JP5235607B2 - Surface coating tool - Google Patents

Description

  The present invention relates to a surface-coated tool formed by forming a coating layer on the surface of a substrate.

  Currently, surface coating tools are used to improve slidability, wear resistance, and fracture resistance by forming various coating layers on the surface of hard materials such as WC-based cemented carbide and TiCN-based cermet. In particular, a coating layer formed by physical vapor deposition has high hardness and high wear resistance, and is widely used in various applications.

  Recently, in such a physical vapor deposition method, a plurality of types of targets having different compositions are mounted in a chamber to evaporate metal elements having different compositions from each target, and a coating layer is formed while rotating a sample stage on which the sample is placed. A coating layer with a multilayer structure in which the metal composition changes with an extremely thin layer thickness by forming a film has been proposed. By adjusting the composition of the target, the hardness and lubricity of the coating layer, heat dissipation, etc. Attempts have been made to improve the properties, heat resistance and the like (see, for example, Patent Documents 1 to 4).

In particular, Patent Document 3 discloses that in the coating film having a multilayer structure of A + B + A +..., The thickness of each layer with A + B as a set is randomly changed. Further, Patent Document 4 discloses a cutting tool having a multilayered structure of MX / LX / MX / LX laminated layers and having a non-periodic coating throughout the thickness of each layer without a repeating cycle. Has been.
JP 2004-74378 A JP-A-2005-199420 JP 2007-196365 A JP 2008-512261 A

  However, the repeated multilayer coating layer obtained by changing the extremely thin coating layer by the method as described in Patent Documents 1 to 4 does not necessarily have sufficient wear resistance and fracture resistance as the entire coating layer, and is particularly resistant to fracture. There was a need to improve sex.

  The present invention is for solving the above-described problems, and an object thereof is to provide a surface-coated tool provided with a coating layer that improves wear resistance and fracture resistance.

The surface-coated tool of the present invention is a cutting tool comprising a substrate and a coating layer that covers the surface of the substrate, wherein the coating layer is Ti _1-a M _a (C _1-x N _x ) (however, , M is at least one selected from the group consisting of Nb, Mo, Ta, Hf, Al, Si and Y, 0.35 ≦ a ≦ 0.55, 0 ≦ x ≦ 1), Ti _1-b M _b (C _1-y N _y ) (where M is at least one selected from the group consisting of Nb, Mo, Ta, Hf, Al, Si and Y, 0.40 ≦ b ≦ 0.60, However, the lower layer in which the second thin layers of b> a, 0 ≦ y ≦ 1) are alternately laminated at a constant period,
Ti _1-c M _c (C _1-x N _x ) (where M is at least one selected from the group consisting of Nb, Mo, Ta, Hf, Al, Si and Y, 0.40 ≦ c ≦ 0.60) , 0 ≦ x ≦ 1) and Ti _1-d M _d (C _1-y N _y ) (where M is a group of Nb, Mo, Ta, Hf, Al, Si, and Y) An upper layer in which at least one selected from the fourth thin layers of 0.45 ≦ d ≦ 0.65, d> c, 0 ≦ y ≦ 1) is alternately laminated at a constant period (where a ≠ c and b ≠ d are satisfied.) and the ratio of the average layer thickness t ₁ of the first thin layer to the average layer thickness t ₂ of the second thin layer is 1.2 ≦ _{t 2} / t ₁ ≦ 2.5 with a ratio between the average layer thickness _{t 4} of the fourth thin layer with an average layer thickness _{t 3} of the third thin layer 2.5 ≦ _{t 4} t ₃ ≦ 18 (provided _{that, (t 2 / t 1)} <(t 4 / t 3)) configured in the.

Here, in the configuration, the period T _A of the lamination of the first thin layer and the second thin layer of the lower layer, and the period T _B of the lamination of the third thin layer and the fourth thin layer of the upper layer is 0. It is desirable that 8 ≦ T _B / T _A ≦ 1.2, the average layer thickness t ₁ of the first thin layer is ₁₀ to 20 nm, and the average layer thickness t ₂ of the second thin layer is 12 to 45 nm. together, the third thin layer average thickness _{t 3} of 2 to 15 nm, the fourth average layer thickness of the thin layer _{t 4} that is preferably a 10 to 40 nm.

According to the surface-coated tool of the present invention, the lower layer in which the first thin layer and the second thin layer are alternately laminated at a constant period, and the third thin layer and the fourth thin layer are alternately alternately arranged at a constant period. And a ratio of the average layer thickness t ₁ of the first thin layer to the average layer thickness t ₂ of the second thin layer is 1.2 ≦ t ₂ / t ₁ ≦ 2.5. with it, the third thin layer of an average layer thickness _{t 3} and the ratio between the average layer thickness _{t 4} of the fourth thin layers _{2.5 ≦ t 4 / t 3 ≦} 18 ( provided that, _(t 2 / t ₁ ) <(t ₄ / t ₃ )), the peeling of the coating layer can be prevented, the chipping resistance is high, the oxidation resistance on the surface of the coating layer is high, and the wear resistance is high. .

Here, in the configuration, the period T _A of the lamination of the first-thin layer and a second thin layer of the lower layer, and the period T _B of the lamination of the third thin layer and the fourth thin layer of the upper layer is 0. The constitution of 8 ≦ T _B / T _A ≦ 1.2 is desirable in terms of providing a coating layer with a good balance between wear resistance and fracture resistance.

Also, in the configuration, the average layer thickness _{t 1} of the first thin layer: 10 to 20 nm, with an average layer thickness _{t 2} of the second thin layer is 12～45Nm, average layer thickness of the third thin layer t ₃ is 2 to 15 nm, the fourth average layer thickness _{t 4} of the thin layer to be 10 to 40 nm, preferably in that it can improve wear resistance by increasing the hardness of the coating layer.

  As for an example of the surface-coated tool of the present invention, (a) a schematic perspective view of a surface-coated cutting tool which is a preferred embodiment, (b) a schematic sectional view of FIG. This will be described with reference to FIG. 2 which is an electron micrograph.

  According to FIG. 1, a surface-coated tool (hereinafter simply referred to as a tool) 1 of the present invention has a rake face 3 as a main surface, a flank face 4 as a side face, and a cross ridge line between the rake face 3 and the flank face 4. And a coating layer 6 is formed on the surface of the substrate 2.

As shown in FIGS. 1B and 2, the coating layer 6 is made of Ti _1−a M _a (C _1−x N _x ) (where M is Nb, Mo, Ta, Hf, Al, Si, and Y). A first thin layer 7 comprising at least one selected from the group of: 0.35 ≦ a ≦ 0.55, 0 ≦ x ≦ 1),
Ti _1-b M _b (C _1-y N _y ) (where M is at least one selected from the group consisting of Nb, Mo, Ta, Hf, Al, Si and Y, 0.40 ≦ b ≦ 0.60) However, the lower layer 9 in which the second thin layers 8 made of b> a, 0 ≦ y ≦ 1) are alternately laminated at a constant period;
Ti _1-c M _c (C _1-x N _x ) (where M is at least one selected from the group consisting of Nb, Mo, Ta, Hf, Al, Si and Y, 0.40 ≦ c ≦ 0.60) , 0 ≦ x ≦ 1), a third thin layer 11;
Ti _1-d M _d (C _1-y N _y ) (where M is at least one selected from the group consisting of Nb, Mo, Ta, Hf, Al, Si and Y, 0.45 ≦ d ≦ 0.65) However, the upper layer 13 (where at least one of a ≠ c and b ≠ d is satisfied) in which the fourth thin layers 12 having d> c and 0 ≦ y ≦ 1) are alternately laminated at a constant period . ,
Consists of. The first thin layer 7 (dark color portion), the second thin layer 8 (light color portion), the third thin layer 11 (dark color portion), and the fourth thin layer 12 (light color portion) have individual average layer thicknesses. Is 1 to 200 nm.

Then, the ratio between the average layer thickness _{t 2} of the average layer thickness _{t 1} of the further first thin layer 7 more second thin layer 8 is 1.2 ≦ _t 2 / _{t 1} ≦ 2.5, third thin layer 11 further average layer thickness _{t 3} and the ratio of the fourth lamina 12 further average layer thickness _{t 4} is _{2.5 ≦ t 4 / t 3 ≦} 18 ( provided _{that, (t 2 / t 1)} <( By adopting the structure of t ₄ / t ₃ )), the coating layer 6 is not peeled off and the chipping resistance is high, and the surface of the coating layer 6 has high oxidation resistance and high wear resistance.

That is, when t ₂ / t ₁ is smaller than 1.2, the adhesion of the lower layer 9 is lowered and the coating layer 6 is easily peeled off. On the other hand, if t ₂ / t ₁ is greater than 2.5, the strain remaining in the coating layer 6 may increase and chipping may occur. On the other hand, if t ₄ / t ₃ is smaller than (t ₂ / t ₁ ) or smaller than 2.5, the chipping resistance of the upper layer 13 is lowered and the covering layer 6 is likely to be chipped. On the other hand, if t ₄ / t ₃ is larger than 18, the oxidation resistance of the coating layer 6 is lowered and the wear tends to proceed.

  In addition, the whole average layer thickness of the coating layer 6 is comprised by 0.8-10 micrometers. With this layer thickness, the wear resistance of the tool 1 is high, the internal stress of the coating layer 6 is not excessively increased, and the fracture resistance of the coating layer 6 is not lowered. A desirable overall average layer thickness of the covering layer 6 is 1 to 6 μm. Further, if the average thickness of each of the first thin layer 7 and the second thin layer 8 is 1 nm or more, the effect of the laminated structure is remarkably exhibited, and if it is 200 nm or less, a hardness improvement effect can be expected.

Here, the first thin layer 7 of the lower layer 9 and the period T _A of the lamination of the second thin layer 8, and the period T _B of the stack of the third thin layer 11 of the upper layer 13 and the fourth thin layer zero. 8 ≦ T _B / T _A ≦ 1.2 is desirable in terms of a good balance between wear resistance and fracture resistance of the coating layer 6.

Further, the average layer thickness t ₁ of the first thin layer 7 is ₁₀ to 20 nm, the average layer thickness t ₂ of the second thin layer 8 is 12 to 45 nm, and the average layer thickness t ₃ of the third thin layer 11 is 2 ～15Nm, average layer thickness _{t 4} of a fourth lamina 12 that is 10 to 40 nm, preferably in that it can improve the abrasion resistance of the coating layer 6 to increase the hardness of the coating layer 6.

The desirable layer thickness of each layer is as follows: the average layer thickness t ₁ of the first thin layer 7 is 13 to 16 nm, the average layer thickness t ₂ of the second thin layer 8 is 15 to 30 nm, and 1.6 ≦ t ₂ / t ₁ ≦ 2.2, the average layer thickness t ₃ of the third thin layer 11 is 5 to 12 nm, the average layer thickness t ₄ of the fourth thin layer 12 is 20 to 35 nm, and 4 ≦ t ₄ / t ₃ ≦ 14.

  The covering layer 6 is formed with columnar crystals (not shown) extending in the perpendicular direction in the direction perpendicular to the laminated surface of the first thin layer 7 and the second thin layer 8. It is desirable that the laminated surface of the first thin layer 7 and the second thin layer 8 is continuous without interruption at the interface between two adjacent columnar crystals. Thereby, the effect of suppressing the progress of cracks is high, and the chipping resistance of the coating layer 6 can be enhanced.

  Here, in the present invention, a crystal specified by a crystal whose crystal length in the direction perpendicular to the substrate surface is 1.5 times longer than the crystal width in the direction parallel to the surface of the substrate 2 is defined as a columnar crystal. To do. And the toughness of the tool 1 can further be improved by the coating layer 6 being comprised with a columnar crystal.

  Further, when the average crystal width of the columnar crystals (the particle diameter in the direction of the laminated surface of the first thin layer 7 and the second thin layer 8) is 0.05 μm or more, the oxidation resistance of the coating layer 6 does not deteriorate. On the other hand, when the average crystal width of the columnar crystals is 0.3 μm or less, the coating layer 6 has high hardness and fracture resistance. A desirable range of the average crystal width of the coating layer 6 is 0.1 to 0.2 μm. In the present invention, the average crystal width of the coating layer 6 is measured by drawing a line A (not shown) at a portion corresponding to the intermediate thickness of the coating layer 6 in the cross-sectional photograph of the coating layer 6. To do. Specifically, the average crystal width of the columnar crystals in the covering layer 6 specifies a length L (not shown) of the line A of 100 nm or more, and the number of grain boundaries crossing the line A having this length L is determined. Count and calculate by length L / number of grain boundaries.

  Furthermore, in the composition of the coating layer 6, it is desirable that the metal element M includes Ti and Al having particularly high hardness, and additionally includes at least one of Nb, Mo, Ta, W, Cr and Si. Is desirable.

Further, as the substrate 2, a cemented carbide or a cermet hard alloy comprising a hard phase mainly composed of tungsten carbide or titanium carbonitride and a binder phase mainly composed of an iron group metal such as cobalt or nickel, silicon nitride, or the like. Hard materials such as ultra-high pressure sintered bodies that fire ceramics and aluminum oxide as a main component, hard phases composed of polycrystalline diamond and cubic boron nitride and binder phases such as ceramics and iron group metals under ultra-high pressure Preferably used.
(Production method)
Next, the manufacturing method of the surface coating tool of this invention is demonstrated.

  First, the tool-shaped substrate 2 is manufactured using a conventionally known method. Next, the coating layer 6 is formed on the surface of the substrate 2. A physical vapor deposition (PVD) method such as an ion plating method can be suitably applied as a method for forming the coating layer 6. FIG. 3 is a schematic view of an arc ion plating film forming apparatus (hereinafter abbreviated as AIP apparatus) 20 and an exemplary diagram showing a rotation state of a sample during film formation, for an example of a detailed film forming method. This will be described with reference to FIG.

The AIP apparatus 20 of FIG. 3 introduces a gas such as N ₂ or Ar into the vacuum chamber 21 from the gas inlet 22, arranges the cathode electrode 23 and the anode electrode 24, and applies a high voltage therebetween. Then, a plasma is generated, and a desired metal or ceramic is evaporated from the target 25 and ionized by the plasma to be ionized to a high energy state, and the ionized metal is adhered to the surface of the sample (base 2) to thereby surface the base 2 The covering layer 6 is covered. Further, according to FIG. 3, the substrate 2 is set on the tower 27 and placed on the sample support base 26 by a plurality, and a plurality of sample support bases 26 (two sets in FIG. 3 and six sets in FIG. 4). It is configured to be placed on the arranged table 28. Further, according to FIG. 3, a heater 29 for heating the substrate 2, a gas discharge port 30 for discharging gas out of the system, and a bias power supply 31 for applying a bias voltage to the substrate 2 are arranged. ing.

  The target 25 is, for example, metal titanium (Ti), metal aluminum (Al), metal M (where M is a group selected from Group 4, 5, 6 elements of the periodic table excluding Ti, rare earth elements, and Si). It is possible to use a metal target containing each of the seeds independently, an alloy target obtained by compounding these, a mixture target composed of these carbides, nitrides, boride compound powders or sintered bodies.

Then, using the target 25, the metal source is evaporated and ionized by arc discharge or glow discharge, and at the same time, nitrogen (N ₂ ) gas as a nitrogen source or methane (CH ₄ ) / acetylene (C ₂ H ₂ ) as a carbon source. By reacting with the gas, the coating layer 6 is deposited on the surface of the substrate 2.

  Further, when forming the film, the substrate 2 is set so that the number of rotations is 2 to 6 rpm when the number of rotations of the sample is defined as the cycle in which each position of the substrate 2 in FIG. It is desirable to adjust the rotation speed of the sample support 26.

  Here, in the present invention, when the substrate 2 is arranged in a direction facing and close to the target 25, the metal component from the target 25 comes in a linear form, and the gas introduced into the chamber. Since the gas pressure is low due to the concentration distribution of the metal, the metal is deposited in a form in which more metal is deposited than the nonmetal. On the other hand, when the substrate 2 is away from the target 25 and does not face the position with respect to the position, the deposited metal component wraps around and deposits, so the deposition amount of the metal component decreases. In addition, since the nonmetallic component gas is introduced from the center of the sample stage, the concentration of the gas increases as the base 2 moves away from the target 25, and the nonmetal is deposited in a form in which more metal is deposited than the metal.

  Further, as shown in FIG. 4, the sample support table 26 on which the substrate 2 is placed is rotated so that each sample support table 26 rotates while the tower 27 rotates, and a plurality of sample support tables 26 revolve. The film is formed while the table 28 rotates. According to the present invention, the rotation timing is a discontinuous movement, and the time during which the base 2 is disposed in the direction facing the target 25 and facing the target 25 and the time during which the base 2 is disposed away from the target 25 are set. By adjusting, it is possible to control the layer thicknesses of the first thin layer 7 and the second thin layer 8, and the third thin layer 11 and the fourth thin layer 12.

  Then, the stacking cycle of the upper layer 13 in which the third thin layer 11 and the fourth thin layer 12 are alternately stacked at a constant cycle, and the first thin layer 7 and the second thin layer 8 are alternately switched at a constant cycle. In order to make the structure longer than the stacking cycle of the stacked lower layers 9, the surface shape of the target 25 is changed. That is, as the target 25 used when forming the lower layer 9, a target 25 (a) whose surface is concave as shown in FIG. The target 25 (b) used when forming the upper layer 13 is a target whose surface of the target 25 is flat or convex as shown in FIG. 5 (b). Note that the target 25 (a) may have a flat surface and the target 25 (b) may have a convex surface. This makes it possible to control the layer thickness of each layer while changing the deposition rate of each layer while maintaining the same deposition condition parameters.

Furthermore, you are possible to table 28 in forming the upper layer 13 when forming the lower layer 9, the tower 27, to adjust the rotational speed of the sample holder 26, to control the T B _/ T _A.

In order to generate plasma, arc discharge or glow discharge is used, and nitrogen (N ₂ ) gas as a nitrogen source or methane (CH ₄ ) / acetylene (C ₂ H ₂ ) gas as a carbon source is used as an introduction gas. be able to. Further, the bias voltage at the time of film formation is set to 50 to 200 V at the initial stage of film formation in order to produce a highly hard coating layer 6 in consideration of the crystal structure of the coating layer and to improve the adhesion to the substrate 2. It is desirable.

Mainly composed of tungsten carbide (WC) powder having an average particle diameter of 0.8 μm, 10% by mass of metallic cobalt (Co) powder having an average particle diameter of 1.2 μm, and vanadium carbide (VC) powder having an average particle diameter of 1.0 μm. Add 0.1 wt% chromium carbide (Cr ₃ C ₂ ) powder with an average particle diameter of 1.0 μm at a ratio of 0.3 wt%, mix by press molding and end mill (model number: 6HFSM060-170- manufactured by Kyocera). 06) After forming into a shape, a binder removal treatment was performed and fired in a vacuum of 0.01 Pa at 1450 ° C. for 1 hour to produce a cemented carbide. Further, the rake face surface of each sample was polished by blasting, brushing or the like. Further, the prepared cemented carbide was subjected to blade edge processing (honing) by brushing.

  Coating layers having various compositions shown in Table 1 were formed on the substrate thus prepared by arc ion plating. The nitrogen gas introduction hole was set to be the center of the sample stage as shown in FIG. Further, the rotation of the rotation of the sample stage was a discontinuous rotation so that the time for the sample to face the target could be controlled to adjust the thickness of the first thin layer and the second thin layer. Further, in the target shape, the depth of the concave portion or the height of the convex portion is described in parentheses.

  With respect to the obtained sample, the cross section including the surface of the coating layer was observed with a transmission electron microscope (TEM), and the average crystal width of the crystals constituting the coating layer was determined. Moreover, when observing with TEM, the composition in arbitrary three places of each coating layer was measured by energy dispersive spectroscopy (EDS), and these average values were computed as a composition of each coating layer.

Next, a cutting test was performed under the following cutting conditions using the obtained end mill (model number: 6HFSM060-170-06 manufactured by Kyocera). The results are shown in Table 3.
Cutting method: End mill work material: SKD11
Cutting speed: 69.7 m / min Feed: 0.04 mm / rev
Cutting: Depth x Transverse cutting = 5mm x 0.15mm
Cutting state: Dry evaluation method: 90 minutes after cutting, side flank wear, tip wear, and chipping
It was measured.

From the results shown in Tables 1 to 3, Sample No. having a structure having only the lower layer and no upper layer was used. 10 was lost early. In addition, the sample No. _{1 in} which the lower layer t ₂ / t ₁ is smaller than 1.2. In No. 11, the progress of wear was rapid due to peeling of the coating layer. On the contrary, the sample No. _{1 in} which the lower layer t ₂ / t ₁ is larger than 2.5. In No. 13, minute chipping occurred.

Furthermore, sample No. ₄ in which the upper layer t ₄ / t ₃ is smaller than 2.5. In No. 14, wear progressed quickly due to chipping of the coating layer. On the contrary, the sample No. in which t ₄ / t ₃ in the upper layer exceeds 18 is obtained. In No. 12, the wear progressed quickly because of the rapid oxidation of the coating layer.

  On the other hand, the sample No. within the scope of the present invention. In each of Nos. 1 to 9, the coating layer was excellent in fracture resistance and oxidation resistance and exhibited good cutting performance.

It is (a) schematic perspective view and (b) schematic sectional drawing which show an example of the surface coating cutting tool which is a suitable example of the surface coating tool of this invention. It is a scanning electron micrograph about the principal part of the coating layer in the surface coating cutting tool of FIG. In the film-forming process of the coating layer at the time of manufacturing the surface coating tool of this invention, it is a schematic diagram of the arc ion plating film-forming apparatus. It is a schematic diagram which shows the rotation state of the whole sample in the film-forming process of the coating layer at the time of manufacturing the surface coating tool of this invention. It is a schematic diagram which shows the surface shape of the target at the time of manufacturing the surface coating tool of this invention, (a) The target for lower layer formation, (b) The target for upper layer formation.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Surface coating tool 2 Base | substrate 3 Drake surface 4 Flank 5 Cutting edge 6 Coating layer 7 1st thin layer 8 2nd thin layer 9 Lower layer 11 3rd thin layer 12 4th thin layer 13 Upper layer 20 AIP apparatus 21 Vacuum chamber 22 Gas Inlet 23 Cathode electrode 24 Anode electrode 25 Target 25a Lower layer forming target 25b Upper layer forming target 26 Sample support base 27 Tower 28 Table 29 Heater 30 Gas exhaust port 31 Bias power supply

Claims (3)

A cutting tool comprising a substrate and a coating layer covering the surface of the substrate, wherein the coating layer is Ti _1-a M _a (C _1-x N _x ) (where M is Nb, Mo, Ta A first thin layer comprising at least one selected from the group consisting of Hf, Al, Si and Y, 0.35 ≦ a ≦ 0.55, 0 ≦ x ≦ 1),
Ti _1-b M _b (C _1-y N _y ) (where M is at least one selected from the group consisting of Nb, Mo, Ta, Hf, Al, Si and Y, 0.40 ≦ b ≦ 0.60) Where b> a, 0 ≦ y ≦ 1) and second thin layers alternately stacked at a constant period;
Ti _1-c M _c (C _1-x N _x ) (where M is at least one selected from the group consisting of Nb, Mo, Ta, Hf, Al, Si and Y, 0.40 ≦ c ≦ 0.60) , 0 ≦ x ≦ 1), a third thin layer,
Ti _1-d M _d (C _1-y N _y ) (where M is at least one selected from the group consisting of Nb, Mo, Ta, Hf, Al, Si and Y, 0.45 ≦ d ≦ 0.65) However, an upper layer (provided that at least one of a ≠ c and b ≠ d is satisfied) in which the fourth thin layers of d> c and 0 ≦ y ≦ 1) are alternately laminated at a constant period;
And the ratio of the average layer thickness t ₁ of the first thin layer to the average layer thickness t ₂ of the second thin layer is 1.2 ≦ t ₂ / t ₁ ≦ 2.5, and the third ratio is 2.5 ≦ _t 4 / _{t 3} ≦ the average layer thickness _{t 3} of the thin layer and the average layer thickness _{t 4} of the fourth thin layer 18 (provided _{that, (t 2 / t 1)} <(t ₄ / t ₃ )). The period T _A of the lamination of the first thin layer and the second thin layer of the lower layer, the period of the lamination of the third thin layer and the fourth thin layer of the upper T _B and is 0.8 ≦ T _{B /} T _A The surface-coated tool according to claim 1, wherein ≦ 1.2. The average thickness t ₁ of the first thin layer is ₁₀ to 20 nm, the average thickness t ₂ of the second thin layer is 12 to 45 nm, and the average thickness t ₃ of the third thin layer is ₂ to 15 nm. The surface-coated tool according to claim 2, wherein an average layer thickness t4 of the fourth thin layer is 10 to ₄₀ nm.