JP5263466B2 - Alignment mask for liquid jet head unit, alignment apparatus for liquid jet head unit, and alignment method for liquid jet head unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an alignment mask for a liquid ejection head unit by which a liquid ejection head and an alignment mask can be aligned in a short time with high precision, an alignment device for the liquid ejection head unit, and to provide an alignment method of the liquid ejection head unit. <P>SOLUTION: The alignment mask is arranged such that a first reference mark 610 is aligned in a predetermined interval in both sides in an X direction and in both sides in a Y direction of one alignment mark 22 in the Y direction toward a second reference mark 620 and in the X direction perpendicular to the Y direction, the alignment mark 22 is arranged so as to be an index when aligned in the X direction and in the Y direction, the second alignment mark 620 is arranged so as to be aligned in a predetermined interval in both sides of the X direction of the other alignment mark 22 and arranged so as to be an index when aligned in the X direction of the alignment mark 22. <P>COPYRIGHT: (C)2008,JPO&amp;INPIT

Description

  The present invention relates to a liquid jet head unit alignment mask, a liquid jet head unit alignment apparatus, and a liquid jet used when aligning and fixing a plurality of liquid jet heads and a fixing member that fixes the plurality of liquid jet heads. The present invention relates to a head unit alignment method.

  An ink jet recording apparatus such as an ink jet printer or plotter is an ink jet recording head unit (hereinafter referred to as a head unit) including an ink jet recording head that discharges ink contained in a liquid container such as an ink cartridge or an ink tank as ink droplets. Said). Here, the ink jet recording head has a nozzle row composed of nozzle openings arranged side by side, and the ink ejection surface side is protected by a cover head. The cover head is provided on the ink droplet discharge surface side of the ink jet recording head and has a window frame portion having an opening window portion that exposes the nozzle opening, and a side wall that is bent from the window frame portion to the side surface side of the ink jet recording head. And fixed by joining the side wall portion to the side surface of the ink jet recording head (for example, see Patent Document 1).

  Further, when a fixing member such as a cover head or a fixing plate and a plurality of liquid ejecting heads are joined, a reference mark provided on an alignment mask made of flat glass and a nozzle opening provided on a nozzle plate The liquid jet head is moved with respect to the fixed member so that alignment marks having the same shape are aligned, and predetermined positioning is performed.

JP 2002-160376 A (page 4, FIG. 3)

  However, in the alignment of the head unit, the reference mark provided on the alignment mask has the same shape as the alignment mark (nozzle opening) provided on the nozzle plate. In particular, the alignment mark is hidden behind the reference mark, and it is difficult to determine whether or not the alignment mark is correct, and there is a problem that the alignment cannot be performed with high accuracy.

  Also, if there is an error in the position or size of the alignment mark due to the formation accuracy of the alignment mark, if you attempt to align multiple alignment marks with the reference mark, the alignment mark cannot be superimposed on the reference mark, There is a problem that accurate positioning cannot be performed.

  In addition, normally, each liquid ejecting head is provided with two alignment marks, and each of the two alignment marks serves as a reference mark of the alignment mask in a predetermined direction (Y direction) and a direction orthogonal to this (X direction). However, in such a method, there is a problem that alignment takes time and is complicated.

  In view of such circumstances, the present invention provides a liquid ejecting head unit alignment mask, a liquid ejecting head unit alignment apparatus, and a liquid ejecting head capable of aligning a liquid ejecting head and an alignment mask with high accuracy and in a short time. It is an object to provide a unit alignment method.

This onset bright aspect for solving the aforementioned problems is used in positioning the nozzle plate in which the nozzle openings are provided for injecting a liquid in the liquid ejecting head, and a fixing member for holding a plurality of liquid ejecting heads, The nozzle plate of the liquid ejecting head is disposed on the upper surface side so as to face each other, and is imaged by the imaging means from the bottom surface side, and on the upper surface side with respect to the nozzle opening of the nozzle plate of the liquid ejecting head The reference mark composed of the first reference mark and the second reference mark respectively aligned with the two alignment marks provided at the predetermined positions is provided in correspondence with each of the plurality of liquid jet heads. An alignment mask for a liquid jet head unit made of a member, wherein the first reference mark is a direction of the second reference mark. In the Y direction and the X direction orthogonal to the Y direction, the alignment mark is provided so as to be aligned at predetermined intervals on both sides in the X direction and both sides in the Y direction of one alignment mark. The second reference mark is positioned at both sides of the other alignment mark in the X direction at a predetermined interval. The alignment mark has a circular shape, and the first reference mark is provided as an index when the alignment mark is aligned in the X direction . The second reference mark has an annular shape with a single hole having an inner diameter larger than the outer diameter of the alignment mark, and the second reference mark extends in the X direction. A liquid-jet head unit for alignment mask characterized by having a long hole be provided over the Y direction width larger than the outside diameter of the i instrument mark.
Is a written that state-like, with aligning the one of the alignment marks in the X and Y directions of the first reference mark alignment mask to align the other of the alignment marks in the X direction of the second reference mark that Thus, the Y direction of the other alignment mark can also be aligned, the alignment work can be simplified, and the time required for the alignment work can be shortened. In addition, by providing the first reference mark and the second reference mark at a predetermined interval with respect to the alignment mark, the first reference mark or the second reference mark can be confirmed simultaneously with the alignment mark. And alignment can be performed with high accuracy. Further, by providing the first reference mark and the second reference mark so as to be at a predetermined interval with respect to the alignment mark, even if there is an error in the position or shape of the alignment mark, the position of the alignment mark is at this interval. Further, it is possible to absorb errors in the shape and to perform highly accurate alignment.
Further, the first reference mark and the second reference mark can be easily formed by forming the alignment mark in a circular shape, forming the first reference mark in a ring shape, and forming the second reference mark in a long hole. In addition, the alignment mark can be aligned with the first reference mark and the second reference mark with high accuracy.

Here, outside the first reference mark, a first guide mark having a ring shape concentric with the first reference mark is provided, and outside the second reference mark, It is preferable that a second guide mark having a concentric ring shape with the second reference mark is provided . According to this, even when the alignment mark and the first and second reference marks cannot be confirmed at the same time, the alignment mark can be moved to the center side of the guide mark by providing the guide mark. Since the direction can be guided, the alignment work can be simplified and the time required for the alignment work can be shortened.

Further, it is preferable that a cross-shaped cross mark is provided at the center between the first reference mark and the second reference mark. According to this, by providing the cross mark, the centers of the first and second reference marks can be identified, and the alignment work can be simplified .

Furthermore, another aspect of the invention includes the alignment mask for a liquid jet head unit according to the above aspect, and the imaging unit that images the reference mark and the alignment mark from the bottom surface side of the alignment mask. The liquid jet head unit alignment apparatus is characterized.
Is a written that state-like, to simplify the alignment operation, while reducing the time required for the alignment operation can be realized an alignment apparatus capable of performing high-precision alignment.

Here, the upper surface side of the liquid jet head unit for alignment mask preferably further includes a base jig the fixing member on the opposite side is placed in with the liquid jet head unit for alignment mask . According to this, by providing the base jig, it is possible to prevent damage such as scratches on the reference marks provided on the upper surface of the alignment mask.

The liquid jet head unit alignment mask is provided with a suction hole having one end opened on the upper surface side and the other end connected to a suction means, and the base jig has the suction hole. It is preferable that a communication hole communicating with is provided . According to this , the suction means can suck and hold the fixing member on the base jig via the suction hole and the communication hole.

Further , the base jig is provided with a through-hole penetrating in a thickness direction in a region facing each reference mark, and the first reference mark and the alignment mark for the liquid jet head unit alignment mask It is preferable that the region where the second reference mark is provided is a protruding portion that protrudes into the through hole . According to this, the distance between the reference mark and the alignment mark of the nozzle plate can be shortened, and the alignment mask and the liquid jet head can be positioned with high accuracy. In addition, since the distance between the reference mark and the alignment mark can be shortened without reducing the thickness of the base jig, the rigidity of the base jig can be maintained to prevent the base jig from being deformed or broken. it can.

Further, according to another aspect of the invention, a liquid ejecting head that positions a nozzle plate provided with a nozzle opening for ejecting liquid of the liquid ejecting head and a fixing member that holds the nozzle plate side of the plurality of liquid ejecting heads. A unit alignment method, which is provided on the nozzle plate of each liquid jet head and has two circular alignment marks having the same shape as the nozzle openings, and a liquid in which the fixing member is held on the upper surface side A single reference hole and a second reference mark provided on the alignment mask for an ejection head unit corresponding to each of the alignment marks, each having a larger inner diameter than the outer diameter of the alignment mark The first fiducial mark having an annular shape provided with the second fiducial mark of the first fiducial mark The second reference mark having an elongated hole provided in the X direction orthogonal to the Y direction, which is the mark side direction, and having a width larger than the outer diameter of the alignment mark and extending in the Y direction. Recognizing from the bottom side of the head unit alignment mask, one alignment mark is aligned with the first reference mark in the Y direction and the X direction so as to have a predetermined interval, The fixing member and the plurality of liquid ejecting heads are aligned by aligning the other alignment mark with the second reference mark at a predetermined interval in the Y direction. There is an alignment method of a liquid jet head unit.
In such an aspect, one alignment mark is aligned in the X direction and Y direction of the first reference mark of the alignment mask, and the other alignment mark is aligned in the X direction of the second reference mark. The alignment mark can also be aligned in the Y direction, simplifying the alignment operation and reducing the time required for the alignment operation. In addition, by providing the first reference mark and the second reference mark at a predetermined interval with respect to the alignment mark, the first reference mark or the second reference mark can be confirmed simultaneously with the alignment mark. And alignment can be performed with high accuracy. Further, by providing the first reference mark and the second reference mark at a predetermined interval with respect to the alignment mark, even if there is an error in the position and shape of the alignment mark, the position of the alignment mark at this interval It can be absorbed and errors of shape, Ru can be performed with high precision alignment.

Hereinafter, the present invention will be described in detail based on embodiments.
(Embodiment 1)
Prior to the description of the alignment mask for a liquid jet head according to an embodiment of the present invention, an example of an ink jet recording head unit that is an example of a liquid jet head unit that is an object of the alignment will be described.

  1 is an exploded perspective view showing an ink jet recording head unit which is an example of a liquid ejecting head unit according to Embodiment 1 of the present invention, and FIG. 2 is an assembly perspective view of the ink jet recording head unit. 3 is a cross-sectional view of an essential part thereof. As shown in FIG. 1, a cartridge case 210, which is a holding member that constitutes an ink jet recording head unit 200 (hereinafter referred to as a head unit 200), which is an example of a liquid ejecting head unit, includes ink supply means (liquid supply means). Each having an ink cartridge (not shown) is mounted. For example, in this embodiment, the ink cartridge is configured as a separate body filled with black and three color inks, and the ink cartridges of the respective colors are mounted in the cartridge case 210. Further, as shown in FIG. 3, a plurality of ink communication paths 212 having one end opened to each cartridge mounting portion 211 and the other end opened to the head case side described later are provided on the bottom surface of the cartridge case 210. . Further, an ink supply needle 213 inserted into the ink supply port of the ink cartridge is formed in the ink communication path 212 in order to remove bubbles and foreign matters in the ink at the opening of the ink communication path 212 of the cartridge mounting portion 211. It is fixed through a filter (not shown).

  In addition, an ink jet type that has a plurality of piezoelectric elements 300 on the bottom surface side of the cartridge case 210 and ejects ink droplets from the nozzle openings 21 by driving the piezoelectric elements 300 on the end surface opposite to the cartridge case 210. It has a head case 230 to which the recording head 220 is fixed. In the present embodiment, a plurality of ink jet recording heads 220 that eject ink of each color of the ink cartridge are provided corresponding to each ink color, and a plurality of head cases 230 are also provided independently corresponding to each ink jet recording head 220. Is provided.

  Here, the ink jet recording head 220 and the head case 230 which are examples of the liquid ejecting head of the present embodiment mounted on the cartridge case 210 will be described. 4 is an exploded perspective view of essential parts of the ink jet recording head and the head case, and FIG. 5 is a cross-sectional view of the ink jet recording head and the head case. As shown in FIGS. 4 and 5, the flow path forming substrate 10 constituting the ink jet recording head 220 is composed of a silicon single crystal substrate in the present embodiment, and silicon dioxide previously formed on one surface thereof by thermal oxidation. An elastic film 50 made of is formed. This flow path forming substrate 10 is formed with two rows in which pressure generation chambers 12 partitioned by a plurality of partition walls are arranged in parallel in the width direction by anisotropic etching from the other side. Further, on the outer side in the longitudinal direction of the pressure generating chambers 12 in each row, a communicating portion constituting a reservoir 100 that communicates with a reservoir portion 31 provided on a protective substrate 30 to be described later and serves as a common ink chamber for each pressure generating chamber 12. 13 is formed. The communication portion 13 is in communication with one end portion in the longitudinal direction of each pressure generating chamber 12 via the ink supply path 14.

Further, a nozzle plate 20 having a nozzle opening 21 communicating with the side opposite to the ink supply path 14 of each pressure generating chamber 12 on the opening surface side of the flow path forming substrate 10 is an adhesive, a heat-welded film, or the like. It is fixed through. In other words, in this embodiment, two nozzle rows 21A in which the nozzle openings 21 are arranged in parallel are provided in one ink jet recording head 220. The nozzle plate 20 has a thickness of, for example, 0.01 to 1 mm and a linear expansion coefficient of 300 ° C. or less, for example, 2.5 to 4.5 [10 ⁻⁶ / ° C.]. It consists of a crystal substrate or stainless steel. In addition, the nozzle plate 20 is provided with an alignment mark 22 that is used when positioning with a fixed plate 250, which will be described in detail later. In the present embodiment, as the alignment mark 22, two through holes having a circular opening having the same shape as the nozzle opening 21 are provided outside the nozzle opening 21 in the juxtaposition direction. Thus, by providing the alignment mark 22 having the same shape as the nozzle opening 21, when the nozzle opening 21 is formed on the nozzle plate 20 made of stainless steel by a punch, the alignment marks 22 are simultaneously formed at the same pitch. can do. The alignment mark 22 is not particularly limited to this, and may be formed by printing marks such as a square shape, a triangular shape, and an elliptical shape on the nozzle plate 20.

  On the other hand, on the side opposite to the opening surface of the flow path forming substrate 10, an insulator film made of zirconium oxide, a lower electrode film made of metal, lead zirconate titanate (PZT), etc. are formed on the elastic film 50. A piezoelectric element 300 is formed by sequentially stacking a piezoelectric layer and a metal upper electrode film. On the flow path forming substrate 10 on which such a piezoelectric element 300 is formed, a protective substrate 30 having a reservoir portion 31 constituting at least a part of the reservoir 100 is bonded. In the present embodiment, the reservoir portion 31 is formed through the protective substrate 30 in the thickness direction and across the width direction of the pressure generation chamber 12. As described above, the communication portion 13 of the flow path forming substrate 10. The reservoir 100 is configured as a common ink chamber for the pressure generation chambers 12.

  A piezoelectric element holding portion 32 having a space that does not hinder the movement of the piezoelectric element 300 is provided in a region of the protective substrate 30 that faces the piezoelectric element 300. Examples of such a protective substrate 30 include glass, ceramic, metal, plastic, and the like, but it is preferable to use a material that is substantially the same as the coefficient of thermal expansion of the flow path forming substrate 10. It was formed using a silicon single crystal substrate made of the same material as the path forming substrate 10.

  Furthermore, a drive IC 110 for driving each piezoelectric element 300 is provided on the protective substrate 30. Each terminal of the drive IC 110 is connected to a lead wiring drawn from the individual electrode of each piezoelectric element 300 via a bonding wire or the like (not shown). Each terminal of the driving IC 110 is connected to the outside via an external wiring 111 such as a flexible printed cable (FPC) as shown in FIG. 1, and various signals such as a print signal from the outside via the external wiring 111. To receive.

  In addition, the compliance substrate 40 is bonded onto the protective substrate 30. An ink inlet 44 for supplying ink to the reservoir 100 is formed in a region facing the reservoir 100 of the compliance substrate 40 by penetrating in the thickness direction. In addition, the region of the compliance substrate 40 other than the ink introduction port 44 in the region facing the reservoir 100 is a flexible portion 43 formed thin in the thickness direction, and the reservoir 100 is sealed by the flexible portion 43. Has been. Compliance is given to the reservoir 100 by the flexible portion 43.

  As described above, the ink jet recording head 220 according to the present embodiment includes the four substrates of the nozzle plate 20, the flow path forming substrate 10, the protective substrate 30, and the compliance substrate 40. On the compliance substrate 40 of the ink jet recording head 220, the ink is introduced into the ink introduction port 44 and is also communicated with the ink communication path 212 of the cartridge case 210. A head case 230 is provided in which an ink supply communication path 231 is provided. The head case 230 is formed with a recess 232 in a region facing the flexible portion 43 so that the flexible portion 43 is appropriately deformed. The head case 230 is provided with a drive IC holding part 233 penetrating in the thickness direction in a region facing the drive IC 110 provided on the protective substrate 30, and the external wiring 111 is connected to the drive IC holding part 233. Is connected to the drive IC 110.

  Such an ink jet recording head 220 of this embodiment takes in ink from the ink cartridge from the ink introduction port 44 via the ink communication path 212 and the ink supply communication path 231, and the inside from the reservoir 100 to the nozzle opening 21. After the ink is filled with ink, a voltage is applied to each piezoelectric element 300 corresponding to the pressure generating chamber 12 in accordance with a recording signal from the driving IC 110 to cause the elastic film 50 and the piezoelectric element 300 to bend and deform, thereby generating each pressure. The pressure in the chamber 12 increases and ink droplets are ejected from the nozzle openings 21.

  Each member constituting the ink jet recording head 220 and the head case 230 are provided with two pin insertion holes 234 into which pins for positioning the respective members are inserted at the time of assembly. The ink jet recording head 220 and the head case 230 are integrally formed by inserting pins into the pin insertion hole 234 and joining the members while performing relative positioning of the respective members.

  The above-described ink jet recording head 220 forms a large number of chips on one silicon wafer at the same time, and bonds and integrates the nozzle plate 20 and the compliance substrate 40. By dividing the chip-sized flow path forming substrate 10 into each other, the ink jet recording head 220 is obtained.

  Four such ink jet recording heads 220 and head cases 230 are fixed to the cartridge case 210 described above at predetermined intervals in the direction in which the nozzle rows 21A are arranged. That is, the head unit 200 of this embodiment is provided with eight nozzle rows 21A. In this way, by increasing the number of nozzle rows 21A composed of the nozzle openings 21 arranged side by side using a plurality of ink jet recording heads 220, a plurality of nozzle rows 21A are formed on one ink jet recording head 220. Compared to the above, the yield can be prevented from decreasing. Further, by using a plurality of ink jet recording heads 220 in order to increase the number of nozzle rows 21A, the number of ink jet recording heads 220 that can be formed from one silicon wafer can be increased. It is possible to reduce the manufacturing cost by reducing the useless area.

  In addition, as shown in FIGS. 1 and 3, the four ink jet recording heads 220 have a fixing plate 250 that is a common fixing member joined to the ink droplet ejection surfaces of the plurality of ink jet recording heads 220. Positioned and held. The fixed plate 250 is a flat plate, defines an exposed opening 251 that exposes the nozzle opening 21, an exposed opening 251, and at least at both ends of the nozzle row 21 </ b> A on the ink droplet ejection surface of the ink jet recording head 220. And a joining portion 252 to be joined.

  In this embodiment, the joining portion 252 extends between the fixing frame portion 253 provided along the outer periphery of the ink droplet discharge surface across the plurality of ink jet recording heads 220 and the adjacent ink jet recording head 220. And a fixing beam portion 254 that divides the exposed opening 251, and a joint portion 252 including the fixing frame portion 253 and the fixing beam portion 254 is formed on the ink droplet discharge surfaces of the plurality of ink jet recording heads 220. They are joined at the same time. Further, the fixing frame portion 253 of the joining portion 252 is formed so as to close the pin insertion hole 234 that positions each member when the ink jet recording head 220 is manufactured.

  Examples of the material of the fixing plate 250 include metals such as stainless steel, glass ceramics, or silicon single crystal plates. The fixing plate 250 is preferably made of a material having the same thermal expansion coefficient as that of the nozzle plate 20 in order to prevent deformation due to a difference in thermal expansion from the nozzle plate 20. For example, when the nozzle plate 20 is formed of a silicon single crystal plate, the fixing plate 250 is preferably formed of a silicon single crystal plate.

  Further, the fixing plate 250 is preferably formed thin, and is preferably thinner than a cover head 240 described later. This is because, for example, when the fixing plate 250 is thickened, the liquid ejecting head used when positioning the alignment mark 22 provided on the nozzle plate 20 of the ink jet recording head 220 described later in detail with the fixing plate 250. The distance from the reference mark for alignment (hereinafter referred to as an alignment mask) is increased, making it difficult to increase the positioning accuracy, and when the ink droplet ejection surface of the nozzle plate 20 is wiped, This is because the ink is likely to remain in between. That is, by forming the fixing plate 250 thin, the distance between the alignment mark 22 of the ink jet recording head 220 and the reference mark of the alignment mask can be shortened, and alignment can be performed easily and with high accuracy. It is possible to prevent ink from remaining on the ink droplet ejection surface of the nozzle plate 20 during wiping. In the present embodiment, the thickness of the fixing plate 250 is 0.1 mm. Further, the joining of the fixing plate 250 and the nozzle plate 20 is not particularly limited, and examples thereof include adhesion using a thermosetting epoxy adhesive or an ultraviolet curable adhesive.

  As described above, since the fixing plate 250 blocks the adjacent ink jet recording heads 220 by the fixing beam portion 254, the ink does not enter between the adjacent ink jet recording heads 220, and the piezoelectric element. It is possible to prevent deterioration and destruction of the ink jet recording head 220 such as the 300 and the driving IC 110 due to ink. Further, since the ink droplet ejection surface of the ink jet recording head 220 and the fixing plate 250 are bonded without any gap by an adhesive, the recording medium is prevented from entering the gap and the deformation of the fixing plate 250 and the fixing plate 250 are prevented. Paper jam can be prevented.

  In addition, four ink jet recording heads 220 are positioned and fixed on such a fixed plate 250, and positioning of the ink jet recording head 220 on the fixed plate 250 is performed by using an alignment mask for a liquid jet head unit ( The alignment can be performed using a liquid jet head unit alignment apparatus (hereinafter referred to as an alignment apparatus) having an alignment mask. Here, the alignment apparatus will be described in detail. 6 is a cross-sectional view showing the alignment apparatus and its AA ′ cross-sectional view, FIG. 7 is a plan view showing the alignment mask, and FIG. 8 is an enlarged plan view of the main part of the alignment mask. .

  As shown in FIG. 6, the alignment apparatus 400 includes a liquid jet head unit alignment mask 410 (hereinafter referred to as an alignment mask) in which a reference mark 600 on which an inkjet recording head 220 to be aligned is aligned is provided on the upper surface side. 410), a holding table 420 for holding the bottom surface side of the alignment mask 410, a base jig 430 provided on the upper surface side of the alignment mask 410, and a fixing member for the head unit provided on the base jig 430. And an optical system for confirming the reference mark 600 of the alignment mask 410 and the alignment mark 22 of the nozzle plate 20 provided on the opposite side of the alignment mask 410 of the holding table 420 and the spacer jig 440 that holds the fixing plate 250. CCD turtle And it includes an imaging unit 500 such as a microscope. According to such an alignment apparatus 400, the fixing plate 250 is held on the base jig 430 via the spacer jig 440, and the nozzle plate 20 of the ink jet recording head 220 with respect to the reference mark 600 of the alignment mask 410. By aligning the two alignment marks 22 provided on the plurality of ink jet recording heads 220, the nozzle plate 20 and the fixing plate 250 of the plurality of ink jet recording heads 220 are aligned. Can be bonded via an adhesive.

  Specifically, the alignment mask 410 is made of a transparent member such as glass such as quartz. Further, as shown in FIG. 7, on the upper surface side of the alignment mask 410, a reference mark 600 for aligning each of the two alignment marks of each ink jet recording head 220 is provided. The reference mark 600 includes a first reference mark 610 that aligns one of the two alignment marks 22 of each ink jet recording head 220 and a first alignment mark that aligns the other alignment mark 22. 2 reference marks 620. In the present embodiment, since the four ink jet recording heads 220 are fixed to the fixing plate 250, the alignment mask 410 has a total of eight first reference marks 610 and second reference marks 620, that is, a reference. Four sets of marks 600 are provided. Of course, the number of the reference marks 600 is not particularly limited, and is appropriately determined according to the number of ink jet recording heads 220 mounted on the head unit 200, that is, the number of ink jet recording heads 220 fixed to the fixed plate 250. What is necessary is just to provide.

  As shown in FIG. 8A, the first reference mark 610 is one in which one of the two alignment marks 22 provided on one ink jet recording head 220 is aligned. The ring shape is provided with a single hole 611 having an inner diameter larger than the outer diameter of the alignment mark 22 inside.

  The first reference mark 610 has a Y-direction which is the direction of the second reference mark 620 shown in FIG. 7 and an X-direction orthogonal to the Y-direction. Aligned so that That is, by aligning one alignment mark 22 in the single hole 611 of the first reference mark 610 so that the alignment mark 22 has the same spacing on both sides in the X direction and both sides in the Y direction, The first reference mark 610 can be aligned in the X direction and the Y direction.

  In this way, the first reference mark 610 is provided so as to be aligned at predetermined intervals on both sides in the X direction and both sides in the Y direction of the one alignment mark 22 so that the one alignment mark 22 is positioned in the X direction. And an index for alignment in the Y direction.

  As shown in FIG. 8B, the second reference mark 620 is for aligning the other alignment mark 22 among the two alignment marks 22 provided on one ink jet recording head 220. The ring shape is provided with an elongated hole 621 provided in the X direction in the X direction with a width larger than the outer diameter of the alignment mark 22 in the Y direction.

  The second reference mark 620 is aligned so that the other alignment mark 22 has a predetermined interval in the X direction. That is, the alignment mark 22 is aligned with the second reference mark 620 by aligning the other alignment mark 22 with the long hole 621 of the second reference mark 620 at the same interval on both sides in the X direction of the alignment mark 22. 620 can be aligned in the X direction.

  As described above, the second reference mark 620 is provided so as to be aligned at a predetermined interval on both sides of the other alignment mark 22 in the X direction, and when the other alignment mark 22 is aligned in the X direction. It becomes an indicator.

  The two alignment marks 22 provided in the ink jet recording head 220 are aligned with the first reference mark 610 and the second reference mark 620 of the alignment mask 410, respectively. At this time, as will be described in detail later, one alignment mark 22 is aligned with the first reference mark 610 in the X direction and the Y direction, and the other alignment mark 22 is aligned with the second reference mark 620. By just aligning in the X direction, the other alignment mark 22 can be aligned in the Y direction with respect to the second reference mark 620. Therefore, the first reference mark 610 and the second reference mark 620 are provided on the alignment mask 410, and the alignment mark 22 of the ink jet recording head 220 is aligned with the first reference mark 610 and the second reference mark 620. By simply doing this, the alignment work can be simplified and the alignment time can be shortened.

  Further, since the first reference mark 610 and the second reference mark 620 have an annular shape provided with an inner diameter larger than that of the alignment mark 22, the alignment mark 22 is used as the first reference mark 610 and the second reference mark. The alignment mark 22 is not hidden by the first fiducial mark 610 or the second fiducial mark 620 by adjusting the distance to the 620 and aligning them, and the image pickup means 500 can pick up both images simultaneously. In addition, the alignment mark 22 can be aligned with the first reference mark 610 or the second reference mark 620 with high accuracy. Further, the first reference mark 610 or the second reference mark of the alignment mark 22 is visually adjusted by adjusting the alignment between the alignment mark 22 and the first reference mark 610 or the second reference mark 620. The amount of deviation with respect to the mark 620 can be easily confirmed, and the alignment mark 22 can be aligned with the first reference mark 610 or the second reference mark 620 with high accuracy. Further, even when there is an error in the size or position of the alignment mark 22, it is only necessary to provide a predetermined interval between the alignment mark 22 and the first reference mark 610 or the second reference mark 620. Thus, the error of the alignment mark 22 can be absorbed, and highly accurate alignment can be performed.

  Furthermore, the inner diameter of the first reference mark 610 and the second reference mark 620 is made slightly larger than the alignment mark 22 with respect to the lens resolution of the image pickup means 500, so that when the positional deviation occurs, The gaps between the reference mark 610 and the second reference mark 620 and the alignment mark 22 are eliminated, and the positional deviation can be visually recognized. Specifically, for a lens having a resolution of 1 μm, if the gap when the alignment mark 22 is aligned with the center of the first reference mark 610 and the second reference mark 620 is set to 2 μm on one side, When the alignment mark 22 is displaced by 1 μm with respect to the first reference mark 610 and the second reference mark 620, one side is 3 μm and the other side is 1 μm. When a positional deviation of 1 μm or more occurs, the gap on the narrowed side becomes 1 μm or less, and the gap becomes invisible. By changing the inner diameters of the first reference mark 610 and the second reference mark 620, it is possible to visually detect the displacement of the alignment mark 22 with a desired system.

  Also, as shown in FIG. 8C, a first guide mark 612 having a ring shape concentric with the first reference mark 610 is provided outside the first reference mark 610. In the present embodiment, a plurality of first guide marks 612 are provided so as to be concentric.

  Similarly, as shown in FIG. 8D, a plurality of second guide marks 622 having a ring shape concentric with the second reference mark 620 are provided outside the second reference mark 620.

  By providing the first guide mark 612 and the second guide mark 622 as described above, when the alignment mark 22 is aligned with the first reference mark 610 or the second reference mark 620, the alignment mark 22 is the first guide mark 612. By moving the alignment mark 22 toward the center side of the first guide mark 612 and the second guide mark 622 when positioned outside the first reference mark 610 and the second reference mark 620, The alignment mark 22 can be moved toward the reference mark 610 and the second reference mark 620 side.

  That is, the imaging unit 500 is provided with a limited viewing angle so that a large image can be captured in order to align the alignment mark 22 with the first reference mark 610 or the second reference mark 620 with high accuracy. Therefore, when the alignment mark 22 is greatly deviated from the first reference mark 610 and the second reference mark 620, the alignment mark 22 and the first reference mark 610 or the second reference mark 620 are simultaneously set by the imaging unit 500. There are cases where the image is not captured. At this time, if the first guide mark 612 and the second guide mark 622 are not provided, it is not known in which direction the alignment mark 22 (ink jet recording head 220) should be moved. On the other hand, by providing the first guide mark 612 and the second guide mark 622 on the alignment mask 410, the alignment mark 22 and the first reference mark 610 or the second reference mark 620 are simultaneously imaged. Even if not, the alignment mark 22 and the arc portion of the first guide mark 612 or a part of the second guide mark 622 are photographed at the same time, and the alignment mark 22 is directed toward the center of the arc portion. The alignment mark 22 can be moved toward the first reference mark 610 or the second reference mark 620 side. Thereby, the alignment work can be simplified and the time required for the alignment work can be shortened.

  The first guide mark 612 and the second guide mark 622 are also useful when aligning the optical axis of the imaging unit 500 with the center of the first reference mark 610 and the second reference mark 620. .

  Further, the alignment mask 410 having the first reference mark 610 and the second reference mark 620 can be formed, for example, by mask printing a plurality of reference marks 600 on a glass substrate. In addition, the alignment mask 410, for example, integrally forms a plurality of regions provided with a plurality of sets of reference marks 600 on a glass substrate according to the number of ink jet recording heads 220 constituting one head unit 200, It can be formed by cutting a glass substrate. Accordingly, it is not necessary to prepare a mask printing apparatus according to the size of the alignment mask 410, and the alignment masks 410 having different sizes can be formed by one mask printing apparatus, and the cost can be reduced.

  On the other hand, as shown in FIG. 6, the holding table 420 of the alignment apparatus 400 holds the bottom surface side of the alignment mask 410 opposite to the top surface side where the reference mark 600 is provided. It is provided so as to be movable in the surface direction (direction orthogonal to the optical axis of the imaging means 500) in which the alignment mask 410 is held with respect to the apparatus main body (not shown). In addition, the holding table 420 is provided with a through-hole 421 that penetrates in the thickness direction in a region facing the first reference mark 610 and the second reference mark 620 of the alignment mask. An optical path from the reference mark 610 and the second reference mark 620 to the alignment mark 22 is secured.

  The base jig 430 is made of stainless steel or the like having a box shape that is fixed to the surface side of the holding table 420 on which the alignment mask 410 is held and that has a bottom surface that opens to cover the alignment mask 410. In addition, the base jig 430 is provided with a through-hole 431 penetrating in the thickness direction in a region facing the first reference mark 610 and the second reference mark 620 of the alignment mask 410. An optical path from the first reference mark 610 and the second reference mark 620 to the alignment mark 22 is secured.

  The spacer jig 440 is held on the surface of the base jig 430 opposite to the alignment mask 410 and holds the fixing plate 250. Specifically, the spacer jig 440 is made of a plate-like member such as stainless steel, and a plurality of suction chambers 441 to which suction means (not shown) such as a vacuum pump are connected are provided. The suction chamber 441 opens on the surface of the spacer jig 440 and sucks and holds the surface of the fixed plate 250. In addition, the spacer jig 440 is provided with a communication hole 442 that communicates with the through hole 431 of the base jig 430, and the alignment mark passes through the first reference mark 610 and the second reference mark 620 of the imaging unit 500. An optical path to 22 is secured. That is, the imaging unit 500 transmits the first reference mark 610 and the second reference mark 620 through the alignment mask 410 through the through hole 421 of the holding table 420 and also the through hole 431 of the base jig 430. The alignment mark 22 of the ink jet recording head 220 is imaged through the communication hole 442 of the spacer jig 440.

  The imaging means 500 is composed of a CCD camera or a microscope having an optical system as described above, and is disposed on the opposite side of the holding table 420 from the alignment mask 410. The imaging means 500 is fixed to the apparatus main body (not shown) so that the optical axis thereof is in the direction reaching the alignment mark 22 via the first reference mark 610 or the second reference mark 620. As a result, the plurality of first reference marks 610 or the second reference marks 620 and the alignment marks 22 are imaged by the imaging unit 500 by moving the holding table 420 in a direction orthogonal to the optical axis of the imaging unit 500. can do. In the present embodiment, the imaging unit 500 is fixed to the apparatus main body, and the holding table 420 is moved in a direction orthogonal to the optical axis of the imaging unit 500. However, the present invention is not limited to this. 420 may be fixed to the apparatus main body, and the imaging means 500 may be provided so as to be movable in a direction orthogonal to the optical axis. However, in this case, there is a problem that an optical axis shift or the like is likely to occur. Further, by providing two imaging means 500, that is, the imaging means 500 for the first reference mark 610 and the imaging means 500 for the second reference mark 620, the holding table 420 is set to the ink jet recording head 220. The image pickup means 500 may be provided corresponding to each of the first reference mark 610 and the second reference mark 620. In this case, it is not necessary to relatively move the imaging unit 500 and the holding table 420, and both can be fixed to the apparatus main body.

  Further, the alignment apparatus 400 of the present embodiment is provided with a pressing unit 450 that presses the ink jet recording head 220 toward the fixed plate 250. In this embodiment, the pressing means 450 is detachably provided on the base jig 430. Specifically, the pressing means 450 has U-shaped arm portions 451 that are detachably fixed to the base jig 430 and disposed on the ink jet recording head 220, and each ink jet type is provided on the arm portion 451. And a pressing portion 453 that presses the recording head 220 toward the fixed plate 250.

  The pressing portion 453 is provided in each region of the arm portion 451 that faces each ink jet recording head 220. In the present embodiment, since four ink jet recording heads 220 are fixed to one fixing plate 250, four pressing portions 453 are provided in the same number as the ink jet recording head 220.

  The pressing portion 453 is inserted in the arm portion 451 and provided with a columnar pressing pin 454 that is provided so as to be movable in the axial direction. The pressing pin 454 is provided on the base end side of the pressing pin 454 so that the pressing pin 454 can be used for ink jet recording. The urging means 455 for urging the head 220 side and a pressing piece 459 arranged between the pressing pin 454 and the ink jet recording head 220 are configured.

  The pressing pin 454 has a hemispherical tip, and contacts the point on the pressing piece 459 to press the pressing piece 459.

  The urging unit 455 is provided on the arm portion 451 to urge the pressing pin 454 toward the ink jet recording head 220 side. In the present embodiment, the urging unit 455 is provided so as to surround the proximal end side of the pressing pin 454. A screw holding portion 456, a screw portion 457 screwed into the screw holding portion 456, and a biasing spring 458 provided between the distal end surface of the screw portion 457 and the proximal end portion of the pressing pin 454.

  Such an urging means 455 can adjust the pressure that presses the pressing pin 454 that the urging screw 458 presses according to the tightening amount of the screw portion 457 with respect to the screw holding portion 456. Thereby, the pressure with which the pressing pin 454 presses the pressing piece 459 can be adjusted.

  The pressing piece 459 is disposed between the pressing pin 454 and the compliance substrate 40 of the ink jet recording head 220, the pressing pin 454 is in point contact with the upper surface of the pressing piece 459, and the pressing force of the pressing pin 454 is ink jet recording. The ink jet recording head 220 can be pressed in a state where the head 220 is uniformly propagated over almost the entire surface of the compliance substrate 40. Rather than bringing the tip of the pressing pin 454 into direct contact with the compliance substrate 40 of the ink jet recording head 220, the entire ink jet recording head 220 is pressed by the pressing piece 459, and the ink jet recording head 220 is securely attached to the fixed plate 250. Can be fixed to. The pressing piece 459 has the same size as the outer peripheral shape of the compliance substrate 40 of the ink jet recording head 220 or a slightly smaller outer peripheral shape.

  Such pressing means 450 can be detached from the holding table 420 together with the base jig 430. Therefore, if a plurality of base jigs 430 and pressing means 450 are prepared, the pressing means 450 together with the base jig 430 is cured while the adhesive that bonds the ink jet recording head 220 and the fixing plate 250 is cured. By removing from the holding table 420, the alignment device 400 can be used for the assembly of the next head unit. Thereby, the cost of the alignment apparatus 400 can be reduced.

  According to such an alignment apparatus 400, the first reference mark 610 and one alignment mark 22 are imaged by the imaging unit 500, and the alignment mark 22 is placed in the single hole 611 of the first reference mark 610 in the X direction. The ink-jet recording head 220 is moved so as to have a predetermined interval on both sides in the Y-direction and both sides in the Y direction, and the second reference mark 620 and the other alignment mark 22 are imaged by the imaging unit 500 while the alignment mark 22 22 is moved to the elongated hole 621 of the second reference mark 620 so that the ink jet recording head 220 is spaced at a predetermined interval on both sides in the X direction, whereby the ink jet recording head 220 is moved to a predetermined position with respect to the alignment mask 410. Can be aligned.

  Here, the alignment method of the head unit using such an alignment apparatus 400 will be described in more detail. 9 and 10 are plan views from the bottom side of the alignment mask showing the head unit alignment method.

  As shown in FIG. 9A, the first reference mark 610 of the alignment mask 410 is aligned with the center of the optical axis of the imaging unit 500. Specifically, the center of the first reference mark 610 is moved to the center of the imaging unit 500 by moving the holding table 420 while imaging the first reference mark 610 from the bottom surface side of the alignment mask 410 by the imaging unit 500. Align.

  Next, as shown in FIG. 9B, the fixing plate 250 is sucked and held on the base jig 430 via the spacer jig 440.

  Next, as shown in FIG. 10A, the first reference mark of the alignment mask 410 is picked up by the image pickup means 500 in a state where the ink jet recording head 220 and the fixing plate 250 are brought into contact with each other through an adhesive. 610 and one of the two alignment marks 22 provided on the nozzle plate 20 of the ink jet recording head 220, the alignment mark 22 enters the single hole 611 of the first reference mark 610. The ink jet recording head 220 is moved so as to have a predetermined interval on both sides in the X direction and both sides in the Y direction. Accordingly, one alignment mark 22 can be aligned with the first reference mark 610 in the X direction and the Y direction.

  At this time, the first reference mark 610 has an annular shape in which a single hole 611 having an inner diameter larger than the outer diameter of the alignment mark 22 is provided. Therefore, as shown in FIG. The first reference mark 610 is aligned with the single hole 611 so as to have the same spacing on both sides in the X direction, and is aligned so as to have the same spacing on both sides in the Y direction. As a result, the alignment mark 22 can be aligned with the first reference mark 610 in the X direction and the Y direction. In this way, by adjusting the position between the alignment mark 22 and the first reference mark 610 for alignment, the alignment mark 22 is not hidden by the first reference mark 610, and the image pickup unit 500 performs both of them. , And the alignment mark 22 can be aligned with respect to the first reference mark 610 with high accuracy. Further, by adjusting the position between the alignment mark 22 and the first reference mark 610 for alignment, the amount of displacement of the alignment mark 22 with respect to the first reference mark 610 can be easily confirmed visually. The alignment mark 22 can be aligned with the first reference mark 610 with high accuracy. Further, even when there is an error in the size or position of the alignment mark 22, only a predetermined interval is provided between the alignment mark 22 and the first reference mark 610, and the error of the alignment mark 22 can be reduced by this interval. Can be absorbed and highly accurate alignment can be performed.

  Next, as shown in FIG. 10B, the imaging unit 500 uses the second reference mark 620 of the alignment mask 410 and the two alignment marks 22 provided on the nozzle plate 20 of the ink jet recording head 220. While imaging the other alignment mark 22, the inkjet recording head 220 is moved so that the alignment mark 22 is placed in the slot 621 of the second reference mark 620 at a predetermined interval on both sides in the X direction. At this time, since one alignment mark 22 is aligned in the Y direction of the first reference mark 610 in the above-described process, the other alignment mark 22 is aligned in the X direction of the second reference mark 620. Only, the other alignment mark 22 is also aligned in the Y direction of the second reference mark 620.

  More specifically, since the second reference mark 620 has an annular shape having a long hole 621 provided in the X direction and having a width larger than the outer diameter of the alignment mark 22 in the Y direction, FIG. ), The alignment mark 22 is aligned with the second reference mark 620 by aligning the alignment mark 22 with the elongated hole 621 of the second reference mark 620 at the same interval on both sides in the X direction. Can be aligned in the X direction. As described above, the alignment mark 22 is not hidden by the second reference mark 620 by adjusting the distance between the alignment mark 22 and the second reference mark 620 so that the image pickup unit 500 can hide both. Can be simultaneously imaged, and the alignment mark 22 can be aligned with the second reference mark 620 with high accuracy. Further, by adjusting and aligning the distance between the alignment mark 22 and the second reference mark 620, it is possible to easily confirm the amount of displacement of the alignment mark 22 with respect to the second reference mark 620, The alignment mark 22 can be aligned with the second reference mark 620 with high accuracy. Furthermore, even when there is an error in the size or position of the alignment mark 22, it is possible to reduce the error of the alignment mark 22 only by providing a predetermined interval between the alignment mark 22 and the second reference mark 620. Can be absorbed and highly accurate alignment can be performed.

  Note that the inner diameter of the first reference mark 610 and the second reference mark 620 is slightly larger than the alignment mark 22 with respect to the lens resolution of the imaging unit 500, so that when the positional deviation occurs, the first The gaps between the reference mark 610 and the second reference mark 620 and the alignment mark 22 are eliminated, and the positional deviation can be visually recognized. Specifically, for a lens having a resolution of 1 μm, if the gap when the alignment mark 22 is aligned with the center of the first reference mark 610 and the second reference mark 620 is set to 2 μm on one side, When the alignment mark 22 is displaced by 1 μm with respect to the first reference mark 610 and the second reference mark 620, one side is 3 μm and the other side is 1 μm. When a positional deviation of 1 μm or more occurs, the gap on the narrowed side becomes 1 μm or less, and the gap becomes invisible. By changing the inner diameters of the first reference mark 610 and the second reference mark 620, it is possible to visually detect the displacement of the alignment mark 22 with a desired system.

  Such movement of the ink jet recording head 220 relative to the fixed plate 250 can be finely adjusted, for example, by a micrometer (not shown). Of course, a CCD camera is used as the image pickup means 500, and an image photographed by the CCD camera is subjected to image processing, so that the micrometer is driven by a drive motor or the like, and the alignment mark 22 is moved to the first reference mark 610 or the second reference mark 610. The ink jet recording head 220 may be automatically moved so that it can be aligned with the reference mark 620.

  Thereafter, the steps shown in FIG. 10 are repeated to sequentially position the plurality of ink jet recording heads 220 on the fixed plate 250. 6 can be bonded by curing the adhesive while pressing the plurality of ink jet recording heads 220 against the fixed plate 250 with a predetermined pressure by the pressing means 450 shown in FIG. Of course, the ink-jet recording head 220 may be aligned in a state where the ink-jet recording head 220 is pressed to the fixed plate 250 side with a predetermined pressure by the pressing means 450. The pressing force by the pressing means 450 may be increased.

  As described above, the fixed plate 250 and the plurality of ink jet recording heads 220 are positioned and joined, whereby the fixed plate 250 and the nozzle row 21A can be positioned with high accuracy. Further, the relative positioning of the nozzle rows 21A of the adjacent ink jet recording heads 220 can be performed with high accuracy. Further, since the ink jet recording head 220 is brought into contact with and joined to a fixed plate 250 made of a flat plate, the ink jet recording head 220 in the ink droplet ejection direction can be simply joined to the fixed plate 250. Relative positioning is performed. For this reason, it is not necessary to align the plurality of ink jet recording heads 220 in the ink droplet ejection direction, and it is possible to reliably prevent ink droplet landing position defects.

  As described above, after aligning one alignment mark 22 of the ink jet recording head 220 with respect to the first reference mark 610 in the X direction and the Y direction, the other alignment mark 22 is moved to the second reference mark 620. Since the alignment mark 22 can be aligned with respect to the second reference mark 620 in the X direction and the Y direction only by performing the alignment in the X direction, the alignment work can be simplified. And the time required for the alignment work can be shortened.

  In the present embodiment, one alignment mark 22 is aligned with the first reference mark 610 in the X direction and the Y direction, and then the other alignment mark 22 is aligned with the second reference mark 620. Although the alignment in the X direction is performed, the present invention is not particularly limited thereto. For example, after the alignment of the other alignment mark 22 with respect to the X direction of the second reference mark 620, the alignment of the other is performed. While maintaining the position of the second reference mark 620 in the X direction of the mark 22, one alignment mark 22 may be aligned with the first reference mark 610 in the X direction and the Y direction. . As described above, when a plurality of imaging units 500 are provided, the alignment of one alignment mark 22 with respect to the first reference mark 610 in the X direction and the Y direction and the second alignment mark 22 with the second alignment mark 22 are aligned. The alignment in the X direction with respect to the reference mark 620 may be performed simultaneously.

  On the other hand, as shown in FIGS. 1 and 2, the head unit 200 includes a cover head having a box shape so as to cover the plurality of ink jet recording heads 220 on the opposite side of the fixing plate 250 from the ink jet recording heads 220. 240 is provided. The cover head 240 includes an outer periphery of the fixing plate 250 on the side of the fixing portion 242 provided with the opening 241 corresponding to the exposed opening 251 of the fixing plate 250 and the ink droplet ejection surface of the ink jet recording head 220. And a side wall portion 245 provided so as to be bent.

  In this embodiment, the fixing portion 242 is provided corresponding to the frame portion 243 provided corresponding to the fixing frame portion 253 of the fixing plate 250, and the opening portion 241 provided corresponding to the fixing beam portion 254 of the fixing plate 250. It is comprised with the beam part 244 which divides | segments. Further, the fixing part 242 including the frame part 243 and the beam part 244 is joined to the joining part 252 of the fixing plate 250.

  As described above, since the ink droplet ejection surface of the ink jet recording head 220 and the cover head 240 are joined without a gap, it is possible to prevent the recording medium from entering the gap and to prevent the deformation of the cover head 240 and the paper jam. Can be prevented. Further, since the side wall portion 245 of the cover head 240 covers the outer peripheral edge portions of the plurality of ink jet recording heads 220, it is possible to reliably prevent the ink from flowing around the side surfaces of the ink jet recording heads 220.

  As such a cover head 240, metal materials, such as stainless steel, are mentioned, for example, A metal plate may be formed by press work and may be formed by shaping | molding. Further, the cover head 240 can be grounded by using a conductive metal material. Furthermore, the cover head 240 needs a certain level of strength in order to protect the ink jet recording head 220 from impacts such as wiping and capping. For this reason, the cover head 240 needs to be relatively thick. In the present embodiment, the thickness of the cover head 240 is 0.2 mm.

  In addition, joining of the cover head 240 and the fixing plate 250 is not particularly limited, and examples thereof include adhesion using a thermosetting epoxy adhesive.

  In addition, the fixing portion 242 is provided with a flange portion 246 provided with a fixing hole 247 for positioning and fixing the cover head 240 to another member. The flange portion 246 is bent and provided so as to protrude from the side wall portion 245 in the same direction as the surface direction of the droplet discharge surface. In the present embodiment, as shown in FIGS. 2 and 3, the cover head 240 is fixed to a cartridge case 210 that is a holding member that holds the ink jet recording head 220 and the head case 230.

  Specifically, as shown in FIGS. 2 and 3, the cartridge case 210 is provided with a protrusion 215 that protrudes toward the ink droplet discharge surface and is inserted into the fixing hole 247 of the cover head 240. The cover head 240 is fixed to the cartridge case 210 by inserting the portion 215 into the fixing hole 247 of the cover head 240 and heating and crimping the tip of the protrusion 215. The protrusion 215 provided on the cartridge case 210 has an outer diameter smaller than that of the fixing hole 247 of the flange 246, so that the cover head 240 is positioned in the surface direction of the ink droplet discharge surface and the cartridge case. 210 can be fixed.

  The cover head 240 and the fixing plate 250 to which the plurality of ink jet recording heads 220 are bonded are fixed by positioning the fixing holes 247 of the cover head 240 and the plurality of nozzle rows 21A. Here, positioning of the fixing holes 247 of the cover head 240 and the plurality of nozzle rows 21A can be performed using the above-described alignment apparatus, but the fixing plate 250 and the plurality of ink jet recording heads 220 are positioned and fixed. At this time, the cover head 240 may be positioned and fixed simultaneously.

(Embodiment 2)
FIG. 11 is an enlarged plan view of a main part of the alignment mask according to the second embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the member similar to Embodiment 1 mentioned above, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 11, a cross mark 630 is formed in the center of the single hole 611 of the first reference mark 610 and the long hole 621 of the second reference mark 620 provided on the alignment mask 410 of the present embodiment. Is provided. The cross mark 630 is provided with a size smaller than the outer diameter of the alignment mark 22.

  Thus, by providing the cross mark 630 at the center of the first reference mark 610 and the second reference mark 620, the cross mark 630 causes the alignment mark 22 to be the center of the single hole 611 of the first reference mark 610 and the second reference mark 610. The reference mark 620 serves as an index for alignment with the center in the short direction of the long hole 621, and the alignment work can be simplified and the time required for the alignment work can be shortened.

  Further, by making the cross mark 630 smaller than the alignment mark 22, the cross mark 630 is hidden by the alignment mark 22 when the alignment mark 22 is aligned with the first reference mark 610 or the second reference mark 620. The alignment between the alignment mark 22 and the first reference mark 610 or the second reference mark 620 can be adjusted for alignment.

(Embodiment 3)
FIG. 12 is an enlarged plan view of a main part of an alignment mask according to Embodiment 3 of the present invention. In addition, the same code | symbol is attached | subjected to the member similar to Embodiment 1 mentioned above, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 12, the outer surface of the first reference mark 610 and the second reference mark are provided on the upper surface of the alignment mask 410 of the present embodiment where the first reference mark 610 and the second reference mark 620 are provided. Two direction recognition marks 640 having a quadrangular shape are provided outside 620. In the present embodiment, the direction recognition mark 640 is opposed to the outside of the first reference mark 610 and the second reference mark 620, with the first reference mark 610 and the second reference mark 620 interposed therebetween. It was made to provide in.

  Such two direction recognition marks 640 are picked up by the image pickup means 500, and, for example, the cross mark provided in the optical system of the image pickup means 500 is aligned with the two direction recognition marks 640, so that the alignment mask 410 is aligned. Thus, alignment in the rotation direction about the optical axis of the imaging means 500 can be performed. Thereby, when the alignment mark 22 is aligned with the first reference mark 610 and the second reference mark 620, the moving direction of the ink jet recording head 220 can be identified.

  That is, if the direction recognition mark 640 is not provided and the rotation direction around the optical axis of the imaging unit 500 with respect to the alignment mask 410 varies, the alignment mark 22 is changed to the first reference mark 610 and the first reference mark 610. When aligning the center of the second reference mark 620, if the inkjet recording head 220 is moved in any direction, the alignment mark 22 moves to the center side of the first reference mark 610 or the second reference mark 620. I can't identify if I can. However, by providing two direction recognition marks 640 on the alignment mask 410 and aligning the image pickup means 500 with the direction recognition mark 640, the alignment mark can be obtained by moving the ink jet recording head 220 in any direction. It is possible to identify whether 22 can be moved to the center side of the first reference mark 610 or the second reference mark 620. Thereby, the alignment work can be simplified and the time required for the alignment work can be shortened.

  Further, in the present embodiment, since the two direction recognition marks 640 are provided for each of the first reference mark 610 and the second reference mark 620, imaging with respect to the alignment mask 410 is performed when the holding table 420 is moved. Even if the position of the rotation direction around the optical axis of the means 500 is shifted, it can be easily corrected.

  Note that the two direction recognition marks 640 are used to align the rotation direction around the optical axis of the imaging unit 500 with respect to the alignment mask 410, and thus the two direction recognition marks 640 are displayed in the field of view of the imaging unit 500. It is preferable to provide it at a position that is the farthest in the corner. In this embodiment, the two direction recognition marks 640 are provided on the outer sides of the first reference mark 610 and the second reference mark 620, respectively. If it is the upper surface side of 410, a position, a shape, etc. will not be specifically limited.

(Embodiment 4)
FIG. 13 is an enlarged plan view of a main part of an alignment mask according to Embodiment 4 of the present invention. In addition, the same code | symbol is attached | subjected to the member similar to Embodiment 1 mentioned above, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 13, the first reference mark 610 </ b> A of the present embodiment has an arc portion 613 having an inner diameter larger than the outer diameter of the alignment mark 22. In other words, the arc portion 613 is provided by partially providing both sides in the X direction and both sides in the Y direction of the single hole 611 of the first embodiment described above. Note that the first fiducial mark 610A having such an arc portion 613 can be formed by partially cutting out the inside of the ring shape similar to that of the first embodiment described above.

  By using the first reference mark 610A having such an arc portion 613, the alignment mark 22 may be aligned so that the predetermined interval is provided between the alignment mark 22 and the arc portion 613 of the first reference mark 610A. This interval can be easily confirmed.

(Embodiment 5)
FIG. 14 is a cross-sectional view of an alignment apparatus according to Embodiment 5 of the present invention. In addition, the same code | symbol is attached | subjected to the member similar to Embodiment 1 mentioned above, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 14, the alignment mask 410 </ b> A of the alignment apparatus 400 </ b> A of the present embodiment is provided with the first reference mark 610 or the second reference mark 620 on the tip surface, and the through hole 431 of the base jig 430. A protruding portion 411 protruding inward is provided on the upper surface.

  In the present embodiment, the protruding portion 411 has a columnar shape provided for each of the first reference mark 610 and the second reference mark 620. In the present embodiment, since four ink jet recording heads 220 are fixed to the fixing plate 250, a total of eight protrusions having the first reference mark 610 or the second reference mark 620 are provided.

  In addition, the protrusion 411 is preferably formed at a height at which the first reference mark 610 or the second reference mark 620 provided on the tip surface is in the vicinity of the alignment mark 22 of the nozzle plate 20. This is to improve the positioning accuracy by reducing the distance between the alignment mark 22 and the first reference mark 610 or the second reference mark 620. That is, for example, if the distance between the reference mark 600 and the alignment mark 22 is long, positioning is difficult, and positioning accuracy cannot be improved. When the distance between the reference mark 600 and the alignment mark 22 is long, the optical axis of the optical system becomes large due to the heat of a metal halide lamp or the like used when confirming the position by the imaging means 500 such as a CCD camera or a microscope. This is because a large error occurs in the actual position between the reference mark 600 and the alignment mark 22.

  When the protrusion 411 is not provided on the alignment mask 410A, the optical axis deviation is about 2.5 μm at the maximum when the distance between the alignment mark 22 and the reference mark 600 is, for example, about 5.1 mm. In this embodiment, by providing the protrusion 411 on the alignment mask 410A, the distance between the reference mark 600 and the alignment mark 22 is set to 110 μm or less, so that the optical axis of the optical system of the imaging unit 500 by heat as described above. The deviation can be set to 0.05 μm or less, and highly accurate positioning can be performed.

  If the protruding portion 411 is too close to the nozzle plate 20, an adhesive that adheres the nozzle plate 20 and the fixing plate 250 adheres to the tip surface of the protruding portion 411, and the alignment mark 22 and the reference mark 600 are picked up by the imaging unit 500. Therefore, it is preferable that the front end surface of the protruding portion 411 is provided at a predetermined distance from the nozzle plate 20.

  Thus, by providing the protrusion 411 on the alignment mask 410A, the distance between the alignment mark 22 and the reference mark 600 is shortened. Therefore, the thickness of the base jig 430 and the spacer jig 440 is reduced, and the reference mark 600 is reduced. There is no need to shorten the distance between the alignment mark 22 and the alignment mark 22. That is, if the thickness of the base jig 430 or the spacer jig 440 is reduced in order to shorten the distance between the alignment mark 22 and the reference mark 600, the base when the ink jet recording head 220 is pressed against the fixed plate 250 is reduced. When the jig 430 is deformed or broken, an error occurs in the alignment between the reference mark 600 and the alignment mark 22. In the present embodiment, since the protruding portion 411 is provided on the alignment mask 410A, it is not necessary to form the base jig 430 thin, and the base jig 430 can be kept rigid to prevent deformation and breakage, which is highly accurate. Positioning can be performed.

  The configuration other than the alignment mask 410A of the alignment apparatus of the present embodiment is the same as that of the first embodiment described above.

  Further, in this embodiment, eight columnar protrusions 411 are provided on the alignment mask 410A. However, the present invention is not particularly limited to this. For example, one protrusion may be provided for each ink jet recording head 220. Good. That is, you may make it provide four protrusion parts in the alignment mask which aligns one head unit. In this case, the through hole 431 of the base jig 430 may be provided in the same shape as the protruding portion, and the rigidity of the base jig 430 is reduced by the through hole even with such a through hole. is not.

(Embodiment 6)
FIG. 15 is a cross-sectional view of an alignment apparatus according to Embodiment 6 of the present invention. In addition, the same code | symbol is attached | subjected to the member similar to Embodiment 5 mentioned above, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 15, the alignment apparatus 400B of the present embodiment is the same as the configuration of the fifth embodiment described above, except that the imaging unit 500A is configured by a bifocal microscope.

  Specifically, the imaging unit 500A including a bifocal microscope has one optical system sharing the optical axis L and another optical system. The optical axis L is directed in a direction (vertical direction in the figure) from the side opposite to the fixing plate 250 of the alignment mask 410A to the first reference mark 610 or the second reference mark 620 to reach the alignment mark 22. Here, the optical system is configured to be able to focus on the first reference mark 610 or the second reference mark 620, that is, the upper surface side of the alignment mask 410A.

  More specifically, the objective lens 503 is housed in the lens barrel 504 with the optical axis L directed in the direction of the reference mark 600 and the alignment mark 22, and the lens barrel 504 is fixed to the housing 505. . In the housing 505, two beam splitters 506 and 507, two mirrors 508 and 509, and two focus lenses 510 and 511 are accommodated.

  The optical system 501 is formed by a beam splitter 506, a mirror 508, a focus lens 510 and a beam splitter 507, and light transmitted through the beam splitter 506 is reflected by the mirror 508, passes through the focus lens 510, and then passes through the beam splitter 507. It has an optical path to the outside (indicated by a dashed line in the figure).

  The optical system 502 is formed by a beam splitter 506, a focus lens 511, a mirror 509, and a beam splitter 507, and the light reflected by the beam splitter 506 passes through the focus lens 511 and then is reflected by the mirror 509 and the beam splitter 507 to be externally applied. (Indicated by the alternate long and short dash line in the figure).

  The CCD 520 simultaneously captures and reproduces the images of the reference mark 600 and the alignment mark 22 via the optical systems 501 and 502. Here, the reference mark 600 forms a focused image on the CCD 520 by adjusting the focal position of the focal lens 510 and the alignment mark 22 adjusts the focal position of the focal lens 511. Thus, a clear image in which the reference mark 600 and the alignment mark 22 are individually focused can be obtained on the CCD 520, and predetermined alignment is performed by adjusting the position of the ink jet recording head 220 so that the images overlap. .

  By using the imaging means 500A composed of such a bifocal microscope, the optical systems 501 and 502 individually focus on objects (reference mark 600 and alignment mark 22) that share the optical axis L but have different positions. Since the depth of field can be reduced, clear reference mark 600 and alignment mark 22 images can be obtained at a sufficient magnification. As a result, the alignment mark 22 can be aligned with the first reference mark 610 or the second reference mark 620 with high accuracy.

  Similar to the first embodiment described above, two imaging means 500A including a bifocal microscope, that is, an imaging means 500A for the first reference mark 610 and an imaging means 500A for the second reference mark 620, In addition, an imaging unit 500A including a bifocal microscope may be provided corresponding to each of the first reference mark 610 and the second reference mark 620.

  In this embodiment, the images of the two optical systems 501 and 502 are acquired by one CCD. However, each of the optical systems 501 and 502 is provided with a CCD camera, and the images acquired by the respective CCD cameras. May be synthesized.

(Embodiment 7)
FIG. 16 is a cross-sectional view of an alignment apparatus according to Embodiment 7 of the present invention. In addition, the same code | symbol is attached | subjected to the member similar to Embodiment 1 mentioned above, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 16, the alignment apparatus 400C of this embodiment includes an alignment mask 410B, a holding table 420 that holds the bottom surface side of the alignment mask 410B, an imaging unit 500, a pressing unit 450, and a suction unit 460. It is configured.

  The alignment mask 410B is provided with a suction hole 412 having one end opened in a region facing the fixing plate 250 on the upper surface and a suction means 460 connected to the other end.

  The holding table 420 is provided with a suction communication hole 422 communicating with the suction hole 412, and a suction means 460 such as a vacuum pump is connected to the suction communication hole 422 through a suction pipe 461. ing.

  In such a configuration, the fixing plate 250 is placed on the upper surface of the alignment mask 410B, and the suction plate 460, the suction communication hole 422, and the suction hole 412 are sucked by the suction means 460, thereby aligning the alignment plate 250. The fixing plate 250 can be sucked and held on the upper surface of the mask 410B.

  The pressing unit 450 has the same configuration as that of the above-described fifth embodiment except that the arm portion 451 is fixed to the surface of the holding table 420 on the alignment mask 410B side.

  In this way, the first reference mark 610 and the second reference mark 620 of the alignment mask 410B and the alignment mark 22 of the ink jet recording head 220 can be obtained by directly attracting and holding the fixing plate 250 on the upper surface of the alignment mask 410B. The distance between the two can be shortened, and both can be aligned with high accuracy.

  In this embodiment, the fixing plate 250 is directly sucked and held on the alignment mask 410B. However, the present invention is not particularly limited to this. For example, the fixing plate 250 is mounted on the alignment mask 410B via a base jig. You may make it adsorb and hold. Such an example is shown in FIG. As shown in FIG. 17, the base jig 430A of the alignment apparatus 400D is provided with a through hole 431 similar to that of the first embodiment and a holding hole 432 communicating with the suction hole 412 of the alignment mask 410B. The suction means 460 sucks and holds the fixing plate 250 on the base jig 430A through the suction pipe 461, the suction communication hole 422, the suction hole 412 and the holding hole 432.

  Even in such a configuration, the distance between the first reference mark 610 and the second reference mark 620 of the alignment mask 410B and the alignment mark 22 of the ink jet recording head 220 is made shorter than in the first embodiment. Both can be aligned with high accuracy.

(Other embodiments)
As mentioned above, although each embodiment of the present invention was described, the present invention is not limited to what was mentioned above. For example, in Embodiments 1 to 7 described above, the first reference marks 610 and 610A and the second reference marks 620 of the alignment mask 410 are exemplified as having the ring shape, but the first reference marks 610 and 610A are not particularly limited thereto. When the alignment mark 22 is aligned in the X direction and the Y direction, the reference marks are provided so as to be aligned at predetermined intervals on both sides of the one alignment mark 22 in the X direction and both sides in the Y direction. When the alignment mark 22 is aligned in the X direction, the second reference mark is provided so as to be aligned at a predetermined interval on both sides of the other alignment mark 22 in the X direction. As long as it is provided as an index of Here, other examples of the first reference mark and the second reference mark are shown in FIGS. 18 and 19 are enlarged plan views of main parts of the alignment mask showing other examples of the first reference mark and the second reference mark.

  As shown in FIG. 18, the first reference mark 610 </ b> B has a square shape, and a square opening 614 having a side longer than the outer diameter of the alignment mark 22 is provided inside. The second reference mark 620A has a rectangular shape, and a rectangular opening 624 having a short side longer than the outer diameter of the alignment mark 22 is provided inside.

  As shown in FIG. 19, the first reference mark 610 </ b> C has a linear shape provided independently on both sides in the X direction and both sides in the Y direction of the alignment mark 22. The second reference mark 620B has a linear shape provided independently on both sides of the alignment mark 22 in the X direction.

  As described above, the first reference marks 610B and 610C and the second reference marks 620A and 620B can obtain the same effects as those of the first embodiment. Needless to say, only one of the first reference marks 610 and 610A and the second reference mark 620 of the first and fourth embodiments may have a shape as shown in FIGS.

  Further, for example, a water repellent film that actually improves water repellency is formed on the ink droplet ejection surface of the nozzle plate 20 of the first to seventh embodiments described above. The water repellent film is not particularly limited, and examples thereof include a metal film. Such a metal film is provided only in the region exposed by the exposed opening 251 of the fixing plate 250 because the adhesive strength of the adhesive is reduced when the fixing plate 250 is bonded to the ink droplet ejection surface. preferable. Moreover, such a metal film can be formed with high accuracy with a predetermined thickness by eutectoid plating, for example.

  In Embodiments 1 to 7 described above, the pressing unit 450 is provided in the alignment devices 400 and 400A to 400D. However, the present invention is not particularly limited thereto. For example, the fixing plate 250 and the ink jet recording head 220 are joined. When an ultraviolet curable adhesive is used as the adhesive, the adhesive is applied to the joint surface of the fixed plate 250, and then the ultraviolet light is applied with the fixed plate 250 and the ink jet recording head 220 in contact with each other. Since both can be joined by irradiating and curing the adhesive, the pressing means 450 may not be provided. Note that the ultraviolet curable adhesive does not need to be cured while pressurizing the fixing plate 250 and the ink jet recording head 220 with a predetermined pressure unlike the thermosetting adhesive, and the ink jet recording head 220 is pressurized. And the fixing plate 250 can be prevented from being misaligned, and both can be joined with high accuracy. In addition, since the bonding strength is relatively weak in the bonding using the ultraviolet curable adhesive, the fixing plate 250 and the ink jet recording head 220 are bonded with the ultraviolet curable adhesive, and then fixed to the ink jet recording head 220. What is necessary is just to fix the circumference | surroundings, such as a corner defined by the board 250, with a thermosetting adhesive. As a result, the fixing plate 250 and the ink jet recording head 220 can be firmly joined with high accuracy and reliability can be improved.

  Furthermore, in Embodiments 1 to 7 described above, the fixing plate 250 made of a flat plate is exemplified as a fixing member for joining the plurality of ink jet recording heads 220. However, the fixing member is not limited to the fixing plate 250, and for example, a cover head A plurality of ink jet recording heads 220 may be positioned and joined directly to 240. Even in such a case, the alignment masks 410, 410A, 410B, the alignment apparatuses 400, 400A to 400D, and the alignment method of the first to seventh embodiments described above can be positioned and bonded with high accuracy.

  Further, in the first embodiment described above, the flexural vibration type ink jet recording head 220 is exemplified, but the present invention is not limited to this. For example, the longitudinal direction in which piezoelectric materials and electrode forming materials are alternately stacked and expanded and contracted in the axial direction is used. Needless to say, the present invention can be applied to a head unit having an ink jet recording head having various structures, such as an ink jet recording head that ejects ink droplets by bubbles generated by heat generation of a vibration type ink jet recording head or a heating element. .

  Note that the head unit alignment mask, the alignment apparatus, and the alignment method that include an ink jet recording head that ejects ink as the liquid ejecting head have been described as examples. The present invention is directed to a mask, an alignment apparatus, and an alignment method. Examples of the liquid ejecting head include a recording head used for an image recording apparatus such as a printer, a color material ejecting head used for manufacturing a color filter such as a liquid crystal display, an organic EL display, and an electrode formation such as an FED (field emission display). Electrode material ejecting heads used in manufacturing, bioorganic matter ejecting heads used in biochip production, and the like.

FIG. 3 is an exploded perspective view of the head unit according to the first embodiment. FIG. 3 is an assembled perspective view of the head unit according to the first embodiment. FIG. 3 is a cross-sectional view of a main part of the head unit according to the first embodiment. FIG. 3 is an exploded perspective view of main parts of the head and the head case according to the first embodiment. 2 is a cross-sectional view of a recording head and a head case according to Embodiment 1. FIG. It is sectional drawing of the alignment apparatus which concerns on Embodiment 1. FIG. 2 is a plan view of an alignment mask according to Embodiment 1. FIG. FIG. 3 is an enlarged plan view of a main part of the alignment mask according to the first embodiment. 5 is a plan view illustrating a head unit alignment method according to Embodiment 1. FIG. 5 is a plan view illustrating a head unit alignment method according to Embodiment 1. FIG. FIG. 10 is an enlarged plan view of a main part of an alignment mask according to Embodiment 2. It is a principal part enlarged plan view of the alignment mask which concerns on Embodiment 3. FIG. FIG. 10 is an enlarged plan view of a main part of an alignment mask according to a fourth embodiment. It is sectional drawing of the alignment apparatus which concerns on Embodiment 5. FIG. It is sectional drawing of the alignment apparatus which concerns on Embodiment 6. FIG. It is sectional drawing of the alignment apparatus which concerns on Embodiment 7. FIG. It is sectional drawing which shows the other example of the alignment apparatus which concerns on Embodiment 7. FIG. It is a principal part enlarged plan view of the alignment mask which concerns on other embodiment. It is a principal part enlarged plan view of the alignment mask which concerns on other embodiment.

Explanation of symbols

  10 flow path forming substrate, 12 pressure generating chamber, 20 nozzle plate, 21 nozzle opening, 22 alignment mark, 100 reservoir, 200 head unit, 210 cartridge case, 220 inkjet recording head, 230 head case, 240 cover head, 250 fixed Plate, 300 piezoelectric element, 400, 400A, 400B, 400C, 400D alignment device, 410, 410A, 410B alignment mask, 420 holding table, 430, 430A base jig, 440 spacer jig, 450 pressing means, 500, 500A imaging Means, 600 fiducial mark, 610, 610A, 610B, 610C first fiducial mark, 612 first guide mark, 620, 620A, 620 A second reference mark, 622 second guide marks, 630 cross mark, mark 640 direction recognition

Claims (8)

The nozzle plate of the liquid ejecting head is disposed on the upper surface side when positioning a nozzle plate provided with a nozzle opening for ejecting liquid of the liquid ejecting head and a fixing member that holds a plurality of liquid ejecting heads. Two alignment marks arranged so as to oppose each other, imaged by an imaging means from the bottom surface side, and provided at a predetermined position on the top surface side with respect to the nozzle opening of the nozzle plate of the liquid jet head; A liquid ejecting head unit alignment mask comprising a transparent member in which a reference mark composed of a first reference mark and a second reference mark that are aligned with each other is provided corresponding to each of the plurality of liquid ejecting heads. And
The first reference mark is located on both sides of one alignment mark in the X direction and both sides in the Y direction in the Y direction that is the direction of the second reference mark and the X direction that is orthogonal to the Y direction. The second reference mark is provided so as to be aligned at a predetermined interval, and is used as an index when aligning the alignment mark in the X direction and the Y direction. Provided to be aligned at a predetermined interval on both sides of the other alignment mark in the X direction, and provided as an index when aligning the alignment mark in the X direction,
The alignment mark has a circular shape, and the first reference mark has an annular shape provided with a single hole having an inner diameter larger than the outer diameter of the alignment mark, and the second reference mark An alignment mask for a liquid jet head unit, wherein the mark has a long hole provided in the X direction with a width larger than the outer diameter of the alignment mark and extending in the Y direction.   A first guide mark having an annular shape concentric with the first reference mark is provided outside the first reference mark, and the second reference mark is provided outside the second reference mark. The alignment mask for a liquid jet head unit according to claim 1, wherein a second guide mark having a ring shape concentric with the reference mark is provided. The first and the reference mark, wherein the second center of the reference mark, the liquid jet head unit for alignment mask according to claim 1 or 2, characterized in that the cross-shaped cross marks are provided . An alignment mask for a liquid jet head unit according to any one of claims 1 to 3 , and the imaging unit that images the reference mark and the alignment mark from the bottom surface side of the alignment mask. An alignment apparatus for a liquid jet head unit. The liquid jet head unit alignment mask further includes a base jig on which the fixing member is placed on a surface opposite to the liquid jet head unit alignment mask. Item 5. The liquid jet head unit alignment apparatus according to Item 4 . The liquid jet head unit alignment mask is provided with a suction hole having one end opened on the upper surface side and the other end connected to a suction means, and the base jig communicates with the suction hole. The alignment apparatus for a liquid jet head unit according to claim 5 , wherein a communication hole is provided. The base jig is provided with a through-hole penetrating in a thickness direction in a region facing each reference mark, and the first reference mark and the second reference mark of the liquid jet head unit alignment mask. region provided with the reference mark of the fact that a projection projecting into the through-hole, characterized in claims 5 or 6 liquid jet head unit for alignment apparatus according. An alignment method of a liquid ejecting head unit that positions a nozzle plate provided with nozzle openings for ejecting liquid of a liquid ejecting head and a fixing member that holds the nozzle plate side of a plurality of liquid ejecting heads,
Two alignment marks provided on the nozzle plate of each liquid ejecting head and having the same shape as the nozzle opening and having a circular shape;
A first reference mark and a second reference mark provided on the alignment mask for a liquid jet head unit, on which the fixing member is held on the upper surface side, corresponding to each of the alignment marks; The first reference mark having a ring shape provided with a single hole having an inner diameter larger than the diameter and the X direction orthogonal to the Y direction which is the direction of the first reference mark on the second reference mark side Recognizing from the bottom surface side of the alignment mask for the liquid jet head unit, the second reference mark having a long hole provided in the direction and having a width larger than the outer diameter of the alignment mark and extending in the Y direction. And aligning one alignment mark with respect to the first reference mark in the Y direction and the X direction so as to have a predetermined interval, The fixing member and the plurality of liquid ejecting heads are aligned by aligning the other alignment mark with the second reference mark at a predetermined interval in the Y direction. Alignment method of liquid jet head unit.

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