JP5128403B2 - 4-axis magnetic sensor - Google Patents

Description

  The present invention relates to a four-axis magnetic sensor.

  As a conventional technique, a magnet plate that is displaced in conjunction with the displacement of a shift lever, a first yoke and a second yoke that have a pair of magnetic plates that are plate-like magnetic bodies arranged facing each other, and a magnet There is known a position sensor including a magnetic detection element for measuring a change in magnetic flux density generated from a magnet of a plate (for example, Patent Document 1).

  This magnet plate is formed of a substantially fan-like plate-like member in which non-magnetic portions that are non-magnetic bodies and magnet bodies that are magnetic bodies are alternately arranged in the circumferential direction. The first and second yokes include first and second bridge portions that hold the pair of magnetic plates in a state where the first and second gaps, which are predetermined gaps, are provided.

According to this position sensor, the magnet plate is displaced by the displacement of the shift lever, and the magnetic flux density detected by the magnetic detection element changes stepwise according to the number of magnet bodies accommodated in the first or second yoke. Therefore, it becomes possible to detect the shift position of the shift lever based on the detected magnetic flux density.
JP 2007-40722 A

  However, according to the conventional position sensor, the change width of the magnetic flux density detected by the magnetic detection element is small, and there is a possibility of malfunction due to the influence of the external magnetic field.

  Accordingly, an object of the present invention is to provide a four-axis magnetic sensor that can stably detect the four-axis operation position without contact.

(1) Since the present invention is to achieve the above object, a push operation, before Symbol rotation operation of the rotation axis a push operation direction, and an operation unit is tilted operably supported, provided on the operating unit, the first A first magnetic field generating section for generating a first magnetic field in the region of the first magnetic field generating section, and a first magnetic field generating section provided opposite to the first magnetic field generating section so that a center coincides with the rotation axis. A first magnetic sensor comprising a first magnetic field detection unit and a second magnetic field detection unit having different magnetic field sensitivities based on the density, and a first directional component perpendicular to the rotation axis generated by the tilting operation And a second magnetic field generator for generating a second magnetic field in the second region, and when the operation unit is in an initial position, the second region is in the second region and the second region A second magnetic sensor provided at a position facing the magnetic field generating unit of A third magnetic field generating unit that generates a third magnetic field in a third region that is displaced based on a second direction component orthogonal to the first direction component, and the operation unit is in the initial position. And a third magnetic sensor provided at a position in the third region and facing the third magnetic field generator.

(2) In order to achieve the above object, the distance between the first magnetic field generator and the first magnetic sensor is applied to the first magnetic sensor as the first magnetic field generator is displaced. When the magnetic flux density of the first magnetic field is changed, the magnetic resistance value of the first magnetic detection unit is maintained saturated and the magnetism of the second magnetic detection unit is maintained. The four-axis magnetic sensor according to (1), which is a distance at which a change in resistance value occurs.

(3) In order to achieve the above object, the present invention provides the four-axis magnetic sensor according to (2), wherein the rotation operation is detected by the first magnetic detection unit.

(4) In order to achieve the above object, the present invention provides eight first magnetic detection units arranged in a ring shape so that the magnetoresistive elements are inclined by 45 °, and the second magnetic detection unit includes the first magnetic detection unit. Eight concentric rings are arranged on the outside of the magnetic detection unit 1 and are inclined by 45 °, and each of the first magnetic detection unit and the second magnetic detection unit includes four magnets. The four-axis magnetic sensor according to any one of (1) to (3), which includes two full bridge circuits each including a resistive element.

(5) In order to achieve the above object, the second magnetic sensor includes a first full bridge circuit formed by four magnetoresistive elements, and a magnetosensitive direction of the first full bridge circuit. A four-axis magnetic sensor according to (1), comprising: a second full-bridge circuit disposed so as to be 45 ° different from the magnetic sensitive direction.

(6) In order to achieve the above object, the present invention provides the four-axis magnetic sensor according to (5), wherein the third magnetic sensor has a configuration similar to that of the second magnetic sensor.

(7) In order to achieve the above object, the first magnetic field generation unit, the second magnetic field generation unit, and the third magnetic field generation unit are permanent magnets (1) to (6). A four-axis magnetic sensor according to any one of the above.

Since (8) The present invention to achieve the above object, a first direction support portion which is displaced in response to the first direction component based on the tilting operation, according to the second direction component based on the tilting operation The four-axis magnetic sensor according to any one of (1) to (7), further comprising: a second direction support portion that is displaced independently of the first direction support portion .

(9) Since the present invention is to accomplish the above object, a push operation, before Symbol rotation operation of the rotation axis a push operation direction, and an operation unit is tilted operably supported, provided on the operating unit, the first A first magnetic field generating section for generating a first magnetic field in the region of the first magnetic field generating section, and a first magnetic field generating section provided opposite to the first magnetic field generating section so that a center coincides with the rotation axis. A first magnetic sensor comprising a first magnetic field detector and a second magnetic field detector having different magnetic field sensitivities based on the density, and outputting a first output signal based on the first magnetic field generator; A second magnetic field generator that generates a second magnetic field in the second region by displacing based on a first direction component orthogonal to the rotation axis that is generated in association with the tilting operation; Is in the second region when in position and the second A second magnetic sensor provided at a position facing the field generation unit and outputting a second output signal based on the second magnetic field generation unit; and a second direction component orthogonal to the first direction component And a third magnetic field generator for generating a third magnetic field in the third region, and when the operation unit is in the initial position, the third region is in the third region, and A third magnetic sensor provided at a position opposite to the third magnetic field generation unit and outputting a third output signal based on the third magnetic field generation unit; the first output signal; and the second output A four-axis magnetic sensor comprising: a detection unit that detects an operation position of the operation unit based on a signal and the third output signal.

(10) In order to achieve the above object, the detection unit performs an angle conversion process on the first output signal, the second output signal, and the third output signal. 4 axis magnetic sensor is provided.

(11) In order to achieve the above object, the detection unit calculates a ratio of sensitivity values of the first magnetic field detection unit and the second magnetic field detection unit sensor, and the calculated ratio The 4-axis magnetic sensor according to (9), wherein the operation position of the operation unit is detected based on a value.

  According to such an invention, the operation positions of the four axes can be stably detected by non-contact.

  Hereinafter, an embodiment of a four-axis magnetic sensor of the present invention will be described in detail with reference to the drawings.

[Embodiment]
(Configuration of position sensor)
FIG. 1 is a schematic diagram of a position sensor according to an embodiment of the present invention. Assuming that the 4-axis magnetic sensor of the present invention is a position sensor, an XYZ coordinate system is defined as shown in FIG. 1, and the lower side of the Z-axis is positive. The four axes include an operation position (position) in the X-axis direction, an operation position in the Y-axis direction, an operation position in the Z-axis direction, and a rotation operation position with the Z-axis as a rotation axis.

  As shown in FIG. 1, the position sensor 1 includes a fixed part 2, a printed wiring board 3, an operation part 4, a Z-axis support part 5, an X-axis support part 6, and a Y-axis support part 7. In general, it is structured.

(Configuration of fixed part)
As shown in FIG. 1, the fixing portion 2 includes a pedestal 20 on which the printed wiring board 3 is fixed on the upper surface with bolts and the like, and a connecting portion 22 that protrudes upward from the center in the short direction of the pedestal 20. And a support portion 21 that is integral with the pedestal 20 via the base.

  As shown in FIG. 1, the pedestal 20 is similarly provided with a connecting portion 22 provided in the short direction at an upper portion in the opposite short direction.

  As shown in FIG. 1, the support portion 21 has a substantially square shape with an opening in the center, and an opening 23 for rotatably supporting the Y-axis support portion 7 on the opening side surface portion in the short side direction. Similarly, an opening 23 is provided in the side surface portion in the short side direction.

  In addition, as shown in FIG. 1, the support portion 21 is provided with an opening 24 for rotatably supporting the X-axis support portion 6 on the opening side surface portion in the longitudinal direction. Similarly, an opening 24 is also provided.

(Configuration of printed wiring board)
As shown in FIG. 1, the printed wiring board 3 has a rectangular shape, is formed of an insulating member, and is schematically configured to have a printed wiring formed of a conductive metal on the surface.

  The printed wiring board 3 has a magnetic sensor composed of a magnetoresistive element, which will be described later, mounted on the upper part, and the magnetic sensor is electrically connected to the printed wiring.

(Configuration of operation unit)
As shown in FIG. 1, the operation unit 4 is roughly configured to include an operation knob 40 having a substantially spherical shape, and a lever 41 provided on the operation knob 40 and having a substantially cylindrical shape.

  The lever 41 is inserted into an opening of a main body 50 having a cylindrical shape of the Z-axis support portion 5 described later so as to be able to move in parallel along the Z-axis. A shaft magnet 4A is provided.

(Configuration of Z-axis support part)
FIG. 2 is a top view of the position sensor according to the embodiment of the present invention. In FIG. 2, the fixing portion 2 is omitted.

  As shown in FIGS. 1 and 2, the Z-axis support portion 5 has a cylindrical shape, a main body 50 in which a lever 41 is inserted in an opening, an arch shape, and the main body 50 is provided on an upper portion of the arch shape. And a convex portion 52 provided on the side surfaces of both ends of the arch shape.

  As shown in FIG. 2, the convex portion 52 is inserted into an opening 62 provided in the X-axis support portion 6, and the Z-axis support portion 5 can rotate with respect to the X-axis support portion 6 with the convex portion 52 as a fulcrum. It is configured.

(Configuration of X-axis support part)
FIG. 3 is a side view of the position sensor according to the embodiment of the present invention as viewed from the Y-axis magnet side. In addition, the fixing | fixed part 2 is abbreviate | omitted in FIG.

  As shown in FIGS. 2 and 3, the X-axis support portion 6 has a rectangular shape, a main body 60 in which the tip of the Z-axis support portion 5 is inserted into an opening provided in the center, and an outer side in the short direction. An opening provided in the center of the side portion and inserted into the opening 24 of the support portion 21 of the fixed portion 2 and an opening provided in the side surface portion in the longitudinal direction and the protrusion portion 52 of the Z-axis support portion 5 is inserted. 62 and a holding portion 63 that holds the X-axis magnet 6A.

  The X-axis support portion 6 is provided to be rotatable with respect to the support portion 21 with the convex portion 61 as a fulcrum.

(Configuration of Y-axis support part)
FIG. 4 is a side view of the position sensor according to the embodiment of the present invention as viewed from the X-axis magnet side. In addition, the fixing | fixed part 2 is abbreviate | omitted in FIG.

  As shown in FIG. 4, the Y-axis support portion 7 is inserted into the main body 70 having an arch shape and the main body 50 of the Z-axis support portion 5, and guides the tilting operation in the X-axis direction of the operation portion 4 in FIG. 1. The X-axis guide 71 shown in the figure and the convex part 72 provided in the both ends of the arch-shaped front-end | tip are comprised roughly.

  The convex portion 72 is inserted into the opening 23 of the fixed portion 2, and the Y-axis support portion 7 is provided to be rotatable with respect to the support portion 21 with the convex portion 72 as a fulcrum.

  When the operation unit 4 is tilted, the X-axis support unit 6 responds to the Y-axis direction component (second direction component) according to the X-axis direction component (first direction component) based on the tilt operation. Since the Y-axis support part 7 is independently displaced and the operation in the Z-axis direction can be performed independently, the operation position of the operation part 4 on the X-axis, Y-axis, and Z-axis can be detected more accurately. Can do.

(Configuration of Z-axis MR sensor)
FIG. 5 is a schematic diagram showing the relationship between the Z-axis MR sensor and the Z-axis magnet according to the embodiment of the present invention. A Z-axis MR (Magneto Resistance) sensor 500 is provided on the printed wiring board 3 so as to face the Z-axis magnet 4A as shown in FIG.

  For example, the Z-axis magnet 4A is a permanent magnet having a cylindrical shape, is magnetized in a direction perpendicular to the rotation axis m, and has a magnetic field formed from the N pole toward the S pole. Note that the shape of the Z-axis magnet 4A is not limited to this, and may be rectangular.

  As shown in FIG. 5, the lever 41 of the operation unit 4 rotates together with the Z-axis magnet 4 </ b> A about the rotation axis m with respect to the main body 50 of the Z-axis support unit 5. It is displaced in the direction, that is, the arrows a and b which are the push operation direction of the operation unit 4. In addition, d0 shown in FIG. 5 is an initial position of the operation unit 4, and d1 and d2 are examples of operation positions where the Z-axis magnet 4A is displaced by a push operation on the operation unit 4.

  FIG. 6 is a schematic diagram showing the positional relationship between the rotational operation position of the operation unit and the Z-axis MR sensor according to the embodiment of the present invention. In FIG. 6, n0 indicates the initial position of the operation unit 4 with respect to rotation, and the rotation angle θ of the lever 41 is positive in the direction of arrow c and negative in the direction of arrow d with respect to the initial position n0.

  The Z-axis magnet (first magnetic field generation unit) 4A is a permanent magnet having a cylindrical shape, and is magnetized with the N pole on the lower side and the S pole on the upper side, and the Z-axis MR sensor 500 has a magnetic field (first magnetic field). ) Is provided in the operation unit 4 so as to form a magnetic field from the N-pole toward the S-pole in a region (first region) where the) can be detected.

  N <b> 1 and n <b> 2 illustrated in FIG. 6 indicate examples of the rotation operation position of the operation unit 4. Further, the center of the Z-axis magnet 4A is provided so as to coincide with the rotation axis m.

  FIG. 7 is a plan view of the Z-axis MR sensor according to the embodiment of the present invention. As shown in FIG. 7, the Z-axis MR sensor 500 has a rotation axis on the same printed circuit board 3 such that the magnetic sensing surfaces for sensing the change in the magnetic field formed by the Z-axis magnet 4A are inclined by 45 °. Eight magnetoresistive elements M11 to M14 and M21 to M24 are provided in a ring shape around m.

  In addition, eight magnetoresistive elements M31 to M34 and M41 to M44 are provided outside the magnetoresistive elements M11 to M14 and M21 to M24, and are arranged in an annular shape around the rotation axis m so as to be inclined by 45 °. ing.

  Here, these magnetoresistive elements M11 to M14, M21 to M24, M31 to M34, and M41 to M44 are composed of a magnetoresistive film mainly composed of a ferromagnetic metal, and the resistance value thereof changes according to the applied magnetic field. In addition, when a magnetic flux density exceeding a predetermined size is applied, the resistance value is saturated.

  Then, as the magnetoresistive elements M11 to M14, M21 to M24, M31 to M34, and M41 to M44 go outward, the ends of a plurality of linear films formed longer are connected alternately. A pattern is formed.

  In the Z-axis MR sensor 500, the magnetoresistive elements forming the magnetoresistive elements M11 to M14, M21 to M24, M31 to M34, and M41 to M44 are set to have a constant thickness. The line widths of the magnetoresistive films that form the eight magnetoresistive elements M31 to M34 and M41 to M44 arranged on the outer side are the same as the magnetoresistive elements that form the eight magnetoresistive elements M11 to M14 and M21 to M24 arranged on the inner side. It is set to be thicker than the line width of the film.

  Thus, the Z-axis MR sensor 500 is applied with eight magnetoresistive elements M11 to M14 and M21 to M24 arranged on the inner side and eight magnetoresistive elements M31 to M34 and M41 to M44 arranged on the outer side. The rate of change in resistance with respect to the magnetic flux density of the magnetic field is different from each other.

  In the Z-axis MR sensor 500, the magnetic detection unit for detecting the change in the magnetic vector and magnetic flux density of the magnetic field is a first magnetic element composed of eight magnetoresistive elements M11 to M14 and M21 to M24 disposed therein. It is comprised by two magnetic detection parts of a detection part and the 2nd magnetic detection part which consists of eight magnetoresistive elements M31-M34 and M41-M44 arrange | positioned outside.

  FIG. 8A is an equivalent circuit diagram relating to the first magnetic detectors (M11 to M14) according to the embodiment of the present invention, and FIG. 8B relates to the first magnetic detectors (M21 to M24). It is an equivalent circuit diagram. (A) shows an equivalent circuit diagram of the magnetoresistive elements M11 to M14 of the first magnetic detection unit 501, and (b) shows an equivalent circuit diagram of the magnetoresistive elements M21 to M24 of the first magnetic detection unit 501. Show.

  As shown in FIG. 8A, the first magnetic detection unit 501 has one full bridge circuit formed by the magnetoresistive elements M11 to M14, and as shown in FIG. 8B, the magnetoresistive elements M21 to M21. Another full bridge circuit is formed by M24.

In this circuit, a constant voltage _Vcc is applied between the magnetoresistive elements M11 and M13 and between the magnetoresistive elements M21 and M23, and between the magnetoresistive elements M12 and M14, and between the magnetoresistive elements M22, M22, Between M24, each is grounded.

  This circuit is provided with a differential amplifier 502 that takes in the midpoint potential between the magnetoresistive elements M11 and M12 and the midpoint potential between the magnetoresistive elements M13 and M14 and performs differential amplification. ing.

  Further, this circuit is provided with a differential amplifier 503 that takes in the midpoint potential between the magnetoresistive elements M21 and M22 and the midpoint potential between the magnetoresistive elements M23 and M24 and performs differential amplification. ing.

  In this circuit, first differential sine signals that continuously change in accordance with changes in the magnetic field applied to the magnetoresistive elements M11 to M14 and M21 to M24 as the differential amplification outputs by the differential amplifiers 502 and 503. V11 and cosine signal V12 are output, respectively. In the following description, the first sine signal V11 and the cosine signal V12 are abbreviated as first output signals V11 and V12.

  FIG. 9A is an equivalent circuit diagram relating to the second magnetic detectors (M31 to M34) according to the embodiment of the present invention, and FIG. 9B relates to the second magnetic detectors (M41 to M44). It is an equivalent circuit diagram. (A) shows an equivalent circuit diagram of the magnetoresistive elements M31 to M34 of the second magnetic detector 504, and (b) shows an equivalent circuit diagram of the magnetoresistive elements M41 to M44 of the second magnetic detector 504. Show.

  The circuit comprising the second magnetic detector 504 of the Z-axis MR sensor 500 has a circuit configuration similar to that of the first magnetic detector 501 as shown in FIGS.

  That is, in this circuit, one full bridge circuit is configured by the four magnetoresistive elements M31 to M34, and another full bridge circuit is configured by the four magnetoresistive elements M41 to M44.

In this circuit, a constant voltage _Vcc is applied between the magnetoresistive elements M31 and M33 and between the magnetoresistive elements M41 and M43, and between the magnetoresistive elements M32 and M34, and the magnetoresistive element M42. , M44 are grounded.

  This circuit is provided with a differential amplifier 505 that takes in the midpoint potential between the magnetoresistive elements M31 and M32 and the midpoint potential between the magnetoresistive elements M33 and M34 and performs differential amplification. ing.

  Further, this circuit is provided with a differential amplifier 506 that takes in the midpoint potential between the magnetoresistive elements M41 and M42 and the midpoint potential between the magnetoresistive elements M43 and M44, respectively, and performs differential amplification. ing.

  In this circuit, as each differential amplification output by the differential amplifiers 505 and 506, a second sine signal that continuously changes in accordance with changes in the magnetic field applied to the magnetoresistive elements M31 to M34 and M41 to M44. V21 and cosine signal V22 are output, respectively. Hereinafter, the second sine signal V21 and the cosine signal V22 are abbreviated as second output signals V21 and V22.

(Configuration of X-axis MR sensor)
FIG. 10 is a schematic diagram showing the relationship between the X-axis magnet and the X-axis MR sensor according to the embodiment of the present invention. FIG. 10 shows the X-axis MR sensor 600 as an equivalent circuit diagram.

  The X-axis magnet (second magnetic field generating unit) 6A is a permanent magnet having a cylindrical shape, and is magnetized with the N pole on the lower side and the S pole on the upper side, and the X-axis MR sensor 600 has a magnetic field (second magnetic field). ) Can be detected (second region) in the holding portion 63 of the X-axis support portion 6 so as to form a magnetic field from the N pole toward the S pole.

  When the operation unit 4 is operated in the positive direction of the X axis, the X axis magnet 6A is displaced in the left side shown in FIG. 10, that is, in the negative direction of the X axis, and the operation unit 4 is operated in the negative direction of the X axis. Then, it is displaced to the right side shown in FIG. 10, that is, the positive direction of the X axis. The state shown in FIG. 10 is the initial position of the X-axis support portion 6.

  As shown in FIG. 10, the third magnetic detection unit 601 includes one full bridge circuit (first full bridge circuit) formed by the magnetoresistive elements M51 to M54, and is formed by the magnetoresistive elements M51 to M54. Another full bridge circuit (second full bridge circuit) is formed by the magnetoresistive elements M61 to M64 arranged so as to be 45 ° different from the magnetic sensing direction of the full bridge circuit.

  The magnetoresistive elements M51 to M54 and M61 to M64 are made of a magnetoresistive film containing a ferromagnetic metal as a main component, and the resistance value thereof changes according to the applied magnetic field.

In this circuit, a constant voltage _Vcc is applied between the magnetoresistive elements M51 and M53 and between the magnetoresistive elements M61 and M63, and between the magnetoresistive elements M52 and M54, and between the magnetoresistive elements M62, M62, Between M64, each is grounded.

  This circuit is provided with a differential amplifier 603 that takes in the midpoint potential between the magnetoresistive elements M51 and M52 and the midpoint potential between the magnetoresistive elements M53 and M54 and performs differential amplification. ing.

  Further, this circuit is provided with a differential amplifier 602 that takes in the midpoint potential between the magnetoresistive elements M61 and M62 and the midpoint potential between the magnetoresistive elements M63 and M64 and performs differential amplification. ing.

  In this circuit, a third cosine signal that continuously changes in accordance with changes in the magnetic field applied to the magnetoresistive elements M51 to M54 and M61 to M64 as the differential amplification outputs by the differential amplifiers 602 and 603. V31 and sine signal V32 are output, respectively. Hereinafter, the third cosine signal V31 and the sine signal V32 are abbreviated as third output signals V31 and V32.

(Configuration of Y-axis MR sensor)
FIG. 11 is a schematic diagram showing the relationship between the Y-axis magnet and the Y-axis MR sensor according to the embodiment of the present invention. FIG. 11 shows the Y-axis MR sensor 700 as an equivalent circuit diagram.

  The magnetoresistive elements M71 to M74 and M81 to M84 are made of a magnetoresistive film containing a ferromagnetic metal as a main component, and the resistance value thereof changes according to the applied magnetic field.

  The Y-axis magnet (third magnetic field generation unit) 7A is a permanent magnet having a cylindrical shape, and is magnetized with the lower side being an N pole and the upper side being an S pole, and the Y-axis MR sensor 700 has a magnetic field (third magnetic field). ) Can be detected (third region) so as to form a magnetic field from the N pole toward the S pole. The holding portion 73 of the Y-axis support portion 7 is provided.

  When the operation unit 4 is operated in the positive direction of the Y axis, the Y-axis magnet 7A is displaced in the left side shown in FIG. 11, that is, in the negative direction of the Y axis, and the operation unit 4 is operated in the negative direction of the Y axis. 11 is displaced in the right direction shown in FIG. 11, that is, in the positive direction of the Y axis. Note that the state shown in FIG. 11 is the initial position of the Y-axis support portion 7.

  As shown in FIG. 11, the fourth magnetic detection unit 701 includes one full bridge circuit (first full bridge circuit) formed by the magnetoresistive elements M71 to M74, and is formed by the magnetoresistive elements M71 to M74. Another full bridge circuit (second full bridge circuit) is formed by the magnetoresistive elements M81 to M84 arranged so as to be 45 ° different from the magnetic sensing direction of the full bridge circuit.

  The magnetoresistive elements M71 to M74 and M81 to M84 are made of a magnetoresistive film containing a ferromagnetic metal as a main component, and the resistance value thereof changes according to the applied magnetic field.

In this circuit, a constant voltage _Vcc is applied between the magnetoresistive elements M71 and M73 and between the magnetoresistive elements M81 and M83, respectively, and between the magnetoresistive elements M72 and M74, and between the magnetoresistive elements M82, M82, Between M84, each is grounded.

  This circuit is provided with a differential amplifier 703 that takes in the midpoint potential between the magnetoresistive elements M71 and M72 and the midpoint potential between the magnetoresistive elements M83 and M84 and performs differential amplification. ing.

  Further, this circuit is provided with a differential amplifier 702 that takes in the midpoint potential between the magnetoresistive elements M81 and M82 and the midpoint potential between the magnetoresistive elements M83 and M84, respectively, and performs differential amplification. ing.

  In this circuit, a fourth cosine signal that continuously changes in accordance with changes in the magnetic field applied to the magnetoresistive elements M71 to M74 and M81 to M84 as the differential amplification outputs by the differential amplifiers 702 and 703. V41 and sine signal V42 are respectively output. Hereinafter, the fourth cosine signal V41 and the sine signal V42 are abbreviated as fourth output signals V41 and V42.

  FIG. 12 is a block diagram relating to the position sensor according to the embodiment of the present invention. The X-axis MR sensor 600, the Y-axis MR sensor 700, and the Z-axis MR sensor 500 of the position sensor 1 are connected to a control unit (detection unit) 90 as shown in FIG.

  The controller 90 detects the rotation operation position and the push operation position of the operation unit 4 based on the first output signals V11 and V12 and the second output signals V21 and V22. Further, the control unit 90 detects the operation position in the X-axis direction of the operation unit 4 based on the third output signals V31 and V32, and the Y-axis direction of the operation unit 4 based on the fourth output signals V41 and V42. The operation position of is detected.

  As shown in FIG. 12, the control unit 90 controls the controlled device 91, and includes first output signals V11 and V12, second output signals V21 and V22, third output signals V31 and V32, and The controlled device 91 is controlled based on the fourth output signals V41 and V42.

(Operation)
Hereinafter, operations related to the position sensor according to the present embodiment will be described in detail with reference to the drawings. First, a method for detecting the push operation position and the rotation operation position on the Z axis will be described.

(Detection of push operation position and rotation operation position on the Z axis)
First, the first sine signal V11 and the first cosine signal V12 output from the first magnetic detection unit 501 can be expressed by the following (1) and (2), respectively.

  In these (1) and (2), V1 represents the sensor sensitivity (the magnitude of the output voltage) of the first magnetic detection unit 501, and θ represents the angle from the initial position n0 of the Z-axis magnet 4A. Show.

V11 = V1sin θ (1)
V12 = V1 cos θ (2)
On the other hand, the second sine signal V21 and the second cosine signal V22 output from the second magnetic detection unit 504 can be expressed by the following (3) and (4), respectively.

  In (3) and (4), V2 represents the sensor sensitivity (the magnitude of the output voltage) of the second magnetic detection unit 504.

V21 = V2sin θ (3)
V22 = V2 cos θ (4)
Incidentally, the values V1 and V2 of the sensor sensitivity of the first and second magnetic detectors 501 and 504 are the magnitudes of the resistance values of the magnetoresistive elements constituting the first and second magnetic detectors 501 and 504, respectively. It is a value that changes based on the length.

  Here, as described above, the resistance values of the magnetoresistive elements constituting the first and second magnetic detectors 501 and 504 change in accordance with the applied magnetic field, and the magnetic flux has a predetermined magnitude. When the density is applied, the value is saturated.

  That is, the sensor sensitivities V1 and V2 change according to the magnitude of the magnetic flux density of the magnetic field applied to the first and second magnetic detection units 501 and 504, and the magnetic flux density exceeding a predetermined magnitude is The value is saturated when applied to the first and second magnetic detectors 501 and 504.

  Incidentally, as described above, each of the first and second magnetic detectors 501 and 504 is composed of two types of magnetoresistive elements having different resistance change rates with respect to the magnetic flux density of the applied magnetic field. Although the circuit configuration is the same, the change modes of the sensor sensitivity values V1 and V2 accompanying the change in the magnetic flux density of the magnetic field applied to the Z-axis MR sensor 500 are slightly different from each other.

  Therefore, the control unit 90 of the position sensor 1 according to the present embodiment firstly calculates the sensor sensitivity value V1 of the first magnetic detection unit 501 from the first output signals V11 and V12 based on the following equation (5). And the sensor sensitivity value V2 of the second magnetic detection unit 504 is calculated from the second output signals V21 and V22 based on the following equation (6).

V1 = √ (V11 ² + V12 ² ) (5)
V2 = √ (V21 ² + V22 ² ) (6)
Then, the control unit 90 uses the differences in the change modes of the sensor sensitivities V1 and V2 of the first and second magnetic detection units 501 and 504 in the arrows a and b of the Z-axis MR sensor 500. The position in the direction shown is detected, and from this, the push operation position of the operation unit 4 is detected.

  FIG. 13A is a diagram relating to the rotation axis direction and sensor sensitivity according to the embodiment of the present invention. Subsequently, referring to FIG. 13A, the respective sensor sensitivities V1 of the first and second magnetic detectors 501 and 504 accompanying the change in magnetic flux density of the magnetic field applied to the Z-axis MR sensor 500, A state of change of V2 will be described.

  Here, FIG. 13A shows the position of the Z-axis magnet 4A in the direction indicated by the arrows a and b and the sensor sensitivity values V1 and V2 of the first and second magnetic detectors 501 and 504, respectively. These are graphs showing the relationship between the horizontal axis and the vertical axis, respectively.

  In the graph of FIG. 13A, the solid line indicates the change tendency of the sensor sensitivity value V1 of the first magnetic detection unit 501, and the alternate long and short dash line indicates the change of the sensor sensitivity value V2 of the second magnetic detection unit 504. Each trend is shown.

  For example, as shown in FIG. 5, the Z-axis magnet 4A is moved from the operation position d2 separated from the initial position d0 in the direction indicated by the arrow b, that is, from the position sufficiently separated from the Z-axis MR sensor 500. And move closer to the Z-axis MR sensor 500.

  At this time, the magnetic flux density of the magnetic field applied to the Z-axis MR sensor 500 changes in a gradually increasing manner, and as shown in FIG. 13A, the first and second magnetic detectors 501 and 504 are changed. Each of the sensor sensitivity values V1 and V2 gradually increases and gradually saturates to reach a constant value.

  Here, when the change modes of the respective values V1 and V2 of the sensor sensitivity are compared, first, after the sensor sensitivity value V1 of the first magnetic detection unit 501 is saturated, the second magnetic detection is performed in a subsequent manner. The sensor sensitivity value V2 of the unit 504 is saturated.

  In the position sensor 1 according to the present embodiment, the distance between the Z-axis magnet 4A and the Z-axis MR sensor 500 is adjusted as follows. That is, when the Z-axis magnet 4A moves from the initial position d0 to the operation position d1 and the magnetic flux density of the magnetic field applied to the Z-axis MR sensor 500 changes, the sensor sensitivity of the first magnetic detection unit 501 is increased. The value V1 is maintained at a saturated state, and is set to a distance at which a change occurs in the sensor sensitivity value V2 of the second magnetic detection unit 504.

  In other words, the resistance values of the magnetoresistive elements M11 to M14 and M21 to M24 constituting the first magnetic detection unit 501 are maintained in a saturated state, and the magnetoresistive elements constituting the second magnetic detection unit 504 The distances at which the resistance values of M31 to M34 and M41 to M44 change are set.

  FIG.13 (b) is a graph which shows the relationship between the position of the axial direction of the Z-axis magnet which concerns on embodiment of this invention, and each value of the 1st and 2nd magnetic detection part of a Z-axis MR sensor. .

  Thus, as shown in FIG. 13B, when the position of the Z-axis magnet 4A in the direction indicated by the arrows a and b changes from the initial position d0 to the operation position d1, the first magnetic detection unit 501 The sensor sensitivity value V1 indicates a constant value V1max, and the sensor sensitivity value V2 of the second magnetic detection unit 504 increases from V2 (d0) to V2 (d1).

  By the way, when the position of the Z-axis magnet 4A changes between the initial position d0 and the operation position d1, the sensor sensitivity value V2 of the second magnetic detection unit 504 changes according to the position of the Z-axis magnet 4A. Therefore, for example, it is considered that the position of the Z-axis magnet 4A in the direction indicated by the arrows a and b can be detected based on the sensor sensitivity value V2.

  However, as described above, the magnetoresistive elements M31 to M34 and M41 to M44 constituting the second magnetic detector 504 including the magnetoresistive elements M11 to M14 and M21 to M24 constituting the first magnetic detector 501 are included. In general, since its resistance value changes under the influence of its own temperature or the like, its sensor sensitivity value V2 also changes as the temperature of the second magnetic detection unit 504 changes.

  FIG. 14A is a graph relating to a temperature change of the Z-axis MR sensor according to the embodiment of the present invention. FIG. 14A shows the temperature change of the second magnetic detection unit 504 according to the operation position of the Z-axis magnet 4A.

  Specifically, for example, when the temperature of the second magnetic detection unit 504 decreases with a decrease in the temperature of the Z-axis MR sensor 500, as shown by a two-dot chain line in FIG. The sensor sensitivity value V2 shifts in the direction of increasing overall. Therefore, when a change occurs in the sensor sensitivity value V2, the change is caused by the temperature change of the magnetoresistive element or the position of the Z-axis magnet 4A in the direction indicated by the arrows a and b. It is difficult to distinguish whether it is caused by a change, and it becomes difficult to detect the position of the Z-axis magnet 4A based on the sensor sensitivity value V2.

  Therefore, in the position sensor 1 according to the present embodiment, the influence of such a temperature change of the magnetoresistive element is reflected in the respective sensor sensitivity values V1 and V2 of the first and second magnetic detectors 501 and 504. Paying attention to this, by calculating the values of these ratios, a value in which the influence of the temperature change of the magnetoresistive element is offset is obtained.

  Specifically, the control unit 90 calculates a value Vr12 (= V1 / V2) obtained by dividing the sensor sensitivity value V1 of the first magnetic detection unit 501 by the sensor sensitivity value V2 of the second magnetic detection unit 504. The position of the Z-axis magnet 4A in the direction indicated by the arrows a and b, in other words, the operation position of the operation unit 4 is detected based on the calculated sensor sensitivity ratio value Vr12.

  FIG. 14B is a graph showing the relationship between the axial position of the Z-axis magnet and the value of the sensor sensitivity ratio of the first and second magnetic detectors according to the embodiment of the present invention.

  FIG. 14 (b) shows the relationship between the position of the Z-axis magnet 4A in the direction indicated by arrows a and b and the sensor sensitivity ratio value Vr12 with respect to the horizontal axis and the vertical axis, respectively. .

  As shown in FIG. 14B, the sensor sensitivity ratio value Vr12 gradually changes if the position of the Z-axis magnet 4A in the direction indicated by the arrows a and b changes from the initial position d0 to the operation position d1. It changes in the mode to do.

  Here, in this position sensor 1, the sensor sensitivity ratio value Vr12 (d0) when the Z-axis magnet 4A is located at the initial position d0 and the operation position d1 relative to the sensor sensitivity ratio value Vr12. An intermediate value Vrd (= (Vr12 (d0) + Vr12 (d1)) / 2) of the value Vr12 (d1) of the sensor sensitivity ratio at the time is set as a threshold value.

  Then, the control unit 90 of the position sensor 1 calculates a sensor sensitivity ratio value Vr12 from the first output signals V11 and V12 and the second output signals V21 and V22, and then based on the sensor sensitivity ratio value Vr12. Thus, the operation position of the operation unit 4 is detected as follows.

(1) When the sensor sensitivity ratio value Vr12 is greater than or equal to the threshold value Vrd.
In this case, the position of the Z-axis magnet 4A in the direction indicated by the arrows a and b is the initial position d0, and the control unit 90 determines that the operation position of the operation unit 4 is the initial position d0.

(2) When the sensor sensitivity ratio value Vr12 is smaller than the threshold value Vrd.
In this case, the position of the Z-axis magnet 4A in the direction indicated by the arrows a and b is the operation position d1, and the control unit 90 determines that the operation position of the operation unit 4 is the operation position d1.

  In addition, said (1) and (2) are examples, Comprising: You may make it the control part 90 detect more push operation positions based on the threshold value set finely.

  Then, the detection method of the rotation operation position of the operation part 4 is demonstrated.

  In the position sensor 1 according to the present embodiment, as described above, when the position of the Z-axis magnet 4A in the direction indicated by the arrows a and b changes between the initial position d0 and the operation position d1, the first sensor The sensor sensitivity value V1 of the magnetic detection unit 501 maintains a saturated state.

  That is, in the first sine signal V11 and the first cosine signal V12 output from the first magnetic detection unit 501, the magnetic flux density of the magnetic field applied from the Z-axis magnet 4A to the Z-axis MR sensor 500 is large. In other words, the operation position of the operation unit 4 is not affected.

  Therefore, the position sensor 1 according to the present embodiment detects and controls the rotation operation of the Z-axis magnet 4A in the directions indicated by the arrows a and b based on the first sine signal V11 and the first cosine signal V12. Accordingly, the unit 90 detects the rotational operation position of the operation unit 4.

  FIG. 15A is a graph showing the relationship between the rotation angle θ and the output signal according to the embodiment of the present invention. FIG. 15A is a graph showing the relationship between the rotation angle θ of the Z-axis magnet 4A in the direction indicated by the arrows a and b and the first output signals V11 and V12.

  As shown in FIG. 15A, the first sine signal V11 and the first cosine signal V12 are respectively sinusoidal according to the rotation angle θ of the Z-axis magnet 4A in the directions indicated by the arrows a and b. And it changes to cosine wave shape.

  FIG. 15B is a graph showing the relationship between the arc tangent values of the first sine signal and the first cosine signal according to the embodiment of the present invention. FIG. 15B shows a change tendency of the arctangent value Vat (= arctan (V12 / V11)) calculated by the control unit 90 based on the first sine signal V11 and the first cosine signal V12. .

  As shown in FIG. 15B, this arc tangent value Vat repeatedly changes from a positive value to a negative value according to the rotation angle, and the value changes in a zigzag pattern.

  In the position sensor 1 according to the present embodiment, the relative positions in the directions indicated by the arrows a and b between the Z-axis magnet 4A and the Z-axis MR sensor 500 are adjusted as follows. .

  That is, as shown in FIG. 6, when the Z-axis magnet 4A is rotated from the initial position n0 to the second operation position n2 through the operation position n1, the arctangent value Vat is changed from the positive value Vat1. The relative position between them is adjusted so as to change to a negative value Vat2 linearly after passing through a value of “0”.

  Here, in this position sensor 1, the half value (Vat1 / 2) of the positive value Vat1 and the half value (Vat2 / 2) of the negative value Vat2 with respect to the arctangent value Vat are threshold values. As each.

  Then, the control unit 90 of the position sensor 1 calculates the arctangent value Vat from the first sine signal V11 and the first cosine signal V12, and then operates the operation unit based on the tangent value Vat as follows. 4 rotational operation positions are detected.

(1) When it is determined that the arctangent value Vat is equal to or greater than the threshold value (Vat1 / 2).
In this case, the rotation position of the Z-axis magnet 4A in the direction indicated by the arrows a and b is the initial position n0, and the control unit 90 determines that the operation position of the operation unit 4 is the initial position n0.

(2) When it is determined that the arctangent value Vat is a value smaller than the threshold value (Vat1 / 2) and is equal to or larger than the threshold value (Vat2 / 2).
In this case, the operation position in the direction indicated by the arrows a and b of the Z-axis magnet 4A is the first operation position n1, and the control unit 90 determines that the operation position of the operation unit 4 is the first operation position n1. It is determined that

(3) When it is determined that the arctangent value Vat is smaller than the threshold value (Vat2 / 2).
In this case, the rotation position of the Z-axis magnet 4A in the direction indicated by the arrows a and b is the second operation position n2, and the control unit 90 determines that the operation position of the operation unit 4 is the second operation position n2. It is determined that

  In addition, said (1)-(3) is an example, Comprising: You may make it the control part 90 detect more rotational operation positions based on the threshold value set finely.

  The position sensor 1 is a case where the resistance values of the magnetoresistive elements M11 to M14, M21 to M24, M31 to M34, and M41 to M44 are changed by the influence of the temperature or the like of the Z-axis MR sensor 500 as described above. However, the rotational position indicated by the arrows a and b of the Z-axis magnet 4A can also be detected.

(About the detection of the operation position on the X axis)
Next, detection of the operation position on the X axis will be described.

  FIG. 16A is a graph showing the relationship between the distance of the X-axis magnet and the output voltage according to the embodiment of the present invention. The horizontal axis in FIG. 16 (a) indicates the operation position along the X axis of the operation unit 4. The center of the X axis magnet 6A shown in FIG. The output voltage output from the X-axis MR sensor 600 is shown.

  As described above, the third magnetic detection unit 601 constituting the X-axis MR sensor 600 outputs the third output signals V31 and V32 based on the operation position of the X-axis magnet 6A.

  The detection of the operation position of the X-axis magnet 6A can be detected by any one of the above-described third output signals V31 and V32 shown in FIG.

  However, as described above, the resistance values of the magnetoresistive elements M51 to M54 and M61 to M64 may change due to the temperature or the like, and the X-axis MR sensor 600 may erroneously detect the operation position.

  Therefore, the control unit 90 performs the angle conversion described above, and converts the output so as not to be affected by temperature or the like.

FIG. 16B is a graph relating to the arc tangent value and the angle θ _{X according} to the embodiment of the present invention. FIG. 16B shows a change tendency of the arctangent value Vbt (= arctan (V32 / V31) / 2) calculated based on the third cosine signal V31 and the third sine signal V32.

  The control unit 90 calculates the arctangent value Vbt based on the third outputs V31 and V32 output according to the position of the X-axis magnet 6A based on the operation position of the operation unit 4, that is, the first value of the X-axis MR sensor 600. The angle with the magnetic field that crosses one magnetic detection unit 601 is calculated.

The magnetoresistive value depends on the angle θ _X of the magnetic field across the magnetoresistive element, but does not depend on the forward or reverse direction when the angle θ _X is the same, so the angle converted value is divided by two. Yes.

The control unit 90 calculates the arc tangent value Vbt shown in FIG. 16B, that is, the angle θ _X , calculates the operation angle of the operation unit 4 from the calculated angle θ _X, and determines the operation position of the operation unit 4. To detect. Furthermore, the control unit 90 can accurately detect the operation position even if the magnetoresistive elements M51 to M54 and M61 to M64 change due to the influence of temperature or the like by calculating the arctangent value Vbt.

(About detection of the operation position on the Y axis)
Next, detection of the operation position on the Y axis will be described.

  FIG. 17A is a graph showing the relationship between the distance of the Y-axis magnet and the output voltage according to the embodiment of the present invention. In FIG. 17A, the horizontal axis indicates the operation position along the Y axis of the operation unit 4, and the center of the Y axis magnet 7A shown in FIG. The output voltage output from the Y-axis MR sensor 700 is shown.

  As described above, the fourth magnetic detection unit 701 constituting the Y-axis MR sensor 700 outputs the fourth output signals V41 and V42 based on the operation position of the Y-axis magnet 7A.

  The operation position of the Y-axis magnet 7A can be detected by any one of the above-described fourth output signals V41 and V42.

  However, as described above, the Y-axis MR sensor 700 may change the resistance values of the magnetoresistive elements M71 to M74 and M81 to M84 due to the influence of temperature or the like, and may erroneously detect the operation position.

  Therefore, the control unit 90 performs the angle conversion described above, and converts the output so as not to be affected by temperature or the like.

FIG. 17B is a graph relating to the arc tangent value and the angle θ _{Y according} to the embodiment of the present invention. FIG. 17B shows a change tendency of the arctangent value Vct (= arctan (V42 / V41) / 2) calculated based on the fourth cosine signal V41 and the fourth sine signal V42.

  The control unit 90 calculates the arc tangent value Vct based on the fourth outputs V41 and V42 output according to the position of the Y-axis magnet 7A based on the operation position of the operation unit 4, that is, the first value of the Y-axis MR sensor 700. The angle with the magnetic field that crosses the magnetic detection unit 701 is calculated.

  The angle-converted value is divided by 2 for the reason described above.

Control unit 90, the arctangent value Vct shown in FIG. 17 (b), i.e., calculates the angle theta _Y, and calculates the operation angle of the operating part 4 from the calculated angle theta _Y, the position of the operating section 4 To detect. Further, the control unit 90 can accurately detect the operation position even if the magnetoresistive elements M71 to M74 and M81 to M84 change due to the influence of temperature or the like by calculating the arctangent value Vct.

  Further, the control unit 90 can calculate the operation position of the operation unit 4 independently for the X axis and the Y axis, and can accurately detect the two-dimensional operation position of the operation unit 4 by combining them.

(effect)
(1) According to the position sensor 1 in the above-described embodiment, the operation position based on the three axes of the X axis, the Y axis, and the Z axis and the operation position based on the rotation operation around the Z axis are operated in total of four axes. The position can be detected.

(2) According to the position sensor 1 in the above-described embodiment, the magnetic resistance value of the first magnetic detection unit 501 constituting the Z-axis MR sensor 500 is saturated based on the applied magnetic field. The operation position based on the rotation operation and the push operation can be detected.

(3) According to the position sensor 1 in the above-described embodiment, the first and second magnetic detectors 501 and 504 having the configuration in which the magnetic sensing surface of the magnetoresistive element is rotated by 45 ° are arranged, and the output thereof is further provided. Since the operation position of the operation unit 4 is determined using the arc tangent value obtained by converting the angle with respect to the signal, it is possible to prevent malfunction due to a change in the resistance value of the magnetoresistive element due to a temperature change or the like.

(4) According to the position sensor 1 in the above-described embodiment, the Z-axis MR sensor 500 has a shape in which the magnetoresistive elements are arranged in an annular manner in an inclined manner of 45 °, so that it is limited. The magnetoresistive element can be effectively arranged at the place, and the detection accuracy of the operation position can be improved.

(5) According to the position sensor 1 in the above-described embodiment, a plurality of operation positions can be detected in a non-contact manner, so that performance can be maintained over a long period of time.

(6) According to the position sensor 1 in the above-described embodiment, the tilting operation in the X-axis direction and the tilting operation in the Y-axis direction of the operation unit 4 move independently without interfering with each other. A known MR sensor can be used as the sensor 600 and the Y-axis MR sensor 700, and costs can be reduced.

(7) Since the position sensor 1 in the above-described embodiment can output the operation position independently of the X-axis direction and the Y-axis direction, it can detect the accurate operation position with little crosstalk.

(8) According to the position sensor 1 in the above-described embodiment, since the member that generates the magnetic field can be formed of a permanent magnet, the cost can be suppressed.

(9) According to the position sensor 1 in the above-described embodiment, an integrated circuit (IC) including the control unit 90 is connected to an ECU (Electronic Control Unit) of the vehicle, and various types of communication are performed via the ECU. Information input to the non-control device 91 can be performed.

(10) According to the position sensor 1 in the above embodiment, the control unit 90 can calculate the angle conversion and the ratio of the sensitivity values.

(About other embodiments)
(1) Although the Z-axis MR sensor 500 is provided on the printed wiring board 3 in the above-described embodiment, the present invention is not limited to this. For example, either one may be provided on the back surface of the printed wiring board 3. .

(2) In the above-described embodiment, the X-axis MR sensor 600 and the Y-axis MR sensor 700 form two full-bridge circuits by combining four half-bridge circuits. They may be arranged one by one and the operation positions of the X axis and the Y axis may be detected by one full bridge circuit.

  The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from or changing the technical idea of the present invention.

It is the schematic of the position sensor which concerns on embodiment of this invention. It is a top view of the position sensor which concerns on embodiment of this invention. It is the side view which looked at the position sensor which concerns on embodiment of this invention from the Y-axis magnet side. It is the side view which looked at the position sensor which concerns on embodiment of this invention from the X-axis magnet side. It is the schematic which shows the relationship between the Z-axis MR sensor which concerns on embodiment of this invention, and a Z-axis magnet. It is the schematic which showed the positional relationship of the rotation operation position of the operation part which concerns on embodiment of this invention, and a Z-axis MR sensor. It is a top view of the Z-axis MR sensor concerning an embodiment of the invention. (A) is an equivalent circuit diagram regarding the 1st magnetic detection part (M11-M14) which concerns on embodiment of this invention, (b) is an equivalent circuit regarding the 1st magnetic detection part (M21-M24). FIG. (A) is an equivalent circuit diagram regarding the 2nd magnetic detection part (M31-M34) which concerns on embodiment of this invention, (b) is an equivalent circuit regarding the 2nd magnetic detection part (M41-M44). FIG. It is the schematic which shows the relationship between the X-axis magnet and X-axis MR sensor which concern on embodiment of this invention. It is the schematic which shows the relationship between the Y-axis magnet and Y-axis MR sensor which concern on embodiment of this invention. It is a block diagram regarding the position sensor which concerns on embodiment of this invention. (A) is a figure regarding the rotating shaft direction and sensor sensitivity which concern on embodiment of this invention, (b) is the position of the axial direction of a Z-axis magnet, and the 1st and 2nd magnetism of a Z-axis MR sensor. It is a graph which shows the relationship with each value of a detection part. (A) is a graph regarding the temperature change of the Z-axis MR sensor which concerns on embodiment of this invention, (b) is the position of the axial direction of a Z-axis magnet, and the sensor of a 1st and 2nd magnetic detection part. It is a graph which shows the relationship with the value of a sensitivity ratio. (A) is the graph which showed the relationship between rotation angle (theta) which concerns on embodiment of this invention, and an output signal, (b) is the arc tangent value of a 1st sine signal and a 1st cosine signal, and It is the graph which showed this relationship. (A) is a graph which shows the relationship between the distance of the X-axis magnet which concerns on embodiment of this invention, and an output voltage, (b) is a graph regarding arctangent value and angle (theta) _X. (A) is a graph which shows the relationship between the distance of the Y-axis magnet which concerns on embodiment of this invention, and an output voltage, (b) is a graph regarding arctangent value and angle (theta) _Y.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Position sensor, 2 ... Fixed part, 3 ... Printed wiring board, 4 ... Operation part, 4A ... Z-axis magnet, 5 ... Z-axis support part, 6 ... X-axis support part, 6A ... X-axis magnet, 7 ... Y Axis support part, 7A ... Y axis magnet, 20 ... pedestal, 21 ... support part, 22 ... connecting part, 23 ... opening, 24 ... opening, 40 ... control knob, 41 ... lever, 50 ... main body, 51 ... support part, 52 ... convex part, 60 ... main body, 61 ... convex part, 62 ... opening, 63 ... holding part, 70 ... main body, 71 ... X-axis guide, 72 ... convex part, 73 ... holding part, 90 ... control part, 91 ... Controlled device, 500 ... Z-axis MR sensor, 501 ... first magnetic detector, 502 ... differential amplifier, 503 ... differential amplifier, 504 ... second magnetic detector, 505 ... differential amplifier, 506 ... difference Dynamic amplifier, 600... X-axis MR sensor, 601... Third magnetic detector, 602. Differential amplifier, 700 ... Y-axis MR sensor, 701 ... fourth magnetic detector, 702 ... differential amplifier, 703 ... differential amplifier, M11-M14 ... magnetoresistance element, M21-M24 ... magnetoresistance element, M31- M34 ... magnetoresistive element, M41 to M44 ... magnetoresistive element, M51 to M54 ... magnetoresistive element, M61 to M64 ... magnetoresistive element, M71 to M74 ... magnetoresistive element, M81 to M84 ... magnetoresistive element, V1 ... sensor sensitivity V11: first sine signal (first output signal), V12: first cosine signal (first output signal), V2: value of sensor sensitivity, V21: second sine signal (second Output signal), V22 ... second cosine signal (second output signal), V31 ... third sine signal (third output signal), V32 ... third cosine signal (third output signal), V41 ... Fourth sine signal (first Output signals of), V 42 ... fourth cosine signal (fourth output signal), Vat ... arctangent, Vbt ... arctangent, Vct ... arctangent value, V _{cc ...} constant voltage, d0 ... initial position, d1 ... operating position, d2 ... operating position, m ... rotary shaft, n0 ... initial position, n1 ... operating position, n2 ... operating position, theta ... rotation angle, theta _X ... angle, theta _Y ... angle, the Vr12 ... sensor sensitivity ratio Value, Vrd ... Threshold, Vat1 / 2 ... Threshold, Vat2 / 2 ... Threshold

Claims (11)

And rotating operation, and tilting operably supported by the operation unit to push operation, the pre-Symbol pushing operation direction and the rotation axis,
A first magnetic field generation unit provided in the operation unit and generating a first magnetic field in the first region;
A first magnetic field detection unit and a second magnetic field detection unit that are provided opposite to the first magnetic field generation unit so that the centers coincide with each other on the rotation axis and have different magnetic field sensitivities based on the magnetic flux density of the first magnetic field. A first magnetic sensor comprising a magnetic field detector of
A second magnetic field generation unit that generates a second magnetic field in the second region by displacing based on a first direction component orthogonal to the rotation axis generated in accordance with the tilting operation;
A second magnetic sensor provided in a position opposite to the second magnetic field generation unit in the second region when the operation unit is in an initial position;
A third magnetic field generator that generates a third magnetic field in the third region by displacing based on a second direction component orthogonal to the first direction component;
A third magnetic sensor provided in a position that is in the third region and faces the third magnetic field generation unit when the operation unit is in the initial position;
A 4-axis magnetic sensor.   The distance between the first magnetic field generation unit and the first magnetic sensor is the magnitude of the magnetic flux density of the first magnetic field applied to the first magnetic sensor with the displacement of the first magnetic field generation unit. The distance at which a change occurs in the magnetoresistance value of the second magnetic detection unit while maintaining the state in which the magnetoresistance value of the first magnetic detection unit is saturated when the change occurs. The four-axis magnetic sensor described.   The four-axis magnetic sensor according to claim 2, wherein the rotation operation is detected by the first magnetic detection unit. The first magnetic detectors are arranged in a ring shape so that the magnetoresistive elements are inclined at 45 °,
The second magnetic detection units are located outside the first magnetic detection unit, and are arranged in a concentric manner in an annular manner in a manner that is inclined by 45 °,
The 4-axis according to any one of claims 1 to 3, wherein each of the first magnetic detection unit and the second magnetic detection unit includes two full bridge circuits each including four magnetoresistive elements. Magnetic sensor.   The second magnetic sensor and the first full-bridge circuit formed by four magnetoresistive elements are arranged so that the magnetic sensitive direction is 45 ° different from the magnetic sensitive direction of the first full-bridge circuit. The four-axis magnetic sensor according to claim 1, further comprising a second full bridge circuit.   The four-axis magnetic sensor according to claim 5, wherein the third magnetic sensor has a configuration similar to that of the second magnetic sensor.   7. The four-axis magnetic sensor according to claim 1, wherein the first magnetic field generation unit, the second magnetic field generation unit, and the third magnetic field generation unit are permanent magnets. The tilting a first direction support portion which is displaced in response to the first direction component based on the operation, independently of the displacement from the first direction support unit in accordance with the second direction component based on the tilting operation A second directional support that
A four-axis magnetic sensor according to claim 1, comprising: A rotation operation and tilting operably supported by the operation unit to push operation, the pre-Symbol pushing operation direction and the rotation axis,
A first magnetic field generation unit provided in the operation unit and generating a first magnetic field in the first region;
A first magnetic field detection unit and a second magnetic field detection unit that are provided opposite to the first magnetic field generation unit so that the centers coincide with each other on the rotation axis and have different magnetic field sensitivities based on the magnetic flux density of the first magnetic field. A first magnetic sensor that outputs a first output signal based on the first magnetic field generator;
A second magnetic field generation unit that generates a second magnetic field in the second region by displacing based on a first direction component orthogonal to the rotation axis generated in accordance with the tilting operation;
When the operation unit is at the initial position, the second output is provided within the second region and at a position facing the second magnetic field generation unit, and based on the second magnetic field generation unit. A second magnetic sensor for outputting a signal;
A third magnetic field generator that generates a third magnetic field in the third region by displacing based on a second direction component orthogonal to the first direction component;
When the operation unit is at the initial position, the operation unit is provided in a position that is in the third region and faces the third magnetic field generation unit, and is configured based on the third magnetic field generation unit. A third magnetic sensor for outputting an output signal;
A detection unit that detects an operation position of the operation unit based on the first output signal, the second output signal, and the third output signal;
A 4-axis magnetic sensor.   The four-axis magnetic sensor according to claim 9, wherein the detection unit performs an angle conversion process on the first output signal, the second output signal, and the third output signal.   The detection unit calculates a ratio of sensitivity values of the first magnetic field detection unit and the second magnetic field detection unit sensor, and detects the operation position of the operation unit based on the calculated ratio value. The four-axis magnetic sensor according to claim 9.

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