JP5057464B2 - Surface cleaning method and apparatus by underwater combustion - Google Patents

Description

  The present invention provides a surface cleaning by underwater combustion suitable for efficiently removing contaminants (including resists) adhering to the surface of the object to be cleaned such as a semiconductor wafer, liquid crystal glass, and printed circuit board. The present invention relates to a method and an apparatus.

  The surface cleaning operation to remove contaminants such as organic matter, inorganic matter, oxide film, particles, etc. present on the surface of the object to be cleaned is a batch type where multiple objects are processed simultaneously as the object to be cleaned becomes larger. There is a tendency to use a single-wafer type processing one by one. As surface cleaning technology, a technology using an organic or inorganic solvent, a technology using plasma, a technology using water or steam, a technology using a cold hydrogen flame, and the like are known.

For example, the technique using water or steam is to be cleaned by the action of steam by injecting water and mist with a controlled diameter onto the surface of the object to be rotated as disclosed in Patent Document 1. The resist is lifted from the surface of the object, and the resist that is lifted up by the spraying action of water mist is peeled off. In addition, as disclosed in Patent Document 2, the technology using a cold hydrogen flame destroys contaminants from the surface of the object to be cleaned by exposing the surface of the object to be cleaned with a low-temperature hydrogen surface mixed diffusion flame in a vacuum environment. To be removed.
JP 2006-114738 A JP 2005-509516 A

  Among the conventional surface cleaning techniques, the technique using an organic or inorganic solvent has a problem such as waste liquid treatment. The technique using plasma or the cold hydrogen flame disclosed in Patent Document 2 requires management of vacuum equipment and energy generation sources. To be complicated. Further, as in Patent Document 2, under a vacuum or a reduced pressure, the hydrogen flame is operated in an unstable region where it tends to explode, and there is a problem in safety. On the other hand, the technique using water or steam is relatively simple and has no problem of waste liquid treatment. However, the normal steam temperature is 100 ° C., and even high-pressure jet steam is 130 ° C., so the surface of the object to be cleaned is contaminated. It is difficult to damage the object for peeling, and lacks cleaning efficiency and effectiveness.

  An object of the present invention is to provide a surface cleaning method and apparatus excellent in cleaning efficiency and effect while suppressing the cost of equipment without problems of waste liquid treatment.

In order to achieve the above object, the invention of claim 1 is a surface cleaning method by underwater combustion, wherein the object to be cleaned is held and the surface of the object to be cleaned is immersed in submersion or water, and a combustion flame is placed on the surface of the object to be cleaned. and irradiated with interposition of water on the surface, by exposing the object to be cleaned surface active species generated in the combustion flame and combustion flame, contaminants該被wash the surface, burning flame It is characterized by being removed by destruction or decomposition at three intersections of the submerged surface and the contaminated surface of the object to be cleaned .

According to a second aspect of the present invention, in the above-described surface cleaning method by underwater combustion, the combustion flame is dish-shaped or bowl-shaped, and a flame holder having a plurality of through holes is used. The object to be cleaned is irradiated through a through hole, and the object to be cleaned is controlled to have a predetermined temperature.

On the other hand, the invention of claim 3 is a single-wafer type surface cleaning apparatus for underwater combustion that removes contaminants on the surface of the object to be cleaned used in claim 1 or 2, and holds the object to be cleaned. A moving means, a water supply means, and a flame generating means for irradiating a combustion flame toward the object to be cleaned held by the moving means are provided in a chamber having an exhaust part and a drain part. It is characterized by that.

(Explanation of Principle) Next, characteristics of the present invention will be clarified.

The first feature is that a combustion flame is used. The combustion flame is made by a flame generating means such as a burner. As the fuel for the combustion flame, a general fuel gas such as acetylene gas can be used, and usually a combustion aid such as oxygen or air is used. Combustion flames that burn these are also called adiabatic flames, and since the combustion reaction is extremely fast, the amount of generated heat is not dissipated outside the system while it is burning, and is mostly used for heating the gas in the system. The flame that burns under this adiabatic condition simultaneously generates thermal energy, active species energy (including radicals), and kinetic energy.

  Of these, the heat energy is high and decomposes and destroys contaminants on the surface of the object to be cleaned. The activated species energy generally becomes CO2 and H2O when hydrocarbons (CmHnO) burn, and recombination of atoms occurs. This recombination is said to reach about 100 in the case of an elementary reaction of methane, for example, and when the fuel is excessive, there are many high-level hydrocarbon active species. In addition, a recombination reaction (termination reaction) of CO and OH occurs at the final stage of the chemical reaction, but a so-called luminescence reaction occurs, but the reaction rate is very slow, so that the lifetime of the active species is extended, and nearby reactants such as contamination The chance of reacting with things increases, greatly contributing to the degradation of contaminants. However, in the case of an oxygen hydrogen flame, only H2O is generated, and only three types of active species OH, O, and H are generated, and the contribution rate to the decomposition reaction of contaminants is small. Kinetic energy generates a high-temperature heat flux by a rapid combustion reaction, and diffuses and removes debris from the surface of the object to be cleaned. In the surface cleaning method of the present invention, the cleaning efficiency is enhanced by the synergistic effect of the thermal energy, active species energy, and kinetic energy generated by the combustion flame.

  In the present invention, the second feature is that the surface of the object to be cleaned is immersed in submerged water or water, and the surface of the object to be cleaned is irradiated with water on the surface being excluded, that is, water supply for submerged water is essential. It is that. Such submerged water supply has the following effects. That is, the destruction and decomposition of the contaminants by the combustion flame are performed at three intersections of the combustion flame, the flood surface and the surface of the contaminant to be cleaned. In addition, the high heat energy generated by the combustion flame forcibly evaporates the submerged water, and the water supply reduces the temperature of the object to be cleaned up to the evaporating temperature of the water by lowering the temperature of the object to be cleaned by the latent heat of evaporation and increasing the latent heat of the submerged water. In addition, the temperature of the submerged water enables appropriate temperature control to suppress thermal deterioration of the object to be cleaned. In addition, contaminants on the surface of the object to be cleaned are easily destroyed by rapid cooling and expansion due to latent heat of evaporation of water, and a rapid evaporation force. In addition, many active species such as OH and H that are decomposed by evaporation of the flooded water due to the combustion flame are generated, which contribute to the decomposition of the pollutants. Since the combustion flame has a large heat flux, the evaporation rate of water is fast, and it is particularly effective in suppressing and removing the generation of gelled products (water marks) on the silicon surface as an object to be cleaned.

  The above water for submergence is not limited to pure water, and includes, for example, a mixture of a cleaning accelerator such as hydrogen peroxide and other chemicals (hereinafter referred to as a functional solution). When this functional solution is used, for example, cleaning accelerators and chemicals are concentrated by momentary evaporation of water to promote reaction with contaminants (especially inorganic substances and metals) on the surface of the object to be cleaned. This is advantageous for removing objects.

  In the present invention, the third feature is to irradiate the object to be cleaned with a combustion flame through a flame holder as a particularly preferable mode. This is because the active species generated from the above-mentioned combustion flame disappears when it leaves a certain distance and its life is shortened. To use the active species effectively, the combustion flame must be set in the vicinity of the object to be cleaned. However, if this is done, the high temperature and heat flux of the combustion flame lead to thermal degradation of the object to be cleaned. Therefore, the thermal deterioration is prevented by installing a flame holder in the vicinity of the object to be cleaned. In addition, by using a flame holder, a circulation region of the air flow is generated between the flame holder and the object to be cleaned, and active species generated from the combustion flame can be confined in the circulation region. The life of the active species can be extended by the confinement action, and the contaminant resolution can be increased. The above-mentioned flame holder may be a simple flat plate shape, but as shown in the form example, it is in a dish shape or a bowl shape for collecting the combustion flame, and a plurality of through-holes are formed, and combustion is performed. It is preferable to irradiate a part of the flame from the through hole to the surface of the object to be cleaned. As an example, when a flame holder such as the one shown in the embodiment is used and the object to be cleaned is irradiated with a combustion flame of acetylene gas from the through hole of the flame holder, the irradiation temperature can be easily controlled to 300 ° C. or less. It has been confirmed. For temperature control, for example, a temperature sensor as described in the embodiment is provided in the holding unit of the moving unit, and the distance between the flame generating unit and the object to be cleaned on the holding unit is generated by flame. Adjustment is made in advance to an optimum value by adjusting the height of the means.

In the invention of claim 1, by irradiating the surface of the object to be cleaned with water on the surface, the thermal energy, active species energy and kinetic energy of the flame are utilized. Thus, it is possible to efficiently remove contaminants on the surface of the object to be cleaned. Specifically, contaminants are removed by the following synergistic actions (a) to (c).
(A) A physical peeling effect is obtained by rapid expansion of microbubbles. This is because the contaminants on the surface of the object to be cleaned always contain fine particles of air, but the heat flux of the combustion flame causes the bubbles to rapidly expand and destroy and remove the contaminants. .
(I) Obtaining the effect of decomposing pollutants by active species. This is because the unstable active species generated in the combustion flame are concentrated on the object to be cleaned and continuously and densely irradiated to chemically decompose and remove the contaminants on the surface of the object to be cleaned. It is.
(C) A scrub effect by high-speed heat flux is obtained. This is an action of preventing the re-deposition by scattering the contaminant from which the heat flux of the outer flame (diffusion flame) of the combustion flame is decomposed and separated from the surface of the object to be cleaned.

  In the invention of claim 2, in addition to the above (a) to (c), by providing a flame holder between the combustion flame and the object to be cleaned, it is easy to control the temperature of the combustion flame, By forming a circulation region of the active species with the object to be cleaned, the concentration of the active species can be increased to improve the contaminant resolution and thus the cleaning efficiency.

According to the invention of claim 3, the apparatus is provided as a device suitable for the surface cleaning method by underwater combustion described by the chamber having the drainage part and the exhaust part, the moving means, the water supply means, and the flame generating means, and provided with reduced equipment costs. It is Ru can.

  The best mode of the present invention will be described below with reference to FIGS. 1 to 3 show a surface cleaning apparatus by underwater combustion in the form, FIG. 4 shows a form and a modification of the flame holder, and FIG. 5 shows a modification of the main part of the apparatus in FIG. In each figure, a part is omitted for simplification due to restrictions on drawing. Moreover, in the following description, the same code | symbol is attached | subjected to the same or functionally same member, and the overlapping description is abbreviate | omitted as much as possible.

(Apparatus Structure) In FIGS. 1 to 3, the surface cleaning apparatus of the embodiment includes a moving means 2 that moves while holding the object to be cleaned w, and an object to be cleaned w that is supplied to the moving means 2 by supplying water. The water supply means 3 for making it flooded, the flame generating means 4 for irradiating the combustion flame toward the object to be cleaned w held by the moving means 2, the combusted substance w and the flame generating means 4 held by the moving means 2 A flame holder 5 and an overflow drain cylinder 7 are provided in the chamber 1 of FIG.

  Here, the chamber 1 has a generally bowl shape, and includes a carry-in port 11 that is opened and closed by a door 16 provided on one of the opposing side portions, a discharge port 12 that is opened and closed by a door 17 provided on the other side, and an upper portion. An exhaust part 13 that sucks and exhausts the gas in the chamber to the outside, and a drain part 14 that is provided in the lower part close to the discharge port 12 side and drains the water supplied from the water supply means 3 to the outside. Have. The exhaust unit 13 keeps the atmosphere in the chamber stable so as not to fluctuate. The drainage unit 14 is configured to allow water to be discharged from the chamber at a set flow rate.

  The moving means 2 is composed of a conveyor mechanism 20 and allows the object to be cleaned w to be moved from the carry-in port 11 side to the discharge port 12 side while being held by the transfer member 21. The conveyor mechanism 20 includes a fixed frame (not shown) disposed inside the transfer member 21 and a drive unit that rotates the transfer member 21. The fixed frame is on the leg member 25 side on the carry-in entrance 11 side and the discharge port 12 side. The leg member 26 is supported. In this case, the leg members 25 and 26 support the shaft member on the conveyor mechanism 20 side on both sides in a state of being disposed on both sides in the width direction of the conveyor mechanism 20. Moreover, the conveyor mechanism 20 is installed in the state inclined highly toward the discharge port 12 side because the leg member 26 by the side of the discharge port 12 is provided high with respect to the leg member 25 by the side of the carry-in port 11.

  The water supply means 3 supplies water into the chamber 1 from an external water supply source. The tip nozzle portion is on the carry-in inlet 11 side and is provided above the moving means 2. A plurality of such water supply units 3 may be provided. The supplied water may be the above-described functional solution.

  The flame generating means 4 burns fuel gas supplied from an external fuel supply unit and irradiates the combustion flame downward, and is attached via a bracket 15. As the fuel, fuel gas is preferable, and propane gas, butane gas, methane gas, acetylene gas, hydrogen gas and the like which are generally easily available can be used, and are usually used together with auxiliary agents such as oxygen and air.

  The flame holder 5 is attached to the burner portion 41 of the flame generating means 4 so that the object to be cleaned w on the moving means side can be irradiated in a state where the combustion flame irradiated from the flame generating means side burner portion 41 is conditioned. To do. The flame holder 5 is formed in a dish shape as shown in FIG. 4A, and has a plurality of through-holes 5a provided in the bottom wall, and a mounting portion 5c provided inside. is doing. Each through-hole 5a is a small-diameter hole through which the combustion flame irradiated from the burner portion 41 passes. The attachment portion 5c has a ring shape, and is supported by a plurality of arm portions 5b protruding from a portion that is equally divided on the end surface side inner periphery of the flame stabilizer 5. The flame holder 5 passes the outer periphery of the tip of the burner part through the inner diameter of the mounting part 5c with respect to the flame generating means side burner part 41, and is prevented from coming off from the outer peripheral side of the mounting part 5c by a stopper (not shown). It is attached in a state.

  FIGS. 4B and 4C show two examples in which the shape of the flame holder 5 is changed. The flame holder 5A of (b) is added with a comb-umbrella-shaped eaves part 6 in which a number of vertical slits are formed in a substantially umbrella shape on the outer periphery of the dish-shaped cross section of the flame holder 5 of (a). It is a configuration. The flame holder 5B of (c) has a hook-shaped cross section with respect to the flame holder 5 of (a), and a comb-umbrella-like hook portion 6 similar to the above is added to the hook-shaped outer periphery. This is the configuration. When the combustion flame of the burner part 41 is irradiated to the moving means side to-be-cleaned object w from such a through-hole 5a, such a collar part 6 has a heat energy and active species energy, and the moving means side to-be-washed object w and a flame holder This is effective for enhancing the cleaning efficiency. Of course, each of the flame holders described above is set to a length corresponding to the width and diameter of the object to be cleaned w, the number of flame generating means 4 used, or the like, or penetrates the collar 6 instead of the comb-shaped slit. It can be made into a hole, the bottom wall can be eliminated, or deformed as necessary.

  The drain tube 7 is provided on the left and right sides of the moving means 2 on the discharge port side, and drains excess water so that the water supplied from the water supply means 3 does not exceed a predetermined height in the chamber 1. It drains to the part 14 by overflow. Here, when the supplied water is slightly higher (slightly) than the surface of the object to be cleaned w held by the moving means 2, that is, the upper surface, the water is set to be drained from the upper opening of the drain tube 7 by overflow.

  Further, as shown in FIG. 3, the above-described chamber 1 is provided with a carry-in portion 8 on the carry-in port side and a discharge portion 9 on the discharge port side that are opposed to each other. The carry-in unit 8 and the discharge unit 9 are provided with a moving unit 2A or moving unit 2B similar to the moving unit 2, an exhaust unit 13A similar to the exhaust unit 13, and a drain unit 14A similar to the drain unit 14. ing. Further, the carry-in unit 8 is provided with a gate (not shown) that is opened and closed by a door 16A on the side facing the carry-in port 11, and the object to be cleaned w passes through the gate through the robot arm 18 in the carry-in unit. So that it can be transferred to the corresponding part of the moving means 2. In contrast, the discharge unit 9 is provided with a gate (not shown) that is opened and closed by a door 17A on the side facing the carry-out port 12, and the object to be cleaned w is cleaned via the robot arm 18A through the gate. Can be transported to the target location.

(Cleaning Method) The main operation procedure when the object to be cleaned w is treated by the surface cleaning method by underwater combustion of the present invention using the above surface cleaning apparatus will be described. That is, in this surface cleaning method, a carrying-in process for holding the object to be cleaned w in the moving means 2, a water supply process for supplying water to the chamber 1, a flame irradiation process for irradiating the object to be cleaned with a combustion flame, It goes through a discharge step of taking out the object to be cleaned w from the chamber 1 after the cleaning process. This operation procedure is merely an example for carrying out the method of the present invention, and does not limit the present invention. Details can be further developed and changed with reference to this.

(A) In the carrying-in process, the object w to be cleaned in the carrying-in part 8 is transferred to the moving means 2 in the chamber 1 and held. Specifically, for example, the object to be cleaned w held by the transfer member 21 is driven from the carry-in entrance 11 through the chamber by driving the moving means 2A with the door 16 open. It moves to the conveyor type transfer member 21 of the side moving means 2.

(B) In the water supply step, water is supplied into the chamber 1 so that the article to be cleaned w held by the moving means 2 is immersed in the submerged water or water. Specifically, as shown in FIG. 2A, the object to be cleaned w is transferred from the carry-in portion 8 to the chamber 1 side, the door 16 is closed, and water is supplied into the chamber 1 by the water supply means 3. Is done. In this case, although not shown in FIG. 3, a predetermined amount of water is supplied into the chamber 1 in advance (for example, it does not flow out from the carry-in port 11 and the discharge port 12), and the target held by the moving means 2 is retained. The amount of water required to immerse the cleaning object w slightly in submerged water or water is supplied by the water supply means 3 in a short time. In addition, in this structure, it sets so that the said flooded state may be maintained by the overflow effect | action of the drain cylinder 7 with the setting of the supply water amount from the water supply means 3, and the discharge water amount from the drainage part 14. FIG.

(C) In the flame irradiation process, the combustion flame generated by the flame generating means 4 irradiates the surface of the object to be cleaned held by the moving means 2 via the flame holder 5 while removing water on the surface. Specifically, as described above, the object to be cleaned w held by the moving means 2 is immersed in submerged water or water, and then the flame generating means 4 is turned on and the combustion flame is irradiated through the flame holder 5. The At this time, in this structure, the moving means 2 is set so as to move the object w to be cleaned in the direction of the arrow in FIG. Yes. As a result, the combustion flame can be irradiated to the surface of the object to be cleaned w held by the moving means 2 via the flame holder 5 (corresponding portion of the upper surface) while removing water on the surface of the object to be cleaned. Become. As described above, the destruction and decomposition of the contaminants by the combustion flame are performed at three intersections of the combustion flame, the flood surface and the surface of the contaminant to be cleaned. Of course, at the time of processing by the combustion flame, the temperature of the object to be cleaned w is detected by a temperature sensor 29 provided below the holding part of the moving means 2, and a control unit (not shown) detects the temperature of the object to be cleaned w by the detection signal. And a control signal is sent to the flame generating means 4 when the temperature exceeds a predetermined temperature. Depending on the size of the object to be cleaned, a plurality of flame generating means 4 are installed instead of a single one. In principle, the combustion flame of the flame generating means 4 may be irradiated to the object to be cleaned held by the moving means 2 without the flame holder 5.

(D) In the discharging step, the object to be cleaned w after the cleaning process is transferred from the moving unit 2 to the discharging unit 9 and held in the moving unit 2B. That is, the door 17 is switched to an open state, the moving means 2 is driven, and the object to be cleaned w held by the transfer member 21 is moved from the discharge port 12 via the conveyor-type transfer member 21 to the discharge unit side moving means. It moves to the 2B conveyor type transfer member 21. In this case, it is important that the cleaned object w after the cleaning process is carried out while maintaining a dry state because a water mark or the like is generated when it is immersed in water during the carrying-out process.

  In the above operation, the exhaust units 13 and 13A are kept stable so as not to fluctuate the atmosphere in the chamber 1, the carry-in unit 8, and the discharge unit 9. The drainage unit 14 discharges water from the chamber 1 at a set flow rate. The discharge unit 14 </ b> A drains water when the water in the chamber 1 inadvertently flows into the carry-in unit 8 and the discharge unit 9 through the carry-in port 11 and the discharge port 12.

  As described in the above explanation of the principle and the effect of the invention, such a surface cleaning method is a synergistic effect of physical exfoliation effect due to rapid expansion of microbubbles, contaminant decomposition effect due to active species, and scrub effect due to high-speed heat flux. Due to the effect, there is no problem of waste liquid treatment, and the cleaning efficiency and the effect are improved while suppressing the equipment cost. In addition, the above surface cleaning method can be easily operated at normal pressure while keeping the temperature of the object to be cleaned low compared to, for example, a method of ashing contaminants due to plasma performed under vacuum. Further, the cleaning efficiency can be improved with respect to the technique of Patent Document 1, and the object to be cleaned can be efficiently cleaned at a normal pressure and at an arbitrary temperature condition with respect to the technique of Patent Document 2.

(Apparatus in FIG. 5) In FIG. 5, the surface cleaning apparatus of the modification is an example in which the moving means 2A that moves while holding the object to be cleaned w is constituted by the rotating mechanism 22, and supplies the water to rotate the rotating mechanism 22. The water supply means 3 for submerging the object w to be cleaned, the flame generating means 4 for irradiating the combustion flame toward the object w side held by the rotation mechanism 22, and the object held by the rotation mechanism 22 It is the same as the above apparatus structure in that it includes a flame holder 5 provided between the combustion substance w and the flame generating means 4 and an overflow drain tube 7 and is provided in the chamber 1 of the figure. . Here, the moving means 2 </ b> A can be rotated by a drive unit of a rotation mechanism 22 (not shown) operatively connected to the shaft member 30 in a state where the object-to-be-cleaned holding unit of the rotation mechanism 22 is supported by the shaft member 30. In addition, it can be moved up and down by a lifting mechanism (not shown). The flame generating means 4 includes a main body 40 and a burner portion 41 that can be inserted into and removed from the main body 40 at an arbitrary length, and the amount of protrusion of the burner portion 41 can be variably adjusted via a control unit (not shown). ing. Instead of such a configuration in which the flame generating means 4 is expanded and contracted vertically, for example, the flame generating means 4 may be moved in the front-rear direction in FIG.

(Cleaning method) When the object to be cleaned w is processed by the surface cleaning method by underwater combustion of the present invention using the above-described surface cleaning apparatus, the following points are changed as the operation procedure described above.
(A) In the carrying-in process, the object to be cleaned w is transferred from the carrying-in unit 8 side to the holding unit of the rotation mechanism 22 in the chamber 1 and held. In this operation, for example, the object to be cleaned w is moved from the carry-in port 11A to the holding unit of the rotation mechanism 22 via the robot arm 18B in the open state of the door 16A.
(B) In the water supply step, water is supplied into the chamber 1 by the same operation as described above, and the object to be cleaned w held by the rotating mechanism 22 is immersed in the submersion or water.

(C) In the flame irradiation step, the combustion flame generated by the flame generating means 4 is irradiated to the surface of the object to be cleaned held by the rotating mechanism 202 via the flame holder 5 while removing water on the surface. In this operation, as described above, the object to be cleaned w held in the holding part of the rotating mechanism 22 is immersed in the submerged water or the water, and then the flame generating means 4 is turned on and the combustion flame is passed through the flame holder 5. Irradiate. At this time, in this structure, the rotating mechanism 22 is set so as to rotate the object to be cleaned w and to be lifted by a minute amount by the lifting mechanism. As a result, the combustion flame removes water on the surface of the object to be cleaned with respect to the surface of the object to be cleaned w held by the moving means 2 via the flame holder 5 (corresponding portion of the upper surface) as in the above operation. Irradiation is possible.

(D) In the discharging step, the object to be cleaned w after the cleaning process is transferred from the holding portion of the rotating mechanism 22 to the discharging portion 9A side. In this operation, for example, the water supply of the water supply means 3 and the rotation of the rotation mechanism 22 are stopped in conjunction with the end of the cleaning process by the combustion flame. Further, the object to be cleaned w is raised by a predetermined distance by the elevating mechanism and the door 17A is switched to the open state, and then the object to be cleaned w is transferred from the discharge port 11A to a predetermined location via the robot arm 18B. .

  The method and apparatus of the present invention can be variously modified or developed based on the above forms and modifications. As an example, the cleaning target has a nozzle provided in the chamber and is cleaned and activated after cleaning the cleaning object by irradiating the combustion flame in the flame irradiation process or in the cleaning process. In order to stabilize the object surface, the functional gas is sprayed onto the surface of the object to be cleaned from the nozzle.

It is a schematic block diagram which shows the principal part of the surface cleaning apparatus by the underwater combustion of invention form. (A), (b) is a schematic block diagram which shows the usage condition of the said apparatus. It is a schematic block diagram which shows the whole said apparatus. (A) is a schematic cross section of a flame holder, (b) is a schematic cross section showing another example of the flame holder, and (c) is a schematic cross section showing still another example of the flame holder. It is a schematic block diagram which shows the modification which changed the apparatus of FIG.

Explanation of symbols

1 ... Chamber (11 is a carry-in port, 12 is a discharge port, 13 is an exhaust part, 14 is a drainage part)
2, 2A ... Moving means (20 is a conveyor mechanism, 22 is a rotating mechanism, 29 is a temperature sensor)
3 ... Water supply means 4 ... Flame generating means (40 is a main body, 41 is a burner part)
5, 5A, 5B ... Flame holder (5a is a through hole, 6 is a buttocks)
7 ... Drain tube 8, 8A ... Carry-in part 9, 9A ... Discharge part w ... Object to be cleaned

Claims (3)

The object to be cleaned is held and the surface of the object to be cleaned is immersed in submerged water or water, and a combustion flame is irradiated to the surface of the object to be cleaned while interposing water on the surface to generate the combustion flame and the combustion flame. The surface of the object to be cleaned is exposed to the active species to be removed by destroying or decomposing the contaminants on the surface of the object to be cleaned at three intersections of the combustion flame, the submerged surface, and the surface of the object to be cleaned. A method of cleaning the surface by underwater combustion. The combustion flame is irradiated to the object to be cleaned through a through hole of the flame holder using a flame holder having a dish shape or a bowl shape and having a plurality of through holes. 2. The surface cleaning method by underwater combustion according to claim 1, wherein the cleaning object is controlled to have a predetermined temperature. 3. A single wafer type surface cleaning device for removing contaminants on the surface of an object to be cleaned used in claim 1 or 2 , wherein the moving means for moving the object to be cleaned, water supply means, and the moving means A surface cleaning apparatus by underwater combustion, characterized in that a flame generating means for irradiating a combustion flame toward the object to be cleaned held inside is provided in a chamber having an exhaust section and a drain section.

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