JP5222667B2 - Light source device for exposure machine - Google Patents

Light source device for exposure machine Download PDF

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JP5222667B2
JP5222667B2 JP2008232764A JP2008232764A JP5222667B2 JP 5222667 B2 JP5222667 B2 JP 5222667B2 JP 2008232764 A JP2008232764 A JP 2008232764A JP 2008232764 A JP2008232764 A JP 2008232764A JP 5222667 B2 JP5222667 B2 JP 5222667B2
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light
honeycomb core
light source
source device
exposure
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JP2010066520A (en
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勉 植竹
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PROTEC CO., LTD.
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PROTEC CO., LTD.
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本発明はスクリーン製版および各種感光フイルム等で使用される露光機に用いられる露光機用光源装置に関する。   The present invention relates to a light source device for an exposure machine used in an exposure machine used in screen plate making and various photosensitive films.

従来、露光機用光源装置は光源の光を、反射鏡や特殊レンズ等を用いて露光面へ放射するように構成されている。 Conventionally, a light source device for an exposure machine is configured to radiate light from a light source to an exposure surface using a reflecting mirror, a special lens, or the like.

このように構成された露光面へ放射される光は、反射鏡で反射された光と光源の直接の光となるため、露光面へ放射される光には露光面に対して傾斜角のある乱反射、拡散光が比較的に多く含まれている。
また、光量ムラ（照度分布のムラ）によって、焼付画像の高寸法精度の露光が難しいという欠点があった。
この欠点を解消するために、露光面と光源との間の距離を長くして、直進光だけを使用できるようにする考えや、フルネルレンズを使用する等の平行光の装置が考えられるが、装置が大型化し、コスト高になるという欠点があった。
特になし The light emitted to the exposure surface configured in this way becomes the light reflected by the reflecting mirror and the direct light of the light source, so that the light emitted to the exposure surface has an inclination angle with respect to the exposure surface. It contains a relatively large amount of diffuse reflection and diffused light.
In addition, there is a drawback that it is difficult to expose a printed image with high dimensional accuracy due to unevenness in the amount of light (irradiance unevenness).
In order to eliminate this drawback, it is possible to consider a parallel light device such as a method of increasing the distance between the exposure surface and the light source so that only straight light can be used, or using a fullnel lens. However, there is a drawback that the apparatus becomes large and the cost is high.
nothing special

本発明は以上のような従来の欠点に鑑み、露光面へ直進光だけを放射することができる、小型で、構造が簡単で、容易に製造することができるとともに、発熱量を著しく低減させることができる露光機用光源装置を提供することを目的としている。     In view of the above-described conventional drawbacks, the present invention is capable of emitting only the straight light to the exposure surface, is small, has a simple structure, can be easily manufactured, and significantly reduces the amount of heat generated. It is an object of the present invention to provide a light source device for an exposure machine that can perform the above.

本発明の前記ならびにそのほかの目的と新規な特徴は次の説明を添付図面と照らし合わせて読むと、より完全に明らかになるであろう。
ただし、図面はもっぱら解説のためのものであって、本発明の技術的範囲を限定するものではない。 The above and other objects and novel features of the present invention will become more fully apparent when the following description is read in conjunction with the accompanying drawings.
However, the drawings are for explanation only and do not limit the technical scope of the present invention.

上記目的を達成するために、本発明は内壁面に光吸収膜が形成されたハニカムコアと、このハニカムコアの開口端部の一端部を覆うように取付けられたベース板と、このベース板の前記ハニカムコアの各筒内に位置し、該ハニカムコアの他端部より直進光だけを放射できるように取付けられた多数個のＲＧＢＬＥＤと、この多数個のＲＧＢＬＥＤを点灯させる制御回路を用いた点灯回路とで使用目的に最適な発光色にして使用することができる露光機用光源装置を構成している。 To achieve the above object, the present invention provides a honeycomb core having a light absorption film formed on the inner wall surface, a base plate attached so as to cover one end of the open end of the honeycomb core, lighting said located within each cylinder of the honeycomb core, using a plurality of RGBLED that only straight light from the other end portion attached to allow emission of the honeycomb core, a control circuit for lighting the plurality of RGBLED A light source device for an exposure machine that can be used with a circuit and having a light emission color that is optimal for the intended use is configured.

以上の説明から明らかなように、本発明にあっては次に列挙する効果が得られる。   As is clear from the above description, the present invention has the following effects.

（１）内壁面に光吸収膜を形成したハニカムコアとＲＧＢＬＥＤを用いているので、ハニカムコアより放射される光はほぼ直進光だけとなり、露光面へ直進光だけ放射することができる。
したがって、発熱量が少なく、高寸法精度の露光を行なうことができる。 (1) Since the honeycomb core having the light absorption film formed on the inner wall surface and the RGBLED are used, the light emitted from the honeycomb core is almost straight light, and only the straight light can be emitted to the exposure surface.
Therefore, the amount of heat generated is small, and exposure with high dimensional accuracy can be performed.

（２）前記（１）によって、露光面と光の放射端部であるハニカムコアの端部との間の距離がなくても、ハニカムコアによって露光面にほぼ均一に直進光を放射することができる。
したがって、均一な光の放射を行なうことができる。 (2) According to the above (1), even if there is no distance between the exposure surface and the end portion of the honeycomb core that is the light emission end portion, the honeycomb core can radiate straight light almost uniformly on the exposure surface. it can.
Therefore, uniform light emission can be performed.

（３）前記（１）によって、ハニカムコアの各筒内にベース板に取付けられたＲＧＢＬＥＤを位置させるだけでよいので、構造が簡単で容易に製造することができる。 (3) According to the above (1), it is only necessary to position the RGBLEDs attached to the base plate in each cylinder of the honeycomb core, so that the structure is simple and can be manufactured easily.

（４）前記（１）によって、ハニカムコアを用いているので十分な強度が得られるとともに、ハニカムコアの高さ寸法の設定によって、直進光だけハニカムコアの他端部より放射できるようにできる。
したがって、反射鏡を用いるものに比べ、容易に設計することができるとともに、安価に製造することができる。 (4) Since (1) uses a honeycomb core, sufficient strength can be obtained, and by setting the height dimension of the honeycomb core, only straight light can be emitted from the other end of the honeycomb core.
Therefore, it can be designed easily and can be manufactured at a lower cost than those using a reflecting mirror.

（５）請求項２も前記（１）〜（４）と同様な作用効果が得られるとともに、光吸収膜を光吸収塗料で形成するため、容易に光吸収膜を形成することができる。 (5) According to the second aspect of the present invention, the same effects as the above (1) to (4) can be obtained, and the light absorbing film can be easily formed because the light absorbing film is formed of the light absorbing paint.

以下、図面に示す本発明を実施するための最良の形態により、本発明を詳細に説明する。   Hereinafter, the present invention will be described in detail with reference to the best mode for carrying out the invention shown in the drawings.

図１ないし図７に示す本発明者が考えた露光機用光源装置において、１は本発明の露光機用光源装置で、この露光機用光源装置１は基板を用いたベース板２と、このベース板２の上面に固定された内壁面に、光吸収塗料で形成された光吸収膜３を有するハニカムコア４と、このハニカムコア４の各筒４ａ内に位置し、該ハニカムコア４の他端部より直進光だけを放射できるように、前記ベース板２に取付けられた使用目的に最適な発光色やピーク波長、ピーク光度の多数個のＬＥＤ５と、この多数個のＬＥＤ５を点灯させるスイッチ６、ＡＣ−ＤＣ変換器７、電流制限抵抗あるいは定電流ダイオード８を用いた商用電源に接続される点灯回路９とで構成されている。
なお、ベース板２より突出しているＬＥＤ５の寸法の２倍以上の高さ寸法のハニカムコア４を用いると、より直進光の放射光が得られる。 In the light source device for an exposure machine considered by the present inventor shown in FIGS. 1 to 7, reference numeral 1 denotes a light source device for an exposure machine according to the present invention. This light source device 1 for an exposure machine includes a base plate 2 using a substrate, A honeycomb core 4 having a light absorbing film 3 formed of a light absorbing paint on the inner wall surface fixed to the upper surface of the base plate 2, and the honeycomb core 4 are positioned in each cylinder 4 a, A plurality of LEDs 5 having light emission colors, peak wavelengths, and peak intensities that are attached to the base plate 2 and that are optimal for the purpose of use so that only straight light can be emitted from the end portions, and a switch 6 that lights the plurality of LEDs 5 , An AC-DC converter 7, and a lighting circuit 9 connected to a commercial power source using a current limiting resistor or a constant current diode 8.
In addition, when the honeycomb core 4 having a height that is twice or more the size of the LED 5 protruding from the base plate 2 is used, more radiated light can be obtained.

上記構成の露光機用光源装置１は点灯回路９を商用電源に接続し、スイッチ６をＯＮするとハニカムコア４の各筒４ａ内に位置するＬＥＤ５は点灯する。
点灯した多数個のＬＥＤ５の光のうち、ハニカムコア４の他端部より外方へ直進光は放射され、ハニカムコア４の内壁面に当たる傾斜光はハニカムコア４の内壁面の光吸収膜３によって吸収される。
このため、ハニカムコア４の他端部より外方へ突出する放射光は直進光だけとなり、高寸法精度の露光を行なうことができる。
[発明を実施するための異なる形態] In the light source device 1 for an exposure machine having the above-described configuration, the lighting circuit 9 is connected to a commercial power source, and when the switch 6 is turned on, the LEDs 5 located in each cylinder 4a of the honeycomb core 4 are lit.
Of the light emitted from the multiple LEDs 5, straight light is radiated outward from the other end of the honeycomb core 4, and the inclined light striking the inner wall surface of the honeycomb core 4 is absorbed by the light absorbing film 3 on the inner wall surface of the honeycomb core 4. Absorbed.
For this reason, the radiated light protruding outward from the other end of the honeycomb core 4 is only the straight light, and exposure with high dimensional accuracy can be performed.
[Different forms for carrying out the invention]

次に、図８ないし図１５に示す本発明を実施するための異なる形態につき説明する。なお、これらの本発明を実施するための異なる形態の説明に当って、前記本発明を実施するための最良の第１の形態と同一構成部分には同一符号を付して重複する説明を省略する。   Next, different modes for carrying out the present invention shown in FIGS. 8 to 15 will be described. In the description of these different modes for carrying out the present invention, the same components as those in the best mode for carrying out the present invention are designated by the same reference numerals and redundant description is omitted. To do.

図８ないし図１１に示す本発明者が考えた露光機用光源装置において、前記図１ないし図７に示す露光機用光源装置と主に異なる点は、ベース板２とハニカムコア４を収納する上部開口の箱状のケース本体１０と、このケース本体１０の開口部１０ａおよびハニカムコア４の上部を覆う透明材性のカバー１１とからなるケース体１２を用いた点で、このようにケース体１２で覆った露光機用光源装置１Ａにしても、前記本発明を実施するための最良の第１の形態と同様な作用効果が得られる。 8 to 11, the light source device for the exposure machine considered by the present inventor is different from the light source device for exposure machine shown in FIGS. 1 to 7 in that the base plate 2 and the honeycomb core 4 are accommodated. In this way, the case body 12 including the box-shaped case body 10 having an upper opening and the transparent material cover 11 covering the opening 10a of the case body 10 and the upper portion of the honeycomb core 4 is used. Even the light source device 1A for an exposure machine covered with 12 can obtain the same effects as those of the best first embodiment for carrying out the present invention.

図１２ないし図１５に示す本発明を実施するための第１の形態において、前記図８ないし図１１に示す露光機用光源装置と主に異なる点は、ハニカムコア４の各筒４ａ内にＲＧＢＬＥＤ１３を取付け、制御回路１４を点灯回路９Ａに用いた点で、このようにＲＧＢＬＥＤ１３を用いることにより、使用目的に最適な発光色にして使用することができる露光機用光源装置１Ｂにすることができる。 The first embodiment for carrying out the present invention shown in FIGS. 12 to 15 is mainly different from the light source device for exposure apparatus shown in FIGS. 8 to 11 in that each of the RGBLEDs 13 is provided in each tube 4a of the honeycomb core 4. By using the RGBLED 13 in this way, the light source device 1B for an exposure machine that can be used with a light emission color optimum for the intended use can be obtained. .

なお、ベース板２より突出しているＬＥＤ５、１３の高さ寸法に対して、ハニカムコア４の高さ寸法を２倍、３倍というように高く設定することにより、よりＬＥＤ５、ＲＧＢＬＥＤ１３のハニカムコア４より放射される光を、より直進光だけにすることができる。   Note that the honeycomb core 4 of the LED 5 and RGBLED 13 is made higher by setting the height dimension of the honeycomb core 4 to be twice or three times the height dimension of the LEDs 5 and 13 protruding from the base plate 2. The more radiated light can be more straight light.

本発明は発熱量が少なく、高寸法精度の露光を行なう場合に使用される露光機用光源装置を製造する産業で利用される。   INDUSTRIAL APPLICABILITY The present invention is used in the industry for manufacturing a light source device for an exposure machine that is used when exposure with high calorific value and a high dimensional accuracy is performed.

本発明者が考えた露光機用光源装置の平面図。 The top view of the light source device for exposure machines which this inventor considered . 本発明者が考えた露光機用光源装置の正面図。 The front view of the light source device for exposure machines which this inventor considered . 本発明者が考えた露光機用光源装置の底面図。 The bottom view of the light source device for exposure machines which this inventor considered . 図１の４−４線に沿う断面図。Sectional drawing in alignment with line 4-4 in FIG. 本発明者が考えた露光機用光源装置のハニカムコアの要部拡大断面図。 The principal part expanded sectional view of the honeycomb core of the light source device for exposure machines which this inventor considered . 本発明者が考えた露光機用光源装置の点灯回路の概略説明図。 The schematic explanatory drawing of the lighting circuit of the light source device for exposure machines which this inventor considered . 本発明者が考えた露光機用光源装置の放射光の説明図。Explanatory drawing of the emitted light of the light source device for exposure machines which this inventor considered . 本発明者が考えた露光機用光源装置の平面図。 The top view of the light source device for exposure machines which this inventor considered . 本発明者が考えた露光機用光源装置の正面図。 The front view of the light source device for exposure machines which this inventor considered . 図８の１０−１０線に沿う断面図。Sectional drawing which follows the 10-10 line of FIG. 本発明者が考えた露光機用光源装置の要部拡大断面図。 The principal part expanded sectional view of the light source device for exposure machines which this inventor considered . 本発明を実施するための第１の形態の平面図。The top view of the 1st form for carrying out the present invention. 本発明を実施するための第１の形態の正面図。The front view of the 1st form for carrying out the present invention. 図１２の１４−１４線に沿う断面図。Sectional drawing which follows the 14-14 line | wire of FIG. 本発明を実施するための第１の形態の要部拡大断面図。The principal part expanded sectional view of the 1st form for implementing this invention.

１、１Ａ、１Ｂ：露光機用光源装置、
２：ベース板、 ３：光吸収膜、
４：ハニカムコア、 ５：ＬＥＤ、
６：スイッチ、 ７：ＡＣ−ＤＣ変換器、
８：電流制限抵抗あるいは定電流ダイオード、
９、９Ａ：点灯回路、 １０：ケース本体、
１１：カバー、 １２：ケース体、
１３：ＲＧＢＬＥＤ、 １４：制御回路。 1, 1A, 1B: Light source device for exposure machine,
2: base plate, 3: light absorption film,
4: Honeycomb core, 5: LED,
6: Switch, 7: AC-DC converter,
8: Current limiting resistor or constant current diode,
9, 9A: lighting circuit, 10: case body,
11: Cover, 12: Case body,
13: RGBLED, 14: control circuit.

Claims (3)

内壁面に光吸収膜が形成されたハニカムコアと、このハニカムコアの開口端部の一端部を覆うように取付けられたベース板と、このベース板の前記ハニカムコアの各筒内に位置し、該ハニカムコアの他端部より直進光だけを放射できるように取付けられた多数個のＲＧＢＬＥＤと、この多数個のＲＧＢＬＥＤを点灯させる制御回路を用いた点灯回路とからなり、使用目的に最適な発光色にして使用することができることを特徴とする露光機用光源装置。 A honeycomb core having a light absorbing film formed on the inner wall surface, a base plate attached so as to cover one end of the opening end of the honeycomb core, and the base plate is located in each cylinder of the honeycomb core, and plurality of RGBLED that only straight light from the other end portion attached to allow emission of the honeycomb core, Ri Do and a lighting circuit using a control circuit to light this plurality of RGBLED, ideal for the intended use A light source device for an exposure machine, characterized in that it can be used in a luminescent color . ハニカムコアの内壁面に形成された光吸収膜は内壁面へ照射される光を反射することなく吸収できる光吸収塗料で形成されていることを特徴とする請求項１記載の露光機用光源装置。 2. The light source device for an exposure machine according to claim 1, wherein the light absorption film formed on the inner wall surface of the honeycomb core is formed of a light absorbing paint capable of absorbing the light irradiated on the inner wall surface without reflecting. . ベース板はハニカムコアの一端部の開口部を覆うように取付けられた基板であることを特徴とする請求項１記載の露光機用光源装置。 2. The light source device for an exposure apparatus according to claim 1, wherein the base plate is a substrate attached so as to cover an opening at one end of the honeycomb core.
JP2008232764A 2008-09-11 2008-09-11 Light source device for exposure machine Expired - Fee Related JP5222667B2 (en)

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KR101728532B1 (en) * 2015-11-16 2017-04-19 지에스옵틱스 주식회사 Apparatus of exposure for scan type using LED light source
WO2019131144A1 (en) * 2017-12-26 2019-07-04 東京エレクトロン株式会社 Light irradiation device

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JPH0822081A (en) * 1994-07-08 1996-01-23 Fuji Photo Film Co Ltd Photographic printer and film scanner
JPH08201930A (en) * 1995-01-27 1996-08-09 Fuji Photo Film Co Ltd Exposing device
JPH08234071A (en) * 1995-02-27 1996-09-13 Kyocera Corp Image device
JP2001091877A (en) * 1999-07-21 2001-04-06 Fuji Photo Film Co Ltd Exposure head
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