JP5167529B2 - Foreign object detection device - Google Patents

Description

  BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a foreign object detection device that detects whether or not a foreign object exists inside a measurement object, and particularly suitable for detecting a foreign object such as a lump, tumor, marker, etc. present in a living body in a non-contact manner. Relates to the device.

  Conventional open abdominal surgery that greatly cuts the body in surgery has a problem such as a heavy burden on the patient and a delay in recovery, and therefore, a minimally invasive surgical method has been introduced. For example, laparoscopic surgery or thoracoscopic surgery Is gradually increasing. Laparoscopic surgery or thoracoscopic surgery is a procedure in which multiple small holes are made in the abdomen and chest, and forceps and a camera are inserted through these holes. Alternatively, it is required to quickly identify the position of a tumor, a marker inserted in advance, or the like.

  By the way, as a method or apparatus for detecting a lump or tumor existing in a living body, for example, Patent Document 1 discloses the presence of a lump or tumor by contacting an ultrasonic transducer with a living body and detecting resonance characteristics from the living body. A tactile sensor capable of sensing is disclosed. Further, Patent Document 2 discloses a nozzle that can inject air, an endoscope that projects line laser light through a predetermined pattern filter and receives reflected light, and receives the reflected light for visualization. There has been proposed a surface hardness distribution measuring apparatus comprising an observation means.

  In Patent Document 3, a phase difference is generated between a vibrator brought into contact with a living body, a vibration detection sensor that detects a reflected wave from the living body, and an input waveform to the vibrator and an output waveform from the vibration detection sensor. In some cases, a lump inspection apparatus for a living body having a phase shift circuit for shifting the phase difference to zero is disclosed. Further, in Patent Document 4, a sensor unit that radiates vibrations such as ultrasonic waves from a sensor unit inserted into a blood vessel toward a measured part that is an affected part such as a tumor and reflects the reflected vibration reflected from the measured part. A hardness measurement catheter sensor is disclosed in which the signal processing unit measures the hardness of the part to be measured based on the change in the phase of the radiation vibration and the reflected vibration in the signal processing unit.

Japanese Unexamined Patent Publication No. 2005-111280 JP 2005-91265 A Japanese Patent Laid-Open No. 2004-283547 JP 2004-261233 A

  However, such a conventional method or apparatus does not have a suitable method that is capable of supporting a laparoscopic operation or a thoracoscopic operation by quickly detecting the presence of a tumor or a marker or the like without contact and lugging. For example, in the case of using the ultrasonic wave disclosed in Patent Document 1 or 4, it is possible to detect a lump etc. without contact, but when air exists between the detection device and the lump, the detection sensitivity There is a problem that it cannot be used in thoracoscopic surgery.

  In addition, the device disclosed in Patent Document 3 or 4 cannot detect a foreign object in a non-contact manner, and the device disclosed in Patent Document 1, 2, or 3 is a large scale through a small hole opened in the abdomen or chest. There is a problem that it is difficult to construct a compact device that can be taken in and out.

  In view of such conventional problems, the present invention can detect a lump, tumor, marker, or other foreign substance existing in a living body in a non-contact manner, and is compact, safe and excellent in operability. It is an object of the present invention to provide a foreign object detection method and apparatus that can be suitably used for thoracoscopic surgery.

A foreign matter detection method according to the present invention is a foreign matter detection method for detecting a foreign matter based on a phase difference generated in a measurement area when a uniform forced vibration having a constant frequency and amplitude is given to an object to be measured. measuring a displacement vibration occurring in the measurement region by injection, and determining a phase difference between the measured displacement vibrations in the measurement region, the method comprising determining the presence or absence of a foreign object by the degree of retardation, is the determination Displaying the result in a Lissajous figure or image .

A foreign object detection device according to the present invention is a foreign object detection device that detects a foreign object based on a phase difference generated in a measurement region when a uniform forced vibration having a constant frequency and amplitude is applied to a device under test. Pressurizing means for blowing air to the area, a pressure gauge for detecting the pressure of the blown air, a displacement gauge for detecting displacement vibration generated in the measurement area by the blown air, a signal from the displacement gauge and the pressure Computation means for calculating the phase difference of the signal from the meter, and display means for outputting the signal from the computation means.

The foreign object detection device according to the present invention is a foreign object detection device that detects a foreign object based on a phase difference that occurs in a measurement area when a uniform forced vibration having a constant frequency and amplitude is applied to an object to be measured. A pressurizing means for blowing air to the measurement area , a plurality of displacement meter groups for detecting displacement vibration generated in the measurement area by the blown air, and an arithmetic means for calculating a phase difference between signals from the displacement gauge group, Display means for outputting a signal from the calculation means.

Furthermore, the foreign object detection device according to the present invention is a foreign object detection device that detects a foreign object based on a phase difference that occurs in a measurement area when a uniform forced vibration having a constant frequency and amplitude is applied to an object to be measured. and pressurizing means for blowing air into the measurement zone, a displacement gauge for detecting the displacement vibration occurring in the measurement region by the air blown, and recording means for storing a signal from the displacement meter, recorded by said recording means Computation means for calculating a phase difference between displacement vibrations at different positions generated on the surface of the object to be measured, and display means for outputting a signal from the computation means.

  In the above invention, the displacement meter is preferably composed of an optical fiber sensor. Further, the display means is preferably capable of displaying a signal from the calculation means as a Lissajous figure, and may be a speaker. Further, the display means is preferably capable of displaying the signal from the computing means and the video from the endoscope camera in an overlapping manner.

  The pressurizing means may include a compressor, an air tank, a regulator, a solenoid valve, a nozzle, and a control device.

  The foreign matter detection method and apparatus according to the present invention can detect foreign matter such as a lump, tumor, marker, etc. present in a living body in a non-contact manner, prevent damage to an object to be measured, is safe, is compact, and operates. It can be suitably used for laparoscopic surgery or thoracoscopic surgery.

An embodiment of a foreign object detection method according to the present invention will be described with reference to the drawings. FIG. 1 is an explanatory view illustrating the principle part of the foreign object detection method according to the present invention. A case where the foreign object 55 existing inside the measurement object 50 such as a living body is detected will be described as an example. In this foreign object detection method, first, air is instantaneously blown to the object to be measured, and the displacement vibration generated on the surface of the object to be measured at that time is measured. That is, as shown in FIGS. 1A to 1C, air is blown onto the object to be measured 50, and the displacement vibration generated on the surface of the object to be measured at that time is measured. Air is blown to the object to be measured 50 through the nozzle 13 of the scanning head 10. At that time, the displacement vibration generated on the surface of the DUT 50 is measured by the displacement meter 15 (15A, 15B). Such measurement is performed at a plurality of locations as shown in FIG.

  Next, the phase difference is obtained based on the displacement vibration at each position of the DUT 50 measured by the displacement meters 15A and 15B. There are various ways of obtaining this phase difference as described below. This phase difference may be obtained every moment when the displacement vibration generated in the measured object is measured, or the displacement vibration generated in each part of the measured object is recorded and the phase difference is obtained from the recorded data. It may be. Further, displacement vibration generated in each part of the measurement object 50 may be recorded together with the position information of the measurement object 50, and the phase difference may be obtained from the recorded data.

According to this phase difference method, a uniform forced vibration having a constant frequency and amplitude is given to the object to be measured. If the phase difference is the same, the hardness and shape characteristics of the section are expected to be equivalent. On the other hand, as the phase difference is different, the presence of an abnormal portion such as an object having a different hardness, a protruding portion, or a depressed portion in the section can be predicted. Furthermore, it has the characteristic that the influence by the difference of the color in a measurement area, the difference of a gradient, etc. can be disregarded. The present invention is characterized in that it is a method for determining the presence or absence of foreign matter by such a phase difference method. In other words, the present invention detects the phase difference in each measurement position, that is, in the measurement section (in the measurement area) when a uniform forced vibration having a constant frequency and amplitude is given to the object to be measured, and the phase difference of the ground. A portion that produces a phase difference different from the above means that there is a hard portion (foreign matter) that is different from the hardness of the ground .

In FIG. 1, when air having a uniform pressure waveform is blown from the nozzle 13 to the non-measurement object 50, the phase of the displacement vibration measured by the displacement meters 15A and 15B at each position in FIG. 1 is α _A1 and α _A2.・ ・ Α _An , α _B1 , α _B2 ... Α _Bn , the phase difference is (α _A1 −α _B1 ), (α _A2 −α _B2 )... (Α _An −α _Bn ) It can be asked. Further, the phase difference is (α _A2 -α _A1 ) (α _An -α _A1 ), or (α _A1 -α), (α _A2 ) with reference to the phase α of a specific vibration waveform. -α), (α _An -α). As a specific vibration waveform, for example, a pressure waveform of air to be blown can be used as a reference.

  Next, the presence or absence of a foreign substance is determined based on the degree of the phase difference obtained in this way. For example, it is possible to determine the presence or absence of the foreign matter 55 existing inside the DUT 50 from the phase difference of the displacement vibration measured at each position shown in FIGS. That is, the phase difference calculated | required from the displacement vibration measured in the position of Fig.1 (a)-(b) becomes equivalent. However, the phase difference obtained from the displacement vibration measured at the position shown in FIG. 1C is different from that shown in FIGS. The portion where the phase difference is different as in FIG. 1C is a limited range of the DUT 50, and many other portions have the same phase difference. For this reason, the presence of the foreign matter 55 can be easily detected.

Hereinafter, the foreign object detection method will be described in detail. FIG. 2 shows a case in which the scanning head 10 is scanned over the surface of the device under test 50 where the foreign object 55 exists inside the device under test 50 to measure the displacement vibration of the surface of the device under test 50. Air is blown from the nozzle 13 onto the surface of the object to be measured 50, and the displacement vibration of the object to be measured 50 generated at that time is measured by the displacement meters 15A and 15B. The force (pressure) applied to the measurement object 50 by the blown air is measured by the pressure gauge 26. 51a is a normal surface state of the object to be measured 50, and 51b is a surface state of the object to be measured 50 when air is blown. The SZ system coordinates shown in FIG. 2 are taken, and the displacement meter is assumed to be disposed at the positions S ₁ and S ₂ .

If the frequency of the pressure waveform of the air blown is f, the force u (t) applied to the object to be measured 50, the displacement z (s, t) measured by the displacement meter, and the phase α (s, f, v ) Is generally expressed as in formulas (1) to (3).
u (t) = A ₁ sin (2πft) + A ₂ (1)
z (s, t) = B ₁ (x) sin (2πft + α (s, f, v)) + B ₂ (x) (2)
α (s, f, v) = 2πfs / v (3)
Where A ₁ is the amplitude of the applied force, A ₂ is the DC component of the applied force, B ₁ is the amplitude of the response measured by the displacement meter 15, and B ₂ is the DC component of the response measured by the displacement meter 15. , V is the velocity of the wave propagated from the applied point, and x is an environment variable.

  Here, based on the force u (t) applied to the DUT 50, the phase difference at each measurement position can be obtained from α (s, f, v) in the equation (3). As can be seen from Equation (3), the phase difference is proportional to the frequency f of the pressure waveform of the blown air and the distance s from the nozzle center of the displacement meter 15. That is, the measurement sensitivity increases as the frequency f or the distance s increases. In this case, since the scanning head 10 can be made compact when s is as small as possible, the measurement sensitivity is preferably adjusted by the frequency f.

As described above, the phase difference may be obtained from the responses z (s, t) of the displacement meters 15A and 15B. In this case, the phase difference between the responses of the displacement meters 15A and 15B can be obtained from α (s ₁ , f, v ₁ ) −α (s ₂ , f, v ₂ ) using equation (2). Examples of actually obtaining the phase difference are shown in FIGS. In FIG. 3, FIG. 3 (a) shows the force u (t) applied to the measurement object 50 by the blown air, the horizontal axis indicates the time from the start of measurement, and the vertical axis is measured by the pressure gauge 26. Pressure applied. FIG. 3 (b) shows the responses z (s ₁ , t) and z (s ₂ , t) of the displacement meters 15A and 15B when the air shown in FIG. 3 (a) is blown, and the horizontal axis indicates the measurement start. The vertical axis indicates the output voltage of the displacement gauges 15A and 15B. Moreover, in FIG. 3, the graph shown at the left end of the figure is an enlarged view of time 4.0 to 4.1 seconds from the start of measurement.

According to FIG. 3A, it can be seen that the applied pressure of the air to be blown is substantially constant, and uniform forced vibration having a constant frequency and amplitude is applied to the object to be measured 50. In addition, at about 4 seconds after the start of measurement, air was blown onto the upper surface of the foreign material 55. According to FIG. 3B, the measurement time was 4 to 5 seconds, particularly z (s ₁ , t It can be seen that the waveform of) is disturbed. FIG. 4 shows the result of examining the phase difference at this measurement position by Fourier transform. In FIG. 4, the horizontal axis indicates the frequency of the pressure waveform of the blown air, and the vertical axis indicates the phase difference. In FIG. 4, the parameter indicated by ● indicates the phase difference when air is blown onto the upper surface of the foreign object 55, and the parameter indicated by □ is the position when air is blown onto the base portion without the foreign object 55. Shows the phase difference.

  According to FIG. 4, it can be seen that the phase difference α is proportional to the frequency f at 25 Hz or more, and the phase difference α increases as the frequency f increases, and the above equation (3) is satisfied. However, when the frequency f is 20 Hz or less, the above equation (3) is not satisfied, and when the frequency f is 50 Hz or more, it can be seen that the data varies relatively. This is because when the frequency is low, the influence of an electromagnetic valve that opens and closes the air to be blown appears, and when the frequency is high, the amplitude decreases and the S / N ratio deteriorates.

  Therefore, in order to measure the phase difference with high sensitivity, it is necessary to select a frequency that matches the properties of the object to be measured, but it is generally preferable to measure in the vicinity of the resonance frequency of the object to be measured. On the other hand, it is necessary to measure the phase difference within a range that does not damage the object to be measured. For this reason, it is better to use the frequency of the pressure waveform of the air to be blown at 200 Hz or less.For example, when the object to be measured is the lung, the pressure of the air to be blown is 0.15 MPa or less, and the frequency is 40 to 90 Hz, preferably 40 The frequency should be ~ 50Hz. Use of a frequency near the resonance frequency of the scanning head 10 itself causes a decrease in sensitivity.

The principle part of the foreign object detection method according to the present invention has been described above. This foreign object detection method can be effectively implemented by the foreign object detection apparatus shown in FIG. 5 in laparoscopic surgery or thoracoscopic surgery. FIG. 5A is a schematic diagram of the entire foreign object detection device, and FIG. 5B is an enlarged view of the scanning head 10 portion of the foreign object detection device. As shown in FIG. 5, the foreign object detection apparatus includes a pressurizing means 20 for blowing air onto the object to be measured 50, a pressure gauge 26 for detecting the pressure of the air to be blown, and the object to be measured 50 by the blown air. Displacement meter 15 for detecting displacement vibration generated on the surface of the sensor, recording means 33 for storing the signal from the displacement meter 15, and phase difference between the displacement vibrations at different positions generated on the surface of the object to be measured recorded by the recording means 33 And a display means 38 for outputting a signal from the calculation means 35. The displacement meter 15 and the nozzle 13 for blowing air are integrated to form the scanning head 10.

  The displacement meter 15 uses an optical fiber sensor in the present invention. A known optical fiber sensor can be used. Thereby, in the laparoscopic surgery or the thoracoscopic surgery, it is possible to configure a compact and inexpensive scanning head 10 that can be inserted and removed from a small hole opened in the abdomen or chest.

  The optical fiber sensor can constitute a compact displacement meter. However, as described below, the output varies depending on the color and shape of the object to be measured. It is not used as a displacement meter for measuring the state. However, in the present invention, the displacement itself of the surface of the object to be measured 50 that occurs when air is blown onto the object to be measured 50 is not measured, but the phase difference of the displacement vibration that occurs on the surface of the object to be measured 50 is measured. Such a problem does not occur because it is to be measured. Therefore, an optical fiber sensor that can constitute a compact scanning head 10 can be used.

  FIG. 6 is a graph showing the relationship between the output voltage V of the displacement meter 15 formed of an optical fiber sensor and the distance d between the displacement meter 15 and the device under test 50 when the color of the device under test 50 is changed variously. Show. FIG. 7 shows the relationship between the output voltage V of the displacement meter 15 and the distance d between the displacement meter 15 and the object to be measured 50 when the inclination angle of the surface of the object to be measured 50 directly facing the optical displacement meter 15 is changed. The graph shown is shown. According to FIGS. 6 and 7, the output voltage of the displacement meter 15 is affected by the color and the inclination angle of the surface of the object to be measured 50, particularly when the distance d from the object to be measured 50 actually used is 10 mm or less. Can be seen to be large.

  As shown in FIG. 5 (b), a plurality of displacement meters 15 are preferably arranged concentrically from the center of the nozzle 13, but when one displacement meter 15 is arranged as shown in FIG. 8 (a)) or when a plurality of displacement gauges 15 are arranged on one side of the nozzle 13 (FIG. 8 (b)), various arrangements can be made. In order to construct a sensitive and compact scanning head 10, two to four displacement gauges 15 are arranged at equal intervals from the center of the nozzle 13 on a concentric circle as shown in FIG. 5 (b). Is good. A plurality of such displacement gauges constitute a displacement gauge group.

  As the pressure gauge 26, a publicly known one can be used, but one having a quick response is preferable. Measurement of the atmospheric pressure with the pressure gauge 26 is preferably performed at the tip of the nozzle 13 because a response without time delay can be obtained. Note that when the phase difference is obtained only from the output voltage of the displacement meter, the pressure gauge 26 may not be used.

  The recording means 33 for storing the signal from the displacement meter 15 displays the signals from the control device 37 for the electromagnetic valve 25 described below, the computing means 35 for calculating the phase difference of the signal from the pressure gauge 15, and the signals from the computing means 35. A known computer including the display means 38 to be used can be used. By providing the recording means 33, the signal from the pressure gauge 15 can be recorded, and the phase difference can be displayed on the display means 38 through the calculating means 35 as necessary. In particular, the signal from the pressure gauge 15 may be recorded together with the position signal of the pressure gauge 15 (scanning head 10). The position signal can be obtained, for example, by attaching a position sensor to the scanning head 10. In the present invention, the recording means 33 may be omitted, and the signal from the displacement meter 15 may be directly displayed on the display means 38 through the calculation means 35.

  As shown in FIG. 5 (a), the pressurizing means 20 for blowing air to the object to be measured includes a compressor 21, an air tank 22, a regulator 23, a solenoid valve 25, a nozzle 13, and a control device 36. (Amplitude, frequency) of compressed air can be instantaneously ejected. Each of the above devices is communicated with a pipe 27, and the electromagnetic valve 25 can be controlled by a control device 37. The pressure of the blowing air is adjusted by a regulator. The compressed air generated by the compressor 21 is accumulated in the air tank 22 and the pressure fluctuation of the air blown to the object to be measured 50 is suppressed.

  The solenoid valve 25 should have good responsiveness. Moreover, what can adjust the frequency of the pressure waveform of the air to spray is good. For example, when used for detecting foreign matter in a living body, it is preferable that the frequency of the pressure waveform can be adjusted to 200 Hz or less.

  For the vibration displacement obtained by the displacement meter 15, the phase difference is obtained by the computing means 35, and the result is displayed by the display means 38. In the present invention, for example, a Lissajous figure is used in order to easily determine the presence or absence of the foreign object 55 present in the object to be measured 50.

From the above equation (3), when the response z (s, t) measured by the displacement meter 15 is filtered to remove its DC component, the responses z (s, t) of the displacement meters 15A and 15B are respectively expressed by the equations ( 4) and (5).
z (s ₁ , t) = B ₁ (x ₁ ) sin (2πft + α (s ₁ , f, v ₁ )) (4)
z (s ₂ , t) = B ₁ (x ₂ ) sin (2πft + α (s ₂ , f, v ₂ )) (5)
When this is normalized using data for one period,
Z (s ₁ , t) = sin (2πft + α (s ₁ , f, v ₁ )) (6)
Z (s ₂ , t) = sin (2πft + α (s ₂ , f, v ₂ )) (7)
It is expressed.

As in the case of FIG. 2, the responses z (s, t) of the displacement meters 15A and 15B are obtained, and Z (s ₁ , t) in the equations (6) and (7) is taken as Z (s ₂ , t ) On the vertical axis, the Lissajous figure is drawn as shown in FIG. FIG. 9A shows a case where the surface of the device under test 50 is white, and FIG. 9B shows a case where the surface of the device under test 50 is colored in a mottled pattern of red and black. The numbers in the figure indicate the time after the start of measurement.

  According to FIG. 9, the figure (1.5 to 2.0 s, 7.0 to 7.5 s) when the scanning head 10 is scanning the base portion has a shape close to a circle, whereas the scanning head 10 is It can be seen that the figure when it comes to the upper surface (4.5 to 5.0 s, 5.0 to 5.5 s) is an elongated ellipse. It can also be seen that such a state is not related to the color of the DUT 50.

That is, when the phase difference is visualized using a Lissajous figure, when there is no foreign object in the DUT 50, the phase difference (α (s ₁ , f, v ₁ ) −α (s ₂ , f, v ₂ )) Becomes zero, and the Lissajous figure becomes a straight line. In such a state, the phase difference remains zero even if the frequency f of the pressure waveform to be applied and the distance s between the displacement meters (for example, the distance between the displacement meters 15A and 15B shown in FIGS. 1 and 2) are changed. The Lissajous figure remains straight. However, a phase difference occurs when the scanning head 10 is scanned and reaches the foreign material 55. At this time, since (α (s ₁ , f, v ₁ ) −α (s ₂ , f, v ₂ )) is not zero, the Lissajous figure becomes an ellipse. In such a case, the measurement sensitivity of the phase difference can be adjusted by adjusting the frequency f. As the frequency f is set higher, the measurement sensitivity can be increased. Therefore, this makes it possible to adjust the amplifier gain of the phase sensitivity.

  Further, when such a difference in phase difference is displayed on the display screen of the endoscope, it becomes easy to specify the presence and position of the foreign matter. For example, it is effective to display as shown in FIG. FIG. 10A shows a case where a Lissajous figure is displayed on the screen of the endoscope. FIG. 10B shows a case where the phase difference distribution map displayed together with the position information is displayed on the screen of the endoscope. 10 (c) shows a case where a phase difference color-coded display is displayed on the screen by the endoscope, and FIG. 10 (d) shows a sound when a predetermined phase difference is detected on the endoscope screen. The case where it is made to emit is shown.

  A foreign object detection test was performed using the foreign object detection apparatus shown in FIG. The configuration of the foreign object detection device is the same as in FIG. The measurement was performed by fixing the scanning head 10 and sliding the measurement object 50 to scan the surface of the measurement object 50. The distance between the tip of the displacement meter 15 and the object to be measured 50 was 5 mm. The outer diameter of the nozzle 13 was 8 mm, the inner diameter was 3 mm, the outer diameter of the displacement meter 15 consisting of an optical fiber sensor was 1.5 mm, and the mounting position was 6 mm from the center of the nozzle 13. The object to be measured 50 is filled with silicon having a rubber hardness of 3 or less in a box of length x depth x height 150 x 60 x 40 mm (plate thickness 1 mm), and the outer diameter is 10 mm at a position 10 mm from the top surface. It is embedded with plastic balls with a rubber altitude of 97 or higher. The capacity of the tank 22 was 10 l. The moving speed of the slider was 10 mm / s. The nominal frequency of the solenoid valve 25 was 1 kHz.

The test results are shown in FIGS. FIG. 12 shows a change state of the measured pressure P when the distance d between the nozzle 13 and the pressure gauge 26 and the position s of the pressure gauge are changed variously. The horizontal axis represents the position s, and the vertical axis represents the measurement pressure P. FIG. 13A shows the result of measuring the pressure of the air sprayed on the measurement object 50 with the pressure gauge 26. The horizontal axis indicates the time from the start of measurement, and the vertical axis indicates the pressure measured by the pressure gauge 26. FIG. 13B shows the responses z (s ₁ , t) and z (s ₂ , t) of the displacement meters 15A and 15B when the air shown in FIG. 13A is blown, and the horizontal axis indicates the measurement. The time from the start is shown, and the vertical axis shows the output voltage of the displacement meters 15A and 15B. Moreover, in FIG.13 (b), the graph shown at the left end of a figure is an enlarged view of time 4.0 to 4.1 second from a measurement start.

FIG. 14 shows a Lissajous figure obtained from the result of FIG. The horizontal axis shows the output response Z ₁ (Z (s ₁ , t)) of the normalized displacement meter 15A, and the vertical axis shows the output response Z ₂ (Z (s ₂ , t) of the normalized displacement meter 15B. )). FIG. 14A shows a case where the DUT 50 remains on a silicon base, and FIG. 14B shows a case where red and black mottled patterns are applied to the silicon surface.

As can be seen from FIG. 12, when the distance d between the nozzle 13 and the pressure gauge 26 and the position s of the pressure gauge are changed variously, the obtained pressure distribution curve is almost constant. Therefore, it can be seen that even when the scanning head 10 is actually used in a living body, uniform forced vibration can be applied to the DUT 50 with high accuracy. Further, according to FIG. 13A, it can be seen that the pressure waveform of the air to be blown is constant and stable. The frequency of this pressure waveform was 50 Hz and the pressure amplitude was 0.15 Mp. According to FIG. 13 (b), air was blown on the upper surface of the foreign material 55 at about 4 seconds after the start of measurement, but z (s ₁ , t) and z were measured at a measurement time of 3.5 to 4.5 seconds. Disturbances are observed in the waveform of (s ₂ , t).

  According to FIG. 14, when disturbance is observed in the pressure waveform in FIG. 13 (b), the Lissajous figure is observed to have a shape different from the Lissajous figure of the base portion. Further, when comparing FIGS. 14A and 14B, similar Lissajous figures are observed, and it can be seen that the change state of the Lissajous figures is not related to the color of the object 50 to be measured. That is, by observing the change state of the Lissajous figure, it can be easily detected whether or not the foreign object 55 exists inside the object to be measured 50.

A foreign substance detection test similar to that in Example 1 was performed using the extracted human lung. The configuration of the test apparatus is the same as that of Example 1 except that the scanning head 10 having the configuration shown in FIG. 2 is used. The nozzle 13 and the displacement meter 15 constituting the scanning head 10 were the same as those in Example 1, and the dimensions of S ₁ and S ₂ in FIG. 2 were 6 mm and 5 mm, respectively.

  FIG. 15 shows the relationship between the frequency of the pressure waveform of the air blown and the phase difference measured by the displacement meter 15 when the hard bronchial portion and the soft fabric portion of the lung are scanned. In FIG. 15, the horizontal axis represents frequency, the vertical axis represents phase difference, the ◯ mark represents the phase difference when the bronchial portion is scanned, and the + mark represents the time when the base portion is scanned.

  According to FIG. 15, it can be seen that when the frequency is 20 Hz or more, the phase difference between the bronchial portion and the base portion is clearly different, and this can be detected when a foreign substance exists inside the lung. It can also be seen that such a phenomenon is clearly observed at a frequency of 25 to 50 Hz.

It is explanatory drawing of the foreign material detection method which concerns on this invention. It is a detailed explanatory view of the foreign object detection method It is the pressure waveform figure of the air which blows on a to-be-measured object, and the output voltage waveform figure measured by the displacement meter at that time. It is a graph which shows the phase difference calculated | required from the output voltage of the displacement meter of FIG. It is a block diagram which shows an example of the foreign material detection apparatus which concerns on this invention. It is a graph which shows the relationship between the distance from the to-be-measured object of the displacement meter which consists of an optical fiber sensor, and output voltage. It is a graph which shows the relationship between the gradient of the to-be-measured object surface of the displacement meter of FIG. 7, and output voltage. It is a schematic diagram which shows the various example of arrangement | positioning of a displacement meter. It is the graph which represented the phase difference calculated | required from the displacement vibration measured with the displacement meter in the Lissajous figure. It is explanatory drawing which shows the various examples which display a phase difference with a display means. It is explanatory drawing which shows the structure of the foreign material detection apparatus of an Example. It is a graph which shows the air pressure distribution by the positional relationship of a nozzle and a to-be-measured object. It is the pressure waveform figure of the air which blows on the measured to-be-measured object, and the output voltage waveform figure measured by the displacement meter at that time. It is the graph which represented the phase difference calculated | required from said result in the Lissajous figure. It is the graph showing the phase difference calculated | required by the test of Example 2 by the relationship with the frequency of a pressure waveform.

Explanation of symbols

10 Scanning head
13 nozzles
15, 15A, 15B Displacement meter
20 Pressurizing means
21 Compressor
22 Air tank
23 Regulator
25 Solenoid valve
26 Pressure gauge
27 Piping
33 Recording means
35 Calculation means
37 Control means
38 Display means
50 DUT
55 Foreign matter

Claims (8)

A foreign object detection device that detects a foreign object based on a phase difference generated in a measurement area when a uniform forced vibration having a constant frequency and amplitude is applied to an object to be measured,
Pressurizing means for blowing air to the measurement area, a pressure gauge for detecting the pressure of the blown air, a displacement gauge for detecting displacement vibration generated in the measurement area by the blown air, a signal from the displacement gauge, and the aforementioned A foreign matter detection apparatus comprising: a calculation unit that calculates a phase difference of a signal from a pressure gauge; and a display unit that outputs a signal from the calculation unit. A foreign object detection device that detects a foreign object based on a phase difference generated in a measurement area when a uniform forced vibration having a constant frequency and amplitude is applied to an object to be measured,
A pressurizing means for blowing air to the measurement area, a displacement meter for detecting displacement vibration generated in the measurement area by the blown air, a recording means for storing a signal from the displacement gauge, and a substrate recorded by the recording means. A foreign object detection apparatus comprising: a calculation unit that calculates a phase difference between displacement vibrations at different positions generated on a surface of a measurement object; and a display unit that outputs a signal from the calculation unit. A foreign object detection device that detects a foreign object based on a phase difference generated in a measurement area when a uniform forced vibration having a constant frequency and amplitude is applied to an object to be measured,
A pressurizing means for blowing air to the measurement area, a plurality of displacement meter groups for detecting displacement vibration generated in the measurement area by the blown air, an arithmetic means for calculating a phase difference of signals from the displacement gauge group, and A foreign matter detection apparatus comprising: display means for outputting a signal from the computing means.   The foreign object detection device according to claim 1, wherein the displacement meter is an optical fiber sensor.   5. The foreign object detection device according to claim 1, wherein the display means is capable of displaying a signal from the calculation means as a Lissajous figure.   The foreign matter detection apparatus according to claim 1, wherein the display means is a speaker.   5. The foreign object detection device according to claim 1, wherein the display means can display the signal from the calculation means and the video from the endoscope camera in an overlapping manner.   The foreign matter detecting device according to claim 1, wherein the pressurizing means includes a compressor, an air tank, a regulator, a solenoid valve, a nozzle, and a control device.

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