JP5250333B2 - Abrasive injection / collection part structure in blasting method and blasting machine - Google Patents

Description

  The present invention relates to a blasting method and a structure of an abrasive jet recovery unit in a blasting apparatus used for the blasting process. More specifically, a predetermined width of cutting is performed on a moving plate-like workpiece in the moving direction of the workpiece. The present invention relates to a method capable of preventing adhesion of a fine abrasive material to a workpiece in blasting using a fine abrasive material as a direction, and a structure of an abrasive jet recovery unit in an apparatus for performing this method.

  Furthermore, in more detail, the present invention has not been conventionally performed as a means that can be used for, for example, a scribing method of a thin film solar cell panel. Another object of the present invention is to provide a processing method that does not require cleaning of the mask and the workpiece after processing, and a structure of an abrasive jet recovery portion in a blasting apparatus that is suitable for this processing.

  The finely divided abrasive in the present invention refers to an abrasive having # 400 or more or an average particle size of 30 μm or less.

  As an example of machining the above-mentioned workpiece, a gravity blasting device 60 is given as an example, which has not been conventionally performed. This will be described with reference to FIG. 7. This blasting device is a cabinet whose inside is a machining chamber. 61, and by disposing the injection nozzle 62 in the cabinet, a workpiece (not shown) carried into the cabinet 61 through the carry-in port 63 can be processed.

  Further, the lower portion of the cabinet 61 is formed in an inverted pyramid shape, and a hopper 68 is formed in this portion. The lowermost end of the hopper 68 is used for collecting abrasives installed on the upper portion of the cabinet 61 via a conduit 65. The upper part of the recovery tank 70 is communicated with.

  The aforementioned recovery tank 70 is a so-called cyclone that separates cutting waste from the abrasive, and connects the distal end of the conduit 65 to the inlet 73 of the recovery tank 70 through a communication tube 75, and also includes a connection tube 74 and a discharge tube 67. When the inside of the recovery tank 70 is sucked by a dust collector (not shown) equipped with a wind exhauster, the abrasive and cutting waste in the cabinet flows into the recovery tank 70 through the communication pipe 75 and flows into the recovery tank 70. The cutting waste is collected by the dust collector when descending while rotating along the inner wall of the steel, while the reusable abrasive material is collected at the bottom of the recovery tank 70 and again from the injection nozzle 62 via the abrasive material supply pipe 64. Injection is possible.

  As described above, in the conventional blasting apparatus, the abrasive material injected in the processing chamber is conveyed and collected in the collection tank 70 by the negative pressure generated by the dust collector, but uses fine powder having a small particle size. In this case, this fine powder abrasive has the property that individual particles have a large surface area relative to the weight compared to a general abrasive, and thus tend to adhere to and agglomerate firmly to the workpiece. Once the fine abrasive material adheres to the inner wall of the processing chamber, it becomes difficult to remove it even if the processing chamber is sucked by negative pressure or air blow or the like is performed on the workpiece.

  For this reason, a work that has been blasted with such a fine abrasive must be cleaned with washing water after blasting to remove the fine abrasive attached to the surface.

  In this way, in blasting using a fine abrasive, it is difficult to remove the fine abrasive once attached to the workpiece, and the fine abrasive adheres to the workpiece and other places. It has also been proposed to collect before.

  As an example of such a configuration, in the blasting apparatus 80 shown in FIG. 8, an injection nozzle 91 for injecting abrasive is provided at one end of the blasting duct 81, and the abrasive is applied to the other end of the blasting duct 81 by negative pressure. A suction duct 83 for suction is communicated, the blasting duct 81 is provided with a blasting chamber 82 in front of the abrasive jet, and the workpiece W is disposed on the side wall of the blasting chamber 82 in a direction substantially perpendicular to the abrasive jet. Is formed, and an air intake gap is formed between the inner periphery of the insertion port 84 and the outer periphery of the workpiece W, and serves as an intake port 85 for sucking outside air. The fine powder injected into the work in the blast processing chamber It has been proposed that the abrasive material is immediately sucked from the suction duct and that the abrasive material is prevented from popping out of the processing chamber by the air blow by the outside air sucked from the suction gap. (See Patent Document 1).

  Blasting using fine abrasive is expected to be used in various fields because high-precision processing is possible. For example, scribing performed in the manufacturing process of thin film solar cells as such a field. In (groove processing), it can be used as an alternative to the currently used laser processing.

  Here, as a scene where scribing with a laser is performed in the manufacturing process of a thin film solar cell, as shown in FIGS. 9A and 9B, a back electrode, a light absorption layer, an emitter, and a transparent electrode are formed on a glass substrate. After forming the thin film layer required for thin film solar cells, etc., before attaching the glass cover, there is an operation to remove the thin film layer from the glass substrate in the range of several mm to several tens of mm at the peripheral edge. By removing the thin film layer at the periphery, it is possible to prevent a short circuit from occurring even when a metal frame such as aluminum is attached to the periphery after the glass cover is attached. It has become.

  In addition, the scribing by the laser performed in the manufacturing process of the thin film solar cell is also performed in the case of dividing the thin film solar cell into each cell in addition to the above example.

Prior art document information of the present invention includes the following.
JP 09-300220 A

  The scribing performed in the thin film solar cell manufacturing process is generally performed by a laser at present. However, the laser processing apparatus is expensive and requires a large initial investment. A nitrogen gas laser generally used for work consumes a relatively high running cost because the nitrogen gas is consumed.

  Therefore, if such scribing can be performed by a blasting method that can keep running costs relatively low by using a blasting device that is cheaper than a laser device, it is advantageous in terms of price competitiveness in the market. Can stand in.

  However, when such scribing is performed by blasting using a fine abrasive, the injected abrasive adheres to the workpiece, so it is necessary to remove the adhering abrasive as described above. In addition, once the fine abrasive material adheres to the workpiece, it is difficult to remove it, and it cannot be easily removed by suction in the processing chamber by a dust collector or air blow to the workpiece.

  Therefore, if it is attempted to remove the fine abrasive material adhering to the workpiece in this way, the workpiece is washed with washing water after blasting. However, if the workpiece is the above-described thin film solar cell, this is removed. There is no effective means to remove the adhering fine abrasive material because it cannot be washed with washing water.

  Further, when cutting is performed by a blast processing apparatus, the abrasive material injected from the injection hole of the blast gun collides with the workpiece as shown in FIG. ° Because of diffusion in all directions, the workpiece is cut not only at the collision with the abrasive but also around it.

  Therefore, if scribing as described above is performed by blasting, it is necessary to protect the surface of the non-cut portion in advance by attaching a mask material or the like so that the portion that remains without being removed is not cut.

  However, when the thin film solar cell described above is used as a workpiece, each layer formed on the glass substrate is relatively fragile, and if the mask material is stuck or peeled off, the thin film layer may be damaged due to an impact during the sticking or peeling. There is a risk of peeling from the glass substrate.

  In the blast processing apparatus introduced as the above-mentioned Patent Document 1, the fine powder abrasive is to be collected before adhering to the work. However, the work that can be handled here is a stick because of the configuration shown in FIG. Or it is limited to a linear thing, For example, it cannot apply to the plate-shaped workpiece | work which bisects a process chamber up and down.

  Further, in the configuration described in the above-mentioned Patent Document 1, if a groove having a certain width is to be formed on a workpiece, it is essential to attach a mask material. From this point as well, it should be used for scribing thin film solar cells. I can't.

  In the above description, a thin film solar cell has been described as an example of a plate-shaped workpiece. However, the present invention is not limited to this, and workpieces of various materials that cannot be cleaned with cleaning water or mask materials can be applied. Has the same problem as above.

  Moreover, even if it is a plate-like workpiece that can be cleaned and mask material can be applied, the advantage that productivity can be improved and processing costs can be reduced if cleaning and mask material application can be omitted. There is.

  Therefore, the present invention has been made to eliminate the above-mentioned disadvantages of the prior art, and even when a fine abrasive is used, the fine abrasive can be recovered without adhering to the workpiece. Therefore, it is not necessary to perform operations such as cleaning to remove the fine abrasive after blasting, and a constant cutting width without sticking a mask material to a relatively moving plate-like workpiece. It is an object of the present invention to provide a blasting method and a blasting device abrasive polishing / collecting part structure capable of grooving and the like.

In order to achieve the above object, the blasting method of the present invention has at least one side edge in the same direction as the movement direction of the plate-like workpiece through the movement allowable gap of the plate-like workpiece W to be machined. The main cover 20 having the openings 22 and 42 facing each other and the facing cover 40 are arranged to face each other in the vertical direction.
The main cover 20 communicates with the space in the main cover via main cover suction pipes 21a and 21b opened to both sides of the injection hole 31 of the blast gun 30 in the moving direction of the plate-like workpiece W ,
The plate-like workpiece W arranged opposite to the main cover 20 is formed with an injection hole 31 in the form of a slit, and the injection hole 31 is located at a position close to the plate-like workpiece W and on the plate-like workpiece W. The plate-like workpiece W is arranged so as to be in a substantially vertical injection direction, is moved relative to the injection hole 31 of the blast gun 30 (in the movement direction T), and the plate-like workpiece W is placed in the main cover. Fine powder abrasive is sprayed through the injection hole 31 of the blast gun 30 disposed on the surface to be processed through a predetermined gap, and negative pressure is applied to the inside of the main cover 20 through the main cover suction pipes 21a and 21b. The thin film layer and the abrasive material cut and removed from the glass substrate from the space are sucked and collected, and the processed surface of the plate-like workpiece W is connected to the space in the counter cover 40 through the counter cover suction pipe 41. And opposite Wherein the sucking and recovering film layer and the abrasive was cut removed from the glass substrate from the space inside the opposite cover 40 which is a negative pressure from the direction (claim 1).

Further, in the configuration in which the injection hole 31 of the blast gun 30 is formed in a slit shape, the relative movement of the plate-like workpiece W with respect to the injection hole 31 is determined in the direction of the opening width W _{O of the} injection hole 31. (Claim 2 ).

Furthermore, in the blasting method in which the injection hole 31 of the blast gun 30 is slit, the opening width W _O of the injection hole 31 of the blast gun 30 is preferably 0.1 to 100 mm ( Claim 3 ).

Further, the main cover suction pipe 21a with respect to the processing surface of the plate-shaped workpiece W, it is preferable that an axial 21b and θ the angle of inclination of 10 to 80 ° (claim 4).

Further, in the blasting method, the baffle plate 24 that is inclined so as to be separated from the plate-like workpiece W in the opening 22 of the main cover 20 on both sides of the injection hole 31 as the width direction is moved away from the injection hole 31. the provided a flow of abrasive along the surface of the plate-shaped workpiece W, it can be deflected in a direction away from the surface of the plate-shaped workpiece (claim 5).

Further, the abrasive jet recovery part structure in the blasting apparatus 1 of the present invention is arranged to face each other in the vertical direction via the relative movement allowable gap of the plate-like workpiece W to be processed, and the plate-like workpiece A main cover 20 and an opposite cover 40 having openings 22 and 42 facing at least one side edge in the same direction as the relative movement direction of
Communicating with the main cover 20, the space to gas thin layer was cut removed from Ras substrate and abrasive sucking and collecting in the main cover 20, toward both sides of the injection hole in the moving direction of the plate-shaped workpiece Main cover suction pipes 21a and 21b opened respectively ,
Is placed in the main within the cover through a predetermined gap to be processed surface of the plate-shaped workpiece, the injection holes formed in a slit shape at positions close to the plate-shaped workpiece, and the plate-like A blast gun 30 that is arranged so as to be in a substantially vertical injection direction with respect to the workpiece, and injects fine powder abrasives through the injection holes 31;
A counter cover suction tube 41 that communicates with the space in the counter cover 40 and sucks the thin film layer and the abrasive material cut and removed from the glass substrate in the counter cover 40 from the direction opposite to the processing surface of the plate-like workpiece W. (Claim 6 ).

Further, in the configuration in which the injection hole 31 of the injection nozzle 30 is formed in a slit shape, the direction of the opening width W _O of the injection hole 31 is made to coincide with the relative movement direction of the plate-like workpiece W. (Claim 7 ).

Further, in the structure of the abrasive jet recovery part 10 in which the injection hole 31 of the blast gun 30 is slit, the opening width W _O of the injection hole 31 of the blast gun 30 is 0.1 to 100 mm. (Claim 8 ).

Further, the main cover suction pipe 21a with respect to the processing surface of the plate-shaped workpiece W, it is preferable that an axial 21b and θ the angle of inclination of 10 to 80 ° (claim 9).

In addition, baffle plates 24 can be provided in the openings 22 of the main cover 20 on both sides of the injection holes 31 so as to be inclined away from the plate-like workpieces W as the width direction moves away from the injection holes 31. (Claim 10 ).

  According to the configuration of the present invention described above, the blast processing method and the blast processing apparatus provided with the abrasive jet recovery part structure of the present invention can obtain the following remarkable effects.

  By recovering the sprayed abrasive from both the main cover 20 and the counter cover 40 under negative pressure, it is ensured when the fine abrasive is in a floating state before adhering to the plate-like workpiece W. As a result, it is not necessary to remove the fine abrasive from the surface of the plate-like workpiece W after blasting.

  As a result, it is not necessary to remove the fine abrasive that has been removed by washing with conventional washing water, and the plate-like workpiece to be machined cannot be washed like thin-film solar cells. However, this could be the target of blasting with fine abrasive.

  Further, by performing suction through the counter cover 40, when the plate-like workpiece W is not disposed between the covers 20, 40, it is possible to suitably collect the fine abrasive material sprayed from the blast gun 30. did it.

  Further, by performing both the suction in the main cover 20 and the suction in the counter cover 40, the suction force acting on the plate-like workpiece W by the suction in the main cover 20 is changed to a plate shape by the suction in the counter cover 40. By canceling with the suction force acting on the workpiece W, the relative movement of the plate-like workpiece W could be facilitated.

The injection hole 31 of the blast gun 30 has a slit shape, is disposed in the main cover 20 so as to be in the vertical injection direction at a position close to the plate-like workpiece W, and the main cover intake pipes 21a and 21b are provided in the injection hole 31. In the structure opened toward both sides in the opening width W _O direction, the diffusion direction of the abrasive material injected from the blast gun 30 and colliding with the plate-like workpiece W is defined as the opening width W _O direction of the injection hole 31. The plate-like workpiece W can be machined with a cutting width corresponding to the opening length L _O of the injection hole 31 without sticking the mask material. It was possible to prevent the fine abrasive from adhering to the surface of W.

  As a result, it is possible to perform blasting using fine abrasives even on workpieces that cannot be masked, and when processing other workpieces, It was possible to reduce the labor and materials spent on sticking and cleaning.

Further, in the above-described configuration in which the injection hole 31 of the blast gun 30 is formed in a slit shape, the relative movement direction T of the plate-like workpiece W and the opening width W _O direction of the injection hole 31 are made to coincide with each other. The plate-like workpiece W could be machined with a high-precision machining width without being used.

By setting the opening width W _O of the injection hole 31 of the blast gun 30 to a range of 0.1 to 100 mm, the opening length L of the injection hole 31 after the injected abrasive material collides with the plate-like workpiece W. It was possible to reliably prevent diffusion in the _O direction, thereby controlling the cutting width of the plate workpiece W with high accuracy.

  By setting the axial direction of the main cover suction pipes 21a and 21b to an inclination angle θ of 10 to 80 ° with respect to the processing surface of the plate-like workpiece W, the fine powder abrasives collected with suction in the main cover 20 can be recovered. Could be done more efficiently.

  By providing baffle plates 24 in the openings 22 of the main cover 20 on both sides of the injection port 31 of the blast gun 30, the flow of the abrasive flowing along the surface of the plate-like workpiece W by the baffle plates 24 is changed. It was possible to deflect in a direction away from the surface of W, thereby improving the recovery efficiency by the main cover suction pipes 21a and 21b and further preventing the adhesion of the fine abrasive to the plate-like workpiece W. .

  Next, embodiments of the present invention will be described below with reference to the accompanying drawings.

Abrasive Material Injection / Recovery Part Structure One embodiment of the structure of the abrasive material injection / recovery part of the present invention used for blasting is shown in FIGS.

  As shown in FIGS. 1 to 6, the abrasive jet recovery unit 10 of the present invention includes a main cover 20 that is disposed to face a work surface of a plate-like workpiece W with a predetermined gap therebetween, and an inside of the main cover 20. And a main cover suction pipes 21a and 21b for sucking the inside of the main cover 20, and a surface opposite to the processing surface of the plate-like workpiece W (hereinafter simply referred to as "workpiece"). A counter cover 40 that is disposed opposite to the back surface via a predetermined gap is disposed to face the main cover 20 and a counter cover suction pipe 41 that sucks the inside of the counter cover 40 is provided.

Main cover The main cover 20 disposed opposite to the work surface of the plate-like workpiece W with a predetermined gap is the upper surface of the plate-like workpiece W arranged horizontally in the illustrated embodiment. The rectangular opening 22 is provided on the surface facing the plate-like workpiece W.

In the illustrated embodiment, as shown in FIG. 1, the main cover 20 has a moving direction T of the plate-like workpiece W to be machined in plan view as the length _Lmc direction, and the moving direction T and the width of the orthogonal method term. An opening 22 is formed on the bottom surface, which is formed in a rectangular shape having a W _mc direction, and has a size obtained by reducing the wall thickness with respect to the length L _mc and the width W _mc . In FIG.

  In the illustrated embodiment, the shape of the main cover 20 is formed in a trapezoidal shape when viewed from the front as described above, but instead of this shape, for example, a semicircular shape in which the front shape of the main cover bulges upward. The shape may be formed, and the shape is not limited to the illustrated embodiment.

  The opening 22 provided at the bottom of the main cover 20 has a flange-shaped pressing plate (upper pressing plate) that protrudes in the outer peripheral direction from the opening edge (three sides excluding one side in the length direction in the example shown in FIG. 1). 23 may be provided, and an arrangement space for a baffle plate 24 to be described later is secured within the thickness of the upper pressing plate 23.

  In the illustrated embodiment, the pressing plate (upper pressing plate) 23 is formed by attaching a plate material having a rectangular opening having the same size as the bottom surface of the trapezoidal main body portion. In this configuration, the opening formed in the pressing plate 23 becomes the opening 22 of the main cover 20.

  The size of the main cover 20 includes the size of the plate-like workpiece W to be machined, the cutting width with respect to the plate-like workpiece W, the machining position of the plate-like workpiece W (for example, the end of the plate-like workpiece W that is a rectangular plate). It can be changed to various sizes depending on whether it is a cutting process along one side or a cutting process on the center part, etc., but when the main cover 20 is excessively enlarged, fine powder polishing floating inside In order to collect the material, the suction speed in the main cover 20 needs to be increased, and a large suction means is required, which is not economical.

As an example, the size of the main cover 20 in the illustrated embodiment is such that the rectangular width W _mc in plan view is 80 mm and the length L _{mc is} 200 mm, and the trapezoidal height H _mc in front view is the pressure plate (upper presser). 109 mm including the thickness of the plate.

In the opening 22 of the main cover 20, baffle plates 24 are preferably provided on both sides of the injection hole 31 of the blast gun 30 as shown in FIG. The baffle plate 24 has an injection hole 31 of the blast gun 30 formed in a slit shape as will be described later, and the injection hole 31 in the opening width W _O direction of the injection hole 31 , that is, in the moving direction of the plate-like workpiece. 1 (see FIG. 1 and FIG. 2), and has a length direction in the direction of the opening length L _O of the injection hole 31 and is separated from the plate-like workpiece W as the width direction moves away from the injection hole 31. Be inclined to be.

  In the embodiment shown in FIG. 1, six baffle plates 24 are provided on one side of the injection hole 31 and a total of 12 baffle plates on both sides so that the inclination angle in each width direction is constant. They are arranged in parallel.

  The baffle plate 24 provided in this way is injected from the injection hole 31 of the blast gun 30, and after the collision with the surface of the plate-like workpiece W, the flow of the abrasive that tries to move along the surface of the plate-like workpiece W is flown. It has an action of deflecting upward and separating from the surface of the plate-like workpiece W [see FIG. 2 (B)]. By this, the fine powder abrasive is suspended in the main cover 20, thereby allowing a main cover suction pipe 21a to be described later. , 21b through the main cover 20 can be more reliably prevented from adhering the fine abrasive to the surface of the plate-like workpiece W.

  Further, in the configuration of the main cover 20 shown in FIG. 1, a peep window 25 is formed by fitting a transparent glass plate or the like on the front of the main cover 20, and the state inside the main cover 20 is confirmed through this peep window 25. It is configured to be able to.

  By providing such a viewing window 25, abnormalities in the main cover 20, for example, clogging due to agglomeration of fine abrasive materials, poor recovery of abrasive materials, changes in the processing state of the plate-like workpiece W, etc. Although it is preferable in that it can be observed, the viewing window 25 is not necessarily required.

  The main cover 20 configured as described above is disposed with the opening 22 formed at the bottom thereof facing the processing surface of the plate-like workpiece W with a predetermined gap therebetween, whereby the main cover 20 is arranged. In the cover 20, a space surrounded by the inner wall of the main cover 20 and the plate-like workpiece W to be processed is formed.

Blast Gun In the main cover 20 configured as described above, a tip portion of a blast gun 30 for injecting an abrasive to the plate-like workpiece W is disposed.

  In the illustrated embodiment, the blast gun 30 passes through the top plate portion of the main cover 20 as shown in FIG. 1 and its injection direction is perpendicular to the plate-like workpiece W. The injection holes 31 are attached so as to be arranged close to the surface of the plate-like workpiece W.

Injection hole 31 provided at the end of the blast gun 30 is formed in a slit shape that the opening width W _O is formed narrow, the opening width W _O direction of the injection hole 31 of the slit-shaped, the plate-like It is attached to the main cover 20 so as to face the moving direction T of the workpiece W (see FIGS. 1 and 2).

In general, abrasives sprayed from a blast gun, especially fine abrasives that are light in weight and easily get on the carrier gas flow, flow along the workpiece surface along with the carrier gas flow when colliding with the workpiece surface. When the abrasive is sprayed by the blast gun 30 having the slit-shaped injection holes 31 on the surface, the diffusion direction of the abrasive flow after colliding with the surface of the plate-like workpiece W is shown in FIG. It can be controlled in the direction of the opening width W _O of the injection hole 31, and the cutting width of the plate-like workpiece W can be prevented from expanding. In order to cause such an action more reliably, the opening width W _O of the injection hole 31 is preferably formed in the range of 0.1 to 100 mm. In this embodiment, a rectangular opening of 0.5 mm × 15 mm is formed.

Further, the opening length L _O of the slit-like injection hole 31 can be formed to a length corresponding to the processing width for the plate-like workpiece W as an example.

However, in the case of cutting a predetermined width along one edge of the plate-like workpiece W, the opening length L _O may be formed longer than the cutting width. In this case, for example, FIG. As shown in A), a desired cutting width may be obtained by adjusting the position of the plate-like workpiece W or the injection hole 31 with respect to the injection hole 31.

Main cover suction pipe The main cover 20 is further provided with main cover suction pipes 21a and 21b for sucking the inside of the main cover 20, and the main cover 20 is passed through the main cover suction pipes 21a and 21b. By sucking, the fine powder abrasive and the cutting waste floating in the main cover 20 can be collected.

The main cover suction pipes 21a and 21b are provided so as to open toward both sides in the opening width W _O direction of the injection hole 31 of the blast gun 30 (see FIG. 1). In the illustrated embodiment, Main cover suction pipes 21 a and 21 b that pass through the respective inclined surfaces formed on the oblique sides of the trapezoid when viewed from the front and communicate with the main cover 20 are provided.

  As shown in FIG. 3D, the main cover suction pipes 21a and 21b have an angle θ formed by a line obtained by extending the axis of the main cover suction pipes 21a and 21b and the work surface of the plate-like workpiece W. It is preferable to set the angle to be in the range of 10 to 80 °. In the illustrated embodiment, the angle θ of 45 ° penetrates the inclined surface of the main cover 20 and communicates with the space in the main cover 20. , Open.

  The size of the main cover suction pipes 21a and 21b can be changed to various sizes depending on the size of the main cover 20, the performance of the suction means used (dust collector 3 to be described later), and the like. The diameter (inner diameter) is 47.6 mm.

Opposing Cover The opposing cover 40 is disposed opposite to the main cover 20 including the blast gun 30 and the main cover suction pipes 21a and 21b described above.

  In the illustrated example, the opposed cover 40 has an opening 42 formed on the upper surface thereof, and an opening 22 formed on the bottom surface of the main cover 20 and an opening 42 formed on the upper surface of the opposed cover 40. At least one side edge of the plate-like workpiece W to be processed is disposed so as to face each other with a movement allowable interval therebetween.

  The opening 22 of the main cover 20 and the opening 42 of the opposing cover 40 do not necessarily have to be formed in the same opening shape, but in the illustrated embodiment, both are formed in the same shape, and both openings are viewed in plan view. The opening edges of (22, 42) are overlapped.

  In the embodiment shown in FIG. 1, the facing cover 40 has a portion formed in a substantially rectangular tube shape, and a substantially inverted pyramid shape formed continuously below the portion formed in the rectangular tube shape. The hopper-like shape is formed as a whole, and the opposite cover suction pipe 41 is communicated with the lowermost end of the inverted pyramid-like portion so that the inside of the opposite cover 40 can be sucked. Yes.

  Further, similarly to the main cover 20 described above, a lower pressing plate 43 protrudes in the outer peripheral direction in a flange shape at the upper opening edge of the facing cover 40.

  In this way, the counter cover 40 disposed to face the main cover 20 is provided, and when the space in the main cover 20 and the counter cover 40 are in communication with each other by sucking the counter cover 40, the counter cover 40 is provided. The fine abrasive powder sprayed in the main cover 20 can be collected via the main cover 20, and the upward suction force acting on the plate-like workpiece W by the suction in the main cover 20 is applied to the counter cover 40. The plate-like workpiece W can be easily moved by canceling with the downward suction force generated by the suction.

  Accordingly, the shape of the facing cover 40, the position where the facing cover suction pipe 41 is formed, the size, and the like are not particularly limited as long as such an action can be obtained.

  However, in the configuration in which the counter cover suction pipe 41 is formed at the center of the bottom of the counter cover 40 as in the illustrated embodiment, the counter cover suction pipe 41 is disposed in front of the blast gun 30 in the spraying direction. When the abrasive is sprayed with the plate-like workpiece W removed from the front surface of the gun 30, the sprayed abrasive can be efficiently sucked and collected via the opposing cover suction pipe 41, There is an advantage that the fine abrasive can be quickly removed and recovered from any internal space of the main cover 20 and the opposed cover 40.

  In FIG. 1, reference numeral 44 denotes a rectifying plate provided in the opening 42 of the opposing cover 40, the width direction of which is arranged in the vertical direction, and when the abrasive is collected in the lower opposing cover 40. A downward flow toward the inside of the facing cover 40 is formed.

Others Since the illustrated abrasive jet recovery unit 10 is configured so that one side of the plate-like workpiece W can be cut with a predetermined width, as shown in FIG. An insertion restricting body 51 is provided in a gap formed between the opposed cover 40 and the insertion position of the plate-like workpiece W is restricted by the insertion restricting body 51.

  Accordingly, the plate-like workpiece W is inserted between the main cover 20 and the opposing cover 40 until one side of the plate-like workpiece W collides with the insertion restricting body 51, and one side of the plate-like workpiece W is in sliding contact with the insertion restricting body 51. When the plate-like workpiece W is moved, a portion to be processed of the plate-like workpiece W can pass through the front surface of the injection hole 31 of the blast gun 30.

  Further, since the vicinity of one side of the plate-like workpiece W is processed in this way, the main cover 20 and the counter cover 40 are shown in FIG. 1 on the side surface opposite to the insertion side of the plate-like workpiece W. For example, when cutting a predetermined width at the center of a relatively large plate-shaped workpiece W with the moving direction as the length direction, the insertion restricting body 51 and the connecting plate are connected. 52 may be removed and the main cover 20 and the opposing cover 40 may be arranged in a state where they are completely separated from each other in the vertical direction.

Method of Use The abrasive jet recovery unit 10 of the present invention configured as described above is a mixture of compressed gas and fine abrasive at the rear end of the blast gun 30 that extends outward from the top plate of the main cover 20. A mixed fluid supply source for supplying fluid is connected.

  Further, both of the two main cover suction pipes 21a and 21b provided on the main cover 20 and the counter cover suction pipe 41 provided on the counter cover 40 are communicated with a suction means such as a dust collector, and the main cover 20 and the counter cover are connected. The inside of 40 is constituted so that suction is possible.

  As an example, FIG. 4 shows one configuration example of the blasting apparatus 1 provided with the above-described abrasive jet recovery unit 10 of the present invention, and the blast provided in the abrasive jet recovery unit 10 of the present invention. The rear end portion of the gun 30 is communicated with a pressurized tank 2 for quantitatively supplying the blast gun as a mixed fluid with a compressed gas while measuring a fine amount of fine abrasive.

  The two main cover suction pipes 21a and 21b provided on the main cover 20 and the counter cover suction pipe 41 provided on the counter cover 40 are both communicated with a common dust collector 3 as a suction means. Suction is possible so that the atmosphere in each of the covers 20 and 40 is under negative pressure.

  The fine abrasive material in the main cover 20 and the counter cover 40 collected by the dust collector 3 is separated into a reusable abrasive and cutting waste by a cyclone 3a provided in the dust collector 3 and collected, and can be reused. The abrasive can be reused, for example, by putting it in the pressurized tank 2 again.

  In the illustrated embodiment, reference numeral 4 in FIGS. 4 and 5 denotes a conveyor table, and the rotation of the driving motor M causes the conveyance roller 5 provided on the conveyor table 4 to rotate, and the upper part thereof. The mounted plate-like workpiece W can be transported in a predetermined direction.

  In the illustrated embodiment, the main cover 20 and the counter cover 40 that constitute the abrasive jet recovery part 10 of the present invention are attached to one side 4a of the conveyor table whose length direction is the conveying direction of the plate-like workpiece W, and the conveyor When the plate-like workpiece W placed on the conveying roller 5 of the table 4 is moved, the vicinity of one end of the plate-like workpiece W passes between the main cover 20 and the counter cover 40. On the contrary, the plate-like workpiece W is fixed, and the main cover 20 and the counter cover 40 that constitute the abrasive jet recovery unit 10 of the present invention are moved to move relative to the plate-like workpiece W. It is possible to make it possible.

  Furthermore, in the illustrated embodiment in which a predetermined width at one end side of the plate-like workpiece W can be machined, the abrasive jet recovery unit 10 of the present invention is provided only on the side 4 a side of the conveyor table 4. However, for example, when processing is performed simultaneously on each of two parallel sides of the plate-like workpiece W, the abrasive jet recovery unit 10 is also provided on the other side 4b of the roller conveyor so that it can be transported once. It may be configured so that two sides of the plate-like workpiece can be processed at the same time. Furthermore, as shown in FIG. 6A, for example, four sides of the plate-like workpiece can be formed by continuous work involving rotation of the plate-like workpiece W. However, as shown in FIG. 6B, the abrasive jet recovery unit 10 may be disposed at a position where the center of the plate-like workpiece W passes. In addition to the edge part of the plate-like workpiece W, the center part, Also blasting other arbitrary positions may be configured to perform the.

  In use, the distance between the main cover 20 and the opposed cover 40, the gap between the plate-like workpiece W and each cover 20, 40, and the height of the blast gun 30 are set corresponding to the thickness of the plate-like workpiece to be processed. And a predetermined gap is provided between the processing surface of the plate-like workpiece W and the opposing surface of the main cover 20 and between the back surface of the workpiece and the opposing surface of the opposing cover 40.

  By providing the gap in this way, when the gas in the main cover 20 and the counter cover 40 is sucked, the outside air is introduced into both covers through this portion, and the fine abrasive material is scattered outside the covers. In addition to being prevented, as the outside air is introduced along the surface of the plate-like workpiece W, the fine powder abrasive that tends to adhere to the surface of the plate-like workpiece W can be suspended by this external airflow.

  As an example, when the plate-like workpiece W to be processed is a plate glass of 3 mm pressure, the interval between each part is the interval between the main cover 20 and the opposite cover 40 in the illustrated example (in the illustrated example, the upper pressing plate 23 and the lower cover). 7 mm in the distance between the side pressing plates 43), 2 mm in the gap between the plate-shaped workpiece W and the main cover 20 (upper pressing plate 23), and the gap between the plate-shaped workpiece W and the opposing cover 40 (lower pressing plate 43). In the illustrated example in which the baffle plate 24 is provided in the opening 22 of the main cover 20, the gap between the baffle plate 24 and the plate-like workpiece W is 0.9 mm. And the plate-like workpiece W can be 3 mm.

As described above, in the state where the pipe connection to each part and the interval adjustment of each part are completed, the abrasive is sprayed from the blast gun 30, and the main cover 20 and the counter cover 40 are also drawn from the three suction pipes 21a, 21b, 41. When the plate-like workpiece W is inserted and passed between the main cover 20 and the opposing cover 40 while suctioning inside, the plate-like workpiece W becomes the opening length of the slit-like injection hole 31 formed in the blast gun 30. It is continuously cut in the movement direction T with a width corresponding to the length L _O.

When a blast gun having a circular injection hole that is generally used is used, the injected abrasive material collides with the plate-like workpiece, and then, on the surface of the plate-like workpiece in all directions of 360 ° as shown in FIG. As described above, a flow that moves along the slit is generated, and is injected from the blast gun 30 provided with the injection hole 31 formed in the slit shape, particularly in the shape of a relatively narrow slit having an opening width W _O of 0.1 to 3 mm. The abrasive generates a flow along the surface of the plate-like workpiece W in the direction of the opening width W _O of the injection hole 31, and the abrasive does not diffuse in the direction of the opening length L _O.

Therefore, by using the blast gun 30 provided with such a slit-like injection hole 31, the plate-like workpiece W can be cut with a width corresponding to the opening length L _O of the injection hole 31.

Further, the abrasive material flow which has moved on the surface of the plate-like workpiece W in the direction of the opening width W _O of the injection hole 31 in this way is then plate-like by the baffle plate 24 provided in the opening 22 of the main cover 20. It is deflected in an obliquely upward flow so as to be separated from the surface of the workpiece W (see FIG. 2B), and accordingly, the abrasive floats in the space in the main cover 20.

  Abrasive grains having a fine particle size of # 400 or more, or an average particle size of 30 μm or less, which are used in the present invention, have a long dwell time when floating, and are easy to ride a gas flow. Since the abrasive in such a floating state is recovered together with the gas in the main cover 20 by suction from the main cover suction pipes 21a and 21b, the plate-like workpiece W is covered. This can be easily recovered before the abrasive adheres to the work surface.

  As a result of the recovery of the abrasive material performed in this way, the space in the main cover 20 becomes negative pressure, and the plate-like workpiece W is sucked upward by this negative pressure, but is disposed opposite to the main cover 20. Due to the suction in the opposing cover 40, a downward suction force acts on the plate-like workpiece W at the same time. As a result, the plate-like workpiece easily passes through the space between the main cover and the opposing cover due to the balance between the two.

  Preferably, the downward suction force generated by the facing cover 40 is reduced by, for example, forming the spacing between the plate-like work W and the counter cover 40 narrower than the distance between the plate work W and the main cover 20. For example, when the plate-like workpiece W is a thin film solar cell or the like by pressing the plate-like workpiece W against the conveying roller 5 of the conveyor table 4. Therefore, it is possible to avoid the occurrence of a problem that each thin film layer formed on the glass substrate is damaged by the contact with the upper pressing plate 23.

  In the case of machining one side end of the plate-like workpiece W as in the illustrated embodiment, the end position of the plate-like workpiece W is regulated by the insertion restricting body 51 when the plate-like workpiece W is cut. As a result, the recovery opening 22 formed between the opening 22 of the main cover 20 and the opening 42 of the counter cover 40 is formed by a portion not covered with the plate-like workpiece W as shown in FIGS. It communicates via ', 42'.

  As a result, the fine abrasive material sprayed from the blast gun 30 and the cutting waste generated by the injection of the fine abrasive material are sucked and collected by the dust collector via the main cover suction pipes 21a and 21b for sucking the inside of the main cover 20. In addition, by the opposed cover suction pipe 41 for sucking the inside of the opposed cover 40, the fine abrasive and cutting waste in the main cover 20 are sucked and collected through the space in the opposed cover 40 and the collection openings 42 'and 22'. Is performed, and the fine abrasive and cutting waste in both covers are efficiently recovered in a floating state before adhering to the surface of the plate-like workpiece W.

  As a result, the counter cover 40 and the counter cover suction pipe 41 share the recovery of the fine abrasive and floating chips floating in the main cover 20 together with the main cover suction pipes 21a and 21b. The fine abrasive material that has come to the side is efficiently recovered, and the fine abrasive material is effectively prevented from adhering to the back surface of the plate-like workpiece W.

  When the plate-like workpiece W is removed from the distance between the two covers by the movement of the plate-like workpiece W, the two covers communicate with each other through the entire opening 22 of the main cover 20 and the opening 42 of the opposing cover 40. The fine abrasive material sprayed from the blast gun 30 is directly introduced into the opposing cover 40 and immediately recovered, and even if there is no plate-like workpiece W between the two covers, the fine powder is contained in the covers 20 and 40. There is no accumulation of abrasives.

  On the other hand, when the plate-like workpiece W completely separates the main cover 20 and the opposed cover 40 from each other up and down, for example, when processing the center portion of a relatively large plate-like workpiece W, the plate When the workpiece W is interposed, the abrasive sprayed in the main cover 20 is recovered only through the main cover suction pipes 21a and 21b communicated with the main cover 20, and suction in the counter cover 40 is performed by a plate. However, when the space in the main cover 20 and the counter cover 40 communicates due to the movement of the plate-like work W, the abrasive material injected from the blast gun 30 into the main cover 20 is , Suction and recovery through the counter cover 40 and the counter cover suction pipe 41.

  As described above, the abrasive jet recovery unit 10 of the present invention having the above-described configuration can prevent the fine abrasive from adhering to the surface of the plate-like workpiece W during the cutting process. For example, when scribing a thin film formed on a glass substrate of a thin film solar cell, the mask material can be washed with cleaning water. Even for workpieces that cannot be attached, blasting with fine abrasives is possible.

  In addition, even when processing workpieces that can be cleaned after blasting and attaching mask material, the labor required for cleaning and mask material application, the mask material used in this operation, The use of materials such as cleaning fluid can be omitted, and cutting costs can be greatly reduced.

  Further, the plate-like workpiece W exists between the covers 20 and 40 before the plate-like workpiece W is arranged between the covers 20 and 40 or after the plate-like workpiece W passes between the covers 20 and 40. If not, the fine abrasive material sprayed from the blast gun 30 is quickly removed from the spaces in both covers by suction by the opposed cover 40, and the fine abrasive material does not stay in the space in the cover.

  Due to the configuration of the present invention described above, the blasting method and blasting apparatus of the present invention can be effectively used when cutting a predetermined width on various plate-shaped workpieces. Various types of etching, such as thin films, that have been performed by conventional lasers are not required because processes such as attaching mask material to limit the cutting range and cleaning with a cleaning liquid to remove adhering fine abrasives are not required. It can be used as an alternative to the laser used for scribing solar cells.

The schematic perspective view of the abrasive | polishing material injection collection | recovery part of the state which isolate | separated the main cover and the opposing cover up and down in the abrasive | polishing material injection collection part of this invention. It is explanatory drawing explaining the relationship between the slit-shaped injection hole provided in a blast gun, and the flow of an abrasives in the abrasives injection collection part of this invention, (A) is a planar view, (B) is the observation by a perspective view. It is explanatory drawing explaining the positional relationship of each part in the abrasives injection | emission collection | recovery part of this invention, (A) is explanatory drawing explaining the example of arrangement | positioning with the slit-shaped injection hole provided in a blast gun, and a plate-shaped workpiece, ) Is an explanatory view of the arrangement of the opening of the main cover and the plate-like work in the bottom view and the positional relationship of the recovery opening formed thereby, and (C) is the arrangement of the opening of the counter cover and the plate-like work in the plan view. Explanatory drawing of the positional relationship of the collection | recovery opening formed by this. (D) is a schematic front view in the abrasive jet recovery part of the present invention. The top view which shows the whole structure of the blast processing apparatus provided with the abrasive material injection collection part of this invention. The front view which shows the whole structure of the blast processing apparatus provided with the abrasive material injection collection part of this invention. It is explanatory drawing which shows the structural example of the blast processing apparatus provided with the abrasive | polishing material injection | emission collection | recovery part of this invention, (A) is an example which can process four sides of a plate-shaped workpiece, (B) is a plate-shaped workpiece. An example in which two sides and the center can be processed. Explanatory drawing of the conventional blast processing apparatus (gravity type). Explanatory drawing of the conventional blast processing apparatus (patent document 1). It is explanatory drawing of scribing with respect to a thin film solar cell, (A) is explanatory drawing of the part which performs scribing, (B) is explanatory drawing of the layer removed by scribing. Explanatory drawing which shows the diffusion state of the abrasives by a blast gun (round injection hole).

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Blast processing apparatus 2 Pressurized tank 3 Dust collector 3a Cyclone 4 Conveyor table 4a One side (conveyor table)
4b Other side (conveyor table)
5 Conveying roller 10 Abrasive injection recovery part 20 Main cover 21a, 21b Main cover suction pipe 22 Opening 22 'Recovery opening 23 Presser plate (upper presser plate)
24 baffle plate 25 viewing window 30 blast gun 31 injection hole 40 counter cover 41 counter cover suction pipe 42 opening 42 'recovery opening 43 lower pressing plate 44 rectifying plate 51 insertion restricting body 52 connecting plate 60 blast processing device 61 cabinet 62 injection nozzle 63 Inlet 64 Abrasive supply pipe 65 Conduit 67 Discharge pipe 68 Hopper 70 Recovery tank 73 Inlet 74 Connection pipe 75 Communication pipe 77 Discharge pipe 80 Blasting machine 81 Blasting duct 82 Blasting chamber 83 Suction duct 84 Insertion port 85 Intake Port 91 Injection nozzle W Plate-like workpiece T Relative movement direction of the workpiece M Motor W _O Opening hole width L _O Injecting hole length

Claims (10)

A main cover having an opening that faces at least one side edge in the same direction as the movement direction of the plate-like workpiece and an opposing cover through a permissible gap of movement of the plate-like workpiece to be machined, respectively, are perpendicular to each other. In the opposite direction,
The main cover communicates with the space in the main cover through main cover suction pipes opened toward both sides of the blast gun injection holes in the moving direction of the plate-like workpiece ,
The plate-like workpiece disposed opposite to the main cover is formed such that the injection hole is formed in a slit shape, and the injection hole is positioned close to the plate-like workpiece and substantially perpendicular to the plate-like workpiece. together arranged such that the injection direction, the moved relative to the injection hole of the blast gun,
In the main cover, fine powder abrasive is sprayed from the blast gun injection hole disposed on the work surface of the plate-like workpiece with a predetermined gap, and the main cover is provided in the main cover via the main cover suction pipe. While sucking and collecting the thin film layer and abrasives cut and removed from the glass substrate from the space,
A thin film layer and an abrasive material cut and removed from the glass substrate from the space in the counter cover from the direction opposite to the processing surface of the plate-like work through the counter cover suction pipe communicating with the space in the counter cover. A blasting method characterized by sucking and collecting. The plate-like relative movement direction of the workpiece, blasting method according to claim 1, characterized in that a hole width direction of the injection hole with respect to the injection hole. The blasting method according to claim 1 or 2, wherein an opening width of the injection hole of the blast gun is 0.1 to 100 mm. The blasting method according to any one of claims 1 to 3, wherein an axial direction of the main cover suction pipe with respect to a work surface of the plate-like workpiece is set to an inclination angle of 10 to 80 °. In the opening of the main cover on both sides of the injection hole, a baffle plate that is inclined so as to be separated from the plate-like work as the width direction is moved away from the injection hole is provided, and an abrasive along the surface of the plate-like work claim 1-4 blasting method according to any one, wherein a flow deflects in a direction away from the surface of the plate-shaped workpiece. The plate-shaped workpiece to be machined has an opening formed so as to face each other in the vertical direction through the movement-permissible gap and face at least one side edge in the same direction as the relative movement direction of the plate-shaped workpiece. A main cover and an opposing cover;
It communicates with the main cover and sucks and collects the thin film layer and the abrasive material cut and removed from the glass substrate from the space in the main cover , toward both sides of the blast gun injection hole in the moving direction of the plate-like workpiece. Main cover suction pipes opened respectively ,
The injection hole, which is disposed in the main cover on a surface to be processed of the plate-like workpiece through a predetermined gap and is formed in a slit shape, is positioned close to the plate-like workpiece and the plate-like workpiece. A blast gun which is arranged so as to be in a substantially vertical injection direction with respect to the nozzle, and which injects fine abrasives through the injection hole,
A counter cover suction tube is provided which communicates with the space in the counter cover and sucks the thin film layer and the abrasive material cut and removed from the glass substrate from the space in the counter cover from the direction opposite to the processing surface of the plate-like workpiece. An abrasive jet recovery part structure in a blasting machine characterized by the above. 7. The abrasive jet recovery part structure in a blast processing apparatus according to claim 6 , wherein an opening width direction of the injection hole is made to coincide with a relative moving direction of the plate-like workpiece. The abrasive jet recovery part structure in the blast processing apparatus according to claim 6 or 7, wherein an opening width of the injection hole of the blast gun is 0.1 to 100 mm. The abrasive injection in the blast processing apparatus according to any one of claims 6 to 8, wherein an axial direction of the main cover suction pipe with respect to a processing surface of the plate-like workpiece is set to an inclination angle of 10 to 80 °. Collection unit structure. In the opening of the main cover on both sides of the injection hole, one of claims 6-9, characterized in that a baffle plate tilted so away from the plate-shaped workpiece according to the width direction away from said injection hole An abrasive jet recovery part structure in the blasting apparatus according to claim 1.

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