JP5159826B2 - Semiconductor manufacturing apparatus, semiconductor manufacturing method, and boat - Google Patents

Description

  The present invention relates to a boat for a semiconductor manufacturing apparatus for holding wafers in a semiconductor manufacturing process.

A semiconductor manufacturing apparatus forms various thin films on a substrate to be processed such as a wafer or a glass substrate or performs etching or the like to form a large number of semiconductor elements on the surface of the substrate to be processed.

In such a semiconductor manufacturing apparatus, particularly a semiconductor manufacturing apparatus having a vertical furnace, when an HTO (High Temperature Oxidation) film is mainly formed on a wafer, the wafer is formed to improve the uniformity of the film generated on the wafer. Is held in multiple stages in a horizontal posture on a boat with a holder.

The outline of a semiconductor manufacturing apparatus having a vertical furnace will be described with reference to FIGS.

In the figure, 1 is a housing, 2 is a cassette loader located on the front side of the housing 1, 3 is a cassette shelf provided on the rear side of the cassette loader 2, and 4 is provided above the cassette shelf 3. The buffer cassette shelf 5 is a wafer transfer machine provided on the rear side of the cassette shelf 3, 6 is a boat elevator provided on the rear side of the wafer transfer machine 5 for raising and lowering the boat 7, and 8 is the boat. The vertical furnace provided above the elevator 6 is shown.

The wafer transfer device 5 has an advance / retreat mechanism unit 9 that can be moved up and down and rotated. The advance / retreat mechanism unit 9 is provided with a chucking head 10 that can be advanced and retracted in the horizontal direction. An elongated flat plate-like tweezer 12 for receiving 11 is attached to a required step.

Next, referring to FIG. 5, the conventional boat 7 will be described in relation to the vertical furnace 8.

In the figure, reference numeral 13 denotes a cylindrical heater, 14 is a concentric outer tube disposed on the heater 13, and an upper tube is closed at the upper end, and 15 is a concentric inner portion of the outer tube 14 that is open at the top. The inner tube 15 is erected on a furnace port flange 16 provided at the lower end of the outer tube 14. A reaction chamber 17 is defined by the inner tube 15, and a cylindrical space 18 having a closed lower end is formed between the outer tube 14 and the inner tube 15. An exhaust pipe 19 communicates with the lower end of the space 18, and the reaction gas introduction pipe 20 inserted through the furnace port flange 16 rises to the vicinity of the upper end of a boat cap 21 described later along the inner wall of the inner tube 15. .

The boat 7 is erected on the furnace port cover 22 through the boat cap 21, and a predetermined number of wafers including 75 product wafers are loaded in the boat 7 in a horizontal posture. The lower end of the flange 16 is hermetically closed.

The wafer 11 is transferred in a state of being loaded in a wafer cassette 23. The wafer cassette 23 is transferred by an external transfer device (not shown), and then the cassette loader 2 supplies the cassette shelf 3 and the buffer cassette shelf 4 as required. Stored in position. As will be described later, the wafer transfer device 5 transfers the wafer 11 between the wafer cassette 23 housed in the cassette shelf 3 and the boat 7 in the lowered state.

The boat 7 loaded with the wafer 11 in the reaction chamber 17 heated to the required temperature by the heater 13 is loaded by the boat elevator 6, the inside of the reaction chamber 17 is evacuated, and the reaction gas is introduced. A reaction gas is introduced from the tube 20 to perform film formation on the wafer 11, and the exhaust gas is exhausted from the exhaust tube 19.

When film formation on the wafer 11 is completed, the introduction of the reaction gas is stopped, the inert gas is introduced and the gas purge is performed, and then the boat 7 is pulled out from the vertical furnace 8.

The processed wafer 11 is transferred from the boat 7 to the wafer cassette 23 on the cassette shelf 3 by reversing the transfer procedure to the boat 7 described above, and the wafer cassette 23 is further transferred. Is carried outside.

Next, the conventional boat 7 will be described with reference to FIGS.

The boat 7 is erected on the furnace port cover 22 that opens and closes the lower end of the vertical furnace 8 via the boat cap 21, and the furnace port cover 22 is supported by the boat elevator 6 and can be raised and lowered.

The boat cap 21 forms a cylindrical space, and a heat insulating holder (not shown) is provided inside the boat cap 21, and a required number of heat insulating plates (not shown) are horizontally held in the heat insulating holder. Yes.

The boat 7 has a structure in which a plurality of support posts 26 are erected between the bottom plate 24 and the top plate 25, and in FIG. 6, the support posts 26 can take in and out the wafer 11. In a range of approximately semicircular. An annular quartz holder plate 27 is welded in multiple stages to the support column 26 in a horizontal posture, and the upper surface of the holder plate 27 is on the opposite side of the wafer 11 on the center line 28 of the holder plate 27. In addition, a total of three claws 29 are fixed, one at a time and one at a symmetrical position with respect to the center line 28.

The claw 29 is composed of a support column 30 and an inner flange portion 31, and the inner flange portion 31 is located on the side surface of the support column portion 30 at a position one step lower than the upper end of the support column portion 30, and the tip of the inner flange portion 31 is The holder plate 27 is fixed so as to indicate the center direction.

The transfer of the wafer 11 between the boat 7 and the cassette shelf 3 will be described with reference to FIG.

The chucking head 10 is moved backward so that the tweezers 12 do not protrude from the advance / retreat mechanism 9, the advance / retreat mechanism 9 is rotated, and the chucking head 10 is opposed to the wafer cassette 23 of the cassette shelf 3. . The chucking head 10 is moved forward, a plurality of stages of tweezers 12 in FIG. 11 are inserted into the wafer cassette 23, and the advance / retreat mechanism 9 is slightly raised by a transfer machine elevator (not shown). The wafer 11 is placed on each tweezer 12. With the wafer 11 placed on the tweezers 12, the chucking head 10 is moved backward so that the tweezers 12 do not protrude from the advance / retreat mechanism 9, and the advance / retreat mechanism 9 is rotated, so that the chucking head 10 is opposed to the required position of the boat 7. The chucking head 10 is moved forward, the tweezers 12 are inserted into the boat 7, the advancing / retracting mechanism 9 is slightly lowered by the transfer machine elevator (not shown), and the wafer 11 is moved to the claw 29. It is placed on the inner collar part 31.

The operation is repeated, and the wafer 11 is placed on the inner flange portion 31 of the claw 29 of the predetermined number of the holder plates 27. Further, the transfer from the boat 7 to the cassette shelf 3 after the completion of the processing is performed in the reverse order of the above procedure.

In order to improve productivity, there is a demand to increase the number of wafers to be processed at one time, and in order to meet such a demand, it is necessary to increase the number of wafers loaded in a boat. However, the space in which the semiconductor manufacturing apparatus is installed is limited in height by a building, a clean room, and the like, and the pitch between the holder plates must be narrowed in order to increase the number of wafers loaded in the boat.

In the conventional boat described above, there are limits to narrowing the gap between the holder plates in consideration of the gap required when inserting the tweezers in the boat, the bending of the tweezers, etc., and the number of wafers that can be held in the boat is limited. There is a problem in that it cannot be increased and throughput cannot be improved and production cost cannot be reduced.

In view of such circumstances, the present invention intends to increase the number of wafers processed at one time and to improve the throughput.

The present invention is a semiconductor manufacturing apparatus that holds a holder plate in multiple stages, inserts a boat holding a substrate to be processed in a wafer receiving portion into a vertical furnace, and heat-processes the substrate to be processed. A to-be-processed substrate transfer tweezer having an annular shape formed with a predetermined annular width, on the surface on which the substrate to be processed is placed, on the opposite side of the holder plate to the substrate input / output side A first recess is provided in which the front end portion of the substrate can be loosely fitted, and is a surface on which the substrate to be processed is placed, on the substrate loading / unloading side of the holder plate. A second recess in which the portion can be loosely fitted is provided, and the tip of the wafer receiving portion protrudes toward the center side from the inner diameter of the annular holder plate, and the first holder in the radial direction of the annular holder plate The width of the recess is narrower than the radial width of the annular holder plate. Yes.

A typical effect of the present invention is that the tweezers enter the position of the recess, and the space for the vertical movement of the tweezers can be secured by the recess.

It is an elevation view showing an embodiment of the present invention. It is a perspective view of the holder plate in this embodiment. It is a top view of the holder plate in this embodiment. It is explanatory drawing of a semiconductor manufacturing apparatus. It is sectional drawing of the vertical furnace which equipped the boat. It is a top view of the state which attached the holder plate to the conventional boat. It is a side view of the conventional holder plate. It is the A arrow partial enlarged view of FIG. It is a perspective view of the conventional boat. It is an elevation view of a conventional boat. It is explanatory drawing about transfer of the wafer between a boat and a cassette shelf. It is a side view when inserting a tweezers into a conventional boat. It is a side view when pulling out tizza from the conventional boat. It is explanatory drawing which shows the amount of bending when a wafer is mounted in the conventional tweezers.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In FIG. 1 to FIG. 3, the same components as those in FIG. 6 to FIG.

The boat 36 has a configuration in which a plurality of support columns 39 are erected between a bottom plate 37 and a top plate 38. The support columns 39 are arranged in a substantially semicircular range so that wafers can be taken in and out. It is installed. An annular quartz holder plate 40 is welded to the support post 39 in multiple stages in a horizontal posture, and the upper surface of the holder plate 40 is 1 on the opposite side of the wafer line on the center line 41 of the holder plate 40. In addition, a total of three claws 42 are fixedly attached one by one in a symmetrical position with respect to the center line 41. The claw 42 is composed of a column part 43 and an inner collar part 44, and the inner collar part 44 is located on the side surface of the column part 43 at a position one step lower than the upper end of the column part 43, and the tip of the inner collar part 44 is The holder plate 40 is fixed so as to indicate the center direction.

First recesses 45 are formed on both sides of the claw 42 on the center line 41 on the upper surface of the holder plate 40, and each first recess 45 is wider than the width of the bifurcated tip portion of the tweezers 12. And is narrower than the annular width of the holder plate 40. A second recess 46 is formed on the upper surface of the holder plate 40 on the wafer loading / unloading side. The second recess is wider than the width of the base end portion of the tweezers 12 and the annular width of the holder plate 40. The tweezers 12 can be loosely fitted in the first recess 45 and the second recess 46.

The operation will be described below.

The wafer 11 is received on the tweezers 12 from the wafer cassette 23 of the cassette shelf 3, and the tweezers 12 are opposed to the required positions of the boat 7. The chucking head 10 is advanced, the tweezers 12 are inserted into the boat 7, the advancing / retreating mechanism portion 9 is slightly lowered by a transfer machine elevator (not shown), and the wafer 11 is placed on the claw 42. Then, the tweezers 12 are moved into the positions of the first recess 45 and the second recess 46, and the tweezers 12 are pulled out from the boat 7. The wafer 11 placed on the upper surface of the tweezers 12 and the claws 42 when the tweezers 12 are pulled out from the boat 7 has a margin in the vertical direction by the first recesses 45 and the second recesses 46. The clearance with the lower surface and the clearance between the lower surface of the tweezer 12 and the upper surface of the holder plate 40 are enlarged, and the holder plate 40 does not come into contact even if the tweezer 12 is bent.

  12 to 14 show the relationship between the conventional boat and the tweezers, and it is assumed that the vertical pitch of the holder plate 27 is 8.5 mm. Since the thickness of the tweezers 12 is 1.85 mm and the thickness of the wafers 11 is 0.8 mm, as shown in FIG. 12, the tweezers 12 are mounted on the boats with the wafers 11 placed on the tweezers 12. 7, the clearance between the upper surface of the wafer 11 and the lower surface of the holder plate 27 directly above the wafer 11 and the lower surface of the wafer 11 and the upper surface of the inner flange 31 is 1.1 mm, so that the transfer operation is possible. is there. However, as shown in FIG. 13R> 3, when the tweezer 12 is pulled out from the boat 7, the clearance between the top surface of the tweezer 12 and the bottom surface of the wafer 11 and the clearance between the bottom surface of the tweezer 12 and the top surface of the holder plate 27 are as follows. Both are 0.825 mm, and as shown in FIG. 14, the normal deflection of the tweezer 12 is 0.35 mm, and considering the operation error of the machine, the clearance is not sufficient. It becomes impossible.

In the embodiment of the present invention, the vertical pitch of the holder plate 40 is 8.5 mm, and the steps of the first recess 45 and the second recess 46 from the upper surface of the holder plate 40 are 0.5 mm.

When the tweezers 12 are loaded into the boat 36 with the wafer 11 having a thickness of 0.8 mm placed on the tweezers 12, the top surface of the wafer 11 and the top surface of the wafer 11 are changed as in the conventional case shown in FIG. The clearance between the lower surface of the holder plate 40 directly above the wafer 11 and the lower surface of the wafer 11 and the upper surface of the inner flange portion 44 is 1.1 mm, and when the tweezers 12 are pulled out of the boat 36, Since the clearance between the lower surface of the wafer 11 and the clearance between the lower surface of the tweezer 12 and the upper surface of the holder plate 40 can be increased by 0.25 mm from the conventional case shown in FIG. Work becomes possible.

Therefore, the number of wafers for a product to be produced at one time can be increased from 75 to 100, improving the throughput and reducing the production cost. Demonstrate.

  As described above, according to the present invention, the pitch between the holder plates can be reduced, and the number of wafers that can be held on the boat can be increased, so that the throughput can be improved and the production cost can be reduced. And exhibit various excellent effects.

36 Boat 39 Post 40 Holder plate 42 Claw 45 First recess 46 Second recess

Claims (3)

A semiconductor manufacturing apparatus for holding a holder plate in multiple stages, inserting a boat holding a substrate to be processed in a wafer receiving portion into a vertical furnace, and heating the substrate to be processed,
The holder plate has an annular shape with a predetermined annular width, and is a surface on the side on which the substrate to be processed is placed, on the opposite side of the holder plate to the substrate input / output side. A first concave portion into which a tip of the processing substrate transfer tweezer can be loosely fitted is provided, and is a surface on which the substrate to be processed is placed, and the substrate to be processed is inserted into or removed from the holder plate. A second recess is provided in which the base end of the processing substrate transfer tweezer can be loosely fitted;
The tip of the wafer receiving portion protrudes toward the center from the inner diameter of the annular holder plate,
The width of the first recess in the radial direction of the annular holder plate is narrower than the width of the holder plate in the radial direction of the annular holder plate. A boat that holds holder plates in multiple stages and holds a substrate to be processed on a wafer receiving portion,
The holder plate has an annular shape with a predetermined annular width, and is a surface on the side on which the substrate to be processed is placed, on the opposite side of the holder plate to the substrate input / output side. A first concave portion into which a tip of the processing substrate transfer tweezer can be loosely fitted is provided, and is a surface on which the substrate to be processed is placed, and the substrate to be processed is inserted into or removed from the holder plate. A second recess is provided in which the base end of the processing substrate transfer tweezer can be loosely fitted;
The tip of the wafer receiving portion protrudes toward the center from the inner diameter of the annular holder plate,
A boat characterized in that a width of the first recess in the radial direction of the annular holder plate is narrower than a width of the holder plate in the radial direction of the annular holder plate. A boat for holding a substrate to be processed on a wafer receiving portion having a tip that protrudes inward from the inner diameter of the holder plate, holding the holder plate that is an annular shape formed with a predetermined annular width in multiple stages,
The holder plate is a surface on which the substrate to be processed is placed, and the width of the holder plate on the side opposite to the substrate loading / unloading side of the holder plate is larger than the width of the holder plate in the radial direction of the holder plate. A narrow first concave portion is provided, and a second concave portion is provided on the surface of the holder plate on the side where the substrate to be processed is placed, on the side where the substrate to be processed is placed,
The tip of the processing substrate transfer tweezer that receives the substrate to be processed is loosely fitted in the first recess so as not to exceed the outer diameter of the holder plate, and the processing substrate transfer tweezer is the second. Descending so as to loosely fit into the recess and placing the substrate to be processed on the boat;
Pulling out the substrate transfer tweezers from the first recess and the second recess;
Charging the boat into a vertical furnace and heating the substrate to be processed;
And a step of pulling out the boat from the vertical furnace.