JP5176364B2 - Light heating apparatus and light heating method - Google Patents

Description

  The present invention relates to a heating device and a heating method, and more particularly to a light heating device and a light heating method for heating an object to be heated by converting light from a light source into heat.

  In the manufacture and mounting of a semiconductor device, a process of heating a semiconductor wafer, a semiconductor chip, a circuit board, and the like is performed, and in recent years, a manufacturing apparatus using light irradiation heating has been developed as an apparatus therefor.

  For example, in Patent Document 1 below, a light diffusing plate is disposed between the upper surface of a substrate held in a heat treatment furnace and a lamp house, and the light emitted from the lamp and condensed by a reflector is emitted as light. An optical heating apparatus that irradiates the upper surface of a substrate after being diffused by a diffusion plate is disclosed.

JP 2002-110580 A

  However, since the method using the conventional light heating apparatus described above is a method in which a work that is a heating target is directly irradiated and heated, there are some problems described below.

  The first problem is that the temperature varies depending on the material of the workpiece. The cause of this problem is due to the difference in the amount of heat generated even when the same energy is applied due to the light reflectance, which is the physical property value of the workpiece.

  A second problem is that temperature variation occurs in the workpiece. The cause of this problem is that the heating temperature is affected by the difference in distance from the light source and the way the light strikes whether it is directly exposed or shaded.

  This invention is made | formed in view of the said problem, The main objective is to provide the optical heating apparatus and optical heating method which can heat a heating target object uniformly.

  In order to achieve the above object, the light heating apparatus of the present invention is a light / heat exchange means that covers at least the upper part of the object to be heated, a light source that emits light to the light / heat exchange means, and a light emitted from the light source. A reflection plate that reflects light to the light / heat exchange means, and the light / heat exchange means absorbs the light emitted from the light source and the light reflected by the reflection plate and converts it into heat. The object to be heated is heated by radiation and gas convection.

  Further, the light heating device of the present invention comprises a light / heat exchange means that covers at least an upper part and a side part of an object to be heated, a light source that irradiates light to the light / heat exchange means, and light emitted from the light source. A reflection plate that reflects to the light / heat exchange means, and the light / heat exchange means absorbs the light emitted from the light source and the light reflected by the reflection plate and converts it into heat, The heating object is heated by radiation and gas convection.

  In the present invention, the light / heat exchange means covers the entire surface of the object to be heated, and the light source and the reflection plate are arranged on both the upper part and the lower part of the object to be heated. Can do.

  In the present invention, the light / heat exchanging means is disposed on the light source side and absorbs light, and is disposed on the heating object side to diffuse the heat generated by the absorbed light. And a thermal diffusion layer.

  Moreover, in this invention, the said reflecting plate can be comprised formed in concave shape with respect to the said heating target object.

  The present invention is also a light heating method for heating an object to be heated, wherein at least an upper part of the object to be heated is covered with light / heat exchange means, a light source, and a reflector that reflects light emitted from the light source; The light / heat exchanging means is irradiated with light, and the light / heat exchanging means absorbs light and converts it into heat, and heats the heating object by radiation and gas convection. is there.

  The present invention is also a light heating method for heating an object to be heated, wherein at least an upper part and a side part of the object to be heated are covered with light / heat exchange means, and a light source and light emitted from the light source are reflected. The light / heat exchanging means is irradiated with light using a reflector, and the light / heat exchanging means absorbs light and converts it into heat, and heats the heating object by radiation and gas convection. To do.

  In the present invention, the light / heat exchange means is formed so as to cover the entire periphery of the object to be heated, and the light source and the reflection plate are disposed on both the upper part and the lower part of the object to be heated. It can be.

  In the present invention, the light / heat exchanging means is disposed on the light source side and absorbs light, and is disposed on the heating object side and diffuses heat generated by the absorbed light. And a heat diffusion layer, and the heat generated by the light absorbed by the upper part or the upper part and the lower part of the light / heat exchange means can be diffused over the entire inner surface of the light / heat exchange means.

  Moreover, in this invention, the said reflecting plate can be comprised so that it may form in concave shape with respect to the said heating target object.

  Thus, in the present invention, the light / heat exchange means is provided between the light source and the object to be heated, and the object to be heated is heated by heating the object by radiation and gas convection from the light / heat exchange means. The object to be heated can be heated while suppressing the influence of the reflectance and the way the light strikes. In addition, by forming the light / heat exchange means so as to cover at least the upper part and the side part of the object to be heated, the influence of the shape of the object to be heated and the turbulence of the air flow due to the installation environment can be suppressed to make the object to be heated uniform Can be heated.

  The light heating device and the light heating method of the present invention have the following effects.

  The 1st effect of this invention is that it can heat regardless of the difference in the light reflectivity of the workpiece | work which is a heating target object, and the way of light hit. The reason is that the light emitted from the light source is not directly applied to the work, the light / heat conversion wall is heated with light, and the work is heated by radiation from the light / heat conversion wall and convection of gas.

  The second effect of the present invention is that heating can be performed uniformly regardless of the shape of the workpiece and the installation environment of the light heating device. The reason for this is that the light / heat exchange wall is formed so as to cover the upper part and side part of the work or the entire surface around the work, and the light / heat conversion wall diffuses heat, from the entire inner surface of the light / heat conversion wall. This is because the workpiece is heated by the radiation and the convection of the heat-transferred gas.

  As shown in the prior art, a light heating device that directly irradiates a work with light is known as a heating device used in a heating process in manufacturing and mounting of a semiconductor device. There is a problem that temperature variation occurs in the work depending on the way the light strikes, the shape, the installation environment of the light heating device, and the like. To solve this problem, a method of arranging a flat heat transfer plate between the light source and the workpiece, heating the heat transfer plate with the light source, and heating the workpiece with radiation from the heat transfer plate can be considered.

  However, a flat heat transfer plate is likely to warp due to a temperature rise due to light irradiation, and there is a problem that the workpiece cannot be heated uniformly. In addition, the flat heat transfer plate cannot suppress the turbulence of the air flow between the heat transfer plate and the workpiece, so when the light heating device is installed in a place where the gas flow is intense, There is a problem that the work cannot be effectively heated by convection, and the temperature of the work fluctuates due to the turbulence of the air flow, and the work cannot be heated uniformly.

  Therefore, in the present invention, a light source is used as a heat source, and a light / heat conversion wall is provided between the work and the light source, and the light serving as the heat source heats the light / heat conversion wall and radiates from the light / heat conversion wall. And the workpiece is heated by convective heat conduction. Thus, by setting it as the structure which does not irradiate light directly to a workpiece | work, the temperature variation by the difference in the light reflectivity of a workpiece | work or the way of light hit can be suppressed.

  The light / heat conversion wall not only absorbs light and converts it into heat, but also diffuses heat by heat conduction, and heats the work by radiation and convection heat conduction from the entire inner surface of the light / heat conversion wall. Thereby, the temperature variation by the shape of a workpiece | work can be suppressed.

  In addition, the light / heat conversion wall is not formed in a plate shape, but the light / heat conversion wall is formed to cover the upper part and the side part of the work or the entire periphery of the work. As a result, the workpiece can be heated not only from the top surface of the workpiece but also from the side and back surfaces, and temperature variations due to the shape of the workpiece and temperature variations due to airflow turbulence between the workpiece and the light / heat conversion wall are suppressed. It is possible to heat the workpiece uniformly. In particular, in a configuration in which the light / heat conversion wall covers the entire periphery of the workpiece, the workpiece is heated in a closed space, so the influence of the environment where the light heating device is installed can be eliminated, and the workpiece is heated uniformly. It becomes possible.

  In order to describe the above-described embodiment of the present invention in further detail, a light heating apparatus and a light heating method according to a first example of the present invention will be described with reference to FIGS. FIG. 1 is a cross-sectional view schematically showing the configuration of the main part of the thermal heating apparatus of this embodiment, and FIG. 2 shows the configuration of the light / heat conversion wall of the thermal heating apparatus of this embodiment and the state of heating. It is sectional drawing shown typically. Moreover, FIG. 3 is sectional drawing which shows the other structure of the thermal heating apparatus of a present Example.

  As shown in FIG. 1, the light heating apparatus of the present embodiment includes a pair of light sources 1 including an incandescent lamp such as a halogen lamp, a discharge lamp such as a xenon lamp, and a power supply circuit (not shown). And a pair of reflecting plates 2 made of a metal plate or the like that reflects the light 6 from the light source 1 in a predetermined direction, and the light 6 from the pair of light sources 1 and the light 6 reflected by the pair of reflecting plates 2. The light / heat conversion wall 3 that absorbs and converts the heat into heat and heats the work 5 placed in a closed space inside by radiation and convection 5 of the gas 4 is a main component.

  The light source 1 only needs to emit light having a wavelength that can be absorbed by the light / heat conversion wall 3, and the type, shape, quantity, arrangement, and the like are not particularly limited. Moreover, the reflecting plate 2 should just be provided with the function to reflect the light 6 from the light source 1 by predetermined | prescribed reflectance, The material and shape are not specifically limited, The edge part of the reflecting plate 2 is light-heat conversion. It is good also as a structure fixed to the wall 3, and good also as a structure fixed to another member. The gas 4 may be air or an inert gas such as nitrogen or argon.

  As shown in FIG. 2, the light / heat conversion wall 3 is disposed on the light source 1 side, and absorbs the light 6 from the light source 1 and the light 6 reflected by the reflection plate 2. And a heat diffusion layer 8 made of ceramics or metal that diffuses the heat 9 generated in the light absorption layer 7.

  The light absorption layer 7 only needs to have a function of absorbing the light 6 at a predetermined absorption rate at the wavelength of the light source 1, and the material and thickness thereof are not particularly limited. The thermal diffusion layer 8 only needs to have a function of conducting the heat 9 generated in the light absorption layer 7 with a predetermined thermal conductivity, and the material and thickness thereof are not particularly limited. In the case of heating not only by the convection of 4 but also by radiation, it is preferable to form the material with a high radiation rate. In addition, the light / heat conversion wall 3 may be configured as shown in FIG. 2 in all portions, and the portions that are exposed to the light 6 (for example, the upper and lower portions of the work 5) are the light absorption film 7 and the heat diffusion layer 8. The portion that is not exposed to the light 6 (for example, the side surface portion of the workpiece 5) may be formed of only the thermal diffusion layer 8.

  In FIG. 1, the light / heat conversion wall 3 covers the entire surface of the work 5, but the work 5 is heated from the surroundings and the gas 4 between the light / heat conversion wall 3 and the work 5 is heated. In order to suppress the flow, any shape that covers at least the upper part (or lower part) and the side surface part of the work 5 may be used. For example, the shape shown in FIGS. . In FIG. 2, the light absorption layer 7 and the thermal diffusion layer 8 are flat layers. However, in order to efficiently absorb and radiate light, irregularities may be formed on the surface.

  Next, the operation of the light heating apparatus of this embodiment will be described with reference to FIGS.

  The light 6 emitted from the light source 1 directly or indirectly reflects on the reflection plate 2 and indirectly hits the light absorption layer 7 on the light source 1 side of the light / heat conversion wall 3. The light absorption layer 7 converts the light 6 into heat 9 and transmits it to the heat diffusion layer 8, and the heat diffusion layer 8 diffuses the heat 9 by heat conduction. The gas 4 confined on the inner surface of the light / heat conversion wall 3 is heated by the heat 9 from the heat diffusion layer 8. The workpiece 5 is heated by heat transmitted from the gas 4 and heat radiated from the light / heat conversion wall 3.

  As described above, the light / heat conversion wall 3 including the light absorption layer 7 and the heat diffusion layer 8 is provided between the light source 1 and the reflector 2 and the work 5, and the light / heat conversion wall 3 is attached to the work 5. By heating the workpiece 5 not only from the upper surface of the workpiece 5, but also from the side and the rear surface, both by radiation and convective heat conduction, by forming a shape that covers at least the upper and side surfaces, preferably the entire periphery of the workpiece 5. It is possible to suppress the temperature variation due to the turbulence of the air flow between the work 5 and the light / heat conversion wall 3 and to heat the work 5 uniformly. Can do.

  Next, a light heating apparatus and a light heating method according to the second embodiment of the present invention will be described with reference to FIG. FIG. 4 is a cross-sectional view schematically showing the configuration of the light / heat conversion wall of the light heating device of this embodiment and the manner of heating.

  In the first embodiment described above, the light / heat conversion wall 3 is composed of the two light absorption layers 7 and the heat diffusion layer 8. However, as shown in FIG. Can be constituted by one layer, or the light / heat conversion wall 3 can be constituted by n layers (n is a positive number of 3 or more) as shown in FIG.

  For example, when a material having a high light absorption rate and a high thermal conductivity (carbon or the like) is used, the light / heat conversion wall 3 can be formed of a single layer. The cost can be reduced. Further, the light absorption layer 7 is composed of a plurality of layers having different absorption characteristics (for example, a layer having a good absorption characteristic at a visible wavelength and a layer having a good absorption characteristic at a near infrared wavelength), or the thermal diffusion layer 8 is formed. By comprising a plurality of layers (for example, a layer with good thermal conductivity and a layer with high strength, etc.), the light 6 from the light source 1 and the light 6 reflected by the reflector 2 are efficiently absorbed, It is possible to efficiently diffuse the entire inner surface of the heat conversion wall 3.

  In each of the above-described embodiments, the basic configuration of the light heating device has been described. However, the present invention is not limited to the above-described embodiment. For example, a plurality of light sources 1 are arranged side by side. As long as it does not deviate from the gist of the present invention, such as the installation of the light source 1 and the reflection plate 2, it can be appropriately changed.

  INDUSTRIAL APPLICABILITY The present invention can be used for a manufacturing apparatus used in a process for heating a semiconductor wafer, a semiconductor chip, a circuit board, and the like and a light heating method using the manufacturing apparatus.

It is sectional drawing which shows typically the structure of the optical heating apparatus which concerns on 1st Example of a present Example. It is sectional drawing which shows typically the structure of the light-heat conversion wall of the heating apparatus which concerns on 1st Example of a present Example, and the mode of a heating. It is sectional drawing which shows typically the other structure of the optical heating apparatus which concerns on the 1st Example of a present Example. It is sectional drawing which shows typically the structure of the light-heat conversion wall of the heating apparatus which concerns on 2nd Example of a present Example, and the mode of a heating.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Light source 2 Reflector 3 Light / heat conversion wall 4 Gas 5 Work 6 Light 7 Light absorption layer 8 Thermal diffusion layer 9 Heat

Claims (10)

Light / heat exchange means that covers at least the upper part of the heating object, a light source that irradiates light to the light / heat exchange means, a reflector that reflects the light emitted from the light source to the light / heat exchange means, Comprising at least
The light / heat exchange means includes a light absorption layer that is disposed on the light source side and absorbs light, and a heat diffusion layer that is disposed on the heating object side and diffuses heat generated by the absorbed light, The light emitted from the light source and the light reflected by the reflector are absorbed and converted to heat, and the heating object is heated by heat radiation diffused in the heat diffusion layer and gas convection. A light heating device. Light / heat exchange means for covering at least the upper part and the side part of the heating object, a light source for irradiating the light / heat exchange means with light, and a reflection for reflecting the light emitted from the light source to the light / heat exchange means And at least a board,
The light / heat exchange means includes a light absorption layer that is disposed on the light source side and absorbs light, and a heat diffusion layer that is disposed on the heating object side and diffuses heat generated by the absorbed light, The light emitted from the light source and the light reflected by the reflector are absorbed and converted to heat, and the heating object is heated by heat radiation diffused in the heat diffusion layer and gas convection. A light heating device. The light / heat exchange means covers the entire surface of the object to be heated,
The light heating device according to claim 1, wherein the light source and the reflection plate are disposed on both of an upper part and a lower part of the heating object. The light / heat exchange means is:
2. The portion that receives light from the light source includes the light absorption layer and the thermal diffusion layer, and the portion that does not receive light from the light source includes only the thermal diffusion layer. The light heating apparatus as described in any one of thru | or 3. The optical heating apparatus according to claim 1, wherein the reflector is formed in a concave shape with respect to the heating object. A light heating method for heating a heating object,
Cover at least the upper part of the heating object with light / heat exchange means,
Using a light source and a reflector that reflects light emitted from the light source, the light / heat exchange means is irradiated with light,
The light / heat exchange means includes a light absorption layer that is disposed on the light source side and absorbs light, and a heat diffusion layer that is disposed on the heating object side and diffuses heat generated by the absorbed light, A light heating method, wherein light is absorbed in the light absorption layer and converted into heat, and the object to be heated is heated by heat radiation and gas convection diffused in the heat diffusion layer . A light heating method for heating a heating object,
Cover at least the upper part and the side part of the heating object with light / heat exchange means,
Using a light source and a reflector that reflects light emitted from the light source, the light / heat exchange means is irradiated with light,
The light / heat exchange means includes a light absorption layer that is disposed on the light source side and absorbs light, and a heat diffusion layer that is disposed on the heating object side and diffuses heat generated by the absorbed light, A light heating method, wherein light is absorbed in the light absorption layer and converted into heat, and the object to be heated is heated by heat radiation and gas convection diffused in the heat diffusion layer . The light / heat exchange means is formed so as to cover the entire periphery of the object to be heated,
The light heating method according to claim 6 or 7, wherein the light source and the reflection plate are disposed on both of an upper part and a lower part of the heating object. In the light-heat exchange means,
The portion that receives light from the light source is composed of the light absorption layer and the thermal diffusion layer, and the portion that does not receive light from the light source consists of only the thermal diffusion layer,
9. The heat generated by light absorbed by the upper part or the upper and lower parts of the light / heat exchange means is diffused over the entire inner surface of the light / heat exchange means. Light heating method. The light heating method according to claim 6, wherein the reflecting plate is formed in a concave shape with respect to the heating object.

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