JP2005163915A - Vibration resistant device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibration resistant device applying a less load to air springs in a direction orthogonal to the extending/retracting direction of the air springs while reducing a shearing spring constant. <P>SOLUTION: This vibration resistant device comprises a vibration resistant block 2 transmitting vibration between the block and equipment disposed on the upper side and the first air spring 3 horizontally acting the load on the vibration resistant block 2. An outer frame 4 is fixed to a floor surface so as to surround the outer periphery of the vibration isolation block to enclose the block and hold the first air spring 3 by the vibration resistant block 2. A damping body having a shearing spring constant smaller than that of the first air spring 3 and damping a load acting on the first air spring 3 from the vibration resistant block 2 in a direction orthogonal to the direction of a load for acting the first air spring 3 on the vibration resistant block 2 is disposed between the vibration resistant block 2 and the first air spring 3. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an anti-vibration device that constitutes a system for isolating an electron microscope, a semiconductor manufacturing apparatus, and the like disposed on an upper portion.

  Precision equipment, such as semiconductor manufacturing equipment, electron microscopes, and three-dimensional measuring instruments, is used to control the vibrations of equipment such as semiconductor manufacturing equipment itself, in order to fully exhibit the performance of each equipment. It is necessary to shake. In order to perform vibration isolation or vibration suppression of these vibrations, in the vibration isolation system, a surface plate on which equipment such as a semiconductor manufacturing apparatus is mounted is supported from below by a plurality of vibration isolation devices. This vibration isolator includes a vibration isolation block that transmits vibrations to and from equipment mounted on a surface plate, a fixed portion that is disposed on the floor, and a vibration isolation block and a fixed portion. A plurality of arranged air springs. And this air spring is vibration-isolating or damping the vibration of the anti-vibration block in the horizontal direction (see, for example, FIGS. 2 to 6 of Patent Document 1). In a vibration isolation system using such a vibration isolation device, in order to control vibrations generated from equipment mounted on a surface plate or vibrations due to ground motion, each vibration isolation device alone Instead, it is necessary to design the vibration isolation device so that the vibration isolation system as a whole can be isolated or suppressed. Therefore, the mass elements and spring elements in the individual coordinate system of the air spring of each vibration isolator are converted into the mass matrix and stiffness matrix in the global coordinate system, and these are substituted into the equation of motion in the entire vibration isolation system and arranged. The spring constant of the power air spring is calculated.

  However, in such calculation, the shear spring constant is one of the parameters. If the calculation is performed with the shear spring constant as one of the parameters, the calculation load is large, requiring time for the design, and the vibration isolator is quickly operated. It is not preferable from the viewpoint of providing it. Therefore, when a plurality of air springs are arranged, the calculation is performed by replacing the operation point of the operating force that each air spring acts on the surface plate with a representative point with a small calculation load. Yes. Therefore, a calculation error occurs and the vibration isolation performance is limited. Furthermore, in an active vibration isolator that controls the air spring based on the vibration value of the surface plate detected by the acceleration sensor, the entire vibration isolation system must be controlled by instantaneous calculation. It has been forced to perform the calculation by replacing the point of action with a representative point with a small calculation load.

Japanese Patent No. 2729378

  The present invention has been made in view of the above-described problems, and an object thereof is to provide a vibration isolator having a small calculation load and a small calculation error.

Means and effects for solving the problems

  In the present invention, the following features are provided alone or in combination as appropriate. The vibration isolator according to the present invention for solving the above-described problems includes a vibration isolation block in which vibration is transmitted to and from a device disposed above, and a load in a horizontal direction with respect to the vibration isolation block. A first air spring to be actuated, and an outer frame fixed to the floor, surrounding the periphery so as to enclose the vibration isolation block, and disposed so as to sandwich the first air spring with the vibration isolation block , The shear spring constant is smaller than that of the first air spring, and the vibration isolation block extends from the vibration isolation block in a direction that intersects the direction of the load that the first air spring acts on the vibration isolation block. A relaxation body for relaxing a load acting on the first air spring is arranged between the vibration isolation block and the first air spring. According to this, the rotation radius can be reduced by the direct contact between the vibration isolation block and the relaxation body, and the combined shear spring constant of the first air spring and the relaxation body is reduced. Even if the operation point of the operating force to be applied to is replaced with a representative point having a small calculation load, the calculation error can be reduced. Therefore, the high-performance vibration isolator 1 can be quickly provided according to the customer's request.

  Here, the vibration isolator according to the present invention is detected by a sensor that detects vibration of the vibration isolation block, an air control valve that controls an amount of air supplied to the first air spring, and the sensor. And a controller that controls an air supply amount to the first air spring in the air control valve based on the vibration value. As described above, in the vibration isolator (hereinafter referred to as “active vibration isolator”) in which the air supply amount to the first air spring is controlled based on the vibration value detected by the sensor, it is detected by the sensor. Since it is necessary to perform the calculation instantaneously based on the vibration value, it is necessary to reduce the calculation load as much as possible. Therefore, by reducing the combined shear spring constant of the first air spring and the relaxation body, it is possible not only to provide the vibration isolator required by the customer quickly, but also to perform calculation processing quickly and without error during operation. And the vibration isolation performance can be improved.

  Here, the vibration isolation device according to the present invention further includes a fixed base fixed to the floor surface, and a second air spring that applies a load in a vertical direction to the vibration isolation block, It is preferable that an air spring is disposed between the fixed base and the vibration isolation block. According to this, since it has a function capable of damping or damping the vibration in the horizontal direction and the vertical direction, the vibration isolator for damping or damping the horizontal vibration, and the damping or damping of the vertical vibration. It is not necessary to separately provide a vibration isolator for isolating vibrations below the surface plate. It is also advantageous in terms of cost.

  In the vibration isolator according to the present invention, the shear spring constant is smaller than that of the second air spring, and the direction intersects the direction of the load applied by the second air spring to the vibration isolation block. It is preferable that a relaxation body that relaxes the load acting on the second air spring from the vibration isolation block in the direction in which the vibration is generated is disposed between the vibration isolation block and the second air spring. According to this, since the anti-vibration block and the relaxation body can directly contact each other, the radius of rotation can be reduced, and the combined shear spring constant of the second air spring and the relaxation body is reduced. Even if the operation point of the operating force that the air spring acts on the surface plate is replaced with a representative point having a small calculation load, the calculation error can be reduced. Therefore, it is possible to quickly provide a vibration isolator required by the customer.

  Moreover, the vibration isolator according to the present invention includes the vibration isolation block, the first air spring in the same horizontal plane as the vibration isolation block, and the first air spring between the vibration isolation block and the first air spring. A horizontal unit portion including an outer frame to be sandwiched, a fixed base, the second air spring in the same vertical plane as the fixed base, and a support member that sandwiches the second air spring between the fixed base. A plurality of types identified by the number of the first air springs arranged in different directions in a horizontal plane with respect to the vibration isolation block. It is preferable that any one of the plurality of types of the horizontal unit portions and the vertical unit portion are connected. In recent years, with the diversification of equipment mounted on a surface plate, there has been a demand for a vibration isolator capable of damping or isolating large vibrations. In this case, although the number of air springs is increased to improve the vibration isolation capability of the vibration isolation device, there is also a demand for a vibration isolation device having a conventional capability. However, it is not preferable to separately manufacture and prepare vibration isolation devices having various vibration isolation capabilities, which leads to an increase in cost. In addition, it is not preferable to manufacture according to the customer's request because the product provision is delayed. However, according to this, it is possible to promptly provide a customer with a vibration isolator having a low cost and an appropriate vibration isolation capability according to the weight of the device placed on the vibration isolator.

  The horizontal unit portion of the vibration isolator according to the present invention includes at least the first air in one direction, two directions, and four directions out of four directions orthogonal to each other in a horizontal plane with respect to the vibration isolation block. It is preferable that three types of springs are provided. According to this, a highly versatile vibration isolator is prepared without omission, and a minimum vibration isolator having an appropriate vibration isolation capability can be prepared at low cost.

  In the vibration isolator according to the present invention, when the horizontal unit part of at least one of the first to third vibration isolators is connected to the vertical unit part, the first air spring is It is preferable that the second air spring is disposed on the inner diameter side than the outer peripheral position. By arranging in this way, an increase in the size of the vibration isolation device constituting the vibration isolation system can be avoided.

  Moreover, it is preferable that the vibration isolator which concerns on this invention is comprised so that a vertical unit part can arrange a some said 2nd air spring in series in a perpendicular direction. According to this, it is possible to quickly provide a vibration isolator having an appropriate capacity according to the weight of the device placed on the surface plate.

  Hereinafter, preferred embodiments of the vibration isolation device according to the present invention will be described. FIG. 1 is a model diagram of a vibration isolation system configured by arranging four active vibration isolation devices. The vibration isolation system 60 in FIG. 1 is constructed by supporting four devices with vibration isolation devices 1 from below a surface plate 50 on which an unillustrated device is placed. In such a vibration isolation system 60, the mass element and the spring element in the individual coordinates of each active vibration isolation device 1 are converted into the mass matrix and the stiffness matrix in the overall coordinate system, and are arranged in each active vibration isolation device 1 based on them. A method for calculating the spring constant of the air spring to be described will be described below. Each active vibration isolator 1 defines representative points P1 to P4 as respective action points, and the two first air springs 3 acting on the representative points P1 to P4 in the horizontal direction; And one air spring 9 that applies a load in the vertical direction.

なお、座標変換マトリックスのr_i ^m，r_i ^kは、（３）式に示されるそれぞれの要素の位置ベクトルr_i ^m(x,y,z)，r_i ^k(x,y,z)から得られるひずみマトリックスによって定義される。

また、ここでは詳述しないが、減衰マトリックスＣも同様に与えることができる。以上から，全体座標系でのＧ₀の振動変位を（４）式、さらにばね下に作用する支点の振動変位を（５）式とすると、空気バネ上に作用する図示しない機器（即ち、定盤５０に載置される機器）からの直接外乱ｄ、及び第１の空気バネ３及び第２の空気バネ９の制御力ｕを加えたときの各能動除振装置１の運動は、（６）式のような微分方程式で表すことができる。

In designing the vibration isolation system 60 in FIG. 1, each active vibration isolation device 1 is modeled with a mass element as a rigid body. That is, considering a vibration isolation target (equipment such as a semiconductor manufacturing apparatus mounted on the surface plate 50) composed of several mass elements (translational mass mi, rotational inertia Ji), vibration isolation in the global coordinate system The center of gravity of the object is G ₀ , and the center of gravity G ₀ is considered as the origin of the global coordinate system composed of the X axis, the Y axis, and the Z axis that are orthogonal to each other. Also, the position vector of the mass element (mi, Ji) given in the individual coordinate system is r _i ^m (x, y, z), and the position vector of the spring element (translation spring constant ki, shear spring constant k _i θ) is r Let _i ^k (x, y, z). At this time, the mass element and the spring element of the individual coordinates can be converted into the entire coordinate system of the origin G ₀ by using the coordinate conversion matrix given by the position vector. The stiffness matrix K of the vibration device 1 is given six-degree-of-freedom expressions such as Equation (1) and Equation (2).

Note that r _i ^m and r _i ^k of the coordinate transformation matrix are ^obtained from the position vectors r _i ^m (x, y, z) and r _i ^k (x, y, z) of the respective elements shown in the equation (3). Defined by the resulting strain matrix.

Further, although not described in detail here, an attenuation matrix C can be similarly given. From the above, when the vibration displacement of G ₀ in the global coordinate system is expressed by equation (4) and the vibration displacement of the fulcrum acting under the spring is expressed by equation (5), a device (not shown) acting on the air spring (ie, constant The movement of each active vibration isolator 1 when the direct disturbance d from the device mounted on the panel 50 and the control force u of the first air spring 3 and the second air spring 9 is applied is (6 ) Can be expressed by a differential equation such as

  The optimum design of the vibration isolator 1 for isolating the vibration of a device (not shown) placed on the surface plate 50 by substituting the equations (1) to (5) into the equation (6). That is, optimum spring constants of the first air spring 3 and the second air spring 9 are obtained. In the present embodiment, the active vibration isolator that detects the vibration from the surface plate and controls the air pressure of the air spring accordingly to apply the operating force to the surface plate 50 has been described. It is not limited to. That is, the present invention can also be applied to a passive vibration isolator (so-called passive vibration isolator) that does not change the natural frequency of the first air spring 3 or the second air spring 9.

センサの個別座標での検出方向をx, y, z で表し，その検出方向に直交する平面内のセンサの位置座標を回転成分の向きに符号を合わせて、センサの数だけ縦に並べることによってＴ_aを求めることができる。例えば、センサを z，z，z，y，x，y方向に配置している場合は（８）式のようになる。

空気バネの個別座標での操作信号をvとしたとき、その座標系での操作力uは、空気バネの特性によって決定される対角行列U からu＝Uvで与えられ、個別座標系の操作力から全体座標系の操作力を与える変換マトリックスをＱとすると、全体座標系の操作力ｕはＱＵｖのように与えられる。センサの場合と同様に、空気バネの向きと位置座標を使って変換マトリックスが定義できる。例として８点の空気バネを用いる場合をあげると、空気バネの力の方向と座標を取り出して、空気バネの順に横に並べて、（９）式となる。

以上のＴ_aとＱによって制御器の内部は全体座標系で記述することが可能になる。このようにして得られた各値を（６）式に代入して、定盤５０に載置された機器を除振するための、第１の空気バネ３及び第２の空気バネ９の最適なバネ定数が求められる。そして、この第１の空気バネ３及び第２の空気バネ９に給排気を行うことによって、定盤１に載置された機器を除振するための最適なバネ定数となるように、第１の空気バネ３及び第２の空気バネ９が制御される。以下に、本実施形態にかかる除振システム５０を構成する能動除振装置１について説明する。 Next, a calculation method during operation of the active vibration isolator 1 will be described. In order to control the rigid model shown in FIG. 1 to be observable and controllable, six or more independent signals and six or more air springs are required. The sensors and air springs used at this time cannot output signals and forces of control coordinates (orthogonal coordinates and mode coordinates) as they are, and it is necessary to convert them from individual coordinates to control coordinates. Although it is practical to directly perform feedback control by arranging the sensor and the air spring in the same position and in the same direction as much as possible, here, coordinate conversion is used as a more general method. In order to extract the global coordinate signal from six sensors arranged in parallel to the global coordinates and independently, it is sufficient to know T _a ⁻¹ that gives the equation (7).

The detection direction in the individual coordinates of the sensor is represented by x, y, z, and the position coordinates of the sensor in the plane orthogonal to the detection direction are aligned with the direction of the rotation component, and are arranged vertically by the number of sensors. T _a can be obtained. For example, when the sensors are arranged in the z, z, z, y, x, and y directions, equation (8) is obtained.

When the operation signal in the individual coordinates of the air spring is v, the operation force u in that coordinate system is given by u = Uv from the diagonal matrix U determined by the characteristics of the air spring, and the operation in the individual coordinate system If the transformation matrix that gives the operating force of the global coordinate system from the force is Q, the operating force u of the global coordinate system is given as QUIv. As with the sensor, the transformation matrix can be defined using the orientation and position coordinates of the air spring. Taking the case of using eight air springs as an example, the direction and coordinates of the force of the air springs are taken out and arranged side by side in the order of the air springs to obtain equation (9).

With the above _Ta and Q, the inside of the controller can be described in the entire coordinate system. The values of the first air spring 3 and the second air spring 9 for vibration isolation of the device placed on the surface plate 50 by substituting the values obtained in this way into the equation (6). Spring constant is required. Then, by supplying and exhausting air to and from the first air spring 3 and the second air spring 9, the first spring constant is set so as to obtain an optimum spring constant for vibration isolation of the device placed on the surface plate 1. The air spring 3 and the second air spring 9 are controlled. Below, the active vibration isolator 1 which comprises the vibration isolating system 50 concerning this embodiment is demonstrated.

  FIG. 2 is a front sectional view of the active vibration isolator 1 and a diagram showing peripheral devices. FIG. 3 is a cross-sectional view of the active vibration isolator 1 taken along the line AA in FIG. The configuration of the active vibration isolator 1 will be described with reference to FIGS. 2 and 3. The active vibration isolator 1 is disposed below the surface plate 50 illustrated by a two-dot chain line, and the vibration isolation block 2, the first air spring 3, the outer frame 4, the vibration isolating rubber 5, and the sensor S1. -S4, the 1st air control valve 6, the control part 7, the fixed base 8, the 2nd air spring 9, the support member 10, and the vibration control body 11 are provided. These specific configurations will be described below.

  The anti-vibration block 2 includes a flat plate portion 2 a and a square portion 2 b extending in a square shape from the center of one surface of the flat plate portion 2 a, and the other surface of the flat plate portion 2 a is the surface plate 50. It is in contact with the lower surface. And vibration is mutually transmitted between the apparatus which is mounted in the surface plate 50 and which is not illustrated.

  The first air spring 3 includes a diaphragm, and the inside of the diaphragm is compressed and filled with air, and the diaphragm can be expanded and contracted in the horizontal direction. In the first air spring 3, as shown in FIG. 3, two first air springs 3 are disposed opposite to each other with the square portion 2b of the vibration isolation block 2 interposed therebetween. . The first air spring 3 applies a load in the horizontal direction to the angular portion 2 b of the vibration isolation block 2.

  The outer frame 4 includes an outer frame block A4a, an outer frame block B4b, and both side surfaces of the outer frame block A4a and the outer frame block B4b that receive the reaction force of the load that the first air spring 3 acts on the vibration isolation block 2. And an outer frame block C4c disposed on the outer periphery of the anti-vibration block. Each of the outer frame block A4a, the outer frame block B4b, and the outer frame block A4a has an outer peripheral surface formed in an arc shape, and is configured integrally with a flange surface 18 formed below. The flange surface 18 is fixed to the fixed base 8 via the support member 10 (the support member 10 and the fixed base will be described later).

  The anti-vibration rubber 5 is an elastic member having a shearing spring constant smaller than that of the first air spring 3, and is provided between the anti-vibration block 2 and the first air spring 3. The spring 3 is fixedly disposed. By doing so, since the combined shear spring constant by the first air spring 3 and the vibration isolating rubber 5 is reduced, the operating point of the operating force that the first air spring 3 acts on the surface plate 50 is set. Even if the calculation is performed by replacing the representative points P1 to P4 with a small calculation load, the calculation error can be reduced. Therefore, the high-performance vibration isolator 1 can be quickly provided according to the customer's request. The anti-vibration rubber 5 in the present embodiment is not limited to rubber, and may be a member having a shear spring constant smaller than that of the first air spring 3. That is, any relaxation body may be used as long as it has a function of relaxing the load acting in the direction intersecting the direction of the load applied by the first air spring 3 to the vibration isolation block 2.

  Sensors S1 to S4 are displacement sensors S1 and S2 for detecting horizontal and vertical displacements of the surface plate 2, and acceleration sensors S3 and S4 for detecting horizontal and vertical accelerations of the surface plate 2, respectively. Is attached to the vibration isolation block 2. Here, the first air spring 3 is connected to a receiver tank 12 in which compressed air is accumulated. Then, the first air control valve 6 provided between the receiver tank 12 and the first air spring 3 is controlled by the control unit 7 based on the results detected by the sensors S1 to S4. In this way, the amount of air supplied to the first air spring 3 is controlled. That is, when air is supplied to the first air spring 3, the first air spring 3 applies an operating force to the vibration isolation block 2 in the horizontal direction. In addition, the active vibration isolator 1 in the present embodiment has two first air springs 4. Therefore, a manifold (not shown) is provided to adjust the air supply amount to each first air spring 4.

  The fixed base 8 has a disk shape and is fixed to the floor surface below the vibration isolation block 2. The second air spring 9 includes a diaphragm 9a and a float core 9b having a disk shape. The diaphragm 9a is compressed and filled with air, and an opening is formed at the center of the surface of the float core 9b that is configured to expand and contract in the vertical direction. The inner peripheral surface of this opening Has a female thread.

  In the present embodiment, two second air springs 9 are disposed below the angular portion 2 b of the vibration isolation block 2 and between the vibration isolation block 2 and the fixed base 8. The second air spring 9 applies a load in the vertical direction to the angular portion 2 b of the vibration isolation block 2. The two second air springs 9 are connected to each other by a shaft 14 having a male thread cut in an opening formed at the center of the surface of the float core 9b. The second air spring 9 is connected to a receiver tank 12 in which compressed air is accumulated. And based on the result detected by each sensor S1-S4, the 2nd air control valve 13 provided between the receiver tank 12 and the 2nd air spring 9 is controlled by the control part 7. FIG. In this way, the amount of air supplied to the second air spring 9 is controlled. That is, when air is supplied to the second air spring 9, the second air spring 9 applies an operating force to the vibration isolation block 2 from below to above. Note that the active vibration isolator 1 in the present embodiment has two second air springs 9. Therefore, a manifold (not shown) is provided to adjust the air supply amount to each second air spring 9.

  The upper and lower surfaces of the vibration control body 11 have convex curved surfaces, and the vibration control body 11 has an action of relaxing axial force and shearing force received from a structure that is in contact with the convex curved surface of the upper surface or the convex curved surface of the lower surface so as to be capable of relative movement. It is a certain relaxation body. The flat stopper 15 fixed to the rectangular portion 2 b of the vibration isolation block 2 and the float core 9 b constituting the second air spring 9 are disposed. Therefore, this vibration control body 11 has the effect | action which relieve | moderates the shear force received from the lower surface of the stopper 15, and the float core 9b.

  Moreover, this active vibration isolator 1 is provided with the horizontal unit part 16 and the vertical unit part 17, and these are comprised so that connection is possible. Specifically, the horizontal unit portion 16 includes the vibration isolation block 2, the first air spring 3, the outer frame 4, and the vibration isolation rubber 5. The first air spring 3 is in the same horizontal plane as the vibration isolation block 2, and is sandwiched between the outer frame 4 and the angular portion 2 b of the vibration isolation block 2. A flange surface 18 is formed on the outer frame 4. On the other hand, the vertical unit portion 17 includes a fixed base 8, a second air spring 9, and a support member 10. The fixed base 8 is fixed to the floor surface as described above, and the second air spring 9 is in the same vertical plane as the fixed base 8. The support member 10 includes a cylindrical portion 10a and a flat plate portion 10b that extends radially inward from the inner peripheral surface of the cylindrical portion 10a and has an opening formed in the center. The cylindrical portion 10 a of the support member 10 is fixed to the fixed base 8, and the flat plate portion 10 b of the support member 10 sandwiches the second air spring 9 with the fixed base 8. Here, the flange surface 18 formed in the outer frame 4, the cylindrical portion 10 a of the support member 10, and the fixed base 8 are configured so as to be integrated by through bolts. That is, the horizontal unit portion 16 and the vertical unit portion 17 are connected at the flange surface 18 formed on the outer frame 4 of the horizontal unit portion 16 and the fixed base 8 extending over the cylindrical portion 10a of the support member 10 of the vertical unit portion 17. It is possible.

  Here, in the horizontal unit portion 16 in FIGS. 2 and 3, two first air springs 3 are arranged, but as shown in FIGS. 4 to 6, one, three, or four. Individual first air springs 3 can also be arranged. Here, FIG. 4 is a sectional view taken along line AA in FIG. 2 of the active vibration isolator 1 in which one first air spring 3 is arranged, and one side surface of the angular portion 2 b of the vibration isolation block 2. It arrange | positions so that a load may act on a horizontal direction. FIG. 5 is a cross-sectional view taken along line AA in FIG. 2 of the active vibration isolator 1 in which three first air springs 3 are arranged, and each of the first air springs 3 corresponds to the vibration isolation block 2. A load is applied in the horizontal direction to the side surface of the rectangular portion 2b. The direction of the load that one first air spring 3 acts on the angular portion 2 b of the vibration isolation block 2 is the other first air spring 3 that is disposed adjacent to the vibration isolation block 2. Each first air spring 3 is arranged so as to be orthogonal to the direction of the load acting on the rectangular portion 2b. 6 is a cross-sectional view taken along line AA in FIG. 2 of the active vibration isolator 1 in which four first air springs 3 are arranged, and each of the first air springs 3 corresponds to the vibration isolation block 2. A load is applied in the horizontal direction to the side surface of the rectangular portion 2b. Further, the first air spring 3 is disposed opposite to each other with the square portion 2 b of the vibration isolation block 2 interposed therebetween. And the direction of the load which the 1st 1st air spring 3 acts with respect to the square part 2b of the vibration isolation block 2 is the other 1st air spring 3 arrange | positioned adjacently. Each first air spring 3 is arranged so as to be orthogonal to the direction of the load acting on the rectangular portion 2b. As shown in FIGS. 5 and 6, when three or four first air springs 3 are arranged, the outer frame block B4b has the first air spring 3 connected to the vibration isolation block 2. It receives the reaction of the load that acts on. As described above, a plurality of types of horizontal unit parts 16 are prepared in which the first air springs that apply loads to the angular parts 2b of the vibration isolation block 2 in different directions in the horizontal plane are arranged. More specifically, four types in which the first air springs 3 are arranged in one direction, two to four directions out of four directions orthogonal to each other in the horizontal plane with respect to the vibration isolation block 2 are prepared. Will be. The vertical unit portion 17 is configured to be connectable to any of these plural types of horizontal unit portions 16. That is, the shape of the flange surface 18 of the outer frame 4 connected to the support member 10 (and the fixed flange 8) of the vertical unit portion 17 is connected to the vertical unit portion 17 regardless of the number of the first air springs 3 disposed. It has a possible configuration. By doing so, it is possible to quickly provide the customer with the active vibration isolator 1 having an appropriate vibration isolation capability at a low cost in accordance with the weight of the device placed on the active vibration isolator 1. Thereby, the active vibration isolator 1 with high versatility is prepared without omission.

  Further, the horizontal unit portion 16 of the active vibration isolator 1 in the present embodiment is such that the first air spring 3 has a diameter larger than the outer peripheral position of the second air spring 9 when connected to the vertical unit portion 17. It is comprised so that it may be arrange | positioned inside. More specifically, all of the first air springs 3 are arranged on the radially inner side of the outer peripheral position of the second air spring 9. By arranging in this way, the size of the active vibration isolator 1 can be avoided. In the active vibration isolator 1 according to the present embodiment, a vibration isolating rubber 5 is provided between the square portion 2 b of the vibration isolation block 2 and the first air spring 3. If the first air spring 3 or the second air spring 9 is arranged as it is on each upper part 2b of the vibration isolation block 2, the shear spring constant increases and the calculation load increases. On the other hand, if the calculation is performed by replacing the action point that the first air spring 3 and the second air spring 9 act on the surface plate 50 with the representative point in order to reduce the calculation load, the calculation error increases. The high-performance vibration isolator 1 cannot be provided. Therefore, by providing the anti-vibration rubber 5 that can be elastically deformed in the direction orthogonal to the expansion and contraction direction of the first air spring 3 between the angular portion 2b of the vibration isolation block and the first air spring 3, The composite shear spring constant of the anti-vibration rubber 5 and the first air spring 3 is reduced.

  Moreover, the vertical unit part 17 which comprises the active vibration isolator 1 which concerns on this embodiment is comprised so that the 2nd air spring 9 can be arranged in series in a perpendicular direction. Here, when the plurality of second air springs 9 are arranged in series in the vertical direction, the float cores 9b are connected to each other. That is, the connecting shaft 14 with a male thread is screwed into and connected to the opening formed in the center of the float core 9b. In this case, the diaphragm 9 is sandwiched between the float core 9 b and the flat plate portion 10 b of the support member 10. The diaphragm 9a of the second air spring 9 arranged at a position other than the lowest stage has a donut shape because the connecting shaft 14 needs to be passed through the center thereof. Although the number of the second air springs 9 can be easily changed in the vertical unit portion 17, the vertical unit portion 17 is stocked in advance as the vertical unit portion 17 including one or a plurality of second air springs 9. You can also keep it. As described above, the vertical unit portion 17 is configured so that the second air springs 9 can be arranged in series in the vertical direction. The active vibration isolator 1 can be selected.

  In addition, although this invention is described in said preferable embodiment, this invention is not restrict | limited only to it. It will be understood that various other embodiments may be made without departing from the spirit and scope of the invention.

It is a model diagram of a vibration isolation system configured by arranging four active vibration isolation devices. It is the figure which showed the front sectional view and peripheral device of the active vibration isolator. FIG. 3 is a cross-sectional view of the active vibration isolator illustrated in FIG. 2 along the line AA. It is the sectional view on the AA line in FIG. 2 about the active vibration isolator in which one 1st air spring is arrange | positioned. It is the sectional view on the AA line in FIG. 2 about the active vibration isolator in which one 1st air spring is arrange | positioned. It is the sectional view on the AA line in FIG. 2 about the active vibration isolator in which four 1st air springs are arrange | positioned.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Active vibration isolator 2 Vibration isolation block 2a Flat part of vibration isolation block 2b Square part of vibration isolation block 3 First air spring 4 Outer frame 4a Outer frame block A
4b Outer frame block B
4c Outer frame block C
DESCRIPTION OF SYMBOLS 5 Anti-vibration rubber | gum 6 1st air control valve 7 Control part 8 Fixed base 9 2nd air spring 10 Support member 11 Vibration control body 12 Receiver tank 13 2nd air control valve 14 Connecting shaft 15 Stopper 16 Horizontal unit part 17 Vertical unit 18 Flange surface of outer frame 50 Surface plate 60 Vibration isolation system S1 to S4 sensor P1 to P4 Representative points of action points of air springs in each active vibration isolation device

Claims (8)

An anti-vibration block in which vibration is transmitted to and from the equipment arranged at the top;
A first air spring that applies a load in a horizontal direction to the vibration isolation block;
An outer frame fixed to the floor surface, surrounding the periphery so as to enclose the vibration isolation block, and disposed so as to sandwich the first air spring with the vibration isolation block,
The first air from the anti-vibration block has a smaller shear spring constant than the first air spring and intersects the direction of the load applied by the first air spring to the anti-vibration block. A vibration isolator in which a relaxation body that relieves a load acting on a spring is disposed between the vibration isolation block and the first air spring.   A sensor that detects vibration of the vibration isolation block, an air control valve that controls the amount of air supplied to the first air spring, and a vibration value detected by the sensor, The vibration isolation device according to claim 1, further comprising a control unit that controls an air supply amount to the first air spring.   A fixed base fixed to the floor surface; and a second air spring that applies a load in a vertical direction to the vibration isolation block, wherein the second air spring includes the fixed base and the vibration isolation block. The vibration isolator according to claim 1 or 2, which is disposed between the two.   From the vibration isolation block, the shear spring constant is smaller than that of the second air spring, and the vibration isolation block is generated in a direction that intersects the direction of the load that the second air spring acts on the vibration isolation block. The vibration isolator according to any one of claims 1 to 3, wherein a relaxation body that relieves a load acting on the second air spring is disposed between the vibration isolation block and the second air spring. apparatus. A horizontal unit portion including the vibration isolation block, the first air spring in the same horizontal plane as the vibration isolation block, and an outer frame sandwiching the first air spring with the vibration isolation block;
A fixed base, the second air spring in the same vertical plane as the fixed base, and a vertical unit including a support member that sandwiches the second air spring between the fixed base and
In the horizontal unit portion, a plurality of types identified by the number of the first air springs arranged in different directions in a horizontal plane with respect to the vibration isolation block are prepared, and the plurality of types of the horizontal springs are prepared. The vibration isolator according to claim 3 or 4, wherein any one of the unit units and the vertical unit unit are connected.   The horizontal unit portion includes at least three types in which the first air springs are respectively arranged in one direction, two directions, and four directions out of four directions orthogonal to each other in a horizontal plane with respect to the vibration isolation block. The vibration isolator according to claim 5.   The said 1st air spring is arrange | positioned in the diameter inner side rather than the outer peripheral position of a said 2nd air spring, when the said horizontal unit part is connected to the said vertical unit part. Vibration isolator. The vibration isolator according to any one of claims 3 to 7, wherein the vertical unit portion is configured such that a plurality of the second air springs can be arranged in series in the vertical direction.

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