JP5171905B2 - Ultrasonic bonding control apparatus and ultrasonic bonding control method - Google Patents

Description

  This invention is an improvement of an ultrasonic bonding control apparatus in which ultrasonic vibration is applied to a contact that presses a bonding member against a member to be bonded to bond both members, and in particular, completion of ultrasonic bonding is a thickness dimension. Ultrasonic waves that are optimal when the material to be joined is heavy in terms of the joint strength and the mechanical vibration of the material to be joined that occurs upon completion of joining is too small. The present invention relates to an improvement of a bonding control device and an ultrasonic bonding control method.

  Ultrasonic welding equipment that melts and joins metal members with frictional heat accompanying ultrasonic vibration applied to the pressure contact surface, and ultrasonic bonding equipment that uses physical bonding that acts between active surfaces generated by friction polishing are widely used. However, it is difficult to determine whether or not the ultrasonic bonding has been normally completed if there is no dimensional change associated with melting. Generally, whether or not predetermined ultrasonic energy has been applied for a predetermined time. It can be considered that the normal joining was performed.

  However, if the applied ultrasonic energy is small, there is a problem that the predetermined bonding force cannot be obtained. If the applied ultrasonic energy is too large, the bonded portion and bonded peeled portion are mixed, resulting in a decrease in bonding strength. Therefore, it is necessary to adjust the ultrasonic energy according to the material and size of the applied material and the environmental temperature.

  Under such circumstances, ultrasonic vibration is applied to the die pad through the tool while the die pad as the joining member is pressed against the metal heat sink as the member to be joined by the tool connected to the ultrasonic wave generation source. An ultrasonic bonding method is disclosed in which the ultrasonic vibration by the ultrasonic wave generation source is stopped or reduced according to the vibration state of the metal heat radiating plate or its supporting member (see, for example, Patent Document 1).

Specifically, as ultrasonic bonding progresses, the member to be bonded (metal heat radiating plate) starts to vibrate in synchronization with the bonding member (die pad), but this state is detected directly and more than necessary. The ultrasonic vibration energy is not applied.
In addition, by detecting the vibration state of the metal heat sink, it is possible to determine whether or not an appropriate joint state has been obtained, and always obtain an appropriate joint state without causing a problem with the metal heat sink. Insist that you can.

  Further, an ultrasonic bonding apparatus having ultrasonic generation means, means for applying ultrasonic waves generated from the ultrasonic generation means to the bonding member, and a jig for holding a fixing material for fixing a member to be bonded to the bonding member. The disclosed means includes means for detecting the relative vibration state of the joining member and the joined member, means for diagnosing the detection result, and means for feeding back the diagnosis result to the ultrasonic wave generation means. The laser Doppler effect is used as the detection means. The detector which was made is used (for example, refer patent document 2).

  Specifically, as ultrasonic bonding progresses, the second workpiece, which is the member to be bonded, starts to vibrate in synchronization with the tool that vibrates the first workpiece, which is the bonding member, and the vibration amplitude of the tool The difference in amplitude between the two gradually decreases and eventually becomes zero, so that it is determined that the joining is completed.

JP 09-045737 A Japanese Patent Laid-Open No. 05-206224

  The ultrasonic bonding method and apparatus according to Patent Document 1 stop ultrasonic vibration generated by an ultrasonic wave generation source in accordance with the vibration state of a member to be bonded or a support member thereof, and suppress the occurrence of problems associated with application of excessive energy. However, if the weight of the member to be joined is large and the vibration amplitude of the member to be joined at the completion of joining is too small for the ratio of the joining strength, or the vibration amplitude on the excitation side decreases with the completion of joining. As a result, when the vibration amplitude of the member to be joined is too small, it becomes difficult to detect the vibration of the member to be joined by the vibration sensor, and there is a problem that accurate joining determination cannot be performed.

In the case of the ultrasonic bonding apparatus and the quality monitoring method according to Patent Document 2, vibration sensors are provided on both the vibration tool side (bonding member side) and the vibration side (bonded member side). Only the vibration tool side vibrates and eventually the vibration side vibrates, and when the joining is completed, both amplitudes coincide with each other and the amplitude deviation becomes zero.
Therefore, when the weight of the member to be joined is large in the ratio of the joining strength and the vibration amplitude of the member to be joined upon completion of joining is too small, it becomes difficult to detect the vibration of the member to be joined by the vibration sensor. However, there is a problem that accurate bonding determination cannot be performed.

  Further, in the case of Patent Document 2, a non-contact type vibrometer using the laser Doppler effect is used, and the apparatus becomes expensive, and the output signals of the vibration sensors on the excitation side and the excitation side are not suitable. There is a phase difference, and it is not possible to simply calculate the deviation between the two, and there is a problem in that bonding separation occurs due to a response delay in bonding determination.

  The present invention has been made to solve the above-mentioned problems, and the weight of the member to be joined is heavy for the joining strength, and the mechanical vibration amplitude of the member to be joined becomes small, thereby completing the joining. It is an object of the present invention to provide an ultrasonic bonding control apparatus that can accurately determine whether or not bonding is good even when ultrasonic bonding is difficult to detect the vibration amplitude, and can prevent outflow of defective products.

In the ultrasonic bonding control apparatus according to the present invention, a bonding member is pressed against a member to be bonded by a contact pressed by a pressing drive mechanism, and an output voltage of a vibrator driving voltage source is applied to the contact. Ultrasonics for an ultrasonic bonding apparatus that joins the joining member and the member to be joined by ultrasonic vibration in a direction parallel to the pressure contact surface that is generated by being coupled and vibrated by the contactor. An abnormality detection that responds to a detection output of a first vibration sensor that is detachably in close contact with the member to be joined or a second vibration sensor provided on the contactor side, which is a sonic joining control device. The abnormality detection unit includes a first band filter or a second band filter, a joining completion determination unit, and a first abnormality determination unit. The center frequency of the second band filter is within a frequency band of rubbing vibration caused when the joining member and the member to be joined are pressed and frictionally slid. After the signal amplitude of the output signal of the first vibration sensor obtained through the band-pass filter or the output signal of the second vibration sensor obtained through the second band-pass filter changes from increasing to decreasing, When it reaches less than a predetermined lower limit value, it is determined that ultrasonic bonding has been completed, and the first abnormality determination means determines that the elapsed time from the start of excitation of the contact reaches a predetermined maximum set time. Necessary to perform normal joining in a plurality of ultrasonic joinings that have been experimentally measured in advance as the maximum set time, if the joining completion judgment means by the joining completion judging means is not obtained. The maximum statistical time or the maximum amount of energy applied is applied, and the arrival of the maximum set time is determined when the elapsed time after the start of vibration to be measured reaches the maximum set time or when the vibrator drive voltage source It is determined that the generated output has arrived when the output energy accumulated over time has reached a predetermined maximum energy amount.

An ultrasonic bonding control device according to the present invention is a device for bonding a bonding member and a member to be bonded using an ultrasonic vibrator driven from a vibrator driving voltage source, and a first member that contacts the member to be bonded. The vibration sensor or the second vibration sensor fixed on the excitation side does not detect the mechanical vibration of the member to be joined, but detects the frictional vibration due to the sliding friction. Completion of joining is determined by detecting that rubbing vibration disappears upon completion.
Therefore, even in ultrasonic bonding where the weight of the member to be bonded is heavy and the mechanical vibration amplitude of the member to be bonded is small and it is difficult to detect the vibration amplitude due to the completion of bonding. By directly detecting whether or not there is a deviation in vibration amplitude between the vibration side and the vibration-excited side based on the presence or absence of rubbing vibration, it is possible to accurately determine whether or not the joining is good and to prevent the outflow of defective products.

  In addition, the frequency of rubbing vibration accompanying sliding friction is larger than the frequency of ultrasonic vibration applied to the member to be joined, and mechanical vibration is achieved by matching the center frequency of the bandpass filter to the frequency band of rubbing vibration. Since the noise of the component can be removed and the frictional vibration component can be emphasized and detected, it is possible to accurately determine whether the joining is good or not even with a weak detection signal.

1 is an overall configuration diagram of an ultrasonic bonding control apparatus according to Embodiment 1 of the present invention. FIG. 2 is a partial plan view of the ultrasonic bonding control apparatus along line AA in FIG. 1. FIG. 2 is an overall control block diagram of the ultrasonic bonding control apparatus of FIG. 1. It is a time chart for description of the ultrasonic bonding control apparatus of FIG. 3 is a flowchart for explaining the operation of the ultrasonic bonding control apparatus of FIG. 1. It is a flowchart for detailed operation | movement description of the one part process in FIG. It is a whole block diagram of the ultrasonic bonding control apparatus which concerns on Embodiment 2 of this invention. FIG. 8 is an overall control block diagram of the ultrasonic bonding control apparatus of FIG. 7. It is a time chart for description of the ultrasonic bonding control apparatus of FIG. It is a flowchart for operation | movement description of the ultrasonic bonding control apparatus of FIG. It is a flowchart for detailed operation | movement description of the one part process in FIG.

Hereinafter, preferred embodiments of an ultrasonic bonding control device of the present invention will be described with reference to the drawings.
Embodiment 1 FIG.
(1) Detailed Description of Configuration of Ultrasonic Bonding Control Device According to Embodiment 1 Hereinafter, FIG. 1 which is an overall configuration diagram of an ultrasonic bonding control device according to Embodiment 1 of the present invention, and the superstructure of FIG. The ultrasonic bonding control apparatus according to the first embodiment is shown in FIG. 2 which is a partial plan view of the ultrasonic bonding control apparatus along line AA and FIG. 3 which is an overall control block diagram of the ultrasonic bonding control apparatus in FIG. The configuration will be described in detail.

1 and 2, the ultrasonic bonding apparatus 100 </ b> A is configured by first to fourth parts, and the first part has a U-shaped side surface formed by a base 110, a back column 111, and a top plate 112. It is comprised by the stationary mechanism and the below-mentioned movable part and drive part which were provided in this stationary mechanism.
The second part is carried in and mounted on the upper surface of the base 110, and the member to be joined 120 such as ceramic, glass, or iron plate, which is transferred upward in FIG. The thin film tape-like joining member 121 is sequentially joined, and this joining member 121 is unwound from a reel reel (not shown).
The third part is a transfer movement mechanism 160 that sequentially transfers the members to be joined 120, and the fourth part is an overall control panel 190 </ b> A installed in the vicinity of the base 110.

  First, a wall plate 113 for holding and fixing a balancer 136 (to be described later) is fixed to the top plate 112 in the first portion, and a first depression is formed on the upper surface of the base 110 via a buffer member 115 made of rubber, for example. A vibration sensor 116 is attached, and the first vibration sensor 116 comes into contact with the lower surface of the member 120 that has been brought in via non-hardening grease (not shown).

  The first vibration sensor 116 is a semiconductor sensor using, for example, a piezoelectric element that responds in the band of several hundreds KHz to several MHz. The first vibration sensor 116 detects a pressure based on the vibration generated in the member 120 and outputs a voltage signal proportional to the pressure. It is generated and can be converted into mechanical vibration amplitude using a predetermined conversion coefficient.

Further, the non-curable grease is, for example, a gel-like silicone grease, which improves the adhesion between the first vibration sensor 116 and the member to be joined 120 and facilitates transmission of ultrasonic vibration.
The buffer member 115 is for preventing the ultrasonic vibration from being propagated and leaked to the base 110, and for example, a rubber material having a hardness of about 80 to 90 Hs is used.

  The movable part in the first part includes a contact 130 that presses the joining member 121, a third vibration sensor 137A that is fixed to the contact 130, and a first lead member 131 that is fixed to one end of the contact 130. For example, an ultrasonic transducer 132 that vibrates at a constant frequency of 20 KHz, and an ultrasonic transducer 132 that is coupled between the ultrasonic transducer 132 and one end of the first lead member 131 or the contact 130 to amplify the ultrasonic vibration. A sonic horn 133, a second lead member 134 having an ultrasonic transducer 132 fixed at one end, a first lead member 131 and a coupling block 135 fixed to the other end of the second lead member 134. The pressure sensor 144 described later and the gravity of the entire movable part are attenuated by a balancer 136, for example, an air cylinder fixed to the wall plate 113. It is driven lift at a constant thrust.

  The drive unit in the first part is fixed to the upper surface of the top plate 112, meshingly engaged with a servo motor 140 provided with a rotation sensor 141 and a screw shaft 142 which is an output rotation shaft of the servo motor 140, A press drive mechanism 143 that moves up and down in accordance with the rotation direction of the servo motor 140, a press sensor 144 that is a load cell, for example, provided between the press drive mechanism 143 and the coupling block 135 of the movable part, The movable parts 146a and 146b which are movable pistons of the auxiliary pressing mechanisms 145a and 145b, which are the air cylinders, and the pressing drive mechanism 150 fixed to the lower ends of the movable parts 146a and 146b.

A buffer member 151 made of a rubber material is bonded to the lower surface of the pressing drive mechanism 150. A partial region of the pressing drive mechanism 150 is divided into a pair of pressing plates 150a and 150b as shown in FIG. The front and rear (upper and lower positions in FIG. 2) of the bonding member 121 pressed by are pressed.
The auxiliary pressing mechanisms 145a and 145b press the bonded member 120 and the bonding member 121 against the base 110 by the pressing drive mechanism 150 to prevent scooping out of the bonded member 120 due to slight vibration, and fluctuations in the bonding point of the bonding member 121. It is for preventing.

As shown in FIG. 1 and FIG. 2, the transport movement mechanism 160 as the third part includes four lifting mechanisms 161 a (161 b to 161 d are not shown), and the tip of the movable piston of the lifting mechanism. The suction plates 162a to 162d provided on the upper side are provided, the members 120 are sucked by the suction plates 162a to 162d, the lifting mechanisms 161a to 161d are raised, and the transport movement mechanism 160 is moved upward in FIG. After stopping and lowering the elevating mechanisms 161a to 161d, opening the suction plates 162a to 162d, raising the elevating mechanisms 161a to 161d again, and moving back to the lower side in FIG. It is designed to move forward.
When the joined member 120 is moved forward (upward in FIG. 2), the joining member 121 is unwound from a reel reel (not shown) and moves together with the joined member 120.
As will be described later with reference to FIG. 3, the overall control panel 190 </ b> A that is the fourth part includes an ultrasonic bonding control device 300 </ b> A, a conveyance control unit 310, a power supply control unit 330 </ b> A, and a drive control unit 340.

In FIG. 3, the ultrasonic bonding control apparatus 300A is mainly configured by a program memory 302A that cooperates with the microprocessor 301, and its control functions are an abnormality detection unit 320A, a carry-in transfer command unit 603, and a press control command unit. 604 and a power supply control command unit 606.
The conveyance control unit 310 that responds to the carry-in / transfer command from the carry-in / transfer command unit 603 is constituted by, for example, a programmable controller, and controls the work transfer mechanism 311 mainly composed of the above-described air cylinder, and the joined member 120 or the joined member. The workpiece 121 is lifted / transferred / lowered, or the auxiliary pressing mechanisms 145a and 145b are controlled to be pressed.

The drive control unit 340 rotationally drives the servo motor 140 via the servo amplifier 342 based on the speed pattern 341 corresponding to the carry-in / transfer command from the carry-in / transfer command unit 603, and the rotation speed detected by the rotation sensor 141 becomes the target. The contactor 130 is driven closer to the joining member 121 or is driven away from the joint member 121 by controlling the rotational speed to be such that the contactor 130 is driven.
Further, the drive control unit 340 controls the torque generated by the servo motor 140 via the servo amplifier 342 based on the pressing force pattern 344 responsive to the pressing command from the pressing control command unit 604, and is detected by the pressing sensor 144. The contact 130 is pressed against the bonding member 121 by controlling the pressing force to be a target pressing force.

The power supply control unit 330A sets the target value of the output voltage or output current of the vibrator drive voltage source 332 based on the voltage / current generation pattern 331 that responds to the excitation control command from the power supply control command unit 606, and the power supply sensor 333. The negative feedback control is performed while monitoring the output voltage or output current of the vibrator driving voltage source 332 detected by the above.
The vibrator driving voltage source 332 operates with, for example, a commercial power supply of AC100V and generates a high voltage with a constant high frequency of 20 KHz at AC1000V or less via a booster circuit. The output voltage and output current are boosted. It is detected at the front stage or the rear stage of the circuit.
Further, the target voltage or the target current is gradually reduced by a command from an amplitude suppression means 321c described later, and the target output voltage is suppressed so that the detected output current does not become excessive, or the target output is set so that the detected output voltage does not become excessive. The current is suppressed.

The abnormality detection unit 320A includes a first band filter 321a and a low frequency band filter 323a, and outputs the output signal of the first vibration sensor 116 as first abnormality determination means 321b, amplitude suppression means 321c, and joining completion determination means. 324 is input.
The second abnormality determination means 322bb responds to the output signal of the low frequency band filter 323a to which the output signals of the power supply sensor 333 and the third vibration sensor 137A are input.

The center frequency of the first band-pass filter 321a is much higher than the frequency of the output voltage generated by the vibrator drive voltage source 332 (for example, 20 KHz), and the joining member 121 and the joined member 120 are pressed to cause friction. The filter characteristics are selected and determined so that the input / output gain becomes a large value at a specific frequency of, for example, 200 KHz to 1 MHz, which is a frequency band of rubbing vibration accompanying sliding.
The center frequency of the low frequency band filter 323a is a frequency corresponding to the frequency (for example, 20 kHz) of the output voltage generated by the vibrator driving voltage source 332. In the first embodiment, the third vibration sensor 137A is a contactor. 130 mechanical vibrations are detected.

  The joining completion determination means 324 decreases after the output signal of the first vibration sensor 116 obtained via the first band-pass filter 321a increases after exceeding a first determination threshold value H11 described later with reference to FIG. Then, it is determined that the ultrasonic bonding is completed when the value is less than the predetermined lower limit value H13.

  The joining completion determining means 324 sequentially stores the output signal data of the first vibration sensor 116 obtained via the first bandpass filter 321a in the old data update storage means 324a that is a shift register. After comparing the old and new data with a predetermined time difference by the data comparison means 324b and the signal amplitude is changed from less than the first determination threshold value H11 to more than the first determination threshold value H11 in the joining completion determination unit 324c, the data is greater than the first determination threshold value H11. It is determined that the ultrasonic bonding has been completed by detecting that the value has decreased below a predetermined lower limit value H13, which is a small value.

  Further, the joining completion determination unit 324 has elapsed less than a predetermined minimum set time after the start of excitation of the contact 130 until the output signal data starts to increase and decreases to determine the joining completion. In some cases, a premature abnormality determination unit 324d that determines that there is a bonding abnormality or invalidates at least the bonding completion determination is provided.

  However, the predetermined minimum set time applies the statistical minimum time or the minimum amount of energy required to perform normal bonding in a plurality of ultrasonic bondings experimentally measured in advance, and the minimum set time Is determined by measuring the elapsed time after the start of vibration or by determining whether the output energy accumulated with the passage of time from the output of the vibrator drive voltage source 332 has reached a predetermined minimum energy amount. It is like that.

The first abnormality determining means 321b determines that a joining abnormality has occurred unless the joining completion judgment by the joining completion judging means 324 is obtained within the maximum set time from the start of excitation of the contact 130.
However, the maximum set time here refers to the statistical maximum time or maximum energy amount required to perform normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance. The arrival of the set time is determined by measuring the elapsed time after the start of excitation, or by determining whether the output energy accumulated with the passage of time from the output of the vibrator drive voltage source 332 has reached a predetermined maximum energy amount. It has come to be.

  In the amplitude suppression unit 321c, the signal amplitude of the output signal of the first vibration sensor 116 obtained through the first bandpass filter 321a has changed from less than a first determination threshold value H11 described later with reference to FIG. It is presumed that the joining has started by detecting that the time has elapsed after a predetermined delay time Δτ or decreased to a value less than the second determination threshold value H12 which is a value larger than the lower limit value H13, and driving the transducer The target output voltage or the target output current for the voltage source 332 is gradually decreased with time.

  The second abnormality determination unit 322bb compares the standard characteristic measured and stored with respect to the output characteristic of the detection signal of the power supply sensor 333 and the output characteristic of the newly measured detection signal to the vibrator driving voltage source 332. The presence or absence of a power supply abnormality is determined based on whether or not an output current corresponding to the supplied input voltage is obtained, and the contact signal 130 is compared by comparing the detection signal of the power supply sensor 333 and the output signal of the low frequency band filter 323a. The presence or absence of equipment abnormality is determined by determining whether the vibration amplitude of the included vibration mechanism is a vibration amplitude corresponding to the output current of the vibrator drive voltage source 332.

When either the first abnormality determination unit 321b or the second abnormality determination unit 322bb makes an abnormality determination, an abnormality generation processing command 618A is generated to perform abnormality notification, storage and storage of the abnormality occurrence information, and automatic stop of the apparatus. It is like that.
When neither the first abnormality determination unit 321b nor the second abnormality determination unit 322bb makes an abnormality determination, a continuation command 614 that permits continuous operation is generated unless a manual stop command (not shown) is generated. It is supposed to be.

(2) Detailed Description of Action / Operation of Ultrasonic Bonding Control Device According to Embodiment 1 Hereinafter, an ultrasonic bonding control device according to Embodiment 1 of the present invention configured as shown in FIGS. An outline of the control operation will be described based on the time chart shown in FIG.
FIG. 4 (A) shows the work loading / unloading operation. The workpieces, which are the plate-like member 120 and the thin-film tape-like joining member 121, are sequentially moved so that the ultrasonic joining portions are sequentially contacted. In order to move to the lower part of 130, the transport movement mechanism 160, the lifting mechanisms 161a to 161d and the suction plates 162a to 162d cooperate to advance in the first time zone 401a and carry out carry-in and carry-in. 'Retreat with empty load in the time zone 401aa, and repeat the same operation from the sixth time zone 406a.

FIG. 4B shows the raising / lowering operation of the contact 130 by the servo motor 140. The lowering operation is performed in the subsequent time zone 401b following the first time zone 401a, and is raised in the preceding time zone 406b of the sixth time zone 406a. The operation is to be performed.
FIG. 4C shows the ascending / descending operation of the pressing drive mechanism 150 by the auxiliary pressing mechanisms 145a and 145b. The descending operation is performed in the subsequent time zone 401c following the subsequent time zone 401b, and the further preceding time of the preceding time zone 406b. The ascending operation is performed in the band 406c.
The auxiliary pressing mechanisms 145a and 145b, which are air cylinders, move up and down in conjunction with the pressing drive mechanism 143 that lifts and lowers the contact 130, and performs the downward pressing operation of the pressing drive mechanism 150 when the lowering of the contact 130 is completed. The contact 130 is lifted after the start of the lifting operation of the pressing drive mechanism 150.

FIG. 4D shows the pressing operation of the contact 130 by the servo motor 140. The pressing operation is performed in the subsequent time zone 401d following the subsequent time zone 401c, and in the further preceding time zone 406d of the preceding time zone 406c. A press release operation is performed.
There are various ways of thinking about the rising / lowering pattern of the pressing force. For example, the pressing force may be gradually increased as shown by the dotted line in FIG.

  FIG. 4E shows the peak value of the output voltage of the vibrator driving voltage source 332 applied to the ultrasonic vibrator 132, and the subsequent state in which the bonding member 121 is pressed by the contact 130 with a pressure equal to or higher than a predetermined pressure. The vibration starts at the first time 401e following the time zone 401d, reaches the fourth time 404e while maintaining a predetermined output voltage, gradually decreases after the fourth time 404e, and the output voltage by the fifth time 405e described later. Is zero.

The maximum set time Tmax, which is the time between the vibration start time 401e and the vibration completion time 405e, is the statistical maximum time required for normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance. Alternatively, the maximum energy amount is applied, and when the maximum set time arrives, the elapsed time is measured, or the output energy accumulated with the passage of time of the generated output of the vibrator drive voltage source 332 becomes the predetermined maximum energy amount. Judgment is made based on whether or not it has been reached.
After the vibration completion time 405e, the process moves to the sixth time zone 406a via the preceding time zones 406d, 406c, and 406b.

FIG. 4F shows the vibration amplitude on the vibration side obtained from the third vibration sensor 137A provided for measuring the vibration amplitude on the contact 130 side through the low frequency band filter 323a.
The vibration of the contact 130 starts from a vibration start time 401f that is the same time as the vibration start time 401e, and a second time that is a slide end time while maintaining a sliding vibration amplitude that changes depending on how dirty the sliding surface is. At 402f, the sliding surface is polished from the second time 402f to the fourth time 404f, and the vibration amplitude is gradually reduced. After that, the vibration suppression is started at the fourth times 404e and 404f, so that the vibration amplitude is further increased. The vibration amplitude gradually decreases until the vibration completion time 405f is reached, and the vibration amplitude becomes zero.

FIG. 4 (G) shows the signal amplitude on the excitation side by the first vibrator 116, and this output signal shows the signal voltage due to frictional vibration due to sliding friction unlike the case of FIG. 4 (F). The vibration start time 401g, the sliding end time 402g, and the joining start time 404g are passed through to the vibration completion time 405g.
In FIG. 4G, the time from when the signal amplitude due to rubbing vibration exceeds the first determination threshold value H11 to less than the second determination threshold value H12 until the joining start determination is performed, and the friction This shows a case where the time from when the signal amplitude due to vibration exceeds the first determination threshold value H11 until the delay time Δτ elapses coincides, and the delay time Δτ predicts and estimates the junction start time. It is time for.

Next, the details of the control operation of the ultrasonic bonding control apparatus according to Embodiment 1 of the present invention configured as shown in FIGS. 1 to 3 will be described based on the flowcharts shown in FIGS.
In FIG. 5, a process 600 is a start step of a control operation of the microprocessor 301 which is a main component of the ultrasonic bonding control apparatus 300A, and a subsequent process 601a raises the contact 130 by the servo motor 140, and an auxiliary pressing mechanism 145a, This is a step of generating an ascending command so as to raise the pressing drive mechanism 150 by 145b. When the ascending operation has already been performed in Step 613, which will be described later, the ascending operation in Step 601a is not necessary.
Subsequent step 602 is a step of generating a workpiece loading / unloading command. With this command, the transfer control unit 310 lowers the suction plates 162a to 162d in FIGS. 1 and 2 to suck and raise the member 120 to be joined. After the moving mechanism 160 is moved forward, the suction plates 162a to 162d are lowered / released / raised, and a series of conveyance control is performed to move back to the initial position due to an empty load.

The subsequent step 601b is a step of generating a command to lower the contact 130 to the servo motor 140 and lowering the pressing drive mechanism 150 by the auxiliary pressing mechanisms 145a and 145b. The step 601b includes steps 601a, 602, and 601b. The process block 603 is a carry-in / transfer command generation process, and these operations are the first time zone 401a and the first 'time zone 401aa in FIG. 4 (A), the first time zone 401b in FIG. 4 (B), FIG. It is executed in the first time zone 401c of 4 (C).
A subsequent step 604 is a pressing control command generation step for generating a command for pressing the contact 130 against the joining member 121 with respect to the servo motor 140.

In the subsequent step 605, it is determined whether or not the pressing force of the contact 130 has reached a predetermined value. If not, NO is determined and the process returns to step 604. If it has reached, the determination is YES and step 606 is performed. These steps are executed after the first time zone 401d in FIG. 4D.
Note that the raising / lowering control and pressing control of the contact 130 are executed by the drive control unit 340 of FIG. 3, and the microprocessor 301 monitors the output of the pressing sensor 144 and only generates and stops the pressing control command. It has become.

  A subsequent step 606 is a power supply control command generation step for applying a drive voltage of a predetermined frequency to the ultrasonic vibrator 132. When the power supply control command is generated, the power supply control unit 330A of FIG. Based on this, the output voltage or output current of the vibrator drive voltage source 332 is subjected to negative feedback control.

  Subsequent step 607 is a step in which step 606 is an excitation completion timing determination step for determining a command generation period for generating a drive voltage. The maximum set time Tmax applied in this command generation period is experimentally measured in advance. The maximum statistical time or amount of energy required to perform normal bonding in multiple ultrasonic bondings is applied, and the arrival of the maximum set time measures the elapsed time or vibrator drive It is determined based on whether or not the output energy accumulated over time with the generated output of the voltage source 332 has reached a predetermined maximum energy amount. If not, NO is determined and the process proceeds to process block 620A. If so, a determination of YES is made and the process proceeds to step 608.

The process block 620A is a joint quality determination process for determining whether or not a joint is good and whether or not an abnormality has occurred, as will be described later with reference to FIG. 6, and the subsequent process 617A reads whether or not the process 628 of FIG. If an abnormality has occurred, a determination of YES is made and the process proceeds to step 618A. If no abnormality has occurred, a determination of NO is made and the process proceeds to step 609a.
Step 609a reads whether or not step 624f in FIG. 6 stores the joining start determination. If joining has started, a determination of YES is made and the process proceeds to step 619. If joining has not started, a determination of NO is made. This is a determination step in which the process returns to step 604.

Step 619 is a step of generating a command for gradually decreasing the target output voltage or output current over time with respect to the power supply control unit 330A of FIG. 3 and then proceeding to Step 609b.
Step 609b reads whether or not step 627 in FIG. 6 stores the joining completion determination. If joining is completed, a determination of YES is made and the process proceeds to step 612. If joining is not completed, a determination of NO is made. This is a determination step in which the process returns to step 604.
Step 618A is an abnormality occurrence processing step of notifying at least occurrence of abnormality, storing and storing abnormality occurrence information, and then proceeding to step 612.

Step 608 is a step in which a first abnormality determination is performed, an overtime abnormality process including at least abnormality notification is performed, and the process proceeds to Step 612.
Step 612 is a step of issuing a drive stop command to the ultrasonic transducer 132 to the power supply control unit 330A, and steps 606 to 612 are performed in the steps of FIGS. 4 (E), (F), and (G). The operation from the 1st time 401e to the 5th time 405e is executed.
A subsequent step 613 is a step of generating a command to stop pressing the contact 130 and a command to raise the contacts 130 and the auxiliary pressing mechanisms 145a and 145b to the power supply control unit 330A, which are shown in FIGS. , (B) in the sixth time zone 406d, 406c, 406b.
The subsequent step 614 is a step for determining whether or not to continue the operation. If an operation stop request by a manual operation switch (not shown) is generated or if the abnormal process in step 618A is to stop the operation, NO is determined. A determination is made and the process proceeds to the operation end process 615. If it is permitted to continue operation, a determination of YES is made and the process returns to step 601a.
In the operation end process 615, when a restart command is generated by a manual operation switch (not shown), the operation start process 600 is started.

In FIG. 6, step 621 is a subroutine program start step indicated by a process block 620A in FIG. 5, and step 629 provided after a series of control programs is a return step to shift to step 617A in FIG. .
Step 622 executed subsequent to step 621 is the second abnormality determination means 322bb shown in FIG. 3, and is compared with the standard characteristic relating to the output voltage vs. output current characteristic by the vibrator driving voltage source 332. If the actual output current is excessive or insufficient, or if the vibration amplitude of the contactor 130 is abnormal, it is determined that the vibrator driving voltage source 332 or the ultrasonic vibrator 132 is abnormal and YES is determined. This is the determination step in which the process proceeds to step 628, and if there is no abnormality in the output current or vibration amplitude, NO is determined and the process proceeds to step 624a.

Step 624a is a step in which the old data update storage means 324a in FIG. 3 reads the first data obtained from the first bandpass filter 321a and performs a read shift on the multistage shift register in which old data before a predetermined time overflows. .
In subsequent step 624b, the new and old first data stored in step 624a are compared in size, and the process proceeds to step 624c.
In step 624c, it is determined whether or not the first data has increased to a value equal to or higher than the first determination threshold value H11 as a comparison result in step 624b. If the excess is confirmed, a determination of YES is made and the process proceeds to step 624d. Otherwise, it is a determination step in which a determination of NO is made and the process proceeds to step 629, whereby the arrival of a time approximately in the middle between the second time 402g and the fourth time 404g in FIG. 4G is determined. Become.

In step 624d, it is stored that the first data has exceeded the first determination threshold value H11, and the process proceeds to step 624e.
In step 624e, it is determined whether or not the first data has decreased to the second determination threshold value H12 or less as a comparison result in step 624b. If less than is confirmed, a determination of YES is made and the process proceeds to step 624f. If not, it is a determination step for determining NO and proceeding to step 629. In step 624f, it is determined that the joining has started, the arrival of the fourth time 404e in FIG. It is supposed to be.
In step 624e, instead of performing the comparison determination with the second determination threshold value H12, it can be replaced with a determination whether or not the predetermined delay time Δτ has elapsed.

Subsequent Step 624g determines whether or not the first data has decreased to the lower limit H13 or less as a comparison result in Step 624b. If less than the lower limit value H13 is confirmed, a determination of YES is made and the process proceeds to Step 626b. In other words, it is a determination step of determining NO and proceeding to step 629.
Step 626b corresponds to the premature abnormality determination unit 324d of FIG. 3, and determines whether the determination elapsed time is equal to or less than a predetermined minimum set time. If the elapsed time is too short, a determination of YES is made and step 628 or The process proceeds to Step 629, and if it is not too small, NO is determined and the process proceeds to Step 627. The process 627 stores the fact that the joining is completed and proceeds to Process 629, and the process 628 is abnormal. Is stored and the process proceeds to step 629.

Note that the predetermined minimum set time in the step 626b is the minimum time or the minimum energy amount required for performing normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance. The arrival of the set time is determined by measuring the elapsed time after the start of excitation, or by determining whether the output energy accumulated over time with the generated output of the vibrator drive voltage source 332 has reached a predetermined minimum energy amount. It has come to be.
Therefore, according to the step 626b, the elapsed time from when the excitation to the contact 130 is started until the output signal data of the first vibration sensor 116 changes from rising to decreasing to determine the joining completion is set to a predetermined minimum setting. If it is less than the time, it is determined that the connection is abnormal, or at least the determination of completion of the connection is invalidated. When the joining completion determination is invalidated, the process moves from step 626b to step 629 according to the flow shown by the dotted line.

When the abnormality occurrence and vibration suppression command are not stored in step 628 and step 624f, in FIG. 5, from step block 620A to step 617A (NO determination), step 609a (NO determination), step 604, and step 605. The process block 620A is repeatedly executed through the processes 606 and 607 (determination of NO). If the process 607 makes a determination of YES, the process shifts to the process 608 to exit the cyclic routine.
If the occurrence of abnormality is determined before that, the process proceeds to step 618A to exit the cyclic routine, and when the vibration suppression command is stored, the cyclic routine including step 619 is performed, and in step 606, the ultrasonic transducer 132 is detected. The applied voltage is gradually decreased.

  Also, if the joint completion determination is stored in step 627 before the YES determination is made in step 607, YES is determined in step 609b in FIG. 5 to exit the cyclic routine, but there is no joining completion determination and no occurrence of abnormality. If YES is determined in step 607, the routine is exited and the process proceeds to step 608, where the first abnormality determination is performed.

(3) Key Points and Features of Ultrasonic Bonding Control Device According to Embodiment 1 As is clear from the above description, the ultrasonic bonding control device according to Embodiment 1 of the present invention is a contact pressed from the pressing drive mechanism 143. The joining member 121 is pressed into contact with the member to be joined 120 by the child 130, and the ultrasonic vibrator 132 to which the output voltage of the vibrator driving voltage source 332 is applied is connected to the contact 130 and is vibrated to be pressed. An ultrasonic bonding control apparatus 300A for an ultrasonic bonding apparatus 100A that bonds the bonding member 121 and the member to be bonded 120 by ultrasonic vibration in a direction parallel to the surface. An abnormality detection unit 320A that responds to the detection output of the first vibration sensor 116 that is in close contact with the attachment / detachment is provided, and the abnormality detection unit 320 is provided. A includes a first band filter 321a, a bonding completion determination unit 324, and a first abnormality determination unit 321b. The center frequency of the first band filter 321a is pressed by the bonding member 121 and the bonded member 120. In the frequency band of friction vibration caused by friction sliding, the joining completion determining means 324 has a signal amplitude of an output signal of the first vibration sensor 116 obtained through the first band filter 321a. After the change from increasing to decreasing, it is determined that the ultrasonic joining has been completed because it has become less than the predetermined lower limit value, and the first abnormality determining means 321b has elapsed time from the start of excitation of the contact 130. If the joining completion judgment means 324 does not obtain the joining completion judgment by the time when the predetermined maximum set time is reached, it is judged that the joining is abnormal, and the maximum As the set time, the statistical maximum time or maximum energy amount required to perform normal bonding in multiple ultrasonic bondings that have been experimentally measured in advance is applied, and the arrival of the maximum set time has elapsed since the start of excitation. Time is measured, or it is determined that the generated output of the vibrator driving voltage source has arrived when the output energy accumulated over time has reached a predetermined maximum energy amount.

  The abnormality detection unit 320A further includes second abnormality determination means 322bb that responds to an output signal of a power supply sensor 333 that is voltage or current detection means provided in an input circuit or an output circuit of the vibrator driving voltage source 332. The second abnormality determination unit 322bb compares the standard characteristic measured and stored with respect to the output characteristic of the detection signal of the power supply sensor 333 and the output characteristic of the newly measured detection signal to drive the vibrator. The presence or absence of power supply abnormality is determined based on whether or not an output current corresponding to the input voltage supplied to the voltage source 332 is obtained.

As described above, the power supply sensor 333 for the vibrator driving voltage source 332 is provided, and the second abnormality determination unit 322bb is added to monitor the output signal of the vibrator driving voltage source 332.
Accordingly, since the presence or absence of abnormality of the vibrator drive voltage source 332 is detected in parallel with the bonding quality determination process in the ultrasonic bonding operation process, it is possible to prevent defective products from flowing out and to generate an abnormality. The cause is clarified and abnormality processing can be easily performed.
In addition, it is confirmed that the signal output of the first vibration sensor 116 or the third vibration sensor 137A has become zero when the joining is completed, and that the signal output is not stopped due to the power supply abnormality in the determination that the signal output of the first vibration sensor 116 or the third vibration sensor 137A becomes zero. By doing so, erroneous determination can be avoided.

  The joining completion determining means 324 compares the output signal data of the first vibration sensor 116 obtained through the first bandpass filter 321a with the old and new data with a predetermined time difference, and the signal amplitude is the first. After the above change from less than one determination threshold H11 to the above, it is determined that the ultrasonic bonding is completed by detecting that the value has decreased to less than a predetermined lower limit H13 that is smaller than the first determination threshold H11. It is like that.

As described above, when the signal amplitude of the output signal of the first vibration sensor 116 changes from increasing to decreasing in time series and becomes less than the predetermined lower limit value H13, it is determined that the ultrasonic bonding is completed. ing.
Therefore, both the generation of sliding friction and the disappearance of sliding friction due to the completion of joining are judged in combination, and the joining completion judgment is made, and it is difficult to detect materials and frictional heat that hardly undergo dimensional changes due to ultrasonic joining. Even with ultrasonic bonding to materials, it is possible to accurately determine the completion of bonding.

  The joining completion determination unit 324 further includes an elapsed time from when the excitation to the contact 130 is started to when the output signal data changes from rising to decreasing and performing the joining completion determination is less than a predetermined minimum set time. If there is, it is determined that the bonding is abnormal, or at least the bonding completion determination is invalidated, and the predetermined minimum set time is used to perform normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance. The required statistical minimum time or minimum energy amount is applied, and when the minimum set time arrives, the elapsed time after the start of excitation is measured or the generated output of the vibrator drive voltage source 332 is elapsed. It is determined based on whether or not the output energy accumulated along with has reached a predetermined minimum energy amount.

As described above, when the time when the joining completion determination is performed is too early, it is a joining abnormality or at least the joining completion determination is invalidated.
Accordingly, since the time period during which the joining completion determination is valid is limited, the probability that an erroneous joining determination is performed even if the signal output temporarily increases due to noise malfunctioning is improved and lowered.

  The abnormality detection unit 320A further includes an amplitude suppression unit 321c, and the amplitude suppression unit 321c has a signal amplitude of the output signal of the first vibration sensor 116 obtained through the first bandpass filter 321a. Joining by detecting that a predetermined delay time Δτ has elapsed after changing from less than one determination threshold value H11 to more than or less than a second determination threshold value H12 that is larger than the lower limit value H13. The target output voltage or the target output current for the vibrator driving voltage source 332 is assumed to have started, and gradually decreases with time.

As described above, the signal amplitude by the first vibration sensor 116 obtained via the first bandpass filter 321a decreases to the second determination threshold value H12 after exceeding the first determination threshold value H11, or is predetermined. When the delay time Δτ elapses, the target output voltage or the target output current for the vibrator drive voltage source 332 starts to gradually decrease.
Therefore, when the signal amplitude detected by the first vibration sensor 116 changes from increasing to decreasing with the progress of frictional sliding, the excitation amplitude is suppressed, and excessive peeling causes bond separation and crack breakage. It can be prevented from occurring.

  The abnormality detection unit 320A further includes a low-frequency band filter 323a to which an output signal of the third vibration sensor 137A is input, and the third vibration sensor 137A is provided with an excitation close to the contact 130. The low-frequency band filter 323a is a band filter that operates with a frequency of an output voltage generated by the vibrator driving voltage source 332 as a center frequency, and the second filter is a vibration sensor for detecting a vibration amplitude of the mechanism. Further, the abnormality determination means 322bb compares the detection signal of the power supply sensor 333 and the output signal of the low frequency band filter 323a so that the vibration amplitude of the excitation mechanism including the contact 130 is the vibrator drive voltage source 332. It is determined whether the vibration amplitude corresponds to the output current.

As described above, the third vibration sensor 137A and the low-frequency band filter 323a for detecting the vibration amplitude of the vibration mechanism are provided, and the second abnormality determination unit 322bb determines whether or not the vibration mechanism is abnormal. It is supposed to be.
Accordingly, in the ultrasonic bonding operation process, the presence / absence of an abnormality in the vibration mechanism including the vibrator driving voltage source 332 and the ultrasonic vibrator 132 is detected in parallel with the bonding quality determination process. In addition to being prevented from flowing out, the cause of the abnormality is clarified and the abnormality processing can be easily performed.

  The pressing drive mechanism 143 is pressed and driven by a servo motor 140 that is driven and controlled by a drive control unit 340. A rotation sensor 141 and a pressing sensor 144 are connected to the drive control unit 340 as input signals, and the drive control is performed. The unit 340 includes a servo amplifier 342 having a speed control mode and a torque control mode. In the speed control mode, the rotation speed of the servo motor 140 detected by the rotation sensor 141 matches a predetermined acceleration / deceleration pattern 341. Negative feedback control is performed to drive the contact 130 toward or away from the joining member 121, and in the torque control mode, the contact 130 and the joining member 121 detected by the pressure sensor 144. Is a predetermined pressing force pattern 344. The joining member 121 and the joined member 120 are gradually increased while maintaining a constant value, the pressing force is released when the output of the vibrator driving voltage source 332 is stopped, and the contactor 130 is driven to be separated. Are to be carried or transported.

As described above, the approach / separation drive and the press drive of the contact 130 are performed by the servo motor controlled in the speed control mode and the torque control mode.
Accordingly, the contactor 130 can be driven to approach / separate quickly, and can be brought into contact with the joining member 121 at a very low speed to prevent the joining member 121 or the joined member 120 from being broken due to the collision of the rotating inertial body.
Further, the pressing force is detected and accurately controlled by the pressing sensor 144, and stable ultrasonic bonding can be performed.

  The contact 130 is attached and fixed to one end of the first lead member 131, and the ultrasonic transducer 132 is attached and fixed to one end of the second lead member 134, and the first lead member 131 and the second lead member 131 are fixed. The other end of the lead member 134 is fixed to a common coupling block 135, and an ultrasonic wave that amplifies ultrasonic vibration between the ultrasonic transducer 132 and one end of the contact 130 or the first lead member 131. The contact 130, the first lead member 131, the coupling block 135, the second lead member 134, the ultrasonic transducer 132, and the ultrasonic horn 133 constitute a movable part that is connected by a horn 133. The movable part is pressed and driven from the servo motor 140 via the pressing sensor 144, and the entire gravity of the movable part is opposed to the installation. And it has been reduced by the balancer 136.

As described above, the pressure sensor 144 is installed between the pressing drive mechanism by the servo motor 140 and the movable part including the ultrasonic wave generation source, and the gravity of the entire movable part is reduced by the balancer 136 so that the pressing force of the contactor 130 is reduced. It does not work as.
Accordingly, it is possible to accurately detect the pressing force acting on the contact 130 by the press sensor 144, and since the ultrasonic vibration is not directly applied to the press sensor 144, the detection characteristics of the press sensor 144 are deteriorated due to the ultrasonic vibration. Further, since the ultrasonic vibrator 132 does not perform unnecessary vibration of the weight body, power consumption is suppressed.

  The vibrator driving voltage source 332 constitutes a power supply control unit 330A, and the power supply control unit 330A is configured so that the output voltage or output current detected by the power supply sensor 333 matches the target output voltage or output current. While negative feedback control is performed on the output voltage of the vibrator drive voltage source 332, the target output voltage is suppressed so that the product of the target output voltage and the detected output current is a predetermined value or less, or the target output current is The target output current is suppressed so that the product of the detected output voltage is not more than a predetermined value.

As described above, the output voltage or output current of the high-frequency variable voltage source supplied to the ultrasonic transducer 132 is subjected to negative feedback control using the power supply sensor 333.
Accordingly, a target output voltage or output current can be obtained even if the load resistance varies, and the presence / absence of abnormality can be accurately determined by comparing the output signal of the power supply sensor 333 and the output signal of the vibration sensor 116. It is possible to prevent excessive vibration amplitude from occurring.

  In the ultrasonic bonding control method in the ultrasonic bonding control apparatus 300A according to the first embodiment of the present invention, the transducer driving is performed after the pressing force of the contact 130 on the bonding member 121 becomes a predetermined value or more. A power source control command generation step 606 that generates an output voltage of the voltage source 332 and sets the output voltage to zero after a predetermined time, and an addition that determines the timing for releasing the pressing force of the contact 130 by setting the output voltage to zero. Vibration completion time determination step 607, abnormality determination step 617A that responds to the determination result of power supply abnormality by the second abnormality determination means 322bb, joining completion determination step 620A that executes the joining completion determination means 324, and amplitude suppression When the means 321c generates a vibration amplitude suppression command, the vibration for gradually decreasing the output voltage or output current of the vibrator drive voltage source 332 A control start step 619, upon detecting a power failure by the abnormality determining step 617A, and a abnormal processing step 618A of performing at least abnormality notification.

  In the excitation completion timing determination step 607, the maximum set time is applied as a command generation period, and neither the abnormality determination nor the joining completion determination is performed within the command generation period in the excitation completion timing determination step 607. Sometimes a first abnormality determination is performed, and an overtime abnormality process including at least abnormality notification is performed. When it is determined that there is an abnormality in the abnormality determination step 617A, and it is determined that the connection is completed in the bonding completion determination step 620A. When this is done, the excitation operation is stopped in a time shorter than the preset maximum setting time.

As described above, the abnormality detection method using the ultrasonic bonding control device includes the power control command generation step, the vibration completion timing determination step, the abnormality determination step, the bonding completion determination step, the vibration suppression start step, the abnormality The procedure is a generation process step, and when a vibration amplitude suppression command is generated within the vibration command generation period, the vibration amplitude gradually decreases, and abnormality determination or joining completion determination is performed within the vibration command generation period. If it is performed, the vibration operation is stopped, and when neither determination result of abnormality determination nor joint completion determination is obtained within the vibration command generation period, the first abnormality determination is performed and the overtime abnormality processing is performed. It has become.
Therefore, it is possible to continue joining normally after completion of normal joining, or to perform abnormality processing according to the abnormality content when an abnormality is detected, or according to an overtime determination where neither determination of completion of joining or occurrence of abnormality can be obtained In addition, the occurrence of ultrasonic vibration is suppressed at the start of bonding, and the occurrence of bond peeling and crack breakage due to excessive vibration application is prevented.
In addition, the vibration operation is automatically stopped at the time of joining completion judgment and when an abnormality occurs, and the vibration extension time after joining is shortened to prevent the occurrence of joint peeling or crack breakage due to excessive vibration application. .

Embodiment 2. FIG.
(1) Detailed Description of Configuration of Ultrasonic Bonding Control Device According to Embodiment 2 of the Invention FIG. 7 and FIG. 7 are overall configuration diagrams of an ultrasonic bonding control device according to Embodiment 2 of the present invention. 7 is an overall control block diagram of the ultrasonic bonding control apparatus 7, and the configuration thereof will be described in detail with a focus on differences from the ultrasonic bonding control apparatus of FIGS. 1 to 3.
In each figure, the same reference numerals indicate the same or equivalent parts, and the subscripts A and B corresponding to the reference numerals indicate the corresponding parts due to differences in the embodiment. In the case of the second embodiment, the vibration side is also caused by sliding friction. The main difference is that a second vibration sensor 137B for detecting rubbing vibration is provided.
In FIG. 7, the ultrasonic bonding apparatus 100 </ b> B is composed of a first part to a fourth part, and the first part is composed of a base 110, a back column 111, and a top plate 112, similar to the ultrasonic bonding control apparatus of FIG. The stationary side surface is constituted by a U-shaped stationary mechanism, and a movable part and a driving part described later provided in the stationary mechanism.
However, the first vibration sensor 116 provided on the upper surface of the base 110 in FIG. 1 is provided on the upper surface of a later-described transfer platform 170.

The same applies to the second part. The member to be joined 120 such as ceramics, glass, or iron plate, which is carried on the upper surface of the base 110 and transferred upward in FIG. 2, and the surface of the member 120 to be joined. It is constituted by a thin film tape-like joining member 121 which is sequentially joined at a predetermined interval, and this joining member 121 is unwound from a reel reel (not shown).
The third part is a transport stand 170 for sequentially transferring the members 120 to be joined, and the fourth part is an overall control panel 190B installed in the vicinity of the base 110.

The movable part in the first part is configured in the same manner as in FIG. 1, except that the contact 130 has a second vibration for measuring the sliding frictional vibration on the vibration side instead of the third vibration sensor 137A. A sensor 137B is provided, and this second vibration sensor 137B is for detecting rubbing vibration due to sliding friction as in the case of the first vibration sensor 172 described later, and is in the range of several hundreds KHz to several MHz. A pressure signal can be detected.
The drive unit in the first part is configured in the same manner as in FIG.

The transport base 170 as a third part is moved up and down in FIG. 2 by an elevator mechanism (not shown) and a forward / backward drive mechanism, and then moved upward in FIG. The mounted member 120 is sequentially advanced and transferred by lowering the elevating mechanism again after mounting and then moving and returning downward in FIG.
A first vibration sensor 172 is provided on the upper surface of the carrier base 170 via a buffer member 171, and the first vibration sensor 172 is in contact with the lower surface of the member 120 to be bonded via a non-hardening grease (not shown). It has become.
As will be described later with reference to FIG. 8, the overall control panel 190 </ b> B that is the fourth part includes an ultrasonic bonding control device 300 </ b> B, a conveyance control unit 310, a power supply control unit 330 </ b> B, and a drive control unit 340.

In FIG. 8, the ultrasonic bonding control device 300B is mainly configured by a program memory 302B that cooperates with the microprocessor 301, and its control functions are an abnormality detection unit 320B, a carry-in transfer command unit 603, and a press control command unit. 604 and a power supply control command unit 606.
The conveyance control unit 310 that responds to the carry-in / transfer command from the carry-in / transfer command unit 603 and the drive control unit 340 that responds to the commands from the carry-in / transfer command unit 603 and the pressing control unit 604 are the same as in FIG.
The power supply control unit 330B that responds to the power supply control command unit 606 is similar to the case of FIG. 3, but the function of gradually reducing the target output voltage or output current is not provided in the case of FIG.
The abnormality detection unit 320B includes a first band filter 321a and a second band filter 322a, and the joining completion determination unit 324 and the first abnormality determination are performed based on the output signals of the first vibration sensor 172 and the second vibration sensor 137B. The means 321b operates.

The newly added sensor abnormality determination means 323b is configured such that the first vibration sensor 172 has a relative ratio between output signals of the first band filter 321a and the second band filter 322a that is outside a predetermined upper and lower limit value range. Alternatively, it is determined that at least one of the second vibration sensors 137B is abnormal.
The second abnormality determination means 322b compares the standard characteristic measured and stored with respect to the output characteristic of the detection signal of the power supply sensor 333 with the output characteristic of the newly measured detection signal, to the vibrator drive voltage source 332. The presence / absence of power supply abnormality is determined based on whether an output current corresponding to the supplied input voltage is obtained.
If any of the first abnormality determination unit 321b, the second abnormality determination unit 322b, and the sensor abnormality determination unit 323b performs an abnormality determination, or if the bonding completion determination by the bonding completion determination unit 324 is premature. An abnormality occurrence processing command 618B is generated to perform abnormality notification, storage and storage of abnormality occurrence information, and automatic stop of the apparatus.
When such an abnormality does not occur, a continuation command 614 for permitting continuous operation is generated unless a manual stop command (not shown) is generated.

(2) Detailed Description of Action / Operation of Ultrasonic Bonding Control Device According to Embodiment 2 of the Invention Hereinafter, ultrasonic bonding control according to Embodiment 2 of the present invention configured as shown in FIGS. The outline of the control operation of the apparatus will be described based on the time chart shown in FIG. 9, focusing on the differences from the case of FIG.
FIG. 9A shows the work loading / unloading operation similar to FIG. 4A. In FIG. 4, the workpiece 120 is transferred by the upper transfer moving mechanism 160. On the other hand, in the case of FIG. 9, it is different in that it is transported by a transport stand 170 provided below the joined member 120.
FIG. 9B shows the raising / lowering operation of the contact 130 as in FIG. 4B.
FIG. 9C shows the raising / lowering operation of the pressing drive mechanism 150 in the same manner as FIG.
FIG. 9D shows the pressing operation of the contact 130 as in FIG. 4D.

  FIG. 9E shows the peak value of the output voltage of the vibrator drive voltage source 332 as in FIG. 4E, and the subsequent time zone 401d when the joining member 121 is pressed to a predetermined pressure by the contactor 130. The vibration starts at the first time 401e that follows, reaches the third time 403e while maintaining the predetermined output voltage, and the output voltage gradually increases from the third time 403e to the fourth time 404e, which is a joining completion time described later. The voltage gradually increases and then decreases rapidly after the fourth time 404e, and the output voltage is zero before the fifth time 405e, which is a vibration completion time described later.

  The maximum set time Tmax, which is the period for generating the vibration command, which is the period from the vibration start time 401e to the vibration completion time 405e, was required to perform normal bonding in a plurality of ultrasonic bondings that were experimentally measured in advance. The statistical maximum time Tmax or the maximum energy amount is applied, and when the command generation time arrives, the elapsed time is measured, or the generated output energy of the vibrator drive voltage source 332 is accumulated over time. The determination is made based on whether or not a predetermined maximum energy amount has been reached.

  The minimum set time Tmin, which is the shortest command generation period that is the period from the vibration start time 401e to the gradual increase start time 403e, is statistically required for performing normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance. The minimum set time Tmin or the minimum energy amount is applied, and when the shortest command generation time arrives, the elapsed time is measured, or the generated output energy of the vibrator drive voltage source 332 is accumulated over time. The determination is made based on whether or not a predetermined maximum energy amount has been reached.

After the vibration completion time 405e, the process moves to the sixth time zone 406a via the preceding time zones 406d, 406c, and 406b.
FIG. 9F shows the signal amplitude of the rubbing vibration detected by the second vibration sensor 137B provided on the contact 130 side as in FIG. 4G. In the case of FIG. Is different.
FIG. 9G shows the signal amplitude of the rubbing vibration detected by the first vibration sensor 172 provided on the joined member 120 side as in FIG. 4G.

9 (E), (F), (G) and FIGS. 4 (E), (F), (G) are different from each other in that the drive voltage for the ultrasonic transducer 132 is changed from the middle in FIG. It is gradually increased, and this is promoted when the completion of joining is delayed.
Such gradual increase control is not limited to the second embodiment, but can be applied to the first embodiment described above.
In the case of FIG. 4E, the second vibration sensor 137B for detecting frictional vibration is not provided, and the detection output of the first vibration sensor 172 exceeds the first determination threshold value H11. The applied voltage to the ultrasonic transducer 132 is gradually decreased after a predetermined delay time Δτ from the time point, whereas in the case of FIG. 9E, the joining completion judging means 324 judges the joining completion. That is, the applied voltage to the ultrasonic transducer 132 is suddenly decreased and stopped at the fourth time 404e.
However, even in the case of FIG. 9E, the applied voltage to the ultrasonic transducer 132 may be gradually reduced and stopped as indicated by a dotted line without being suddenly reduced and stopped.

Next, the ultrasonic bonding control apparatus according to Embodiment 2 of the present invention configured as shown in FIGS. 7 and 8 is different from FIGS. 5 and 6 based on the flowcharts shown in FIGS. Details of the control operation will be described focusing on the points.
In FIG. 10, a process 600 is a start step of the control operation of the microprocessor 301 which is a main component of the ultrasonic bonding control apparatus 300B, but the processes 600 to 606 and processes 613 to 615 are the same as FIG. Since the operation is performed, the description is omitted.
Step 607 following step 606 is a step in which step 606 is an excitation completion timing determination step for determining a command generation period in which a drive voltage is generated, and the maximum set time Tmax that becomes the command generation period is determined by experimental measurement in advance. The statistical maximum time or maximum amount of energy required for normal joining in multiple ultrasonic joinings applied is applied, and the arrival of the maximum set time measures the elapsed time or the transducer It is determined based on whether or not the output energy accumulated over time with the generated output of the drive voltage source 332 has reached a predetermined maximum energy amount, and if not reached, NO is determined and the process proceeds to process block 620B. If it has reached, a determination of YES is made and the process proceeds to step 608.

  The process block 620B is a bonding quality determination process for determining whether or not the bonding is normal and whether or not an abnormality has occurred, as will be described later with reference to FIG. 11, and the subsequent process 617B reads whether or not the process 628 in FIG. If an abnormality has occurred, a determination of YES is made and the process proceeds to step 618B. If no abnormality has occurred, a determination of NO is made and the process proceeds to step 609a.

Step 609a reads out whether or not step 627 in FIG. 11 stores the joint completion determination. If the completion determination is not stored, the determination is NO and the process returns to step 604, and the completion determination is stored. This is a determination step of determining YES and proceeding to step 612b.
Step 612b is a step of proceeding to step 613 after generating a command to suddenly stop the target output voltage or output current for the power supply control unit 330B of FIG.
Step 618B is an abnormality generation processing step that notifies at least the occurrence of abnormality, stores and stores abnormality occurrence information, and then proceeds to step 612a.

In step 608, since the determination of YES is made in step 607, the abnormality determination is not performed within the predetermined vibration period, but the bonding completion determination is not obtained. After the determination is made and at least the occurrence of the overtime abnormality is stored, the process proceeds to step 612a.
Step 612a is a step of issuing a drive stop command to the ultrasonic transducer 132 to the power supply control unit 330B, and then proceeds to step 613.

In FIG. 11, step 621 is a subroutine program start step indicated by a process block 620B in FIG. 10, and step 629 provided after a series of control programs is a return step to shift to step 617B in FIG. .
Step 622a executed subsequent to step 621 corresponds to the second abnormality determination means 322b shown in FIG. 8, and if there is a power supply abnormality, a determination of YES is made and the process proceeds to step 628, and there is no power supply abnormality. If NO, the process proceeds to step 622b.
Step 622b corresponds to the sensor abnormality determination means 323b shown in FIG. 8, and if a sensor abnormality occurs, a determination of YES is made and the process proceeds to step 628. If there is no abnormality, a determination of NO is made. This is a determination step for proceeding to step 624a.

In the process block 623 constituted by the processes 624a and 625a, the old data update storage means 324a in FIG. 8 reads the first data and the second data obtained from the first band filter 321a and the second band filter 322a. This is a step of performing a read shift on the multistage shift register in which old data before a predetermined time overflows.
In subsequent step 624b, the new and old first data stored in step 624a are compared in size, and the process proceeds to step 624ce.

  In step 624ce, it is determined whether or not the first data has increased to the first determination threshold value H11 or more as a comparison result in step 624b, and eventually has become the lower limit threshold value H13 or less. If the increase / decrease is not confirmed, NO is determined and the process proceeds to step 629, whereby the time immediately before the disappearance of the vibration amplitude in FIG. 9 (G) is detected.

In subsequent step 625b, the new and old second data stored in step 625a are compared in size, and the process proceeds to step 625ce.
In step 625ce, it is determined whether or not the second data has increased to the first determination threshold value h11 or more as a comparison result in step 625b and eventually becomes the lower limit threshold value h13 or less. If the increase / decrease is not confirmed, NO is determined and the process proceeds to step 629, whereby the time immediately before the disappearance of the vibration amplitude in FIG. 9 (F) is detected.

In step 626a, it is determined whether or not the increase / decrease values of the latest first data and second data stored in steps 624a and 625a are relatively matched, and if they match, a determination of YES is made. Then, the process proceeds to step 626b, and if they do not match, NO is determined and the process proceeds to step 628.
However, when the completion of joining is determined by only one of the first vibration sensor 172 and the second vibration sensor 137B, the step 624ce or the step 625ce and the step 626a are omitted.

  Step 626b corresponds to the premature abnormality determination unit 324d of FIG. 8 and determines whether or not the determination elapsed time is equal to or shorter than a predetermined minimum set time. If the elapsed time is too short, a determination of YES is made and step 628 or The process proceeds to Step 629, and if it is not too small, NO is determined and the process proceeds to Step 627. The process 627 stores the fact that the joining is completed and proceeds to Process 629, and the process 628 is abnormal. Is stored and the process proceeds to step 629.

Note that the predetermined minimum set time in step 626b is the minimum statistical time or minimum energy amount required to perform normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance. The arrival of the set time is determined by measuring the elapsed time after the start of excitation, or by determining whether the output energy accumulated over time with the generated output of the vibrator drive voltage source 332 has reached a predetermined minimum energy amount. It has come to be.
Therefore, according to the process 626b, the time from when the vibration to the contact 130 is started until the output signal data of the first vibration sensor 172 and the second vibration sensor 137B changes from increasing to decreasing until the joining completion determination is performed. When the elapsed time is less than a predetermined minimum set time, it is determined that the joining is abnormal or at least the joining completion judgment is invalidated. When the joining completion determination is invalidated, the process moves from step 626b to step 629 according to the flow shown by the dotted line.

  In addition, when the completion of joining and the occurrence of abnormality are not stored in step 627 and step 628, in FIG. 10, from step block 620B to step 617B (NO determination), step 609a (NO determination), step 604, step 605, and step After step 606 and step 607 (determination of NO), the process block 620B is repeatedly executed, and if step 607 makes a determination of YES, the process proceeds to step 608 to exit the cyclic routine, and before that, the determination of occurrence of abnormality is made. If it has been performed, the process proceeds to step 618B to exit the circuit routine, and if it is determined that the joining is completed, the process proceeds to step 612b to exit the circuit routine.

(3) Key Points and Features of Ultrasonic Bonding Control Device According to Embodiment 2 As is clear from the above description, the ultrasonic bonding control device according to Embodiment 2 of the present invention is contacted by the pressing drive mechanism 143. The joining member 121 is pressed into contact with the member to be joined 120 by the child 130, and the ultrasonic vibrator 132 to which the output voltage of the vibrator driving voltage source 332 is applied is connected to the contact 130 and is vibrated to be pressed. An ultrasonic bonding control apparatus 300B for the ultrasonic bonding apparatus 100B that bonds the bonding member 121 and the member to be bonded 120 by ultrasonic vibration in a direction parallel to the surface. Abnormality detection that responds to the detection output of the first vibration sensor 172 that is detachably contacted or the second vibration sensor 137B provided on the contact 130 side. The abnormality detection unit 320B includes a first band filter 321a or a second band filter 322a, a joining completion determination unit 324, and a first abnormality determination unit 321b. The center frequencies of the band-pass filter 321a and the second band-pass filter 322a are within the frequency band of rubbing vibration caused when the joining member 121 and the joined member 120 are pressed and frictionally slid. The means 324 outputs the output signal of the first vibration sensor 172 obtained via the first band-pass filter 321a or the output signal of the second vibration sensor 137B obtained via the second band-pass filter 322a. After the signal amplitude has changed from increasing to decreasing, ultrasonic bonding is completed when it reaches below the predetermined lower limit. The first abnormality determining means 321b must obtain the joining completion judgment by the joining completion judging means 324 by the time when the elapsed time from the start of excitation of the contact 130 reaches a predetermined maximum set time. The maximum set time is determined by applying the statistical maximum time or maximum energy amount required to perform normal bonding in a plurality of ultrasonic bondings that have been experimentally measured in advance. The set time arrives when the elapsed time after the start of excitation is measured, or when the output energy accumulated with the passage of time has reached the predetermined maximum energy amount. It comes to judge.

  The joining completion determining means 324 is the output signal data of the first vibration sensor 172 obtained via the first band filter 321a or the second vibration sensor obtained via the second band filter 322a. For at least one of the output signal data of 137B, the new and old data with a predetermined time difference are compared, and after the signal amplitude changes from less than the first determination threshold values H11 and h11, the first determination threshold value is exceeded. It is determined that ultrasonic bonding has been completed by detecting that the values have decreased to less than the predetermined lower limit values H13 and h13, which are small values.

As described above, the ultrasonic joining is completed when the signal amplitude of the output signal of the first vibration sensor 172 or the second vibration sensor 137B is changed from increasing to decreasing in time series and becomes less than a predetermined lower limit value. It comes to judge.
Therefore, both the generation of sliding friction and the disappearance of sliding friction due to the completion of joining are judged in combination, and the joining completion judgment is made, and it is difficult to detect materials and frictional heat that hardly undergo dimensional changes due to ultrasonic joining. Even with ultrasonic bonding to materials, it is possible to accurately determine the completion of bonding.

  The abnormality detection unit 320B includes both the first vibration sensor 172 and the second vibration sensor 137B, the first band filter 321a and the second band filter 322a, and further includes a sensor abnormality determination unit 323b. The second vibration sensor 137B is a vibration sensor that is installed close to the contact 130 and detects a rubbing vibration caused by the sliding of the joining member 121 and the member 120 to be joined. The sensor abnormality determination means 323b determines whether the first vibration sensor 172 or the second vibration sensor 172 or It is determined that at least one of the vibration sensors 137B is abnormal.

As described above, in order to detect frictional vibration due to sliding friction of the joint surface, the output signal of the second vibration sensor 137B provided on the vibration mechanism side is monitored via the second bandpass filter 322a, and the first The abnormality of the first vibration sensor 172 or the second vibration sensor 137B is detected by comparing with the output signal of the band filter 321a.
Therefore, if there is an abnormality in the adhesion between the first vibration sensor 172 and the member 120 to be joined, this can be detected and maintenance inspection can be promoted.

  In the ultrasonic bonding control method using the ultrasonic bonding control device 300B according to the second embodiment of the present invention, the transducer 130 is pressed after the pressing force of the contact 130 against the bonding member 121 becomes a predetermined value or more. A power source control command generation step 606 for generating an output voltage of the drive voltage source 332 and setting the output voltage to zero after a predetermined time, and an addition for determining the timing for releasing the pressing force of the contact 130 by setting the output voltage to zero. Vibration completion time determination step 607, abnormality determination step 617B responding to the determination result of power supply abnormality by the second abnormality determination means 322b, joining completion determination step 620B for executing the bonding completion determination means 324, and the abnormality determination When a power supply abnormality is detected in step 617B, at least an abnormality generation processing step 618B for notifying abnormality is provided.

  In the excitation completion time determination step 607, the maximum set time is applied as the command generation period, and when it is determined that there is an abnormality in the abnormality determination step 617B, and it is determined that the bonding is completed in the bonding completion determination step 620B. Oscillating operation is sometimes stopped in a time shorter than the preset maximum setting time, and either the abnormality determination or the joining completion determination is performed within the command generation period in the excitation completion timing determination step 607. When there is no abnormality, the first abnormality determination is performed, and at least the time excess abnormality process including the abnormality notification is performed.

  As described above, the abnormality detection method in the ultrasonic bonding control apparatus 300B is based on the procedure of the power control instruction generation step, the vibration completion timing determination step, the abnormality determination step, the bonding completion determination step, and the abnormality generation processing step. When the abnormality determination or the welding completion determination is performed within the vibration command generation period, the vibration operation is stopped, and both the abnormality determination and the bonding completion determination results are obtained within the vibration command generation period. When there is not, the first abnormality determination is performed and the time excess abnormality process is performed.

Therefore, it is possible to continue joining normally after completion of normal joining, or to perform abnormality processing according to the abnormality content when an abnormality is detected, or according to an overtime determination where neither determination of completion of joining or occurrence of abnormality can be obtained In addition, the ultrasonic vibration generation is stopped when normal bonding is completed, and the vibration extension time after the bonding is completed is shortened. Is prevented.
Further, the vibration operation can be automatically stopped when an abnormality occurs.

  In the power supply control command generation step 606, the output voltage or output current of the vibrator drive voltage source 332 is maintained at a constant value in the initial period immediately after the start of generation of the output voltage of the vibrator drive voltage source 332, The output voltage or output current of the vibrator driving voltage source 332 is gradually increased from the time when the minimum set time has elapsed, and the output voltage or output current of the vibrator driving voltage source 332 is reached from the time when the output suppression start time arrives. The output voltage or output current of the vibrator drive voltage source 332 is stopped when the generation stop time comes.

As described above, the output voltage or the output current is controlled to have a characteristic that gradually increases after being maintained at a predetermined value.
Therefore, when the completion of joining is delayed, the excitation amplitude can be gradually increased to promote joining.

(Description of other embodiments)
In the above description, the overall control block diagrams shown in FIGS. 3 and 8 are obtained by dividing and displaying the control contents of the overall control panels 190A and 190B in units of functions. It does not indicate.
As one example of actual configuration, the overall control panel is mainly composed of a programmable controller, and the input / output bus of this programmable controller is not only a general-purpose board for on / off control, but also an analog input / output board, digital data The special option board such as the I / O board is connected to not only the solenoid valve for the air cylinder and the operation check sensor provided in the work transfer mechanism 311 but also the servo amplifier 342 and the vibrator drive voltage source 332. They are directly connected and share some functions of negative feedback control.
Also, the carry-in transfer command unit 603, the press control command unit 604, and the power control command unit 606 in the ultrasonic bonding control devices 300A and 300B are functions shared by the programmable controller.
However, for the abnormality detection units 320A and 320B, a dedicated board composed of hardware is created and connected to the input / output bus of the programmable controller.

  This dedicated board is equipped with a dedicated microprocessor that communicates directly with the microprocessor in the programmable controller to determine the signal frequency for performing joint analysis by performing Fourier analysis of the signal waveform, and to prevent crack breakage and bond peeling. It is connected to an analysis tool for measuring the natural frequency generated.

In the above description, in the first embodiment, the mechanical vibration of the contact 130 is detected by the third vibration sensor 137A, and thus whether the vibrator driving voltage source 332 and the ultrasonic vibrator 132 are operating normally. It comes to judge.
On the other hand, in the second embodiment, the second vibration sensor 137B detects the friction vibration generated between the joining member 121 and the joined member 120 via the contact 130, and cooperates with the first vibration sensor 172. Thus, it is used as a sensor abnormality determination means 323b.
The first vibration sensor 116 that is in direct contact with the member 120 to be joined has higher sensitivity for detection of friction vibration than the second vibration sensor 173B that indirectly detects friction vibration via the contact 130. Therefore, it is suitable for accurately determining the completion of joining, but it is necessary to manage the supply of intervening non-hardening grease.

On the other hand, since the second vibration sensor 137B is fixed to the contact 130, there is an advantage that it is possible to detect the rubbing vibration stably although the sensitivity is low.
Note that it is difficult to detect both mechanical vibration and rubbing vibration with one vibration sensor because the vibration frequency is too large and cannot be avoided by changing the center frequency of the bandpass filter. .
For this reason, two vibration sensors having different response frequency bands may be fixed to the contact 130, and the mechanical vibration of the contact may be detected on the one hand and the rubbing vibration may be detected on the other hand.
As a result, it is possible to detect both the abnormality on the equipment side including the vibrator driving power source 332 and the ultrasonic vibrator 132 and the adhesion abnormality of the first vibration sensor 172.
In addition, about the abnormality determination by the side of an installation, it is also possible to measure the vibration state of a contactor in the no-load state which does not press a contactor.

  In the above description, the maximum setting time and the minimum setting time are the maximum time or the minimum time of the required time for ultrasonic bonding that has been experimentally measured in advance, or the conversion time corresponding to the maximum accumulated energy or the minimum accumulated energy. However, once the maximum setting time and the minimum setting time are calculated, it is also possible to calculate by inference by omitting experimental measurement in ultrasonic bonding with respect to similar materials.

  100A, 100B ultrasonic bonding apparatus, 110 base, 116 first vibration sensor, 120 member to be bonded, 121 bonding member, 130 contact, 131 first lead member, 132 ultrasonic transducer, 133 ultrasonic horn, 134 second lead member, 135 coupling block, 136 balancer, 137A third vibration sensor, 137B second vibration sensor, 140 servo motor, 141 rotation sensor, 143 pressure drive mechanism, 144 pressure sensor, 145a, 145b auxiliary pressure Mechanism, 146a, 146b Movable part, 150 Press mechanism, 150a, 150b Press plate, 151 Buffer member, 160 Transport movement mechanism, 161a Lifting mechanism, 162a-162d Suction plate, 170 Transport platform, 171 Buffer member, 172 Second vibration Sensor, 190A, 190B Body control panel, 300A, 300B ultrasonic bonding control device, 320A, 320B abnormality detection unit, 321a first band filter, 321b first abnormality determination means, 321c amplitude suppression means, 322a second band filter, 322b second Abnormality determination means, 323a low frequency band filter, 323b sensor abnormality determination means, 324 bonding completion determination means, 324a old data update storage means, 324b old and new data comparison means, 324c bonding completion determination section, 324d premature abnormality determination section, 330A, 330B power supply control unit, 332 vibrator drive voltage source, 333 power supply sensor, 340 drive control unit, 341 speed pattern, 342 servo amplifier, 344 torque pattern, 603 carry-in / transfer command unit, 604 pressure control command unit, 606 Control command unit, 608 hours excess process, 617A, 617B abnormality determination step, 618A, 618B abnormality processing step, 619 vibration suppression start step, 620A, 620B joined completion determination step.

Claims (13)

The contact member is pressed against the member to be joined by the contact pressed from the pressing drive mechanism, and an ultrasonic transducer to which the output voltage of the transducer drive voltage source is applied is connected to the contact and is vibrated. An ultrasonic bonding control apparatus for an ultrasonic bonding apparatus for bonding the bonding member and the member to be bonded by ultrasonic vibration in a direction parallel to a pressure contact surface generated by being vibrated by the contact,
A first vibration sensor that is detachably in close contact with the member to be joined, or an abnormality detection unit that responds to a detection output of a second vibration sensor provided on the contact side;
The abnormality detection unit includes a first band filter or a second band filter, a joining completion determination unit, and a first abnormality determination unit.
The center frequency of the first band-pass filter and the second band-pass filter is in a frequency band of rubbing vibration that is caused when the joining member and the member to be joined are pressed and frictionally slid,
The joining completion determining unit is configured to output an output signal of the first vibration sensor obtained through the first band filter or an output signal of the second vibration sensor obtained through the second band filter. After the signal amplitude changes from increasing to decreasing, it is determined that the ultrasonic bonding is completed when the signal amplitude reaches less than a predetermined lower limit value,
The first abnormality determination means is a bonding abnormality if the joining completion judgment by the joining completion judgment means is not obtained by the time when the elapsed time from the start of excitation of the contact reaches a predetermined maximum set time. Judgment,
As the maximum set time, the statistical maximum time or the maximum energy amount required for performing normal bonding in a plurality of ultrasonic bondings experimentally measured in advance is applied,
The maximum set time has arrived when the elapsed time after the start of excitation to be measured reaches the maximum set time, or the output energy accumulated with the passage of time of the generated output of the vibrator drive voltage source is a predetermined value. An ultrasonic bonding control device characterized by determining that it has arrived when the maximum amount of energy has been reached. The abnormality detection unit further includes second abnormality determination means that responds to an output signal from a power supply sensor provided in an input circuit or an output circuit of the vibrator driving voltage source,
The second abnormality determining means compares the standard characteristic measured and stored for the output characteristic of the output signal from the power supply sensor with the newly measured output characteristic of the output signal, and the vibrator drive voltage source The ultrasonic bonding control device according to claim 1, wherein a power supply abnormality is determined when an output current corresponding to the input voltage supplied to the power source is not obtained. The joining completion determination means is the output signal data of the first vibration sensor obtained through the first band filter, or the output signal of the second vibration sensor obtained through the second band filter. For at least one of the data, the old and new data with a predetermined time difference are compared, and after the signal amplitude changes from less than the first determination threshold to greater than or equal to the first determination threshold, the value is smaller than the first determination threshold. The ultrasonic bonding control device according to claim 1, wherein the ultrasonic bonding control device determines that the ultrasonic bonding is completed when it is detected that the value has decreased below a certain predetermined lower limit value. When the joining completion determination means is less than a predetermined minimum set time after the start of excitation of the contactor until the output signal data changes from rising to decreasing to determine the joining completion Is determined to be a bonding abnormality, or the bonding completion determination is invalidated,
As the minimum set time, a statistical minimum time or a minimum energy amount required for performing normal bonding in a plurality of ultrasonic bondings experimentally measured in advance is applied,
The minimum set time has arrived when the elapsed time after the start of excitation to be measured reaches the minimum set time, or the output energy accumulated with the passage of time of the generated output of the vibrator drive voltage source is a predetermined value. The ultrasonic bonding control device according to claim 3, wherein arrival is determined when the minimum energy amount is reached. The abnormality detection unit further includes amplitude suppression means,
The amplitude suppression unit is configured to change a signal amplitude of an output signal of the first vibration sensor obtained through the first bandpass filter from less than the first determination threshold to more than the first determination threshold. A target output to the transducer drive voltage source is estimated by detecting that a predetermined delay time has elapsed or that the predetermined delay time has passed or the decrease is less than a second determination threshold value that is larger than the lower limit value. 5. The ultrasonic bonding control device according to claim 3, wherein the voltage or the target output current is gradually decreased with time. The abnormality detection unit further includes a low frequency band filter to which an output signal of the third vibration sensor is input,
The third vibration sensor is fixed to the contact and detects a vibration amplitude of an excitation mechanism coupled to the contact ;
In the low frequency band filter, the operating center frequency is the frequency of the output voltage generated by the vibrator driving voltage source,
The second abnormality determination means further compares the detection signal from the power supply sensor with the output signal of the low frequency band filter, and the vibration amplitude of the vibration mechanism including the contact is determined by the vibrator drive voltage source. The ultrasonic bonding control device according to claim 2, wherein an abnormality is determined when the vibration amplitude does not correspond to the output current. The abnormality detection unit further includes both a first band filter to which the first vibration sensor is connected, a second band filter to which the second vibration sensor is connected, and a sensor abnormality determination unit. Prepared,
The second vibration sensor is fixed to the contact, and detects a friction vibration accompanying the friction sliding with the contact member pressed by the contact member and the member to be joined,
The sensor abnormality determination means is configured to detect the first vibration sensor or the second vibration when a relative ratio between output signals of the first band filter and the second band filter is outside a predetermined upper and lower limit value range. The ultrasonic bonding control device according to any one of claims 1 to 4, wherein at least one of the sensors is determined to be abnormal. The press drive mechanism is pressed and driven by a servo motor that is driven and controlled by a drive control unit, and an input signal is input to the drive control unit from a rotation sensor and a press sensor.
The drive control unit includes a servo amplifier having a speed control mode and a torque control mode as operation modes,
In the speed control mode, negative feedback control is performed so that the rotation speed of the servo motor detected by the rotation sensor matches a predetermined acceleration / deceleration pattern, and the contact is driven closer to the joining member or Drive away,
In the torque control mode, the pressure between the contact detected by the pressing sensor and the joining member gradually increases based on a predetermined pressing force pattern and maintains a constant value, and the vibrator drive voltage source The pressing force is released when the output is stopped, and the joining member and the joined member are carried in or transferred while the contactor is driven to be separated. The ultrasonic bonding control apparatus according to item. The contact is attached and fixed to one end of the first lead member,
The ultrasonic transducer is attached and fixed to one end of the second lead member,
The other end of the first lead member and the second lead member is fixed to a common coupling block,
The ultrasonic transducer and the contact or one end of the first lead member are connected by an ultrasonic horn that amplifies ultrasonic vibration,
The contact and the first lead member, the coupling block, the second lead member, the ultrasonic transducer, and the ultrasonic horn are integrated to form a movable part,
The ultrasonic bonding control according to claim 8, wherein the movable portion is pressed and driven from the servo motor via the pressing sensor, and the entire gravity is reduced by a counterbalanced balancer. apparatus. The vibrator driving voltage source constitutes a power control unit,
The power supply control unit performs negative feedback control on the output voltage of the vibrator driving voltage source so that the output voltage or output current detected by the power supply sensor is equal to the target output voltage or output current, and the target output voltage and Suppress the target output voltage so that the product of the detected output current is below a predetermined value, or suppress the target output current so that the product of the target output current and the detected output voltage is below a predetermined value The ultrasonic bonding control apparatus according to any one of claims 1 to 4, wherein the ultrasonic bonding control apparatus is characterized in that: An ultrasonic bonding control method using the ultrasonic bonding control device according to claim 3,
A power source control command generation step of generating an output voltage of the vibrator driving voltage source after the pressing force of the contact against the joining member becomes a predetermined value or more, and setting the output voltage to zero after a predetermined time;
An excitation completion time determination step for determining a timing at which the output voltage is set to zero and the pressing force of the contact is released;
An abnormality determination step that responds to the determination result of the power supply abnormality by the second abnormality determination means;
A joining completion determining step for executing the joining completion determining means;
When a power supply abnormality is detected by the abnormality determination step, at least an abnormality occurrence processing step for notifying abnormality is provided,
In the vibration completion time determination step, a predetermined maximum set time is applied as the command generation period, and when it is determined that the abnormality is determined in the abnormality determination step, and when it is determined that the bonding is completed in the bonding completion determination step Stop the excitation operation in a time shorter than the preset maximum setting time,
When neither the abnormality determination nor the joining completion determination is performed within the command generation period in the vibration completion timing determination step, a first abnormality determination is performed, and an overtime abnormality process including at least an abnormality notification is performed. An ultrasonic bonding control method characterized by the above. An ultrasonic bonding control method using the ultrasonic bonding control device according to claim 5,
A power source control command generation step of generating an output voltage of the vibrator driving voltage source after the pressing force of the contact against the joining member becomes a predetermined value or more, and setting the output voltage to zero after a predetermined time;
An excitation completion timing determination step for determining a timing for releasing the pressing force of the contact by setting the output voltage to zero;
An abnormality determination step that responds to the determination result of the power supply abnormality by the second abnormality determination means;
A joining completion determining step for executing the joining completion determining means;
A vibration suppression start step of gradually decreasing the output voltage or output current of the vibrator driving voltage source when the amplitude suppression means generates a vibration amplitude suppression command;
When a power supply abnormality is detected by the abnormality determination step, at least an abnormality occurrence processing step for notifying abnormality is provided,
In the excitation completion timing determination step, a predetermined maximum set time is applied as the command generation period, and when neither the abnormality determination nor the joining completion determination is performed within the command generation period in the excitation completion timing determination step The first abnormality determination is performed, the time excess abnormality process including at least abnormality notification is performed,
When the abnormality is determined to be abnormal in the abnormality determination step, and when it is determined that the bonding is completed in the bonding completion determination step, the excitation operation is stopped in a time shorter than the preset maximum setting time. An ultrasonic bonding control method characterized by the above. In the power supply control command generation step, the output voltage or output current of the vibrator drive voltage source is maintained at a constant value in an initial period immediately after the start of generation of the output voltage of the vibrator drive voltage source, and a predetermined minimum setting From the point of time, gradually increase the output voltage or output current of the vibrator drive voltage source,
From the time when the output suppression start command is generated, the output voltage or output current of the vibrator driving voltage source is gradually decreased, and when the generation stop command is generated, the output voltage or output current of the vibrator driving voltage source is reduced. The ultrasonic bonding control method according to claim 11, wherein the ultrasonic bonding control method is stopped.

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