JP5095204B2 - Probe storage board and contact machine - Google Patents

Description

  The present invention relates to a coaxial probe used for relay for electrically connecting each electrode of an electronic component such as a semiconductor element and an electronic circuit such as a tester circuit, a probe storage board, a cable holding board, and the like The present invention relates to a contact machine using a cable and a method for manufacturing the cable holding board.

  Electronic circuits using ICs, LSIs, transistors, and other electronic components are used in a large number of devices and devices, and their applications are steadily expanding. It is usually constructed using a printed circuit board with wiring films printed on both sides, and an electronic circuit is mounted by mounting various electronic components such as IC, LSI, transistor, etc. on the printed circuit board and performing necessary soldering. Is configured.

  Many of devices and devices using electronic circuits are required to be downsized, highly functional, and high in performance, and accordingly, the circuit configuration of electronic circuits is complicated and high integration is required. Therefore, the wiring of the printed circuit board also tends to be miniaturized and highly integrated, and as a result, measurement for the inspection becomes difficult. This is because it is necessary to increase the arrangement density of the probes for measurement and the accuracy of the arrangement position by miniaturization and high integration of the wiring.

Nevertheless, the importance of inspection is increasing.
This is because the incidence of short-circuit defects increases as the wiring becomes finer and more integrated.
A tester equipped with a measurement circuit is used for the inspection, and a contact machine is used for electrical derivation of each wiring film, electrode, etc. of the printed circuit board to the measurement circuit. This contact machine has a number of probes on a plate, one end of each probe is brought into contact with a portion to be electrically connected to a measurement circuit such as each wiring film of a printed circuit board, and the other end of a cord connected to the measurement circuit. Many are designed to come into contact with the tip. In this regard, the applicant company has made various proposals according to Japanese Patent Application No. 7-61728, Japanese Patent Application No. 8-183449, Japanese Patent Application No. 10-66333, and the like.

Japanese Patent Application No. 7-61728 Japanese Patent Application No. 8-183449 Japanese Patent Application No. 10-66333

  Incidentally, there is a need to connect a device to be measured such as an IC or LSI and a measurement circuit by a coaxial cable. This is because electronic devices are required to have higher measurement accuracy and higher measurement speed along with higher performance, higher frequency, and multi-functionality, in order to increase measurement accuracy and increase measurement speed. This requires more complete prevention of noise intrusion into the measurement line (line) and more complete impedance matching because a coaxial cable connection between the device under test and the measurement circuit is preferable.

However, conventionally, there is no contact machine compatible with a coaxial cable. This is because a cable core connected to a measurement circuit such as a tester can be electrically connected to a terminal to be measured, for example, an IC, LSI, VLSI, etc. by a rod-shaped conductor that forms a probe. This is because there is no means for electrically connecting the outer conductor to the terminal on the device under test side.
That is, conventionally, the contact machine is not compatible with the coaxial cable, and there is a problem that noise enters the cable holding board portion and necessary impedance matching cannot be sufficiently obtained.

  The present invention has been made in order to solve such problems, such as a coaxial probe, a probe storage board that stores the coaxial probe, a cable holding board that forms a contact machine with the probe storage board, and the like. Coaxial-compatible contact machine using the probe storage board and the cable holding board, and a method for manufacturing the cable holding board, so that the contact machine can be coaxially connected and the contact machine is connected as a relay means. An object of the present invention is to more completely prevent noise from entering a circuit formed by a circuit element or the like and a circuit such as a measurement circuit, and to achieve better impedance matching.

The probe storage board according to claim 1 has a probe holding plate in which a plurality of probe holding holes for holding the coaxial probe are provided, and each probe holding hole has a coaxial probe on both sides of the probe holding plate. The rod-shaped conductors of the all coaxial probes and the tips of the outer conductive tubes projecting from both sides of the coaxial probe and the tip of the outer conductive cylinder are located on the same plane and are stored in a state where they are prevented from coming off.
The coaxial probe is a rod-shaped conductor that forms a core wire whose both ends are in contact with each other and have electrical continuity, and the rod-shaped conductor is externally fitted in a state in which it is prevented from coming off. An insulating cylinder having electrical insulation, one end is closed, the other end is open, and a conductor loose insertion hole through which the rod-like conductor is passed in a non-contact manner is formed at the closed end. One or more contact protrusions projecting outward are formed on the outer peripheral portion of the loose insertion hole, and a pair of electrically conductive cylinders are opposed to each other at the other open ends, and are fitted onto the insulating cylinder. An outer conductive cylinder, a conductive compression spring interposed between the pair of cylindrical bodies forming the outer conductive cylinder, and the outer conductive cylinder are fitted on the outer conductive cylinder and the distance between the cylindrical bodies is constant. And a barrel that holds while regulating so as not to become larger It is an axial probe.

Contacts machine according to claim 2, a probe container board according to claim 1, in respective cable receiving hole has a cable having a plurality of cable storage hole, it is polished end face cable core to the surface, outer cable A cable holding board in which the end of the coaxial cable with the conductor exposed is inserted and fixed so that the end face and the surface of the cable holding plate are located on the same plane; Each coaxial probe of the board is in contact with the surface of the cable holding plate of the cable holding board, one contact end of each rod-like conductor is a cable core wire of the corresponding coaxial cable, and one side of each outer conductive cylinder The protrusions face each other so that they can contact each other with the corresponding cable outer conductor of the coaxial cable, and the coaxial probe faces the cable conductor. And full coaxial probe in proximity to Buru holding board coaxial probe corresponding thereto, characterized in that so as to or contact state or caused to the contact, its contact state separated is released.

According to the probe storage board of claim 1 , a plurality of coaxial probes connected to a plurality of coaxial cables are stored in one cable holding plate in a state where both ends protrude from both ends of the cable holding plate and are prevented from coming off. Therefore, a large number of electrodes such as an IC and a large number of elevations such as a tester circuit can be connected in a coaxial manner.

  According to the contact machine of claim 2, the probe storage board according to claim 1 and a cable in which a plurality of cable storage holes are formed, each of the cable storage holes is end-face polished and a cable core wire on the surface thereof. A cable holding board in which the end of the coaxial cable with the cable outer conductor exposed is inserted and fixed so that the end face and the surface of the cable holding plate are located on the same plane is connected to the probe. Each coaxial probe of the storage board is in contact with the surface of the cable holding plate of the cable holding board, one contact end of each rod-shaped conductor is a contact with the cable core of the corresponding coaxial cable, and one side of each outer conductive cylinder The protrusions are aligned and faced with the corresponding outer cable conductors of the coaxial cable so that they can contact each other, and the coaxial probe is moved to the The contact states described above occur near the cable holding board, or the contact states are released when they are separated from each other. It is possible to provide a contact machine that can be coaxially supported by being electrically derived by electrons and an outer conductive cylinder and connected to, for example, an IC disposed on the opposite side of the cable holding board of the coaxial probe.

  The coaxial probe of the present invention basically includes a rod-shaped conductor, an electrically insulating insulating tube that is externally fitted in a state where it is prevented from coming off, an outer conductive tube that is externally fitted thereto, and the outer conductive material. A compression spring having conductivity interposed between the pair of cylinders forming the cylinder and the outer conductive cylinder are held while being fitted on the outer cylinder so as not to increase the distance between the cylinders beyond a certain level. Although it is a barrel, a step portion is provided by appropriately reducing the diameter of the inner portion of the outer cylinder from both ends of the outer peripheral surface of the insulating tube, and further, the step portion is formed from the end surface on the opening side of the inner peripheral surface of each outer conductive tube. A step portion is provided by appropriately increasing the inner diameter to the corresponding portion, and a contact spring is fixed to the portion whose inner diameter is increased, and the step portion of the contact spring (step portion of the outer conductive cylinder) The part that protrudes from the insulating cylinder Engage the Kidan portion may be adapted to define the positional relationship between the insulating tube and the outer conductive tube. This is the case in the examples described later.

  In addition, each coaxial probe is used in a contact machine, and impedance Zo at a predetermined value, for example, at the time of contact such as measurement, that is, when the coaxial cable is electrically connected to an IC or the like, for example, It is preferable to be 50Ω.

Hereinafter, the present invention will be described in detail according to illustrated embodiments.
1A to 1C show one embodiment of the coaxial probe of the present invention. FIG. 1A is a longitudinal sectional view, FIG. 1B is a view of the coaxial probe viewed from the left end, and FIG. It is a perspective view which shows a part.
Reference numeral 2 denotes a coaxial probe, and 4 denotes a rod-like conductor which is in contact with a cable core wire of a coaxial cable, which will be described later.

Reference numeral 8 denotes an insulating cylinder fitted on the rod-shaped conductor 4 and has an inner diameter that is much longer than the cylinder that forms the intermediate portion of the rod-shaped conductor 4 and that is much larger than the outer diameter of the cylinder. Ring-shaped projections 8 and 8 having an inner diameter smaller than that of other portions are formed at both ends of the insulating cylinder 8, and these projections 8 and 8 form an intermediate portion of the rod-shaped conductor 4. The rod-shaped conductor 4 is prevented from coming off by engaging with a cylindrical body.
The both ends of the outer peripheral surface of the insulating cylinder 8 have protrusions 10 and 10 formed by making the outer diameter larger than that of the intermediate part.

  Reference numerals 12a and 12a denote cylinders constituting the outer conductive cylinder 12, each of which has a shape in which one end is open and the other is closed, and 14 and 14 indicate the closed ends. Reference numerals 16 and 16 denote conductor insertion holes formed in the central portions of the closed ends 14 and 14, and have an inner diameter sufficiently larger than the outer diameter of the rod-like conductor 4. 18, 18,... Are needle-like contact protrusions disposed on the periphery of the conductor loose insertion holes 16, 16 of the outer conductive cylinder 12, and the contact protrusions 18, 18,. It is in contact with the measurement IC or the like or the cable outer conductor of the coaxial cable and plays a role of electrical conduction.

  20 and 20 are steps formed by increasing the inner diameter of the portion from the end of the inner peripheral surface of the cylindrical body 12a, 12a constituting the outer conductive tube 12 to the substantially central portion larger than the other portions. The step portions 20 and 20 are located at positions corresponding to the inward step portions by the protrusions 10 and 10 of the insulating cylinder 8. Reference numerals 22 and 22 denote outward stepped portions formed by making the outer diameter of the outer peripheral surfaces of the cylindrical bodies 12a, 12a from the end portion to the substantially central portion larger than the other portions.

  Reference numerals 24 and 24 denote the contact springs (springs in which the adjacent wire rings are fixed and are not elastic), and are fixed to the inner diameter of the outer conductive cylinder 12 where the inner diameter is increased. The thickness is larger than the steps of the step portions 20, 20, and the portion protruding from the step portions 20, 20 forms a step portion that engages with the protrusion 10 of the insulating cylinder 6. And the positional relationship in the axial direction of the insulating cylinder 8 and the outer side conductive cylinder 12 fitted on it is prescribed | regulated by the engagement.

  A conductive compression spring 26 is interposed between the opening side end portions of the pair of outer conductive cylinders 12 and 12. Reference numeral 28 denotes a cylindrical barrel, and ring-shaped projections 30 and 30 projecting inwardly are formed at both ends, and the cylindrical barrel 28 constitutes a pair of cylindrical bodies 12 a and 12 constituting the outer conductive cylinder 12. The projections 30 and 30 are engaged with the step portions 22 and 22 of the cylinders 12a and 12a to hold the outer conductive cylinder 12 including the pair of cylinders 12a and 12a in a state of being prevented from coming off.

  According to such a coaxial probe 2, the terminal on one side of the rod-shaped conductor 4 is the cable core wire of the coaxial cable, and the contact protrusions 18, 18,. And can be electrically connected to the electrode of the element to be measured (not shown). As will be described later, the impedance of the coaxial probe 2 is set so as to be a predetermined impedance, for example, 50Ω when it is incorporated into a contact machine and brought into a contact state.

2A and 2B show one embodiment of the contact machine of the present invention, where FIG. 2A is a cross-sectional view of the contact machine, and FIG. 2B is a cross-section showing a coaxial cable housed in a cable holding board. FIG.
The contact machine includes a probe storage board 40 and a cable holding board 42. The probe storage board 40 has a large number of probe storage holes 46 formed of probe storage holes 46a, 46b, 46b formed in the probe holding plate 44 in which a plurality of probe holding plates 44a, 44b, 44b are stacked. The coaxial probes 2, 2,... Are stored in the probe storage holes 46, 46,... In a state where the coaxial probes 2, 2,. Projecting from both surfaces of the probe storage plate 44.

The cable holding board 42 has a plurality of cable holding holes 50, 50,... Corresponding to the probe housing holes 46, 46,. 50,... Are inserted and bonded to the end of the coaxial cable 52.
The coaxial cable 52 is formed by covering a cable core 54 with an insulator 56, covering the insulator 56 with a cable outer conductor 58, and further covering the cable outer conductor 58 with a cable cover 60.

  The cable core wires 54, 54,... Of the coaxial cable 52 are stored in the probe storage holes 46, 46,. The cable outer conductors 58, 58, ... can contact the contact protrusions 18, 18, ... of the outer conductive cylinder 12 of the coaxial probes 2, 2, ..., respectively. As shown, the placement positions of the probe storage holes 46, 46,... Of the probe storage board 40 and the cable holding holes 50, 50,. The probe storage board 40 is disposed so as to be movable in the vertical direction.

  The coaxial cables 52, 52,... Of the cable holding board 42 have the cable core 54 and the cable outer conductor 58 exposed at the tip surfaces thereof, and the tip surfaces are flush with the surface of the cable holding plate 48. It is supposed to be located. The ends of the coaxial cables 52, 52,... That are inserted and fixed to the cable holding board 42 are connected to a tester circuit (not shown), for example.

  In this contact machine, by lowering the probe storage board 40, the bar-shaped conductors 4, 4,... Of the coaxial cables 2, 2,. , 18, ... contact the cable core wires 54, 54, ... of the coaxial cables 52, 52, ... held on the cable holding board 42, respectively, and the cable outer conductors 58, 58, ..., respectively. The contact state is formed so that the probe storage board 40 can be raised, and the non-contact state can be achieved.

Then, a measurement object such as an IC (not shown) is loaded (set) on the probe storage board 40, and the electrodes of the measurement object and the rod-shaped conductors 4, 4,. ... and the contact protrusions 18, 18, ... of the outer conductive cylinder 12 can be brought into contact with each other.
Therefore, by the contact machine, each electrode of the measured object such as an IC and the corresponding cable core wires 54, 54,... Of the coaxial cables 52, 52,..., The cable outer conductors 58, 58,. Can be electrically connected, that is, a contact state can be formed.

3A and 3B are cross-sectional views showing the method of manufacturing the cable holding board 42 in the order of steps.
(A) Insert the coaxial cables 52, 52,... From the lower side into the cable holding holes 50, 50,... Of the cable holding plate 48 so that the tips protrude from the upper surface of the cable holding plate 48. Then, the adhesive 62 is adhered and fixed. FIG. 3A shows the fixed state.
(B) Next, the portion protruding from the cable holding plate 48 of the coaxial cable 52 is polished by polishing in a direction parallel to the surface of the cable holding plate 48 using the polishing machine 64.
As a result, the end surface of the coaxial cable 52 that is the polished surface is exposed to the cable core wire 54 and the cable outer conductor 58, and the cable holding board 42 is completed.

  The present invention relates to a coaxial probe, a probe storage board, a cable holding board, a contact machine, a cable, and a relay used to connect each electrode of an electronic component such as a semiconductor element and an electronic circuit such as a tester circuit. There is general applicability to the manufacturing method of the holding board.

(A)-(C) show one embodiment of the coaxial probe of the present invention, (A) is a longitudinal sectional view, (B) is a view of the coaxial probe viewed from the left end, and (B) is one end. It is a perspective view shown. (A), (B) shows one embodiment of the contact machine of the present invention, (A) is a sectional view of the contact machine, (B) is a sectional view showing a coaxial cable housed in a cable holding board. is there. (A), (B) is sectional drawing which shows the manufacturing method of the cable holding board 42 in order of a process.

Explanation of symbols

2 ... Coaxial probe, 4 ... Bar-shaped conductor, 6 ... Insulating cylinder, 12 ... Outer conductive cylinder, 14 ... Closed end, 16 ... Conductor loose insertion hole, 18 ...・ Contact protrusion,
26 ... conductive compression spring, 28 ... barrel,
40: Probe storage board, 42: Cable holding board,
44 ... Probe storage plate, 46 ... Probe storage hole, 48 ... Cable holding hole,
52 ... Coaxial cable, 54 ... Cable core, 58 ... Cable outer conductor,
62: Adhesive, 64: Polishing machine.

Claims (2)

A probe holding plate having a plurality of probe holding holes for holding a coaxial probe;
In each probe holding hole,
One rod-shaped conductor that forms a core wire that is a contact end that is in contact with the other and takes electrical continuity;
An insulating cylinder having an electrical insulation and fitted on the rod-shaped conductor in a state in which the rod-shaped conductor is prevented from coming off;
One end is closed, the other end is open, and a conductor loose insertion hole through which the rod-like conductor is passed in a non-contact manner is formed at the closed end, and protrudes outward from the outer periphery of the conductor loose insertion hole 1 Or a pair of cylinders having a plurality of contact protrusions and having electrical conductivity, the other open ends are opposed to each other, and an outer conductive cylinder externally fitted to the insulating cylinder,
A compression spring having conductivity interposed between the pair of cylinders forming the outer conductive cylinder;
A barrel that holds the outer conductive cylinder while being fitted to the outer conductive cylinder so as not to increase the distance between the cylindrical bodies more than a certain value;
A coaxial probe consisting of
Both ends protrude from both surfaces of the probe holding plate, and the rod-shaped conductors of all coaxial probes protruding from both surfaces and the tips of the outer conductive cylinders are located on the same plane and are stored in a state of being prevented from being detached. Probe storage board. A coaxial cable having a probe storage board according to claim 1 and a cable in which a plurality of cable storage holes are formed, each of the cable storage holes having an end polished and a cable core wire and a cable outer conductor exposed on the surface. A cable holding board which is inserted and fixed so that the end face side of the end face of the cable and the surface of the cable holding plate are located on the same plane,
Each coaxial probe of the probe storage board is connected to the surface of the cable holding plate of the cable holding board, one of the contact ends of each rod-shaped conductor is a cable core of the coaxial cable corresponding to it, and one of the outer conductive cylinders. The contact protrusions on the side face the cable outer conductor of the corresponding coaxial cable so that they can contact each other,
The coaxial probe is brought close to the cable holding board, and a contact state in which all the coaxial probes and the corresponding coaxial probe make the above-mentioned contact occurs or is separated and the contact state is released. Contact machine.

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