JP5041400B2 - Foreign matter detection method and foreign matter detection device - Google Patents

Description

  The present invention relates to an improvement in a method and apparatus for detecting a foreign substance such as a magnetic substance mixed in a resin composition for semiconductor encapsulation, and more particularly to a superconducting quantum interference device (hereinafter referred to as “SQUID (Superconducting Quantum This is related to appropriately increasing the accuracy in the detection using “Interference Device)”.

(Necessity to remove foreign matter)
For example, thermosetting resin compositions that can be transfer-molded from the viewpoint of reliability and productivity are widely used for sealing semiconductor elements such as ICs and LSIs. The most common epoxy resin composition as a thermosetting resin composition for semiconductor encapsulation is usually premixed by mixing a predetermined amount of each raw material with a mixing device, and then a single-screw kneader, a twin-screw kneader, a heating After being melt-kneaded using a heat kneader such as a roll or continuous kneader, the mixture is pulverized by a pulverizer and tableted by a tablet machine. In these manufacturing processes, a manufacturing apparatus such as a mixing apparatus, a heat kneader, or a pulverizer may be worn, and a small amount of magnetic material such as iron powder may be mixed into the resin material as a foreign substance.

  However, if such a conductive foreign matter such as iron powder is present in the resin composition, there is a risk of shorting between pins and wirings in the semiconductor package and causing electrical failure. In particular, in recent years, a semiconductor package in which a semiconductor is sealed with a resin composition tends to be extremely small and thin, and as a result, the interval between pins and wiring in the semiconductor package is becoming narrower. Even if conductive foreign matter such as iron powder that is considerably fine is included, there is a risk of causing these electrical failures. For this reason, the size of conductive foreign matters such as iron powder to be removed is desired to be at a finer level than before, and the demand for detection thereof is becoming stricter.

(1. Limit of removal by adsorption)
With respect to this point, conventionally, it has been common to install a magnet in a part of the manufacturing process, etc., and to attract and remove foreign matters such as metal with this magnet (for example, see Patent Documents 1 to 3). ). However, foreign matter such as iron powder is very minute and minute, but it is necessary to remove it from the resin, which is a material. In other words, it was not always possible to say that foreign substances could be removed sufficiently.

(2. Conventional technology of detection by magnetic sensor)
On the other hand, various kinds of sensors have been used to detect foreign substances contained in the resin composition (see, for example, Patent Documents 4 and 5), but foreign substances in units of several tens of μm are detected. There was a problem that could not be enough. For this reason, using a magnetic sensor using a superconducting quantum interference device (SQUID) having a sensitivity that is 10 ³ times that of a conventional high-sensitivity magnetic sensor and 10 ⁶ times that of a Hall element, several tens of It has also been proposed to detect a fine magnetic material of about μm (see, for example, Patent Documents 6 to 8).

(3. Characteristics of SQUID)
However, the strength of the magnetic field that can be detected by the magnetic sensor composed of the SQUID depends on the distance from the magnetic sensor composed of the SQUID to the magnetic body. That is, as the detection distance is smaller, even a weak magnetic field can be detected. On the other hand, as the detection distance gradually increases, there is a tendency that the weak magnetic field cannot be detected. For this reason, as shown in FIG. 1A, if a magnetic sensor 14 having the same SQUID is used to detect foreign matter (magnetic body 2) such as iron powder contained in the inspected object 1 having different sizes, There is a possibility that the foreign matter contained in the small inspection object 1A that is far from the sensor 14 cannot be detected properly. Moreover, even if the object is large, if the position of the magnetic body 2 is far from the magnetic sensor 14, it may not be detected properly.

  Further, as shown in FIG. 10, the strength of the magnetic field that affects the detection range of the magnetic sensor composed of this SQUID varies depending on the size of the magnetic material to be detected. That is, a relatively large magnetic material generates a strong magnetic field and is easy to detect, whereas a relatively small magnetic material generates a weak magnetic field. Furthermore, it also differs depending on the type of magnetic material to be detected for the strength of the magnetic field that affects the detection range of the magnetic sensor made of SQUID. Therefore, the distance that the magnetic sensor composed of the SQUID can reliably detect the magnetic body is not determined only by the absolute distance from the magnetic sensor composed of the SQUID to the magnetic body. Even if the detection distance is set without considering it, it is not always possible to detect the magnetic material appropriately. That is, it is necessary to relatively determine the distance between the magnetic sensor composed of the SQUID and the magnetic body, and thus the size of the object to be inspected in consideration of the relationship between the size and the material of the magnetic body.

  Further, since the magnetic sensor composed of SQUID detects only the vertical vector component of the magnetic field entering the sensor surface, the detection range depends on the direction of the magnetic field created by the applied magnetic material. That is, as shown in FIG. 11, the strength of the magnetic field in the direction perpendicular to the sensor surface can be detected as a large value (for example, see Patent Document 7), while the direction of the applied magnetic field is the sensor surface. As the direction becomes parallel, the detection intensity decreases. Accordingly, it is of course necessary to set the sensor surface of the magnetic sensor made of SQUID and the direction of the applied magnetic field to be orthogonal, but the sensor surface of the magnetic sensor made of SQUID and the direction of the applied magnetic field Even if they are set to be orthogonal to each other, as described above, depending on the position of the magnetic body in the object to be inspected, the distance to the magnetic sensor composed of the SQUID varies, and there is a possibility that sufficient detection intensity cannot be ensured. .

  In addition, from the relationship between the detection range and the direction of the magnetic field, the magnetic field produced by the magnetic material not located immediately below the magnetic sensor made of SQUID is compared with the magnetic field produced by the magnetic material located directly below the magnetic sensor. Since the vertical vector component entering the surface is greatly reduced, if the object to be inspected is larger than the width of the magnetic sensor made of SQUID, it exists in the part other than the part directly under the magnetic sensor in the object to be inspected. There is a possibility that the magnetic material to be detected cannot be detected. Similarly, for example, as shown in FIG. 6 (A), when detecting a foreign substance that is a magnetic material over a wide area compared to the sensor surface 14a of the magnetic sensor 14 made of SQUID, the magnetic sensor under test is inspected. While maintaining the distance and orientation to the object, it is necessary to move the SQUID magnetic sensor for scanning, or to move the inspected object so that the inspected object passes directly below the SQUID magnetic sensor 14 Occurs. However, this requires a cost for the equipment for detection and may make it difficult to detect foreign matter appropriately.

JP 2003-80107 A JP 2002-273264 A JP 2003-10728 A Japanese Patent Laid-Open No. 11-23725 JP 2004-264266 A JP-A-7-77516 Japanese Patent Laid-Open No. 10-10091 Japanese Patent Laid-Open No. 10-268013

  In view of the above-mentioned problems, the problem to be solved by the present invention is to improve the detection accuracy by making full use of the characteristics of a magnetic sensor composed of SQUID, and to exhibit its high sensitivity performance. An object of the present invention is to provide a foreign matter detection method and a foreign matter detection device capable of reliably and appropriately detecting a foreign matter such as a magnetic substance.

As a first means for solving the above-mentioned problems, the present invention applies a magnetic field to an object to be inspected by a magnetic field applying means installed on a conveyance path of the object to be inspected, and contains a magnetic material contained in the object to be inspected. In a foreign object detection method for detecting a magnetic substance in an inspection object by a magnetic detection means having at least one magnetic sensor comprising a superconducting quantum interference element installed on the inspection object conveyance path, Means for applying a magnetic field to the object to be inspected from a direction perpendicular to the conveying direction of the object to be inspected, and the magnetic sensor means arranged so that the sensor surface of the magnetic sensor is perpendicular to the direction of application of the magnetic field The magnetic field applying step and the magnetic detecting step for detecting the magnetic material by changing the relative positional relationship between the magnetic field applying means and the magnetic detecting means and the object to be inspected are perpendicular to the conveyance direction of the object to be inspected. In There row for each application direction of the plurality of magnetic field of different directions to complex, wherein a plurality of times rows Ukoto the detection of the applied and the magnetic of the magnetic field in different directions direction crossing at right angles to the conveying direction of the object to be inspected The present invention provides a method for detecting foreign matter.

According to the present invention, as a second means for solving the above-described problem, in the first solution means, a magnetic field is applied from a direction intersecting the inspection object at a right angle to the inspection object conveyance direction by the magnetic field application means. A pair of magnetic sensors pass through the same plane where the sensor surface of the magnetic sensor is perpendicular to the magnetic field application direction and intersect at right angles to the direction of conveyance of the inspection object. Magnetic field application step and magnetic detection step for detecting a magnetic material by means of magnetic detection means arranged so as to face each other with an object sandwiched between at least a half-circular portion in a direction intersecting at right angles to the conveyance direction of the object to be inspected The present invention provides a foreign object detection method characterized in that the detection is performed for each of a plurality of different magnetic field application directions.

As a third means for solving the above-mentioned problems, the present invention provides a plurality of sets of magnetic field application means and magnetic field application means and magnetic detection means in the first or second solution means. The magnetic detection means are arranged in different directions intersecting at right angles to the direction of conveyance of the inspection object and at a predetermined interval in the conveyance direction of the inspection object, and a magnetic field is applied to the inspection object. The present invention provides a method for detecting a foreign substance, characterized in that a magnetic field application step for detecting a magnetic substance after applying a magnetic field and a magnetic detection step are performed for each of a plurality of magnetic field application directions different from each other in the circumferential direction of an object to be inspected. .

The present invention provides, as a fourth means for solving the above-described problem, in the first or second solving means, wherein a plurality of magnetic sensors or a plurality of sets of magnetic sensors are arranged in a direction in which an object to be inspected is conveyed. in different directions of a direction crossing at right angles to, and arranged on the same plane intersecting at right angles to the conveying direction of the object to be inspected, the magnetic field applying means to the conveying direction of the object to be inspected Rotate in a direction that intersects at right angles to change the magnetic field application direction to a direction perpendicular to the sensor surface of at least one magnetic sensor, and then repeat the test object multiple times on the magnetic field application means and magnetic detection means By applying the magnetic field to the object to be inspected, the magnetic field application process for detecting the magnetic material and the magnetic detection process are applied in a direction perpendicular to the direction of conveyance of the object to be inspected. Every There is provided a method of detecting foreign matter according to claim Ukoto.

According to the present invention, as a fifth means for solving the above-described problem, in either the first or the second solution means, the magnetic sensor or the object to be inspected intersects at right angles to the conveyance direction. The magnetic detection means and magnetic field application means in which a set of magnetic sensors are arranged on the same plane are rotated in a direction perpendicular to the conveyance direction of the inspection object, and then the magnetic field is applied to the inspection object. The magnetic field applying step for detecting the magnetic material after applying the magnetic field to the object to be inspected and the magnetic detecting step are crossed at right angles to the direction of conveyance of the object to be inspected by repeatedly passing through the means and the magnetic detecting means. The present invention provides a foreign object detection method, which is performed for each of the application directions of a plurality of magnetic fields having different directions .

According to the present invention, as a sixth means for solving the above-described problem, in either the first or the second solving means, the magnetic sensor or the object to be inspected intersects at right angles to the conveyance direction. A set of magnetic sensors are arranged on the same plane, and the object to be inspected is rotated at an arbitrary angle in a direction perpendicular to the direction of conveyance of the object to be inspected. The magnetic field application step for detecting the magnetic material after applying the magnetic field to the object to be inspected and the magnetic detection step are crossed at right angles to the direction of conveyance of the object to be inspected by repeatedly passing through the means a plurality of times. The present invention provides a foreign object detection method, which is performed for each direction in which a plurality of magnetic fields are applied.

  According to the present invention, as a seventh means for solving the above-described problem, in any one of the first to sixth solving means, the width of the conveyance path is adjusted to the width of the sensor surface of a single magnetic sensor. The present invention provides a foreign object detection method, wherein a magnetic material is detected by magnetic detection means having at least one magnetic sensor.

  The present invention provides, as an eighth means for solving the above-mentioned problem, in any one of the first to seventh solving means, the object to be inspected is dropped into a cylinder having a fixed shape, and installed on the outer periphery of the cylinder. It is another object of the present invention to provide a foreign object detection method characterized in that a magnetic material is detected by a magnetic detection means.

  The present invention provides, as a ninth means for solving the above-described problem, in any one of the first to eighth solving means, a detection distance at which the magnetic sensor can detect the magnetic substance in the inspection object. The foreign substance detection method is characterized in that the magnetic substance is detected by a magnetic detection means after being processed into a size that can pass through the above range.

  According to the present invention, as a tenth means for solving the above problem, in the ninth solving means, the detection distance at which the magnetic sensor can detect the magnetic material is set to the size of the target magnetic material. The present invention provides a foreign object detection method characterized in that it is set accordingly.

  An object of the present invention is to provide a detection distance at which the magnetic sensor can detect a magnetic material in the ninth or tenth solution means as an eleventh means for solving the above-described problems. The present invention provides a method for detecting a foreign substance, which is set according to the material of a magnetic body.

  According to the present invention, as a twelfth means for solving the above problem, in any one of the ninth to eleventh solving means, the size of the inspection object is set within the width of the sensor surface of the magnetic sensor. The present invention provides a method for detecting foreign matter characterized by the above.

  According to the present invention, as a thirteenth means for solving the above problems, in any one of the first to twelfth solving means, the object to be inspected is a resin composition for semiconductor encapsulation, The object of the present invention is to provide a foreign matter detection method characterized by detecting a magnetic substance contained in a semiconductor sealing resin by magnetic detection means as a product inspection of a resin composition.

  The present invention provides, as a fourteenth means for solving the above-mentioned problems, in any one of the first to twelfth solving means, wherein the object to be inspected is a raw material of the resin composition for semiconductor encapsulation, Provided is a foreign matter detection method characterized by detecting a magnetic substance contained in a raw material of a resin composition for encapsulating a semiconductor by means of magnetic detection as a product inspection of the raw material before manufacturing the resin composition for fixing. is there.

As a fifteenth means for solving the above-mentioned problems, the present invention provides a transport path for transporting an object to be inspected, and a magnetic material installed in the object to be tested by applying a magnetic field to the object to be inspected. A magnetic field applying means for magnetizing the body; and a magnetic detection means having at least one magnetic sensor comprising a superconducting quantum interference element that is installed on the inspection object conveyance path and detects the magnetic field applied to the inspection object by the magnetic field applying means. In a foreign matter detection device for detecting a magnetic material in an inspection object by a magnetic detection means after applying a magnetic field to the inspection object by a magnetic field application means and magnetizing a magnetic material contained in the inspection object, The magnetic field applying means applies a magnetic field to the inspection object from different directions intersecting at right angles to the conveyance direction of the inspection object, and the magnetic sensor of the magnetic detection means has a sensor surface perpendicular to the application direction of the magnetic field. Arrange to be Is, the magnetic field applying means and the magnetic detection means, by changing the relative positional relationship between the magnetic field applying means and the magnetic detecting means and the object to be inspected, in a direction crossing at right angles to the conveying direction of the object to be inspected An object of the present invention is to provide a foreign object detection device characterized in that a magnetic field application and a magnetic material detection are performed a plurality of times for each of a plurality of different magnetic field application directions.

According to the present invention, as a sixteenth means for solving the above-described problems, in the fifteenth solution means, the magnetic detection means has a sensor surface perpendicular to a magnetic field application direction and transports an object to be inspected. A pair of magnetic sensors arranged so as to face each other with the inspection object passing on the same plane intersecting at right angles to the direction, and the magnetic field applying means and the magnetic detection means at least convey the inspection object Magnetic field application and magnetic substance detection are performed for each of the application directions of a plurality of magnetic fields different from each other in a direction perpendicular to the conveyance direction of the object to be inspected with respect to a half-circumferential portion in a direction perpendicular to the direction. A feature of the foreign matter detection device is provided.

According to the present invention, as a seventeenth means for solving the above-described problem, in any one of the fifteenth and sixteenth solving means, the magnetic field applying means and the magnetic detecting means are combined to form a plurality of sets of magnetic field applying means. And the magnetic detection means are arranged in different directions with respect to the direction intersecting at right angles to the conveyance direction of the inspection object and at a predetermined interval in the conveyance direction of the inspection object. An application unit and a magnetic detection unit are a foreign object detection device that applies a magnetic field and detects a magnetic substance for each of a plurality of magnetic field application directions different from each other in a direction perpendicular to the conveyance direction of an object to be inspected. It is to provide.

According to the present invention, as an eighteenth means for solving the above-described problem, in any one of the fifteenth and sixteenth solution means, the magnetic detection means intersects at a right angle to the conveyance direction of the object to be inspected. A plurality of magnetic sensors or a plurality of sets of magnetic sensors arranged on the same plane that intersect with each other in a direction different from the direction and perpendicular to the conveyance direction of the object to be inspected. Further, the magnetic field application direction is changed in such a manner that the magnetic field application means is rotated in a direction perpendicular to the conveyance direction of the object to be inspected to change the magnetic field application direction to a direction perpendicular to the sensor surface of at least one magnetic sensor. also comprising means, magnetic field applying means and the magnetic detecting means, the magnetic field from different directions direction crossing at right angles to the conveying direction of the inspection object to be inspected on which is applied from the magnetic field applying direction changing means, the By査物passes repeatedly magnetic field applying means and the magnetic detecting means detects a magnetic field application and magnetic every application direction of the plurality of magnetic fields in different directions to intersect at right angles to the conveying direction of the object to be inspected It is an object of the present invention to provide a foreign object detection device characterized by the above.

According to the present invention, as a nineteenth means for solving the above-described problem, in any one of the fifteenth and sixteenth solving means, the magnetic detection means is adapted to carry a single magnetic sensor or an object to be inspected. The detection device rotates the magnetic field applying means and the magnetic detection means in a direction perpendicular to the conveyance direction of the object to be inspected. An application and detection direction changing unit is further provided, and the magnetic field application unit and the magnetic detection unit are configured to apply magnetic fields from different directions intersecting the inspection object at a right angle to the conveyance direction of the inspection object by the application and detection direction changing unit. in terms of the application of the, by the object to be inspected passes repeatedly magnetic field applying means and the magnetic detecting means, the direction of different magnetic field markings for each application direction of the magnetic field crossing at right angles to the conveying direction of the object to be inspected And there is provided a detection device for foreign matter, characterized in that the detection of the magnetic substance.

According to the present invention, as a twentieth means for solving the above-described problem, in any one of the fifteenth and sixteenth solving means, the magnetic detection means is adapted to carry a single magnetic sensor or an object to be inspected. The detection device rotates the object to be inspected at an arbitrary angle in the direction intersecting at right angles to the conveyance direction of the object to be inspected. An inspection object rotating means is further provided, and the magnetic field applying means applies a magnetic field to the inspection object rotated by the inspection object rotating means from a direction perpendicular to the conveyance direction of the inspection object , The magnetic detection means has an object to be detected repeatedly for each application direction of a plurality of magnetic fields different from each other in a direction perpendicular to the conveyance direction of the inspection object by repeatedly passing the inspection object multiple times. Detection of characteristic foreign matter It is to provide a location.

  According to the present invention, as a twenty-first means for solving the above-described problem, in any one of the eighteenth to twentieth solving means, the detection device is configured to convey the object to be inspected from the outlet of the conveying path to the inlet. The inspection object conveying means further includes a foreign object detection device characterized by repeatedly passing the inspection object through the magnetic field applying means and the magnetic detection means.

  According to the present invention, as a twenty-second means for solving the above problem, in any one of the fifteenth to twenty-first means, the conveyance path has a width that matches a width of a sensor surface of a single magnetic sensor. The magnetic detection means provides a foreign object detection device that detects a magnetic material contained in an object to be inspected conveyed along a conveyance path.

  According to the present invention, as a twenty-third means for solving the above problem, in any one of the fifteenth to twenty-second solution means, the transport path is formed of a cylinder having a fixed shape, and the magnetic detection means is an outer periphery of the cylinder. The present invention provides a foreign object detection device that detects a magnetic material contained in an object to be inspected that is installed in a cylinder and falls inside a cylinder.

  According to the present invention, as described above, the object to be inspected is processed to a size that allows the magnetic sensor to pass within the detection distance range in which the magnetic body can be detected. Magnetic material existing between the surface and the surface of the object to be inspected can be detected, and the magnetic material is included in any height position in the object to be inspected as long as it is within this size range. However, there is a practical advantage that the magnetic field produced by the magnetic material can be reliably detected with high accuracy.

  In this case, in particular, according to the present invention, as described above, since the detection distance of the magnetic sensor is set according to the size of the magnetic material to be detected, a relatively small magnetic field whose magnetic field tends to be weak. Even when the purpose is to detect a body, there is an advantage that a magnetic body can be reliably detected by setting the detection distance to be small accordingly.

  Similarly, in this case, according to the present invention, since the detection distance of the magnetic sensor is set according to the material of the magnetic material to be detected as described above, for example, the magnetic field generated by magnetization tends to be weak. If the object is to detect foreign matter such as stainless steel, the magnetic material can be reliably detected by setting the detection distance to be small according to the strength of the magnetic field.

  Further, in this case, according to the present invention, as described above, since the size of the object to be inspected is set within the width of the sensor surface of the magnetic sensor, the magnetic body that exists in a direction perpendicular to the sensor surface. In a magnetic sensor composed of a SQUID that detects a magnetic field, there is an advantage that a magnetic field produced by the magnetic material can be reliably detected with high accuracy regardless of the position of the magnetic material in the left-right direction in the inspection object. .

In addition, according to the present invention, as described above, the magnetic material is applied and the magnetic material is detected multiple times from different directions in the direction intersecting at right angles to the conveyance direction of the inspection object. However, there is an advantage that it can be surely detected at any position on a cross section cut by a plane intersecting at right angles to the conveyance direction of the inspection object.

  In this case, in particular, according to the present invention, as described above, a set arranged to face each other with the inspection objects passing on the same plane intersecting at right angles to the conveyance direction of the inspection objects. Since the magnetic substance is detected by the magnetic detecting means having the magnetic sensor, if the magnetic field is applied and detected only to the half circumference part (180 °) of the magnetic substance, the entire circumference (360 °) of the inspection object There is an actual advantage that a magnetic substance can be detected over a wide range.

  Similarly, in this case, in particular, according to the present invention, as described above, the plurality of magnetic field applying means and the plurality of magnetic detection detecting means are directed in mutually different directions with respect to the circumferential direction of the object to be inspected. In addition, since the inspection object is arranged at a predetermined interval in the conveying direction, the inspection work of the magnetic material over the entire circumference of the inspection object can be completed by passing the inspection object once through the inspection process. There is an advantage that a magnetic substance can be detected with high accuracy in a short time.

  Furthermore, in this case, in particular, according to the present invention, as described above, a magnetic field is applied to the object to be inspected from a plurality of directions different from each other in the circumferential direction, and the same plane intersects at right angles to the conveyance direction of the object to be inspected. Since the magnetic detection means having a plurality of magnetic sensors or a plurality of sets of magnetic sensors arranged above is repeatedly passed in each direction in which the magnetic field is applied, only the magnetic sensor is installed at one location in the direction of conveyance of the inspection object. Thus, the magnetic body can be detected over the entire circumference of the object to be inspected, and there is an advantage that the magnetic body can be detected with high accuracy with a simple device.

  In this case, in particular, according to the present invention, as described above, by rotating the magnetic field applying means, the relationship between the sensor surface of the magnetic sensor and the application direction of the magnetic field is adjusted relatively orthogonally, while being inspected. A magnetic field is applied to an object from a plurality of different circumferential directions, and is repeatedly passed through a magnetic detection means consisting of a magnetic sensor installed at one place in the conveyance direction of the inspection object for each magnetic field application direction. By simply installing a plurality or a plurality of sets of magnetic sensors, the magnetic body can be detected over the entire circumference of the object to be inspected, and the magnetic body can be accurately detected at low cost with a simple device. There are real benefits.

  In addition, in this case, in particular, according to the present invention, as described above, by rotating the magnetic field applying means and the magnetic detecting means or the inspection object, the sensor surface of the magnetic sensor and the direction of applying the magnetic field Magnetic detection means having a magnetic sensor installed at one location in the direction of conveyance of the inspection object by applying a magnetic field to the inspection object from a plurality of different circumferential directions while adjusting the relationship relatively orthogonally Since the magnetic field is repeatedly passed for each direction of application of the magnetic field, it is possible to perform the work of detecting the magnetic material over the entire circumference of the object to be inspected simply by installing one or a set of magnetic sensors. There is an advantage that a magnetic substance can be detected with high accuracy at low cost.

  Further, according to the present invention, as described above, when the inspection object is repeatedly passed through the magnetic detection means, the inspection object is automatically conveyed again to the entrance of the conveyance path by the inspection object conveyance means. Therefore, there is an actual benefit that the processing efficiency can be improved by facilitating the work.

  Furthermore, according to the present invention, as described above, the width of the transporter in the transport path is formed in accordance with the width of the sensor surface of the single magnetic sensor, so that the magnetic material to be detected must be the SQUID. Because it passes directly under the magnetic sensor, it is possible to accurately detect the magnetic material with a simple structure without moving the magnetic sensor and moving the object to be inspected. There is a real benefit that can be suppressed.

  According to the present invention, as described above, the object to be inspected is dropped into a cylinder having a fixed shape, and the magnetic body is detected by the magnetic detection means having the magnetic sensor installed on the outer periphery of the cylinder. If the moving speed of the object is within a certain range, the magnetic sensor composed of the SQUID that is not greatly affected can appropriately exhibit the high sensitivity performance to detect the foreign matter reliably, and the processing line of the inspection object There are also benefits that can be easily applied.

  According to the present invention, as described above, the magnetic substance contained in the semiconductor sealing resin is detected by the magnetic detection means having the magnetic sensor as the product inspection of the semiconductor sealing resin composition. There is an advantage that it is possible to easily determine whether the resin composition for stopping is appropriate or not, and to prevent problems such as a short circuit between pins and wires in the semiconductor package.

  According to the present invention, as described above, the raw material of the resin composition for semiconductor encapsulation is used as an object to be inspected, and the magnetic material contained in the raw material by the magnetic sensor as an acceptance inspection of the raw material before the production of the semiconductor sealing resin composition. Since the body is detected, it is possible to prevent the processing of the raw material mixed with foreign substances into the resin composition for encapsulating the semiconductor, thereby improving the yield of the product and making the product unsuitable after the fact. There is an actual benefit that can avoid the hassle of eliminating.

  DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described in detail with reference to the drawings. FIGS. 1B to 7 and 8B and 9 show a foreign object detection apparatus 10 according to the present invention. The state of carrying out the detection method is shown. This foreign matter detection apparatus 10 includes a magnetic field applying means 11 (not shown) that magnetizes a magnetic body 2 contained in the inspection object 1 by applying a magnetic field to the inspection object 1, At least one magnetic sensor 14 comprising a transport path 12 for transporting the inspection object 1 to which the magnetic field is applied by the magnetic field applying means 11 and a superconducting quantum interference element (SQUID) installed on the transport path 12 by the transport path 12. And magnetic detection means 13.

  In the foreign matter detection method of the present invention, a magnetic field applying unit 11 applies a magnetic field to the inspection object 1 to magnetize the magnetic body 2 contained in the inspection object 1, and thereafter, FIGS. As shown in FIG. 8 (B) and FIG. 9, the magnetic detection means 13 having at least one magnetic sensor 14 made of SQUID installed on the conveyance path 12 of the inspection object 1 is used in the inspection object 1. The magnetized magnetic body 2 is detected. Therefore, the magnetic field application unit 11 is installed upstream of the magnetic sensor 14 in the transport path 12. In addition, as the magnetic field applying means 11, specifically, a permanent magnet can be used, and a uniform magnetic field is created from one permanent magnet to the other permanent magnet by a pair of permanent magnets. Can be installed.

  In this case, the direction of the magnetic field applied by the magnetic field applying means 11 such as these permanent magnets is relatively relative to the magnetic sensor 14 made of SQUID (at least in the form of installing a plurality of magnetic sensors 14 described later). One of the magnetic sensors 14) must be set in a direction perpendicular to the sensor surface 14a. For example, in the embodiment shown in FIG. 1, a magnetic field is applied in the vertical direction in FIG. In addition, at least one magnetic sensor 14 is installed in the vertical direction. As a result, in the embodiment shown in FIG. 1, a magnetic field is applied in a direction perpendicular to the conveyance direction by the conveyance path 12. On the other hand, in other embodiments shown in FIGS. 3 to 7 and the like, as shown in FIGS. 2A and 2B, the sensor surface 14a of the magnetic sensor 14 and the direction of the applied magnetic field (arrow G). Are set to be relatively vertical.

  This is because the detected intensity of the magnetic sensor 14 composed of SQUID is determined by the component that the magnetic field generated by the applied magnetic body 2 enters perpendicularly to the sensor surface 14a of the magnetic sensor 14, and as shown in FIG. Since the intensity of the magnetic material to which a magnetic field is applied in a direction perpendicular to the sensor surface 14a can be detected as a large value, the high sensitivity performance is appropriately exhibited in consideration of the directivity of the SQUID. This is for reliably detecting the fine magnetic body 2. In this case, after the magnetic sensor 14 applies a magnetic field in a specific direction to the inspection object 1 by the magnetic field applying unit 11 so that the magnetic sensor 14 does not detect an external magnetic field other than the magnetic field applied to the inspection object 1, at least magnetic Until the detection by the magnetic detection means 13 having the sensor 14 is completed, the inspection process including the magnetic detection means 13 having the magnetic sensor 14 and the inspection object 1 is covered with a magnetic shield such as permalloy (not shown), It is desirable to shield from environmental magnetic fields.

  In this case, as shown in FIG. 1B, the inspection object 1 is processed into a size that allows the magnetic sensor 14 to pass through a detection distance range in which the magnetic sensor 14 can detect the magnetic body 2. The magnetic body 2 can be detected by the magnetic detection means 13 having at least one of the above. Thereby, as can be seen from comparison with FIG. 1A, the magnetic sensor 14 can detect the magnetic body 2 existing between the sensor surface 14a and the surface of the conveyance path 12 of the inspection object 1. If within this size range, the magnetic field produced by the magnetic body 2 can be reliably detected with high accuracy regardless of the height of the magnetic body 2 contained in the inspection object 1.

  In this case, the detection distance at which the magnetic sensor 14 can detect the magnetic body 2, that is, the distance from the sensor surface 14 a of the magnetic sensor 14 to the surface of the conveyance path 12 depends on the size of the target magnetic body 2. It is desirable to set them. As a result, even when the purpose is to detect a relatively small magnetic body 2 whose magnetic field tends to be weak, the magnetic body 2 can be reliably detected by setting the detection distance to be small accordingly. Can do.

  Similarly, in this case, the detection distance at which the magnetic sensor 14 can detect the magnetic body 2, that is, the distance from the sensor surface 14 a of the magnetic sensor 14 to the surface of the transport path 12 is the material of the target magnetic body 2. It is desirable to set according to. Thus, for example, when the purpose is to detect a foreign material such as stainless steel in which the magnetic field generated by application tends to be weak, by setting the detection distance small according to the strength of the magnetic field, It can be detected reliably. On the other hand, when the target magnetic body 2 is iron powder, a magnetic field stronger than stainless steel is created by application. Can be detected.

  Furthermore, in this case, it is desirable to set the width of the inspection object 1 within the width of the sensor surface 14a of the magnetic sensor 14, as shown in FIG. Thereby, in the magnetic sensor 14 composed of the SQUID that detects the magnetic body 2 present in the direction perpendicular to the sensor surface 14a, the magnetic body 2 is high at any position in the left-right direction in the inspection object 1. The magnetic field produced by the magnetic body 2 can be reliably detected with accuracy.

  Considering the above, it is desirable that the inspection object 1 is processed into the same shape with a certain size set according to the size and material of the magnetic body 2 to be detected, as shown in FIG. In this case, it is preferable that the shape is a substantially cylindrical shape, and the upper surface and the bottom surface are transported in the transport direction by the transport path 12 as shown in FIG. In this case, the circular diameters of the substantially cylindrical upper surface and the bottom surface, that is, the size of the inspection object 1 are set so as to satisfy the detection range conditions in the height direction and the width direction.

  However, since the appropriate diameter varies depending on the material of the target magnetic body 2 as described above, for example, stainless steel detection and iron powder detection are installed at appropriate detection distances (different). Detection can be performed by different detection devices 10 comprising magnetic detection means 13 having at least one magnetic sensor 14 (installed at a height position). However, in one detection device 10, the magnetic sensor 14 is set to be displaceable in the height direction, and the height position is appropriately adjusted according to the size and material of the target magnetic body 2. , Can also respond.

(First embodiment)
A first embodiment of the present invention will be described with reference to FIGS. 2 to 7. In this embodiment, a magnetic field is applied to the inspection object 1 from the circumferential direction of the inspection object 1, and a magnetic sensor The detection step of detecting the magnetic body 2 by the magnetic detection means 13 having at least one 14 is performed a plurality of times from different directions in the circumferential direction of the inspection object 1. As a result, as shown in FIG. 2, the magnetic body 2 can be reliably detected at any position on the cross section cut by a plane intersecting at right angles to the conveyance direction of the inspection object 1. .

  In order to perform the application of the magnetic field and the detection of the magnetic body 2 a plurality of times from different directions in the circumferential direction of the inspection object 1, various means can be considered. First, (1) the direction of the magnetic field of the magnetic sensor 14 2A, using one magnetic sensor 14 for each magnetic field direction (arrow G), as shown in FIG. 2B, and as shown in FIG. It is conceivable to use a set of magnetic sensors 14 for the direction of the magnetic field (arrow G).

  In the former case, that is, when one magnetic sensor 14 is used for each magnetic field direction, as shown in FIG. 2A, the magnetic sensor 14 is moved in the magnetic field application direction (arrow G). The sensor surface 14a is arranged so as to be vertical. On the other hand, in the latter case, that is, when the magnetic sensors 14 are used as a set, the sensor surface 14a is perpendicular to the magnetic field application direction (arrow G) and the set of the magnetic sensors 14 is inspected. On the same plane that intersects at right angles to the conveyance direction of the object 1, they are arranged so as to face each other with the passing inspection object 1 interposed therebetween.

  In this case, which form is selected depends on the strength of the magnetic field generated by the magnetic body 2 to be detected, that is, the relationship with the size and material of the magnetic body 2 that influences the strength of the magnetic field, and a magnetic sensor composed of SQUID. 14 can be determined relatively in relation to the detection capability of itself. Specifically, the inspection object 1 is relatively small, or the detection capability of the magnetic sensor 14 itself is high, and the detection range of one magnetic sensor 1 is all in the height and width directions of the inspection object 1 ( In the embodiment shown in FIG. 2, in the case of the diameter of the object 1 to be inspected), as shown in FIG. 2 (A), one magnetic field for each magnetic field direction (arrow G). A sensor 14 can be used.

  On the other hand, on the contrary, for example, the inspection object 1 is relatively large, or the detection range of the magnetic sensor 14 itself is about half of the height and width direction of the inspection object 1 (shown in FIG. 2). In the embodiment, when it only reaches the radius of the inspection object 1), as shown in FIG. 2 (B), a set of one magnetic field direction (arrow G). A magnetic sensor 14 can be used. In the case of this set of magnetic sensors 14, as shown in FIG. 2B, the application of the magnetic field and the detection of the magnetic body 2 are performed only on the circumferential portion of the inspection object 1 only. If it does, there exists a merit of the processing speed surface that the magnetic body 2 can be detected over the perimeter of the to-be-inspected object 1. FIG.

  Next, (2) as a matter of the number of magnetic sensors 14, only one or a set of magnetic sensors 14 is used, or a plurality or a plurality of sets of magnetic sensors 14 are selected. it can. In this case, when only a single or a set of magnetic sensors 14 is used, the magnetic sensor 14 is installed only in any one of the conveyance directions of the inspection object 1. When the inspection object 1 is considered to be fixed, one or a set of magnetic sensors 14 are arranged with respect to one magnetic field direction (arrow G), and therefore relative to the inspection object 1. It is a matter of course that the application of the magnetic field and the detection of the magnetic body 2 should be performed a plurality of times in different directions in the circumferential direction of the inspected object 1 by changing the proper positional relationship.

  Specifically, first, as shown in FIG. 6, the magnetic field applying means 11 and the magnetic detecting means 13 having one or a set of magnetic sensors 14 are connected to the inspection object 1 by applying and detecting direction changing means (not shown). By rotating in different circumferential directions, the relative positional relationship between the magnetic field application means 11 and the magnetic detection means 13 having one or a set of magnetic sensors 14 and the inspection object 1 is changed each time. The magnetic field applying and detecting step for detecting the magnetic body 2 is performed by repeatedly passing the inspection object 1 a plurality of times through the magnetic detecting means 13 having the magnetic field applying means 11 and one or a set of magnetic sensors 14. The inspection can be performed a plurality of times for each application direction of a plurality of magnetic fields having different circumferential directions.

  In addition, as shown in FIG. 7, a magnetic field applying means 11 and one or a set of magnetic sensors are obtained by rotating the inspection object 1 to an arbitrary angle in the circumferential direction by an inspection object rotating means (not shown). 14 is applied to the inspection object 1 in the circumferential direction of the inspection object 1 by changing the relative positional relationship between the magnetic detection means 13 having the reference numeral 14 and the inspection object 1 each time. By repeatedly passing the inspection object 1 through the magnetic detection means 13 having one or a set of magnetic sensors 14 a plurality of times, a detection process for detecting the magnetic body 2 is performed in a plurality of different circumferential directions of the inspection object 1. It can be performed a plurality of times for each application direction of the magnetic field.

  In the embodiment shown in FIGS. 6 and 7, at the stage where one magnetic field application step and magnetic detection step are completed, the applied magnetic field is once demagnetized, and then the next magnetic field application step and magnetic detection step. The magnetic field can be applied in different directions in the circumferential direction of the object 1 to be inspected. In these cases as well, as described above, the relationship between the application direction of the magnetic field and the sensor surface 14a of the magnetic sensor 14 is to maintain the relationship shown in FIG. One magnetic sensor 14 in which the sensor surface 14a is perpendicular to the application direction or on the same plane where the sensor surface 14a is perpendicular to the application direction of the magnetic field and intersects at right angles to the conveyance direction of the inspection object 1 It is a premise that a set of magnetic sensors 14 arranged so as to face each other with the inspection object 1 passing in FIG.

  In this way, the magnetic field applying means 11 and the magnetic detection means 13 or the inspection object 1 are rotated in the circumferential direction of the inspection object 1, so that the magnetic field application means 11 and the magnetic detection means 13 and the inspection object 1 are relative to each other. When the positional relationship is changed and the relationship between the sensor surface 14a of the magnetic sensor 14 and the magnetic field application direction is adjusted to be relatively orthogonal, the inspection object 1 can be obtained simply by installing one or a set of magnetic sensors 14. The magnetic body 2 can be detected over the entire circumference, and the magnetic body 2 can be detected with low cost and high accuracy with the simple device 10.

  On the other hand, when the latter plural or plural sets of magnetic sensors 14 are used, (3) the arrangement of the inspection object 1 in the transport direction, as shown in FIG. The magnetic detection means 13 having a plurality of sets of magnetic sensors 14 are arranged in different directions in the circumferential direction of the inspection object 1 and at a predetermined interval in the transport direction of the inspection object 1, or Alternatively, as shown in FIGS. 4 and 5, in a different direction with respect to the circumferential direction of the inspection object 1 passing through a plurality or a plurality of sets of magnetic sensors 14, and in the conveyance direction of the inspection object 1. They can be arranged on the same plane that intersects at right angles to each other.

  As shown in FIG. 3, the former, that is, the magnetic field applying means 11 and the magnetic detection means 13 having a plurality or a plurality of sets of magnetic sensors 14 are directed in directions different from each other with respect to the circumferential direction of the inspection object 1. When the test object 1 is arranged at a predetermined interval in the transport direction, a plurality of magnetic field applying means 11 are installed on the upstream side of each magnetic detection means 13 between the magnetic sensors 14 to thereby provide a magnetic field. It is necessary to repeat the application of the magnetic material, but the detection work of the magnetic material over the entire circumference of the inspection object can be completed by passing the inspection object 1 once through the inspection process. Can be detected with high accuracy.

  On the other hand, as shown in FIGS. 4 and 5, the latter, that is, in a different direction with respect to the circumferential direction of the inspection object 1 passing through a plurality or a plurality of sets of magnetic sensors 14, and the inspection object 1. When the inspection object 1 is arranged on the same plane intersecting at right angles to the conveyance direction, it is necessary to repeatedly pass the inspection object 1 through the magnetic field application means 11 and the magnetic detection detection means 13 having these magnetic sensors 14. However, only by installing the magnetic detection means 13 having a plurality or a plurality of sets of magnetic sensors 14 at one place in the transport direction of the inspection object 1, the magnetic body 2 is detected over the entire circumference of the inspection object 1. Thus, the magnetic body 2 can be detected with high accuracy by the simple device 10. In this case as well, at the stage where one magnetic field application step and magnetic detection step are completed, the applied magnetic field is once demagnetized, and then the inspection object 1 to be subjected to the next magnetic field application step and magnetic detection step. Magnetic fields can be applied in different circumferential directions. In this case, in particular, as shown in FIG. 5, the sensor surface 14a of at least one magnetic sensor 14 of the magnetic detection means 13 is perpendicular to the magnetic field application direction by a magnetic field application direction changing means (not shown). As described above, the magnetic field application means 11 can be rotated with respect to the circumferential direction of the object 1 to adjust the magnetic field application direction.

  4 to 7, when the magnetic detection means 13 having the magnetic sensor 14 is installed only at one place in the transport direction of the inspection object 1, the inspection object 1 is Although it is necessary to repeatedly pass through the magnetic detection means 13, in this case, for example, by installing an inspection object transfer means (not shown) such as a rail provided along the transfer furnace 12, the inspection object 1 Can be transported from the exit of the transport path 12 to the entrance, and the inspection object 1 can be repeatedly passed through the magnetic field applying means 11 and the magnetic detection means 13. As a result, the object to be inspected can be automatically re-conveyed to the entrance of the conveyance path, so that the processing efficiency can be improved by facilitating the work.

  The above points (1) to (3) can be implemented by appropriately selecting and combining them according to the merits to be prioritized, and are not limited to any one combination. Further, if the application of the magnetic field and the detection of the magnetic body 2 can be performed a plurality of times from different directions in the circumferential direction of the object to be inspected, other appropriate means other than the above means can be taken.

(Second Embodiment)
Further, the second embodiment of the present invention will be described with reference to FIG. 8B. In the third embodiment, as shown in FIG. The detection means 13 having a width that matches the width of the sensor surface 14a of the single magnetic sensor 14 and having at least one magnetic sensor 14 is configured to detect the magnetic body 2 contained in the inspection object 1 conveyed by the conveyance path 12. To detect.

  As described above, the detection intensity of the magnetic sensor 14 composed of SQUID is determined by the component that the magnetic field generated by the applied magnetic body 2 enters perpendicularly to the sensor surface 14a of the magnetic sensor 14, and is composed of SQUID. The magnetic field created by the magnetic material not located directly below the magnetic sensor 14 significantly reduces the vertical vector component entering the sensor surface 14a as compared to the magnetic field created by the magnetic material located directly below the magnetic sensor 14. Therefore, when the directivity is taken into consideration, it is desirable to pass the inspection object 1 only directly below the sensor surface 14a. In particular, in this case, since it is formed in accordance with the width of the sensor surface 14a of the single magnetic sensor 14 instead of a plurality, the magnetic path differs from the case of the wide conveyance path 12 shown in FIG. The sensor 14 is moved for scanning, or foreign matter that passes under the magnetic sensor made of SQUID without moving the inspection object so that the inspection object passes all under the magnetic sensor 14 made of SQUID. Can be detected. For this reason, while being able to detect a magnetic body with a simple structure accurately, an increase in equipment cost can be suppressed.

  Note that the width of the magnetic sensor 14 made of SQUID and the width of the transport path 12 can be relatively determined from various conditions in accordance with the first embodiment described above, and is not particularly limited. It can be. Moreover, the form of this conveyance path 12 can be made into appropriate forms, such as a belt conveyor other than the cage | basket shown in FIG.8 (B). In particular, when the bowl-shaped conveyance path shown in FIG. 8 is used, the height thereof similarly satisfies the conditions described in the first embodiment, and the magnetic sensor 14 made of SQUID ensures sufficient detection intensity. It is desirable to make it as high as possible.

(Third embodiment)
Finally, a third embodiment of the present invention will be described. As shown in FIG. 9, the conveyance path 12 is a cylinder having a fixed shape, and the inspection object 1 is dropped into the cylinder having the fixed shape. The magnetic body 2 can be detected by the magnetic sensor 14 installed on the outer periphery of the cylinder.

  In this case, the sensitivity of the magnetic sensor 14 composed of the SQUID is not significantly affected by the moving speed of the object 1 to be inspected, and varies slightly depending on the detection distance (distance from the magnetic sensor 14 to the magnetic body 2), but is constant. If the moving speed is within the range, specifically, the moving speed is 140 mm / sec or less, the magnetic body 2 in units of μm can be detected. Therefore, basically, it is possible to detect the magnetic body 2 with sufficiently high accuracy without particularly considering the moving speed of the inspection object 1 due to natural fall (falling in the vertical direction) in the cylinder. If the magnetic sensor 14 is too early, noise may be generated in the detection of the magnetic sensor 14, so that the viscosity of the object 1 to be inspected and the time for applying the magnetic field between the magnetic sensors 14 are also considered when using a plurality of magnetic sensors 14. Then, for example, the detection intensity can be set appropriately by adjusting the inclination angle of a cylinder (not shown) and setting the moving speed appropriately. Further, in this case, in order to transport the magnetic body 2 magnetized by the magnetic field applying means 11 to the detecting means 13 having the magnetic sensor 14 in a state where the magnetization direction does not change as much as possible, the inclination angle, the magnetic field applying means 11 And the detection means 13 having the magnetic sensor 14 can be adjusted.

  In the fourth embodiment, the inspection object 1 naturally falls in the cylinder shown in FIG. 9, so that no conveyance power for conveying the inspection object 1 is required, and the apparatus is simple. In addition, the tube can be easily applied to the processing line of the object to be inspected 1 by using the tube as a pipe for connecting the processes. However, it is desirable that the shape of the cylinder is constant so that the distance from the magnetic sensor 14 to the inspection object 1 does not change.

(Combination of the first to third embodiments)
In addition, said 1st thru | or 3rd embodiment can be implemented in arbitrary combinations suitably as needed. Specifically, for example, the first to third embodiments can be performed in a state where the detection range of the magnetic sensor 14 satisfies the form shown in FIG. 1B, and the first embodiment is also possible. The arrangement of the magnetic detection means 13 including the magnetic field application means 11 and the magnetic sensor 14 shown in (3) can also be implemented in the third embodiment. In the first to third embodiments described above, the form of the inspected object 1 is not particularly limited. In particular, in the second embodiment and the third embodiment shown in FIG. Can be said to be suitable for the inspection of the powdery inspection object 1.

(How to use the detector)
Moreover, implementation of the detection method by the detection apparatus 10 of this invention can be performed as product inspection of the resin composition for semiconductor sealing. As a result, it is possible to easily determine whether the resin composition for semiconductor encapsulation is appropriate or not, and it is possible to prevent problems such as shorting between pins and wires in the semiconductor package. Furthermore, the detection method using the detection apparatus 10 according to the present invention can also be performed as a raw material acceptance test before processing the raw material of the semiconductor sealing resin composition into the semiconductor sealing resin composition. As a result, it is possible to prevent the production of a resin composition for semiconductor encapsulation using raw materials mixed with foreign matters, thereby improving the yield of the product and avoiding the trouble of excluding inappropriate products afterwards. can do.

  The present invention can be widely applied to resin materials and other various inspected objects, particularly to detection of foreign substances made of a magnetic material.

It is the schematic which shows the state which detects a foreign material from a to-be-inspected object with a magnetic sensor, The figure (A) is the schematic of the conventional detection method, The figure (B) is the outline of the state which implements the detection method of this invention. FIG. The state which implements the 1st Embodiment of this invention is shown, The figure (A) is the schematic of the state which uses each one magnetic sensor with respect to the direction of one magnetic field, (B) FIG. 2 is a schematic view of a state in which a set of magnetic sensors is used for one magnetic field direction. In the first embodiment of the present invention, the magnetic field applying means and the magnetic detection means having a plurality of magnetic sensors are directed in different directions with respect to the circumferential direction of the inspection object, and the inspection object is conveyed. It is a schematic perspective view which shows the state by which two or more sets were arrange | positioned at predetermined intervals in the direction. In the 1st Embodiment of this invention, it is a schematic perspective view which shows the state by which the some magnetic sensor was arrange | positioned on the same plane. In the first embodiment of the present invention, the inspection object to which the magnetic field is applied in a different direction in the circumferential direction by the magnetic field applying means rotating with respect to the circumferential direction of the inspection object is flush with the magnetic field applying means. It is a schematic perspective view which shows the state which repeatedly passes the magnetic detection means which has the several or several sets of magnetic sensor arrange | positioned in multiple times. In the first embodiment of the present invention, a state in which an object to be inspected repeatedly passes a magnetic field applying means rotating in the circumferential direction of the object to be inspected and a magnetic detecting means having one or a set of magnetic sensors a plurality of times. It is a schematic perspective view shown. In the first embodiment of the present invention, a state in which an object to be inspected is rotated in the circumferential direction and then repeatedly passed through a magnetic detection means having a magnetic field application means and one or a set of magnetic sensors multiple times. It is a schematic perspective view. It is the schematic which shows the state which detects a foreign material from a to-be-inspected object with a magnetic sensor, The figure (A) is a schematic perspective view of the conventional detection method, The figure (B) is 2nd implementation of the detection method of this invention. It is a schematic perspective view of the state which implements this form. It is a schematic side view of the state which implements the 3rd Embodiment of this invention. It is a graph which shows the relationship between the magnitude | size of a magnetic body, and the detection strength of a magnetic sensor. It is a graph which shows the relationship between the direction of a magnetic field, and the detection strength of a magnetic sensor.

DESCRIPTION OF SYMBOLS 1 Inspection object 2 Magnetic body 10 Foreign material detection apparatus 11 Magnetic field application means 12 Conveyance path 13 Magnetic detection means 14 Magnetic sensor 14a comprising a superconducting quantum interference element Sensor surface

Claims (23)

After applying a magnetic field to the inspection object by the magnetic field applying means installed on the inspection object conveyance path to magnetize the magnetic material contained in the inspection object, the magnetic object is installed on the inspection object conveyance path. In the foreign object detection method for detecting a magnetic substance in the inspection object by a magnetic detection means having at least one magnetic sensor comprising a superconducting quantum interference element, the magnetic field application means transports the inspection object to the inspection object. A magnetic field is applied from a direction intersecting at right angles to the direction, and the magnetic substance is detected by the magnetic detection means arranged so that the sensor surface of the magnetic sensor is perpendicular to the magnetic field application direction. the magnetic field application process and the magnetic detection step, by changing the relative positional relationship between the magnetic field applying means and the magnetic detection means and the object to be inspected, with respect to the transport direction of the object to be inspected There row for each of a plurality of application direction of magnetic field of different directions that cross each other at the corner, multiple rows detection of the applied and the magnetic of the magnetic field in different directions direction crossing at right angles to the conveying direction of the object to be inspected Ukoto A foreign matter detection method characterized by the above. 2. The foreign object detection method according to claim 1, wherein a magnetic field is applied to the inspection object by a direction perpendicular to a conveyance direction of the inspection object by the magnetic field applying means, and a set of magnetic sensors is provided. The sensor surface of the magnetic sensor is perpendicular to the direction in which the magnetic field is applied, and faces each other with the passing inspection object on the same plane intersecting at right angles to the conveyance direction of the inspection object. The magnetic field applying step and the magnetic detection step for detecting the magnetic body by the magnetic detection means arranged in the manner described above are different from each other at least with respect to a half-circumferential portion in a direction intersecting at right angles to the conveyance direction of the inspection object . A method for detecting a foreign substance, which is performed for each application direction of a magnetic field. In the detection method of the foreign matter according to any of claims 1 or claim 2, as a set of said magnetic field applying means and the magnetic detection means, a plurality of sets of said magnetic field applying means and the magnetic detection means, the inspection After applying a magnetic field to the object to be inspected in a direction different from the direction intersecting at right angles to the object conveying direction and at a predetermined interval in the object inspecting direction. A method for detecting a foreign substance, wherein a magnetic field applying step for detecting a magnetic material and a magnetic detecting step are performed for each of the application directions of a plurality of different magnetic fields in the circumferential direction of the inspection object. 3. The foreign object detection method according to claim 1, wherein a plurality of the magnetic sensors or a plurality of sets of the magnetic sensors are crossed at a right angle with respect to a conveyance direction of the inspection object . It is arranged in a different direction and on the same plane that intersects at right angles to the transport direction of the inspection object, and the magnetic field applying means is crossed at right angles to the transport direction of the inspection object. The magnetic field application direction is changed to a direction perpendicular to the sensor surface of at least one of the magnetic sensors, and the inspection object is repeatedly passed through the magnetic field application unit and the magnetic detection unit a plurality of times. by the direction of different that intersect at right angles the magnetic field application process and the magnetic detection step for detecting a magnetic body after applying a magnetic field to the object to be inspected with respect to the conveying direction of the object to be inspected Detection method of the foreign matter, which comprises carrying out each application direction of the field. 3. The foreign matter detection method according to claim 1, wherein one set of the magnetic sensors on the same plane intersecting at right angles to the conveyance direction of the one magnetic sensor or the inspection object. The magnetic detecting means and the magnetic field applying means arranged are rotated in a direction perpendicular to the conveying direction of the inspection object , and then the inspection object is moved to the magnetic field applying means and the magnetic field. By passing through the detection means a plurality of times, a magnetic field application step for detecting the magnetic material after applying a magnetic field to the inspection object and a magnetic detection step intersect at right angles to the conveyance direction of the inspection object. A foreign object detection method, which is performed for each application direction of a plurality of magnetic fields having different directions . 3. The foreign matter detection method according to claim 1, wherein one set of the magnetic sensors on the same plane intersecting at right angles to the conveyance direction of the one magnetic sensor or the inspection object. And rotating the inspection object at an arbitrary angle in a direction perpendicular to the conveyance direction of the inspection object, the inspection object is moved to the magnetic field applying means and the magnetic detection means a plurality of times. A plurality of different magnetic field application steps and magnetic detection steps for detecting the magnetic body after applying a magnetic field to the object to be inspected by repeatedly passing through the object to be inspected at right angles to the direction of conveyance of the object to be inspected A method for detecting a foreign substance, which is performed for each direction of application of a magnetic field. 7. The foreign matter detection method according to claim 1, wherein a width of the transport path is set to a width of a sensor surface of the single magnetic sensor, and the magnetic sensor has at least one magnetic sensor. A method for detecting a foreign substance, wherein the magnetic material is detected by a detecting means. 8. The foreign object detection method according to claim 1, wherein the object to be inspected is dropped into a cylinder having a fixed shape, and the magnetic body is detected by the magnetic detection means installed on the outer periphery of the cylinder. A method for detecting a foreign matter, characterized by detecting 9. The foreign object detection method according to claim 1, wherein the inspection object has a size that allows the inspection object to pass through a detection distance within which the magnetic sensor can detect the magnetic body. A foreign object detection method comprising: processing and detecting the magnetic body by the magnetic detection means. The foreign object detection method according to claim 9, wherein a detection distance at which the magnetic sensor can detect the magnetic body is set according to a target size of the magnetic body. To detect foreign matter. 11. The foreign matter detection method according to claim 9, wherein a detection distance at which the magnetic sensor can detect the magnetic body depends on a target material of the magnetic body. A foreign object detection method characterized by setting. 12. The foreign object detection method according to claim 9, wherein a size of the inspection object is set within a width of a sensor surface of the magnetic sensor. Method. 13. The foreign matter detection method according to claim 1, wherein the object to be inspected is a semiconductor sealing resin composition, and the product inspection of the semiconductor sealing resin composition is performed as described above. A method for detecting a foreign substance, wherein the magnetic substance contained in the semiconductor sealing resin is detected by a magnetic detection means. The foreign matter detection method according to any one of claims 1 to 12, wherein the object to be inspected is a raw material of a resin composition for semiconductor encapsulation, and before the production of the resin composition for semiconductor encapsulation. And detecting the magnetic substance contained in the raw material of the semiconductor sealing resin composition by the magnetic detection means as a product inspection of the raw material. A transport path for transporting the object to be inspected, a magnetic field applying means for applying a magnetic field to the object to be inspected and magnetizing a magnetic material contained in the object to be inspected, and transporting the object to be inspected Magnetic detection means having at least one magnetic sensor comprising a superconducting quantum interference element that is installed on a road and detects a magnetic field applied to the inspection object by the magnetic field application means, and the inspection object by the magnetic field application means In the foreign matter detection apparatus, wherein the magnetic detection means detects the magnetic material in the inspection object by the magnetic detection means after applying a magnetic field to the magnetic material contained in the inspection object. wherein the inspected object by applying a magnetic field from different directions direction crossing at right angles to the conveying direction of the object to be inspected, the magnetic sensor sensing surface perpendicular to the application direction of the magnetic field of the magnetic detection means Disposed so that the magnetic field applying means and said magnetic detection means, by changing the relative positional relationship between the magnetic field applying means and the magnetic detection means and the object to be inspected, the transport of the object to be inspected An apparatus for detecting a foreign substance, wherein the magnetic field application and the magnetic body detection are performed a plurality of times for each application direction of a plurality of magnetic fields different from each other in a direction perpendicular to the direction . 16. The foreign matter detection device according to claim 15, wherein the magnetic detection means has a sensor plane perpendicular to the direction in which the magnetic field is applied and intersects at right angles to the transport direction of the inspection object. A pair of the magnetic sensors disposed so as to face each other with the inspection object passing therethrough, wherein the magnetic field applying means and the magnetic detection means are at least perpendicular to the conveyance direction of the inspection object; The magnetic field application and the detection of the magnetic material are performed for each of the application directions of a plurality of magnetic fields different from each other in a direction perpendicular to the conveyance direction of the inspection object with respect to a half-circumferential portion in the direction intersecting with each other. A foreign object detector. The foreign object detection device according to claim 15 or 16, wherein the magnetic field application unit and the magnetic detection unit form a set, and a plurality of sets of the magnetic field application unit and the magnetic detection unit are provided with the covered object. The magnetic field applying means and the magnetism are arranged in different directions with respect to the direction intersecting at right angles to the direction of conveyance of the inspection object and at a predetermined interval in the conveyance direction of the inspection object. A detection unit for detecting foreign matter, wherein the detection unit applies the magnetic field and detects the magnetic material for each of the application directions of a plurality of magnetic fields different from each other in a direction perpendicular to the conveyance direction of the inspection object . The foreign matter detection device according to claim 15 or 16, wherein the magnetic detection means is directed in a direction different from a direction intersecting at right angles to a transport direction of the inspection object . And a plurality of the magnetic sensors or a plurality of sets of the magnetic sensors arranged on the same plane intersecting at right angles to the conveying direction of the inspection object, and the detection device further includes the magnetic field applying means And a magnetic field application direction changing means for changing the magnetic field application direction to a direction perpendicular to the sensor surface of the at least one magnetic sensor by rotating in a direction perpendicular to the conveyance direction of the inspection object. wherein said magnetic field applying means and said magnetic detection means, magnetic from the direction different direction crossing at right angles to the conveying direction of the object to be inspected in the inspection object by the magnetic field applying direction change means In terms of the application of the said by the object to be inspected passes repeatedly said magnetic field applying means and the magnetic detection means, a plurality of application direction of magnetic field of different directions which intersect at right angles to the conveying direction of the object to be inspected An apparatus for detecting foreign matter, wherein the magnetic field application and the magnetic material are detected every time. 17. The foreign matter detection device according to claim 15, wherein the magnetic detection means is on the same plane intersecting at right angles to the conveyance direction of one of the magnetic sensors or the inspection object. An application and detection direction in which the detection device includes a set of the magnetic sensors arranged, and the detection device rotates the magnetic field application unit and the magnetic detection unit in a direction perpendicular to the conveyance direction of the inspection object. The magnetic field application unit and the magnetic detection unit are further provided with a change unit, and the magnetic field application unit and the magnetic detection unit are configured to change the direction of the inspection object from the different directions perpendicular to the conveyance direction of the inspection object by the application and detection direction changing unit. on a magnetic field is applied, the by the object to be inspected passes repeatedly said magnetic field applying means and the magnetic detection means, the direction of it different to crossing at right angles to the conveying direction of the object to be inspected Detection device of the foreign matter which is characterized in that a plurality of magnetic field the magnetic field application and detection of the magnetic body for each application direction of. 17. The foreign matter detection device according to claim 15, wherein the magnetic detection means is on the same plane intersecting at right angles to the conveyance direction of one of the magnetic sensors or the inspection object. An inspection object rotating means having a set of magnetic sensors arranged, wherein the detection device rotates the inspection object at an arbitrary angle in a direction intersecting at right angles to the conveyance direction of the inspection object. The magnetic field applying means applies a magnetic field to the inspection object rotated by the inspection object rotating means from a direction intersecting at a right angle with respect to a conveyance direction of the inspection object, and the magnetic sensor The magnetic detection means includes: a plurality of magnetic field application directions different from each other in a direction intersecting at right angles to a conveyance direction of the inspection object by repeatedly passing the inspection object a plurality of times. In line Detection device of the foreign matter, characterized in that. The foreign object detection device according to any one of claims 18 to 20, wherein the detection device further includes inspection object conveying means for conveying the inspection object from an outlet of the conveyance path to an entrance. The foreign object detection device, wherein the inspection object conveying means repeatedly passes the inspection object through the magnetic field applying means and the magnetic detection means. The foreign object detection device according to any one of claims 15 to 21, wherein the conveyance path has a width that matches a width of a sensor surface of the single magnetic sensor, and the magnetic detection means is the conveyance path. An apparatus for detecting a foreign material, wherein the magnetic material contained in the object to be inspected conveyed by the apparatus is detected. 23. The foreign matter detection device according to claim 15, wherein the transport path is formed of a cylinder having a fixed shape, and the magnetic detection means is installed on an outer periphery of the cylinder and falls inside the cylinder. An apparatus for detecting a foreign substance, wherein the magnetic substance contained in the inspection object is detected.

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