JP5051167B2 - Processing method of ferrous metal parts - Google Patents

Processing method of ferrous metal parts Download PDF

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JP5051167B2
JP5051167B2 JP2009083190A JP2009083190A JP5051167B2 JP 5051167 B2 JP5051167 B2 JP 5051167B2 JP 2009083190 A JP2009083190 A JP 2009083190A JP 2009083190 A JP2009083190 A JP 2009083190A JP 5051167 B2 JP5051167 B2 JP 5051167B2
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polishing
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barrel polishing
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昌知 渡辺
啓朗 末菅
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Sintokogio Ltd
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Description

本発明は、鉄系金属部品の加工方法に関し、更に詳しくは、円柱形状の鉄系金属部品の両側の端面の角部(稜角部)に丸みを付すための加工方法に関する。   The present invention relates to a method for processing an iron-based metal part, and more particularly to a method for rounding corners (ridge corners) on both end faces of a cylindrical iron-based metal part.

ここで、円柱形状の鉄系金属部品としては、音響機器、映像機器、小型モータ等のシャフトおよび各種回転機械装置のコロ軸受け等を挙げることができる。   Here, examples of the columnar iron-based metal parts include shafts of acoustic equipment, video equipment, small motors, and roller bearings of various rotary machine devices.

円柱形状の鉄系金属部品は、通常、鉄系丸棒を所定長に切断したりして調製した円柱形状素材(ワーク)の両側の端面の角部(稜角部)に丸み付けをする、いわゆる面取り加工しておく必要がある。   Cylindrical iron-based metal parts are usually rounded at the corners (ridge corners) of the end faces on both sides of a cylindrical material (workpiece) prepared by cutting an iron-based round bar to a predetermined length. It is necessary to chamfer.

該丸み付けの面取り加工は、従来、特許文献1段落0014に記載の如く、一本ずつ旋削などの切削加工により行っていた。なお、特許文献1では、面取り加工後の各コロを、バレル内で容器の内面に衝突させて硬化処理を行うことが記載されている(特許請求の範囲等参照)。   The rounding chamfering has been conventionally performed by cutting such as turning one by one as described in paragraph 0014 of Patent Document 1. In addition, in patent document 1, it describes that each roller after a chamfering process is made to collide with the inner surface of a container within a barrel, and a hardening process is performed (refer Claims etc.).

しかし、当該面取り加工方法は、一本ずつ、面取り加工をするため、非常に面倒で工数が嵩んだ。この傾向は、円柱形状素材が細径(例えば、5mm未満)であればあるほど増大する。   However, since the chamfering method performs chamfering one by one, it is very troublesome and labor-intensive. This tendency increases as the cylindrical material has a small diameter (for example, less than 5 mm).

なお、特許文献2には、本発明のような稜角部(面と面の交わり角)のみの丸み付けではないが、シャフト(円柱形状の鉄系金属部品)端面を円弧状とする端R面加工を連続送りして一本ずつ切削加工する方法が記載されている。   In addition, Patent Document 2 does not include rounding of only the ridge angle portion (intersection angle of the surface and the surface) as in the present invention, but the end R surface in which the end surface of the shaft (cylindrical iron-based metal part) has an arc shape. A method is described in which machining is continuously fed and cut one by one.

また、特許文献3は、本発明で使用する流動バレル研磨装置の類似構成が記載された、本発明者らが先に出願した先行技術文献である。   Patent Document 3 is a prior art document previously filed by the present inventors, in which a similar configuration of a fluid barrel polishing apparatus used in the present invention is described.

特開2009−14126号公報JP 2009-14126 A 特公平6−39046号公報Japanese Patent Publication No. 6-39046 特開2009−12085号公報JP 2009-12085 A

上記問題点を解決するために、円柱形状の鉄系金属部品の両端面角部(稜角部)に丸み付けをするために、回転バレルや流動バレル等を用いて湿式バレル研磨により、多数本の円柱形状素材を同時処理すれば、上記面取り(丸み付け)加工の工数を大幅に削減できることが考えられる。   In order to solve the above-mentioned problems, in order to round off both end corners (ridge corners) of a cylindrical iron-based metal part, many barrels are formed by wet barrel polishing using a rotating barrel or a fluid barrel. It is conceivable that the number of processes for the chamfering (rounding) process can be greatly reduced by processing the cylindrical material simultaneously.

しかし、当該方法で湿式バレル研磨により丸み付加工を行った場合、ワークWの外周面側ダレ量Rxが端面側ダレ量Ryに比して大きくなる傾向があるとともに、研磨時間も長時間必要となる問題点(図1(C)および比較例1参照)があり、該ワークWの外周面の表面粗さが「粗」であるから、製品化するには、回転砥石等を用いて前記表面粗さを平滑化するとともに外周面側のダレ量Rxと端面側ダレ量Ryとを略等しくし、かつ、軸方向に円柱形状にして外形寸法を規定値に揃えるための仕上げ研磨を行う必要がある。   However, when rounding is performed by wet barrel polishing by the method, the outer peripheral surface side sag amount Rx of the workpiece W tends to be larger than the end surface side sag amount Ry, and a long polishing time is required. (See FIG. 1C and Comparative Example 1), and the surface roughness of the outer peripheral surface of the workpiece W is “rough”. It is necessary to perform finish polishing to smooth the roughness, make the sagging amount Rx on the outer peripheral surface side substantially equal to the sagging amount Ry on the end surface side, and form a cylindrical shape in the axial direction so as to align the outer dimensions to a specified value. is there.

しかし、前記のように、ワークWの端面側ダレ量Ryに対し外周面側のダレ量Rxの寸法が長いと、軸長手方向の外周面形状を円柱形状に揃えるための軸直径方向の研磨量が増え、かつ、軸直径寸法を規定値に揃えるために、研磨加工をさらにすると、図1(C)に示す如く、外周面側のダレ量Rxが許容値以下乃至消失してしまうおそれがある。   However, as described above, if the dimension of the sagging amount Rx on the outer peripheral surface side is longer than the sagging amount Ry on the end surface side of the workpiece W, the polishing amount in the axial diameter direction for aligning the outer peripheral surface shape in the axial longitudinal direction into a cylindrical shape. Further, if the polishing process is further performed in order to make the shaft diameter dimension equal to the specified value, the sagging amount Rx on the outer peripheral surface side may be less than the allowable value or disappear as shown in FIG. .

本発明は、上記問題点を課題とするもので、円柱形状の鉄系金属部品の稜角部の丸み付け加工をするための加工方法において、外周面側ダレ量と端面側ダレ量との近似化(均一化)が容易で、更には、丸み付け加工が短時間で済む鉄系金属部品の加工方法を提供することを目的とする。   The present invention addresses the above-mentioned problems, and approximates the amount of sagging on the outer peripheral surface side and the amount of sagging on the end surface side in a machining method for rounding a ridge corner of a cylindrical iron-based metal part. Another object of the present invention is to provide a method for processing an iron-based metal part that can be easily (homogenized) and can be rounded in a short time.

本発明は、上記課題を、下記手段(発明特定事項)を具備する「鉄系金属部品の加工方法」により解決するものである(参考のために図符号を付す。)。   The present invention solves the above problems by a “processing method of iron-based metal parts” comprising the following means (invention specific matter) (reference numerals are attached for reference).

円柱形状の鉄系金属部品(ワーク)Wの両側の端面W1の角部W2に丸みR付けをするための加工方法であって、
前記端面W1に角部W2を有するワークWの多数本を同時処理するバレル研磨工程により行い、
該バレル研磨工程が、
ワークWの角部W2を塑性変形させて、該端面W1の外周端部に、湾曲凸部aを、端面W1にワークの外径より小さい径の平面部bを残して形成する第一工程、及び、
湾曲凸部aを研磨除去して丸みRが形成されるようにする第二工程、
の二段階を含むことを特徴とする。
A processing method for rounding the corners W2 of the end faces W1 on both sides of a cylindrical iron-based metal part (work) W,
Performed by a barrel polishing process for simultaneously processing a large number of workpieces W having corners W2 on the end face W1,
The barrel polishing step
A first step of plastically deforming the corner portion W2 of the workpiece W to form a curved convex portion a on the outer peripheral end portion of the end surface W1 and leaving a planar portion b having a diameter smaller than the outer diameter of the workpiece on the end surface W1; as well as,
A second step in which the curved protrusion a is polished and removed so that a roundness R is formed;
It is characterized by including these two steps.

そして、上記鉄系金属部品の加工方法において、上部が開放された筒状の固定槽22と、該固定槽22の底部に水平回転する回転盤24とで構成される研磨槽(研磨処理室)12を備えた流動バレル研磨装置10を用いて、第一工程を乾式流動バレル研磨で行い、前記第二工程を湿式流動バレル研磨で行なうことが望ましい。   And in the said processing method of an iron-type metal component, the polishing tank (polishing process chamber) comprised by the cylindrical fixed tank 22 by which the upper part was open | released, and the turntable 24 rotated horizontally at the bottom part of this fixed tank 22 is. It is preferable that the first step is performed by dry fluid barrel polishing and the second step is performed by wet fluid barrel polishing using the fluid barrel polishing apparatus 10 having 12.

本願発明の流動バレル研磨装置は、従来から用いられている水平回転型などに比して1バッチの容量が少なく短い研磨時間で加工ができるから、小ロット・多品種の加工処理が可能である。本願発明の流動バレル研磨装置の1バッチの処理量は100〜200kgであるのに対し、従来の水平回転型は500〜200kgであり、大容量となって研磨加工時間も多く必要となる。   The fluidized barrel polishing apparatus according to the present invention has a small batch size and can be processed in a short polishing time as compared with the conventionally used horizontal rotation type, and therefore, it is possible to process small lots and a variety of products. . While the throughput of one batch of the fluid barrel polishing apparatus of the present invention is 100 to 200 kg, the conventional horizontal rotary type is 500 to 200 kg, which requires a large capacity and requires a long polishing time.

本発明の実施例および比較例の面取り加工における作用の説明図である。It is explanatory drawing of the effect | action in the chamfering of the Example and comparative example of this invention. 本発明のバレル研磨に使用するのに好適な集塵機付設の流動バレル研磨装置の一例を示す概略断面図である。It is a schematic sectional drawing which shows an example of the fluid barrel grinding | polishing apparatus attached to the dust collector suitable for using for the barrel grinding | polishing of this invention. 第一工程におけるバレル研磨槽の一例を示すモデル斜視図(A)・作用説明平面図(B)である。It is a model perspective view (A) and action explanation top view (B) which show an example of the barrel polish tank in the 1st process. 第一工程におけるバレル研磨槽の他の一例を示すモデル斜視図(A)・作用説明平面図(B)・作用説明斜視図(C)、(D)である。It is a model perspective view (A) which shows other examples of a barrel polish tank in the 1st process, an operation explanation top view (B), an action explanation perspective view (C), and (D).

本発明に係るワークWの形状が円柱形状である鉄系金属部品の両側の端面W1の角部W2をバレル研磨装置を用いて丸みR形状に加工する面取り加工方法の概要について、図1を用いて説明する。   About the outline of the chamfering processing method which processes the corner | angular part W2 of the end surface W1 of the both sides of the iron-type metal component whose shape of the workpiece | work W which concerns on this invention is a column shape into a round R shape using a barrel polishing apparatus, FIG. I will explain.

本実施形態の面取り加工方法は、両側の端面W1に角部W2を有する円柱形状素材ワークWの両側の端面W1の角部W2の丸みR付け加工を、多数本同時に処理することができるバレル研磨装置を用いて行なうもので、その加工工程を下記第一工程と第二工程の2段階で行なうことを第一の特徴とする。なお、本願発明の第一工程、第二工程終了後のワークWの外周面表面を平滑化しかつ外径寸法を揃えて、両側の端面W1の角部W2を丸みR付けされた円柱形状の鉄系金属部品の製品とするために、前記回転砥石等を用いて仕上げ研磨が行なわれる。   The chamfering method of the present embodiment is a barrel polishing capable of simultaneously processing a plurality of rounded rounding processes for the corners W2 of the end surfaces W1 on both sides of the cylindrical workpiece W having the corners W2 on both end surfaces W1. It is performed using an apparatus, and the first feature is that the processing step is performed in the following two steps: a first step and a second step. Note that the cylindrical iron in which the outer peripheral surface of the workpiece W after the first step and the second step of the present invention is smoothed and the outer diameter is made uniform, and the corner portions W2 of the end surfaces W1 on both sides are rounded and rounded. In order to obtain a product of a metallic metal part, finish polishing is performed using the rotating grindstone or the like.

1)第一工程は、円柱形状を成すワークWの両側の端面W1の角部W2を塑性変形させて、前記各々の端面W1の外周端部に、その外径がワークWの外径より大きい湾曲凸部aを形成する。このとき、前記ワークWの両側の端面W1には、該ワークWの外径より小さい径の平面部bが残るようにする。   1) The first step plastically deforms the corners W2 of the end faces W1 on both sides of the work W having a cylindrical shape, and the outer diameter of each of the end faces W1 is larger than the outer diameter of the work W. A curved convex portion a is formed. At this time, the planar portions b having a diameter smaller than the outer diameter of the workpiece W remain on the end surfaces W1 on both sides of the workpiece W.

2)第二工程は、前記第一工程で形成された湾曲凸部aを研磨除去し、ワークWの両側の端面W1の角部W2に丸みRを形成する。即ち、図1(B)の部分拡大図のハッチング部分を研磨除去して、ワークの両側の端面W1の角部W2に、その外周面側のダレ量をRxとし端面側のダレ量をRyとした丸みRが形成される。   2) In the second step, the curved convex portions a formed in the first step are polished and removed, and roundness R is formed at the corner portions W2 of the end surfaces W1 on both sides of the workpiece W. That is, the hatched portion in the partially enlarged view of FIG. 1B is polished and removed, and the sagging amount on the outer peripheral surface side is Rx and the sagging amount on the end surface side is Ry at the corner W2 of the end surface W1 on both sides of the workpiece. Round R is formed.

ここで、ダレ量Rx、Ryは、可及的に等しい(近似している)ことが望ましい。例えば、設定ダレ量Rx、Ryともに、0.45mmとした場合、後述の如く許容誤差−0mm+0.4mmとする。   Here, it is desirable that the sagging amounts Rx and Ry be as equal (approximated) as possible. For example, when the set sag amounts Rx and Ry are both 0.45 mm, the allowable error is −0 mm + 0.4 mm as will be described later.

次に、本発明に係る第一工程と第二工程の両工程に流動バレル研磨装置を用いたときの加工状況の詳細を、図2を用いてより具体的に説明する。     Next, the details of the processing situation when the fluid barrel polishing apparatus is used in both the first step and the second step according to the present invention will be described more specifically with reference to FIG.

流動バレル研磨装置の研磨装置本体10における研磨槽(研磨処理室)12は、上部が開放された筒状の固定槽22と、該固定槽22の底部に水平回転する回転盤(流動化手段)24とで構成されている。   The polishing tank (polishing processing chamber) 12 in the polishing apparatus main body 10 of the fluid barrel polishing apparatus includes a cylindrical fixed tank 22 having an open top, and a rotating disk (fluidizing means) that rotates horizontally at the bottom of the fixed tank 22. 24.

そして、第一工程は「乾式法」、第二工程は「湿式法」、により加工を行なう。   Then, processing is performed by the “dry method” in the first step and the “wet method” in the second step.

(1)第一工程:
第一工程の研磨槽12は、内周横断面丸形でもよいが、図3に示す如く、内周断面五〜十角形とすることが望ましい(図例では八角形)。更には、研磨槽12の内周壁面12aは、従来の耐磨耗性ゴム(例えば、ウレタンライナー)で形成してよいが、ワークWより硬い伝熱性剛性材料(鉄系ないしセラミック)で形成することが望ましい。ワークWより硬い剛性材料としては、例えば、ワークWがSUJ−2の場合、ハイクロム鋳鋼とする。
(1) First step:
The polishing tank 12 in the first step may have a circular inner peripheral cross section, but preferably has a pentagonal decagonal inner cross section as shown in FIG. Further, the inner peripheral wall surface 12a of the polishing tank 12 may be formed of a conventional wear-resistant rubber (for example, urethane liner), but is formed of a heat conductive rigid material (iron-based or ceramic) harder than the workpiece W. It is desirable. As the rigid material harder than the workpiece W, for example, when the workpiece W is SUJ-2, high-chromium cast steel is used.

研磨槽12の内周横断面形状が丸形や内壁面が耐磨耗性ゴムで形成されている場合に比して、ワークWと固定槽22の研磨槽内周壁面12aとの衝突によりワーク端面W1外周部における湾曲凸部aの形成が促進され易いためである。また、固定槽22内周面を伝熱性剛性材料とすることにより、放熱が促進されて、ワーク相互およびワークと研磨槽内周壁面12aの衝突による研磨槽12内の昇温を抑制できる。前記固定槽22内周面にウレタンゴム等からなる耐磨耗性ゴムライナを取り付けて固定槽22の磨耗対策を施すようにすることが一般的であるが、このような構成にすると該耐磨耗性ゴムの弾性により本願発明の第一工程における湾曲凸部aを形成する塑性変形作用力が弱く、加工時間が長時間となるばかりでなく、研磨加工による研磨槽12内の温度上昇と発熱により前記耐磨耗性ゴムライナの磨耗が促進され、その役割を果たすことができないため、本願発明には不適切である。   Compared to the case where the inner circumferential cross-sectional shape of the polishing tank 12 is round and the inner wall surface is formed of wear-resistant rubber, the workpiece W is collided with the inner circumferential wall surface 12a of the polishing tank of the fixed tank 22. This is because the formation of the curved convex portion a in the outer peripheral portion of the end face W1 is easily promoted. Moreover, by making the inner peripheral surface of the fixed tank 22 a heat conductive rigid material, heat dissipation is promoted, and the temperature rise in the polishing tank 12 due to the collision between the workpieces and the work and the inner peripheral wall surface 12a of the polishing tank can be suppressed. In general, a wear-resistant rubber liner made of urethane rubber or the like is attached to the inner peripheral surface of the fixed tank 22 so as to take measures against wear of the fixed tank 22. The plastic deformation acting force for forming the curved convex portion a in the first step of the present invention is weak due to the elasticity of the conductive rubber, and the processing time is not only long, but also due to the temperature rise and heat generation in the polishing tank 12 due to polishing processing Since the wear of the wear resistant rubber liner is promoted and cannot play its role, it is not suitable for the present invention.

前記材質に関しては、回転盤24においても同様で、その上面を耐磨耗性ゴムライナとせずに、ワークより硬い伝熱性剛性材料とすることが望ましい。しかし、回転盤24の上面を剛性材料で形成した場合、ワークが回転盤24上面を滑って、流動作用力が抑制されるため、通常、回転盤24の上面に図3(A)、(B)に示すような滑り止めリブ24aを形成する必要がある。   Regarding the material, the same applies to the turntable 24, and it is desirable that the upper surface is not a wear-resistant rubber liner but is a heat-transfer rigid material harder than the workpiece. However, when the upper surface of the rotating disk 24 is formed of a rigid material, the work slides on the upper surface of the rotating disk 24 and the fluid action force is suppressed. It is necessary to form a non-slip rib 24a as shown in FIG.

また、固定槽22の内周壁面又はその近傍には、図4(A)〜(D)に示す如く、ワークWのマス流れ撹乱部材27を配することが望ましい。ワークWのマス流れ撹乱が促進されることにより研磨槽12の内周壁面12aに対するワークWの衝突エネルギーが増大し塑性変形作用が増大して、前記ワークWの端面外周の湾曲凸部aの形成が促進される。上記マス流れ撹乱部材27の形状は、丸棒(図4(B)・(C))、角柱、アングル材、帯板材等(図4(D))、任意である。   Moreover, it is desirable to arrange the mass flow disturbance member 27 of the workpiece W on the inner peripheral wall surface of the fixed tank 22 or in the vicinity thereof, as shown in FIGS. By promoting the mass flow disturbance of the workpiece W, the collision energy of the workpiece W against the inner peripheral wall surface 12a of the polishing tank 12 is increased, and the plastic deformation action is increased, thereby forming the curved convex portion a on the outer periphery of the end surface of the workpiece W. Is promoted. The shape of the mass flow disturbing member 27 is arbitrary, such as a round bar (FIGS. 4B and 4C), a prism, an angle material, a strip material, etc. (FIG. 4D).

そして、この第一工程における、回転盤24の外周速度は、ワークWの材質や大きさにより異なるが、ワークWが、例えば炭素鋼製で円柱外径が5mm以内で軸径比:2/1〜10/1の場合、6〜20m/sとなるように回転盤の回転速度を調節することが望ましい。20m/sを超えると、軸径比が小さい(直径が細く軸長が長い)ワークWの変形(曲がり)が懸念されるものであり、6m/s未満ではワークWに必要な塑性変形を形成し難い又は形成するのにその加工時間が長時間となる(実施例6参照)。   In this first step, the outer peripheral speed of the rotating disk 24 varies depending on the material and size of the work W. However, the work W is made of, for example, carbon steel and the outer diameter of the cylinder is within 5 mm, and the shaft diameter ratio is 2/1. In the case of -10/1, it is desirable to adjust the rotational speed of the turntable so as to be 6 to 20 m / s. If it exceeds 20 m / s, there is concern about deformation (bending) of the workpiece W having a small shaft diameter ratio (thin diameter and long shaft length), and if it is less than 6 m / s, plastic deformation necessary for the workpiece W is formed. Difficult to form or long processing time to form (see Example 6).

なお、第一工程は、乾式であり、発熱するとともに摩耗粉が発生するため、研磨槽内に間欠的に冷却水を噴霧しながら、吸引して、図2に示す如く、集塵機44に粉塵を導入する。粉塵爆発のおそれがあるため、研磨槽内を40〜60℃以下に制御しておく必要がある。   The first step is dry, and generates heat and generates abrasion powder. Therefore, suction is performed while spraying cooling water intermittently into the polishing tank, and dust is collected in the dust collector 44 as shown in FIG. Introduce. Since there is a risk of dust explosion, the inside of the polishing tank needs to be controlled to 40 to 60 ° C. or lower.

(2)第二工程
第二工程は、砥材を使用して湿式で行なう。即ち、研磨槽12内にワークとともに、水、砥材(メディアタイプ又はコンパウンドタイプ)、堆積防止剤を入れて行なう。ここで、添加する堆積防止剤の目的は、研磨後の砥材の磨耗粉およびワークWの磨耗粉が、固定槽22と回転盤24外周部との摺接隙間Sから水とともに固定槽22の底面と回転盤24の下側空間(下部流路)25に流入し、研磨中は研磨槽12内に循環し(戻り)、研磨終了後は研磨槽12外に排出される。その際に、砥材磨耗粉およびワークWの磨耗粉等が前記固定槽22の底面と回転盤24の下側空間(下部流路)25内に堆積するのを防止するためのものである。
(2) Second step The second step is performed wet using an abrasive. That is, the polishing tank 12 is filled with water, abrasive (media type or compound type), and deposition inhibitor together with the workpiece. Here, the purpose of the anti-deposition agent to be added is that the abrasion powder of the abrasive after polishing and the abrasion powder of the work W are in contact with the water from the sliding contact gap S between the fixed tank 22 and the outer peripheral portion of the rotating plate 24 in the fixed tank 22. It flows into the lower space (lower flow path) 25 of the bottom surface and the rotating disk 24, circulates (returns) in the polishing tank 12 during polishing, and is discharged out of the polishing tank 12 after polishing. At that time, abrasive wear powder and wear powder of the workpiece W are prevented from accumulating in the bottom surface of the fixed tank 22 and the lower space (lower flow path) 25 of the rotating plate 24.

堆積防止剤としては、消石灰(Ca(OH)2)が望ましく、例えば、水5L、砥材800gに対して、消石灰30〜100g添加する。堆積防止剤である消石灰が少なすぎては、堆積防止効果が期待できず、消石灰が多すぎては、ワークWと砥材の流動性が阻害されて、湿式研磨加工性が低下する。 As a deposition inhibitor, slaked lime (Ca (OH) 2 ) is desirable. For example, 30 to 100 g of slaked lime is added to 5 L of water and 800 g of abrasive. If there is too little slaked lime as an anti-deposition agent, the anti-deposition effect cannot be expected, and if there is too much slaked lime, the fluidity of the workpiece W and the abrasive is hindered, and wet polishing processability decreases.

前記第一工程(乾式バレル研磨)および第二工程(湿式バレル研磨)は、それぞれ、別の研磨槽(研磨装置)で行なってもよいが、図2に示すような、流動バレル研磨装置の研磨装置本体10が、集塵機(減圧吸引装置)44を備え、該集塵機44が固定槽22の底部と回転盤24下側との間に形成される下側空間25に流体排出配管42で接続され、該流体排出配管42が前記研磨槽側に連通開閉弁46を備え、前記集塵機44の手前側に排気・排液切替弁48を備える構成にすれば、前記乾式バレル研磨を必要とする第一工程と湿式バレル研磨を必要とする第二工程とを一台の流動バレル研磨装置で加工が可能となる。   The first step (dry barrel polishing) and the second step (wet barrel polishing) may be performed in separate polishing tanks (polishing apparatuses), respectively, but polishing by a fluid barrel polishing apparatus as shown in FIG. The apparatus main body 10 includes a dust collector (decompression suction device) 44, and the dust collector 44 is connected to a lower space 25 formed between the bottom of the fixed tank 22 and the lower side of the rotating plate 24 by a fluid discharge pipe 42. If the fluid discharge pipe 42 is provided with a communication opening / closing valve 46 on the polishing tank side and an exhaust / drainage switching valve 48 on the front side of the dust collector 44, the first step requiring the dry barrel polishing. And the second step requiring wet barrel polishing can be processed with a single fluid barrel polishing apparatus.

具体的には、特許文献3の図2に示されているものが使用可能であって、特許文献3の段落0030〜0035を次のように、若干の変更を加えて引用する。   Specifically, the one shown in FIG. 2 of Patent Document 3 can be used, and paragraphs 0030 to 0035 of Patent Document 3 are cited with some modifications as follows.

装置全体の主な構成要素は、研磨装置本体10と液体供給装置(液体供給手段)14と流体排出装置(液体・気体排出手段)18とから構成される。   The main components of the entire apparatus include a polishing apparatus main body 10, a liquid supply device (liquid supply means) 14, and a fluid discharge device (liquid / gas discharge means) 18.

上記研磨装置本体10の研磨槽(研磨処理室)12は、固定槽22と回転盤(流動化手段)24とで構成されている。具体的には、研磨槽12は、上方開放の竪型円筒状であり、回転盤24は、固定槽22の底部内周部に摺接隙間Sを有して駆動回転可能とされている。すなわち、回転盤24の中心部には駆動回転軸26と連結され、該回転軸26は、主軸モータ28とプーリー連結(ベルト伝動)された減速機30により駆動回転されるようになっている。   The polishing tank (polishing processing chamber) 12 of the polishing apparatus main body 10 includes a fixed tank 22 and a rotating disk (fluidizing means) 24. Specifically, the polishing tank 12 has a vertically open vertical cylindrical shape, and the rotating disk 24 has a sliding contact gap S on the inner periphery of the bottom of the fixed tank 22 and can be driven and rotated. That is, the center of the rotating disk 24 is connected to a drive rotary shaft 26, and the rotary shaft 26 is driven and rotated by a speed reducer 30 connected to a main shaft motor 28 and a pulley (belt transmission).

上記液体供給装置14は、通常、研磨液タンク32と水タンク(冷却・洗浄液用タンク)32A、該両タンク32、32Aの底部と研磨槽12の液体供給口22aとを接続する液体供給配管34とからなる。該液体供給配管34は、研磨液又は冷却液(洗浄液)を、選択的に汲み上げて研磨槽12に供給可能に、切替弁(図示せず。)及び供給ポンプ36を備えている。適宜供給ポンプ36の吐出側には開閉弁(図示せず。)を設けてもよい。   The liquid supply device 14 normally includes a polishing liquid tank 32, a water tank (cooling / cleaning liquid tank) 32A, and a liquid supply pipe 34 that connects the bottoms of the tanks 32 and 32A and the liquid supply port 22a of the polishing tank 12. It consists of. The liquid supply pipe 34 includes a switching valve (not shown) and a supply pump 36 so that a polishing liquid or a cooling liquid (cleaning liquid) can be selectively pumped and supplied to the polishing tank 12. An on-off valve (not shown) may be provided on the discharge side of the supply pump 36 as appropriate.

流体排出装置18は、流体排出配管42と、減圧吸引装置(集塵機)44とからなる。流体排出配管42は、研磨槽12側から開閉弁46、排気・排液切替弁48を備え、該排気・排液切替弁(集塵・排液切替弁)48を介して元部管部42aから二方向の分岐管部42b、42cに分岐されるとともに、該分岐管部の一方42bが排液系とされ他方42cが排気系とされて、それぞれ液体排出手段と気体排出手段が形成されている。   The fluid discharge device 18 includes a fluid discharge pipe 42 and a vacuum suction device (dust collector) 44. The fluid discharge pipe 42 includes an opening / closing valve 46 and an exhaust / drainage switching valve 48 from the polishing tank 12 side, and the original pipe section 42 a is connected via the exhaust / drain switching valve (dust collection / drainage switching valve) 48. Are branched into two-way branch pipe portions 42b and 42c, and one of the branch pipe portions 42b is a drainage system and the other 42c is an exhaust system, and a liquid discharge means and a gas discharge means are formed respectively. Yes.

また、排気系の分岐管部42cの先端側には減圧吸引装置44が接続されている。通常、減圧吸引装置44は、減圧ポンプ50と減圧ポンプ50の吸引側にバグフィルター(ろ布)52を備えた集塵機(集塵手段)44とされている。集塵手段は、バグフィルター集塵に限定されず、他の、フィルター集塵、さらには、遠心力集塵、電気集塵等も適用可能である。   Further, a vacuum suction device 44 is connected to the distal end side of the branch pipe portion 42c of the exhaust system. In general, the vacuum suction device 44 is a dust collector (dust collector) 44 having a vacuum pump 50 and a bag filter (filter cloth) 52 on the suction side of the vacuum pump 50. The dust collecting means is not limited to bag filter dust collection, and other filter dust collection, further centrifugal dust collection, electric dust collection, and the like can be applied.

本願発明の効果を確認するために実施した実施例・比較例・参照例の各試験に採用した共通する試験条件およびその評価基準を次に示す。   The common test conditions and evaluation criteria adopted in the tests of Examples, Comparative Examples, and Reference Examples carried out to confirm the effects of the present invention are as follows.

1)第一工程の試験に使用したバレル研磨装置
乾式流動バレル研磨装置(新東ブレーター株式会社製「EVF-04D型」:研磨槽実容量40L);研磨槽内周面形状・材質は、表1に示すものとした。回転盤は、いずれも、ウレタンライナー内張りとし、回転数1000min-1までインバータ可変としてあるものを使用した。集塵機が接続されている。
1) Barrel polisher used for the first step test Dry flow barrel polisher ("EVF-04D type" manufactured by Shinto Brater Co., Ltd .: Polishing tank actual capacity 40L); As shown in FIG. All the turntables were urethane liner linings, and the inverters were variable up to a rotation speed of 1000 min- 1 . A dust collector is connected.

2)第二工程の試験に使用したバレル研磨装置
湿式流動バレル研磨装置(新東ブレーター株式会社製「EVF-04型」:研磨槽実容量40L)、 固定槽内周面形状:丸形、材質:炭素鋼
3)ワーク:ベアリング鋼SUJ2、Φ2mm×5mm、(実施例2:Φ2mm×15mm)
4)第二工程の試験に使用した砥材:炭化珪素(「CF150」新東ブレーター株式会社製)
5)第二工程の試験に使用した堆積防止材:消石灰
6)第二工程の試験に使用した防錆コンパウンド:(「SLR」新東ブレーター株式会社製)
7)ダレ量の評価基準:目標とするダレ量Rx、Ryともに0.45mmとし、下記基準に従って評価した。
2) Barrel polisher used for the second step test Wet fluid barrel polisher ("EVF-04 type" manufactured by Shinto Brater Co., Ltd .: Polishing tank actual capacity 40L), Fixed tank inner peripheral shape: Round shape, Material : Carbon steel 3) Workpiece: Bearing steel SUJ2, Φ2mm × 5mm, (Example 2: Φ2mm × 15mm)
4) Abrasive material used for the test in the second step: Silicon carbide (“CF150” manufactured by Shinto Brater Co., Ltd.)
5) Anti-deposition material used in the second step test: slaked lime 6) Rust prevention compound used in the second step test: ("SLR" manufactured by Shinto Blator Co., Ltd.)
7) Evaluation criteria for sagging amount: The target sagging amounts Rx and Ry were both 0.45 mm, and evaluation was performed according to the following criteria.

◎:Rx、Ryともに、ダレ量誤差が−0mm+0.1mm以内であるもの。     A: Rx and Ry both have a sag amount error of −0 mm + 0.1 mm.

○:Rx、Ryの少なくとも一方のダレ量誤差が−0mm+0.1mmを超えるが、−0mm+0.4mm以内であるもの。     ○: The sag amount error of at least one of Rx and Ry exceeds −0 mm + 0.1 mm, but is within −0 mm + 0.4 mm.

×:Rx、Ryの少なくとも一方のダレ量誤差が、−0mm+0.4mmを超えるもの。     X: A sag amount error of at least one of Rx and Ry exceeds −0 mm + 0.4 mm.

8)処理時間の評価基準:第一工程および第二工程合計時間で評価し、下記基準で評価をした。   8) Evaluation criteria for treatment time: Evaluated based on the total time of the first step and the second step, and evaluated according to the following criteria.

◎:合計14h以内、○:14h超16h以内、△:16h超20h以内、
×:20h超
◎: Within 14h in total, ○: Over 14h within 16h, △: Over 16h within 20h,
×: Over 20h

以下に、各実施例・比較例・参照例の加工工程、洗浄・防錆処理の条件と、その評価結果を個々に示すが、実施例2以降の加工工程、洗浄・防錆処理の条件に関する記載は、実施例1との相違点のみ記載する。   The processing steps of each Example / Comparative Example / Reference Example, the conditions for cleaning / rust prevention treatment and the evaluation results are shown below individually. Only the differences from Example 1 are described.

(実施例1)
1)第一工程:研磨槽にワーク(サイズ:Φ2mm×5mm)を15kg投入し、回転数500min−1(外周速度は10.5m/s)にて6時間、乾式研磨処理をした。なお、この処理は、冷却水を20秒毎に10mL噴射しながら、かつ、集塵機で吸引しながら行なった。
Example 1
1) First step: 15 kg of a workpiece (size: Φ2 mm × 5 mm) was put into a polishing tank, and dry polishing was performed for 6 hours at a rotation speed of 500 min −1 (peripheral speed was 10.5 m / s). This treatment was performed while jetting 10 mL of cooling water every 20 seconds and sucking with a dust collector.

2)第二工程:研磨槽に、上記第一工程後のワーク15kgと、研磨水を5L、砥材を800g、および堆積防止剤を50g投入し、回転数300min−1(外周速度は6.3m/s)にて5時間、湿式研磨処理をした。 2) Second step: Into the polishing tank, 15 kg of the work after the first step, 5 L of polishing water, 800 g of abrasive, and 50 g of an anti-deposition agent are added, and the rotation speed is 300 min −1 (the outer peripheral speed is 6.3 m). / S) for 5 hours.

3)洗浄・防錆処理:バルブを開け、毎分10Lの水を流しながら、回転数300min−1で2分間洗浄処理した。その後、排水バルブを閉じ10Lの水と防錆コンパウンドを50mL投入し、1分間防錆処理をした。 3) Washing and rust prevention treatment: The valve was opened, and washing treatment was performed for 2 minutes at a rotation speed of 300 min- 1 while flowing 10 L of water per minute. Thereafter, the drain valve was closed and 50 mL of 10 L of water and an antirust compound were added, and an antirust treatment was performed for 1 minute.

評価結果:処理時間は、合計11時間(第一工程6時間、第二工程5時間)で処理時間評価:○となった。ダレ量はRx=0.48mm、Ry=0.50mmとなり、ダレ量評価:◎となった。   Evaluation result: The processing time was 11 hours in total (6 hours for the first step, 5 hours for the second step). The sagging amount was Rx = 0.48 mm and Ry = 0.50 mm, and the sagging amount evaluation was “◎”.

(実施例2)
1)第一工程:研磨槽に投入するワーク(サイズ:Φ2mm×15mm)を15kg投入し、回転数350min−1(外周速度は7.3m/s)にて2時間処理した。なお、この処理は、冷却水を20秒毎に10mL噴射しながらおこなった。
(Example 2)
1) First step: 15 kg of a workpiece (size: Φ2 mm × 15 mm) to be put into the polishing tank was put in and processed at a rotational speed of 350 min −1 (peripheral speed was 7.3 m / s) for 2 hours. This treatment was performed while jetting 10 mL of cooling water every 20 seconds.

2)第二工程:研磨槽に、上記第一工程後のワークと、研磨水を5L、研磨材を800g、および堆積防止剤50g投入し、回転数300min−1 (外周速度は6.3m/s)にて5時間処理した。 2) Second step: The work after the first step, 5 L of polishing water, 800 g of polishing material, and 50 g of an anti-deposition agent are charged into the polishing tank, and the rotational speed is 300 min −1 (the outer peripheral speed is 6.3 m / s). ) For 5 hours.

3)洗浄・防錆処理:バルブを開け、毎分10Lの水を流しながら、毎分300回転の回転数で2分間処理した。その後、排水バルブを閉じ10Lの水と防錆コンパウンド50mL投入して1分間処理した。   3) Cleaning / rust prevention treatment: The treatment was performed for 2 minutes at a rotation speed of 300 revolutions per minute while opening a valve and flowing 10 L of water per minute. Then, the drain valve was closed and 10 L of water and 50 mL of rust preventive compound were added and treated for 1 minute.

評価結果:処理時間は、合計4時間(第一工程2時間,第二工程2時間)で処理時間評価:◎となった。ダレ量はRx=0.48mm、Ry=0.50mmとなって、Rx、Ryともに、ダレ量評価:◎となった。   Evaluation result: The processing time was 4 hours in total (2 hours for the first step and 2 hours for the second step). The sagging amount was Rx = 0.48 mm and Ry = 0.50 mm, and the sagging amount evaluation was “◎” for both Rx and Ry.

(実施例3)
上記研磨槽の外壁から内側に2cmの位置に,φ9mmの鉄製の棒を等間隔に4本設置した。
Example 3
Four φ9 mm iron bars were installed at equal intervals at a position 2 cm inward from the outer wall of the polishing tank.

第一工程:乾式バレル研磨槽にワークを15kg投入し,毎分500回転の回転数(外周速度は毎秒10.5m)にて5時間処理。なおこの処理は、水を20秒毎に10mL噴射しながら行なった。   First step: 15 kg of workpiece is put into a dry barrel polishing tank and treated for 5 hours at 500 rpm (peripheral speed is 10.5 m / s). This treatment was performed while jetting 10 mL of water every 20 seconds.

第二工程:湿式流動バレル研磨槽に、上記ワークと、水を5L、研磨材を800gおび堆積防止剤を50g投入し,毎分300回転の回転数(外周速度は6.3m/s)にて4.5時間処理した。   Second step: The above work, 5L of water, 800g of abrasive and 50g of anti-deposition agent are added to the wet fluidized barrel polishing tank at a rotation speed of 300 revolutions per minute (peripheral speed is 6.3m / s) Treated for 4.5 hours.

洗浄・防錆処理:バルブを開け、毎分10Lの水を流しながら、毎分300回転の回転数で2分処理した。その後、 排水バルブを閉じ10Lの水と防錆コンパウンドを50mL投入して1分処理した。   Cleaning and rust prevention treatment: The treatment was performed for 2 minutes at a rotation speed of 300 revolutions per minute while opening the valve and flowing 10 L of water per minute. Thereafter, the drain valve was closed and 50 mL of 10 L of water and a rust preventive compound were added and treated for 1 minute.

評価結果:処理時間は、合計9.5時間(第一工程5時間、第二工程4.5時間)で、処理時間評価:◎となった。ダレ量はRx=0.45mm、Ry=0.48mmとなり、ダレ量評価:◎となった。   Evaluation results: The treatment time was 9.5 hours in total (5 hours for the first step, 4.5 hours for the second step). The sagging amount was Rx = 0.45 mm and Ry = 0.48 mm, and the sagging amount evaluation was “◎”.

(比較例1)
実施例1において、第一工程を行わず、第二工程の湿式バレル研磨のみを実施例1と同様に行い、Ry=0.50mmになるまで研磨を行った結果、その研磨時間は48時間を要した。その後に洗浄・防錆処理をおこなった。
(Comparative Example 1)
In Example 1, only the wet barrel polishing of the second step was performed in the same manner as in Example 1 without performing the first step, and polishing was performed until Ry = 0.50 mm. As a result, the polishing time required 48 hours. did. After that, cleaning and rust prevention treatment were performed.

評価結果; 処理時間は、48時間で処理時間評価:×、ダレ量はRx=1.12mm、Ry=0.50mmとなり、ダレ量評価:×となった。   Evaluation results: The processing time was 48 hours, the processing time evaluation was: x, the sagging amount was Rx = 1.12 mm, Ry = 0.50 mm, and the sagging amount evaluation was x.

(実施例4)
実施例1において、第一工程のバレル研磨槽として、水平横断面形状が丸形の炭素鋼製としたものを使用した。
Example 4
In Example 1, the barrel polishing tank in the first step was made of carbon steel having a round horizontal cross-sectional shape.

評価結果:処理時間は、合計18時間(第一工程13時間,第二工程5時間)で処理時間評価:△となった。ダレ量は、Rx=0.49mm、Ry=59mmで、ダレ量評価:○となった。   Evaluation results: The processing time was 18 hours in total (13 hours for the first step, 5 hours for the second step). The sagging amount was Rx = 0.49 mm, Ry = 59 mm, and the sagging amount evaluation was ◯.

(実施例5)
実施例1において、第一工程の乾式バレル研磨槽を八角形のウレタンライナー製としたものを使用した。
(Example 5)
In Example 1, the dry barrel polishing tank of the first step made of octagonal urethane liner was used.

評価結果:処理時間は、合計16時間(第一工程11時間、第二工程5時間)で処理時間評価:△となった。Rx=0.48mm、Ry=0.57mmで、ダレ量評価:○となった。   Evaluation results: The processing time was 16 hours in total (11 hours for the first step, 5 hours for the second step). When Rx = 0.48 mm and Ry = 0.57 mm, the sagging amount was evaluated as ◯.

(実施例6)
実施例1において、第一工程の乾式バレル研磨槽の回転盤の外周速度を3.1m/s(150min)としたが、処理時間は、合計17時間(第一工程12時間、第二工程5時間)で処理時間評価:△となった。ダレ量は、Rx=0.49mm,Ry=0.58mmで、ダレ量評価:○となった。
Example 6
In Example 1, the outer peripheral speed of the rotary disk of the dry barrel polishing tank in the first step was 3.1 m / s (150 min), but the processing time was 17 hours in total (12 hours in the first step, 5 hours in the second step). ), The processing time evaluation was △. The sagging amount was Rx = 0.49 mm, Ry = 0.58 mm, and the sagging amount evaluation: ○.

(参照例1)
実施例1において、第一工程の乾式バレル研磨槽の回転盤の外周速度を20.9m/s(1000min−1)として、処理時間を30分から6時間とした以外は同様にして行なった。いずれも端面全体が丸まっており、ダレ量評価は不可であった。
(Reference example 1)
In Example 1, the same procedure was performed except that the outer peripheral speed of the rotating disk of the dry barrel polishing tank in the first step was 20.9 m / s (1000 min −1 ) and the treatment time was changed from 30 minutes to 6 hours. In all cases, the entire end face was rounded, and the amount of sagging could not be evaluated.

(参照例2)
実施例1において、第一工程の乾式バレル研磨槽に水を噴霧しなかったが、水を噴霧しない場合は30分で76℃,1時間で83℃に上昇して、粉塵爆発のおそれがあり、実験を続行できなかった。
(Reference example 2)
In Example 1, water was not sprayed on the dry barrel polishing tank in the first step, but when water was not sprayed, the temperature rose to 76 ° C in 30 minutes and 83 ° C in 1 hour, and there was a risk of dust explosion. The experiment could not be continued.

上記実施例1〜6及び比較例1の主たる試験条件・試験結果及びそれらの評価結果を表1にまとめて示す。   Table 1 summarizes the main test conditions and test results of Examples 1 to 6 and Comparative Example 1 and the evaluation results thereof.

Figure 0005051167
Figure 0005051167

10 バレル研磨装置本体
12 流動バレル研磨槽(研磨処理室)
12a 研磨槽の内周壁面
22 固定槽
24 固定槽の内壁面
27 マス流れ撹乱部材
42 流体排出配管
44 集塵機
W ワーク
W1 ワーク両側の端面
W2 ワーク両側の端面の角部
Rx ワーク外周面側のダレ量
Ry ワーク端面側のダレ量
a 第一工程で形成される湾曲凸部
b 同じくワーク端面に残す平面部
10 Barrel Polishing Machine Body 12 Fluid Barrel Polishing Tank (Polishing Processing Chamber)
12a Inner wall surface of polishing tank 22 Fixed tank 24 Inner wall surface of fixed tank 27 Mass flow disturbance member 42 Fluid discharge pipe 44 Dust collector W Work W1 End face on both sides of work W2 Corner of end face on both sides of work Rx Amount of sagging on work outer face Ry The amount of sag on the workpiece end surface side a Curved convex portion formed in the first step b The flat surface portion that remains on the workpiece end surface

Claims (9)

円柱形の鉄系金属部品(以下「ワーク」という。)の両端面の角部(稜角部)に丸みを付すための加工方法であって、
前記端面に稜角部を有する前記ワークの多数本を同時処理するバレル研磨工程により行い、
該バレル研磨工程が、
前記ワークの前記稜角部を塑性変形させて、前記端面の外周端部に、前記ワークの外径より小さい径の平面部を前記端面に残すように湾曲凸部を形成する第一工程、及び、
前記湾曲凸部を研磨除去して前記丸みを形成する第二工程、
の二段階を含むことを特徴とする鉄系金属部品の加工方法。
A processing method for rounding corners (ridge corners) of both end faces of a cylindrical iron-based metal part (hereinafter referred to as “work”),
Performed by a barrel polishing process that simultaneously processes a large number of the workpieces having ridge corners on the end face,
The barrel polishing step
A first step of plastically deforming the ridge corner portion of the workpiece and forming a curved convex portion on the outer peripheral end portion of the end surface so as to leave a flat surface portion having a diameter smaller than the outer diameter of the workpiece on the end surface; and
A second step of polishing and removing the curved convex portion to form the roundness;
A method for processing an iron-based metal part comprising the following two steps.
上部が開放された筒状の固定槽と、該固定槽の底部に水平回転する回転盤とで構成される研磨槽(研磨処理室)を備えた流動バレル研磨装置を用いて、前記第一工程を乾式流動バレル研磨で行い、前記第二工程を湿式流動バレル研磨で行なうことを特徴とする請求項1記載の鉄系金属部品の加工方法。 Using the fluid barrel polishing apparatus provided with a polishing tank (polishing processing chamber) composed of a cylindrical fixed tank with an open top and a rotating plate that rotates horizontally at the bottom of the fixed tank, the first step 2. The method of processing an iron-based metal part according to claim 1, wherein the second step is performed by wet fluid barrel polishing. 前記第一工程において、前記回転盤の前記固定槽との摺接隙間部位の外周部周速を6〜20m/sの範囲内となるように設定することを特徴とする請求項2記載の鉄系金属部品の加工方法。 3. The iron according to claim 2, wherein, in the first step, the peripheral speed of the outer peripheral portion of the sliding contact gap portion of the rotating disk with the fixed tank is set within a range of 6 to 20 m / s. Of processing metallic metal parts. 前記第二工程において、前記研磨槽内に前記第一工程を経たワークに、砥材(メディアタイプおよびコンパウンドタイプを含む。)、堆積防止材、及び水を投入して行なうことを特徴とする請求項2又は3記載の鉄系金属部品の加工方法。 In the second step, an abrasive (including a media type and a compound type), a deposition preventive material, and water are added to the workpiece that has undergone the first step in the polishing tank. Item 4. A method for processing an iron-based metal part according to Item 2 or 3. 請求項1〜4のいずれか一記載の鉄系金属部品の加工方法の第一工程に使用する流動バレル研磨装置であって、
前記固定槽の内周横断面形状が五〜十角形であるとともに、前記固定槽の内壁面が前記ワークより硬い伝熱性剛性材料で形成されていることを特徴とする流動バレル研磨装置。
It is a fluid barrel polisher used for the 1st process of the processing method of the ferrous metal parts according to any one of claims 1 to 4,
A fluid barrel polishing apparatus characterized in that an inner peripheral cross-sectional shape of the fixed tank is a pentagonal and decagonal shape, and an inner wall surface of the fixed tank is formed of a heat conductive rigid material harder than the workpiece.
さらに、前記固定槽の内周壁面に接して又はその近傍に前記ワークのマス流れ撹乱部材が配されていることを特徴とする請求項5記載の流動バレル研磨装置。 6. The fluid barrel polishing apparatus according to claim 5, wherein a mass flow disturbance member of the workpiece is disposed in contact with or in the vicinity of an inner peripheral wall surface of the fixed tank. 前記回転盤が伝熱性剛性材料で形成され、さらに、その上面が滑り止め形状とされていることを特徴とする請求項6記載の流動バレル研磨装置。 7. The fluid barrel polishing apparatus according to claim 6, wherein the rotating disk is made of a heat conductive rigid material, and the upper surface of the rotating disk has a non-slip shape. さらに、前記研磨槽内へ冷却液を供給する液供給手段及び研磨槽内で発生する粉塵を吸引する吸引手段を備えることを特徴とする請求項7記載の流動バレル研磨装置。 8. The fluid barrel polishing apparatus according to claim 7, further comprising a liquid supply means for supplying a cooling liquid into the polishing tank and a suction means for sucking dust generated in the polishing tank. 請求項8記載の流動バレル研磨装置が、前記吸引手段として集塵機を備え、該集塵機と前記固定槽の底部(回転盤下側流路)との間が流体排出配管で接続され、該流体排出配管が前記研磨装置側に連通開閉弁を備え、前記集塵機側に排気・排液切替弁を備えている構成とされて、前記第一工程の乾式研磨と共に前記第二工程の湿式研磨も一台で可能とされていることを特徴とする流動バレル研磨装置。 9. A fluid barrel polishing apparatus according to claim 8, comprising a dust collector as the suction means, wherein a fluid discharge pipe connects between the dust collector and a bottom portion of the fixed tank (a flow path below the rotating disk). Is provided with a communication opening / closing valve on the polishing apparatus side and an exhaust / drainage switching valve on the dust collector side, and the wet polishing in the second step together with the dry polishing in the first step. A fluid barrel polishing apparatus characterized by being made possible.
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