JP5176232B2 - MICROSTRUCTURE AND METHOD FOR PRODUCING MICROHELICAL STRUCTURE - Google Patents

Description

  The present invention relates to a method of manufacturing a microstructure by separating a secondary tube wall having an annular shape, a spiral shape, a ladder shape, or a mesh shape from a vascular plant, and more particularly, a secondary tube having a helical shape. The present invention relates to a method of manufacturing a micro spiral structure that can be applied to an electromagnetic wave absorber or the like by separating a wall (referred to as a spiral pattern).

  The following techniques are known as conventional methods for appropriately treating a plant that is a natural material to extract or modify industrially usable materials.

  For example, in Japanese Patent Application Laid-Open No. 2005-027534, a leaf portion is heated to soften its composition and then separated into a liquid mesophyll portion, a solid petiole portion and a vein portion, for example, a mesophyll portion. Has disclosed a technique for concentrating vitamin K contained in the food. Japanese Patent Laid-Open No. 03-123701 discloses a technique for separating plant veins by ultrasonic treatment subsequent to strong alkali treatment. In addition, the obtained leaf vein is affixed on a sheet material or the like and used for a cosmetic material or the like.

  Japanese Patent Application Laid-Open No. 2002-339281 discloses a technique for separating leaf sheath fibers, which are pulp raw materials, from herbaceous plants by microbial treatment. A technique for separating a leaf vein of a plant by microbial treatment is disclosed.

  Japanese Patent Application Laid-Open No. 08-127502 discloses a technique for manufacturing decorative articles, crafts, etc. after reducing the binding force of vascular tissue using an intercellular dissociating enzyme. Japanese Patent Laid-Open No. 03-123702 discloses a technique for separating plant veins by a decomposing enzyme treatment subsequent to a strong alkali treatment.

  JP 2006-328610 A and JP 2005-264395 A disclose methods for producing conductive fibers by conducting treatment with a polyaniline coating, and JP 2003-527126 A discloses gold or gold. A method of producing tobacco and tobacco filters containing gold or silver particles by introducing silver ions into the veins is disclosed.

  Furthermore, Japanese Patent Application Laid-Open No. 07-148711 discloses a technique for improving wood by introducing an inorganic material into a vascular bundle, and Japanese Patent Application Laid-Open No. 2004-173536 discloses a technique for applying it to a plant tissue by foliar spraying. Methods for introducing substances such as nutrient substances and drugs are disclosed.

  As described above, there are many conventional methods for treating a plant, which is a natural material, to extract or modify an industrially usable material.

  However, a method for efficiently removing a secondary pipe wall (in particular, a spiral pattern) having an annular, spiral, ladder, or mesh shape from a vascular plant, or removing the extracted spiral pattern (ie, a spiral shape). There is no disclosure in the prior art regarding a method for producing a micro-helical structure that can be applied to an electromagnetic wave absorbing material or the like by surface treatment on the secondary wall of the conduit).

  In addition, the conduit secondary wall formed by thickening spirally inside the conduit primary wall is the spiral pattern. Similarly, an annular conduit secondary wall is referred to as a ring pattern, a ladder-shaped conduit secondary wall is referred to as a floor pattern, and a mesh-shaped conduit secondary wall is referred to as a mesh pattern or a hole pattern.

  And while the primary wall of the conduit and other vascular tissues are mainly composed of cellulose, hemicellulose, pectin and protein and a large amount of water, the secondary wall of the conduit accumulates lignin and relatively pectin and It has a reduced protein and water content and a more stable and stronger composition than the primary wall of the conduit and other vascular tissues.

  For this reason, the vein separation method disclosed in Japanese Patent Laid-Open No. 03-123701, Japanese Utility Model Laid-Open No. 02-106401, Japanese Patent Laid-Open No. 03-123702, etc., for example, while dissolving the surrounding tissue using an alkaline chemical solution, It is possible to partially leave the ring pattern, spiral pattern, floor pattern, net pattern, and hole pattern delayed by dissolution.

  However, if priority is given to the complete removal of surrounding tissue, dissolution of the ring pattern, spiral pattern, floor pattern, net pattern, and hole pattern becomes significant, and the ring pattern, spiral pattern, floor pattern, net pattern, net pattern, and hole pattern become complete. If priority is given to remaining, the removal of surrounding tissue will be incomplete. In addition, among the secondary walls of the above-mentioned shapes, especially the fine spiral shape (including diameter and pitch) of the spiral pattern is deformed by the chemical action of chemicals and the effects of heat, mechanical force, etc. used in the chemical treatment. It is extremely difficult to leave them without causing them.

Also, since the extracted secondary wall of the conduit is thin and soft and easily deforms, it is extremely difficult to cut the secondary wall of the desired length while maintaining its fine shape. It is. Furthermore, the above-mentioned conduit secondary wall pieces can be modified without agglomerating each other, and the axes of all the secondary wall pieces can be aligned, aligned, polarized, chemically polarized (hydrophobic / It is also extremely difficult to perform alignment treatment such as hydrophilization.
JP 2005-027534 A (paragraph 0004) Japanese Patent Laid-Open No. 03-123701 (Claims) JP 2002-339281 A (summary) Japanese Utility Model Publication No. 02-106401 (Utility Model Registration Request) Japanese Patent Application Laid-Open No. 08-127502 (Claims, paragraph 0001) Japanese Patent Laid-Open No. 03-123702 (Claims) JP 2006-328610 A (Claims) JP 2005-264395 A (Claims) Japanese translation of PCT publication No. 2003-527126 (Claims) JP 07-148711 A (summary) JP 2004-173536 A (Claims)

  The present invention has been made paying attention to such problems, and the problem is that a secondary wall piece of a pipe having an annular shape, a spiral shape, a ladder shape, or a mesh shape is obtained from a vascular plant. An object of the present invention is to provide a microstructure that has been subjected to various surface treatments and orientation treatments, and a method for manufacturing a microspiral structure that can be efficiently removed while maintaining the shape.

That is, the invention according to claim 1
From a vascular plant, on the premise of a method for producing a microstructure having a ring shape, a spiral shape, a ladder shape or a mesh shape,
A first step of cutting a leaf part, stem part or root part of a vascular plant to a desired thickness to obtain a slice piece, and introducing a drug solution into the conduit from a conduit opening exposed on the cut surface of the slice piece, A second step of at least partially modifying the conduit secondary wall having an annular, spiral, ladder-like or mesh-like shape on the inner surface; and a conduit secondary wall modified by removing unnecessary portions of the sliced piece. And a third step of taking out the piece,
The invention according to claim 2
On the premise of a method for producing a micro helical structure having a spiral shape from a vascular plant,
A first step of cutting a leaf part, stem part or root part of a vascular plant to a desired thickness to obtain a slice piece, and introducing a drug solution into the conduit from a conduit opening exposed on the cut surface of the slice piece, A second step of at least partially modifying a conduit secondary wall (hereinafter referred to as a spiral pattern) having a spiral shape on the inner surface, and removing a modified spiral pattern piece by removing unnecessary portions of the slice piece. And a third step of taking out.

Next, the invention according to claims 3 to 8 is based on the manufacturing method of the micro helix structure according to the invention according to claim 2,
The invention according to claim 3
In the first step of obtaining the slice piece, characterized in that the leaf part, stem part or root part of the vascular plant is cut in a frozen state,
The invention according to claim 4
The second step of modifying the spiral pattern includes forming a conductive film by plating,
The invention according to claim 5
In the second step of modifying the spiral pattern, the method includes formation of a magnetic film by plating and magnetization treatment,
The invention according to claim 6
The second step of modifying the spiral pattern includes forming a metal film by plating and heating the surface of the metal film in an oxidizing atmosphere to at least partially form a metal oxide layer. ,
The invention according to claim 7 provides:
The second step of modifying the spiral pattern includes forming an insulating film by a sol-gel method,
The invention according to claim 8 is
In the third step of taking out the modified helical pattern, at least one selected from thermal decomposition by heating, chemical decomposition by chemicals, or mechanical decomposition by any external force of ultrasonic, mechanical vibration, or centrifugal force. It is characterized by including one decomposition.

According to the manufacturing method of the microstructure and the microspiral structure according to the present invention,
From the vascular plant, it is possible to efficiently remove the secondary wall piece of the pipe having an annular shape, a spiral shape, a ladder shape, or a mesh shape while maintaining its fine shape, and at the same time, various surface treatments and orientation treatments are performed. It becomes possible to obtain the conduit | pipe secondary wall piece (micro structure as well as micro spiral structure) made.

  Hereinafter, the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a schematic perspective view schematically showing a stem section of a lotus (vascular plant). The large hole exposed in the cross section is the vent hole 10, and the conduits 2 are dotted in the surrounding area. FIG. 2 is a schematic perspective view schematically showing the internal structure of a stem in the lotus (vascular plant). The lotus conduit 2 is a spiral-patterned conduit (a conduit whose secondary wall has a spiral shape), and a spiral pattern 3 which is a conduit secondary wall is formed on the inner surface thereof.

  And in the 1st process of the manufacturing method which concerns on this invention, the leaf part, stem part, or root part of a vascular plant is cut | disconnected to desired thickness, and a slice piece is obtained. At this time, it is important to use a sufficiently sharp blade that can be cut without destroying the vascular tissue, especially the secondary wall of the conduit. Further, if the conduit 2 is deformed or crushed at the time of cutting, the conduit 2 may not be sufficiently opened at the cut surface 4, and processing in subsequent steps may be difficult. Therefore, in order to prevent the tissue from being deformed by the mechanical force at the time of cutting, it is effective to freeze the object to be cut (in this case, a lotus stalk) in advance. 3 is a schematic perspective view of a slice piece 5 obtained by cutting a lotus stalk, which is a vascular plant, at a desired interval using, for example, a rotary blade, and FIG. 4 is a schematic diagram showing the internal structure of the slice piece 5. It is a schematic perspective view shown in FIG.

  Next, in the second step of the manufacturing method according to the present invention, a chemical solution is introduced into the conduit 2 from the opening of the conduit 2 exposed on the cut surface 4 of the slice piece 5, and at least a part of the individual spiral pattern 30 is formed. Reform.

  FIG. 5 is a schematic perspective view schematically showing a state in which a conductive film of Au is formed on the surface of each spiral pattern piece 30 in the slice piece 5 by plating. In addition to Au, Cu, Ag, Al, or the like can be used for the conductive film by plating. Here, the slice piece 5 is subjected to a surface active treatment such as application or immersion of a surfactant (the above chemical solution), whereby the slice piece 5 is treated with a catalyst (hereinafter simply referred to as plating). The whole surface of the slice piece 5 is plated in order to sink into the processing solution.

  On the other hand, when the surface activation treatment is omitted and the slice piece 5 is put into the plating solution, the slice piece 5 is kept floating on the plating solution surface. In particular, in the lotus slice piece 5, the floating state is maintained for a long time due to the high water repellency of the inner surface of the vent hole 10. However, in this case as well, the plating treatment liquid permeates into the conduit having high hydrophilicity originally, so that the plating reaction inside the conduit proceeds preferentially. Moreover, in one section of the slice piece 5 that is in contact with the plating solution, an eluate from the fractured structure may inhibit the plating reaction. Even in this case, reliable plating can be performed by previously washing the cross section and then applying a surfactant to impart hydrophilicity.

  Further, an electroless plating metal layer (metal film) formed in advance on one surface of the slice piece 5 by the above method may be used as an electrode, and further electroplating may be performed to perform additional growth of the plating metal layer (metal film). Alternatively, one of the cross sections of the slice piece 5 in contact with the plating treatment liquid is not actively hydrophilized or water repellent, so that the plating treatment of the cross section is prevented and only the inside of the conduit is plated. It is also possible.

  In the method of the present invention, since the individual spiral pattern pieces 30 are contained in the slice pieces 5 and are collected and collected in, for example, a plating process solution, which is a chemical solution, fine spiral pattern pieces are obtained during the plating process. 30 are not entangled with each other, and it is easy to recover the processed material from the plating solution.

  Other modification treatments for the spiral pattern 30 include, for example, the formation of a magnetic film such as Ni, Fe, or Co by plating, or the formation of a conductive film by electrolytic polymerization of polypyrrole, polythiophene, polyaniline, or the like. Further, as a means for forming the insulating coating, there is formation of an oxide insulating coating or a dielectric coating by a sol-gel method. Alternatively, the surface of the metal film (plated metal layer) formed by the plating may be oxidized by means such as heating in an oxidizing atmosphere to at least partially convert the surface vicinity into a metal oxide film.

  In the manufacturing method according to the present invention, when the coating material is a ferromagnetic material, the magnetization process is performed, and when the coating material is a ferroelectric material, the polarization process is performed. It is possible to carry out in a state where it is housed in the house. Since the spiral axes of the spiral pattern pieces 30 are held substantially parallel to each other and substantially perpendicular to the cut surface 4 while being accommodated in the slice piece 5, an external magnetic field or electric field is applied perpendicularly to the cut surface 4. By doing so, it is possible to obtain a dipole with higher efficiency than in the case where the magnetization process and the polarization process are performed in a state where the individual spiral pattern pieces 30 are randomly arranged.

  Next, in the third step of the manufacturing method according to the present invention, unnecessary portions of the slice piece 5 are removed, and the modified secondary pipe wall piece (spiral crest piece), that is, as shown in FIG. A micro helical structure 6 is obtained.

  The primary wall of the duct and other vascular tissues are mainly composed of cellulose, hemicellulose, pectin and protein, and a large amount of water, whereas lignin accumulates in the secondary wall of the duct and is relatively free of pectin, protein and water. The content is reduced and the composition is more stable and stronger than the primary wall of the duct and other vascular tissues.

  For this reason, even if it is the spiral pattern 30 which has not been especially modified, by applying an alkaline chemical solution such as sodium hydroxide or a cellulose-degrading enzyme such as cellulase under appropriate conditions, unnecessary surrounding tissue It is possible to delay and partially leave the secondary wall of the conduit while it dissolves.

  However, in the manufacturing method of the microstructure (micro-spiral structure) according to the present invention, an unnecessary conduit primary wall or other object can be obtained by subjecting each spiral pattern 30 to a modification treatment that prevents chemical dissolution. Even if priority is given to the complete removal of the vascular tissue, the individual helical pattern 30 can remain, and even when a chemical solution that completely dissolves or decomposes the plant tissue including the secondary wall of the conduit is used, By leaving the coating metal material and the coating oxide material, it is possible to obtain the micro helical structure 6 composed only of the coating material.

  In addition, since most of the metal coating and oxide coating have better heat resistance than the plant tissue, the slice piece 5 is heated after the modification process (modification process including the coating process) in the second step, The micro helical structure 6 composed only of the covering material can be obtained also by pyrolyzing the plant tissue. At this time, even if acceleration of separation between the micro helix structure 6 and surrounding unnecessary portions is accelerated by the application of mechanical vibration including ultrasonic waves and the combined use of filtration and centrifugal separation means, the micro waves protected and reinforced by the coating material are used. The spiral structure (that is, the micro spiral structure composed of the spiral pattern 30 and the covering material) 6 can be taken out without being deformed or lost.

  As described above, the microstructure and the microspiral structure in the present invention include a structure (for example, a spiral crest without a coating material) constituted only by a conduit secondary wall piece having no coating material, a coating material, A structure composed of a conduit secondary wall piece (for example, a spiral pattern having a covering material) and a structure composed only of the covering material from which the conduit secondary wall has been removed are included.

  Needless to say, a microstructure that has been previously polarized or magnetized can be easily collected using an electrode or an electromagnet. Further, the present invention has been described by taking a lotus as an example of a vascular plant, but the vascular plant according to the present invention is naturally not limited to a lotus and can be applied to all vascular plants. In particular, it can be suitably used for vascular plants having a spiral pattern such as bamboo, Benicana memochi, and pumpkin.

  The microstructure and the spiral structure obtained by the present invention can be used as an ink paste dispersed in a thermosetting epoxy resin, for example. The film can function as an electromagnetic wave absorber having good loss characteristics in a frequency range of 0.5 to 100 GHz, for example.

  Hereinafter, the present invention will be described specifically by way of examples.

  A pre-frozen lotus ground stalk was circularly cut at equal intervals with a rotating circumferential blade to obtain a sliced piece having a diameter of about 20 mm and a thickness of 1 mm.

  The sliced piece in a frozen state was naturally thawed in room temperature water to which a surfactant (trade name: Melplate Conditioner 1101 manufactured by Meltex Co., Ltd.) was added. Then, the slice piece became hydrophilic while being thawed, and finally it was submerged in the liquid and subjected to a surface-active treatment on the entire surface of the slice piece.

  Next, the sliced piece after thawing was applied with a catalyst in an aqueous solution containing a catalyst (trade name: Melplate Activator 7331 manufactured by Meltex), and then Ni plating solution (trade name: Melplate NI-871 manufactured by Meltex). Then, Ni electroless plating (that is, reforming treatment including coating treatment) was performed. The plated Ni layer grew on substantially the entire surface of the sliced piece, and grew mainly on the inner surface of the spiral pattern in the conduit. The plating film thickness was about 5 μm.

  The Ni-plated slice piece was magnetized in a pulsed magnetic field perpendicular to the slice piece cross section after washing and drying. Thereafter, organic substances were decomposed and removed in an aqueous sodium hydroxide solution while applying ultrasonic waves, the remaining magnetized metal pieces (microspiral structures) were washed with water, and further collected in water by an electromagnet.

  The collected metal pieces (micro-spiral structures) are passed through a mesh with a hole diameter of 1 mm along with water flow to remove large pieces, and the average diameter as a residue when passing through a mesh with a hole diameter of 0.05 mm is A Ni microspiral structure having an average length of about 0.1 mm and an average length of about 1 mm was obtained.

  In addition, in the obtained Ni micro spiral structure, the spiral pattern which is an organic substance did not remain | survive, and the spiral shape was maintained only by Ni plating layer (namely, coating | coated material).

  A pre-frozen lotus ground stalk was circularly cut at equal intervals with a rotating circumferential blade to obtain a sliced piece having a diameter of about 20 mm and a thickness of 1 mm. The frozen slices were naturally thawed in room temperature water.

  Next, the sliced piece after thawing was poured into a solution composed of tetraethoxysilane (20 wt%) and ethanol (80 wt%) together with a small amount of water and ammonia to hydrolyze this solution. The slice piece was kept in the solution until the hydrolysis proceeded sufficiently and the solution became a silica sol.

  Thereafter, the slice piece was pulled up from the solution, and dried at 80 ° C. for 30 minutes in an oven. While ordinary slice pieces were significantly deformed due to tissue shrinkage due to drying, slice pieces dried with silica sol and its dried product (dried gel) attached to the surface remained substantially intact.

  Furthermore, the slice piece to which the dried gel adhered was heat-treated at 800 ° C. for 60 minutes, and the adhered dried gel was sintered. At the time of sintering, the plant tissue composed of organic matter was thermally decomposed and removed.

  The debris remaining after the heat treatment is passed through a mesh with a hole diameter of 1 mm in a centrifuge together with a water stream to remove large fragments, and the average diameter is about 0 as a residue when passing through a mesh with a hole diameter of 0.05 mm. A silica microspiral structure having a thickness of 1 mm and an average length of about 1 mm was obtained.

  In addition, the spiral pattern which is an organic substance did not remain | survive in the obtained silica micro helical structure, and the helical shape was maintained only by the sintered silica layer (namely, coating | coated material).

  A pre-frozen lotus ground stalk was circularly cut at equal intervals with a rotating circumferential blade to obtain a sliced piece having a diameter of about 20 mm and a thickness of 1 mm. The sliced piece in the frozen state was naturally thawed in the air at room temperature.

  Next, the sliced piece after thawing was put into an aqueous solution containing a catalyst (trade name: Melplate Activator 7331 manufactured by Meltex Co., Ltd.) and applied with the catalyst in a state of floating on the liquid surface, and then Ni plating solution (manufactured by Meltex Corp.). (Product name: Melplate NI-871), and Ni electroless plating (that is, reforming treatment including coating treatment) was carried out while floating on the liquid surface. The plated Ni layer grew only on the inner surface of the conduit of the slice piece, and grew mainly on the inner surface of the spiral pattern in the conduit. The plating film thickness was about 5 μm.

  The Ni-plated slice piece was magnetized in a pulsed magnetic field perpendicular to the slice piece cross section after washing and drying. Then, organic substances were decomposed and removed in an aqueous solution containing cellulase and maceroteam while applying ultrasonic waves, and the remaining magnetized metal pieces (Ni micro helical structure) group were washed with water and further collected in water by an electromagnet. .

  In addition, in the obtained Ni micro spiral structure, the spiral pattern which is an organic substance did not remain | survive, and the spiral shape was maintained only by Ni plating layer (namely, coating | coated material).

  A pre-frozen lotus ground stalk was circularly cut at equal intervals with a rotating circumferential blade to obtain a sliced piece having a diameter of about 20 mm and a thickness of 1 mm. The sliced piece in the frozen state was naturally thawed in the air at room temperature.

  Next, the slice piece after thawing was washed with running water, and then an aqueous solution to which a surfactant (trade name: Melplate Conditioner 1101 manufactured by Meltex Co., Ltd.) was added was applied to one cross section.

  Next, the slice piece after application was put into an aqueous solution containing a catalyst (trade name: Melplate Activator 7331 manufactured by Meltex Co., Ltd.), and the catalyst was applied in a state of floating while the application surface was in contact with the liquid surface. (Product name: Melplate NI-871 manufactured by Meltex Co., Ltd.) was applied, and Ni electroless plating (that is, reforming treatment including coating treatment) was performed in a state where the coated surface was floated while being in contact with the liquid surface. The plated Ni layer grew on the cross section of the slice piece on the side in contact with the inner surface of the conduit and the liquid surface, and grew mainly on the inner surface of the spiral pattern in the conduit. The plating film thickness was about 5 μm.

  The Ni-plated slice pieces were washed with water, and the lotus tissue was decomposed and removed in an aqueous solution containing cellulase while applying ultrasonic waves. As a residue, an Ni micro helix structure array composed of a Ni disk having an outer diameter of about 20 mm and a large number of Ni micro helix structures attached upright on the disk was obtained. The average diameter of each Ni micro helical structure was about 0.1 mm and the length was about 1 mm.

  In the obtained Ni micro-helical structure array, the spiral pattern or the like that is an organic substance did not remain, and the above-described array shape was maintained by the Ni plating layer (that is, the coating material) alone.

  The fine structure and the fine spiral structure according to the present invention have industrial applicability applied to, for example, an electromagnetic wave absorbing material that is added to an ink paste to form an electromagnetic wave absorbing film.

The schematic perspective view which shows typically the stem cross section of a lotus (vascular plant). The schematic perspective view which shows typically the internal structure of the stem in a lotus (vascular plant). The schematic perspective view of the slice piece obtained by cut | disconnecting the stem of a lotus (vascular plant). The schematic perspective view which shows typically the internal structure of the said slice piece. The schematic perspective view which shows typically the state by which the conductive film was formed in the surface of each spiral pattern piece in a slice piece. 1 is a schematic perspective view of a micro helix structure according to the present invention.

Explanation of symbols

1 Epidermis 2 Conduit 3 Spiral Crest (Conduit Secondary Wall)
4 Cut surface 5 Slice piece 6 Spiral structure 10 Vent 30 Spiral crest

Claims (8)

In a method for producing a microstructure having a ring shape, a spiral shape, a ladder shape, or a mesh shape from a vascular plant,
A first step of cutting a leaf part, stem part or root part of a vascular plant to a desired thickness to obtain a slice piece, and introducing a drug solution into the conduit from a conduit opening exposed on the cut surface of the slice piece, A second step of at least partially modifying the conduit secondary wall having an annular, spiral, ladder-like or mesh-like shape on the inner surface; and a conduit secondary wall modified by removing unnecessary portions of the sliced piece. And a third step of taking out the piece. In a method for producing a micro helical structure having a helical shape from a vascular plant,
A first step of cutting a leaf part, stem part or root part of a vascular plant to a desired thickness to obtain a slice piece, and introducing a drug solution into the conduit from a conduit opening exposed on the cut surface of the slice piece, A second step of at least partially modifying a conduit secondary wall (hereinafter referred to as a spiral pattern) having a spiral shape on the inner surface, and removing a modified spiral pattern piece by removing unnecessary portions of the slice piece. And a third step of taking out the method.   The method for producing a microspiral structure according to claim 2, wherein in the first step of obtaining the slice piece, the leaf part, stem part or root part of the vascular plant is cut in a frozen state in advance.   3. The method of manufacturing a micro helix structure according to claim 2, wherein the second step of modifying the spiral pattern includes forming a conductive film by plating.   3. The method of manufacturing a micro helical structure according to claim 2, wherein the second step of modifying the spiral pattern includes formation of a magnetic film by plating and a magnetizing process.   The second step of modifying the spiral pattern includes forming a metal film by plating and oxidizing the surface of the metal film by heating the surface of the metal film in an oxidizing atmosphere to at least partially form a metal oxide layer. The manufacturing method of the micro helical structure of Claim 2.   The method for producing a microspiral structure according to claim 2, wherein the second step of modifying the spiral pattern includes forming an insulating film by a sol-gel method.   In the third step of taking out the modified helical pattern, at least one selected from thermal decomposition by heating, chemical decomposition by chemicals, or mechanical decomposition by any external force of ultrasonic, mechanical vibration, or centrifugal force. The method for manufacturing a micro-helical structure according to claim 2, wherein the method includes one decomposition.

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