JP5085857B2 - Cutting apparatus and cutting method - Google Patents

Description

  The present invention relates to a cutting device and a cutting method using water containing abrasive grains.

  A conventional cutting apparatus and cutting method using water containing abrasive grains will be described. This method has been devised for the purpose of improving the processing efficiency with respect to a method (so-called water jet cutting) for injecting high-pressure water onto an object and cutting the object (for example, patent document). 1). According to this, garnet, silica sand, cast iron grit or the like is used as an abrasive (abrasive grain). Then, the wet polishing material is fed from the polishing material tank into the mixing chamber of the abrasive nozzle head through the polishing material supply pipe. Here, the wet abrasive is fed (pressure fed) into the mixing chamber by high-pressure air generated by a compressor. Then, the abrasive is mixed with the high-pressure water jet in the mixing chamber, and is injected from the abrasive nozzle as an abrasive water jet containing the abrasive. Further, the abrasive water jet used for cutting is collected by a catcher after passing through a groove of a table (fixed table) that supports a work (object) (see FIG. 4 of Patent Document 1). Then, the abrasive is collected by a sieve (sieving), and the collected abrasive is returned to the abrasive tank in a wet state and reused (see FIG. 1 of Patent Document 1).

  However, according to the conventional technology described above, there are the following problems. First, since the wet abrasive is pumped to the mixing chamber of the abrasive nozzle head via the abrasive supply pipe (see FIG. 1 of Patent Document 1), the inner wall of the abrasive supply pipe and the abrasive are polished. The material supply port is easily worn. For this reason, there is a possibility that it takes time and effort to manage and maintain the abrasive supply pipe and the abrasive supply port.

Second, according to the prior art, the supply system for the high-pressure water jet and the abrasive is separate and there is only one abrasive supply system. For this reason, in order to keep the ratio of the abrasive in the abrasive tank at an appropriate level, the operation of injecting the abrasive water jet containing the abrasive must be stopped. And it is necessary to replenish the abrasive | polishing material in the dry state in the abrasive | polishing material tank, or to replenish water until the ratio mentioned above becomes appropriate (refer FIG. 2 of patent document 1). Therefore, there is a problem that the operating rate of the cutting device is lowered. In addition, there is a problem that the structure of the abrasive nozzle head is complicated (see FIG. 3 of Patent Document 1).
Japanese Unexamined Patent Publication No. 2000-000767 (2nd to 4th pages, FIGS. 1 to 4)

  The problem to be solved by the present invention is that, firstly, the wet abrasive grains are pumped, so that the inner wall of the pipe through which the wet abrasive grains flow easily wears. Second, since the abrasive grains cannot be replenished unless the operation of spraying the super-high pressure water containing the abrasive grains is stopped, the operating rate of the cutting device is lowered.

In order to solve the above-mentioned problem, a cutting device according to the present invention is a cutting device that cuts an object by spraying water containing abrasive grains from a nozzle at high pressure, and applies high pressure to water containing abrasive grains. A pump to be added, a tank group composed of a plurality of tanks each storing water containing abrasive grains, a nozzle system pipe for supplying water containing abrasive grains to the nozzles, and a pump and a nozzle system via each tank of the tank group A water system pipe that connects the pipe, tank switching means provided in the water system pipe, and a controller that designates a part of each tank as a supply tank that supplies water containing abrasive grains to the nozzle, In a normal state, each tank has a low ratio water and a high ratio water located below the low ratio water in contact with each other. In a high ratio water in a normal state, abrasive grains are lower than in a low ratio water. Exist at a high rate And, each water pipes in operation initiated from the normal state to supply water at high pressure to the lower inside of each tank was supplied to the lower inside of each tank water containing abrasive grains Tank switching means for agitating water and extruding water containing abrasive grains from each tank and supplying the nozzles with high pressure to the nozzle, and supplying the water containing abrasive grains from the designated supply tank to the nozzles It is characterized by operating.

  Moreover, the cutting device according to the present invention is the above-described cutting device, wherein each of the tanks includes a sensor group including sensors that respectively detect a ratio of abrasive grains to water including abrasive grains in each tank. Abrasive system tank for storing high ratio water including a ratio, an abrasive system pipe connecting each tank and the abrasive system tank, and an abrasive system switching means provided in the abrasive system pipe The control unit determines which tank of each tank is supplied with the high ratio water from the abrasive system tank based on the ratio of the abrasive grains detected in each tank. Based on the above, the abrasive grain system switching means is operated, and the tank switching means is operated by designating any one of the tanks to which the high ratio water is not supplied as the supply tank.

  Further, in the cutting device according to the present invention, in the above-described cutting device, the control unit has an abrasive grain ratio of 5% by volume or more and 70 volumes based on the abrasive grain ratio detected in each tank. %, The tank switching means and the abrasive grain system switching means are operated.

  Further, the cutting device according to the present invention is the above-described cutting device, the recovery means for recovering water containing abrasive grains and used for cutting the object, and abrasive grains from the water recovered by the recovery means A sieving means for sieving, a supply means for supplying the screened abrasive grains to each tank, and a storage means for storing high-rate water supplied with the abrasive grains, as well as a recovery means, a storage means and an abrasive system The tank is common.

  Further, the cutting device according to the present invention is the above-described cutting device, wherein the bypass pipe provided in each of the water system pipes and the bypass pipe for connecting the pump and the nozzle system pipe without passing through each tank in each of the water system pipes. And a pipe switching means, and after the operation of supplying water containing abrasive grains from the designated supply tank to the nozzle is completed, the control section supplies water not containing abrasive grains from the nozzle without going through the supply tank. The bypass pipe switching means is operated so as to inject at a high pressure.

Further, the cutting method according to the present invention is a cutting method for cutting an object by spraying water containing abrasive grains from a nozzle at a high pressure, and water containing abrasive grains is individually contained in a tank group consisting of a plurality of tanks. A step of supplying, a step of detecting a ratio of abrasive grains to water containing abrasive grains in each tank of each tank group, and whether or not the ratio of abrasive grains detected in each tank conforms to a predetermined standard. A step of determining, a part of the tanks in which the ratio of the abrasive grains conforms to the standard is designated as a supply tank that supplies water containing abrasive grains to the nozzle, and A process of uniformly distributing abrasive grains in water containing abrasive grains, a process of applying high pressure to water containing abrasive grains stored in a supply tank, and water containing abrasive grains subjected to high pressure to an object Jetting from the nozzle toward Provided, each tank in the normal state in which a abrasive grains in each precipitated multiple tanks exist a high percentage water located below the low ratio water and low ratio water contact with each other, usually In the high-ratio water in this state, the abrasive grains are present in a higher ratio than in the low-ratio water, and the high-pressure is applied to the water containing the abrasive and the process of uniformly distributing the abrasive grains in the operation started from the normal state In the process, the abrasive grains are uniformly distributed by supplying water at a high pressure to the lower part in each tank, and the high pressure is applied to the water containing the abrasive grains.

  Further, the cutting method according to the present invention includes a step of designating one tank determined as not conforming to the standard in the determining step in the above-described cutting method as a replenishment tank, and abrasive grains in the replenishment tank A step of calculating the amount of abrasive grains to be injected into the replenishment tank based on the ratio, and a high proportion water containing abrasive grains at a high ratio to the replenishment tank in an amount corresponding to the calculated amount of abrasive grains. And an injecting step.

  Further, the cutting method according to the present invention is characterized in that, in the above-described cutting method, the standard is 5% by volume or more.

  Moreover, the cutting method according to the present invention includes a step of recovering water used for cutting an object, which is water containing abrasive grains, and a step of sieving the abrasive grains from the recovered water. And a step of supplying the screened abrasive grains to high-ratio water.

  Further, the cutting method according to the present invention is characterized in that, in the above-described cutting method, after the step of spraying, water not containing abrasive grains is sprayed from the nozzle at a high pressure without passing through the supply tank.

  According to the present invention, firstly, the use of one tank having a reduced abrasive grain ratio among the tanks is canceled, and another tank is designated and used as a supply tank. Thereby, even while the abrasive grains are being replenished in the one tank, the water containing the abrasive grains can be supplied from the other tanks to the nozzle for cutting. Therefore, the operating rate of the cutting device is greatly improved. In addition, since water containing abrasive grains, particularly water in which abrasive grains are evenly distributed, is supplied to the nozzle, the wear of the nozzle and piping is less than when using dry abrasive grains or wet abrasive grains. In addition to being suppressed, the structure of the nozzle is simplified.

  Second, a mechanism is provided for supplying water containing no abrasive grains to the downstream side of each tank at a high pressure. Thereby, the residue of the abrasive grain in the downstream side of each tank is suppressed. Therefore, clogging of the abrasive grains on the downstream side of each tank is prevented, so that the operating rate of the cutting device is improved.

  Third, the abrasive grains recovered from the water used for cutting the object are used again for cutting. Therefore, the running cost in the cutting device can be reduced. Further, since the recovery means, the storage means, and the abrasive grain tank are common, the cutting device can be simplified.

  The cutting device includes a high-pressure pump (2) for increasing the pressure of water, a first inflow-side water system pipe (4), a first inflow-side on-off valve (30), and a first tank on-off valve (33). A first tank (5) connected to the high-pressure pump (2) through the second inflow side water piping (6), a second inflow side on-off valve (31), and a second on-off valve for tank ( 36) through a second tank (7) connected to the high-pressure pump (2), and a first outflow side water system connected to the first tank (5) and the second tank (7), respectively. The pipe (8), the second outlet water system pipe (9), the first inlet water system pipe (4) and the first outlet water system pipe (8) without going through the first tank (5); The first bypass pipe (32) for connecting the second inflow side water system pipe (6) and the second outflow side water system pipe without going through the second tank (7) 9) and a second bypass pipe (35) for connecting the nozzle system pipe (10) connected to the first outflow side water system pipe (8) and the second outflow side water system pipe (9), A cutting nozzle (11) connected to the nozzle system pipe (10).

  A cutting apparatus according to a first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a piping system diagram schematically showing the configuration of the cutting apparatus according to the present embodiment. In addition, in order to make it easy to understand, any drawing used in the following description is schematically omitted or exaggerated as appropriate. Also, in each of the following examples, a semiconductor chip mounted on a circuit board is collectively sealed with a resin to form a sealing body, and the sealing body is cut along orthogonal grid-like cutting lines. The case where it does is demonstrated. In this case, a highly accurate cutting position and a cutting width of around 200 μm are required.

  The cutting device shown in FIG. 1 includes the following components as a system for injecting water containing abrasive grains at a high pressure. These components are a high-pressure pump 2 for increasing the pressure of water supplied from the water source 1, a switching valve 3 connected to the high-pressure pump 2, and the switching valve 3 via a first inflow-side water system pipe 4. The first tank 5 is connected to the switching valve 3 and the second tank 7 is connected to the switching valve 3 via the second inflow-side water piping 6. Further, a first outflow side water system pipe 8 and a second outflow side water system pipe 9 connected to the first tank 5 and the second tank 7 respectively. Further, there are a nozzle system pipe 10 connected to a portion where the first outflow side water system pipe 8 and the second outflow side water system pipe 9 are connected, and a cutting nozzle 11 connected to the nozzle system pipe 10. . Both the first tank 5 and the second tank 7 are substantially filled with water containing abrasive grains.

Here, the abrasive grains are made of silicon carbide (SiC), alumina (Al ₂ O ₃ ), garnet or the like, and have a particle diameter d of about 10 to 100 μm. Since the specific gravity of these abrasive grains is larger than 1, in a normal state, in each of the first tank 5 and the second tank 7, high ratio waters 12 and 13 in which precipitated abrasive grains exist in a high ratio, There are low-ratio waters 14 and 15 consisting almost of water. The “ratio” here means “ratio of abrasive grains contained in water containing abrasive grains” (hereinafter the same). In addition, each of the first and second tanks 5 and 7 being “substantially filled” with water containing abrasive grains includes the case where slight bubbles or spaces remain in the tank. Means (the same applies below). Further, since the first tank 5 and the second tank 7 are switched and used as will be described later, it is preferable that the first tank 5 and the second tank 7 have the same capacity.

  The cutting device shown in FIG. 1 includes the following components as a system for supplying abrasive grains to the first tank 5 and the second tank 7. The constituent elements are an abrasive tank 16 for storing water containing abrasive grains at a high ratio (hereinafter referred to as “high ratio water”), and supplying pressurized water to the abrasive tank 16. And an extrusion pump 17 for extruding high-rate water from the abrasive tank 16. Further, the abrasive supply pipe 18 that supplies the high ratio water pushed out from the abrasive grain tank 16 to the first tank 5 and the second tank 7, and the portion connected to the first tank 5 in the abrasive supply pipe 18. The first abrasive grain supply valve 19 provided in the first and second abrasive grain supply valves 20 provided in the part connected to the second tank 7 in the abrasive grain supply pipe 18. Further, when high-ratio water is supplied, the return pipe 21 that returns the water overflowing from the first tank 5 and the second tank 7 to the abrasive tank 16, and the part connected to the first tank 5 in the return pipe 21 And a second return valve 23 provided at a portion of the return pipe 21 connected to the second tank 7. Further, this system is provided with a water injection valve 24 for supplying water to the abrasive grain supply pipe 18 from the outside. By the system for supplying abrasive grains to the first and second tanks 5 and 7 described so far, the first and second tanks 5 and 7 are always substantially filled with water containing abrasive grains.

  Moreover, the cutting device shown by FIG. 1 is provided with the following component as a system which maintains the ratio of the abrasive grain in the 1st tank 5 and the 2nd tank 7 appropriately. These components are a first sensor 25 and a second sensor 26 which are fixed to the bottoms of the first tank 5 and the second tank 7 and are respectively constituted by load cells. Further, this system receives signals from the first and second sensors 25 and 26, and calculates the weights of water containing abrasive grains in the first and second tanks 5 and 7 based on these signals, respectively. In addition, a control unit (controller) CNT that controls valves, pumps, and the like included in the cutting device as necessary is provided. In FIG. 1, wirings for the control unit CNT to control the high-pressure pump 2 and the switching valve 3 are virtually shown by broken lines, and the other wirings are not shown.

  Furthermore, the cutting device shown in FIG. 1 includes a moving mechanism (not shown) that moves the nozzle 11 in the horizontal (XY) direction and the vertical (Z) direction, and a fixed base 27. A sealing body 28, which is an object to be cut, is fixed to the fixing base 27 by a method such as suction. Then, water containing abrasive grains is jetted from the nozzle 11 at a high pressure, and the sealing body 28 is cut by the high-pressure water 29 that is the jetted water and contains the abrasive grains.

  Hereinafter, a method for cutting the sealing body 28 as an object using the cutting apparatus of FIG. 1 will be described. First, the operation of bringing the first and second tanks 5 and 7 into a state where they are substantially filled with water containing abrasive grains will be described.

  First, water containing abrasive grains is supplied to the first tank 5 and the second tank 7. As a result, the first and second tanks 5 and 7 are substantially filled with water containing abrasive grains. Specifically, the following operation is performed. First, in order to supply water containing abrasive grains to the first tank 5, the first return valve 22, the first abrasive grain supply valve 19, and the water injection valve 24 are opened, and the second abrasive grain supply valve is opened. 20 and the second return valve 23 are closed. Then, water is supplied at a predetermined pressure to the first tank 5 through the water injection valve 24, the abrasive supply pipe 18, and the first abrasive supply valve 19 in order. Due to the negative pressure (negative pressure) generated by this, high-rate water is sucked out from the abrasive tank 16. And the high ratio water sucked out is poured into the first tank 5 together with water through the abrasive grain supply pipe 18 and the first abrasive grain supply valve 19 sequentially. When the first tank 5 is filled with water containing abrasive grains, the water injection valve 24, the first abrasive grain supply valve 19, and the first return valve 22 are closed. By the same procedure, the second tank 7 can be substantially filled with water containing abrasive grains.

  Here, it is preferable that the initial ratio in water containing abrasive grains filling the first and second tanks 5 and 7 is 50% by volume or more and 70% by volume or less. The reason is that the higher the ratio, the better the cutting efficiency. However, when the ratio exceeds 70% by volume, it is difficult to uniformly distribute the abrasive grains in the tank. The initial ratio in the water containing the abrasive grains filling the first and second tanks 5 and 7 is the ratio of the abrasive grains in the high ratio water and the pressure and amount of water injected through the water injection valve 24. Etc. If the ratio in the tank exceeds the above-mentioned standard (for example, 70% by volume) for some reason, water may be injected into the tank by opening the water injection valve 24.

  Second, the nozzle 11 contains water containing abrasive grains from one of the first tank 5 and the second tank 7, both of which are filled with water containing abrasive grains, for example, the first tank 5. The operation of cutting the sealing body 28 by supplying to the substrate will be described with reference to FIG. In FIG. 1, a state where there is a flow is indicated by a solid line, and a state where there is no flow is indicated by a broken line. Here, the first abrasive grain supply valve 19, the first return valve 22, the second abrasive grain supply valve 20, and the second return valve 23 are all closed. Further, the high-pressure pump 2 is operated. In addition, the nozzle 11 is aligned with a predetermined position of the sealing body 28, and is aligned so that the tip of the nozzle 11 and the upper surface of the sealing body 28 are at a predetermined distance.

  First, the flow path from the high pressure pump 2 to the first inflow side water system pipe 4 is opened by the switching valve 3 and the flow path from the high pressure pump 2 to the second inflow side water system pipe 6 is closed. Then, high pressure pump 2 injects water into the first tank 5 at high pressure via the first inflow side water system pipe 4. The water injected at a high pressure stirs the water containing abrasive grains in the first tank 5 to distribute the abrasive grains uniformly, pushes out the water containing abrasive grains, and the first outflow side water system pipe 8 A high pressure is supplied to the nozzle 11 through the nozzle system pipe 10 in sequence. Thereby, the water containing an abrasive grain can be injected from the nozzle 11 at a high pressure. Then, the high-pressure water 29 that is water jetted at high pressure and containing abrasive grains collides with the sealing body 28 fixed on the fixing base 27. Thereby, the abrasive grains mainly contained in the high-pressure water 29 collide with the sealing body 28. Further, in this state, the sealing body 28 is cut by moving the nozzle 11 in the horizontal (XY) direction at an appropriate speed.

  Next, water containing abrasive grains is supplied from the first tank 5 to the moving nozzle 11, and high-pressure water 29 is injected from the nozzle 11 to cut the sealing body 28. When this operation is repeated with respect to the plurality of sealing bodies 28, the first tank 5 is filled with water containing abrasive grains by water injected at a high pressure from the first inflow-side water piping 4. The state continues. On the other hand, in the first tank 5, the abrasive grains flow out, so that the ratio of the abrasive grains gradually decreases. And when this ratio becomes too small, cutting efficiency is remarkably lowered, which is not preferable.

  Next, when the ratio in the first tank 5 falls below a certain value, the use of the first tank 5 is stopped and the second tank 7 is used. Specifically, first, the control unit CNT determines that the ratio of the abrasive grains in the first tank 5 is below a certain value based on the signal received from the first sensor 25, and the first tank 5 It is designated as a tank that requires replenishment of abrasive grains, that is, a tank that requires replenishment. Then, the control unit CNT closes the flow path from the high pressure pump 2 to the first inflow side water system pipe 4 by the switching valve 3 and the flow path from the high pressure pump 2 to the second inflow side water system pipe 6. To open. As a result, water containing abrasive grains is supplied from the second tank 7 to the nozzle 11 through the second outflow side water system pipe 9 and the nozzle system pipe 10 sequentially, and the high pressure water 29 is injected from the nozzle 11 and sealed. The stop 28 is cut.

  By the way, the above-mentioned “constant value of ratio” is a value determined as a predetermined standard, and may be, for example, 5% by volume, preferably 10% by volume. The reason for the 5 volume% is that the cutting efficiency is remarkably lowered when the abrasive grain ratio is less than 5 volume%. Further, the reason why the volume is preferably 10% by volume is that it is preferable to provide a margin in the standard in managing cutting conditions.

  Here, calculation of the abrasive grain ratio in the first tank 5 will be described. The weight and capacity of the first tank 5 itself are known. Further, the first tank 5 is always substantially filled with water containing abrasive grains. Further, the specific gravity of the abrasive grains is determined according to the material of the abrasive grains, and the specific gravity thereof is known. Therefore, the ratio in the first tank 5 can be calculated by the control unit CNT as follows. First, the first sensor 25 is used to measure the weight of the first tank 5 that is filled with water containing abrasive grains. Next, the weight of the first tank 5 that is filled only with water (which may be calculated based on the capacity or may be actually measured) is subtracted from the weight. Since the obtained difference corresponds to the weight of the abrasive grains in the tank, the volume of the abrasive grains in the tank is obtained by dividing the weight by the specific gravity of the abrasive grains. The ratio in the first tank 5 can be calculated based on the volume of the obtained abrasive grains and the capacity of the tank itself. Therefore, when the first sensor 25 measures the weight of the first tank 5 in a state filled with water containing abrasive grains as a substitute characteristic, the ratio of the abrasive grains in the first tank 5 is detected. You can say that. The same applies to the detection of the ratio in the second tank 7.

  In the description so far, the operation in the case where the initial ratio of water containing abrasive grains filling the first and second tanks 5 and 7 is high, in other words, the operation from the initial state has been described. By the way, when one of the first and second tanks 5 and 7 continues to be used and the abrasive grain ratio in the tank decreases, the use of one of the tanks is canceled and the other tank is used. Become. And the operation | movement which supplies an abrasive grain to one tank which stopped using is performed.

  Third, with reference to FIG. 1, the operation of replenishing one of the tanks when the use of the other tank and the use of the other tank with the reduced ratio of abrasive grains is stopped will be used. I will explain. In FIG. 1, the other tank that is used is the first tank 5, and one tank that is replenished with abrasive grains after the use is stopped is the second tank 7.

  First, in order to supply water containing abrasive grains to the second tank 7 which has been discontinued, the first abrasive grain supply valve 19 and the first return valve 22 are closed, and the second return valve 23 and The second abrasive grain supply valve 20 and the water injection valve 24 are opened. Then, water is supplied to the second tank 7 at a predetermined pressure through the water injection valve 24, the abrasive supply pipe 18 and the second abrasive supply valve 20 in this order. Due to the negative pressure (negative pressure) generated by this, high-rate water is sucked out from the abrasive tank 16. And the high ratio water sucked out is poured into the second tank 7 together with water through the abrasive grain supply pipe 18 and the second abrasive grain supply valve 20 sequentially.

  Next, when the second tank 7 is filled with water containing abrasive grains, the water injection valve 24, the second abrasive grain supply valve 20, and the second return valve 23 are closed. In this state, the second tank 7 stands by until the ratio in the first tank 5 falls below a certain value. The ratio of water containing abrasive grains filling the second tank 7 is determined by the ratio of abrasive grains in high-ratio water, the pressure and amount of water injected through the water injection valve 24, and the like.

  As described above, according to this embodiment, the use of one tank having a reduced abrasive grain ratio is canceled and the other tank is used. Thereby, even while the abrasive grains are being replenished in one tank, the water containing the abrasive grains can be supplied from the other tank to the nozzle for cutting. Therefore, the operating rate of the cutting device is greatly improved. In addition, since water containing abrasive grains is supplied to the nozzle, wear of nozzles and piping is suppressed as compared with the case of using dry abrasive grains or wet abrasive grains (polishing material), The structure of the nozzle is simplified.

  A cutting apparatus according to a second embodiment of the present invention will be described with reference to FIG. FIG. 2 is a piping diagram schematically illustrating the configuration of the cutting device according to the present embodiment. Note that, in any of the drawings used in the following description, the same components as those shown in FIG.

  In the cutting device shown in FIG. 2, instead of the switching valve 3 in FIG. 1, a first inflow side on-off valve 30 is provided in the first inflow side water system pipe 4, and a second inflow side water system pipe 6 is Two inflow side on-off valves 31 are provided. Also by this cutting device, the same effect as the cutting device according to the first embodiment can be obtained.

  A third embodiment of the cutting device according to the present invention will be described with reference to FIG. FIG. 3 is a piping diagram schematically illustrating the configuration of the cutting device according to the present embodiment. The cutting device according to the present embodiment is characterized by piping (including a valve / nozzle 11; hereinafter referred to as “downstream piping”) provided on the downstream side of the first tank 5 and the second tank 7. It is provided with a mechanism for preventing residual abrasive grains. The side of the first tank 5 will be described in detail. For the purpose of preventing abrasive grains from remaining in the downstream piping, that is, from the first outflow side water system piping 8 to the nozzle 11, abrasive particles are provided in these downstream piping. A mechanism for supplying water containing no water at high pressure is provided. When abrasive grains remain in the downstream pipe, the resistance in the pipe increases. Therefore, the abrasive grains are likely to be clogged in the downstream side piping, and the operating rate of the cutting device may be reduced. In particular, as in the case of cutting a sealing body formed by collectively sealing a semiconductor chip or the like mounted on a circuit board with a resin, a small diameter abrasive grain is used for the injection port and the small diameter channel. In some cases, the problem of clogging with abrasive grains becomes serious. Therefore, in order to prevent such clogging, it is preferable not to leave abrasive grains in the downstream pipe.

  The cutting apparatus shown in FIG. 1 includes the following components as a system for supplying water containing no abrasive grains to the downstream pipe at a high pressure. Those components relating to the first tank 5 side are as follows. First, on the downstream side of the first inflow side on-off valve 30, the first bypass pipe that connects the first inflow side water system pipe 4 and the first outflow side water system pipe 8 without going through the first tank 5. 32. Next, the first inflow-side water system pipe 4 includes a first tank opening / closing valve 33 provided between the first bypass pipe 32 and the first tank 5. Next, the first outflow side water system pipe 8 includes a first outflow side on-off valve 34 provided between the first bypass pipe 32 and the nozzle system pipe 10. Similarly, a second bypass pipe 35, a second tank opening / closing valve 36, and a second outflow side opening / closing valve 37 are provided as components relating to the second tank 7 side. Since these positions are the same as those on the first tank 5 side, the description thereof is omitted.

  Hereinafter, a method for cutting the sealing body 28 as an object using the cutting apparatus of FIG. 3 will be described. First, an operation of supplying water containing abrasive grains from the first tank 5 to the nozzle 11 to cut the sealing body 28 will be described.

  In this embodiment, the second outflow side on / off valve 37, the second tank on / off valve 36, and the second inflow side on / off valve 31 are all closed, and the first outflow side on / off valve 34 and Both the first tank on-off valve 33 and the first inflow side on-off valve 30 are opened. As a result, the water injected into the first tank 5 at a high pressure from the first inflow-side water system pipe 4 agitates the water containing abrasive grains in the first tank 5 and distributes the abrasive grains uniformly. Then, water containing abrasive grains is pushed out to the first outflow side water system pipe 8. Further, water containing no abrasive grains is supplied to the first outflow side water system pipe 8 through the first bypass pipe 32 at a high pressure, and the negative pressure (negative pressure) generated thereby causes the water from the first tank 5. Water containing abrasive grains is sucked out. By these actions, water containing abrasive grains can be supplied to the nozzle 11 at a high pressure through the first outflow side water system pipe 8 and the nozzle system pipe 10 sequentially. Therefore, water containing abrasive grains can be ejected from the nozzle 11 at a high pressure.

  Secondly, an operation of supplying water containing no abrasive grains to the downstream pipe on the first tank 5 side at a high pressure will be described. This operation needs to be performed for the purpose of preventing abrasive grains from remaining in the downstream piping when the operation of cutting the sealing body 28 is once interrupted.

  In this case, the first outflow side on / off valve 34, the first tank on / off valve 33, and the first inflow side on / off valve 30 are all open, and the high pressure pump 2 is operating. Then, the first tank opening / closing valve 33 is closed. As a result, abrasive particles are contained via the first inflow side on-off valve 30, the first bypass pipe 32, the first outflow side water system pipe 8, the first outflow side on-off valve 34, and the nozzle system pipe 10. No water can be injected from the nozzle 11 at high pressure. Therefore, the abrasive grains remaining in the downstream pipe composed of the first outflow side water system pipe 8, the first outflow side on-off valve 34, the nozzle system pipe 10, and the nozzle 11 are jetted from the nozzle 11 together with the high-pressure water. Is done. By the operation described so far, clogging of abrasive grains in the downstream side pipe is prevented, so that the operating rate of the cutting device is improved.

  As described above, according to this embodiment, a mechanism for supplying water containing no abrasive grains to the downstream pipe at high pressure is provided. Thereby, the residue of the abrasive grain in downstream piping is suppressed. Therefore, clogging of the abrasive grains in the downstream pipe is prevented, so that the operating rate of the cutting device is improved.

  In the present embodiment, the configuration of the valve shown in FIG. 3 is an example, and for example, the following modifications are possible. In this modification, a bypass valve is provided in the first bypass pipe 32 in place of the first inflow side on-off valve 30. Then, the bypass valve is closed, and the first outflow side on-off valve 34 and the first tank on-off valve 33 are both opened. As a result, an operation similar to that of the cutting apparatus of FIG. 2 is possible. When water containing no abrasive grains is supplied to the downstream pipe at a high pressure, the first tank on-off valve 33 is closed and the first outflow-side on-off valve 34 and the bypass valve are turned on. Can also be opened.

  A cutting apparatus according to a fourth embodiment of the present invention will be described with reference to FIG. FIG. 4 is a piping diagram schematically illustrating the configuration of the cutting device according to the present embodiment. In FIG. 4, only the first tank 5 is shown for ease of explanation. The cutting device according to the present embodiment is characterized in that a tank that contains water containing abrasive grains and contains water used for cutting an object and collects the abrasive grains is provided. 1 to 3 (see the abrasive tank 16 in FIG. 3).

  The cutting device shown in FIG. 4 is a system for collecting water containing abrasive grains and used for cutting an object, and a collection tank 38 provided below the fixed base 27 and a sieve ( And a collection pipe 40 for connecting the collection tank 38 and the sieve 39. Here, the water used for the cutting stored in the recovery tank 38 includes water 41 itself, an intra-standard abrasive grain 42 made of abrasive grains having a particle size equal to or smaller than a predetermined value, and particles generated by the cutting. And non-standard particles 43 made of particles having a particle size larger than a predetermined value.

  In addition, as other components constituting the system for collecting used water, a reuse pipe 44 for supplying the non-standard abrasive grains 42 to the first tank 5 and a standard for returning the non-standard particles 43 to the recovery tank 38. A pipe 45 for outer particles and a pump 46 for non-standard particles provided in the pipe 45 for non-standard particles are provided. Further, the recovery tank 38 is provided with a drain pipe 47.

  Further, a bypass valve 48 is provided in the first bypass pipe 32 as a component irrelevant to the system for collecting used water. The bypass valve 48 corresponds to the bypass valve described in the modification of the third embodiment.

  Hereinafter, the operation of the cutting apparatus of FIG. 4 will be described. First, the first outflow side on-off valve 34, the first tank on-off valve 33, and the bypass valve 48 are all opened. As a result, the water injected at a high pressure from the first inflow-side water system pipe 4 into the first tank 5 generates a water flow 49 in the first tank 5. The water stream 49 agitates the water 50 containing abrasive grains to uniformly distribute the abrasive grains, and pushes the water 50 containing abrasive grains into the first outflow side water system pipe 8. Further, water containing no abrasive grains is supplied to the first outflow side water system pipe 8 through the first bypass pipe 32 at a high pressure, and the negative pressure (negative pressure) generated thereby causes the water from the first tank 5. Water 50 containing abrasive grains is sucked out. By these actions, the water 50 containing abrasive grains can be supplied to the nozzle 11 at high pressure through the first outflow side water system pipe 8 and the nozzle system pipe 10 sequentially. Therefore, the water 50 containing abrasive grains can be jetted from the nozzle 11 at a high pressure.

  The operation | movement which accommodates the water used for cutting | disconnection and collect | recovers an abrasive grain in the cutting device of FIG. 4 is demonstrated. First, in an initial state, high ratio water is supplied to the recovery tank 38. As a result, the recovery tank 38 functions as an abrasive system tank (see the abrasive system tank 16 in FIGS. 1 to 3) that supplies high ratio water to the first tank 5.

  Next, water is injected into the first tank 5 from the first inflow side water system pipe 4 at a high pressure. Accordingly, water 50 containing abrasive grains is jetted from the nozzle 11 at a high pressure to cut the sealing body 28. Then, the water 50 containing abrasive grains and used for cutting is stored in the recovery tank 38. The water stored in the recovery tank 38 is pushed out by the pressurized water supplied to the recovery tank 38 by the extrusion pump 17 and supplied to the sieve 39 via the recovery pipe 40. The within-standard abrasive grains 42 screened by the sieve 39 are returned to the first tank 5 together with water via the reuse pipe 44. On the other hand, the non-standard particle 43 screened by the sieve 39 is returned to the recovery tank 38 together with water via the non-standard particle pipe 45 and the non-standard particle pump 46. Since the non-standard particles 43 cannot be used for cutting, if a certain amount of non-standard particles 43 are stored in the recovery tank 38, the non-standard particles 43 are discarded.

  As described above, according to this embodiment, first, the in-standard abrasive grains 42 can be collected and reused. Therefore, the running cost in the cutting device can be reduced. Further, the recovery tank 38 and the abrasive grain tank that supplies the high ratio water to the first tank 5 can be shared. Therefore, the cutting device can be simplified.

  A cutting nozzle used in the fifth embodiment of the cutting apparatus according to the present invention will be described with reference to FIG. FIG. 5A is a partial cross-sectional view showing an enlarged main part of a nozzle used in the cutting apparatus according to the present embodiment, and FIG. 5B is a part showing a further enlarged tip portion of the nozzle. It is sectional drawing.

  As shown in FIG. 5A, the cutting nozzle 11 is fitted to the holder 51, the columnar body 52 fixed inside the holder 51, and the tip of the columnar body 52 inside the holder 51. The support body 53 is formed, and a connecting body 54 and a nozzle chip 55 are integrally fitted inside the support body 53. The columnar body 52 is provided with a channel 56 having a predetermined diameter. The connecting body 54 is provided with a funnel-shaped space 57 that is connected to the flow path 56 and has a tapered shape. The nozzle tip 55 is provided with a small-diameter channel 58 connected to the space 57 and having a constant diameter D. The tip of the nozzle tip 55 protrudes from the tip of the support 53 and the holder 51 by a predetermined amount, and the tip of the small diameter channel 58 forms an injection port 59 consisting of an opening with a diameter D. Here, the holder 51, the columnar body 52, the support body 53, the coupling body 54, and the nozzle chip 55 are made of, for example, stainless steel, ceramics, or the like. An abrasion resistant film 60 is formed on the inner wall of the small diameter channel 58 of the nozzle tip 55. The wear resistant film 60 is formed by a known method such as plasma CVD.

  The first feature of the nozzle 11 shown in FIG. 5 is that the wear-resistant film 60 formed on the inner wall of the small-diameter channel 58 is, for example, a diamond single crystal, a sapphire single crystal, a diamond sintered body, or cubic boron nitride. (CBN) It is comprised with the abrasion-resistant material which consists of a composite material etc. which disperse | distributed the sintered compact, diamond, or cBN in the cemented carbide. Thereby, even when the water pressurized and pressurized and containing the abrasive grains 42 flows through the small-diameter channel 58 at high speed, the wear on the inner wall of the small-diameter channel 58 is reduced.

  The second feature of the nozzle 11 shown in FIG. 5 is that the diameter D of the small diameter channel 58 is determined as follows with respect to the diameter d of the abrasive grains 42. That is, the diameter D of the small-diameter channel 58 is determined so that D ≧ 2dmax with respect to the maximum value dmax in the standard defined for the diameter d of the abrasive grains 42. The reason for determining in this way is that when the D of the small diameter channel 58 is less than twice the maximum value dmax allowed as the diameter d of the abrasive grains 42, the abrasive grains in the small diameter channel 58 or the injection port 59. This is because it is known from experience that 42 is easily clogged. This prevents clogging of the abrasive grains 42 in the small-diameter flow path 58 or the injection port 59, thereby improving the operating rate of the cutting device. In the case of cutting the sealing body (see sealing body 28 in FIGS. 1 to 4), for example, the diameter d of the abrasive grains 42 is 63 μm, which is smaller than the maximum diameter dmax in the standard dmax = 100 μm. The diameter D of the diameter channel 58 is 250 μm.

  Here, the upper limit value of the diameter D of the small diameter channel 58 with respect to the diameter d of the abrasive grains 42 is not particularly defined. The reason is that the diameter D of the small-diameter channel needs to be appropriately increased when the desired cutting width is wide, and therefore it is preferable not to determine the upper limit value of the diameter D. Then, the object can be cut with a wide cutting width by increasing the diameter D of the small-diameter channel according to the wide cutting width.

  The third feature of the nozzle 11 shown in FIG. 5 is that the length L of the small-diameter channel 58 is determined to be 2D ≦ L ≦ 20D with respect to the diameter D. There is the following relationship between the length L and the diameter D in the small-diameter channel 58. First, in the case of 2D> L, since the high-pressure water 29 ejected from the ejection port 59 spreads, there is a problem that the cutting efficiency is lowered and the cutting width is widened. In this case, since the length of the wear-resistant film 60 (the vertical distance in the figure) is short, there is a problem that the life of the nozzle tip 55 is shortened. Next, in the case of L> 20D, there is a problem that the abrasive grains 42 are easily clogged in the small diameter channel 58. In this case, a pressure loss occurs in the small-diameter channel 58, so that there is a problem that cutting efficiency is lowered. From these viewpoints, the length L with respect to the diameter D is determined to be 2D ≦ L ≦ 20D. When the sealing body (see sealing body 28 in FIGS. 1 to 4) is cut, the length L of the small-diameter flow path is determined so that 10D ≦ L ≦ 20D with respect to the diameter D. It is preferable. Specifically, in the small-diameter channel 58, a length L = 4.7 mm is employed for a diameter D = 250 μm.

  The fourth feature of the nozzle 11 shown in FIG. 5 is that the connecting body 54 is provided with a funnel-shaped space 57 that is connected to the flow path 56 and has a tapered shape, and the tapered tip. Is connected to the small-diameter channel 58. In other words, a funnel-shaped space 57 that connects the flow path 56 and the small-diameter flow path 58, which is tapered toward the small-diameter flow path 58, is provided. Thereby, from the flow path 56 to the small diameter flow path 58, the water containing the abrasive grains 42 that is pressurized at a high pressure can flow without receiving a large resistance.

  As described above, according to this embodiment, since the wear resistant film 60 is first formed on the inner wall of the small-diameter channel 58, the wear on the inner wall is reduced. Therefore, since the life of the nozzle tip 55 is extended, the labor required for the management and maintenance of the cutting device is reduced. In addition, since the diameter D of the small-diameter channel 58 is appropriately determined with respect to the diameter d of the abrasive grains 42, clogging of the abrasive grains 42 in the small-diameter channel 58 or the injection port 59 is prevented. Further, since the length L of the small diameter channel 58 is appropriately determined with respect to the diameter D, the clogging of the abrasive grains 42 in the small diameter channel 58 is suppressed without shortening the life of the nozzle tip 55. , Cutting efficiency is kept good. Further, since the tapered space 57 is provided from the flow path 56 toward the small diameter flow path 58, the water containing the abrasive grains 42 flows without receiving a large resistance.

  In the present embodiment, the member itself in which the small-diameter channel 58 is formed, that is, the nozzle tip 55 itself may be made of a wear-resistant material made of a diamond sintered body or the like. Even in this case, since the inner wall of the small-diameter channel 58 is made of the wear-resistant material, the wear of the inner wall of the small-diameter channel 58 is reduced.

  A fixing base, which is a receiving mechanism used in Embodiment 6 of the cutting device according to the present invention, will be described with reference to FIGS. FIG. 6 is a perspective view schematically showing a configuration of a fixing base and a sealing body used in the cutting apparatus according to the present embodiment. FIG. 7A is a cutaway view showing the fixed base of FIG. 6 along the Y direction at the convex portion, and FIG. 7B is a cutaway view showing the fixed base of FIG. 6 along the X direction at the groove portion.

  As shown in FIG. 6, the sealing body 28 that is an object to be cut includes a circuit board 61 such as a lead frame and a printed board, and a sealing resin 62. Further, cutting lines 63 and 64 orthogonal to each other are virtually provided, and each of the regions 65 partitioned by the cutting lines 63 and 64 corresponds to a package of an electronic component which is a finished product.

  As shown in FIG. 6, the fixed base 66 used in this embodiment includes the following components. First, a convex portion 67 provided corresponding to each region 65 of the sealing body 28, and groove portions 68X and 68Y provided between the convex portions 67 along the X direction and the Y direction, respectively. . Also, a base portion 69 provided so as to connect the lower portions of the convex portions 67 along the Y direction, and a frame portion 70 provided so as to connect the base portions 69 at both ends of each base portion 69 (one Only the part is shown). As a result, the groove 68X is periodically closed by the base portion 69 at the lower portion thereof. Further, the groove 68 </ b> Y passes through the fixed base 66. In FIG. 6, the frame portion 70 is only partially drawn, but is actually provided so as to surround the four circumferences of the fixed base 66. This frame part 70 is water used for cutting and prevents water containing abrasive grains from scattering.

  In each convex part 67 and the frame part 70 as necessary, a recess 71 is provided on the upper surface, and a through hole 72 is provided in the center of the recess 71. These through holes 72 are connected to a suction mechanism (both not shown) by piping. And in the groove part extended along one direction among each groove part 68X, 68Y, for example, the groove part 68X extended in a X direction, the protection member 74 which consists of an elongate plate-shaped member so that the upper surface 73 of the base part 69 may be covered, respectively. Is provided. Each of the protection members 74 is detachable from the groove 68X, and is made of a material having a hardness higher than that of abrasive grains used in cutting. Examples of such materials include diamond single crystals, sapphire single crystals, diamond sintered bodies, cubic boron nitride (cBN) sintered bodies, composite materials in which diamond or cBN is dispersed in a cemented carbide, and the like. It is done.

  Hereinafter, the function of the protection member 74 when cutting the sealing body 28 will be described with reference to FIGS. 6 and 7. First, the sealing body 28 is adsorbed by the intake air 75 through the through holes 72 and the depressions 71 in this order, and this allows the sealing body 28 to be fixed to the fixed base 66, more precisely to each convex portion 67 and some frame portions 70. Fix it.

  Next, a case where the sealing body 28 is cut along the X direction will be described. In this case, as shown in FIG. 7A, the high-pressure water 29 that is abrasive-containing water and used for cutting collides with the protective member 74 in all portions of the groove 68X. However, it does not collide with the upper surface 73 of the base portion 69. This prevents the base 69 of the fixed base 66 from being worn.

  Next, a case where the sealing body 28 is cut along the Y direction will be described. In this case, the sealing body 28 can be cut by changing the moving direction of the nozzle 11 using the same fixing base 66. As shown in FIG. 7B, the high-pressure water 29 used for cutting flows as follows. First, in a portion where the groove portion 68Y is sandwiched between the convex portions 67, the high-pressure water 29 passes through the groove portion 68Y and flows below the fixed base 66. Therefore, the high-pressure water 29 does not collide with the fixed base 66 at all. Further, at the portion where the groove portion 68Y intersects the groove portion 68X, the high-pressure water 29 collides with the protective member 74 but does not reach the upper surface 73 of the base portion 69, as in the case where the sealing body 28 is cut along the X direction. Do not collide. Accordingly, when the sealing body 28 is cut along the X direction and the Y direction using the same fixing base 66, the wear of the fixing base 66 is prevented. Moreover, if the sealing body 28 is cut | disconnected continuously, the protection member 74 will wear out gradually. In this case, the protection member 74 may be replaced as appropriate. Thereby, the sealing body 28 can be cut | disconnected, without the fixed base 66 being worn out.

  As described above, according to the present embodiment, the sealing body 28 can be cut along the X direction and the Y direction using the same fixing table 66. In other words, in the case of cutting the sealing body 28 along the X direction and the Y direction, two types of fixing bases 66 are prepared, the fixing bases 66 are replaced, and the sealing body 28 is aligned. It is unnecessary to do. Therefore, when the sealing body 28 is cut along the intersecting two-direction cutting lines, the cost of the fixing base 66 is reduced, the work efficiency is lowered, and the dimensional accuracy (position, angle, etc.) of cutting is reduced. Decrease is prevented.

  Hereinafter, a modification of the present embodiment will be described with reference to FIG. FIG. 8 is a perspective view schematically showing a configuration of a modified example of the fixing base used in the cutting apparatus according to this modified example and a sealing body. The feature of this modification is that the frame portion 70 shown in FIG. 7 is composed of two detachable members. The two members are a lower frame portion 76 and a wall member 77 shown in FIG. In this modification, when the protection member 74 is replaced, the wall member 77 is removed upward (Z direction) in the figure. Moreover, the wall member 77 provided in the outer periphery of the fixed stand 66 so that attachment or detachment is possible prevents the water which was used for the cutting | disconnection and which contains an abrasive grain from scattering. According to the present modification, the entire fixing base 66 can be easily processed as compared with the configuration shown in FIG. 7, so that the price of the fixing base 66 can be reduced. Further, the operation of inserting and fitting the protective member 74 in the groove 68X becomes easy.

  In the description of the present embodiment (including the modification), the protective member 74 is made of a material having a hardness higher than that of the abrasive grains used for cutting. However, the protection member 74 may be made of a material having a hardness lower than that of the abrasive grains. Examples of such materials include metal materials such as stainless steel, resin materials such as urethane resin, and ceramic materials such as alumina. These materials are inferior in wear resistance as compared to the diamond sintered body described in the examples. As a result, the low-hardness protective member 74 made of these materials wears in a shorter time than the protective member 74 made of a diamond sintered body or the like. However, the low hardness protective member 74 can be obtained at a low price. Therefore, the low-hardness protective member 74 can be appropriately replaced and used according to the type of abrasive grains and cutting conditions. In short, it is sufficient that the water containing abrasive grains hits the protective member 74 so that the water containing abrasive grains does not hit the base portion 69.

  In addition, each protection member 74 that is detachable is inserted into each groove 68X for use. However, the present invention is not limited thereto, and a removable protective member 74 having a comb shape connected at one end may be inserted into the groove 68X and used. In addition, a removable protective member 74 having a cross beam shape (# shape) can be used by being inserted into each of the groove portions 68X and 68Y. The collective protective member having these shapes can be manufactured, for example, by etching a metal material.

  Further, the protective member 74 may be provided along any of two different directions (X direction and Y direction in FIGS. 6 to 8) in the grid-like cutting lines 63 and 64. In this case, all the convex portions 67 are connected by the base portion 69, and the upper surface 73 of the base portion 69 is provided by a protective member extending in the X direction and the Y direction, respectively, or in a cross beam shape (# shape). All are covered by the provided protective member. Therefore, since the high-pressure water does not collide with the upper surface 73 of the base portion 69, the base portion 69 is prevented from being worn.

  Further, in the sealing body 28 that is the object to be cut, the cutting lines 63 and 64 extending in the two intersecting directions may be in the form of an orthogonal grid as shown in FIGS. Also good. The two cutting lines 63 and 64 may be a combination of a curve and a straight line, or a combination of curves. In any case, the groove portions 68X and 68Y are provided below the cutting lines 63 and 64 extending in the respective directions so as to include the cutting lines, and the groove portions 68X and 68Y cover and protect the base portion 69. The member 74 should just be provided. Thereby, the feature of the water jet that cuts along a cutting line made of a curve can be utilized.

  In each of the embodiments described so far, the semiconductor chips mounted on the circuit board are collectively sealed with a resin to form a sealing body, and this sealing is performed along orthogonal grid-like cutting lines. The case of cutting the body has been described. The present invention is not limited to this, and it goes without saying that the present invention is applied when cutting other objects. In addition to the purpose of cutting, the present invention may be applied for the purpose of disassembling in order to dispose of unnecessary materials, in addition to completing the product.

  In addition, the water containing abrasive grains may contain other substances for some purpose. Examples of the other substance include a cleaning agent.

  Moreover, the ratio of the abrasive grain contained in this with respect to the water containing an abrasive grain was detected using the sensor which measures a weight. This ratio may be detected using other types of sensors that detect characteristics other than weight. For such sensors, the ratio of abrasive grains in each tank, optical characteristics of water containing abrasive grains (the amount of transmitted light, scattered light, reflected light, etc.), chemical characteristics (pH, etc.), electrical characteristics, etc. Examples include sensors that detect based on (electric conductivity, etc.), acoustic characteristics (such as attenuation of ultrasonic waves), and the like.

  In addition, two tanks, a first tank 5 and a second tank 7, were provided as a tank group consisting of a plurality of tanks for storing water containing abrasive grains. Not limited to this, a tank group consisting of N or more tanks (N is an integer satisfying N ≧ 3) is provided, and a part of each tank, that is, one to (N−1) tanks. Can also be designated as the supply tank.

  Moreover, when specifying a part of each tank as a supply tank, it specified based on the ratio of the abrasive grain in each tank. However, the present invention is not limited to this, and another tank may be designated after a certain period of time has elapsed using a certain tank as a supply tank. In this case, the abrasive grains are replenished as follows. First, the amount of water (including abrasive grains) that has flowed out of the supply tank during the predetermined time is detected or calculated. Next, based on the amount, the amount of abrasive grains flowing out from the supply tank is calculated. Next, an amount of abrasive grains corresponding to the calculated amount of abrasive grains is supplied to a replenishment tank that has been a supply tank until then.

  In addition, the present invention is not limited to the above-described embodiments, and may be arbitrarily combined, changed, or selected as necessary without departing from the spirit of the present invention. It can be done.

FIG. 1 is a piping system diagram schematically showing a configuration of a cutting apparatus according to Embodiment 1 of the present invention. FIG. 2 is a piping diagram schematically illustrating the configuration of the cutting device according to the second embodiment of the present invention. FIG. 3 is a piping diagram schematically illustrating the configuration of the cutting device according to the third embodiment of the present invention. FIG. 4 is a piping diagram schematically showing a configuration of a cutting device according to Embodiment 4 of the present invention. FIG. 5A is a partial cross-sectional view showing an enlarged main part of a nozzle used in a cutting apparatus according to Embodiment 5 of the present invention, and FIG. 5B further enlarges the tip of the nozzle. FIG. FIG. 6 is a perspective view schematically showing a configuration of a fixing base and a sealing body used in the cutting apparatus according to the present invention. FIG. 7A is a cutaway view showing the fixed base of FIG. 6 along the Y direction at the convex portion, and FIG. 7B is a cutaway view showing the fixed base of FIG. 6 along the X direction at the groove portion. FIG. 8 is a perspective view schematically showing a configuration of a modified example of the fixing base used in the cutting device according to the present invention and a sealing body.

1 Water source 2 High-pressure pump (pump)
3 Switching valve (tank switching means)
4 1st inflow side water system piping (water system piping)
5 1st tank 6 2nd inflow side water system piping (water system piping)
7 Second tank 8 First outflow side water system piping (water system piping)
9 Second outflow side water system piping (water system piping)
DESCRIPTION OF SYMBOLS 10 Nozzle system piping 11 Nozzle 12,13 High ratio water 14,15 Low ratio water 16 Abrasive grain tank 17 Extrusion pump 18 Abrasive grain supply pipe (abrasive grain pipe)
19 1st abrasive grain supply valve (abrasive system switching means)
20 Second abrasive grain supply valve (abrasive grain switching means)
21 Return pipe (Abrasive system piping)
22 1st return valve (abrasive system switching means)
23 Second return valve (abrasive system switching means)
24 Water injection valve 25 First sensor (sensor)
26 Second sensor (sensor)
27 Fixing base 28 Sealed body (object)
29 High-pressure water 30 First inflow side on-off valve (tank switching means)
31 2nd inflow side on-off valve (tank switching means)
32 First bypass piping (bypass piping)
33 First tank on-off valve (tank switching means, bypass piping switching means)
34 1st outflow side on-off valve (tank switching means)
35 Second bypass piping (bypass piping)
36 Second on-off valve for tank (tank switching means, bypass piping switching means)
37 Second outlet side on-off valve (tank switching means)
38 Recovery tank (recovery means, storage means, abrasive tank)
39 Sieve (sieving means)
40 Pipe for recovery 41 Water 42 Abrasive grains within standard, abrasive grains 43 Non-standard grains 44 Reuse pipe (supply means)
45 Pipe for non-standard particle 46 Pump for non-standard particle 47 Drain pipe 48 Valve for bypass 49 Water flow 50 Water containing abrasive grains 51 Holder 52 Columnar body 53 Support body 54 Connecting body 55 Nozzle tip 56 Flow path 57 Space 58 Small diameter flow path 59 Injecting Port 60 Abrasion Resistant Film 61 Circuit Board 62 Sealing Resin 63, 64 Cutting Line 65 Region 66 Fixing Base 67 Protruding Portion 68X, 68Y Groove 69 Base Foundation 70 Frame 71 Depression 72 Through Hole 73 Upper Surface 74 Protection Member 75 Intake 76 Lower frame part 77 Wall member CNT control part

Claims (10)

A cutting device for cutting an object by spraying water containing abrasive grains from a nozzle at high pressure,
A pump for applying high pressure to water containing the abrasive grains;
A tank group comprising a plurality of tanks each storing water containing the abrasive grains;
A nozzle system pipe for supplying water containing the abrasive grains to the nozzle;
A water system pipe connecting the pump and the nozzle system pipe through each tank of the tank group;
Tank switching means provided in the water piping;
A controller for designating a part of each tank as a supply tank for supplying water containing the abrasive grains to the nozzle;
Under normal conditions, each tank has low ratio water and high ratio water located below the low ratio water in contact with each other.
In the high ratio water in the normal state, the abrasive grains are present in a higher ratio than in the low ratio water,
In the operation started from the normal state, each water system pipe supplies water at a high pressure to the lower part in each tank,
The water supplied to the lower part inside each tank stirs the water containing the abrasive grains, and extrudes the water containing the abrasive grains from each tank and supplies the nozzles with high pressure,
The said control part operates the said tank switching means so that the water containing the said abrasive grain may be supplied to the said nozzle from the specified said supply tank, The cutting device characterized by the above-mentioned. The cutting device according to claim 1, wherein
A sensor group comprising sensors for detecting the ratio of the abrasive grains to the water containing the abrasive grains in the respective tanks;
An abrasive tank that stores high-ratio water containing the abrasive at a high ratio;
Abrasive piping connecting the tank and the abrasive tank respectively.
With an abrasive grain system switching means provided in the abrasive grain system piping,
Based on the ratio of the abrasive grains detected in each tank, the control unit supplies to which tank of the tanks the amount of the high ratio water from the abrasive tank. And the abrasive grain system switching means is operated based on the determination, and any one of the tanks to which the high ratio water is not supplied is designated as the supply tank. A cutting device characterized by operating the device. The cutting device according to claim 2, wherein
The control unit, based on the ratio of the abrasive grains detected in each tank, the tank switching means and the tank switching means so that the abrasive grain ratio in each tank is 5% by volume or more and 70% by volume or less. A cutting apparatus characterized by operating an abrasive grain system switching means. The cutting device according to claim 2 or 3,
Recovery means for recovering water containing the abrasive grains and used for cutting the object;
Sieving means for sieving the abrasive grains from the water collected by the collecting means;
Supply means for supplying the screened abrasive grains to the tanks;
A storage means for storing the high ratio water supplied with the abrasive grains,
The cutting device characterized in that the recovery means, the storage means, and the abrasive grain tank are common. In the cutting device in any one of Claims 1-4,
A bypass pipe that connects the pump and the nozzle system pipe without passing through the tanks in each of the water system pipes;
With a bypass pipe switching means provided in each of the water system pipes,
The control unit, after finishing the operation of supplying water containing the abrasive grains from the designated supply tank to the nozzle, does not pass through the supply tank and does not supply the abrasive-free water from the nozzle. The cutting device characterized in that the bypass pipe switching means is operated so as to inject at the same time. A cutting method for cutting an object by spraying water containing abrasive grains from a nozzle at high pressure,
Supplying water containing the abrasive grains to a tank group consisting of a plurality of tanks;
Detecting each ratio of the abrasive grains to the water containing the abrasive grains in each tank of the tank group;
Determining whether the ratio of the abrasive grains detected in each tank conforms to a predetermined standard;
Designating a part of the tanks, in which the ratio of the abrasive grains conforms to the standard, to a supply tank that supplies water containing the abrasive grains to the nozzle;
Uniformly distributing the abrasive grains in water containing the abrasive grains stored in the supply tank;
Applying high pressure to water containing the abrasive grains stored in the supply tank;
Spraying water containing the abrasive grains subjected to high pressure from the nozzle toward the object,
In a normal state where the abrasive grains are precipitated in each of the plurality of tanks, each tank has low ratio water and high ratio water located below the low ratio water in contact with each other.
In the high ratio water in the normal state, the abrasive grains are present in a higher ratio than in the low ratio water,
In the step of uniformly distributing the abrasive grains in the operation started from the normal state and the step of applying high pressure to the water containing the abrasive grains, water is supplied at a high pressure to the lower part in each tank. A cutting method characterized by uniformly distributing the abrasive grains and applying high pressure to water containing the abrasive grains. The cutting method according to claim 6, wherein
Designating one tank determined as not conforming to the standard in the determining step as a tank requiring replenishment;
Calculating the amount of the abrasive to be injected into the replenishment tank based on the ratio of the abrasive grains in the replenishment tank;
And a step of injecting high ratio water containing the abrasive grains at a high ratio into the replenishment tank in an amount corresponding to the calculated amount of abrasive grains. In the cutting method in any one of Claim 6 or 7,
The cutting method according to claim 1, wherein the standard is 5% by volume or more. In the cutting method in any one of Claim 7 or 8,
Recovering the water containing the abrasive grains and used for cutting the object; and
Sieving the abrasive grains from the recovered water;
And a step of supplying the screened abrasive grains to the high-ratio water. In the cutting method in any one of Claims 6-9,
After the step of injecting, the cutting method characterized by injecting water containing no abrasive grains from the nozzle at a high pressure without going through the supply tank.

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