JP5237682B2 - Pressure measuring device - Google Patents

Description

  The present invention relates to a pressure measuring device. More specifically, a tube body that forms a part of the microchannel and a strain sensor attached to the outer surface of the wall portion of the tube body, and the micro flow is based on the strain of the wall portion detected by the strain sensor. The present invention relates to a device configured to measure the pressure of a fluid flowing through a channel.

  A microchemical plant is a facility that uses mixing, chemical reaction, separation, and the like in a microscale space, and has many advantages compared to a conventional plant using a large tank. For example, it is possible to mix a plurality of fluids and perform a chemical reaction with a small amount of reagent in a short time, and because the equipment is small, if the production technology of the product can be established at the laboratory level, it is easy to produce by performing numbering up. They can be equipped with equipment, can be adapted to reactions involving dangers such as explosions, and can easily adjust production to meet demand. For this reason, in the fields of chemical industry and pharmaceutical industry, it has been attracting attention as a suitable apparatus for producing materials and products by mixing or reacting fluids, and research and development has been actively conducted in recent years.

In a microchemical plant, the reaction rate and the quality of the product can be improved by appropriately controlling the pressure of the fluid flowing through the microchannel that is the reaction channel. In order to perform the above control, it is necessary to accurately measure the pressure of the fluid. Patent Document 1 describes an invention that enables accurate dynamic pressure measurement of fluid in a rocket propellant supply pipe. According to the invention, since the strain gauge is attached to the outer surface of the thin-walled pipe, the dynamic pressure in the pipe can be accurately measured without providing a port in the pipe.
Japanese Patent Laid-Open No. 10-132676

  It is also conceivable to use the technique of Patent Document 1 as a means for measuring the pressure of the fluid flowing through the microchannel. However, the flow path used in the microchemical plant generally has a small cross-sectional area of several mm 2 or less, and when the cross section of the tube body forming the micro flow path is a perfect circle, using the technique of Patent Document 1, There are the following problems. That is, in the perfect circular tube body, the pressure receiving area is very small, and even if the strain gauge is attached to the outer surface of the thin-walled pipe, the distortion sufficient for accurate pressure measurement does not occur. There is a demand for a technique that can accurately measure the pressure in a narrow channel used in a microchemical plant. The present invention has been made in view of such a problem, and an object thereof is to provide a pressure measuring device capable of accurately measuring the pressure of a fluid flowing through a microchannel.

In order to achieve the above object, a pressure measuring device according to claim 1 includes a tube body that forms a part of a microchannel, and a strain sensor attached to an outer surface of the tube body, A pressure measuring device that measures the pressure of the fluid flowing through the microchannel based on the detected distortion of the wall of the tube body,
The tube body has a substantially flat circular cross-section perpendicular to the fluid flow direction, and the strain sensor is attached to the wall portions of the tube body facing each other in the short-axis direction of the substantially flat circular shape and flattened. Treat the wall as a diaphragm surface of a pressure gauge, detect strain in the wall ,
There are two types of strain sensors: a strain sensor for detecting vertical strain and a strain sensor for detecting lateral strain.
Kind is attached,
The strain sensor for detecting the vertical strain and the strain sensor for detecting the lateral strain are attached to the outer surfaces of the wall portions facing each other, the strain sensor for detecting the vertical strain on one wall portion, and the other The vertical strain detection strain sensors in the wall portion are attached so as not to face each other, and the lateral strain detection strain sensor in one wall portion and the lateral strain detection in the other wall portion. The strain sensor is attached so as to be in a position not facing each other .

  According to the pressure measuring device of claim 1, the pressure of the fluid flowing through the micro flow path is determined based on the strain detected by the strain sensors attached to the wall portions facing each other in the substantially flat circular minor axis direction of the tube body. taking measurement. That is, this flat wall portion is handled as a diaphragm surface of the pressure gauge. Since the distortion of the flat wall portion is generated in proportion to the pressure of the fluid flowing through the microchannel, accurate pressure measurement is possible by converting this distortion amount into an appropriate physical quantity. Compared to a tube body whose cross section perpendicular to the fluid flow direction is a perfect circle, the effective pressure receiving area can be increased, and sufficient strain can be generated for measuring the pressure of the fluid flowing through the microchannel. . Further, it is not necessary to provide a retention portion such as a port in the flow path.

In addition, according to the pressure measuring device of claim 1, since two types of strain sensors for detecting longitudinal strain and strain sensors for detecting lateral strain are attached, it becomes possible to measure longitudinal strain and lateral strain simultaneously. Even more accurate pressure measurement is possible.

  According to the pressure measuring device of claim 1, the strain sensor for detecting the vertical strain in one wall portion and the strain sensor for detecting the vertical strain in the other wall portion are the flow direction of the fluid flowing through the microchannel. Two different pressures can be measured. By obtaining the pressure average of these two points, pressure measurement with higher reliability becomes possible. The same applies to the strain sensor for detecting lateral strain.

  The pressure measuring device according to a second aspect includes a fixing frame that fixes and supports both end portions of the tube body by a welding structure.

  According to the pressure measuring device of the second aspect, since both end portions of the tube body are fixedly supported by the fixed frame by the welding structure, the strain generated in the tube body does not propagate outside the tube body. Since the tube body is distorted only within the fixed frame, more accurate pressure measurement is possible.

  The pressure measuring device according to claim 3, wherein the tube body includes a flat portion in which a cross section perpendicular to the fluid flow direction is substantially flat and a cross section perpendicular to the fluid flow direction is substantially circular. A correction strain sensor attached to an outer surface of the perfect circle portion of the tube body, and distortion detected by the strain sensor based on strain information obtained by the correction strain sensor. Temperature influence correcting means for correcting the temperature influence.

  According to the pressure measuring device of claim 3, since the distortion due to the temperature change can be detected by the correction strain sensor attached to the perfect circle part of the tube body that is hardly distorted by the pressure change, it is attached to the flat part of the tube body. The temperature effect on the strain detected by the strain sensor can be corrected more accurately, and more accurate pressure measurement is possible.

  According to a fourth aspect of the present invention, there is provided a pressure measuring device including: a temperature sensor attached to a wall portion facing each other in a short axis direction of a substantially flat circular shape in the tube body; and the strain sensor based on temperature information obtained by the temperature sensor. Temperature influence correction means for correcting the temperature influence of the detected strain.

  According to the pressure measuring device of the fourth aspect, since the temperature effect in the strain sensor is corrected by the temperature signal obtained by the temperature sensor, more accurate pressure measurement is possible.

  In the pressure measuring device according to claim 5, the strain sensor and the temperature sensor or the correction strain sensor are coated with a coating agent.

  According to the pressure measuring device of the fifth aspect, the strain sensor, the temperature sensor, and the correction strain sensor attached to the outer surface of the tube body are shielded from the outside air by the coating agent. Less susceptible to humidity.

In the pressure measuring device according to a sixth aspect , the cross-sectional area of the flow path of the tube body is 1 mm 2 or more and 8 mm 2 or less.

  According to the present invention, there is provided a pressure measuring device that can accurately measure the pressure of a fluid flowing through a microchannel.

  A pressure measurement device 10 according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 3. The pressure measurement device 10 mainly includes a fixed frame 12, a tube body 13, a strain sensor 14, a correction strain sensor 15, and a signal conversion unit 16.

  The fixed frame 12 is made of a metal such as stainless steel or brass, and includes a rectangular parallelepiped main body block 121 and an inlet side connection portion 122 and an outlet side connection portion 123 provided at both ends of the main body block 121 in the longitudinal direction. I have.

  The main body block 121 is provided with a through-hole 124 penetrating from the upper surface to the lower surface in the center. As shown in FIG. 1, the through holes 124 have a substantially long hole shape in which the longitudinal direction of the main body block 121 is the long axis direction, and the through holes 125 are respectively formed in the wall portions facing each other in the long axis direction. And a through hole 126 is provided.

  The inlet side connecting portion 122 is a hollow male connector body provided integrally with one end surface of the main body block 121 in the longitudinal direction. The inlet side connecting portion 122 includes a through hole 127 at the central shaft portion, and the through hole 127 and the through hole 125 of the main body block 121 communicate with each other.

  The outlet side connection portion 123 is a hollow male connector body provided integrally with the other end surface in the longitudinal direction of the main body block 121. The outlet side connection portion 123 includes a through hole 128 in the central shaft portion, and the through hole 128 and the through hole 126 of the main body block 121 communicate with each other.

  The tube body 13 is made of a metal such as stainless steel and forms part of the microchannel. That is, it is connected to the micro flow path and becomes a part of the micro flow path R. Further, the tube body 13 has a flat portion 131 in which a cross section (transverse section) perpendicular to the flow direction of the liquid flowing in the tube is substantially flat and a cross section (transverse section) perpendicular to the flow direction of the liquid is approximately. And a perfect circle portion 132 having a perfect circle shape.

  As shown in FIG. 3, the flat part 131 of the tube body 13 has comprised the flat cylinder shape obtained when a cylinder is crushed in radial direction. The cross-sectional area of the flow path of the tube body 13 is 1 mm2 to 8 mm2. In this flat cylindrical body, the walls 131a and 131b facing each other in the minor axis J direction have a thickness sufficient to obtain a strain amount sufficient for pressure measurement by the strain sensor 14, and specifically, 90 μm or more and 110 μm or less. It is said to be thin. This thickness is a suitable value when the pressure of the liquid flowing through the tube body 13 is in the range of 0 to 1 MPa. In addition, according to the pressure range of the liquid which flows through the micro flow path R, it can change into another value suitably. In addition, the cross-sectional shape of the flat portion 131 can be variously modified such as an elliptical shape and an oval shape.

  As shown in FIG. 2, the tube body 13 is inserted into the through hole 127 and the through hole 128 of the fixed frame 12, and both ends of the tube body 13 are connected to the inlet side connection portion 122 and the outlet side of the fixed frame 12. Each of the connection portions 123 is welded and fixed by a welded portion W.

  The strain sensor 14 (14a1, 14a2, 14b1, 14b2) is attached to the outer surface of the wall 131a, 131b of the flat part 131 of the tube body 13, and the outer peripheral surface of the perfect circle part 132 of the tube body 13 is Correction distortion sensors 15 (15a1, 15a2, 15b1, 15b2) are attached.

  The strain sensor 14 is composed of a strain gauge that outputs an electrical signal corresponding to the strain of the attached detection target. From the strain sensors 14a1 and 14b1 for detecting longitudinal strain and the strain sensors 14a2 and 14b2 for detecting lateral strain. Become. The strain sensor 14a1 for detecting longitudinal strain is attached so as to detect strain in the longitudinal direction (longitudinal direction) of the wall portion 131a of the flat portion 131. The strain sensor 14a2 for detecting lateral strain is attached so as to detect strain in the lateral direction (short direction) of the wall 131a. Similarly, the strain sensor 14b1 for detecting vertical strain is mounted so as to detect the vertical strain of the wall 131b, and the strain sensor 14b2 for detecting lateral strain detects the lateral strain of the wall 131b. It is attached as follows.

  The strain sensor 14a1 for detecting vertical strain and the strain sensor 14a2 for detecting lateral strain are attached along the longitudinal direction of the flat portion 131 on the outer surface of the wall portion 131a. Similarly, the strain sensor 14b1 for detecting vertical strain and the strain sensor 14b2 for detecting lateral strain are attached along the longitudinal direction of the flat portion 131 on the outer surface of the wall portion 131b. The strain sensor 14a1 for detecting vertical strain in the wall portion 131a and the strain sensor 14b1 for detecting vertical strain in the wall portion 131b are mounted so as to be in a non-opposing position, and for detecting lateral strain in the wall portion 131a. The strain sensor 14a2 and the strain sensor 14b2 for detecting lateral strain at the wall 131b are attached so as to be in a non-opposing position.

  The correction strain sensor 15 includes a strain gauge that outputs an electrical signal corresponding to the strain of the attached detection target. The correction strain sensors 15a1 and 15b1 for detecting vertical strain and the correction for detecting lateral strain. It consists of strain sensors 15a2 and 15b2. The correction strain sensor 15a1 for detecting the vertical strain is attached so as to detect the strain in the vertical direction (the axial direction of the tube body 13) of the peripheral wall portion of the perfect circle portion 132 of the tube body 13. The correction strain sensor 15a2 for detecting lateral strain is attached so as to detect strain in the lateral direction (circumferential direction of the tube body 13) of the peripheral wall portion of the perfect circle portion 132. Similarly, the correction strain sensor 15b1 for detecting the vertical strain is mounted so as to detect the vertical strain of the peripheral wall portion, and the correction strain sensor 15b2 for detecting the horizontal strain is used to detect the lateral strain of the peripheral wall portion. Mounted to detect.

  The correction strain sensor 15 a 1 for detecting vertical strain and the correction strain sensor 15 a 2 for detecting lateral strain are attached along the axial direction of the tube body 13 on the upper surface of the peripheral wall portion of the perfect circle portion 132. Similarly, the correction strain sensor 15b1 for detecting vertical strain and the correction strain sensor 15b2 for detecting lateral strain are attached along the axial direction of the tube body 13 on the lower surface of the peripheral wall portion of the perfect circle portion 132. The correction strain sensor 15a1 for detecting the vertical strain and the correction strain sensor 15b1 for detecting the vertical strain are attached so as to face each other, and the correction strain sensor 15a2 for detecting the lateral strain and the horizontal The correction strain sensor 15b2 for distortion detection is attached so as to be in a non-opposing position.

  The strain sensor 14 and the correction strain sensor 15 are attached to the outer surface of the tube body 13 via the coating agent 17 together with the lead wires 14L and 15L connected thereto and the lead wire for ground. In this embodiment, the silicone resin is used as the coating agent 17, but it can be appropriately changed to another material according to the liquid temperature at the time of pressure measurement. The lead wires 14L and 15L are also attached via the coating agent 17 on the inner wall surface of the through hole 124 of the fixed frame 12.

  The signal conversion unit 16 includes an amplifier circuit that amplifies signals output from the strain sensor 14 (14a1, 14a2, 14b1, 14b2) and the correction strain sensor 15 (15a1, 15a2, 15b1, 15b2), each strain sensor 14, An average value calculation circuit for calculating an average value of signals obtained by the correction strain sensor 15 is provided, and each output average is output as a pressure signal. At that time, the temperature effect received by the strain sensor 14 is also calculated based on the strain signal measured by each correction strain sensor 15.

  As described above, according to the pressure measurement device 10 of the present embodiment, the flat sensor 131 of the tube body 13 is detected by the strain sensor 14 attached to the walls 131 a and 131 b facing each other in the substantially flat circular minor axis direction. Based on the strain, the pressure of the fluid flowing through the microchannel R can be measured. That is, the flat walls 131a and 131b are handled as the diaphragm surface of the pressure gauge. Since the distortion of the flat wall portions 131a and 131b is generated in proportion to the pressure of the fluid flowing through the micro flow path R, accurate pressure measurement is possible by converting the distortion amount into an appropriate physical quantity. In the wall portions 131a and 131b of the flat portion 131, an effective pressure receiving area can be increased as compared with the perfect circle portion 132 having a substantially perfect circular cross section, and the pressure of the fluid flowing through the microchannel can be measured. Sufficient distortion can be generated. Further, it is not necessary to provide a retention portion such as a port in the flow path.

  In addition, since both end portions of the tube body 13 are fixedly supported by the fixed frame 12 by the welding structure, distortion generated in the tube body 13 does not propagate from the tube body 13 to the outside. Since the tube body 13 is distorted only in the fixed frame 12, more accurate pressure measurement is possible.

  In addition, since the distortion due to the temperature change is detected by the correction strain sensor 15 attached to the perfect circle portion 132 of the tube body 13, the temperature effect on the strain detected by the strain sensor 14 attached to the flat portion 131 can be more accurately determined. Correction can be made, and more accurate pressure measurement is possible. That is, when the temperature of the fluid flowing through the micro flow path R changes, the flat portion 131 of the tube body 13 is also distorted due to a change in the temperature of the fluid in addition to the distortion due to the change in the pressure of the fluid. However, in the perfect circle part 132 of the tube body 13, distortion due to pressure change hardly occurs compared to distortion due to temperature change. Therefore, the distortion of the perfect circle portion 132 is detected by the correction strain sensor 15, and the temperature effect on the strain detected by the strain sensor 14 is corrected based on the strain information, thereby accurately adjusting the fluid pressure of the tube body 13. Can be measured.

  Further, since the strain sensor 14 and the correction strain sensor 15 attached to the outer surface of the tube body 13 are shielded from the outside air by the coating agent 17, the strain sensor 14 and the correction strain sensor 15 depend on the ambient temperature and humidity. Less affected.

  Further, since two types of strain sensors 14a1 and 14b1 for detecting longitudinal strain and strain sensors 14a2 and 14b2 for detecting lateral strain are attached, the longitudinal strain and lateral strain of the flat portion 131 of the tube body 13 are simultaneously measured. More accurate pressure measurement is possible. In the present embodiment, since two types of correction strain sensors 15a1 and 15b1 for detecting vertical strain and correction strain sensors 15a2 and 15b2 for detecting lateral strain are attached, a perfect circle portion 132 of the tube body 13 is attached. Thus, it is possible to measure the longitudinal strain and lateral strain simultaneously, and this also enables more accurate pressure measurement.

  Further, the fluid flowing through the micro flow path R by the strain sensor 14a1 for detecting the vertical strain in the one wall portion 131a of the flat portion 131 of the tube body 13 and the strain sensor 14b1 for detecting the vertical strain in the other wall portion 131b. Two different pressures can be measured for the flow direction. By obtaining the pressure average of these two points, pressure measurement with higher reliability becomes possible. The same applies to the strain sensors 14a2 and 14b2 for detecting lateral strain.

  Further, in the present embodiment, two different points in the flow direction of the perfect circle portion 132 are detected by the correction strain sensor 15a1 for detecting longitudinal strain and the correction strain sensor 15b1 attached to the true circle portion 132 of the tube body 13. Since strain can be measured, pressure measurement with higher reliability can be performed by obtaining the average of these two points. The same applies to the correction strain sensors 15a2 and 15b2 for detecting lateral strain.

  Next, the pressure measuring device 1 according to the second embodiment of the present invention will be described with reference to FIGS. 4 is a perspective view showing the appearance of the pressure measuring device 1 according to the present invention, FIG. 5 is a partial plan view of the pressure measuring device 1 according to the present invention, and FIG. 6 is a front view of the pressure measuring device 1 according to the present invention. FIG. 7 is a cross-sectional view of the tube body 3.

  As shown in FIGS. 4 to 6, the pressure measurement device 1 according to the present invention includes a fixed frame 2, a tube body 3, a strain sensor 4, a temperature sensor 5, a signal conversion unit 6, and the like.

  The fixed frame 2 is made of a metal such as stainless steel or brass, and includes a main body block 21, an inlet side connection portion 22, and an outlet side connection portion 23.

  The main body block 21 is a hollow box-like body having a through hole 24 penetrating from the upper surface to the lower surface in the center. As illustrated in FIG. 6, the through hole 24 includes an upper hole portion 241, a lower hole portion 242, and a middle hole portion 243. The upper hole portion 241 is formed by an inverted truncated cone inclined surface 24D inclined downward toward the center. The pilot hole portion 242 is formed by a truncated cone inclined surface 24U that is inclined upward toward the center. The middle hole portion 243 is formed by the cylindrical surface 24T. Both portions of the cylindrical surface 24T facing each other are provided with a through hole 251 having a radius of 0.6 mm serving as an inlet side channel and a through hole 252 having a radius of 0.6 mm serving as an outlet side channel.

  The inlet side connection portion 22 is a hollow male connector body provided integrally with one end surface of the main body block 21. A male screw 22N is formed on the outer peripheral surface, and a through hole 22H having a radius of 0.6 mm, which becomes an inlet port hole, is formed in the central shaft portion. The through hole 251 in the main body block 21 and the through hole 22H in the inlet side connection portion 22 communicate with each other.

  The outlet side connection portion 23 is a hollow male connector body provided integrally with the other end surface of the main body block 21. A male screw 23N is formed on the outer peripheral surface, and a through hole 23H having a radius of 0.6 mm which is an outlet port hole is formed in the central shaft portion. The through hole 252 in the main body block 21 and the through hole 23H in the inlet side connecting portion 22 communicate with each other.

  The tube body 3 is made of a metal such as stainless steel and has a flat cylindrical shape obtained when the cylinder is crushed in the radial direction as shown in FIG. That is, the cross section perpendicular to the liquid flow direction is substantially flat. The flow path of the hollow part of the tube body 3 is a part of the micro flow path R, and its cross-sectional area is 1 mm2 to 8 mm2. In this flat cylindrical body, the wall portions 31a and 31b facing each other in the minor axis J direction have a thickness sufficient to obtain a strain amount sufficient for pressure measurement by the strain sensor 4, and specifically, 90 μm or more and 110 μm or less. It is said to be thin. This thickness is a suitable value when the pressure of the liquid flowing through the tube body 3 is in the range of 0 to 1 MPa. In addition, according to the pressure range of the liquid which flows through the micro flow path R, it can change into another value suitably. The tube body 3 is attached between the opposing wall surfaces of the cylindrical surface 24T of the main body block 21 so as to communicate with each of the through hole 251 and the through hole 252. Specifically, the attachment is performed by welding.

  Distortion sensors 4 (4a1, 4a2, 4b1, 4b2) and temperature sensors 5 (5a, 5b) are attached to the outer surfaces of the walls 31a, 31b, respectively.

  The strain sensor 4 includes a strain gauge that outputs an electrical signal corresponding to the strain to be detected, and includes strain sensors 4a1 and 4b1 for detecting longitudinal strain and strain sensors 4a2 and 4b2 for detecting lateral strain. The strain sensor 4a1 for detecting longitudinal strain is attached so as to detect longitudinal (longitudinal) strain of the wall portion 31a. The strain sensor 4a2 for detecting lateral strain is attached so as to detect lateral (short direction) strain of the wall portion 31a. Similarly, the strain sensor 4b1 for detecting the vertical strain is attached so as to detect the vertical strain of the wall portion 31b. The strain sensor 4b2 for detecting lateral strain is attached so as to detect lateral strain of the wall portion 31b.

  The strain sensor 4a1 for detecting vertical strain and the strain sensor 4a2 for detecting lateral strain are attached along the longitudinal direction of the flat cylindrical body on the outer peripheral surface of the wall portion 31a. Similarly, the strain sensor 4b1 for detecting vertical strain and the strain sensor 4b2 for detecting lateral strain are attached along the longitudinal direction of the flat cylindrical body on the outer peripheral surface of the wall portion 31b. The strain sensor 4a1 for detecting vertical strain in the wall portion 31a and the strain sensor 4b1 for detecting vertical strain in the wall portion 31b are attached so as not to face each other, and the strain for detecting lateral strain in the wall portion 31a. The sensor 4a2 and the strain sensor 4b2 for detecting lateral strain at the wall 31b are attached so as to be in a non-opposing position.

  The temperature sensor 5 includes a thermocouple in which two dissimilar metals are joined. The temperature sensor 5 is attached to the outer surface of the walls 31a and 31b. For the temperature sensor 5a on the wall 31a, the mounting position is between the strain sensor 4a1 for detecting vertical strain and the strain sensor 4a2 for detecting lateral strain. The temperature sensor 5b in the wall portion 31b is between the strain sensor 4b1 for detecting vertical strain and the strain sensor 4b2 for detecting lateral strain.

  The strain sensor 4 and the temperature sensor 5 are attached to the outer peripheral surfaces of the wall portions 31a and 31b through the coating agent 7 together with the lead wires 4L and 5L and the ground lead wire GL connected thereto. Although the silicone resin is used for the coating agent 7 in this embodiment, it can be appropriately changed to another material according to the liquid temperature at the time of pressure measurement. Further, the lead wires 4L and 5L are attached to the inverted truncated cone inclined surface 24D in the main body block 21 via the coating agent 7.

  The signal conversion unit 6 amplifies the signals output from the strain sensors 4a and 4b and the temperature sensors 5a and 5b, the average value of the signals obtained by the strain sensors 4a1 and 4a2, and the signal obtained by the strain sensors 4b1 and 4b2. And an average value calculating circuit for calculating the average value of each output, and each output average is output as the pressure signal S1. At that time, based on the temperature signal measured by the temperature sensor 5, the temperature effect received by the strain sensor 4 is also processed.

  Next, a usage example of the pressure measuring device 1 will be described with reference to FIG. FIG. 8 is a schematic view of a reaction system 20 using the pressure measuring device 1 according to the present invention. As shown in FIG. 8, the reaction system 20 includes a first liquid supply unit 71, a second liquid supply unit 72, a first liquid pressure adjustment unit 73, a second liquid pressure adjustment unit 74, a pressure measurement device 1, a microreactor 81, It consists of a controller 9 and piping 75, 83, 84 and the like.

  The 1st liquid supply part 71 is comprised so that the 1st liquid which is a to-be-reacted liquid can be pumped by a predetermined pressure. The 2nd liquid supply part 72 is comprised so that the 2nd liquid which is a to-be-reacted liquid can be pumped by predetermined pressure. In this embodiment, when the first liquid supply unit 71 and the second liquid supply unit 72 pump the first liquid and the second liquid, the liquid pressure in the pressure measuring device 1 or the microreactor 81 is in the range of 0 to 1 MPa. Thus, the predetermined pressure is determined. The first hydraulic pressure adjusting unit 73 is configured to pressurize or depressurize the first liquid supplied from the first liquid supply unit 71 based on a control signal S <b> 2 from the controller 9. The second hydraulic pressure adjustment unit 74 is configured to pressurize or depressurize the second liquid supplied from the second liquid supply unit 72 based on a control signal S2 from the controller 9. The microreactor 81 includes a microchannel 82 formed so that the reaction between the first liquid and the second liquid proceeds.

  The controller 9 is configured to send a control signal S2 to the first hydraulic pressure adjusting unit 73 and the second hydraulic pressure adjusting unit 74 based on the pressure signal S1 output from the pressure measuring device 1. The contents of control by the control signal S2 will be described later.

  The operation of the reaction system 20 and the effect of the pressure measuring device 1 will be described. The first liquid supply unit 71 and the second liquid supply unit 72 simultaneously supply the first liquid and the second liquid to the pressure measuring device 1 through the pipe 75, respectively.

  The pressure of the mixed liquid of the first liquid and the second liquid flowing through the micro flow path R of the pressure measuring device 1 is measured by the strain sensor 4. Further, the temperature of the mixed solution is measured by the temperature sensor 5. The signal conversion unit 6 converts the signal acquired from each strain sensor 4 into appropriate pressure data, and performs a correction calculation process on the temperature effect received by the strain sensor 4 based on the temperature signal measured by the temperature sensor 5.

  The controller 9 generates a control signal S2 based on the pressure signal S1 subjected to the temperature correction process. The control signal S2 performs the following control. That is, when the measured pressure is higher than the target pressure, the controller 9 reduces the pressure of the first liquid and the second liquid supplied from the first liquid supply unit 73 and the second liquid supply unit 74. The first hydraulic pressure adjusting unit 73 and the second hydraulic pressure adjusting unit 74 are controlled. On the other hand, when the measured pressure is lower than the target pressure, the controller 9 increases the pressures of the first liquid and the second liquid supplied from the first liquid supply unit 73 and the second liquid supply unit 74. In addition, the first hydraulic pressure adjusting unit 73 and the second hydraulic pressure adjusting unit 74 are controlled. Thereby, the pressure of the reaction liquid is appropriately controlled.

  The first liquid and the second liquid that have come out of the pressure measuring device 1 enter the microreactor 81 through the pipe 83. Thereafter, the first liquid and the second liquid cause the reaction to proceed in the microchannel 82. Then, from the outlet port of the microreactor 81, the reacted liquid whose reaction has been completed is led out to the next step through the pipe 84.

  As described above, according to the pressure measuring device 1, the micro flow path R is formed based on the strain of the wall portions 31a and 31b detected by the strain sensor 4 attached to the outer surface of the wall portions 31a and 31b in the tube body 3. Measure the pressure of the flowing liquid. That is, the wall portions 31a and 31b in the tube body 3 are handled as the diaphragm surface of the pressure gauge. Since the distortion of the wall portions 31a and 31b in the tube body 3 is generated in proportion to the pressure of the liquid flowing in the micro flow path R, accurate pressure measurement is possible by converting this distortion amount into an appropriate physical quantity. . In the present invention, the tube body 3 has a substantially flat circular cross section perpendicular to the liquid flow direction, and the wall portions 31a and 31b facing each other in the short flat axis J direction of the substantially flat circular shape are thin. The Therefore, an effective pressure receiving area can be increased as compared with a tube body having a perfect circular cross section, and sufficient strain can be generated for measuring the pressure of the liquid flowing through the micro flow path R. Further, it is not necessary to provide a retention portion such as a port in the flow path.

  Further, since both end portions of the tube body 3 are fixedly supported by the fixed frame 2 by the welding structure, the distortion generated in the tube body 3 does not propagate from the tube body 3 to the outside. Since the tube body 3 is distorted only in the fixed frame 2, more accurate pressure measurement is possible.

  In addition, since the temperature effect in the strain sensor 4 is corrected by the temperature signal obtained by the temperature sensor 5, more accurate pressure measurement is possible.

  Further, since the strain sensor 4 attached to the outer surfaces of the wall portions 31a and 31b in the tube body 3 is shielded from the outside air by the coating agent 7, the strain sensor 4 is hardly affected by the surrounding temperature and humidity. .

  In addition, since two types of strain sensors 4a1 and 4b1 for detecting longitudinal strain and strain sensors 4a2 and 4b2 for detecting lateral strain are attached, it becomes possible to measure longitudinal strain and lateral strain at the same time, and more accurate pressure measurement. Is possible.

  Further, the strain sensor 4a1 for detecting the vertical strain in one wall portion 31a and the strain sensor 4b1 for detecting the vertical strain in the other wall portion 31b are different in the flow direction of the liquid flowing through the micro flow path R. Can be measured. By obtaining the pressure average of these two points, pressure measurement with higher reliability becomes possible. The same applies to the strain sensors 4a2 and 4b2 for detecting lateral strain.

  As mentioned above, although embodiment of this invention was described, embodiment disclosed above is an illustration to the last, Comprising: The scope of the present invention is not limited to this embodiment. The scope of the present invention is defined by the terms of the claims, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims. For example, in the above-described embodiment, the fluid for pressure measurement is a liquid, but it may be a gas.

It is a partial cross section top view of the pressure measuring device of 1st embodiment which concerns on this invention. It is a partial cross section front view of the pressure measuring device of 1st embodiment which concerns on this invention. It is a cross-sectional view of the tube body of the pressure measuring device according to the first embodiment of the present invention. It is a perspective view which shows the external appearance of the pressure measuring device of 2nd embodiment which concerns on this invention. It is a plane partial cross section figure of the pressure measuring device of 2nd embodiment which concerns on this invention. It is a front fragmentary sectional view of the pressure measuring device of 2nd embodiment which concerns on this invention. It is a cross-sectional view of the tube body of the pressure measuring device of the second embodiment according to the present invention. It is the schematic of the reaction system using the pressure measuring device of 2nd embodiment which concerns on this invention.

1, 10 Pressure measuring device 2, 12 Fixed frame 3, 13 Tube body 131 Flat part 132 Round part 4, 14 Strain sensor 4a1, 14a1 Strain sensor 4a2, 14a2 for detecting longitudinal strain Strain sensor 4b1, for detecting lateral strain 14b1 Longitudinal strain detection strain sensors 4b2, 14b2 Lateral strain detection strain sensor 15 Correction strain sensor 15a1 Vertical strain detection correction strain sensor 15a2 Lateral strain detection correction strain sensor 15b1 Longitudinal strain detection correction Strain sensor 15b2 Correction strain sensor 5 for detecting lateral strain Temperature sensor 6, 16 Signal converter (temperature effect correction means)
7, 17 Coating agent 31a, 131a Wall part 31b, 131b Wall part R Micro flow path J Short axis

Claims (6)

A tube body that forms a part of the microchannel, and a strain sensor attached to an outer surface of the tube body, and the microchannel based on the strain of the wall of the tube body detected by the strain sensor A pressure measuring device for measuring the pressure of a fluid flowing through
The tube body has a substantially flat circular cross-section perpendicular to the fluid flow direction, and the strain sensor is attached to the wall portions of the tube body facing each other in the short-axis direction of the substantially flat circular shape and flattened. Treat the wall as a diaphragm surface of a pressure gauge, detect strain in the wall ,
Two types of strain sensors, a strain sensor for detecting vertical strain and a strain sensor for detecting lateral strain, are attached,
The strain sensor for detecting the vertical strain and the strain sensor for detecting the lateral strain are attached to the outer surfaces of the wall portions facing each other, the strain sensor for detecting the vertical strain on one wall portion, and the other The vertical strain detection strain sensors in the wall portion are attached so as not to face each other, and the lateral strain detection strain sensor in one wall portion and the lateral strain detection in the other wall portion. A pressure measuring device, wherein the pressure measuring device is attached so as to be in a non-opposing position with respect to the strain sensor .   2. The pressure according to claim 1, further comprising a fixing frame that fixes and supports both ends of the tube body by a welding structure, and distortion generated in the tube body does not propagate to the outside from the tube body. Measuring device. The tube body includes a flat portion in which a cross section perpendicular to the fluid flow direction is a substantially flat circular shape, and a perfect circle portion in which a cross section perpendicular to the fluid flow direction is a substantially circular shape,
The correction strain sensor attached to the opposing wall portion of the outer surface of the perfect circle portion of the tube body, and the temperature effect of the strain detected by the strain sensor is corrected based on the strain information obtained by the correction strain sensor. The pressure measurement device according to claim 1, further comprising a temperature influence correction unit that performs the operation.   A temperature sensor attached to walls facing each other in the short axis direction of the substantially flat circular shape in the tube body, and the temperature effect of the strain detected by the strain sensor is corrected based on temperature information obtained by the temperature sensor. The pressure measurement device according to claim 1, further comprising a temperature influence correction unit.   The strain sensor and the correction strain sensor or the temperature sensor are coated with a coating agent for shielding the outside air from being affected by ambient temperature and humidity. Pressure measuring device. The pressure measuring device according to any one of claims 1 to 5 , wherein a cross-sectional area of a flow path of the tube body is 1 mm ² or more and 8 mm ² or less.

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