JP5116979B2 - Laser processing equipment - Google Patents

Description

  The present invention relates to a laser processing apparatus.

Conventionally, laser processing apparatuses that perform laser processing by scanning laser light from a laser light source with an optical scanning unit and then condensing the laser light on a processing region on a processing object through a condenser lens are widely known. ing.
Japanese Patent Laid-Open No. 11-170073

  By the way, in the laser processing apparatus as described above, parameters for processing include the pulse period of the pulse laser beam, the scanning speed by the optical scanning means, the laser power, and the interval between painting. If these parameters can be set and changed, the degree of freedom in processing is increased, which is preferable. However, since a plurality of parameters influence each other, it is difficult to grasp a specific image of the print result, and an unexpected print result may be obtained.

  The present invention has been made based on the above-described circumstances, and an object thereof is to provide a laser processing apparatus capable of stably performing the filling process without unevenness.

As means for achieving the above object, the laser processing apparatus according to claim 1 comprises:
A laser light source for emitting pulsed laser light;
The irradiation spot of the pulse laser beam from the laser light source is scanned in one direction on the workpiece at a first shift interval, and is scanned at a second shift interval in an orthogonal direction perpendicular to the scanning direction. Optical scanning means;
Setting changing means for changing the setting of at least one of the first shifting interval and the second shifting interval;
When one of the settings is changed by the setting changing means, the other is adjusted by processing of the CPU so that the first shift interval and the second shift interval are maintained in a predetermined relationship before and after the change. Adjustment means;
It is provided with.

The laser processing apparatus according to claim 2 comprises:
A laser light source for emitting pulsed laser light;
The irradiation spot of the pulse laser beam from the laser light source is scanned in one direction on the workpiece at a first shift interval, and is scanned at a second shift interval in an orthogonal direction perpendicular to the scanning direction. Optical scanning means;
Setting changing means for changing the setting of at least one of the first shifting interval and the second shifting interval;
When one of the settings is changed by the setting changing means, the other is adjusted by processing of the CPU so that the first shift interval and the second shift interval are maintained in a predetermined relationship before and after the change. Adjustment means;
Display means for displaying a first overlapping state when the irradiation spot is shifted in the scanning direction and a second overlapping state when the irradiation spot is shifted in the orthogonal direction based on the adjustment content by the adjusting means;
With
Further, at least one of the first shift interval and the second shift interval is set by the setting changing unit in a state where the first overlapping state and the second overlapping state are displayed by the display unit. It can be changed.

The invention of claim 3 is the laser processing apparatus according to claim 1 or 2,
The setting changing means changes the one by changing at least one of a pulse period of the pulse laser light, a scanning speed by the optical scanning means, and the second shift interval,
The adjusting means adjusts the other by changing at least one of the pulse period, the scanning speed, and the second shift interval.

A fourth aspect of the present invention is the laser processing apparatus according to any one of the first to third aspects,
Uniform mode setting means for making the irradiation spot shift interval uniform,
The adjusting means sets the first shifting interval and the second shifting interval to be the same when the uniform mode is set by the uniform mode setting means.

The invention of claim 5 is the laser processing apparatus according to any one of claims 1 to 4,
Display means for displaying a first overlapping state when the irradiation spot is shifted in the scanning direction and a second overlapping state when the irradiation spot is shifted in the orthogonal direction based on the setting change content by the setting changing means. With
The display means numerically displays the first overlap state and the second overlap state.

<Invention of Claim 1>
According to the first aspect of the present invention, when either one of the first shift interval and the second shift interval is changed by the setting change unit, the first shift interval and the second shift interval are predetermined. The other is adjusted based on the irradiation spot diameter of the pulse laser so that Therefore, the degree of shift in the scanning direction and the degree of shift in the orthogonal direction are constantly maintained in a predetermined relationship by the adjusting means, so that stable painting without unevenness is possible.

<Invention of Claim 2>
According to the second aspect of the present invention, when one of the first shift interval and the second shift interval is changed by the setting changing means, the first shift interval and the second shift interval are predetermined. The other is adjusted based on the irradiation spot diameter of the pulse laser so that Further, based on the adjustment contents, a first overlapping state when the irradiation spot is shifted in the scanning direction and a second overlapping state when the irradiation spot is shifted in the orthogonal direction are displayed. Therefore, the degree of shift in the scanning direction and the degree of shift in the orthogonal direction are constantly maintained in a predetermined relationship by the adjusting means, so that stable painting without unevenness is possible. In addition, since the user can visually grasp the overlapping state by the display means, it becomes easy to perform a desired painting process.

<Invention of Claim 3>
As in the invention of claim 3, the first shift interval and the second shift interval are changed by changing at least one of the pulse period of the pulse laser beam, the scanning speed by the optical scanning means, and the second shift interval. If one of them is changed, one of the first shift interval and the second shift interval can be easily set and changed. On the other hand, if such a change is made, it becomes difficult to grasp the image of what kind of processing result will be obtained. In the invention of claim 4, the pulse period, scanning speed, and second shift interval are adjusted by the adjusting means. At least one of the above is changed, and the one and the other are always maintained in a predetermined relationship. Therefore, the setting change and adjustment of the first shift interval and the second shift interval can be performed easily and suitably.

<Invention of Claim 4>
According to the invention of claim 4, when the uniform mode is set by the uniform mode setting means, the first overlap interval and the second overlap interval are adjusted to be the same. Therefore, stable uniform processing without unevenness can be easily performed with high accuracy.

<Invention of Claim 5>
According to the invention of claim 5, since the first overlapping state and the second overlapping state are numerically displayed by the display means, the user can grasp more accurate information.

<Embodiment 1>
Embodiment 1 of the present invention will be described with reference to the drawings.
FIG. 1 is a diagram illustrating a schematic configuration of the laser processing apparatus according to the first embodiment, and FIG. 2 is a block diagram illustrating an electrical configuration of the laser processing apparatus of FIG. FIG. 3 is a perspective view illustrating the appearance of the controller.
1. 1 is a processing table on which an object to be processed (in this embodiment, an insulating sheet used for a mobile phone is illustrated), and reference numeral M is a laser processing apparatus. .
The laser processing apparatus M includes a laser light source 10, and the laser light emitted from the laser light source 10 is irradiated to the workpiece W after the direction is changed by the galvano scanner 20. The galvano scanner 20 includes a pair of galvanometer mirrors 20V and 20W and a condensing lens 20Z. One galvanometer mirror 20W can change the reflection angle in the vertical direction by the driving means 20Y, and the other galvanometer mirror 20V. Can shift the reflection angle in the lateral direction by the driving means 20X.

  These two galvanometer mirrors 20V and 20W can adjust the direction of the laser beam in two orthogonal directions. As a result, the laser beam can be scanned at any position in the processing region on the workpiece W. It becomes. The condensing lens 20Z is composed of, for example, an fθ lens and has a function of converging the laser light reflected by the galvanometer mirrors 20V and 20W to focus on the workpiece W.

2. Electrical Configuration of Laser Processing Apparatus As shown in FIG. 2, the controller 30 includes a memory 32 that stores processing data such as characters and graphics, and a CPU 34. Is connected.

  The memory 32 may be configured by one type of storage unit (for example, ROM) or may be configured by a plurality of types of storage units. When configured by a plurality of storage units, a volatile memory such as a RAM and a nonvolatile memory such as an EEPROM may be combined.

  The display unit 37 is configured by a liquid crystal display panel, and can display character information, graphic information, and the like. Note that the display unit may be formed using an EL panel or the like.

As shown in FIG. 3, the input unit 31 includes a plurality of operation buttons and is configured to be able to input information. The configuration shown here is merely an example, and other input interfaces may be used as long as information can be input. For example, the input unit may be configured by touch panel type input means.
In the present embodiment, although not shown, it is configured so that it can be input from an external device such as a computer.

  The input unit 31 can input a processing pattern. When a predetermined processing pattern is set by the input unit 31, the CPU 34 reads corresponding processing data (vector data) from the memory 32. Then, the coordinate data of a plurality of points including the start point and the end point is calculated for the line elements of the read processing data, and these are assigned to the coordinates on the workpiece W (generation of coordinate data).

  Thereafter, the CPU 34 temporarily stores the coordinate data in the memory 32, and outputs it through the signal line S1 at a predetermined timing. The coordinate data output from the CPU 34 is converted from a digital signal to an analog signal by the D / A conversion circuit 36, and then input to each drive circuit (not shown) constituting the galvano drive means 20X, 20Y. Accordingly, the laser beam is scanned by adjusting and controlling the swing angle of the galvanic mirrors 20W and 20V, and it is possible to perform desired processing on the workpiece W. Further, a pulse is given from the CPU 34 to the laser light source 10, and laser light (pulse laser light) is output in accordance with the timing of this pulse.

3. Characteristic Configuration FIG. 4 illustrates the behavior of the irradiation spot SP during scan scanning.
As described above, the laser processing apparatus M is provided with the laser light source 10 that emits pulsed laser light and the galvano scanner 20 corresponding to the optical scanning means. In this case, the irradiation spot SP of the pulsed laser light from the laser light source 10 is scanned in one direction while being superimposed on the workpiece W at the first shift interval W1, and the scanning direction X Is shifted in the orthogonal direction Y orthogonal to the second shift interval W2 and overlapped.

 Furthermore, in the present embodiment, the scanning speed SS, the pulse period PS, and the filling interval TU are set to be changeable. FIG. 5 conceptually shows how these are stored in the memory 32. By setting these parameters, the first shift interval W1 and the second shift interval W2 are determined. By changing the setting of each parameter, the first shift interval W1 and the second shift interval W2 are set. The setting of the shift interval W2 can be changed.

  For example, the first shift interval W1 means the distance from the center of a certain irradiation spot SP to the center of the next irradiation spot SP, and is determined by the product of the scanning speed SS and the pulse period PS. The second shift interval W2 is the distance between the centers of the irradiation spots SP when shifted in the orthogonal direction Y, and corresponds to an arbitrarily determined paint interval TU (TU1 in memory). The processing of the CPU 34 changes the setting of the scanning speed SS, the pulse period PS, and the filling interval TU (for example, the setting is changed according to the input from the user), and accordingly the first shift interval W1 and the second shift interval TU. The shift interval W2 is changed, and the CPU 34 corresponds to a setting change unit.

  Further, when one of the first shift interval W1 and the second shift interval W2 is changed by the processing of the CPU 34, the first shift interval W1 and the second shift interval W2 have a predetermined relationship. In addition, the other is adjusted based on the irradiation spot diameter of the pulse laser beam.

  Specifically, the “predetermined relationship” in the present embodiment is a relationship in which the first overlap interval W1 and the second overlap interval W2 are the same. More specifically, the first overlap interval W1 and the second overlap interval W2 are changed by changing at least one of the pulse period PS of the pulse laser beam, the scanning speed SS by the optical scanning unit, and the second shift interval W1. Is changed, and the other is adjusted so that the first shift interval W1 and the second shift interval W2 are the same. The adjustment method will be specifically described below.

Next, the processing will be described with reference to the flowchart of FIG.
First, when the processing is started, it is determined in S10 whether or not the uniform mode is set. For example, a screen for selecting the uniform mode and the normal mode is displayed. If the uniform mode is selected, the process proceeds to Yes in S10, and if the normal mode is selected, the process proceeds to No in S10. ing. When it progresses to No, a normal process is performed in S60. In the present embodiment, the overlap interval of the irradiation spots SP can be made uniform (that is, the first overlap interval W1 and the second overlap interval W2 are made the same), and the CPU 34 can be set. Corresponds to uniform mode setting means.

  After proceeding to Yes in S10, the current set content is read and displayed in S20. Specifically, the storage contents of the memory 32 as shown in FIG. 5 are read, and the display as shown in FIG. 7 is performed on the display unit 37 (see FIGS. 2 and 3). Here, based on the set contents, a first overlapping state when the irradiation spot SP is shifted in the scanning direction and a second overlapping state when the irradiation spot SP is shifted in the orthogonal direction are displayed. In addition, when the setting content of the memory 32 is changed, the first overlapping state and the second overlapping state are displayed based on the setting change content.

  The first overlap state is numerically displayed as a scanning direction overlap interval TS (in FIG. 7, numerically displayed as TS1 (for example, 1 mm)) and graphically displayed as an overlap of irradiation spots in the scanning direction ( (Refer to the part of the figure Z1). Further, the second overlapping state is also numerically displayed as the filling interval TU, and is displayed as a graphic as an overlap of irradiation spots in the orthogonal direction (see the portion of the graphic Z2). Although the numerical display and the graphic display are used together here, the first overlap state and the second overlap state may be displayed by only one of them. The scanning direction overlap interval TS corresponds to the first overlap interval W1 (FIG. 4), and is automatically calculated based on the scanning speed SS and the pulse period PS. The filling interval TU corresponds to the second overlap interval, and a set value stored in the memory 32 is displayed.

  In S30, the user is confirmed whether or not to change the setting. For example, the display unit 37 displays a screen for inquiring whether to change the setting. If there is an instruction to change the setting from the user, the process proceeds to Yes in S30, and the setting change process is performed in S40. On the other hand, if there is an instruction not to change the setting, the process proceeds to No in S30, and the uniform processing is performed with the currently set contents.

  The setting change process of S40 is performed using the display screen of the display unit 37 shown in FIG. For example, when the user changes the pulse period PS from the current set value PS1 to PS2, the first overlap interval W1 is determined by the product of the PS1 and the current scanning speed SS1. Then, the CPU 34 changes and sets the second overlap interval W2 so that the first overlap interval W1 and the second overlap interval W2 are the same. That is, the filling interval TU corresponding to the second overlap interval is changed from the current set value TU1 to TU2, which is equal to the product of PS2 and SS1. In other words, parameters other than the parameters whose settings are changed by the user are adjusted so that the relationship of PS × SS = TU is maintained.

  Here, an example in which the user can change the scanning speed SS and the pulse period PS is shown, but the scanning direction overlap interval TS (that is, the first overlap interval W1) itself may be changed. In this case, when TS is changed, the painting interval TU is changed so that TS = TU.

  Further, when the painting interval TU (that is, the first overlap interval W1) is changed, either or both of the scanning speed SS and the pulse period PS are maintained so that the relationship of TU = SS × PS is maintained. Is adjusted. At the time of this adjustment, either one of the scanning speed SS and the pulse period PS may be set as a fixed value and the other may be set as a fluctuation value. Both of them are determined (for example, the fluctuation ratio of the scanning speed SS and the pulse It may be changed according to a law that makes the fluctuation ratio of the period PS the same, and finally TU = SS × PS.

  And based on such adjustment content, the new first overlap state and the new second overlap state after adjustment will be displayed. When the adjustment is performed by the CPU 34 after the scanning speed SS is changed by the user, the display unit 37 displays a new pulse period PS and a scanning direction overlap interval TS (that is, in addition to the changed scanning speed SS). The first shifting interval W1) and the filling interval TU (first shifting interval W2) are numerically displayed, and the position of each figure is also changed accordingly. In this case, in the uniform processing process of S50, the first shift interval W1 and the second shift interval are newly set in the setting change process of S40 and based on the set values whose overlap state is displayed on the display unit 37. W2 is switched and set.

  As described above, in this embodiment, when one of the first shift interval W1 and the second shift interval W2 is changed by the CPU 34 corresponding to the setting change unit, the CPU 34 corresponding to the adjustment unit changes the setting. The other is adjusted based on the irradiation spot diameter SP of the pulse laser so that the first shift interval W1 and the second shift interval W2 have a predetermined relationship. Accordingly, the degree of shift in the scanning direction X and the degree of shift in the orthogonal direction Y are constantly maintained in a predetermined relationship, and stable painting without unevenness is possible.

  Further, when one of the first shift interval W1 and the second shift interval W2 is changed in setting, the first spot when the irradiation spot SP is shifted in the scanning direction X based on the setting change content. The overlap state and the second overlap state when shifted in the orthogonal direction Y are displayed on the display unit 37 (display means). Therefore, the user can visually grasp what kind of overlapping state is obtained, and it becomes easy to perform a desired painting process.

  In addition, when one of the first shift interval W1 and the second shift interval W2 is changed, the first shift interval W1 and the second shift interval W2 have a predetermined relationship. The other is adjusted based on the diameter of the irradiation spot SP of the pulse laser. Further, based on the adjustment contents, the first overlapping state when the irradiation spot SP is shifted in the scanning direction X and the second overlapping state when the irradiation spot SP is shifted in the orthogonal direction Y are displayed on the display unit 37. Therefore, the degree of shift in the scanning direction X and the degree of shift in the orthogonal direction Y are constantly maintained in a predetermined relationship, enabling stable painting without unevenness, and the display unit 37 allows the user to see what overlapping state Therefore, it is easy to perform a desired painting process.

  Furthermore, one of the first shift interval W1 and the second shift interval W2 is changed by changing at least one of the pulse period of the pulse laser beam, the scanning speed by the optical scanning means, and the second shift interval. Like to do. Accordingly, one of the first shift interval W1 and the second shift interval W2 can be easily set and changed. On the other hand, if such a change is made, it becomes difficult to grasp an image of what kind of processing result will be obtained. However, in the configuration of the present embodiment, the CPU 34 as the adjusting means performs the pulse period, the scanning speed, and the second. At least one of the shift intervals is changed, and one and the other are always maintained in a predetermined relationship. Therefore, the setting change and adjustment of the first shift interval W1 and the second shift interval W2 can be performed easily and suitably.

  Further, when the uniform mode is set by the CPU 34 corresponding to the uniform mode setting means, the first overlap interval W1 and the second overlap interval W2 are adjusted to be the same. Therefore, stable uniform processing without unevenness can be easily performed with high accuracy.

  Further, since the first overlap state W1 and the second overlap state W2 are numerically displayed on the display unit 37 (display means), the user can grasp more accurate information.

<Other embodiments>
The present invention is not limited to the embodiments described with reference to the above description and drawings. For example, the following embodiments are also included in the technical scope of the present invention.

(1) In the above-described embodiment, an example in which the setting of the pulse period PS, the scanning speed SS, and the second shift interval W1 can be changed has been described. However, other parameters may be changed.
(2) In the above embodiment, the contents adjusted by the CPU 34 (adjusting means) are displayed on the display unit 37, but laser processing may be performed without displaying them.
(3) In the above embodiment, the contents adjusted by the CPU 34 (adjusting means) are displayed on the display unit 37, but the adjusting means may be omitted.
That is, a laser light source that emits pulsed laser light and an irradiation spot of the pulsed laser light from the laser light source are scanned in one direction on the workpiece at a first shift interval and orthogonal to the scanning direction. Optical scanning means for scanning in the orthogonal direction at a second shift interval, and setting change means for changing the setting of at least one of the first shift interval and the second shift interval, and setting by the setting change means Laser processing comprising display means for displaying a first overlapping state when the irradiation spot is shifted in the scanning direction and a second overlapping state when the irradiation spot is shifted in the orthogonal direction based on the change contents It can be configured as a device.
These laser light source, optical scanning means, setting change means, and display means can be the same as those in the first embodiment. In addition, the structure which provided the adjustment means in this laser processing apparatus corresponds to Embodiment 1. FIG.
According to this configuration, when one of the first shift interval and the second shift interval is changed by the setting change unit, the irradiation spot is shifted in the scanning direction based on the setting change content. The first overlap state and the second overlap state when shifted in the orthogonal direction are displayed. Therefore, the user can visually grasp what kind of overlapping state is obtained, and it becomes easy to perform a desired painting process.
Specifically, as in the first embodiment, the current setting status such as the pulse period PS, the scanning speed SS, and the second shift interval is displayed on the display unit 37 (display means), and the user is based on the display contents. The setting may be changed manually.
Also in this configuration, the display means can be configured to numerically display the first overlap state and the second overlap state.
(4) In the above embodiment, as the “predetermined relationship”, the relationship in which the first shift interval and the second shift interval are the same is illustrated, but other relationships may be used. For example, the adjustment by the adjusting unit may be performed so that the first shift interval and the second shift interval have a constant ratio (for example, a ratio of 1: 2).

The figure which shows schematic structure of the laser processing apparatus of Embodiment 1. Block diagram illustrating the electrical configuration of the laser processing apparatus of FIG. A perspective view illustrating the appearance of the controller Explanatory drawing explaining the behavior of the irradiation spot in laser processing Explanatory drawing explaining the setting contents stored in the memory Flowchart illustrating the flow of processing The figure which illustrates the contents displayed on a display part in processing

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Laser light source 20 ... Galvano scanner (optical scanning means)
34 ... CPU (setting changing means, adjusting means, switching setting means, uniform mode setting means)
37. Display section (display means)
M ... Laser processing device W ... Workpiece

Claims (5)

A laser light source for emitting pulsed laser light;
The irradiation spot of the pulse laser beam from the laser light source is scanned in one direction on the workpiece at a first shift interval, and is scanned at a second shift interval in an orthogonal direction perpendicular to the scanning direction. Optical scanning means;
Setting changing means for changing the setting of at least one of the first shifting interval and the second shifting interval;
When one of the settings is changed by the setting changing means, the other is adjusted by processing of the CPU so that the first shift interval and the second shift interval are maintained in a predetermined relationship before and after the change. Adjustment means;
A laser processing apparatus comprising: A laser light source for emitting pulsed laser light;
The irradiation spot of the pulse laser beam from the laser light source is scanned in one direction on the workpiece at a first shift interval, and is scanned at a second shift interval in an orthogonal direction perpendicular to the scanning direction. Optical scanning means;
Setting changing means for changing the setting of at least one of the first shifting interval and the second shifting interval;
When one of the settings is changed by the setting changing means, the other is adjusted by processing of the CPU so that the first shift interval and the second shift interval are maintained in a predetermined relationship before and after the change. Adjustment means;
Display means for displaying a first overlapping state when the irradiation spot is shifted in the scanning direction and a second overlapping state when the irradiation spot is shifted in the orthogonal direction based on the adjustment content by the adjusting means;
With
Further, at least one of the first shift interval and the second shift interval is set by the setting changing unit in a state where the first overlapping state and the second overlapping state are displayed by the display unit. A laser processing apparatus characterized by being changeable. The setting changing means changes the one by changing at least one of a pulse period of the pulse laser light, a scanning speed by the optical scanning means, and the second shift interval,
3. The laser according to claim 1, wherein the adjusting unit adjusts the other by changing at least one of the pulse period, the scanning speed, and the second shift interval. 4. Processing equipment. Uniform mode setting means for making the irradiation spot shift interval uniform,
The adjusting means sets the first shifting interval and the second shifting interval to be the same when the uniform mode setting means sets the uniform mode. The laser processing apparatus according to any one of claims 1 to 3. Display means for displaying a first overlapping state when the irradiation spot is shifted in the scanning direction and a second overlapping state when the irradiation spot is shifted in the orthogonal direction based on the setting change content by the setting changing means. With
The laser processing apparatus according to claim 1, wherein the display unit numerically displays the first overlapping state and the second overlapping state.

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