JP5145089B2 - WIRING BOARD FOR ELECTRICAL CHARACTERISTICS MEASUREMENT, AND METHOD FOR PRODUCING WIRING BOARD FOR ELECTRICAL CHARACTERISTICS - Google Patents

Description

  The present invention particularly relates to an electrical property measurement wiring board that can be used as, for example, a probe card for measuring electrical properties of a semiconductor element (IC) or a semiconductor integrated circuit (LSI) formed on a semiconductor wafer, and electrical properties. The present invention relates to a method for manufacturing a measurement wiring board.

  Conventionally, a tester has been used for testing semiconductor chips and integrated circuits formed on a semiconductor wafer such as silicon. Such circuit inspection is performed by connecting a probe of an electrical characteristic measurement wiring board such as a probe card connected to the tester to the semiconductor chip or the integrated circuit.

  In recent years, a burn-in test has been performed as one of accelerated tests for selecting initial defects resulting from the manufacturing process of ICs and LSIs formed on semiconductor wafers, and the reliability of shipped products has been ensured. For example, an operation state inspection at a high temperature of 100 ° C. or higher or an operation state inspection at a higher voltage load than usual is performed.

  In such a temperature-accelerated inspection, when a measurement wiring board made of polyimide is used, the difference in thermal expansion coefficient from the semiconductor wafer is greatly different, so that the temperature is raised even if alignment is performed at room temperature. This causes a problem that the electrical contact between the measurement terminal provided on the surface of the wiring board for measuring electrical characteristics and the semiconductor wafer cannot be maintained.

  Therefore, attempts have been made to bring the coefficient of thermal expansion of the electrical characteristic measurement wiring board close to the coefficient of thermal expansion of the semiconductor wafer. For example, a probe card is disclosed in which a positional deviation due to a temperature change is reduced by using transparent quartz glass having a thermal expansion coefficient close to that of a semiconductor wafer (see Patent Document 1).

  Further, in order to prevent deformation of the wiring board for measuring electrical characteristics, such as warping and undulation, and to perform an accurate inspection, the electrical characteristics measurement is performed using a non-oxide ceramic such as a carbide ceramic or a nitride ceramic. It has been proposed to produce a wiring board for use (see Patent Document 2).

  Furthermore, the base material of the wiring board for electrical property measurement is composed of a sintered body containing cordierite containing Si, Al, Mg, B, etc., and is brought close to the thermal expansion coefficient of the silicon semiconductor wafer to measure the electrical property. Even when warping or undulation or the like occurs in the wiring board for use, an attempt has been made to ensure electrical contact between the wiring board for measuring electrical characteristics and the semiconductor wafer and to measure the electrical characteristics of the semiconductor wafer. (See Patent Document 3).

  The measurement of the electrical characteristics of a semiconductor wafer using such a wiring board for measuring electrical characteristics is to perform a circuit inspection of each semiconductor element by bringing a probe into contact with each semiconductor element formed on the semiconductor wafer. is there. Therefore, the size of the wiring board for measuring electrical characteristics is on the order of several cm at the maximum.

  On the other hand, in recent years, it is desired to measure the electrical characteristics of a plurality of semiconductor elements at the same time, not for each semiconductor element formed on a semiconductor wafer. However, since the semiconductor wafer reaches a size of several tens of centimeters at the maximum, when measuring the electrical characteristics of a plurality of semiconductor elements formed on such a semiconductor wafer at the same time, a wiring board for measuring electrical characteristics is used. Must be expanded to a size of several tens of centimeters.

  However, it is difficult to increase the size of the member made of quartz glass or ceramics as described above due to the manufacturing method thereof, and as a result, the characteristics of the members described above also in the wiring board for measuring electrical characteristics. It was difficult to increase the size based on this. Further, when the above-mentioned wiring board for measuring electrical characteristics is produced from ceramics, the compacted body is shrunk particularly in the sintering process, which is a manufacturing process thereof. When manufacturing the product, the compaction of the molded body becomes remarkable, and sufficient dimensional accuracy cannot be obtained.

  Therefore, as described above, when the wiring board for measuring electrical characteristics is made of ceramics or the like, it is not possible to increase the size of the wiring board, and sufficient electrical contact with the semiconductor wafer cannot be ensured. For this reason, simultaneous measurement of the electrical characteristics of a plurality of semiconductor elements formed on the target semiconductor wafer cannot be realized yet.

JP-A-10-111315 JP 2004-165650 A JP 2006-284541 A

  SUMMARY OF THE INVENTION An object of the present invention is to provide a large electrical characteristic measuring wiring board capable of simultaneously measuring electrical characteristics of a plurality of semiconductor elements formed on a semiconductor wafer, and a method for manufacturing the same.

In order to achieve the above object, the present invention provides:
An insulating substrate;
A plurality of resin layers laminated on one surface of the insulating substrate;
A wiring layer disposed between the plurality of resin layers;
A first electrode pad formed on a resin layer located at an uppermost layer of the plurality of resin layers and electrically connected to the wiring layer;
A first protective layer laminated on the resin layer located on the uppermost layer so as to expose the first electrode pad;
A second electrode pad formed above the other surface of the insulating substrate and electrically connected to the wiring layer;
The side surface of the insulating substrate, the side surfaces of the plurality of resin layers, and the side surface of the wiring layer are covered, and the second electrode pad is formed above the other surface of the insulating substrate. A second protective layer formed,
The present invention relates to an electrical property measurement wiring board (first wiring board) characterized in that the length of one side is 10 cm or more.

The present invention also provides:
An insulating substrate;
A plurality of resin layers laminated on one surface of the insulating substrate;
A wiring layer disposed between the plurality of resin layers;
A first electrode pad formed on a resin layer located at an uppermost layer of the plurality of resin layers and electrically connected to the wiring layer;
A first protective layer laminated on the resin layer located on the uppermost layer so as to expose the first electrode pad;
A second electrode pad formed above the other surface of the insulating substrate and electrically connected to the wiring layer;
The side surface of the insulating substrate, the side surfaces of the plurality of resin layers, and the side surface of the wiring layer are covered, and the portion where the second electrode pad is formed is exposed above the other surface of the insulating substrate. The present invention relates to a wiring board for measuring electrical characteristics (second wiring board), characterized in that it comprises the second protective layer formed as described above and has a side length of 10 cm or more.

Furthermore, the present invention provides
Forming a plurality of resin layers on one surface of the insulating substrate with a wiring layer interposed between the layers;
Forming a first electrode pad electrically connected to the wiring layer on a resin layer located at an uppermost layer of the plurality of resin layers;
Forming a first protective layer on the resin layer located on the uppermost layer so as to cover the first electrode pad;
Forming a second electrode pad electrically connected to the wiring layer above the other surface of the insulating substrate;
The side surface of the insulating substrate, the side surfaces of the plurality of resin layers, and the side surface of the wiring layer are covered, and the second electrode pad is formed above the other surface of the insulating substrate. Forming a second protective layer;
Applying laser processing to the first protective layer to expose the first electrode pad;
In particular, the present invention relates to a method for manufacturing a wiring board for measuring electrical characteristics (first manufacturing method) having a side length of 10 cm or more.

The present invention also provides:
Forming a plurality of resin layers on one surface of the insulating substrate with a wiring layer interposed between the layers;
Forming a first electrode pad electrically connected to the wiring layer on a resin layer located at an uppermost layer of the plurality of resin layers;
Forming a first protective layer on the resin layer located on the uppermost layer so as to cover the first electrode pad;
Forming a second electrode pad electrically connected to the wiring layer above the other surface of the insulating substrate;
The side surface of the insulating substrate, the side surfaces of the plurality of resin layers, and the side surface of the wiring layer are covered, and the portion where the second electrode pad is formed is exposed above the other surface of the insulating substrate. A step of forming the second protective layer as described above,
Applying laser processing to the first protective layer to expose the first electrode pad;
And a step of partially removing the second protective layer to expose the second electrode pad, wherein the wiring board for measuring electrical characteristics having a side length of 10 cm or more is provided. This relates to a manufacturing method (second manufacturing method).

  According to the present invention, an insulating substrate is used as a base substrate, and a resin layer and a wiring layer are formed on the substrate, and electrode pads are formed on the outermost surface and the opposite back surfaces, respectively, to measure electrical characteristics. A wiring board for use is configured. As described above, the electrical characteristic wiring board is composed of the resin layer and the wiring layer (so-called build-up board), so that the side can be increased to 10 cm, further 20 cm or more, and the conductor resistance is low. Wiring layers using Cu and Ag materials can be easily formed finely.

  In addition, a wiring board for measuring electrical characteristics composed only of a so-called build-up board in which a resin layer is formed on an insulating board becomes rich in flexibility. Therefore, when the wiring board for measuring electrical characteristics is enlarged, for example, when the length of one side is 10 cm or more, deflection occurs during use, making it difficult to make electrical contact with the semiconductor wafer, or the insulation. Mechanical holding on the substrate becomes difficult and may result in breakage.

  However, in the present invention, the first protective layer is formed so as to expose the first electrode pad of the resin layer located at the uppermost layer. In addition to covering the side surface of the insulating substrate, the side surfaces of the plurality of resin layers, and the side surface of the wiring layer, the other surface of the insulating substrate includes a portion where the second electrode pad is formed, Alternatively, the second protective layer is formed so as to expose the portion where the second electrode pad is formed. Therefore, the first protective layer and the second protective layer function to mechanically supplement the holding of the wiring layer and the like by the insulating substrate, thereby preventing the above-described deflection and breakage. it can.

  Note that the second protective layer is formed on the other surface of the insulating substrate including the portion where the second electrode pad is formed or excluding the portion where the second electrode pad is formed. This is based on the usage pattern of the wiring board for measuring electrical characteristics. That is, when plating or cleaning the electrical characteristic measurement wiring board, the second protective layer prevents the second electrode pad from being affected by chemical damage or the like. A second protective layer is formed so as to cover the second electrode pad. As will be described below, when actually using the wiring board for measuring electrical characteristics, the second electrode pad is exposed, Since it is necessary to electrically connect the probe pin and the first electrode pad to an inspection apparatus or the like, in this case, the second protective layer is formed in a state excluding the surface portion of the second electrode pad. Because it will be.

  The first protective layer and the second protective layer are so-called support layers that mechanically complement the holding of the wiring layer and the like by the insulating substrate of the wiring board for measuring electrical characteristics as described above. In addition to the above function, it is preferable to have chemical resistance against an alkaline solution. As described above, when the probe pin or the like is formed on the first electrode pad, the electrical characteristic measurement wiring board including the first electrode pad or the like is immersed in a strong alkaline solution. This is due to the fact that this is often done.

  The first protective layer is preferably processable by laser light or exposure development. As described in the first manufacturing method and the second manufacturing method, usually, the first protective layer is formed so as to cover the first electrode pad, and a part of the first protective layer is formed. The first electrode pad is removed to be exposed. Therefore, by partially configuring the first protective layer from a material that can be processed by laser light or a material that can be processed by exposure and development, it is possible to easily remove part of the first protective layer described above. In addition, the first electrode pad can be easily exposed.

  The insulating substrate and the second protective layer preferably have a coefficient of thermal expansion of 3.5 to 4.2 ppm / K. As described above, the insulating substrate is a base material of the wiring board for measuring electrical characteristics, and the second protective layer includes a side surface of the insulating substrate, a side surface of the plurality of resin layers, and a wiring layer. A side surface is formed and the other surface of the insulating substrate is covered. Therefore, if the coefficient of thermal expansion between the second protective layer and the insulating substrate is relatively different, an internal strain is caused due to the difference in the coefficient of thermal expansion between the second protective layer and the insulating substrate. As a result, a relatively large warp may occur with respect to the electrical characteristic measuring wiring board.

  Further, when the object to be measured is a silicon semiconductor wafer, alignment is performed at room temperature if there is a large difference in thermal expansion coefficient between the silicon semiconductor wafer and the insulating substrate and the second protective layer. However, when the temperature is raised, a deviation occurs, and the same problem as in the past occurs such that the electrical contact between the measurement terminal provided on the surface of the wiring board for measuring electrical characteristics and the silicon semiconductor wafer cannot be maintained. Garage.

  However, by setting the thermal expansion coefficients of the insulating substrate and the second protective layer in the range of 3.5 to 4.2 ppm / K, the disadvantage caused by the difference in the thermal expansion coefficient of each other, and the silicon The above disadvantages when measuring a semiconductor wafer can be avoided.

  Furthermore, the second protective layer preferably has a strength of 10 Gpa or more in a three-point bending test. As described above, the second protective layer covers the side surface of the insulating substrate, the side surfaces of the plurality of resin layers, and the side surface of the wiring layer, and covers the other surface of the insulating substrate. It is formed. Therefore, the role which supplements the support function of the said 2nd protective layer especially the said insulating substrate increases. From this viewpoint, the support function can be improved by the second protective layer having the above-described strength.

  Moreover, it is preferable that the said electrical characteristic measurement wiring board has the intensity | strength of 10 Gpa or more similarly in a three-point bending test. As a result, the wiring board for measuring electrical characteristics has a sufficiently high mechanical strength, so that its deflection can be prevented. As a result, it is possible to prevent inadequate electrical contact with an object to be measured, such as a semiconductor wafer.

  As described above, according to the present invention, a large-sized electrical characteristic measurement wiring board capable of simultaneously measuring electrical characteristics of a plurality of semiconductor elements formed on a semiconductor wafer and a method for manufacturing the same are provided. be able to.

  Hereinafter, other features and advantages of the present invention will be described based on embodiments of the present invention with reference to the drawings.

(First embodiment)
1 to 4 are configuration diagrams showing an example of a wiring board for measuring electrical characteristics in the present embodiment. In the present embodiment, a case in which the first wiring board, that is, the characteristic measuring wiring board is shipped as a product will be described. 1 is a cross-sectional view of the wiring board for measuring electrical characteristics, FIG. 2 is a plan view when viewed from the front side of the wiring board for measuring electrical characteristics, and FIG. 3 is a drawing for measuring the electrical characteristics. It is a top view at the time of seeing from the back surface side of a wiring board.

  As shown in FIGS. 1 to 3, the electrical characteristic measurement wiring board 10 of this embodiment includes an insulating substrate 11, a first resin layer 12 and a second resin layer 13 formed on one surface thereof. It has. A wiring layer 14 is disposed between the first resin layer 12 and the second resin layer 13. In addition, a first electrode pad 15 is formed at the center on the second resin layer 13 located at the uppermost layer, and an interlayer connector (via) (not shown) penetrating through the second resin layer 13 is used. It is electrically connected to the wiring layer 14. Further, on the other surface side of the insulating substrate 11, a second electrode pad 17 is formed at the edge thereof, and the interlayer connector (via) (not shown) penetrating through the first resin layer 12 and the insulating substrate 11. Is electrically connected to the wiring layer 14.

  As will be described below, the first electrode pad 15 is brought into electrical contact with an electric circuit or the like actually formed on the semiconductor wafer by forming probe pins, so that the actual electrical characteristics of the semiconductor wafer can be obtained. The second electrode pad 17 is provided for measurement. The second electrode pad 17 is electrically connected to an external circuit board (not shown) or the like and is connected to the external circuit board via the second electrode pad 17 and the wiring layer 14. An electric signal (current) for measurement is supplied to the first electrode pad 15 and the probe pin, or the electric signal measured by the probe pin is used as the first electrode pad 15, the wiring layer 14, and the second electrode pad. And the like.

  Further, a first protective layer 16 is formed on the second resin layer 13 so as to exclude the region where the first electrode pad 15 is formed, and the side surface of the insulating substrate 11, the resin layer 12, and A second protective layer 18 is formed so as to cover the side surfaces of the wiring layer 14 and the side surface of the wiring layer 14 and to include the portion on which the second electrode pad 17 is formed on the other surface of the insulating substrate 11.

  The insulating substrate 11 functions as a base substrate of the electrical characteristic measurement wiring substrate 10 of the present embodiment. The insulating substrate 11 is made of a material such as borosilicate glass / quartz glass, ceramics such as AlN, and silicon. It is also possible to use a heat-resistant resin plate (for example, a bismaleimide-triazine resin plate), a fiber reinforced resin plate, or the like. The coefficient of thermal expansion is preferably 3.5 to 4.2 ppm / K. In this case, the thermal expansion coefficient of the insulating substrate 11 is low, for example, very close to the thermal expansion coefficient of the silicon semiconductor wafer. Therefore, it is possible to prevent electrical contact due to positioning caused by the difference in thermal expansion coefficient with the semiconductor wafer.

  The coefficient of thermal expansion is a value measured using the TMA method. The TMA method is a thermomechanical analysis, for example, one specified in JPCA-BU01, which is a value measured with a TMA (thermomechanical analyzer) between 0 ° C. and 100 ° C. .

  The insulating substrate 11 preferably has a strength of 10 Gpa or more in a three-point bending test. Since the resin layers 12 and 13 are extremely flexible, the wiring layer 14 is also made of metal, and the layer thickness is extremely low, the electrical characteristic measuring wiring board 10 of the present embodiment is rich in flexibility. Accordingly, when the wiring board 10 for measuring electrical characteristics is enlarged, for example, when the length of one side exceeds 10 cm, if the strength of the insulating substrate 11 is small, deflection occurs during use, and electrical contact with the semiconductor wafer occurs. May be difficult, or may be difficult to mechanically hold on the insulating substrate 11 and may be damaged.

  However, the disadvantages described above can be eliminated by setting the strength of the insulating substrate 11 as described above. The three-point bending test is performed in accordance with (JIS-R1601).

  The upper limit value of the strength of the insulating substrate 11 is not particularly limited, but can be set to 25 Gpa in consideration of the currently used material types. However, for the reasons described above, this strength is preferably as high as possible.

  In the present embodiment, the first protective layer 16 is formed so as to exclude the region on the second resin layer 13 where the first electrode pad 15 is formed, and the second protective layer 18 is formed. The insulating substrate 11 is formed so as to cover the side surface of the insulating substrate 11, the side surfaces of the resin layers 12 and 13, and the side surface of the wiring layer 14 and include a portion on the other surface of the insulating substrate 11 where the second electrode pads 17 are formed. ing. In this case, the support function by the insulating substrate 11 is complemented, and the resin layer 13 and the like are substantially supported by the protective layer 16 and the like, so that the wiring board 10 for measuring electrical characteristics is prevented from being bent or damaged. be able to.

  As a result, when the wiring board 10 for measuring electrical characteristics is increased in size, for example, when the length of one side exceeds 10 cm, the insulating substrate 11 is supported even when the strength of the insulating substrate 11 is relatively small. Complementing the function, it is possible to prevent the electrical contact with the semiconductor wafer from becoming difficult or damaged due to the occurrence of deflection when the wiring board 10 for measuring electrical characteristics is used.

  In particular, the second protective layer 18 preferably has a strength of 10 Gpa or more in a three-point bending test. The second protective layer 18 is formed so as to cover the side surface of the insulating substrate 11, the side surfaces of the resin layers 12 and 13, and the side surface of the wiring layer 14 as described above, and to cover the other surface of the insulating substrate 11. Is done. Therefore, the role which supplements the support function of the 2nd protective layer 18, especially the insulating substrate 11 increases. From this viewpoint, the second protective layer 18 has the above-described strength, whereby the support function can be improved.

  Note that the upper limit value of the strength of the second protective layer 18 is not particularly limited, but can be 25 GPa in consideration of currently used material types. However, for the reasons described above, this strength is preferably as high as possible. The three-point bending test is performed in accordance with (JIS-R1601).

  The second protective layer 18 and the insulating substrate 11 preferably have a thermal expansion coefficient of 3.5 to 4.2 ppm / K. As described above, the insulating substrate 11 is a base material of the wiring board 10 for measuring electrical characteristics, and the second protective layer 18 includes the side surfaces of the insulating substrate 11, the side surfaces of the resin layers 12 and 13, and the wiring layer 14. And the other surface of the insulating substrate 11 is covered.

  Therefore, if the coefficient of thermal expansion between the second protective layer 18 and the insulating substrate 11 is relatively different, internal strain is caused due to the difference in the coefficient of thermal expansion between the second protective layer 18 and the insulating substrate 11. As a result, a relatively large warp may occur with respect to the wiring board 10 for measuring electrical characteristics.

  Further, when the object to be measured is a silicon semiconductor wafer, alignment is performed at room temperature if there is a large difference in thermal expansion coefficient between such a silicon semiconductor wafer and the insulating substrate 11 and the second protective layer 18. However, when the temperature is raised, a deviation occurs, which may cause a problem that electrical contact between the measurement terminal provided on the surface of the wiring board 10 for measuring electrical characteristics and the silicon semiconductor wafer cannot be maintained.

  However, by setting the thermal expansion coefficients of the insulating substrate 11 and the second protective layer 18 in the range of 3.5 to 4.2 ppm / K, the disadvantage caused by the difference in the thermal expansion coefficient of each other, and the silicon The above disadvantages when measuring a semiconductor wafer can be avoided.

  The first protective layer 16 and the second protective layer 18 are so-called supports that mechanically complement the holding of the wiring layer 14 and the like by the insulating substrate 11 of the wiring board 10 for measuring electrical characteristics as described above. It is preferable to have not only a function as a layer but also chemical resistance. When the electrical characteristic measurement wiring board 10 is actually used, probe pins are formed as shown below. When the probe pins are formed, for example, the first electrode pad 15 or the like is used. This is because the electrical property measurement wiring board 10 containing slag may be immersed in a strongly alkaline solution.

  Therefore, since the first protective layer 16 and the second protective layer 18 have chemical resistance as described above, even when immersed in the strong alkaline solution, the resin layer 12 existing under the protective layer. And 13 and the insulating substrate 11 are not adversely affected such as corrosion.

  The first protective layer 16 is preferably processable by laser light or exposure and development. As described below, the first protective layer 16 is usually formed so as to cover the first electrode pad 15, and then a part thereof is removed to expose the first electrode pad 15. It is intended to make it. Therefore, by partially forming the first protective layer 16 from a material that can be processed by laser light or a material that can be processed by exposure and development, a part of the first protective layer 16 can be easily removed. In addition, the first electrode pad 15 can be easily exposed.

  In this example, a polyimide layer was used as the first protective layer 16 and a SUS plate was used as the second protective layer 18.

  The first protective layer 16 that satisfies the above-described requirements can be composed of, for example, SUS, Teflon (registered trademark), or the like. The second protective layer 18 can also be made of, for example, a metal such as SUS, Ti, or platinum, a metal plated with gold or silver, a Mo plate, a CuW alloy, a carbon fiber plate, or the like.

  Since the electrical characteristic measurement wiring board 10 in the present embodiment is manufactured to satisfy the various requirements described above, it is possible to simultaneously measure the electrical characteristics of a plurality of semiconductor elements formed on the semiconductor wafer. It can function as a large-sized wiring board for measuring electrical characteristics. Actually, the length of one side can be increased to 10 cm or more, and for example, it can be increased to about 50 cm.

  When both the first protective layer 16 and the second protective layer 18 are made of an insulating material, the first electrode pad 15 and the second electrode pad 17, the first protective layer 16 and The electrical contact with the second protective layer 18 is not necessarily excluded. On the other hand, when the first protective layer 16 and the second protective layer 18 are made of a conductive material such as SUS, the first protective pad 16 and the second protective pad 17 are not in electrical contact with each other. .

  The thickness of the insulating substrate 11 is about 0.4 to 1.0 mm, the thickness of the resin layers 12 and 13 is about 45 to 450 um, the thickness of the first protective layer 16 is about 5 to 50 um, The thickness of the protective layer 18 is about 0.4 to 1.0 mm.

(Second Embodiment)
4 and 5 are configuration diagrams showing an example of a wiring board for measuring electrical characteristics according to the present embodiment. In the present embodiment, a configuration in consideration of the case where the second wiring board, that is, the electrical characteristic measuring wiring board is actually used will be described. FIG. 4 is a cross-sectional view of the electrical characteristic measurement wiring board, and FIG. 5 is a plan view when viewed from the back side of the electrical characteristic measurement wiring board. The plan view when viewed from the front side of the wiring board for measuring electrical characteristics is the same as FIG.
The same reference numerals are used for the same or similar components.

  As shown in FIGS. 4 and 5, the electrical characteristic measurement wiring board 20 of the present embodiment includes an insulating substrate 11, a first resin layer 12 and a second resin layer 13 formed on one surface thereof. It has. A wiring layer 14 is disposed between the first resin layer 12 and the second resin layer 13. In addition, a first electrode pad 15 is formed at the center on the second resin layer 13 located at the uppermost layer, and an interlayer connector (via) (not shown) penetrating through the second resin layer 13 is used. It is electrically connected to the wiring layer 14. Further, on the other surface side of the insulating substrate 11, second electrode pads 17 are formed at the edge of each side, and an interlayer connector (not shown) penetrating through the first resin layer 12 and the insulating substrate 11 ( Vias) are electrically connected to the wiring layer 14.

  The functions of the first electrode pad 15 and the second electrode pad 17 are the same as those in the first embodiment.

  Further, a first protective layer 16 is formed on the second resin layer 13 so as to exclude the region where the first electrode pad 15 is formed, and the side surface of the insulating substrate 11, the resin layer 12, and A second protective layer 18 is formed so as to cover the side surface 13 and the side surface of the wiring layer 14, and to expose a portion where the second electrode pad 17 is formed on the other surface of the insulating substrate 11. As is apparent from FIG. 6, the second protective layer 18 extends to the corner of the insulating substrate 11 where the second electrode pad 17 is not formed.

  As described above, the wiring board 20 for measuring electrical characteristics in the present embodiment has the second protective layer 18 from the viewpoint of actual use based on the formation of the probe pins described below on the second electrode pads 17. However, the second embodiment is different from the wiring board 10 for measuring electrical characteristics of the first embodiment in that the portion where the second electrode pad 17 is formed is excluded.

  However, in the other constituent elements, the electrical characteristic measurement wiring board 20 of the present embodiment and the electrical characteristic measurement wiring board 10 of the first embodiment are the same as each other. The characteristics required for each component of the substrate 20 are the same as the characteristics required for the electrical characteristic measuring wiring board 10.

  That is, the characteristics required for the insulating substrate 11, the first protective layer 16, the second protective layer 18, and the like are the same as those of the wiring board 10 for measuring electrical characteristics in the first embodiment.

  FIG. 6 is a modification of the example shown in FIGS. In this example, an aspect of the electrical characteristic measurement wiring board in which the probe pins 19 are actually formed on the second electrode pad 17 of the electrical characteristic measurement wiring board 20 shown in FIGS. 4 and 5 is shown. As described above, the probe pin 19 is used in electrical contact with a semiconductor wafer or the like that is actually a measurement object. Therefore, according to the electrical characteristic measurement wiring board 20 shown in FIG. 6, it is possible to provide an electrical characteristic measurement wiring board having probe pins capable of measuring the electrical characteristics of a semiconductor wafer or the like.

(Third embodiment)
FIG. 7 is a configuration diagram showing an example of a wiring board for measuring electrical characteristics in the present embodiment. In the present embodiment, a case where two resin layers are formed on the surface of the insulating substrate 11 in the first embodiment on the second electrode pad 17 (second protective layer 18) side is shown. FIG. 7 is a cross-sectional view of the electrical characteristic measurement wiring board. The plan view when viewed from the front surface side of the electrical characteristic measurement wiring board is the same as FIG. 2, and the plan view when viewed from the front surface side of the electrical characteristic measurement wiring board is the same as FIG. is there. The same reference numerals are used for the same or similar components.

  As shown in FIG. 7, the electrical characteristic measurement wiring board 30 of the present embodiment includes an insulating substrate 11 and a first resin layer 12 and a second resin layer 13 formed on one surface thereof. It is. A wiring layer 14 is disposed between the first resin layer 12 and the second resin layer 13. In addition, a first electrode pad 15 is formed at the center on the second resin layer 13 located at the uppermost layer, and an interlayer connector (via) (not shown) penetrating through the second resin layer 13 is used. It is electrically connected to the wiring layer 14. In addition, a first electrode pad 15 is formed at the center on the second resin layer 13 located at the uppermost layer, and an interlayer connector (via) (not shown) penetrating through the second resin layer 13 is used. It is electrically connected to the wiring layer 14.

  Further, a third resin layer 22 and a fourth resin layer 23 are formed on the other surface side of the insulating substrate 11. An additional wiring layer 24 is disposed between the third resin layer 22 and the fourth resin layer 23. Further, the second electrode pad 17 is formed at the edge of the fourth resin layer 23, and is electrically connected to the additional wiring layer 24 by an interlayer connector (via) (not shown) penetrating the third resin layer 22. It is connected.

  The functions of the first electrode pad 15 and the second electrode pad 17 are the same as those in the first embodiment.

  Further, a first protective layer 16 is formed on the second resin layer 13 so as to exclude the region where the first electrode pad 15 is formed, and the side surface of the insulating substrate 11, the resin layer 12, and 13, the side surface of the wiring layer 14, and the side surfaces of the resin layers 22 and 23 and the wiring layer 24, and the other surface of the insulating substrate 11 is exposed to the portion where the second electrode pad 17 is formed. In addition, a second protective layer 18 is formed.

  As described above, the electrical characteristic measurement wiring board 30 in the present embodiment has a plurality of resin layers laminated on both sides of the insulating substrate 11, and the electrical characteristic measurement wiring board 30 also has such an electrical characteristic measurement. The wiring board for electrical property measurement that can function in the same manner as the wiring board 10 for an electric circuit and can measure the electrical characteristics of a semiconductor wafer or the like by forming the above-described probe pin 19 on the second electrode pad 17. Can be provided.

  The characteristics required for the third resin layer 22 and the fourth resin layer 23 are the same as those of the first resin layer 12 and the second resin layer 13 of the first embodiment, respectively. The characteristics required for the constituent elements are the same as those of the electrical characteristic measurement wiring board 10 of the first embodiment.

(Fourth embodiment)
Next, a method for manufacturing the electrical characteristic measurement wiring boards 10 and 20 in the first and second embodiments will be described.

  8 to 10 are process diagrams of the manufacturing method in the present embodiment. As shown in FIG. 8, first, an insulating substrate 11 is prepared, a first resin layer 12 is formed on one surface of the insulating substrate 11, and a wiring layer 14 is formed on the surface. Two resin layers 13 are formed. These resin layers are coated with a predetermined resin material on the insulating substrate 11, and then flattened by applying pressure from above and below, and cured to form resin layers. The wiring layer 14 is formed by patterning a solid metal foil.

  Next, the first electrode pad 15 is formed on the surface of the second resin layer 13, and the second electrode pad 17 is formed at the edge of the other surface of the insulating substrate 11. These electrode pads are formed by forming a uniform metal layer and then patterning it.

  Next, as shown in FIG. 9, a first protective film 16 is formed on the second resin layer 13 so as to cover the first electrode pad 15, and the side surfaces of the insulating substrate 11, the resin layers 12 and 13 are formed. A second protective layer 18 is formed so as to cover the side surface and the side surface of the wiring layer 14 and to cover the second electrode pad 17 on the other surface of the insulating substrate 11.

  The insulating substrate 11 has a through hole or the like formed in advance, and a conductor is formed in the through hole to constitute an interlayer connection body. The first resin layer 12 and the second resin layer 13 are formed on the insulating substrate 11. Also, an interlayer connector such as a via conductor is formed, and the first electrode pad 15, the wiring layer 14, and the second electrode pad 17 are electrically connected to each other.

  Next, as shown in FIG. 10, for example, laser processing is performed on the first protective layer 16 to expose the first electrode pad 15. Similarly, the second protective layer 18 is subjected to, for example, laser processing to expose the second electrode pad 17.

  In the case where both the first protective layer 16 and the second protective layer 18 are made of an insulating material, the remaining first electrode pad 15 and second electrode pad 17 are exposed after the first electrode pad 15 and the second electrode pad 17 are exposed. It does not necessarily exclude that the first protective layer 16 and the second protective layer 18 are in electrical contact with the first electrode pad 15 and the second electrode pad 17. On the other hand, when the first protective layer 16 and the second protective layer 18 are made of a conductive material such as SUS, the first electrode pad 15 and the second electrode pad 17 remaining after the first electrode pad 15 and the second electrode pad 17 are exposed. The first protective layer 16 and the second protective layer 18 are not in electrical contact with the first electrode pad 15 and the second electrode pad 17.

  Through the steps as described above, the electrical characteristic measurement wiring boards 10 and 20 in the first embodiment can be manufactured.

  In the example described above, laser processing is used to remove a part of the protective layer, but exposure development processing, drill processing, mechanical polishing processing, and the like can also be used.

  The present invention has been described in detail with reference to specific examples. However, the present invention is not limited to the above contents, and various modifications and changes can be made without departing from the scope of the present invention.

  For example, in the above specific example, the first resin layer 12 and the second resin layer 13 are formed on the insulating substrate 11 and the wiring layer 14 is interposed between them, but the number of resin layers is particularly two. It is not limited to a layer and can be any number as required. Accordingly, the number of wiring layers can be set to an arbitrary number.

It is sectional drawing of the wiring board for an electrical property measurement in 1st Embodiment. It is a top view at the time of seeing from the surface side of the wiring board for electrical property measurement in a 1st embodiment. It is a top view at the time of seeing from the back surface side of the wiring board for electrical property measurement in 1st Embodiment. It is sectional drawing of the wiring board for an electrical property measurement in 2nd Embodiment. It is a top view at the time of seeing from the back surface side of the wiring board for an electrical property measurement in 2nd Embodiment. It is sectional drawing which showed the modification of the wiring board for an electrical property measurement in 2nd Embodiment. It is sectional drawing of the wiring board for an electrical property measurement in 3rd Embodiment. It is process drawing of the manufacturing method of the wiring board for an electrical property measurement in an embodiment. Similarly, it is process drawing of the manufacturing method of the wiring board for electrical property measurement in an embodiment. Similarly, it is process drawing of the manufacturing method of the wiring board for electrical property measurement in an embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10,20 Electrical property measurement wiring board 11 Insulating substrate 12 1st resin layer 13 2nd resin layer 14 Wiring layer 15 1st electrode pad 16 1st protective layer 17 2nd electrode pad 18 2nd protection Layer 19 Probe pin

Claims (14)

An insulating substrate;
A plurality of resin layers laminated on one surface of the insulating substrate;
A wiring layer disposed between the plurality of resin layers;
A first electrode pad formed on a resin layer located at an uppermost layer of the plurality of resin layers and electrically connected to the wiring layer;
A first protective layer laminated on the resin layer located on the uppermost layer so as to expose the first electrode pad;
A second electrode pad formed above the other surface of the insulating substrate and electrically connected to the wiring layer;
The side surface of the insulating substrate, the side surfaces of the plurality of resin layers, and the side surface of the wiring layer are covered, and the second electrode pad is formed above the other surface of the insulating substrate. A second protective layer formed,
A wiring board for measuring electrical characteristics, wherein the length of one side is 10 cm or more. An insulating substrate;
A plurality of resin layers laminated on one surface of the insulating substrate;
A wiring layer disposed between the plurality of resin layers;
A first electrode pad formed on a resin layer located at an uppermost layer of the plurality of resin layers and electrically connected to the wiring layer;
A first protective layer laminated on the resin layer located on the uppermost layer so as to expose the first electrode pad;
A second electrode pad formed above the other surface of the insulating substrate and electrically connected to the wiring layer;
The side surface of the insulating substrate, the side surfaces of the plurality of resin layers, and the side surface of the wiring layer are covered, and the portion where the second electrode pad is formed is exposed above the other surface of the insulating substrate. A second protective layer formed as described above,
A wiring board for measuring electrical characteristics, wherein the length of one side is 10 cm or more.   The wiring board for measuring electrical characteristics according to claim 2, further comprising a probe pin formed so as to be electrically connected to the first electrode pad.   The electrical characteristic according to claim 1, further comprising at least one resin layer between the other surface of the insulating substrate and the second electrode pad. Wiring board for measurement. 5. The wiring board for measuring electrical characteristics according to claim 1, wherein the insulating substrate has a coefficient of thermal expansion of 3.5 to 4.2 ppm / K.   The wiring board for measuring electrical characteristics according to any one of claims 1 to 5, wherein the first protective layer has chemical resistance.   The wiring board for measuring electrical characteristics according to any one of claims 1 to 6, wherein the first protective layer is made of a material that can be processed by laser light.   The wiring board for measuring electrical characteristics according to any one of claims 1 to 6, wherein the first protective layer is made of a material that can be processed by exposure and development.   The wiring board for measuring electrical characteristics according to any one of claims 1 to 8, wherein the second protective layer has chemical resistance.   The wiring board for measuring electrical characteristics according to claim 1, wherein the second protective layer has a strength of 10 GPa or more in a three-point bending test.   The wiring board for measuring electrical characteristics according to any one of claims 1 to 10, wherein the second protective layer has a coefficient of thermal expansion of 3.5 to 4.2 ppm / K.   The wiring board for measuring electrical characteristics according to any one of claims 1 to 11, wherein the wiring board for measuring electrical characteristics has a strength of 10 GPa or more in a three-point bending test. Forming a plurality of resin layers on one surface of the insulating substrate with a wiring layer interposed between the layers;
Forming a first electrode pad electrically connected to the wiring layer on a resin layer located at an uppermost layer of the plurality of resin layers;
Forming a first protective layer on the resin layer located on the uppermost layer so as to cover the first electrode pad;
Forming a second electrode pad electrically connected to the wiring layer above the other surface of the insulating substrate;
The side surface of the insulating substrate, the side surfaces of the plurality of resin layers, and the side surface of the wiring layer are covered, and the second electrode pad is formed above the other surface of the insulating substrate. Forming a second protective layer;
Applying laser processing to the first protective layer to expose the first electrode pad;
A method of manufacturing a wiring board for measuring electrical characteristics, wherein one side has a length of 10 cm or more. Forming a plurality of resin layers on one surface of the insulating substrate with a wiring layer interposed between the layers;
Forming a first electrode pad electrically connected to the wiring layer on a resin layer located at an uppermost layer of the plurality of resin layers;
Forming a first protective layer on the resin layer located on the uppermost layer so as to cover the first electrode pad;
Forming a second electrode pad electrically connected to the wiring layer above the other surface of the insulating substrate;
The side surface of the insulating substrate, the side surfaces of the plurality of resin layers, and the side surface of the wiring layer are covered, and the portion where the second electrode pad is formed is exposed above the other surface of the insulating substrate. A step of forming the second protective layer as described above,
Applying laser processing to the first protective layer to expose the first electrode pad;
Partially removing the second protective layer to expose the second electrode pad;
A method of manufacturing a wiring board for measuring electrical characteristics, wherein one side has a length of 10 cm or more.

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