JP5229499B2 - Magnetic bearing device and vacuum pump including the same - Google Patents

Magnetic bearing device and vacuum pump including the same Download PDF

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JP5229499B2
JP5229499B2 JP2009154690A JP2009154690A JP5229499B2 JP 5229499 B2 JP5229499 B2 JP 5229499B2 JP 2009154690 A JP2009154690 A JP 2009154690A JP 2009154690 A JP2009154690 A JP 2009154690A JP 5229499 B2 JP5229499 B2 JP 5229499B2
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rotating body
magnetic bearing
protective
bearing device
axial direction
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JP2011012690A (en
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恵次郎 見須
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Yaskawa Electric Corp
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

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  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Sliding-Contact Bearings (AREA)

Description

本発明は、磁気力で回転体を非接触状態で支持する磁気軸受を備える磁気軸受装置、およびそれを備えるターボ分子ポンプ等の真空ポンプに関するものである。   The present invention relates to a magnetic bearing device including a magnetic bearing that supports a rotating body in a non-contact state with a magnetic force, and a vacuum pump such as a turbo molecular pump including the magnetic bearing device.

図５は従来の磁気軸受装置の断面図である。回転体１０は、ラジアル磁気軸受３０とラジアル磁気軸受４０とにより、径方向に非接触浮上するよう制御される。ラジアル磁気軸受３０は、ラジアル電磁石３１と、ラジアル電磁石ターゲット３２と、ラジアルセンサ３３と、ラジアルセンサターゲット３４とからなる。ラジアル磁気軸受４０は、ラジアル電磁石４１と、ラジアル電磁石ターゲット４２と、ラジアルセンサ４３と、ラジアルセンサターゲット４４とからなる。
回転体１０は、スラスト磁気軸受５０により、軸方向に非接触浮上するよう制御される。スラスト磁気軸受５０は、回転体１０の径方向に平行に取り付けられたスラストディスク５１と、スラスト電磁石５２および５３と、スラストセンサ５４とからなる。
このように径方向および軸方向に非接触浮上した回転体１０は、モータ６０によって回転する。 FIG. 5 is a cross-sectional view of a conventional magnetic bearing device. The rotating body 10 is controlled by the radial magnetic bearing 30 and the radial magnetic bearing 40 so as to float in a non-contact manner in the radial direction. The radial magnetic bearing 30 includes a radial electromagnet 31, a radial electromagnet target 32, a radial sensor 33, and a radial sensor target 34. The radial magnetic bearing 40 includes a radial electromagnet 41, a radial electromagnet target 42, a radial sensor 43, and a radial sensor target 44.
The rotating body 10 is controlled by the thrust magnetic bearing 50 to float in a non-contact manner in the axial direction. The thrust magnetic bearing 50 includes a thrust disk 51, thrust electromagnets 52 and 53, and a thrust sensor 54 attached in parallel to the radial direction of the rotating body 10.
Thus, the rotating body 10 that has floated in a non-contact manner in the radial direction and the axial direction is rotated by the motor 60.

保護軸受２１および２２は、回転体１０の両端に配置される。保護軸受２１および２２と回転体１０の隙間は、ラジアル磁気軸受３０および４０に形成される隙間や、スラスト磁気軸受５０に形成される隙間よりも狭い。このため、ラジアル磁気軸受３０および４０、スラスト軸受５０が機能していない際に、回転体１０は、保護軸受２１および２２により、径方向および軸方向にて接触支持される。通常は、回転体１０の回転が停止した後、もしくは回転体１０の回転数が十分に低速になった後に、回転体１０は、保護軸受２１および２２に接触支持される。   The protective bearings 21 and 22 are disposed at both ends of the rotating body 10. The clearance between the protective bearings 21 and 22 and the rotating body 10 is narrower than the clearance formed in the radial magnetic bearings 30 and 40 and the clearance formed in the thrust magnetic bearing 50. For this reason, when the radial magnetic bearings 30 and 40 and the thrust bearing 50 are not functioning, the rotating body 10 is contact-supported by the protective bearings 21 and 22 in the radial direction and the axial direction. Normally, after the rotation of the rotating body 10 stops or after the number of rotations of the rotating body 10 becomes sufficiently low, the rotating body 10 is supported by contact with the protective bearings 21 and 22.

特開２００２−３３９９７０号公報JP 2002-339970 A

しかしながら、磁気軸受３０および４０が停電もしくは何らかの故障により機能しなくなった場合、回転体１０の回転数が高い状態であっても、回転体１０は、保護軸受２１および２２により接触支持されることになる。この場合、回転体１０、保護軸受２１および２２に大きな負荷がかかる。特に保護軸受２１および２２の硬度が高いため、保護軸受２１および２２と接触する回転体１０の接触面に磨耗が生じることになる。そして従来においては、この摩耗により発生した摩耗粉が、回転体１０と保護軸受２１および２２との接触部に存在していたので、回転体１０の接触面の磨耗が増大するという問題があった。
なお、回転体１０の接触面の磨耗防止のために、回転体１０の接触面に焼入れを施し表面硬度を上げるか、固体潤滑等の処置を施し摩擦を減じるか、あるいは回転体１０の接触部をロータ軸とは異なる硬度が高い材料の別部品で構成するかといった処置をすることも考えられる。しかし、これらのいずれにおいても、製作費用が高くなるとともに、部品の交換費用も高くなるという問題があった。
また、磨耗粉が、保護軸受２１および２２内に混入し、保護軸受２１および２２の損傷が増大し、保護軸受２１および２２の寿命が短くなるという問題もあった。特に保護軸受２１および２２は、コストが高いので、この問題はコスト面で大きな問題であった。 However, when the magnetic bearings 30 and 40 do not function due to a power failure or some failure, the rotating body 10 is contact-supported by the protective bearings 21 and 22 even when the rotating body 10 is in a high rotational speed state. Become. In this case, a large load is applied to the rotating body 10 and the protective bearings 21 and 22. In particular, since the hardness of the protective bearings 21 and 22 is high, wear occurs on the contact surface of the rotating body 10 that contacts the protective bearings 21 and 22. In the prior art, the wear powder generated by this wear was present at the contact portion between the rotating body 10 and the protective bearings 21 and 22, so that there was a problem of increased wear on the contact surface of the rotating body 10. .
In order to prevent the contact surface of the rotating body 10 from being worn, the contact surface of the rotating body 10 is hardened to increase the surface hardness, or a solid lubrication or the like is applied to reduce friction, or the contact portion of the rotating body 10 is reduced. It is also conceivable to take a measure such as to make up a separate part of a material having a high hardness different from that of the rotor shaft. However, in any of these, there is a problem that the manufacturing cost is high and the replacement cost of the parts is also high.
In addition, wear powder is mixed into the protective bearings 21 and 22, and the damage to the protective bearings 21 and 22 increases, resulting in a problem that the life of the protective bearings 21 and 22 is shortened. In particular, since the protective bearings 21 and 22 are expensive, this problem is a serious problem in terms of cost.

本発明は、このような問題点に鑑みてなされたものであり、従来よりもコストを抑えながら回転体の接触面の磨耗の増大を抑えるとともに、保護軸受の寿命を延ばすことが可能な磁気軸受装置、およびそれを備える真空ポンプを提供することを目的とする。   The present invention has been made in view of such a problem, and can suppress an increase in wear of a contact surface of a rotating body while suppressing cost more than the conventional one, and can extend the life of a protective bearing. An object is to provide a device and a vacuum pump including the same.

請求項１に記載の発明は、磁気軸受装置に関するものであって、磁気軸受装置は、回転体と、回転体の周囲に設けられ、回転体を回転自在に非接触で支持する磁気軸受と、回転体の周囲に設けられ、磁気軸受が回転体を支持しないときに回転体を支持する保護軸受と、回転体と対向する保護軸受の内輪側に設けられ、回転体の軸方向に伸びる溝が回転体との対向面に形成された保護部材と、を備える。
請求項２に記載の発明は、請求項１に記載の磁気軸受装置において、軸方向における保護部材の端部は、軸方向における保護軸受の内輪の端部を少なくとも覆うことを特徴とするものである。
請求項３に記載の発明は、請求項２に記載の磁気軸受装置において、軸方向における保護部材の端部は、軸方向に沿って形成された、保護軸受の内外輪の隙間をさらに覆うことを特徴とするものである。
請求項４に記載の発明は、請求項１乃至３のいずれか１項に記載の磁気軸受装置において、保護部材には、回転体の周方向に伸びる溝がさらに形成されることを特徴とするものである。
請求項５に記載の発明は、請求項１乃至４のいずれか１項に記載の磁気軸受装置において、回転体と接触する保護部材の接触面のうち、軸方向における端部の形状をテーパー形状としたことを特徴とするものである。
請求項６に記載の発明は、請求項１乃至５のいずれか１項に記載の磁気軸受装置において、回転体と接触する保護部材の接触面の硬度を、保護部材と接触する回転体の接触面の硬度より低くしたことを特徴とするものである。
請求項７に記載の発明は、請求項１乃至６のいずれか１項に記載の磁気軸受装置において、回転体を駆動するモータをさらに備えたことを特徴とするものである。
請求項８に記載の発明は、請求項１乃至７のいずれか１項に記載の磁気軸受装置を備えた真空ポンプである。 The invention according to claim 1 relates to a magnetic bearing device, wherein the magnetic bearing device is provided around a rotating body, and a magnetic bearing that supports the rotating body rotatably and in a non-contact manner, A groove provided around the rotating body and supporting the rotating body when the magnetic bearing does not support the rotating body, and a groove extending in the axial direction of the rotating body provided on the inner ring side of the protective bearing facing the rotating body. And a protective member formed on a surface facing the rotating body.
The invention according to claim 2 is the magnetic bearing device according to claim 1, characterized in that the end of the protection member in the axial direction covers at least the end of the inner ring of the protection bearing in the axial direction. is there.
According to a third aspect of the present invention, in the magnetic bearing device according to the second aspect, the end portion of the protective member in the axial direction further covers a gap between the inner and outer rings of the protective bearing formed along the axial direction. It is characterized by.
According to a fourth aspect of the present invention, in the magnetic bearing device according to any one of the first to third aspects, the protective member is further formed with a groove extending in a circumferential direction of the rotating body. Is.
According to a fifth aspect of the present invention, in the magnetic bearing device according to any one of the first to fourth aspects, the shape of the end portion in the axial direction of the contact surface of the protective member that contacts the rotating body is a tapered shape. It is characterized by that.
According to a sixth aspect of the present invention, in the magnetic bearing device according to any one of the first to fifth aspects, the hardness of the contact surface of the protective member that comes into contact with the rotating body is determined by the contact of the rotating body that comes into contact with the protective member. It is characterized by being lower than the hardness of the surface.
According to a seventh aspect of the present invention, in the magnetic bearing device according to any one of the first to sixth aspects, a motor for driving the rotating body is further provided.
The invention according to an eighth aspect is a vacuum pump including the magnetic bearing device according to any one of the first to seventh aspects.

請求項１に記載の発明によれば、保護部材に形成された溝により、回転体と保護部材とが相対速度差をもって接触した際に生じる磨耗粉が当該溝に入ることになり、保護部材と回転体の接触部に入る磨耗粉が減じられる。そのため、保護部材と接触する回転体の接触面の磨耗の増大を抑えることが可能となる。また、磨耗粉が溝に入ることにより、磨耗粉の飛散が防止され、保護軸受内への磨耗粉の混入が減じられ、保護軸受の寿命を延ばすことも可能となる。
請求項２に記載の発明によれば、保護部材により、回転体を軸方向にも支持することができる。
請求項３に記載の発明によれば、回転体と保護部材が接触することにより生じた磨耗粉が保護軸受内に混入することを防ぐことができ、保護軸受の寿命をさらに延ばすことが可能となる。
請求項４に記載の発明によれば、回転体の接触面の磨耗の増大をさらに抑えることができるとともに、保護軸受の寿命をさらに伸ばすことが可能となる。
請求項５に記載の発明によれば、回転体と保護部材の接触面積を増やすことができ、回転体の接触面の磨耗の増大をさらに抑えることが可能となる。
請求項６に記載の発明によれば、回転体の接触面の磨耗の増大をさらに抑えることが可能となる。 According to the first aspect of the present invention, the groove formed in the protective member causes wear powder generated when the rotating body and the protective member come into contact with each other with a relative speed difference to enter the groove. The wear powder entering the contact portion of the rotating body is reduced. Therefore, it is possible to suppress an increase in wear of the contact surface of the rotating body that contacts the protective member. In addition, since the wear powder enters the groove, scattering of the wear powder is prevented, and contamination of the wear powder into the protective bearing is reduced, and the life of the protective bearing can be extended.
According to the second aspect of the present invention, the rotating body can be supported in the axial direction by the protective member.
According to the invention described in claim 3, it is possible to prevent wear powder generated by the contact between the rotating body and the protective member from entering the protective bearing, and to further extend the life of the protective bearing. Become.
According to the fourth aspect of the present invention, it is possible to further suppress an increase in wear of the contact surface of the rotating body and further extend the life of the protective bearing.
According to the fifth aspect of the present invention, the contact area between the rotating body and the protection member can be increased, and the increase in wear on the contact surface of the rotating body can be further suppressed.
According to invention of Claim 6, it becomes possible to further suppress the increase in wear of the contact surface of a rotary body.

本発明の実施例１に係る磁気軸受装置の側断面図Side sectional view of the magnetic bearing device according to the first embodiment of the present invention. 図１に示した保護部材７２を示す図The figure which shows the protection member 72 shown in FIG. 本発明の実施例２に係る保護部材７２を示す図The figure which shows the protection member 72 which concerns on Example 2 of this invention. 本発明の実施例３に係る保護部材７２を示す図The figure which shows the protection member 72 which concerns on Example 3 of this invention. 従来の磁気軸受装置の側断面図Side sectional view of a conventional magnetic bearing device

以下、本発明の実施形態について図を参照して説明する。   Embodiments of the present invention will be described below with reference to the drawings.

図１は、本発明の実施例１に係る磁気軸受装置の側断面図である。図１において、磁気軸受装置は、回転体１０、保護軸受２１および２２、ラジアル磁気軸受３０および４０、スラスト磁気軸受５０、モータ６０、保護部材７１および７２を備える。なお、図１において、図５に示した構成と同一の構成については同一の符号を付している。また、図１に示した磁気軸受装置は、真空ポンプ等に搭載される。   1 is a side sectional view of a magnetic bearing device according to a first embodiment of the present invention. In FIG. 1, the magnetic bearing device includes a rotating body 10, protective bearings 21 and 22, radial magnetic bearings 30 and 40, a thrust magnetic bearing 50, a motor 60, and protective members 71 and 72. In FIG. 1, the same components as those shown in FIG. The magnetic bearing device shown in FIG. 1 is mounted on a vacuum pump or the like.

回転体１０は、周囲に設けられたラジアル磁気軸受３０とラジアル磁気軸受４０とにより、径方向に非接触浮上するよう制御される。ラジアル磁気軸受３０は、ラジアル電磁石３１と、ラジアル電磁石ターゲット３２と、ラジアルセンサ３３と、ラジアルセンサターゲット３４とからなる。ラジアル磁気軸受４０は、ラジアル電磁石４１と、ラジアル電磁石ターゲット４２と、ラジアルセンサ４３と、ラジアルセンサターゲット４４とからなる。
回転体１０は、周囲に設けられたスラスト磁気軸受５０により、軸方向に非接触浮上するよう制御される。スラスト磁気軸受５０は、回転体１０に垂直に取り付けられたスラストディスク５１と、スラスト電磁石５２および５３と、スラストセンサ５４とからなる。
このように径方向および軸方向に非接触浮上し回転自在に支持された回転体１０は、モータ６０によって回転する。 The rotating body 10 is controlled to float in a non-contact manner in the radial direction by a radial magnetic bearing 30 and a radial magnetic bearing 40 provided around the rotor 10. The radial magnetic bearing 30 includes a radial electromagnet 31, a radial electromagnet target 32, a radial sensor 33, and a radial sensor target 34. The radial magnetic bearing 40 includes a radial electromagnet 41, a radial electromagnet target 42, a radial sensor 43, and a radial sensor target 44.
The rotating body 10 is controlled to float in the axial direction by a thrust magnetic bearing 50 provided around the rotor 10. The thrust magnetic bearing 50 includes a thrust disk 51 that is vertically attached to the rotating body 10, thrust electromagnets 52 and 53, and a thrust sensor 54.
Thus, the rotating body 10 that floats in a non-contact manner in the radial direction and the axial direction and is rotatably supported is rotated by the motor 60.

保護軸受２１および２２は、回転体１０の両端近くに配置され、ラジアル磁気軸受３０および４０、スラスト軸受５０が機能していない際に、回転体１０を支持する。ここで、本実施形態では、保護軸受２１および２２の内輪（回転体１０側）に保護部材７１および７２が嵌合されている。保護部材７１および７２と回転体１０の隙間は、ラジアル磁気軸受３０および４０に形成される隙間や、スラスト磁気軸受５０に形成される隙間よりも狭い。このため、ラジアル磁気軸受３０および４０、スラスト軸受５０が機能していない際に、回転体１０は、保護部材７１および７２により、径方向および軸方向にて接触支持される。   The protective bearings 21 and 22 are disposed near both ends of the rotating body 10 and support the rotating body 10 when the radial magnetic bearings 30 and 40 and the thrust bearing 50 are not functioning. Here, in this embodiment, protective members 71 and 72 are fitted to the inner rings (rotating body 10 side) of the protective bearings 21 and 22. The clearance between the protection members 71 and 72 and the rotating body 10 is narrower than the clearance formed in the radial magnetic bearings 30 and 40 and the clearance formed in the thrust magnetic bearing 50. For this reason, when the radial magnetic bearings 30 and 40 and the thrust bearing 50 are not functioning, the rotating body 10 is contact-supported by the protective members 71 and 72 in the radial direction and the axial direction.

保護部材７１の形状は、円筒形状となっており、保護部材７２の形状は、図２に示すように、外周面に段差が設けられた円筒形状となっている。図２は、図１に示した保護部材７２を示す図であり、図２（ａ）は、保護部材７２の上面図であり、図２（ｂ）は、保護部材７２の側断面図である。保護部材７１および７２の材料は、保護部材７１および７２と接触する回転体１０の接触面よりも表面硬度が低くなる材料に選定されている。なお、保護部材７１および７２の材料を、回転体１０の接触面よりも表面硬度が低くなる材料に選定する代わりに、保護部材７１および７２に表面処理を施してもよい。
ここで、保護部材７１および７２の内周面には、軸方向に伸びる溝が設けられている。図２（ａ）に示すように、保護部材７２には溝７２ａが設けられ、保護部材７１も溝７２ａと同じ溝が設けられている。
これにより、回転体１０と保護部材７１および７２とが相対速度差をもって接触した際に生じる磨耗粉が溝に入ることになり、保護部材７１および７２と回転体１０との接触部に入る磨耗粉が減じられる。そのため、保護部材７１および７２と接触する回転体１０の接触面の磨耗の増大を抑えることが可能となる。
また、接触した際に生じる磨耗粉が溝に入ることにより、磨耗粉の飛散が防止され、保護軸受２１および２２内への磨耗粉の混入が減じられ、保護軸受２１および２２の寿命を延ばすことも可能となる。 The shape of the protection member 71 is a cylindrical shape, and the shape of the protection member 72 is a cylindrical shape in which a step is provided on the outer peripheral surface as shown in FIG. 2 is a view showing the protection member 72 shown in FIG. 1, FIG. 2 (a) is a top view of the protection member 72, and FIG. 2 (b) is a side sectional view of the protection member 72. . The material of the protection members 71 and 72 is selected as a material having a lower surface hardness than the contact surface of the rotating body 10 that contacts the protection members 71 and 72. Instead of selecting the material of the protective members 71 and 72 as a material whose surface hardness is lower than the contact surface of the rotating body 10, the protective members 71 and 72 may be subjected to a surface treatment.
Here, grooves extending in the axial direction are provided on the inner peripheral surfaces of the protection members 71 and 72. As shown in FIG. 2A, the protective member 72 is provided with a groove 72a, and the protective member 71 is also provided with the same groove as the groove 72a.
As a result, wear powder generated when the rotating body 10 and the protection members 71 and 72 come into contact with each other with a relative speed difference enters the groove, and wear powder entering the contact portion between the protection members 71 and 72 and the rotation body 10. Is reduced. Therefore, it is possible to suppress an increase in wear of the contact surface of the rotating body 10 that contacts the protection members 71 and 72.
In addition, the wear powder generated upon contact enters the groove, so that the scattering of the wear powder is prevented, the contamination of the wear powder into the protective bearings 21 and 22 is reduced, and the life of the protective bearings 21 and 22 is extended. Is also possible.

以上のように、本実施例によれば、軸方向に延びる溝が設けられた保護部材により、従来よりもコストを抑えながら回転体の接触面の磨耗の増大を抑えるとともに、保護軸受の寿命を延ばすことが可能になる。   As described above, according to the present embodiment, the protective member provided with the groove extending in the axial direction suppresses the increase in wear of the contact surface of the rotating body while reducing the cost as compared with the conventional one, and extends the life of the protective bearing. It can be extended.

なお、上述した保護部材７２には、溝７２ａ以外に、図２（ｂ）に示すように、周方向に伸びた溝７２ｂも設けられている。この溝７２ｂにより、回転体１０の接触面の磨耗の増大をさらに抑えることができ、保護軸受２２の寿命をさらに延ばすことが可能となる。なお、この溝７２ｂと同様の溝を、保護部材７１にも設けてよい。この溝により、回転体１０の接触面の磨耗の増大をさらに抑えることができ、保護軸受２１の寿命をさらに延ばすことが可能となる。   In addition to the groove 72a, the protective member 72 described above is also provided with a groove 72b extending in the circumferential direction, as shown in FIG. The groove 72b can further suppress an increase in wear of the contact surface of the rotating body 10, and can further extend the life of the protective bearing 22. A groove similar to the groove 72b may also be provided in the protective member 71. By this groove, it is possible to further suppress an increase in wear on the contact surface of the rotating body 10 and further extend the life of the protective bearing 21.

図３は、本発明の実施例２に係る保護部材７２を示す図であり、図３（ａ）は、保護部材７２の上面図であり、図３（ｂ）は、保護部材７２の側断面図である。保護部材７２の形状は、外周面に段差が設けられた円筒形状となっている。保護軸受２２と嵌合しない保護部材７２の外周面の外径Ｄ２は、保護軸受２２の内輪外径Ｄ１より大きくなっている。つまり、保護軸受２２の内外輪の隙間が、保護部材７２の軸方向端部で覆われている。これにより、保護軸受２２内への磨耗粉の混入をさらに防ぐことができ、保護軸受２２の寿命をさらに延ばすことが可能となる。
なお、保護部材７２の軸方向端部が、保護軸受２２の内輪の端部を少なくとも覆うことによって、回転体１０を軸方向に支持することができる。
また、保護部材７１の外周面に、保護軸受２１を嵌合する凹部を設け、この凹部における軸方向の両端部により、保護軸受２１の内外輪の隙間を覆うようにしてもよい。この場合、軸方向の両端部それぞれの先端の外径が、保護軸受２１の内輪外径より大きくなっていればよい。 3A and 3B are diagrams showing a protection member 72 according to the second embodiment of the present invention, FIG. 3A is a top view of the protection member 72, and FIG. 3B is a cross-sectional side view of the protection member 72. FIG. The shape of the protection member 72 is a cylindrical shape in which a step is provided on the outer peripheral surface. The outer diameter D2 of the outer peripheral surface of the protective member 72 that does not fit with the protective bearing 22 is larger than the outer diameter D1 of the inner ring of the protective bearing 22. That is, the gap between the inner and outer rings of the protective bearing 22 is covered with the axial end portion of the protective member 72. As a result, it is possible to further prevent wear powder from entering the protective bearing 22 and further extend the life of the protective bearing 22.
The rotating member 10 can be supported in the axial direction by covering at least the end of the inner ring of the protective bearing 22 with the axial end of the protective member 72.
Further, a recess for fitting the protection bearing 21 may be provided on the outer peripheral surface of the protection member 71, and the gap between the inner and outer rings of the protection bearing 21 may be covered by both end portions of the recess in the axial direction. In this case, it is only necessary that the outer diameter of the tip of each end portion in the axial direction is larger than the outer diameter of the inner ring of the protective bearing 21.

図４は、本発明の実施例３に係る保護部材７２を示す図であり、図４（ａ）は、保護部材７２の上面図であり、図４（ｂ）は、保護部材７２の側断面図である。回転体１０と接触する保護部材７２の接触面の軸方向端部をテーパー形状としている。これにより、回転体１０と保護部材７２の接触面積を増やすことができ、回転体１０の接触面の磨耗の増大をさらに抑えることができる。
なお、回転体１０と接触する保護部材７１の接触面の軸方向端部をテーパー形状としてもよい。 4A and 4B are diagrams showing a protection member 72 according to a third embodiment of the present invention, FIG. 4A is a top view of the protection member 72, and FIG. 4B is a side cross-sectional view of the protection member 72. FIG. The axial end of the contact surface of the protection member 72 that contacts the rotating body 10 is tapered. Thereby, the contact area of the rotary body 10 and the protection member 72 can be increased, and the increase in wear of the contact surface of the rotary body 10 can be further suppressed.
In addition, it is good also considering the axial direction edge part of the contact surface of the protection member 71 which contacts the rotary body 10 as a taper shape.

１０ 回転体
２１、２２ 保護軸受
３０、４０ ラジアル磁気軸受
３１、４１ ラジアル電磁石
３２、４２ ラジアル電磁石ターゲット
３３、４３ ラジアルセンサ
３４、４４ ラジアルセンサターゲット
５０ スラスト磁気軸受
５１ スラストディスク
５２、５３ スラスト電磁石
５４ スラストセンサ
６０ モータ
７１、７２ 保護部材 10 Rotating body 21, 22 Protective bearing 30, 40 Radial magnetic bearing 31, 41 Radial electromagnet 32, 42 Radial electromagnet target 33, 43 Radial sensor 34, 44 Radial sensor target 50 Thrust magnetic bearing 51 Thrust disk 52, 53 Thrust electromagnet 54 Thrust Sensor 60 Motor 71, 72 Protection member

Claims (8)

回転体と、
前記回転体の周囲に設けられ、前記回転体を回転自在に非接触で支持する磁気軸受と、
前記回転体の周囲に設けられ、前記磁気軸受が前記回転体を支持しないときに前記回転体を支持する保護軸受と、
前記回転体と対向する前記保護軸受の内輪側に設けられ、前記回転体の軸方向に伸びる溝が前記回転体との対向面に形成された保護部材と、を備える磁気軸受装置。 A rotating body,
A magnetic bearing provided around the rotating body and rotatably supporting the rotating body in a non-contact manner;
A protective bearing that is provided around the rotating body and supports the rotating body when the magnetic bearing does not support the rotating body;
A magnetic bearing device comprising: a protective member provided on an inner ring side of the protective bearing facing the rotating body and having a groove extending in an axial direction of the rotating body formed on a surface facing the rotating body. 請求項１に記載の磁気軸受装置において、
前記軸方向における前記保護部材の端部は、前記軸方向における前記保護軸受の内輪の端部を少なくとも覆うことを特徴とする磁気軸受装置。 The magnetic bearing device according to claim 1,
The end portion of the protection member in the axial direction covers at least the end portion of the inner ring of the protection bearing in the axial direction. 請求項２に記載の磁気軸受装置において、
前記軸方向における前記保護部材の端部は、前記軸方向に沿って形成された、前記保護軸受の内外輪の隙間をさらに覆うことを特徴とする磁気軸受装置。 The magnetic bearing device according to claim 2,
An end portion of the protection member in the axial direction further covers a gap between inner and outer rings of the protection bearing formed along the axial direction. 請求項１乃至３のいずれか１項に記載の磁気軸受装置において、
前記保護部材には、前記回転体の周方向に伸びる溝がさらに形成されることを特徴とする磁気軸受装置。 The magnetic bearing device according to any one of claims 1 to 3,
The magnetic bearing device, wherein the protective member is further formed with a groove extending in a circumferential direction of the rotating body. 請求項１乃至４のいずれか１項に記載の磁気軸受装置において、
前記回転体と接触する前記保護部材の接触面のうち、前記軸方向における端部の形状をテーパー形状としたことを特徴とする磁気軸受装置。 In the magnetic bearing device according to any one of claims 1 to 4,
Of the contact surface of the protection member that contacts the rotating body, the end portion in the axial direction has a tapered shape. 請求項１乃至５のいずれか１項に記載の磁気軸受装置において、
前記回転体と接触する前記保護部材の接触面の硬度を、前記保護部材と接触する前記回転体の接触面の硬度より低くしたことを特徴とする磁気軸受装置。 The magnetic bearing device according to any one of claims 1 to 5,
The magnetic bearing device according to claim 1, wherein a hardness of a contact surface of the protective member that contacts the rotating body is lower than a hardness of a contact surface of the rotating member that contacts the protective member. 請求項１乃至６のいずれか１項に記載の磁気軸受装置において、
前記回転体を駆動するモータをさらに備えたことを特徴とする磁気軸受装置。 The magnetic bearing device according to any one of claims 1 to 6,
A magnetic bearing device further comprising a motor for driving the rotating body. 請求項１乃至７のいずれか１項に記載の磁気軸受装置を備えた真空ポンプ。   A vacuum pump comprising the magnetic bearing device according to claim 1.
JP2009154690A 2009-06-30 2009-06-30 Magnetic bearing device and vacuum pump including the same Expired - Fee Related JP5229499B2 (en)

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