JP5263219B2 - Solid-state imaging device, manufacturing method thereof, and imaging device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve sensitivity by effectively and photoelectrically converting light in a long-wavelength range having been transmitted through a photodiode. <P>SOLUTION: The solid-state imaging device includes a photoelectric conversion unit 21 formed in a semiconductor layer 11, a signal circuit unit (not illustrated) which handles signal charges generated through photoelectric conversion by the photoelectric conversion unit and is formed at the semiconductor layer 11 on the opposite side from an incidence side of light made incident on the photoelectric conversion unit 21, a gate insulating film 31 formed on the surface of the semiconductor layer 11 on the opposite side from the light, a gate electrode 32 of a transfer gate formed on the semiconductor layer adjacent to the photoelectric conversion unit with the gate insulating film interposed, and a reflecting layer 43 reflecting the light having been transmitted through the photoelectric conversion unit toward the photoelectric conversion unit side and formed on the opposite side from the photoelectric conversion unit. The reflecting layer 43 comprises a tungsten layer or a layer including at least the tungsten layer, and is different from a wiring layer 53 formed above on the opposite side of the semiconductor layer 11 from the incidence side of the light, the reflecting layer being formed between the semiconductor layer 11 and wiring layer 53. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a back-illuminated solid-state imaging device, a manufacturing method thereof, and an imaging device using the solid-state imaging device.

  As shown in FIG. 8, the back-illuminated solid-state imaging device receives light from one surface of the silicon substrate 211 on which the photodiode 221 is formed, and forms a signal circuit 231 on the other surface. For this reason, when the thickness of the silicon layer in the photodiode 221 region is several μm or less, light having a long wavelength component out of light entering from the light incident surface is not sufficiently absorbed by the photodiode 221, The light passes through the circuit 231 side. In particular, since light on the long wavelength (for example, red wavelength) side passes through the photodiode 221 region and the transmitted light passes through the signal circuit 231, it is difficult to effectively photoelectrically convert the light in the long wavelength region. Further, the transmitted light is reflected by the wiring layer 233 formed in the signal circuit 231 and enters the photodiode of the adjacent pixel, which causes color mixing. The occurrence of this color mixture becomes a problem. As a conventional technique, there is a configuration in which a polysilicon layer is formed on a photodiode or a configuration in which an aluminum layer is formed (for example, see Patent Document 1). It was insufficient as a light shielding property against light. In particular, since the amount of transmitted light is large in the polysilicon layer, and the aluminum layer is formed by grain growth, light leakage occurs from the crystal grain boundary, so that the reflectance is low.

JP 2006-261372 A

  The problem to be solved is that it is difficult for light in a long wavelength region to pass through a photoelectric conversion unit (for example, a photodiode) and to effectively perform photoelectric conversion, and on the side opposite to the light incident side of the photodiode. If a reflective polysilicon layer or aluminum layer is formed, the light blocking property of light in the long wavelength region is particularly insufficient.

  An object of the present invention is to make it possible to improve sensitivity by effectively photoelectrically converting light in a long wavelength region transmitted through a photodiode.

The solid-state imaging device according to the present invention handles a photoelectric conversion unit formed in a semiconductor layer and a signal charge photoelectrically converted by the photoelectric conversion unit. What is an incident side of light incident on the photoelectric conversion unit? A signal circuit portion formed in the opposite semiconductor layer, a gate insulating film formed on a surface of the semiconductor layer opposite to the light incident side, and the semiconductor layer adjacent to the photoelectric conversion portion The gate electrode of the transfer gate formed through the gate insulating film and the light that has passed through the photoelectric conversion unit is reflected to the photoelectric conversion unit side, and is opposite to the light incident side of the photoelectric conversion unit. And a formed reflective layer. The reflective layer is made of a tungsten layer or a layer including at least a tungsten layer, and is a layer different from a wiring layer formed on an upper side opposite to the light incident side of the semiconductor layer, and the semiconductor layer and the semiconductor layer It is formed between the wiring layer and the contact portion connected to the signal circuit portion in the same process .

  In the solid-state imaging device according to the present invention, a reflection layer that reflects light transmitted through the photoelectric conversion unit to the photoelectric conversion unit side is provided on the side opposite to the light incident side of the photoelectric conversion unit. If the light cannot be absorbed by the photoelectric conversion unit, the reflection layer reflects light in a long wavelength region that is particularly easily transmitted through the photoelectric conversion unit, for example, light in a long wavelength region such as near infrared light and infrared light. , It can be returned to the photoelectric conversion unit again. That is, since the light once transmitted through the photoelectric conversion unit can be received again by the photoelectric conversion unit, the amount of light in a long wavelength region that can be received by the photoelectric conversion unit is substantially increased. For this reason, the sensitivity of the long wavelength region of the photoelectric conversion unit can be improved. In particular, since the reflective layer is made of a tungsten layer or a layer containing a tungsten layer, it is formed more densely than the reflective layer made of an aluminum layer formed by grain growth. It is possible to reflect light in the long wavelength region. In addition, light that has not been absorbed by the photoelectric conversion unit out of the light incident from the light incident surface is reflected by the reflection layer on the signal circuit side and returned to the original photoelectric conversion unit, so that light is transmitted to the adjacent pixels. Color mixing caused by leakage can be prevented.

The method for manufacturing a solid-state imaging device according to the present invention includes a step of forming a photoelectric conversion part in a semiconductor layer, and a gate insulating film is formed on the semiconductor layer opposite to a light incident side incident on the photoelectric conversion part Forming a gate electrode through the gate insulating film to form a signal circuit unit including a transistor for extracting an electric signal photoelectrically converted by the photoelectric conversion unit; and a light incident side of the photoelectric conversion unit; via the gate insulating film extending on the opposite side, possess a step of forming a reflective layer comprising a layer containing tungsten layer or at least a tungsten layer, a step of forming a wiring layer above the reflective layer, wherein The reflective layer is formed in a step of forming a contact portion connected to the signal circuit portion .

  In the method for manufacturing a solid-state imaging device of the present invention, a reflection layer that reflects light that has passed through the photoelectric conversion unit to the photoelectric conversion unit side is formed on the side opposite to the light incident side of the photoelectric conversion unit. When the incident light cannot be absorbed by the photoelectric conversion unit, the reflection layer reflects light in a long wavelength region that is easily transmitted through the photoelectric conversion unit, for example, light in a long wavelength region such as near infrared light and infrared light. Thus, it can be returned to the photoelectric conversion unit again. That is, since the light once transmitted through the photoelectric conversion unit can be received again by the photoelectric conversion unit, the amount of light in the long wavelength region that can be received by the photoelectric conversion unit in particular can be substantially increased. For this reason, a solid-state imaging device with improved sensitivity in the long wavelength region of the photoelectric conversion unit is manufactured. In particular, since the reflective layer is formed of a tungsten layer or a layer containing a tungsten layer, it becomes denser than the reflective layer made of an aluminum layer formed by grain growth. It becomes possible to reflect light in the long wavelength region. In addition, light that has not been absorbed by the photoelectric conversion unit out of light incident from the light incident surface is reflected by the reflection layer on the signal circuit side and returned to the original photoelectric conversion unit, so that adjacent pixels Thus, a solid-state imaging device that prevents color mixing caused by light leakage is manufactured.

An imaging apparatus according to the present invention includes a condensing optical unit that condenses incident light, a solid-state imaging device that receives and photoelectrically converts light collected by the condensing optical unit, and processes the photoelectrically converted signal A signal processing unit. The solid-state imaging device extracts a photoelectric conversion unit formed in a semiconductor layer and an electrical signal photoelectrically converted by the photoelectric conversion unit, and is on the opposite side to the incident side of light incident on the photoelectric conversion unit. A signal circuit portion formed on the semiconductor layer; a gate insulating film formed on a surface of the semiconductor layer opposite to the light incident side; and the gate on the semiconductor layer adjacent to the photoelectric conversion portion. A gate electrode of a transfer gate formed through an insulating film, and a reflection that is formed through the gate insulating film on the photoelectric conversion unit and reflects light transmitted through the photoelectric conversion unit to the photoelectric conversion unit side The reflective layer is made of a tungsten layer or a layer including at least a tungsten layer, and is a layer different from a wiring layer formed on the side opposite to the light incident side of the semiconductor layer, Before the semiconductor layer Is formed between the wiring layers, characterized in that it is formed by the contact portion in the same step of connecting to the signal circuit.

  Since the imaging device of the present invention uses the solid-state imaging device of the present invention, it becomes a solid-state imaging device that is highly sensitive and prevents color mixing, as described above.

According to the solid-state imaging device according to the present invention, the light transmitted through the photoelectric conversion unit is reflected to the photoelectric conversion unit side, and the reflection layer made of the tungsten layer or the layer including the tungsten layer is the light incident side of the photoelectric conversion unit. Since it is formed on the opposite side, it is highly sensitive by improving the sensitivity of the long wavelength region of the photoelectric conversion unit, can suppress the occurrence of color mixing, and has a high dynamic range by incorporating a large amount of light into the photoelectric conversion unit. There is an advantage that a solid-state imaging device can be realized.

  According to the method for manufacturing a solid-state imaging device according to the present invention, the light transmitted through the photoelectric conversion unit is reflected to the photoelectric conversion unit side, and the reflection layer formed of a tungsten layer or a layer including the tungsten layer is formed on the photoelectric conversion unit. Since it is formed on the side opposite to the light incident side, high sensitivity can be obtained by improving the sensitivity of the long wavelength region of the photoelectric conversion unit, color mixing can be suppressed, and high by incorporating a large amount of light into the photoelectric conversion unit. There is an advantage that it is possible to manufacture a solid-state imaging device capable of obtaining a dynamic range.

  According to the imaging apparatus of the present invention, since the solid-state imaging apparatus of the present invention is used, there is an advantage that the same effect as described above can be obtained.

1 is a schematic cross-sectional view showing an embodiment (first example) according to a solid-state imaging device of the present invention. It is a schematic structure sectional view showing one embodiment (the 2nd example) concerning a solid imaging device of the present invention. It is a schematic structure sectional view showing one embodiment (the 3rd example) concerning a solid imaging device of the present invention. It is the plane layout figure which showed one embodiment (3rd Example) which concerns on the solid-state imaging device of this invention. It is schematic structure sectional drawing which showed one Embodiment (4th Example) which concerns on the solid-state imaging device of this invention. It is schematic structure sectional drawing which showed one Embodiment (5th Example) which concerns on the solid-state imaging device of this invention. It is the block diagram which showed one Embodiment (Example) which concerns on the imaging device of this invention. It is schematic structure sectional drawing which showed an example of the conventional solid-state imaging device.

  An embodiment (first example) according to the solid-state imaging device of the present invention will be described with reference to the schematic sectional view of FIG.

As shown in FIG. 1, a pixel separation region 12 for separating pixels is formed in the semiconductor layer 11. For example, a silicon layer or a silicon substrate is used for the semiconductor layer 11. The pixel isolation region 12 is formed of, for example, a p-type well region. A photoelectric conversion unit 21 is formed in a region divided by the pixel separation region 12. A hole accumulation layer 22 is formed on the light incident side of the photoelectric conversion unit 21 (the lower side of the photoelectric conversion unit 21 in the drawing). The hole accumulation layer 22 is formed of, for example, a p ⁺ region. Further, a hole accumulation layer 23 is formed on the side opposite to the light incident side of the photoelectric conversion unit 21 (upper side of the photoelectric conversion unit 21 in the drawing), and an n-type well region 24 is formed in the lower layer. . The hole accumulation layer 23 is formed of, for example, a p ⁺ region. A gate electrode (for example, a transfer gate) 32 is formed on the photoelectric conversion unit 21 via a gate insulating film 31. An n ⁺ region 25 is formed in the semiconductor layer 11 on one side of the gate electrode 32.

  A contact part 41 is connected on the gate electrode 32, a contact part 42 is connected on the pixel isolation region 12, and the contact part is formed on the photoelectric conversion part 21 via the gate insulating film 31. A reflective layer 43 made of a contact portion similar to 41 and 42 is formed. In addition, a contact portion connected to another transistor (for example, a gate electrode, a source / drain region, etc.) of a signal circuit portion (not shown) is also formed. An insulating film 81 is formed on the gate insulating film 31 and the gate electrode 32, and each contact portion is formed by embedding a conductor in the holes 91, 92, 93, etc. formed in the insulating film 81, for example. ing.

  The reflective layer 43 needs to reflect the light transmitted through the photoelectric conversion unit 21 toward the photoelectric conversion unit 21. For example, at least light in a long wavelength region such as near infrared light and infrared light is reflected to the photoelectric conversion unit 21 side. The reflective layer 43 may reflect light having a shorter wavelength, for example, visible light, near ultraviolet light, ultraviolet light, and the like, in addition to the light in the long wavelength region. An example of a material having such characteristics is a tungsten layer. Therefore, the reflective layer 43 is preferably formed of a tungsten layer. Alternatively, it is preferably formed using a layer including a tungsten layer. As such a laminated structure, there are a laminated structure of a polysilicon layer and a tungsten layer, and a laminated structure of a tungsten layer and a silicide layer.

  Thus, since the reflective layer 43 is formed of a tungsten layer, the light transmitted through the photoelectric conversion unit 21 can be reflected to the photoelectric conversion unit 21 side. Moreover, since the tungsten layer is not formed by grain growth like a conventional aluminum layer, it is difficult to form a crystal grain boundary. For this reason, the aluminum film can also reflect light in a long wavelength region such as near infrared light and infrared light that has leaked from the crystal grain boundary.

  Further, first wirings 51 to 53 connected to the contact portions 41 and 42 and the reflective layer 43 are formed. The first wiring 53 connected to the reflective layer 43 is preferably formed in, for example, a shape projected from the electrode layer 34 or a shape larger than the shape. The first wirings 51 to 52 are preferably formed of tungsten, for example, but may be other metal materials such as copper or aluminum. For example, when the first wirings 51 to 53 are formed of tungsten, the light of the long wavelength region that has not been reflected by the reflective layer 43, for example, leaked from the peripheral portion of the reflective layer 43, is used as the first wiring 51. By -53, it becomes possible to reflect in the photoelectric conversion part 21 side.

  For example, second wirings 61 to 63 are connected to the first wirings 51 to 53 through vias 54 to 56. Similarly, third wirings 71 to 73 are connected to the second wirings 61 to 63 through, for example, vias 64 to 66. Although the solid-state imaging device 1 having a wiring layer having a three-layer structure is shown in the drawings, the present invention can be applied even when the number of wiring layers is four or more. An insulating film 80 including the insulating film 81 is formed so as to cover the wiring layers. The insulating film 80 is formed of a plurality of layers of insulating films according to the wiring formation. Although not shown on the side opposite to the light incident side of the semiconductor layer 11, a transistor group such as a transfer transistor, a reset transistor, and an amplifying transistor, the first wirings 51 to 53, and the vias 54 to 56. A signal circuit unit including wiring layers such as second wirings 61 to 63, vias 64 to 66, and third wirings 71 to 73 is formed.

  In the solid-state imaging device 1 of the first embodiment, the reflective layer 43 that reflects the light transmitted through the photoelectric conversion unit 21 to the photoelectric conversion unit 21 side is provided on the side opposite to the light incident side of the photoelectric conversion unit 21. Therefore, when the light incident on the photoelectric conversion unit 21 cannot be absorbed by the photoelectric conversion unit 21, it is particularly long in the long wavelength region that is easily transmitted through the photoelectric conversion unit 21, such as near infrared light and infrared light. Light in the wavelength region can be reflected by the reflective layer 43 and returned to the photoelectric conversion unit 21 again. That is, since the light once transmitted through the photoelectric conversion unit 21 can be received again by the photoelectric conversion unit 21, the amount of light in the long wavelength region that can be received by the photoelectric conversion unit 21 is substantially increased. For this reason, the sensitivity of the long wavelength region of the photoelectric conversion unit 21 can be improved. In addition, since the reflective layer 43 is made of a tungsten layer or a layer containing a tungsten layer, it is formed more densely than the reflective layer made of an aluminum layer formed by grain growth. Light in a long wavelength region such as light can be reflected. Further, light that has not been absorbed by the photoelectric conversion unit 21 among the light incident from the light incident surface is reflected by the reflection layer 43 on the signal circuit side and returned to the original photoelectric conversion unit 21 to be adjacent. Color mixing caused by light leaking to the pixel can be prevented.

  In order to manufacture the solid-state imaging device 1 having the configuration of the first embodiment, the photoelectric conversion is performed when the contact portion 41 is formed on the gate electrode 32 and the contact portion 42 is formed on the pixel isolation region 12. A reflective layer 43 formed of a contact portion similar to the contact portions 41 and 42 may be formed on the portion 21 via the gate insulating film 31. For example, tungsten is embedded in the holes 91 and 92 formed in the insulating film 81 to form the contact portions 41 and 42, and at the same time, tungsten is embedded in the holes 93 formed in the insulating film 81 on the photoelectric conversion unit 21. Thus, the reflective layer 43 is formed. Then, the first wiring 51 connected to the contact portion 41 and the first wiring 52 connected to the contact portion 42 are formed, and at the same time, the first wiring 53 connected to the reflective layer 43 is covered on the photoelectric conversion portion 21. To form. As a result, the reflective layer 43 is formed between the gate insulating film 31 near the photoelectric conversion unit 21 and the first wiring 53 as illustrated.

Next, an embodiment (second example) according to the solid-state imaging device of the present invention will be described with reference to the schematic sectional view of FIG. This second embodiment is a countermeasure for the case where it is difficult to bury the inside of the hole 93 with a tungsten layer when the opening shape of the hole 93 in which the reflective layer 43 is formed is large in the first embodiment. It is an example.

As shown in FIG. 2, a pixel separation region 12 for separating pixels is formed in the semiconductor layer 11. For example, a silicon layer is used for the semiconductor layer 11. The pixel isolation region 12 is formed of, for example, a p-type well region. A photoelectric conversion unit 21 is formed in a region divided by the pixel separation region 12. A hole accumulation layer 22 is formed on the light incident side of the photoelectric conversion unit 21 (the lower side of the photoelectric conversion unit 21 in the drawing). The hole accumulation layer 22 is formed of, for example, a p ⁺ region. Further, a hole accumulation layer 23 is formed on the side opposite to the light incident side of the photoelectric conversion unit 21 (upper side of the photoelectric conversion unit 21 in the drawing), and an n-type well region 24 is formed in the lower layer. . The hole accumulation layer 23 is formed of, for example, a p ⁺ region. A gate electrode (for example, a transfer gate) 32 is formed on the photoelectric conversion unit 21 via a gate insulating film 31. An n + region 25 is formed in the semiconductor layer 11 on one side of the gate electrode 32.

  A contact part 41 is connected on the gate electrode 32, a contact part 42 is connected on the pixel isolation region 12, and the contact part is formed on the photoelectric conversion part 21 via the gate insulating film 31. A reflective layer 43 made of a contact portion similar to 41 and 42 is formed. In addition, a contact portion connected to another transistor (for example, a gate electrode, a source / drain region, etc.) of a signal circuit portion (not shown) is also formed. An insulating film 81 is formed on the gate insulating film 31 and the gate electrode 32, and each contact portion is formed by, for example, burying a conductive layer in a hole formed in the insulating film 81. A similar method is used for the reflective layer 43, but it is difficult to form the reflective layer 43 so as to fill the inside of the hole 93 because the opening shape of the hole 93 is large. Therefore, the reflective layer 43 is formed so as to cover the inner surface of the hole 93.

  The reflective layer 43 is made of a material that reflects light transmitted through the photoelectric conversion unit 21 toward the photoelectric conversion unit 21. For example, at least light in a long wavelength region such as near infrared light and infrared light is reflected to the photoelectric conversion unit 21 side. The reflective layer 43 may reflect light having a shorter wavelength, for example, visible light, near ultraviolet light, ultraviolet light, and the like, in addition to the light in the long wavelength region. An example of a material having such characteristics is a tungsten layer. Therefore, the reflective layer 43 is preferably formed of a tungsten layer. Alternatively, it is preferably formed using a layer including a tungsten layer. As such a laminated structure, there are a laminated structure of a polysilicon layer and a tungsten layer, and a laminated structure of a tungsten layer and a silicide layer. Further, the reflective layer 43 formed so as to cover the inner surface of the hole 93 needs to be formed to a thickness that does not transmit light in a long wavelength region such as near infrared light or infrared light.

  Thus, since the reflective layer 43 is formed of a tungsten layer, the light transmitted through the photoelectric conversion unit 21 can be reflected to the photoelectric conversion unit 21 side. Moreover, since the tungsten layer is not formed by grain growth like a conventional aluminum layer, it is difficult to form a crystal grain boundary. For this reason, the aluminum film can also reflect light in a long wavelength region such as near infrared light and infrared light that has leaked from the crystal grain boundary.

  A filling material 44 made of an insulating film or a conductive film is buried in the hole 93 with a reflective layer 43 interposed therebetween. As described above, by filling the hole 93 with the filling material 44, the occurrence of a step in the hole 93 is eliminated.

  Further, first wirings 51 to 53 connected to the contact portions 41 and 42 and the reflective layer 43 are formed. The first wiring 53 connected to the reflective layer 43 is preferably formed in, for example, a shape projected from the electrode layer 34 or a shape larger than the shape. The first wirings 51 to 53 are preferably formed of tungsten, for example, but may be other metal materials such as copper and aluminum. For example, when the first wirings 51 to 53 are formed of tungsten, the light of the long wavelength region that has not been reflected by the reflective layer 43, for example, leaked from the peripheral portion of the reflective layer 43, is used as the first wiring 51. By -53, it becomes possible to reflect in the photoelectric conversion part 21 side.

  For example, second wirings 61 to 63 are connected to the first wirings 51 to 53 through vias 54 to 56. Similarly, third wirings 71 to 73 are connected to the second wirings 61 to 63 through, for example, vias 64 to 66. Although the solid-state imaging device 2 having a wiring layer having a three-layer structure is shown in the drawings, the present invention can be applied even when the number of wiring layers is four or more. An insulating film 80 including the insulating film 81 is formed so as to cover the wiring layers. The insulating film 80 is formed of a plurality of layers of insulating films according to the wiring formation. Although not shown on the side opposite to the light incident side of the semiconductor layer 11, a transistor group such as a transfer transistor, a reset transistor, and an amplifying transistor, the first wirings 51 to 53, and the vias 54 to 56. A signal circuit unit including wiring layers such as second wirings 61 to 63, vias 64 to 66, and third wirings 71 to 73 is formed.

  In the solid-state imaging device 2 of the second embodiment, the reflective layer 43 that reflects the light transmitted through the photoelectric conversion unit 21 to the photoelectric conversion unit 21 side is provided on the side opposite to the light incident side of the photoelectric conversion unit 21. Therefore, when the light incident on the photoelectric conversion unit 21 cannot be absorbed by the photoelectric conversion unit 21, it is particularly long in the long wavelength region that is easily transmitted through the photoelectric conversion unit 21, such as near infrared light and infrared light. Light in the wavelength region can be reflected by the reflective layer 43 and returned to the photoelectric conversion unit 21 again. That is, since the light once transmitted through the photoelectric conversion unit 21 can be received again by the photoelectric conversion unit 21, the amount of light in the long wavelength region that can be received by the photoelectric conversion unit 21 is substantially increased. For this reason, the sensitivity of the long wavelength region of the photoelectric conversion unit 21 can be improved. In addition, since the reflective layer 43 is made of a tungsten layer or a layer containing a tungsten layer, it is formed more densely than the reflective layer made of an aluminum layer formed by grain growth. Light in a long wavelength region such as light can be reflected. Further, light that has not been absorbed by the photoelectric conversion unit 21 among the light incident from the light incident surface is reflected by the reflection layer 43 on the signal circuit side and returned to the original photoelectric conversion unit 21 to be adjacent. Color mixing caused by light leaking to the pixel can be prevented.

  In order to manufacture the solid-state imaging device 2 having the configuration of the second embodiment, the photoelectric conversion is performed when the contact portion 41 is formed on the gate electrode 32 and the contact portion 42 is formed on the pixel isolation region 12. A reflective layer 43 formed of a contact portion similar to the contact portions 41 and 42 may be formed on the portion 21 via the gate insulating film 31. However, since the hole 93 cannot be embedded in the reflective layer 43, an embedded material 44 made of an insulating film or a conductive film is embedded in a portion that could not be embedded in the reflective layer 43. For example, a tungsten film is buried in the holes 91 and 92 formed in the insulating film 81 to form the contact portions 41 and 42, and at the same time, tungsten is formed on the inner surface of the hole 93 formed in the insulating film 81 on the photoelectric conversion unit 21. The reflective layer 43 is formed by forming a film. Next, an embedded material 44 made of an insulating film or a conductive film is embedded in the portion of the hole 93 that has not been completely embedded in the reflective layer 43, and then the excess embedded material is removed. Then, the first wiring 51 connected to the contact portion 41 and the first wiring 52 connected to the contact portion 42 are formed, and at the same time, the first wiring 53 connected to the reflective layer 43 is covered on the photoelectric conversion portion 21. To form. As a result, the reflective layer 43 is formed between the gate insulating film 31 near the photoelectric conversion unit 21 and the first wiring 53 as illustrated.

  Next, an embodiment (third example) according to the solid-state imaging device of the present invention will be described with reference to the schematic cross-sectional view of FIG. 3 and the plane layout diagram of FIG.

As shown in FIGS. 3 and 4, a pixel isolation region 12 for isolating pixels is formed in the semiconductor layer 11. For example, a silicon layer is used for the semiconductor layer 11. The pixel isolation region 12 is formed of, for example, a p-type well region. A photoelectric conversion unit 21 is formed in a region divided by the pixel separation region 12. A hole accumulation layer 22 is formed on the light incident side of the photoelectric conversion unit 21 (the lower side of the photoelectric conversion unit 21 in the drawing). The hole accumulation layer 22 is formed of, for example, a p ⁺ region. Further, a hole accumulation layer 23 is formed on the side opposite to the light incident side of the photoelectric conversion unit 21 (upper side of the photoelectric conversion unit 21 in the drawing), and an n-type well region 24 is formed in the lower layer. . The hole accumulation layer 23 is formed of, for example, a p ⁺ region. A gate electrode (for example, a transfer gate) 32 is formed on the photoelectric conversion unit 21 via a gate insulating film 31. An n + region 25 is formed in the semiconductor layer 11 on one side of the gate electrode 32.

  A contact portion 41 is formed on the gate electrode 32, a contact portion 42 is formed on the pixel isolation region 12, and the peripheral portion of the photoelectric conversion portion 21 is interposed via the gate insulating film 31. A reflection layer 43 formed simultaneously with the contact portions 41 and 42 is formed. In addition, a contact portion connected to another transistor (for example, a gate electrode, a source / drain region, etc.) of a signal circuit portion (not shown) is also formed. An insulating film 81 is formed on the gate insulating film 31 and the gate electrode 32, and each contact portion is formed by, for example, burying a conductive layer in a hole formed in the insulating film 81. Therefore, as shown in FIG. 4, the groove 94 in which the reflective layer 43 is formed is formed on the peripheral portion of the photoelectric conversion portion 21 so as to have a width in which the groove 94 is embedded with a conductive layer. 4A shows the positional relationship between the photoelectric conversion unit 21 and the reflective layer 43 formed in the groove 94, and FIG. 4B further shows the photoelectric conversion unit 21 and the groove 94 added with the first wiring 53. The positional relationship of the formed reflective layer 43 is shown.

  The reflective layer 43 is made of a material that reflects light transmitted through the photoelectric conversion unit 21 toward the photoelectric conversion unit 21. For example, at least light in a long wavelength region such as near infrared light and infrared light is reflected to the photoelectric conversion unit 21 side. The reflective layer 43 may reflect light having a shorter wavelength, for example, visible light, near ultraviolet light, ultraviolet light, and the like, in addition to the light in the long wavelength region. An example of a material having such characteristics is a tungsten layer. Therefore, the reflective layer 43 is preferably formed of a tungsten layer. Alternatively, it is preferably formed using a layer including a tungsten layer. As such a laminated structure, there are a laminated structure of a polysilicon layer and a tungsten layer, and a laminated structure of a tungsten layer and a silicide layer. Further, the reflective layer 43 formed so as to fill the groove 94 needs to be formed to a thickness that does not transmit light in a long wavelength region such as near infrared light or infrared light.

  Thus, since the reflective layer 43 is formed of a tungsten layer, the light transmitted through the photoelectric conversion unit 21 can be reflected to the photoelectric conversion unit 21 side. Moreover, since the tungsten layer is not formed by grain growth like a conventional aluminum layer, it is difficult to form a crystal grain boundary. For this reason, the aluminum film can also reflect light in a long wavelength region such as near infrared light and infrared light that has leaked from the crystal grain boundary.

  Further, first wirings 51 to 53 connected to the contact portions 41 and 42 and the reflective layer 43 are formed. The first wiring 53 connected to the reflective layer 43 is preferably formed in, for example, a shape projected from the electrode layer 34 or a shape larger than the shape. The first wirings 51 to 53 are formed of, for example, a tungsten layer or a layer including at least a tungsten layer. Since the first wiring 53 is formed of a tungsten layer or a layer including a tungsten layer, it is possible to reflect the light in the long wavelength region transmitted through the region surrounded by the reflective layer 43 to the photoelectric conversion unit 21 side. become. In addition, since the reflective layer 43 is formed on the periphery of the photoelectric conversion unit 21 and connected to the first wiring 53, the light transmitted through the photoelectric conversion unit 21 is affected by the first wiring 53 and the reflection layer 43. Since the light is reflected to the photoelectric conversion unit 21 side, it can be re-incident on the photoelectric conversion unit 21 without being incident on other pixels. That is, in the third embodiment, the first wiring 53 is also a reflective layer because of the function of allowing light transmitted through the photoelectric conversion unit 21 to reenter the photoelectric conversion unit 21.

  Further, the groove 94 in which the reflective layer 43 is formed is formed so as not to overlap the transfer transistor 101 formed by being connected to the photoelectric conversion unit 21. As an example, the transfer transistor 101, the reset transistor 102, and the amplification transistor 103 are sequentially connected to the photoelectric conversion unit. Further, for example, a contact portion 41 connected to the transfer gate 101G of the transfer transistor 101 and a contact connected to the source / drain of each transistor are provided.

  For example, second wirings 61 to 63 are connected to the first wirings 51 to 53 through vias 54 to 56. Similarly, third wirings 71 to 73 are connected to the second wirings 61 to 63 through, for example, vias 64 to 66. Although the solid-state imaging device 3 having a wiring layer having a three-layer structure is shown in the drawing, the present invention can be applied even when the wiring layer has four or more wiring layers. An insulating film 80 including the insulating film 81 is formed so as to cover the wiring layers. The insulating film 80 is formed of a plurality of layers of insulating films according to the wiring formation. Further, on the side opposite to the light incident side of the semiconductor layer 11, a transistor group such as a transfer transistor 101, a reset transistor 102, and an amplification transistor 103, the first wirings 51 to 53, the vias 54 to 56, and the second wirings. A signal circuit portion including wiring layers such as 61 to 63, vias 64 to 66, and third wirings 71 to 73 is formed.

  In the solid-state imaging device 3 of the third embodiment, the reflection layer 43 and the first wiring that reflect the light that has passed through the photoelectric conversion unit 21 to the photoelectric conversion unit 21 side are opposite to the light incident side of the photoelectric conversion unit 21. 53, when the light incident on the photoelectric conversion unit 21 cannot be absorbed by the photoelectric conversion unit 21, it is particularly easy to transmit light in a long wavelength region that passes through the photoelectric conversion unit 21, such as near infrared light, red Light in a long wavelength region such as external light can be reflected by the reflective layer 43 and the first wiring 53 and returned to the photoelectric conversion unit 21 again. That is, since the light once transmitted through the photoelectric conversion unit 21 can be received again by the photoelectric conversion unit 21, the amount of light in the long wavelength region that can be received by the photoelectric conversion unit 21 is substantially increased. For this reason, the sensitivity of the long wavelength region of the photoelectric conversion unit 21 can be improved. In addition, since the reflective layer 43 and the first wiring 53 are made of a tungsten layer or a layer including a tungsten layer, the reflective layer 43 and the first wiring 53 are formed more densely than the reflective layer made of an aluminum layer formed by grain growth. Light in a long wavelength region such as outside light or infrared light can be reflected. Further, light that has not been absorbed by the photoelectric conversion unit 21 among the light incident from the light incident surface is reflected by the reflection layer 43 on the signal circuit side and returned to the original photoelectric conversion unit 21 to be adjacent. Color mixing caused by light leaking to the pixel can be prevented.

  In order to manufacture the solid-state imaging device 3 having the configuration of the third embodiment, when the contact portion 41 is formed on the gate electrode 32 and the contact portion 42 is formed on the pixel isolation region 12, the photoelectric conversion is performed. A reflective layer 43 formed of a contact portion similar to the contact portions 41 and 42 may be formed on the portion 21 via the gate insulating film 31. For example, the holes 91 and 92 formed in the insulating film 81 are filled with tungsten to form the contact portions 41 and 42, and at the same time, the trench 94 formed in the insulating film 81 on the photoelectric conversion portion 21 is filled with tungsten. Thus, the reflective layer 43 is formed. Then, the first wiring 51 connected to the contact portion 41 and the first wiring 52 connected to the contact portion 42 are formed, and at the same time, the first wiring 53 connected to the reflective layer 43 is covered on the photoelectric conversion portion 21. To form. As a result, the reflective layer 43 is formed between the gate insulating film 31 near the photoelectric conversion unit 21 and the first wiring 53 as illustrated.

  An embodiment (fourth example) according to the solid-state imaging device of the present invention will be described with reference to the schematic sectional view of FIG.

As shown in FIG. 5, a pixel separation region 12 for separating pixels is formed in the semiconductor layer 11. For example, a silicon layer is used for the semiconductor layer 11. The pixel isolation region 12 is formed of, for example, a p-type well region. A photoelectric conversion unit 21 is formed in a region divided by the pixel separation region 12. A hole accumulation layer 22 is formed on the light incident side of the photoelectric conversion unit 21 (the lower side of the photoelectric conversion unit 21 in the drawing). The hole accumulation layer 22 is formed of, for example, a p ⁺ region. Further, a hole accumulation layer 23 is formed on the side opposite to the light incident side of the photoelectric conversion unit 21 (upper side of the photoelectric conversion unit 21 in the drawing), and an n-type well region 24 is formed in the lower layer. . The hole accumulation layer 23 is formed of, for example, a p ⁺ region. A gate electrode (for example, a transfer gate) 32 is formed on the photoelectric conversion unit 21 via a gate insulating film 31. An n + region 25 is formed in the semiconductor layer 11 on one side of the gate electrode 32.

  An electrode layer 34 formed of the same layer as the gate electrode 32 is formed on the photoelectric conversion portion 21 with the gate insulating film 31 interposed therebetween. The electrode layer 34 can be formed of, for example, polysilicon or polycide. The electrode layer 34 includes a contact portion 41 connected to the gate electrode 32, a contact portion connected to another transistor (for example, a gate electrode, a source / drain region, etc.) (not shown), and pixel isolation. A reflection layer 43 including a plurality of contact portions is formed together with the contact portion 42 connected to the region 12. The reflection layer 43 is formed as many as possible on the electrode layer 34 and is configured to reflect the light transmitted through the photoelectric conversion unit 21 to the photoelectric conversion unit 21 side. For example, at least light in a long wavelength region such as near infrared light and infrared light is reflected to the photoelectric conversion unit 21 side. The reflection layer 43 may reflect light having a shorter wavelength than the light in the long wavelength region, for example, visible light, near ultraviolet light, ultraviolet light, and the like together with the light in the long wavelength region. An example of a material having such characteristics is a tungsten layer. Therefore, the reflective layer 43 is preferably formed of a tungsten layer. Alternatively, it is preferably formed using a layer including a tungsten layer. The reflective layer 43 formed on the electrode layer 34 is formed so that the interval is the minimum dimension of the design rule, and the size (caliber) of each reflective layer 43 is the maximum dimension. ing. That is, the reflective layer 43 formed on the electrode layer 34 occupies the largest area.

  Further, first wirings 51 to 53 connected to the contact portions 41 and 42 and the reflective layer 43 are formed. The first wiring 53 connected to the reflective layer 43 is preferably formed in, for example, a shape projected from the electrode layer 34 or a shape larger than the shape. The first wirings 51 to 53 are formed of, for example, a tungsten layer or a layer including at least a tungsten layer. Since the first wiring 53 is formed of a tungsten layer or a layer including a tungsten layer, it is possible to reflect the light in the long wavelength region transmitted between the reflective layers 43 to the photoelectric conversion unit 21 side. In addition, since the light transmitted through the photoelectric conversion unit 21 is reflected to the photoelectric conversion unit 21 side by the first wiring 53 and the reflective layer 43, the incident light to other pixels is reduced, and the photoelectric conversion unit 21 is reduced. It becomes possible to make it re-enter on. That is, in the fourth embodiment, the first wiring 53 is also a reflective layer because of the function of allowing light transmitted through the photoelectric conversion unit 21 to reenter the photoelectric conversion unit 21.

  In the first wirings 51 to 53, second wirings 61 to 63 are formed through vias 54 to 56, for example. Similarly, third wirings 71 to 73 are formed in the second wirings 61 to 63 through vias 64 to 66, for example. Although the solid-state imaging device 4 having a wiring layer having a three-layer structure is shown in the drawing, the present invention can be applied even when the number of wiring layers is four or more. An insulating film 81 is formed so as to cover the wiring layers. The insulating film 81 is formed of a plurality of layers of insulating films according to the wiring formation. Although not shown on the side opposite to the light incident side of the semiconductor layer 11, a transistor group such as a transfer transistor, a reset transistor, and an amplifying transistor, the first wirings 51 to 53, and the vias 54 to 56. A signal circuit unit including wiring layers such as second wirings 61 to 63, vias 64 to 66, and third wirings 71 to 73 is formed.

  In the solid-state imaging device 4 of the fourth embodiment, a plurality of reflective layers 43 that reflect light transmitted through the photoelectric conversion unit 21 toward the photoelectric conversion unit 21 are provided on the side opposite to the light incident side of the photoelectric conversion unit 21. Therefore, when the light incident on the photoelectric conversion unit 21 cannot be absorbed by the photoelectric conversion unit 21, light in a long wavelength region that is particularly easily transmitted through the photoelectric conversion unit 21, such as near infrared light, infrared light, etc. The light in the long wavelength region can be reflected by the reflective layer 43 and returned to the photoelectric conversion unit 21 again. That is, since the light once transmitted through the photoelectric conversion unit 21 can be received again by the photoelectric conversion unit 21, the amount of light in the long wavelength region that can be received by the photoelectric conversion unit 21 is substantially increased. For this reason, the sensitivity of the long wavelength region of the photoelectric conversion unit 21 can be improved. In addition, since the reflective layer 43 is made of a tungsten layer or a layer containing a tungsten layer, it is formed more densely than the reflective layer made of an aluminum layer formed by grain growth. Light in a long wavelength region such as light can be reflected. Further, light that has not been absorbed by the photoelectric conversion unit 21 among the light incident from the light incident surface is reflected by the reflection layer 43 on the signal circuit side and returned to the original photoelectric conversion unit 21 to be adjacent. Color mixing caused by light leaking to the pixel can be prevented.

Furthermore, by applying a bias to the electrode layer 34, it is possible to change the potential of the region in the photoelectric conversion unit 21 where charge is accumulated. In the current CMOS image sensor, the potential depth of the charge storage portion must be designed so that it can be completely transferred without residual reading, that is, afterimage, at the time of charge reading. Therefore, as in the present invention, by applying a bias at the time of charge readout, the potential of the charge accumulation portion is changed in a shallow direction, the potential of the charge accumulation region is deepened while maintaining the read efficiency, and the saturation charge amount is increased. Can be increased.

  Further, since the electrode layer 34 to which a bias can be applied is formed on the photoelectric conversion unit 21, it is a countermeasure against pinning. Further, when the electrode layer 34 is formed of polysilicon, the function as a reflection film is insufficient with polysilicon alone, but a reflection layer 43 made of tungsten having the same configuration as the contact portion is formed on the electrode layer 34. Since it is formed, the reflection efficiency is also ensured.

  In order to manufacture the solid-state imaging device 4 having the configuration of the fourth embodiment, the electrode layer 34 is formed on the gate insulating film 31 on the photoelectric conversion unit 21 in the step of forming the gate electrode 32. That is, the electrode layer 34 is formed in a process of forming a gate electrode of a transistor group such as a transfer transistor, a reset transistor, and an amplification transistor. Further, when the contact portion 41 is formed on the gate electrode 32 and the contact portion 42 is formed on the pixel isolation region 12, the contact portion 41 is formed on the electrode layer 34 similar to the contact portions 41 and 42. A plurality of reflective layers 43 may be formed. For example, tungsten is buried in the holes 91 and 92 formed in the insulating film 81 to form the contact portions 41 and 42, and at the same time, tungsten is formed in the plurality of holes 93 formed in the insulating film 81 on the photoelectric conversion unit 21. By embedding, the reflective layer 43 is formed. At this time, the reflective layer 43 formed on the electrode layer 34 is formed so that the interval is the minimum dimension of the design rule, and the size (caliber) of each reflective layer 43 is the maximum dimension. To do. That is, the reflective layer 43 formed on the electrode layer 34 is formed to have the largest area. Then, the first wiring 51 connected to the contact portion 41 and the first wiring 52 connected to the contact portion 42 are formed, and at the same time, the first wiring 53 connected to the reflective layer 43 is covered on the photoelectric conversion portion 21. To form. Thereby, the reflective layer 43 is formed between the electrode layer 34 close to the photoelectric conversion unit 21 and the first wiring 53 as illustrated.

  Next, an embodiment (fifth example) according to the solid-state imaging device of the present invention will be described with reference to a schematic sectional view of FIG.

As shown in FIG. 6, a pixel separation region 12 for separating pixels is formed in the semiconductor layer 11. For example, a silicon layer is used for the semiconductor layer 11. The pixel isolation region 12 is formed of, for example, a p-type well region. A photoelectric conversion unit 21 is formed in a region divided by the pixel separation region 12. A hole accumulation layer 22 is formed on the light incident side of the photoelectric conversion unit 21 (the lower side of the photoelectric conversion unit 21 in the drawing). The hole accumulation layer 22 is formed of, for example, a p ⁺ region. Further, a hole accumulation layer 23 is formed on the side opposite to the light incident side of the photoelectric conversion unit 21 (upper side of the photoelectric conversion unit 21 in the drawing), and an n-type well region 24 is formed in the lower layer. . The hole accumulation layer 23 is formed of, for example, a p ⁺ region. A gate electrode (for example, a transfer gate) 32 is formed on the photoelectric conversion unit 21 via a gate insulating film 31. An n + region 25 is formed in the semiconductor layer 11 on one side of the gate electrode 32.

  A contact portion 41 is formed on the gate electrode 32, and a reflective layer 43 is formed on the pixel isolation region 12 so as to fill a groove 95 formed around the photoelectric conversion portion 21. In addition, a contact portion connected to another transistor (for example, a gate electrode, a source / drain region, etc.) of a signal circuit portion (not shown) is also formed. An insulating film 81 is formed on the gate insulating film 31 and the gate electrode 32, and the contact portions and the reflective layer 43 are formed by, for example, embedding a conductive layer in the holes and grooves 95 formed in the insulating film 81. Has been.

  The reflective layer 43 is made of a material that reflects light transmitted through the photoelectric conversion unit 21 toward the photoelectric conversion unit 21. For example, at least light in a long wavelength region such as near infrared light and infrared light is reflected to the photoelectric conversion unit 21 side. The reflective layer 43 may reflect light having a shorter wavelength, for example, visible light, near ultraviolet light, ultraviolet light, and the like, in addition to the light in the long wavelength region. An example of a material having such characteristics is a conductive tungsten layer. Therefore, the reflective layer 43 is preferably formed of a tungsten layer. Alternatively, it is preferably formed using a layer including a tungsten layer. As such a laminated structure, there are a laminated structure of a polysilicon layer and a tungsten layer, and a laminated structure of a tungsten layer and a silicide layer. Further, the reflective layer 43 formed so as to fill the groove 95 needs to be formed to a thickness that does not transmit light in a long wavelength region such as near infrared light or infrared light.

  Thus, since the reflective layer 43 is formed of a tungsten layer, the light transmitted through the photoelectric conversion unit 21 can be reflected to the photoelectric conversion unit 21 side. Moreover, since the tungsten layer is not formed by grain growth like a conventional aluminum layer, it is difficult to form a crystal grain boundary. For this reason, the aluminum film can also reflect light in a long wavelength region such as near infrared light and infrared light that has leaked from the crystal grain boundary.

  Further, a first wiring 51 connected to the contact portion 41 and a first wiring 53 connected to the reflective layer 43 are formed. The first wiring 53 connected to the reflective layer 43 is preferably formed to have a size equivalent to or larger than the external shape of the reflective layer 43 surrounding the photoelectric conversion unit 21, for example. The first wirings 51 and 53 are formed of, for example, a tungsten layer or a layer including at least a tungsten layer. Since the first wiring 53 is formed of a tungsten layer or a layer including a tungsten layer, it is possible to reflect the light in the long wavelength region transmitted through the region surrounded by the reflective layer 43 to the photoelectric conversion unit 21 side. become. In addition, since the reflective layer 43 is formed on the periphery of the photoelectric conversion unit 21 and connected to the first wiring 53, the light transmitted through the photoelectric conversion unit 21 is affected by the first wiring 53 and the reflection layer 43. Since the light is reflected to the photoelectric conversion unit 21 side, it can be re-incident on the photoelectric conversion unit 21 without being incident on other pixels. That is, in the fifth embodiment, the first wiring 53 is also a reflective layer because of the function of re-entering the light that has passed through the photoelectric conversion unit 21 into the photoelectric conversion unit 21.

  For example, second wirings 61 and 63 are connected to the first wirings 51 and 53 through vias 54 and 56, for example. Similarly, third wirings 71 and 73 are connected to the second wirings 61 and 63 via vias 64 and 66, for example. Although the solid-state imaging device 5 having a wiring layer having a three-layer structure is shown in the drawing, the present invention can be applied even when the wiring layer has four or more wiring layers. An insulating film 80 including the insulating film 81 is formed so as to cover the wiring layers. The insulating film 80 is formed of a plurality of layers of insulating films according to the wiring formation. Although not shown on the side opposite to the light incident side of the semiconductor layer 11, a transistor group such as a transfer transistor, a reset transistor, and an amplifying transistor, the first wirings 51 to 53, and the vias 54 to 56. A signal circuit unit including wiring layers such as second wirings 61 to 63, vias 64 to 66, and third wirings 71 to 73 is formed.

  In the solid-state imaging device 5 according to the fifth embodiment, the reflective layer 43 and the first wiring that reflect the light transmitted through the photoelectric conversion unit 21 to the photoelectric conversion unit 21 side on the side opposite to the light incident side of the photoelectric conversion unit 21. 53, when the light incident on the photoelectric conversion unit 21 cannot be absorbed by the photoelectric conversion unit 21, it is particularly easy to transmit light in a long wavelength region that passes through the photoelectric conversion unit 21, such as near infrared light, red Light in a long wavelength region such as external light can be reflected by the reflective layer 43 and the first wiring 53 and returned to the photoelectric conversion unit 21 again. That is, since the light once transmitted through the photoelectric conversion unit 21 can be received again by the photoelectric conversion unit 21, the amount of light in the long wavelength region that can be received by the photoelectric conversion unit 21 is substantially increased. For this reason, the sensitivity of the long wavelength region of the photoelectric conversion unit 21 can be improved. In addition, since the reflective layer 43 and the first wiring 53 are made of a tungsten layer or a layer including a tungsten layer, the reflective layer 43 and the first wiring 53 are formed more densely than the reflective layer made of an aluminum layer formed by grain growth. Light in a long wavelength region such as outside light or infrared light can be reflected. Further, light that has not been absorbed by the photoelectric conversion unit 21 among the light incident from the light incident surface is reflected by the reflection layer 43 on the signal circuit side and returned to the original photoelectric conversion unit 21 to be adjacent. Color mixing caused by light leaking to the pixel can be prevented.

  In order to manufacture the solid-state imaging device 5 having the configuration of the fifth embodiment, when the contact portion 41 is formed on the gate electrode 32, the contact portion 41 formed on the gate electrode 32 is formed in the same manner as the contact portion 41. A reflective layer 43 made of a contact portion may be formed on the pixel isolation region 12. For example, tungsten is buried in the hole 91 formed in the insulating film 81 to form the contact portion 41, and at the same time, tungsten is buried in the groove 95 formed in the insulating film 81 on the pixel isolation region 12. 43 is formed. Then, at the same time when the first wiring 51 connected to the contact portion 41 is formed, the first wiring 53 connected to the reflective layer 43 is formed so as to cover the photoelectric conversion portion 21. As a result, the reflective layer 43 is formed between the element isolation region 12 close to the photoelectric conversion unit 21 and the first wiring 53 as illustrated.

  In each of the solid-state imaging devices 1 to 5, tungsten is used for the reflective layer 43, but a laminated structure with tungsten having silicide formed on the lower layer side and a laminated structure with tungsten having polysilicon formed on the lower layer side may be used. By adopting such a structure, it is possible to prevent underlying processing damage by silicide or polysilicon during tungsten processing.

  Next, an embodiment (example) according to the imaging apparatus of the present invention will be described with reference to the block diagram of FIG.

As illustrated in FIG. 7, the imaging device 200 includes a solid-state imaging device (not shown) in the imaging unit 201. An image forming optical system 202 for forming an image is provided on the light condensing side of the image pickup unit 201, and the image pickup unit 201 displays an image of a signal converted photoelectrically by a driving circuit for driving the image pickup unit 201 and a solid-state image pickup device. A signal processing unit 203 having a signal processing circuit or the like for processing is connected. The image signal processed by the signal processing unit can be stored by an image storage unit (not shown). In such an imaging device 200, the solid-state imaging devices 1 to 5 described in the above embodiment can be used as the solid-state imaging device.

  Since the imaging device 200 of the present invention uses the solid-state imaging devices 1 to 5 of the present invention, the area of the photoelectric conversion portion of each pixel is sufficiently secured as described above. Therefore, there is an advantage that pixel characteristics such as high sensitivity can be achieved.

  The imaging device 200 of the present invention is not limited to the above configuration, and can be applied to any configuration as long as the imaging device uses a solid-state imaging device.

  The solid-state imaging devices 1 to 5 may be formed as a single chip, or may be a modular configuration having an imaging function in which an imaging unit and a signal processing unit or an optical system are packaged together. May be. Further, the present invention can be applied not only to a solid-state imaging device but also to an imaging device. In this case, an effect of improving the image quality can be obtained as the imaging device. Here, the imaging device indicates, for example, a camera or a portable device having an imaging function. “Imaging” includes not only capturing an image during normal camera shooting but also includes fingerprint detection in a broad sense.

  DESCRIPTION OF SYMBOLS 1 ... Solid-state imaging device, 11 ... Semiconductor layer, 21 ... Photoelectric conversion part, 43 ... Reflection layer

Claims (9)

A photoelectric conversion part formed in the semiconductor layer;
Handles signal charges photoelectrically converted by the photoelectric conversion unit, a signal circuit unit formed on the semiconductor layer opposite to the incident side of light incident on the photoelectric conversion unit,
A gate insulating film formed on a surface of the semiconductor layer opposite to the light incident side;
A gate electrode of a transfer gate formed on the semiconductor layer adjacent to the photoelectric conversion unit via the gate insulating film;
Reflecting the light transmitted through the photoelectric conversion unit to the photoelectric conversion unit side, and a reflective layer formed on the side opposite to the light incident side of the photoelectric conversion unit,
The reflective layer is made of a tungsten layer or a layer including at least a tungsten layer, and is a layer different from a wiring layer formed on an upper side opposite to the light incident side of the semiconductor layer, and the semiconductor layer and the semiconductor layer A solid-state imaging device formed between a wiring layer and a contact part connected to the signal circuit part . An insulating film is formed on the photoelectric conversion part via the gate insulating film,
The solid-state imaging device according to claim 1, wherein the reflective layer is formed by embedding a conductor in a hole formed in the insulating film on the photoelectric conversion unit. An insulating film is formed on the photoelectric conversion part via the gate insulating film,
The solid-state imaging device according to claim 1, wherein the reflective layer is formed on at least an inner surface of a hole formed in the insulating film on the photoelectric conversion unit. A polysilicon electrode layer is formed between the gate insulating film and the reflective layer on the photoelectric conversion unit,
The solid-state imaging device according to claim 1, wherein a bias voltage is applied to the polysilicon electrode layer via the reflective layer. The reflective layer is a solid-state imaging device according to claim 1, wherein is formed along a periphery of the gate insulating film interposed therebetween wherein the photoelectric conversion unit. A wiring layer connected to the reflective layer is extended on the photoelectric conversion part,
The wiring layer is formed of a tungsten layer or a layer containing at least tungsten.
The solid-state imaging device according to claim 1 . Forming a photoelectric conversion portion in the semiconductor layer;
A gate insulating film is formed on the semiconductor layer opposite to the incident side of light incident on the photoelectric conversion unit, a gate electrode is formed through the gate insulating film, and photoelectric conversion is performed by the photoelectric conversion unit. Forming a signal circuit portion comprising a transistor for extracting an electrical signal;
Forming a reflective layer made of a tungsten layer or a layer including at least a tungsten layer via the gate insulating film extending to the opposite side of the photoelectric conversion portion from the light incident side;
It has a step of forming a wiring layer above the reflective layer,
The method for manufacturing a solid-state imaging device, wherein the reflective layer is formed in a step of forming a contact portion connected to the signal circuit portion . In the step of forming a wiring layer to be connected on the contact part, the wiring layer is formed to extend on the photoelectric conversion part.
The manufacturing method of the solid-state imaging device of Claim 7 . A condensing optical unit that condenses incident light;
A solid-state imaging device that receives and photoelectrically converts light collected by the condensing optical unit; and
A signal processing unit for processing the photoelectrically converted signal,
The solid-state imaging device
A photoelectric conversion part formed in the semiconductor layer;
Extracting an electrical signal photoelectrically converted by the photoelectric conversion unit, a signal circuit unit formed in the semiconductor layer on the opposite side to the incident side of the light incident on the photoelectric conversion unit,
A gate insulating film formed on a surface of the semiconductor layer opposite to the light incident side;
A gate electrode of a transfer gate formed on the semiconductor layer adjacent to the photoelectric conversion unit via the gate insulating film;
A reflective layer that is formed on the photoelectric conversion unit via the gate insulating film and reflects the light transmitted through the photoelectric conversion unit to the photoelectric conversion unit side;
The reflective layer is made of a tungsten layer or a layer including at least a tungsten layer, and is a layer different from a wiring layer formed on an upper side opposite to the light incident side of the semiconductor layer, and the semiconductor layer and the semiconductor layer An imaging device formed between a wiring layer and a contact portion connected to the signal circuit portion .

Images