JP5267284B2 - Control device for fan filter unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To achieve both coarse adjustment and fine adjustment of set rotational frequency by one variable resistor, in a fan filter unit mounted with a D.C. motor for setting motor rotational frequency by the variable resistor. <P>SOLUTION: This control device for the fan filter unit includes: a rotational frequency setting means 1 constituted of the variable resistor operated manually; an A/D conversion means 2 for performing A/D conversion of output voltage of the rotational frequency setting means 1; a switching means 7 for switching an output destination of an A/D conversion value; a switching destination setting means 20 for determining an output destination of the switching means 7; a fine adjustment amount determination means 4 for determining fine adjustment amount of the rotational frequency by inputting the A/D conversion value switched by the switching means 7; a rotational frequency determination means 3 for determining rotational frequency by inputting the A/D conversion value switched by the switching means 7 and the fine adjustment amount from the fine adjustment amount determination means 4; and a motor control means for controlling the motor in accordance with a rotational frequency instruction from the rotational frequency determination means 3. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a control device that varies the air volume of a fan filter unit used in a manufacturing apparatus that requires a clean environment such as a semiconductor, a liquid crystal, and a plasma display panel.

  Conventionally, this type of fan filter unit is installed in a manufacturing apparatus such as a semiconductor, or installed and operated on a ceiling portion of a clean room to clean a certain space. This fan filter unit is used by adjusting the air volume according to the operating conditions of the semiconductor manufacturing apparatus and the clean room and the installation location. Usually, the fan is driven by a brushless DC motor, and a control circuit constituted by a microcomputer controls the rotational speed. Conventionally, such a rotational speed is set by manually generating a voltage signal of 0 to 10 V using a variable resistor manually operated as shown in Japanese Patent Laid-Open No. 7-332717 (Patent Document 1). This is done by converting it into a digital signal by a / D conversion circuit and giving it to a microcomputer.

JP-A-7-332717 (FIG. 1)

  In such a fan filter unit that manually operates a conventional variable resistor to set the rotation speed, when setting the rotation speed, the operation angle is about 300 degrees with an inexpensive variable resistor used in household electric appliances. Thus, the set number of rotations is 0 to several thousand, and the set number of rotations varies greatly with a few operations, so it is difficult to finely adjust the set number of rotations.

  An object of the present invention is to solve such a problem related to the setting of the rotational speed of a conventional fan filter unit, and to realize a fan filter unit control apparatus that can finely adjust the rotational speed at a low cost.

  In order to achieve the above object, a control device for a fan filter unit according to the present invention provides a rotational speed setting means comprising a manually operated variable resistor, and an A / D for A / D converting the output voltage of the rotational speed setting means. Conversion means, switching means for switching the output destination of the A / D conversion value, switching destination setting means for determining the output destination of the switching means, and rotation by inputting the A / D conversion value switched by the switching means A fine adjustment amount determining means for determining the number of fine adjustment amounts, a rotation for determining the number of revolutions by inputting the A / D conversion value switched by the switching means and the fine adjustment amount from the fine adjustment amount determining means The speed determining means and motor control means for controlling the motor in accordance with the rotational speed instruction from the rotational speed determining means.

  With this configuration, one variable resistor can be switched between coarse adjustment and fine adjustment, and a fan filter unit capable of finely adjusting the set rotational speed is obtained.

  In another means, the switching destination setting means is constituted by a manually operated changeover switch.

  With this configuration, one variable resistor can be switched between coarse adjustment and fine adjustment, and a fan filter unit capable of finely adjusting the set rotational speed is obtained.

  In another aspect, the switching destination setting means is constituted by time counting means for inputting a voltage output from the rotation speed setting means and outputting a switching signal after a predetermined time has elapsed after the input value changes.

  With this configuration, one variable resistor can be switched between coarse adjustment and fine adjustment, and a fan filter unit capable of finely adjusting the set rotational speed is obtained.

  The other means inputs the output voltage of the rotation speed setting means to the switching destination setting means, counts the number of times the input value becomes 0V, and outputs a switching signal when the predetermined number of times is exceeded. It consists of counting means.

  With this configuration, one variable resistor can be switched between coarse adjustment and fine adjustment, and a fan filter unit capable of finely adjusting the set rotational speed is obtained.

  Another means is provided with display means for displaying a switching destination by inputting a signal from the switching means to the various configurations.

  With this configuration, one variable resistor can be switched between coarse adjustment and fine adjustment, a fan filter unit capable of finely adjusting the set rotational speed is obtained, and the fine adjustment mode is provided by the display means. This can be confirmed visually, and the operability is improved.

  The other means includes a rotation speed setting means comprising a manually operated variable resistor, an A / D conversion means for A / D converting the output voltage of the rotation speed setting means, a fine adjustment amount setting means, and a fine adjustment amount setting means. The second fine adjustment amount determining means for determining the fine adjustment amount according to the output signal of the adjustment amount setting means, the A / D conversion value and the fine adjustment amount from the second fine adjustment amount determining means are input. And a motor control means for controlling the motor in accordance with the rotational speed instruction from the rotational speed determination means.

  According to this configuration, since the fine adjustment amount can be set by the fine adjustment amount setting means after the set rotation speed is roughly adjusted by the variable resistor, a fan filter unit capable of fine adjustment of the set rotation speed is obtained.

  Another means is that the fine adjustment amount setting means is constituted by a fine adjustment amount setting switch which is manually operated.

  According to this configuration, since the fine adjustment amount can be set with the fine adjustment amount setting switch after coarsely adjusting the set rotation number with the variable resistor, a fan filter unit capable of fine adjustment of the set rotation number is obtained.

  According to another aspect, the fine adjustment amount setting means includes a fine adjustment amount setting switch that is manually operated and a second fine adjustment amount setting switch.

  According to this configuration, since the fine adjustment amount can be set with the fine adjustment amount setting switch after coarsely adjusting the set rotation number with the variable resistor, a fan filter unit capable of fine adjustment of the set rotation number is obtained. Also, with two switches, plus and minus can be finely adjusted, improving operability.

  Further, the other means inputs the output voltage of the rotation speed setting means to the fine adjustment amount setting means, counts the number of times the input value becomes 0V, and sets the count number to the second fine adjustment amount determination means. This is constituted by second 0V voltage counting means for outputting.

  With this configuration, it is possible to obtain a fan filter unit capable of finely adjusting the set rotational speed by roughly adjusting the set rotational speed with the variable resistor and then performing a predetermined special operation on the variable resistor.

  Further, the other means inputs the output voltage of the rotation speed setting means to the fine adjustment amount setting means, counts the number of times the input value becomes 0V, and sets the count number to the second fine adjustment amount determination means. The second 0V voltage counting means for outputting a signal and the output voltage of the rotation speed setting means are input, the number of times that the input value becomes a predetermined maximum voltage is counted, and the count number is determined by the second fine adjustment amount determining means. And MAX voltage count means for outputting a signal to

  With this configuration, after roughly adjusting the set rotational speed with a variable resistor, a fan filter unit capable of finely adjusting the set rotational speed by performing a predetermined special operation of the variable resistor is obtained. Also, by providing two special operations, plus and minus fine adjustments are possible, improving operability.

  Further, the other means is configured such that a rotational speed storage means for holding the rotational speed determined by the rotational speed determination means is provided for each of the above-described configurations.

  With this configuration, it is possible to obtain a fan filter unit that can finely adjust the set rotational speed, and even if the power is cut off due to a power failure or maintenance, it returns to the previous set rotational speed when the power is turned on again. Operability is improved.

  In addition, another means is configured such that a rotation speed pulse output means for outputting the rotation speed determined by the rotation speed determination means is provided for each of the above-described structures.

  With this configuration, a fan filter unit capable of finely adjusting the set rotational speed is obtained, and the operability is improved because the set rotational speed can be measured digitally.

  According to the present invention, since one variable resistor is configured to be switched between coarse adjustment and fine adjustment by the switching destination setting means, a fan filter unit control device capable of finely adjusting the set rotational speed can be obtained. it can.

Block diagram of Embodiment 1 of the present invention Block diagram using the changeover switch of Embodiment 1 of the present invention The block diagram using the time count means of Embodiment 1 of this invention The block diagram using the 0V voltage count means of Embodiment 1 of this invention The block diagram using the display means of Embodiment 1 of this invention Block diagram of Embodiment 2 of the present invention Block diagram using fine adjustment amount setting switch of embodiment 2 of the present invention Block diagram using fine adjustment amount setting switch and second fine adjustment amount setting switch of Embodiment 2 of the present invention The block diagram using the 2nd 0V count means of Embodiment 2 of the present invention The block diagram using the 2nd 0V voltage count means and MAX voltage count means of Embodiment 2 of this invention The block diagram using the rotation speed memory | storage means of Embodiment 2 of this invention Block diagram using rotation speed pulse output means of embodiment 2 of the present invention The figure which shows the structure of the rotation speed setting means of Embodiment 1 of this invention. The figure which shows operation | movement of the time count means of Embodiment 1 of this invention. The figure which shows operation | movement of the 0V voltage count means of Embodiment 1 of this invention.

  According to the first aspect of the present invention, a rotation speed setting means comprising a manually operated variable resistor, an A / D conversion means for A / D converting the output voltage of the rotation speed setting means, and an A / D conversion Switching means for switching the output destination of the value, switching destination setting means for determining the output destination of the switching means, and the A / D conversion value switched by the switching means are inputted to determine the fine adjustment amount of the rotational speed. Fine adjustment amount determination means, rotational speed determination means for determining the rotational speed by inputting the A / D conversion value switched by the switching means and the fine adjustment amount from the fine adjustment amount determination means, and the rotational speed The motor control means controls the motor in accordance with the rotational speed instruction from the determination means, and has the effect of switching one variable resistor between coarse adjustment and fine adjustment.

  According to a second aspect of the present invention, the switching destination setting means is constituted by a manually operated changeover switch, and has an action of switching one variable resistor between a coarse adjustment and a fine adjustment.

  According to a third aspect of the present invention, the switching destination setting means is constituted by time counting means for outputting a switching signal after elapse of a predetermined time after an input voltage is changed by inputting an output voltage of the rotation speed setting means. And has the effect of switching one variable resistor between coarse adjustment and fine adjustment.

  According to a fourth aspect of the present invention, the switching destination setting means inputs the output voltage of the rotation speed setting means, counts the number of times the input value becomes 0V, and exceeds the predetermined number of times. Is constituted by a 0V voltage counting means for outputting one variable resistor, and has the effect of switching one variable resistor between coarse adjustment and fine adjustment.

  The invention according to claim 5 of the present invention is configured to include a display means for inputting a signal from the switching means and displaying a switching destination, wherein one variable resistor is roughly adjusted and finely adjusted. It has the effect | action of switching to, and the effect | action of displaying a switching state.

  According to a sixth aspect of the present invention, there is provided a rotation speed setting means comprising a manually operated variable resistor, an A / D conversion means for A / D converting the output voltage of the rotation speed setting means, and a fine adjustment amount setting. Means, a second fine adjustment amount determining means for determining a fine adjustment amount according to an output signal of the fine adjustment amount setting means, and an A / D conversion value and the fine adjustment from the second fine adjustment amount determining means. And a motor control means for controlling the motor in accordance with the rotational speed instruction from the rotational speed determination means. The fine adjustment amount setting means finely adjusts the rotational speed. It has the effect of adjusting.

  According to a seventh aspect of the present invention, the fine adjustment amount setting means is constituted by a fine adjustment amount setting switch which is manually operated, and has an effect of performing fine adjustment with the fine adjustment amount setting switch.

  According to an eighth aspect of the present invention, the fine adjustment amount setting means includes a fine adjustment amount setting switch that is manually operated and a second fine adjustment amount setting switch. It has the effect of fine adjustment of plus and minus with the amount setting switch.

  According to a ninth aspect of the present invention, the fine adjustment amount setting means inputs the output voltage of the rotation speed setting means, counts the number of times the input value becomes 0 V, and sets the count number to the second fine adjustment amount. This is constituted by second 0V voltage counting means that outputs to the adjustment amount determining means, and has the effect of performing fine adjustment by a predetermined special operation of the variable resistor.

  According to a tenth aspect of the present invention, the fine adjustment amount setting means receives the output voltage of the rotation speed setting means, counts the number of times the input value becomes 0V, and sets the count number to the second fine adjustment amount. The second 0V voltage counting means for outputting a signal to the adjustment amount determining means and the output voltage of the rotation speed setting means are input, the number of times that the input value becomes a predetermined maximum voltage is counted, and the count number is It is composed of a MAX voltage counting means for outputting a signal to the fine adjustment amount determining means, and has the effect of performing fine adjustment of plus and minus by two predetermined special operations of the variable resistor.

  The invention according to claim 11 of the present invention has a configuration in which a rotation speed storage means for holding the rotation speed determined by the rotation speed determination means is provided. It has the effect of maintaining the previous set rotational speed when returning.

  According to a twelfth aspect of the present invention, there is provided a configuration in which a rotation speed pulse output means for outputting the rotation speed determined by the rotation speed determination means is provided. In addition to the operations of the first to eleventh aspects, , Has the effect of digitally measuring the rotational speed.

(Embodiment 1)
As shown in FIG. 1, the control device for the fan filter unit includes a rotation speed setting means 1 comprising a manually operated variable resistor, and an A / D conversion means for A / D converting the output voltage of the rotation speed setting means 1. 2, a switching means 7 for switching the output destination of the A / D conversion value by the switching destination setting means 20, and the A / D conversion value switched by the switching means 7 are input to determine the fine adjustment amount of the rotational speed. Fine adjustment amount determining means 4, rotational speed determining means 3 for determining the rotational speed by inputting the A / D conversion value switched by the switching means 7 and the fine adjustment amount from the fine adjustment amount determining means 4, The motor control means 5 controls the motor 6 in accordance with the rotational speed instruction from the rotational speed determination means 3.

  As shown in FIG. 13, the rotation speed setting means 1 includes a variable resistor 19, and outputs a voltage of 0 to 10 V by turning a knob of the variable resistor 19. The variable resistor 19 is a general one used for household electric appliances, and the rotation angle of the knob is about 300 degrees. The set rotational speed is set to a minimum rotational speed of 0 V, for example, and a maximum rotational speed of 10 V.

  The A / D conversion means 2 performs A / D conversion on the 0 to 10 V voltage and outputs it to the switching means 7 as a digital signal. The switching means 7 outputs an A / D converted digital signal to the rotation speed determining means 3 or the fine adjustment amount determining means 4 in accordance with the output signal (ON / OFF) of the switching destination setting means 20. For example, when the output signal of the switching destination setting means 20 is off, it is output to the rotational speed determination means 3, and when the output signal of the switching destination setting means 20 is on, it is output to the fine adjustment amount determination means 4. The rotational speed determination means 3 takes into account the rotational speed setting signal obtained from the output of the A / D conversion means 2 via the switching means 7 and the fine adjustment amount of the rotational speed obtained from the fine adjustment amount determination means 4. The set rotational speed is determined and a signal is output to the motor control means 5. The motor control means 5 controls the rotational speed of the motor 6 at this set rotational speed.

  According to the above configuration, the output speed of the switching destination setting means 20 is turned off and the set rotational speed is roughly adjusted, and then the output signal of the switching destination setting means 20 is turned on to finely adjust the set rotational speed. Thus, since the target number of rotations is set, coarse adjustment and fine adjustment can be performed by one adjustment means. That is, it is possible to quickly approximate the target rotational speed by rough adjustment, and it is possible to accurately set the target rotational speed by fine adjustment.

  In FIG. 2, the switching destination setting means 20 is constituted by a changeover switch 8.

  In this case, after the changeover switch 8 is turned off and the set rotational speed is roughly adjusted, the changeover switch 8 is turned off and the set rotational speed is finely adjusted to set the target rotational speed.

  In FIG. 3, the switching destination setting means 20 is composed of time counting means 9.

  This time counting means 9 monitors the output of the rotation speed setting means 1 and outputs an on / off signal to the switching means 7. For example, as shown in FIG. 14, the output of the time counting means 9 is normally off, but when the output voltage of the rotation speed setting means 1 changes and becomes constant thereafter, for example, the output is output after 1 second. It has a function of being turned on for a certain time (for example, 1 minute). That is, the rotational speed setting means 1 is operated to roughly adjust the rotational speed setting, wait for 1 second, and then fine adjustment can be performed by turning the variable resistor.

  In FIG. 4, the switching destination setting means 20 is constituted by 0 V voltage counting means 10.

  The 0V voltage counting means 10 monitors the output of the rotation speed setting means 1 and outputs an on / off signal to the switching means 7. For example, as shown in FIG. 15, the output of the 0V voltage counting means 10 is normally off, but the number of times that the output voltage of the rotation speed setting means 1 becomes 0V is within a certain time (for example, 10 seconds). In addition, when it is three times, the output is turned on for a certain time (for example, one minute).

  In other words, the set rotational speed can be finely adjusted by operating the rotational speed setting means 1 to roughly adjust the set rotational speed, and then turning the knob of the variable resistor three times in the minimum direction.

  Further, in FIG. 5, for example, a display unit 11 configured by LEDs is provided, and the LED of the display unit 11 is controlled to be turned on / off according to the switching state of the switching unit 7.

  In this case, for example, the switching means 7 controls the display means 11 as follows. In the case of the coarse adjustment state of the set rotational speed, the LED of the display means 11 is turned off, and in the case of the fine adjustment state of the set rotational speed, the LED of the display means 11 is turned on.

(Embodiment 2)
Next, a second embodiment of the present invention will be described. About the same structure as 1st Embodiment, the same code | symbol is attached | subjected and the detailed description is abbreviate | omitted.

  As shown in FIG. 6, the fan filter unit control apparatus according to the second embodiment of the present invention has a rotational speed setting means 1 composed of a manually operated variable resistor, and an output voltage of the rotational speed setting means 1. A / D conversion means 2 for A / D conversion, fine adjustment amount setting means 22, and a second fine adjustment amount for determining the fine adjustment amount of the set rotational speed by inputting a signal of this fine adjustment amount setting means 22 A determination means 21, an output of the A / D conversion means 2 and a fine adjustment amount from the second fine adjustment amount determination means 21, and a rotational speed determination means 3 for determining the rotational speed; and the rotational speed determination. The motor control means 5 is configured to control the motor 6 in accordance with the rotational speed instruction from the means.

  In the above configuration, for example, the second fine adjustment amount determination means 21 monitors the number of on / off times of the output signal of the fine adjustment amount setting means 22, and increases the set rotation speed by one turn by one on / off. Then, the fine adjustment amount is determined and the fine adjustment amount is output to the rotational speed determination means 3. The rotational speed determination means 3 determines the set rotational speed by adding a fine adjustment amount to the set rotational speed of the A / D conversion means 2.

  In FIG. 7, the fine adjustment amount setting means 22 is constituted by a fine adjustment amount setting switch 12.

  In this case, for example, the second fine adjustment amount determination means 21 monitors the number of on / off times of the fine adjustment amount setting switch 12 and finely adjusts the set number of rotations by one turn on / off. The amount is determined, and the fine adjustment amount is output to the rotation speed determination means 3. The rotational speed determination means 3 determines the set rotational speed by adding a fine adjustment amount to the set rotational speed of the A / D conversion means 2.

  In FIG. 8, the fine adjustment amount setting means 22 includes a fine adjustment amount setting switch 12 and a second fine adjustment amount setting switch 14.

  In this case, for example, the second fine adjustment amount determination means 21 recognizes the on / off count of the fine adjustment amount setting switch 12 as an input for increasing the set rotational speed, and turns on the second fine adjustment amount setting switch 14.・ Recognizes the number of OFF times as an input that reduces the set speed.

  In FIG. 9, the fine adjustment amount setting means 22 is constituted by a second 0V count means 23.

  The second 0V counting means 23 monitors the output voltage of the rotational speed setting means 1, counts the number of times the output becomes 0V, and finely adjusts the rotational speed to be reduced by one revolution, for example, once. The amount is output to the second fine adjustment amount determination means 21. The second fine adjustment amount determination means 21 determines the set rotation speed by adding this fine adjustment amount to the set rotation speed instruction from the A / D conversion means 2.

  In FIG. 10, the fine adjustment amount setting means 22 inputs the output voltage of the rotation speed setting means 1, counts the number of times the input value becomes 0 V, and outputs a signal to the second fine adjustment amount determination means 21. The second 0V voltage counting means 23 and the output voltage of the rotation speed setting means 1 are input, the number of times that the input value becomes a predetermined maximum voltage is counted, and the count number is input to the second fine adjustment amount determining means 21. It is comprised with the MAX voltage count means 16 which outputs a signal.

  The second 0V count means 23 monitors the output voltage of the rotational speed setting means 1, counts the number of times that the output voltage becomes 0V, and finely adjusts the rotational speed to be reduced by one revolution, for example, once. The amount is output to the second fine adjustment amount determination means 21. Further, the MAX voltage counting means 16 monitors the output voltage of the rotation speed setting means 1, counts the number of times the output becomes the MAX voltage, and finely adjusts the set rotation speed by one rotation, for example, once. The amount is output to the second fine adjustment amount determination means 21. The second fine adjustment amount determination unit 21 determines the set rotation number by adding these fine adjustment amounts to the set rotation number instruction from the A / D conversion unit 2.

  FIG. 11 shows an example in which a rotation speed storage means 17 is further added.

  The rotational speed storage means 17 always stores the set rotational speed determined by the rotational speed determination means 3. If the rotational speed storage means 17 is not provided, when the power is turned off, the fine adjustment amount is not stored. Therefore, when the power is turned on again, the fine adjustment amount becomes zero. On the other hand, when the rotational speed storage means 17 instructs the rotational speed determination means 3 to store the rotational speed when the power is turned on, the rotational speed is controlled at the set rotational speed taking into account the previous fine adjustment amount. This rotational speed storage means 17 may be applied to the first embodiment, that is, FIGS.

  FIG. 12 shows an example in which the rotation speed pulse output means 18 is added.

  The rotation speed pulse output means 18 receives the set rotation speed determined by the rotation speed determination means 3, and outputs, for example, one pulse for each rotation. By measuring this pulse output with a pulse counter or the like, the set rotational speed can be read directly. This rotational speed pulse output means 18 may also be applied to the first embodiment, that is, FIGS.

  It can be used for control for setting the number of rotations of a motor with a variable resistor, or control for setting a volume with an audio device or the like.

DESCRIPTION OF SYMBOLS 1 Rotation speed setting means 2 A / D conversion means 3 Rotation speed determination means 4 Fine adjustment amount determination means 5 Motor control means 6 Motor 7 Switching means 8 Change switch 9 Time count means 10 0V voltage count means 11 Display means 12 Fine adjustment amount Setting switch 14 Second fine adjustment amount setting switch 15 0V voltage counting means 16 MAX voltage counting means 17 Rotational speed storage means 18 Rotational speed pulse output means 19 Variable resistor 20 Switching destination setting means 21 Second fine adjustment amount determining means 22 Fine adjustment amount setting means 23 Second 0V voltage counting means

Claims (12)

Rotation speed setting means comprising a manually operated variable resistor, A / D conversion means for A / D converting the output voltage of the rotation speed setting means, switching means for switching the output destination of the A / D conversion value, A switching destination setting means for determining an output destination of the switching means, a fine adjustment amount determining means for inputting the A / D conversion value switched by the switching means and determining a fine adjustment amount of the rotational speed, and the switching means. Rotation speed determining means for inputting the switched A / D conversion value and the fine adjustment amount from the fine adjustment amount determining means to determine the rotation speed, and controlling the motor according to the rotation speed instruction from the rotation speed determination means And a fan filter unit control device comprising motor control means. 2. The fan filter unit control device according to claim 1, wherein the switching destination setting means comprises a manually operated changeover switch. 2. The fan filter unit control according to claim 1, wherein the switching destination setting means is configured by time counting means for inputting an output voltage of the rotation speed setting means and outputting a switching signal after a predetermined time elapses after the input value changes. apparatus. The switching destination setting means is composed of 0V voltage counting means for inputting the output voltage of the rotation speed setting means, counting the number of times the input value becomes 0V, and outputting a switching signal when the predetermined number of times is exceeded. The fan filter unit control device according to claim 1. 5. The fan filter unit control device according to claim 1, further comprising display means for inputting a signal from the switching means to display a switching destination. Rotation speed setting means comprising a manually operated variable resistor, A / D conversion means for A / D converting the output voltage of the rotation speed setting means, fine adjustment amount setting means, and output of the fine adjustment amount setting means The second fine adjustment amount determination means for determining the fine adjustment amount according to the signal, the A / D conversion value and the fine adjustment amount from the second fine adjustment amount determination means are input to determine the rotation speed. A fan filter unit control device comprising: a rotational speed determining means; and a motor control means for controlling a motor in accordance with a rotational speed instruction from the rotational speed determining means. 7. The fan filter unit control device according to claim 6, wherein the fine adjustment amount setting means includes a fine adjustment amount setting switch operated manually. The fan filter unit control device according to claim 6, wherein the fine adjustment amount setting means includes a fine adjustment amount setting switch operated manually and a second fine adjustment amount setting switch. The fine adjustment amount setting means receives the output voltage of the rotation speed setting means, counts the number of times the input value becomes 0V, and outputs the count number to the second fine adjustment amount determination means. 7. The fan filter unit control device according to claim 6, comprising voltage counting means. The fine adjustment amount setting means receives the output voltage of the rotation speed setting means, counts the number of times that the input value becomes 0V, and outputs a signal of the count number to the second fine adjustment amount determination means. MAX voltage for inputting the output voltage of the 0V voltage counting means and the rotation speed setting means, counting the number of times the input value becomes a predetermined maximum voltage, and outputting the count number to the second fine adjustment amount determining means The fan filter unit control device according to claim 6, further comprising a count unit. The fan filter unit control device according to any one of claims 1 to 10, further comprising a rotation speed storage means for holding the rotation speed determined by the rotation speed determination means. The fan filter unit control device according to any one of claims 1 to 11, further comprising a rotation speed pulse output means for outputting a rotation speed determined by the rotation speed determination means.

Images