JP5232983B2 - Micro mixer - Google Patents

Description

  The present invention is carried out using a microfluidic device having a microstructure represented by a microreactor represented by μ-TAS (abbreviation of Micro Total Analysis System) in Europe and Lab-on-A-chip in the United States. The present invention relates to a novel micromixer that enables mixing and stirring of two kinds of microfluids.

As a conventional technique regarding the structure of the micromixer, for example, as described in Patent Document 1, a micromixer using a substrate in which a micro flow path is formed in a Y shape, or as described in Patent Document 2, There is known a micromixer using a substrate in which a micro channel is formed in a T shape.
JP 2006-205080 A JP 2006-7063 A

  In the micromixer in which these Y-shaped and T-shaped microchannels are formed, the flow is in a laminar state. Therefore, the solution supplied from the two supply ports becomes a two-layer flow in the microchannel, and the stirring / mixing of these two layers is governed by diffusion. Therefore, it is difficult to perform complete mixing in a short time. There is a problem that time is required.

  For the purpose of shortening the mixing time, as a means for increasing the area of the interface between the two liquids, for example, the flow of two layers is divided into a large number on a plane to form a large number of laminar flows. The method of improving stirring efficiency is mentioned. However, since such a method divides the flow into a large number, it is necessary to form a complicated multi-channel using a precision processing technique, which is not preferable because the processing cost increases. In addition, even when multi-channel is used, since it is a micro-channel formed in a plane, the fluid is still laminar and stirring / mixing is governed by diffusion. There was room for improvement. In addition, in order to form a multi-channel on a flat surface, a large substrate area is required to some extent, which has a problem that it cannot be used for the purpose of downsizing the entire micromixer.

Furthermore, other micromixer conventional technologies include a mixer using a porous filter, a multilayer mixer, a mixer that performs mixing by chaotic mixing using a spiral flow of fluid, and a pseudo turbulent flow generated by colliding with a flow path wall. A wide variety of micromixers have been reported, such as a mixer that uses an ultrasonic wave, an ultrasonic field, an electric field, a magnetic field, and a micromixer that uses a fine stirrer (for example, Patent Document 3). Since the road pattern and the device configuration are complicated, there is a problem that it is expensive and not suitable for mass production.
JP 2006-320877 A

  An object of the present invention is to provide a micromixer that is small in size, has a relatively simple structure, and can effectively increase mixing efficiency.

In order to achieve the above object, the gist of the present invention is as follows.
(1) a be formed by connecting at least three tubular member, a first tubular member first fluid guide so as to flow and directed to the first direction, the downstream portion of the first tubular member has a tubular tip portion for guiding the second fluid so that the flow was directed in a direction opposite to the first direction with being inserted into, the tubular tip flow channel of the downstream portion of the first tubular member a second tubular member having a narrow flow passage space than the said downstream side portion of the first tubular member is defined by a tubular distal portion of the second tubular member, the first fluid flowing through the first tubular member the mixed fluid obtained by the second fluid flowing through the second tubular member to collide countercurrently, with guides to the flow which is directed in the same direction as the first direction, the increase the fluid pressure of the mixed fluid 1 an annular space communicates with the first annular space, said first annular space Lowering the fluid pressure of the al mixed fluid ejected, to promote the mixing of the mixed fluid by the eddy flow generated in association with this, formed in a block shape in member located between the inlet and the outlet of the second tubular member a pressure relief space, have a third tubular member for guiding the mixed fluid of the pressure relief space into predetermined collecting means, said second tubular member is that you have been configured so as to penetrate the pressure relief space A feature of the micromixer (first invention) .

(2) even without least Ri Do a stack of two plate-like members, the first plate member, is partitioned and formed by the bottom wall and the first groove wall, to name a substantially rectangular shape in plan view, the a first compartment groove 1 fluid guides so that the flow was directed in a first direction, before Symbol first plate member, is partitioned and formed by the second groove wall in the downstream portion of the first partition groove the Chi also tip groove for guiding the second fluid so that the flow was directed in a direction opposite to the first direction, the narrow flow passage space than end groove tip flow path space of the downstream portion of the first partition groove second compartment groove is defined by the downstream side portion and the second compartment groove tip groove portion before Symbol first partitioning groove, the second fluid flowing in the first fluid and the second compartment groove through the first compartment groove having The mixed fluid obtained by impinging on the countercurrent flow is guided to a flow directed in the same direction as the first direction, and the pressure of the mixed fluid is And Mel third section groove, before Symbol third possible inflow of the mixed fluid that will be ejected from the compartment groove position of the first plate member, a second plate member superimposed with said first plate member is formed, the third lower the pressure of the mixed fluid ejected from the compartment groove, a pressure relief space which promotes the mixing of the mixed fluid by the eddy flow generated in association with this, pressure relief space before Symbol second plate member and having a guide member for guiding the mixed fluid flowing into predetermined collecting means micro mixer (second invention).

According to the present invention, it is possible to provide a micromixer that is small in size, relatively simple in structure, and can effectively increase the mixing efficiency.
In particular, the present invention improves the mixing efficiency of the obtained mixed fluid by causing the first fluid flowing in the first guide channel and the second fluid flowing in the second guide channel to collide countercurrently. In addition, the mixed fluid obtained by the collision is guided to a flow directed in the same direction as the first direction at the discharge port of the discharge portion of the second guide flow path, thereby forming a turbulent flow and mixing efficiency. In the third guide channel, by increasing the pressure of the mixed fluid in accordance with the configuration such as narrowing the channel, the molecular diffusion distance in the mixed fluid is shortened as much as possible and the mixing efficiency is increased. As a result, the mixed fluid discharged from the third guide flow channel can flow into the mixing promoting space to lower the fluid pressure, and the mixing fluid can be promoted by the vortex generated thereby. Forming a fully mixed state Even when mixing the first fluid and the second fluid, such as piles, it can easily achieve complete mixing even at low flow rates (or low velocity).

  The micromixer according to the present invention includes a straight first guide channel that guides the first fluid to flow in a first direction, and the first guide channel in the downstream portion of the first guide channel. A discharge portion that guides the second fluid so as to flow in a direction opposite to the direction, the discharge portion having a flow path space narrower than a flow path space of a downstream portion of the first guide flow path, Preferably, the discharge portion is located at the center of the first guide channel, and a straight second guide channel provided concentrically with the first guide channel, a downstream portion of the first channel, A mixed fluid obtained by causing the first fluid flowing in the first guide channel and the second fluid flowing in the second guide channel to collide with each other. The flow is directed in the same direction as one direction and the pressure of the mixed fluid is increased. A third guide channel and mixing that communicates with the third guide channel, lowers the fluid pressure of the mixed fluid discharged from the third guide channel, and promotes mixing of the mixed fluid by a vortex generated along with the fluid pressure The present invention is to have a promotion space and a fourth guide channel for guiding the mixed fluid in the mixing promotion space to a predetermined recovery means.

Embodiments according to the present invention will be described below with reference to the drawings.
1 and 2 show the configuration of the main part of the micromixer according to the first invention, in which FIG. 1 is a front view and FIG. 2 is an exploded view.

  The micromixer 1 of the first invention includes a first tubular member 2 that is a first guide channel, a second tubular member 3 that is a second guide channel, and a first annular space 4 that is a third guide channel ( 3), a mixing promoting space 5, and a third tubular member 6 which is a fourth guide channel, and is composed mainly of at least three tubular members, in FIG. 1, three tubular members 2, 3 and 6 Is a micromixer formed by connecting them in a T-shape.

  The first tubular member 2 preferably has a straight shape and is provided to guide the first fluid 7 so as to flow in the first direction x.

  The second tubular member 3 preferably has a straight shape, and in the downstream portion 2a of the first tubular member 2, a direction opposite to the first direction x, preferably with respect to the first direction x. As shown in FIG. 1, a tubular tip portion that is a discharge portion that guides the second fluid 8 so that the flow is directed in a direction y that is 180 ° opposite to the first direction x as shown in FIG. 3a, and the tubular tip 3a has a channel space S2 that is narrower than the channel space S1 in the downstream portion of the first tubular member 2. In FIG. 1, the second tubular member 3 includes an outer tube portion 10 having the same size as the first tubular member, an inner end inserted into the outer tube portion 10 and the other end inserted into the first tubular member 2. Although it has a double-pipe structure composed of a tube portion 11 and the connecting portion 12 between the outer tube portion 10 and the inner tube portion 11 is configured to be water-tightly chained, it has the same diameter over the entire length. It may be configured with a single tube.

  The first annular space 4 is partitioned by the downstream portion 2a of the first tubular member 2 and the tubular tip portion 3a of the second tubular member 3, and the first fluid 7 flowing in the first tubular member 2 and the second tubular member. A mixed fluid 9 obtained by colliding with the second fluid 8 flowing in the member 3 in a countercurrent direction has a direction in the same direction as the first direction x, preferably 0 to 30 ° with respect to the first direction x, Optimally, as shown in FIG. 1, it is provided to guide the flow in the direction of 0 ° with respect to the first direction x and to increase the pressure of the mixed fluid 9. As a means for increasing the pressure of the mixed fluid 9 in the first annular space 4, for example, in FIGS. 1 and 3, the flow passage cross-sectional area of the first annular space 4 is the tubular tip 3 a of the second tubular member 3. Although the case where the pressure of the mixed fluid 9 is increased by narrowing the outer diameter of the first tubular member 2 as close as possible to the inner diameter of the first tubular member 2 is shown, the flow rate of the first fluid 7 or the second fluid 8 is increased. The pressure of the mixed fluid 9 may be increased, and various modes are conceivable for such a configuration.

  The mixing promoting space 5 is a pressure relaxation space formed in the block-like member 15 located between the inlet 13 and the outlet 14 of the second tubular member 3, and communicates with the first annular space 4. It is provided in order to lower the fluid pressure of the mixed fluid 9 discharged from the annular space 4 and to promote the mixing of the mixed fluid 9 by the vortex generated along with this.

  The third tubular member 6 is provided to guide the mixed fluid 9 in the mixing promotion space 5 to a predetermined recovery means (not shown). In FIG. 1, the mixed fluid 9 flowing through the annular space 4 is directed in the x direction. The block-shaped member 15 is mounted in a direction Z bent by 90 ° with respect to the block.

  FIG. 3 illustrates the flow of the mixed fluid 9 obtained by causing the first fluid 7 flowing in the first tubular member 2 and the second fluid 8 flowing in the second tubular member 3 to collide countercurrently. It is a conceptual diagram.

  As shown in FIG. 3, in the micromixer of the present invention, the first fluid 7 and the second fluid 8 are directed at the position of the discharge port 14 of the second tubular member 3 that discharges the second fluid 8 or immediately after the discharge. The mixed fluid 9 can be obtained by being supplied in a stream and mixed by collision. However, when the mixed fluid 9 is a mixed fluid that hardly forms a complete mixed state in which the first fluid, for example, water, and the second fluid, for example, a 10% polyacrylic acid aqueous solution are mixed, In a micromixer, for example, mixing at a low flow rate (or low flow rate) such as 0.1 ml / min or less does not form a complete mixed state.

  Next, the mixed fluid 9 increases the fluid pressure of the mixed fluid 9 in the first annular space 4 defined by the downstream portion 2a of the first tubular member 2 and the tubular tip 3a of the second tubular member 3. After that, it is discharged into the mixing promotion space 5. At this time, the flow of the mixed fluid 9 passing through the first annular space 4 is in the same direction as the flow direction (x direction) of the first fluid 7 and opposite to the flow direction (y direction) of the second fluid 8. Become a direction.

  And in this invention, the mixed fluid 9 discharged | emitted from the 1st annular space 4 in the mixing promotion space 5 makes the fluid pressure of the mixed fluid 9 raised in the 1st annular space 4 pressure in the mixing promotion space 5 As a result of the vortex generated when released, mixing and stirring are further promoted. As a result, the mixing efficiency of the fluid can be effectively increased while the structure is relatively simple.

  In the first invention, the ratio of the cross-sectional areas of the first tubular member 2, the second tubular member 3, and the first annular space 4 may be 5 to 10: 1: 1 to 3 in relation to mixing by collision. Effectively create vortex flow related to mixing by increasing kinetic energy of two fluids, decreasing molecular diffusion distance related to mixing due to contraction flow, increasing mixed fluid pressure and releasing pressure (lowering mixed fluid pressure) This is preferable.

  The second fluid 8 discharged from the second tubular member 3 preferably has a larger flux than the first fluid 7 flowing through the first tubular member 2. For example, when the first fluid 7 is a 2% sulfuric acid aqueous solution and the second fluid 8 is a 10% sodium hydroxide aqueous solution, the difference in flux between the second fluid 8 and the second fluid 7 is 20 mm / s or more. Is preferred.

  Furthermore, the fluid pressure P1 of the mixed fluid 9 passing through the first annular space 4 is preferably 0.2 to 5 MPa, and the fluid pressure P2 of the mixed fluid 9 passing through the mixing promoting space 5 is 0.1. The pressure difference P1-P2 is preferably 0.1 to 5 MPa, and more preferably 0.5 to 1 MPa. In addition, the adjustment method of the mixing ratio of a 1st fluid and a 2nd fluid includes the method of performing by the flow volume setting of the pump which supplies a 1st fluid and a 2nd fluid, for example.

  Furthermore, the first tubular member 2 and the second tubular member 3 can be provided with a check valve (not shown) as necessary in order to prevent the fluid from flowing back.

  In FIG. 2, the micromixer of the first invention is provided with sealing materials 16, 17, 18 for maintaining watertightness on the first, second and third tubular members 2, 3, 6 and Threaded portions 22, 23 provided on the block-like member 15 forming the first annular space are connected to the connecting portions such as nuts 19, 20, 21 provided on the first, second and third tubular members 2, 3, 6; Although the structure which carries out screw connection to 24 is shown, respectively, it is not limited to this structure. The material of the sealing materials 16, 17, and 18 is not particularly limited as long as it is a material that can maintain watertightness. For example, a metal such as aluminum, an alloy such as stainless steel or a nickel-based alloy, or Teflon. Examples thereof include plastic resins such as (registered trademark).

  FIG. 4 is an exploded perspective view showing the main configuration of the micromixer according to the second invention.

  The micromixer 101 of the second invention includes a first partition groove 102 that is a first guide channel, a second partition groove 103 that is a second guide channel, and a third partition groove 104 that is a third guide channel. The mixing promotion space 105 and the guide member 106, which is the fourth guide flow path, are mainly configured, and at least two plate-like members, in FIG. 4, four plate-like members 107, 111, 112, and 113 are stacked. It is a micromixer consisting of the body.

  The first partition groove 102 is provided to guide the first fluid 7 so as to flow in the first direction x. The first plate member 107 has one bottom wall 108 and a first groove wall 109. And form a substantially rectangular shape in plan view.

  The second partition groove 103 guides the second fluid 8 in the downstream portion of the first partition groove 102 to guide the second fluid 8 so as to flow in a direction y opposite to the first direction x. The front end groove 103a is partitioned by 110, and the front end groove 103a has a flow path space S2 that is narrower than the flow path space S1 in the downstream portion of the first partition groove 102.

  The third partition groove 104 is partitioned by the downstream portion of the first partition groove 102 and the tip groove portion 103a of the second partition groove 103, and the first fluid 7 flowing in the first partition groove 102 and the second partition groove 103 A mixed fluid 9 obtained by colliding the second fluid 8 flowing inside in a countercurrent is guided to a flow directed in the same direction as the first direction x, and is provided to increase the pressure of the mixed fluid 9. It is done.

  The mixing promoting space 105 communicates with the third partition groove 104, lowers the fluid pressure of the mixed fluid 9 discharged from the third partition groove 104, and promotes mixing of the mixed fluid 9 by the vortex generated thereby. Pressure relaxation formed on the second plate member 111 superimposed with the first plate member 107 at a position where the mixed fluid 9 discharged from the third partition groove 104 of the first plate member 107 can flow. It is space. FIG. 4 shows a configuration in which the mixing promoting space 105 is superposed on the first plate member 107 via another plate member 112, but the first plate member 107 is shown. The first plate-like member 107 may be directly superimposed on the first plate-like member, or may be superposed via two or more other plate-like members 112. In addition, the first plate-like member 107 is formed on the lower surface side of the first plate-like member 107. One or more other plate-like members 113 each provided with a through-hole for introducing the first fluid and the second fluid may be superposed on each other, and their configuration can be appropriately selected as necessary.

  The guide member 106 is provided to guide the mixed fluid flowing out from the second plate-like member 111 to a predetermined recovery means.

  The micromixer of the second invention can also effectively increase the mixing efficiency of the fluid by the same mechanism as the micromixer of the first invention described above, while having a relatively simple structure.

  The material of each member constituting the micromixer of the first and second inventions is, for example, an alloy such as stainless steel or a nickel base alloy, a plastic resin such as Teflon or acrylic, a glass such as quartz, or zirconia. It is preferable to use ceramics such as silicon nitride, but it is particularly preferable to use an alloy such as stainless steel or a nickel-based alloy from the viewpoint of preventing damage to the member due to pressure.

  The above description is merely an example of the embodiment of the present invention, and various modifications can be made within the scope of the claims.

  Next, a micromixer according to the present invention (first invention) was prototyped, and two types of fluids were mixed using this micromixer, which will be described below.

(Example)
As shown in FIG. 1, the micromixer according to the first invention includes a first tubular member 2 (size: length 35 mm, outer diameter 1.6 mm, inner diameter 0.48 mm), second tubular member 3 (outer tube portion 10). Size: length 35 mm, outer diameter 1.6 mm, inner diameter 0.48 mm, inner tube portion 11 size: length 10 mm, outer diameter 0.44 mm, inner diameter 0.14 mm) and third tubular member 6 (size: length 50 mm, outer diameter 1.6 mm, inner diameter 0.48 mm) and a micromixer composed of three tubular members, using a 2% sulfuric acid aqueous solution as the first fluid 7 and 1.60% KI as the second fluid. A 4 type mixed aqueous solution in which an aqueous solution, a 0.41% KIO ₃ aqueous solution, a 3.34% H ₃ BO ₃ aqueous solution and a 0.80% NaOH aqueous solution were mixed at a volume ratio of 1: 1: 1: 1 was used. It was. The third tubular member 6 was configured such that the mixed aqueous solution directly flows into the ultraviolet-visible spectrophotometer. The flow rate of the first fluid 7 flowing in the first tubular member 2 is 0.125 to 0.5 ml / min, and the flow rate of the second fluid 8 flowing in the second tubular member 3 is 0.125 to 0.5 ml / min. The ratio of the first fluid 7 and the second fluid 8 constituting the mixed fluid 9 flowing in the third tubular member 6 is 1: 1, and the flow rate of the mixed fluid 9 flowing in the third tubular member 6 is 0. It was changed within the range of 25 to 1.0 ml / min.

The mixing characteristics of the first fluid and the second fluid were evaluated using the Villermaux / Dushman reaction. That is, when two types of fluids are mixed, a fast reaction is preferentially advanced when the mixing characteristics are good, and conversely, a slow reaction is also advanced when the mixing characteristics are poor. The mixing characteristics can be evaluated by measuring the concentration of the substance. Specifically, when the first fluid and the second fluid are mixed, an acid-alkali neutralization reaction or an I ₂ generation reaction that is a reaction when the mixing characteristics are poor occurs, and when this I ₂ generation reaction occurs, The generated I ₂ partly becomes I ₃ ^−, and since this I ₃ ⁻ has an absorption peak at a wavelength of 353 nm, the mixing property was evaluated by measuring the absorbance. This example shows that the smaller the absorption peak at a wavelength of 353 nm, the better the mixing characteristics. The evaluation results are shown in FIG.

(Comparative example)
For comparison, as shown in FIG. 6, the first tubular member 202 and the second tubular member 203 are provided to face each other, and the first fluid 7 passing through the first tubular member 202 and the second tubular member 203 are passed through. After the second fluid 8 passing therethrough is convected to form a mixed fluid, the mixed fluid 9 is directly discharged through the third tubular member 206 without passing through the first annular space or the mixing promoting space. A micromixer 201 having the same configuration as that of the example was made experimentally and the mixing characteristics were evaluated. The evaluation result is shown in FIG. In Comparative Example 1 shown in FIG. 7, the first tubular member 202 and the second tubular member 203 are both 35 mm long, 1.6 mm outer diameter and 0.48 mm inner diameter, and the size of the third tubular member 206. The length was 50 mm, the outer diameter was 1.6 mm, and the inner diameter was 0.48 mm. In Comparative Example 2, the first tubular member 202 and the second tubular member 203 are both 35 mm in length, 1.6 mm in outer diameter and 0.14 mm in inner diameter, and the third tubular member 206 is 50 mm in length and outside. The diameter was 1.6 mm and the inner diameter was 0.48 mm.

  From the results shown in FIG. 7, it can be seen that the example has a smaller absorption peak at a wavelength of 353 nm and superior mixing characteristics at any flow rate as compared with Comparative Examples 1 and 2.

According to the present invention, it is possible to provide a micromixer that is small in size, relatively simple in structure, and can effectively increase the mixing efficiency.
In particular, the present invention improves the mixing efficiency of the obtained mixed fluid by causing the first fluid flowing in the first guide channel and the second fluid flowing in the second guide channel to collide countercurrently. In addition, the mixed fluid obtained by the collision is guided to the flow directed in the same direction as the first direction by the third guide channel, thereby forming a turbulent flow, and in the third guide channel. By increasing the pressure of the mixed fluid in accordance with the configuration such as narrowing the flow path, the molecular diffusion distance in the mixed fluid can be shortened as much as possible to further increase the mixing efficiency, and further the discharge from the third guide flow path The mixed fluid is allowed to flow into the mixing promoting space to lower the fluid pressure, and the mixing of the mixed fluid is promoted by the vortex generated thereby. When mixing two fluids. Also, even at low flow rates (or low flow rate) can be easily achieve complete mixing.

It is a front view of the micromixer according to this invention (1st invention). It is an exploded view of the micromixer of FIG. In the micromixer of FIG. 1, it is a conceptual diagram for demonstrating that the 1st fluid which passes the inside of a 1st tubular member, and the 2nd fluid which passes the inside of a 2nd tubular member collide by convection, and become a mixed fluid. It is a disassembled perspective view of the micromixer according to this invention (2nd invention). FIG. 5 is a conceptual diagram for explaining that the first fluid passing through the first partition groove and the second fluid passing through the second partition groove collide with each other by convection to become a mixed fluid in the micromixer of FIG. 4. The conceptual diagram for demonstrating that the 1st fluid which passes through the inside of a 1st division groove, and the 2nd fluid which passes through the inside of a 2nd division groove collide by convection into a mixed fluid in the micro mixer of the comparative examples 1 and 2. It is. It is a graph which shows the evaluation result which measured the light absorbency in the wavelength of 353 nm with respect to the flow velocity of the mixed fluid by the side of a guide member about an Example and Comparative Examples 1 and 2. FIG.

Explanation of symbols

1, 101 Micromixer 2 First tubular member 3 Second tubular member 4 First annular space 5 Mixing promotion space 6 Third tubular member 7 First fluid 8 Second fluid
10 Outer pipe
11 Inner pipe
12 Connecting part
13 Inlet of second tubular member
14 Discharge port of second tubular member
15 Block-shaped member
16, 17, 18 Sealing material
19, 20, 21 Nut
22, 23, 24 Block member threaded part
102 First section groove
103 Second partition groove
104 Third section groove
105 Mixing promotion space
106 Guide member
107 First plate member
108 Bottom wall
109 First groove wall
110 Second groove wall
111 Second plate member
112, 113 Plate member

Claims (2)

Formed by connecting at least three tubular members,
A first tubular member that guides the first fluid to flow in a first direction;
Has a tubular tip portion for guiding the second fluid so that the flow was directed in a direction opposite to the first direction with being inserted into the downstream portion of the first tubular member, said tubular tip is first A second tubular member having a channel space narrower than the channel space of the downstream portion of the tubular member ;
The partitioned by a tubular front end portion of the downstream side portion and the second tubular member of the first tubular member, and a second fluid flowing in the first fluid flowing through the first tubular member within the second tubular member countercurrently A first annular space that guides the mixed fluid obtained by collision into a flow directed in the same direction as the first direction, and increases the pressure of the mixed fluid;
First through annular space and communicating, the first lowering the pressure of the mixed fluid discharged from the annular space, to promote the mixing of the mixed fluid by the eddy flow generated in association with this, the inlet and the outlet of the second tubular member A pressure relaxation space formed in the block-like member located between
And a third tubular member for guiding the mixed fluid of the pressure relief space into predetermined collecting means, said second tubular member micromixer, characterized in that is configured to penetrate the pressure relief space . It consists of a laminate of at least two plate-like members,
A first partition groove formed on the first plate-like member by a bottom wall and a first groove wall, having a substantially rectangular shape in plan view, and guiding the first fluid to flow in a first direction. When,
A tip groove portion that is partitioned in the first plate-like member by a second groove wall in the downstream portion of the first partition groove and guides the second fluid so that the flow is directed in the direction opposite to the first direction. A second partition groove having a channel space that is narrower than the channel space of the downstream portion of the first partition groove;
A first fluid flowing through the first partition groove and a second fluid flowing through the second partition groove are collided in countercurrent with a downstream portion of the first partition groove and a tip groove portion of the second partition groove. A third partition groove that guides the resulting mixed fluid in a flow directed in the same direction as the first direction and increases the pressure of the mixed fluid;
It is formed on the second plate-like member that is overlapped with the first plate-like member at a position where the mixed fluid discharged from the third compartment groove of the first plate-like member can flow in, and is discharged from the third partition groove. A pressure relief space that lowers the pressure of the mixed fluid and promotes mixing of the mixed fluid by a vortex generated by the pressure,
A micromixer comprising: a guide member that guides the mixed fluid flowing out from the pressure relaxation space of the second plate member to a predetermined recovery means.

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