JP5123561B2 - Charged particle beam drawing apparatus and charged particle beam drawing method - Google Patents

Description

  The present invention relates to a charged particle beam drawing apparatus and a charged particle beam drawing method, and more particularly to an arbitrary angle figure drawing method used in an electron beam drawing apparatus.

  Lithography technology, which is responsible for the progress of miniaturization of semiconductor devices, is an extremely important process for generating a pattern among semiconductor manufacturing processes. In recent years, with the high integration of LSI, circuit line widths required for semiconductor devices have been reduced year by year. In order to form a desired circuit pattern on these semiconductor devices, a highly accurate original pattern (also referred to as a reticle or a mask) is required. Here, the electron beam (electron beam) drawing technique has an essentially excellent resolution, and is used for producing a high-precision original pattern.

FIG. 20 is a conceptual diagram for explaining the operation of the variable shaped electron beam drawing apparatus.
The variable shaped electron beam (EB) drawing apparatus operates as follows. First, the first aperture 410 is formed with a rectangular opening 411 for forming the electron beam 330. Further, the second aperture 420 is formed with a variable shaping opening 421 for shaping the electron beam 330 that has passed through the opening 411 into a desired rectangular shape. The electron beam 330 irradiated from the charged particle source 430 and passed through the opening 411 is deflected by a deflector. And it passes through a part of variable shaping | molding opening 421, and is irradiated to the sample mounted on the stage. The stage continuously moves in a predetermined direction (for example, the X direction) during drawing. Thus, a rectangular shape that can pass through both the opening 411 and the variable shaping opening 421 is drawn in the drawing region of the sample 340. A method of creating an arbitrary shape by passing both the opening 411 and the variable forming opening 421 is referred to as a variable forming method. Here, the variable shaped opening 421 may be formed with a 45 ° side (not shown) in addition to the 0 ° and 90 ° sides. In this case, a shape that is an integral multiple of 45 degrees is drawn in the drawing region of the sample 340 as a shape that passes through the opening 411 and the variable shaping opening 421.

  In performing such electron beam drawing, first, a layout of a semiconductor integrated circuit is designed, and layout data (design data) is generated. Then, the layout data is converted, and drawing data to be input to the electron beam drawing apparatus is generated. Here, when an arbitrary angle figure having an angle other than an integer multiple of 45 degrees is included in the layout figure, it cannot be drawn at the angle as it is depending on the drawing apparatus, and thus is divided into a plurality of slit figures such as a rectangle and approximated. Then, each divided figure is drawn (for example, see Patent Document 1).

FIG. 21 is a diagram illustrating an example of conventional slit division.
For example, the arbitrary-angle figure 90 is divided into three rectangles of non-arbitrary-angle figures 91, 92, and 93 and approximated. Here, in order to improve the accuracy of the hypotenuse of an arbitrary angle, it is conventionally possible to increase the resolution by narrowing the division width S and increasing the number of slit figures to be divided. FIG. 21 shows an example in which, for example, the division width S is halved to double the resolution, thereby dividing the figure into six rectangles of non-arbitrary-angle figures 94, 95, 96, 97, 98, and 99. ing. Thus, if the division width S is halved, the number of figures to be divided is doubled. However, if the number of figures is greatly increased as shown in FIG. 21, the drawing time also increases accordingly. Along with the high integration of LSI, the amount of pattern data to be drawn is also increasing. For this reason, it is desired to suppress an increase in drawing time as much as possible. Further, when drawing, multiple drawing is performed in order to suppress systematic errors. In multiple drawing, generally, the same plurality of slit figures are drawn in multiple places at the same position.
Japanese Patent Laid-Open No. 06-97055

  As described above, there is a problem that the drawing time increases with an increase in the number of slit divisions of an arbitrary angle figure. In particular, when performing multiple drawing, there is a problem that if the number of divisions increases, the drawing time further increases in proportion to the number of drawing.

  Accordingly, an object of the present invention is to provide a drawing apparatus and method that overcomes such problems, suppresses the number of divided figures, and shortens the drawing time.

A charged particle beam drawing apparatus according to one embodiment of the present invention includes:
Arbitrary angle figures having an angle excluding an integer multiple of 45 degrees and at least one of a rectangle and a trapezoid having an angle of 45 degrees are configured such that one side is substantially the same and has a predetermined width and the other sides are different in length. One side in the same direction as the one side is composed of at least one of a first divided figure data obtained by approximately dividing a plurality of one non-arbitrary figure and a rectangular shape and a trapezoid as described above. The second substantially divided into a plurality of second non-arbitrary figures having different division positions from the first plurality of non-arbitrary figures having substantially the same predetermined width and different lengths on the other sides. A storage unit for storing divided graphic data;
A drawing unit that draws the first plurality of non-arbitrary angle figures and the second plurality of non-arbitrary angle figures on the sample so as to overlap each other using a charged particle beam;
It is characterized by having.

  When the multiple drawing is performed, the division positions are different, so that the dose (electron irradiation amount) distribution can be made finer on the hypotenuse of the arbitrary-angle figure than when drawing at the same position.

  Further, it is preferable that the first and second divided graphic data are stored in the storage unit after being input as separate data files.

  Alternatively, the first and second divided graphic data may be configured so that one data file is stored in the storage unit after being input as one data file.

Moreover, the charged particle beam drawing apparatus according to another aspect of the present invention includes:
A storage unit for inputting and storing graphic data including an arbitrary angle graphic having an angle excluding an integer multiple of 45 degrees;
First, an arbitrary-angle figure is approximately divided into a plurality of first non-arbitrary-angle figures in which one side constituted by at least one of a rectangle and a trapezoid having an angle of 45 degrees has a predetermined width and the other sides are different in length. 1 division part;
A first plurality of non-arbitrary angles, each of which is composed of at least one of a rectangular shape and a trapezoid as described above, and whose one side in the same direction as the one side is orthogonal with a predetermined width. A second dividing unit that approximately divides the figure into a plurality of second non-arbitrary figures having different division positions from the figure;
A drawing unit that draws the first plurality of non-arbitrary angle figures and the second plurality of non-arbitrary angle figures on the sample so as to overlap each other using a charged particle beam;
It is characterized by having.

  As described above, it is also preferable to arbitrarily divide an arbitrary angle figure in the drawing apparatus. As described above, when the multiple drawing is performed, the division position is different, so that the dose distribution can be made finer on the hypotenuse of the arbitrary angle figure than when the drawing is performed at the same position.

The charged particle beam drawing method of one embodiment of the present invention includes:
A first plurality of arbitrary angle figures having an angle excluding an integer multiple of 45 degrees, wherein one side formed of at least one of a rectangle and a trapezoid having an angle of 45 degrees has a predetermined width and the other sides are different in length. A first dividing step of approximately dividing into a non-arbitrary angle figure of
A first drawing step of drawing a first plurality of non-arbitrary angles on a sample using a charged particle beam;
Arbitrary angle figure is composed of at least one of a rectangle and a trapezoid, and is divided from the first plurality of non-arbitrary figures whose one side and the same direction are perpendicular to each other with a predetermined width and different in length A second dividing step of approximating and dividing into a plurality of second non-arbitrary angular figures having different positions;
A second drawing step of drawing a second plurality of non-arbitrary angle figures on the sample so as to overlap with the first plurality of non-arbitrary angle figures using a charged particle beam;
It is characterized by having.

  Further, it is preferable that the second plurality of non-arbitrary-angle figures are divided at division positions shifted from the division positions of the first plurality of non-arbitrary-angle figures in the direction of one side and the direction of the other side, respectively. .

  In the charged particle beam writing method, n-th approximate division and n-th writing are performed. In that case, the k-th (2 ≦ k ≦ n) non-arbitrary figures are divided by 1 / n dimension from the dividing position of the k-1 non-arbitrary-angle figures to the one side described above, and the other side It is preferable that the image is divided at a division position shifted by the 1 / n dimension of the difference from the non-arbitrary angle graphic adjacent in the direction.

  According to the present invention, since the dose distribution can be made finer on the hypotenuse of an arbitrary angle figure, a highly accurate arbitrary angle figure can be drawn without substantially increasing the number of divisions.

  Hereinafter, in the embodiment, a configuration using an electron beam (electron beam) will be described as an example of a charged particle beam (charged particle beam). However, the charged particle beam is not limited to an electron beam, and may be a beam using charged particles such as an ion beam. An arbitrary angle indicates an angle excluding an integer multiple of 45 degrees, and a figure having this angle is defined as an arbitrary angle figure. Then, a figure composed only of an integer multiple of 45 degrees, such as a rectangle or a trapezoid having an angle of 45 degrees, is defined as a non-arbitrary angle figure.

Embodiment 1 FIG.
FIG. 1 is a conceptual diagram showing the main configuration of the drawing apparatus according to the first embodiment.
In FIG. 1, the drawing apparatus 100 includes a drawing unit 150 and a control unit 160. The drawing apparatus 100 is an example of a charged particle beam drawing apparatus. The drawing apparatus 100 draws a desired pattern on the sample 101. The control unit 160 includes a control circuit 110, a drawing data processing unit 120, and a storage device 122. The drawing unit 150 includes an electron column 102 and a drawing chamber 103. In the electron column 102, an electron gun 201, an illumination lens 202, a first aperture 203, a projection lens 204, a deflector 205, a second aperture 206, an objective lens 207, and a deflector 208 are disposed. In the drawing chamber 103, an XY stage 105 is arranged so as to be movable. A sample 101 is disposed on the XY stage 105. As the sample 101, for example, an exposure mask for transferring a pattern to a wafer is included. Further, this mask includes, for example, mask blanks on which no pattern is formed. Also, the first graphic data file 132 and the second graphic data file 134 for multiple drawing, for example, two drawing, are input into the control unit 160 and stored in the storage device 122. Here, FIG. 1 shows components necessary for explaining the first embodiment. Needless to say, the drawing apparatus 100 may normally include other necessary configurations.

  The electron beam 200 emitted from the electron gun 201 illuminates the entire first aperture 203 having a rectangular shape, for example, a rectangular hole, by the illumination lens 202. Here, the electron beam 200 is first shaped into a rectangle. Then, the electron beam 200 of the first aperture image that has passed through the first aperture 203 is projected onto the second aperture 206 by the projection lens 204. The position of the first aperture image on the second aperture 206 is controlled by the deflector 205. Thereby, a beam shape and a dimension can be changed. The electron beam 200 of the second aperture image that has passed through the second aperture 206 is focused by the objective lens 207. Then, the electron beam 200 is deflected by the deflector 208. In this manner, the desired position of the sample 101 on the XY stage 105 is irradiated. By repeating these operations, multiple drawing can be performed in which the number of drawing on the sample 101 is divided into a plurality of times. Systematic errors can be suppressed by performing multiple drawing. The combination of the first aperture 203 and the second aperture 206 forms an opening so that it can be formed into a figure having an angle that is an integral multiple of 45 degrees. For example, 45 degrees, 90 degrees, and 135 degrees.

FIG. 2 is a diagram showing an example in which an arbitrary angle graphic in the first embodiment is divided into slits for the first drawing.
In the variable shaping type drawing apparatus 100 that determines the shape of a figure by combining the first aperture 203 and the second aperture 206, the arbitrary angle figure 10 other than the set angle cannot be drawn as it is. Therefore, as shown in FIG. 2, approximation is performed by dividing by rectangular non-arbitrary-angle figures 11, 13, and 15 having one side divided in width S and different orthogonal lengths. When dividing into a plurality of such non-arbitrary figures, it is preferable to divide so that the midpoint of the upper side is located on the oblique side of the arbitrary figure 10.

FIG. 3 is a diagram showing an example in which an arbitrary angle graphic in the first embodiment is divided into slits for the second drawing.
In the first embodiment, a non-arbitrary figure that is divided by shifting the division position to a different position is prepared instead of increasing the number of divisions as in the prior art. The side is shifted by a half of the division width S in the side direction (lateral direction) having the division width S. At the same time, the position of the side is shifted by ½ of the difference in length from the non-arbitrary figure adjacent in the side direction (vertical direction) orthogonal to the side having the divided width S. In the example of FIG. 3, the position of the non-arbitrary angular figure 14 of the second drawing (second pass) is set in the horizontal direction by ½ of the division width S of the non-arbitrary angular figure 11 of the first drawing (first pass). Shift to. At the same time, the position of the upper side of the non-arbitrary figure 14 is extended in the vertical direction by ½ of the height difference σ between the non-arbitrary figure 11 and the non-arbitrary figure 13 in the first drawing (first pass). Shift to. Similarly, the position of the non-arbitrary figure 16 in the second drawing (second pass) is shifted in the horizontal direction by ½ of the division width S of the non-arbitrary figure 13 in the first drawing (first pass). . At the same time, the position of the upper side of the non-arbitrary figure 16 is extended in the vertical direction by ½ of the height difference σ between the non-arbitrary figure 13 and the non-arbitrary figure 16 in the first drawing (first pass). Shift to. The edge is divided so that the midpoint of the upper side is positioned on the oblique side of the arbitrary angle figure 10 with the remaining width of S / 2. That is, the non-arbitrary figure 12 is cut out so that the middle point of the upper side is positioned on the oblique side of the arbitrary angle figure 10 with the width of S / 2 in which the side in the horizontal direction remains. For example, when the difference between the upper side of the non-arbitrary figure 11 and the lower end of the hypotenuse of the arbitrary angle figure 10 is δ, the height of the non-arbitrary figure 12 may be δ / 2. Similarly, the non-arbitrary figure 18 is cut out so that the middle point of the upper side is located on the hypotenuse of the arbitrary angle figure 10 with a width of S / 2 where the side in the horizontal direction remains. For example, when the difference between the non-arbitrary figure 15 and the upper end of the hypotenuse of the arbitrary-angle figure 10 is β, the height of the non-arbitrary figure 18 is assumed to be a height that extends by δ / 2 from the non-arbitrary figure 15. That's fine. As described above, it is preferable to divide the non-arbitrary-angle figures 12 and 18 located at the ends so that the midpoint of the upper side is located on the oblique side of the arbitrary-angle figure 10. Therefore, at least the non-arbitrary angle figures 12 and 18 are divided so that the midpoint of the upper side is located on the hypotenuse. Thereby, in the non-arbitrary-angle figure located in the edge part, the area of the error part outside the hypotenuse coincides with the area of the error part missing inside. Therefore, the dose amount that should be irradiated and the dose amount that should not be irradiated can be matched. Therefore, the accuracy of the end can be improved.

FIG. 4 is a diagram showing an example in which a figure obtained by slit-splitting an arbitrary angle figure in the first embodiment for the first and second drawing is superimposed.
As shown in FIG. 4, when a plurality of non-arbitrary angle graphics 11 to 18 cut out at different positions are overlapped, the resolution can be increased as if the division width S is narrowed. Therefore, the dose distribution can be made finer on the hypotenuse of the arbitrary-angle figure 10 by drawing the figure groups whose division positions are shifted in the first drawing and the second drawing in this way. Therefore, it is possible to draw a highly accurate arbitrary angle figure without substantially increasing the number of divisions. Here, the number of times of exposure of the hatched portion is one, but when the resist on the sample 101 is not resolved, the height position may be adjusted as appropriate.

FIG. 5 is a diagram showing another example in which a figure obtained by slit-splitting an arbitrary-angle figure in the first embodiment for slitting for the first time and the second time is overlaid.
FIG. 6 is a diagram illustrating an example of slitting an arbitrary angle graphic in the first embodiment with a graphic whose height position is corrected.
When the arbitrary angle figure 10 of the design data is divided by the above-described shift division method, and the actual boundary is shifted from the diagonal line shown by the dotted line in FIG. 5 to the diagonal line described by the solid line by the process, as shown in FIG. It is preferable to correct to. Here, for example, a case where the deviation width is uniformly α will be described. In order to correct this, as shown in FIG. 6, each non-arbitrary angle figure is arranged by adjusting the height in consideration of the actual boundary. In the case of FIG. 6, each non-arbitrary figure to be divided for the first and second drawing with the adjustment width β = α is extended upward by β, as if on the hypotenuse indicated by the solid line in FIG. Arrange to come. In FIG. 6, each non-arbitrary angle figure is extended upward by the amount indicated by hatching.

FIG. 7 is a diagram showing another example of the case where the arbitrary angle graphic in the first embodiment is slit-divided with the graphic whose height position is corrected.
Here, there may be a case where the tendency of the appearance of the actual boundary due to the process is generally different between the non-arbitrary figure at the end and the non-arbitrary figure at the center. In that case, there may be a case where the method of collectively adjusting the graphic as shown in FIG. 6 is insufficient. Therefore, for example, in the case of resolving only where the image is drawn twice in FIG. 6, since the end portion is corrected in a different tendency from the central portion in FIG. 6, the actual boundary as shown in FIG. In consideration of (process), the non-arbitrary figure at the end (shown by hatching in FIG. 7) is individually adjusted. Although the adjustment of the non-arbitrary angle graphic at the end has been described here, the same adjustment is possible for each non-arbitrary angle graphic.

  Here, in order to facilitate understanding of the description, the case where the number of times of multiple drawing is two has been described, but the present invention is not limited to this. When n times of multiple drawing is performed, the shift position may be set as follows. That is, when the slit is divided for the k-th drawing, it is shifted by 1 / n of the division width S from the (k−1) -th position in the side direction (lateral direction) having the division width S. At the same time, the position of the side is shifted from the (k−1) th position by 1 / n of the difference in length from the non-arbitrary figure adjacent to the side (vertical direction) orthogonal to the side having the divided width S. Just do it. Note that k is a natural number such that 2 ≦ k ≦ n. 1 / n is preferable as the shift amount (shift width), but is not limited thereto. Other shift amounts are not excluded.

FIG. 8 is a conceptual diagram for explaining a procedure for creating a graphic data file in the first embodiment.
In manufacturing a semiconductor integrated circuit, first, a layout of the semiconductor integrated circuit is designed, and a layout data file 130 is generated. In the layout data file 130, a non-arbitrary figure 19 and an arbitrary figure 10 are defined as layout data. Next, the layout data file 130 is input to the conversion device 300 and converted therein to generate a drawing data file. Here, the conversion device 300 creates a graphic data file 132 storing the first drawing data and a graphic data file 134 storing the second drawing data.

  First, as a first division step, the conversion apparatus 300 includes non-arbitrary figure 11, 13, 15 (first figure) in which an arbitrary angle figure 10 is formed of a rectangle and one side is orthogonal with a division width S and the other sides are different in length. 1 is divided into a plurality of non-arbitrary figures. Then, the non-arbitrary figure 19 and the non-arbitrary figures 11, 13, 15 obtained by dividing the arbitrary-angle figure 10 into slits are defined in the graphic data file 132 as the first drawing data.

  Further, as the second dividing step, the conversion device 300 includes non-arbitrary figure 11, 13, 15 in which the arbitrary angle figure 10 is formed of a rectangle and one side of which is orthogonal with the division width S is different in length. Approximately divide into non-arbitrary angle figures 12, 14, 16, 18 (second plural non-arbitrary angle figures) having different division positions. Then, non-arbitrary angle figures 12, 14, 16, 18 obtained by slitting the arbitrary angle figure 10 by shifting the position from the non-arbitrary angle figure 19 are defined in the graphic data file 134 as the second drawing data.

FIG. 9 is a diagram showing an example of the format of graphic data in the first embodiment.
Here, as the graphic data, a flag for identifying whether it is data for n-th drawing, a graphic code for identifying the graphic shape, coordinates (x, y) defining the position of the graphic, The size (lx, ly) is stored. Here, the flag is defined for each figure, but the present invention is not limited to this. Since the file is configured to be different if the number of times of drawing is different, it is sufficient that each file can be identified.

  As shown in FIG. 1, the graphic data files 132 and 134 are input to the drawing apparatus 100 as separate data files and stored in the storage device 122.

  Then, as the first drawing process, first, the drawing data processing unit 120 reads the graphic data file 132 for the first drawing from the storage device 122 and converts it into shot data. Then, the drawing unit 150 controlled by the control circuit 110 uses the electron beam 200 to draw the first non-arbitrary figure 11, 13, 15 for drawing and the original non-arbitrary figure 19 on the sample 101. To do.

  Similarly, as the second drawing process, first, the drawing data processing unit 120 reads the drawing data file 134 for the second drawing from the storage device 122 and converts it into shot data. Then, the drawing unit 150 controlled by the control circuit 110 uses the electron beam 200 to perform the second drawing non-arbitrary figure 12, 14, 16, 18 on the sample 101 and the original non-arbitrary angle figure 19. Is drawn so as to overlap the non-arbitrary angle figure 11, 13, 15 and the original non-arbitrary angle figure 19.

  By performing multiple drawing as described above, the dose distribution can be made finer on the hypotenuse of the arbitrary angle figure 10. Therefore, it is possible to draw a highly accurate arbitrary angle figure without substantially increasing the number of divisions.

  Here, in FIGS. 2 to 4, the case where the arbitrary angle graphic 10 is divided in the horizontal direction by a rectangular non-arbitrary angle graphic has been described, but the method of division is not limited thereto. For example, it is preferable to divide as follows.

FIG. 10 is a diagram showing another example in which a figure obtained by slit-splitting an arbitrary angle figure for the first and second drawing is overlapped.
FIG. 10 shows a case where the arbitrary angle figure 20 is divided in the vertical direction by rectangular non-arbitrary figure. First, the slit is divided into non-arbitrary angular figures 21, 23, 25 for the first drawing. Next, the slit is divided into non-arbitrary angle figures 22, 24, 26, and 28 for the second drawing. In this case, the half of the divided width is shifted in the vertical direction to be divided, and the difference in the left side of the adjacent figure is shifted in the horizontal direction toward the oblique side by half of the difference between the left sides of the adjacent figures. Arbitrary angle figures 22, 24, 26 and 28 can be cut out. The shape of the end is the same as that described above.

FIG. 11 is a diagram showing another example in which a figure obtained by slit-splitting an arbitrary-angle figure for the first and second drawing is overlapped.
FIG. 11 shows a case where the arbitrary-angle figure 30 is divided in the horizontal direction by trapezoidal non-arbitrary-angle figures having an angle of 45 degrees. First, the slit is divided into non-arbitrary angle figures 31, 33 and 35 for the first drawing. Next, the slit is divided into non-arbitrary angle figures 32, 34, 36, and 38 for the second drawing. Here, the image is shifted by ½ of the divided width in the horizontal direction to be divided, and is shifted upward by ½ of the difference between the upper sides of adjacent graphics toward the hypotenuse side. Square figures 32, 34, 36, and 38 can be cut out. The shape of the end is the same as that described above.

FIG. 12 is a diagram showing another example in which a figure obtained by slit-splitting an arbitrary angle figure for the first and second drawing is overlapped.
FIG. 12 shows a case where the arbitrary angle figure 40 is divided in the vertical direction by a trapezoidal non-arbitrary angle figure having an angle of 45 degrees. First, the slit is divided into non-arbitrary angle figures 41, 43, 45 for the first drawing. Next, the slit is divided into non-arbitrary angle figures 42, 44, 46, and 48 for the second drawing. Here, by shifting by 1/2 of the divided width in the vertical direction to be divided, and by shifting by 1/2 of the difference between the left oblique sides of adjacent figures toward the oblique side of the arbitrary angle figure 40, The non-arbitrary angle figures 42, 44, 46, and 48 for the second drawing can be cut out. The shape of the end is the same as that described above.

FIG. 13 is a diagram showing another example in which a figure obtained by slit-splitting an arbitrary angle figure for the first and second drawing is overlapped.
FIG. 13 shows a case where the trapezoidal arbitrary angle figure 80 is divided horizontally by a rectangular nonarbitrary figure with a lower part and a trapezoidal nonarbitrary figure with an angle of 45 degrees in the upper part including the hypotenuse. . First, the upper part including the hypotenuse is slit-divided into non-arbitrary angle figures 81, 83, 85 for the first drawing. The lower part is a non-arbitrary figure 89 for the first drawing. Next, the upper part including the hypotenuse is divided into slits into non-arbitrary angle figures 82, 84, 86, 88 for the second drawing. In this case, the image is shifted by ½ of the divided width in the horizontal direction to be divided and shifted upward by ½ of the difference between the upper sides of adjacent graphics toward the hypotenuse side. Arbitrary angle figures 82, 84, 86, 88 can be cut out. About the lower part, it is set as the non-arbitrary-angle figure 89 similar to the 1st time. The shape of the end is the same as that described above.

  As described above, it is possible to draw a highly accurate arbitrary angle figure by performing multiple drawing by shifting the division position.

Embodiment 2. FIG.
In the first embodiment, a data file is prepared every time when multiple drawing is performed, but the present invention is not limited to this. In the second embodiment, a case where graphic data of each time is stored in a common file will be described.

FIG. 14 is a conceptual diagram showing the main configuration of the drawing apparatus according to the second embodiment.
14 is the same as FIG. 1 except that the graphic data file input by the drawing apparatus 100 is a single graphic data file 136 instead of the two graphic data files 132 and 134. Further, the non-arbitrary angle figures 11, 13, 15 divided for the first drawing and the non-arbitrary figure 12, 14, 16, 18 divided for the second drawing are the same as in the first embodiment. is there.

FIG. 15 is a conceptual diagram for explaining a procedure for creating a graphic data file in the second embodiment.
The contents of the layout data file 130 are the same as those in the first embodiment. In the second embodiment, the conversion device 300 creates the first drawing data and the second drawing data so as to be stored in one graphic data file 136.

  First, as a first division step, the conversion apparatus 300 includes non-arbitrary figure 11, 13, 15 (first figure) in which an arbitrary angle figure 10 is formed of a rectangle and one side is orthogonal with a division width S and the other sides are different in length. 1 is divided into a plurality of non-arbitrary figures.

  Further, as the second dividing step, the conversion device 300 includes non-arbitrary figure 11, 13, 15 in which the arbitrary angle figure 10 is formed of a rectangle and one side of which is orthogonal with the division width S is different in length. Approximately divide into non-arbitrary angle figures 12, 14, 16, 18 (second plural non-arbitrary angle figures) having different division positions.

  Then, the non-arbitrary figure 10 obtained by slitting the common non-arbitrary figure 19 and the arbitrary angle figure 10 serving as the first drawing data and the position of the second drawing data are shifted from each other. Are defined in the graphic data file 136.

FIG. 16 is a diagram showing an example of the format of graphic data in the second embodiment.
As the graphic data, for example, for the non-arbitrary angle graphic 19 that is common every time, for the non-arbitrary graphic 11, 13, and 15 that is the first drawing data obtained by dividing the arbitrary angle graphic 10 into slits with “0” as a flag. , "2" is stored in the flag for the non-arbitrary-angle figures 12, 14, 16, and 18 that are the second drawing data obtained by slitting the arbitrary-angle figure 10 by shifting the position with the flag "1". Other data configurations are the same as those in the first embodiment.

  As shown in FIG. 14, the graphic data file 136 is input to the drawing apparatus 100 as a joint data file and stored in the storage device 122. Subsequent operations are the same as those in the first embodiment.

  Even if configured as described above, the same effect as in the first embodiment can be obtained. Furthermore, since the common graphic data that was originally a non-arbitrary angle graphic can be shared, the amount of graphic data can be reduced. Therefore, the data transfer time to the drawing apparatus 100 can be shortened. As a result, the drawing time can be further reduced by that amount.

Embodiment 3 FIG.
In each of the above-described embodiments, a data file in which an arbitrary angle graphic is divided into a plurality of non-arbitrary angle graphics before being input to the drawing apparatus 100 is created. However, the present invention is not limited to this. In the third embodiment, a case where an arbitrary angle figure is divided and approximated in the drawing apparatus 100 will be described.

FIG. 17 is a conceptual diagram showing the main configuration of the drawing apparatus according to the third embodiment.
In FIG. 17, the graphic data file input by the drawing apparatus 100 is changed to a graphic data file 138 containing data in an arbitrary angle shape instead of the two graphic data files 132 and 134, and the drawing data. 1 except that the data processing unit 120 includes a shot data generation unit 124 and a plurality of division units 126a to 126n.

FIG. 18 is a conceptual diagram for explaining a procedure for creating a graphic data file in the third embodiment.
The contents of the layout data file 130 are the same as those in the first embodiment. In the third embodiment, first, the conversion device 300 converts the layout data into drawing data for the first drawing. At this time, the arbitrary angle graphic 10 is converted as it is without dividing the slit. The drawing data for the first drawing is stored in the graphic data file 138. As shown in FIG. 17, the graphic data file 138 is input to the drawing apparatus 100 as a data file for the first drawing and is stored in the storage device 122.

  First, as a first division step, the division unit 126a reads the graphic data file 138 from the storage device 122, and the length of the other side where one side of the arbitrary-angle graphic 10 made of a rectangle is orthogonal with the division width S is different. Approximately divide into non-arbitrary angle figures 11, 13, and 15 (first plurality of non-arbitrary angle figures). Then, as the first drawing process, the shot data generation unit 124 converts the non-arbitrary angle figures 11, 13, 15 and the non-arbitrary angle figure 19 into shot data. Then, the drawing unit 150 controlled by the control circuit 110 uses the electron beam 200 to draw the first non-arbitrary figure 11, 13, 15 for drawing and the original non-arbitrary figure 19 on the sample 101. To do.

  Further, as the second dividing step, the dividing unit 126b reads the graphic data file 138 from the storage device 122, and the length of the other side where one side of the arbitrary angle graphic 10 made of a rectangle is orthogonal with the division width S is different. The non-arbitrary angle figures 11, 13, and 15 are approximately divided into non-arbitrary angle figures 12, 14, 16, and 18 (second plurality of non-arbitrary angle figures) having different division positions. And as a 2nd drawing process, the shot data production | generation part 124 converts the non-arbitrary figure 12, 14, 16, 18 and the arbitrary angle figure 19 into shot data similarly. Then, the drawing unit 150 controlled by the control circuit 110 uses the electron beam 200 to perform the second drawing non-arbitrary figure 12, 14, 16, 18 on the sample 101 and the original non-arbitrary angle figure 19. Is drawn so as to overlap the non-arbitrary angle figure 11, 13, 15 and the original non-arbitrary angle figure 19.

  Here, the non-arbitrary angle figures 11, 13, 15 divided for the first drawing and the non-arbitrary figure 12, 14, 16, 18 divided for the second drawing are the same as in the first embodiment. It is.

  Here, although the division and the shot data conversion are described separately, each division unit 126 equipped with the function of the shot data generation unit 124 may simultaneously convert into shot data while dividing.

  Even if configured as described above, the same effect as in the first embodiment can be obtained. Furthermore, the number of graphic data in the data file can be reduced by inputting the arbitrary angle graphic before slit division into the drawing apparatus 100. Therefore, the data transfer time to the drawing apparatus 100 can be further shortened. As a result, the drawing time can be further reduced by that amount.

  In the above description, what is described as “˜circuit”, “˜part”, or “˜process” can be configured by a program operable by a computer. Or you may make it implement by not only the program used as software but the combination of hardware and software. Alternatively, a combination of hardware and firmware may be used. When configured by a program, the program is recorded on a recording medium such as a magnetic disk device, a magnetic tape device, an FD, a CD, a DVD, an MO, or a ROM shown below.

FIG. 19 is a block diagram illustrating an example of a hardware configuration when configured by a program.
A CPU 50 serving as a computer is connected via a bus 74 to a RAM (Random Access Memory) 52, a ROM 54, a magnetic disk (HD) device 62, a keyboard (K / B) 56, a mouse 58, an external interface (I / F) 60, The monitor 64, the printer 66, the FD 68, the DVD 70, and the CD 72 are connected. Here, a RAM (Random Access Memory) 52, a ROM 54, a magnetic disk (HD) device 62, an FD 68, a DVD 70, and a CD 72 are examples of a storage device. A keyboard (K / B) 56, a mouse 58, an external interface (I / F) 60, an FD 68, a DVD 70, and a CD 72 are examples of input means. The external interface (I / F) 60, the monitor 64, the printer 66, the FD 68, the DVD 70, and the CD 72 are examples of output means.

  The embodiments have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, in each embodiment, cell information is mainly described as an internal component, but the present invention is not limited to this, and data may be configured centering on another hierarchical data. In each embodiment, the division width S is used, but the value does not have to be completely the same width, and may be substantially the same width.

  In addition, although descriptions are omitted for parts and the like that are not directly required for the description of the present invention, such as a device configuration and a control method, a required device configuration and a control method can be appropriately selected and used. For example, although the description of the control unit configuration for controlling the drawing apparatus 100 is omitted, it goes without saying that the required control unit configuration is appropriately selected and used.

  In addition, all electron beam drawing data creation methods, electron beam drawing data conversion methods, electron beam drawing methods, and devices that include elements of the present invention and that can be appropriately modified by those skilled in the art are within the scope of the present invention. Is included.

1 is a conceptual diagram illustrating a main configuration of a drawing apparatus according to Embodiment 1. FIG. It is a figure which shows an example which slit-divided the arbitrary angle figure in Embodiment 1 for the drawing of the 1st time. It is a figure which shows an example which slit-divided the arbitrary angle figure in Embodiment 1 for the drawing of the 2nd time. It is a figure which shows an example which piled up the figure which slit-divided the arbitrary angle figure in Embodiment 1 for the drawing of the 1st time and the 2nd time. It is a figure which shows another example which piled up the figure which slit-divided the arbitrary angle figure in Embodiment 1 for the drawing of the 1st time and the 2nd time. It is a figure which shows an example in the case of slit-dividing the arbitrary angle figure in Embodiment 1 with the figure which correct | amended the height position. It is a figure which shows another example in the case of slit-dividing the arbitrary angle figure in Embodiment 1 by the figure which correct | amended the height position. FIG. 5 is a conceptual diagram for explaining a procedure for creating a graphic data file in the first embodiment. 6 is a diagram illustrating an example of a format of graphic data in the first embodiment. FIG. It is a figure which shows another example which piled up the figure which slit-divided arbitrary angle figures for the drawing of the 1st time and the 2nd time. It is a figure which shows another example which piled up the figure which slit-divided arbitrary angle figures for the drawing of the 1st time and the 2nd time. It is a figure which shows another example which piled up the figure which slit-divided arbitrary angle figures for the drawing of the 1st time and the 2nd time. It is a figure which shows another example which piled up the figure which slit-divided arbitrary angle figures for the drawing of the 1st time and the 2nd time. FIG. 10 is a conceptual diagram illustrating a main configuration of a drawing apparatus according to a second embodiment. FIG. 11 is a conceptual diagram for explaining a procedure for creating a graphic data file in the second embodiment. It is a figure which shows an example of the format of the graphic data in Embodiment 2. FIG. FIG. 10 is a conceptual diagram illustrating a main configuration of a drawing apparatus according to Embodiment 3. FIG. 20 is a conceptual diagram for explaining a procedure for creating a graphic data file in the third embodiment. It is a block diagram which shows an example of the hardware constitutions when comprising by a program. It is a conceptual diagram for demonstrating operation | movement of a variable shaping type | mold electron beam drawing apparatus. It is a figure which shows an example of the conventional slit division | segmentation.

Explanation of symbols

10, 20, 30, 40, 80, 90 Arbitrary angle figure 11, 12, 13, 14, 15, 16, 18, 19 Non-arbitrary figure 21, 22, 23, 24, 25, 26, 28, 29 Non-arbitrary Corner figure 31, 32, 33, 34, 35, 36, 38, 39 Non-arbitrary corner figure 41, 42, 43, 44, 45, 46, 48, 49 Non-arbitrary corner figure 50 CPU
52 RAM
54 ROM
56 K / B
58 Mouse 60 I / F
62 HD device 64 Monitor 66 Printer 68 FD
70 DVD
72 CD
74 Bus 81, 82, 83, 84, 85, 86, 88, 89 Non-arbitrary figure 91, 92, 93, 94, 95, 96, 97, 98, 99 Non-arbitrary figure 100 Rendering device 101, 340 Sample 102 Electronic column 103 Drawing room 105 XY stage 110 Control circuit 120 Drawing data processing circuit 122 Storage device 124 Shot data generation unit 126 Division unit 130 Layout data file 132, 134, 136, 138 Graphic data file 150 Drawing unit 160 Control unit 200 Electronic Beam 201 Electron gun 202 Illumination lens 203, 410 First aperture 206, 420 Second aperture 204 Projection lens 205, 208 Deflector 207 Objective lens 300 Converter 330 Electron beam 411 Opening 421 Variable shaping opening 430 Charged particle source

Claims (5)

Arbitrary angle figures having an angle excluding an integer multiple of 45 degrees and at least one of a rectangle and a trapezoid having an angle of 45 degrees are configured such that one side is substantially the same and has a predetermined width and the other sides are different in length. The first divided graphic data that is approximately divided into a plurality of one non-arbitrary figure, and at least one of a rectangle and the trapezoid, and the one side is substantially the same in the same direction as the one side Second divided graphic data obtained by approximating and dividing a plurality of second non-arbitrary angular graphics having different division positions from the first plurality of non-arbitrary angular graphics different in length from the other sides orthogonal to each other with a predetermined width A storage unit for storing
A drawing unit that draws the first plurality of non-arbitrary angle graphics and the second plurality of non-arbitrary angle graphics on a sample using a charged particle beam so as to overlap each other;
A charged particle beam drawing apparatus comprising:   2. The charged particle beam drawing apparatus according to claim 1, wherein the first and second divided graphic data are respectively stored in the storage unit after being input as separate data files.   2. The charged particle beam drawing apparatus according to claim 1, wherein the first and second divided graphic data are input as one data file, and then the one data file is stored in the storage unit. A storage unit for inputting and storing graphic data including an arbitrary angle graphic having an angle excluding an integer multiple of 45 degrees;
The arbitrary-angle figure is approximately divided into a plurality of first non-arbitrary-angle figures in which one side constituted by at least one of a rectangle and a trapezoid having an angle of 45 degrees has a predetermined width and the other sides are different in length. A first division;
The first plurality of non-arbitrary shapes, wherein the arbitrary angle figure is configured by at least one of a rectangle and the trapezoid, and one side in the same direction as the one side is perpendicular to the predetermined width and the other side is different in length. A second dividing unit that approximately divides the figure into a plurality of second non-arbitrary figures having different division positions from the angular figure;
A drawing unit that draws the first plurality of non-arbitrary angle graphics and the second plurality of non-arbitrary angle graphics on a sample using a charged particle beam so as to overlap each other;
A charged particle beam drawing apparatus comprising: A first plurality of arbitrary angle figures having an angle excluding an integer multiple of 45 degrees, wherein one side formed of at least one of a rectangle and a trapezoid having an angle of 45 degrees has a predetermined width and the other sides are different in length. A first dividing step of approximately dividing into a non-arbitrary angle figure of
A first drawing step of drawing the first plurality of non-arbitrary shapes on a sample using a charged particle beam;
The first plurality of non-arbitrary shapes, wherein the arbitrary angle figure is configured by at least one of a rectangle and the trapezoid, and one side in the same direction as the one side is perpendicular to the predetermined width and the other side is different in length. A second dividing step of approximately dividing the figure into a plurality of second non-arbitrary figures having different division positions from the angular figure;
A second drawing step of drawing the second plurality of non-arbitrary angles on the sample so as to overlap the first plurality of non-arbitrary angles using a charged particle beam;
A charged particle beam drawing method comprising:

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