JP5120070B2 - Water treatment equipment - Google Patents

Description

  The present invention relates to a water treatment apparatus, and more particularly to a water treatment apparatus for obtaining high-purity pure water used for semiconductor cleaning and the like.

  Conventionally, water that does not contain impurities, so-called pure water, is often used for cleaning semiconductors and the like. In recent years, with the development of electronic technologies such as semiconductors, pure water used as cleaning water is also required to have higher purity (for example, a specific resistance value of 1 MΩ · cm or more).

As a water treatment device for obtaining pure water from raw water such as groundwater and industrial water, a reverse osmosis membrane device using a reverse osmosis membrane or a deionization device using an ion exchange membrane and an ion exchange resin is generally used. ing. For example, a reverse osmosis membrane device selectively permeates only water as a solvent by applying a pressure higher than the osmotic pressure of water to be treated by utilizing the property of a reverse osmosis membrane that allows a solvent to pass but not a solute to permeate. And can be collected (see, for example, Patent Document 1).
Japanese Patent Laid-Open No. 5-220480

  However, in order to obtain high-purity pure water as described above, it is not sufficient to purify raw water only once. For example, treated water purified by a reverse osmosis membrane device is further treated with a reverse osmosis membrane device or deionized water. It may be necessary to repeatedly purify the apparatus. In this case, for example, the reverse osmosis membrane device is disposed on the upstream side, and the reverse osmosis membrane device or the deionization device is disposed on the downstream side, whereby the treated water can be purified in one step. However, when reverse osmosis membrane devices or reverse osmosis membrane devices and deionization devices are connected, when the reverse osmosis membrane device arranged on the upstream side breaks down or becomes clogged, it is placed downstream. The reverse osmosis membrane device or the deionization device has a problem that the flow rate becomes insufficient and cavitation occurs.

  For this, for example, an intermediate tank that temporarily stores treated water purified by the reverse osmosis membrane device between the upstream reverse osmosis membrane device and the downstream reverse osmosis membrane device or deionization device. It is possible to avoid by installing. However, when the intermediate tank is installed, there is a problem that it is necessary to secure an installation space for newly installing the intermediate tank. Considering only the installation space, it is possible to install a small intermediate tank. However, when a small intermediate tank is installed, since the capacity is small, it is necessary to frequently start the upstream reverse osmosis membrane device to perform water treatment, and the life of the reverse osmosis membrane is shortened. .

  In addition, for example, it is possible to share the operating conditions of the reverse osmosis membrane devices or between the reverse osmosis membrane device and the deionization device, and control the flow rate of each device to avoid the above-described problem. However, there has been a problem that it becomes difficult to cope with a failure of a flow meter or an abnormality in communication. Furthermore, there is a problem that it takes a lot of cost to install an intermediate tank and control the flow rate.

  Therefore, an object of this invention is to provide the water treatment apparatus which can supply highly purified pure water stably, without expanding an installation space.

The water treatment apparatus of the present invention is a first water storage tank for storing water to be treated, and the water to be treated supplied from the first water storage tank is purified using a reverse osmosis membrane or a nanofiltration membrane. A first purification unit that obtains one treated water, and a first treated water that is disposed on the downstream side of the first purification unit and obtained by the first purification unit is separated into a reverse osmosis membrane, a nanofiltration membrane, or an electric desorption. Obtained by a second purification unit that obtains second treated water by purification using an ion device , a first connection line that connects the first purification unit and the second purification unit, and the second purification unit. A second treated water distribution line through which the second treated water circulates, a first auxiliary line connecting the first water storage tank and the first connection line, the second purification unit, and the first water storage tank. And connecting the first concentrated water discharged from the second purification unit when purifying the first treated water. A first initial return for distributing a part of the second treated water flowing through the second treated water distribution line to the first stored water line from the second refining unit and the first treated water distribution line. And a check valve that is provided in the first auxiliary line and restricts the flow direction of the water flowing through the first auxiliary line only in the direction from the first connection line to the first water storage tank. It is characterized by that.

  The first purification unit and the second purification unit preferably perform purification using a reverse osmosis membrane.

In addition, it is preferable that the first purification unit performs purification using a reverse osmosis membrane, and the second purification unit performs purification using an electric deionization apparatus .

Moreover, the water treatment apparatus of the present invention purifies the first water storage tank for storing the water to be treated and the water to be treated supplied from the first water storage tank using a reverse osmosis membrane or a nanofiltration membrane. a first purification unit to obtain a first processed water Te, disposed on the downstream side of the first purification unit, the first treated water obtained by the first purification unit, reverse osmosis membranes, nanofiltration membranes or electrical A second refining unit that obtains second treated water by refining using a deionizer, a first connection line that connects the first refining unit and the second refining unit, and a second refining unit A third purification unit disposed on the downstream side and purifying the second treated water using a reverse osmosis membrane, a nanofiltration membrane or an electric deionization device to obtain a third treated water; and the second purification unit And the 3rd treated water through which the 3rd treated water obtained by the 3rd refinement part distributes the 2nd connection line which connects the 3rd refinement part A first line for connecting the through line, the first water storage tank and the first connection line, the second purification unit and the first water storage tank are connected, and the first treated water is purified. Connecting a first water distribution line for distributing the first concentrated water discharged from the second purification unit to the first water storage tank from the second purification unit, and the first water storage tank and the second connection line. The second auxiliary line, the third purification unit, and the first water storage tank are connected, and the second concentrated water discharged from the third purification unit when the second treated water is purified is converted to the third purification line. A second water distribution line that distributes water from the section to the first water storage tank, a second initial return line that distributes a portion of the third treated water flowing through the third treated water distribution line to the first water storage tank, and Provided in the second auxiliary line, A check valve for restricting only the direction toward the flow direction of the water flowing through the second auxiliary line from the second connecting line to the first water storage tank, characterized in that it comprises a.

Moreover, it is preferable that the said 3rd refinement | purification part performs the refinement | purification using an electrical deionization apparatus .

  According to the present invention, the water treatment apparatus can stably supply high-purity pure water without increasing the installation space.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[1] First Embodiment FIG. 1 is a flow sheet showing a water treatment apparatus according to a first embodiment of the present invention. As shown in FIG. 1, the water treatment device 1 according to the first embodiment includes an activated carbon filtration device 2, a soft water device 3, a water supply tank (first water storage tank) 4, and a first reverse osmosis membrane device (first The refining units 5a and 5b, the second reverse osmosis membrane device (second refining unit) 6, and the water storage tank 7 are mainly configured. The raw water is subjected to a predetermined treatment in each device in the order described above from the activated carbon filtration device 2 disposed on the upstream side, and is stored in the water storage tank 7 disposed on the downstream side.

  The activated carbon filtration device 2 is connected to a raw water supply source (not shown). The activated carbon filtering device 2 performs a filtering process on the raw water as the first purification process. Specifically, the activated carbon filtering device 2 obtains first pretreated water from raw water by adsorbing and removing an oxidizing agent such as sodium hypochlorite dissolved in the raw water. The activated carbon filter 2 is provided to prevent early deterioration of the ion exchange capacity of the water softener 3. The activated carbon filtration device 2 also serves to prevent early deterioration of the filtration capacity of the first reverse osmosis membrane device 5 and to improve and stabilize the treatment efficiency of the treated water.

  The soft water device 3 is connected to the downstream side of the activated carbon filtration device 2. The soft water device 3 performs a predetermined purification process on the first pretreated water obtained by the activated carbon filtration device 2. Specifically, the water softener 3 exchanges hardness components (calcium ions and magnesium ions) contained in the first pretreated water with sodium ions using an ion exchange resin. That is, the water softener 3 removes the hardness component from the first pretreated water to obtain the second pretreated water.

  The water supply tank 4 is connected to the downstream side of the water softener 3. The water supply tank 4 stores the second pretreated water (treated water) purified by the soft water device 3.

  The first reverse osmosis membrane devices 5a and 5b are connected to the downstream side of the water supply tank 4 via the supply line 10a. The first reverse osmosis membrane device is composed of two first reverse osmosis membrane devices 5a and 5b arranged in parallel. The supply line 10a branches on the upstream side of the first reverse osmosis membrane devices 5a and 5b, and is connected to the upstream side of each of the first reverse osmosis membrane device 5a and the first reverse osmosis membrane device 5b.

  The first reverse osmosis membrane devices 5a and 5b are mainly composed of pressure pumps 51a and 51b provided on the upstream side and reverse osmosis modules (hereinafter referred to as “RO modules”) 52a and 52b provided on the downstream side. Has been. The pressurizing pumps 51a and 51b pressurize the second pretreated water supplied from the water supply tank 4 toward the RO modules 52a and 52b. The RO modules 52a and 52b include a large number of reverse osmosis membranes (not shown), remove impurities by the reverse osmosis membrane, and selectively allow the second pretreated water to permeate, so that the first pure water (first Treated water).

  Further, on the downstream side of the RO modules 52a and 52b, distribution lines 53a and 53b and concentrated water drain lines 54a and 54b are independently connected. The 1st pure water from which the impurity was removed from the 2nd pretreatment water by the reverse osmosis membrane is distribute | circulated to the distribution lines 53a and 53b. The distribution line 53a and the distribution line 53b merge on the downstream side. The distribution lines 53a and 53b are provided with check valves 55a and 55b. The check valves 55a and 55b regulate the recirculation of the first pure water from the distribution lines 53a and 53b to the RO modules 52a and 52b. From the concentrated water drain lines 54a and 54b, the concentrated drain water in which impurities of the second pretreatment water are concentrated by the reverse osmosis membranes of the RO modules 52a and 52b is discharged.

  The second reverse osmosis membrane device 6 is connected in series to the downstream side of the first reverse osmosis membrane devices 5a and 5b via the first connection line 10b. Here, “in series” means that the first reverse osmosis membrane devices 5a, 5b and the second reverse osmosis membrane device 6 are connected without an intermediate tank or the like, for example. The first connection line 10b is connected to the merged distribution lines 53a and 53b.

  The second reverse osmosis membrane device 6 is mainly composed of a pressure pump 61 provided on the upstream side and a reverse osmosis module (hereinafter referred to as “RO module”) 62 provided on the downstream side. The pressurization pump 61 pressurizes the 1st pure water which distribute | circulates from the 1st connection line 10b to the RO module 62 side. The RO module 62 includes a large number of reverse osmosis membranes (not shown), removes impurities by the reverse osmosis membrane, and selectively allows the first pure water to permeate, so that the first pure water to the second pure water ( Second treated water) is obtained.

  A distribution line 63 and a concentrated water drain line (first water distribution line) 64 are independently connected to the downstream side of the RO module 62. The downstream side of the distribution line 63 is connected to the water storage line 10d. The downstream side of the concentrated water drain line 64 is connected to the water supply tank 4. The second pure water from which impurities have been removed from the first pure water by the reverse osmosis membrane flows through the distribution line 63. From the concentrated water drain line 64, the concentrated waste water in which impurities of the first pure water are concentrated by the reverse osmosis membrane is discharged. The concentrated drainage is returned to the water supply tank 4 through the concentrated water drainage line 64 without being discarded.

  Note that the processing capacity of the first reverse osmosis membrane devices 5a and 5b is preferably 1.2 times or more of the processing capability of the second reverse osmosis membrane device 6 in consideration of flow rate fluctuations and the like.

  One side of the first auxiliary line 10c is connected to the first connection line 10b so as to be branched from the first connection line 10b. The other side of the first auxiliary line 10 c is connected to the water supply tank 4. The first auxiliary line 10 c connects the first connection line 10 b and the water supply tank 4.

  The water storage tank 7 is connected to the second reverse osmosis membrane device 6 through a water storage line 10d. The water storage line 10 d is connected to the distribution line 63 of the second reverse osmosis membrane device 6. The water storage tank 7 stores the second pure water purified by the second reverse osmosis membrane device 6.

  One side of the initial return line 65 is connected to the water storage line 10d in a form branched from the water storage line 10d. The other side of the initial return line 65 is connected to the water supply tank 4. The initial return line 65 connects the water storage line 10 d and the water supply tank 4.

  Next, operation | movement of the water treatment apparatus 1 which concerns on 1st Embodiment is demonstrated. The second pure water stored in the water storage tank 7 is appropriately supplied to an external device (not shown). Therefore, the amount of water stored in the water storage tank 7 decreases according to the amount supplied to the external device. When the amount of water stored in the water storage tank 7 becomes less than a predetermined amount of water (predetermined water reduction level), an operation request is made to the water treatment device 1 of the first embodiment.

  When an operation request is made to the water treatment device 1 of the first embodiment, the water treatment device 1 of the first embodiment first activates the first reverse osmosis membrane devices 5a and 5b. When the first reverse osmosis membrane devices 5a and 5b are activated, the first reverse osmosis membrane devices 5a and 5b operate the pressure pumps 51a and 51b. When the pressurizing pumps 51a and 51b are operated, the supply of the second pretreatment water from the water supply tank 4 is started. The second pretreated water is circulated to the first reverse osmosis membrane devices 5a and 5b through the supply line 10a. The second pretreated water circulated through the first reverse osmosis membrane devices 5a and 5b is circulated to the RO modules 52a and 52b by the pressurizing pumps 51a and 51b. The second pretreated water distributed to the RO modules 52a and 52b is subjected to a predetermined purification process by the RO modules 52a and 52b. Thereby, the 2nd pretreatment water is refined and the 1st pure water is obtained.

  The first reverse osmosis membrane devices 5a and 5b activated by the water treatment device 1 of the first embodiment are initially operated for a certain period of time until the purification capacity is stabilized. That is, the first reverse osmosis membrane devices 5a and 5b first perform a first initial operation so that first pure water having a predetermined water quality is obtained. The first initial operation is performed for a predetermined time.

  Since the 1st pure water refine | purified at the time of a 1st initial driving | operation has a possibility that the predetermined | prescribed water quality may not be obtained, it returns to the water supply tank 4 via the 1st auxiliary line 10c. That is, the 1st pure water refine | purified at the time of 1st initial operation is circulated through the 1st auxiliary line 10c during 1st initial operation. Concentrated waste water discharged during the purification of the first pure water is discharged from the concentrated water drain lines 54a and 54b and discarded regardless of the first initial operation and the normal operation described later.

  Next, the water treatment device 1 of the first embodiment activates the second reverse osmosis membrane device 6. When the second reverse osmosis membrane device 6 is activated, the second reverse osmosis membrane device 6 first operates the pressurizing pump 61. When the pressurizing pump 61 is activated, the supply of the first pure water is started from the first reverse osmosis membrane devices 5a and 5b. The 1st pure water is distribute | circulated to the 2nd reverse osmosis membrane apparatus 6 via the 1st connection line 10b. The first pure water circulated through the second reverse osmosis membrane device 6 is circulated to the RO module 62 by the pressure pump 61. The first pure water circulated through the RO module 62 is subjected to a predetermined purification process by the RO module 62. Thereby, 1st pure water is refine | purified and 2nd pure water is obtained.

  The second reverse osmosis membrane device 6 activated by the water treatment device 1 of the first embodiment performs an initial operation for a predetermined time until the purification capacity is stabilized. That is, the water treatment device 1 according to the first embodiment also causes the second reverse osmosis membrane device 6 to perform the second initial operation so as to obtain a predetermined water quality. The second initial operation is performed for a predetermined time.

  The second pure water purified during the second initial operation may be returned to the water supply tank 4 via the initial return line 65 because there is a possibility that a predetermined water quality may not be obtained. That is, the second pure water purified during the second initial operation is circulated through the initial return line 65 during the second initial operation.

  Moreover, since the concentrated waste water discharged | emitted at the time of refinement | purification of 2nd pure water is what concentrated 1st pure water, it is a thing with a higher purification degree than 2nd pre-treatment water. As a result, the concentrated drainage discharged during the purification of the second pure water is returned to the water supply tank 4 through the concentrated water drainage line 64 in the same manner as the second pure water. That is, the concentrated wastewater discharged during the purification of the second pure water is also circulated through the concentrated water drainage line 64.

  When the first and second initial operations are completed, the water treatment device 1 of the first embodiment starts a normal operation. That is, the water treatment device 1 according to the first embodiment blocks the initial return line 65 and distributes the second pure water to the water storage tank 7. The water storage tank 7 stores the second pure water.

  The water treatment apparatus 1 according to the first embodiment is configured such that the second reverse osmosis membrane device 6 and the first reverse osmosis membrane device when the water storage amount of the second pure water in the water storage tank 7 reaches a predetermined water amount (predetermined full water level). The operation is stopped in the order of 5a and 5b. The water treatment apparatus 1 according to the first embodiment always monitors the amount of water stored in the water storage tank 7 at the time of startup, and issues an operation request when the amount of water stored in the water storage tank 7 falls below a predetermined amount of water (predetermined water reduction level). Then, the above operation is repeated.

  According to the water treatment device 1 of the first embodiment having the above configuration, the following effects are obtained. In the water treatment device 1 of the first embodiment, the first reverse osmosis membrane devices 5a and 5b and the second reverse osmosis membrane device 6 are connected in series by the first connection line 10b, and the first connection line 10b and the water supply A first auxiliary line 10 c that connects the tank 4 is provided. Therefore, in the water treatment device 1 of the first embodiment, for example, even when the first pure water exceeding the flow rate required in the second reverse osmosis membrane device 6 is purified in the first reverse osmosis membrane devices 5a and 5b. Only the first pure water having a required flow rate is allowed to flow through the second reverse osmosis membrane device 6, and the excess first pure water can be returned to the water supply tank 4. Thereby, there is no possibility that an unnecessary load is applied to the second reverse osmosis membrane device 6.

  Further, by returning the excess first pure water to the water supply tank 4, for example, the second pretreatment water stored in the water supply tank 4 can be diluted with the first pure water. Therefore, it is possible to improve the quality of the second pretreatment water.

  Moreover, in the water treatment apparatus 1 of 1st Embodiment, when the 1st reverse osmosis membrane apparatus 5a, 5b produces a failure, membrane clogging, etc., the flow volume which the 2nd reverse osmosis membrane apparatus 6 requires | requires, for example Even when not supplied from the first reverse osmosis membrane devices 5 a and 5 b, the second reverse osmosis membrane device 6 can receive the supply of the second pretreatment water directly from the water supply tank 4. Therefore, it is possible to prevent the idling of the second reverse osmosis membrane device 6. Thereby, it becomes possible to prevent the occurrence of cavitation due to the insufficient flow rate of the second reverse osmosis membrane device 6. Further, even when the first reverse osmosis membrane devices 5a and 5b cause a failure or a membrane clogging, stable supply of pure water becomes possible.

  Moreover, in the water treatment device 1 of the first embodiment, for example, the first reverse osmosis membrane devices 5a and 5b and the second reverse osmosis membrane device 6 can be arranged in series without performing complicated control or the like. It becomes possible. Thereby, it becomes possible to stably supply high purity second pure water without incurring a great deal of cost. Moreover, since it is the structure which only provides the 1st auxiliary | assistant line 10c, it becomes possible to manufacture without increasing a component significantly. In addition, maintenance becomes easy.

  Moreover, in the water treatment apparatus 1 of 1st Embodiment, it becomes unnecessary to provide an intermediate tank between the 1st reverse osmosis membrane apparatus 5a, 5b and the 2nd reverse osmosis membrane apparatus 6. FIG. Therefore, it is not necessary to secure an installation space for installing the intermediate tank. Thereby, the water treatment apparatus 1 can be installed even in a place where the installation area is small.

  Further, in the water treatment device 1 of the first embodiment, the water supply tank 4 is disposed via the concentrated water drainage line 64 without discarding the concentrated drainage discharged during the purification of the second pure water by the second reverse osmosis membrane device 6. Return to. Therefore, the water treatment device 1 of the first embodiment can effectively use the concentrated drainage.

  Moreover, in the water treatment apparatus 1 of 1st Embodiment, the initial return line 65 which returns the 2nd pure water refine | purified at the time of the 2nd initial operation of the 2nd reverse osmosis membrane apparatus 6 to the water supply tank 4 is provided. . Therefore, the water treatment device 1 according to the first embodiment can circulate the second pure water. Thereby, the water treatment device 1 of the first embodiment can be effectively used without discarding the second pure water.

  In the water treatment device 1 of the first embodiment, check valves 55a and 55b are provided in the flow lines 53a and 53b of the first reverse osmosis membrane devices 5a and 5b. Therefore, for example, even when the first reverse osmosis membrane device 5a fails, the first pure water purified by the first reverse osmosis membrane device 5b is prevented from flowing to the first reverse osmosis membrane device 5a side. Is possible. Accordingly, the first reverse osmosis membrane devices 5a and 5b can appropriately circulate the first pure water through the first auxiliary line 10c.

[2] Second Embodiment FIG. 2 is a flow sheet showing a water treatment apparatus according to a second embodiment of the present invention. As shown in FIG. 2, the water treatment device 1A of the second embodiment includes an activated carbon filtration device 2, a soft water device 3, a water supply tank (first water storage tank) 4, and a first reverse osmosis membrane device (first purification). Part) 5a, 5b, an electric deionizer (second purification part) 8, and a water storage tank 7 are mainly configured. The water treatment device 1A of the second embodiment is mainly different from the first embodiment in that an electric deionization device 8 is provided instead of the second reverse osmosis membrane device 6.

  Hereinafter, a description will be given centering on differences from the first embodiment. In the following embodiments, parts that are not particularly described are the same as those in the first embodiment, and the same reference numerals are given to the numbers given in the drawings if they are the same as those in the first embodiment.

  The first reverse osmosis membrane devices 5a and 5b are connected to the downstream side of the water supply tank 4 via the supply line 10a. The first reverse osmosis membrane device is composed of two first reverse osmosis membrane devices 5a and 5b arranged in parallel. The supply line 10a branches on the upstream side of the first reverse osmosis membrane devices 5a and 5b, and is connected to the upstream side of each of the first reverse osmosis membrane device 5a and the first reverse osmosis membrane device 5b.

  The electrical deionization device 8 is connected in series to the downstream side of the first reverse osmosis membrane devices 5a and 5b via the first connection line 10b. Here, “in series” means that the first reverse osmosis membrane devices 5a and 5b and the electric deionization device 8 are connected without an intermediate tank or the like, for example. The first connection line 10b is connected to the merged distribution lines 53a and 53b.

  The electric deionization apparatus 8 is mainly composed of a pressurizing pump 81 provided on the upstream side and a deionization module (hereinafter referred to as “EDI module”) 82 provided on the downstream side. The pressurizing pump 81 pressurizes the first pure water circulated from the first reverse osmosis membrane devices 5a and 5b toward the EDI module 82. The EDI module 82 is configured by laminating a cation exchange membrane and an anion exchange membrane (not shown) and filled with an ion exchanger, and removes impurities by the semi-permeation characteristics and charge of the ion exchange membrane. By selectively allowing the first pure water (first treated water) to permeate, third pure water (second treated water) is obtained from the first pure water.

  A distribution line 83 and a concentrated water drainage line (first water distribution line) 84 are independently connected to the downstream side of the EDI module 82. The downstream side of the distribution line 83 is connected to the water storage line 10d. The downstream side of the concentrated water drain line 84 is connected to the water supply tank 4. The third pure water from which impurities have been removed from the first pure water by the ion exchange membrane flows through the distribution line 83. From the concentrated water drainage line 84, the concentrated wastewater in which impurities of the first pure water are concentrated by the reverse osmosis membrane is discharged. The concentrated wastewater concentrated by the electric deionizer 8 is returned to the water supply tank 4 via the concentrated water drainage line 84 without being discarded.

  One side of the first auxiliary line 10c is connected to the first connection line 10b so as to be branched from the first connection line 10b. The other side of the first auxiliary line 10 c is connected to the water supply tank 4. The first auxiliary line 10 c connects the first connection line 10 b and the water supply tank 4.

  A check valve 11 is provided in the first auxiliary line 10c. The check valve 11 restricts the flow direction of the first pure water and / or the second pretreatment water in the first auxiliary line 10 c only in the direction from the first connection line 10 b toward the water supply tank 4. The check valve 11 restricts the second pretreated water stored in the water supply tank 4 from flowing directly to the electric deionizer 8 via the first connection line 10b.

  The water storage tank 7 is connected to the downstream side of the electric deionizer 8 through a water storage line 10d. The upstream side of the water storage line 10 d is connected to the downstream side of the distribution line 83 of the electric deionizer 8. The water storage tank 7 stores the third pure water purified by the electric deionization device 8.

  One side of the initial return line 85 is connected to the water storage line 10d in a form branched from the water storage line 10d. The other side of the initial return line 85 is connected to the water supply tank 4. The initial return line 85 connects the water storage line 10 d and the water supply tank 4.

  Next, the operation of the water treatment apparatus 1A according to the second embodiment will be described. The third pure water stored in the water storage tank 7 is appropriately supplied to an external device (not shown). Therefore, the amount of water stored in the water storage tank 7 decreases according to the amount supplied to the external device. When the amount of water stored in the water storage tank 7 becomes less than a predetermined amount of water (predetermined water reduction level), an operation request is made to the water treatment device 1A of the second embodiment.

  When an operation request is made to the water treatment device 1A of the second embodiment, first, the water treatment device 1A of the second embodiment activates the first reverse osmosis membrane devices 5a and 5b. When the first reverse osmosis membrane devices 5a and 5b are activated, the first reverse osmosis membrane devices 5a and 5b operate the pressure pumps 51a and 51b. When the pressurizing pumps 51a and 51b are operated, the supply of the second pretreatment water from the water supply tank 4 is started. The second pretreated water is circulated to the first reverse osmosis membrane devices 5a and 5b through the supply line 10a. The second pretreated water circulated through the first reverse osmosis membrane devices 5a and 5b is circulated to the RO modules 52a and 52b by the pressurizing pumps 51a and 51b. The second pretreated water distributed to the RO modules 52a and 52b is subjected to a predetermined purification process by the RO modules 52a and 52b. Thereby, the 2nd pretreatment water is refined and the 1st pure water is obtained.

  The first reverse osmosis membrane devices 5a and 5b activated by the water treatment device 1A of the second embodiment are initially operated for a certain period of time until the purification capacity is stabilized. That is, the first reverse osmosis membrane devices 5a and 5b first perform a first initial operation so that first pure water having a predetermined water quality is obtained. The first initial operation is performed for a predetermined time.

  Since the 1st pure water refine | purified at the time of a 1st initial driving | operation has a possibility that the predetermined | prescribed water quality may not be obtained, it returns to the water supply tank 4 via the 1st auxiliary line 10c. That is, the 1st pure water refine | purified at the time of 1st initial operation is circulated through the 1st auxiliary line 10c during 1st initial operation. Further, the concentrated waste water discharged during the purification of the first pure water is discharged from the concentrated water drain line 54a and discarded regardless of the first initial operation and the normal operation.

  Next, 1 A of water treatment apparatuses of 2nd Embodiment start the electrical deionization apparatus 8. FIG. When the electric deionization device 8 is activated, the electric deionization device 8 first operates the pressurizing pump 81. When the pressurizing pump 81 is activated, the supply of the first pure water is started from the first reverse osmosis membrane devices 5a and 5b. The 1st pure water is distribute | circulated to the electric deionization apparatus 8 via the 1st connection line 10b. The first pure water circulated through the electric deionizer 8 is circulated to the EDI module 82 by the pressurizing pump 81. The first pure water distributed to the EDI module 82 is subjected to a predetermined purification process by the EDI module 82. Thereby, 1st pure water is refine | purified and 3rd pure water is obtained.

  The electric deionizer 8 activated by the water treatment apparatus 1A of the second embodiment performs an initial operation for a certain period of time until the purification capacity is stabilized. That is, the water treatment apparatus 1 </ b> A of the second embodiment causes the electric deionization apparatus 8 to perform the third initial operation so as to obtain a predetermined water quality. The third initial operation is performed for a predetermined time.

  The third pure water purified during the third initial operation is returned to the water supply tank 4 via the initial return line 85 because there is a possibility that a predetermined water quality may not be obtained. In other words, the third pure water purified during the third initial operation is circulated through the initial return line 85 during the third initial operation.

  Moreover, since the concentrated waste water discharged | emitted at the time of refinement | purification of 3rd pure water is what concentrated 1st pure water, it is a thing with a higher purification degree than 2nd pre-treatment water. Thereby, it returns to the water supply tank 4 through the concentrated water drainage line 84 similarly to the 3rd pure water. That is, the concentrated wastewater discharged during the purification of the third pure water is also circulated through the concentrated water drainage line 84.

  When the first and third initial operations are completed, the water treatment apparatus 1A of the second embodiment starts a normal operation. That is, the initial return line 85 is blocked, and the third pure water is circulated to the water storage tank 7. The water storage tank 7 stores the third pure water.

  When the amount of the third pure water stored in the water storage tank 7 reaches a predetermined amount of water (a predetermined full water level), the water treatment device 1A of the second embodiment includes the deionization device 8 and the first reverse osmosis membrane devices 5a and 5b. Stop operation in this order. The water treatment apparatus 1A of the second embodiment always monitors the amount of water stored in the water storage tank 7 at the time of start-up, and issues an operation request when the amount of water stored in the water storage tank 7 falls below a predetermined amount of water (predetermined water reduction level). Then, the above operation is repeated.

  According to 1 A of water treatment apparatuses which concern on 2nd Embodiment which has the above structure, there exist the following effects. In the water treatment apparatus 1A of the second embodiment, the first reverse osmosis membrane devices 5a and 5b and the electric deionization device 8 are connected in series by the first connection line 10b, and the first connection line 10b and the water supply tank are connected. The first auxiliary line 10c is connected to the first auxiliary line 10c. Therefore, in the water treatment device 1A of the second embodiment, for example, even when the first pure water exceeding the flow rate required in the electric deionization device 8 is purified in the first reverse osmosis membrane devices 5a and 5b, Only the first pure water having a required flow rate is allowed to flow through the electric deionization device 8, and excess first pure water can be returned to the water supply tank 4. Thereby, there is no possibility that an unnecessary load is applied to the electric deionization device 8.

  Further, by returning the excess first pure water to the water supply tank 4, for example, the second pretreatment water stored in the water supply tank 4 can be diluted with the first pure water. Therefore, it is possible to improve the quality of the second pretreatment water.

  In the water treatment device 1A of the second embodiment, for example, the first reverse osmosis membrane devices 5a and 5b and the electric deionization device 8 can be arranged in series without performing complicated control or the like. become. This makes it possible to stably supply high purity third pure water without incurring a great deal of cost. Moreover, since it is the structure which only provides the 1st auxiliary | assistant line 10c, it becomes possible to manufacture without increasing a component significantly. In addition, maintenance becomes easy.

  Further, in the water treatment device 1A of the second embodiment, it is not necessary to provide an intermediate tank between the first reverse osmosis membrane devices 5a and 5b and the electric deionization device 8. Therefore, it is not necessary to secure an installation space for installing the intermediate tank. Thereby, the water treatment apparatus 1A can be installed even in a place where the installation area is small.

  Further, in the water treatment apparatus 1A of the second embodiment, the concentrated drainage discharged during the purification of the third pure water by the electric deionization device 8 is not discarded and is supplied to the water supply tank 4 via the concentrated water drainage line 84. It is returning. Therefore, it becomes possible to use concentrated drainage effectively.

  Moreover, in the water treatment apparatus 1A of the second embodiment, an initial return line 85 is provided for returning the third pure water purified during the third initial operation of the electric deionization apparatus 8 to the water supply tank 4. Therefore, it is possible to circulate the third pure water. Thereby, the water treatment apparatus 1A of the second embodiment can be effectively used without discarding the third pure water.

  Further, in the water treatment apparatus 1A of the second embodiment, the check valve 11 allows the first pure water and / or the second pretreatment water to flow in the first auxiliary line 10c from the first connection line 10b to the water supply tank. It is restricted only in the direction toward 4. For this reason, it is possible to prevent the second pretreatment water stored in the water supply tank 4 from being directly circulated to the electric deionization device 8. Thereby, 1 A of water treatment apparatuses can obtain the 3rd pure water with high purity.

[3] Third Embodiment FIG. 3 is a flow sheet showing a water treatment apparatus according to a third embodiment of the present invention. As shown in FIG. 3, the water treatment device 1B of the third embodiment includes an activated carbon filtration device 2, a soft water device 3, a water supply tank (first water storage tank) 4, and a first reverse osmosis membrane device (first purification). Part) 5a, 5b, 3rd reverse osmosis membrane apparatus (2nd refinement | purification part) 9a, 9b, the electric deionization apparatus (3rd refinement | purification part) 8, and the water storage tank 7 are comprised mainly. . Compared with the second embodiment, the water treatment device 1B of the third embodiment includes third reverse osmosis membrane devices 9a and 9b between the first reverse osmosis membrane devices 5a and 5b and the electric deionization device 8. It differs mainly in being provided.

  Hereinafter, a description will be given centering on differences from the second embodiment. In the following embodiments, parts that are not particularly described are the same as those in the second embodiment, and the same reference numerals are given to the numbers given in the drawings when they are the same as those in the previously described embodiments.

  In the water treatment device 1B of the third embodiment, the first reverse osmosis membrane devices 5a and 5b, the third reverse osmosis membrane devices 9a and 9b, and the electric deionization device 8 are connected in series from the upstream side. Here, “in series” means that the first reverse osmosis membrane devices 5a and 5b, the third reverse osmosis membrane devices 9a and 9b, the third reverse osmosis membrane devices 9a and 9b, and the electric deionization device 8, for example, It is connected without an intermediate tank or the like.

  The first reverse osmosis membrane devices 5a and 5b are connected to the downstream side of the water supply tank 4 via the supply line 10a. The first reverse osmosis membrane device is composed of two first reverse osmosis membrane devices 5a and 5b arranged in parallel. The supply line 10a branches on the upstream side of the first reverse osmosis membrane devices 5a and 5b, and is connected to the upstream side of each of the first reverse osmosis membrane device 5a and the first reverse osmosis membrane device 5b.

  The third reverse osmosis membrane devices 9a and 9b are connected in series to the downstream side of the first reverse osmosis membrane devices 5a and 5b via the first connection line 10b. The first connection line 10b is connected to the merged distribution lines 53a and 53b. The third reverse osmosis membrane device is composed of two third reverse osmosis membrane devices 9a and 9b arranged in parallel. The first connection line 10b is connected to the merged distribution lines 53a and 53b, and then branches upstream of the third reverse osmosis membrane devices 9a and 9b. The third reverse osmosis membrane device 9a and the third reverse osmosis membrane It is connected to the upstream side of each device 9b.

  The third reverse osmosis membrane devices 9a, 9b are mainly composed of pressure pumps 91a, 91b provided on the upstream side and reverse osmosis modules (hereinafter referred to as “RO modules”) 92a, 92b provided on the downstream side. Has been. The pressurizing pumps 91a and 91b pressurize the first pure water (first treated water) circulated from the first reverse osmosis membrane devices 5a and 5b toward the RO modules 92a and 92b. The RO modules 92a and 92b include a large number of reverse osmosis membranes (not shown), remove impurities by the reverse osmosis membrane, and selectively allow the first pure water to permeate, whereby the first pure water to the fourth pure water are obtained. (Second treated water) is obtained.

  Further, on the downstream side of the RO modules 92a and 92b, distribution lines 93a and 93b and concentrated water drain lines (first water distribution lines) 94a and 94b are independently connected. The distribution lines 93a and 93b merge on the downstream side and are connected to the upstream side of the second connection line 10e described later. The downstream sides of the concentrated water drain lines 94 a and 94 b are connected to the water supply tank 4. The 4th pure water from which impurities were removed from the 1st pure water by the reverse osmosis membrane flows through distribution lines 93a and 93b. The distribution lines 93a and 93b are provided with check valves 95a and 95b. The check valves 95a and 95b restrict the fourth pure water from recirculating from the distribution lines 93a and 93b to the RO modules 92a and 92b. From the concentrated water drain lines 94a and 94b, the concentrated drain water in which impurities of the first pure water are concentrated by the reverse osmosis membrane is discharged from the RO modules 92a and 92b. The concentrated waste water concentrated by the third reverse osmosis membrane devices 9a, 9b is returned to the water supply tank 4 via the concentrated water drain lines 94a, 94b without being discarded.

  The electric deionization device 8 is connected in series with the third reverse osmosis membrane devices 9a and 9b via the second connection line 10e. The second connection line 10 e is connected to the upstream side of the electric deionization device 8 after being connected to the merged distribution lines 93 a and 93 b.

  The electric deionization apparatus 8 is mainly composed of a pressurizing pump 81 provided on the upstream side and a deionization module (hereinafter referred to as “EDI module”) 82 provided on the downstream side. Further, a distribution line 83 and a concentrated water drainage line (second water distribution line) 84 are independently connected to the EDI module 82. The downstream side of the distribution line 83 is connected to the water storage line 10d. The downstream side of the concentrated water drain line 84 is connected to the water supply tank 4. The fifth pure water from which impurities have been removed from the fourth pure water by the ion exchange membrane flows through the distribution line 83. Concentrated waste water in which impurities are concentrated by the reverse osmosis membrane is discharged to the concentrated water drain line 84. The concentrated wastewater concentrated by the electric deionizer 8 is returned to the water supply tank 4 via the concentrated water drainage line 84 without being discarded.

  One side of the second auxiliary line 10f is connected to the second connection line 10e so as to be branched from the second connection line 10e. The other side of the second auxiliary line 10 f is connected to the water supply tank 4. The second auxiliary line 10 f connects the second connection line 10 e and the water supply tank 4.

  A check valve 10g is provided in the second auxiliary line 10f. The check valve 10g restricts the flow direction of the fourth pure water and / or the second pretreatment water in the second auxiliary line 10f only in the direction from the second connection line 10e toward the water supply tank 4. The check valve 10g restricts the second pretreated water stored in the water supply tank 4 from flowing directly to the electric deionizer 8 via the second connection line 10e.

  The water storage tank 7 is connected to an electric deionizer 8 through a water storage line 10d. The water storage line 10 d is connected to the downstream side of the distribution line 83 of the electric deionizer 8. The water storage tank 7 stores the fifth pure water purified by the electric deionization device 8.

  One side of the initial return line 85 is connected to the water storage line 10d in a form branched from the water storage line 10d. The other side of the initial return line 85 is connected to the water supply tank 4. The initial return line 85 connects the water storage line 10 d and the water supply tank 4.

  Next, operation | movement of the water treatment apparatus 1B which concerns on 3rd Embodiment is demonstrated. The fifth pure water stored in the water storage tank 7 is appropriately supplied to an external device (not shown). Therefore, the amount of water stored in the water storage tank 7 decreases according to the amount supplied to the external device. When the amount of water stored in the water storage tank 7 becomes less than a predetermined amount of water (predetermined water reduction level), an operation request is made to the water treatment device 1B of the third embodiment.

  When an operation request is made to the water treatment device 1B of the third embodiment, the water treatment device 1B of the third embodiment first activates the first reverse osmosis membrane devices 5a and 5b. When the first reverse osmosis membrane devices 5a and 5b are activated, the first reverse osmosis membrane devices 5a and 5b operate the pressure pumps 51a and 51b. When the pressurizing pumps 51a and 51b are operated, the supply of the second pretreatment water from the water supply tank 4 is started. The second pretreated water is circulated to the first reverse osmosis membrane devices 5a and 5b through the supply line 10a. The second pretreated water circulated through the first reverse osmosis membrane devices 5a and 5b is circulated to the RO modules 52a and 52b by the pressurizing pumps 51a and 51b. The second pretreated water distributed to the RO modules 52a and 52b is subjected to a predetermined purification process by the RO modules 52a and 52b. Thereby, the 2nd pretreatment water is refined and the 1st pure water is obtained.

  The first reverse osmosis membrane devices 5a and 5b activated by the water treatment device 1B of the third embodiment are initially operated for a certain period of time until the purification capacity is stabilized. That is, the first reverse osmosis membrane devices 5a and 5b first perform a first initial operation so that first pure water having a predetermined water quality is obtained. The first initial operation is performed for a predetermined time.

  Since the 1st pure water refine | purified at the time of a 1st initial driving | operation has a possibility that the predetermined | prescribed water quality may not be obtained, it returns to the water supply tank 4 via the 1st auxiliary line 10c. That is, the 1st pure water refine | purified at the time of 1st initial operation is circulated through the 1st auxiliary line 10c during 1st initial operation. Further, the concentrated waste water discharged during the purification of the first pure water is discharged from the concentrated water drain line 54a and discarded regardless of the first initial operation and the normal operation.

  Next, the water treatment device 1B of the third embodiment activates the third reverse osmosis membrane devices 9a and 9b. When the third reverse osmosis membrane devices 9a and 9b are activated, the third reverse osmosis membrane devices 9a and 9b operate the pressure pumps 91a and 91b. When the pressurizing pumps 91a and 91b are operated, the supply of the first pure water from the first reverse osmosis membrane devices 5a and 5b is started. The 1st pure water is distribute | circulated to the 3rd reverse osmosis membrane apparatus 9a, 9b via the 1st connection line 10b. The 1st pure water distribute | circulated to the 3rd reverse osmosis membrane apparatus 9a, 9b is distribute | circulated to RO module 92a, 92b by the pressurization pumps 91a, 91b. The first pure water circulated through the RO modules 92a and 92b is subjected to a predetermined purification process by the RO modules 92a and 92b. Thereby, 1st pure water is refine | purified and 4th pure water is obtained.

  The third reverse osmosis membrane devices 9a and 9b activated by the water treatment device 1B of the third embodiment are initially operated for a certain period of time until the purification capacity is stabilized. That is, the third reverse osmosis membrane devices 9a and 9b first perform a fourth initial operation so that fourth pure water having a predetermined water quality is obtained. The fourth initial operation is performed for a predetermined time.

  The fourth pure water purified during the fourth initial operation may be returned to the water supply tank 4 via the second auxiliary line 10f because there is a possibility that a predetermined water quality may not be obtained. In other words, the fourth pure water purified during the fourth initial operation is circulated through the second auxiliary line 10f during the fourth initial operation.

  Moreover, since the concentrated waste water discharged | emitted at the time of refinement | purification of 4th pure water is what concentrated 1st pure water, it is a thing with a higher purification degree than 2nd pre-treatment water. Thereby, it returns to the water supply tank 4 similarly to the 4th pure water through the concentrated water drain lines 94a and 94b. That is, the concentrated waste water discharged during the purification of the fourth pure water is also circulated through the concentrated water drain lines 94a and 94b.

  Next, the water treatment apparatus 1 </ b> B of the third embodiment activates the electric deionization apparatus 8. When the electric deionization device 8 is activated, the electric deionization device 8 first operates the pressurizing pump 81. When the pressurizing pump 81 is activated, the supply of the fourth pure water is started from the third reverse osmosis membrane devices 9a, 9b. The fourth pure water is circulated to the electric deionization device 8 via the second connection line 10e. The fourth pure water circulated through the electric deionizer 8 is circulated to the EDI module 82 by the pressurizing pump 81. The fourth pure water distributed to the EDI module 82 is subjected to a predetermined purification process by the EDI module 82. Thereby, 4th pure water is refine | purified and 5th pure water is obtained.

  The electric deionizer 8 activated by the water treatment device 1B of the third embodiment performs an initial operation for a certain period of time until the purification capacity is stabilized. That is, the water treatment apparatus 1B causes the electric deionization apparatus 8 to perform the fifth initial operation so as to obtain a predetermined water quality. The fifth initial operation is performed for a predetermined time.

  The fifth pure water purified during the fifth initial operation may be returned to the water supply tank 4 via the initial return line 85 because there is a possibility that a predetermined water quality may not be obtained. That is, the fifth pure water purified during the fifth initial operation is circulated through the initial return line 85 during the fifth initial operation.

  Further, since the concentrated wastewater discharged during the purification of the fifth pure water is a concentrate of the fourth pure water purified by the third reverse osmosis membrane devices 9a, 9b, the degree of purification is higher than that of the second pretreated water. Is high. Thereby, it returns to the water supply tank 4 through the concentrated water drainage line 84 similarly to the 5th pure water. That is, the concentrated drainage discharged during the purification of the fifth pure water is also circulated through the concentrated water drainage line 84.

  When the first, fourth, and fifth initial operations are completed, the water treatment apparatus 1B of the third embodiment starts a normal operation. That is, the initial return line 85 is blocked and the fifth pure water is circulated to the water storage tank 7. The water storage tank 7 stores the fifth pure water.

  When the storage amount of the fifth pure water in the water storage tank 7 reaches a predetermined water amount (predetermined full water level), the water treatment device 1B of the third embodiment includes an electric deionization device 8 and a third reverse osmosis membrane device 9a. , 9b and the first reverse osmosis membrane devices 5a, 5b in this order. The water treatment apparatus 1B of the third embodiment constantly monitors the amount of water stored in the water storage tank 7 during startup, and requests operation when the amount of water stored in the water storage tank 7 falls below a predetermined amount of water (predetermined water reduction level). Repeat the above operation.

  According to the water treatment device 1B of the third embodiment having the above configuration, the following effects are obtained. In the water treatment device 1B according to the third embodiment, the first reverse osmosis membrane devices 5a and 5b, the third reverse osmosis membrane devices 9a and 9b, and the electric deionization device 8 are connected to the first connection line 10b and The second connection line 10e is connected in series. Therefore, the treated water can be continuously treated by the first reverse osmosis membrane devices 5a and 5b, the third reverse osmosis membrane devices 9a and 9b, and the electric deionization device 8. Thereby, it becomes possible to refine | purify high purity 5th pure water.

  Moreover, in the water treatment apparatus 1 </ b> B of the third embodiment, a first auxiliary line 10 c that connects the first connection line 10 b and the water supply tank 4 is provided. Therefore, the water treatment apparatus 1B of the third embodiment, for example, in the case where the first pure water exceeding the flow rate required in the third reverse osmosis membrane devices 9a, 9b is purified in the first reverse osmosis membrane devices 5a, 5b. In addition, only the first pure water having a necessary flow rate is allowed to flow through the third reverse osmosis membrane devices 9 a and 9 b, and excess first pure water can be returned to the water supply tank 4. Thereby, there is no possibility that an unnecessary load is applied to the third reverse osmosis membrane devices 9a and 9b.

  Further, by returning the excess first pure water to the water supply tank 4, for example, it becomes possible to dilute the second pretreatment water stored in the water supply tank 4 with the first pure water, and the second pretreatment water. It becomes possible to improve water quality.

  Moreover, the 2nd auxiliary line 10f which connects the 2nd connection line 10e and the water supply tank 4 is provided in the water treatment apparatus 1B of 3rd Embodiment. Therefore, the water treatment apparatus 1B of the third embodiment is necessary even when, for example, the fourth pure water exceeding the flow rate required in the electric deionization apparatus 8 is purified in the third reverse osmosis membrane apparatuses 9a and 9b. Only the fourth pure water having a flow rate is allowed to flow through the electric deionizer 8, and the extra fourth pure water can be returned to the water supply tank 4. Thereby, there is no possibility that an unnecessary load is applied to the electric deionization device 8.

  Further, by returning the excess third pure water to the water supply tank 4, for example, it becomes possible to dilute the second pretreatment water stored in the water supply tank 4 with the third pure water. It becomes possible to improve water quality.

  Moreover, in the water treatment apparatus 1B of the third embodiment, for example, the first reverse osmosis membrane devices 5a and 5b, the third reverse osmosis membrane devices 9a and 9b, and the electric deionization device without complicated control or the like. 8 can be arranged in series. Thereby, it is possible to stably supply high-purity fifth pure water without incurring great costs. In addition, since the first and second auxiliary lines 10c and 10f are simply provided, it is possible to manufacture without significantly increasing the number of components. In addition, maintenance becomes easy.

  Moreover, in the water treatment apparatus 1B of the third embodiment, there is no need to provide an intermediate tank. Therefore, it is not necessary to secure an installation space for installing the intermediate tank. Thereby, the water treatment apparatus 1B of the third embodiment can be installed even in a place where the installation area is small.

  Further, in the water treatment device 1B of the third embodiment, the concentrated drainage discharged during the purification of the fourth pure water by the third reverse osmosis membrane devices 9a, 9b and the purification of the fifth pure water by the electric deionization device 8. The concentrated drainage discharged at times is returned to the water supply tank 4 via the concentrated water drainage lines 94a, 94b, 84 without being discarded. Therefore, it becomes possible to use concentrated drainage effectively.

  Further, in the water treatment device 1B of the third embodiment, the fourth and fifth pure waters purified at the fourth and fifth initial operations of the third reverse osmosis membrane devices 9a and 9b and the electric deionization device 8. A second auxiliary line 10f and an initial return line 85 that can return the water to the water supply tank 4 are provided. Therefore, it becomes possible to circulate the 4th and 5th pure water. Thereby, the water treatment apparatus 1B of the third embodiment can be effectively used without being discarded.

[4] Fourth Embodiment FIG. 5 is a flow sheet showing a water treatment apparatus according to a fourth embodiment of the present invention. As shown in FIG. 5, the water treatment device 1C includes an activated carbon filtration device 2, a soft water device 3, a water supply tank (first water storage tank) 4, and first reverse osmosis membrane devices (first purification units) 5a and 5b. A third reverse osmosis membrane device (second purification unit) 9a, 9b, an auxiliary tank (second water storage tank) 12, an electric deionization device (third purification unit) 8, and a water storage tank 7. Consists of the subject.

  Hereinafter, a description will be given centering on differences from the third embodiment. In the following embodiments, parts that are not particularly described are the same as those in the third embodiment, and the same reference numerals are given to the numbers given in the drawings if they are the same as those in the previously described embodiments.

  In a water treatment device 1C of the fourth embodiment, first reverse osmosis membrane devices 5a and 5b and third reverse osmosis membrane devices 9a and 9b are connected in series. Here, “in series” means that the first reverse osmosis membrane devices 5a, 5b and the third reverse osmosis membrane devices 9a, 9b are connected without an intermediate tank or the like, for example. Further, in the water treatment device 1C of the fourth embodiment, the electric deionization device 8 is connected to the third reverse osmosis membrane devices 9a and 9b via the second water storage tank 12.

  The first reverse osmosis membrane devices 5a and 5b are connected to the downstream side of the water supply tank 4 via the supply line 10a. The first reverse osmosis membrane device is composed of two first reverse osmosis membrane devices 5a and 5b arranged in parallel. The supply line 10a branches on the upstream side of the first reverse osmosis membrane devices 5a and 5b, and is connected to the upstream side of each of the first reverse osmosis membrane device 5a and the first reverse osmosis membrane device 5b.

  The third reverse osmosis membrane devices 9a and 9b are connected in series to the downstream side of the first reverse osmosis membrane devices 5a and 5b via the first connection line 10b. The first connection line 10b is connected to the downstream side of the merged distribution lines 53a and 53b. The third reverse osmosis membrane device is composed of two third reverse osmosis membrane devices 9a and 9b arranged in parallel. The first connection line 10b is connected to the merged distribution lines 53a and 53b, and then branches upstream of the third reverse osmosis membrane devices 9a and 9b. The third reverse osmosis membrane device 9a and the third reverse osmosis membrane It is connected to the upstream side of each device 9b.

  The auxiliary tank 12 is connected to the downstream side of the third reverse osmosis membrane devices 9a and 9b via the third connection line 11a. The third connection line 11e is connected to the auxiliary tank 12 after being connected to the downstream side of the merged distribution lines 93a and 93b. The auxiliary tank 12 stores the fourth pure water purified by the third reverse osmosis membrane devices 9a and 9b.

  The electric deionization device 8 is connected to the auxiliary tank 12 via the fourth connection line 11b. The electric deionizer 8 purifies the fourth pure water stored in the auxiliary tank 12 to obtain fifth pure water.

  The water storage tank 7 is connected to the downstream side of the electric deionizer 8 through a water storage line 10d. The water storage line 10 d is connected to the downstream side of the distribution line 83 of the electric deionizer 8. The water storage tank 7 stores the fifth pure water purified by the electric deionization device 8.

  One side of the initial return line 85 is connected to the water storage line 10d in a form branched from the water storage line 10d. The other side of the initial return line 85 is connected to the water supply tank 4. The initial return line 85 connects the water storage line 10 d and the water supply tank 4.

  Next, the operation of the water treatment apparatus 1C according to the fourth embodiment will be described. The fifth pure water stored in the water storage tank 7 is appropriately supplied to an external device (not shown). Therefore, the amount of water stored in the water storage tank 7 decreases according to the amount supplied to the external device. When the amount of water stored in the water storage tank 7 becomes less than a predetermined amount of water (predetermined water reduction level), an operation request is made to the water treatment device 1C of the fourth embodiment.

  When an operation request is made to the water treatment device 1C of the fourth embodiment, first, the water treatment device 1C of the fourth embodiment activates the first reverse osmosis membrane devices 5a and 5b. When the first reverse osmosis membrane devices 5a and 5b are activated, the first reverse osmosis membrane devices 5a and 5b operate the pressure pumps 51a and 51b. When the pressurizing pumps 51a and 51b are operated, the supply of the second pretreatment water from the water supply tank 4 is started. The second pretreated water is circulated to the first reverse osmosis membrane devices 5a and 5b through the supply line 10a. The second pretreated water circulated through the first reverse osmosis membrane devices 5a and 5b is circulated to the RO modules 52a and 52b by the pressurizing pumps 51a and 51b. The second pretreated water distributed to the RO modules 52a and 52b is subjected to a predetermined purification process by the RO modules 52a and 52b. Thereby, the 2nd pretreatment water is refined and the 1st pure water is obtained.

  The first reverse osmosis membrane devices 5a and 5b activated by the water treatment device 1C of the fourth embodiment are initially operated for a certain period of time until the purification capacity is stabilized. That is, the first reverse osmosis membrane devices 5a and 5b first perform a first initial operation so that first pure water having a predetermined water quality is obtained. The first initial operation is performed for a predetermined time.

  Since the 1st pure water refine | purified at the time of a 1st initial driving | operation has a possibility that the predetermined | prescribed water quality may not be obtained, it returns to the water supply tank 4 via the 1st auxiliary line 10c. That is, the 1st pure water refine | purified at the time of 1st initial operation is circulated through the 1st auxiliary line 10c during 1st initial operation. Further, the concentrated waste water discharged during the purification of the first pure water is discharged from the concentrated water drain line 54a and discarded regardless of the first initial operation and the normal operation.

  Next, 1 C of water treatment apparatuses of 4th Embodiment start 3rd reverse osmosis membrane apparatus 9a, 9b. When the third reverse osmosis membrane devices 9a and 9b are activated, the third reverse osmosis membrane devices 9a and 9b operate the pressure pumps 91a and 91b. When the pressurizing pumps 91a and 91b are operated, the supply of the first pure water from the first reverse osmosis membrane devices 5a and 5b is started. The 1st pure water is distribute | circulated to the 3rd reverse osmosis membrane apparatus 9a, 9b via the 1st connection line 10b. The 1st pure water distribute | circulated to the 3rd reverse osmosis membrane apparatus 9a, 9b is distribute | circulated to RO module 92a, 92b by the pressurization pumps 91a, 91b. The first pure water circulated through the RO modules 92a and 92b is subjected to a predetermined purification process by the RO modules 92a and 92b. Thereby, 1st pure water is refine | purified and 4th pure water is obtained.

  If necessary, the third reverse osmosis membrane devices 9a and 9b activated by the water treatment device 1C of the fourth embodiment may perform an initial operation for a certain period of time until the purification capacity is stabilized. That is, the third reverse osmosis membrane devices 9a and 9b may first perform a fourth initial operation so that fourth pure water having a predetermined water quality can be obtained. In this case, the fourth initial operation is performed for a predetermined time.

  When performing the fourth initial operation, the fourth pure water purified at the time of the fourth initial operation may not have a predetermined water quality. Therefore, as in the third embodiment (see FIG. 3), The water is returned to the water supply tank 4 through the second auxiliary line 10f. In other words, the fourth pure water purified during the fourth initial operation is circulated through the second auxiliary line 10f during the fourth initial operation.

  Moreover, since the concentrated waste water discharged | emitted at the time of refinement | purification of 4th pure water is what was concentrated by 1st reverse osmosis membrane apparatus 5a, 5b, it is a thing with a higher purification degree than 2nd pre-treatment water. Thereby, it returns to the water supply tank 4 similarly to the 4th pure water through the concentrated water drain lines 94a and 94b. That is, the concentrated waste water discharged during the purification of the fourth pure water is also circulated through the concentrated water drain lines 94a and 94b.

  When the fourth initial operation ends, the water treatment apparatus 1C of the fourth embodiment stores the fourth pure water in the auxiliary tank 12.

  When the amount of water stored in the auxiliary tank 12 becomes equal to or greater than a predetermined amount of water (a predetermined full water level), the water treatment device 1C of the fourth embodiment activates the electric deionization device 8. When the electric deionization device 8 is activated, the electric deionization device 8 first operates the pressurizing pump 81. When the pressurizing pump 81 is operated, the supply of the fourth pure water from the auxiliary tank 12 is started. The fourth pure water is circulated to the electric deionizer 8 via the third connection line 11a. The fourth pure water circulated through the electric deionizer 8 is circulated to the EDI module 82 by the pressurizing pump 81. The fourth pure water distributed to the EDI module 82 is subjected to a predetermined purification process by the EDI module 82. Thereby, 4th pure water is refine | purified and 5th pure water is obtained.

  The electric deionizer 8 activated by the water treatment apparatus 1C of the fourth embodiment performs an initial operation for a certain period of time until the purification capacity is stabilized. That is, the water treatment apparatus 1 </ b> C of the fourth embodiment also performs the fifth initial operation so that a predetermined water quality can be obtained even in the electric deionization apparatus 8. The fifth initial operation is performed for a predetermined time.

  The fifth pure water purified during the fifth initial operation may be returned to the water supply tank 4 via the initial return line 85 because there is a possibility that a predetermined water quality may not be obtained. That is, the fifth pure water purified during the fifth initial operation is circulated through the initial return line 85 during the fifth initial operation. Here, the fifth pure water purified during the fifth initial operation may be returned to the auxiliary tank 12 via the initial return line 85.

  Moreover, since the concentrated waste water discharged | emitted at the time of refinement | purification of 5th pure water is what was concentrated by 3rd reverse osmosis membrane apparatus 9a, 9b, it is a thing with a higher purification degree than 2nd pre-treatment water. Thereby, it returns to the water supply tank 4 through the concentrated water drainage line 84 similarly to the 5th pure water. That is, the concentrated drainage discharged during the purification of the fifth pure water is also circulated through the concentrated water drainage line 84.

  When the fifth initial operation is completed, the water treatment apparatus 1C of the fourth embodiment starts the normal operation. That is, the initial return line 85 is blocked and the fifth pure water is circulated to the water storage tank 7. The water storage tank 7 stores the fifth pure water.

  When the storage amount of the fifth pure water in the water storage tank 7 reaches a predetermined water amount (predetermined full water level), the water treatment device 1C of the fourth embodiment includes an electric deionization device 8 and a third reverse osmosis membrane device 9a. , 9b and the first reverse osmosis membrane devices 5a, 5b in this order. The water treatment apparatus 1C of the fourth embodiment constantly monitors the amount of water stored in the water storage tank 7 during startup, and issues an operation request when the amount of water stored in the water storage tank 7 is less than a predetermined amount of water (predetermined water reduction level). Then, the above operation is repeated.

  In the case where an operation request is made when the auxiliary tank 12 has a water storage amount greater than or equal to a predetermined amount, first, the above operation in the electric deionizer 8 is prioritized, and the water storage amount of the auxiliary tank 12 is a predetermined amount. When it becomes less than, the 1st and 3rd reverse osmosis membrane apparatus 5a, 5b, 9a, 9b is started, and said driving | operation is performed.

  According to the water treatment apparatus 1 </ b> C of the fourth embodiment having the above configuration, the following effects are achieved. In the water treatment apparatus 1 </ b> C according to the fourth embodiment, by providing the auxiliary tank 12, it is possible to secure a predetermined amount of fourth pure water as a buffer in the auxiliary tank 12. Therefore, for example, even if the flow rate is reduced due to the failure of the third reverse osmosis membrane devices 9a and 9b, membrane clogging, or the like, the electric deionization device 8 can prevent the occurrence of cavitation. In addition, as compared with the water treatment apparatus 1B of the third embodiment, even if the treatment capacity of the third reverse osmosis membrane apparatuses 9a and 9b is reduced, the electric deionization apparatus 8 can be circulated at a predetermined flow rate. Become.

  In addition, embodiment of this invention is not limited to said embodiment at all, and the technical scope of this invention is not limited to this.

  In the first embodiment, the first auxiliary line 10c is directly connected to the first connection line 10b. However, the present invention is not limited to this. For example, a check valve that restricts the flow direction of the first pure water in the first auxiliary line 10c only in the direction from the first connection line 10b toward the water supply tank 4 may be provided in the first auxiliary line 10c. By restricting the flow direction of the first pure water and / or the second pretreatment water in the first auxiliary line 10c only to the direction from the first connection line 10b toward the water supply tank 4, the second pretreatment water is supplied to the water supply tank 4. From being directly distributed to the second reverse osmosis membrane device 6. Therefore, the 1st pure water through the 1st reverse osmosis membrane apparatus 5a, 5b will always be distribute | circulated to the 2nd reverse osmosis membrane apparatus 6. FIG. This makes it possible to obtain high purity second pure water.

  Further, for example, when the RO modules 52a and 52b of the first reverse osmosis membrane devices 5a and 5b are deteriorated or when the quality of the raw water is poor, the first pure water is circulated to the first auxiliary line 10c. It is good also as a structure which adjusts the quality of the 1st pure water by adjusting the quantity. The circulation amount can be adjusted by adjusting the number of rotations of the pressure pumps 51a, 51b, 61 provided in the first and second reverse osmosis membrane devices 5a, 5b, 6.

  Further, a pressure switch is attached to the first connection line 10b, and an opening / closing valve such as a motor valve provided in the first auxiliary line 10c is opened / closed according to the pressure of the first pure water flowing through the first connection line 10b. It is good. That is, when the pressure of the first connection line 10b decreases due to failure of the first reverse osmosis membrane devices 5a, 5b, etc., the on-off valve is opened and treated water is supplied from the water supply tank 4 to the second reverse osmosis membrane device. 6 may be configured to supply water.

  In the above embodiment, the initial operation of the first reverse osmosis membrane devices 5a and 5b and the second reverse osmosis membrane device 6 is canceled after a predetermined time, but the present invention is not limited to this. . For example, a water quality meter may be provided in the first auxiliary line 10c and the initial return line 65, and the initial operation may be canceled on condition that the first pure water and the second pure water have a predetermined water quality.

  Moreover, in the said embodiment, although demonstrated using 1st and 2nd reverse osmosis membrane apparatus 5a, 5b, 6 using a reverse osmosis membrane (RO membrane) as a 1st and 2nd refinement | purification part, in this invention Is not limited to this. For example, a filtration device using a nanofiltration membrane (NF membrane) instead of a reverse osmosis membrane (RO membrane) may be used. Here, the nanofiltration membrane is a liquid separation membrane capable of preventing permeation of particles and polymers (substances having a maximum molecular weight of about several hundreds) smaller than about 2 mm. A nanofiltration membrane (NF membrane) is a liquid separation having a function located between an ultrafiltration membrane (a membrane capable of separating a substance having a molecular weight of about 1000 to 300,000) and a reverse osmosis membrane in terms of filtration function. It is a membrane.

  Moreover, in the said embodiment, although the two 1st and 3rd reverse osmosis membrane apparatuses 5a, 5b, 9a, 9b were arrange | positioned in parallel, it demonstrated in this invention. The number of first and third reverse osmosis membrane devices 5a, 5b, 9a, 9b may be changed as appropriate according to the required flow rate. For example, one first and / or third reverse osmosis membrane device 5a, 5b, 9a, 9b may be used, and a plurality of first and / or third reverse osmosis membrane devices 5a, 5b may be used. , 9a, 9b may be used.

  Moreover, although the said 2nd reverse osmosis membrane apparatus 6 was arrange | positioned and demonstrated in the said embodiment, in this invention, it is not restricted to this. The number and capacity of the second reverse osmosis membrane device 6 may be changed as appropriate according to the required flow rate. For example, a plurality of second reverse osmosis membrane devices may be arranged in parallel.

  Moreover, although the said embodiment demonstrated as a water treatment apparatus which supplies a pure water to the external apparatus which wash | cleans a semiconductor, in this invention, it is not restricted to this. For example, as an external device, you may use for the water treatment apparatus which supplies pure water to thermal equipment, such as a steam boiler, a hot water boiler, a cooling tower, and a water heater.

  In the third embodiment, the first auxiliary line 10c and the second auxiliary line 10f are provided independently. However, the present invention is not limited to this. For example, as shown in FIG. 4, the water treatment apparatus 1B may be configured to include a third auxiliary line 10h that connects the first auxiliary line 10c and the second auxiliary line 10f.

  By providing the third auxiliary line 10h that connects the first auxiliary line 10c and the second auxiliary line 10f, the water treatment apparatus 1B ′ can cause, for example, the third reverse osmosis membrane devices 9a and 9b to malfunction or become clogged. Even when it is generated, the electric deionization device 8 can receive the supply of the first pure water from the first reverse osmosis membrane devices 5a and 5b. Therefore, it is possible to prevent the idling of the second reverse osmosis membrane device 6. Thereby, it becomes possible to prevent the occurrence of cavitation due to the insufficient flow rate of the second reverse osmosis membrane device 6.

It is a flow sheet which shows the water treatment equipment concerning a 1st embodiment of the present invention. It is a flow sheet which shows the water treatment equipment concerning a 2nd embodiment of the present invention. It is a flow sheet which shows the water treatment equipment concerning a 3rd embodiment of the present invention. It is a flow sheet which shows the modification of the water treatment equipment concerning a 3rd embodiment of the present invention. It is a flow sheet which shows the water treatment equipment concerning a 4th embodiment of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Water treatment apparatus 1A, 1B, 1B ', 1C Water treatment apparatus 4 Water supply tank (1st water storage tank)
5a, 5b First reverse osmosis membrane device (first purification unit)
6 Second reverse osmosis membrane device (second purification unit)
10a Supply line 10b First connection line 10c First auxiliary line 10d Water storage line

Claims (5)

A first water storage tank for storing treated water;
A first purification unit that obtains first treated water by refining the treated water supplied from the first water storage tank using a reverse osmosis membrane or a nanofiltration membrane;
The first treated water disposed at the downstream side of the first purification unit and obtained by the first purification unit is purified using a reverse osmosis membrane, a nanofiltration membrane, or an electric deionization device to obtain a second product. A second purification unit for obtaining treated water;
A first connection line connecting the first purification unit and the second purification unit;
A second treated water distribution line through which the second treated water obtained by the second purification unit flows;
A first auxiliary line connecting the first water storage tank and the first connection line;
The first refining unit and the first water storage tank are connected, and the first concentrated water discharged from the second refining unit when the first treated water is purified is transferred from the second refining unit to the first water storage. A first water distribution line for distributing water to the tank;
A first initial return line for distributing a portion of the second treated water flowing through the second treated water distribution line to the first water storage tank;
A check valve that is provided in the first auxiliary line and restricts a flow direction of water flowing through the first auxiliary line only in a direction from the first connection line toward the first water storage tank;
A water treatment apparatus comprising:   The water treatment apparatus according to claim 1, wherein the first purification unit and the second purification unit perform purification using a reverse osmosis membrane. The first purification unit performs purification using a reverse osmosis membrane,
The said 2nd refinement | purification part performs the refinement | purification using an electrical deionization apparatus , The water treatment apparatus of Claim 1 characterized by the above-mentioned. A first water storage tank for storing treated water;
A first purification unit that obtains first treated water by refining the treated water supplied from the first water storage tank using a reverse osmosis membrane or a nanofiltration membrane;
The first treated water disposed at the downstream side of the first purification unit and obtained by the first purification unit is purified using a reverse osmosis membrane, a nanofiltration membrane, or an electric deionization device to obtain a second product. A second purification unit for obtaining treated water;
A first connection line connecting the first purification unit and the second purification unit;
A third purification unit disposed downstream of the second purification unit and purifying the second treated water using a reverse osmosis membrane, a nanofiltration membrane or an electrical deionization device to obtain a third treated water; ,
A second connection line connecting the second purification unit and the third purification unit;
A third treated water distribution line through which the third treated water obtained by the third purification unit flows;
A first auxiliary line connecting the first water storage tank and the first connection line;
The first refining unit and the first water storage tank are connected, and the first concentrated water discharged from the second refining unit when the first treated water is purified is transferred from the second refining unit to the first water storage. A first water distribution line for distributing water to the tank;
A second auxiliary line connecting the first water storage tank and the second connection line;
The third refining unit is connected to the first water storage tank, and the second concentrated water discharged from the third refining unit when the second treated water is purified is transferred from the third refining unit to the first water storage. A second water distribution line for distributing water to the tank;
A second initial return line for distributing a part of the third treated water flowing through the third treated water distribution line to the first water storage tank;
A check valve that is provided in the second auxiliary line and restricts a flow direction of water flowing through the second auxiliary line only in a direction from the second connection line toward the first water storage tank;
A water treatment apparatus comprising: The water treatment apparatus according to claim 4, wherein the third purification unit performs purification using an electric deionization apparatus.

Images