JP5176190B2 - Semiconductor device - Google Patents

Semiconductor device Download PDF

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JP5176190B2
JP5176190B2 JP2010054335A JP2010054335A JP5176190B2 JP 5176190 B2 JP5176190 B2 JP 5176190B2 JP 2010054335 A JP2010054335 A JP 2010054335A JP 2010054335 A JP2010054335 A JP 2010054335A JP 5176190 B2 JP5176190 B2 JP 5176190B2
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lid
housing
semiconductor device
internal space
inclined surface
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JP2011187878A (en
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英樹 塚本
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Mitsubishi Electric Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4911Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
    • H01L2224/49111Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain the connectors connecting two common bonding areas, e.g. Litz or braid wires
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49175Parallel arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/73Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191Disposition
    • H01L2924/19101Disposition of discrete passive components
    • H01L2924/19107Disposition of discrete passive components off-chip wires

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Description

本発明は、半導体装置に関し、特に、筐体と蓋とを有する半導体装置に関するものである。   The present invention relates to a semiconductor device, and more particularly to a semiconductor device having a housing and a lid.

半導体装置の一例としてのパワーモジュールでは、筐体の内部空間に半導体チップが実装された基板が搭載され、その内部空間が蓋で閉じられている。この蓋は筐体にねじまたは接着剤で固定されている。蓋を筐体にねじで固定する場合、蓋の対角の4箇所を固定するねじ締め方式などが用いられている。また、蓋を筐体に接着剤で固定する場合、蓋の各辺の一部に接着剤を塗布して接着する接着剤方式などが用いられている。   In a power module as an example of a semiconductor device, a substrate on which a semiconductor chip is mounted is mounted in an internal space of a housing, and the internal space is closed with a lid. This lid is fixed to the housing with screws or an adhesive. When the lid is fixed to the housing with screws, a screw tightening method for fixing four diagonal positions of the lid is used. Moreover, when fixing a lid | cover to a housing | casing with an adhesive agent, the adhesive agent system etc. which apply | coat an adhesive agent to a part of each edge | side of a lid | cover, etc. are used.

蓋を筐体にねじで固定する構造の一例として、たとえば特開平10−205830号公報(特許文献1)には、電気部品が実装された基板が基板ホルダに取り付けられた空気調和機用インバータ制御回路装置が提案されている。この空気調和機用インバータ制御回路装置では、基板ホルダの上部開口部にこの開口の気密を閉じるようにプレート状のカバー部材がねじ止めされている。また、カバー部材のねじ止めされる部分が形成された辺の対辺には凸部が形成され、その凸部が基板ホルダに形成された凹部に嵌合する。   As an example of a structure for fixing a lid to a housing with a screw, for example, Japanese Patent Laid-Open No. 10-205830 (Patent Document 1) discloses an inverter control for an air conditioner in which a board on which an electrical component is mounted is attached to a board holder. Circuit devices have been proposed. In this inverter control circuit device for an air conditioner, a plate-like cover member is screwed to the upper opening of the substrate holder so as to close the airtightness of the opening. Further, a convex portion is formed on the opposite side of the side where the screwed portion of the cover member is formed, and the convex portion is fitted into the concave portion formed in the substrate holder.

特開平10−205830号公報Japanese Patent Laid-Open No. 10-205830

従来のパワーモジュールでは、蓋を筐体に固定するためのねじ締め箇所または接着剤塗布箇所は、蓋の対角または対辺などのように蓋の中央に対して対称または対称に近い位置に配置されている。そのため、ねじの所要数または接着剤の所要量の削減が妨げられている。また、ねじ締め時間または接着剤塗布時間の削減も同様に妨げられている。   In conventional power modules, the screw tightening points or adhesive application points for fixing the lid to the housing are arranged symmetrically or nearly symmetrically with respect to the center of the lid, such as the diagonal or opposite side of the lid. ing. This hinders the reduction of the required number of screws or the required amount of adhesive. In addition, the reduction of screw tightening time or adhesive application time is similarly prevented.

上記の空気調和機用インバータ制御回路装置において、カバー部材の凸部が基板ホルダの凹部に嵌合された状態でカバー部材が基板ホルダにねじ止めされている場合であって、さらにこのカバー部材を基板ホルダにねじで固定する構造がパワーモジュールに適用可能な場合でも次の問題がある。   In the above inverter control circuit device for an air conditioner, the cover member is screwed to the substrate holder in a state in which the convex portion of the cover member is fitted in the concave portion of the substrate holder. Even when the structure of fixing to the substrate holder with screws is applicable to the power module, there are the following problems.

つまり、上記の構造では、密閉構造のため基板ホルダの開口部とカバー部材の大きさが等しく、さらにカバー部材から突き出すように凸部が形成されている。そのため、カバー部材を基板ホルダに固定する際には、基板ホルダの凹部にカバー部材の凸部を嵌合させて開口部にカバー部材を強引に嵌め込む必要がある。この嵌め込みは作業が困難であり、時間がかかるため生産性が低い。   That is, in the above structure, the opening of the substrate holder and the size of the cover member are equal because of the hermetic structure, and the convex portion is formed so as to protrude from the cover member. Therefore, when fixing the cover member to the substrate holder, it is necessary to fit the convex portion of the cover member into the concave portion of the substrate holder and forcefully fit the cover member into the opening. This fitting is difficult to work and takes time, so productivity is low.

また、開口部の近傍において基板ホルダから突き出した信号端子が形成されたパワーモジュールでは、その信号端子に接触しないように蓋を筐体に取り付ける必要があるため、上記の構造では蓋の取り付け作業が困難である。そのため、上記の構造では、著しく生産性が低くなる。   In addition, in the power module in which the signal terminal protruding from the substrate holder is formed in the vicinity of the opening, it is necessary to attach the lid to the housing so as not to contact the signal terminal. Have difficulty. Therefore, in the above structure, productivity is remarkably lowered.

本発明は上記の課題を鑑みてなされたものであり、その目的は、蓋を筐体に取り付ける際の生産性を向上した半導体装置を提供することである。   The present invention has been made in view of the above problems, and an object thereof is to provide a semiconductor device with improved productivity when a lid is attached to a housing.

本発明の半導体装置は、一方側に開口する内部空間を有し、かつ内部空間側へ突き出す突起部を有する筐体と、内部空間を閉塞可能であり、かつ閉塞した状態で突起部に係合する勾配部を有する蓋とを備え、突起部は、突起部が突き出す方向に突起部の先端に向かって突起部の厚みが小さくなるように傾斜している第1の傾斜面を含み、勾配部は、第1の傾斜面と対向し、かつ蓋の端縁に向かって勾配部の厚みが小さくなるように傾斜している第2の傾斜面を含み、閉塞した状態で蓋の内部空間と反対側の面に対する第1の傾斜面の傾斜角は第2の傾斜面の傾斜角より大きくなるよう構成されている。   The semiconductor device of the present invention has a housing having an internal space that opens to one side and a protruding portion that protrudes toward the internal space, and the internal space can be closed and engaged with the protruding portion in the closed state. Including a first inclined surface that is inclined so that the thickness of the protruding portion decreases toward the tip of the protruding portion in a direction in which the protruding portion protrudes. Includes a second inclined surface that faces the first inclined surface and is inclined so that the thickness of the gradient portion decreases toward the edge of the lid, and is opposite to the inner space of the lid in the closed state. The inclination angle of the first inclined surface with respect to the side surface is configured to be larger than the inclination angle of the second inclined surface.

本発明の半導体装置によれば、閉塞した状態で蓋の内部空間と反対側の面に対する第1の傾斜面の傾斜角は第2の傾斜面の傾斜角より大きくなるよう構成されているため、第1の傾斜面と第2の傾斜面とを面接触させた状態で蓋を第1の傾斜面に沿ってスライドさせて筐体に取り付けることができる。そのため、第1の傾斜面に第2の傾斜面を沿わせて蓋を筐体に迅速かつ的確に取り付けることができる。   According to the semiconductor device of the present invention, the inclined angle of the first inclined surface with respect to the surface opposite to the inner space of the lid in the closed state is configured to be larger than the inclined angle of the second inclined surface. The lid can be slid along the first inclined surface and attached to the housing in a state where the first inclined surface and the second inclined surface are in surface contact with each other. For this reason, the lid can be quickly and accurately attached to the housing with the second inclined surface along the first inclined surface.

また、蓋を筐体に取り付ける際に蓋を斜めに傾けて筐体に嵌合させることができる。そのため、内部空間の開口の近傍において突き出した信号端子などに蓋が接触することを抑制することができる。   Further, when the lid is attached to the casing, the lid can be inclined and fitted to the casing. Therefore, it is possible to suppress the lid from coming into contact with the signal terminal protruding in the vicinity of the opening of the internal space.

また、本発明の半導体装置では、閉塞した状態において突起部と勾配部とが係合する部分では突起部が蓋の上側を押さえる。そのため、突起部と勾配部とが係合する部分では、ねじ止めまたは接着剤による接着が不要となる。このため、ねじの所要数または接着剤の所要量を削減することができるとともに、ねじ締め時間または接着剤塗布時間を短縮することができる。   Further, in the semiconductor device of the present invention, the protruding portion presses the upper side of the lid at the portion where the protruding portion and the gradient portion are engaged in the closed state. Therefore, screwing or bonding with an adhesive is not necessary at the portion where the protrusion and the gradient portion are engaged. Therefore, the required number of screws or the required amount of adhesive can be reduced, and the screw tightening time or adhesive application time can be shortened.

これらにより、蓋を筐体に取り付ける際の生産性を向上した半導体装置を提供することができる。   Accordingly, it is possible to provide a semiconductor device with improved productivity when the lid is attached to the housing.

本発明の実施の形態1における半導体装置の概略平面図(A)と、概略側面図(B)と、概略正面図(C)である。1A is a schematic plan view (A), a schematic side view (B), and a schematic front view (C) of a semiconductor device according to a first embodiment of the present invention; 本発明の実施の形態1における半導体装置の概略斜視図である。1 is a schematic perspective view of a semiconductor device according to a first embodiment of the present invention. 図1のIII−III線に沿う概略断面図である。It is a schematic sectional drawing in alignment with the III-III line of FIG. 図3のP部を示す概略断面図である。It is a schematic sectional drawing which shows the P section of FIG. 本発明の実施の形態1における半導体装置の蓋を筐体に取り付ける際の動作を示す概略斜視図である。It is a schematic perspective view which shows the operation | movement at the time of attaching the cover of the semiconductor device in Embodiment 1 of this invention to a housing | casing. 本発明の実施の形態1における半導体装置の変形例の概略平面図である。It is a schematic plan view of the modification of the semiconductor device in Embodiment 1 of this invention. 本発明の実施の形態1における半導体装置の変形例の概略斜視図である。It is a schematic perspective view of the modification of the semiconductor device in Embodiment 1 of this invention. 図6のVIII−VIII線に沿う概略断面図である。It is a schematic sectional drawing which follows the VIII-VIII line of FIG. 本発明の実施の形態1における半導体装置の変形例の筐体に蓋を接着する前の状態を示す概略平面図である。It is a schematic plan view which shows the state before adhere | attaching a lid | cover on the housing | casing of the modification of the semiconductor device in Embodiment 1 of this invention. 本発明の実施の形態1における半導体装置の変形例の蓋を筐体に取り付ける際の動作を示す概略斜視図である。It is a schematic perspective view which shows the operation | movement at the time of attaching the cover of the modification of the semiconductor device in Embodiment 1 of this invention to a housing | casing. 比較例1の半導体装置の概略平面図(A)と、概略側面図(B)と、概略正面図(C)である。FIG. 6 is a schematic plan view (A), a schematic side view (B), and a schematic front view (C) of the semiconductor device of Comparative Example 1; 比較例1の半導体装置の概略斜視図である。7 is a schematic perspective view of a semiconductor device of Comparative Example 1. FIG. 図11のXIII−XIII線に沿う概略断面図である。It is a schematic sectional drawing which follows the XIII-XIII line | wire of FIG. 比較例1の半導体装置の蓋を筐体に取り付ける際の動作を示す概略斜視図である。10 is a schematic perspective view illustrating an operation when a lid of the semiconductor device of Comparative Example 1 is attached to a housing. FIG. 比較例2の筐体に蓋を接着する前の状態を示す概略平面図である。10 is a schematic plan view showing a state before a lid is bonded to the casing of Comparative Example 2. FIG. 比較例2の半導体装置の蓋を筐体に取り付ける際の動作を示す概略斜視図である。12 is a schematic perspective view showing an operation when a lid of a semiconductor device of Comparative Example 2 is attached to a housing. FIG. 本発明の実施の形態2における半導体装置の概略平面図である。It is a schematic plan view of the semiconductor device in Embodiment 2 of this invention. 本発明の実施の形態2における半導体装置の変形例の概略平面図である。It is a schematic plan view of the modification of the semiconductor device in Embodiment 2 of this invention.

以下、本発明の実施の形態の半導体装置について図に基づいて説明する。
(実施の形態1)
最初に本発明の実施の形態1の半導体装置の構成について説明する。
Hereinafter, semiconductor devices according to embodiments of the present invention will be described with reference to the drawings.
(Embodiment 1)
First, the configuration of the semiconductor device according to the first embodiment of the present invention will be described.

図1(A)〜(C)および図2を参照して、本実施の形態の半導体装置1は、筐体2と、蓋3とを主に有している。筐体2の突起部12とねじ11とによって蓋3が筐体2に取り付けられている。蓋3の外縁を取り囲むように電極7および信号端子8が筐体2に配置されている。電極7にはナット9が設けられている。   Referring to FIGS. 1A to 1C and FIG. 2, semiconductor device 1 of the present embodiment mainly has a housing 2 and a lid 3. The lid 3 is attached to the housing 2 by the protrusion 12 and the screw 11 of the housing 2. An electrode 7 and a signal terminal 8 are arranged on the housing 2 so as to surround the outer edge of the lid 3. The electrode 7 is provided with a nut 9.

図3を参照して、筐体2は、ケース2aと金属ベース板2bと有している。ケース2aは、金属ベース板2bの一方面を取り囲むように金属ベース板2bの外縁部分に接着剤で接着されている。ケース2aの内周面と金属ベース板2bの一方面とに取り囲まれた空間が内部空間4を形成している。内部空間4の金属ベース板2bとは反対側の一方側は開口している。   Referring to FIG. 3, the housing 2 has a case 2a and a metal base plate 2b. The case 2a is bonded to the outer edge portion of the metal base plate 2b with an adhesive so as to surround one surface of the metal base plate 2b. A space surrounded by the inner peripheral surface of the case 2a and one surface of the metal base plate 2b forms an internal space 4. One side of the internal space 4 opposite to the metal base plate 2b is open.

内部空間4には金属厚箔付絶縁基板6が配置されている。金属厚箔付絶縁基板6は、金属ベース板2bにはんだ付けされている。また金属厚箔付絶縁基板6の金属ベース板2bにはんだ付けされた面と反対側の面には半導体チップ6aがはんだ付けされている。   An insulating substrate 6 with a metal thick foil is disposed in the internal space 4. The insulating substrate 6 with the metal thick foil is soldered to the metal base plate 2b. A semiconductor chip 6a is soldered to the surface opposite to the surface soldered to the metal base plate 2b of the insulating substrate 6 with a thick metal foil.

電極7および信号端子8は、インサートまたはアウトサートによりケース2aに取り付けられている。電極7および信号端子8が金属ワイヤー6bまたははんだにより金属厚箔付絶縁基板6または半導体チップ6aに電気的に接続されることにより、回路が構成されている。   The electrode 7 and the signal terminal 8 are attached to the case 2a by insert or outsert. The electrode 7 and the signal terminal 8 are electrically connected to the insulating substrate 6 with a metal thick foil or the semiconductor chip 6a by a metal wire 6b or solder to constitute a circuit.

内部空間4には金属厚箔付絶縁基板6、半導体チップ6aおよび金属ワイヤー6bを覆うようにシリコーンゲル5が充填されている。シリコーンゲル5は硬化されている。シリコーンゲル5によって、半導体チップ6aが保護されており、また異電極間が絶縁されている。   The internal space 4 is filled with silicone gel 5 so as to cover the insulating substrate 6 with thick metal foil, the semiconductor chip 6a, and the metal wire 6b. The silicone gel 5 is cured. The semiconductor gel 6a is protected by the silicone gel 5, and the different electrodes are insulated.

図3および図4を参照して、筐体2は、一方側に開口する内部空間4を有しており、その開口する部分に内部空間4側へ突き出す突起部12を有している。   3 and 4, the housing 2 has an internal space 4 that opens to one side, and a protrusion 12 that protrudes toward the internal space 4 at the opening.

蓋3は内部空間4の開口を覆うことにより内部空間4を閉塞可能に構成されている。これにより、蓋3は内部空間4の防塵および保護を図ることができる。蓋3は、内部空間4を閉塞した状態で突起部12に係合する勾配部13を有している。   The lid 3 is configured to be able to close the internal space 4 by covering the opening of the internal space 4. As a result, the lid 3 can protect the internal space 4 from dust and protection. The lid 3 has a gradient portion 13 that engages with the protrusion 12 in a state in which the internal space 4 is closed.

突起部12は、突起部12が突き出す方向に突起部12の先端に向かって突起部12の厚みが小さくなるように傾斜している第1の傾斜面12aを含んでいる。つまり、突起部12は、突起部12の先端に向かって先が細くなるテーパ形状を有している。突起部12の突き出す方向の長さLは、たとえば1mm以上1.5mm以下に形成されていてもよい。   The protrusion 12 includes a first inclined surface 12a that is inclined so that the thickness of the protrusion 12 decreases toward the tip of the protrusion 12 in the direction in which the protrusion 12 protrudes. That is, the protruding portion 12 has a tapered shape that tapers toward the tip of the protruding portion 12. The length L in the protruding direction of the protrusion 12 may be formed to be 1 mm or more and 1.5 mm or less, for example.

勾配部13は、第1の傾斜面12aと対向し、かつ蓋3の端縁に向かって勾配部13の厚みが小さくなるように傾斜している第2の傾斜面13aを含んでいる。つまり、勾配部13は、蓋3の端縁に向かって先が細くなるテーパ形状を有している。   The gradient portion 13 includes a second inclined surface 13a that faces the first inclined surface 12a and is inclined so that the thickness of the gradient portion 13 decreases toward the edge of the lid 3. That is, the gradient portion 13 has a tapered shape that tapers toward the edge of the lid 3.

内部空間4を閉塞した状態で、蓋3の内部空間4と反対側の面3aに対する第1の傾斜面12aの傾斜角θ1は、第2の傾斜面13aの傾斜角θ2より大きくなるよう構成されている。これにより、第1の傾斜面12aと第2の傾斜面13aとが互いに面で接触した状態で蓋3を筐体2に対して移動させることができる。また、蓋3が筐体2に対して斜めに傾いた状態で蓋3と筐体2とを嵌合させることができる。   In a state where the internal space 4 is closed, the inclination angle θ1 of the first inclined surface 12a with respect to the surface 3a opposite to the internal space 4 of the lid 3 is configured to be larger than the inclination angle θ2 of the second inclined surface 13a. ing. Thereby, the lid | cover 3 can be moved with respect to the housing | casing 2 in the state which the 1st inclined surface 12a and the 2nd inclined surface 13a contacted each other in the surface. Further, the lid 3 and the housing 2 can be fitted in a state where the lid 3 is inclined obliquely with respect to the housing 2.

この第1の傾斜面12aの傾斜角θ1および第2の傾斜面13aの傾斜角θ2は、蓋3が筐体2に取り付けられる際、蓋3が筐体2に対して斜めに傾けられた状態で開口近傍の信号端子8などに蓋3が接触しない角度に形成されている。たとえば、第1の傾斜面12aの傾斜角θ1は30°であり、第2の傾斜面13bの傾斜角θ2は25°に形成されていてもよい。   The inclination angle θ1 of the first inclined surface 12a and the inclination angle θ2 of the second inclined surface 13a are such that the lid 3 is inclined with respect to the housing 2 when the lid 3 is attached to the housing 2. Thus, the lid 3 is formed at such an angle that it does not contact the signal terminal 8 in the vicinity of the opening. For example, the inclination angle θ1 of the first inclined surface 12a may be 30 °, and the inclination angle θ2 of the second inclined surface 13b may be 25 °.

内部空間4が閉塞された状態で、第1の傾斜面12aが内部空間4の内側に向き合い、かつ第2の傾斜面13aが内部空間4の外側に向き合うように、筐体2の突起部12と蓋3の勾配部13とが係合されている。   In a state in which the internal space 4 is closed, the protruding portion 12 of the housing 2 is such that the first inclined surface 12a faces the inside of the internal space 4 and the second inclined surface 13a faces the outside of the internal space 4. And the slope portion 13 of the lid 3 are engaged.

蓋3は、勾配部13以外の部分において、ねじ11で筐体にねじ止め可能に構成されている。蓋3の内部空間4と反対側の面3aからねじ11がねじ締めされている。これにより、蓋3が筐体2から脱落することを防止することができる。なお、本実施の形態では、ねじ11は2箇所でねじ止めされているが、少なくとも1箇所でねじ止めされていればよい。   The lid 3 is configured so that it can be screwed to the housing with screws 11 at portions other than the gradient portion 13. A screw 11 is screwed from a surface 3 a opposite to the inner space 4 of the lid 3. Thereby, it is possible to prevent the lid 3 from dropping from the housing 2. In addition, in this Embodiment, although the screw 11 is screwed in two places, what is necessary is just to be screwed in at least one place.

次に、本実施の形態の半導体装置の蓋を筐体に取り付ける際の動作について説明する。
図5を参照して、蓋3の勾配部13(図3)の第2の傾斜面13aと筐体2の突起部12の第1の傾斜面12aとを面接触させ、上記の面接触させた状態で蓋3は第1の傾斜面12aに沿ってスライドさせて筐体2に取り付けられる。この際、筐体2に対して蓋3が斜めに傾けられた状態で、筐体2の突起部12に蓋3の勾配部13が嵌合される。
Next, an operation when the lid of the semiconductor device of this embodiment is attached to the housing will be described.
Referring to FIG. 5, the second inclined surface 13 a of the slope portion 13 (FIG. 3) of the lid 3 and the first inclined surface 12 a of the projection portion 12 of the housing 2 are brought into surface contact, and the above surface contact is made. In this state, the lid 3 is attached to the housing 2 by sliding along the first inclined surface 12a. At this time, the slope portion 13 of the lid 3 is fitted to the protrusion 12 of the housing 2 in a state where the lid 3 is inclined obliquely with respect to the housing 2.

この後、蓋3が内部空間4(図3)を閉塞するように、蓋3の勾配部13が設けられた一方側と対辺の他方側が、蓋3の勾配部13を支点として筐体2に向かって円弧を描くように筐体2に取り付けられる。内部空間4が閉塞された状態で、蓋3の他方側の近傍の2箇所にねじ11がねじ止めされる。これにより、図3に示すように、突起部12と勾配部13とが係合しつつ蓋3が筐体2にねじ止めされる。   Thereafter, the lid 3 closes the inner space 4 (FIG. 3) so that one side of the lid 3 on which the slope portion 13 is provided and the other side of the opposite side are attached to the housing 2 with the slope portion 13 of the lid 3 as a fulcrum. It attaches to the housing | casing 2 so that a circular arc may be drawn. With the internal space 4 closed, screws 11 are screwed to two locations near the other side of the lid 3. Thereby, as shown in FIG. 3, the lid 3 is screwed to the housing 2 while the protrusion 12 and the gradient portion 13 are engaged.

上記では、蓋3が筐体2にねじ11でねじ止めされる場合について説明したが、蓋3は筐体2に接着剤で接着されていてもよい。   Although the case where the lid 3 is screwed to the housing 2 with the screw 11 has been described above, the lid 3 may be bonded to the housing 2 with an adhesive.

図6〜図8を参照して、本実施の形態の変形例の半導体装置1は、蓋3が筐体2に接着剤14で接着されている。図8および図9を参照して、筐体2の内部空間4の突起部12が設けられた一方側と対辺の他方側において、筐体2と蓋3とが接着剤14を挟むように接着剤14が筐体2に塗布されている。蓋3は、勾配部13以外の部分において筐体2に接着されている。   With reference to FIGS. 6 to 8, in the semiconductor device 1 of the modification of the present embodiment, the lid 3 is bonded to the housing 2 with an adhesive 14. Referring to FIGS. 8 and 9, the housing 2 and the lid 3 are bonded so that the adhesive 14 is sandwiched between one side where the protrusion 12 of the internal space 4 of the housing 2 is provided and the other side of the opposite side. An agent 14 is applied to the housing 2. The lid 3 is bonded to the housing 2 at a portion other than the gradient portion 13.

図10を参照して、筐体2に対して蓋3が斜めに傾けられた状態で、筐体2の突起部12に蓋3の勾配部13(図8)が嵌合される。この後、蓋3が内部空間4(図8)を閉塞するように、蓋3の勾配部13が設けられた一方側と対辺の他方側が、蓋3の勾配部13を支点として筐体2に向かって円弧を描くように筐体2に取り付けられる。内部空間4が閉塞された状態で蓋3の他方側の端部が接着剤14で筐体2に接着される。これにより、図8に示すように、突起部12と勾配部13とが係合しつつ蓋3が筐体2に接着剤14で接着される。   Referring to FIG. 10, gradient portion 13 (FIG. 8) of lid 3 is fitted to protrusion 12 of housing 2 in a state where lid 3 is tilted with respect to housing 2. Thereafter, the lid 3 closes the internal space 4 (FIG. 8) so that one side of the lid 3 provided with the gradient portion 13 and the other side of the opposite side are attached to the housing 2 with the gradient portion 13 of the lid 3 as a fulcrum. It attaches to the housing | casing 2 so that a circular arc may be drawn. In the state where the internal space 4 is closed, the other end of the lid 3 is bonded to the housing 2 with an adhesive 14. As a result, as shown in FIG. 8, the lid 3 is bonded to the housing 2 with the adhesive 14 while the protrusion 12 and the gradient portion 13 are engaged.

次に、本実施の形態の半導体装置の作用効果について比較例と比較して説明する。
図11(A)〜(C)、図12および図13を参照して、比較例1の半導体装置1では、蓋3の対角の4箇所でねじ11がねじ止めされている。これにより、蓋3が筐体2にねじ止めされている。なお、比較例1の半導体装置1では、本実施の形態の半導体装置1と比較して筐体2の突起部12および蓋3の勾配部13は形成されていない。
Next, the function and effect of the semiconductor device of this embodiment will be described in comparison with a comparative example.
With reference to FIGS. 11A to 11C, FIG. 12, and FIG. 13, in semiconductor device 1 of Comparative Example 1, screws 11 are screwed at four diagonal positions of lid 3. Thereby, the lid 3 is screwed to the housing 2. In the semiconductor device 1 of the comparative example 1, the protruding portion 12 of the housing 2 and the gradient portion 13 of the lid 3 are not formed as compared with the semiconductor device 1 of the present embodiment.

図14を参照して、筐体2に対して蓋3が平行の状態で、蓋3が内部空間4(図13)を閉塞するように、蓋3が筐体2に取り付けられる。内部空間4が閉塞された状態で蓋3の対角の4箇所にねじ11がねじ止めされる。   Referring to FIG. 14, lid 3 is attached to casing 2 so that lid 3 closes internal space 4 (FIG. 13) in a state where lid 3 is parallel to casing 2. Screws 11 are screwed to four diagonal positions of the lid 3 in a state where the internal space 4 is closed.

また、図15および図16を参照して、比較例2の半導体装置1では、内部空間4の四方のそれぞれの一部に接着剤14が塗布されている。図16に示すように、筐体2に対して蓋3が平行の状態で、蓋3が内部空間4(図15)を閉塞するように、蓋3が筐体2に取り付けられる。内部空間4が閉塞された状態で蓋3の四方が接着剤14で接着される。   Referring to FIGS. 15 and 16, in the semiconductor device 1 of the comparative example 2, the adhesive 14 is applied to a part of each of the four sides of the internal space 4. As shown in FIG. 16, the lid 3 is attached to the casing 2 so that the lid 3 closes the internal space 4 (FIG. 15) in a state where the lid 3 is parallel to the casing 2. The four sides of the lid 3 are bonded with an adhesive 14 in a state where the internal space 4 is closed.

比較例1では、蓋3は、蓋3の対角の4箇所で筐体2にねじ止めされている。また比較例2では、蓋3は、蓋3の四方で筐体2に接着されている。   In Comparative Example 1, the lid 3 is screwed to the housing 2 at four diagonal positions of the lid 3. In Comparative Example 2, the lid 3 is bonded to the housing 2 at four sides of the lid 3.

これに対して、本実施の形態1の半導体装置1によれば、閉塞した状態で蓋3の内部空間4と反対側の面3aに対する第1の傾斜面12aの傾斜角θ1は第2の傾斜面13aの傾斜角θ2より大きくなるよう構成されている。   In contrast, according to the semiconductor device 1 of the first embodiment, the inclination angle θ1 of the first inclined surface 12a with respect to the surface 3a opposite to the inner space 4 of the lid 3 in the closed state is the second inclination. The surface 13a is configured to be larger than the inclination angle θ2.

そのため、第1の傾斜面12aと第2の傾斜面13aとを面接触させた状態で蓋3を第1の傾斜面12aに沿ってスライドさせて筐体2に取り付けることができる。このため、第1の傾斜面12aに第2の傾斜面13aを沿わせて蓋3を筐体2に迅速かつ的確に取り付けることができる。   Therefore, the lid 3 can be attached to the housing 2 by sliding along the first inclined surface 12a in a state where the first inclined surface 12a and the second inclined surface 13a are in surface contact with each other. For this reason, the lid 3 can be quickly and accurately attached to the housing 2 along the second inclined surface 13a along the first inclined surface 12a.

また、蓋3を筐体2に取り付ける際に蓋3を斜めに傾けて筐体2に嵌合させることができる。そのため、内部空間4の開口の近傍において突き出した信号端子8などに蓋3が接触することを抑制することができる。   In addition, when the lid 3 is attached to the housing 2, the lid 3 can be inclined and fitted to the housing 2. Therefore, it is possible to suppress the lid 3 from coming into contact with the signal terminal 8 or the like protruding in the vicinity of the opening of the internal space 4.

また、本実施の形態1の半導体装置1では、第1の傾斜面12aと第2の傾斜面13aとを面接触させた状態で蓋3を第1の傾斜面12aに沿ってスライドさせ、勾配部13を支点として蓋3を筐体2移動させて内部空間4が閉塞される。   In the semiconductor device 1 according to the first embodiment, the lid 3 is slid along the first inclined surface 12a in a state where the first inclined surface 12a and the second inclined surface 13a are in surface contact with each other, and the gradient is increased. The lid 3 is moved by the housing 2 with the portion 13 as a fulcrum to close the internal space 4.

閉塞した状態において突起部12と勾配部13とが係合する部分では突起部12が蓋3の上側を押さえる。そのため、突起部12と勾配部13とが係合する部分では、ねじ止めまたは接着剤による接着が不要となる。このため、比較例1または比較例2と比較して、本実施の形態の半導体装置1では、ねじ11の所要数または接着剤14の所要量を削減することができるとともに、ねじ締め時間または接着剤塗布時間を短縮することができる。よって、蓋3を筐体2に容易に取り付けることができる。   The protrusion 12 presses the upper side of the lid 3 at the portion where the protrusion 12 and the gradient portion 13 are engaged in the closed state. Therefore, in the part where the projection part 12 and the inclination part 13 engage, screwing or adhesion | attachment by an adhesive agent becomes unnecessary. For this reason, compared with Comparative Example 1 or Comparative Example 2, in the semiconductor device 1 of the present embodiment, the required number of screws 11 or the required amount of the adhesive 14 can be reduced, and the screw tightening time or adhesion can be reduced. The agent application time can be shortened. Therefore, the lid 3 can be easily attached to the housing 2.

これらにより、蓋3を筐体2に取り付ける際の生産性を向上した半導体装置を提供することができる。   As a result, a semiconductor device with improved productivity when the lid 3 is attached to the housing 2 can be provided.

本実施の形態の半導体装置1によれば、蓋3は、勾配部13以外の部分において筐体2にねじ止め可能に構成されていてもよい。これにより、蓋3は、勾配部13が突起部12と係合されつつ勾配部13以外の部分において筐体2にねじ止めされるため、生産性を向上しつつ蓋3の筐体2からの脱落および浮きなどを防止することができる。   According to the semiconductor device 1 of the present embodiment, the lid 3 may be configured to be screwed to the housing 2 at a portion other than the gradient portion 13. As a result, the lid 3 is screwed to the housing 2 at a portion other than the slope portion 13 while the slope portion 13 is engaged with the protruding portion 12, so that the productivity of the lid 3 from the housing 2 is improved. Dropping and floating can be prevented.

本実施の形態の半導体装置1によれば、蓋3は、勾配部13以外の部分において筐体2に接着されていてもよい。これにより、蓋3は、勾配部13が突起部12と係合されつつ勾配部13以外の部分において筐体2と接着されているため、生産性を向上しつつ蓋3の筐体2からの脱落および浮きなどを防止することができる。   According to the semiconductor device 1 of the present embodiment, the lid 3 may be bonded to the housing 2 at a portion other than the gradient portion 13. As a result, the lid 3 is bonded to the housing 2 at a portion other than the slope portion 13 while the slope portion 13 is engaged with the projecting portion 12, so that the productivity of the lid 3 from the housing 2 is improved. Dropping and floating can be prevented.

(実施の形態2)
発明の実施の形態2では、実施の形態1と比較して、突起部および勾配部が複数設けられている点で主に異なっている。
(Embodiment 2)
The second embodiment of the present invention is mainly different from the first embodiment in that a plurality of protrusions and gradient portions are provided.

図17を参照して、本実施の形態の半導体装置1では、内部空間4(図3)の開口部10は、一の辺10aと一の辺10aと交差する他の辺10bとを含んでいる。突起部12は、一の辺10aに設けられた第1の突起片12fと他の辺10bに設けられた第2の突起片12sとを含んでいる。第1の突起片12fおよび第2の突起片12sは、実施の形態1の突起部12と同様の構造を有している。   Referring to FIG. 17, in semiconductor device 1 of the present embodiment, opening 10 in internal space 4 (FIG. 3) includes one side 10a and another side 10b that intersects one side 10a. Yes. The protruding portion 12 includes a first protruding piece 12f provided on one side 10a and a second protruding piece 12s provided on the other side 10b. The first projecting piece 12f and the second projecting piece 12s have the same structure as the projecting portion 12 of the first embodiment.

勾配部13は、第1の突起片12fと係合する第1の勾配部分13fと第2の突起片12sと係合する第2の勾配部分13sとを含んでいる。第1の勾配部分13fおよび第2の勾配部分13sは、実施の形態1の勾配部13と同様の構造を有している。   The gradient portion 13 includes a first gradient portion 13f that engages with the first projection piece 12f and a second gradient portion 13s that engages with the second projection piece 12s. The first gradient portion 13f and the second gradient portion 13s have the same structure as the gradient portion 13 of the first embodiment.

第1の突起片12fと第1の勾配部分13fとが係合し、第2の突起片12sと第2の勾配部分13sとが係合している。蓋3の第1の勾配部分13fが設けられた一方側と対辺の他方側の近傍の2箇所で蓋3が筐体2にねじ止めされている。   The first protruding piece 12f and the first gradient portion 13f are engaged, and the second protruding piece 12s and the second gradient portion 13s are engaged. The lid 3 is screwed to the housing 2 at two locations in the vicinity of one side where the first gradient portion 13f of the lid 3 is provided and the other side of the opposite side.

なお、本実施の形態のこれ以外の構成は、上述した実施の形態1の構成と同一であるため同一の要素については同一の符号を付し、その説明を繰り返さない。   In addition, since the structure other than this of this Embodiment is the same as the structure of Embodiment 1 mentioned above, about the same element, the same code | symbol is attached | subjected and the description is not repeated.

本実施の形態の半導体装置1では、第1の突起片12fと第1の勾配部分13fとの係合と、第2の突起片12sと第2の勾配部分13sとの係合とが同時に行われる。そのため、開口部10の一の辺10aと他の辺10bに対応する蓋3の2辺がともに斜めに傾いた状態で、第1の突起片12fおよび第2の突起片12sのそれぞれの第1の傾斜面12aに沿って蓋3が筐体2に取り付けられる。この後、蓋3が内部空間4(図3)を閉塞するように、第1の勾配部分13fおよび第2の勾配部分13fを支点として蓋3が筐体2に向かって取り付けられる。内部空間4(図3)が閉塞された状態で、蓋3の他方側の近傍の2箇所でねじ11がねじ止めされる。これにより、図17に示すように、第1の突起片12fと第1の勾配部分13fとが係合し、第2の突起片12sと第2の勾配部分13sとが係合しつつ蓋3が筐体2にねじ止めされる。   In the semiconductor device 1 of the present embodiment, the engagement between the first protruding piece 12f and the first gradient portion 13f and the engagement between the second protruding piece 12s and the second gradient portion 13s are performed simultaneously. Is called. Therefore, each of the first protrusions 12f and the second protrusions 12s is first in a state where the two sides of the lid 3 corresponding to the one side 10a and the other side 10b of the opening 10 are inclined obliquely. The lid 3 is attached to the housing 2 along the inclined surface 12a. Thereafter, the lid 3 is attached toward the housing 2 with the first gradient portion 13f and the second gradient portion 13f as fulcrums so that the lid 3 closes the internal space 4 (FIG. 3). With the internal space 4 (FIG. 3) closed, the screws 11 are screwed at two locations near the other side of the lid 3. Accordingly, as shown in FIG. 17, the first protrusion 12f and the first gradient portion 13f are engaged, and the second protrusion 12s and the second gradient portion 13s are engaged while the lid 3 is engaged. Is screwed to the housing 2.

上記では、蓋3が筐体2にねじ11でねじ止めされる場合について説明したが、実施の形態1と同様に、蓋3は筐体2に接着剤で接着されていてもよい。   Although the case where the lid 3 is screwed to the housing 2 with the screw 11 has been described above, the lid 3 may be bonded to the housing 2 with an adhesive as in the first embodiment.

図18を参照して、本実施の形態の変形例の半導体装置1は、蓋3が勾配部13以外の部分において筐体2に接着剤14(図8)で接着されている。本実施の形態の変形例のこれ以外の構成は、上述した本実施の形態の構成と同一であるため同一の要素については同一の符号を付し、その説明を繰り返さない。   Referring to FIG. 18, in the semiconductor device 1 according to the modification of the present embodiment, the lid 3 is bonded to the housing 2 with an adhesive 14 (FIG. 8) at a portion other than the gradient portion 13. Since other configurations of the modification of the present embodiment are the same as the configurations of the present embodiment described above, the same elements are denoted by the same reference numerals, and description thereof is not repeated.

本実施の形態の半導体装置1によれば、内部空間4の開口部10は一の辺10aと一の辺10aと交差する他の辺10bとを含み、突起部12は一の辺10aに設けられた第1の突起片12fと他の辺10bに設けられた第2の突起片12sとを含み、勾配部13は第1の突起片12fと係合する第1の勾配部分13fと第2の突起片12sと係合する第2の勾配部分13sとを含んでいる。   According to the semiconductor device 1 of the present embodiment, the opening 10 of the internal space 4 includes one side 10a and another side 10b that intersects the one side 10a, and the protrusion 12 is provided on the one side 10a. The first protruding piece 12f and the second protruding piece 12s provided on the other side 10b, and the gradient portion 13 includes a first gradient portion 13f and a second gradient portion 13f that engage with the first protruding piece 12f. And a second gradient portion 13s that engages with the protruding piece 12s.

そのため、蓋3は第1の突起片12fと第1の勾配部分13fとの係合および第2の突起片12sと第2の勾配部分13sとの係合により、蓋3は2箇所で筐体2に係合されている。したがって、1箇所で係合する場合と比較して、蓋3を筐体2にしっかりと係合することができる。   Therefore, the lid 3 has two housings at two locations by engaging the first projecting piece 12f with the first gradient portion 13f and engaging the second projecting piece 12s with the second gradient portion 13s. 2 is engaged. Therefore, compared with the case where it engages at one place, the lid | cover 3 can be firmly engaged with the housing | casing 2. FIG.

また、第1の突起片12fと第1の勾配部分13fとの係合および第2の突起片12sと第2の勾配部分13sとの係合が互いに交差する位置でなされているため、第1の突起片12fと第1の勾配部分13fとの係合と、第2の突起片12sと第2の勾配部分13sとの係合とを同時に行うことができる。したがって、蓋3を筐体2にしっかりと係合させつつ迅速に取り付けることができる。   In addition, since the engagement between the first protruding piece 12f and the first gradient portion 13f and the engagement between the second protruding piece 12s and the second gradient portion 13s are performed at positions intersecting each other, the first The engagement between the protruding piece 12f and the first gradient portion 13f and the engagement between the second protruding piece 12s and the second gradient portion 13s can be performed simultaneously. Therefore, the lid 3 can be quickly attached while being firmly engaged with the housing 2.

また、開口部10の」一の辺10aと他の辺10bに対応する蓋3の2辺がともに斜めに傾いた状態で、第1の突起片12fおよび第2の突起片12sのそれぞれの第1の傾斜面12aに沿って蓋3を筐体2に取り付けることができる。したがって、蓋3を筐体2にしっかりと係合させつつ開口近傍の信号端子8などに蓋3が接触することを抑制することができる。   In addition, in the state where the two sides of the lid 3 corresponding to the one side 10a and the other side 10b of the opening 10 are both inclined obliquely, the first projection piece 12f and the second projection piece 12s are The lid 3 can be attached to the housing 2 along one inclined surface 12a. Accordingly, the lid 3 can be prevented from coming into contact with the signal terminals 8 and the like in the vicinity of the opening while the lid 3 is firmly engaged with the casing 2.

上記の各実施の形態は、適時組み合わせることができる。
今回開示された実施の形態はすべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は上記した説明ではなくて特許請求の範囲によって示され、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることを意図される。
The above embodiments can be combined in a timely manner.
The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

1 半導体装置、2 筐体、2a ケース、2b 金属ベース板、3 蓋、3a 内部空間と反対側の面、4 内部空間、5 シリコーンゲル、6 金属厚箔付絶縁基板、6a 半導体チップ、6b 金属ワイヤー、7 電極、8 信号端子、9 ナット、10 開口部、10a 一の辺、10b 他の辺、11 ねじ、12 突起部、12a 第1の傾斜面、12f 第1の突起片、12s 第2の突起片、13 勾配部、13a 第2の傾斜面、13f 第1の勾配部分、13s 第2の勾配部分、14 接着剤。   DESCRIPTION OF SYMBOLS 1 Semiconductor device, 2 housing | casing, 2a case, 2b metal base board, 3 lid | cover, 3a surface opposite to internal space, 4 internal space, 5 silicone gel, 6 insulating board with metal thick foil, 6a semiconductor chip, 6b metal Wire, 7 electrode, 8 signal terminal, 9 nut, 10 opening, 10a one side, 10b other side, 11 screw, 12 protrusion, 12a first inclined surface, 12f first protrusion, 12s second Projecting piece, 13 slope portion, 13a second slope surface, 13f first slope portion, 13s second slope portion, 14 adhesive.

Claims (4)

一方側に開口する内部空間を有し、かつ前記内部空間側へ突き出す突起部を有する筐体と、
前記内部空間を閉塞可能であり、かつ前記閉塞した状態で前記突起部に係合する勾配部を有する蓋とを備え、
前記突起部は、前記突起部が突き出す方向に前記突起部の先端に向かって前記突起部の厚みが小さくなるように傾斜している第1の傾斜面を含み、
前記勾配部は、前記第1の傾斜面と対向し、かつ前記蓋の端縁に向かって前記勾配部の厚みが小さくなるように傾斜している第2の傾斜面を含み、
前記閉塞した状態で前記蓋の前記内部空間と反対側の面に対する前記第1の傾斜面の傾斜角は前記第2の傾斜面の傾斜角より大きくなるよう構成されている、半導体装置。
A housing having an internal space opening on one side and having a protrusion protruding toward the internal space;
A lid that can close the internal space and has a slope portion that engages with the protrusion in the closed state;
The protrusion includes a first inclined surface that is inclined so that the thickness of the protrusion decreases toward the tip of the protrusion in a direction in which the protrusion protrudes,
The gradient portion includes a second inclined surface that faces the first inclined surface and is inclined so that the thickness of the gradient portion decreases toward the edge of the lid,
The semiconductor device is configured such that, in the closed state, an inclination angle of the first inclined surface with respect to a surface of the lid opposite to the internal space is larger than an inclination angle of the second inclined surface.
前記内部空間の前記開口部は一の辺と前記一の辺と交差する他の辺とを含み、
前記突起部は前記一の辺に設けられた第1の突起片と前記他の辺に設けられた第2の突起片とを含み、
前記勾配部は前記第1の突起片と係合する前記第1の勾配部分と前記第2の突起片と係合する前記第2の勾配部分とを含んでいる、請求項1に記載の半導体装置。
The opening of the internal space includes one side and another side intersecting the one side;
The protruding portion includes a first protruding piece provided on the one side and a second protruding piece provided on the other side,
2. The semiconductor according to claim 1, wherein the gradient portion includes the first gradient portion that engages with the first protrusion piece and the second gradient portion that engages with the second protrusion piece. apparatus.
前記蓋は、前記勾配部以外の部分において前記筐体にねじ止め可能に構成されている、請求項1または2に記載の半導体装置。   The semiconductor device according to claim 1, wherein the lid is configured to be screwed to the casing at a portion other than the slope portion. 前記蓋は、前記勾配部以外の部分において前記筐体に接着されている、請求項1または2に記載の半導体装置。   The semiconductor device according to claim 1, wherein the lid is bonded to the housing at a portion other than the slope portion.
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