JP5083822B2 - Semiconductor device - Google Patents

Description

  The present invention relates to a semiconductor device, for example, a high withstand voltage power semiconductor device having high heat resistance.

  Wide-gap semiconductor materials such as silicon carbide (hereinafter referred to as SiC) have superior physical properties such as a larger energy gap and a breakdown electric field strength that is about one order of magnitude larger than silicon (hereinafter referred to as Si). Therefore, it is suitable for use in a power semiconductor device with high heat resistance and high withstand voltage.

  Conventionally, in a high withstand voltage semiconductor device using SiC, for example, a SiC semiconductor element having a high reverse withstand voltage is housed in a metal package, and this package is filled with an insulating gas such as sulfur hexafluoride gas. ing. Thereby, the insulation in the surrounding space between the electrodes to which the high voltage of the SiC semiconductor element is applied is enhanced.

  Here, the sulfur hexafluoride gas has an excellent insulating property as an insulating gas, but it must be avoided from the viewpoint of preventing global warming. In particular, in order to obtain high insulation, it is necessary to set the pressure of sulfur hexafluoride gas filled in the semiconductor device to about 2 atm. Therefore, when the temperature rises during use of the semiconductor device, this pressure becomes 2 atmospheres or more. Therefore, there is a risk of explosion or gas leakage unless the package of the semiconductor device is made quite robust.

  On the other hand, Patent Document 1 (Japanese Patent Laid-Open No. 2006-206721) proposes a material having an excellent insulating property that is used to maintain a high insulating property of a semiconductor device with a substance other than the above-described sulfur hexafluoride gas. Yes. This material is an addition of an organosilicon polymer having a crosslinked structure of siloxane (Si-O-Si conjugate) and an organosilicon polymer having a linear linkage structure of siloxane linked by a siloxane bond. It is a synthetic polymer compound formed into a three-dimensional structure by linking with covalent bonds generated by the reaction. This synthetic polymer compound is applied so as to cover the entire semiconductor element (semiconductor chip) and is cured by heating from room temperature to about 200 ° C., thereby maintaining the high insulation of the semiconductor element and increasing the withstand voltage. be able to.

  Patent Document 1 discloses a semiconductor device shown in FIG. This semiconductor device has a thermosetting coating 102 in which a synthetic polymer compound is applied to a semiconductor element 101 and then coated and further thermally cured. In this semiconductor device, in order to prevent surface oxidation of the thermosetting coating 102, the metal cap 103 is attached to the support 104 and welded in a nitrogen atmosphere, and the internal space 105 is filled with nitrogen gas. In FIG. 3, 106 and 110 are terminals, 107 and 111 are insulators that insulate the terminals 106 and 110 and the support 104, and 108 and 112 are lead wires that connect the semiconductor element 101 to the terminals 106 and 110. .

  By the way, in the semiconductor device, when the metal cap 103 and the support 104 are welded, welding is incomplete if a slight amount of the synthetic polymer compound forming the coating 102 adheres to the welded portion 109. Then, air flows into the internal space 105 filled with nitrogen gas. When the semiconductor device is used for a long time in this state, the coating 102 which is a thermosetting material inside the device is oxidized and deteriorated, and the insulating property of the coating 102 is lowered. Further, since the metal cap 103 and the support 104 require a special jig when welding in a nitrogen atmosphere, the welding work requires a lot of time and cost.

  On the other hand, if a semiconductor device is molded using a general epoxy resin used in transistors, ICs, etc., a metal cap is not necessary, but epoxy resin is not flexible at high temperatures, and when it exceeds 200 ° C., glass Will become harder. For this reason, when the temperature of the semiconductor element returns from the high temperature state at the time of energization to the room temperature state at the time of off, a large number of cracks are generated inside the epoxy resin, cannot withstand a high electric field, and the electric resistance is not good .

In contrast, the synthetic polymer compound described above retains flexibility even at high temperatures, but when this synthetic polymer compound is cured and a semiconductor device is molded, the linear expansion coefficient between the synthetic polymer compound and the support is determined. Due to this difference, there is a problem that the mold peels off when the temperature rises and falls repeatedly.
JP 2006-206721 A JP 2006-283012 A

  SUMMARY OF THE INVENTION An object of the present invention is to provide a semiconductor device that can achieve high heat resistance and high voltage resistance and can improve the adhesion between the covering portion of the semiconductor element and the support of the semiconductor element.

In order to solve the above problems, a semiconductor device of the present invention includes a semiconductor element,
A metal support for supporting the semiconductor element;
An electrical connection for electrically connecting the semiconductor element to an external device;
A coating portion made of a silicon-containing curable composition that covers the semiconductor element and covers at least a portion of the electrical connection portion and a portion of the support;
The silicon-containing curable composition is
Contains at least one silicon-containing polymer of the following (A) component, (B) component and (C) component, and contains the following (D) component, (E) component and (F) component When the content of the component (F) is 40 to 70% by volume filling rate and the component (C) is not contained, silicon containing both the component (A) and the component (B) Containing curable composition,
The said coating | coated part is the hardened | cured material which heat-cured the said silicon-containing curable composition, The linear expansion coefficient of the said hardened | cured material is 50-200 ppm / degrees C, The semiconductor device characterized by the above-mentioned.

Component ^{_{(A): Si-CH = CH 2,}} Si-R 1 -CH = CH 2 and ^{Si-R 1 -OCOC (R 2} ) = CH 2 [ wherein, ^{R 1} represents an alkylene group having 1 to 9 carbon atoms Or a phenylene group, and R ² is hydrogen or a methyl group]. One or two or more reactive groups (A ′) selected from the group consisting of a group consisting of Si—O—Si bonds are provided at one place. Silicon-containing polymer having a molecular weight of 1,000,000 to 1,000,000 (excluding those further having Si-H groups)
Component (B): A silicon-containing polymer having Si—H groups, having one or more cross-linked structures by Si—O—Si bonds, and having a molecular weight of 1,000,000 to 1,000,000 (however, the above reactive groups ( (Excluding those with A '))
Component (C): One or more of the above reactive groups (A ′), a Si—H group, one or more bridged structures by Si—O—Si bonds, and a molecular weight of 100 Silicon-containing polymer that is ~ 1 million
Component (D): a curing reaction catalyst that is a platinum-based catalyst
Component (E): Iron group-containing complex
(F) Component: Ceramic Particles In the semiconductor device of the present invention, a covering portion that covers the semiconductor element and covers at least a part of the electrical connection portion is made of a silicon-containing curable composition. This silicon-containing curable composition contains a silicon-containing polymer having a crosslinking structure of siloxane (Si—O—Si conjugate) at one or more locations and having a molecular weight of 1,000,000 to 1,000,000, and is cured. Ceramic particles are blended as a filler in a silicon-containing curable composition containing a platinum-based catalyst as a reaction catalyst and an iron group-containing complex. Thereby, according to the semiconductor device of this invention, even if it uses the said coating | coated part at high temperature (for example, 200 degreeC or more), a crack etc. do not generate | occur | produce and high dielectric strength can be achieved. In addition, the coating portion has a low coefficient of linear expansion due to the blending of the ceramics. For example, the difference in the coefficient of linear expansion from a support made of a metal such as copper and supporting a semiconductor element is reduced. The adhesion between the part and the support can be improved.

  The ceramic particles preferably have a particle size of 1 to 50 μm, more preferably 5 to 25 μm. Moreover, it is preferable that the volume filling rate of the ceramics which occupies for the said silicon-containing curable composition which comprises the said coating | coated part is 40 to 70%, and 50 to 60% is more preferable. Thereby, the linear expansion coefficient of the hardened | cured material formed by hardening | curing the said silicon-containing curable composition can be 50-200 ppm / degreeC, More preferably, it can be 100-150 ppm / degreeC. If the linear expansion coefficient of the cured product obtained by curing the silicon-containing curable composition that forms the covering portion is less than 50 ppm / ° C., the adhesion between the semiconductor element and the support deteriorates and acts as an insulating material. Disappear. On the other hand, if the linear expansion coefficient of a cured product obtained by curing the silicon-containing curable composition forming the covering portion is greater than 200 ppm / ° C., a hardness that can protect the semiconductor device cannot be obtained.

  The platinum catalyst of the component (D) is a catalyst that contains one or more metals of platinum, palladium, and rhodium and promotes the hydrosilylation reaction, and known ones can be used. Examples of the platinum catalyst used as a catalyst for hydrosilylation include platinum-carbonylvinylmethyl complex, platinum-divinyltetramethyldisiloxane complex, platinum-cyclovinylmethylsiloxane complex, platinum-octylaldehyde complex, etc. The compounds in which platinum in these catalysts is replaced with palladium or rhodium, which are also platinum-based metals, may be used, and these may be used alone or in combination of two or more. From the viewpoint of curability, those containing platinum are preferred, and specifically, platinum-carbonylvinylmethyl complexes are particularly preferred. In addition, so-called Wilkinson catalysts containing the above platinum-based metals, such as chlorotristriphenylphosphine rhodium (I), are also included in the platinum catalyst of component (D).

Further, the iron group-containing complex of the component (E) is not particularly limited as long as it is a complex containing any one or more of iron, ruthenium and osmium. Specific examples thereof include iron (III) acetylacetonate, Hemin derivatives, iron (III) diphenylpropane dionate, iron (III) acrylate, iron (III) meso-tetraphenylporphyrin chloride, iron (III) trifluoropentanedionate, iron carbonyl complex, ruthenium carbonyl complex, etc. . Iron (III) acetylacetonate is preferred from the viewpoints of heat resistance, electrical properties, curability, mechanical properties, storage stability and handling properties.
Examples of the ceramic particles of the component (F) include colloidal silica, silica filler, silica gel, minerals such as mica and montmorillonite, metal oxides such as aluminum oxide, zinc oxide, and silicon dioxide, silicon nitride, aluminum nitride, Examples thereof include ceramics such as boron nitride and silicon carbide. Aluminum oxide is preferable from the viewpoint of heat resistance.

  Further, according to the present invention, since the cured product has a linear expansion coefficient of 50 ppm / ° C. or more, the adhesiveness between the semiconductor element and the metal support is good, and the cured product has a linear expansion coefficient of 200 ppm / ° C. Therefore, hardness sufficient to protect the semiconductor device can be obtained.

In one embodiment of the semiconductor device, the covering portion is the first covering portion,
Covering the semiconductor element and covered with the first covering portion, and containing at least one silicon-containing polymer of the components (A), (B) and (C), and And a silicon-containing curable composition containing both the component (A) and the component (B) when the component (D) and the component (E) are contained and the component (C) is not contained. It has a 2nd coating | coated part.

  According to the semiconductor device of this embodiment, the semiconductor element can be insulated by the second covering portion having high heat resistance and high voltage resistance and high flexibility.

  In one embodiment, the semiconductor element is a SiC semiconductor element made of SiC, which is a wide-gap semiconductor, or a GaN semiconductor element made of GaN, which is a wide-gap semiconductor.

  According to the semiconductor device of this embodiment, it is possible to improve the adhesion between the first covering portion for molding the SiC or GaN wide gap semiconductor element and the support and realize a semiconductor device having high heat resistance and high voltage resistance. it can.

  In one embodiment, the silicon-containing curable composition of the first covering portion may contain ceramic particles having a volume filling rate of 40 to 70% from the viewpoint of curability and handling properties. desirable.

  According to the semiconductor device of the present invention, the curing reaction catalyst contains a silicon-containing polymer having one or more cross-linked structures of siloxane (Si—O—Si conjugate) and having a molecular weight of 1,000,000 to 1,000,000. High heat resistance by covering a semiconductor element with a coating part made of a silicon-containing curable composition containing a platinum-based catalyst and an iron group-containing complex and containing insulating ceramics as a filler Thus, a molded semiconductor device having high withstand voltage can be realized.

  Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments. Note that the present invention is not limited to these embodiments.

(First embodiment)
FIG. 1 is a sectional view of a semiconductor device according to a first embodiment of the present invention. The semiconductor device according to the first embodiment is a SiC-GTO thyristor device having a breakdown voltage of 5 kV, and includes a SiC GTO (gate turn-off) thyristor element 1 as a semiconductor element.

  The anode electrode 2 of the GTO thyristor element 1 is connected to the upper end of the anode terminal 5 by an aluminum lead wire 3. The gate electrode 6 of the thyristor element 1 is connected to the upper end of the gate terminal 8 by a gold lead wire 7. The lead wires 3, 7 and the anode terminal 5 and the gate terminal 8 are electrical connection portions.

  The cathode electrode 10 is attached to the copper support 11 of the package, which is a cathode terminal, while maintaining electrical connection using high temperature solder of gold silicon. The anode terminal 5 and the gate terminal 8 are fixed through the support 11 while maintaining insulation between the anode terminal 5 and the gate terminal 8 with the respective insulating materials 12 and 13.

  The first silicon-containing curable composition to be the covering portion 15 as the second covering portion is applied so as to cover the entire surface of the GTO thyristor element 1 and the vicinity of the connecting portion between the lead wires 3 and 7 and the GTO thyristor element 1. Has been. The first silicon-containing curable composition used as the covering portion 15 was synthesized by the synthesis step 1 to the synthesis step 5 described below. In the synthesis steps 1 to 5, “part” represents part by weight. The covering portion 15 is obtained by curing the first silicon-containing curable composition at 250 ° C. for 3 hours.

  Furthermore, in the first embodiment, a second covering portion 16 is formed so as to cover the entire surface of the covering portion 15 and the entire surfaces of the anode terminal 5 and the gate terminal 8 protruding from the upper surface 11A of the support 11. A silicon-containing curable composition is applied. The second silicon-containing curable composition used as the first covering portion 16 is composed of alumina fine particles having a particle diameter of 20 μm as an insulating ceramic in the first silicon-containing curable composition at a volume filling rate of 50%. It is blended. The 1st coating | coated part 16 is obtained by making this 2nd silicon-containing curable composition make hardening reaction at 200 degreeC for 6 hours. The linear expansion coefficient of the second silicon-containing curable composition after curing is 150 ppm / ° C.

  [Synthesis step 1] After 75 parts of phenyltrimethoxysilane and 25 parts of methyltriethoxysilane were mixed, 86 parts of 0.4% phosphoric acid aqueous solution was added, and this reaction solution was neutralized with aqueous sodium hydroxide solution. And stirred at 60 ° C. for 30 minutes. After the reaction, ethanol and water were distilled off while adding 900 parts of toluene (azeotropic) to obtain a first silicon-containing polymer precursor. As a result of analysis by GPC (gel permeation chromatography), the weight average molecular weight (Mw) of the obtained first silicon-containing polymer precursor was 5000.

  [Synthesis Step 2] 90 parts of dichlorodimethylsilane and 9 parts of dichlorodiphenylsilane were mixed and dropped into 100 parts of ion-exchanged water. After removing the aqueous layer from this reaction solution, polymerization was carried out at 250 ° C. for 2 hours while still distilling off the remaining solvent (water). 20 parts of pyridine was added to the reaction solution obtained, and 20 parts of dichlorodimethylsilane was further added thereto, followed by stirring for 30 minutes. Thereafter, the resulting solution was depressurized while being heated at 250 ° C. to remove low molecular weight components and pyridine hydrochloride, thereby obtaining a second silicon-containing polymer precursor. As a result of analysis by GPC, the molecular weight (Mw) of the second silicon-containing polymer precursor was 50,000.

  [Synthesis Step 3] Using toluene as a solvent, 5 parts of the first silicon-containing polymer precursor obtained in Synthesis Step 1 above, 10 parts of pyridine, and 1.5 parts of trimethylchlorosilane were added, and 30 parts at room temperature. Stir for minutes. To this solution, 100 parts of the second silicon-containing polymer precursor obtained in the above synthesis step 2 was added, copolymerization was further performed for 4 hours while stirring, and ion exchange water was added to stop the copolymerization reaction. . The third silicon-containing polymer precursor was obtained by removing pyridine hydrochloride and the like by washing with water. As a result of analysis by GPC, the molecular weight (Mw) was 92,000.

[Synthesis Step 4] Using toluene as a solvent, 50 parts of the third silicon-containing polymer precursor obtained in Synthesis Step 3 and 5 parts of pyridine were added and mixed uniformly, and then the mixture was divided in half. . One part of the above mixture was added with 5 parts of dimethylvinylchlorosilane, stirred at room temperature for 30 minutes, and further at 70 ° C. for 30 minutes, and then washed with ion-exchanged water to remove pyridine hydrochloride, and a silicon-containing polymer ( A) was obtained. The obtained silicon-containing polymer (A) had a Si—CH═CH ₂ group, had a crosslinked structure with Si—O—Si bonds at more than one site, and had a molecular weight (Mw) of 93,000. In addition, 5 parts of dimethylchlorosilane was added to the other of the above mixture, and after stirring at room temperature for 30 minutes and further at 70 ° C. for 30 minutes, pyridine hydrochloride was removed by washing with ion-exchanged water to remove the silicon-containing polymer. (B) was obtained. The obtained silicon-containing polymer (B) had Si—H groups, had one or more cross-linked structures with Si—O—Si bonds, and had a molecular weight (Mw) of 93,000.

  [Synthesis step 5] A mixture of 50 parts of the silicon-containing polymer (A) obtained in the synthesis step 4 and 50 parts of the silicon-containing polymer (B) is added to a curing reaction catalyst (platinum catalyst). D) 0.005 part of a platinum-carbonylvinylmethyl complex as D) and 0.01 part of iron (III) acetylacetonate as an iron group-containing complex (E) are mixed to obtain the first silicon-containing curable composition. Obtained.

  According to this embodiment, the second silicon-containing curable composition serving as the first covering portion 16 is composed of 50% volume of alumina fine particles having a particle diameter of 20 μm as ceramics in the first silicon-containing curable composition. It is blended at the filling rate. And this 2nd silicon-containing curable composition was made into the 1st coating | coated part 16 by carrying out hardening reaction at 200 degreeC for 6 hours. The linear expansion coefficient of the second silicon-containing curable composition after curing is 150 ppm / ° C. According to this embodiment, even if the first covering portion 16 is used at a high temperature (for example, 200 ° C. or higher), cracks and the like do not occur, and a high dielectric strength can be achieved. Further, the first covering portion 16 has a smaller coefficient of linear expansion due to the blending of the ceramics, and there is a difference in coefficient of linear expansion from the support 11 made of a metal such as copper and supporting the semiconductor element 1. Since it becomes small, the adhesiveness of the 1st coating | coated part 16 and the support body 11 can be improved.

  The silicon-containing polymers (A) and (B) contained in the first and second silicon-containing curable compositions may be those having the following compositions.

Silicon-containing polymer (A) component: Si—CH═CH ₂ , Si—R ¹ —CH═CH ₂ and Si—R ¹ —OCOC (R ² ) ═CH ₂ [wherein R ¹ has 1 to ¹ carbon atoms] 9 is an alkylene group or a phenylene group, and R ² is hydrogen or a methyl group] and has one or more reactive groups (A ′) selected from the group consisting of A silicon-containing polymer having one or more structures and a molecular weight of 1,000,000 to 1,000,000 (except for those having a Si-H group).

  Silicon-containing polymer (B) component: a silicon-containing polymer having Si—H groups, having one or more cross-linked structures by Si—O—Si bonds, and having a molecular weight of 100 to 1,000,000 (however, Excluding those having the reactive group (A ′)).

  Moreover, in the said embodiment, although the said 1st, 2nd silicon-containing curable composition contained the said (A) component and (B) component, in addition to the said (A) component and (B) component, the following (C) You may contain the component shown.

Component (C): One or more of the above reactive groups (A ′), a Si—H group, one or more bridged structures by Si—O—Si bonds, and a molecular weight of 100 The silicon-containing polymer which is ˜1 million Further, the component (A) and the component (C) among the components (A), (B) and (C) may be contained. Moreover, you may contain the said (B) component and the said (C) component among the said (A) component, (B) component, and (C) component. Moreover, you may contain only (C) component among the said (A) component, (B) component, and (C) component. However, when not containing the said (C) component, it is necessary to contain both the said (A) component and (B) component.

  Moreover, 1-50 micrometers is preferable and, as for the particle size of the ceramic particle which the 2nd silicon containing curable composition which comprises the said 1st coating part 16 contains, 5-25 micrometers is more preferable. Moreover, it is preferable that the volume filling rate of the ceramic particle which occupies for said 2nd silicon containing curable composition is 40 to 70%, and 50 to 60% is more preferable. Thereby, the linear expansion coefficient of the hardened | cured material formed by hardening | curing the said 2nd silicon containing curable composition can be 50-200 ppm / degreeC, More preferably, it can be 100-150 ppm / degreeC. When the linear expansion coefficient of the cured product obtained by curing the second silicon-containing curable composition forming the first covering portion 16 is less than 50 ppm / ° C., the GTO thyristor element 1 which is a semiconductor element and the metal Adhesiveness with a certain support 11 is deteriorated, and it does not function as an insulating material. On the other hand, when the linear expansion coefficient of the cured product obtained by curing the second silicon-containing curable composition forming the first covering portion 16 is greater than 200 ppm / ° C., a hardness sufficient to protect the semiconductor device is obtained. Absent.

  Moreover, the gas barrier property of the said 2nd silicon-containing curable composition improves because the 2nd silicon-containing curable composition which comprises the said 1st coating | coated part 16 contains insulating ceramic fine particles. That is, the second silicon-containing curable composition is less susceptible to oxidative degradation.

(Second Embodiment)
Next, a second embodiment of the semiconductor device of the present invention will be described. This 2nd Embodiment differs in the composition of the silicon-containing curable composition which forms the 2nd coating | coated part 15 and the 1st coating | coated part 16 in above-mentioned 1st Embodiment from the above-mentioned 1st Embodiment. Therefore, in the second embodiment, points different from the first embodiment will be described.

  In the second embodiment, the second covering portion 15 is formed of a third silicon-containing curable composition instead of the first silicon-containing curable composition. This third curable genus was synthesized by the synthesis step 6 described below. In this synthesis step 6, “parts” represents parts by weight. The covering portion 15 is obtained by causing the third silicon-containing curable composition to undergo a curing reaction at 250 ° C. for 3 hours.

  Furthermore, in the second embodiment, a fourth covering portion 16 is formed so as to cover the entire surface of the covering portion 15 and the entire surfaces of the anode terminal 5 and the gate terminal 8 protruding from the upper surface 11A of the support 11. A silicon-containing curable composition is applied. The fourth silicon-containing curable composition used as the first covering portion 16 is compounded with the third silicon-containing curable composition with alumina fine particles having a particle diameter of 20 μm as ceramic particles at a volume filling rate of 40%. doing. The 4th silicon containing curable composition is made to harden at 200 degreeC for 6 hours, and the 1st coating | coated part 16 is obtained. The linear expansion coefficient of the fourth silicon-containing curable composition is 180 ppm / ° C.

  [Synthesis step 6] 50 parts of the silicon-containing polymer (A) obtained in the synthesis step 4 described in the first embodiment and 50 parts of the silicon-containing polymer (B) are mixed and cured. The above third silicon-containing curability is prepared by mixing 0.01 part of a platinum-carbonylvinylmethyl complex as a reaction catalyst (D) and 0.01 part of iron (III) acetylacetonate as an iron group-containing complex (E). A composition was obtained.

(First comparative example)
Next, a first comparative example of the present invention will be described. This 1st comparative example is only the point which replaced the said 1st coating | coated part 16 in the above-mentioned 1st Embodiment with the said 2nd silicon-containing curable composition, and was formed with the 5th silicon-containing curable composition. This is different from the first embodiment described above. Therefore, in the first comparative example, differences from the above-described first embodiment will be described.

  The fifth silicon-containing curable composition constituting the first covering portion 16 of the first comparative example is composed of 20% alumina fine particles having a particle size of 20 μm as ceramics in the first silicon-containing curable composition. It is compounded by volume filling rate. The first covering portion 16 is obtained by curing the fifth silicon-containing curable composition at 200 ° C. for 6 hours. The linear expansion coefficient of the fifth silicon-containing curable composition is 300 ppm / ° C.

(Second comparative example)
Next, a second comparative example of the present invention will be described with reference to the sectional view of FIG. As shown in FIG. 2, the second comparative example is different from the first embodiment described above in that a covering portion 21 is provided instead of the covering portions 15 and 16 of the first embodiment described above.

  That is, in the second comparative example, the covering portion 15 in the first embodiment is formed so as to cover the entire surface of the GTO thyristor element 1 and the anode terminal 5 and the gate terminal 8 protruding from the upper surface 11A of the support 11. A first silicon-containing curable composition was applied. The first silicon-containing curable composition is subjected to a curing reaction at 250 cc for 3 hours to obtain the covering portion 21. The first silicon-containing curable composition has a linear expansion coefficient of 400 ppm / ° C.

(Heat resistance test)
Next, a heat resistance test was performed on the semiconductor devices according to the first and second embodiments and the first and second comparative examples described above. Moreover, it replaced with the coating | coated part 21 of the 2nd comparative example, made it the 3rd comparative example which used the hardened | cured material obtained from the commercial epoxy resin as a coating | coated part, and also performed the heat resistance test about this 3rd comparative example. This heat resistance test is a 100-cycle thermal cycle test in which each semiconductor device is heated in air to 200 ° C. and left for 20 minutes, then cooled to 0 ° C. and left for 20 minutes. And by observing the peeling of the covering portion and the first covering portion.

  The results of this heat resistance test are shown in FIG. As shown in FIG. 4, in the first and second embodiments of the semiconductor device of the present invention, the first and second coating portions are not peeled off after the above-mentioned 100 cycles, whereas the first and second embodiments. In the comparative example and the third comparative example, peeling of the covering portion after the above 100 cycles occurred. In particular, in the third comparative example, cracks occurred in the covering portion. Therefore, according to the first and second embodiments in which the first covering portion 16 is made of the second and third silicon-containing curable compositions having a linear expansion coefficient smaller than 200 ppm / ° C., the linear expansion coefficient is 200 ppm / It was found that the heat resistance was higher than that of the first and second comparative examples having a coating part (300 ppm / ° C.) and a coating part (400 ppm / ° C.) larger than ° C.

  In the first and second embodiments, the GTO thyristor element made of SiC is provided as the semiconductor element. However, another semiconductor element made of SiC may be provided, and the semiconductor element is made of GaN or another wide gap semiconductor. A semiconductor element made of a semiconductor other than a wide gap semiconductor may be provided.

  The present invention can be used for a wide gap semiconductor device having high withstand voltage and high heat resistance, and is useful as a high withstand voltage power semiconductor device having high heat resistance as an example.

It is sectional drawing which shows the SiC-GTO thyristor apparatus which is 1st Embodiment of the semiconductor device of this invention. It is sectional drawing which shows the SiC-GTO thyristor apparatus which is the 2nd comparative example of the semiconductor device of this invention. It is sectional drawing of the conventional SiC diode apparatus. It is a figure which shows the result of the heat resistance test in the said 1st, 2nd embodiment and a 1st, 2nd, 3rd comparative example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 GTO thyristor apparatus 2 Anode electrode 3, 7 Lead wire 5 Anode terminal 6 Gate electrode 8 Gate terminal 10 Cathode electrode 11 Support body 12,13 Insulation material 15 2nd coating | coated part 16 1st coating | coated part

Claims (3)

A semiconductor element;
A metal support for supporting the semiconductor element;
An electrical connection for electrically connecting the semiconductor element to an external device;
A coating portion made of a silicon-containing curable composition that covers the semiconductor element and covers at least a portion of the electrical connection portion and a portion of the support;
The silicon-containing curable composition is
Contains at least one silicon-containing polymer of the following (A) component, (B) component and (C) component, and contains the following (D) component, (E) component and (F) component When the content of the component (F) is 40 to 70% by volume filling rate and the component (C) is not contained, silicon containing both the component (A) and the component (B) Containing curable composition,
The said coating | coated part is the hardened | cured material which heat-cured the said silicon-containing curable composition, The linear expansion coefficient of the said hardened | cured material is 50-200 ppm / degrees C, The semiconductor device characterized by the above-mentioned.
Component ^{_{(A): Si-CH = CH 2,}} Si-R 1 -CH = CH 2 and ^{Si-R 1 -OCOC (R 2} ) = CH 2 [ wherein, ^{R 1} represents an alkylene group having 1 to 9 carbon atoms Or a phenylene group, and R ² is hydrogen or a methyl group]. One or two or more reactive groups (A ′) selected from the group consisting of a group consisting of Si—O—Si bonds are provided at one place. Silicon-containing polymer having a molecular weight of 1,000,000 to 1,000,000 (excluding those further having Si-H groups)
Component (B): A silicon-containing polymer having Si—H groups, having one or more cross-linked structures by Si—O—Si bonds, and having a molecular weight of 1,000,000 to 1,000,000 (however, the above reactive groups ( (Excluding those with A '))
Component (C): One or more of the above reactive groups (A ′), a Si—H group, one or more bridged structures by Si—O—Si bonds, and a molecular weight of 100 Silicon-containing polymer that is ~ 1 million
Component (D): a curing reaction catalyst that is a platinum-based catalyst
Component (E): Iron group-containing complex
Component (F): Ceramic particles The semiconductor device according to claim 1,
The covering portion is a first covering portion,
Covering the semiconductor element and covered with the first covering portion, and containing at least one silicon-containing polymer of the components (A), (B) and (C), and And a silicon-containing curable composition containing both the component (A) and the component (B) when the component (D) and the component (E) are contained and the component (C) is not contained. A semiconductor device comprising a second covering portion. The semiconductor device according to claim 1 or 2,
A semiconductor device, wherein the semiconductor element is a SiC semiconductor element made of SiC, which is a wide gear semiconductor, or a GaN semiconductor element made of GaN, which is a wide gear semiconductor.

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