piece is fixed to the two-dimensional scanning stage, and the test piece is moved by driving the two-dimensional scanning stage. The cutting process was performed.

  The laser beam pattern in the optical fiber fixing holder was 6 circular beam spots arranged in an annular shape, as shown in FIG. As each laser beam used in the laser processing apparatus, a continuous wave laser beam having characteristics common to all six beams was used. The laser beam used had a beam quality (BPP) of 1.2 mm · mrad and a maximum power of 400 W. The core diameter of the optical fiber, that is, the diameter of the circular beam spot coming out from the terminal end of the optical fiber was 50 μm. Using the laser beam having such characteristics, the power of each of the six beam spots was set to 333 W. Here, the centers of the six circular beam spots were arranged on a circumference having a diameter of 150 μm. Therefore, in this example, the diameter of the circumscribed circle of the six circular beam spots was 200 μm. The end cap was common to the six circular beam spots, and six optical fibers were fused to one end cap. The direction of polarization was completely radial, and the direction of linear polarization of each optical fiber and the direction of the straight line connecting the center of the circle and the center of the optical fiber were completely coincident.

  The focal lengths of the collimation lens and the condensing lens used as the condensing optical system were both 200 mm. Therefore, the image forming magnification of the condensing optical system in this embodiment is 1, and the laser beam pattern at the focal point where the optical fiber exit is just imaged is exactly the same as the laser beam pattern in the optical fiber fixing holder. The effective diameter of the laser beam group at the focal position where the optical fiber exit is just imaged was 200 μm. In this example, the focal position was set to be 2 mm below the surface of the test piece (that is, inside the test piece).

  The test piece was 5 mm thick stainless steel SUS304. From a nozzle outlet having a diameter of 2.5 mm installed at a position of 0.7 mm from the material surface, nitrogen gas at 14 atm was used as an assist gas and sprayed from the direction coaxial with the central axis of the laser beam.

  In order to observe the influence on the cutting surface roughness when the test piece is cut in various directions using the hexagonal beam pattern as shown in FIG. 18, as shown in FIG. The experiment was conducted while changing the cutting direction angle θ defined with respect to the reference direction of the pattern (the direction connecting the center of one circular beam pattern and the center of the hexagon).

  As a comparative example, one unpolarized laser beam emitted from one fiber laser was condensed by the same condensing optical system and cut in the same manner as in the above-described example of the present invention. The spot diameter of the laser beam was a circle having a diameter of 200 μm, the beam quality (BPP) was 1.2 mm · mrad, and the beam power was 2000 W. The diameter (200 μm) and the total power (2000 W) were matched to the above-described examples of the present invention.

The evaluation of the cut surface roughness was carried out by using a contact-type roughness meter along the line of the thickness direction center portion (depth 2.5 mm from the surface) of the test piece with a 10-point average roughness R _ZJIS (JIS B 0601-2001). ) Was measured.

  FIG. 19 shows the measurement results of the cut surface roughness in the present invention example and the comparative example. The cutting speed was 2 m / min for all conditions. Since the comparative example has one laser beam and the pattern of the focused beam is originally isotropic, the evaluation is performed only by cutting in one direction. As is clear from comparison between the measurement results of the present invention example and the comparative example shown in FIG. 19, the cut surface roughness in the comparative example is about 28 μm, whereas the cut surface roughness in the present invention example is about 12 μm to It is about 16 micrometers, and it turns out that cut surface roughness is suppressed compared with the comparative example. As is clear from the results of the present invention example, although there is a slight change in the cutting surface roughness depending on the cutting direction angle θ, the use of six beams makes it almost uniform regardless of the cutting direction angle θ. Cutting quality could be obtained.

<Example 2>
In order to confirm the applicability to a material having a larger thickness, a laser processing apparatus having a pattern composed of 19 circular beam spots was manufactured as shown in FIG. A method of transmitting a plurality of linearly polarized laser beams emitted from a fiber laser by using one polarization maintaining fiber and bundling them with an optical fiber fixing holder, except for one beam at the center. Adopted. In addition, the laser beam located at the center of the multiple circular rings was transmitted from a non-polarized fiber laser through an optical fiber that does not depend on normal polarization.

The core diameter of the optical fiber, that is, the diameter of the circular beam spot coming out from the end of the optical fiber was 50 μm in common for all 19 pieces. As shown in FIG. 20, the pattern of the laser beam in the optical fiber fixing holder is an inner ring composed of six circular beam spots (the diameter of the circle passing through the beam center was 150 μm), twelve. An outermost circular ring composed of circular beam spots (the diameter of the circle passing through the beam center was 280 μm) and one circular beam located at the center (the beam spot S ₀ shown in FIG. 20). ). Therefore, the diameter of the circumscribed circle of the 19 circular beam spots arranged on the outermost ring was 330 μm. Further, as shown in FIG. 20, a beam spot S _{1 serving as} a reference for the beams arranged in the annular ring located on the inner side and a beam spot S _{2 serving} as a reference for the beams arranged in the outer ring located on the outer side are arranged as shown in FIG. An angular difference of 15 degrees was provided in the direction.

  As each laser beam used in the laser processing apparatus, a continuous wave laser beam having a characteristic common to all 19 elements other than the characteristic relating to polarization was used. The laser beam used had a beam quality of 1.2 mm · mrad and a maximum power of 400 W. Using the laser beam having such characteristics, the power of 19 beams was set to 400 W each. The end cap was common to 19 circular beam spots, and 19 optical fibers were fused to one end cap. The direction of polarization of the 18 beams arranged in the inner and outer rings is completely radial, and the direction of the linear polarization of each optical fiber and the direction of the straight line connecting the center of the circle and the center of the optical fiber are Was a perfect match.

  The assist gas supply port including the nozzle, the conditions of the assist gas, and the driving method using the two-dimensional scanning stage are the same as those in the first embodiment. Since the condensing optical system having the same imaging magnification of 1 as in Example 1 was used, the effective diameter of the laser beam group at the focal position where the optical fiber exit was just imaged was 330 μm. In this example, the focal position was set to be 8 mm below the surface of the test piece (that is, inside the test piece).

In order to see the effect on the cutting surface roughness when cutting a specimen in various directions using a beam pattern based on hexagons and dodecagons, as shown in FIG. The experiment was performed while changing the cutting direction angle θ defined with respect to the direction (the direction connecting the center of the beam spot S _{0 and} the center of the beam spot S ₁ ).

  As a comparative example, one unpolarized laser beam emitted from one fiber laser was condensed by the same condensing optical system and cut in the same manner as in the above-described example of the present invention. The spot diameter of the laser beam was a circle having a diameter of 300 μm, the beam quality (BPP) was 4 mm · mrad, and the beam power was 7600 W. The diameter (300 μm) and the total power (7600 W = 400 W × 19) were set to substantially the same conditions as in the above-described example of the present invention.

The test piece was 12 mm thick stainless steel SUS304. The evaluation of the cut surface roughness is 10-point average roughness _RZJIS (JIS B 0601-2001) using a contact-type roughness meter along the center line in the thickness direction of the test piece (depth 6 mm from the surface). This was done by measuring.

  FIG. 21 shows the measurement results of the cut surface roughness in the inventive examples and the comparative examples. The cutting speed was 2 m / min for all conditions. As is clear from comparison between the measurement results of the present invention example and the comparative example shown in FIG. 21, the cut surface roughness in the comparative example is about 52 μm, whereas the cut surface roughness in the present invention example is about 24 μm to It is about 28 micrometers, and it turns out that cut surface roughness is suppressed compared with the comparative example. Further, as is clear from the results in the present invention example, the use of 19 beams makes it possible to obtain a uniform cutting quality that does not depend on the cutting direction angle θ, as compared with the first embodiment using 6 beams. Could get. As described above, it has been proved that the laser processing apparatus and the laser processing method according to the embodiment of the present invention are effective in improving the cut surface roughness in the cutting of the thick steel plate.

<Example 3>
Next, as shown in FIG. 11, a plurality of parallel laser beams emitted from a plurality of fiber lasers are condensed by a single condenser lens, and beam spots collected from the plurality of laser beams are processed points. A performance confirmation test was conducted on the configuration in which the liquid crystal is disposed on at least one ring. In this example, as shown in FIG. 12, a laser processing apparatus having a pattern composed of seven circular beam spots was produced. The fiber laser corresponding to the beam spot in the center is an unpolarized fiber laser, and the optical fiber that transmits the laser beam is an optical fiber that does not depend on normal polarization. The laser beams of the fiber lasers corresponding to the six beam spots arranged on the ring were all linearly polarized light and transmitted independently by one polarization maintaining fiber. As shown in FIG. 11, collimators 151 are connected to the outlets of the seven optical fibers, and seven parallel laser beams are emitted from these collimators 151. These seven collimators 151 were fixed by a collimator fixing holder 153. At this time, the direction of the linearly polarized light of the six laser beams emitted from the six collimators 151 arranged in the outer annular shape was completely radial. That is, for each of the six, the direction of the linear polarization of the laser beam and the direction of the straight line connecting the center of the ring and the center of the laser beam were completely the same.

  Each laser beam used in the laser processing apparatus is a continuous wave laser beam, and all of the seven laser beams have common characteristics. The beam quality (BPP) of the laser beam emitted from each of the seven collimators 151 was 0.4 mm · mrad, and the maximum power was 400 W. The beam diameters of the parallel laser beams emitted from the collimator 151 were all 4.9 mm. The distance between the centers of the center laser beam and the six laser beams arranged in an annular shape was 15 mm, and the diameter of a circle passing through the centers of the six laser beams arranged in an annular shape was 30 mm. As the condenser lens 131, a commercially available synthetic quartz spherical plano-convex lens was used. The focal length of this lens was 300 mm.

  The test piece was 5 mm thick stainless steel SUS304. The assist gas supply port including the nozzle, the conditions of the assist gas, and the driving method using the two-dimensional scanning stage are the same as those in the first embodiment.

  The focal position of the laser beam located at the center of the ring was set to be 2 mm below the surface of the test piece (that is, inside the test piece). As a result, as a pattern of seven beam spots on the surface of the test piece, the beam diameter of the unpolarized laser beam located at the center is 120 μm, and the beam spot corresponding to the unpolarized laser beam has a radius of 60 μm as the center. A pattern in which six laser beams having completely linear linear polarization with respect to the center were arranged on the ring was obtained. Regarding the beam shape of the six laser beams on the specimen surface, the beam diameter was slightly different between the radial direction with respect to the center of the ring and the direction perpendicular to the radial direction. 110 μm. Therefore, the effective diameter of the laser beam group on the material surface was 230 μm. The power of each of the seven laser beams was 360 W, and the total power was 2520 W.

  As in the case of the first and second embodiments described above, in order to see the influence on the cut surface roughness when the test piece is cut in various directions, as shown in FIG. The experiment was performed while changing the cutting direction angle θ defined with respect to a direction in which the center of one circular beam pattern and the center of the hexagon were connected.

  As a comparative example, one unpolarized laser beam emitted from one fiber laser is condensed by a spherical plano-convex lens having a focal length of 300 mm as described above, and the same cutting as in the third embodiment is performed. went. The spot diameter of the laser beam was a circle having a diameter of 250 μm, the beam quality (BPP) was 1.2 mm · mrad, and the beam power was 2500 W. The diameter (250 μm) and the total power (2500 W) were almost the same as in Example 3 above.

The evaluation of the cut surface roughness was carried out by using a contact-type roughness meter along the line of the thickness direction center portion (depth 2.5 mm from the surface) of the test piece with a 10-point average roughness R _ZJIS (JIS B 0601-2001). ) Was measured.

  FIG. 23 shows the measurement results of the cut surface roughness in the inventive examples and the comparative examples. The cutting speed was 2.2 m / min for all conditions. Since the comparative example has one laser beam and the pattern of the focused beam is originally isotropic, the evaluation is performed only by cutting in one direction. As apparent from comparison of the measurement results of the present invention example and the comparative example shown in FIG. 23, the cut surface roughness in the comparative example is about 29 μm, whereas the cut surface roughness in the present invention example is about 14 μm to It is about 18 micrometers, and it turns out that cut surface roughness is suppressed compared with the comparative example. It can be seen that the effect of suppressing the roughness of the cut surface in this example is substantially the same as the effect of suppressing the roughness in Example 1 shown in FIG.

  As described above, a beam spot obtained by bundling a plurality of fiber outlets as shown in FIG. 4 by a modification of the embodiment of the present invention in which a plurality of parallel emitted laser beams are collected by a condenser lens. It was confirmed that the roughness reduction effect was almost the same as the pattern imaged on the processed surface by the collimator lens and the condenser lens. That is, when each laser beam arranged on the ring is transmitted from the condenser lens to the surface of the work material as in another modification of the present embodiment described with reference to FIGS. Even when the optical axis of the laser beam is slightly inclined with respect to the center axis of the ring, as in the first example of the present embodiment shown in FIGS. It has been found that the roughness reduction effect is almost the same as that in the case of transmission with the optical axis almost parallel to the central axis of the ring.

  The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to such examples. It is obvious that a person having ordinary knowledge in the technical field to which the present invention pertains can come up with various changes or modifications within the scope of the technical idea described in the claims. Of course, it is understood that these also belong to the technical scope of the present invention.

DESCRIPTION OF SYMBOLS 10 Calf 11 Calf front 13 Calf front surface 15 Side part 17 Droplet 100 Laser processing apparatus 101 Laser oscillator 103 Optical fiber 105 Apparatus main body 107 Processing head 109 Guide rail 121 Cylindrical part 123 Nozzle 125 Optical fiber fixing holder 127 Condensing optical system 129 Collimation lens 131 Condensing lens 133 Assist gas supply port 151 Collimator 153 Collimator fixing holder 155 Wedge

Claims (22)

A laser processing apparatus that processes a workpiece material by guiding a laser beam emitted from a laser oscillator and condensing and irradiating the surface of the workpiece material,
At least one laser oscillator for emitting the laser beam;
A plurality of optical fibers for transmitting the emitted laser beam;
At least one optical element for condensing and irradiating the surface of the workpiece material with the laser beam emitted from the optical fiber;
With
At the exit end of the optical fiber, the exit ends of the plurality of optical fibers are arranged in one or more annular shapes,
At least the laser beam transmitted by the plurality of optical fibers arranged in the annular shape on the outermost periphery has linearly polarized light, and the polarization of the linearly polarized laser beam emitted from the emission ends of the plurality of optical fibers. A laser processing apparatus in which directions are aligned in a radial direction with respect to the center of the outermost ring.   The laser processing apparatus according to claim 1, wherein one more optical fiber is arranged at a central portion of the ring. Outgoing ends of the plurality of optical fibers are arranged in a plurality of annular shapes sharing a center,
In the optical fiber arranged in the annular shape inside the outermost ring, a laser beam having a polarization whose polarization direction is aligned in a radial direction is transmitted with reference to the center of the ring. The laser processing apparatus according to claim 1. Outgoing ends of the plurality of optical fibers are arranged in a plurality of annular shapes sharing a center,
3. The laser processing apparatus according to claim 1, wherein the non-polarized laser beam is transmitted through the optical fiber disposed in an annular shape inside the outermost ring. 4. The at least one optical element comprises:
A collimation lens that collimates the laser beam emitted from the optical fiber;
A condensing lens that condenses the parallel light emitted from the collimation lens;
The laser processing apparatus of any one of Claims 1-4 which has these. The plurality of optical fibers are connected to a collimator fixing holder in which a plurality of collimators each having the collimation lens are arranged in one or a plurality of annular shapes,
The condenser lens is a spherical lens having spherical aberration or an aspheric lens having a predetermined curved surface,
The laser processing apparatus according to claim 5, wherein the laser beam emitted from the condensing lens is focused and irradiated on a surface of the material to be processed.   The collimator disposed on the outermost ring in an annular shape is disposed so as to be inclined radially outward or inward with respect to a central axis direction of the ring of the collimator fixing holder. Item 7. The laser processing apparatus according to Item 6.   Between the collimator fixing holder and the condenser lens, the laser beam emitted from the collimator is radially outward or inward with respect to the central axis direction of the ring of the collimator fixing holder. The laser processing apparatus according to claim 6, wherein a wedge to be inclined is disposed.   The laser processing apparatus according to claim 1, wherein the laser oscillator is a fiber laser or a disk laser.   The direction of linearly polarized light of the laser beam transmitted by the plurality of optical fibers arranged on the outermost ring is changed in the same rotational direction between the adjacent laser beams. The laser processing apparatus according to claim 1, wherein an angle formed by the directions of linearly polarized light of two adjacent laser beams is within 60 °.   The laser processing apparatus according to claim 10, wherein six or more optical fibers are disposed on the outermost ring. A laser processing method of processing a workpiece material by guiding a laser beam emitted from a laser oscillator and condensing and irradiating the surface of the workpiece material,
A laser beam emitted from at least one laser oscillator is transmitted through a plurality of optical fibers, and the laser beam is focused from each optical fiber by at least one optical element that focuses and irradiates the surface of the workpiece material. Condensing and irradiating the surface of the workpiece material with the emitted laser beam,
At the exit end of the optical fiber, the exit ends of the plurality of optical fibers are arranged in one or more annular shapes,
At least the laser beam transmitted by the plurality of optical fibers arranged in the annular shape on the outermost periphery has linearly polarized light, and the polarization of the linearly polarized laser beam emitted from the emission ends of the plurality of optical fibers. A laser processing method in which directions are aligned in a radial direction with respect to the center of the outermost ring.   The laser processing method according to claim 12, wherein one more optical fiber is disposed at a central portion of the ring. Outgoing ends of the plurality of optical fibers are arranged in a plurality of annular shapes sharing a center,
In the optical fiber arranged in the annular shape inside the outermost ring, a laser beam having a polarization whose polarization direction is aligned in a radial direction is transmitted with reference to the center of the ring. The laser processing method according to claim 12 or 13. Outgoing ends of the plurality of optical fibers are arranged in a plurality of annular shapes sharing a center,
The laser processing method according to claim 12 or 13, wherein the non-polarized laser beam is transmitted through the optical fiber disposed in the annular shape inside the outermost ring. The at least one optical element comprises:
A collimation lens that collimates the laser beam emitted from the optical fiber;
A condensing lens that condenses the parallel light emitted from the collimation lens;
The laser processing method according to any one of claims 13 to 15, comprising: The plurality of optical fibers are connected to a collimator fixing holder in which a plurality of collimators having the collimation lens are arranged in one or a plurality of annular shapes,
The condenser lens is a spherical lens having spherical aberration or an aspheric lens having a predetermined curved surface,
The laser processing method according to claim 16, wherein the laser beam emitted from the condensing lens is focused and irradiated on a surface of the material to be processed.   The collimator disposed on the outermost ring in an annular shape is disposed so as to be inclined radially outward or inward with respect to a central axis direction of the ring of the collimator fixing holder. Item 18. A laser processing method according to Item 17.   Between the collimator fixing holder and the condenser lens, the laser beam emitted from the collimator is radially outward or inward with respect to the central axis direction of the ring of the collimator fixing holder. The laser processing method according to claim 17, wherein a wedge to be inclined is disposed.   The laser processing method according to claim 12, wherein the laser oscillator is a fiber laser or a disk laser.   The direction of linearly polarized light of the laser beam transmitted by the plurality of optical fibers arranged on the outermost ring is changed in the same rotational direction between the adjacent laser beams. The laser processing method according to any one of claims 12 to 20, wherein an angle formed by linearly polarized light directions of two adjacent laser beams is within 60 °. The laser processing method according to claim 21, wherein six or more optical fibers are arranged on the outermost ring.

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