JP2005079392A - Method for generating image drawing data - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method capable of preventing a step difference between patterns from being unnecessarily too small or too large after division of an image so as to reduce an image drawing time and enhance the image drawing accuracy in the case of generating image drawing data from design data. <P>SOLUTION: In the image drawing data generating method wherein a pattern 11 with a slope whose angle is an optional angle other than an integer multiple of 45 degrees in the design data is slit into patterns 12 with a rectangle or a trapezoid with a slope with an angle of 45 degrees to generate the image drawing data, the direction of slit division and the kind of division graphics are specified in response to the optional angle and the division width is determined so that step differences between adjacent patterns after slit division are within a prescribed permissible range. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a drawing data creation method for creating drawing data allowed for a variable shaped electron beam exposure apparatus from design data.

  The drawing data of the variable shaped electron beam exposure apparatus includes a trapezoid and a rectangular pattern (hereinafter referred to as a basic figure) having a hypotenuse with an angle of 45 ° or 90 °. On the other hand, design data created by CAD or the like is generally not limited to 45 ° or 90 °, but includes a polygonal pattern having an arbitrary angle. For this reason, in the process of converting design data into drawing data, it is necessary to approximate a polygon having an arbitrary angle by dividing it with a basic figure. Conventionally, a method of dividing with the same slit width regardless of the angle has been widely used.

  In such slit division, the step of the divided pattern is unnecessarily fine at a certain angle depending on the angle of the arbitrary angle pattern, and the drawing time becomes long (FIG. 10A), and is too large at a certain angle. However, there is a problem that the drawing accuracy (line width, line smoothness) is impaired (FIG. 10B).

  Also, in the data processing process, before performing slit division, the input data pattern is divided into processing unit areas, or multi-vertex figures are divided into trapezoids and rectangles to express the patterns as trapezoids and rectangles. (For example, refer patent document 1). With this process, the following problems (1) and (2) have been caused.

  (1) As shown in FIG. 11A, a single arbitrary angle pattern at the design stage is divided by area division, trapezoid division, or the like, and by rounding the coordinates of division positions to address units, FIG. The inclination angle changes for each divided pattern as shown in FIG. The arbitrary angle pattern near the reference angle does not have a uniform line width after drawing because the slit dividing direction is not unified.

(2) A plurality of arbitrary angle patterns that have the same angle at the design stage are rounded to the address unit of coordinates by processing such as sizing before slit splitting, and the inclination angle changes, so that it is close to the reference angle The direction of slit division is not unified among a plurality of oblique line patterns, and the line width accuracy after drawing varies.
JP 2002-151387 A

  As described above, in the conventional drawing data creation method, when the design data is converted to the drawing data, the pattern step after the division becomes too small in the slit division, resulting in an increase in the drawing time or the pattern step. There is a problem in that it becomes too large and the drawing accuracy is lowered. Also, in the data processing process, the slit division direction is not uniform in an arbitrary angle pattern near the reference angle, so the line width after drawing is not constant, and the slit division direction is between a plurality of oblique line patterns with an angle close to the reference angle. There is a problem that the line width accuracy after drawing is not uniform, and the accuracy of the line width after drawing is varied.

  The present invention has been made in consideration of the above circumstances, and the object of the present invention is to make the pattern step after division unnecessarily small or too large when creating drawing data from design data. It is an object of the present invention to provide a drawing data creation method that can prevent such a situation and can contribute to improvement of drawing accuracy as well as shortening of drawing time.

  Further, in the data processing process, the slit division direction can be unified between an arbitrary angle pattern near the reference angle and a plurality of oblique line patterns close to the reference angle in the data processing process. An object of the present invention is to provide a drawing data creation method that can contribute to suppression of variation in line width accuracy.

  In order to solve the above problems, the present invention adopts the following configuration.

  That is, the present invention creates drawing data by creating a drawing data by slitting a pattern having a hypotenuse at an arbitrary angle other than an integer multiple of 45 degrees in the design data into a trapezoidal or rectangular pattern having a hypotenuse of 45 degrees. The method defines the slit division direction and the type of divided figure according to the arbitrary angle, calculates a numerical value representing the roughness of the pattern after slit division for each arbitrary angle, and the numerical value is within an allowable range. The slit division is performed using such a division width as follows.

  The present invention also provides drawing data creation for creating drawing data by dividing a pattern having a hypotenuse of an arbitrary angle other than an integer multiple of 45 degrees in the design data into a trapezoidal or rectangular pattern having a hypotenuse of 45 degrees. The method is characterized in that, in the slit division, slit division is performed with a division width expressed by a real number, coordinates of a division position are expressed by a real number, and rounding to an address unit is performed after the division is completed.

  The present invention also provides drawing data creation for creating drawing data by dividing a pattern having a hypotenuse of an arbitrary angle other than an integer multiple of 45 degrees in the design data into a trapezoidal or rectangular pattern having a hypotenuse of 45 degrees. In the method, when the angle of the hypotenuse changes due to the rounding process to the address unit of the division coordinates generated in the area division process when dividing the pattern having the hypotenuse of an arbitrary angle in the design data into a plurality of areas The slit division direction and the divided figure type are determined from the angle of the hypotenuse before the division process, the decision information is inherited by each division pattern after the area division process, and the division direction and the divided figure determined for the division pattern are determined. The slit division is performed according to the type.

  The present invention also provides drawing data creation for creating drawing data by dividing a pattern having a hypotenuse of an arbitrary angle other than an integer multiple of 45 degrees in the design data into a trapezoidal or rectangular pattern having a hypotenuse of 45 degrees. A plurality of patterns having different hypotenuse angles in the design data and connected to each other, and the difference between the hypotenuse angles is within a certain range, the average angle of each hypotenuse and the slit dividing direction and The type of divided figure is determined, and all of the plurality of connected patterns are slit-divided according to the determined division direction and divided figure type.

  The present invention also provides drawing data creation for creating drawing data by dividing a pattern having a hypotenuse of an arbitrary angle other than an integer multiple of 45 degrees in the design data into a trapezoidal or rectangular pattern having a hypotenuse of 45 degrees. In the method, when the difference between the oblique side angle of the plurality of adjacent patterns in the design data and the reference angle for determining the slit dividing direction and the type of the divided figure is within a certain range, the adjacent plurality of patterns All the patterns are slit-divided in the same slit dividing direction and divided figure type.

  The present invention also provides drawing data creation for creating drawing data by dividing a pattern having a hypotenuse of an arbitrary angle other than an integer multiple of 45 degrees in the design data into a trapezoidal or rectangular pattern having a hypotenuse of 45 degrees. A method for examining the angle distribution of the hypotenuse for each of a plurality of adjacent patterns in the design data, and determining the angle range near the peak of the distribution, the slit dividing direction, and the type of divided figure And the reference angle is shifted so as to avoid the vicinity of the peak.

  According to the present invention, when drawing data is created from design data, slit division is performed using a division width such that a numerical value representing the roughness of the pattern after slit division is within an allowable range. For example, by determining the division width so that the level difference between adjacent patterns after slit division is within a predetermined allowable range, the pattern level difference after division can be prevented from becoming unnecessarily small or too large. As a result, the drawing time can be shortened and the drawing accuracy can be improved.

  In addition, slit division is performed with the division width expressed in real numbers, the coordinates of the division position are expressed in real numbers, and rounding to the address unit is performed after division is completed, thereby preventing rounding errors from accumulating at the edge of the pattern. it can. Furthermore, by determining the slit division direction and the type of the divided figure from the angle of the hypotenuse before the area division processing, by performing the slit division of each divided pattern after the area division processing by the determined division direction and divided figure type, It is possible to avoid the inconvenience that the pattern after the division process is divided into different slit division directions or different divided figure types by the rounding process to the address unit of the divided coordinates generated in the area division process.

  In addition, for a plurality of patterns connected with different hypotenuse angles, when the hypotenuse angle difference is within a certain range, the slit division direction and the type of divided figure are determined from the average angle of each hypotenuse, By slitting all of the connected patterns according to the determined division direction and divided figure type, the slit division direction can be unified with respect to the connected patterns, and the line width after drawing can be made constant. It is possible to measure.

  In addition, when the difference between the hypotenuse angle of a plurality of adjacent patterns and the reference angle is within a certain range, by dividing the adjacent pattern with the same slit division direction and divided figure type, a plurality of angles close to the reference angle can be obtained. It is possible to unify the slit division direction between patterns having oblique sides, and to suppress variations in line width accuracy after drawing. Furthermore, for the multiple adjacent patterns in the design data, the angle distribution of the hypotenuse is examined, and when the angle range near the peak of the distribution overlaps with the reference angle, the reference angle is shifted so as to avoid the vicinity of the peak. The direction of slit division can be unified by an arbitrary angle pattern near the angle, and the line width after drawing can be made constant.

  The details of the present invention will be described below with reference to the illustrated embodiments.

(First embodiment)
1 to 3 are diagrams for explaining a drawing data creation method according to the first embodiment of the present invention.

In order to convert design data created by CAD into drawing data acceptable for the variable shaping electron beam drawing apparatus, a polygonal shaded portion having a hypotenuse at an arbitrary angle in the design data is converted into drawing data. Before slitting, divide the slit. As shown in FIGS. 1 (a) to 1 (d), these hypotenuse angles are classified into 0 °, θ ₁ , θ ₂ , θ ₃ , and 90 ° sections divided by five reference angles. The direction and shape of slit division corresponding to each are selected. 1A shows a case where 0 <θ <θ ₁ , FIG. 1B shows a case where θ ₁ <θ <θ ₂ , and FIG. 1C shows a case where θ ₂ <θ <θ ₃ . d) shows the case of θ ₃ <θ <90 °. However, θ ₁ = tan ⁻¹ (2) / 2, θ ₂ = 45 °, and θ ₃ = 90 ° −tan ⁻¹ (2) / 2. In the figure, 11 indicates a pattern (design data) having a hypotenuse, and 12 indicates a slit division pattern.

  1A, the slit division direction is the X direction (left and right direction on the paper surface), and the type of divided figure is a rectangle. In (b), the slit dividing direction is the Y direction (up and down direction on the paper surface), and the type of divided figure is a trapezoid. In (c), the slit dividing direction is the X direction, and the type of divided figure is a trapezoid. In (d), the slit dividing direction is the Y direction, and the type of the divided figure is a rectangle.

In this proposal, the method of dividing using a trapezoid and a rectangle is shown, but slit division may be performed using only a rectangle (corresponding to θ ₁ = θ ₂ = θ ₃ = 45 °).

  Here, if an allowable step given before the conversion is assumed to be ε, it corresponds to each division direction and shape shown in FIGS. 2 (a) to 2 (d) corresponding to FIGS. 1 (a) to 1 (d). The maximum value S is obtained so that the step σ obtained in this way does not exceed this ε. Based on this S, a division width represented by a real number for equally dividing the input pattern is obtained, slit division is performed, and coordinates are rounded to an address unit (AU) unit. In this case, σ = Stanθ in FIG. 2A, σ = S (cotθ-1) in (b), σ = S (tanθ-1) in (c), and σ = Scotθ in (d).

A specific example is shown in FIG. In the input pattern shown in FIG. _3A , if the angle θa of the hypotenuse is applicable to the classification of FIG. 1B, division in the Y direction using a trapezoid is selected. A maximum real number S is obtained in which the step σ = S {cot (θ _a ) −1} shown in FIG. 2B does not exceed the allowable step ε given in advance.

  When the value obtained by rounding S into AU units is Swid, and this is used as the slit division width and division is performed from the lower end, a thin slit figure having a width Sedg <Swid is generated at the upper end as shown in FIG. There is.

  In order to avoid this in the present embodiment, if the length of the input pattern shown in FIG. 3A in the division direction is L, a real number Sref = L / [L / S] is used as the slit division width. Here, [X] is the smallest integer equal to or greater than X.

  As shown in FIG. 3B, a division is made from the lower end with Sref (dashed line), and the y coordinate is rounded to AU units (solid line). As shown in FIG. 3C, the next dividing line is divided at a length Sref from the dividing line before the rounding of the previous division (the wavy line in (b)), and then the y coordinate is set to the AU unit. Round. Thereafter, as shown in FIG. 3D, the same operation is repeated, and the division is performed to the upper end.

According to this embodiment, with respect to the shaded portion of the polygon with hypotenuse of arbitrary angle theta _a design data, it is possible to create drawing data by performing an optimum slit split. In this case, by setting the divided pattern step σ to the maximum value S that does not exceed the allowable step ε, the divided pattern step can be prevented from becoming unnecessarily small or too large, and the drawing time can be reduced. The drawing accuracy can be improved along with the shortening. In addition, slit division is performed with the division width expressed in real numbers, the coordinates of the division position are expressed in real numbers, and rounding to the address unit is performed after division is completed, thereby preventing rounding errors from accumulating at the edge of the pattern. There is also an advantage that can be done.

  In this embodiment, the step is used as an index indicating approximate roughness by slit division, but an index other than the step may be used. For example, the distance δ between the apex of the rectangle or trapezoid after splitting the slit that protrudes outward from the hypotenuse shown in FIG. 2 and the hypotenuse can be used as an approximate roughness index. Further, in the present embodiment, the slit division is performed in the conversion process from the design data including the arbitrary angle pattern to the drawing data of only the basic figure, but the electron beam drawing apparatus using the drawing data including the arbitrary angle pattern as an input It is also possible to execute this in the shot dividing circuit.

(Second Embodiment)
As a second embodiment of the present invention, a case involving scaling processing will be described as an example.

Consider a case in which input data including two patterns having hypotenuses at the same angle as shown in FIG. 5A becomes large as shown in FIG. 5B by 1.5 times scaling. In this case, as shown in FIG. 5 (c), the coordinates of the pattern corner after scaling are shifted from the AU unit, and as shown in FIG. 5 (d), the coordinates of the pattern corner are rounded to the AU unit, The angle of changes. The angle of the diagonal lines of the two patterns of the input data are both θ _c0, and the angle of the diagonal line of the right pattern after scaling is θ _c1 . When one of the angles θ _c0 and θ _c1 is smaller than the reference angle θ ₁ and the other is larger than θ ₁ , the slit splitting direction is determined according to the respective angles, and FIG. As shown, the dividing direction is switched on the left and right of the center line.

In the present embodiment, in order to avoid this, information on the division direction and shape classification determined by the angle of the hypotenuse is held in the arbitrary angle pattern in the input data before AU rounding caused by scaling or the like is performed. Since the angle θ _c0 of the input pattern in FIG. 5A is 0 degree or more and θ ₁ or less, it is classified as shown in FIG. This information is held in the input pattern, and in the slit division processing of the arbitrary angle pattern after scaling, the division direction is determined based on this information, and slit division is performed. As a result, as shown in FIG. 6A, the dividing direction can be made the same regardless of before and after the dividing point.

(Third embodiment)
As a third embodiment of the present invention, a case involving an area division process will be described as an example.

Consider a case where an input pattern as shown in FIG. 4A is divided as shown in FIG. 4B by area division processing in the course of data processing. In this case, as shown in FIG. 4C, the coordinates of the dividing point on the hypotenuse are rounded to AU units, and the angle of the hypotenuse changes from that before the division, and the angle of the hypotenuse does not match on the left and right of the dividing point. When one of the angles θ _b1 and θ _{b2 at} this time is smaller than the reference angle θ ₁ and the other is larger than θ ₁ , the slit splitting direction is determined in accordance with each angle, as shown in FIG. As shown in e), the dividing direction is switched before and after the dividing point.

In the present embodiment, in order to avoid this, information on the division direction and shape classification determined by the angle of the hypotenuse is held in the arbitrary angle pattern in the input data before AU rounding caused by area division or the like is performed. If the angle θ _b0 of the input pattern in FIG. 4A is 0 degree or more and θ ₁ or less, the classification is as shown in FIG. This information is held in a pattern, and after division, the information is inherited by each divided pattern. In subsequent slit division processing of an arbitrary angle pattern, the division direction is determined based on this information, and slit division is performed. As a result, as shown in FIG. 4D, the dividing direction is the same regardless of before and after the dividing point.

  Note that the present embodiment is not limited to area division, and can be similarly applied to a case where an arbitrary angle pattern that was one at the design stage is divided by trapezoidal division or the like. That is, the present invention can be applied when the angle of the hypotenuse changes due to the rounding process to the address unit of the coordinates of the division position generated in the area division or the like.

(Fourth embodiment)
As a fourth embodiment of the present invention, a case where a line is bent in the middle will be described as an example.

Assume that the input pattern is bent as shown in FIG. Of the three divided patterns divided at the inflection point, the diagonal line angle of the left pattern is θ _d1 , the diagonal line angle of the central pattern is θ _d2 , and the diagonal line angle of the right pattern is θ _d3 . Here, when the angles θ _d1 and θ _d3 are larger than the reference angle θ ₁ and θ _d2 is smaller than θ ₁ , as shown in FIG. 7C, the dividing direction is switched before and after the bending point. .

  In this embodiment, in order to avoid this, a representative pattern is determined for a continuous pattern, and patterns within a certain error range having a difference from the angle of the pattern are set as one group. An average angle is obtained within the group, and all patterns in the group are slit-divided with the division direction and shape determined thereby.

In FIG. 7A, assuming that the pattern having the hypotenuse of θ _d1 is a representative pattern and the difference between θ _d2 , θ _d3 and θ _d1 is within an allowable range, the three patterns are grouped into one group. be able to. The average angle θ _d4 of θ _d2 , θ _d3 , θ _d1 is obtained. If θ ₁ <θ _d4 <θ ₂ , the classification is as shown in FIG. Three patterns are divided into slits according to the division direction and shape of this classification. As a result, as shown in FIG. 7B, the dividing direction can be made the same regardless of before and after the bending point.

(Fifth embodiment)
As a fifth embodiment of the present invention, a case of a plurality of patterns having an angle near θ ₁ will be described as an example.

As shown in FIG. 8 (a), relatively close angle _{θ 1 θ e1, θ e2,} θ e3, four patterns having an angle of theta _e4 shall present adjacent. Here, θ ₂ > θ _e1 > θ _e2 > θ ₁ > θ _e3 > θ _e4 > 0. In this case, as shown in FIG. 8C, the division direction is switched depending on the pattern.

In the present embodiment, in order to avoid this, in the case where the difference between the oblique line angles θ _e1 , θ _e2 , θ _e3 , θ _{e4 of} a plurality of adjacent oblique line patterns and the reference angle θ ₁ is within a certain range, all the adjacent oblique lines The pattern is divided into slits in the same slit dividing direction and divided figure type. For example, the division direction and figure type shown in FIG. Accordingly, as shown in FIG. 8B, the division direction is the same for all patterns.

(Sixth embodiment)
As a sixth embodiment of the present invention, a case of a plurality of patterns having an angle near θ ₁ will be described as an example.

As shown in FIG. 8A, it is assumed that there are four adjacent patterns having angles θ _e1 , θ _e2 , θ _e3 , and θ _e4 close to θ ₁ . Here, for ease of explanation,
θ _e1 = θ _e2 , θ _e3 = θ _e4 , | θ _e1 −θ _e3 | ≈0, 0 <θ _e3 <θ ₁ <θ _e1 <θ ₂
And In this case, as shown in FIG. 8C, the division direction is switched depending on the pattern.

In this embodiment, in order to avoid this, threshold values (reference angles θ ₁ , θ ₂ , θ ₃ ) as shown in the flowchart of FIG. 12 are optimized. The threshold value is obtained by substituting the initial value for the threshold, the part for obtaining the angle of the hypotenuse of each pattern of the input data, the part for obtaining the distribution of the hypotenuse angle of the pattern in the entire data, and obtaining the peak from this distribution. An optimum value is obtained when a portion for determining whether or not the peak is applied and a threshold value is applied to the peak, and an optimum value for the threshold value is automatically performed using a program having a portion to be substituted for the threshold value.

For example, it is assumed that there is certain input data in which a pattern as shown in FIG. First, an initial value is substituted for the threshold value. It is assumed that θ ₁ = tan ⁻¹ (2) / 2, θ ₂ = 45 °, and θ ₃ = 90 ° −tan ⁻¹ (2) / 2, respectively. Next, the angle of the hypotenuse of each pattern in the input data is obtained to obtain a distribution as shown in FIG. Since the peak of the distribution in FIG. 9 is afflicted with θ1 outside this peak, 'seek, the theta ₁ theta _1' most theta values theta ₁ close to the initial value of ₁ shifted to. Here, the tolerance of the shifting from the initial value of the threshold alpha, when the difference between the theta ₁ of the initial value and the theta ₁ 'is greater than or equal to alpha is theta ₁ and from the initial value.

In the case of FIG. _{8, θ 1 '<θ e3} , tan -1 (2) / 2-θ 1' ≦ α become such theta ₁ 'when it is assumed that obtained as the optimum value, θ ₁ = θ _1' < θ _e3 <θ _e1 <θ ₂ = 45 °, and all patterns are classified as shown in FIG. Therefore, as shown in FIG. 8B, the division direction is the same for all patterns.

  In addition, this invention is not limited to each embodiment mentioned above, In the range which does not deviate from the summary, it can implement in various deformation | transformation. Each of the embodiments described above is not necessarily performed alone, and a plurality of embodiments may be combined. For example, in the second to sixth embodiments, as in the first embodiment, by setting the division width so that the step of the adjacent pattern after slit division is within the allowable range, Similarly, the drawing time can be shortened and the drawing accuracy can be improved.

  In the embodiment, the case where electron beam drawing data is created from design data has been described as an example. However, the present invention can also be applied to creation of ion beam drawing data. In addition, various modifications can be made without departing from the scope of the present invention.

The figure for demonstrating the drawing data production method concerning 1st Embodiment, and showing the relationship between the angle of a hypotenuse, a division | segmentation direction, and a division | segmentation figure kind. FIG. 5 is a diagram for illustrating a definition of an allowable step for explaining a drawing data creation method according to the first embodiment. The figure which is for demonstrating the drawing data creation method concerning 1st Embodiment, and shows the specific division | segmentation method. The figure which shows the drawing data creation method in the case of accompanying area division processing as 3rd Embodiment. The figure which shows the drawing data creation method in the case of accompanying a scaling process as 2nd Embodiment. The figure which shows the example of the slit division | segmentation by 2nd Embodiment, and the slit division | segmentation by a conventional method. The figure which shows the drawing data creation method with respect to the line bent in the middle as 4th Embodiment. The figure which shows the drawing data creation method with respect to the some pattern which has the angle of reference | standard angle (theta) ₁ vicinity as 5th and 6th embodiment. The figure which is for demonstrating 6th Embodiment, and shows the angular distribution of the pattern in a chip | tip. The figure for demonstrating the conventional problem and showing that the pattern level difference after a division changes with the angle of a hypotenuse. The figure which is for demonstrating the conventional problem and shows that the hypotenuse angle of the pattern after a division | segmentation changes. The flowchart for optimizing a threshold value for demonstrating 6th Embodiment.

Explanation of symbols

11 ... Pattern having a hypotenuse (design data)
12 ... Slit division pattern

Claims (7)

A drawing data creation method for creating drawing data by dividing a pattern having a hypotenuse of an arbitrary angle other than an integer multiple of 45 degrees in design data into a trapezoidal or rectangular pattern having a hypotenuse of 45 degrees,
The slit division direction and the type of divided figure are defined according to the arbitrary angle, and a numerical value representing the roughness of the pattern after slit division is calculated for each arbitrary angle, and the numerical value is within an allowable range. A drawing data generation method characterized by performing slit division using a width.   2. The drawing data creation method according to claim 1, wherein, in the slit division, the division width is determined so that a step between adjacent patterns after the slit division is within a predetermined allowable range. A drawing data creation method for creating drawing data by slitting a pattern having a hypotenuse at an arbitrary angle other than an integer multiple of 45 degrees in design data into a trapezoidal or rectangular pattern having a hypotenuse of 45 degrees,
A drawing data creation method characterized in that, when the slit is divided, slit division is performed with a division width expressed by a real number, coordinates of a division position are expressed by a real number, and rounding to an address unit is performed after the division is completed. A drawing data creation method for creating drawing data by slitting a pattern having a hypotenuse at an arbitrary angle other than an integer multiple of 45 degrees in design data into a trapezoidal or rectangular pattern having a hypotenuse of 45 degrees,
The hypotenuse before the region division processing when the angle of the hypotenuse changes due to the rounding processing to the address unit of the division coordinates generated in the region division processing when dividing the pattern having the hypotenuse at an arbitrary angle in the design data The slit division direction and the type of the divided figure are determined from the angle of, and the decision information is inherited by each divided pattern after the area division processing, and the slit division is performed on the divided pattern according to the determined division direction and the divided figure type. A drawing data creation method characterized by performing. A drawing data creation method for creating drawing data by slitting a pattern having a hypotenuse at an arbitrary angle other than an integer multiple of 45 degrees in design data into a trapezoidal or rectangular pattern having a hypotenuse of 45 degrees,
For a plurality of patterns that have different oblique sides in the design data and are connected to each other, if the angle difference of each oblique side is within a certain range, the slit dividing direction and the type of divided figure are determined from the average angle of each oblique side. A drawing data creation method characterized by determining and slit-dividing all of the plurality of connected patterns according to the determined division direction and divided figure type. A drawing data creation method for creating drawing data by slitting a pattern having a hypotenuse at an arbitrary angle other than an integer multiple of 45 degrees in design data into a trapezoidal or rectangular pattern having a hypotenuse of 45 degrees,
When the difference between the oblique side angle of the plurality of adjacent patterns in the design data and the reference angle for determining the slit division direction and the type of the divided figure is within a certain range, all of the plurality of adjacent patterns are A drawing data generation method, characterized by performing slit division with the same slit division direction and divided figure type. A drawing data creation method for creating drawing data by slitting a pattern having a hypotenuse at an arbitrary angle other than an integer multiple of 45 degrees in design data into a trapezoidal or rectangular pattern having a hypotenuse of 45 degrees,
When examining the distribution of the angle of the hypotenuse for each of a plurality of adjacent patterns in the design data, the angle range near the peak of the distribution overlaps the reference angle for determining the slit division direction and the type of divided figure, A drawing data creation method characterized by shifting the reference angle so as to avoid the vicinity of the peak.

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