JP5071327B2 - Method for manufacturing feedthrough capacitor - Google Patents

Description

  The present invention relates to a method for manufacturing a feedthrough capacitor.

  The feedthrough capacitor includes first and second internal electrodes alternately stacked with a dielectric layer sandwiched in the capacitor body, and the first and second internal electrodes (penetration electrodes) are respectively provided in the capacitor body. And penetrates from one to the other of a pair of side surfaces facing each other.

According to the manufacturing method described in Patent Document 1 below, an insulating layer in which first electrode patterns to be a plurality of first through electrodes are arranged and a second electrode to be a plurality of second through electrodes A dielectric layer on which patterns are arranged is prepared, and laminated so that the first electrode pattern and the second electrode pattern face each other, thereby forming a laminated body. Thereafter, the multilayer body is cut vertically and horizontally to form a plurality of capacitor bodies.
Japanese Patent Laid-Open No. 10-256082

  In the feedthrough capacitor described in Patent Document 1, the end of the first feedthrough electrode is exposed at the longitudinal center portion of the long side surface of the capacitor body, and the first terminal electrode is disposed at the longitudinal center portion of the long side surface. Is formed and connected to the first through electrode. For this reason, in the manufacturing process, when the laminate is cut off, the position at which the end of the first through electrode is exposed is shifted from the center to the left and right on the long side surface of the capacitor body. If the first terminal electrode is formed at the center of the long side surface of such a capacitor element body, there is a possibility that a connection failure between the first terminal electrode and the first through electrode may occur.

  In addition, when the laminated body is cut off, the shape of the first and second through electrodes included in each capacitor body may vary, or the opposing area may vary, and the characteristics of the through capacitors may vary. is there.

  Therefore, an object of the present invention is to provide a method of manufacturing a feedthrough capacitor that can easily detect a cutting deviation in a manufacturing process.

  The feedthrough capacitor manufacturing method of the present invention includes a first feedthrough electrode and a second feedthrough electrode that are alternately stacked with a dielectric layer in between, and a second feedthrough at both ends of the same layer as the second feedthrough electrode. A method of manufacturing a feedthrough capacitor comprising a capacitor body having a pair of dummy electrodes arranged with a through electrode interposed therebetween, wherein the first and second electrodes are first and second through electrodes and dummy electrodes. A pattern forming step of arranging a pattern on the green sheet, a stacking step of stacking a plurality of green sheets on which the first to third electrode patterns are formed to obtain a stack, and a plurality of stacks parallel to each other A cutting step of cutting the first cutting line and a plurality of second cutting lines perpendicular to the first cutting line and parallel to each other in the stacking direction to obtain a plurality of substantially rectangular parallelepiped green chips; By heat treating the chip Forming a terminal electrode on the obtained capacitor body, and in the pattern forming step, a first row in which the first electrode patterns are arranged and a second row in which the second electrode patterns are arranged, Are alternately arranged along the first cutting line, and the first cutting line is located between the first column and the second column, respectively. The first electrode pattern is formed so that the end portions of the first electrode patterns adjacent to each other in the direction of the first cutting line are connected to each other in a band shape so as to extend from one of the cutting lines to the other. In the second row, a second electrode pattern is formed so as to extend from one of the adjacent first cutting lines to the other, and the ends of the first electrode patterns are connected to each other, The third electrode pattern in the form of a strip that connects the connecting portions adjacent to each other in the direction of the cutting line Forming the cutting line, in the laminating step, characterized in that the first electrode pattern and the second electrode patterns are stacked green sheets so as to overlap.

  In the feedthrough capacitor manufacturing method of the present invention, in the pattern forming step, the end portions of the first electrode patterns are connected to each other, and the connecting portions adjacent to each other in the direction of the second cutting line are connected. A third electrode pattern is formed on the second cutting line. Therefore, when a plurality of green sheets are stacked and cut along the first and second cutting lines, the third electrode pattern is cut on the side surface of the green chip formed by the first cutting lines. As a result, the divided end faces are exposed. The divided end surfaces are exposed at both ends of the side surface of the green chip. When the cut along the second cutting line is shifted, the width of the end face exposed at one end of the side surface of the green chip is widened, and the width of the end face exposed at the other end is narrowed. For this reason, the shift | offset | difference of the cutting | disconnection along a 2nd cutting line can be detected easily. Further, it is possible to detect a cutting deviation before forming the terminal electrode.

  In the pattern forming step, the first column in which the first electrode patterns are arranged and the second column in which the second electrode patterns are arranged alternately are arranged, and the first electrode pattern in the first column is The second electrode pattern in the second column is formed from one of the adjacent second cutting lines to the other, and the second electrode pattern in the second column is formed from one first cutting line to the other first cutting line. Is formed across the cutting line. Thereby, the electrode pattern used as the 1st and 2nd penetration electrode is formed in one green sheet. Therefore, since a laminated body can be formed with one type of green sheet, the manufacturing process can be facilitated.

  Preferably, in the pattern forming step, in the second electrode pattern, the width of the central portion is made wider than the width in the first cutting line direction at both ends in contact with the first cutting lines on both sides.

  In this case, the second through electrode has a wide region. Therefore, in the feedthrough capacitor, the facing area between the second through electrode and the first through electrode is increased, and the capacitance can be increased.

  Preferably, in the pattern forming step, a first electrode pattern is formed that protrudes toward the first cutting line located on both sides of the first electrode pattern and has a protruding portion spaced from the first cutting line, In the terminal formation step, the terminal electrode is electrically connected to the first through electrode formed from the portion including the first electrode pattern on the side surface of the capacitor body formed by cutting along the second cutting line. A first terminal electrode is formed so as to be connected, and a second penetration formed from a portion including the second electrode pattern on a side surface of the capacitor body formed by cutting along the first cutting line A second terminal electrode is formed so as to be electrically connected to the electrode, and further, it is determined whether or not a short circuit occurs between the first terminal electrode and the second terminal electrode.

  In the pattern forming step, the substantially central portion of the first electrode pattern protrudes toward the first cutting lines on both sides and is separated from the first cutting lines, so that the first penetration of the capacitor element body The electrode has a protruding portion protruding toward the side surface formed by the first cutting line. For this reason, when the cutting along the first cutting line is shifted, the projecting portion of the first through electrode and the second terminal electrode come into contact with each other, and the first terminal electrode and the second terminal electrode are short-circuited. . Therefore, it is possible to detect a deviation in cutting along the first cutting line by determining whether or not a short circuit occurs between the first terminal electrode and the second terminal electrode.

  Preferably, in the pattern formation step, one end of the second electrode pattern on the first cutting line side exceeds one first cutting line, and the other end on the first cutting line side is the other end. A second electrode pattern is formed so as to exceed the first cutting line.

  In this case, even if the cutting along the first cutting line is slightly deviated, the second electrode pattern is cut at both ends by cutting along the first cutting line, and the end face is securely on the side surface of the green chip. Exposed. Therefore, the end surface of the second through electrode is reliably exposed on the side surface of the capacitor body and functions as the through electrode, and connection failure with the second terminal electrode can be prevented.

  Moreover, the part of the edge part side divided | segmented by the 1st cutting line among 2nd electrode patterns remains in the layer of the 1st electrode pattern of an adjacent green chip as a dummy electrode. Since the end surface of the end portion is exposed on the side surface of the capacitor element body, the end surface is in close contact with the second terminal electrode formed on the side surface, thereby improving the adhesion between the capacitor element body and the second terminal electrode. Can be made.

  Preferably, the interval between the first cutting lines is set wider than the interval between the second cutting lines, and in the terminal forming step, a side surface of the capacitor element body formed by cutting along the second cutting line as a terminal electrode The first terminal electrode is formed so as to cover the capacitor, and the second terminal electrode is formed on the side surface of the capacitor body formed by cutting along the first cutting line.

  In this case, the end portion of the first electrode pattern and the end portion of the divided portion of the third electrode pattern are exposed on the side surface of the green chip formed by cutting along the second cutting line. By the heat treatment, the first electrode pattern becomes a part of the first through electrode, and the portion of the third electrode pattern that is divided and remains in the first electrode pattern layer is the lead-out portion of the first through electrode It becomes. Accordingly, by setting the interval between the first cutting lines wider than the interval between the second cutting lines, the width of the side surface of the green chip (capacitor body) formed by cutting along the second cutting line is wide. Thus, the width of the first through electrode exposed on the side surface is also increased. Therefore, the width of the connection portion between the first through electrode and the first terminal electrode can be increased. Therefore, low ESL can be easily realized.

  According to the method for manufacturing a feedthrough capacitor of the present invention, it is possible to easily detect a cutting deviation.

  The best mode for carrying out the present invention will be described below in detail with reference to the accompanying drawings. In the description of the drawings, the same reference numerals are assigned to the same elements, and duplicate descriptions are omitted.

  FIG. 1 is a schematic perspective view of a feedthrough capacitor. The feedthrough capacitor 1 includes a substantially rectangular parallelepiped capacitor body 2, two first terminal electrodes 3 and 3 formed on the surface of the capacitor body 2, and two second terminal electrodes 4 and 4. It is prepared for. The capacitor body 2 has short side surfaces 2a and 2a facing each other, long side surfaces 2b and 2b facing each other, and main surfaces 2c and 2c facing each other. The short side surface 2 a is a surface perpendicular to the longitudinal direction of the capacitor body 2.

  The first terminal electrode 3 is formed so as to cover the short side surfaces 2a, 2a of the capacitor body 2 facing each other. One first terminal electrode 3 is formed over the long side surfaces 2b, 2b of the capacitor body 2 and the region on the one short side surface 2a side of the main surfaces 2c, 2c. The other first terminal electrode 3 is formed over the long side surfaces 2b and 2b of the capacitor body 2 and the region on the other short side surface 2a side of the main surfaces 2c and 2c.

  The second terminal electrode 4 is formed in a strip shape so as to extend from one main surface 2c to the other main surface 2c at substantially the center of the long side surfaces 2b and 2b. The second terminal electrode 4 is insulated from the first terminal electrode 3 on the surface of the capacitor body 2. The first and second terminal electrodes 3 and 4 are made of a material such as Cu, Ni, or Ag—Pd, and plated with Ni—Sn or the like.

  FIG. 2 is a schematic diagram showing a cross-sectional structure of the feedthrough capacitor. The capacitor body 2 includes a plurality of (four in this embodiment) first through electrodes 6 and a plurality (four in this embodiment) of second through electrodes 7 sandwiching a plurality of dielectric layers 8. It has the structure laminated | stacked alternately. The main surface 2c of the capacitor body 2 is a surface parallel to each layer. The capacitor body 2 has a dummy electrode 9 located in the same layer as the second through electrode 7.

In the capacitor body 2, the dielectric layers 8 adjacent in the stacking direction are integrated to such an extent that the boundary cannot be visually recognized. The dielectric layer 8 is formed of a dielectric material such as a BaTiO ₃ system, a Ba (Ti, Zr) O ₃ system, or a (Ba, Ca) TiO ₃ system. The first and second through electrodes 6 and 7 and the dummy electrode 9 are made of a material such as Ni, for example.

  The shapes of the first and second through electrodes 6 and 7 and the dummy electrode 9 will be described with reference to FIGS. FIG. 3 is a schematic diagram showing the first through electrode. FIG. 4 is a schematic diagram showing a second through electrode and a dummy electrode.

  As shown in FIG. 3, the first through electrode 6 has a main portion 6a and a lead portion 6b that are integrally formed. The main portion 6a is formed in a substantially rectangular shape, and penetrates from one short side surface 2a of the capacitor body 2 to the other short side surface 2a. The lead portion 6b is a portion where the width increases along the short side surface 2a on both end sides of the first through electrode 6. That is, the lead portion 6 b is a rectangular portion located at the four corners of the rectangular dielectric layer 8.

  The end of the first through electrode 6 is exposed from one end on the short side surface 2 a of the capacitor body 2 to the other end. Therefore, the 1st penetration electrode 6 is connected with the 1st terminal electrode 3 formed so that the short side surface 2a might be covered.

  Since the first through electrode 6 includes not only the main portion 6a but also the lead portion 6b, the contact area with the first terminal electrode 3 formed on the short side surface 2a increases. For this reason, the reliability of the electrical connection between the first through electrode 6 and the first terminal electrode 3 is improved. Further, the first terminal electrode 3 has higher adhesion to the first through electrode 6 than the dielectric layer 8. For this reason, the adhesiveness between the capacitor element body 2 and the first terminal electrode 3 can be increased by increasing the area of the first through electrode 6 exposed on the short side surface 2 a of the capacitor element body 2.

  As shown in FIG. 4, the second through electrode 7 and the pair of dummy electrodes 9 and 9 are arranged in the same layer. The second through electrode 7 includes a main portion 7a and a pair of lead portions 7b that are integrally formed. The main portion 7 a is formed in a substantially rectangular shape and is disposed at a substantially central portion of the dielectric layer 8.

  One of the two lead portions 7b is a portion that is led out from the central portion of the long side of the main portion 7a to one long side surface 2b of the capacitor body 2, and its end is in the longitudinal direction of the long side surface 2b. It is exposed at the center. The other lead portion 7b is a portion that is led out from the central portion of the long side of the main portion 7a to the other long side surface 2b of the capacitor body 2, and its end portion is exposed at the central portion in the longitudinal direction of the long side surface 2b. ing.

  That is, the 2nd penetration electrode 7 is formed in the shape of an approximately cross, and has penetrated from one long side 2b to the other long side 2b. The main portion 7a is a region extending in the direction in which the short side surface 2a faces, and is wider in the direction in which the short side surface 2a faces than the lead portion 7b.

  In addition, one lead portion 7b of the second through electrode 7 is in close contact with the second terminal electrode 4 formed on one long side surface 2b of the capacitor body 2, and the other lead portion 7b It is in close contact with the second terminal electrode 4 formed on the side surface 2b. That is, the second through electrode 7 and the second terminal electrode 4 are electrically connected.

  The pair of dummy electrodes 9 are disposed at both ends of the same layer with the second through electrode 7 interposed therebetween. The dummy electrodes 9, 9 are formed in a band shape and are spaced apart from the second through electrode 7. One dummy electrode 9 is formed from one long side surface 2b to the other long side surface 2b along one short side surface 2a side of the dielectric layer 8. For this reason, the end of one dummy electrode 9 is exposed at one short side surface 2a and one short side surface 2a side of the long side surface 2b. The exposed end portion is covered with the first terminal electrode 3 formed on one short side surface 2a, and contributes to improving the adhesion between the capacitor element body 2 and the first terminal electrode 3.

  Similarly, the other dummy electrode 9 is formed from the one long side surface 2b to the other long side surface 2b along the other short side surface 2a side of the dielectric layer 8, and is formed on the other short side surface 2a. The first terminal electrode 3 is covered and contributes to improving the adhesion between the capacitor body 2 and the first terminal electrode 3. Note that the width dimension of the dummy electrode 9 (dimension in the facing direction of the short side surface 2a of the capacitor body 2) is the width dimension of the lead portion 6b of the first through electrode 6 (the facing direction of the short side surface 2a of the capacitor body 2). The dummy electrode 9 and the lead portion 6b overlap each other when viewed from the stacking direction.

  In the first through electrode 6 and the second through electrode 7, the main portion 6 a of the first through electrode 6 and the main portion 7 a of the second through electrode 7 are opposed to each other with the dielectric layer 8 interposed therebetween, and the capacitance Form. In particular, the length of the main portion 7 a of the second through electrode 7 in the short direction (the dimension in the opposing direction of the long side surface 2 b of the capacitor body 2) is the short direction of the main portion 6 a of the first through electrode 6. Of the capacitor element body 2 (dimensions in the opposing direction of the long side surface 2b of the capacitor body 2) and overlap each other.

  In the capacitor element body 2, the short side surface 2a, the long side surface 2b, and the main surface 2c are orthogonal to each other. In the capacitor body 2, the first and second through electrodes 6, 7 and the dummy electrode 9 ideally pass through the center of the capacitor body 2 and are parallel to the short side surfaces 2 a, 2 a. They are formed symmetrically with respect to each other and arranged symmetrically, and are formed symmetrically with respect to a plane passing through the center of the capacitor body 2 and parallel to the long side surfaces 2b, 2b.

  The feedthrough capacitor 1 described above is mounted such that either one of the main surfaces 2c faces another component (for example, a circuit board or an electronic component). For example, the first terminal electrode 3 is connected to the signal line on the circuit board, and the second terminal electrode 4 is connected to the ground line on the circuit board.

  With reference to FIG. 5, the manufacturing method of the feedthrough capacitor according to the present embodiment will be described. FIG. 5 is a flow chart showing the manufacturing process of the feedthrough capacitor according to this embodiment. The feedthrough capacitor manufacturing method according to the present embodiment includes a preparation step S1, a pattern formation step S2, a lamination step S3, a cutting step S4, a firing (heat treatment) step S5, and a terminal formation step S6. Hereinafter, each step will be described.

In the preparation step S1, a plurality of green sheets to be the dielectric layer 8 are prepared. First, a ceramic paste is obtained by mixing and kneading an organic vehicle or the like with a BaTiO ₃ based, Ba (Ti, Zr) O ₃ based, or (Ba, Ca) TiO ₃ based dielectric material. This ceramic paste is applied onto a PET film by a doctor blade method or the like to form a green sheet.

  In the pattern forming step S <b> 2, first to third electrode patterns to be the first and second through electrodes 6, 7 and the dummy electrode 9 are arranged and formed on the green sheet. The first to third electrode patterns are formed by screen printing an electrode paste on a green sheet.

  In the stacking step S3, a plurality of green sheets on which the first to third electrode patterns are formed are stacked and pressed from the stacking direction to form a stacked body.

  In the cutting step S4, the stacked body is cut to form a plurality of substantially rectangular parallelepiped green chips. The cutting is performed along a plurality of first cutting lines parallel to each other on the main surface of the green sheet and a plurality of second cutting lines perpendicular to the first cutting lines and parallel to each other.

  In the firing step S5, the green chip is subjected to binder removal processing, and then the green chip is fired to obtain the capacitor element body 2. By this heat treatment, the green sheet becomes the dielectric layer 8, the electrode pattern becomes the first and second through electrodes 6, 7 and the dummy electrode 9, and the capacitor body 2 is obtained.

  In the terminal forming step S6, the first terminal electrode 3 is formed on the short side surface 2a of the capacitor body 2, and the second terminal electrode 4 is formed on the long side surface 2b. A conductive paste is applied to the short side surfaces 2a and 2a of the capacitor body 2 so as to cover the entire surface, and a conductive paste is applied to the long side surfaces 2b and 2b in a strip shape at the center in the longitudinal direction. Then, the applied conductive paste is baked and further plated to form the first and second terminal electrodes 3 and 4. Thus, the feedthrough capacitor 1 is formed.

  With reference to FIG. 6, the shape of the 1st-3rd electrode patterns 16, 17, and 19 formed in pattern formation process S2 is demonstrated. The first to third electrode patterns 16, 17, 19 are formed with reference to the first and second cutting lines L 1, L 2 set on the green sheet 18. The interval between the first cutting lines L1 is narrower than the interval between the second cutting lines L2.

  The first electrode pattern 16 is a portion that becomes the main portion 6 a of the first through electrode 6. The second electrode pattern 17 is a portion that becomes the second through electrode 7. The third electrode pattern 19 is a portion that becomes the lead portion 6 b of the dummy electrode 9 and the first through electrode 6. For this reason, either one of the first electrode pattern 16 and the second electrode pattern 17 is formed in each square formed by the first cutting line L1 and the second cutting line L2. .

  The first column A in which the first electrode patterns 16 are arranged and the second column B in which the second electrode patterns 17 are arranged are alternately formed. A first cutting line L1 is located between the first column A and the second column B, respectively. The first electrode pattern 16 and the second electrode pattern 17 are spaced apart from each other.

  The first electrode pattern 16 is formed from one side of the adjacent second cutting line L2 to the other side. The end portions 16a of the first electrode patterns 16 adjacent in the direction of the first cutting line L1 are connected to each other, and the connecting portion 16b in which the end portions 16a are connected to each other is formed in a band shape.

  The second electrode pattern 17 is formed so as to extend from one of the adjacent first cutting lines L1 to the other. Further, the second electrode pattern 17 is formed in a cross shape with a central portion having a region 17a having a wide width in the direction of the first cutting line L1. The width of the portion extending in the direction of the first cutting line L1 (dimension in the direction of the second cutting line L2) is equal to the width of the first electrode pattern 16 (dimension in the direction of the second cutting line L2). It is about the same.

  The third electrode pattern 19 is formed integrally with the first electrode pattern 16, and is formed in a strip shape so as to connect the connecting portion 16b of the first electrode pattern 16 in the direction of the second cutting line L2. The third electrode pattern 19 is formed on the second cutting line L2, and is formed so as to connect the connecting portions 16b adjacent in the direction of the second cutting line L2. The third electrode pattern 19 is arranged between the second electrode patterns 17 arranged in the direction of the first cutting line L1, and is arranged apart from the second electrode pattern 17.

  By forming the first to third electrode patterns 16, 17, and 19 as described above, a lattice-like pattern is formed by the first electrode pattern 16 and the third electrode pattern 19, and the lattice pattern First, the second electrode pattern 17 is arranged.

  As shown in FIG. 6, in the stacking step S3, the first electrode pattern 16 and the second electrode pattern 17 overlap the green sheet 18 on which the first to third electrode patterns 16, 17, and 19 are formed. The laminated body 10 is formed by laminating as described above. That is, the green sheets 18 that are stacked by the interval of the first cutting lines L1 are stacked with an offset. As a result, the first electrode pattern 16 and the second electrode pattern 17 face each other.

  In the cutting step S4, when the stacked body 10 is cut along the first and second cutting lines L1 and L2, a green chip is formed. On the green chip 12, first electrode patterns 16 and second electrode patterns 17 are alternately stacked. Further, the third electrode pattern 19 is cut in half by the second cutting line L2, and the portion 19a that becomes the dummy electrode 9 and the leading portion of the first through electrode 6 are cut by the first cutting line L1. It is divided into a portion 19b to be 6b.

  FIG. 7 is a diagram showing the long side surface 12b of the green chip 12 formed by cutting along the first cutting line L1. The short side surface 12a of the green chip 12 is a cut surface formed by cutting along the second cutting line L2. The short side surface 12a and the long side surface 12b of the green chip 12 are surfaces that become the short side surface 2a and the long side surface 2b of the capacitor body 2, respectively.

  The end portion of the second electrode pattern 17 is exposed at the central portion in the longitudinal direction of the long side surface 12b. Cut surfaces of the portions 19a and 19b of the third electrode pattern 19 are exposed at both ends of the long side surface 12b in the longitudinal direction. In the actual green chip 12, since the green sheet 18 has a relatively white color and the first to third electrode patterns 16, 17, and 19 have a relatively black color, they are exposed on the long side surface 12b. The end portions of the second electrode pattern 17 and the end portions of the portions 19a and 19b of the third electrode pattern 19 can be visually recognized.

  When cutting along the second cutting line L <b> 2 in the cutting step S <b> 4, cutting is performed along the center of the third electrode pattern 19. Therefore, the width dimension G1 on one side and the width dimension G2 on the other side of the portions 19a, 19b of the third electrode pattern 19 exposed on the long side surface 12b of the green chip 12 are approximately the same. The width dimensions G1 and G2 are dimensions in the opposing direction of the short side surface 12a of the green chip 12.

  However, when the cutting along the second cutting line L2 is shifted (in the direction of the first cutting line L1), one of the width dimensions G1 and G2 of the portions 19a and 19b exposed on the long side surface 12b becomes large. The other becomes smaller. For example, the cutting deviation may be determined by comparing the size relationship between the width dimension G1 and the width dimension G2, or by comparing a predetermined value such as a design value with the width dimensions G1, G2. Cutting deviation may be determined. Thereby, the shift | offset | difference of the cutting | disconnection along the 2nd cutting line L2 can be detected easily.

  As described above, in the feedthrough capacitor manufacturing method according to the present embodiment, in the pattern formation step S2, the first row A in which the first electrode patterns 16 are arranged and the second row in which the second electrode patterns 17 are arranged. Are alternately arranged along the first cutting line L1, and the first cutting line L1 is located between the first column A and the second column B, respectively. In column A, the end portions 16a of the first electrode patterns 16 that are adjacent to each other in the direction of the first cutting line L1 are connected to each other so as to extend from one of the adjacent second cutting lines L2. The first electrode pattern 16 is formed so as to form a band, and in the second row B, the second electrode pattern 17 is formed so as to extend from one of the adjacent first cutting lines L1 to the other, This is a connecting portion 16b in which the end portions 16a of the electrode pattern 16 are connected to each other. To form a third electrode pattern 19 of the strip connecting the connecting portions 16b adjacent to each other in the direction of the second cutting line L2 on the second cutting line L2.

  For this reason, when the plurality of green sheets 18 are stacked so that the first electrode pattern 16 and the second electrode pattern 17 overlap and are cut along the first and second cutting lines L1, L2, On the long side surface 12b of the green chip 12 formed by the cutting line L1, the end surfaces of the portions 19a and 19b divided by cutting the third electrode pattern 19 are exposed. The end surfaces of the portions 19a and 19b are exposed at both ends of the long side surface 12b of the green chip 12, respectively. When the cutting along the second cutting line L2 is shifted, the width dimension G1 of the end face exposed at one end of the long side surface 12b of the green chip 12 becomes wide, and the width dimension G2 of the end face exposed at the other end becomes narrow. Become. For this reason, the shift | offset | difference of the cutting | disconnection along the 2nd cutting line L2 can be easily detected by an external appearance inspection. Further, before the first and second terminal electrodes 3 and 4 are formed and before the green chip 12 is fired, the cutting deviation can be detected.

  In addition, when the green sheet 18 is misaligned in the laminating step S3, the widths G1 and G2 of the portions 19a and 19b are not aligned, so that the misalignment can also be detected by the appearance inspection of the green chip 12.

  In addition, the first to third electrode patterns 16, 17, and 19 including the electrode patterns to be the first and second through electrodes 6 and 7 are formed on one green sheet. Therefore, since a laminated body can be formed with one type of green sheet, the manufacturing process can be facilitated.

  In the pattern forming step S2, in the second electrode pattern 17, the width of the central portion is made wider than the width in the first cutting line direction at both ends in contact with the first cutting lines L1 on both sides. In this case, the dimension in the penetration direction of the first penetration electrode 6 in the second penetration electrode 7 is increased. Therefore, in the feedthrough capacitor 1, the facing area between the first through electrode 6 and the second through electrode 7 is increased, and the capacitance can be increased.

  Subsequently, a modification of the above embodiment will be described. In the description of each modification, the description of the same points as in the above embodiment will be omitted, and different points will be mainly described.

(First modification)
A feedthrough capacitor 1A according to a first modification will be described with reference to FIGS. FIG. 8 is a schematic diagram showing the first through electrode. FIG. 9 is a schematic diagram showing a second through electrode and a dummy electrode. The first through electrode 21 included in the feedthrough capacitor 1A has a main part 21a and four lead parts 21b similar to the main part 6a and the four lead parts 6b constituting the first through electrode 6, and It has two protrusions 21c.

  The one protruding portion 21c is a portion in which the central portion of one side of the main portion 21a of the first through electrode 21 on the one long side surface 2b protrudes in a substantially rectangular shape toward the one long side surface 2b. The other protruding portion 21c is a portion in which the central portion of one side of the main portion 21a of the first through electrode 21 on the other long side surface 2b protrudes in a substantially rectangular shape toward the other long side surface 2b. That is, the protruding portion 21 c protrudes toward the second terminal electrode 4. However, there is a gap between the tip of the protruding portion 21c and the long side surface 2b, and the protruding portion 21c and the second terminal electrode 4 formed on the long side surface 2b are insulated.

  FIG. 10 is a schematic diagram showing first to third electrode patterns formed in the manufacturing process of the feedthrough capacitor according to this modification. In order to form the first through electrode 21 having the protruding portion 21c, the first electrode pattern 23 has two protruding portions 23c. The one protruding portion 23c is a portion protruding toward the first cutting line L1 adjacent to the central portion on the first cutting line L1 side of the first electrode pattern 23. The other protruding portion 23c is a portion where the center portion on the other first cutting line L1 side of the first electrode pattern 23 protrudes toward the other adjacent first cutting line L1. The tip of the protrusion 23c is separated from the first cutting line L1.

  Similarly to the first electrode pattern 16, the first electrode pattern 23 has end portions 23a adjacent to each other in the direction of the first cutting line L1 connected to each other. In the connecting portion 23 b, the connecting portions 23 b adjacent in the direction of the second cutting line L <b> 2 are connected by the third electrode pattern 19. In the laminating step S3, the green sheet 18 on which the first electrode pattern 23 and the second and third electrode patterns 17 and 19 are formed is laminated.

  In the cutting step S4, the stacked body is cut along the first cutting line L1, but the actual cutting may deviate from the first cutting line L1. If the actual cut surface is displaced, a green chip may be formed in which the end surface of the second electrode pattern is not exposed to the cut surface along the first cut line L1. In this case, in the feedthrough capacitor formed using this green chip, there is a possibility that a connection failure between the second feedthrough electrode and the second terminal electrode occurs.

  Further, when the actual cut surface along the first cut line L1 is shifted, the gap between the protruding portion 23c of the first electrode pattern 23 and the cut surface along the first cut line L1 is reduced. In this case, when the first and second terminal electrodes 3 and 4 are formed by a wet plating method or the like, the plating solution enters the layer in which the first through electrode is formed in the capacitor body, and the reliability is lowered. There is a fear.

  In addition, if the actual cut surface along the first cutting line L1 is shifted, the shape of the first and second through electrodes included in the capacitor body changes, so that the characteristics as the through capacitor may change. is there.

  Therefore, in order to easily detect that the actual cut surface along the first cutting line L1 has shifted, the first electrode pattern 23 having the protrusion 23c is formed. When the cutting along the first cutting line L1 shifts, in the feedthrough capacitor 1A, the protruding portion 21c of the first through electrode 21 and the second terminal electrode 4 are in contact with each other, and the first terminal electrode 3 and the first 2 terminal electrode 4 is short-circuited. Therefore, it is determined whether or not a short circuit occurs between the first terminal electrode 3 and the second terminal electrode 4 after the first and second terminal electrodes 3 and 4 are formed in the terminal formation step S6. By doing so, it is possible to easily detect the deviation of the cutting along the first cutting line L1.

(Second modification)
With reference to FIG.11 and FIG.12, the feedthrough capacitor 1B which concerns on a 2nd modification is demonstrated. FIG. 11 is a schematic diagram showing the first through electrode. FIG. 12 is a schematic diagram showing a second through electrode and a dummy electrode. The feedthrough capacitor 1B has two dummy electrodes 31 in the layer where the first feedthrough electrode 6 is disposed.

  The two dummy electrodes 31 have a substantially rectangular shape and are respectively disposed on the long side surfaces 2b on both sides of the first through electrode 6. Further, the dummy electrode 31 is disposed so as to be separated from the first through electrode 6. One side of the dummy electrode 31 is exposed to the long side surface 2b. Further, the dummy electrode 31 has a dimension in the direction along the long side surface 2 b that is approximately the same as the dimension in the same direction in the lead portion 7 b of the second through electrode 7. It overlaps with the drawer portion 7b. The presence of the dummy electrode 31 improves the adhesion between the second terminal electrode 4 and the capacitor body 2B.

  FIG. 13 is a schematic diagram showing first to third electrode patterns formed in the manufacturing process of the feedthrough capacitor according to this modification. As for the 2nd electrode pattern 32, the edge part of one 1st cutting line L1 side exceeds one 1st cutting line L1, and the edge part of the other 1st cutting line L1 side is the other 1st cutting line L1 side. It exceeds the cutting line L1. The second electrode pattern 32 has a portion formed across the adjacent first cutting lines L1, that is, a portion 33 existing between the first cutting lines L1 in the second column B, The through electrode 7 is formed. On the other hand, the portion 34 separated from the portion 33 by the cutting along the first cutting line L <b> 1 becomes the dummy electrode 31.

  In this case, even if the cutting along the first cutting line L1 is slightly shifted, both ends of the second electrode pattern 32 are cut by the cutting along the first cutting line L1, and the end faces of the green chip 12 The long side surface 12b is reliably exposed. Therefore, the end surface of the second through electrode 7 is reliably exposed to the long side surface 2b of the capacitor body 2 and functions as a through electrode, and connection failure with the second terminal electrode 4 can be prevented.

  Further, in the second electrode pattern 32, the end portion portion 34 divided by the first cutting line L <b> 1 remains as a dummy electrode 31 in the layer of the first electrode pattern 16 of the adjacent green chip 12. . Since the end surface of the portion 34 is exposed on the long side surface 2b of the capacitor element body 2, the end surface of the portion 34 is in close contact with the second terminal electrode 4 formed on the long side surface 2b, and the capacitor element body 2, the second terminal electrode 4 and the like. It is possible to improve the adhesion.

(Third Modification)
With reference to FIGS. 14 to 16, the structure of the feedthrough capacitor 41 according to the fourth modification will be described. FIG. 14 is a schematic perspective view of the feedthrough capacitor. FIG. 15 is a schematic diagram showing the first through electrode. FIG. 16 is a schematic diagram showing a second through electrode and a dummy electrode. The feedthrough capacitor 41 according to the fourth modification is a feedthrough capacitor having a shape obtained by extending the feedthrough capacitor 1 in the direction opposite to the long side surface 2b.

  In the feedthrough capacitor 41, the first terminal electrode 3 is formed so as to cover the long side surface 42 b of the capacitor body 42. The second terminal electrode 4 is formed in a strip shape at a substantially central portion of the short side surface 42a. The short side surface 42 a and the long side surface 42 b are orthogonal to each other, and the short side surface 42 a is a surface perpendicular to the longitudinal direction of the capacitor body 42.

  The first and second through electrodes 46 and 47 and the dummy electrode 49 of the capacitor body 42 have a dimensional ratio to the first and second through electrodes 6 and 7 of the capacitor body 2 and the dummy electrode 9 described above. Different. This point will be mainly described.

  As shown in FIG. 15, the first through electrode 46 has a main portion 46a and a lead portion 46b that are integrally formed. The main portion 46 a is formed in a substantially rectangular shape, penetrates from one long side surface 42 b of the capacitor body 42 to the other long side surface 42 b, and is electrically connected to the first terminal electrode 3. The first through electrode 46 penetrates the dielectric layer 8 in the short direction, and its end is exposed on the long side surface 42b. For this reason, the width of the first through electrode 46 is wider than that in the case where the first through electrode 46 penetrates in the longitudinal direction of the dielectric layer 8, and the area of the cross section perpendicular to the direction in which the current flows is increased. In the present embodiment, the wide first through electrode 46 functions as a ground electrode. For this reason, ESL can be reduced.

  As shown in FIG. 16, the second through electrode 47 includes a substantially rectangular main portion 47a and lead portions 47b integrally formed on both sides of the main portion 47a. The main portion 47a is a region that is wider in the direction in which the long side surface 42b faces than the lead portion 47b. The second through electrode 47 penetrates from one short side surface 42 a to the other short side surface 42 a and is electrically connected to the second terminal electrode 4.

  The pair of dummy electrodes 49 are disposed on the long side surfaces 42b on both sides of the same layer with the second through electrode 47 interposed therebetween. The dummy electrodes 49 are formed from one short side surface 42a to the other short side surface 42a along the long side surface 42b side of the dielectric layer 8, respectively.

  FIG. 17 is a schematic diagram showing first to third electrode patterns formed in the manufacturing process of the feedthrough capacitor according to this modification. In the present modification, the cut surface along the first cutting line L1 becomes the short side surface 42a of the capacitor body 42, and the second terminal electrode 4 is formed. On the other hand, the cut surface along the second cutting line L2 becomes the long side surface 42b of the capacitor body 42, and the first terminal electrode 3 is formed. In this modification, the interval between the first cutting lines L1 is wider than the interval between the second cutting lines L2.

  Further, as in the above embodiment, the first electrode pattern 56 is a portion that becomes the main portion 46 a of the first through electrode 46. The second electrode pattern 57 is a portion that becomes the second through electrode 47. The third electrode pattern 59 is a portion that becomes the lead portion 46 b of the dummy electrode 49 and the first through electrode 46.

  Between the first cutting lines L1, the first rows A in which the first electrode patterns 56 are arranged and the second rows B in which the second electrode patterns 57 are arranged are alternately formed.

  The first electrode pattern 56 is formed from one side of the adjacent second cutting line L2 to the other side. The end portions 56a of the first electrode patterns 56 adjacent to each other in the direction of the first cutting line L1 are connected to each other, and the connecting portion 56b in which the end portions 56a are connected to each other is formed in a band shape.

  The second electrode pattern 57 is formed so as to extend from one of the adjacent first cutting lines L1 to the other. Further, the second electrode pattern 57 has a region 57a having a wide width in the direction of the first cutting line L1 at the center thereof.

  The third electrode pattern 59 is formed integrally with the first electrode pattern 56, and is formed in a strip shape so as to connect the connecting portions 56b of the first electrode pattern 56 in the second cutting line L2 direction. The third electrode pattern 59 is formed on the second cutting line L2, and is formed so as to connect the connecting portions 56b of the first electrode patterns 56 adjacent in the direction of the second cutting line L2.

  The green sheet 18 on which the first to third electrode patterns 56, 57, and 59 are thus formed is stacked and cut to form a green chip. In the cutting step S4, the third electrode pattern 59 is cut in half by the second cutting line L2, and the portion 59a that becomes the dummy electrode 49 and the first through electrode are cut by the first cutting line L1. 46 is divided into a portion 59d to be the lead-out portion 46b.

  On the short side of the green chip, the end of the second electrode pattern 57 is exposed at the center, and the cut surfaces of the portions 59a and 59b of the third electrode pattern 59 are exposed at both ends. ing. Therefore, by comparing the size relationship between the width dimension on one side and the width dimension on the other side of the portions 59a and 59b of the third electrode pattern 59 exposed on the short side surface of the green chip, the second cutting is performed. The misalignment of the cut along the line L2 can be easily determined.

  As described above, by setting the interval between the first cutting lines L1 wider than the interval between the second cutting lines L2, the width dimension (dimension in the direction perpendicular to the penetrating direction) of the first through electrode 46 is increased. Become. For this reason, the feedthrough capacitor 41 realizing low ESL can be easily manufactured.

(Fourth modification)
A feedthrough capacitor 41A according to a fourth modification will be described with reference to FIGS. FIG. 18 is a schematic diagram showing the first through electrode. FIG. 19 is a schematic diagram showing a second through electrode and a dummy electrode. This is a feedthrough capacitor having a shape in which the feedthrough capacitor 1A according to the second modified example is stretched in the opposing direction of the long side surface 2b.

  The feedthrough capacitor 41A is also a modification of the feedthrough capacitor 41 according to the third modification, and therefore, the difference from the feedthrough capacitor 41 according to the third modification will be mainly described. The first through electrode 61 included in the feedthrough capacitor 41A includes main portions 61a and 4 similar to the main portion 46a and the four lead portions 46b constituting the first through electrode 46 included in the feedthrough capacitor 41 according to the third modification. And two protrusions 61c.

  One projecting portion 61c is a portion in which the central portion of one side of the main portion 61a of the first through electrode 61 on the one short side surface 42a projects in a substantially rectangular shape toward the one short side surface 42a. The other protruding portion 61c is a portion in which the central portion of one side of the main portion 61a of the first through electrode 61 on the other short side surface 42a protrudes in a substantially rectangular shape toward the other short side surface 42a. That is, the two protruding portions 61 c protrude toward the two second terminal electrodes 4. However, there is a gap between the tip of the protruding portion 61c and the short side surface 42a, and the protruding portion 61c and the second terminal electrode 4 formed on the short side surface 42a are insulated.

  FIG. 20 is a schematic diagram showing first to third electrode patterns formed in the manufacturing process of the feedthrough capacitor according to this modification. In order to form the first through electrode 61 having the protruding portion 61c, the first electrode pattern 63 has two protruding portions 63c. The one protruding portion 63 c protrudes toward the second electrode pattern 57 adjacent to the central portion on the first cutting line L 1 side of the first electrode pattern 63. The other protruding portion 63 c protrudes toward the second electrode pattern 57 adjacent to the central portion on the other first cutting line L 1 side of the first electrode pattern 63. The tip of the protrusion 63c is separated from the first cutting line L1.

  The protrusion 63c (61c) is formed to easily detect that the actual cut surface along the first cutting line L1 has shifted. When the cutting along the first cutting line L1 shifts, in the feedthrough capacitor 41A, the one protruding portion 61c of the first through electrode 61 and the second terminal electrode 4 come into contact with each other, and the first terminal electrode 3 And the second terminal electrode 4 is short-circuited. Therefore, it is determined whether or not a short circuit occurs between the first terminal electrode 3 and the second terminal electrode 4 after the first and second terminal electrodes 3 and 4 are formed in the terminal formation step S6. By doing so, the shift | offset | difference of the cutting | disconnection along the 1st cutting line L1 can be detected.

(5th modification)
With reference to FIGS. 21 and 22, a feedthrough capacitor 41B according to a fifth modification will be described. FIG. 21 is a schematic diagram showing the first through electrode. FIG. 22 is a schematic diagram showing a second through electrode and a dummy electrode. A feedthrough capacitor 41B according to the fifth modification is a feedthrough capacitor having a shape obtained by extending the feedthrough capacitor 1B according to the third modification in the direction opposite to the long side surface 2b.

  The feedthrough capacitor 41B is also a modification of the feedthrough capacitor 41 according to the third modification, and therefore, the difference from the feedthrough capacitor 41 according to the third modification will be mainly described. The feedthrough capacitor 41B has two dummy electrodes 71 in the layer where the first feedthrough electrode 46 is disposed.

  The two dummy electrodes 71 have a substantially rectangular shape and are respectively disposed on the short side surface 42 a side on both sides of the first through electrode 46. Further, the dummy electrode 71 is disposed apart from the first through electrode 46. One side of the dummy electrode 71 is exposed on the short side surface 42a. In addition, the dummy electrode 71 has a dimension in the direction along the short side surface 42 a that is approximately the same as the dimension in the same direction in the lead portion 47 b of the second through electrode 47, and the dummy electrode 71 has the same dimension as the second through electrode 47. It overlaps with the drawer 47b. The presence of the dummy electrode 71 improves the adhesion between the second terminal electrode 4 and the capacitor body 42B.

  FIG. 23 is a schematic diagram showing first to third electrode patterns formed in the manufacturing process of the feedthrough capacitor according to this modification. In the second electrode pattern 72, one portion 74 on the first cutting line L1 side exceeds one first cutting line L1, and the other portion 74 on the other first cutting line L1 side is the other first cutting line L1 side. It exceeds the cutting line L1. In the second electrode pattern 72, the portion 73 formed across the adjacent first cutting lines L <b> 1 becomes the second through electrode 47, and the portion 74 becomes the dummy electrode 71.

  In this case, even if the cutting along the first cutting line L1 is slightly shifted, both ends of the second electrode pattern 72 are cut by the cutting along the first cutting line L1, and the end surface is short of the green chip. Exposed to the side. Therefore, the end surface of the second through electrode 47 is reliably exposed to the short side surface 42a of the capacitor body 42 and functions as a through electrode, and connection failure with the second terminal electrode 4 can be prevented.

  In addition, the end portion 74 of the second electrode pattern 72 divided by the first cutting line L1 remains as a dummy electrode 71 in the layer of the first electrode pattern 56 of the adjacent green chip. Since the end surface of the end-side portion 74 is exposed on the side surface of the capacitor body 42, the end surface is in close contact with the second terminal electrode 4 formed on the side surface, and the capacitor body 42, the second terminal electrode 4, It is possible to improve the adhesion.

  The present invention is not limited to the above embodiment, and various modifications can be made. For example, in the above-described embodiment, the second electrode pattern (second through electrode) has a width at the center portion larger than that at the end portion, but is not limited thereto. The 2nd electrode pattern should just be formed over the 1st cutting line L1 of both sides, and, thereby, the 2nd penetration electrode which penetrates a capacitor element body can be formed.

1 is a schematic perspective view of a feedthrough capacitor according to an embodiment of the present invention. 1 is a schematic cross-sectional view of a feedthrough capacitor according to an embodiment of the present invention. It is a mimetic diagram showing the 1st penetration electrode which the penetration capacitor concerning the embodiment of the present invention has. It is a mimetic diagram showing the 2nd penetration electrode and dummy electrode which the penetration capacitor concerning the embodiment of the present invention has. It is a flowchart which shows the manufacturing method of the feedthrough capacitor which concerns on embodiment of this invention. It is a schematic diagram which shows the 1st-3rd electrode pattern formed in the manufacturing process of the feedthrough capacitor which concerns on embodiment of this invention. It is a schematic diagram which shows the long side surface of the capacitor | condenser body formed in the manufacturing process of the feedthrough capacitor which concerns on embodiment of this invention. It is a mimetic diagram showing the 1st penetration electrode which the penetration capacitor concerning the 1st modification has. It is a mimetic diagram showing the 2nd penetration electrode and dummy electrode which the penetration capacitor concerning the 1st modification has. It is a schematic diagram which shows the 1st-3rd electrode pattern formed in the manufacturing process of the feedthrough capacitor which concerns on a 1st modification. It is a mimetic diagram showing the 1st penetration electrode which the penetration capacitor concerning the 2nd modification has. It is a mimetic diagram showing the 2nd penetration electrode and dummy electrode which the penetration capacitor concerning the 2nd modification has. It is a schematic diagram which shows the 1st-3rd electrode pattern formed in the manufacturing process of the feedthrough capacitor which concerns on a 2nd modification. It is a schematic perspective view of the feedthrough capacitor according to a third modification. It is a mimetic diagram showing the 1st penetration electrode which the penetration capacitor concerning the 3rd modification has. It is a schematic diagram which shows the 2nd penetration electrode and dummy electrode which the penetration capacitor which concerns on a 3rd modification has. It is a schematic diagram which shows the 1st-3rd electrode pattern formed in the manufacturing process of the feedthrough capacitor which concerns on a 3rd modification. It is a mimetic diagram showing the 1st penetration electrode which the penetration capacitor concerning the 4th modification has. It is a schematic diagram which shows the 2nd penetration electrode and dummy electrode which the penetration capacitor which concerns on a 4th modification has. It is a schematic diagram which shows the 1st-3rd electrode pattern formed in the manufacturing process of the feedthrough capacitor which concerns on a 4th modification. It is a mimetic diagram showing the 1st penetration electrode which the penetration capacitor concerning the 5th modification has. It is a schematic diagram which shows the 2nd penetration electrode and dummy electrode which the penetration capacitor which concerns on a 5th modification has. It is a schematic diagram which shows the 1st-3rd electrode pattern formed in the manufacturing process of the feedthrough capacitor which concerns on a 5th modification.

Explanation of symbols

1, 1A, 1B, 41, 41A, 41B ... feedthrough capacitor, 2, 2A, 2B, 42, 42A, 42B ... capacitor body, 2a ... short side surface, 2b ... long side surface, 3 ... first terminal electrode, 4 ... 2nd terminal electrode, 6, 46 ... 1st penetration electrode, 7, 47 ... 2nd penetration electrode, 8 ... Dielectric layer, 9, 49 ... Dummy electrode, 10 ... Laminated body, 12 ... Green chip, Reference numerals 16, 17, 19: first to third electrode patterns, 16a: end portions, 16b: connection portions, 18: green sheets, 23: first electrode patterns, 23c: protrusions, 31: dummy electrodes, 32 ... 2nd electrode pattern, A ... 1st row | line, B ... 2nd row | line | column, G1, G2 ... Width dimension, L1 ... 1st cutting line, L2 ... 2nd cutting line.

Claims (5)

A first through electrode and a second through electrode having a main portion and a pair of lead portions that are alternately laminated and integrally formed with a dielectric layer interposed therebetween, and the same as the second through electrode. A method of manufacturing a feedthrough capacitor comprising a capacitor body having a pair of dummy electrodes disposed on both ends of one layer with the second through electrode interposed therebetween,
A pattern forming step of arranging the first and second electrode patterns serving as the first and second through electrodes and the dummy electrode on a green sheet;
A stacking step of stacking a plurality of the green sheets on which the first to third electrode patterns are formed to obtain a stack;
The stacked body is cut in the stacking direction along a plurality of first cutting lines parallel to each other and a plurality of second cutting lines perpendicular to the first cutting lines and parallel to each other. Cutting process to obtain a green chip of
A terminal forming step of forming a terminal electrode on the capacitor body obtained by performing a heat treatment on the green chip,
In the pattern forming step,
The first column in which the first electrode pattern is arranged and the second column in which the second electrode pattern is arranged are alternately arranged along the first cutting line, and the first column and The first cutting lines are respectively located between the second columns,
In the first row, the ends of the first electrode patterns adjacent to each other in the direction of the first cutting line are connected to each other so as to extend from one of the adjacent second cutting lines to the other. Forming the first electrode pattern so as to form a strip,
In the second row, the second electrode pattern is formed so as to extend from one of the adjacent first cutting lines to the other,
The connection part which the edge parts of the said 1st electrode pattern connected, Comprising: The said 1st connection part which adjoins the said connection part adjacent to the direction of the said 2nd cutting line in the direction of the said 1st cutting line Forming a strip-shaped third electrode pattern extending between the electrode patterns on the second cutting line;
The first electrode pattern is a portion that becomes the main portion of the first through electrode and a part of the lead portion, and the second electrode pattern is the main portion of the second through electrode. And the third electrode pattern is a portion that becomes the remaining portion of the lead portion of the dummy electrode and the first through electrode,
In the laminating step, the green sheets are laminated so that the first electrode pattern and the second electrode pattern overlap ,
In the cutting step, a feedthrough capacitor manufactured by exposing an end face divided by cutting the third electrode pattern to a side face of the green chip formed by the first cutting line. Method.   In the pattern forming step, in the second electrode pattern, the width of the central portion is made wider than the width in the first cutting line direction at both ends in contact with the first cutting lines on both sides. The method of manufacturing a feedthrough capacitor according to claim 1. In the pattern forming step, the first electrode pattern that protrudes toward the first cutting line located on both sides of the first electrode pattern and has a protruding portion that is separated from the first cutting line is formed. And
In the terminal forming step, as the terminal electrode,
A first side electrode is formed on a side surface of the capacitor body formed by cutting along the second cutting line so as to be electrically connected to a first through electrode formed from a portion including the first electrode pattern. And forming a terminal electrode of
A second side electrode is formed on the side surface of the capacitor body formed by cutting along the first cutting line so as to be electrically connected to a second through electrode formed from a portion including the second electrode pattern. The terminal electrode of
The method of manufacturing a feedthrough capacitor according to claim 1, further comprising determining whether or not a short circuit occurs between the first terminal electrode and the second terminal electrode.   In the pattern forming step, one end of the second electrode pattern on the first cutting line side exceeds the one first cutting line, and the other end on the first cutting line side The method for manufacturing a feedthrough capacitor according to claim 1, wherein the second electrode pattern is formed so as to exceed the other first cutting line. An interval between the first cutting lines is set wider than an interval between the second cutting lines;
In the terminal forming step, a first terminal electrode is formed as the terminal electrode so as to cover a side surface of the capacitor element body formed by cutting along the second cutting line, and the first cutting line is formed. 5. The method for manufacturing a feedthrough capacitor according to claim 1, wherein a second terminal electrode is formed on a side surface of the capacitor body formed by cutting along the line.

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