JP5207934B2 - Ceramic member assembly and conveying member having the same - Google Patents

Description

  The present invention relates to an assembly of ceramic members, and in particular, a transport member having an assembly of ceramic members used to support and transport a glass substrate that has been enlarged in order to increase production efficiency. About.

  In recent years, in order to increase production efficiency, the size of a glass substrate, which is a main member for making a flat display (FPD) such as a liquid crystal television (LCD), a plasma television (PDP), and a notebook personal computer, is increasing. The size of the glass substrate, which is said to be the 10th generation recently, is 2850 mm x 3050 mm, and the conveying member that conveys the enlarged glass substrate has an elongated shape called an arm or fork, and is longer than the glass substrate. There is a need.

  Conventionally, ceramic members that are excellent in corrosion resistance, heat resistance, and rigidity have been used for glass substrate transport members. However, when it becomes a ceramic member having a length of more than 3 to 4 m, a molded body produced from a ceramic raw material. A relatively short ceramic of 1 to 2 m because the shape is warped or cracked or broken on the surface or inside due to drying after molding or firing for forming the molded body into a sintered body. A ceramic member assembly is used in which a plurality of members are produced and fastened by fastening members.

  5A and 5B show a conventional ceramic member assembly. FIG. 5A is a plan view, FIG. 5B is a side view, and FIG. 5C is a cross-sectional view taken along line XX ′ in FIG. is there.

  The ceramic member assembly 20 shown in FIG. 5 includes a fastening member 24 composed of bolts 24a and nuts 24b, and a ceramic member 22 having through holes 25. The bolts 24a are connected to the through holes 25 of the plurality of ceramic members 22. And is assembled by being fastened by a nut 24b, and using a plurality of such ceramic member assemblies 20, a glass substrate is placed on the surface of the ceramic member 22 shown in FIG. It is used to

  In the ceramic member 22 assembly 20, the edge portion 22a of the ceramic member 22 that comes into contact with the fastening member 24 is a portion that is easily chipped by the pressing force received from the head of the bolt 24a and the nut 24b during fastening. Further, when the assembly 20 of the ceramic member 22 is used as a member for transporting a heavy glass substrate, the stress applied to the assembly 20 and the pressing force received from the head of the bolt 24a and the nut 24b, There was a problem that cracks and breakage were likely to occur near the opening of the through hole 25 of the ceramic member 22. Therefore, in order to solve this problem, fastening is performed by sandwiching a metal plate between the ceramic member 22 and the fastening member 24.

  6A and 6B show another example of a conventional ceramic member assembly. FIG. 6A is a plan view, FIG. 6B is a side view, and FIG. 6C is a YY ′ line in FIG. FIG.

  As described above, the assembly 30 of the conventional ceramic member 32 assembled with the metal plate 30 interposed therebetween includes a fastening member 34 including a bolt 34a and a nut 34b, a ceramic member 32 having a through hole 35, and a through hole 35. The metal plate 33 having the overlapping holes 33a is fastened with bolts 34a to the holes 33a of the metal plate 33 and the through holes 35 of the plurality of ceramic members 32 with nuts 34b. It is assembled.

In Patent Document 1, as a method of fastening ceramic members together, a fastening member made of a bolt and a nut is made of ceramics, and an intermediate member that softens at a temperature higher than room temperature is mounted on the fastening member. A method of fastening a ceramic member that has undergone a softening process of heat softening and cooling hardening has been proposed. If ceramic members are fastened together using this fastening method, the possibility of local stress concentration on the fastening member occurring even when an impact load is applied to the fastening portion or the loss of bolt grooves, etc. are eliminated. The bond strength is greatly improved.
JP 59-190510 A

  However, the ceramic member assembly 30 shown in FIG. 6 and the ceramic member fastened by the fastening method of Patent Document 1 are ceramics in which the ceramic member 22 shown in FIG. 5 is fastened only by the fastening member 24 including the bolt 24a and the nut 24b. Compared to the member assembly 20, since the head of the bolt 34 a and the nut 34 b are not directly in contact with the ceramic member 32, the metal plate 33 is sandwiched or a hardened interposition member is interposed. Due to the pressing force received from the head of the bolt 34a and the nut 34b, the edge portion 32a around the opening of the through hole 35a of the ceramic member 32 that comes into contact with the fastening member 34 is not easily chipped. Further, when this ceramic member assembly 30 is used as a heavy glass substrate transporting member, the ceramic 30 is subjected to the stress applied to the assembly 30 and the pressing force received from the head of the bolt 34a and the nut 34b. Although it is possible to reduce the occurrence of cracks and breakage in the vicinity of the opening of the through-hole 35 of the member 32, it is possible to reduce the occurrence of cracks and breakage sufficiently, and an assembly of a ceramic member that can withstand long-term use and There is a need for a conveying member using this.

  The present invention has been devised to solve the above-described problem, and the edge portion around the opening of the through hole of the ceramic member is missing due to the pressing force received from the fastening member when fastening a plurality of ceramic members. An assembly of few ceramic members and a glass substrate that is a heavy object having the assembly is brought close to the opening of the through hole of the ceramic member by a stress applied to the assembly and a pressing force received from the fastening member. It is an object of the present invention to provide a conveying member that is less likely to crack or break.

An assembly of ceramic members according to the present invention includes a plurality of ceramic members arranged with corresponding through holes stacked thereon, a metal plate disposed on a surface of the ceramic member and having a hole overlapping the through hole, the holes and the passed through the through-holes are closed and a fastening member for pressing said metal plate at the head, the ceramic member, the opening of the through hole is larger than the head of the fastening member with said surface And the opening of the through hole on the surface is compared with other parts of the through hole.
The edge portion is formed to be large, and the metal plate is fastened only in contact with the upper surface of the edge portion .

  Moreover, the ceramic member assembly of the present invention has a hollow portion coaxial with the through-hole, wherein the ceramic member has a larger diameter in the middle of the through-hole. It is characterized by.

  The ceramic member assembly of the present invention is characterized in that, in any one of the above-described configurations, a plurality of the through holes are arranged in the ceramic member and the openings are continuous between the through holes. To do.

  Moreover, the conveying member of the present invention is characterized by having an assembly of ceramic members having any one of the above-described configurations.

  Moreover, the conveyance member of the present invention is characterized in that, in the above configuration, a support member is sandwiched between the ceramic members.

According to the ceramic member assembly of the present invention, a plurality of ceramic members arranged with corresponding through holes stacked thereon, a metal plate arranged on the surface of the ceramic member and having holes overlapping with the through holes, and the holes and passed through the through-holes are closed and a fastening member for pressing a metal plate in the head, a ceramic member, surface is formed larger than the head openings fastening member through hole, and the through surface The opening of the hole is formed larger than the other part of the through hole to form an edge portion, and the metal plate is fastened only in contact with the upper surface of the edge portion, so that the fastening member is fastened. The pressing force received by the ceramic member is applied to the surface in contact with the metal plate other than the opening of the through hole of the ceramic member, and the pressing force received by the ceramic member from the fastening member due to the bending of the metal plate is Since it is distributed around the mouth, the stress applied to the edge around the opening of the through hole of the ceramic member can be reduced, so that multiple ceramic members can be fastened well without missing the edge of the ceramic member. And maintain the assembled state.

  Moreover, according to the ceramic member assembly of the present invention, when the ceramic member has a hollow portion coaxial with the through hole in the middle of the through hole, the strength is greatly reduced. Thus, the weight of the ceramic member assembly can be reduced.

  Further, according to the ceramic member assembly of the present invention, when a plurality of through holes are arranged in the ceramic member and there are continuous openings between these through holes, the strength of the ceramic member is not greatly reduced. The time for grinding so that the opening of the through hole is larger than the head of the fastening member can be shortened compared with the case of processing each individual through hole. Also, if these through holes and openings are arranged in the length direction of the ceramic member, the cross-sectional shape perpendicular to the length direction of the ceramic member will be the same, so molding by extrusion molding method Therefore, it is not necessary to perform grinding to form the opening of the through hole larger than the head of the fastening member, and the manufacturing cost can be reduced.

  Moreover, according to the conveying member of the present invention, since the ceramic member assembly of the present invention is provided, it is possible to suppress the occurrence of cracks and breakage in the vicinity of the opening of the through hole of the ceramic member.

  Further, according to the conveying member of the present invention, when the supporting member is sandwiched between the ceramic members, various specifications can be accommodated by combining with the supporting member, and a heavy glass substrate is conveyed. In this case, it is possible to suppress the occurrence of cracks and breakage in the vicinity of the opening of the through hole of the ceramic member due to the stress applied to the assembly and the pressing force received from the fastening member, and to provide a conveying member that can withstand long-term use. be able to.

  Hereinafter, an example of an embodiment of an assembly of ceramic members according to the present invention will be described with reference to the drawings.

  FIG. 1 shows an example of an embodiment of an assembly of ceramic members according to the present invention. (A) is a plan view, (b) is a side view, and (c) is an AA of (a). It is sectional drawing in a line.

  As shown in FIGS. 1A to 1C, a ceramic member assembly 1 according to the present invention includes a fastening member 4 including a bolt 4a and a nut 4b, a corresponding through hole 5 and an opening 6. 5 and the metal plate 3 having a hole 3 a overlapping the through hole 5, and the corresponding hole 3 a of the metal plate 3 and the corresponding through hole 5 of the plurality of ceramic members 2. It is assembled by being fastened by a nut 4b through a bolt 4a of the fastening member 4. At this time, it is important that the opening 6 of the through hole 5 on the surface of the ceramic member 2 is larger than the head of the fastening member 4. The head of the fastening member 4 refers to the head of the bolt 4a and the nut 4b.

  Thus, the opening 6 of the through-hole 5 is larger than the head of the fastening member 4, that is, the head of the bolt 4a and the nut 4b, so that the head of the bolt 4a and the nut 4b and the metal plate 3 are connected. The surface of the metal plate 3 facing the ceramic member 2 corresponding to the contacting portion is not in contact with the ceramic member 2.

  Therefore, the pressing force received from the head of the bolt 4 a and the nut 4 b during fastening is applied to the surface of the ceramic member 2 excluding the opening 6 of the through hole 5 in contact with the metal plate 3, and the metal plate 3 is located inside the opening 6. Since the pressing force received from the head of the bolt 4a and the nut 4b by bending is distributed around the opening 6 of the ceramic member 2, the stress applied to the edge portion 2a around the opening 6 of the through hole 5 of the ceramic member 2 Therefore, the plurality of ceramic members 2 can be well fastened and assembled without indispensable the edge portion 2a of the ceramic member 2. Here, the edge portion 2a of the ceramic member 2 is preferably chamfered on the C surface, the R surface, or the like in that the stress applied to the edge portion 2a can be further reduced.

  The material of the ceramic member 2 used in the ceramic member assembly 1 of the present invention is ceramics such as alumina, yttria, YAG (yttrium-aluminum-garnet), zirconia, cordierite, mullite, silicon nitride and silicon carbide. Alternatively, a composite composed of two or more of these ceramics can be used. The ceramic member assembly 1 of the present invention may be assembled using the same ceramic member 2 or may be assembled using different ceramic members 2.

  Further, it is considered that any metal material can be applied as the material of the metal plate 3 used in the ceramic member assembly 1 of the present invention. However, the metal plate 3 is highly rigid and excessively bent when subjected to a pressing force from the fastening member 4. It is preferable to use a hard material. From this viewpoint, stainless steel (SUS), carbon tool steel (SK), and alloy tool steel (SKD) are preferably used.

  Further, the fastening member 4 used in the ceramic member assembly 1 of the present invention has a maximum diameter of the head smaller than the opening 6, and the diameter of the portion excluding the head is a hole of the through hole 5 and the metal plate 3. A bolt 4a having a length smaller than the inner diameter of 3a and capable of being fastened by arranging a plurality of ceramic members 2 on both sides of the ceramic member 2 and excluding the head, and a maximum diameter of the head being an opening 6 A smaller nut 4b is used.

  FIG. 2 shows another example of the embodiment of the ceramic member assembly of the present invention, (a) is a plan view, (b) is a side view, and (c) is B of (a). It is sectional drawing in the -B 'line.

  In the ceramic member assembly 1 of the present invention shown in FIG. 2, the ceramic member 2 has a hollow portion 7 coaxial with the through hole 5, in which the diameter of the through hole 5 is increased, in the middle of the through hole 5. Around the hollow portion 7, there are so-called ribs 8 which are solid portions. With such a structure, the weight of the ceramic member assembly 1 can be reduced without significantly reducing the strength. At this time, depending on the size of the hollow portion 7, there is a concern that the strength of the ceramic member 2 near the through hole 5 may be reduced. However, the metal plate is pressed by the pressing force received from the fastening member 4 during fastening. The stress applied to the surface of the ceramic member 2 through 3 is applied to the rib 8 which is a solid part parallel to the through hole 5, and the rib 8 is solid and thus has sufficient strength. The rib 8 is cracked, and there is little possibility that the ceramic member 2 is damaged due to the crack.

  The hollow portion 7 provided in the middle of the through-hole 5 extends between the through-holes 5 arranged side by side, in addition to the through-holes 5 that are formed in a coaxial cylindrical shape by increasing the diameter of the through-hole 5. It may be considered as a hollow portion coaxially formed with the through-hole 5 in which the diameter of the through-hole 5 is increased as viewed in the cross section of the through-hole 5 formed continuously.

  FIG. 3 shows a plurality of examples of embodiments of openings formed in the surface of the ceramic member of the ceramic member assembly of the present invention, (a) and (b) are plan views, and (c) and (D) is a top view and sectional drawing.

  In the example shown in FIGS. 3A and 3B, a square or circular opening 6 is formed for each through hole 5 on the surface of the ceramic member 2, and in the example shown in FIG. 3C, there is a width on the surface of the ceramic member 2. A rectangular opening 6 corresponding to two through-holes 5 arranged in the direction is formed, and in the example shown in (d), the opening 6 penetrates the front and rear ends in the length direction on the surface of the ceramic member 2. It is formed continuously between the holes 5. Comparing the structure of the ceramic member 2 in the example shown in FIGS. 3A to 3D, the metal between the adjacent through-holes 5 as shown in FIG. In the example shown in FIGS. 3A, 3 </ b> B, and 3 </ b> D having a contact surface with the plate 3, it can withstand a larger pressing force than that received from the fastening member 4 at the time of fastening. Further, the circular opening 6 of the example shown in FIG. 3B is easier to form than the rectangular opening 6 of the example shown in FIG. 3A, and the pressing force transmitted through the metal plate 3 is more ceramic. 2 can be uniformly received by the annular edge portion 2 a around the opening 6, which is preferable in that the edge portion 2 a is not easily chipped. In the example shown in FIG. 3C, since the openings 6 are continuous between the through-holes 5 arranged side by side, the area of the opening 6 is large, and this opening is caused by the pressing force received from the fastening member 4 at the time of fastening. Although the metal plate 3 arranged so as to cover 6 is easily bent, the metal plate 3 having high rigidity may be used so as not to be excessively bent, and the openings 6 are continuous between the through holes 5 arranged side by side. The grinding time can be shortened as compared with the ceramic member 2 in the example shown in FIGS. 3A and 3B. Further, as in the example shown in FIG. 3D, when a plurality of through holes 5 are arranged in the length direction of the ceramic member 2 and there are continuous openings 6 between these through holes 5, FIG. Since the cross-sectional shape perpendicular to the length direction of the ceramic member 2 is the same as shown in the cross-sectional view along the line DD ′ shown side by side in (d), extrusion molding having the same cross-sectional shape in the extrusion direction Grinding that greatly increases the manufacturing cost as required for the ceramic member 2 of the example shown in FIGS. It is not necessary to process and form the opening 6 on the surface. Therefore, in order to reduce the manufacturing cost while the ceramic member 2 can withstand the pressing force received from the fastening member 4 at the time of fastening, the ceramic member 2 is preferably formed using an extrusion method. Moreover, if the extrusion molding method is used, the hollow portion 7 that is coaxial with the through-hole 5 and can be regarded as having a larger diameter when viewed in cross-section in the middle of the through-hole 5 can be formed at the same time, so that the strength is greatly reduced. In addition, the weight can be reduced.

  Next, the example of embodiment of the conveyance member of this invention containing the assembly 1 of the ceramic member of this invention is demonstrated.

  4A and 4B show an example of an embodiment of a conveying member according to the present invention. FIG. 4A is a plan view and FIG. 4B is a cross-sectional view taken along line E-E ′.

  The conveying member 10 of this example includes a supporting member 9 sandwiched between ceramic members 2 of the ceramic member assembly 1, that is, the supporting member 9 is disposed between the ceramic members 2, Since the hole 3a, the through hole 9a of the support member 9 and the through hole 5 of the ceramic member 2 are assembled by being fastened by the nut 4b through the bolt 4a of the fastening member 4, the length of the support member 9 in the direction of the fastening member 4 By adjusting the height according to the size of the conveyed product, it is possible to load conveyed items of various sizes from small to large.

  In addition, although the supporting member 9 is sandwiched between the ceramic members 2 in the example of the conveying member 10 illustrated in FIG. 4, the supporting member 9 is not necessarily required as the conveying member 10. Needless to say, the ceramic members 2 may be directly stacked without using any other material.

  According to the conveying member 10 of the present invention, as in the case where the supporting member 9 is not provided, the stress applied to the assembly 1 and the head and nut of the bolt 4a when a heavy glass substrate is conveyed. Since the pressing force received from 4b can suppress cracks and breakage in the vicinity of the opening 6 of the through-hole 5 of the ceramic member 2, the conveying member 10 that can withstand long-term use can be obtained. it can. In addition, as for the conveyance member 10 which has arrange | positioned and assembled the support member 9 between the ceramic members 2, the up-down direction in Fig.4 (a) is made into the left-right direction at the time of use, and the figure of the ceramic member 2 and the support member 9 is shown. It is used so that the surface shown to 4 (a) becomes a mounting surface.

  The support member 9 can be made of either metal or ceramic. However, considering the weight reduction of the transport member 10 and the heat resistance that allows heat treatment while the transported object is loaded, the support member 9 is made of ceramic. It is preferable to do this. As an example of the embodiment of the conveying member 10 of the present invention, FIG. 4 shows an example in which the supporting member 9 is arranged between the two ceramic members 2, but the conveying member 10 of the present invention is assembled. Needless to say, the members are not limited to this content, and various modifications may be made without departing from the scope of the invention. As described above, the support member 9 may not be used. For example, the support member 9 may be arranged between the ceramic members 2 arranged in a row and assembled to form a conveying member. It is also possible to arrange a long support member 9 between the ceramic members 2 to provide a conveying member corresponding to a long conveyed object. Further, even if the conveying member is constituted by using a plurality of ceramic member assemblies 1 shown in FIGS. 1 and 2, the substrate can be conveyed.

  Next, a method for manufacturing the ceramic member assembly 1 of the present invention will be described below.

  First, the ceramic member 2 is prepared by preparing a ceramic raw material having a purity of 90% or more and an average particle diameter of about 1 μm, and adding a predetermined amount of a sintering aid, a binder, a solvent, a dispersing agent and the like to form a slurry. Thereafter, this is granulated by a spray granulation method (spray drying method) to obtain a secondary raw material. Then, the secondary raw material is put into a rubber mold having a predetermined shape and molded by an isostatic press molding method (rubber press method). Thereafter, the molded body is removed from the rubber mold and cut into a predetermined shape. Apply. Next, the ceramic member 2 is obtained by placing in a firing furnace and firing at a predetermined temperature, and grinding the resulting sintered body to provide the through holes 5 and the openings 6.

  As another method for producing the ceramic member 2, a ceramic raw material having a purity of 90% or more and an average particle diameter of about 1 μm is prepared, and a predetermined amount of a sintering aid, a binder and a solvent are added thereto. Mix and stir with a stirring mixer. Furthermore, after kneading with a kneader to obtain a kneaded material, the kneaded material is extruded using an extrusion machine equipped with a mold capable of extruding into a predetermined shape. In this way, by attaching a mold having a predetermined shape and extruding and forming, a hollow portion that can be regarded as a coaxial hollow portion 7 in which the diameter of the through hole 5 is increased in the cross section of the through hole 5 is provided. The openings 6 that are continuous between the through-holes 5 arranged on the surface of the ceramic member 2 can be provided without being formed or by cutting the formed body to provide the openings 6.

  Next, the metal plate 3 is cut into a predetermined shape from a metal plate material having high rigidity and is difficult to bend, and a hole 3a having the same inner diameter as the through hole 5 provided in the ceramic member 2 is formed using a drilling machine. The hole 3a may be opened by punching. Further, as the fastening member 4, the maximum diameter of the head is smaller than the opening 6, and the diameter of the portion excluding the head is smaller than the inner diameter of the through-hole 5 and the hole 3 a of the metal plate 3, and the portion excluding the head A bolt 4 a having a length capable of being fastened by arranging a plurality of ceramic members 2 on both sides of the ceramic member 2 and a nut 4 b having a maximum head diameter smaller than the opening 6 is prepared.

  Then, a plurality of ceramic members 2 are arranged so that the corresponding through holes 5 overlap, and then the metal plate 3 is arranged so that the through holes 5 and the holes 3a of the metal plate 3 overlap, and the holes 3a and the through holes 5 are arranged. The ceramic member assembly 1 of the present invention can be obtained by fastening the bolt 4a with the bolt 4a and the nut 4b, which are the fastening members 4.

  The ceramic member assembly 1 of the present invention thus obtained has a corresponding through-hole 5, a ceramic member 2 arranged so as to overlap the corresponding through-holes 5, and the surface of the ceramic member 2. And a metal plate 3 having a hole 3a that overlaps with the through-hole 5, and a fastening member 4 that is passed through the hole 3a and the through-hole 5 and presses the metal plate 3 at the head, and the surface of the ceramic member 2 Since the opening 6 of the through hole 5 is larger than the head of the fastening member 4, the head of the bolt 4a, which is the fastening member 4, and the portion where the nut 4b and the metal plate 3 are in contact with each other. The surface of the metal plate 3 facing the ceramic member 2 does not contact the ceramic member 2. Therefore, the pressing force received from the head of the bolt 4a and the nut 4b at the time of fastening is applied to the surface (surface around the opening 6) where the ceramic member 2 except the opening 6 of the through hole 5 is in contact with the metal plate 3. Since the pressing force received from the head portion of the bolt 4a and the nut 4b due to appropriate bending of the bolt 4a is dispersed around the opening 6 of the through hole 5 of the ceramic member 2, the edge portion 2a around the opening 6 of the ceramic member 2 is distributed. Therefore, a plurality of ceramic members 2 can be well fastened and assembled without causing cracks or breakage from the edge 2a of the ceramic member 2.

  Details of the embodiments of the present invention will be described below.

Example 1
The ceramic member assembly 1 of the example shown in FIG. 1 is manufactured, and the presence or absence of a chip in the edge portion 2a around the opening 6 of the through hole 5 of the ceramic member 2 due to the pressing force received from the fastening member 4 at the time of fastening is confirmed. I did it.

  First, a commercially available alumina primary material having a purity of 95% and an average particle diameter of 1 μm is prepared, and a sintering aid made of oxides of Ca, Si, and Mg with respect to 100% by mass of the primary material. 1 to 5% by mass, 1 to 1.5% by mass of a binder such as PVA, 100% by mass of solvent, and 0.5% by mass of a dispersant, and put in a stirrer container to mix and stir After making the slurry, this was granulated by a spray granulation method (spray drying method) to obtain a secondary raw material. Then, this secondary raw material is put into a rubber mold having a predetermined shape and molded by an isostatic press molding method (rubber press method). Thereafter, the molded body is removed from the rubber mold and cut into a predetermined shape. Was given. Next, the molded body subjected to the cutting process was placed in a firing furnace and fired at a firing temperature of 1680 ° C. in an air atmosphere.

  After firing, a plurality of ceramic members 2 constituting the assembly 1 are subjected to diameters on the front and rear portions of the surface in contact with the metal plate 3 (portions on both sides of the ceramic members 2 arranged in an overlapping manner). Was provided with a circular opening 6 having a diameter of 40 mm and a depth of 3 mm, and a through hole 5 having an inner diameter of 13 mm in the center of the circular opening 6. It should be noted that when the plurality of ceramic members 2 are fastened, the length of the overlapping portion is 50 mm, the distance from the front end or the rear end of each ceramic member 2 is 25 mm, By performing grinding to form the opening 6 and the through-hole 5 around the position where the distance is 25 mm, from a square alumina sintered body having a length of 1500 mm and a section perpendicular to the length direction of 50 mm on a side. A ceramic member 2 was obtained.

  Next, a square plate having a thickness of 3 mm and a side of 50 mm is cut out from the stainless steel plate material, and a hole 3a having an inner diameter of 13 mm similar to the through-hole 5 of the ceramic member 2 is formed in the center of the plate using a drilling machine. The metal plate 3 was obtained by processing.

  Next, as the fastening member 4, the thickness of the head is 10 mm, the length of the portion excluding the head is 120 mm, and the maximum diameter of the head is 21.9 mm. An M12 hexagon nut 4b having a maximum head diameter of 21.9 mm was prepared. Then, three ceramic members 2 produced by the above manufacturing method, four metal plates 3 and two sets of fastening members 4 are used and assembled as shown in FIG. An example of the ceramic member assembly 1 was obtained.

  Next, a conventional ceramic member assembly shown in FIG. 6 was produced as a comparative example. This manufacturing method was performed using the same method and the same member as the ceramic member assembly 1 of the present invention except that the opening 6 was not provided in the ceramic member 2.

  Then, using the ceramic member assembly 1 of the embodiment of the present invention and the ceramic member assembly of the comparative example, while confirming that the length of the bolt 4a protruding from the nut 4b is the same, the fastening member 4 is tightened to increase the pressing force, and then the bolt 4a is loosened and the metal plate 3 is removed to open the through hole 5 of the ceramic member 2 which is a constituent member of the ceramic member assembly 1 of the present invention. The presence or absence of chipping in the peripheral edge portion of the through hole of the ceramic member which is a constituent member of the peripheral edge portion 2a of 6 and the ceramic member assembly of the comparative example was confirmed. In this evaluation test, “assembly”, “retightening”, and “confirmation of presence / absence of chipping” were repeatedly performed until any chipping was confirmed.

  As a result, it was confirmed that the ceramic member assembly of the comparative example was chipped in the edge portion of the ceramic member first. As a result, the ceramic member assembly 1 according to the embodiment of the present invention is disposed on the surface of the ceramic member 2 with the corresponding through-holes 5 overlapped, and overlaps with the through-holes 5. An assembly of a ceramic member 2 having a metal plate 3 having a hole 3a and a fastening member 4 that passes through the hole 3a and the through-hole 5 and presses the metal plate 3 at the head. Since the opening 6 of the through-hole 5 is larger than the head of the fastening member 4, the pressing force received from the fastening member 4 during fastening is such that the ceramic member 2 excluding the opening 6 of the through-hole 5 is in contact with the metal plate 3. Since the pressing force received from the fastening member 4 due to the metal plate 3 being appropriately bent is dispersed around the opening 6 of the through hole 5 on the contact surface, the stress applied to the edge 2a around the opening 6 is reduced. Can be In, without causing cracks or damage from the surrounding edge portion 2a of the opening 6 of the through-hole 5 of the ceramic member 2, that a plurality of ceramic members 2 can be assembled satisfactorily concluded was confirmed.

(Example 2)
Next, the ceramic member assembly 1 of the example of the present invention shown in FIG. 2 was manufactured, and the presence or absence of cracks in the rib 8 portion of the ceramic member 2 was confirmed.

  First, a commercially available alumina primary material having a purity of 95% or more and an average particle diameter of 1 μm used in Example 1 was prepared, and Ca, Si, Mg of 100% by mass of the primary material was used. After weighed 1 to 5% by mass of a sintering aid made of oxide, 5 to 10% by mass of a binder such as methylcellulose, and 15% by mass of solvent, and after mixing and stirring in a container of a stirrer Further, kneading was performed to obtain a clay for extrusion molding. Next, this kneaded material was molded using an extrusion machine equipped with a mold capable of extruding it into a predetermined shape to obtain a molded body. Then, this compact was placed in a firing furnace and fired at a firing temperature of 1680 ° C. in an air atmosphere.

  After firing, grinding was performed to provide the openings 6 and the through holes 5 as described above, and a plurality of ceramic members 2 having a length of 1500 mm, a height of 50 mm, and a width of 140 mm were obtained. As shown in the sectional view of FIG. 2 (c), the ceramic member 2 has two hollow portions 7 having a length of 20 mm and a width of 40 mm, and a rib having a thickness of 20 mm between the hollow portions 7. 8 was assumed to have. In addition, at the front and rear ends of the surface of the ceramic member 2 in contact with the metal plate 3, there are two openings 6 each having a square with a side of 40 mm and a depth of 3 mm and through holes 5 with an inner diameter of 13 mm. The distance from the front end or the rear end of the ceramic member 2 is 25 mm, and the distance from the end face on the width side of the ceramic member 2 is 35 mm so that the overlapping portion when the plurality of ceramic members 2 are fastened is 50 mm. It is assumed that the opening 6 and the through hole 5 are ground with the position of the center.

  Next, for the metal plate 3, a rectangular plate having a thickness of 3 mm, a length of 50 mm, and a width of 140 mm is cut out from a stainless steel plate material, and a hole with a 13 mm inner diameter overlapping the through hole 5 of the ceramic member 2 using a drilling machine. The metal plate 3 was obtained by performing a process of opening 3a at two locations on the plate. Further, for the fastening member 4, the same hexagon bolt 4a and nut 4b as in Example 1 were prepared.

  Then, three ceramic members 2 produced by the above-described manufacturing method, four metal plates 3 and four sets of fastening members 4 are assembled as shown in FIG. An example ceramic member assembly 1 was obtained.

  Next, the ceramic member assembly 1 was manufactured using the same method and the same members as described above except that the ceramic member 2 did not have the hollow portion 7, that is, was solid. The ceramic member assembly 1 is also within the scope of the present invention, but for the purpose of identification, a hollow ceramic member assembly 1 and a solid ceramic member assembly 1 are used.

  These ceramic member assemblies 1 were fixed in a cantilevered manner, and a load of 50 kg was applied on each ceramic member assembly 1. As a result, neither ceramic member assembly 1 was damaged. Thereafter, the bolt 4a was loosened, the metal plate 3 was removed, and the ceramic member 2 was cut in order to check the rib 8 of the hollow ceramic member assembly 1, but no cracks were found in the rib 8.

  As a result, the hollow ceramic member assembly 1 is free from cracks in the ribs 8, can withstand the same load as the solid ceramic member assembly 1, and is hollow without reducing its strength. Therefore, it was confirmed that the load applied to the driving of the transfer device and the like can be reduced because the weight can be reduced.

(Example 3)
Next, the conveying member 10 of the present invention shown in FIG. 4 was manufactured, and it was confirmed whether there was any crack or breakage in the vicinity of the opening 6 of the through hole 5 of the ceramic member 2 after assembly and after loading.

  First, the ceramic member 2 used for the conveying member 10 is extruded using a clay similar to that of Example 2 and is provided with a cross-sectional mold capable of obtaining the ceramic member 2 shown in FIG. The molded body was obtained by molding using a machine. Then, this molded body is put in a firing furnace, fired at a firing temperature of 1680 ° C. in an air atmosphere, and subjected to grinding processing for providing the opening 6 and the through hole 5 after firing, and has a length of 5000 mm and a height of 50 mm. Thus, a long ceramic member 2 having two hollow portions 7 having a width of 140 mm, a length of 20 mm and a width of 40 mm inside, and a rib of 20 mm between the hollow portions 7 was obtained. The surface of the long ceramic member 2 in contact with the metal plate 3 has an opening 6 having a width of 40 mm and a depth of 3 mm continuous from the front end to the rear end in the length direction, and 1000 mm, 2500 mm and 4000 mm from the front end. Two through-holes 5 each having an inner diameter of 13 mm are provided at each position.

  Next, the supporting member 9 was produced using the same clay as the ceramic member 2. In the production of the support member 9, extrusion molding was performed with an extruder to obtain a molded body, which was then cut to a predetermined length. And this molded object was put into the baking furnace, and it baked with the calcination temperature of 1680 degreeC in air | atmosphere atmosphere, and performed the grinding process which provides the through-hole 9a after baking. The obtained support member 9 is 60 mm in length, 140 mm in width and 40 mm in height, and has two through-holes 9 a having an inner diameter of 13 mm penetrating the height direction so as to overlap with the through-hole 5 of the ceramic member 2. It was supposed to be provided one by one.

  Next, for the metal plate 3, a plate having a thickness of 3 mm, a length of 50 mm, and a width of 150 mm is cut out from a stainless steel plate material, and a hole 3 a having an inner diameter of 13 mm that overlaps the through hole 5 of the ceramic member 2 is formed using a drilling machine. The metal plate 3 was obtained by performing a process of opening at two locations on the plate. Further, for the fastening member 4, the same hexagon bolt 4a and nut 4b as in Example 1 were prepared except that the length of the portion excluding the head was 160 mm.

  Then, as shown in FIG. 4, two ceramic members 2 produced by the above-described manufacturing method, three support members 9, eight metal plates 3, and eight sets of fastening members 4 are used. As a result, the conveying member 10 of the example comprising the ceramic member assembly 1 of the present invention was obtained.

  Next, a conveyance member of a comparative example was produced using the same method and the same member except that the opening 6 was not provided in the ceramic member 2.

  Then, one end of each of the conveying member 10 according to the embodiment of the present invention and the conveying member according to the comparative example is fixed in a cantilevered form, and the conveying member 10 according to the embodiment of the present invention and the conveying member according to the comparative example are fixed. A load of 100 kg was applied to the central part of each. Thereafter, the bolt 4a is loosened, the metal plate 3 is removed, the load is removed, and the ceramic member 2 which is a constituent member of the conveying member 10 of the embodiment of the present invention and the ceramic member which is a constituent member of the conveying member of the comparative example. The cracks and breakage near the opening of the through hole were confirmed.

  As a result, although a crack was confirmed in the vicinity of the opening of the through hole of the ceramic member that is a constituent member of the transport member of the comparative example, the ceramic member 2 that is a constituent member of the transport member 10 of the embodiment of the present invention. In the vicinity of the opening 6 of the through hole 5, no cracks or breakage occurred.

  From this result, the conveying member 10 according to the present invention is a heavy article because the ceramic member assembly 1 includes the supporting member 9, that is, the supporting member 9 is sandwiched between the ceramic members 2. When the glass substrate is transported, the stress applied to the assembly 1 and the pressing force received from the head of the bolt 4a and the nut 4b cause cracks and breakage in the vicinity of the opening 6 of the through hole 5 of the ceramic member 2. It was confirmed that the conveyance member 10 can be suppressed and can withstand long-term use.

An example of the embodiment of the ceramic member assembly of the present invention is shown, (a) is a plan view, (b) is a side view, and (c) is a line AA ′ in (a). It is sectional drawing. The other example of embodiment of the assembly of the ceramic member of this invention is shown, (a) is a top view, (b) is a side view, (c) is a BB 'line | wire of (a). FIG. The several example of embodiment of the opening formed in the surface of the ceramic member of the assembly of the ceramic member of this invention is shown, (a) and (b) are top views, (c) and (d) are It is a top view and sectional drawing. An example of embodiment of the conveyance member of this invention is shown, (a) is a top view, (b) is sectional drawing in the E-E 'line. FIG. 2A is a plan view, FIG. 2B is a side view, and FIG. 2C is a cross-sectional view taken along line X-X ′ in FIG. The other example of the assembly of the conventional ceramic member is shown, (a) is a top view, (b) is a side view, (c) is sectional drawing in the YY 'line of (a). is there.

Explanation of symbols

1: Ceramic member assembly 2: Ceramic member 3: Metal plate 4: Fastening member 4a: Bolt 4b: Nut 5: Through hole 6: Opening 7: Hollow portion 8: Rib 9: Support member
10: Transport material

Claims (5)

A plurality of ceramic members arranged with corresponding through-holes stacked thereon, a metal plate disposed on the surface of the ceramic member and having a hole overlapping the through-hole, and the head passing through the hole and the through-hole possess a fastening member for pressing the metal plate, the ceramic member, the formed larger than the head of the opening of the through hole in said surface said fastening member and said through hole in said surface A ceramic member characterized in that an opening is formed larger than other portions of the through hole to form an edge portion, and the metal plate is fastened only in contact with the upper surface of the edge portion. Assembly.   2. The ceramic member assembly according to claim 1, wherein the ceramic member has a hollow portion coaxial with the through hole in which the diameter of the through hole is increased in the middle of the through hole. .   The ceramic member assembly according to claim 1, wherein a plurality of the through holes are arranged in the ceramic member, and the openings are continuous between the through holes.   A conveying member comprising the ceramic member assembly according to any one of claims 1 to 3.   The conveying member according to claim 4, wherein a supporting member is sandwiched between the ceramic members.