JP5124934B2 - Solid-state imaging device, manufacturing method thereof, and imaging apparatus - Google Patents

Description

  The present invention relates to a solid-state imaging device, a manufacturing method thereof, and an imaging apparatus (camera or the like) including the solid-state imaging device.

Recently, with the increase in the number of pixels of a solid-state imaging device, the cell size of each pixel has been reduced.
As a result, the sensitivity tends to decrease with respect to the amount of light received per unit area of each pixel.
In particular, the tendency of the sensitivity of short wavelength light to decrease is remarkable, and it has become a problem as an image sensor.

Further, in an image sensor in which the photoelectric conversion film is formed of silicon, the sensitivity generally tends to be low with respect to the short wavelength region in the visible light region due to the spectral sensitivity of silicon itself.
For this reason, the difference in sensitivity between blue and green becomes large.

  Many solutions have been devised for such problems.

The most essential improvement method is that the photoelectric conversion surface is not made of silicon.
For example, it has been proposed to stack an amorphous selenium-based material or the like on silicon.
However, in the case where other materials are laminated on silicon as described above, there are many technical problems in stably forming a laminated film.

On the other hand, many methods for forming a fluorescent light-emitting film on a solid-state imaging device made of a photoelectric conversion film made of silicon have been proposed (see, for example, Patent Document 1, Patent Document 2, and Patent Document 3). .
This fluorescent light-emitting film has absorption in a desired wavelength range to improve sensitivity, and has a property of emitting light in a wavelength range longer than the wavelength range and having high sensitivity in the photoelectric conversion film. Photoelectric conversion can be performed efficiently in the conversion film.

JP-A-4-326673 JP-A-4-322467 Japanese Patent Laid-Open No. 10-150177

Patent Document 1 discloses a configuration in which a light receiving region is formed on a silicon substrate, and a fluorescent light emitting film is formed thereon via a protective film.
The fluorescent light-emitting film has absorption in a desired wavelength region where the sensitivity is to be improved, and has a feature of emitting light in a wavelength region longer than the wavelength region and in which the sensitivity of the photoelectric conversion film is high. Yes.

Patent Document 2 discloses a configuration in which a microlens containing a fluorescent material is formed on a photodiode formed on a silicon substrate via a thin film layer.
With such a configuration, the wavelength of light in a region where sensitivity is desired to be increased can be converted into light on the long wavelength side by a microlens containing a fluorescent material, and the light can be efficiently collected by the lens action.
Further, by providing a fluorescent reflection film on the microlens containing the fluorescent substance, the wavelength-converted light is directed to the photodiode side.

Patent Document 3 discloses a configuration in which a fluorescent light emitting film is formed in a lower layer than an upper end of a light shielding film in an upper layer of a photodiode.
With this configuration, it is possible to suppress the light emitted from the fluorescent light emitting layer from entering the photodiode of the adjacent pixel.
In addition, by providing an interference filter (single layer or multilayer structure) that transmits the absorption wavelength of the fluorescent light emitting film (the region of light whose sensitivity is to be increased) and reflects the light emitting wavelength on the upper layer of the fluorescent light emitting film, the fluorescent light emission It has been shown that the light emitted from the film is efficiently used.
Further, it has been shown that the light emitted from the fluorescent light-emitting layer can be efficiently used by forming the photoelectric conversion film region of the photodiode deeper in the substrate.

However, in the structures shown in Patent Document 1 and Patent Document 2, since light emitted by wavelength conversion is scattered in all directions, a portion that does not enter the photoelectric conversion film is lost.
Moreover, since the light incident on the photoelectric conversion film of the adjacent pixel becomes an erroneous signal, the resolution may be deteriorated.

On the other hand, in the structure disclosed in Patent Document 3, the light shielding film can prevent light emitted by wavelength conversion from entering the photoelectric conversion film of an adjacent pixel.
However, in the structure specifically proposed in Patent Document 3, the fluorescent light emitting film is formed on the photodiode after the light shielding film is formed, which complicates the manufacturing process.

  Furthermore, when the fluorescent light emitting layer is formed, there is a possibility that a problem may occur due to diffusion of impurities from the fluorescent light emitting layer. For example, it is conceivable that an impurity metal element diffuses into a silicon substrate to cause crystal defects, interface states, and defect levels on the surface of the silicon substrate.

  In order to solve the above-described problems, in the present invention, by performing wavelength conversion of incident light without causing problems, a solid-state imaging device having a high sensitivity in the short wavelength region of visible light, a manufacturing method thereof, An imaging apparatus provided with a solid-state imaging device is provided.

The solid-state imaging device of the present invention is a solid-state imaging device in which a photoelectric conversion unit made of a photodiode is formed on a silicon layer to form a pixel, and a plurality of pixels are arranged to form an imaging region. In some pixels, a wavelength conversion layer is formed near the surface of the photoelectric conversion unit, and the wavelength conversion layer is made of strained silicon or nanoscale silicon particles.
In the solid-state imaging device according to the first aspect of the present invention, in the pixel in which the wavelength conversion layer is formed, a light shielding layer that absorbs or reflects light having the emission wavelength of the wavelength conversion layer and light in the vicinity thereof is disposed around the wavelength conversion layer. It is set as the provided structure.
In the solid-state imaging device according to the second aspect of the present invention, the dangling bond at the interface on the surface side of the silicon layer where the wavelength conversion layer is formed is terminated.

According to the above-described configuration of the solid-state imaging device of the present invention, a photoelectric conversion unit made of a photodiode is formed on a silicon layer to constitute a pixel, and a plurality of pixels are arranged to constitute an imaging region. In each pixel, a wavelength conversion layer is formed near the surface of the photoelectric conversion unit, and the wavelength conversion layer is composed of strained silicon or nanoscale silicon particles, whereby a wavelength composed of strained silicon or nanoscale silicon particles. Since the conversion layer absorbs light in the short wavelength region of visible light and generates light of long wavelength, light in the short wavelength region of visible light with low sensitivity in the photoelectric conversion part formed in the silicon layer Can be converted into light in a long wavelength region with high sensitivity, and photoelectric conversion can be performed with high sensitivity.
That is, the sensitivity to the short wavelength region of visible light can be improved.
In addition, since the wavelength conversion layer is made of the same silicon material as the silicon layer on which the photoelectric conversion layer is formed, it can be manufactured by extending the conventional method for manufacturing a solid-state imaging device, and a fluorescent material is used. As in the case, there is no possibility that impurities such as metals diffuse and cause problems.

  The method for manufacturing a solid-state imaging device according to the present invention manufactures a solid-state imaging device in which a photoelectric conversion unit made of a photodiode is formed on a silicon layer to form pixels, and a plurality of pixels are arranged to form an imaging region. A step of forming a photoelectric conversion portion in the silicon layer, a step of forming a wavelength conversion layer made of strained silicon or nanoscale silicon particles in the vicinity of the surface of the photoelectric conversion portion of the silicon layer, and a wavelength conversion layer And a step of terminating dangling bonds at the interface on the surface side of the formed silicon layer.

According to the method for manufacturing a solid-state imaging device of the present invention described above, the method includes the step of forming a wavelength conversion layer made of strained silicon or nanoscale silicon particles in the vicinity of the surface of the photoelectric conversion portion of the silicon layer. By forming a wavelength conversion layer made of nanoscale silicon particles, a solid-state imaging device having high sensitivity for the short wavelength region of visible light can be manufactured.
In addition, since it has a step of terminating dangling bonds at the interface on the surface side of the silicon layer on which the wavelength conversion layer is formed, the wavelength consisting of dangling bonds in the silicon layer and strained silicon or nanoscale silicon particles Since the dangling bonds generated when the conversion layer is formed can be terminated to reduce the probability that electrons excited at a short wavelength in the wavelength conversion layer are non-radiative recombination, the wavelength conversion (long) The light emission efficiency of light (wavelength) can be improved. Thereby, it becomes possible to further improve the sensitivity to the short wavelength region of visible light.

In the imaging device of the present invention, a photoelectric conversion unit made of a photodiode is formed in a silicon layer to form a pixel, a plurality of pixels are arranged to form an imaging region, and photoelectric conversion is performed in at least some of the pixels. A wavelength conversion layer is formed in the vicinity of the surface of the unit. The wavelength conversion layer includes a solid-state imaging device made of strained silicon or nanoscale silicon particles, means for guiding light from the imaging target to the solid-state imaging device, and solid-state imaging. And at least element driving means.
In the imaging device according to the first aspect of the present invention, the solid-state imaging device absorbs or reflects light having the emission wavelength of the wavelength conversion layer and a wavelength in the vicinity thereof around the wavelength conversion layer in the pixel in which the wavelength conversion layer is formed. The light shielding layer is provided.
In the imaging device of the second aspect of the present invention, the solid-state imaging device has a configuration in which dangling bonds at the interface on the surface side of the silicon layer where the wavelength conversion layer is formed are terminated.

  According to the above-described configuration of the imaging apparatus of the present invention, the imaging apparatus includes at least a solid-state imaging device, a unit that guides light from the imaging target to the solid-state imaging device, and a driving unit for the solid-state imaging device. With the configuration of the solid-state imaging element, the sensitivity to the short wavelength region of visible light can be improved, so that an image with good color reproducibility and good image quality can be obtained.

The Oite the first imaging device of a solid-state imaging element and the first invention of the present invention, the solid-state imaging device, the pixel of the wavelength conversion layer is formed, around the wavelength conversion layer, the wavelength conversion layer The light-shielding layer that absorbs or reflects the light having the light emission wavelength and the wavelength in the vicinity thereof is provided, so that the light-shielding layer absorbs or reflects the light having the light emission wavelength in the wavelength conversion layer and the light in the vicinity thereof. Therefore, the light generated from the wavelength conversion layer can be prevented from entering the photoelectric conversion unit of the adjacent pixel or the signal charge transfer path.

  Further, the light shielding layer may be formed by a wiring layer or an electrode layer partially embedded in a silicon layer. In such a structure, the light shielding layer is formed by the wiring layer or the electrode layer. Therefore, the configuration can be simplified as compared with the case where a light shielding layer is provided separately from these wiring layers or electrode layers.

In the solid-state imaging device of the present invention, a photoelectric conversion region is formed in a silicon layer to form a pixel, a plurality of pixels are arranged to form an imaging region, and an insulating layer provided on the surface side of the silicon layer A solid-state imaging device having a structure in which a wiring layer is formed and light is irradiated to the photoelectric conversion region from the back side of the silicon layer, and at least a part of the silicon layer of the portion where the photoelectric conversion region is formed A wavelength conversion layer is formed in the vicinity of the back side interface, and this wavelength conversion layer is made of strained silicon or nanoscale silicon particles.
In the solid-state imaging device according to the third aspect of the present invention, in the pixel in which the wavelength conversion layer is formed, a light shielding layer that absorbs or reflects light having the emission wavelength of the wavelength conversion layer and a wavelength in the vicinity of the wavelength conversion layer is disposed around the wavelength conversion layer. The configuration is provided.
In the solid-state imaging device of the fourth aspect of the present invention, a dangling bond at the interface on the back surface side of the silicon layer where the wavelength conversion layer is formed is terminated.

According to the configuration of the solid-state imaging device of the present invention described above, a photoelectric conversion region is formed in a silicon layer to form a pixel, and a plurality of pixels are arranged to form an imaging region, which is provided on the surface side of the silicon layer. A wiring layer is formed in the insulating layer thus formed, and the photoelectric conversion region is irradiated with light from the back side of the silicon layer, so that a so-called back-illuminated structure solid-state imaging device is configured.
In at least some of the pixels, a wavelength conversion layer is formed in the vicinity of the back side interface of the silicon layer where the photoelectric conversion region is formed, and the wavelength conversion layer is made of strained silicon or nanoscale silicon particles. As a result, the wavelength conversion layer made of strained silicon or nanoscale silicon particles absorbs light in the short wavelength region of visible light and has a property of generating long wavelength light. It is possible to convert light in the short wavelength region of visible light with low sensitivity in the photoelectric conversion region into light in the long wavelength region with high sensitivity, and perform photoelectric conversion with high sensitivity.
That is, the sensitivity to the short wavelength region of visible light can be improved.
In addition, since the wavelength conversion layer is made of the same silicon material as the silicon layer in which the photoelectric conversion region is formed, it can be manufactured by extending the conventional method for manufacturing a solid-state imaging device, and a fluorescent material is used. As in the case, there is no possibility that impurities such as metals diffuse and cause problems.

  In the solid-state imaging device manufacturing method of the present invention, a photoelectric conversion region is formed in a silicon layer to form a pixel, a plurality of pixels are arranged to form an imaging region, and insulation provided on the surface side of the silicon layer A step of forming a photoelectric conversion region in the silicon layer when manufacturing a solid-state imaging device having a structure in which a wiring layer is formed in the layer and the photoelectric conversion region is irradiated with light from the back side of the silicon layer; In this pixel, a step of forming a wavelength conversion layer made of strained silicon or nanoscale silicon particles in the vicinity of the interface on the back surface side of the silicon layer, where the photoelectric conversion region was formed, and the wavelength conversion layer were formed And a step of terminating dangling bonds at the interface on the back side of the silicon layer.

According to the method for producing a solid-state imaging device of the present invention described above, strained silicon or nanoscale silicon particles are formed in the vicinity of the interface on the back surface side of the silicon layer in the portion where the photoelectric conversion region is formed in at least some of the pixels. Manufacturing a solid-state imaging device having high sensitivity to the short wavelength region of visible light by forming a wavelength conversion layer made of strained silicon or nanoscale silicon particles. can do.
In addition, since it has a step of terminating dangling bonds at the interface on the back side of the silicon layer where the wavelength conversion layer is formed, it is made of dangling bonds in the silicon layer or strained silicon or nanoscale silicon particles. Since the dangling bond generated when forming the wavelength conversion layer can be terminated to reduce the probability that electrons excited at a short wavelength in the wavelength conversion layer are non-radiatively recombined, the wavelength conversion was performed ( The light emission efficiency of light (long wavelength) can be improved. Thereby, it becomes possible to further improve the sensitivity to the short wavelength region of visible light.

In the imaging device of the present invention, a photoelectric conversion region is formed in a silicon layer to form a pixel, a plurality of pixels are arranged to form an imaging region, and a wiring is provided in an insulating layer provided on the surface side of the silicon layer. A layer is formed, and the photoelectric conversion region is irradiated with light from the back side of the silicon layer, and at least in some pixels, in the vicinity of the interface on the back side of the silicon layer of the portion where the photoelectric conversion region is formed In addition, a wavelength conversion layer is formed, and the wavelength conversion layer includes a solid-state imaging device made of strained silicon or nanoscale silicon particles, means for guiding light from the imaging target to the solid-state imaging device, and driving means for the solid-state imaging device And at least.
In the imaging device according to the third aspect of the present invention, the solid-state imaging element absorbs or reflects light having the emission wavelength of the wavelength conversion layer and the wavelength in the vicinity thereof around the wavelength conversion layer in the pixel in which the wavelength conversion layer is formed. The light shielding layer is provided.
In the imaging device of the fourth aspect of the present invention, the solid-state imaging device has a configuration in which dangling bonds at the interface on the back surface side of the silicon layer where the wavelength conversion layer is formed are terminated.

  According to the above-described configuration of the imaging apparatus of the present invention, the imaging apparatus includes at least a solid-state imaging device, a unit that guides light from the imaging target to the solid-state imaging device, and a driving unit for the solid-state imaging device. With the configuration of the solid-state imaging element, the sensitivity to the short wavelength region of visible light can be improved, so that an image with good color reproducibility and good image quality can be obtained.

The Oite the third image pickup apparatus of the solid-state imaging device and the third invention of the present invention, the solid-state imaging device, the pixel of the wavelength conversion layer is formed, around the wavelength conversion layer, the wavelength conversion layer The light-shielding layer that absorbs or reflects the light having the light emission wavelength and the wavelength in the vicinity thereof is provided, so that the light-shielding layer absorbs or reflects the light having the light emission wavelength in the wavelength conversion layer and the light in the vicinity thereof. Therefore, light generated from the wavelength conversion layer can be prevented from entering the photoelectric conversion region of the adjacent pixel.

According to the configuration of the solid-state imaging device and the imaging apparatus of the present invention, it is possible to improve the sensitivity of the short wavelength component in the visible light region, which becomes a problem when the photoelectric conversion unit is formed in the silicon layer.
This makes it possible to obtain sufficient sensitivity even when the pixels are miniaturized.
Therefore, it is possible to reduce the size of the pixels, thereby increasing the number of pixels and reducing the size.

In addition, according to the present invention, since the wavelength conversion layer is composed of silicon of the same material as that of the photoelectric conversion portion, it is not necessary to add other materials such as a fluorescent material, and the conventional method for manufacturing a solid-state imaging device can be extended. It is possible to manufacture, and there is no possibility of causing a problem like a fluorescent material.
Therefore, it is possible to manufacture a solid-state imaging device with good sensitivity at a low cost and with a high yield.

  In particular, in a pixel in which a wavelength conversion layer of a solid-state imaging device is formed, a light-shielding layer that absorbs or reflects light having a light emission wavelength of the wavelength conversion layer and a wavelength in the vicinity thereof is provided around the wavelength conversion layer. In this case, it is possible to prevent light generated in the wavelength conversion layer from entering an adjacent pixel or signal charge transfer path and generating an erroneous signal.

  According to the method for manufacturing a solid-state imaging device of the present invention, it is possible to further improve the sensitivity of the solid-state imaging device with respect to the short wavelength region of visible light. Therefore, the solid-state imaging with higher sensitivity of the short wavelength component in the visible light region. An element can be manufactured.

In the first aspect of the present invention, the wavelength conversion layer is formed in the vicinity of the surface of the silicon layer of the photoelectric conversion unit (photodiode) constituting the pixel in at least a part of the pixels of the solid-state imaging device.
The wavelength conversion layer is composed of a strained silicon layer or nanoscale silicon particles, that is, a structure formed of a silicon material.

  That is, in the first present invention, as shown in the schematic cross-sectional view of FIG. 1, the wavelength conversion layer 3 is provided in the vicinity of the surface of the photoelectric conversion region 2 of the light receiving sensor portion formed in the silicon layer 1.

  Examples of the silicon layer 1 include a silicon substrate, a semiconductor epitaxial layer epitaxially grown on the silicon substrate, and other silicon layers (including a polycrystalline layer and an amorphous layer) deposited on the substrate.

As described above, the wavelength conversion layer 3 is composed of a strained silicon layer or nanoscale silicon particles.
These strained silicon layers and nanoscale silicon particles, like the fluorescent materials used in conventional wavelength conversion layers, absorb shorter wavelength light and generate longer wavelength light. It has the property of converting and outputting.
For example, nanoscale silicon particles exhibit a quasi-direct transition characteristic due to a change in band structure due to a quantum effect, and have a property of emitting light at room temperature. Further, the absorption wavelength region and the emission wavelength region can be controlled by controlling the scale of the silicon particles.

  Note that the wavelength conversion layer 3 is preferably formed to a depth of several tens of nanometers from the surface of the silicon layer 1 in which the photoelectric conversion region is formed.

Further, as a more preferable form of the solid-state imaging device of the first aspect of the present invention, a light shielding layer 4 is provided around the wavelength conversion layer 3 as shown in the schematic sectional view of FIG.
The light shielding layer 4 is made of a material that absorbs or reflects light having a wavelength of light generated in the wavelength conversion layer 3 and light having a wavelength in the vicinity thereof.
Thus, by providing the light shielding layer 4 around the wavelength conversion layer 3, the light generated in the wavelength conversion layer 3 is incident on the photoelectric conversion region 2 and the signal charge transfer path of another adjacent pixel. Can be prevented.

The light shielding layer 4 shown in FIG. 2 can be manufactured, for example, by etching the silicon layer 1 to form recesses and holes and embedding the material of the light shielding layer 4 in the recesses and holes.
Although not shown, an electrode layer or a wiring layer formed by being embedded in a silicon layer can be used as the light shielding layer.

An imaging apparatus, for example, a camera such as a still camera or a video camera can be configured by including the solid-state imaging device according to the first aspect of the present invention having the above-described configuration.
The imaging apparatus is configured to include at least a solid-state imaging device, a unit (for example, an optical system such as a lens) that guides light from the imaging target to the solid-state imaging device, and a driving unit (driving circuit or the like) for the solid-state imaging device.
Furthermore, other means are provided as necessary. For example, when it is necessary to perform signal processing of an image signal obtained by a solid-state imaging device in the imaging apparatus, signal processing means such as a signal processing circuit is provided.

  In the second aspect of the present invention, a photoelectric conversion region is formed in a silicon layer to form a pixel, a plurality of pixels are arranged to form an imaging region, and an insulating layer provided on the surface side of the silicon layer is formed. A wiring layer is formed, and a solid-state imaging device having a configuration in which light is irradiated from the back surface side (opposite to the wiring layer) of the silicon layer into the photoelectric conversion region, that is, a solid-state imaging device having a so-called back-illuminated structure is configured. .

  By adopting the back-illuminated structure in this way, incident light is not blocked by the wiring layer, so that the light incident on the photoelectric conversion region can be increased and the sensitivity can be improved.

In the second aspect of the present invention, in at least some of the pixels of the solid-state imaging device having the back-illuminated structure, the wavelength near the interface on the back side of the silicon layer in the portion where the photoelectric conversion region constituting the pixel is formed. It is assumed that the conversion layer is formed.
The wavelength conversion layer is composed of a strained silicon layer or nanoscale silicon particles, that is, a structure formed of a silicon material.
That is, the configuration of the second aspect of the present invention can also be considered as a configuration in which the wavelength conversion layer of the first aspect of the present invention is applied to the back-illuminated structure.

  Examples of the silicon layer in which the photoelectric conversion region is formed include a silicon substrate, a semiconductor epitaxial layer, and other silicon layers (including a polycrystalline layer and an amorphous layer).

As described above, the wavelength conversion layer is composed of a strained silicon layer or nanoscale silicon particles.
These strained silicon layers and nanoscale silicon particles, like the fluorescent materials used in conventional wavelength conversion layers, absorb shorter wavelength light and generate longer wavelength light. It has the property of converting and outputting.
For example, nanoscale silicon particles exhibit a quasi-direct transition characteristic due to a change in band structure due to a quantum effect, and have a property of emitting light at room temperature. Further, the absorption wavelength region and the emission wavelength region can be controlled by controlling the scale of the silicon particles.

  Note that the wavelength conversion layer is desirably formed to a depth of several tens of nanometers from the back side interface of the silicon layer in which the photoelectric conversion region is formed.

In the solid-state imaging device of the second aspect of the present invention, more preferably, a light shielding layer is provided around the wavelength conversion layer.
This light shielding layer is made of a material having a property of absorbing or reflecting light with respect to the wavelength of light generated in the wavelength conversion layer and light in the vicinity thereof.
As described above, by providing the light shielding layer around the wavelength conversion layer, it is possible to prevent light generated in the wavelength conversion layer from entering the photoelectric conversion region of another adjacent pixel.
Such a light shielding layer can be manufactured, for example, by etching a silicon layer to form a recess or a hole and embedding the material of the light shielding layer in the recess or the hole.

An imaging apparatus, for example, a camera such as a still camera or a video camera can be configured by including the solid-state imaging device of the second aspect of the present invention having the above-described configuration.
The imaging apparatus is configured to include at least a solid-state imaging device, a unit (for example, an optical system such as a lens) that guides light from the imaging target to the solid-state imaging device, and a driving unit (driving circuit or the like) for the solid-state imaging device.
Furthermore, other means are provided as necessary. For example, when it is necessary to perform signal processing of an image signal obtained by a solid-state imaging device in the imaging apparatus, signal processing means such as a signal processing circuit is provided.

Next, a specific embodiment of the first present invention will be described.
As an embodiment of the first aspect of the present invention, a schematic configuration diagram of a solid-state imaging device is shown in FIGS. 3 is a plan view, and FIG. 4 is a cross-sectional view (cross-sectional view of one pixel) taken along line AA of FIG.
In the present embodiment, the present invention is applied to a CCD solid-state imaging device.

As shown in FIG. 3, in this solid-state imaging device, an imaging region 11 is configured by forming a vertical transfer register 13 on one side of each column of the light receiving sensor units 12 arranged in a matrix (matrix). ing.
Each of the light receiving sensor sections 12 constitutes a pixel, and in this embodiment, one is provided for each pixel.
Outside the imaging area 11, a horizontal transfer register 14 is provided connected to one end of the vertical transfer register 13, and an output unit 15 is provided at one end of the horizontal transfer register 14.

  As shown in the cross-sectional view of FIG. 4, the photoelectric conversion region 2 made of an N-type semiconductor region is formed on the silicon substrate 1, thereby forming a photodiode constituting the light receiving sensor unit 12.

A P-type (P ⁺ ) channel stop region 6 is formed between the light receiving sensor unit 12 and the vertical transfer register 13 on the right side in the drawing. Further, a read gate unit 16 is provided between the light receiving sensor unit 1 (12, 13) and the left vertical transfer register 2, and the vertical transfer register 13 is connected from the photoelectric conversion region 2 of the light receiving sensor unit 12 through the read gate unit 16. The signal charge is read out to the transfer channel region 5.
The transfer electrode 7 is formed over the channel stop region 6 and the read gate portion 16.

The vertical transfer register 13 includes a transfer channel region 5 formed in the silicon substrate 1, a gate insulating film, and a transfer electrode (charge transfer electrode) 7.
A light shielding film 8 is formed on the transfer electrode 7 via an interlayer insulating film. The light shielding film 8 has an opening formed on the photoelectric conversion region 2 of the light receiving sensor unit 12.

Further, an inner lens 21, a color filter 22, and an on-chip lens 23 are formed above the light shielding film 8.
The on-chip lens 23 converges the light incident on the solid-state imaging device and collects it in the photoelectric conversion region 2 of the light receiving sensor unit 12.
The color filter 22 is provided with a filter of a predetermined color for each pixel.
The intra-layer lens 21 is formed of a material having a higher refractive index than the surrounding insulating layer, and further converges incident light and efficiently collects it in the photoelectric conversion region 2 of the light receiving sensor unit 12.

In the present embodiment, in particular, the wavelength conversion layer 3 is formed in the vicinity of the surface of the silicon substrate 1 in the light receiving sensor unit 12 in which the photoelectric conversion region 2 is formed.
And this wavelength conversion layer 3 is comprised with the silicon material which has a property which absorbs light with a short wavelength, and light-emits light with a long wavelength. Thereby, the sensitivity with respect to the short wavelength area | region of visible light can be improved. As the silicon material having such properties, the above-described strained silicon layer and nanoscale silicon particles can be used.
Such a silicon material has strong absorption with respect to incident light of 350 nm to 450 nm, for example, and emits light of 500 nm to 700 nm depending on the size of particles and the like. The light converted into the long wavelength region is absorbed in the photoelectric conversion region 2.
Therefore, by providing the wavelength conversion layer 3, it is possible to obtain sufficient signal charges from incident light of 350 nm to 450 nm, which has been low in sensitivity in the past, and to improve the sensitivity in the short wavelength region of visible light. .

  The wavelength conversion layer 3 does not need to be formed on all pixels, and it is also effective to form the wavelength conversion layer 3 only on a pixel whose sensitivity is to be improved, for example, a pixel in a blue region.

The solid-state imaging device of the present embodiment can be manufactured, for example, as follows.
First, the transfer channel region 5 and the photoelectric conversion region 2 are formed on the silicon substrate 1 and the layers such as the transfer electrode 7 and the light shielding film 8 are formed in the same manner as in the conventional method for manufacturing a solid-state imaging device.

Next, a thick film resist is used to cover a portion other than the opening region, which is formed on the light shielding film 8 above the photoelectric conversion region 2 of the light receiving sensor unit 12.
Subsequently, the wavelength conversion layer 3 made of a strained silicon layer or nanoscale silicon particles is formed in the vicinity of the surface of the photoelectric conversion region 2 (within 100 nm from the surface) through the opening formed in the light shielding film 8.

The wavelength conversion layer 3 can be formed by performing ion implantation on the silicon layer 1 using, for example, inert ions (Ar, Ne, etc.) or active ions (P, B, Si, etc.). it can.
At this time, a silicon light emitting layer having a thickness of 1 nm to 10 nm is formed in the vicinity of the surface as the wavelength conversion layer 3 by selecting an appropriate acceleration voltage and dose corresponding to the type of ions to be used. Can do. For example, the acceleration voltage is set to 15 keV, and the dose is increased to 10 ¹⁵ / cm ² as compared with the case where a normal semiconductor region is formed by ion implantation.

Strained silicon layers and nanoscale silicon particles show a change in band gap depending on the size of the particles and the like, and an absorption region and a light emitting region change depending on the size.
Therefore, if the ion implantation conditions are changed, it is possible to easily change the wavelength region where the sensitivity is desired to be increased.

  Subsequently, the wavelength conversion layer 3 is crystallized and stabilized, for example, by performing a high-temperature heat treatment step at 500 ° C. for 30 minutes.

Thereafter, the in-layer lens 21, the color filter 22, and the on-chip lens 23 are formed in the same manner as in the conventional method for manufacturing a solid-state imaging device.
In this way, the solid-state imaging device having the configuration shown in FIG. 4 can be manufactured.

According to the configuration of the solid-state imaging device of the present embodiment described above, the wavelength conversion layer 3 is provided in the vicinity of the surface of the photoelectric conversion region 2, so that incident light in the short wavelength region of visible light with low spectral sensitivity is obtained. Can be converted to a long wavelength (high spectral sensitivity) by the wavelength conversion layer 3.
Thereby, incident light in the short wavelength region of visible light can be sufficiently absorbed by the photoelectric conversion region 2, so that sensitivity to incident light in the short wavelength region of visible light can be improved.

Further, according to the configuration of the solid-state imaging device of the present embodiment, the wavelength conversion layer 3 is formed from a strained silicon layer or nanoscale silicon particles, and is formed of silicon, so an expensive material is used. It is not necessary and can be formed so as not to contain impurities (such as metal elements) with respect to the silicon layer 1.
Thereby, it is possible to manufacture a solid-state imaging device having high sensitivity even in a short wavelength region at a relatively low cost. In addition, since it is possible to avoid the influence of impurities, a solid-state image sensor having good characteristics and high reliability can be realized, and a solid-state image sensor having good characteristics can be manufactured with a high yield.

Further, with the configuration of the solid-state imaging device of the present embodiment, sufficient sensitivity can be obtained even if the pixels are miniaturized.
Therefore, it is possible to reduce the size of the pixels, thereby increasing the number of pixels and reducing the size.

Next, as another embodiment of the first aspect of the present invention, FIG.
In the present embodiment, the transfer electrode 7 is embedded in the silicon layer 1 (embedded transfer electrode).
As shown in FIG. 5, a recess is formed in the silicon layer 1, and a transfer electrode 7 is formed in the recess via a gate insulating film.

Further, since the light shielding film 8 covering the upper side of the transfer electrode 7 extends to the side of the transfer electrode 7 embedded in the silicon layer 1, the light shielding film 8 exists around the wavelength conversion layer 3.
Thereby, the light shielding film 8 extending around the wavelength conversion layer 3 acts as the light shielding layer 4 shown in FIG. 2 so that the light generated in the wavelength conversion layer 3 is applied to the adjacent pixels and the transfer channel region 5. It becomes possible to prevent the incidence.

  In FIG. 5, the entire transfer electrode 7 is embedded in the silicon layer 1, but a configuration in which a part of the transfer electrode 7 is embedded in the silicon layer 1 may be employed.

The solid-state imaging device of the present embodiment can be manufactured as follows, for example.
A recess is formed in the silicon layer 1 by etching or the like.
Next, the transfer electrode 7 is formed in a predetermined pattern in the recess through a gate insulating film.
Further, a light shielding film 8 is formed on the transfer electrode 7 via an interlayer insulating layer. At this time, the light-shielding film 8 is formed so as to extend also to the light-receiving sensor portion 12 side of the transfer electrode 7.
Subsequently, an opening is formed in the light shielding film 8 on the light receiving sensor unit 12.
Thereafter, the solid-state imaging device of the present embodiment shown in FIG. 5 can be manufactured in the same manner as the manufacturing process of the solid-state imaging device of the previous embodiment shown in FIG.

According to the configuration of the solid-state imaging device of the present embodiment described above, the wavelength conversion layer 3 is provided in the vicinity of the surface of the photoelectric conversion region 2 as in the previous embodiment, so that the short wavelength of visible light can be obtained. Sensitivity to incident light in the region can be improved.
In addition, it is possible to manufacture a solid-state imaging device having high sensitivity even in a short wavelength region at a relatively low cost. In addition, since it is possible to avoid the influence of impurities, a solid-state image sensor having good characteristics and high reliability can be realized, and a solid-state image sensor having good characteristics can be manufactured with a high yield.

Further, with the configuration of the solid-state imaging device of the present embodiment, sufficient sensitivity can be obtained even if the pixels are miniaturized.
Therefore, it is possible to reduce the size of the pixels, thereby increasing the number of pixels and reducing the size.

Furthermore, according to the configuration of the solid-state imaging device of the present embodiment, the light shielding film 8 extends to the side of the transfer electrode 7, so that it is formed near the surface of the photoelectric conversion region 2 of the light receiving sensor unit 12. The extended portion of the light shielding film 8 surrounds the wavelength conversion layer 3 formed.
Thus, the extended portion of the light shielding film 8 is caused to act in the same manner as the light shielding layer 4 shown in FIG. 2, and the light generated by the wavelength conversion layer 3 is transferred to the photoelectric conversion region 2 or transfer of other adjacent pixels. The incident on the channel region 5 can be prevented.

Next, FIG. 6 shows a schematic configuration diagram (cross-sectional view) of a solid-state imaging device as still another embodiment of the first invention.
In the present embodiment, the light shielding layer 4 shown in FIG. 2 is provided.
As shown in FIG. 6, a light shielding layer 4 is formed around the wavelength conversion layer 3.
As the material for the light shielding layer 4, a material that absorbs or reflects light with respect to the wavelength of light generated from the wavelength conversion layer 3 and light in the vicinity thereof is used. Thereby, it is possible to prevent the light generated from the wavelength conversion layer 3 from entering the adjacent pixels or the transfer channel region 5.
Since the other configuration is the same as that of the embodiment shown in FIG. 4, the same reference numerals are given and redundant description is omitted.

  The light shielding layer 4 may be made of the same material as the light shielding film 8 on the transfer electrode 7.

In order to manufacture the solid-state imaging device of the present embodiment, for example, a groove is formed in the silicon layer 1 around the photoelectric conversion region 2 by dry etching, and then a light shielding layer is formed in the groove by a CVD method. 4 material is embedded.
The other steps are the same as the manufacturing steps of the solid-state imaging device of the previous embodiment shown in FIG.

According to the configuration of the solid-state imaging device of the present embodiment described above, the wavelength conversion layer 3 is provided in the vicinity of the surface of the photoelectric conversion region 2 as in the previous embodiment, so that the short wavelength of visible light can be obtained. Sensitivity to incident light in the region can be improved.
In addition, it is possible to manufacture a solid-state imaging device having high sensitivity even in a short wavelength region at a relatively low cost. In addition, since it is possible to avoid the influence of impurities, a solid-state image sensor having good characteristics and high reliability can be realized, and a solid-state image sensor having good characteristics can be manufactured with a high yield.

Further, with the configuration of the solid-state imaging device of the present embodiment, sufficient sensitivity can be obtained even if the pixels are miniaturized.
Therefore, it is possible to reduce the size of the pixels, thereby increasing the number of pixels and reducing the size.

  Furthermore, according to the configuration of the solid-state imaging device of the present embodiment, since the light shielding layer 4 is formed around the wavelength conversion layer 3, the light generated by the wavelength conversion layer 3 can be transmitted to other adjacent pixels. It is possible to prevent the light from entering the photoelectric conversion region 2 and the transfer channel region 5.

Next, as another embodiment of the first present invention, a schematic configuration diagram (cross-sectional view) of a solid-state imaging device is shown in FIG.
In the present embodiment, in the light receiving sensor unit 12, a substantially hemispherical silicon layer 17 is further laminated on the silicon substrate 1, and a wavelength conversion layer made of silicon is formed in the vicinity of the surface of the substantially hemispherical silicon layer 17. 18 is formed.
Since the other configuration is the same as that of the embodiment shown in FIG.

The solid-state imaging device of the present embodiment can be manufactured as follows, for example.
A silicon layer 17 is laminated (deposited) by the CVD method on the silicon layer 1 of the light receiving sensor unit 12 in which the photoelectric conversion region 2 is formed.
Next, the deposited silicon layer 17 is crystallized by high-temperature heat treatment.
Then, a wavelength conversion layer 18 made of silicon is formed near the surface of the silicon layer 17 by ion implantation.
Thereafter, the wavelength conversion layer 18 is stabilized by performing a high-temperature heat treatment (for example, at 500 ° C. for 30 minutes).
Other manufacturing processes can manufacture a solid-state imaging device in the same manner as the manufacturing process of the previous embodiment.

According to the configuration of the solid-state imaging element of the present embodiment described above, the wavelength conversion layer 18 made of silicon is provided in the vicinity of the surface of the substantially hemispherical silicon layer 17 formed above the photoelectric conversion region 2. Thus, the sensitivity to the incident light in the short wavelength region of visible light can be improved by the wavelength conversion layer 18 as in the previous embodiment.
In addition, it is possible to manufacture a solid-state imaging device having high sensitivity even in a short wavelength region at a relatively low cost. In addition, since it is possible to avoid the influence of impurities, a solid-state image sensor having good characteristics and high reliability can be realized, and a solid-state image sensor having good characteristics can be manufactured with a high yield.

Further, with the configuration of the solid-state imaging device of the present embodiment, sufficient sensitivity can be obtained even if the pixels are miniaturized.
Therefore, it is possible to reduce the size of the pixels, thereby increasing the number of pixels and reducing the size.

Further, in the solid-state imaging device of the present embodiment, the wavelength conversion layer 18 is above the silicon layer 1, and the portion extending to the side of the transfer electrode 7 of the light shielding film 8 on the transfer electrode 7 is the wavelength conversion. It surrounds the layer 18.
Thereby, the extended portion of the light shielding film 8 is caused to act in the same manner as the light shielding layer 4 shown in FIG. 2, so that the light generated by the wavelength conversion layer 18 is transferred to the photoelectric conversion region 2 or the transfer of another adjacent pixel. The incident on the channel region 5 can be prevented.

Next, a schematic configuration diagram (cross-sectional view) of a solid-state imaging device is shown in FIG. 8 as still another embodiment of the first invention.
In the present embodiment, a P-type (P ⁺ ) positive charge accumulation region 19 is provided above the photoelectric conversion region 2 in the light receiving sensor unit 12, and the positive charge accumulation region 19 and the surface of the silicon substrate 1 are provided. Between these, a wavelength conversion layer 3 made of silicon is provided.
Since the other configuration is the same as that of the embodiment shown in FIG. 4, the same reference numerals are given and redundant description is omitted.

In the solid-state imaging device of the present embodiment, by providing the positive charge accumulation region 19 above the photoelectric conversion region 2, dark current caused by interface states near the surface of the silicon layer 1 can be suppressed. .
Even in the configuration in which the positive charge accumulation region 19 is provided as described above, the wavelength conversion layer 3 can be provided by applying the present invention.

In each of the embodiments described above, the present invention is applied to the CCD solid-state image sensor, but the present invention can also be applied to solid-state image sensors having other configurations.
For example, the present invention can be similarly applied to a solid-state imaging device having a charge transfer unit other than the CCD structure, and a MOS-type or CMOS-type solid-state imaging device.

  Further, when applied to a MOS type or CMOS type solid-state imaging device, a gate electrode or a wiring layer is used as a silicon substrate (or instead of embedding a transfer electrode in a silicon substrate in the configuration of the embodiment shown in FIG. It is also possible to embed in a silicon layer. And it can be made to act as a light shielding layer by selecting the material of the electrode layer and wiring layer to embed.

Incidentally, when manufacturing the solid-state imaging device of the first invention described above, although the silicon layer or strained silicon layer nanoscale formed by ion implantation as the wavelength conversion layer, this time, the SiO 2 / _Si A dangling bond may be formed near the interface.
In this way, when a dangling bond is formed at the interface, electrons excited by incident light (electrons generated in the wavelength conversion layer and its vicinity) are trapped at the interface state, causing non-radiative recombination. Therefore, there is a possibility that sufficient light emission efficiency cannot be obtained with the wavelength conversion layer. In this case, since the conversion efficiency improvement in the photoelectric conversion region, which should be originally obtained by forming the wavelength conversion layer, cannot be sufficiently achieved, the effect of improving the sensitivity by the wavelength conversion layer can be sufficiently obtained. Disappear.

Therefore, dangling bonds generated near the interface of the silicon layer are terminated to reduce the interface state.
Preferably, hydrogen annealing treatment or cyan treatment is performed as the termination treatment step.
In addition to these hydrogen annealing treatment and cyan treatment, for example, termination treatment is possible even if fluorine is used, but fluorine has a drawback that it is dangerous and difficult to handle.

Examples of the termination processing method include the following methods.
(1) A hydrogen annealing process is performed in a hydrogen atmosphere.
(2) Cyan treatment is performed in an atmosphere containing cyan (CN).
(3) Cyan plasma is generated by generating CN plasma in an atmosphere containing cyan (CN).
(4) Cyan treatment is performed by dipping in a solution containing cyan.
(5) Cyan treatment is performed by applying or dropping a solution containing cyan on the surface.
(6) Cyan treatment is performed by implanting ions containing carbon C and nitrogen N.

By performing hydrogen annealing treatment or cyan treatment by these methods, dangling bonds can be terminated by Si—H bonds or Si—CN bonds with respect to the silicon layer on which the wavelength conversion layer is formed. it can.
As a result, the interface state in the vicinity of the surface of the silicon layer can be reduced, so that the probability that electrons excited at a short wavelength in the wavelength conversion layer are non-radiatively recombined is reduced, and wavelength conversion is performed (long wavelength The luminous efficiency of light can be improved, and the sensitivity to the short wavelength region of visible light can be further improved.

  And also in manufacturing each embodiment of the solid-state imaging device of the first aspect of the present invention shown in FIGS. 4 to 8, the termination process is performed after the wavelength conversion layer 3 is formed. The dangling bonds generated near the interface of the silicon layer 1 can be terminated to reduce the interface state.

  Here, the termination process in the case of manufacturing the embodiment of the solid-state imaging device shown in FIG. 4 will be described with reference to FIGS. 9 and 10.

First, process drawings showing a part of the manufacturing process of the solid-state imaging device of FIG. 4 are shown in FIGS. 9A to 9C.
As shown in FIG. 9A, a photoelectric conversion region 2, a transfer channel region 5, and a channel stop region 6 are formed in the silicon layer 1, and a SiO ₂ layer 9 is formed on the surface of the silicon layer 1. A transfer electrode 7 is formed on the silicon layer 1 via a SiO ₂ layer (gate insulating film). The SiO ₂ layer 9 is not shown in FIG. 4 because it is difficult to distinguish a clear boundary from the upper SiO ₂ layer.
Next, from the state shown in FIG. 9A, for example, by performing ion implantation using the above-described thick film resist as a mask, as shown in FIG. 9B, near the surface of the silicon layer 1 above the photoelectric conversion region 2. The wavelength conversion layer 3 is formed.
Then, if necessary, the wavelength conversion layer 3 is crystallized and stabilized by performing a high temperature heat treatment step.
Next, as illustrated in FIG. 9C, a light shielding film 8 is formed above the transfer electrode 7.

When the termination process is performed, the termination process is incorporated between the process of forming the wavelength conversion layer 3 in FIG. 9B and the process of forming the light shielding film 8 in FIG. 9C.
Moreover, when performing the high temperature heat treatment process which crystallizes and stabilizes the wavelength conversion layer 3, a termination process process is performed after the high temperature heat treatment process.
Note that a termination treatment step may be incorporated after the light shielding film 8 is formed.

  Each form of the termination | terminus processing process integrated between FIG. 9B and FIG. 9C is shown to FIG. 10A-FIG. 10E, respectively.

The process shown in FIG. 10A is a case where hydrogen annealing treatment is performed.
By placing the substrate in the hydrogen atmosphere, as shown in FIG. 10A, the silicon layer 1 on which the wavelength conversion layer 3 is formed is supplied with hydrogen from the hydrogen (H ₂ ) atmosphere 101 through the SiO ₂ layer 9. Supply.
Thereby, a dangling bond can be terminated by a Si—H bond.

The process shown in FIG. 10B is a case where cyan processing is performed using CN plasma.
By generating CN plasma in a gas atmosphere containing cyan (CN), as shown in FIG. 10B, cyan treatment is performed by CN plasma 102 on the silicon layer 1 on which the wavelength conversion layer 3 is formed.
At this time, the substrate may be heat-treated.
Conditions for the cyan treatment are, for example, a substrate temperature of 60 to 300 ° C. and a pressure of 1.33 to 665 Pa.

The process shown in FIG. 10C is a case where the cyan treatment is performed by immersing in a cyan-containing solution.
As shown in FIG. 10C, the entire substrate is immersed in a cyan-containing solution (cyan solution) 103, whereby cyan treatment is performed on the silicon layer 1 on which the wavelength conversion layer 3 is formed.
As the cyan solution, for example, an HCN solution or a cyan solution containing crown ether can be used.
In particular, when a cyan solution containing crown ether is used, the crown ether forms a complex with a cation (potassium ion or the like) of the cyan solution, so that the cation remains in the silicon layer 1, the SiO ₂ layer 9, the transfer electrode 7, and the like. There is an effect to suppress this.
As conditions for the cyan treatment, for example, the liquid temperature of the cyan solution 103 is set to room temperature to 100 ° C., and the treatment time is set to a range of 10 seconds to 30 minutes.

The step shown in FIG. 10D is a case where cyan treatment is performed by applying or dropping a solution containing cyan.
While rotating the substrate, as shown in FIG. 10D, a solution containing cyan (cyan solution) 103 is poured into the substrate surface and applied or dropped. Thereby, cyan treatment can be performed on the silicon layer 1 on which the wavelength conversion layer 3 is formed.
Also in this case, as the cyan solution, for example, an HCN solution or a cyan solution containing crown ether can be used. In particular, when a cyan solution containing crown ether is used, there is an effect of suppressing the cation (potassium ion or the like) of the cyan solution from remaining.
As conditions for the cyan treatment, when the cyan solution 103 is poured onto the substrate surface, for example, the rotation of the substrate is set to 50 rpm and the time is set within a range of 10 seconds to 30 minutes. When the cyan solution 103 is dropped on the substrate surface, for example, the time is 10 minutes.

The step shown in FIG. 10E is a case where cyan treatment is performed by implanting ions containing carbon C and nitrogen N.
Using a mask (not shown), as shown in FIG. 10E, ions 104 containing carbon C and nitrogen N are implanted into the silicon layer 1 where the wavelength conversion layer 3 is formed to perform cyan treatment. .
In this case, carbon C and nitrogen N may be ion-implanted at the same time, or one of them may be implanted sequentially.

In addition, when hydrogen annealing treatment is performed as a termination treatment, Si—H bonds are generally broken at 550 to 600 ° C. Therefore, if there is a high-temperature process during the manufacturing process, the silicon layer 1 The dangling bond at the interface may not be terminated completely, or the dangling bond once terminated by hydrogen annealing may be restored.
Further, the Si—H bond may be broken depending on the use environment (humidity, temperature, ultraviolet light, contact with water or other substances), and the like.

On the other hand, when the cyan treatment is performed as the termination treatment, it is stable in terms of energy, and the bond with the dangling bond (Si-CN bond) is not broken even at a high temperature. Regeneration of dangling bonds can be suppressed when using a solid-state imaging device).
Thereby, it becomes possible to perform a high temperature process and the freedom degree of a manufacturing process can be raised.

Next, a specific embodiment of the second present invention will be described.
FIG. 11 shows a schematic configuration diagram (cross-sectional view) of an embodiment of the solid-state imaging device according to the second aspect of the present invention.
The present embodiment is applied to a CMOS type solid-state imaging device.

In the solid-state imaging device 51 of the present embodiment, as shown in FIG. 11, a photoelectric conversion region 60 constituting a photodiode is formed in a single crystal silicon layer (semiconductor substrate) 52, and one photoelectric conversion region 60 and A unit pixel is composed of the MOS transistor including the gate electrode 54. FIG. 11 shows a cross-sectional view of three pixels.
An imaging region is configured by arranging a large number of unit pixels having such a configuration (for example, in a matrix).
Although not shown, a peripheral circuit unit such as a circuit for driving the solid-state image sensor, a region where a pad connected to an external wiring, or the like is provided is provided around the imaging region.

On the front surface side (lower side in the figure) of the silicon layer 52, a gate electrode 54 of a MOS transistor and a multilayer wiring layer 55 are formed in an insulating layer 53 to constitute a wiring portion.
The insulating layer 53 constituting the wiring part is bonded to the relatively thick support substrate 61.

  On the other hand, a planarizing film 57 is formed on the back surface side (upper side in the drawing) of the silicon layer 52 via a silicon oxide film 56. On the planarizing film 57, a color filter 58 and an on-chip lens 59 are formed for each unit pixel.

By configuring the solid-state imaging device 51 in this way, light is irradiated to the photoelectric conversion region 60 through the on-chip lens 59 from the back side of the substrate. That is, the solid-state imaging device 51 has a backside illumination type structure.
Since the back-illuminated structure is employed, light can be widely incident on the photoelectric conversion region 60, so that sensitivity can be increased.

In the present embodiment, in particular, the wavelength conversion layer 62 is formed near the interface on the back surface side of the silicon layer 52 where the photoelectric conversion region 60 is formed.
The wavelength conversion layer 62 is made of a silicon material having a property of absorbing light having a short wavelength and emitting light having a long wavelength. Thereby, the sensitivity with respect to the short wavelength area | region of visible light can be improved. As the silicon material having such properties, the above-described strained silicon layer and nanoscale silicon particles can be used.
Such a silicon material has strong absorption with respect to incident light of 350 nm to 450 nm, for example, and emits light of 500 nm to 700 nm depending on the size of particles and the like. The light converted into the long wavelength region is absorbed in the photoelectric conversion region 60.
Therefore, by providing the wavelength conversion layer 62, a sufficient signal charge can be obtained from incident light of 350 nm to 450 nm, which has conventionally been low in sensitivity, and the sensitivity in the short wavelength region of visible light can be improved. .

  The wavelength conversion layer 62 does not need to be formed on all pixels, and it is also effective to form the wavelength conversion layer 62 only on a pixel whose sensitivity is to be improved, for example, a pixel in a blue region.

The solid-state image sensor 51 of the present embodiment can be manufactured, for example, as follows.
As shown in FIG. 12A, an SOI substrate 70 in which a silicon layer (single crystal silicon layer) 73 is formed on a silicon substrate 71 via a silicon oxide film 72 is prepared.
First, as shown in FIG. 12B, the photoelectric conversion region 60 is formed in the silicon layer 73 of the SOI substrate 70. This silicon layer 73 becomes the silicon layer 52 of FIG.
Next, as illustrated in FIG. 12C, a wiring portion in which the gate electrode 54 and the multilayer wiring layer 55 are formed in the insulating layer 53 is formed on the surface side of the silicon layer 73.

Subsequently, the support substrate 61 is bonded to the wiring portion (53, 54, 55) side with respect to the SOI substrate 70 on which the wiring portion is formed. At this time, in order to bond the insulating layer 53 of the wiring portion and the support substrate 61, bonding is performed via an adhesive layer (not shown).
Next, the SOI substrate 70 is turned upside down so that the support substrate 61 is on the lower side as shown in FIG. 12D.

Subsequently, the back side of the SOI substrate 70, that is, the side opposite to the side where the wiring portion is formed is thinned. For example, the silicon substrate 71 on the back side of the SOI substrate 70 is thinned to some extent by polishing such as CMP (Chemical Mechanical Polishing).
Next, wet etching is performed on the remaining silicon substrate 71 using an etching solution, thereby completely removing the silicon substrate 71 as shown in FIG. 13E. At this time, the silicon oxide film 72 remains on the silicon layer 73, and this silicon oxide film 72 becomes the silicon oxide film 56 shown in FIG.

Subsequently, as shown in FIG. 13F, a strained silicon layer or nanoscale is formed in the vicinity of the interface on the back side of the silicon layer 52 (within 100 nm from the interface) through the silicon oxide film 56 where the photoelectric conversion region 60 is formed. A wavelength conversion layer 62 made of silicon particles is formed.
The wavelength conversion layer 62 can be formed by performing ion implantation on the silicon layer 71 using inert ions (Ar, Ne, etc.) or active ions (P, B, Si, etc.).
At this time, a silicon light emitting layer having a thickness of 1 nm to 10 nm is formed in the vicinity of the surface as the wavelength conversion layer 62 by selecting an appropriate acceleration voltage and dose corresponding to the type of ions to be used. Can do. For example, the acceleration voltage is set to 15 keV, and the dose is increased to 10 ¹⁵ / cm ² as compared with the case where a normal semiconductor region is formed by ion implantation.

Strained silicon layers and nanoscale silicon particles show a change in band gap depending on the size of the particles and the like, and an absorption region and a light emitting region change depending on the size.
Therefore, if the ion implantation conditions are changed, it is possible to easily change the wavelength region where the sensitivity is desired to be increased.

  Subsequently, the wavelength conversion layer 62 is crystallized and stabilized, for example, by performing a high-temperature heat treatment step at 500 ° C. for 30 minutes.

Thereafter, a planarizing film 57 is formed on the silicon oxide film 56, and a color filter 58 and an on-chip lens 59 are formed thereon.
In this way, the solid-state imaging device 51 having the configuration shown in FIG. 11 can be manufactured.

According to the configuration of the solid-state imaging device 51 of the above-described embodiment, the wavelength conversion layer 62 is provided in the vicinity of the interface on the back surface side of the silicon layer 52 where the photoelectric conversion region 60 is formed. Incident light in the short wavelength region of visible light with low sensitivity can be converted into a long wavelength (high in spectral sensitivity) by the wavelength conversion layer 62.
Thereby, since the incident light in the short wavelength region of visible light can be sufficiently absorbed by the photoelectric conversion region 60, the sensitivity to the incident light in the short wavelength region of visible light can be improved.

Further, according to the configuration of the solid-state imaging device 51 of the present embodiment, the wavelength conversion layer 62 is formed of a strained silicon layer or nanoscale silicon particles, and is formed of silicon. It is possible to form the silicon layer 52 so as not to contain impurities (such as metal elements).
Thereby, it is possible to manufacture the solid-state imaging device 51 having high sensitivity even in a short wavelength region at a relatively low cost. In addition, since it is possible to avoid the influence of impurities, it is possible to realize a solid-state image sensor 51 with good characteristics and high reliability, and it is possible to manufacture the solid-state image sensor 51 having good characteristics with a high yield. Become.

The configuration of the solid-state imaging device 51 of the present embodiment makes it possible to obtain sufficient sensitivity even when the pixels are miniaturized.
Therefore, it is possible to reduce the size of the pixels, thereby increasing the number of pixels and reducing the size.

Next, as another embodiment of the second aspect of the present invention, a schematic configuration diagram (cross-sectional view) of a solid-state imaging device is shown in FIG.
In the solid-state imaging device 81 of the present embodiment, a p-type (p ⁺ ) positive charge accumulation region 63 is provided above the n-type photoelectric conversion region 60 of each unit pixel. And a wavelength conversion layer 62 made of silicon is provided between the silicon layer 52 and the interface on the back side of the silicon layer 52.
Other configurations are the same as those of the solid-state imaging device 51 of the embodiment shown in FIG.

The solid-state image sensor 81 of the present embodiment can be manufactured as follows, for example.
As shown in FIG. 15, an n-type photoelectric conversion region 60 and a p-type positive charge storage region 63 are formed in the silicon layer 73 (52) of the SOI substrate 70 having the configuration shown in FIG. 12A. Either order may be sufficient as the order which forms each area | region 60,63.
Thereafter, the solid-state imaging device 81 can be manufactured in the same manner as the manufacturing process of the previous embodiment shown in FIGS. 12C to 13G.
However, the wavelength conversion layer 62 is formed in a shallow place closer to the interface on the back surface side of the silicon layer 52 than the positive charge accumulation region 63.

In the solid-state imaging device 81 according to the present embodiment, by providing the positive charge accumulation region 63 on the photoelectric conversion region 60, it is possible to suppress dark current caused by an interface state near the surface of the silicon layer 52. it can.
Even in such a configuration in which the positive charge accumulation region 63 is provided, the wavelength conversion layer 62 can be provided by applying the present invention.

Next, a schematic configuration diagram (cross-sectional view) of a solid-state imaging device is shown in FIG. 16 as still another embodiment of the second aspect of the present invention.
As shown in FIG. 16, the solid-state imaging device 82 of the present embodiment has a configuration in which a light shielding layer 64 is provided around the wavelength conversion layer 62 of each unit pixel.
As the material of the light shielding layer 64, a material that absorbs or reflects light with respect to the wavelength of light generated from the wavelength conversion layer 62 and light in the vicinity thereof is used. Thereby, the light generated from the wavelength conversion layer 62 can be prevented from entering the adjacent pixels.
Other configurations are the same as those of the solid-state imaging device 51 of the embodiment shown in FIG.

The solid-state image sensor 82 of the present embodiment can be manufactured as follows, for example.
First, a manufacturing process similar to the manufacturing process shown in FIGS. 12A to 13E of the previous embodiment is performed.
Next, grooves are formed in the silicon layer 52 around the photoelectric conversion region 60 by dry etching.
Subsequently, the material of the light shielding layer 64 is embedded in the groove. As a result, as shown in FIG. 17A, a light shielding layer 64 is formed in the silicon layer 52 around the photoelectric conversion region 60 of each unit pixel.
Next, as shown in FIG. 17B, a strained silicon layer or nanoscale is formed in the vicinity of the interface on the back surface side of the silicon layer 52 (within 100 nm from the interface) of the portion where the photoelectric conversion region 60 is formed through the silicon oxide film 56. A wavelength conversion layer 62 made of silicon particles is formed.
The other steps are the same as the manufacturing steps of the solid-state imaging device 51 of the previous embodiment shown in FIG.

According to the configuration of the solid-state imaging element 82 of the present embodiment described above, the wavelength conversion layer 62 is provided in the vicinity of the interface on the back side of the silicon layer 52 where the photoelectric conversion region 60 is formed, as in the previous embodiment. The sensitivity to incident light in the short wavelength region of visible light can be improved.
Further, it is possible to manufacture the solid-state imaging device 82 having high sensitivity even in a short wavelength region at a relatively low cost. In addition, since it is possible to avoid the influence of impurities, it is possible to realize a solid-state image sensor 82 with good characteristics and high reliability, and it is possible to manufacture the solid-state image sensor 82 with good characteristics with high yield. Become.

The configuration of the solid-state imaging device 82 of the present embodiment makes it possible to obtain sufficient sensitivity even when the pixels are miniaturized.
Therefore, it is possible to reduce the size of the pixels, thereby increasing the number of pixels and reducing the size.

  Furthermore, according to the configuration of the solid-state imaging device 82 of the present embodiment, since the light shielding layer 64 is formed around the wavelength conversion layer 62, the light generated by the wavelength conversion layer 62 is transmitted to other adjacent pixels. Can be prevented from entering the photoelectric conversion region 60.

In each of the above-described embodiments, the solid-state imaging device is manufactured using the SOI substrate 70 in which the silicon layer (single crystal silicon layer) 73 is formed on the silicon substrate 71 via the silicon oxide film 72. However, it is also possible to manufacture a solid-state imaging device from a single-layer silicon substrate.
In the case of manufacturing from a single-layer silicon substrate, for example, a step of thinning the back surface side of the silicon substrate or a step of forming a silicon oxide film at the interface on the back surface side of the silicon substrate are performed as necessary.

  In each of the above-described embodiments, the present invention is applied to a MOS type solid-state imaging device. However, the present invention is also applied to solid-state imaging devices having other configurations as long as the solid-state imaging device has a back-illuminated structure. It is possible to apply.

By the way, when manufacturing the above-described solid-state imaging device of the present invention, as in the case of manufacturing the solid-state imaging device of the first invention, a nanoscale silicon layer or distorted silicon is used as the wavelength conversion layer. The layer is formed by ion implantation. At this time, a dangling bond may be formed in the vicinity of the SiO ₂ / Si interface.
In this way, when a dangling bond is formed at the interface, electrons excited by incident light (electrons generated in the wavelength conversion layer and its vicinity) are trapped at the interface state, causing non-radiative recombination. Therefore, there is a possibility that sufficient light emission efficiency cannot be obtained with the wavelength conversion layer. In this case, since the conversion efficiency improvement in the photoelectric conversion region, which should be originally obtained by forming the wavelength conversion layer, cannot be sufficiently achieved, the effect of improving the sensitivity by the wavelength conversion layer can be sufficiently obtained. Disappear.

Therefore, dangling bonds generated near the interface of the silicon layer are terminated to reduce the interface state.
Preferably, hydrogen annealing treatment or cyan treatment is performed as the termination treatment step.
In addition to these hydrogen annealing treatment and cyan treatment, for example, termination treatment is possible even if fluorine is used, but fluorine has a drawback that it is dangerous and difficult to handle.

Examples of the termination processing method include the following methods described above.
(1) A hydrogen annealing process is performed in a hydrogen atmosphere.
(2) Cyan treatment is performed in an atmosphere containing cyan (CN).
(3) Cyan plasma is generated by generating CN plasma in an atmosphere containing cyan (CN).
(4) Cyan treatment is performed by dipping in a solution containing cyan.
(5) Cyan treatment is performed by applying or dropping a solution containing cyan on the surface.
(6) Cyan treatment is performed by implanting ions containing carbon C and nitrogen N.

By performing hydrogen annealing treatment or cyan treatment by these methods, dangling bonds can be terminated by Si—H bonds or Si—CN bonds with respect to the silicon layer on which the wavelength conversion layer is formed. it can.
As a result, the interface state in the vicinity of the surface of the silicon layer can be reduced, so that the probability that electrons excited at a short wavelength in the wavelength conversion layer are non-radiatively recombined is reduced, and wavelength conversion is performed (long wavelength The luminous efficiency of light can be improved, and the sensitivity to the short wavelength region of visible light can be further improved.

  When manufacturing each embodiment of the solid-state imaging device according to the second aspect of the present invention shown in FIGS. 11, 14, and 16, the termination process is performed after the wavelength conversion layer 62 is formed. By doing so, dangling bonds generated near the interface of the silicon layer 71 can be terminated, and the interface state can be reduced.

Here, the termination process in the case of manufacturing the solid-state imaging device 51 shown in FIG. 11 will be described with reference to FIGS. 13 and 18 to 19.
In this case, a termination processing step is incorporated between the step of forming the wavelength conversion layer 62 in FIG. 13F and the step of forming the planarizing film 57, the color filter 58, and the on-chip lens 59 in FIG. 13G.
Moreover, when performing the high temperature heat treatment process which crystallizes and stabilizes the wavelength conversion layer 62, a termination process process is performed after the high temperature heat treatment process.

  Each form of the termination | terminus processing process integrated between FIG. 13F and FIG. 13G is shown to FIG. 18A-FIG. 19E, respectively.

The process shown in FIG. 18A is a case where hydrogen annealing treatment is performed.
By placing the substrate in a hydrogen atmosphere, as shown in FIG. 18A, hydrogen is supplied from the hydrogen (H ₂ ) atmosphere 101 through the silicon oxide film 56 to the silicon layer 52 on which the wavelength conversion layer 62 is formed. Supply.
Thereby, a dangling bond can be terminated by a Si—H bond.

The process shown in FIG. 18B is a case where cyan processing is performed using CN plasma.
By generating CN plasma in a gas atmosphere containing cyan (CN), as shown in FIG. 18B, cyan treatment is performed by the CN plasma 102 on the silicon layer 52 on which the wavelength conversion layer 62 is formed.
At this time, the substrate may be heat-treated.
Conditions for the cyan treatment are, for example, a substrate temperature of 60 to 300 ° C. and a pressure of 1.33 to 665 Pa.

The process shown in FIG. 18C is a case where the cyan treatment is performed by dipping in a solution containing cyan.
As shown in FIG. 18C, the entire substrate is immersed in a cyan-containing solution (cyan solution) 103 to perform cyan treatment on the silicon layer 52 on which the wavelength conversion layer 62 is formed.
As the cyan solution, for example, an HCN solution or a cyan solution containing crown ether can be used.
In particular, when a cyan solution containing crown ether is used, the crown ether forms a complex with a cation (potassium ion or the like) of the cyan solution, so that cations remain in the silicon layer 52, the silicon oxide film 56, and the like. effective.
As conditions for the cyan treatment, for example, the liquid temperature of the cyan solution 103 is set to room temperature to 100 ° C., and the treatment time is set to a range of 10 seconds to 30 minutes.

The process shown in FIG. 19D is a case where cyan treatment is performed by applying or dropping a solution containing cyan.
While rotating the substrate, as shown in FIG. 19D, a solution containing cyan (cyan solution) 103 is poured into the substrate surface and applied or dropped. Thereby, cyan treatment can be performed on the silicon layer 52 on which the wavelength conversion layer 62 is formed.
Also in this case, as the cyan solution, for example, an HCN solution or a cyan solution containing crown ether can be used. In particular, when a cyan solution containing crown ether is used, there is an effect of suppressing the cation (potassium ion or the like) of the cyan solution from remaining.
As conditions for the cyan treatment, when the cyan solution 103 is poured onto the substrate surface, for example, the rotation of the substrate is set to 50 rpm and the time is set within a range of 10 seconds to 30 minutes. When the cyan solution 103 is dropped on the substrate surface, for example, the time is 10 minutes.

The step shown in FIG. 19E is a case where cyan treatment is performed by implanting ions containing carbon C and nitrogen N.
As shown in FIG. 19E, using the mask 110, a portion of the silicon layer 52 where the wavelength conversion layer 62 is formed is implanted with ions 104 containing carbon C and nitrogen N to perform cyan treatment.
In this case, carbon C and nitrogen N may be ion-implanted at the same time, or one of them may be implanted sequentially.

  Further, when the solid-state imaging device 82 shown in FIG. 16 is manufactured, not only the termination processing step after the wavelength conversion layer 62 is formed but also the silicon layer 52 is terminated before the light shielding layer 64 is formed. Can be performed. Thus, by performing the termination process on the silicon layer 52 before the light shielding layer 64 is formed, dangling bonds generated near the wall surface of the groove when the groove is formed in the silicon layer 52 are terminated. Therefore, generation of dark current due to dangling bonds can be suppressed.

As described above, FIGS. 20A to 20C show a manufacturing process in the case where the termination process is performed twice on the silicon layer 52 in total.
First, the same manufacturing process as that shown in FIGS. 12A to 13E is performed.
Next, as shown in FIG. 20A, a groove 52A is formed in the silicon layer 52 around the photoelectric conversion region 60 by dry etching.
Next, as shown in FIG. 20B, a termination process is performed on the silicon layer 52 in which the groove 52A is formed. FIG. 20B shows a case where, for example, the cyan treatment is performed by pouring or dropping a solution containing cyan (cyan solution) 103 as the termination treatment. More preferably, a cyan solution 103 containing crown ether is used.
Also in this case, for example, as described with reference to FIG. 19D, when the cyan solution 103 is poured onto the substrate surface, for example, the rotation of the substrate is set to 50 rpm and the time is within a range of 10 seconds to 30 minutes. When the cyan solution 103 is dropped on the substrate surface, for example, the time is 10 minutes.
Other termination processing methods may be employed.
Next, as shown in FIG. 20C, the material of the light shielding layer 64 is embedded in the groove of the silicon layer 52. The state shown in FIG. 20C is the same as the state shown in FIG. 17A.
Subsequently, as shown in FIG. 17B, the wavelength conversion layer 62 is formed.
Thereafter, as shown in FIGS. 18A to 19E, termination processing is performed on the silicon layer 52 on which the wavelength conversion layer 62 is formed.
Further, the planarization film 57, the color filter 58, and the on-chip lens 59 are formed, and the solid-state imaging device 82 shown in FIG. 16 can be manufactured.

When the solid-state imaging device of the first aspect of the invention or the solid-state imaging element of the second aspect of the invention is manufactured, in the case of performing a termination process step for dangling bonds near the interface of the silicon layer, It is also possible to use hydrogen annealing treatment and cyan treatment in combination.
Thus, for example, even when only one process cannot be terminated sufficiently, it is possible to terminate completely.

If necessary, a hydrogen annealing treatment or a cyan treatment for termination may be performed after the step of thinning the SiO ₂ layer on the silicon layer. This is particularly effective when the SiO ₂ layer is formed thick and it is difficult to obtain the effects of hydrogen annealing and cyan treatment.

  In addition, when the pixel which forms a wavelength conversion layer is only a pixel of a specific color, it is good also considering only the part of the pixel of the specific color as the location which performs a termination process.

  In addition, when the pixel for forming the wavelength conversion layer is only a pixel of a specific color, for example, a mask for ion implantation for forming the wavelength conversion layer or a mask for ion implantation of ions containing C or N Can be shared with a mask for forming a color filter of the color, and the number of masks can be reduced.

  Furthermore, when manufacturing the solid-state imaging device of the second aspect of the present invention, that is, a solid-state imaging device having a backside illumination type structure, the side on which the wavelength conversion layer is formed (the back side) of the silicon layer on which the light-receiving sensor portion is formed. Termination treatment may also be performed on the surface opposite to the side (surface side on which the wiring layer is formed). In that case, a termination process is performed on the silicon layer before forming the wiring layer.

  The imaging apparatus of the present invention comprises at least the solid-state imaging device of the present invention, means (optical system) for guiding light from the imaging target to the solid-state imaging element, and means for driving the solid-state imaging element. In addition, when signal processing is performed inside the apparatus rather than outside the apparatus, a means (signal processing means) for processing a signal obtained by the solid-state imaging device is also provided.

  And the imaging device (camera) which images images, such as a still image and a moving image, can be comprised using the solid-state image sensor of each embodiment mentioned above.

  Specifically, for example, as an embodiment of the imaging apparatus of the present invention, as shown in FIG. 21, a schematic configuration diagram (block diagram) of the imaging apparatus, A lens 41 and the like as means (optical system) for guiding light from the imaging target to the solid-state image sensor 42, a drive circuit 43 for driving the solid-state image sensor 42, and a signal as means for signal processing the signal obtained by the solid-state image sensor 42 The imaging device 40 is configured by including the processing circuit 44.

As described above, the solid-state imaging device of the present invention can improve the sensitivity of the short wavelength component of visible light by providing the wavelength conversion layer made of silicon near the surface of the photoelectric conversion region.
Since the imaging apparatus of the present invention is configured to include the solid-state imaging device of the present invention, the sensitivity to the short wavelength component of visible light is increased similarly to the sensitivity to other wavelength components, and good color reproduction is achieved. Have sex.

  The present invention is not limited to the above-described embodiment, and various other configurations can be taken without departing from the gist of the present invention.

It is a schematic sectional drawing explaining the structure of the solid-state image sensor of this invention. It is a schematic sectional drawing explaining the other structure of the solid-state image sensor of this invention. It is a top view of one embodiment of the solid-state image sensor of the 1st present invention. It is sectional drawing in AA of FIG. It is a schematic block diagram (sectional drawing of one pixel) of other embodiment of the solid-state image sensor of 1st this invention. It is a schematic block diagram (sectional drawing of 1 pixel) of other embodiment of the solid-state image sensor of 1st this invention. It is a schematic block diagram (sectional drawing of one pixel) of another embodiment of the solid-state image sensor of 1st this invention. It is a schematic block diagram (sectional drawing of one pixel) of further another embodiment of the solid-state image sensor of 1st this invention. FIGS. 5A to 5C are process diagrams showing a manufacturing process of the solid-state imaging device of FIG. A to E are process diagrams showing each form of a termination process in the manufacturing process of the solid-state imaging device in FIG. 1. It is a schematic block diagram (sectional drawing) of one Embodiment of the solid-state image sensor of 2nd this invention. FIGS. 12A to 12D are process diagrams showing a manufacturing process of the solid-state imaging device of FIG. EG It is process drawing which shows the manufacturing process of the solid-state image sensor of FIG. It is a schematic block diagram (sectional drawing) of other embodiment of the solid-state image sensor of 2nd this invention. It is process drawing which shows 1 process of the manufacturing process of the solid-state image sensor of FIG. It is a schematic block diagram (sectional drawing) of other embodiment of the solid-state image sensor of 2nd this invention. FIG. 17 is a process diagram showing a manufacturing process of the solid-state image sensor of FIG. 16. FIGS. 12A to 12C are process diagrams showing each form of a termination process in the manufacturing process of the solid-state imaging device of FIG. D, E It is process drawing which shows each form of the termination process process in the manufacturing process of the solid-state image sensor of FIG. FIG. 17 is a process diagram illustrating a manufacturing process of the solid-state imaging device in FIG. 16 in a case where AC termination processing is performed twice. 1 is a schematic configuration diagram (block diagram) of an embodiment of an imaging apparatus of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Silicon substrate, 2 Photoelectric conversion area | region, 3,18 Wavelength conversion layer, 4 Light shielding layer, 5 Transfer channel area | region, 6 Channel stop area | region, 7 Transfer electrode, 8 Light shielding film, 11 Imaging area | region, 12 Light reception sensor part, 13 Vertical transfer Register, 14 Horizontal transfer register, 17 Silicon layer, 19 Positive charge storage area, 21 In-layer lens, 22 Color filter, 23 On-chip lens, 40 Imaging device, 41 Lens, 42 Solid-state imaging device, 43 Drive circuit, 44 Signal processing Circuit, 51, 81, 82 Solid-state imaging device, 52, 73 Silicon layer, 53 Insulating layer, 54 Gate electrode, 55 Wiring layer, 56, 72 Silicon oxide film, 57 Planarization film, 58 Color filter, 59 On-chip lens, 60 photoelectric conversion region, 61 support substrate, 62 wavelength conversion layer, 63 positive charge accumulation region, 64 Light shielding layer, 70 SOI substrate, 71 silicon substrate

Claims (16)

In the silicon layer, a photoelectric conversion unit made of a photodiode is formed to form a pixel,
A solid-state imaging device in which an imaging region is configured by arranging a plurality of the pixels,
In at least some of the pixels, a wavelength conversion layer is formed near the surface of the photoelectric conversion unit,
The wavelength conversion layer is composed of strained silicon or nanoscale silicon particles ,
In the pixel in which the wavelength conversion layer is formed, a solid-state imaging device in which a light-blocking layer that absorbs or reflects light having a light emission wavelength of the wavelength conversion layer and a wavelength in the vicinity thereof is provided around the wavelength conversion layer . The solid-state imaging device according to claim 1 , wherein the light shielding layer is formed of a wiring layer or an electrode layer partially embedded in the silicon layer. In the silicon layer, a photoelectric conversion unit made of a photodiode is formed to form a pixel,
A solid-state imaging device in which an imaging region is configured by arranging a plurality of the pixels,
In at least some of the pixels, a wavelength conversion layer is formed near the surface of the photoelectric conversion unit,
The wavelength conversion layer is composed of strained silicon or nanoscale silicon particles ,
A solid-state imaging device in which a dangling bond at an interface on the surface side of the silicon layer in which the wavelength conversion layer is formed is terminated . The solid-state imaging device according to claim 3 , wherein the dangling bond is terminated with a compound of carbon and nitrogen or an ion of the compound. A photoelectric conversion region is formed in the silicon layer to form a pixel,
An imaging region is configured by arranging a plurality of the pixels,
A wiring layer is formed in an insulating layer provided on the surface side of the silicon layer,
A solid-state imaging device having a configuration in which light is irradiated from the back side of the silicon layer to the photoelectric conversion region,
In at least some of the pixels, a wavelength conversion layer is provided in the vicinity of the interface on the back surface side of the silicon layer in a portion where the photoelectric conversion region is formed,
The wavelength conversion layer is composed of strained silicon or nanoscale silicon particles ,
In the pixel in which the wavelength conversion layer is formed, a solid-state imaging device in which a light-blocking layer that absorbs or reflects light having a light emission wavelength of the wavelength conversion layer and a wavelength in the vicinity thereof is provided around the wavelength conversion layer . A photoelectric conversion region is formed in the silicon layer to form a pixel,
An imaging region is configured by arranging a plurality of the pixels,
A wiring layer is formed in an insulating layer provided on the surface side of the silicon layer,
A solid-state imaging device having a configuration in which light is irradiated from the back side of the silicon layer to the photoelectric conversion region,
In at least some of the pixels, a wavelength conversion layer is provided in the vicinity of the interface on the back surface side of the silicon layer in a portion where the photoelectric conversion region is formed,
The wavelength conversion layer is composed of strained silicon or nanoscale silicon particles ,
A solid-state imaging device in which a dangling bond at an interface on the back surface side of the silicon layer in which the wavelength conversion layer is formed is terminated . The solid-state imaging device according to claim 6 , wherein the dangling bond is terminated with a compound of carbon and nitrogen or an ion of the compound. A method of manufacturing a solid-state imaging device in which a photoelectric conversion unit including a photodiode is formed in a silicon layer to form a pixel, and a plurality of the pixels are arranged to form an imaging region,
Forming the photoelectric conversion part in the silicon layer;
Forming a wavelength conversion layer made of strained silicon or nanoscale silicon particles near the surface of the photoelectric conversion part of the silicon layer;
The wavelength conversion layer is formed, the manufacturing method of at least a solid-state imaging device and a step of terminating dangling bonds at the interface of said surface side of said silicon layer. The method for manufacturing a solid-state imaging device according to claim 8 , wherein the dangling bond is terminated with a compound of carbon and nitrogen or an ion of the compound. A photoelectric conversion region is formed in the silicon layer to form a pixel, a plurality of the pixels are arranged to form an imaging region, a wiring layer is formed in an insulating layer provided on the surface side of the silicon layer, A method of manufacturing a solid-state imaging device having a configuration in which light is irradiated to the photoelectric conversion region from the back side of the silicon layer,
Forming the photoelectric conversion region in the silicon layer;
Forming a wavelength conversion layer made of strained silicon or nanoscale silicon particles in the vicinity of the back surface side interface of the silicon layer of the portion where the photoelectric conversion region is formed in at least some of the pixels;
The wavelength conversion layer is formed, the manufacturing method of at least a solid-state imaging device and a step of terminating dangling bonds at the interface of the back surface side of the silicon layer. The method of manufacturing a solid-state imaging device according to claim 10 , wherein the dangling bond is terminated with a compound of carbon and nitrogen or an ion of the compound. In the silicon layer, a photoelectric conversion unit made of a photodiode is formed to form a pixel,
A plurality of the pixels are arranged to form an imaging region, and in at least some of the pixels, a wavelength conversion layer is formed near the surface of the photoelectric conversion unit, and the wavelength conversion layer is made of strained silicon or nanoscale In the pixel, which is made of silicon particles and has the wavelength conversion layer formed thereon, a light-shielding layer that absorbs or reflects light having the emission wavelength of the wavelength conversion layer and a wavelength in the vicinity thereof is provided around the wavelength conversion layer. A solid-state imaging device,
Means for guiding light from the imaging target to the solid-state imaging device;
An imaging apparatus comprising at least a driving unit for the solid-state imaging element. The imaging device according to claim 12 , wherein in the solid-state imaging device, the light shielding layer is formed by a wiring layer or an electrode layer partially embedded in the silicon layer. In the silicon layer, a photoelectric conversion unit made of a photodiode is formed to form a pixel,
A plurality of the pixels are arranged to form an imaging region, and in at least some of the pixels, a wavelength conversion layer is formed near the surface of the photoelectric conversion unit, and the wavelength conversion layer is made of strained silicon or nanoscale A solid-state imaging device made of silicon particles , in which the wavelength conversion layer is formed, dangling bonds at the interface on the surface side of the silicon layer are terminated, and
Means for guiding light from the imaging target to the solid-state imaging device;
An imaging apparatus comprising at least a driving unit for the solid-state imaging element. A photoelectric conversion region is formed in the silicon layer to form a pixel, a plurality of the pixels are arranged to form an imaging region, a wiring layer is formed in an insulating layer provided on the surface side of the silicon layer, The photoelectric conversion region is irradiated with light from the back side of the silicon layer, and at least in a part of the pixels, a wavelength near the interface on the back side of the silicon layer in a portion where the photoelectric conversion region is formed. In the pixel in which the conversion layer is provided, the wavelength conversion layer is made of strained silicon or nanoscale silicon particles , and the wavelength conversion layer is formed, the emission wavelength of the wavelength conversion layer is around the wavelength conversion layer And a solid-state imaging device provided with a light shielding layer that absorbs or reflects light having a wavelength in the vicinity thereof , and
Means for guiding light from the imaging target to the solid-state imaging device;
An imaging apparatus comprising at least a driving unit for the solid-state imaging element. A photoelectric conversion region is formed in the silicon layer to form a pixel, a plurality of the pixels are arranged to form an imaging region, a wiring layer is formed in an insulating layer provided on the surface side of the silicon layer, The photoelectric conversion region is irradiated with light from the back side of the silicon layer, and at least in a part of the pixels, a wavelength near the interface on the back side of the silicon layer in a portion where the photoelectric conversion region is formed. A conversion layer is provided, the wavelength conversion layer is made of strained silicon or nanoscale silicon particles , and the wavelength conversion layer is formed, and dangling bonds at the back side interface of the silicon layer are terminated. A solid-state imaging device,
Means for guiding light from the imaging target to the solid-state imaging device;
An imaging apparatus comprising at least a driving unit for the solid-state imaging element.

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