JP5092563B2 - Microdevice for display - Google Patents

Description

  The present invention relates to a display microdevice, and is suitably applied to a display device formed by disposing a plurality of display microdevices as pixels on a substrate surface, for example.

  2. Description of the Related Art In recent years, in the field of display devices, so-called scattering-type display devices that display using light scattering are known (see, for example, Patent Document 1).

In addition, as a display device that performs display operation with low power consumption, for example, a so-called liquid movement type display device that performs display by moving a colored dielectric liquid between electrodes and visually checking the presence or absence of coloring is used. It is known (see, for example, Patent Document 2).
JP 05-088149 A Japanese Patent Laid-Open No. 08-254962

  By the way, since the display microdevices used in these display devices are thin and can be driven at a low voltage, they can be used in a wide range of fields as display devices for small electronic devices such as watches and calculators.

  In such a field, it is desired to provide a microdevice for a display that is more reliable than a conventional device, which is smaller and thinner, and has high productivity.

  The present invention has been made in view of the above points, and provides a microdevice for display that can be reduced in size and thickness with a simple configuration and has high reliability while improving productivity. Objective.

A display microdevice according to claim 1 of the present invention comprises a substrate having a first electrode on one surface, and a liquid that remains without being evaporated during thin film formation processing by a CVD (Chemical Vapor Deposition) method. A liquid bulge portion bulged from one surface of the substrate by tension or a support portion, a protective film laminated on the liquid surface of the liquid bulge portion by the CVD method, and formed on the surface of the protective film A second electrode and a light emitting unit that passes through the light emitting unit main body while reflecting the light irradiated into the light emitting unit main body while reflecting the inner wall, and a voltage is applied between the first electrode and the second electrode. When applied, an electrostatic force is generated, and the protective film is deformed by the electrostatic force, whereby the second electrode is brought into contact or non-contact with the light-emitting portion body, and the second electrode emits the light. When not in contact with the main unit The light emitted into the light emitting unit main body passes through the light emitting unit main body as it is, and when the second electrode is in contact with the light emitting unit main body, the light emitted into the light emitting unit main body is The light is guided from the contact portion between the light-emitting portion main body and the second electrode to the liquid bulging portion, and light from the light-emitting portion main body is transmitted through the liquid bulging portion .

The display microdevice according to claim 2 of the present invention comprises a substrate having a first electrode on one surface, and a liquid that remains without being evaporated during thin film formation processing by a CVD (Chemical Vapor Deposition) method. A liquid bulge portion bulged from one surface of the substrate by tension or a support portion, a protective film laminated on the liquid surface of the liquid bulge portion by the CVD method, and formed on the surface of the protective film A second electrode; a third electrode provided on the other surface of the substrate opposite to the one surface; and the protective film laminated on the surface by the CVD method; and the protective film on the other surface side of the substrate. And a through-hole penetrating the substrate, the first electrode, and the third electrode. The substrate has one surface as an irradiation surface, and light is emitted from the one surface. and emitted towards the first electrode及The protective film is deformed by an electrostatic force generated according to a voltage change between the second electrode and a voltage change between the third electrode and the fourth electrode, and the liquid in the liquid bulging portion Is configured to be movable to one surface or the other surface of the substrate through the through-hole, and when the liquid bulge is on the other surface side, the light from the substrate is irradiated to the outside as it is, when the liquid bulging portion is in said one side, those you characterized in that the light from the substrate is irradiated to the outside is transmitted through the liquid bulging portion.

The display microdevice according to claim 3 of the present invention is characterized in that the liquid is silicon oil.

In the display microdevice according to claim 4 of the present invention, a thin film having higher oil repellency than the placement area is formed on the surface of the non-placement area other than the placement area where the liquid is placed. It is characterized by this.

In the display microdevice according to claim 5 of the present invention, the first electrode and the second electrode are made of a transparent electrode member, the substrate is made of a transparent substrate member, and the protective film is made of a transparent thin film member. It is characterized by this.

The display microdevice according to claim 6 of the present invention is characterized in that the protective film is made of polyparaxylylene.
In the display microdevice according to claim 7 of the present invention, a light changing member is inserted in the liquid bulging portion, and the light changing member is configured to transmit the light when the light passes through the liquid bulging portion. The light color is changed.

  According to the display microdevice of claim 1 of the present invention, the protective film formed by the CVD method can be deformed by a slight electrostatic force. The light can be transmitted through the liquid bulge to change the light. Moreover, since the complicated assembly process of sticking the previously formed sheet member to the liquid bulging portion can be omitted, the productivity can be improved accordingly. Furthermore, since it is possible to suppress the deformation of the liquid bulge due to impact, gravity or the like by using a protective film, the liquid bulge is deformed into a desired shape regardless of the installation angle, and the liquid bulge Therefore, it is possible to reliably transmit light from a predetermined direction, and thus to provide a highly reliable display microdevice.

Further , according to the display microdevice of the present invention, the light in the light emitting unit main body can be guided to the liquid bulging portion by bringing the second electrode deformed by electrostatic force into contact with the light emitting unit main body. Thus, the light irradiation direction can be appropriately changed by deforming the liquid bulging portion.

According to the display microdevice according to claim 2 of the present invention, the liquid bulging portion is moved to one surface side or the other surface side of the substrate through the through hole by electrostatic force, and reflected from the light emitted from the substrate or the substrate. Light can be impermeable or transmitted through the liquid bulging portion, and thus the light can be appropriately adjusted by deforming the liquid bulging portion.

According to the display microdevice according to claim 3 of the present invention, even if the silicon oil is liquid, it can be left in a liquid state without being evaporated in the process of forming the protective film by the CVD method. Thus, the protective film can be surely laminated and formed on the liquid bulging portion made of liquid.

According to the display microdevice according to the fourth aspect of the present invention, the liquid bulge portion can be easily formed only in the mounting region, and the liquid bulge portion composed of only the liquid of the optimum liquid amount can be easily formed. .

According to the display microdevice according to the fifth aspect of the present invention, light from a predetermined direction can be reliably transmitted to the liquid bulging portion.

According to the display microdevice according to the sixth aspect of the present invention, the protective film can be reliably formed on the liquid surface of the liquid bulging portion by the CVD method.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(1) Scattering display device (1-1) Configuration of display microdevice In FIGS. 1 (A) and 1 (B), 1 is a display constituting one pixel (cell) of a scattering display device (not shown). A microdevice for use is shown. In this case, an overall view of the scattering display device is omitted, and only the vicinity of the display microdevice 1 will be described.

  The display microdevice 1 includes a device main body 2, a light emitting unit 3 that travels in one direction while reflecting light L <b> 1 irradiated into the hollow light emitting unit main body 3 a to the inner wall, and the device main body 2 is used as the light emitting unit 3. It consists of the installation part 4 to install.

  In the device body 2, for example, an ITO (Indium Tin Oxide) electrode 11 made of a transparent member is provided on one surface of a substrate 10 made of a transparent glass member, and a liquid bulging portion 12 is formed on the ITO electrode 11 as the first electrode. Has been. The liquid bulging portion 12 is made of, for example, silicon oil that is a transparent liquid, and is formed so that a predetermined amount of silicon oil bulges from the surface of the ITO electrode 11 in a curved shape.

  The liquid bulge 12 and the surface of the ITO electrode 11 have a predetermined thickness using, for example, high-vacuum CVD (Chemical Vapor Deposition) using polyparaxylylene (trade name Parylene) made of a transparent thin film member as a coating material. A protective film 13 is formed by deposition. Thus, the protective film 13 fixes and protects the liquid bulging portion 12 to the ITO electrode 11.

  On the surface of the protective film 13, a transparent electrode 14 is formed which has a variable region facing the placement region 6 a of the ITO electrode 11 provided on the substrate 3 and covering the liquid bulging portion 12. ing.

  As shown in FIG. 1B, the ITO electrode 11 and the electrode 14 are electrically connected, and a predetermined voltage is applied from the power supply unit 18 provided between the ITO electrode 11 and the electrode 14. As a result, an electrostatic force is generated in the electrode 14, and the curvature of the liquid bulging portion 12 can be changed by controlling the curvature of the protective film 13 by this electrostatic force.

  In this way, the device body 2 adjusts the degree of distortion generated in the protective film 13 by adjusting the voltage value applied between the ITO electrode 11 and the electrode 14 and adjusts the curvature in the liquid bulging portion 12. be able to.

  In addition to this configuration, the device body 2 has the liquid bulging portion 12 disposed on the light emitting portion 3 side, and the electrode 14 is connected to the light emitting portion body 3a when no voltage is applied between the ITO electrode 11 and the electrode 14. Is provided in the installation part 4 so as to be non-contact. Thereby, the light L1 of the light emitting unit main body 3a can pass through the inside of the light emitting unit main body 3a as it is without being irradiated to the liquid bulging part 12.

  In addition to such a configuration, as shown in FIG. 1 (B), the installation section 4 is applied with a voltage between the ITO electrode 11 and the electrode 14 to change the curvature of the liquid bulging section 12 so that the light emitting section main body 3a side. The height dimension is selected so that the electrode 14 at the tip of the liquid bulging portion 12 contacts the light emitting portion main body 3a when the liquid bulging portion 12 swells.

  Thus, in the display microdevice 1, when a voltage is applied between the ITO electrode 11 and the electrode 14 and the electrode 14 is deformed and comes into contact with the light emitting unit main body 3a, it is reflected in one direction while being reflected on the inner wall of the light emitting unit main body 3a. The traveling light L1 passes through the protective film 13 and is guided to the liquid bulging portion 12 from the electrode 14 that is in contact with the light emitting portion main body 3a.

As a result, the display microdevice 1 transmits the light L1 from the light emitting portion main body 3a to the liquid bulging portion 12 , and uses the liquid bulging portion 12 to adjust the light L2 that has been subjected to various light adjustments such as light color. It can be irradiated from the other side to the outside.

  Here, since the display microdevice 1 constitutes one pixel of the liquid mobile display device, as shown in FIGS. 2A and 2B, the display microdevice 1 does not emit light L2. Then, a desired image can be displayed as a whole by appropriately controlling the display microdevice 1 that emits the light L2. 1A and 1B are drawings showing the detailed configuration of the small square portion ER1 in FIGS. 2A and 2B.

  For example, as shown in FIG. 3, the device main bodies 2 are arranged in a predetermined pattern such as an array. The ITO electrode 11 adhered to the substrate 10 has a longitudinal direction extending in a predetermined direction and is arranged at equal intervals with the adjacent ITO electrode 11 to form a regular predetermined pattern.

  The ITO electrode 11 is provided with a plurality of mounting regions 6a formed in a circular shape at a predetermined interval, and the liquid bulging portion 12 can be formed in each of the mounting regions 6a.

  In the case of this embodiment, the region 6b between the surface of the ITO electrode 12 other than the mounting region 6a and the surface of the substrate 10 (hereinafter collectively referred to as a non-mounting region) 6b is amorphous transparent A thin film 19 (hereinafter referred to as an oil repellent film) 19 made of a fluororesin and having higher oil repellency than the ITO electrode 11 is formed.

  As described above, the oil repellency treatment by the oil repellent film 19 is applied to the non-mounting area 6b, so that the liquid bulging portion 12 is accurately disposed only in the mounting area 6a because the silicon oil droplets are repelled. In addition, only a predetermined amount of silicon oil can be accurately placed in the placement region 6a by the surface tension.

  The electrode 14 as the second electrode is formed to have a predetermined thickness by a transparent electrode member such as a gold film, for example, and is arranged so that the longitudinal direction is orthogonal to the longitudinal direction of the ITO electrode 11. They are arranged at equal intervals. The ITO electrode 11 and the electrode 14 can be arranged in a lattice pattern.

  Here, in the case of this embodiment, as shown in FIG. 4, the device body 2 has ITO electrodes 11 and electrodes 14 arranged in a grid pattern. And applying the voltage between the second row La2 of the second row La2 and the second row Lb2 of the first row Lb1 and the second row Lb2 of the electrode 14, thereby applying the ITO electrode 11 The liquid bulging portion 12 of one device body 2a in which the second row La2 and the second row Lb2 of the electrode 14 are directly connected can be greatly varied. At this time, the device main bodies other than the device main body 2a are also slightly deformed. In order to prevent this, a diode may be inserted in series with each device body.

(1-2) Manufacturing Procedure of Device Body Here, the device body 2 having such a configuration can be manufactured by the following procedure.

  First, as shown in FIG. 5B, which is a cross-sectional view taken along the line AA ′ in FIGS. 5A and 5A, an ITO electrode 11 having a placement region 6 a is attached to one surface of the substrate 10. After that, as shown in FIG. 6B, which is a cross-sectional view at the BB ′ position in FIGS. 6A and 6A, the non-mounting area 6b other than the mounting area 6a is placed. An oil repellent film 19 is formed from an amorphous transparent fluororesin and subjected to oil repellent treatment.

  In practice, when the oil repellent film 19 is formed only in the non-mounting region 6b using, for example, CYTOP (trade name) manufactured by Asahi Glass Co., Ltd. as an amorphous transparent fluororesin, the substrate 10 is first ultrasonicated with acetone. After washing, degreasing is performed by rinsing with ethanol, and baking is performed at 110 ° C. for 2 minutes.

  Subsequently, a liquid film made of an amorphous transparent fluororesin solution is uniformly formed on one surface of the substrate 10 by spin coating, and after coating one surface of the substrate 10 with the amorphous transparent fluororesin, this is baked. Then, the oil repellent film 19 is formed on the substrate 10.

  Next, after an aluminum film is deposited on the oil-repellent film 19, a photoresist is formed on the aluminum film, and the photoresist is patterned to etch the aluminum film using the photoresist as a mask.

  Then, using the aluminum film patterned in this manner as a mask, the oil repellent film 19 is plasma etched, and the oil repellent film 19 is etched in the placement region 6a to expose the ITO electrode 11, and the non-mounting regions other than the placement region 6a are not mounted. Only the placement region 6b is coated with the oil repellent film 19. Thereafter, the photoresist and the aluminum film are sequentially removed, so that only the placement area 6a of the ITO electrode 11 is exposed and the non-placement area 6b is an oil repellent film as shown in FIGS. 6 (A) and 6 (B). A substrate 10 coated with 19 is formed.

  Subsequently, after immersing the substrate 10 in silicon oil, the silicon oil on the oil-repellent film 19 is removed by centrifugal force by removing excess silicon oil from each placement region 6a by a spin coating method to obtain a uniform liquid amount. .

  Thus, as shown in FIG. 7B, which is a cross-sectional view taken along the line CC ′ in FIGS. 7A and 7A, each placement region 6a on the substrate 10 has a surface tension. A liquid bulging portion 12 made of a predetermined amount of silicon oil bulging from the ITO electrode 11 in a curved shape can be formed. The spin coating method will be described in detail in “(1-4) Spin coating method” below, including the verification results.

  Next, as shown in FIG. 8B, which is a cross-sectional view taken along the line DD ′ in FIG. 8A and FIG. 8A, the oil repellent film 19 in the non-mounting region 6b is formed by a high vacuum CVD method. A protective film 13 made of polyparaxylylene as a transparent thin film member and having a thickness of about several nm is laminated and formed on the surface and the liquid surface of the liquid bulging portion 12 in the placement region 6a.

  Here, for example, methylphenyl silicone oil is suitable as the silicone oil, but it is excellent in insulation, transparency, heat resistance and vacuum resistance, and does not evaporate during thin film formation processing by the CVD (Chemical Vapor Deposition) method. As long as the liquid remains, various liquids can be used instead of silicone oil.

  Silicon oil is excellent in heat resistance, has little change in viscosity over a wide temperature range, and has a very small evaporation amount, so that it can maintain a liquid state even during thin film formation processing by a high vacuum CVD method. Thus, the protective film 13 can be formed on the liquid surface of the liquid bulging portion 12 by the high vacuum CVD method.

According to the experiment, as silicon oil, the liquid has a vacuum durability of 10 ⁻⁷ to 10 ⁻²² [Torr], a boiling point of 5 [Torr] and 210 [° C.], a specific gravity of 1.065, and a refractive index of 1.555. The liquid bulging portion 12 was formed using methylphenyl silicone oil having a kinematic viscosity of 37 [mm ² / s].

  Then, by using a high vacuum CVD method, 0.5 [g] Parylene C (trade name of polymonochloro paraxylylene, manufactured by Union Carbide Co., Ltd.) under conditions of 25 [° C.] and 0.1 [Torr] ) In a vacuum chamber (not shown) for 30 [min], the silicon oil does not evaporate, and a protective film 13 having a thickness of about 1000 [nm] is formed on the liquid surface of the liquid bulging portion 12. It was confirmed that the film could be formed.

  Here, if the liquid bulging portion 12 is not covered with the protective film 13, as shown in FIG. 9A, the liquid bulging portion 12 is simply tilted by about 45 degrees as shown in FIG. Silicone oil gathers on the lower side due to its own weight and deforms. As shown in FIG. 9B, this is also confirmed by arranging a lattice pattern on the back surface of the tilted substrate 10 and visually confirming the pattern through the substrate 10. it can.

  On the other hand, when the liquid bulging portion 12 is covered with the protective film 13 as described above, the substrate 10 is not only about 45 degrees but also about 90 degrees as shown in FIG. Even if it is inclined, the protective film 13 can suppress the liquid bulging portion 12 from being deformed by its own weight. This can be confirmed from the fact that when the lattice-like pattern was visually recognized through the substrate 10 as shown in FIG. 10B, the pattern could be visually recognized with almost no deformation.

  Therefore, it can be confirmed that the device main body 2 can be used with the liquid bulging portion 12 in a desired shape regardless of the installation angle, with the liquid bulging 12 being hardly deformed even when provided at various angles such as a right angle. It was.

  Next, as shown in FIG. 11B, which is a cross-sectional view taken along the line EE ′ in FIGS. 11A and 11A, a predetermined masking member M is provided on one surface side of the substrate 10, and this By depositing gold in the state, the electrode 14 having the variable region is laminated.

  Thus, as shown in FIG. 11C, the protective film 13 is laminated on the liquid bulging portion 12 by high vacuum CVD, and the ITO electrode 11 is disposed on one surface of the liquid bulging portion 12, The device body 2 in which the electrode 14 is disposed on the other surface via the protective film 13 can be obtained.

  Finally, the ITO electrode 11 and the electrode 14 of the substrate 10 are connected to the power supply unit 18, whereby the electrode 14 in each device body 2 is deformed by electrostatic force to change the curvature of the liquid bulge portion 12, thereby It is possible to obtain the device body 2 that can appropriately adjust the height from the top to the bottom of the protruding portion 12.

  Such a device main body 2 is installed in the light emitting unit 3 via the installation unit 4 so that the liquid bulging unit 12 is arranged on the light emitting unit book 3a side, and thus the display microdevice 1 can be manufactured.

(1-3) Operation and effect In the above configuration, in the device main body 2, the liquid bulging portion 12 has excellent heat resistance and is formed of silicon oil that has a small amount of evaporation even in a high vacuum. Even when the high vacuum CVD method for forming a film is used, the protective film 13 can be laminated on the liquid surface of the liquid bulging portion 12 without evaporation of silicon oil.

  Therefore, in the device main body 2, the liquid bulging portion 12 can be fixed to the ITO electrode 11 by the protective film 13 while the liquid bulging portion 12 is placed on the substrate 10 at a desired position. It can be easily arranged in various shapes such as a shape.

  Further, in the device body 2, the protective film 13 that is much thinner than the sheet member can be formed on the liquid surface of the liquid bulging portion 12. Since the layer 13 can be deformed by electrostatic force, the electrode 14 can be brought into contact with the light-emitting portion main body 3a with a slight force, and thus the light L1 in the light-emitting portion main body 3a can be easily swelled from the contact point. 12 can be transmitted.

  Therefore, in the device body 2, the protective film 13 can be deformed by using a driving device having a simple configuration that generates an electrostatic force. Therefore, a pump for adjusting the liquid amount of the liquid bulging portion 12 and a liquid amount can be used. The entire apparatus can be simply configured as much as the flow path for adjustment is not required, and thus can be easily integrated and embedded in the display device of a small electronic device.

  Furthermore, in the device body 2 as described above, since the protective film 13 can be deformed by the elastic force by the protective film 13 and the electrostatic force, there is no friction or the like that causes hysteresis, and the curvature of the liquid bulging portion 12 Thus, the electrode 14 can be reliably brought into contact with the light emitting portion main body 3a, and the light L1 can be guided to the liquid bulging portion 12.

  Further, in the device main body 2, the protective film 13 is formed on the liquid bulging portion 12 and the oil repellent film 19 by using a high vacuum CVD method, so that a separate sheet member is attached to the liquid surface of the droplet. Since it is not necessary to perform a complicated assembly process, the productivity of the display microdevice 1 as a whole can be improved accordingly.

  Further, in the device main body 2, by using the high vacuum CVD method when forming the protective film 13 on the liquid bulging portion 12, the film thickness of the protective film 13 can be set accurately and only the desired region is protected. The film 13 can be formed, and the protective film 13 with a uniform film thickness and little residual stress can be formed.

  Further, since the device body 2 uses the protective film 13 having mechanical strength, it is possible to prevent the liquid bulging portion 12 from being deformed due to impact, gravity or the like. The electrode 14 can be brought into contact with the light emitting unit main body 3a only after the projecting portion 12 is deformed. Further, the protective film 13 can stably bring the electrode 14 into contact with the light emitting unit body 3a without being damaged by the impact even if the operation of bringing the electrode 14 into contact with the light emitting unit body 3a is repeated.

  Further, in the case of this embodiment, in the device main body 2, the oil repellent film 19 is formed in the non-mounting area 6b, so that the liquid bulging portion is formed only in the mounting area 6a with the optimal amount of silicon oil. 12 can be formed, the electrode 14 provided on the outer surface of the liquid bulging portion 12 can be reliably brought into contact with the light emitting portion main body 3a only at a desired position after the liquid bulging portion 12 is deformed.

  According to the above configuration, the liquid bulging portion 12 is formed of silicon oil that is excellent in heat resistance and has a low evaporation amount even in a high vacuum. A protective film 13 can be laminated on the liquid surface.

  As a result, by deforming the protective film 13 by electrostatic force, the light L1 from a predetermined direction can be transmitted to the liquid bulging portion 12, so that a flow path for adjusting the pump, the amount of liquid, A simple configuration that does not require an apparatus for changing the irradiation direction can be achieved. Thus, it is possible to provide the display microdevice 1 that can change the light L1 by transmitting the light L1 from a predetermined direction to the liquid bulging portion 12 while reducing the size and thickness with such a simple configuration.

  Furthermore, since a complicated assembly process of separately sticking a previously formed sheet member to the liquid bulging portion 12 can be omitted, productivity can be improved correspondingly.

  Furthermore, since there is no friction that causes hysteresis and the curvature of the liquid bulging portion 12 can be accurately controlled, the liquid bulging portion 12 is accurately deformed into a desired shape, and the liquid bulging portion 12 It is possible to reliably transmit the light L1 from a predetermined direction.

  Further, by using the protective film 13, it is possible to prevent the liquid bulging portion 12 from being deformed due to impact, gravity, etc., so that the liquid bulging portion 12 can be accurately deformed into a desired shape regardless of the installation angle, The liquid bulging portion 12 can reliably transmit the light L1 from a predetermined direction, and thus a highly reliable display microdevice 1 can be provided.

(1-4) About the spin coat method Hereinafter, the spin coat method described above will be described. Here, as shown in FIG. 12, for example, a substrate 20 having a mounting area 20a having a circular shape with a diameter of 1500 [μm] provided in an array with an interval of 500 [μm] is prepared. Verification was performed on the case where a silicone solution or liquid paraffin having a liquid amount was placed on the placement region 20a.

  In this case, as shown in FIG. 13A, the substrate 20 on which the oil repellent film 20b was formed was immersed in a silicone solution or liquid paraffin to form a liquid layer 21 having a predetermined thickness on the substrate 20.

  Next, by rotating the substrate 20 at a predetermined angular velocity, as shown in FIG. 13B, the liquid bulging portion 22 bulging in a curved shape due to the surface tension can be formed only in the placement region 20a. Has been made.

  Then, as shown in FIG. 14A, regarding the relationship between the thickness t of the liquid bulging portion 22 having a diameter 2r of 1500 [μm] (hereinafter referred to as a droplet thickness) t and the angular velocity of the spin coat, As a result of examining each using a silicone solution and liquid paraffin, it became a relationship as shown in FIG. From FIG. 15, it was found that when the substrate 20 was rotated at a low speed, the droplet thickness t was larger in the silicone solution than in the liquid paraffin.

Here, as shown in FIG. 14A, since the surface shape of the liquid bulging portion 22 is a part of a spherical surface, the droplet thickness t of the cross section is determined by the diameter 2r and the angle θ. It is done. Further, there is an upper limit for the angle θ. The upper limit theta ₁ angle theta, as shown in FIG. 14 (B), determined by the magnitude of the contact angle between the oil-repellent film 20b is liquid and the surface treatment material used in the fabrication of the liquid bulging portion 22. That is, θ ≦ θ _1.

Here, the angle θ has a lower limit. As shown in FIGS. 14C and 14D, when the contact angle θ ₂ becomes smaller, the diameter of the contact surface between the liquid bulging portion 22 and the substrate 3 becomes smaller than 2r during the vacuum deposition of the surface treatment material. . This contact angle θ ₂ is a contact angle between the liquid used for manufacturing the liquid bulging portion 22 and the material of the substrate 3. In other words, when the amount of liquid is small, the entire liquid pattern width cannot be covered, and when the patterned liquid is stabilized by placing it in a vacuum, the surface tension of the liquid works and is stable in energy. Return liquid to proper shape.

That is, the width of the liquid pattern is reduced so that the angle θ is the contact angle θ ₂ with the substrate 20. Therefore, in order to obtain the designed diameter 2r, the amount of liquid must be large to some extent. Contact angle theta ₂ is a lower limit of the angle theta. That is, θ ₂ ≦ θ.

From the above, when the diameter 2r of the liquid pattern is constant, the range in which the droplet thickness t can be adjusted by the rotational speed of the spin coating method is θ ₂ ≦ θ ≦ θ ₁ (θ ₁ : production of the liquid bulging portion 22. The contact angle between the liquid used and the surface treatment material that is the oil-repellent film 20b is determined by θ ₂ : the contact angle between the liquid used for manufacturing the liquid bulging portion 22 and the substrate 20). In addition, once the surface treatment material that is an oil repellent film is determined, the contact angle θ ₁ does not change, so the maximum value of the droplet thickness t in the cross section depends on the diameter 2r. Once the substrate is determined, the contact angle θ ₂ does not change, so the minimum value of the droplet thickness t in the cross section depends on 2r.

(1-5) Deformation Characteristics of Device Main Body Here, as shown in FIGS. 16A and 16B, the radius r is 500 [μm], and the distance from the bottom to the top of the liquid bulging portion 12 Three types of device bodies (simply shown as (A), (B), and (C) in FIGS. 16B and 17) having different t1 and film thickness d of the protective film 10 and the electrode 14 are prepared. As shown in FIG. 17, each deformation ratio when the applied voltage was changed in each device main body (A), (B), and (C) was measured.

  Note that R in FIG. 16A indicates the radius of curvature of the liquid bulging portion 12, and Ro in FIG. 17 indicates the initial radius of curvature of the liquid bulging portion 12. At this time, the deformation rate is R / Ro.

  From the results shown in FIG. 17, it was found that when the film thickness d is the same, the deformation rate of the liquid bulge 12 is larger when the droplet thickness t1 of the liquid bulge 12 is smaller. Further, it was found that the deformation rate of the liquid bulging portion 12 is larger when the film thickness d is smaller.

(2) Liquid mobile display device In FIG. 18 (A), the same reference numerals are assigned to the corresponding parts to FIG. 1 (A), and 30 is a display microdevice constituting one pixel of the liquid mobile display device. Show. In this case, an overall view of the liquid mobile display is omitted, and only the vicinity of the display microdevice 30 will be described.

  The display microdevice 30 includes a device main body 31, and the other surface side of the device main body 31 can be installed on a base with a predetermined gap provided by an installation unit (not shown).

  The device main body 31 includes a substrate 34 that irradiates light L3 outward from one surface as an irradiation surface, an irradiation-side ITO electrode 35a as a first electrode provided on one surface of the substrate 34, and the other surface of the substrate 164. A non-irradiation side ITO electrode 35b as a third electrode provided is provided, and the irradiation side ITO electrode 35a and the non-irradiation side ITO electrode 35b are covered with a protective film 36.

  Here, the protection film 36 covering the irradiation side ITO electrode 35a is covered with the irradiation side electrode 37 as the second electrode, and the protection film 36 covering the non-irradiation side ITO electrode 35b is covered with the fourth film. The non-irradiation side electrode 38 as an electrode is coated.

  A liquid bulging portion 40 is formed between the irradiation side ITO electrode 35a and the protective film 36. The liquid bulging portion 40 includes a substrate 34, an irradiation side ITO electrode 35a, and a non-irradiation side ITO electrode. It passes through the through hole 41 penetrating through 35b and can move to the space between the non-irradiation side ITO electrode 35b and the protective film 36 on the other surface side.

  In the case of this embodiment, the liquid that forms the liquid bulging portion 40 may be any liquid that does not evaporate during the thin film formation process by the CVD method, such as silicon oil and liquid paraffin. The liquid may be used.

  In practice, when a voltage is not applied between the irradiation side ITO electrode 35a and the irradiation side electrode 37, and a voltage is applied between the non-irradiation side ITO electrode 35b and the non-irradiation side electrode 38, FIG. As shown, when the non-irradiation side electrode 38 pushes the liquid bulging portion 40 toward the non-irradiation side ITO electrode 35b, the liquid in the liquid bulging portion 40 passes through the through hole 41 toward the irradiation side ITO electrode 35a. The liquid bulging portion 40 is formed between the irradiation side ITO electrode 35a and the protective film 36.

  Thus, the light L3 emitted from one surface of the substrate 34 is transmitted through the liquid bulging portion 40, thereby changing to the light L4 whose light color or the like has been changed by the liquid bulging portion 40, and is irradiated outward.

  On the other hand, when a voltage is applied between the irradiation side ITO electrode 35a and the irradiation side electrode 37 and no voltage is applied between the non-irradiation side ITO electrode 35b and the non-irradiation side electrode 38, FIG. As shown, the irradiation side electrode 37 pushes the liquid bulging portion 40 toward the irradiation side ITO electrode 35a, so that the liquid in the liquid bulging portion 40 passes through the through hole 41 toward the non-irradiation side ITO electrode 35b. The liquid bulging portion 40 is formed between the non-irradiation side ITO electrode 35b and the protective film 36.

  Thus, the light L3 emitted to the one surface side of the substrate 34 does not pass through the liquid bulging portion 40 but becomes the light L5 that passes through only the protective film 36 and the irradiation side electrode 37, and is irradiated outward as it is.

  By the way, such a display microdevice 30 constitutes one pixel of the liquid mobile display device. Accordingly, as shown in FIGS. 19A and 19B, the display microdevice 30 that transmits the light L3 by transmitting the light L3 through the liquid bulging portion 40 and the light L3 through the liquid bulging portion 40 are transmitted. A desired image can be displayed as a whole by appropriately controlling each display microdevice 30 individually with the display microdevice 30 that emits the light L5. 18 (A) and 18 (B) are drawings showing the detailed configuration of the square portion ER2 in FIGS. 19 (A) and 19 (B).

  Next, a method for manufacturing such a display microdevice 30 will be briefly described below. First, an irradiation-side ITO electrode 35a having a predetermined pattern is attached to one surface of the substrate 34, and a non-irradiation-side ITO electrode 35b having a predetermined pattern is attached to the other surface.

  The substrate 34, the irradiation side ITO electrode 35a, and the non-irradiation side ITO electrode 35b are formed with through holes 171 penetrating the thickness. The substrate 34 is coated with an oil repellent film (not shown) except for the placement area where the liquid bulging portion 40 is formed. Then, as shown in FIG. 20A, the liquid bulging portion 40 can be formed in the placement region of the irradiation side ITO electrode 35a by the above-described spin coating method.

  Next, as shown in FIG. 20B, the protective film 36 made of polyparaxylylene is formed on the liquid surface of the liquid bulging portion 40, the irradiation side ITO electrode 35a and the non-irradiation side ITO electrode 35b by a high vacuum CVD method. Laminated to the surface. Thereafter, the irradiation-side electrode 37 is provided on the protection film 36 on the irradiation-side ITO electrode 35a side, and the non-irradiation-side electrode 38 is provided on the protection film 36 on the non-irradiation-side ITO electrode 35b side. Can be manufactured.

  In the above configuration, in the display microdevice 30, the liquid bulging portion 40 is moved to one surface or the other surface of the substrate 34 through the through hole 41 by electrostatic force, so that the light L3 emitted from the substrate 34 is emitted from the liquid bulging portion 40. Thus, the liquid bulging portion 40 can be deformed and adjusted to the light L4 or the light L5 as appropriate.

  Further, in the display microdevice 30, the protective film 36 is formed on the liquid bulging portion 40, the irradiation side ITO electrode 35a, and the non-irradiation side ITO electrode 35b by using a high vacuum CVD method. Since a complicated assembly process of sticking a sheet member formed in advance to the liquid surface of the liquid bulging portion 40 to be changed can be omitted and the configuration can be simplified, productivity can be improved accordingly.

  In addition, the display microdevice 30 can accurately set the thickness of the protective film 36 by using a high vacuum CVD method when forming the protective film 36 on the liquid bulging portion 40, and in the desired region. Thus, the protective film 36 can be accurately formed, and the protective film 36 having a uniform film thickness and less residual stress can be formed.

  Furthermore, because the liquid bulging part 40 is formed of a liquid that has excellent heat resistance and has a low evaporation amount even in a high vacuum, a protective film 36 is laminated on the liquid surface of the liquid bulging part 40 using a high vacuum CVD method. Therefore, the size and thickness can be reduced as much as the sheet member having a predetermined thickness is not used.

  Further, since the display microdevice 30 uses the protective film 36 having mechanical strength, it is possible to prevent the liquid bulging portion 40 covered with the protective film 36 from being deformed due to impact or gravity. The liquid bulging portion 40 can be accurately moved to one side or the other side of the substrate 34 regardless of the installation angle, and thus the light L3 emitted from the substrate can be appropriately adjusted to the light L4 or the light L5. Further, even if the protective film 36 repeats the operation of pressing the liquid bulging portion 40, the protective film 36 is reliable so that the light L3 emitted from the substrate 34 can be stably adjusted to the light L4 or the light L5 without being damaged by the impact. High display microdevice 30 can be provided.

  In the case of this embodiment, the substrate 34 that irradiates light outward from one surface by applying one surface as an irradiation surface is applied, but the present invention is not limited to this, and the one surface functions as a reflection surface. A substrate that reflects light from the outside on one side may also be applied. In this case, for example, in FIGS. 19A and 19B, the display microdevice 30 that transmits light through the liquid bulging portion 40 and reflects light, and the light reflects without passing through the liquid bulging portion 40. By controlling each display microdevice 30 appropriately and individually with the display microdevice 30, a reflective liquid mobile display device can be configured as a whole.

(3) Other Embodiments Although the embodiment of the present invention has been described above, the present invention is not limited to the above-described embodiment, and various modifications can be made. For example, various other light changing members such as fluorescent beads and quantum dots that can change the light color are placed in the liquid bulging portion 12 of the display microdevice 1 or the liquid bulging portion 40 of the display microdevice 30. May be.

  Furthermore, an oil repellent film 51 is provided on the outer peripheral region of the ITO electrode 11 as in the device main body 50 shown in FIG. It may be formed lower than the surface of the oil film 51.

  In this case, in the ITO electrode 11 on the substrate 10, since the recessed portion surrounded by the oil repellent film 51 becomes the mounting region 52, it is possible to more easily place silicon oil only in the mounting region 52 by the amount of the recess. Can do.

  Actually, the oil-repellent film 51 is plasma etched using the patterned aluminum film as a mask, and as shown in FIG. 22 (A), the mounting area 52 in which only the central area is exposed except the outer peripheral area of the ITO electrode 11. And the outer peripheral region of the ITO electrode 11 is covered with the oil repellent film 51.

  As a result, as shown in FIG. 22 (B), a predetermined amount of silicon oil dripped onto the placement areas 52 is removed from each placement area 52 by a spin coating method to obtain a uniform liquid amount. At this time, the silicon oil easily stays in each of the recessed placement areas 52 surrounded by the oil repellent film 51, and the liquid bulging portion 12 can be easily formed in each placement area 52.

  Furthermore, in the embodiment of the device body 2 described above, the case where the ITO electrode 4 and the electrode 14 made of a gold film are applied as the first electrode and the second electrode made of a transparent electrode member. Although described, this invention is not restricted to this, You may make it apply the 1st electrode and 2nd electrode which consist of various transparent electrode members.

  Furthermore, in the above-described embodiment, the case where the substrate 10, 34 made of a transparent and hard glass member is applied as the substrate made of the transparent substrate member has been described, but the present invention is not limited to this, A substrate made of various other substrate members such as a transparent substrate member having a flexible structure may be applied. For example, the substrate 34 may be formed by forming an ITO electrode, an organic EL (organic electroluminescence) layer, and an aluminum thin film electrode on a polyimide substrate. In this case, the organic EL layer emits light, and the aluminum electrode becomes a reflective film, and light is emitted from the polyimide substrate side. The aluminum electrode can be made thin so that light is emitted from both sides of the substrate. Since the polyimide substrate is flexible, a flexible display device can be realized.

  Furthermore, in the above-described embodiment, the case where the protective films 13 and 36 made of polyparaxylylene are applied as the protective film has been described. However, the present invention is not limited to this, and the insulating property and light transmission property are not limited thereto. Any protective film may be used as long as the protective film is made of a material that is flexible and can be deposited by CVD at a temperature from room temperature to about 200 degrees.

  Further, in the above-described embodiment, the case where the high vacuum CVD method is applied as the CVD method has been described. However, the present invention is not limited to this, and the thermal CVD method, the photo CVD method, the plasma CVD method, etc. Various other CVD methods may be applied.

  Further, in the above-described embodiment, the case where silicon oil is mainly applied as the liquid has been described. However, the present invention is not limited to this, and the vapor pressure at room temperature such as liquid paraffin and glycerin is 0. Various other liquids may be applied as long as the liquid is lower than 1 [Torr]. In short, any liquid may be used as long as it remains without being evaporated during the thin film formation process by the CVD method.

  Here, when the vapor pressure of the liquid at room temperature is higher than 0.1 [Torr], the amount of evaporation increases during the thin film formation process by the CVD method. Accordingly, it is preferable that the vapor pressure at room temperature is lower than 0.1 [Torr] so that the liquid remains without being evaporated during the thin film formation process by the CVD method.

  Furthermore, in the embodiment described above, the case where the liquid bulging portions 12 and 40 bulged from the substrates 10 and 34 due to the surface tension of the liquid has been described, but the present invention is not limited thereto, A region surrounded by a support portion may be formed on the substrate, and a liquid may be poured into the region and the liquid bulged from the substrate 10 or 34 by the support portion to form a liquid bulge portion.

Further, in the above-described embodiment, as a material for forming an oil repellent film as a thin film having high oil repellency, Cytop (registered trademark), C ₄ F ₈ , and a self-assembled monolayer (SAM) are used. Various other materials may be used.

  In the embodiment of the liquid mobile display device described above, the case where one surface of the substrate 34 is an irradiation surface that emits light has been described. However, the present invention is not limited to this, and the other surface of the substrate 34 or the substrate is concerned. One side and the other side of 34 may be irradiated surfaces or reflecting surfaces that emit light.

It is the schematic which shows the structure of the microdevice for a display in a light-diffusion type display apparatus. It is the schematic which shows the mode of operation | movement of the microdevice for a display provided with two or more. It is the schematic which shows the structure which decomposed | disassembled some microdevices for a display by this invention. It is the schematic which shows the mode of the electrical connection of an ITO electrode and an electrode. It is the schematic which shows the manufacturing procedure (1) of a device main body. It is the schematic which shows the manufacturing procedure (2) of a device main body. It is the schematic which shows the manufacturing procedure (3) of a device main body. It is the schematic which shows the manufacturing procedure (4) of a device main body. It is the schematic which shows a mode when the board | substrate which has not formed the protective film in the liquid bulging part is inclined. It is the schematic which shows a mode when the board | substrate which formed the protective film in the liquid bulging part is inclined. It is the schematic which shows the manufacturing procedure (5) of a device main body. It is the schematic which shows the arrangement | positioning relationship of a mounting area | region and a non-mounting area | region. It is the schematic where it uses for description of a spin coat method. Sectional view of the liquid bulge, contact angle between the liquid used in the production of the liquid bulge and the surface treatment material to be the protective film, the angle of the liquid bulge, the liquid and substrate used in the production of the liquid bulge It is the schematic where it uses for description of a contact angle. It is a graph which shows the relationship between a spin coat angular velocity and droplet thickness. It is the schematic used for description of three types of device main bodies from which the distance from the bottom part of a liquid bulging part to a top part, and the film thickness of a protective film and an electrode differ, and a table | surface. It is a graph which shows the relationship between an applied voltage and a deformation rate. It is the schematic which shows the structure of the microdevice for a display in a liquid movement type display apparatus. It is the schematic which shows the mode of operation | movement of the other microdevice for other displays provided. It is the schematic which shows the partial manufacture procedure of the microdevice for a display in a liquid movement type display apparatus. It is the schematic which shows the structure of the device main body by other embodiment. It is the schematic which shows the structure when the ITO electrode and oil-repellent film by other embodiment, and the liquid bulge part are formed.

1,30 Microdevice for display
10, 34 substrate
11 ITO electrode (first electrode)
12, 40 Liquid bulge
13, 36 Protective film
14 electrode (second electrode)
19 Oil repellent film (thin film)
35a Irradiation side ITO electrode (first electrode)
35b Non-irradiated side ITO electrode (third electrode)
37 Irradiation side electrode (second electrode)
38 Non-irradiation side electrode (fourth electrode)
41 Through hole

Claims (7)

A substrate having a first electrode on one side;
A liquid bulging portion that is formed from a liquid that remains without being evaporated during thin film formation processing by a CVD (Chemical Vapor Deposition) method, and bulges from one surface of the substrate by surface tension or a support portion;
A protective film laminated on the liquid surface of the liquid bulge portion by the CVD method;
A second electrode formed on the surface of the protective film ;
A light emitting unit that passes through the light emitting unit main body while reflecting the light irradiated in the light emitting unit main body to the inner wall ;
An electrostatic force is generated by applying a voltage between the first electrode and the second electrode, and the protective film is deformed by the electrostatic force, so that the second electrode comes into contact with the light emitting unit body. State or non-contact state,
When the second electrode is in a non-contact state with the light emitting unit body, the light irradiated in the light emitting unit body passes through the light emitting unit body as it is,
When the second electrode is in contact with the light emitting unit main body, the light irradiated in the light emitting unit main body is guided to the liquid bulging part from the contact point between the light emitting unit main body and the second electrode. The display microdevice is characterized in that light from the light-emitting portion main body passes through the liquid bulging portion . A substrate having a first electrode on one side;
A liquid bulging portion that is formed from a liquid that remains without being evaporated during thin film formation processing by a CVD (Chemical Vapor Deposition) method, and bulges from one surface of the substrate by surface tension or a support portion;
A protective film laminated on the liquid surface of the liquid bulge portion by the CVD method;
A second electrode formed on the surface of the protective film;
A third electrode provided on the other surface of the substrate opposite to the one surface and having the protective film laminated on the surface by the CVD method;
A fourth electrode formed on the surface of the protective film on the other surface side of the substrate;
A through hole penetrating the substrate, the first electrode, and the third electrode;
The substrate has one surface as an irradiation surface, and emits light outward from the one surface .
The protective film is deformed by an electrostatic force generated according to a voltage change between the first electrode and the second electrode and a voltage change between the third electrode and the fourth electrode, and the liquid The liquid of the bulging portion is configured to be movable to one surface or the other surface of the substrate through the through hole ,
When the liquid bulging portion is on the other surface side, the light from the substrate is irradiated to the outside as it is,
Wherein when the liquid bulging portion is in said one side, a display microdevice you characterized in that the light from the substrate is irradiated to the outside is transmitted through the liquid bulging portion. Display microdevice of claim 1 or 2, wherein the said liquid is a silicone oil. The surface of the non-mounting region other than the mounting region where the liquid is placed in any of the preceding claims, characterized in that the oil repellency is higher film than before according depositing area is formed The display microdevice according to claim 1. Made from the first electrode and the second electrode is the transparent electrode members, wherein the substrate is a transparent substrate member, any one of claims 1 to 4, wherein the protective film is characterized by comprising a transparent thin film member The display microdevice according to claim 1. The display microdevice according to claim 1 , wherein the protective film is made of polyparaxylylene.   A light changing member is placed in the liquid bulging portion, and the light changing member changes the light color of the light when the light passes through the liquid bulging portion.
  The display microdevice according to claim 1, wherein the display microdevice is a display microdevice.