JP2005163914A - Vibration resistant system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide vibration resistant systems causing little bias in a supporting load acting from a surface plate on each active vibration isolation device. <P>SOLUTION: The surface plate 2 comprises the first vibration resistant device A1 acting an operating force F1 in a horizontal direction, the second vibration resistant device A2 acting an operating force F2 in a direction intersecting with the horizontal direction, and the third vibration resistant device A3 acting operating forces F3 and F4 in directions opposed to the horizontal direction and intersecting with the horizontal direction. Each of the vibration resistant devices A1 to A3 is disposed so that a translation force and a rotational force resulting from the operating force from each of the vibration isolation devices A1 to A3 acting on the surface plate 2 can be canceled. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a vibration isolation system that performs vibration isolation of a surface plate on which an electron microscope, a semiconductor manufacturing apparatus, and the like are placed by arranging a plurality of vibration isolation devices.

  There is known a vibration isolation system in which four active vibration isolation devices are arranged so as to support the surface plate from below the surface plate and perform vibration isolation of the surface plate. In this vibration isolation system, four vibration isolation devices, that is, a first vibration isolation device, a second vibration isolation device, a third vibration isolation device, and a fourth vibration isolation device are provided. Are arranged on each side. Among these, the first vibration isolator serving as a reference applies translational force and rotational force to the surface plate by applying an operation force in one direction to one side of the surface plate. And the 2nd vibration isolator is arrange | positioned on the opposite side of the edge | side where this 1st vibration isolator is arrange | positioned. The second vibration isolation device is controlled so that the operation force in the opposite direction to the operation force applied to the surface plate by the first vibration isolation device is applied to the opposite side, and the translational force is canceled out. A rotational force is applied to the surface plate together with the vibration isolator. Further, the third vibration isolation device and the fourth vibration isolation device are arranged so as to face each side adjacent to the side where the first vibration isolation device is arranged. The translational force resulting from the operation force from the third vibration isolation device and the fourth vibration isolation device is controlled to cancel, and the operation force from the first vibration isolation device and the second vibration isolation device. The reverse rotational force is applied to the surface plate with respect to the rotational force of (see, for example, Patent Document 1).

  However, in a vibration isolation system that supports the surface plate with four active vibration isolation devices, the support load acting on each active vibration isolation device from the surface plate is biased, and the operating force from the vibration isolation device is applied to the surface plate. Therefore, it is difficult to act sufficiently, leading to a decrease in vibration isolation performance. Also, the surface of the surface plate is finished with high accuracy, but if the support load acting on each active vibration isolator from the surface plate is biased, the center of gravity of the surface plate moves, and the surface accuracy of the surface plate is reduced. It will decrease. And the fall of the surface accuracy of a surface plate increases the bias | inclination of the support load which acts on each active vibration isolator from a surface plate, and leads to the fall of the vibration isolation performance further.

JP-A-8-135730

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a vibration isolation system in which a bias is hardly generated in a support load that acts on each active vibration isolation device from a surface plate.

Means and effects for solving the problems

  In the present invention, the following features are provided alone or in combination as appropriate. The vibration isolation system according to the present invention for solving the above-described problems includes a surface plate on which equipment is placed, and a first vibration isolation that causes an operating force in a first direction to act on the surface plate in a horizontal plane. An apparatus, a second vibration isolator for causing the operating force in a second direction different from the first direction in the horizontal plane to act on the surface plate, and the first and second directions in the horizontal plane. A third vibration isolator for causing the operating force in a third direction different from the first and third directions to act on the surface plate in a horizontal plane. And the first to third to the shape plate so that the rotational force and translational force applied to the shape plate due to the operating force from the first to third vibration isolator are canceled. The position of the vibration isolator and the directions and magnitudes of the first to fourth operating forces are determined. And wherein the door. According to this vibration isolation system, it becomes possible to support the surface plate with three vibration isolation devices, the supporting load acting on each vibration isolation device from the surface plate is almost the same size, and the high surface of the surface plate Accuracy can be maintained. In terms of structural mechanics, the four-point support is an indefinite structure, but the three-point support is a static structure. Therefore, the three-point support is preferable as in the vibration isolator system according to the present invention. Conventionally, four anti-vibration devices are required, but a vibration isolation system that performs horizontal anti-vibration with three anti-vibration devices can be configured, leading to cost reduction.

  Here, in the vibration isolation system according to the present invention, the first direction and the third direction are opposite to each other, the second direction and the fourth direction are opposite to each other, and It is preferable that the first direction and the third direction are orthogonal to the second direction and the fourth direction. By doing so, the calculation for canceling the rotational force and translational force applied to the surface plate due to the operating force from each vibration isolator is facilitated.

  Here, in the vibration isolation system according to the present invention, the positions of the first to third vibration isolation devices correspond to the three vertices of an equilateral triangle, and the operation force in the first to fourth directions is Preferably they are the same size. By doing so, a rational configuration of a vibration isolation system capable of supporting the surface plate with three vibration isolation devices is realized.

  Here, in the vibration isolation system according to the present invention, at least one of the first to third vibration isolation devices includes a vibration isolation block in which vibration is transmitted to and from the surface plate, and the vibration isolation A horizontal unit including a first air spring in the same horizontal plane as the block, and an outer frame sandwiching the first air spring between the anti-vibration block, a fixed base, and the same vertical plane as the fixed base And a vertical unit portion including a support member that sandwiches the second air spring with the fixed base. The horizontal unit portion includes the vibration isolation block. A plurality of types identified by the number of the first air springs arranged in different directions in the horizontal plane are prepared, and any one of the plurality of types of the horizontal unit portions and the vertical unit portion are provided. Connected It is preferred. In the vibration isolation system according to the present invention, at least a vibration isolation device that applies an operating force only in one horizontal direction to the surface plate, one horizontal direction to the surface plate, and the one horizontal direction and the horizontal direction. An anti-vibration device that applies an operating force in the intersecting direction is required. Further, depending on the arrangement of each vibration isolator, various variations of the vibration isolator that apply an operating force to the surface plate in the horizontal direction are necessary. However, stocking such a variety of vibration isolators individually is not preferable because it increases costs. Moreover, if it manufactures as needed, provision of a product will be delayed. Therefore, with the configuration according to the present invention, the required vibration isolator can be provided promptly, so that an increase in cost can be avoided.

  Further, the horizontal unit portion of the vibration isolation system according to the present invention includes at least the first direction in one direction, two directions, and four directions out of four directions orthogonal to each other in a horizontal plane with respect to the vibration isolation block. Three types of air springs are preferably prepared. By doing so, it is possible to provide a vibration isolation device that can be applied to any vibration isolation system.

  Further, the vibration isolation system according to the present invention is configured such that at least one of the first to third vibration isolation devices is configured such that the plurality of second air springs can be arranged in series in the vertical direction. It is preferable. In this way, it is possible to quickly provide a customer with a vibration isolation system in which a vibration isolation device having an appropriate vibration isolation capacity is arranged at a low cost according to the weight of the device placed on the surface plate. Can do.

  In the vibration isolation system according to the present invention, when the horizontal unit portion of at least one of the first to third vibration isolation devices is connected to the vertical unit portion, the first air spring is It is preferable that the second air spring is disposed on the inner diameter side than the outer peripheral position. By arranging in this way, an increase in the size of the vibration isolation device constituting the vibration isolation system can be avoided.

  In addition, the vibration isolation system according to the present invention provides a surface plate on which the device is placed and an operation force in a first direction and a second direction different from the first direction on the surface plate in a horizontal plane. Operating force in a fourth direction different from the first direction and the first direction, the third direction different from the first direction and the second direction, and the fourth direction different from the first to third directions in the horizontal plane. A second vibration isolator that acts on the surface plate; a fifth direction in a horizontal plane; a sixth direction different from the fifth direction; a fifth direction different from the fifth direction and the sixth direction. 7 and a third vibration isolator that acts on an eighth direction different from the fifth to seventh directions, and an operation from the first to third vibration isolator The first to the first plates with respect to the platen so that the rotational force and translational force applied to the platen due to force are canceled out. 3 position and direction and magnitude of the operating force of the first to eighth anti-vibration apparatus may be one that has been determined. According to this vibration isolation system, it is possible to increase the translational force and the rotational force due to the operating force from each vibration isolation device acting on the surface plate, and this torque balance is fixed by three vibration isolation devices. Since it can be realized by supporting the panel, the surface accuracy of the surface plate can be maintained at a high level, and high costs such as increasing the surface plate rigidity are not incurred. In addition, because of the structural mechanics, the four-point support is an indefinite structure, but the three-point support is a static structure. is there.

  Hereinafter, preferred embodiments of the vibration isolation system according to the present invention will be described. FIG. 1 is a plan view of a vibration isolation system in which a surface plate is supported by three vibration isolation devices. FIG. 2 is a front sectional view of an active vibration isolation device used in the vibration isolation system according to the present invention. X and Y illustrated in FIG. 1 are horizontal coordinate axes in the entire vibration isolation system of the present embodiment, and the X axis and the Y axis are orthogonal to each other. In the following description, it is assumed that the right direction of the X axis is the positive direction, the left direction is the negative direction of the X axis, the upward direction of the Y axis is the positive direction, and the downward direction is the negative direction when viewed from the front of the page. The center of gravity G is the origin of horizontal coordinates in the entire vibration isolation system. Below, the structure of the vibration isolation system 1 in this embodiment is demonstrated in detail.

  In FIG. 1, a vibration isolation system 1 according to this embodiment includes a surface plate 2 having a rectangular parallelepiped shape, a first vibration isolation device A1, a second vibration isolation device A2, and a third vibration isolation device A3. And a vibration isolator. On the upper surface of the surface plate 2, devices such as a semiconductor manufacturing apparatus and an electron microscope (not shown) are arranged. Each vibration isolator A1-A3 is arrange | positioned under the surface plate 2, and is supporting the surface plate 2 from the downward direction. The surface of the surface plate 2 supported by the vibration isolation devices A1 to A3 and the surface of the surface plate 2 on which a semiconductor manufacturing device (not shown) is arranged are all flat surfaces. In the vibration isolation system 1 according to the present embodiment, the first vibration isolation device A1 that causes the operating force F1 in the first direction to act on the surface plate 2 in the horizontal plane and the first direction in the horizontal plane are A second vibration isolator A2 that causes the operating force F2 in a different second direction to act on the surface plate 2, an operating force F3 in a third direction different from the first and second directions in the horizontal plane, and In the horizontal plane, a third vibration isolation device A3 is used that applies an operating force F4 in a fourth direction different from the first to third directions to the surface plate 2.

  Here, the configuration of the first vibration isolation device A1, the second vibration isolation device A2, and the third vibration isolation device A3 will be described with reference to FIG. Each of these vibration isolation devices A1 to A3 includes a vibration isolation block 3 that transmits vibration to and from the surface plate 2, a first air spring 4 that expands and contracts in the horizontal direction, and a first air spring 4. A horizontal unit portion 6 including an outer frame 5 having three types of outer frame blocks 5a to 5c having different shapes, which are arranged so as to be sandwiched between the vibration isolation block 3, and a fixed base 7 fixed to the floor surface A second air spring 8 that expands and contracts in the vertical direction, a support member 9 that supports the second air spring 8, and a vertical unit portion 10 that includes a vibration control body 21 that acts to relieve shearing force. . The first vibration isolation device A1 and the second vibration isolation device A2 include one first air spring 4, and the third vibration isolation device A3 includes two first air springs 4. This will be described later. Displacement sensors S1 and S2 for detecting horizontal and vertical displacements of the surface plate 2 and acceleration sensors S3 and S4 for detecting horizontal and vertical accelerations of the surface plate 2 are provided. Here, the first air spring 4 is connected to a receiver tank 11 in which compressed air is accumulated, and based on the result detected by each sensor, the receiver tank 11 and the first air spring 4 The amount of air supplied to the first air spring 4 is controlled by the air control valve 12 provided between the two. That is, when air is supplied to the first air spring 4, the first air spring 4 applies a leftward operating force to the vibration isolation block 3 when viewed from the front of the page. In the third vibration isolator having two first air springs 4, a manifold (not shown) is further provided, and the amount of air supplied to each first air spring 4 is adjusted by this manifold. The

  Next, the number of the first air springs 4 disposed will be described with reference to FIGS. Here, FIG. 3 is a cross-sectional view taken along the line AA in FIG. 2 for the first vibration isolation device A1 and the second vibration isolation device A2, and FIG. 4 is a diagram in FIG. 2 for the third vibration isolation device A3. It is AA sectional view. As for the front sectional view, the first vibration isolation device A1, the second vibration isolation device A2, and the third vibration isolation device A3 are all the same as shown in FIG. As shown in FIG. 3, in the first vibration isolation device A1 and the second vibration isolation device A2, when air is supplied to the first air spring 4, the first air spring 4 is moved to the vibration isolation block. 3, an operating force is applied in one horizontal direction. On the other hand, as shown in FIG. 4, in the third vibration isolation device A <b> 3, when air is supplied to the first air spring 4, the first air spring 4 moves horizontally with respect to the vibration isolation block 3. An operating force is applied to the direction. These two horizontal directions are orthogonal to each other.

  Here, the configuration of the outer frame 5 will be described. The outer frame 5 includes the outer frame block A5a, the outer frame block B5b, and both side surfaces of the outer frame block A5a and the outer frame block B5b that receive the reaction force of the load that the first air spring 4 acts on the vibration isolation block 3. And an outer frame block C5c arranged in the frame. Further, each of the outer frame block A5a, the outer frame block B5b, and the outer frame block A5a has an outer peripheral surface formed in an arc shape, and is configured integrally with a flange surface 20 formed below. The flange surface 20 is fixed to the fixed base 8 via the support member 9.

  Next, the arrangement of the vibration isolation devices A1 to A3 in the vibration isolation system 1 according to this embodiment will be described with reference to FIG. Here, each side in the surface of the surface plate 2 supported by each vibration isolator A1-A3 is set to a1-a4. Each of the vibration isolation devices A1 to A3 is arranged below the surface plate 2 and in an area surrounded by the four sides a1 to a4 of the surface plate 2, that is, not to protrude from the surface plate 2. Has been. The first vibration isolation device A1 applies an operating force F1 in the positive direction of the Y axis to the vibration isolation block 3 of the first vibration isolation device A1 along the side a1 of the surface plate 2 at substantially the center thereof. Are arranged as follows. The second vibration isolator A2 has a vibration isolation block 3 of the second vibration isolator A2 at a corner surrounded by one side a2 adjacent to one side a1 of the surface plate 2 and a side a3 facing the side a1. The operating force F2 is arranged in the positive direction of the X axis. The third vibration isolator A3 has a vibration isolation block of the third vibration isolator A3 at a corner surrounded by the other side a4 adjacent to the side a1 of the surface plate 2 and the side a3 facing the side a1. 3, the Y-axis negative operation force F <b> 3 and the X-axis negative direction operation force F <b> 4 are applied. In addition, since the surface plate 2 is arrange | positioned above each vibration isolator A1-A3, the operation force F1-F4 which each vibration isolator A1-A3 acts with respect to each vibration isolation block 3 is a surface plate. It acts on 2 as it is. That is, “the vibration isolation devices A1 to A3 apply the operation forces F1 to F4 to the vibration isolation blocks 3” means that “the vibration isolation devices A1 to A3 apply the operation force F1 to the surface plate 2”. Is synonymous with “acting F4”. Then, the translational force and the rotational force caused by the operation forces F1 to F4 that the vibration isolators A1 to A3 arranged in this way act on the surface plate 2 are canceled out. Below, the principle by which the translational force and rotational force resulting from the operation force F1-F4 from each vibration isolator A1-A3 which acts on the surface plate 2 are negated is demonstrated.

  First, the principle by which the translational force caused by the operation forces F1 to F4 from the vibration isolation devices A1 to A3 acting on the surface plate 2 is canceled will be described. In order to cancel the translational force caused by the operation forces F1 to F4 from the vibration isolation devices A1 to A3 acting on the surface plate 2, the operation force that one vibration isolation device acts on the surface plate 2 Must be offset by the translational force caused by the operating force that the vibration isolator disposed opposite to the one vibration isolator acts on the surface plate 2. That is, the direction of the component force in the linear direction of the operating force that one vibration isolator acts on the surface plate 2 and the vibration isolator disposed opposite to the one vibration isolator is against the surface plate 2. When the operating force to be applied is opposite to the direction of the component force in the linear direction and the component force in each linear direction is the same, it is canceled out. In the vibration isolation system 1 of the present embodiment, in the Y-axis direction, the operating force F1 that the first vibration isolation device A1 acts on the surface plate 2 is a translational force, and the third vibration isolation device A3 is constant. The operation force F3 in the negative Y-axis direction applied to the board 2 is a translational force. Therefore, they are canceled when they are in the direction opposite to each other and have the same operating force. Similarly, in the X-axis direction, the operating force F2 that the second vibration isolator A2 acts on the surface plate 2 and the X-axis negative that the third vibration isolator A3 acts on the surface plate 2 are the same. The operating force F4 in the direction is a direction opposite to each other, and is canceled when the operating force has the same magnitude.

Next, the principle by which the rotational force caused by the operating forces F1 to F4 from the vibration isolation devices A1 to A3 acting on the surface plate 2 is canceled will be described. In order to cancel the rotational force caused by the operation forces F1 to F4 from the vibration isolators A1 to A3 acting on the surface plate 2, the center plate G is caused to act on the surface plate 2 clockwise. The rotational moment needs to be counteracted by the rotational moment acting on the surface plate 2 counterclockwise around the center of gravity G. Below, it demonstrates in the vibration isolator system 1 of this embodiment. The distance from the vibration isolation block 3 of the vibration isolation device A1 to which the operating force F1 is applied to the center of gravity G is L1, and the distance from the vibration isolation block 3 of the vibration isolation device A2 to which the operation force F2 is applied is to the gravity center G. L2, the distance from the vibration isolation block 3 of the vibration isolation device A3 to which the operation forces F3 and F4 are applied to the center of gravity G is L3, and the component force of the operation force F2 in the rotation direction around the center of gravity G is f2. The component force of the force F3 in the rotation direction around the center of gravity G is f3, and the component force of the operation force F4 in the rotation direction around the center of gravity G is f4. In the vibration isolation system 1 of the present embodiment, in order to cancel the clockwise rotational moment by the counterclockwise rotational moment, the following expression is used.
[Equation 1]
F1 * L1 + f3 * L3 = f2 * L2 + f4 * L3

  Thus, by supporting the surface plate 2 with the three vibration isolation devices A1 to A3, the operation forces F1 to F4 from the vibration isolation devices A1 to A3 acting on the surface plate 2 are linear and rotational directions. Therefore, it can be realized by a three-point support which is a static structure in structural mechanics. Therefore, the support loads acting on the vibration isolation devices A1 to A3 from the surface plate 2 become substantially the same, and the high surface accuracy of the surface plate 2 can be maintained. Conventionally, four anti-vibration devices are required, but a vibration isolation system that performs horizontal anti-vibration with three anti-vibration devices can be configured, leading to cost reduction.

  In addition, arrangement | positioning of each vibration isolator A1-A3 is not restricted to this. That is, for the translational force, the translational force caused by the operation force applied to the surface plate 2 from one vibration isolation device is applied to the surface plate 2 by the vibration isolation device arranged opposite to the one vibration isolation device. What is necessary is just to cancel by the translational force resulting from the operation force made to act on. As for the rotational force, the rotational moment that acts on the surface plate 2 clockwise around the center of gravity G is offset by the rotational moment that acts on the surface plate 2 counterclockwise around the center of gravity G. That's fine. For example, if each vibration isolator is arranged as shown in FIGS. 5 to 7, the object of the present invention can be achieved. 5 to 7 are plan layout views of the vibration isolation system 1 in which the surface plate 2 is supported by the three vibration isolation devices A1 to A3, and constitute the vibration isolation system 1 according to the present invention. The directions of the operating forces F1 to F4 that the vibration isolation devices A1 to A3 act on the surface plate 2 indicate that the vibration isolation devices A1 to A3 constituting the vibration isolation system 1 illustrated in FIG. This is different from the direction of the operating forces F1 to F4 to be applied. The meanings of the reference numerals shown in FIGS. 5 to 7 are the same as the meanings of the reference numerals shown in FIG. In the present embodiment, the operation force F1 applied to the surface plate 2 by the first vibration isolation device and the operation force F2 applied to the surface plate 2 by the second vibration isolation device are orthogonal to each other. The first vibration isolation device and the second vibration isolation device are arranged, but they are not necessarily arranged to be orthogonal to each other, and may be arranged to intersect each other. That is, the vibration isolation devices A1 to A3 may be arranged so that the translational force and the rotational force caused by the operation forces F1 to F4 that the vibration isolation devices A1 to A3 act on the surface plate 2 are canceled out. . However, the first vibration isolation is such that the operation force F1 applied to the surface plate 2 by the first vibration isolation device and the operation force F2 applied to the surface plate 2 by the second vibration isolation device are orthogonal to each other. If the device and the second vibration isolation device are arranged, the operation forces F1 to F4 that the vibration isolation devices A1 to A3 act on the surface plate 2 to cancel the translational force and the rotational force are easy. It becomes. Furthermore, the arrangement positions of the vibration isolation devices A1 to A3 are not limited to this, and the shape of the surface plate 2 is not limited to a rectangular parallelepiped.

  Furthermore, as a modification, the object of the present invention can be achieved also in the vibration isolation system shown in FIG. FIG. 8 is a plan layout view of the vibration isolation system 1 in which the surface plate 2 is supported by three vibration isolation devices, a fourth vibration isolation device A4, a fifth vibration isolation device A5, and a sixth vibration isolation device A6. The operation force (F11, F22, F33, F44, F55, F66, F77, F88) that the vibration isolation devices A4 to A6 constituting the vibration isolation system 1 according to the present invention act on the surface plate 2 Is different from the number of operating forces F1 to F4 that the vibration isolation devices A1 to A3 constituting the vibration isolation system 1 illustrated in FIGS. 1 and 5 to 7 act on the surface plate 2. .

  Here, the configuration of the fourth vibration isolation device A4, the fifth vibration isolation device A5, and the sixth vibration isolation device A6 will be described with reference to FIG. FIG. 9 is a front sectional view of active vibration isolation devices A4 to A6 constituting the vibration isolation system 1 as a modified example related to the present invention. Each of these vibration isolation devices A4 to A6 includes a vibration isolation block 3 through which vibration is transmitted to and from the surface plate 2, a first air spring 4 that expands and contracts in the horizontal direction, and a first air spring 4. A horizontal unit portion 6 including an outer frame 5 disposed so as to be sandwiched between the vibration isolation block 3, a fixed base 7 fixed to the floor surface, a second air spring 8 extending and contracting in the vertical direction, and a second A vertical unit portion 10 including a support member 9 that supports the air spring 8 is provided. The fourth vibration isolator A4 and the fifth vibration isolator A5 include two first air springs 4, and the sixth vibration isolator A6 includes four first air springs 4. This will be described later. Displacement sensors S1 and S2 for detecting horizontal and vertical displacements of the surface plate 2 and acceleration sensors S3 and S4 for detecting horizontal and vertical accelerations of the surface plate 2 are provided. Here, the fourth air spring 4 is connected to a receiver tank 11 in which compressed air is accumulated, and based on the result detected by each sensor, the receiver tank 11 and the first air spring 4 The amount of air supplied to the first air spring 4 is controlled by the air control valve 12 provided between the two. Further, a manifold (not shown) is provided in each vibration isolator A4 to A6, and the amount of air supplied to each first air spring 4 in each vibration isolator is adjusted by this manifold. That is, when air is supplied to the first air spring 4 disposed on the left side when viewed from the front side of the paper, the first air spring 4 is directed to the anti-vibration block 3 toward the right when viewed from the front side of the paper. An operating force is applied to the surface plate 2.

  Next, the arrangement of the vibration isolation devices A4 to A6 in the vibration isolation system 1 of the modification will be described with reference to FIG. Here, let each side in the surface of the surface plate 2 supported by each vibration isolator A4-A6 be b1-b4. The vibration isolation devices A4 to A6 are arranged below the surface plate 2 and in an area surrounded by the four sides b1 to b4 of the surface plate 2, that is, so as not to protrude from the surface plate 2. Has been. The fourth vibration isolator A4 has an operating force in the positive and negative directions of the Y axis with respect to the anti-vibration block 3 of the first anti-vibration device A4 along the one side b1 of the surface plate 2. It arrange | positions so that F11 and F22 may act. The fifth anti-vibration device A5 has the anti-vibration block 3 of the fourth anti-vibration device A4 at a corner surrounded by one side b2 adjacent to the one side b1 of the surface plate 2 and the side b3 facing the one side b1. In contrast, the operating forces F33 and F44 are arranged to act in the positive and negative directions of the X axis. The sixth vibration isolator A6 has a vibration isolation block of the sixth vibration isolator A6 at a corner surrounded by another side b4 adjacent to one side b1 of the surface plate 2 and a side b3 facing the side b1. 3, the Y-axis positive and negative operating forces F55 and the X-axis positive and negative operating forces F77 and F88 are applied. In addition, since the surface plate 2 is arrange | positioned at the upper part of each vibration isolator A4-A6, the operation force F11-F88 which each vibration isolator A4-A6 acts with respect to each anti-vibration block 3 is a surface plate. It acts on 2 as it is. That is, “the vibration isolation devices A4 to A6 apply the operation forces F11 to F88 to the vibration isolation blocks 3” means “the vibration control devices F1 to F6 are applied to the vibration isolation devices A4 to A6. It is synonymous with “acting F88”. Then, the translational force and the rotational force resulting from the operating forces F11 to F88 acting on the surface plate 2 from the vibration isolation devices A4 to A6 arranged in this way are canceled out. Below, the principle by which the translational force and rotational force resulting from the operation force F11-F88 from each vibration isolator A4-A6 which acts on the surface plate 2 are negated is demonstrated.

  First, the principle by which the translational forces caused by the operation forces F11 to F88 from the vibration isolation devices A4 to A6 acting on the surface plate 2 are canceled each other will be described. In order for the translational forces caused by the operation forces from the vibration isolation devices A4 to A6 acting on the surface plate 2 to cancel each other, the operation force that one vibration isolation device acts on the surface plate 2 in the linear direction. The component force needs to be canceled out by the component force in the linear direction of the operating force that is applied to the surface plate 2 by the vibration isolator disposed opposite to the one vibration isolator. That is, the direction of the component force in the linear direction of the operating force that one vibration isolator acts on the surface plate 2 and the vibration isolator disposed opposite to the one vibration isolator is against the surface plate 2. In addition to the case where the direction of the component force in the linear direction of the operating force to be applied is opposite and each component force has the same magnitude, all of the vibration isolators A4 to A6 are respectively When an operation force is applied in a direction opposite to the surface plate 2 and the magnitude of the operation force is the same, the translational force resulting from the operation force on the surface plate 2 is canceled out. In the vibration isolation system 1 of the modified example, the operation force F11 that the fourth vibration isolation device A4 applies to the surface plate 2 in the positive direction of the Y axis and the operation force F22 that operates in the negative direction of the Y axis are relative to each other. Since the same size, the translational force in the Y-axis direction with respect to the surface plate 2 is balanced in the fourth vibration isolator A4. Similarly, the translational force in the X-axis direction is balanced in the fifth vibration isolation device A5, and the translational force is balanced in both the Y-axis direction and the X-axis direction in the sixth vibration isolation device A6.

Next, the principle that the operation forces F11 to F88 from the vibration isolation devices A4 to A6 acting on the surface plate 2 are balanced in the rotation direction will be described. In order for the operating forces F11 to F88 from the vibration isolators A4 to A6 acting on the surface plate 2 to balance in the rotation direction, the rotation is caused to act clockwise on the surface plate 2 around the center of gravity G. The moment needs to be offset by a rotational moment that acts counterclockwise on the surface plate 2 around the center of gravity G. Below, it demonstrates in the vibration isolating system 1 of a modification. Note that the distance from the vibration isolation block 3 of the fourth vibration isolation device A4 to the center of gravity G is L11, the distance from the vibration isolation block 3 of the fifth vibration isolation device A5 to the gravity center G is L22, and the sixth vibration isolation device. The distance from the anti-vibration block 3 of A6 to the center of gravity G is L33, and the counterclockwise components of the operating forces F33, F55, and F88 are the clockwise rotations of f33, f55, and f88, and the operating forces F44, F66, and F77, respectively. Are the component forces f44, f66, and f77, respectively. In order to balance the rotational moment in the vibration isolation system 1 of the modification, it is expressed by the following equation.
[Equation 2]
F11 × L11 + f44 × L22 + (f66 + f77) × L33 = F22 × L11 + f33 × L22 + (f55 + f88) × L33

  Even in such a configuration, by supporting the surface plate 2 with the three vibration isolation devices A4 to A6, the operation forces F11 to F88 from the vibration isolation devices A4 to A6 acting on the surface plate 2 are caused. The translational force and rotational force that cancel each other out. Therefore, since it can be realized by a three-point support that is a static structure in terms of structural mechanics, the support load acting on the vibration isolation devices A4 to A6 from the surface plate 2 becomes almost the same size, and the surface accuracy of the surface plate 2 is high. Can be maintained. Conventionally, four anti-vibration devices are required, but a vibration isolation system that performs horizontal anti-vibration with three anti-vibration devices can be configured, leading to cost reduction. Furthermore, in the vibration isolation system 1 according to the modification, each of the vibration isolation devices A4 to A6 includes two to four first air springs 4, so that the operating force can be increased.

  As described above, the anti-vibration devices A1 to A6 constituting the anti-vibration system 1 shown in the present embodiment and the modification have different numbers of first air springs 4, respectively. Therefore, stocking each of the vibration isolators A1 to A6 is not preferable because it leads to an increase in cost. Therefore, in the present invention, the horizontal unit portion 6 composed of a plurality of variations in which the number of the first air springs 4 is arranged is stocked, and any one of the horizontal unit portions 6 and the vertical unit 10 can be connected. It is configured. Specifically, as shown in FIGS. 3, 4, 10, and 11, a variation of the horizontal unit 6 in which 1 to 4 first air springs 4 are arranged is prepared in advance. When three or four first air springs 4 are arranged, the outer frame block B4b is subjected to a reaction of a load that the first air spring 4 acts on the vibration isolation block 3. Here, FIG. 10 is a cross-sectional view of the fourth vibration isolator A4 and the fifth vibration isolator A5 taken along the line BB in FIG. 9, and FIG. 11 is a diagram of the sixth vibration isolator A6 in FIG. It is a BB sectional view. 2 and 9, the vibration isolation block 3 constituting the horizontal unit portion 6 and the stopper 13 constituting the vertical unit portion 10 that supports the vibration isolation block 3 from below the vibration isolation block 3. Are connected with a bolt 19. Further, the flange 20 formed on the outer frame 5 constituting the horizontal unit portion 6 is connected to the support member 9 and the fixed base 7 constituting the vertical unit 10 with a through bolt 15. Here, the vibration isolation block 3 is a movable portion that transmits vibrations to and from the surface plate 2, and the stopper 13 becomes a movable portion when connected to the vibration isolation block 3. The fixed base 7 is a fixed portion fixed to the floor surface, and the outer frame 5 becomes a fixed portion by being connected to the fixed base 7 via the support member 9. As described above, the vertical unit 10 can be connected to any one of a plurality of horizontal unit parts 6 including a plurality of variations in which the number of the first air springs 4 is arranged, thereby reducing the number of vibration isolation devices to be stocked. Since it can be reduced, the cost can be reduced.

  Furthermore, when all the horizontal unit portions 6 of the vibration isolation devices A1 to A6 constituting the vibration isolation system 1 of the present invention are connected to the vertical unit portion 10, the first air spring 4 is the second air. The spring 8 is configured so as to be arranged on the inner side in the diameter than the outer peripheral position of the spring 8. More specifically, all of the first air springs 4 are arranged on the radially inner side of the outer peripheral position of the second air spring 8. By arranging in this way, the size of the vibration isolation devices A1 to A6 can be avoided. In each of the vibration isolation devices A1 to A6 constituting the vibration isolation system 1 of the present invention, the vibration isolation rubber 14 is provided between the vibration isolation block 3 and the first air spring 4. The air spring exhibits excellent performance against the occurrence of a load in the expansion / contraction direction, but it is not preferable that the load be generated in a direction orthogonal to the expansion / contraction direction. Therefore, a vibration isolating rubber 14 that can be elastically deformed in a direction orthogonal to the expansion / contraction direction of the first air spring 4 is provided between the vibration isolation block 3 and the first air spring 4.

  Further, each of the vertical unit portions 10 of the vibration isolation devices A1 to A6 constituting the vibration isolation system 1 of the present invention is configured such that the second air springs 8 can be arranged in series in the vertical direction. Specifically, the second air spring 8 includes a diaphragm 16 and a float core 17. The diaphragm 16 is an elastic body, and compressed air is accommodated therein. The float core 7 is a disk-shaped member, and an opening is formed at the center. A female screw is cut on the inner surface of the opening. Here, when the plurality of second air springs 8 are arranged in series in the vertical direction, the float cores 17 are connected to each other. In other words, the connecting shaft 18 having a male thread is screwed into and connected to the opening formed at the center of the float core 17. In this case, the diaphragm 16 is sandwiched between the float core 17 and the support member 9. Note that the diaphragm 16 of the second air spring 8 arranged at a position other than the lowermost stage has a donut shape because the connecting shaft 18 needs to be passed through the center thereof. Although the number of the second air springs 8 can be easily changed in the vertical unit portion 10, the vertical unit portion 10 is stocked in advance as the vertical unit portion 10 including one or a plurality of second air springs 8. You can also keep it. As described above, the vertical unit portion 10 is configured so that the second air springs 8 can be arranged in series in the vertical direction, so that it is optimal according to the weight of the device arranged on the upper portion of the surface plate 2. A vibration isolation device can be selected.

  In addition, although this invention is described in said preferable embodiment, this invention is not restrict | limited only to it. It will be understood that various other embodiments may be made without departing from the spirit and scope of the invention.

It is a plane arrangement view of a vibration isolation system in which a surface plate is supported by three vibration isolation devices. It is a front sectional view of an active vibration isolator used in the vibration isolation system according to the present invention. It is the sectional view on the AA line in FIG. 2 about a 1st vibration isolator and a 2nd vibration isolator. It is the sectional view on the AA line in FIG. 2 about a 3rd vibration isolator. FIG. 3 is a plan view of a vibration isolation system in which a surface plate is supported by three vibration isolation devices, and a direction of an operating force that each vibration isolation device acts on the surface plate is different from FIG. 1. FIG. 3 is a plan view of a vibration isolation system in which a surface plate is supported by three vibration isolation devices, and the direction of the operating force that each vibration isolation device acts on the surface plate is different from those in FIGS. 1 and 2. It is. FIG. 1 is a plan view of a vibration isolation system in which a surface plate is supported by three vibration isolation devices, and the direction of the operating force that each vibration isolation device acts on the surface plate is shown in FIGS. 1, 5, and 6. FIG. FIG. 3 is a plan layout view of a vibration isolation system in which a surface plate is supported by three vibration isolation devices, and the number of operating forces that the vibration isolation device constituting the vibration isolation system according to the present invention acts on the surface plate. FIG. 8 is different from FIG. 1 and FIGS. It is a front sectional view of an active vibration isolator constituting a vibration isolation system as a modified example related to the present invention. It is the BB sectional view taken on the line in FIG. 9 about the 4th vibration isolator and the 5th vibration isolator. It is the BB sectional view taken on the line in FIG. 9 about a 6th vibration isolator.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Anti-vibration system 2 Surface plate 3 Anti-vibration block 4 1st air spring 5 Outer frame 5a-5c Outer frame block 6 Horizontal unit part 7 Fixed base 8 Second air spring 9 Support member 10 Vertical unit part 11 Receiver tank 12 Air control valve 13 Stopper 14 Anti-vibration rubber 15 Through bolt 16 Diaphragm 17 Float core 18 Connecting shaft 19 Bolt 20 Flange surface 21 Vibration control body A1 First vibration isolator A2 Second vibration isolator A3 Third vibration isolator A4 4th vibration isolation device A5 5th vibration isolation device A6 6th vibration isolation device F1 Operation force F2 which 1st vibration isolation device acts on a surface plate 2nd vibration isolation device with respect to a surface plate Operating force F3 to be applied The operating force F4 to be applied to the surface plate by the third vibration isolator The operating force f2 to be applied to the surface plate by the third vibration isolator The second vibration isolator is applied to the surface plate. Act on Rotational component force f3 of the operating force to be applied The third component of the vibration isolator applied to the surface plate by the third vibration isolator f4 The force component of the operating force applied to the surface plate by the third vibration isolator device Rotational component force F11 Operation force F22 that the fourth vibration isolation device acts on the surface plate in the Y-axis positive direction Operation force F33 that the fourth vibration isolation device acts on the surface plate in the Y-axis negative direction Operation force F44 that the fifth vibration isolator acts on the surface plate in the X axis positive direction Operation force F55 that the fifth vibration isolator acts on the surface plate in the X axis negative direction F55 Sixth vibration isolation device Operating force F66 that acts on the surface plate in the Y-axis positive direction F6 operating force F77 that causes the sixth vibration isolator to act on the surface plate in the Y-axis negative direction F6 Operating force F88 acting in the X-axis positive direction Operating force f33 causing the sixth vibration isolator to act on the surface plate in the X-axis negative direction The anti-clockwise component force f44 of the operating force that the vibration isolator 5 acts on the surface plate in the X-axis positive direction The operating force that the fifth vibration isolator acts on the surface plate in the X-axis negative direction Clockwise component force f55 Counterclockwise component force f66 of the operating force that the sixth vibration isolator exerts on the surface plate in the positive direction of the Y-axis f66 Clockwise component force f77 of the operating force to be applied in the direction f6 The sixth component vibration isolator is applied to the surface plate in the clockwise direction of the X axis f88 the sixth component of the vibration isolator is the surface plate Counter-clockwise component forces a1 to a4 of the operating force acting in the negative direction of the X axis against the surface of the surface plate supported by the first vibration isolator, the second vibration isolator, and the third vibration isolator Sides b1 to b4 in the surface of the surface plate supported by the fourth vibration isolator, the fifth vibration isolator, and the sixth vibration isolator

Claims (8)

A surface plate on which the equipment is placed;
A first vibration isolator for applying an operating force in a first direction to the surface plate in a horizontal plane;
A second vibration isolator for causing the operating force in a second direction different from the first direction to act on the surface plate in a horizontal plane;
An operating force in a third direction different from the first and second directions in the horizontal plane and an operating force in a fourth direction different from the first to third directions in the horizontal plane are applied to the surface plate. A third vibration isolator that acts against the
The first to third vibration isolation devices for the surface plate are canceled so that the rotational force and the translational force applied to the surface plate due to the operating force from the first to third vibration isolation devices are canceled out. A vibration isolation system in which a position and directions and magnitudes of the first to fourth operating forces are determined.   The first direction and the third direction are opposite to each other, the second direction and the fourth direction are opposite to each other, and the first direction and the third direction are The vibration isolation system according to claim 1, wherein the vibration isolation system is orthogonal to the second direction and the fourth direction.   The removal according to claim 2, wherein the positions of the first to third vibration isolation devices correspond to three vertices of an equilateral triangle, and the operation forces in the first to fourth directions are the same. Vibration system. At least one of the first to third vibration isolation devices is
A vibration isolation block in which vibration is transmitted to and from the surface plate, a first air spring in the same horizontal plane as the vibration isolation block, and the first air spring between the vibration isolation block A horizontal unit including an outer frame sandwiching the
A fixed base, a second air spring in the same vertical plane as the fixed base, and a vertical unit portion including a support member that sandwiches the second air spring between the fixed base,
In the horizontal unit portion, a plurality of types identified by the number of the first air springs arranged in different directions in a horizontal plane with respect to the vibration isolation block are prepared, and the plurality of types of the horizontal springs are prepared. The vibration isolation system according to any one of claims 1 to 3, wherein any one of the unit units and the vertical unit unit are connected.   The horizontal unit portion includes at least three types in which the first air springs are respectively arranged in one direction, two directions, and four directions out of four directions orthogonal to each other in a horizontal plane with respect to the vibration isolation block. The vibration isolation system according to claim 4, which is prepared.   The removal according to claim 4 or 5, wherein the vertical unit portion of at least one of the first to third vibration isolation devices is configured such that a plurality of the second air springs can be arranged in series in the vertical direction. Vibration system.   When the horizontal unit part of at least one of the first to third vibration isolation devices is connected to the vertical unit part, the first air spring is more than the outer peripheral position of the second air spring. The vibration isolation system according to any one of claims 4 to 6, which is disposed inside the diameter. A surface plate on which the equipment is placed;
A first vibration isolator that causes an operating force in a first direction and a second direction different from the first direction to act on the surface plate in a horizontal plane;
In the horizontal plane, a second direction that causes the operating force to act on the surface plate in a third direction different from the first direction and the second direction and in a fourth direction different from the first to third directions. A vibration device;
The fifth direction, the sixth direction different from the fifth direction, the seventh direction different from the fifth direction and the sixth direction, and the fifth to seventh directions in the horizontal plane A third vibration isolator that operates in a different eighth direction,
The first to third vibration isolation devices for the surface plate are canceled so that the rotational force and the translational force applied to the surface plate due to the operating force from the first to third vibration isolation devices are canceled out. A vibration isolation system in which a position and directions and magnitudes of the first to eighth operating forces are determined.

Images