JP5088341B2 - Solid-state imaging device - Google Patents

Description

  The present invention relates to a solid-state imaging device, in particular, a photoelectric conversion unit and a solid-state imaging device including a conversion unit that converts a charge generated by the photoelectric conversion unit into a pixel signal, such as a CMOS image sensor.

  The CMOS image sensor is a solid-state imaging device in which a plurality of pixels each including a photoelectric conversion unit and a plurality of MOS transistors are arranged in a two-dimensional array, and charges generated by the photoelectric conversion elements are converted into pixel signals and read. In recent years, this CMOS image sensor has attracted attention as an image pickup device such as a camera for a mobile phone, a digital still camera, or a digital video camera.

  In the image sensor, charges are generated by photoelectric conversion by light in a photodiode, for example, a photodiode, but there are other electrons / holes that are thermally generated. This is called dark current. Dark current is one of the dominant factors of noise in image sensors and is an important factor that affects image quality. Further, the dark current is generated not only in the photodiode but also in the floating diffusion portion. The dark current of a normal image sensor varies with temperature and storage time. For this reason, when dark current is generated, the signal output value in the optically black state, that is, in the state without exposure, changes depending on the temperature and the accumulation time, the reference optical black level changes, and the image May affect the contrast. Thus, the dark current is one of the dominant factors of the image sensor noise.

  For example, when a fixed signal level is used as a reference for A / D conversion, the digital value of the optical black level changes with temperature due to dark current, and the black portion of the image obtained after image processing. Depending on the temperature, the image may float white or sink black, resulting in an unstable contrast image.

  In order to avoid such a problem, in many image sensors, an effective pixel (hereinafter referred to as an aperture pixel) in an effective pixel region and a black reference pixel (hereinafter referred to as an OB pixel (Optical Black pixel)) that outputs an optical black level are used. ) On a single device. The OB pixel has the same structure as the aperture pixel, but a light-shielding film is formed on the wiring so as to be shielded from light. By reading out this OB pixel, an optical black level is output for each frame. Can do. For this reason, even when the temperature changes and the dark current changes, the reference level of contrast can be estimated at the aperture pixel based on the black level of the OB pixel.

  FIG. 5 shows a schematic configuration diagram of a conventional CMOS image sensor. The solid-state imaging device 1 is configured to include an imaging region 2 and a vertical selection circuit unit 3 and a readout circuit unit 4 arranged around the imaging region 2. The imaging area 2 is an optical where an aperture pixel (effective pixel) 6 for imaging a subject image is arranged and an OB pixel 8 which is formed around the effective pixel area 5 and is shielded from light. And an optical black region 7. Pixels including the aperture pixel 6 and the OB pixel 8 are regularly arranged in a two-dimensional array.

  The opening pixel 6 and the OB pixel 8 include, for example, a photodiode that constitutes a photoelectric conversion unit, and a plurality of MOS transistors such as a transfer transistor, a reset transistor, an amplification transistor, and a selection transistor.

  The vertical selection circuit unit 3 is configured by, for example, a shift register, and sequentially selects and scans each aperture pixel 6 and OB pixel 8 in the imaging region 2 in the vertical direction in units of rows, and passes through each pixel through a vertical signal line (not shown). A signal charge generated according to the amount of received light in the photoelectric conversion unit (photodiode) is supplied to the readout circuit unit 4.

  Although not shown, the read circuit unit 4 includes a horizontal signal line, a horizontal selection circuit, a column signal processing circuit, an output circuit, and the like. Further, on the same chip, based on the vertical synchronization signal, the horizontal synchronization signal, and the master clock, a clock signal and a control signal serving as a reference for operations of the vertical selection circuit unit 3 and the readout circuit unit 4 are generated, and the vertical selection circuit unit 3 and a control circuit to be input to the readout circuit unit 4 and the like.

  FIG. 7 shows a cross-sectional structure on the line DD ′ passing through the aperture pixel 6 and the OB pixel 8 in FIG. An aperture pixel 6 partitioned by an element isolation region 12 is formed in an effective pixel region 5 of a semiconductor substrate (for example, a silicon substrate) 11, and an OB pixel 8 partitioned similarly by the element isolation region 12 is formed in an optical black region 7. Is done. The aperture pixel 6 includes a photodiode (PD) 13 as a photoelectric conversion unit and a plurality of MOS transistors (only the transfer transistor Tr1 is shown in FIG. 7). The transfer transistor Tr1 includes a semiconductor region that becomes a floating diffusion (FD) portion 14, a photodiode 13, and a transfer gate electrode 15 formed through a gate insulating film. The OB pixel 8 includes a photodiode (PD) 23 which is a photoelectric conversion unit and a plurality of MOS transistors (only the transfer transistor Tr2 is shown in FIG. 7). The transfer transistor Tr2 includes a semiconductor region to be a floating diffusion (FD) portion 24, a photodiode 23, and a transfer gate electrode 25 formed through a gate insulating film.

  A multilayer wiring 18 is formed on the semiconductor substrate 11 via an interlayer insulating film 17. Further, in the optical black region 7, a light shielding film 19 made of a metal film such as an Al film is formed on the multilayer wiring 18. Although not shown, a color filter, an on-chip lens, and the like are further formed through a planarization film.

  8A and 8B show a schematic plan structure of the photodiode (PD) 23 and the floating diffusion (FD) portion 24 of the OB pixel 8, and the photodiode (PD) 13 and the floating diffusion of the aperture pixel 6, respectively. The schematic planar structure of the (FD) part 14 is shown. In the OB pixel 8 and the aperture pixel 6, the photodiodes 13 and 23 and the floating diffusion portions 14 and 24 are formed with the same size.

  With the above configuration, an image is read out, and details of the reading scan will be described. First, the OB pixel 8 and the aperture pixel 6 are sequentially selected and read in accordance with the horizontal synchronization signal from the vertical selection circuit unit 3. FIG. 6 shows an example of the read signal output. In FIG. 5, the front OB pixel row m1 in FIG. 5 is three rows (m1 = 3), and the rear OB pixel row m2 is two rows (m2 = 2). In the signal output, in both the OB pixel row and the aperture pixel row, the signal output in one horizontal scanning period between the horizontal synchronization signals (XHS) is shown enlarged.

  An image of one frame is output before the next vertical synchronization signal with a vertical synchronization signal (XVS) as a trigger. A signal for one row is output between the vertical synchronization signals with a horizontal synchronization signal (XHS) as a trigger. Paying attention to the signal output for one row, the signal output of the OB pixel row is only output at the optical black (OB) output level, but the signal output c of the aperture pixel row outputs optical black (OB) before and after. Level outputs a and b are output.

  Generally, the output value of the OB pixel 8 read out at the beginning of one frame is sampled, and after waiting for the result, the temperature is suddenly changed because it adapts to the black level of the aperture pixel 6 in the frame. Even in this case, the dark current amount is canceled with respect to the temperature change within one frame.

  With the above configuration, even if a dark current that varies with temperature and accumulation time is generated in the aperture pixel 6, the dark current amount under the same conditions is measured in the OB pixel 8, and the black current of the OB pixel 8 is measured. Since the contrast of the aperture pixel 6 is determined using the level as a reference level, disturbance of image contrast due to dark current can be reduced.

  However, it has been found that when the light shielding film 19 is formed on the OB pixel 8, it is difficult to precisely match the dark current amounts of the OB pixel 8 and the aperture pixel 6 due to a difference in surface level. The reason for using the optical black level of the OB pixel 8 as a reference is based on the premise that the dark current amounts of the OB pixel 8 and the aperture pixel 6 are the same. Therefore, if the dark current amounts of the OB pixel 8 and the aperture pixel 6 are different, the optical black level reference by the OB pixel 8 cannot be applied to the aperture pixel 6. As a result, even if there is no temperature change within one frame, the image contrast of the aperture pixel 6 may be affected. For example, even if the difference in dark current between the OB pixel 8 and the aperture pixel 6 is small, there is a problem when the accumulation time is extended, such as when trying to take a dark image.

  Patent Document 1 discloses a method of removing the photodiode of the OB pixel in order to suppress the dark current in the OB pixel.

Japanese Patent Laid-Open No. 10-107245

  When the pixel is composed of a photodiode and a floating diffusion portion, the dark current can be divided into those generated from the photodiode and those generated from the floating diffusion portion. When the dark current is read as a signal, it is read as the sum thereof. When the shape of the pixel is the same between the aperture pixel and the OB pixel as in the prior art of FIG. 7 and FIG. 8, the dark current amount of both is equalized because the light shielding film of Al is formed on the OB pixel. It ’s difficult. In other words, even if the floating diffusion portions and the photodiodes of the OB pixel and the aperture pixel are made in the same size and in the same manner, there may be a difference in dark current.

  Also, the cause of the difference in the amount of dark current between the aperture pixel and the OB pixel can be attributed to either a photodiode or a floating diffusion. However, since the manufacturing process is different between the photodiode and the floating diffusion, the difference in the amount of dark current is also different. Usually, since the area of the photodiode is larger than that of the floating diffusion, the dark current difference is often caused by the photodiode.

  A method of suppressing dark current by removing the photodiode of the OB pixel as described in Patent Document 1 has been proposed. However, since the dark current of the OB pixel is extremely smaller than that of the aperture pixel, the temperature is eventually reduced. Depending on the accumulation time, a black level shift occurs.

  In view of the above-described points, the present invention can output an optical black level that does not vary depending on temperature and accumulation time by adjusting the difference in the amount of dark current generated between the aperture pixel and the OB pixel. The solid-state imaging device which can reduce the influence of this is provided.

In order to solve the above problems and achieve the object of the present invention, the solid-state imaging device of the present invention includes a plurality of effective pixels and black reference pixels each having a photoelectric conversion unit and a floating diffusion unit. The effective pixel photoelectric conversion unit and the black reference pixel photoelectric conversion unit are configured in the same shape so that the dark current amount of the effective pixel and the dark current amount of the black reference pixel match. The surface area or peripheral length of the floating diffusion portion of the black reference pixel is formed smaller than the surface area or peripheral length of the floating diffusion portion of the effective pixel.

  In the solid-state imaging device of the present invention, the sum of the dark currents of both pixels can be matched by making the shapes of the floating diffusion portions of the black reference pixel and the effective pixel different.

  According to the solid-state imaging device according to the present invention, the dark current amount of the black reference pixel and the effective pixel can be made uniform without degrading the characteristics of the solid-state imaging device itself, and a stable black level can be output. The image contrast can be improved.

It is a schematic block diagram of the CMOS image sensor of this Embodiment. It is sectional drawing in AA 'of FIG. A, B It is a schematic block diagram which shows the layout of the OB pixel (A) of this Embodiment, and an opening pixel (B). It is sectional drawing in AA 'in case PD does not exist in OB pixel of this Embodiment. It is a schematic block diagram of the conventional CMOS image sensor. It is the outline of the read signal scanning in the conventional CMOS image sensor. It is sectional drawing in DD 'of FIG. A, B It is a schematic block diagram which shows the layout of the conventional OB pixel (A) and opening pixel (B).

  Embodiments of the present invention will be described below with reference to the drawings.

  The solid-state imaging device according to the present embodiment is a CMOS image sensor that is a unit pixel having a photoelectric conversion unit and a conversion unit that converts charges generated by the photoelectric conversion unit into pixel signals.

  FIG. 1 shows a schematic configuration diagram of a CMOS image sensor according to the present embodiment. As shown in FIG. 1, the solid-state imaging device 31 according to the present embodiment includes an imaging region 32, and a vertical selection circuit unit 33 and a readout circuit unit 34 arranged around the imaging region 32. The imaging region 32 includes an effective pixel region 35 in which effective pixels (hereinafter referred to as aperture pixels) 36 for capturing a subject image are arranged, and a black reference pixel (hereinafter referred to as a light-shielded black pixel) formed around the effective pixel region 35. , An OB pixel) 38 and an optical black region 37 (Optical Black region) 37 arranged therein. Pixels including the aperture pixel 36 and the OB pixel 38 are regularly arranged in a two-dimensional array.

  The opening pixel 36 and the OB pixel 38 include, for example, a photodiode that constitutes a photoelectric conversion unit, and a plurality of MOS transistors such as a transfer transistor, a reset transistor, an amplification transistor, and a selection transistor.

  The vertical selection circuit unit 33 is configured by, for example, a shift register, and sequentially selects and scans each aperture pixel 36 and OB pixel 38 in the imaging region 32 in the vertical direction in units of rows, and passes through each pixel through a vertical signal line (not shown). A signal charge generated according to the amount of received light in the photoelectric conversion unit (photodiode) is supplied to the readout circuit unit 34.

  Although not shown, the read circuit unit 34 includes a horizontal signal line, a horizontal selection circuit, a column signal processing circuit, an output circuit, and the like. Further, on the same chip, based on the vertical synchronization signal, the horizontal synchronization signal, and the master clock, a clock signal and a control signal serving as a reference for operations of the vertical selection circuit unit 33 and the readout circuit unit 34 are generated, and the vertical selection circuit unit 33 and a control circuit for inputting to the readout circuit section 34 and the like are formed.

  FIG. 2 shows a cross-sectional structure on the line AA ′ passing through the aperture pixel 36 and the OB pixel 38 in FIG. An aperture pixel 36 partitioned by an element isolation region 42 is formed in an effective pixel region 35 of a semiconductor substrate (for example, a silicon substrate) 41, and an OB pixel 38 partitioned similarly by the element isolation region 42 is formed in an optical black region 37. Is done. The aperture pixel 36 includes a photodiode (PD) 43 that is a photoelectric conversion element and a plurality of MOS transistors (only the transfer transistor Tr1 is shown in FIG. 2). The transfer transistor Tr1 includes a semiconductor region that becomes a floating diffusion (FD) portion 44, a photodiode 43, and a transfer gate electrode 45 formed through a gate insulating film. The OB pixel 38 includes a photodiode (PD) 53 as a photoelectric conversion unit and a plurality of MOS transistors (only the transfer transistor Tr1 is shown in FIG. 2). The transfer transistor Tr2 includes a semiconductor region to be a floating diffusion (FD) portion 54, a photodiode 53, and a transfer gate electrode 55 formed through a gate insulating film.

  A multilayer wiring 48 is formed on the semiconductor substrate 41 via an interlayer insulating film 47. Further, in the optical black region 37, a light shielding film 49 made of a metal film, for example, an Al film, is formed on the multilayer wiring 48. Although not shown, a color filter, an on-chip lens, and the like are further formed through a planarization film.

In the present embodiment, although details will be described later, in order to make the dark current amounts of the aperture pixel 36 and the OB pixel 38 coincide with each other, the floating diffusion (FD) portions 44 in the aperture pixel 36 and the OB pixel 38 are respectively used. And 54 have different shapes.
Since the signal readout of the solid-state imaging device 31 of the present embodiment is the same as that described in the above-described conventional example, a duplicate description is omitted.

  Table 1 below shows the dark current components caused by the photodiodes 43 and 53 and the dark current components caused by the floating diffusion portions 44 and 54 of the aperture pixel 36 and the OB pixel 38. The dark current component due to the photodiode 53 in the OB pixel 38 is P1, the dark current component due to the floating diffusion portion 54 is F1, the dark current component due to the photodiode 43 in the aperture pixel 36 is P2, and the dark current component due to the floating diffusion portion 44 is dark. Let the current component be F2.

  When the dark current is read out as a signal, the dark current is read out as the sum of those generated from the photodiodes 43 and 53 and those generated from the floating diffusion portions 44 and 54. Therefore, matching the dark current amounts of the aperture pixel and the OB pixel means that F1 + P1 = F2 + P2 from the table.

Next, the present embodiment will be described in detail together with an adjustment method for setting the dark current amount to F1 + P1 = F2 + P2. In the present embodiment, the aperture pixel 36 is designed so that the imaging characteristics are optimized in order to match the dark currents of the aperture pixel 36 and the OB pixel 38 with no deterioration in performance as a device. To adjust the dark current. Then, only F1 is adjusted so that F1 + P1 = F2 + P2. The dark current component increases as the surface area or perimeter of the photodiode and floating diffusion increases. Further, it is generally known that the dark current of the OB pixel 38 is larger than the dark current of the aperture pixel 36.
Therefore, in the present embodiment, F1 + P1 = F2 + P2 is achieved by making F1 smaller than F2.

  As shown in FIG. 2, the first embodiment of the present invention is configured such that the surface area of the floating diffusion portion 44 of the aperture pixel 36 is different from the surface area of the floating diffusion portion 54 of the OB pixel 38. In this example, the surface area of the floating diffusion portion 54 of the OB pixel 38 is made smaller than the surface area of the floating diffusion portion 44 of the aperture pixel 36.

  According to the first embodiment, the dark current amount is set to F1 + P1 = F2 + P2 by forming the shape of the floating diffusion portion 54 in the OB pixel 38, that is, the surface area smaller than that of the floating diffusion portion 44 in the opening pixel 36. Can be adjusted.

FIG. 3 shows a second embodiment of the present invention. In the present embodiment, the peripheral lengths and surface areas of the floating diffusion portions 44 and 54 of the aperture pixel 36 and the OB pixel 38 are different from each other. FIG. 3 shows an example of the layout. In this example, the peripheral length and surface area of the floating diffusion portion 54 of the OB pixel 38 are configured to be smaller than the peripheral length and surface area of the floating diffusion portion 44 of the aperture pixel 36. The amount of dark current is proportional to the surface area or the perimeter of the floating diffusion 30.
Therefore, according to the second embodiment, the peripheral lengths of the floating diffusion portions 44 and 54 of the aperture pixel 36 and the OB pixel 38 are set so that the dark current amount becomes F1 + P1 = F2 + P2 as in the layout of FIG. The amount of dark current can be adjusted by appropriately adjusting the surface area.

  With the above configuration, F1 + P1 = F2 + P2 is achieved, and the respective dark current amounts in the aperture pixel 36 and the OB pixel 38 become equal. Thereby, the reference of the black level obtained by the OB pixel 38 can always be applied to the aperture pixel 36, and an image having a better contrast than the conventional one can be output during one frame.

  FIG. 4 shows a solid-state imaging device according to a reference example. Since the amount of dark current can be changed by changing the shape of the floating diffusion portion 54, the photodiode 53 of the OB pixel 38 may be removed. That is, in the present embodiment, the aperture pixel 36 includes the photodiode 43 and the floating diffusion portion 44 as usual, but the OB pixel 38 omits the photodiode 53 and includes only the floating diffusion portion 54. None, the surface area or the peripheral length of the floating diffusion portion 54 of the OB pixel 38 is made smaller than that of the floating diffusion portion 44 of the aperture pixel 36 so that F1 = F2 + P2.

Thus, according to the reference example, the dark current amount can be adjusted in the same manner as in the first and second embodiments. In addition, since the photodiode 53 is not formed in the OB pixel 38, it is not necessary to read out the charge of the photodiode 53 of the OB pixel 38.
At this time, since P1 = 0, the dark current amount is adjusted to satisfy F1 = F2 + P2.

  Further, by not forming the photodiode 53 in the OB pixel 38, the area per pixel in the OB pixel region 37 can be reduced, the OB pixel region 37 can be reduced, and the chip area and cost can be reduced. Contribute.

  By the way, in the OB pixel 38, since the height from the substrate 41 to the light shielding film 49 becomes high, there is a possibility that light incident obliquely may leak into the photodiode. However, as described above, the photodiode 53 is included in the OB pixel 38. By not forming the region, there is no region where photoelectric conversion is performed, so that it is possible to eliminate the influence of light leakage when the OB pixel 38 is irradiated with a large amount of light.

  Next, a third embodiment of the present invention will be described. In the present embodiment, although not shown, both the aperture pixel 36 and the OB pixel 38 include a photodiode and a floating diffusion portion, but the OB pixel 38 is used when transferring the charge of the photodiode to the floating diffusion portion. In this case, the charge of the photodiode 53 is configured not to be transferred to the floating diffusion portion. At this time, the shape of the floating diffusion portion of the OB pixel 38 is adjusted so that the dark current amount is F1 = F2 + P2.

  According to 3rd Embodiment, in addition to the effect in 1st Embodiment and 2nd Embodiment, there exist the following effects. The sensitivity of the pixel strongly depends on the continuity of the shape of the aperture pixel 36 and the OB pixel 38. Therefore, when the aperture pixel 36 and the OB pixel 38 are formed, if there is a variation in the process, a stable one cannot be obtained. Therefore, continuity and uniformity of the pixel layout on the imaging region 32 are desired. Therefore, if the aperture pixel 36 and the OB pixel 38 both have a photodiode and a floating diffusion, and the readout of the charge of the photodiode 53 of the OB pixel 38 is not performed, the aperture pixel 36 and the OB pixel 38 Thus, layout continuity can be obtained. At the same time, the amount of dark current can be adjusted without significantly changing the pixel layout, and light leakage can be prevented when the OB pixel 38 is irradiated with a large amount of light.

  Further, when layout restrictions are large, not only the shape of the floating diffusion portion 54 of the OB pixel 38 but also the shape of the photodiode 53 may be changed so that F1 + P1 = F2 + P2. In this way, by increasing the degree of freedom of adjustment, it is possible to select an adjustment method suitable for manufacturing conditions and manufacturing processes.

  Furthermore, as another embodiment, the shape of the photodiodes of the aperture pixel and the OB pixel can be different. For example, the surface area of the photodiode of the OB pixel and the opening so that the sum of the dark current of the photodiode and the floating diffusion portion in the aperture pixel is equal to the sum of the dark current of the photodiode of the OB pixel and the floating diffusion portion. The pixel photodiodes can be configured with a difference in surface area.

  According to the above-described embodiment of the present invention, it is assumed that the amount of dark current changes with temperature and accumulation time by changing the shape of the floating diffusion so that the amount of dark current of the aperture pixel and the OB pixel becomes equal. In addition, a stable optical black level can be output from the OB pixel. As a result, it is possible to prevent a decrease in image contrast due to dark current. Further, when the photodiode of the OB pixel in the OB pixel region is omitted, the OB pixel can be reduced, the chip area can be reduced, and the cost of the solid-state imaging device can be reduced. Further, when the photodiode of the OB pixel is omitted or the photodiode charge is not read out of the OB pixel, it is possible to prevent an adverse effect due to light leaking into the OB pixel region when a large amount of light is irradiated.

  1, 31... Solid-state imaging device 2, 32... Imaging region 3, 33.. Vertical selection circuit 4, 34. (Aperture) pixel, 7, 37... Optical black region, 8, 38... OB pixel, 11, 41 .. substrate, 12, 42 .. element isolation region, 13, 23, 43, 53. , 14, 24, 44, 54.. Floating diffusion part, 15, 25, 45, 55.. Transfer gate electrode, 17, 47.. Interlayer insulating film, 18, 48. Light shielding film

Claims (2)

The effective pixel and the black reference pixel configured to have a photoelectric conversion unit and a floating diffusion unit each have an imaging region in which a plurality of pixels are arranged,
The effective pixel photoelectric conversion unit and the black reference pixel photoelectric conversion unit are configured in the same shape so that the dark current amount of the effective pixel and the dark current amount of the black reference pixel match.
The solid-state imaging device, wherein a surface area or a peripheral length of a floating diffusion portion of the black reference pixel is smaller than a surface area or a peripheral length of the floating diffusion portion of the effective pixel. The solid-state imaging device according to claim 1, wherein the black reference pixel is configured not to transfer the charge of the photoelectric conversion unit to the floating diffusion unit.

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