JP5140213B2 - Spring-type vibration isolator and vibration isolator - Google Patents

Description

  The present invention relates to a spring-type vibration isolator that supports a supported body disposed above a foundation and a vibration isolator that supports and supports the supported body using the same.

An anti-vibration device is used for supporting and isolating a supported body such as a building, plant, or mechanical equipment.
The vibration isolator includes one or a plurality of spring-type vibration isolator devices that support the supported body.
For example, a spring-type vibration isolator includes one or more air springs that support a supported body and an automatic leveling device.
An air spring is a mechanical element that expands and contracts in a straight line by compression or expansion of air stored inside.
For example, an air spring is an air piston, a cylindrical member made of a flexible material, in which air is stored and a gutter is fitted around.
The air spring expands and contracts when the fluid is injected and discharged.
An automatic leveling device is a device that adjusts the level or level of a supported body by injecting or discharging fluid into or from one or more air springs.

  For example, a plurality of air springs are divided into three groups, and each group is provided with an air supply / exhaust pipe and an automatic leveling device, and each automatic leveling device is provided with an air spring belonging to each group. Adjust the amount of fluid supplied to the pipes or the amount of exhaust exhausted from the air supply / exhaust pipes provided in the air springs belonging to each group to adjust the level of the supported body supported by the air springs included in each group. adjust.

When an earthquake occurs, horizontal acceleration and vertical acceleration are generated on the foundation of the support. It is known that earthquake waves are a combination of many waves with different periods.
It is desirable to lengthen the natural period of the vibration isolator in order to avoid resonance of the vibration isolator and prevent a large force from acting on the supported body in the event of an earthquake with such properties. It is. For example, if the natural period of the vibration isolator is increased to 2 seconds, 3 seconds, and 5 seconds, the seismic isolation effect increases.

To construct a vibration isolator that supports the vertical direction, a vibration isolator having spring characteristics is adopted. When designing the vibration isolator, if the natural period is set to the above value, the so-called spring constant becomes extremely small. For this reason, a large vertical displacement occurs when the weight of the supported body slightly changes in a steady state without an earthquake.
Therefore, at the time of steady state where there is no earthquake etc., the level and levelness can be kept constant regardless of changes in the weight of the supported body and the falling moment, and at the time of unsteady state where an earthquake etc. occurred, There is a demand for a vibration isolator that does not transmit the basic acceleration to the support.
In order to achieve this object, a vibration isolator that combines an air spring and an automatic leveling device is used.
At regular times, the level of the support is maintained by automatic leveling equipment. The material in which the earthquake has occurred tries to maintain the level of the automatic leveling device, and the air spring absorbs the long-period acceleration exceeding the characteristics of the automatic leveling device.
In particular, in recent years, there has been an increasing demand for exhibiting anti-vibration performance for components having a longer period.

Public utility Showa 50-1111596 Public utility Showa 50-147083 Public utility Showa 53-90756 Public utility Showa 54-148782 Public utility Showa 57-87844

  The present invention has been devised in view of the above-described problems, and a spring-type vibration isolator that exhibits a vibration isolating effect against a component having a longer period with a simple structure and a vibration isolator using the same. Try to provide.

  In order to achieve the above object, a spring-type anti-vibration device for supporting a supported body arranged above a foundation according to the present invention, a pedestal supported by the foundation, a table for mounting the supported body, and a vertical direction A vertical spring, a horizontal spring that is horizontally extendable, a horizontal guide member that is supported by the gantry and is capable of reciprocating in the horizontal direction, and one end of the table is rocked to the table. A link member that is movably connected and whose other end is slidably connected to the horizontal guide member, and an imaginary line connecting both ends is inclined, and an automatic adjustment of the level of the table A leveling device, wherein one of the vertical spring or the horizontal spring is an air spring that is expandable or contractible by expanding or compressing a gas stored therein, and the vertical spring is supported by the gantry and is Table The horizontal spring pushes the horizontal guide member in the horizontal direction, the automatic leveling device supplies and exhausts gas to one of the vertical spring or the horizontal spring, and the height position of the table Is to be maintained at a predetermined height position determined in advance.

With the configuration of the present invention, the gantry is supported on the foundation. The table carries the supported body. The vertical spring becomes telescopic in the vertical direction. The horizontal spring becomes telescopic in the horizontal direction. One of the vertical spring and the horizontal spring is an air spring which is expanded or compressed by expanding or compressing a gas stored therein. A horizontal guide member is supported by the mount and can reciprocate in the horizontal direction. The link member is pivotally connected at one end to the table and is pivotally connected at the other end to the horizontal guide member to incline an imaginary line connecting both ends. The vertical spring is supported by the gantry and supports the table by pushing it in the vertical direction. The horizontal spring pushes the horizontal guide member in the horizontal direction. The automatic leveling device supplies and exhausts gas to one of the vertical spring and the horizontal spring to maintain the height position of the table at a predetermined height position.
As a result, the load acting on the table by the vertical spring tends to increase as the table is lowered, and the load acting on the table by the horizontal spring tends to decrease as the table is lowered. The tendency is offset, the apparent spring constant of the spring-type vibration isolator is reduced, and the acceleration transmitted from the foundation to the supported body is reduced. Furthermore, it tries to maintain the height position of the table at the predetermined height position.

  Below, the spring type vibration isolator which concerns on embodiment of this invention is demonstrated. The present invention includes any of the embodiments described below, or a combination of two or more of them.

The spring-type vibration isolator according to an embodiment of the present invention is an air spring that is expandable or compressible by expanding or compressing a gas stored in the other of the vertical spring or the horizontal spring, and the vertical spring Alternatively, the pressure of the gas stored in the other of the horizontal springs is maintained at a predetermined pressure.
By the structure of the said embodiment, the other of the said vertical spring or the said horizontal spring is an air spring which was able to expand-contract by expanding or compressing the gas stored inside. The pressure of the gas stored in the other of the vertical spring or the horizontal spring tends to be maintained at a predetermined pressure.
As a result, the load acting on the table by the other of the vertical spring or the horizontal spring is stabilized, and the height position of the table can be easily maintained at a predetermined height position.

A spring-type vibration isolator according to an embodiment of the present invention is an air spring in which the other of the vertical spring or the horizontal spring expands or compresses a gas stored therein, and is expandable and contractible. When acceleration exceeding a predetermined acceleration is not generated on the support body, the pressure of the gas stored in the other of the vertical spring or the horizontal spring is maintained at the predetermined pressure, and the base or the support body exceeds the predetermined acceleration. When acceleration is generated, the gas stored in the other of the vertical spring and the horizontal spring is blocked or suppressed.
By the structure of the said embodiment, the other of the said vertical spring or the said horizontal spring is an air spring which was able to expand-contract by expanding or compressing the gas stored inside. When no acceleration exceeding a predetermined acceleration is generated on the foundation and the supported body, the pressure of the gas stored in the other of the vertical spring and the horizontal spring is maintained at a predetermined pressure. When an acceleration exceeding a predetermined acceleration occurs on the foundation or the supported body, the pressure of the gas stored in the other of the vertical spring or the horizontal spring changes around the predetermined pressure.
As a result, when the acceleration exceeding the predetermined acceleration is generated on the foundation or the supported body, the load acting on the table by the horizontal spring changes around the predetermined value, and the height position of the table is determined in advance. It can be easily maintained at a predetermined height position.

The spring-type vibration isolator according to an embodiment of the present invention is an air spring that is expandable or compressible by expanding or compressing a gas stored in the other of the vertical spring or the horizontal spring, and the vertical spring Alternatively, if the pressure of the gas stored in the other of the horizontal springs is to be maintained at a predetermined pressure, and the gas stored in the other of the vertical spring or the horizontal spring is blocked, the height position of the table As the value becomes lower in the vicinity of the predetermined height position, the support load acting on the supported body via the table becomes slightly larger.
By the structure of the said embodiment, the other of the said vertical spring or the said horizontal spring is an air spring which was able to expand-contract by expanding or compressing the gas stored inside. An attempt is made to maintain the pressure of the gas stored in the other of the vertical spring or the horizontal spring at a predetermined pressure. If the gas stored in the other of the vertical springs or the horizontal springs is blocked, the table acts via the table as the height position of the table becomes lower in the vicinity of the predetermined height position. The supporting load is slightly increased.
As a result, even if an acceleration exceeding the response capability occurs on the base or the supported body and a phenomenon equivalent to blocking the flow of the gas stored in the other of the vertical spring or the horizontal spring occurs, the table As the height position of the table becomes lower in the vicinity of the predetermined height position, since the support load acting on the supported body via the table is slightly large, the apparent spring constant of the table is small and responds to long-period vibration. it can.

The spring-type vibration isolator according to an embodiment of the present invention is an air spring that is expandable or compressible by expanding or compressing a gas stored in the other of the vertical spring or the horizontal spring, and the vertical spring Alternatively, the pressure of the gas stored in the other of the horizontal springs is maintained at a predetermined pressure, and if the pressure of the gas stored in the other of the vertical spring or the horizontal spring is the predetermined pressure, When the height position changes in the vicinity of the predetermined height position, the support load acting on the supported body via the table is substantially constant.
By the structure of the said embodiment, the other of the said vertical spring or the said horizontal spring is an air spring which was able to expand-contract by expanding or compressing the gas stored inside. An attempt is made to maintain the pressure of the gas stored in the other of the vertical spring or the horizontal spring at a predetermined pressure. If the pressure of the gas stored in the other of the vertical spring or the horizontal spring is the predetermined pressure, when the height position of the table changes in the vicinity of the predetermined height position, The support load acting on the supported body is substantially constant.
As a result, even if a large acceleration exceeding the response capability is generated on the foundation or the supported body and a phenomenon equivalent to blocking the flow of the gas stored in the other of the vertical spring or the horizontal spring occurs, The pressure of the gas stored in the spring fluctuates around a predetermined pressure, and when the height position of the table changes within a movable range centered on the predetermined height position, a supported body is provided via the table. Since the supporting load acting on the surface is substantially constant, the apparent spring constant of the table is small and can respond to long-period vibration.

In the spring-type vibration isolator according to the embodiment of the present invention, the horizontal spring is connected to the frame on one side in the horizontal direction and connected to the horizontal guide member on the other side.
With the configuration of the above embodiment, one horizontal side of the horizontal spring is connected to the gantry. The other side is connected to the horizontal guide member.
As a result, when horizontal acceleration occurs in the supported body, a horizontal force acting on the table is transmitted to the horizontal spring via the link member and the horizontal guide member, and the horizontal spring passes through the gantry. Since it is supported by the foundation, the horizontal movement of the entire system of the supported body and the spring-type vibration isolator is restricted.

A spring-type vibration isolator according to an embodiment of the present invention includes another horizontal guide member supported by the gantry and capable of reciprocating in the horizontal direction, and one end of which is swingably connected to the table. A horizontal guide member as viewed from above, and a member that is swingably connected to the other horizontal guide member and has an inclined imaginary line connecting both ends. The reciprocating locus of the other horizontal guide member and the reciprocating locus of the other horizontal guide member are aligned along a straight line, and the horizontal spring is connected to the horizontal guide member on one side in the horizontal direction and the other side is located on the other side. Connected to the horizontal guide member.
According to the configuration of the above embodiment, the other horizontal guide member is supported by the gantry and can reciprocate in the horizontal direction. The other link member is swingably connected at one end to the table and the other end is swingably connected to the other horizontal guide member, and an imaginary line connecting both ends is inclined. Let A trajectory of the horizontal guide member reciprocatingly viewed from above and a trajectory of the other horizontal guide member reciprocatingly moving are aligned along a straight line. The horizontal spring has one horizontal side connected to the horizontal guide member and the other side connected to the other horizontal guide member.
As a result, when the horizontal spring expands and contracts in the horizontal direction, the horizontal guide member and the other horizontal guide member are pushed in opposite directions, and the table is directed upward through the inclined link member and the other link member. A load is applied, and a support load which is a resultant force of these loads supports the supported body.

A spring-type vibration isolator according to an embodiment of the present invention includes another horizontal spring that is extendable in the horizontal direction, another horizontal guide member that is supported by the mount and is capable of reciprocating in the horizontal direction, The other end is connected to the table in a swingable manner, and the other end is connected to the other horizontal guide member in a swingable manner. A trajectory of reciprocating movement of the horizontal guide member as viewed from above and a trajectory of reciprocating movement of the other horizontal guide member as viewed from above, and the horizontal spring is arranged in one of the horizontal directions. One side is connected to the gantry, the other side is connected to the horizontal guide member, the other horizontal spring is connected to one side in the horizontal direction to the gantry, and the other side is connected to the other horizontal guide member. The
With the configuration of the above-described embodiment, the other horizontal springs can be expanded and contracted in the horizontal direction. The other horizontal guide member is supported by the mount and can reciprocate in the horizontal direction. The other link member is swingably connected at one end to the table and the other end is swingably connected to the other horizontal guide member, and an imaginary line connecting both ends is inclined. . A trajectory of the horizontal guide member reciprocatingly viewed from above and a trajectory of the other horizontal guide member reciprocatingly moving are aligned along a straight line. The horizontal spring has one side in the horizontal direction connected to the gantry and the other side connected to the horizontal guide member. The other horizontal spring is connected to the frame on one side in the horizontal direction and connected to the other horizontal guide member on the other side.
As a result, when the horizontal spring expands and contracts in the horizontal direction, the horizontal guide member is pushed, and an upward load is applied to the table via the inclined link member. When the other horizontal spring expands and contracts in the horizontal direction, the other horizontal guide member is pushed, and an upward load is applied to the table via the inclined other link member. A support load that is a resultant force of these loads supports the supported body.

  In order to achieve the above object, a vibration isolator for supporting a supported body arranged above a foundation according to the present invention includes a pedestal supported by the foundation, a table on which the supported body is mounted, and a vertical extension. A vertical spring that can be freely extended, a horizontal spring that can be expanded and contracted in the horizontal direction, a horizontal guide member that is supported by the frame and can be reciprocated in the horizontal direction, and one end of which can swing on the table. A link member that is pivotably connected to the horizontal guide member at the other end thereof, and in which an imaginary line that connects both ends is inclined, and the vertical spring includes the gantry The horizontal spring pushes the horizontal guide member in the horizontal direction, the three spring-type vibration-proof devices are provided, and the three spring-type vibration-proof devices are respectively supported. The reciprocating trajectory of the horizontal guide member When viewed from the top from a virtual point located within the contours of the supported body scattered around it is arranged so placed along respectively the three lines of radially extending, and the things.

With the configuration of the present invention, the gantry is supported by the foundation in the spring-type vibration isolator. The table carries the supported body. The vertical spring becomes telescopic in the vertical direction. The horizontal spring becomes telescopic in the horizontal direction. A horizontal guide member is supported by the mount and can reciprocate in the horizontal direction. The link member is pivotally connected at one end to the table and is pivotally connected at the other end to the horizontal guide member to incline an imaginary line connecting both ends. The vertical spring is supported by the gantry and supports the table by pushing it in the vertical direction. The horizontal spring pushes the horizontal guide member in the horizontal direction. On the three lines extending radially from the virtual points located in the contour of the supported body when the three spring-type vibration isolating devices are viewed from above to see the reciprocating trajectory of each of the horizontal guide members. It is arranged to follow each.
As a result, the load acting on the table by the vertical spring tends to increase as the table is lowered, and the load acting on the table by the horizontal spring tends to decrease as the table is lowered. The tendency is offset and so-called spring constant of the spring type vibration isolator is reduced. When acceleration occurs on the foundation or the supported body, the acceleration transmitted between the foundation and the supported body is reduced, and each horizontal force acting on the three spring-type vibration isolator is concentrated on the virtual point. And unbalance each force.

  Moreover, in order to achieve the said objective, the vibration isolator which supports the to-be-supported body arrange | positioned above the foundation which concerns on this invention, the base supported by a foundation, the table which mounts a to-be-supported body, an up-down direction A vertical spring, a horizontal spring that is horizontally extendable, a horizontal guide member that is supported by the gantry and is capable of reciprocating in the horizontal direction, and one end of the table is rocked to the table. A link member that is movably connected and whose other end is swingably connected to the horizontal guide member, and in which an imaginary line connecting both ends is inclined, and the vertical spring is A pair of spring-type anti-vibration devices comprising a pair of spring-type anti-vibration devices that are supported by the gantry and push the table in the vertical direction and support the horizontal guide member in the horizontal direction. Reciprocally move each of the horizontal guide members Look at the locus from above are arranged so placed along substantially on a straight line, and the things.

With the configuration of the present invention, the gantry is supported by the foundation in the spring-type vibration isolator. The table carries the supported body. The vertical spring becomes telescopic in the vertical direction. The horizontal spring becomes telescopic in the horizontal direction. A horizontal guide member is supported by the mount and can reciprocate in the horizontal direction. The link member is pivotally connected at one end to the table and is pivotally connected at the other end to the horizontal guide member to incline an imaginary line connecting both ends. The vertical spring is supported by the gantry and supports the table by pushing it in the vertical direction. The horizontal spring pushes the horizontal guide member in the horizontal direction. The pair of spring-type vibration isolator devices are arranged so that the trajectory of each of the horizontal guide members reciprocatingly follows a straight line when viewed from above.
As a result, the load acting on the table by the vertical spring tends to increase as the table is lowered, and the load acting on the table by the horizontal spring tends to decrease as the table is lowered. The trend is offset and the so-called spring constant of the spring-type vibration isolator is reduced. When acceleration occurs on the foundation or the supported body, the acceleration transmitted between the foundation and the supported body is reduced, and the horizontal forces acting on the pair of spring-type vibration isolator are concentrated on a straight line. , Each force unbalance can be offset.

  Below, the vibration isolator which concerns on embodiment of this invention is demonstrated. The present invention includes any of the embodiments described below, or a combination of two or more of them.

An anti-vibration device according to an embodiment of the present invention includes an automatic leveling device in which the spring-type anti-vibration device adjusts a level of a table, and one of the vertical spring and the horizontal spring stores gas stored therein. It is an air spring that is expandable or compressible to expand and contract, and one of the vertical spring or the horizontal spring is an air spring that expands or compresses gas stored inside and expands or contracts in the vertical direction. The automatic leveling device supplies and exhausts gas to one of the vertical spring and the horizontal spring to maintain the height position of the table at a predetermined height position.
According to the configuration of the above-described embodiment, one of the vertical spring and the horizontal spring is an air spring that can expand and contract by expanding or compressing a gas stored therein. Gas is supplied to or exhausted from one of the vertical spring and the horizontal spring to maintain the height position of the table at a predetermined height position.
As a result, the automatic leveling device changes the load by the vertical spring, the height position of the table fluctuates up and down from the predetermined height position, and the acceleration transmitted from the foundation to the supported body is reduced.

The vibration isolator according to an embodiment of the present invention is an air spring that is expandable or compressible by expanding or compressing a gas stored in the other of the vertical spring or the horizontal spring, and the vertical spring or the An attempt is made to maintain the pressure of the gas stored in the other of the horizontal springs at a predetermined pressure.
By the structure of the said embodiment, the other of the said vertical spring or the said horizontal spring is an air spring which was able to expand-contract by expanding or compressing the gas stored inside. The pressure of the gas stored in the other of the vertical spring or the horizontal spring tends to be maintained at a predetermined pressure.
As a result, the load acting on the table by the horizontal spring is stabilized, and the height position of the table can be easily maintained at a predetermined height position.

An anti-vibration device according to an embodiment of the present invention is an air spring in which the other of the vertical spring or the horizontal spring expands or compresses a gas stored therein, and is expandable and contractible. When the acceleration exceeding the predetermined acceleration is not generated, the pressure of the gas stored in the other of the vertical spring or the horizontal spring is maintained at the predetermined pressure, and the acceleration exceeding the predetermined acceleration is applied to the foundation or the supported body. When generated, the gas stored in the other of the vertical spring and the horizontal spring is blocked or suppressed.
By the structure of the said embodiment, the other of the said vertical spring or the said horizontal spring is an air spring which was able to expand-contract by expanding or compressing the gas stored inside. When no acceleration exceeding a predetermined acceleration is generated on the foundation and the supported body, the pressure of the gas stored in the other of the vertical spring and the horizontal spring is maintained at a predetermined pressure. When acceleration exceeding a predetermined acceleration occurs on the foundation or the supported body, the gas stored in the other of the vertical spring or the horizontal spring is blocked or suppressed.
As a result, when acceleration exceeding a predetermined acceleration occurs on the foundation or the supported body, the load acting on the table by the horizontal spring slightly changes around a predetermined value, and the height position of the table is set to a predetermined predetermined height. Easy to maintain in position.

An anti-vibration device according to an embodiment of the present invention is an air spring in which the other of the vertical spring or the horizontal spring expands or compresses a gas stored therein, and can be expanded and contracted. If the pressure of the gas stored in the other of the horizontal springs is maintained at a predetermined pressure, and the gas stored in the other of the vertical spring or the horizontal spring is blocked, the height position of the table is The supporting load acting on the support via the table slightly increases as it falls within the movable range centered on the predetermined height position.
By the structure of the said embodiment, the other of the said vertical spring or the said horizontal spring is an air spring which was able to expand-contract by expanding or compressing the gas stored inside. The pressure of the gas stored in the other of the vertical spring or the horizontal spring tends to be maintained at a predetermined pressure. If the gas stored in the other of the vertical spring or the horizontal spring is shut off, the height position of the table is lowered within the movable range centered on the predetermined height position via the table. The support load acting on the supported body is slightly increased.
As a result, even if a large acceleration exceeding the response capability occurs on the foundation or the supported body and a phenomenon equivalent to blocking the gas flow stored in the other of the vertical spring or the horizontal spring occurs, As the height position of the table decreases within a movable range centered on the predetermined height position, the apparent spring constant of the table is small because the support load acting on the supported body through the table is slightly large, Can respond to long-period vibration.

An anti-vibration device according to an embodiment of the present invention is an air spring in which the other of the vertical spring or the horizontal spring expands or compresses a gas stored therein, and can be expanded and contracted. If the pressure of the gas stored in the other of the horizontal springs is to be maintained at a predetermined pressure, and the pressure of the gas stored in the other of the vertical spring or the horizontal spring is a predetermined pressure, the height of the table When the position changes within a movable range centered on the predetermined height position, the supporting load acting on the supported body via the table is substantially constant.
By the structure of the said embodiment, the other of the said vertical spring or the said horizontal spring is an air spring which was able to expand-contract by expanding or compressing the gas stored inside. The pressure of the gas stored in the other of the vertical spring or the horizontal spring tends to be maintained at a predetermined pressure. If the pressure of the gas stored in the other of the vertical spring or the horizontal spring is the predetermined pressure, when the height position of the table changes in the vicinity of the predetermined height position, The support load acting on the supported body is substantially constant.
As a result, if a large acceleration exceeding the response capability is generated in the base or the supported body and a phenomenon equivalent to blocking the flow of gas stored in the other of the vertical spring or the horizontal spring occurs, The pressure of the gas stored in the spring fluctuates around a predetermined pressure, and when the height position of the table changes in the vicinity of the predetermined height position, a support load that acts on the supported body via the table Is substantially constant, the apparent spring constant of the table is small, and it can respond to long-period vibration.

In the vibration isolator according to the embodiment of the present invention, the horizontal spring has one side in the horizontal direction connected to the gantry and the other side connected to the horizontal guide member.
With the above-described configuration of the present invention, one horizontal side of the horizontal spring is connected to the gantry. The other side is connected to the horizontal guide member.
As a result, when a horizontal acceleration is generated in the supported body, a horizontal force acting on the table is transmitted to the horizontal spring through the link member and the horizontal guide member, and the horizontal spring is connected to the foundation through the gantry. Therefore, the horizontal movement of the entire system of the supported body and the spring-type vibration isolator is restricted.

In the vibration isolator according to the embodiment of the present invention, the spring-type vibration isolator is supported by the gantry and can be reciprocated in the horizontal direction, and one end is shaken by the table. Another link member that is movably connected and the other end of which is swingably connected to the other horizontal guide member, and in which an imaginary line connecting both ends is inclined, The trajectory of the horizontal guide member reciprocatingly viewed from above and the trajectory of the other horizontal guide member reciprocatingly aligning along a straight line, the horizontal spring is connected to the horizontal guide member on one side in the horizontal direction. The other side is connected to the other horizontal guide member.
According to the configuration of the present invention, the other horizontal guide member is supported by the frame and can reciprocate in the horizontal direction. The other link member is swingably connected at one end to the table and the other end is swingably connected to the other horizontal guide member, and an imaginary line connecting both ends is inclined. . The trajectory of the horizontal guide member reciprocally moving and the trajectory of the other horizontal guide member reciprocatingly moving as viewed from above are aligned along a straight line. The horizontal spring has one horizontal side connected to the horizontal guide member and the other side connected to the other horizontal guide member.
As a result, when the horizontal spring expands and contracts in the horizontal direction, the horizontal guide member and the other horizontal guide member are pushed in opposite directions, and the table is directed upward through the inclined link member and the other link member. A load is applied, and a support load which is a resultant force of the load supports the supported body.

An anti-vibration device according to an embodiment of the present invention includes a spring-type anti-vibration device in which another horizontal spring that can be expanded and contracted in a horizontal direction and another horizontal spring that is supported by the gantry and can reciprocate in the horizontal direction. An imaginary line connecting a horizontal guide member and one end portion to the table so as to be swingable and the other end swingably connected to the other horizontal guide member. And the trajectory of the horizontal guide member reciprocatingly moving and the trajectory of the other horizontal guide member reciprocatingly moving as viewed from above are aligned along a straight line. One side in the horizontal direction is connected to the gantry, the other side is connected to the horizontal guide member, the other horizontal spring is connected to the gantry on one side in the horizontal direction, and the other side is connected to the other horizontal Connected to the guide member.
With the above-described configuration of the present invention, the other horizontal springs can be expanded and contracted in the horizontal direction. Another horizontal guide member is supported by the mount and can reciprocate in the horizontal direction. The other link member is a member in which one end is swingably connected to the table and the other end is swingably connected to the other horizontal guide member, and both ends are connected. Tilt virtual lines. The trajectory of the horizontal guide member reciprocally moving and the trajectory of the other horizontal guide member reciprocatingly moving as viewed from above are aligned along a straight line. The horizontal spring has one side in the horizontal direction connected to the gantry and the other side connected to the horizontal guide member. The other horizontal spring is connected to the frame on one side in the horizontal direction and connected to the other horizontal guide member on the other side.
As a result, when the horizontal spring expands and contracts in the horizontal direction, the horizontal guide member is pushed, and an upward load is applied to the table via the inclined link member. When the other horizontal spring expands and contracts in the horizontal direction, the other horizontal guide member is pushed, and an upward load is applied to the table via the inclined other link member. A support load that is a resultant force of these loads supports the supported body.

As described above, the spring-type vibration isolator according to the present invention has the following effects due to its procedure and configuration.
The vertical spring that expands and contracts in the vertical direction is provided between the gantry and the table, a horizontal guide member that is movable in the horizontal direction is provided on the gantry, and the table and the horizontal guide member are arranged by the inclined link member. The horizontal guide member is pushed by the horizontal spring that expands and contracts in the horizontal direction, and either the vertical spring or the horizontal spring is used as an air spring. Since the control is performed so that the table is in the height position, the load acting on the table by the vertical spring tends to increase as the table is lowered, and the load acting on the table by the horizontal spring tends to decrease as the table is lowered. The support load, which is the resultant force, cancels out this tendency, and the so-called spring constant of the spring-type anti-vibration device decreases, and is transmitted from the foundation to the supported body. Reduce the acceleration. Furthermore, it fluctuates up and down at the predetermined height position.
In addition, since the other of the vertical spring or the horizontal spring is an air spring and the pressure of the gas stored in the other of the vertical spring or the horizontal spring is maintained at a predetermined pressure, the load acting on the table by the air spring is stable. In addition, the height position of the table can be easily maintained at a predetermined height position.
Further, the other of the vertical spring or the horizontal spring is an air spring, and the pressure of the gas stored in the other of the vertical spring or the horizontal spring is maintained at a predetermined pressure when large acceleration is not generated in the foundation and the supported body. When a large acceleration occurs, the gas stored in the other of the vertical spring or the horizontal spring is blocked or suppressed, so that the load acting on the table by the air spring slightly changes around a predetermined value. In addition, the height position of the table can be easily maintained at a predetermined height position.
Also, the other of the vertical spring or the horizontal spring is an air spring, and the pressure of the gas stored in the other of the vertical spring or the horizontal spring is maintained at a predetermined pressure, and temporarily stored in the other of the vertical spring or the horizontal spring. Since the support load acting on the supported body through the table is slightly increased as the height position of the table is lowered in the vicinity of the predetermined height position when the gas entry / exit is cut off, the response Even if a large acceleration exceeding the capacity is generated and a phenomenon equivalent to blocking the entry and exit of the gas stored in the air spring occurs, the height position of the table becomes lower in the vicinity of the predetermined height position. Since the support load acting on the support via the table is slightly large, the apparent spring constant of the table is small, and it is possible to respond to long-period vibration.
Also, the other of the vertical spring or the horizontal spring is an air spring, and the pressure of the gas stored in the other of the vertical spring or the horizontal spring is maintained at a predetermined pressure, and temporarily stored in the other of the vertical spring or the horizontal spring. When the gas pressure is the predetermined pressure, the support load acting on the support via the table when the height position of the table changes in the vicinity of the predetermined height position is substantially constant. Therefore, even if a large acceleration exceeding the response capability occurs and a phenomenon equivalent to shutting out the gas stored in the air spring occurs, the pressure of the gas stored in the air spring is centered on a predetermined pressure. When the height position of the table changes in the vicinity of the predetermined height position, the support load acting on the supported body via the table is substantially constant, so that the table is viewed. Kenobane constant is small, it can respond to vibrations of the long period.
In addition, since one side of the horizontal spring in the horizontal direction is connected to the gantry and the other side is connected to the horizontal guide member, the table is subject to acceleration when a horizontal acceleration occurs in the supported body. A horizontal force acting on the horizontal spring is transmitted from one end to the other end via the link member, and is transmitted to the other horizontal side of the horizontal spring via the horizontal guide member, via the horizontal spring. Then, it is transmitted from the other side in the horizontal direction to a gantry connected to one side. Since the gantry is supported by the foundation, the horizontal movement of the entire system of the supported body and the spring-type vibration isolator is restricted.
Further, another horizontal guide member and another link member are provided, and the trajectory of the reciprocating movement of the horizontal guide member and the other horizontal guide member as viewed from above is arranged along a straight line, and the horizontal spring is arranged in the horizontal direction. Since it is connected between the guide member and the other horizontal guide member, when the horizontal spring expands and contracts in the horizontal direction, the horizontal guide member and the other horizontal guide member are pushed in the opposite directions and inclined. An upward load is applied to the table via the link member and the other link member, and a support load that is a resultant force of these loads supports the supported body.
Further, another horizontal spring, another horizontal guide member, and another link member are provided, and the trajectory of the reciprocating movement of the horizontal guide member and the other horizontal guide member as viewed from above is arranged along a straight line, Since the horizontal spring connected to the side pushes the horizontal guide member and the other horizontal spring connected to the gantry pushes the other horizontal guide member, when the horizontal spring expands and contracts in the horizontal direction, The horizontal guide member is pushed, and an upward horizontal spring support load is applied to the table via the inclined link member. When the other horizontal spring expands and contracts in the horizontal direction, the other horizontal guide member is pushed, and an upward load is applied to the table via the inclined other link member. A support load that is a resultant force of these loads supports the supported body.

As described above, the vibration isolator according to the present invention has the following effects due to its procedure and configuration.
The vertical spring that expands and contracts in the vertical direction is provided between the gantry and the table, a horizontal guide member that is movable in the horizontal direction is provided on the gantry, and the table and the horizontal guide member are disposed by the inclined link member. Three spring-type vibration isolator devices having a structure in which a horizontal guide member is pushed by the horizontal springs that are connected and stretched in the horizontal direction are adopted, and the three spring-type vibration isolator devices are connected to each of the horizontal guide members. Since the reciprocating trajectory is arranged along three lines extending radially from the virtual point located in the contour of the supported body when viewed from above, it acts on the table by the vertical spring. The load tends to increase as the table goes down, the load acting on the table by the horizontal spring tends to decrease as the table goes down, and the support load that is the resultant force of both tends to Offset to each other, so-called spring constant of the spring type vibration damping device is reduced. When acceleration occurs in the foundation due to an earthquake or the like, the acceleration transmitted from the foundation to the supported body is reduced, and each horizontal force acting on the three spring-type vibration isolator is concentrated on the virtual point. Can cancel the power imbalance.
In addition, a pair of spring-type vibration isolator having the above-described structure is adopted, and the trajectory of the reciprocating movement of each horizontal guide member of the pair of spring-type anti-vibration devices is substantially in a straight line when viewed from above. The load acting on the table by the vertical spring tends to increase as the table is lowered, and the load acting on the table by the horizontal spring tends to decrease as the table is lowered. The supporting load, which is the resultant force, cancels out this tendency, and the so-called spring constant of the spring-type vibration isolator decreases. When acceleration occurs on the foundation due to an earthquake or the like, the acceleration transmitted from the foundation to the supported body is reduced, and each horizontal force acting on the pair of spring-type vibration isolator is concentrated on a straight line. Can be offset.
Also, one of the vertical spring and the horizontal spring is an air spring, and gas is supplied to and exhausted from one of the vertical spring and the horizontal spring so that the height position of the table is set to a predetermined height position. Since the automatic leveling device changes the load caused by the air spring, the height position of the table fluctuates up and down from the predetermined height position, and the acceleration transmitted from the foundation to the supported body is reduced. .
Also, the other of the vertical spring or the horizontal spring is an air spring, and the pressure of the gas stored in the other of the vertical spring or the horizontal spring is maintained at a predetermined pressure, so that the horizontal spring acts on the table. The load is stable, and the height position of the table can be easily maintained at a predetermined height position.
The other of the vertical spring and the horizontal spring is an air spring, and the pressure of the gas stored in the other of the vertical spring or the horizontal spring is predetermined when a large acceleration is not generated in the foundation and the supported body. When a large acceleration is generated to maintain the pressure, the flow of gas stored in the other of the vertical spring or the horizontal spring is blocked or suppressed. The height of the table can be easily maintained at a predetermined height.
Further, the other of the vertical spring or the horizontal spring is an air spring, and the pressure of the gas stored in the other of the vertical spring or the horizontal spring is maintained at a predetermined pressure. On the other hand, when the stored gas is blocked from entering and exiting, the support load acting on the supported body through the table is slightly increased as the height position of the table becomes lower in the vicinity of the predetermined height position. Therefore, even if a large acceleration exceeding the response capability occurs on the foundation or the supported body and a phenomenon equivalent to blocking the entrance and exit of the gas stored in the air spring occurs, the height position of the table is the predetermined level. As the load is lowered near the height position, the support load acting on the supported body via the table is slightly large, so the apparent spring constant of the table is small, and the long cycle It can respond to vibration.
The other of the vertical spring or the horizontal spring is an air spring, and the pressure of the gas stored in the vertical spring or the horizontal spring is maintained at a predetermined pressure, and temporarily stored in the vertical spring or the horizontal spring. When the gas pressure is the predetermined pressure, when the height position of the table changes in the vicinity of the predetermined height position, the support load acting on the supported body via the table is substantially constant. Therefore, even if a large earthquake that exceeds the response capability occurs and the phenomenon equivalent to blocking the flow of gas stored in the air spring occurs, the pressure of the gas stored in the horizontal spring fluctuates around a predetermined pressure. Then, when the height position of the table changes in the vicinity of the predetermined height position, the supporting load acting on the supported body via the table is substantially constant, so that the apparent surface of the table Constant is small, it can respond to vibrations of the long period.
In addition, since one side of the horizontal spring in the horizontal direction is connected to the gantry and the other side is connected to the horizontal guide member, the table is subject to acceleration when a horizontal acceleration occurs in the supported body. Since the horizontal force acting on the frame is transmitted to the horizontal spring via the link member and the horizontal guide member, and the horizontal spring is supported by the foundation via the gantry, the supported body and the entire spring type vibration isolator The horizontal movement of the system is constrained.
Further, another horizontal guide member and another link member are provided, and the trajectory of the reciprocating movement between the horizontal guide member and the other horizontal guide member as viewed from above is arranged along a straight line, and the horizontal spring is arranged in the horizontal guide. Since it is connected between the member and the other horizontal guide member, when the horizontal spring expands and contracts in the horizontal direction, the horizontal guide member and the other horizontal guide member are pushed in the opposite directions and inclined. An upward load is applied to the table via the link member and the other link member, and a support load which is a resultant force of these loads supports the supported body.
In addition, another horizontal spring, another horizontal guide member, and another link member are provided, and the trajectory of the reciprocating movement of the horizontal guide member and the other horizontal guide member as viewed from above is arranged along a straight line, Since the connected horizontal spring pushes the horizontal guide member and the other horizontal spring connected to the gantry pushes the other horizontal guide member, when the horizontal spring expands and contracts in the horizontal direction, A horizontal guide member is pushed and an upward load is applied to the table via the inclined link member. When the other horizontal spring expands and contracts in the horizontal direction, the other horizontal guide member is pushed, and an upward load is applied to the table via the inclined other link member. A support load that is a resultant force of these loads supports the supported body.
Accordingly, it is possible to provide a spring-type vibration isolator that exhibits a seismic isolation effect with respect to a component having a longer period with a simple structure and a vibration isolator using the spring type vibration isolator.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

Initially, the vibration isolator 20 which concerns on embodiment of this invention is demonstrated based on a figure.
FIG. 1 is a side view of a vibration isolator according to an embodiment of the present invention. FIG. 2 is a conceptual diagram of the vibration isolator according to the first embodiment of the present invention. FIG. 3 is a conceptual diagram of a vibration isolator according to the second embodiment of the present invention. FIG. 4 is a piping system diagram of the vibration isolator according to the embodiment of the present invention. FIG. 5 is a conceptual diagram of the spring-type vibration isolator according to the first embodiment of the present invention. FIG. 6 is a conceptual diagram of a spring-type vibration isolator according to the second embodiment of the present invention. FIG. 7 is a conceptual diagram of a spring-type vibration isolator according to the third embodiment of the present invention. FIG. 8 is a conceptual diagram of a spring-type vibration isolator according to the fourth embodiment of the present invention. FIG. 9 is a conceptual diagram of a spring-type vibration isolator according to the fifth embodiment of the present invention. FIG. 10 is a conceptual diagram of a spring-type vibration isolator according to the sixth embodiment of the present invention. FIG. 11 is a conceptual diagram of a spring-type vibration isolator according to the seventh embodiment of the present invention. FIG. 12 is a conceptual diagram of a spring-type vibration isolator according to the eighth embodiment of the present invention. FIG. 13 is a first performance characteristic diagram of the vibration isolator according to the embodiment of the present invention. FIG. 14 is a second performance characteristic diagram of the vibration isolator according to the embodiment of the present invention.

The vibration isolator 20 is a device that supports the supported body 10 arranged above the foundation 30.
The vibration isolator 20 is composed of one or a plurality of spring-type vibration isolator 100.
A plurality of spring-type anti-vibration devices 100 are disposed below the supported body.
Or the single spring type vibration isolator 100 is arrange | positioned under a to-be-supported body.
The spring vibration isolator 100 includes a gantry 110, a table 120, one or more vertical springs 130, one or more horizontal springs 140, one or more horizontal guide members 150, and one or more link members 160. The

The gantry 110 is supported by the foundation.
The table 120 mounts a supported body.
The supported body is restrained from moving in the horizontal direction by a separate mechanism (not shown).
The vertical spring 130 is a device that can expand and contract in the vertical direction.
For example, the vertical spring 130 is an air spring, a helical spring, a spring made of an elastic material, or the like.
The horizontal spring 140 is a device that can expand and contract in the horizontal direction.
For example, the horizontal spring 140 is an air spring, a helical spring, a spring made of an elastic material, or the like.
The horizontal guide member 150 is a member that is supported by a gantry and can be reciprocated in the horizontal direction.
The link member 160 is a member in which one end is swingably connected to the table 120 and the other end is swingably connected to the horizontal guide member 150, and is an imaginary line connecting both ends. Is inclined.
A vertical spring 130 is supported by the gantry 110 and supports the table 120 by pushing it in the vertical direction.
The horizontal spring 140 pushes the horizontal guide member 150 in the horizontal direction.

The vertical spring 130 may be a vertical air spring 130 that expands or compresses gas stored therein and can be expanded and contracted in the vertical direction.
The horizontal spring 140 may be a horizontal air spring 140 that expands or compresses gas stored in the horizontal spring 140 and can expand and contract in the horizontal direction.

  Two types of seismic isolation devices 20 will be described below.

The first type of vibration isolator 20 includes at least three spring-type vibration isolator 100 and a pressure fluid supply device 200.
The spring vibration isolator 100 is a device that supports the supported body 10 disposed above the foundation.
The spring-type anti-vibration device 100 includes a pedestal 110, a table 120, one or more vertical air springs 130, one or more horizontal air springs 140, one or more horizontal guide members 150, one or more link members 160, and automatic. And leveling device 170.

For the convenience of explanation, when it is desired to distinguish a plurality of devices, they are called as follows.
The plurality of vertical air springs 130 are referred to as a first vertical air spring 131 (corresponding to “vertical air spring”) and a second vertical air spring 132 (corresponding to “other vertical air spring”). .
The plurality of horizontal air springs 140 are referred to as a first horizontal air spring 141 (corresponding to “horizontal air spring”) and a second horizontal air spring (corresponding to 142 “other horizontal air spring”). To do.
The plurality of horizontal guide members 150 are referred to as a first horizontal guide member 151 (corresponding to a “horizontal guide member”) and a second horizontal guide member 152 (corresponding to “another horizontal guide member”). To do.
The plurality of link members 160 are distinguished by being referred to as a first link member 161 (corresponding to “link member”) and a second link member 162 (corresponding to “other link member”).

For example, a plurality of spring-type vibration isolation devices 100 are arranged at a distance from each other on the foundation and support the supported body 10.
The three spring-type anti-vibration devices 100 radiate from the virtual point G located in the contour of the supported body 10 as seen from above, with the trajectory of each horizontal guide member 150, which will be described later, reciprocally move. You may arrange | position so that it may each follow on the three lines to extend.
FIG. 2 shows that three spring-type vibration isolator 100 scatters around from a virtual point G located in the outline of the supported body 10 when the trajectory of each horizontal guide member 150 reciprocally moving is viewed from above. It is shown that they are arranged so as to run along three lines extending radially.

The second type vibration isolator 20 includes at least a pair of spring-type vibration isolator 100 and a pressure fluid supply device 200.
A pair of spring-type vibration isolator devices may be arranged such that the reciprocating trajectory of each horizontal guide member 150 to be described later is aligned substantially in a straight line when viewed from above.
FIG. 3 shows that a pair of spring-type anti-vibration devices and another pair of spring-type anti-vibration devices are arranged in a substantially straight line when the reciprocating trajectory of each horizontal guide member 150 described later is viewed from above. Is shown.

Below, the spring type vibration isolator 100 is explained in full detail.
When an automatic leveling device 170 described later supplies and exhausts gas to the vertical air spring 130 to maintain the height position of the table at a predetermined height position, the horizontal spring 130 is an air spring, a vine. It may be a spring or a spring made of an elastic material.
When an automatic leveling device 170 described later supplies and exhausts gas to the horizontal air spring 140 to maintain the height position of the table at a predetermined height position, the vertical spring 130 is an air spring, a vine. It may be a spring or a spring made of an elastic material.
In the following description, it is assumed that the vertical spring and the horizontal spring are air springs.

The vertical air spring 130 is a device that can expand and contract in the vertical direction by expanding or compressing the gas stored therein.
For example, the vertical air spring 130 includes a vertical air spring main body 130a and a vertical auxiliary tank 130b.
The horizontal air spring 140 is a device that expands or compresses the gas stored in the inside thereof and can expand and contract in the horizontal direction.
For example, the horizontal air spring 140 includes a horizontal air spring main body 140a and a horizontal auxiliary tank 140b.
The horizontal guide member 150 is a member that is supported by a gantry and can be reciprocated in the horizontal direction.
The link member 160 is a member in which one end portion is swingably connected to the table 120 and the other end portion is swingably connected to the horizontal guide member 150, and an imaginary line connecting both ends is provided. It is slanted.
The automatic leveling device 170 is a device that adjusts the level of the table 120.
A vertical air spring 130 is supported by the gantry 110 and supports the table 120 by pushing it in the vertical direction.
The horizontal air spring 140 pushes the horizontal guide member 150 in the horizontal direction.

The automatic leveling device 170 supplies and exhausts gas to one of the vertical air spring 130 and the horizontal air spring 140 to maintain the height position of the table at a predetermined height position.
The automatic leveling device 170 supplies and exhausts gas to one of the vertical air spring 130 and the horizontal air spring 140 when the acceleration exceeding the predetermined acceleration is not generated on the foundation and the supported body, thereby the height position of the table. May be maintained at a predetermined height position.
The automatic leveling device 170 supplies and exhausts gas to one of the vertical air spring 130 and the horizontal air spring 140 when the acceleration exceeding the predetermined acceleration is not generated on the foundation and the supported body, thereby the height position of the table. Is stored in one of the vertical air spring 130 and the horizontal air spring 140 when an acceleration exceeding a predetermined acceleration is generated on the foundation or the supported body. May be blocked or suppressed.
"When the acceleration exceeding the specified acceleration is not generated on the foundation or supported body" means "when an earthquake is not occurring", "when the object stored in the supported body is not moving greatly", " “When the object accommodated by the support body does not change its weight abruptly”.
In the following, unless otherwise specified, “when no acceleration exceeding a predetermined acceleration is generated on the foundation or the support” will be described as “when no earthquake occurs”.
For example, the automatic leveling device supplies and exhausts gas to one of the vertical air spring 130 or the horizontal air spring 140 when there is no earthquake and maintains the height position of the table at a predetermined height position. And
In each spring-type vibration isolator 100, each leveling device 170 adjusts the level of each table 120, so that the level of the supported body 10 is maintained and the height position of the supported body 10 is maintained. To do.
In particular, when the weight of the supported body 10 changes or the position of the center of gravity of the supported body 10 changes, in each spring-type vibration isolator 100, each automatic leveling device 170 is connected to the vertical air spring 130 or horizontal. Gas is supplied to and exhausted from the air spring 140 to adjust the pressure of the gas stored in the vertical air spring 130 or the horizontal air spring 140.
As a result, the level of the supported body 10 is maintained, and the height position of the supported body 10 is maintained at a predetermined height position.

An attempt is made to maintain the pressure of the gas stored in the other of the vertical air spring 130 or the horizontal air spring 140 at a predetermined pressure.
When no acceleration exceeding a predetermined acceleration is generated on the foundation and the supported body, the pressure of the gas stored in the other of the vertical air spring 130 or the horizontal air spring 140 may be maintained at a predetermined pressure.
When the acceleration exceeding the predetermined acceleration is not generated in the foundation and the supported body, the pressure of the gas stored in the other of the vertical air spring 130 or the horizontal air spring 140 is maintained at the predetermined pressure, and the foundation and the supported body. When acceleration exceeding a predetermined acceleration occurs, the gas stored in the other of the vertical air spring 130 or the horizontal air spring 140 may be blocked or suppressed.

Hereinafter, a method for adjusting the pressure of the gas stored in the vertical air spring 130 or the horizontal air spring 140 and a method for supplying and exhausting the gas will be described in detail.
The automatic leveling device 170 supplies / exhausts gas to / from the vertical air spring 130 to maintain the height position of the table at a predetermined height position, and the pressure of the gas stored in the horizontal air spring 140 is set to a predetermined pressure. You may try to keep it.
The automatic leveling device 170 supplies and exhausts gas to the horizontal air spring 140 to maintain the height position of the table at a predetermined height position, and the pressure of the gas stored in the vertical air spring 130 is set to a predetermined pressure. You may try to keep it.
For easy understanding of the explanation, the automatic leveling device 170 supplies and exhausts gas to the vertical air spring 130 to maintain the height position of the table at a predetermined height position. The case where it is going to maintain the pressure of the stored gas to a predetermined pressure is demonstrated to an example.

The automatic leveling device 170 supplies and exhausts gas to the vertical air spring 130 when the acceleration exceeding the predetermined acceleration is not generated on the foundation and the supported body, and the height position of the table 120 is set to a predetermined height. You may try to keep it in position.
For example, the automatic leveling device 170 supplies / exhausts gas to / from the vertical air spring 130 when there is no earthquake, and tries to maintain the height position of the table 120 at a predetermined height position.

For example, the automatic leveling device 170 supplies and exhausts gas to and from the vertical air spring 130 when an earthquake occurs, and tries to maintain the height position of the table 120 at a predetermined height position.
Since the response capability of the pressure fluid supply apparatus 200 has a reasonable limit, when a large earthquake exceeding the limit occurs, the entry and exit of air stored in the vertical air spring 130 is substantially suppressed.
When the phenomenon that the entry and exit of the air stored in the vertical air spring 130 is substantially suppressed occurs, the pressure of the gas stored in the vertical air spring 130 increases when the height position of the table falls below a predetermined height position. When the height position of the gas rises above the predetermined height position, the pressure of the gas stored in the vertical air spring 130 decreases.

The automatic leveling device 170 supplies and exhausts gas to the vertical air spring 130 when the acceleration exceeding the predetermined acceleration is not generated on the foundation and the supported body, and the height position of the table 120 is set to a predetermined height. The position may be maintained, and when acceleration exceeding a predetermined acceleration occurs on the foundation or the supported body, the gas stored in the vertical air spring 130 may be blocked or suppressed.
For example, the automatic leveling device 170 supplies and exhausts gas to the vertical air spring 130 when there is no earthquake, and maintains the height position of the table 120 at a predetermined height position. The entrance and exit of the gas stored in the air spring 130 may be blocked or suppressed.
Here, “suppressing the entry / exit of gas” means to block the entry / exit of many gases and allow the remaining gas to enter / exit.

When the acceleration exceeding the predetermined acceleration is not generated on the foundation and the supported body, the pressure of the gas stored in the horizontal air spring 140 may be maintained at the predetermined pressure.
For example, when there is no earthquake, the pressure of the gas stored in the horizontal air spring 140 is maintained at a predetermined pressure, and when the earthquake occurs, the pressure of the gas stored in the horizontal air spring 140 is maintained at a predetermined pressure. .
The circuit that controls the pressure of the gas stored in the horizontal air spring 140 has a reasonable response limit, and when an earthquake with an amplitude exceeding the response limit occurs, the gas stored in the horizontal air spring 140 is substantially in and out of the circuit. To be suppressed.

Further, when the acceleration exceeding the predetermined acceleration is not generated on the foundation and the supported body, the pressure of the gas stored in the horizontal air spring 140 is maintained at the predetermined pressure, and the acceleration exceeding the predetermined acceleration is applied to the foundation or the supported body. If generated, the gas stored in the horizontal air spring 140 may be blocked or suppressed.
For example, the pressure of the gas stored in the horizontal air spring 140 is maintained at a predetermined pressure when there is no earthquake, and when the earthquake occurs, the gas stored in the horizontal air spring 140 is blocked or suppressed.

If the gas stored in the other of the vertical air spring or the horizontal air spring is shut off, the support load that acts on the supported body via the table as the height position of the table decreases near the predetermined height position. May be slightly larger.
For example, if the gas stored in the horizontal air spring is shut off, the support load acting on the supported body through the table becomes slightly larger as the height position of the table decreases near the predetermined height position. Also good.
If the predetermined pressure is properly selected and the gas stored in the other of the vertical air spring and the horizontal air spring is shut off, the table moves as the height position of the table decreases in the vicinity of the predetermined height position. The support load acting on the supported body is slightly increased.
For example, if the predetermined pressure is properly selected and the gas stored in the horizontal air spring is shut off, the table acts on the supported body via the table as the height position of the table decreases near the predetermined height position. The supporting load is slightly increased.

If the pressure of the gas stored in the other of the vertical air spring or the horizontal air spring is a predetermined pressure, it acts on the supported body via the table when the height position of the table changes in the vicinity of the predetermined height position. The supporting load to be performed may be substantially constant.
For example, if the pressure of the gas stored in the horizontal air spring is a predetermined pressure, the support load acting on the supported body via the table when the height position of the table changes in the vicinity of the predetermined height position is substantially constant. It may be.
For example, if the predetermined pressure is properly selected and the pressure of the gas stored in the horizontal air spring is the predetermined pressure, it is supported via the table when the height position of the table changes in the vicinity of the predetermined height position. The support load acting on the body is substantially constant.
When an earthquake with an amplitude exceeding the limit of response capability occurs, a phenomenon equivalent to the suppression of the gas entering and exiting the horizontal air spring occurs, so when the table height position falls below the specified height position, the horizontal air When the pressure of the gas stored in the spring rises and the height position of the table rises from the predetermined height position, the pressure of the gas stored in the horizontal air spring decreases.

The performance characteristics of the spring-type vibration isolator 100 according to the embodiment of the present invention will be described with reference to the drawings.
FIG. 13: shows an example of the performance characteristic view of the spring type vibration isolator which concerns on embodiment of this invention.
In the upper left of FIG. 13, gas is supplied to and exhausted from the vertical air spring 130 to maintain the height of the table at a predetermined height, the pressure of the gas stored in the horizontal air spring 140 is maintained at a predetermined pressure, and then the horizontal air spring is maintained. The vertical load acting on the table by the vertical air spring 130 when the gas stored in 140 is blocked and the gas stored in the vertical air spring 130 is blocked.
The vertical axis represents the vertical load acting on the table by the vertical air spring 130, and the horizontal axis represents the vertical displacement from a predetermined height. The predetermined pressure P is changed in five stages.
In the upper right of FIG. 13, gas is supplied to and exhausted from the vertical air spring 130 to maintain the height of the table at a predetermined height, and the pressure of the gas stored in the horizontal air spring 140 is maintained at a predetermined pressure. The vertical load acting on the table by the horizontal air spring 140 when the gas stored in 140 is blocked and the gas stored in the vertical air spring 130 is blocked.
The vertical axis represents the vertical load acting on the table by the horizontal air spring 140, and the horizontal axis represents the vertical displacement from a predetermined height. The predetermined pressure P is changed in five stages.
In the lower part of FIG. 13, gas is supplied to and exhausted from the vertical air spring 130 to maintain the height of the table at a predetermined height, and the pressure of the gas stored in the horizontal air spring 140 is maintained at a predetermined pressure. When the gas stored in 140 is blocked and the gas stored in vertical air spring 130 is blocked, the vertical air spring 130 acts on the table and the horizontal air spring 140 acts on the table. Indicates the total value of vertical loads. The predetermined pressure P is changed in five stages.

When the predetermined height position of the table is properly selected and the predetermined pressure P of the gas stored in the other of the vertical air spring 130 or the horizontal air spring 140 is appropriately selected, the performance characteristics of the spring-type vibration isolator are as follows: Can be done.
If the gas in / out of the vertical air spring 130 is blocked or suppressed, the height position of the table falls within a movable range centered on the predetermined height position, and the vertical load acting on the table by the vertical air spring 130 is , Tend to grow. When the predetermined pressure P increases, the load tends to decrease as a whole.
When the flow of gas stored in the horizontal air spring 140 is blocked or suppressed, the vertical load acting on the table by the horizontal air spring 140 falls within the movable range in which the height position of the table is centered on the predetermined height position. There is a tendency to become smaller. When the predetermined pressure P increases, the load tends to increase as a whole.
Accordingly, when the air stored in the vertical air spring 130 and the horizontal air spring 140 is blocked or suppressed, the support load acting on the table by the vertical air spring 130 and the horizontal air spring 140 is applied to the horizontal air spring 140. When the predetermined pressure P of the sealed gas is large, the height position of the table is decreased, and when the predetermined pressure P of the gas sealed in the horizontal air spring 140 is small, the height position of the table is increased.
Therefore, by selecting the predetermined pressure P of the gas stored in the horizontal air spring 140 when there is no earthquake, the height position of the table is set to a predetermined height when the air stored in the horizontal air spring 140 is blocked. The supporting load acting on the supported body via the table can be made slightly larger as it becomes lower in the vicinity of.

As another method, when the predetermined pressure P of the gas stored in the horizontal air spring 140 when there is no earthquake is selected and the pressure of the air stored in the horizontal air spring 140 is maintained at the predetermined pressure, the height of the table is increased. Even if the position changes in the vicinity of the predetermined height, the support load acting on the supported body via the table can be made substantially constant.
In this way, when the air stored in the vertical air spring 130 and the horizontal air spring 140 is blocked or suppressed, when the height position of the table is lowered, the air is stored in the vertical air spring 130 and the horizontal air spring 140. When the pressure of the gas rises and the height position of the table rises, the pressure of the gas stored in the vertical air spring 130 and the horizontal air spring 140 falls, so the height position of the table becomes lower in the vicinity of the predetermined height. As a result, the support load acting on the support via the table can be made slightly larger.

The pressure fluid supply device 200 is a device that supplies pressure fluid to the spring-type vibration isolator 100.
The pressure fluid supply apparatus 200 includes a vertical air spring pressure system 210, a horizontal air spring pressure system 220, and a vertical air spring sensor system 230.
The vertical air spring pressure system 210 is a system that supplies pressure gas to the vertical air spring 130, and includes a vertical air spring pressure pipe 211 and a vertical air spring pressure source 212.
The vertical air spring pressure pipe 211 is a pipe that communicates the vertical air spring pressure source 212 with the vertical air spring 130 via a switching valve 171 described later.
The vertical air spring pressure source 212 is a device that supplies pressurized gas.
The horizontal air spring pressure system 220 is a system that supplies a gas having a predetermined pressure to the horizontal air spring 140, and includes a horizontal air spring pressure pipe 221 and a horizontal air spring pressure source 222.
The horizontal air spring pressure pipe 221 is a pipe that connects the horizontal air spring pressure source 222 to the horizontal air spring 140.
The horizontal air spring pressure source 222 is a device that supplies air of a predetermined pressure.
For example, the horizontal air spring pressure source 222 has a relief valve for maintaining the pressure of the fluid supplied to the horizontal air spring pressure pipe 221 at a predetermined pressure.
The vertical air spring sensor system 230 is a system that detects the pressure of the vertical air spring 130, and includes a vertical air spring sensor pipe 231 and a vertical air spring sensor meter 232.
The vertical air spring sensor pipe 231 is a pipe that communicates the vertical air spring 130 and the vertical air spring sensor meter 232.
The vertical air spring sensor meter 232 is a device that detects the pressure of the vertical air spring sensor pipe 231.

  In the following, a plurality of types of spring-type vibration isolator 100 will be described in detail.

Initially, the spring type vibration isolator 100 concerning 1st embodiment is demonstrated based on a figure.
FIG. 5 is a conceptual diagram of the spring-type vibration isolator 100 according to the first embodiment of the present invention.
The spring-type vibration isolator 100 of the first embodiment includes a gantry 110, a table 120, two vertical air springs 130, one horizontal air spring 140, two horizontal guide members 150, and two link members 160. And an automatic leveling device (not shown).
The two vertical air springs 130 include a first vertical air spring 131 and a second vertical air spring 132.
The two horizontal guide members 150 include a first horizontal guide member 151 and a second horizontal guide member 152.
The two link members 160 include a first link member 161 and a second link member 162.

  The first vertical air spring 131 and the second vertical air spring 132 are supported horizontally by the gantry 110 and support the table 120 by pushing it upward.

As viewed from above, the first horizontal guide member 151 and the second horizontal guide member 152 are arranged so that their reciprocating trajectories are aligned along a straight line and supported by the gantry 110.
For example, the first horizontal guide member 151 is supported on the gantry 110 via a linear guide, and the second horizontal guide member 152 is supported on the gantry 110 via a linear guide.
As seen from above, the linear movement direction of each linear guide is along a straight line.

A first link member 161 is pivotally connected at one end to the table 120 and is pivotally connected to the first horizontal guide member 151 at the other end, and an imaginary line S1 connecting both ends. Tilt.
The second link member 162 is pivotally connected at one end to the table 120 and is pivotally connected to the second horizontal guide member 152 at the other end, and an imaginary line S2 connecting both ends. Tilt.
When viewed from above, the longitudinal direction of the reciprocating path of the first horizontal guide member 151, the reciprocating path of the second horizontal guide member 152, the imaginary line of the first link member 161, and the imaginary line of the second link member 162. The direction of matches.
When viewed from the side, the distance between the connection position of the first link member 161 to the table 120 and the connection position of the second link member to the table 120 is a connection position of the first link member 161 to the first horizontal guide member. It is narrower than the separation distance between the second link member 162 and the connecting portion with the second horizontal guide member 152.
That is, the virtual line S1 of the first link member 161 and the virtual line S2 of the second link member 162 are separated from each other as they go upward.

A first horizontal air spring 141 is disposed between the first horizontal guide member 151 and the second horizontal guide member 152.
One side of the first horizontal air spring 141 in the horizontal direction is connected to the first horizontal guide member 151.
The other horizontal side of the first horizontal air spring 141 is connected to the second horizontal guide member 152.
For example, the first horizontal air spring 141 includes one horizontal air spring main body 140a and two horizontal auxiliary tanks 140b.
One horizontal auxiliary tank 140b is connected to one side of the horizontal air spring body 140a in the horizontal direction, and the other one horizontal auxiliary tank 140b is connected to the other side of the horizontal air spring body 140a in the horizontal direction.

FIG. 14 shows another example of the performance characteristic diagram of the spring-type vibration isolator according to the embodiment of the present invention.
FIG. 14 shows the vertical load acting on the table by the vertical air spring 130, the vertical load acting on the table by the horizontal air spring 140, and the support load that is the total when the predetermined pressure is properly selected. Show.
The vertical support load acting on the table by the vertical air spring 130 tends to increase as the table falls.
The vertical support load acting on the table by the horizontal air spring 140 tends to decrease as the table is lowered.
The vertical support load acting on the table by the vertical air spring 130 and the horizontal air spring 140 is designed to increase slightly when the height position falls within a movable range centered on a predetermined height position. I understand that.

Next, the spring type vibration isolator according to the second embodiment will be described with reference to the drawings.
FIG. 6 is a conceptual diagram of a spring-type vibration isolator according to the second embodiment of the present invention.
The air spring vibration isolator according to the second embodiment includes a gantry 110, a table 120, two vertical air springs 130, one horizontal air spring 140, two horizontal guide members 150, and two link members 160. And an automatic leveling device (not shown).

  The structure of the gantry 110, the table 120, the two vertical air springs 130, the one horizontal air spring 140, the two horizontal guide members 150, and the automatic leveling device (not shown) is a spring according to the first embodiment. Since it is the same as that of the type vibration isolator, the description is omitted.

  The two link members 160 include a first link member 161 and a second link member 162.

A first link member 161 is pivotally connected at one end to the table 120 and is pivotally connected to the first horizontal guide member 151 at the other end, and an imaginary line S1 connecting both ends. Tilt.
The second link member 162 is pivotally connected at one end to the table 120 and is pivotally connected to the second horizontal guide member 152 at the other end, and an imaginary line S2 connecting both ends. Tilt.
When viewed from above, the trajectory of the horizontal guide member 150 reciprocally matches the longitudinal direction of the imaginary line S1 of the first link member 161 and the imaginary line S2 of the second link member 162.
When viewed from the side, the distance between the connection position of the first link member 161 to the table 120 and the connection position of the second link member to the table 120 is a connection position of the first link member 161 to the first horizontal guide member. The distance between the second link member 162 and the second horizontal guide member 152 is larger than the separation distance.
That is, the virtual line S1 of the first link member 161 and the virtual line S2 of the second link member 162 are separated from each other as they go upward.

  Since the performance characteristic of the spring type vibration isolator 100 according to the second embodiment is the same as that of the spring type vibration isolator 100 according to the first embodiment, the description thereof is omitted.

Next, the structure of the spring type vibration isolator 100 according to the third embodiment will be described with reference to the drawings.
FIG. 7 is a conceptual diagram of a spring-type vibration isolator according to the third embodiment of the present invention.

The spring vibration isolator 100 according to the third embodiment includes a gantry 110, a table 120, two vertical air springs 130, two horizontal air springs 140, two horizontal guide members 150, and two link members 160. And an automatic leveling device (not shown).
The two vertical air springs 130 include a first vertical air spring 131 and a second vertical air spring 132.
The two horizontal air springs 140 include a first horizontal air spring 141 and a second horizontal air spring 142.
The two horizontal guide members 150 include a first horizontal guide member 151 and a second horizontal guide member 152.
The two link members 160 include a first link member 161 and a second link member 162.

  The structure of the gantry 110, the table 120, the two vertical air springs 130, the two horizontal guide members 150, the two link members 160, and the automatic leveling device (not shown) is the spring according to the first embodiment. Since it is the same as that of the type vibration isolator, the description is omitted.

When viewed from above, the first horizontal air spring 141 and the second horizontal air spring 142 are aligned with each other in the direction of expansion and contraction.
Further, when viewed from above, the expansion / contraction direction of the first horizontal air spring 141 and the reciprocating trajectory of the first horizontal guide member 151 are in a straight line.
Further, when viewed from above, the expansion / contraction direction of the second horizontal air spring 142 and the reciprocating trajectory of the first horizontal guide member 152 are in a straight line.
The first horizontal air spring 141 is connected to the gantry 110 on one side in the horizontal direction and connected to the first horizontal guide member 151 on the other side.
The second horizontal air spring 142 is connected to the gantry 110 on one side in the horizontal direction and connected to the second horizontal guide member 152 on the other side.

  Since the performance characteristics of the spring vibration isolator 100 according to the third embodiment are the same as those of the spring vibration isolator 100 according to the first embodiment, the description thereof is omitted.

Next, the structure of the spring-type vibration isolator 100 according to the fourth embodiment of the present invention will be described with reference to the drawings.
FIG. 8 is a conceptual diagram of a spring-type vibration isolator according to the fourth embodiment of the present invention.

  The spring-type vibration isolator 100 according to the fourth embodiment includes a gantry 110, a table 120, two vertical air springs 130, two horizontal air springs 140, two horizontal guide members 150, and two link members 160. And an automatic leveling device (not shown), a rolling support member 180, and a horizontal support member 190.

  The structure of the gantry 110, the table 120, the two vertical air springs 130, the two horizontal air springs 140, the two horizontal guide members 150, the two link members 160, and the automatic leveling device (not shown) Since it is the same as that of the spring type vibration isolator according to the third embodiment, the description is omitted.

The rolling support member 180 is a member that supports the gantry 110 by rolling machine elements and supports the supported body 10 so as to be movable in the horizontal direction.
The rolling bearing member 180 is two spherical rolling bearing members 181.
Spherical rolling support members 181 are disposed at a lower portion of the gantry 110 and are separated from each other.
The spherical rolling support member 181 includes an upper plate structure, a plurality of spheres, a retainer, and a lower plate structure.
A retainer holds a plurality of spheres rotatably while maintaining a constant distance from each other.
A plurality of spheres are sandwiched between the upper plate structure and the lower plate structure.
The upper plate structure and the lower plate structure can move horizontally with a small frictional force.

The horizontal support member 190 is a member that causes a horizontal resistance force to act on the gantry 110 as the supported body 10 moves in the horizontal direction.
For example, the horizontal support member 190 is formed by stacking a plurality of rubber plates in the vertical direction and connecting the upper part to the gantry 110 and the lower part to the foundation 30.

  When horizontal acceleration occurs on the foundation 30, the small frictional force of the rolling member 180 reduces the level of acceleration transmitted to the supported body 10, and the origin is returned to the origin by the resistance force of the horizontal support member 190.

  The performance characteristics of the spring-type vibration isolator 100 according to the fourth embodiment are the same as those of the spring-type vibration isolator 100 according to the first embodiment in the vertical direction, and the description thereof is omitted.

Next, a spring-type vibration isolator 100 according to a fifth embodiment will be described with reference to the drawings.
FIG. 9 is a conceptual diagram of a spring-type vibration isolator according to the fifth embodiment of the present invention.
The spring-type vibration isolator according to the fifth embodiment includes a gantry 110, a table 120, two vertical air springs 130, two horizontal air springs 140, two horizontal guide members 150, and two link members 160. And an automatic leveling device (not shown), a rolling support member 180, and a horizontal support member 190.

  The structure of the gantry 110, the table 120, the two vertical air springs 130, the two horizontal air springs 140, the two horizontal guide members 150, the two link members 160, and the automatic leveling device (not shown) Since it is the same as that of the spring type vibration isolator according to the third embodiment, the description is omitted.

The rolling support member 180 is a member that supports the gantry 110 by rolling machine elements and supports the supported body 10 so as to be movable in the horizontal direction.
The rolling bearing member 180 is two linear motion rolling bearing members 182.
Linear motion type rolling support members 182 are disposed at a lower portion of the gantry 110 so as to be separated from each other.
The linear motion type rolling bearing member 182 is a pair of upper and lower linear rails that are connected orthogonally to each other.

The horizontal support member 190 is a member that causes a horizontal resistance force to act on the gantry 110 as the supported body 10 moves in the horizontal direction.
For example, the horizontal support member 190 is formed by stacking a plurality of rubber plates in the vertical direction and connecting the upper part to the gantry 110 and the lower part to the foundation 30.

  When horizontal acceleration occurs on the foundation 30, the small frictional force of the rolling member 180 reduces the level of acceleration transmitted to the supported body 10, and the origin is returned to the origin by the resistance force of the horizontal support member 190.

  The performance characteristics of the spring-type vibration isolator 100 according to the fifth embodiment are the same as those of the spring-type vibration isolator 100 according to the first embodiment in the up-down direction, and a description thereof will be omitted.

Next, a spring-type vibration isolator 100 according to a sixth embodiment of the present invention will be described with reference to the drawings.
FIG. 10 is a conceptual diagram of a spring-type vibration isolator according to the sixth embodiment of the present invention.
The spring-type vibration isolator 100 according to the sixth embodiment includes a gantry 110, a table 120, one vertical air spring 130, one horizontal air spring 140, one horizontal guide member 150, and one set of link members. 160 and an automatic leveling device 170.
One set of link members 160 are two link members that connect the table 120 and the horizontal guide member 150 in parallel to each other.

  One vertical air spring 130 is connected to the base 110 on the lower side in the vertical direction and connected to the lower surface of the table 120 on the upper side.

  One horizontal air spring 140 is connected to the gantry 110 on one side in the horizontal direction and connected to the horizontal guide member 150 on the other side.

The automatic leveling device 170 is a device that adjusts the level of the table 120, and includes a switching valve 171 and a level sensor 172.
The switching valve 171 is a valve that supplies gas to the vertical air spring 130 or exhausts it from the vertical air spring 130.
The level sensor 172 is a device that feeds back the level of the table 120 to the switching valve.
For example, when the height position of the table is higher than a predetermined height position, the switching valve 171 exhausts the gas having a flow rate corresponding to the difference height from the vertical air spring 130.
For example, when the height position of the table is lower than a predetermined height position, the switching valve 171 supplies the vertical air spring 130 with a gas having a flow rate corresponding to the difference height.
In this way, when there is a factor that causes the height of the table to fluctuate, the height position of the table 120 fluctuates up and down with a predetermined height in between. When there is no factor that changes the height of the table, the height of the table becomes a predetermined height.

Three of the three spring-type vibration isolator 100 are radially extended by the reciprocating trajectory of each of the first horizontal guide members scattered from the virtual points located in the outline of the supported body when viewed from above. The three spring-type vibration isolator 100 may be arranged so as to be point-symmetric with respect to the virtual point.
FIG. 2 shows that three spring-type vibration isolator 100 is arranged along three lines extending radially from the virtual point to the periphery, and the orientation of the three spring-type anti-vibration devices 100 is as follows. It shows that they are arranged so as to be symmetric with respect to a virtual point.
If it does in this way, the horizontal force which acts on a horizontal air spring will mutually be canceled, and a to-be-supported body can be stabilized in a predetermined position.

A pair of spring-type anti-vibration devices are arranged such that the reciprocating trajectory of each first horizontal guide member is aligned along a substantially straight line when viewed from above, and the pair of spring-type anti-vibration devices 100 May be arranged to be line symmetric along a straight line.
FIG. 3 shows that four spring-type vibration isolator devices are divided into two groups, and each pair of spring-type vibration isolator devices has a reciprocating path of each first horizontal guide member from the top. It is arranged so as to be aligned along a substantially straight line as viewed, and a pair of spring-type vibration isolator 100 is disposed so as to be line-symmetrical along the straight line.
If it does in this way, the horizontal force which acts on a horizontal air spring will mutually be canceled, and a to-be-supported body can be stabilized in a predetermined position.

  Since the performance characteristics of the spring vibration isolator according to the sixth embodiment are the same as those of the spring vibration isolator according to the first embodiment, the description thereof is omitted.

Next, a spring-type vibration isolator 100 according to a seventh embodiment of the present invention will be described with reference to the drawings.
FIG. 11 is a conceptual diagram of a spring-type vibration isolator according to the seventh embodiment of the present invention.
The spring-type vibration isolator 100 according to the seventh embodiment includes a gantry 110, a table 120, two vertical air springs 130, two horizontal air springs 140, two horizontal guide members 150, and two sets of link members. 160 and an automatic leveling device 170.
The two vertical air springs 130 include a first vertical air spring 131 and a second vertical air spring 132.
The two horizontal air springs 140 include a first horizontal air spring 141 and a second horizontal air spring 142.
The two horizontal guide members 150 include a first horizontal guide member 151 and a second horizontal guide member 152.
The two sets of link members 160 are two pairs of link members that connect the table 120 and the horizontal guide member 150 in parallel with each other.

Two vertical air springs 131 are connected to the base 110 on the lower side in the vertical direction and connected to the lower surface of the table 120 on the upper side.
Two vertical air springs 131 are arranged at positions sandwiching the reciprocating trajectory of the two horizontal guide members 151 and 152, respectively.

  Two horizontal guide members 151 and 153 are arranged on the gantry 110 with the horizontal auxiliary tanks facing each other along a straight line along a reciprocal trajectory of each other.

The first horizontal air spring 141 and the second horizontal air spring 142 are disposed between the two horizontal guide members 151 and 153 along a straight line in the direction of expansion and contraction.
Sides of the first horizontal air spring 141 and the second horizontal air spring 142 facing each other in the horizontal direction are connected to the gantry 110.
The opposite sides of the first horizontal air spring 141 and the second horizontal air spring 142 in the horizontal direction are connected to the first horizontal guide member 151 and the second horizontal guide member 152, respectively.

  Since the arrangement | positioning method of the some spring type vibration isolator 100 concerning 7th Embodiment is the same as that of the spring type vibration isolator 100 concerning 6th Embodiment, description is abbreviate | omitted.

  Since the performance characteristics of the spring vibration isolator 100 according to the seventh embodiment are the same as those of the spring vibration isolator 100 according to the first embodiment, the description thereof is omitted.

Next, a spring-type vibration isolator 100 according to an eighth embodiment of the present invention will be described with reference to the drawings.
FIG. 12 is a conceptual diagram of a spring-type vibration isolator according to the eighth embodiment of the present invention.
The spring-type vibration isolator 100 according to the seventh embodiment includes a gantry 110, a table 120, two vertical air springs 130, two horizontal air springs 140, two horizontal guide members 150, and two sets of link members. 160 and an automatic leveling device 170.
The two vertical air springs 130 include a first vertical air spring 131 and a second vertical air spring 132.
The two horizontal air springs 140 include a first horizontal air spring 141 and a second horizontal air spring 142.
The two horizontal guide members 150 include a first horizontal guide member 151 and a second horizontal guide member 152.
The two sets of link members 160 are two pairs of link members that connect the table 120 and the horizontal guide member 150 in parallel with each other.

Two vertical air springs 131 are connected to the base 110 on the lower side in the vertical direction and connected to the lower surface of the table 120 on the upper side.
Two vertical air springs 131 are arranged at positions sandwiching the reciprocating trajectory of the two horizontal guide members 151 and 152, respectively.

  The two horizontal guide members 151 and 153 are arranged on the gantry 110 so as to be separated from each other along a straight line along a trajectory in which the two horizontal guide members 151 and 153 reciprocate.

The first horizontal air spring 141 and the second horizontal air spring 142 are disposed outside the two horizontal guide members 151 and 153 along a straight line in the direction of expansion and contraction.
The opposite sides of the first horizontal air spring 141 and the second horizontal air spring 142 in the horizontal direction are connected to the gantry 110.
The mutually facing sides of the first horizontal air spring 141 and the second horizontal air spring 142 in the horizontal direction are connected to the first horizontal guide member 151 and the second horizontal guide member 152, respectively.

  Since the arrangement method of the plurality of spring-type vibration isolator 100 according to the eighth embodiment is the same as that of the spring-type vibration isolator 100 according to the sixth embodiment, description thereof is omitted.

  Since the performance characteristics of the spring vibration isolator 100 according to the eighth embodiment are the same as those of the spring vibration isolator 100 according to the first embodiment, the description thereof is omitted.

As described above, the use of the spring vibration isolator according to the embodiment of the present invention has the following effects.
A vertical air spring 130 that expands and contracts in the vertical direction is provided between the gantry 110 and the table 120, a horizontal guide member 150 that can move in the horizontal direction is provided on the gantry, and the table and the horizontal guide member 150 are provided by the inclined link member 160. The horizontal guide spring 150 is pushed by the horizontal air spring 140 that expands and contracts in the horizontal direction, and the automatic leveling device 170 controls the height position of the table 120 to a predetermined height position when there is no earthquake. The vertical air spring 130 expands and contracts in the vertical direction to apply an upward load to the table, and the horizontal air spring 140 expands and contracts in the horizontal direction and pushes the horizontal guide member 150 to support the table 120 upwardly via the inclined link member 160. The supporting load which is the resultant force of these loads supports the supported body. The automatic leveling device 170 supplies and exhausts gas to and from the vertical air spring 130 to change the load, thereby reducing the acceleration transmitted from the foundation 30 to the supported body 10. Further, the height position of the table 120 is moved up and down with a predetermined height position as a boundary.
Further, since the pressure of the gas stored in the horizontal air spring 140 is maintained at a predetermined pressure when there is no earthquake, the load acting on the table 120 by the horizontal air spring 140 is stabilized, and the height position of the table 120 is set in advance. It can be easily maintained at a predetermined height position.
In addition, when there is no earthquake, the pressure of the gas stored in the horizontal air spring 140 is maintained at a predetermined pressure, and when there is an earthquake, the gas stored in the horizontal air spring 140 is blocked from entering and exiting. The acting load slightly changes around a predetermined value, and the height position of the table 120 can be easily maintained at a predetermined height position.
Further, when there is no earthquake, the pressure of the gas stored in the horizontal air spring 140 is maintained at a predetermined pressure, and if the gas stored in the horizontal air spring 140 is shut off, the height position of the table 120 becomes the predetermined height position. Since the support load acting on the support via the table is slightly increased as it decreases in the vicinity of, a large earthquake exceeding the response capacity occurs and the gas stored in the horizontal air spring is shut off. Even if the same phenomenon occurs, the support load acting on the supported body through the table is slightly larger as the height position of the table becomes lower within the movable range centered on the predetermined height position. The apparent spring constant is small and can respond to long-period vibration.
Further, when there is no earthquake, the pressure of the gas stored in the horizontal air spring tries to be maintained at a predetermined pressure, and if the pressure of the gas stored in the horizontal air spring is the predetermined pressure, the height position of the table is set at the predetermined height position. Since the support load acting on the supported body via the table when it changes within the movable range centered on the center is almost constant, a large earthquake exceeding the response capacity occurred and stored in the horizontal air spring Even if a phenomenon equivalent to shutting in and out of gas occurs, the pressure of the gas stored in the horizontal air spring fluctuates around a predetermined pressure, and the height position of the table is movable around the predetermined height position. Since the support load acting on the support via the table when it changes within the range is substantially constant, the apparent spring constant of the table is small and can respond to long-period vibration.

In addition, since one side of the horizontal air spring 140 in the horizontal direction is connected to the gantry 110 and the other side is connected to the horizontal guide member 150, the table 10 is generated when horizontal acceleration occurs in the supported body 10. The horizontal force acting on 120 is transmitted from one end to the other end via the link member 160, and is transmitted to the other side in the horizontal direction of the horizontal air spring 140 via the horizontal guide member 150. This is transmitted from the other side in the horizontal direction via the spring 140 to the gantry 110 connected to one side. Since the gantry 110 is supported by the foundation, the horizontal movement of the entire system of the supported body 10 and the spring-type vibration isolator 100 is restricted.
The first horizontal guide member 151, the second horizontal guide member 152, the first link member 161, and the second link member 162 are provided, and the first horizontal guide member 151 and the second horizontal guide member 52 are reciprocated when viewed from above. Since the moving trajectories are arranged in a straight line and the horizontal air spring 140 is connected between the first horizontal guide member 151 and the second horizontal guide member 152, when the horizontal air spring 140 expands and contracts in the horizontal direction, One horizontal guide member 151 and the second horizontal guide member 152 are pushed in opposite directions, and an upward load is applied to the table 120 via the inclined first link member 161 and second link member 162, and the resultant force of these loads A support load is to support the support.
The first horizontal air spring 141, the second horizontal air spring 142, the first horizontal guide member 151, the second horizontal guide member 152, the first link member 161, and the second link member 162 are provided, and the first horizontal air spring 141 is viewed from above. The reciprocating trajectories of the horizontal guide member 151 and the second horizontal guide member 152 are arranged along a straight line, and the first horizontal air spring 141 connected to the gantry pushes the first horizontal guide member 151 and is coupled to the gantry. Since the second horizontal air spring 142 pushes the second horizontal guide member 152, the first horizontal air spring 141 expands and contracts in the horizontal direction to push the first horizontal guide member 151 and to tilt the first link member 161. An upward load is applied to the table via The second horizontal air spring 142 expands and contracts in the horizontal direction, pushes the second horizontal guide member 152, and applies an upward load to the table via the inclined second link member 162. A support load that is a resultant force of these loads supports the supported body.

Moreover, if the vibration isolator which concerns on embodiment of this invention is used, it has the following effects.
Three spring vibration isolator devices 100 each including a gantry, a table, a vertical spring, a horizontal spring, a horizontal guide member, and a link member are prepared, and the three spring vibration isolator devices 100 are connected to each horizontal guide member 150. Since the reciprocating trajectory is arranged along three lines extending radially from the virtual point G located in the outline of the supported body 10 when viewed from above, the vertical spring 130 is moved up and down. The horizontal spring 140 expands and contracts in the direction and the horizontal spring 140 expands and contracts in the horizontal direction and pushes the horizontal guide member 150 to apply the upward load to the table 120 via the inclined link member 160. A support load that is a resultant force of the support member 10 is supported. When acceleration occurs in the foundation due to an earthquake or the like, the acceleration transmitted from the foundation to the supported body is reduced, and each horizontal force acting on the three spring-type vibration isolator 100 is concentrated on the virtual point G, Can cancel the power imbalance.
In addition, at least one pair of spring-type vibration isolator 100 including a gantry, a table, a vertical spring, a horizontal spring, a horizontal guide member, and a link member is prepared. Since the guide member 150 is arranged so that the reciprocating path of the guide member 150 is aligned with the straight line when viewed from above, the vertical spring 130 expands and contracts in the vertical direction to apply an upward load to the table, and the horizontal spring 140 The horizontal load extends and contracts in the horizontal direction and pushes the horizontal guide member 150 to apply an upward load to the table via the inclined link member 160, and the support load that is the resultant force of these loads supports the supported body. When acceleration occurs on the foundation due to an earthquake, etc., the acceleration transmitted from the foundation to the supported body is reduced, and each horizontal force acting on a pair of spring-type vibration isolator is concentrated on a straight line. Unbalance can be offset.

The present invention is not limited to the embodiments described above, and various modifications can be made without departing from the scope of the invention.
In the description of the present invention, air springs are employed as the vertical springs and horizontal springs of a plurality of spring-type vibration isolating devices constituting the vibration isolator, but the present invention is not limited thereto. A helical spring or a spring made of an elastic material may be adopted. For example, an air spring that supplies and exhausts gas with an automatic leveling device is used for one of the vertical spring and the horizontal spring, and a helical spring or a spring made of an elastic material is used for the other of the vertical spring and the horizontal spring. Good.

It is a side view of the vibration isolator which concerns on embodiment of this invention. It is a conceptual diagram of the vibration isolator which concerns on 1st embodiment of this invention. It is a conceptual diagram of the vibration isolator which concerns on 2nd embodiment of this invention. It is a piping system diagram of the vibration isolator which concerns on embodiment of this invention. It is a conceptual diagram of the spring type vibration isolator which concerns on 1st embodiment of this invention. It is a conceptual diagram of the spring type vibration isolator which concerns on 2nd embodiment of this invention. It is a conceptual diagram of the spring type vibration isolator which concerns on 3rd embodiment of this invention. It is a conceptual diagram of the spring type vibration isolator which concerns on 4th embodiment of this invention. It is a conceptual diagram of the spring type vibration isolator which concerns on 5th embodiment of this invention. It is a conceptual diagram of the spring type vibration isolator which concerns on 6th embodiment of this invention. It is a conceptual diagram of the spring type vibration isolator which concerns on 7th embodiment of this invention. It is a conceptual diagram of the spring type vibration isolator which concerns on 8th embodiment of this invention. It is the performance characteristic view 1 of the vibration isolator which concerns on embodiment of this invention. It is the performance characteristic view 2 of the vibration isolator which concerns on embodiment of this invention.

Explanation of symbols

G virtual point S1 virtual line S2 virtual line 10 supported body 20 vibration isolator 30 foundation 100 spring type vibration isolator 110 mount 120 table 130 vertical air spring (vertical spring)
130a Vertical air spring body 130b Vertical auxiliary tank 131 First vertical air spring 132 Second vertical air spring 140 Horizontal air spring (horizontal spring)
140a horizontal air spring body 140b horizontal auxiliary tank 141 first horizontal air spring 142 second horizontal air spring 150 horizontal guide member 151 first horizontal guide member 152 second horizontal guide member 160 link member 161 first link member 162 second link member 170 Automatic Leveling Equipment 171 Switching Valve 172 Level Sensor 180 Rolling Bearing Member 181 Spherical Rolling Bearing Member 182 Direct Acting Rolling Bearing Member 190 Horizontal Support Member 200 Pressure Fluid Supply Device 210 Vertical Air Spring Pressure System 211 Vertical Air Spring Pressure Piping 212 Vertical Air spring pressure source 220 Horizontal air spring pressure system 221 Horizontal air spring pressure piping 222 Horizontal air spring pressure source 230 Vertical air spring sensor system 231 Vertical air spring sensor piping 232 Vertical air spring sensor meter

Claims (17)

A spring-type anti-vibration device that supports a supported body disposed above the foundation,
A base supported by the foundation;
A table on which a supported body is mounted;
A vertical spring that can be expanded and contracted vertically;
A horizontal spring that can be expanded and contracted in the horizontal direction;
A horizontal guide member supported by the frame and capable of reciprocating in the horizontal direction;
A link member in which one end is swingably connected to the table and the other end is swingably connected to the horizontal guide member, and an imaginary line connecting both ends is inclined; ,
An automatic leveling device for adjusting the level of the table;
With
The vertical spring is an air spring that expands or compresses the gas stored therein and is vertically stretchable.
The horizontal spring is an air spring that expands or compresses the gas stored in the inside thereof and can expand and contract in the horizontal direction,
The vertical spring is supported by the gantry and supports the table by pushing in the vertical direction,
The horizontal spring pushes the horizontal guide member in a horizontal direction;
While the automatic leveling device supplies / exhausts gas to / from one of the vertical springs or the horizontal springs, the height position of the table is adjusted so that the expansion / contraction length of the one air spring becomes a constant value. Trying to maintain a predetermined height position,
An attempt is made to maintain the pressure of the gas stored in the other air spring at a predetermined pressure so that the other air spring can be expanded and contracted while sucking and exhausting to the other air spring of the vertical spring or the horizontal spring. To
Spring-type vibration isolator characterized by that. A spring-type anti-vibration device that supports a supported body disposed above the foundation,
A base supported by the foundation;
A table on which a supported body is mounted;
A vertical spring that can be expanded and contracted vertically;
A horizontal spring that can be expanded and contracted in the horizontal direction;
A horizontal guide member supported by the frame and capable of reciprocating in the horizontal direction;
A link member in which one end is swingably connected to the table and the other end is swingably connected to the horizontal guide member, and an imaginary line connecting both ends is inclined; ,
An automatic leveling device for adjusting the level of the table;
With
The vertical spring is an air spring that expands or compresses the gas stored therein and is vertically stretchable.
The horizontal spring is an air spring that expands or compresses the gas stored in the inside thereof and can expand and contract in the horizontal direction,
The vertical spring is supported by the gantry and supports the table by pushing in the vertical direction,
The horizontal spring pushes the horizontal guide member in a horizontal direction;
The automatic leveling device supplies and discharges gas to and from the air spring of the vertical spring, and the height position of the table is set to a predetermined height so that the vertical extension / contraction length of the air spring becomes a constant value. Try to keep in position,
Trying to maintain the pressure of the gas stored in the air spring at a predetermined pressure so that the air spring can be expanded and contracted in the horizontal direction while sucking and exhausting to the air spring of the horizontal spring,
Spring-type vibration isolator characterized by that. A spring-type anti-vibration device that supports a supported body disposed above the foundation,
A base supported by the foundation;
A table on which a supported body is mounted;
A vertical spring that can be expanded and contracted vertically;
A horizontal spring that can be expanded and contracted in the horizontal direction;
A horizontal guide member supported by the frame and capable of reciprocating in the horizontal direction;
A link member in which one end is swingably connected to the table and the other end is swingably connected to the horizontal guide member, and an imaginary line connecting both ends is inclined; ,
An automatic leveling device for adjusting the level of the table;
With
The vertical spring is an air spring that expands or compresses the gas stored therein and is vertically stretchable.
The horizontal spring is an air spring that expands or compresses the gas stored in the inside thereof and can expand and contract in the horizontal direction,
The vertical spring is supported by the gantry and supports the table by pushing in the vertical direction,
The horizontal spring pushes the horizontal guide member in a horizontal direction;
While the automatic leveling device supplies / exhausts gas to / from one of the vertical springs or the horizontal springs, the height position of the table is adjusted so that the expansion / contraction length of the one air spring becomes a constant value. Trying to maintain a predetermined height position,
When no acceleration exceeding a predetermined acceleration is generated on the foundation and the supported body, the other air spring is retracted while sucking and exhausting to the other air spring of the vertical spring or the horizontal spring. Trying to maintain the pressure of the gas stored in the other air spring at a predetermined pressure,
When acceleration exceeding a predetermined acceleration occurs on the foundation or the supported body, the other air spring of the vertical spring or the horizontal spring is made to be extensible so that the gas stored in the other air spring is prevented from entering and exiting. Or suppress,
Spring-type vibration isolator characterized by that. A spring-type anti-vibration device that supports a supported body disposed above the foundation,
A base supported by the foundation;
A table on which a supported body is mounted;
A vertical spring that can be expanded and contracted vertically;
A horizontal spring that can be expanded and contracted in the horizontal direction;
A horizontal guide member supported by the frame and capable of reciprocating in the horizontal direction;
A link member in which one end is swingably connected to the table and the other end is swingably connected to the horizontal guide member, and an imaginary line connecting both ends is inclined; ,
An automatic leveling device for adjusting the level of the table;
With
The vertical spring is an air spring that expands or compresses the gas stored therein and is vertically stretchable.
The horizontal spring is an air spring that expands or compresses the gas stored in the inside thereof and can expand and contract in the horizontal direction,
The vertical spring is supported by the gantry and supports the table by pushing in the vertical direction,
The horizontal spring pushes the horizontal guide member in a horizontal direction;
While the automatic leveling device supplies / exhausts gas to / from one of the vertical springs or the horizontal springs, the height position of the table is adjusted so that the expansion / contraction length of the one air spring becomes a constant value. Trying to maintain a predetermined height position,
An attempt is made to maintain the pressure of the gas stored in the other air spring at a predetermined pressure so that the other air spring can be expanded and contracted while sucking and exhausting to the other air spring of the vertical spring or the horizontal spring. ,
If the other air spring of the vertical spring or the horizontal spring is made to be extendable and the gas stored in the other air spring is shut off, the height position of the table becomes the predetermined height. The supporting load acting on the supported body via the table is slightly increased as it decreases in the vicinity of the position.
Spring-type vibration isolator characterized by that. A spring-type anti-vibration device that supports a supported body disposed above the foundation,
A base supported by the foundation;
A table on which a supported body is mounted;
A vertical spring that can be expanded and contracted vertically;
A horizontal spring that can be expanded and contracted in the horizontal direction;
A horizontal guide member supported by the frame and capable of reciprocating in the horizontal direction;
A link member in which one end is swingably connected to the table and the other end is swingably connected to the horizontal guide member, and an imaginary line connecting both ends is inclined; ,
An automatic leveling device for adjusting the level of the table;
With
The vertical spring is an air spring that expands or compresses the gas stored therein and is vertically stretchable.
The horizontal spring is an air spring that expands or compresses the gas stored in the inside thereof and can expand and contract in the horizontal direction,
The vertical spring is supported by the gantry and supports the table by pushing in the vertical direction,
The horizontal spring pushes the horizontal guide member in a horizontal direction;
While the automatic leveling device supplies / exhausts gas to / from one of the vertical springs or the horizontal springs, the height position of the table is adjusted so that the expansion / contraction length of the one air spring becomes a constant value. Trying to maintain a predetermined height position,
An attempt is made to maintain the pressure of the gas stored in the other air spring at a predetermined pressure by allowing the other air spring of the vertical spring or the horizontal spring to be sucked / exhausted and making the other air spring expandable / contractable. ,
If the other air spring of the vertical spring or the horizontal spring is sucked and exhausted, the other air spring can be expanded and contracted, and the pressure of the gas stored in the other air spring is the predetermined pressure. When the height position of the table is changed in the vicinity of the predetermined height position, the support load acting on the supported body via the table is substantially constant.
Spring-type vibration isolator characterized by that. A spring-type anti-vibration device that supports a supported body disposed above the foundation,
A base supported by the foundation;
A table on which a supported body is mounted;
A vertical spring that can be expanded and contracted vertically;
A horizontal spring that can be expanded and contracted in the horizontal direction;
A horizontal guide member supported by the frame and capable of reciprocating in the horizontal direction;
A link member in which one end is swingably connected to the table and the other end is swingably connected to the horizontal guide member, and an imaginary line connecting both ends is inclined; ,
An automatic leveling device for adjusting the level of the table;
Other horizontal guide members supported by the gantry and capable of reciprocating in the horizontal direction;
A member in which one end is swingably connected to the table and the other end is swingably connected to the other horizontal guide member, and an imaginary line connecting both ends is inclined. A link member of
With
The vertical spring is an air spring that expands or compresses the gas stored therein and is vertically stretchable.
The horizontal spring is an air spring that expands or compresses the gas stored in the inside thereof and can expand and contract in the horizontal direction,
The vertical spring is supported by the gantry and supports the table by pushing in the vertical direction,
The horizontal spring pushes the horizontal guide member in a horizontal direction;
While the automatic leveling device supplies / exhausts gas to / from one of the vertical springs or the horizontal springs, the height position of the table is adjusted so that the expansion / contraction length of the one air spring becomes a constant value. Trying to maintain a predetermined height position,
The trajectory of the horizontal guide member reciprocating as viewed from above and the trajectory of the other horizontal guide member reciprocatingly arranged along a straight line,
The horizontal spring is connected to the horizontal guide member on one side in the horizontal direction and connected to the other horizontal guide member on the other side,
When the vertical spring air spring extends, the horizontal spring air spring extends, and when the vertical spring air spring contracts, the horizontal spring air spring contracts.
The spring-type vibration isolator according to claim 2. A spring-type anti-vibration device that supports a supported body disposed above the foundation,
A base supported by the foundation;
A table on which a supported body is mounted;
A vertical spring that can be expanded and contracted vertically;
A horizontal spring that can be expanded and contracted in the horizontal direction;
A horizontal guide member supported by the frame and capable of reciprocating in the horizontal direction;
A link member in which one end is swingably connected to the table and the other end is swingably connected to the horizontal guide member, and an imaginary line connecting both ends is inclined; ,
An automatic leveling device for adjusting the level of the table;
Other horizontal springs that can be stretched horizontally,
Other horizontal guide members supported by the gantry and capable of reciprocating in the horizontal direction;
A member in which one end is swingably connected to the table and the other end is swingably connected to the other horizontal guide member, and an imaginary line connecting both ends is inclined. A link member of
With
The vertical spring is an air spring that expands or compresses the gas stored therein and is vertically stretchable.
The horizontal spring is an air spring that expands or compresses the gas stored in the inside thereof and can expand and contract in the horizontal direction,
The vertical spring is supported by the gantry and supports the table by pushing in the vertical direction,
The horizontal spring pushes the horizontal guide member in a horizontal direction;
While the automatic leveling device supplies / exhausts gas to / from one of the vertical springs or the horizontal springs, the height position of the table is adjusted so that the expansion / contraction length of the one air spring becomes a constant value. Trying to maintain a predetermined height position,
The trajectory of the horizontal guide member reciprocating as viewed from above and the trajectory of the other horizontal guide member reciprocatingly arranged along a straight line,
The horizontal spring is connected to the gantry on one side in the horizontal direction and connected to the horizontal guide member on the other side,
The other horizontal spring is connected to the frame on one side in the horizontal direction and connected to the other horizontal guide member on the other side,
When the air spring of the vertical spring extends, the air spring of the horizontal spring and the air spring of the other horizontal spring extend, and when the air spring of the vertical spring contracts, the air spring of the horizontal spring and the air of the other horizontal spring The spring shrinks,
The spring-type vibration isolator according to claim 2. A vibration isolator for supporting a supported body disposed above the foundation,
A base supported by a foundation, a table on which a supported body is mounted, a vertical spring that can be expanded and contracted in a vertical direction, a horizontal spring that can be expanded and contracted in a horizontal direction, and a horizontal spring supported by the base and reciprocating in a horizontal direction A movable horizontal guide member and a member having one end swingably connected to the table and the other end swingably connected to the horizontal guide member. It has a link member that inclines the imaginary line to be connected and an automatic leveling device that adjusts the level of the table, and the vertical spring expands or compresses the gas stored inside, and can expand and contract in the vertical direction. It is an air spring, and the horizontal spring is an air spring that expands or compresses the gas stored in the inside thereof and can be expanded and contracted in the horizontal direction. The vertical spring is supported by the gantry and supported by pushing the table in the vertical direction. The horizontal spring pushes the horizontal guide member in the horizontal direction, and the automatic leveling device supplies / exhausts gas to / from one air spring of the vertical spring or the horizontal spring. To maintain the height position of the table at a predetermined height position so as to be a constant value, while the other air spring of the vertical spring or the horizontal spring is sucked and exhausted, Three spring-type vibration isolating devices that try to maintain the pressure of the gas stored in the other air spring at a predetermined pressure so that the air spring can expand and contract,
Prepared,
On the three lines extending radially from the virtual points located in the contour of the supported body when the three spring-type vibration isolating devices are viewed from above to see the reciprocating trajectory of each of the horizontal guide members. To be arranged along each of the
An anti-vibration device characterized by that. A vibration isolator for supporting a supported body disposed above the foundation,
A base supported by a foundation, a table on which a supported body is mounted, a vertical spring that can be expanded and contracted in a vertical direction, a horizontal spring that can be expanded and contracted in a horizontal direction, and a horizontal spring supported by the base and reciprocating in a horizontal direction A movable horizontal guide member and a member having one end swingably connected to the table and the other end swingably connected to the horizontal guide member. It has a link member that inclines the imaginary line to be connected and an automatic leveling device that adjusts the level of the table, and the vertical spring expands or compresses the gas stored inside, and can expand and contract in the vertical direction. It is an air spring, and the horizontal spring is an air spring that expands or compresses the gas stored in the inside thereof and can be expanded and contracted in the horizontal direction. The vertical spring is supported by the gantry and supported by pushing the table in the vertical direction. The horizontal spring pushes the horizontal guide member in the horizontal direction, and the automatic leveling device supplies / exhausts gas to / from one air spring of the vertical spring or the horizontal spring. To maintain the height position of the table at a predetermined height position so as to be a constant value, while the other air spring of the vertical spring or the horizontal spring is sucked and exhausted, A pair of spring-type vibration isolator that tries to maintain the pressure of the gas stored in the other air spring at a predetermined pressure so that the air spring can expand and contract,
Prepared,
A pair of the spring-type vibration isolator is arranged so that the trajectory of the reciprocating movement of each of the horizontal guide members is aligned substantially in a straight line when viewed from above.
An anti-vibration device characterized by that. A vibration isolator for supporting a supported body disposed above the foundation,
A base supported by a foundation, a table on which a supported body is mounted, a vertical spring that can be expanded and contracted in a vertical direction, a horizontal spring that can be expanded and contracted in a horizontal direction, and a horizontal spring supported by the base and reciprocating in a horizontal direction A movable horizontal guide member and a member having one end swingably connected to the table and the other end swingably connected to the horizontal guide member. It has a link member that inclines the imaginary line to be connected and an automatic leveling device that adjusts the level of the table, and the vertical spring expands or compresses the gas stored inside, and can expand and contract in the vertical direction. It is an air spring, and the horizontal spring is an air spring that expands or compresses the gas stored in the inside thereof and can be expanded and contracted in the horizontal direction. The vertical spring is supported by the gantry and supported by pushing the table in the vertical direction. The horizontal spring pushes the horizontal guide member in the horizontal direction, and the automatic leveling device supplies and discharges gas to and from the air spring of the vertical spring so that the expansion / contraction length of the air spring becomes a constant value. The pressure of the gas stored in the air spring is adjusted so that the air spring can be expanded and contracted while sucking and exhausting to the air spring of the horizontal spring. Three spring-type anti-vibration devices that try to maintain a predetermined pressure
Prepared,
On the three lines extending radially from the virtual points located in the contour of the supported body when the three spring-type vibration isolating devices are viewed from above to see the reciprocating trajectory of each of the horizontal guide members. To be arranged along each of the
An anti-vibration device characterized by that. A vibration isolator for supporting a supported body disposed above the foundation,
A base supported by a foundation, a table on which a supported body is mounted, a vertical spring that can be expanded and contracted in a vertical direction, a horizontal spring that can be expanded and contracted in a horizontal direction, and a horizontal spring supported by the base and reciprocating in a horizontal direction A movable horizontal guide member and a member having one end swingably connected to the table and the other end swingably connected to the horizontal guide member. It has a link member that inclines the imaginary line to be connected and an automatic leveling device that adjusts the level of the table, and the vertical spring expands or compresses the gas stored inside, and can expand and contract in the vertical direction. It is an air spring, and the horizontal spring is an air spring that expands or compresses the gas stored in the inside thereof and can be expanded and contracted in the horizontal direction. The vertical spring is supported by the gantry and supported by pushing the table in the vertical direction. The horizontal spring pushes the horizontal guide member in the horizontal direction, and the automatic leveling device supplies and discharges gas to and from the air spring of the vertical spring so that the vertical extension length of the air spring becomes a constant value. Gas stored in the air spring so as to be able to expand and contract in the horizontal direction while sucking and exhausting to the horizontal spring while trying to maintain the height position of the table at a predetermined height position. A pair of spring-type anti-vibration devices that try to maintain the pressure of
Prepared,
A pair of the spring-type vibration isolator is arranged so that the trajectory of the reciprocating movement of each of the horizontal guide members is aligned substantially in a straight line when viewed from above.
An anti-vibration device characterized by that. When the acceleration exceeding the predetermined acceleration is not generated on the foundation and the supported body, the other air spring is retracted while sucking and exhausting to the other air spring of the vertical spring or the horizontal spring. Trying to maintain the pressure of the gas stored in the other air spring at a predetermined pressure,
Gas stored in the other air spring so that the other air spring of the vertical spring or the horizontal spring can be expanded and contracted when an acceleration exceeding a predetermined acceleration is generated on the foundation or the supported body Block or suppress the entry and exit of
The vibration isolator according to claim 8 or 9 , wherein If the other air spring of the vertical spring or the horizontal spring is made to be extendable and the gas stored in the other air spring is shut off, the height position of the table becomes the predetermined height. The supporting load acting on the supported body through the table is slightly increased as it decreases in the vicinity of the position.
The vibration isolator according to claim 8 or 9 , wherein If the other air spring of the vertical spring or the horizontal spring is sucked and exhausted, the other air spring can be expanded and contracted, and the pressure of the gas stored in the other air spring is the predetermined pressure. When the height position of the table is changed in the vicinity of the predetermined height position, the support load acting on the supported body via the table is substantially constant.
The vibration isolator according to claim 8 or 9 , wherein The horizontal spring is connected to the gantry on one side in the horizontal direction and connected to the horizontal guide member on the other side,
When the vertical spring air spring extends, the horizontal spring air spring extends, and when the vertical spring air spring contracts, the horizontal spring air spring contracts.
The vibration isolator according to claim 10 or 11 , wherein the vibration isolator is one of the above. The spring-type anti-vibration device is supported by the gantry and is horizontally reciprocated with another horizontal guide member, one end of which is swingably connected to the table, and the other end is connected to the other And a link that is swingably connected to the horizontal guide member, and has a link line that inclines an imaginary line connecting both ends, and the trajectory of the horizontal guide member reciprocating as viewed from above And the horizontal trajectory of the other horizontal guide member are aligned along a straight line, and the horizontal spring is connected to the horizontal guide member on one side in the horizontal direction and connected to the other horizontal guide member on the other side. And
When the vertical spring air spring extends, the horizontal spring air spring extends, and when the vertical spring air spring contracts, the horizontal spring air spring contracts.
The vibration isolator according to claim 10 or 11 , wherein the vibration isolator is one of the above. The spring-type anti-vibration device includes another horizontal spring that is extendable in the horizontal direction, another horizontal guide member that is supported by the gantry and is capable of reciprocating in the horizontal direction, and one end of the table is attached to the table. A second link member that is pivotably connected to the other horizontal guide member and has a second imaginary line that connects both ends. When viewed from above, the trajectory of the horizontal guide member reciprocatingly moves and the trajectory of the other horizontal guide member reciprocally moving are aligned along a straight line, and the horizontal spring is disposed on one side in the horizontal direction on the gantry. The other side is connected to the horizontal guide member, the other horizontal spring is connected to one side in the horizontal direction to the frame, and the other side is connected to the other horizontal guide member,
When the air spring of the vertical spring extends, the air spring of the horizontal spring and the air spring of the other horizontal spring extend, and when the air spring of the vertical spring contracts, the air spring of the horizontal spring and the air of the other horizontal spring The spring shrinks,
The vibration isolator according to claim 10 or 11 , wherein the vibration isolator is one of the above.

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