JP2019191127A - Foreign matter inspection method, foreign matter inspection device and slitter - Google Patents

Abstract

To provide a foreign matter inspection method, foreign matter inspection device and slitter that can identify a location suspicious about a foreign matter of metal species in a film-like inspected object.SOLUTION: A foreign matter inspection method is configured to inspect a foreign matter likely to be contained with respect to a first film serving a film-like inspected object to be conveyed from upstream to downstream. The foreign matter inspection method has: a magnetic detection step of detecting a signal of a magnetic detection unit plurally lined in a width direction orthogonal to a conveyance direction; and a first foreign matter coordinate map preparation step of preparing a first foreign matter coordinate map MAP1 indicative of a location of a first foreign matter Me in the first film on the basis of a location of the magnetic detection unit in which a signal value is a prescribed threshold in the magnetic detection step and a feed coordinate in which the signal of the magnetic detection unit outputs the threshold in a conveyance direction of the first film.SELECTED DRAWING: Figure 7

Description

  The present invention relates to a foreign matter inspection method, a foreign matter inspection device, and a slitter.

  Patent Document 1 discloses a technique of a foreign matter detection process for detecting a foreign matter of a metal type based on a difference in reflectance. Patent Document 2 discloses a fine metal detection device that can detect fine metal foreign metal particles mixed into an object to be inspected using a fluxgate sensor. Patent Document 3 discloses a magnetic detection device that uses a permanent magnet and a detection coil to detect a magnetic metal foreign object contained in an object to be inspected that travels along a moving direction from the upstream side toward the downstream side.

JP 2003-215051 A JP 2011-237181 A JP 2014-224811 A

  By the way, film-like production equipment to be inspected is often made of metal, and it is difficult to predict the location of contamination of metal species. When the metal type foreign material becomes small, the difference in reflectance becomes small, and even with the technique of Patent Document 1, it is difficult to distinguish the metal type foreign material, and even if there is a metal type foreign material, a normal film-like inspection is performed. There is a possibility of being identified as a target. Moreover, in the technique of Patent Document 1, the discrimination accuracy may be affected by the color of the film-like object to be inspected.

  Therefore, it is conceivable to detect a foreign substance of a metal type with respect to a film-like object to be inspected by a magnetic detection device such as a fluxgate sensor described in Patent Document 2. However, if the magnetic detection device detects a foreign substance of a metal type, the production of the film-like object to be inspected must be stopped, and the entire film-like object to be inspected of foreign matter must be discarded. The yield may be reduced.

  An object of the present invention is to provide a foreign substance inspection method, a foreign substance inspection apparatus, and a slitter capable of specifying a position where a metal type foreign substance is suspected in a film-like object to be inspected.

  A foreign matter inspection method according to a first aspect is a foreign matter inspection method for inspecting foreign matter that may be contained in a first film that is a film-like object to be inspected in a transport direction from upstream to downstream. A magnetic detection step for detecting a plurality of magnetic detection unit signals arranged in a width direction orthogonal to the transport direction; and in the magnetic detection step, in the width direction of the magnetic detection unit whose signal value has become a predetermined threshold value. Based on the position and the feed coordinates in the transport direction of the first film at which the signal of the magnetic detection unit outputs a threshold value, a first foreign matter coordinate map indicating the position of the first kind foreign matter on the first film is created. First foreign matter coordinate map creation step. According to this aspect, it is possible to specify a position where there is a suspicion of a foreign metal species in the film-like object to be inspected.

  As a desirable mode, an image detection step of irradiating the first film with inspection light and detecting an image of the first film, and specifying a second type foreign matter based on a luminance difference from the image of the first film. The position of the second type foreign matter in the first film is determined based on the feed coordinates in the transport direction of the first film obtained by capturing an image of the first film and the position of the second type foreign matter in the image. A second foreign matter coordinate map creating step for creating a second foreign matter coordinate map to be shown, wherein in the first foreign matter coordinate map, the region containing the first kind foreign matter is overlaid on the second foreign matter coordinate map, The second type foreign matter that overlaps the region where the first type foreign matter is present is determined as the first type foreign matter. Thereby, the first type foreign matter can be specified with the same accuracy as the second foreign matter coordinate map with high positional accuracy.

  As a desirable mode, an image detection step of irradiating the first film with inspection light and detecting an image of the first film, and specifying a second type foreign matter based on a luminance difference from the image of the first film. The position of the second type foreign matter in the first film is determined based on the feed coordinates in the transport direction of the first film obtained by capturing an image of the first film and the position of the second type foreign matter in the image. A second foreign matter coordinate map creating step for creating a second foreign matter coordinate map to be shown; and in the first foreign matter coordinate map, an area containing the first foreign matter is overlaid on the second foreign matter coordinate map, and the first foreign matter is And a third foreign matter coordinate map creating step of creating a third foreign matter coordinate map in which the second kind foreign matter overlapping with a certain region is replaced with the first kind foreign matter. Thereby, since the second type foreign matter is all handled as the first type foreign matter in the region where the first type foreign matter is suspected, the oversight of the first type foreign matter is suppressed.

  As a desirable mode, an image detection step of irradiating the first film with inspection light and detecting an image of the first film, and specifying a second type foreign matter based on a luminance difference from the image of the first film. The position of the second type foreign matter in the first film is determined based on the feed coordinates in the transport direction of the first film obtained by capturing an image of the first film and the position of the second type foreign matter in the image. A second foreign matter coordinate map creating step for creating a second foreign matter coordinate map to be shown, the first foreign matter coordinate map and the second foreign matter coordinate map are compared with the same feed coordinates, and in the second foreign matter coordinate map, The second foreign matter in the first foreign matter coordinate map is in the second range within a half or less of the distance between the adjacent magnetic detection units arranged in the width direction with the second foreign matter as the center. seed Objects and further includes third and foreign matter coordinates map creation step of creating a third foreign matter coordinates map obtained by replacing the first type foreign matter, the. Thereby, since it is determined based on the highly accurate second foreign material coordinates whether the foreign material is the first type foreign material or the second type foreign material, erroneous determination is suppressed.

  As a desirable mode, the first film is a plurality of second films divided by a plurality of slits provided in the width direction, the positions of the plurality of slits provided in the width direction, and the third foreign matter coordinates. Based on the map, the second film containing the first type foreign matter is evaluated with a quality grade lower than that of the second film not containing the first type foreign matter. Thereby, since the 2nd film containing a 1st type foreign material is known, the yield of a product improves without discarding the whole 1st film.

  As a desirable mode, the magnetic detection width in the width direction in which one magnetic detection unit can detect magnetism overlaps the magnetic detection width of the magnetic detection unit adjacent to the magnetic detection unit, and in the transport direction, In the predetermined range of the feed coordinates, when the adjacent magnetic detection unit detects a signal equal to or greater than the threshold value, the first position coordinate in the width direction on the side of the magnetic detection unit that outputs a large signal is given. The seed foreign matter is plotted on the first foreign matter coordinate map. Thereby, the detection precision of the 1st type foreign material between adjacent magnetism detection parts is securable.

  As a desirable mode, the magnetic detection part is a fluxgate sensor. Thereby, the magnetized first type foreign matter is detected with high accuracy.

As a desirable mode, one magnetic detection unit outputs a signal equal to or higher than the threshold for the first type foreign matter of 0.05 mm ² or more. Thereby, 0.05 mm < ² > or more type 1 foreign material can be detected accurately.

  As a desirable mode, the first film passes through the magnetic field of the magnetic porcelain on the upstream side of the magnetic detection unit. Thereby, the magnetic detection part can detect the magnetized 1st type foreign material.

  As a desirable mode, the first film passes through the process of the electrostatic removal device on the upstream side of the magnetic detection unit and on the downstream side of the magnet. Thereby, the signal noise of a magnetic detection part reduces.

  The foreign matter inspection apparatus according to the second aspect is a foreign matter inspection device that inspects a foreign matter that may be contained in a first film that is a film-like object to be inspected in the transport direction from upstream to downstream. A position detection device that detects feed coordinates in the transport direction of the first film, a magnetic detection device that detects signals from a plurality of magnetic detectors arranged in a width direction orthogonal to the transport direction, and a signal value is a predetermined value Based on the position in the width direction of the magnetic detection unit that has become the threshold value and the feed coordinates in the transport direction of the first film from which the signal of the magnetic detection unit has output the threshold value, the first type in the first film And an analysis device that creates a first foreign matter coordinate map indicating the position of the foreign matter. According to this aspect, it is possible to specify a position where there is a suspicion of a foreign metal species in the film-like object to be inspected.

  As a desirable mode, the first film is further irradiated with inspection light to detect an image of the first film, and the analysis device is based on a luminance difference from the image of the first film. Based on the feed coordinates in the transport direction of the first film, in which the second type foreign matter is identified and the image of the first film is captured, and the position of the second type foreign matter in the image, A second foreign matter coordinate map indicating the position of the second foreign matter is created, and an area where the first foreign matter is overlapped on the second foreign matter coordinate map in the first foreign matter coordinate map, The second type foreign matter that overlaps a certain area is determined as the first type foreign matter. Thereby, the first type foreign matter can be specified with the same accuracy as the second foreign matter coordinate map with high positional accuracy.

  The slitter according to the third aspect includes a travel roll that transports the first film in the transport direction from upstream to downstream, a cutter roll that divides the first film into a plurality of second films, and the cutter roll. And a foreign matter inspection device for inspecting foreign matter that may be contained in the first film, the foreign matter inspection device transporting the first film. A position detection device for detecting a feed coordinate in the direction, a magnetic detection device for detecting a plurality of magnetic detection unit signals arranged in a width direction orthogonal to the transport direction, and a magnetic detection unit having a signal value at a predetermined threshold value The position of the first foreign matter in the first film based on the position in the width direction and the feed coordinates in the transport direction of the first film from which the signal of the magnetic detection unit outputs a threshold value Having an analysis device for creating a first foreign matter coordinate map showing the. According to this aspect, it is possible to specify a position where there is a suspicion of a foreign metal species in the film-like object to be inspected.

  As a desirable mode, the foreign object inspection device further includes an image detection device that irradiates the first film with inspection light and detects an image of the first film, and the analysis device includes an image of the first film. Based on the difference in brightness from the second type foreign matter, based on the feed coordinates in the transport direction of the first film that captured the image of the first film, and the position of the second type foreign matter in the image , Creating a second foreign matter coordinate map indicating the position of the second type foreign matter on the first film, and in the first foreign matter coordinate map, superimposing a region with the first type foreign matter on the second foreign matter coordinate map, The second type foreign matter that overlaps the region with the first type foreign matter is determined as the first type foreign matter. Thereby, the first type foreign matter can be specified with the same accuracy as the second foreign matter coordinate map with high positional accuracy.

  According to the first to third aspects described above, a position where there is a suspicion of a foreign metal species is specified in the film-like object to be inspected.

FIG. 1 is a schematic diagram showing the overall configuration of a slitter equipped with the foreign substance inspection apparatus of the present embodiment. FIG. 2 is a schematic diagram of the image detection apparatus of the present embodiment. FIG. 3 is a schematic diagram for explaining the position and the magnetic detection region of the magnetic detection device of the present embodiment. FIG. 4 is an explanatory diagram for explaining a detection example of three adjacent magnetic detection units in the present embodiment. FIG. 5 is an explanatory diagram for explaining a flowchart of the foreign matter inspection method of the present embodiment. FIG. 6 is a flowchart for explaining the creation of the third foreign matter coordinate map in the foreign matter inspection method of the present embodiment. FIG. 7 is an explanatory diagram showing an example of the first foreign object coordinate map of the present embodiment. FIG. 8 is an explanatory diagram showing an example of the second foreign object coordinate map of the present embodiment. FIG. 9 is an explanatory diagram showing an example of the third foreign object coordinate map of the present embodiment. FIG. 10 is an explanatory diagram for explaining the second type foreign matter that is replaced with the first type foreign matter in the modification of the present embodiment. FIG. 11 is an explanatory diagram for explaining a plurality of second type foreign substances that are replaced with the first type foreign substances in a modification of the present embodiment.

  Hereinafter, modes for carrying out the present invention (hereinafter referred to as embodiments) will be described with reference to the drawings. In addition, this invention is not limited by the following embodiment. In addition, constituent elements in the following embodiments include those that can be easily assumed by those skilled in the art, those that are substantially the same, and those in a so-called equivalent range. Furthermore, the constituent elements disclosed in the following embodiments can be appropriately combined.

  FIG. 1 is a schematic diagram showing the overall configuration of a slitter equipped with the foreign substance inspection apparatus of the present embodiment. FIG. 2 is a schematic diagram of the image detection apparatus of the present embodiment. FIG. 3 is a schematic diagram for explaining the position and the magnetic detection region of the magnetic detection device of the present embodiment. Hereinafter, the foreign matter inspection apparatus 20 for the first film FML will be described with reference to FIGS. 1 to 3 as appropriate.

(Foreign substance inspection device)
As shown in FIG. 1, the foreign matter inspection device 20 is a device that detects foreign matter on the first film FML conveyed by the traveling roll RR. The foreign substance inspection device 20 includes a position detection device 8, an image detection device 5, a magnetic detection device 1, and an analysis device 10.

  The slitter 100 includes a foreign matter inspection apparatus 20. The slitter 100 includes at least a traveling roll RR and a cutter roll CR. The slitter 100 uses the cutter roll CR to insert a slit CL (see FIG. 3) in the wound raw fabric MR, and obtains QH from the plurality of second films QA wound up. The first film FML is divided into a plurality of second films QA to QH. A plurality of second films QA to QH become product rolls RL. In FIG. 3, the position where the cutter roll CR enters the slit CL is a position SLT.

  In the first film FML, since the thickness at both ends in the width direction of the film is likely to be thicker than that at the center portion, the both ends QQ in the width direction of the film are respectively deleted from the width FMLW at the time of film formation by a predetermined amount. Wind up after processing. In addition, it is not necessary to perform the ear removal processing.

  The first film FML is a film-like object to be inspected by the foreign matter inspection apparatus 20 or the foreign matter inspection method according to the present embodiment. The first film FML is formed of a thermoplastic resin. For example, the first film FML is made of polycarbonate resin, acrylic resin, polyester resin, acrylonitrile / butadiene / styrene resin (ABS), acrylonitrile / ethylene-propylene / diene / styrene resin (AES), acrylonitrile / styrene / acrylate resin. (ASA), polyolefin resin such as vinyl chloride resin, polyethylene, polypropylene, etc., a resin in which two or more of these are combined, a resin in which two or more of these are laminated, or a fiber or fine particles added to these resins. Yes.

  The position detection device 8 is an encoder that measures the amount of motor rotation that rotates the traveling roll RR and detects the feed coordinates of the first film FML. The position detection device 8 transmits information on the feed coordinates to the analysis device 10. The position detection device 8 may be an encoder that measures the rotation amount of the traveling roll RR and detects the feed coordinates of the first film FML. Alternatively, the position detection device 8 may be an encoder that optically detects the feed amount of the first film FML itself and detects feed coordinates.

  The image detection device 5 includes an imaging device 6 and an irradiation device 7. As shown in FIG. 2, the irradiation device 7 is disposed on the optical axis of the imaging device 6. The first film FML passes between the irradiation device 7 and the imaging device 6.

  As shown in FIG. 2, the imaging device 6 is arranged so that the surface of the first film FML moving in the transport direction F is in focus. The imaging device 6 is also called a line camera. As shown in FIG. 2, the imaging device 6 can capture the image in the width direction of the first film FML as a single image in the imaging region PB orthogonal to the transport direction F (see FIG. 1). Has an angle of view. For this reason, the imaging device 6 can capture an image in which the entire width of the surface of the first film FML is the imaging region PB. The imaging device 6 is, for example, a solid-state imaging device using a CCD (Charge Coupled Device), a solid-state imaging device using a complementary metal oxide semiconductor (CMOS), or a metal oxide semiconductor (MOS). One of the solid-state imaging devices using Oxide Semiconductor).

  As shown in FIG. 2, the length in the width direction of the irradiation device 7 is larger than the length FMLW in the width direction of the first film FML. For this reason, since the irradiation apparatus 7 can illuminate the back surface (1st surface) of the 1st film FML uniformly over the width direction of the 1st film FML, it permeate | transmits from the surface (2nd surface) of the 1st film FML. The intensity unevenness of the transmitted light is suppressed.

  As shown in FIG. 2, the irradiation device 7 irradiates a light source body such as a light emitting diode (LED), a fluorescent lamp, or a halogen lamp, and light from the light source body, in a housing.

  When the irradiation device 7 transmits the inspection light to the first film FML, internal defects such as internal foreign matter and bubbles are detected by the imaging device 6 as a luminance difference (brightness difference) with high sensitivity.

  As shown in FIG. 2, the inspection light emitted from the irradiation device 7 is, for example, diffused light, which passes through at least the imaging region PB of the first film FML, and the transmitted light is detected by the imaging device 6 as an image. The imaging device 6 transmits information on an image obtained by imaging the imaging region PB to the analysis device 10.

  The magnetic porcelain 2 includes a first permanent magnet having an S pole facing one side of the first film FML and a second permanent magnet having an N pole facing the other side of the first film FML. The first film FML passes through the magnetic porcelain 2. In the unlikely event that a magnetizable metal foreign matter is mixed in the first film FML, the metal foreign matter is magnetized by a magnetic field between the pair of first permanent magnets and the second permanent magnet.

  As shown in FIG. 1, the magnetic detection device 1 detects a change in the magnetic field at a magnetic detection position PA that is behind the magnetizing device 2 in the transport direction F. As shown in FIG. 3, the magnetic detection device 1 includes a plurality of magnetic detection units SE1 to SEn. The plurality of magnetic detection units SE1 to SEn are arranged in the width direction orthogonal to the transport direction F of the first film FML.

  Each of the magnetic detection units SE1 to SEn is a fluxgate sensor. Thereby, the magnetized first type foreign matter can be detected with high accuracy. Since the configuration described in Patent Document 2 may be used for the fluxgate sensor, detailed description thereof is omitted. The magnetic detection units SE1 to SEn use magnetoresistive elements or anisotropic magnetoresistive elements applying anisotropic magnetoresistive effect, giant magnetoresistive effect or tunnel magnetoresistive effect instead of fluxgate sensors. Also good.

  The distance between the magnetic detection units SE1 to SEn and the first film FML is within 10 mm. Thereby, the magnetic detection units SE1 to SEn can ensure the necessary sensitivity. The magnetic detection units SE1 to SEn are accommodated in a metal shield box that reduces the influence of a disturbance magnetic field.

  As shown in FIG. 3, one magnetic detection region is partitioned in units of px × py. Here, the length py in the width direction is the same as the distance between adjacent magnetic detection units among the magnetic detection units SE1 to SEn arranged in the width direction. The length px in the transport direction F is the same as the distance between adjacent magnetic detection units among the magnetic detection units SE1 to SEn arranged in the width direction.

  The magnetic detection unit SE1 detects the magnetic detection region Pm1 from the magnetic detection region P11. The magnetic detection unit SE2 detects the magnetic detection region Pm2 from the magnetic detection region P12. The magnetic detection unit SE3 detects the magnetic detection region Pm3 from the magnetic detection region P13. The magnetic detection unit SE4 detects the magnetic detection region Pm4 from the magnetic detection region P14. The same applies to the following, and the magnetic detection unit SEn detects the magnetic detection region Pmn from the magnetic detection region P1n. Each section is stored in the storage unit 15 in a state where each section is identified as the magnetic detection area Pmn from the magnetic detection area P11.

  In the present embodiment, the foreign matter inspection device 20 includes an electrostatic removal device 3 between the magnetic porcelain 2 and the magnetic detection device 1. The static eliminator 3 is also called an ionizer, generates corona discharge, and removes static electricity from the first film FML with ionized air. Thereby, signal noise of the magnetic detection units SE1 to SEn due to static electricity is suppressed.

  The analysis device 10 is a so-called computer, and includes an input interface, an output interface, a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and a storage unit 15. ing. The position detection device 8, the imaging device 6, and the magnetic detection device 1 are connected to the input interface, and the display device 19 is connected to the output interface. The CPU, ROM, RAM, and storage unit 15 are connected by a bus. The ROM stores a program such as BIOS (Basic Input Output System). The storage unit 15 is, for example, an HDD (Hard Disk Drive), a flash memory, or the like, and stores an operating system program and an application program. The CPU is a calculation means, and executes a program stored in the ROM or the storage unit 15 while using the RAM as a work area, thereby obtaining a position acquisition unit 11, a magnetic detection analysis unit 12, an image processing unit 13, and a type. The function of the analysis unit 14 is realized. The storage unit 15 may be internal or external, may use a RAM as a temporary storage, or may be a storage device or server on a network.

  In this embodiment, the magnetizable metal type foreign matter is a first type foreign matter, and the non-magnetizable foreign matter other than the first type foreign matter and the internal defect are called second type foreign matters. Magnetizable metal species include not only iron, nickel, cobalt, and ferrite stainless steel, but also austenitic stainless steel. Since austenitic stainless steel has a property of being magnetized when stress is applied, it becomes a magnetizable metal species.

  The position acquisition unit 11 stores the first foreign substance coordinates of the first film FML in the storage unit 15 in association with the feed coordinates of the first film FML detected by the position detection device 8 and the position of the magnetic detection position PA. The magnetic detection analysis unit 12 stores, in the storage unit 15, the first foreign matter coordinate map plotted as the first type foreign matter detected by the magnetic detection device 1 in the first foreign matter coordinates.

  The position acquisition unit 11 stores the second foreign matter coordinates of the first film FML in the storage unit 15 in association with the feed coordinates of the first film FML detected by the position detection device 8 and the position of the imaging region PB. The image processing unit 13 stores, in the storage unit 15, a second foreign object coordinate map in which all the foreign objects and internal defects detected by the imaging device 6 are plotted as second type foreign objects in the second foreign object coordinates.

  The distance between the magnetic detection position PA and the imaging region PB is known as the distance in the transport direction F on the first film FML. The distance between the magnetic detection position PA and the imaging region PB is stored in the storage unit 15. For this reason, the analysis apparatus 10 can relate the position of the magnetic detection position PA and the position of the imaging region PB with reference to the feed coordinates of the first film FML.

  The type analysis unit 14 specifies the second type foreign matter to be replaced as the first type foreign matter in the second foreign matter coordinate map.

(Foreign matter inspection method)
As shown in FIG. 1, the slitter 100 manufactures QH from a plurality of second films QA from the first film FML. The first film FML is subjected to a foreign matter inspection method by the foreign matter inspection apparatus 20.

  FIG. 4 is an explanatory diagram for explaining a detection example of three adjacent magnetic detection units in the present embodiment. In FIG. 4, a plurality of magnetic detection units SE1 to SE3 among the plurality of magnetic detection units SE1 to SEn shown in FIG. FIG. 5 is an explanatory diagram for explaining a flowchart of the foreign matter inspection method of the present embodiment. FIG. 6 is a flowchart for explaining the creation of the third foreign matter coordinate map in the foreign matter inspection method of the present embodiment. FIG. 7 is an explanatory diagram showing an example of the first foreign object coordinate map of the present embodiment. FIG. 8 is an explanatory diagram showing an example of the second foreign object coordinate map of the present embodiment. FIG. 9 is an explanatory diagram showing an example of the third foreign object coordinate map of the present embodiment.

  As shown in FIG. 5, the foreign matter inspection apparatus 20 processes a magnetic detection step for performing magnetic detection on the first film FML moving in the transport direction F (step ST1). As shown in FIG. 3, the magnetic detection width SA that can detect the magnetism of the magnetic detection unit SE2 overlaps the magnetic detection units SE1 and SE2 adjacent to each other in the width direction. When the plurality of magnetic detection units SE1 to SE3 are arranged, for example, at intervals of 30 mm, the magnetic detection width SA capable of detecting the magnetism of the magnetic detection unit SE2 is 60 mm. When the plurality of magnetic detection units SE1 to SE3 are arranged, for example, at intervals of 25 mm, the magnetic detection width SA capable of detecting the magnetism of the magnetic detection unit SE2 is 50 mm.

  In FIG. 4, the relationship between each detection voltage of magnetic detection part SE1 to SE3 and the feed coordinate Fx of the 1st film FML is shown. For example, the magnetic detection unit SE1 shown in FIG. 3 detects the magnetic detection region P11. The magnetic detection unit SE2 detects the magnetic detection region P12. The magnetic detection unit SE3 detects the magnetic detection region P13. The detection voltage Vse1, the detection voltage Vse2, and the detection voltage Vse3 are signal values of the magnetic detection units SE1 to SE3 of this embodiment.

  As shown in FIG. 4, when the detection voltage Vse1 of the magnetic detection unit SE1 and the detection voltage Vse2 of the magnetic detection unit SE2 are compared, the magnetic detection unit SE1 and the magnetic detection unit SE2 are equal to or higher than the threshold Th at the same feed coordinate Fx. The detection voltages Th1 and Th2 are output. On the other hand, when the detection voltage Vse2 of the magnetic detection unit SE2 is compared with the detection voltage Vse3 of the magnetic detection unit SE3, only the magnetic detection unit SE2 outputs a detection voltage Th2 that is equal to or higher than the threshold Th at the same feed coordinate Fx.

  Next, the maximum value of the detection voltage Vse1 of the magnetic detection unit SE1 is compared with the maximum value of the detection voltage Vse2 of the magnetic detection unit SE2. Here, when the maximum value of the detection voltage Vse1 of the magnetic detection unit SE1 is larger than the maximum value of the detection voltage Vse2 of the magnetic detection unit SE2, the magnetic detection analysis unit 12 enters the first type in the magnetic detection region P11 shown in FIG. Analyzes the presence of foreign objects.

  Alternatively, when the maximum value of the detection voltage Vse1 of the magnetic detection unit SE1 is smaller than the maximum value of the detection voltage Vse2 of the magnetic detection unit SE2, the magnetic detection analysis unit 12 has the first type foreign matter in the magnetic detection region P12 shown in FIG. You can analyze that there is.

  Alternatively, when the maximum value of the detection voltage Vse1 of the magnetic detection unit SE1 is the same as the maximum value of the detection voltage Vse2 of the magnetic detection unit SE2, the magnetic detection analysis unit 12 includes the magnetic detection region P11 and the magnetic detection region P12 illustrated in FIG. It can be analyzed that there is a first type foreign matter at the boundary.

  As shown in FIG. 4, when the detection voltage Vse1 of the magnetic detection unit SE1 and the detection voltage Vse2 of the magnetic detection unit SE2 are compared, a predetermined range of the feed coordinate Fx (the length corresponding to one magnetic detection region shown in FIG. 3) is obtained. In the range of px), the magnetic detection unit SE2 may output the detection voltage Th21 that is equal to or higher than the threshold Th before the magnetic detection unit SE1. On the other hand, when the detection voltage Vse2 of the magnetic detection unit SE2 and the detection voltage Vse3 of the magnetic detection unit SE3 are compared, within a predetermined range of the feed coordinate Fx (within the length px for one magnetic detection region shown in FIG. 3). , Only the magnetic detection unit SE2 outputs a detection voltage Th21 that is equal to or higher than the threshold Th. Thereby, the magnetic detection analysis part 12 can analyze that there exists a 1st type foreign material in the magnetic detection area P11 side, for example in the magnetic detection area P12 shown in FIG. The magnetic detection analysis unit 12 plots the coordinates of the first type foreign matter Me in the magnetic detection region P11 in the first foreign matter coordinate map MAP1 (see FIG. 7). The predetermined range of the feed coordinate Fx is the length px in FIG.

  Note that, within a predetermined range of the feed coordinate Fx (within the range of the length px corresponding to one magnetic detection region shown in FIG. 3), one magnetic detection unit has two waveforms having a detection voltage that is equal to or greater than the threshold Th. If captured, the process may be performed based on the first waveform. This is because there is no change in the presence of the first foreign substance in one magnetic detection region.

  As a result of the analysis, the magnetic detection analysis unit 12 processes a first foreign matter coordinate map MAP1 creation step for creating a first foreign matter coordinate map MAP1 as shown in FIG. 7 (step ST2). The first coordinates of the first foreign object coordinate map MAP1 are defined by m rows and n columns of magnetic detection areas partitioned in units of px × py shown in FIGS. As shown in FIG. 7, the detection voltages of the adjacent magnetic detection units SE1 to SE3 are compared, and the magnetic detection unit exceeding the detection voltage exceeding the threshold Th and the detection voltage exceeding the detection voltage Th From the feed coordinates of one film FML, the coordinates of the first foreign matter Me are plotted on the first foreign matter coordinates of the first foreign matter coordinate map MAP1. That is, the first foreign object coordinate map MAP1 is a map for indicating the position of the first type foreign object Me.

  Large in the conveyance direction F, when the adjacent magnetic detection unit detects a signal equal to or greater than the threshold value Th within a predetermined range of the feed coordinate Fx (within the length px corresponding to one magnetic detection region shown in FIG. 3). The first type foreign object Me to which the position coordinate in the width direction on the magnetic detection unit side that outputs the signal is plotted on the first foreign object coordinate map MAP1.

  As shown in FIG. 5, the foreign matter inspection apparatus 20 processes an image detection step of performing image detection on the first film FML moving in the transport direction F (step ST11). The imaging device 6 transmits information on an image obtained by imaging the imaging region PB to the analysis device 10.

  The image processing unit 13 processes a second foreign matter coordinate map MAP2 creation step for creating a second foreign matter coordinate map MAP2 as shown in FIG. 8 (step ST12). The coordinates of the second foreign object coordinate map MAP2 are defined in an image detection area of M rows and N columns divided in units of gx × gy shown in FIG. The length gx is smaller than the length px (see FIG. 7), and the length gy is smaller than the length py (see FIG. 7). gx × gy is 1 mm × 1 mm or less. For this reason, the image detection area is smaller than the above-described magnetic detection area. As a result, the positional accuracy of the foreign matter by image detection is higher than the positional accuracy of the foreign matter by magnetic detection. Then, the image processing unit 13 stores, in the storage unit 15, the second foreign object coordinate map MAP2 in which all the foreign objects and internal defects detected by the imaging device 6 are plotted as the second type foreign object C in the second foreign object coordinates. That is, the second foreign object coordinate map MAP2 is a map for indicating the position of the second type foreign object C.

  Next, as shown in FIG. 5, the type analysis unit 14 processes a third foreign matter coordinate map MAP3 creation step for creating a third foreign matter coordinate map MAP3 (step ST3). Hereinafter, step ST3 will be described with reference to FIG.

  The type analysis unit 14 reads the first foreign object coordinate map MAP1 created in step ST2 and stored in the storage unit 15. Then, as shown in FIG. 6, the type analysis unit 14 identifies the region AM1 and the region AM2 where the first type foreign matter Me is present in the first foreign matter coordinate map MAP1 (step ST31).

  Here, as shown in FIG. 7, the region AM1 where the first type foreign matter Me is present has the first type foreign matter Me at a position straddling the four magnetic detection regions. Therefore, the area AM1 where the first type foreign matter Me is present is four times as large as one magnetic detection area. Although illustration is omitted, when the position where the first type foreign material Me is located extends over two magnetic detection areas, the area where the first type foreign material Me exists is twice as large as one magnetic detection area.

  In the area AM2 where the first type foreign matter Me is present, the first type foreign matter Me exists in one magnetic detection region. For this reason, the area AM2 where the first type foreign matter Me is provided becomes one magnetic detection area.

  Next, the type analysis unit 14 reads the second foreign object coordinate map MAP2 created in step ST12. As illustrated in FIG. 8, the type analysis unit 14 identifies the second type foreign matter C in the second foreign matter coordinate map MAP2 that overlaps the areas AM1 and AM2 where the first type foreign matter Me is present as the first type foreign matter Me (step ST32). ).

  As shown in FIG. 7, there is one second-type foreign matter C in the area AM1 where the first-type foreign matter Me is present. There are two second-type foreign matter C in the area AM2 where the first-type foreign matter Me is present. In the present embodiment, the two second type foreign matter C overlapping the region AM1 where the first type foreign matter Me is present are both replaced with the first type foreign matter Me. Thereby, all the foreign substances suspected as the first type foreign matter Me are set as the first type foreign matter Me, and the oversight of the first type foreign matter Me is suppressed.

  Next, as shown in FIG. 9, the type analysis unit 14 creates a third foreign object coordinate map MAP3 in which the second type foreign object C identified in step ST32 is replaced with the first type foreign object Me (step ST33). The type analysis unit 14 stores the created third foreign object coordinate map MAP3 in the storage unit 15.

  The second type foreign matter C that overlaps the area AM1 where the first type foreign matter Me is present is replaced with the first type foreign matter Me at the position where the second type foreign matter C exists in the coordinates of the second foreign matter coordinate map MAP2. Thereby, in the 3rd foreign material coordinate map MAP3, the position of the 1st type foreign material Me is specified with the same accuracy as the 2nd foreign material coordinate map MAP2 with high position accuracy.

  Next, the type analysis unit 14 evaluates the product roll RL as shown in FIG. 5 (step ST4). In the position SLT shown in FIG. 3, the position of the slit CL in the width direction of the first film FML is stored in the storage unit 15 in advance. Therefore, the type analysis unit 14 determines whether the first type foreign material Me in the third foreign material coordinate map MAP3 shown in FIG. 9 is included in any one of the second films QA to QH shown in FIG. Is specified by calculation.

  The type analysis unit 14 sets the second film QA to QH shown in FIG. 3 that includes the first type foreign matter Me to a quality grade higher than the second film that does not include the first type foreign matter Me. Lower and evaluate.

  As described above, the foreign matter inspection apparatus 20 inspects a foreign matter that may be contained in the first film FML that is a film-like object to be inspected that is transported in the transport direction F from upstream to downstream.

For example, in the food industry and the medical industry, the internal organs and the like may be damaged, so that the foreign substance of the metal species is positioned as a serious defect. As the size of the foreign substance of the metal species, it is required that the contamination of the foreign substance of the metal species of 0.05 mm ² or more is suppressed. It is considered that the metal type foreign matter is caused by dust or the like resulting from the production facility. Production equipment often uses iron or stainless steel from the viewpoint of durability. Since the magnetized metal species foreign matter caused by the production facility is recognized as a serious defect, it is necessary to judge the quality grade lower than that of the carbonized foreign matter. The foreign substance inspection apparatus 20, the slitter 100, and the foreign substance inspection method of this embodiment can distinguish the magnetized metal type foreign substance resulting from production facilities from other carbonized foreign substances.

  The foreign substance inspection device 20 includes at least a position detection device 8, a magnetic detection device 1, and an analysis device 10. The magnetic detection device 1 includes magnetic detection units SE1 to SEn arranged in a plurality in the width direction orthogonal to the transport direction F. The analysis device 10 includes the position of the magnetic detection unit in which the signal value is a predetermined threshold Th among the magnetic detection units SE1 to SEn, and the transport direction of the first film FML in which the signal of the magnetic detection unit outputs the threshold Th. Based on the feed coordinates of F, a first foreign matter coordinate map MAP1 indicating the position of the first type foreign matter Me on the first film FML is created. Thereby, the foreign material test | inspection apparatus 20 can pinpoint the position with the suspected metal type foreign material in the 1st film FML. In the slitter 100, the foreign matter inspection apparatus 20 uses the first film FML on the upstream side of the cutter roll CR as an inspection target, and inspects the foreign matter that may be included in the first film FML. Accordingly, the determination as to whether the first type foreign material Me is included in any one of the second films QA to QH shown in FIG. 3 or in both end portions QQ is more accurate.

Here, the magnetic detection device 1 is set such that one magnetic detection unit outputs a signal equal to or greater than the threshold value Th for a first type foreign material Me of 0.05 mm ² or greater. Thereby, the foreign material of the metal seed | species of 0.05 mm < ² > or more can be detected accurately.

  The first foreign object coordinate map MAP1, the second foreign object coordinate map MAP2, and the third foreign object coordinate map MAP3 are displayed on the display device 19.

(Modification)
FIG. 10 is an explanatory diagram for explaining the second type foreign matter that is replaced with the first type foreign matter in the modification of the present embodiment. In the modified example, the same components are denoted by the same reference numerals and detailed description thereof is omitted. In FIG. 10, the coordinate origin of the second foreign object coordinate map MAP2 on the left side and the first foreign object coordinate map MAP1 on the right side are compared with the same feed coordinates of the first film FML.

  The length py in the width direction of the region AM11 shown in FIG. 10 is the same as the distance between adjacent magnetic detection units among the magnetic detection units SE1 to SEn arranged in the width direction. The length px in the transport direction F of the region AM11 is the same as the distance between adjacent magnetic detection units among the magnetic detection units SE1 to SEn arranged in the width direction.

  In the present modification, the second type foreign matter C of the second foreign matter coordinate map MAP2 is aligned with the center of the area AM11. When the first type foreign matter Me exists in the area AM11 of the first foreign matter coordinate map MAP1, the second type foreign matter C is replaced with the first type foreign matter Me.

  FIG. 11 is an explanatory diagram for explaining a plurality of second type foreign substances that are replaced with the first type foreign substances in a modification of the present embodiment. In FIG. 11, the coordinate origin of the second foreign object coordinate map MAP2 on the left side and the first foreign object coordinate map MAP1 on the right side are compared with the same feed coordinates of the first film FML.

  The length py in the width direction of the region AM12 shown in FIG. 11 is the same as the distance between adjacent magnetic detection units among the magnetic detection units SE1 to SEn arranged in the width direction. The length px in the transport direction F of the region AM11 is the same as the distance between adjacent magnetic detection units among the magnetic detection units SE1 to SEn arranged in the width direction. The region AM13 is the same size as the region AM12.

  The first type 2 foreign matter C of the second foreign matter coordinate map MAP2 is aligned with the center of the area AM12. When the first type foreign matter Me exists in the area AM12 of the first foreign matter coordinate map MAP1, the second type foreign matter C is replaced with the first type foreign matter Me.

  The second type second foreign matter C of the second foreign matter coordinate map MAP2 is aligned with the center of the area AM13. When the first type foreign matter Me exists in the area AM13 of the first foreign matter coordinate map MAP1, the second type foreign matter C is replaced with the first type foreign matter Me.

  As described above, in step ST3 shown in FIG. 5, the type analysis unit 14 compares the first foreign object coordinate map MAP1 and the second foreign object coordinate map MAP2 with the same feed coordinates. Then, the type analysis unit 14 in the second foreign matter coordinate map MAP2 is an area AM11 that is a range of ½ or less of the distance between adjacent magnetic detection units arranged in the width direction with the second foreign matter C as the center. The second type foreign matter C having the first type foreign matter Me in the first foreign matter coordinate map MAP1 is replaced with the first type foreign matter Me to create a third foreign matter coordinate map MAP3.

  In the modification of the present embodiment, the type analysis unit 14 may calculate as follows. The type analysis unit 14 calculates a specific area in the first foreign object coordinate map MAP1 that is a range of ½ or less of the distance between adjacent magnetic detection units arranged in the width direction around each first type foreign object Me. To do. The type analysis unit 14 superimposes this specific area on the position of the second foreign object coordinate map MAP2, and replaces the second type foreign object C in the second foreign object coordinate map MAP2 in the specific area with the first type foreign object Me, A third foreign object coordinate map MAP3 is created. Thereby, since it is determined based on the highly accurate second foreign matter coordinate map MAP2 whether the first type foreign matter or the second type foreign matter, erroneous determination is suppressed.

  The preferred embodiments have been described above, but the present invention is not limited to such embodiments. The content disclosed in the embodiment is merely an example, and various modifications can be made without departing from the spirit of the present invention. Appropriate changes made without departing from the spirit of the present invention naturally belong to the technical scope of the present invention. All the inventions that can be implemented by those skilled in the art based on the above-mentioned inventions as appropriate are included in the technical scope of the present invention as long as they include the gist of the present invention.

  For example, the magnetic detection units SE1 to SEn may be detection coils as described in Patent Document 3.

  “Sheet” is generally a thin product as defined by JIS and generally has a thickness that is small and flat instead of length and width, and “film” is generally thicker than length and width. Is a thin flat product with an extremely small maximum thickness, and is usually supplied in the form of a roll (Japanese Industrial Standard JISK6900), but the boundary between the sheet and film is not clear, In the present embodiment, both are used synonymously and are collectively referred to as “film”.

DESCRIPTION OF SYMBOLS 1 Magnetic detection apparatus 2 Magnetizer 3 Static elimination apparatus 5 Image detection apparatus 6 Imaging apparatus 7 Irradiation apparatus 8 Position detection apparatus 10 Analysis apparatus 11 Position acquisition part 12 Magnetic detection analysis part 13 Image processing part 14 Type analysis part 15 Storage part 19 Display device 20 Foreign matter inspection device 100 Slitter C Second type foreign matter CL Slit CR Cutter roll F Transport direction FML First film MAP1 First foreign matter coordinate map MAP2 Second foreign matter coordinate map MAP3 Third foreign matter coordinate map Me First type foreign matter MR Original Anti-SE1, SE2, SE3, SE4... SEn Magnetic detector Th threshold value

Claims (14)

A foreign matter inspection method for inspecting a foreign matter that may be included for a first film that is a film-like object to be inspected in the transport direction from upstream to downstream,
A magnetic detection step of detecting a plurality of magnetic detection unit signals arranged in a width direction orthogonal to the transport direction;
In the magnetic detection step, the position in the width direction of the magnetic detection unit where the signal value becomes a predetermined threshold value, and the feed coordinates in the transport direction of the first film from which the signal of the magnetic detection unit outputs the threshold value A foreign matter inspection method comprising: a first foreign matter coordinate map creating step for creating a first foreign matter coordinate map indicating a position of the first kind foreign matter on the first film. An image detecting step of irradiating the first film with inspection light and detecting an image of the first film;
Based on the brightness difference from the image of the first film, the second type foreign matter is specified, the feed coordinates in the transport direction of the first film that has captured the image of the first film, and the second type in the image A second foreign matter coordinate map creating step of creating a second foreign matter coordinate map indicating the position of the second kind foreign matter on the first film based on the position of the foreign matter,
The foreign matter inspection method according to claim 1, wherein a second type foreign matter that overlaps a region where the first type foreign matter is present in the first foreign matter coordinate map is determined as a first type foreign matter. An image detecting step of irradiating the first film with inspection light and detecting an image of the first film;
Based on the brightness difference from the image of the first film, the second type foreign matter is specified, the feed coordinates in the transport direction of the first film that has captured the image of the first film, and the second type in the image A second foreign matter coordinate map creating step for creating a second foreign matter coordinate map indicating the position of the second kind foreign matter on the first film based on the position of the foreign matter;
In the first foreign matter coordinate map, a region where the first type foreign matter is superimposed on the second foreign matter coordinate map, and a second type foreign matter overlapping the region containing the first type foreign matter is replaced with a first type foreign matter. A third foreign matter coordinate map creating step for creating a foreign matter coordinate map;
The foreign matter inspection method according to claim 1, further comprising: An image detecting step of irradiating the first film with inspection light and detecting an image of the first film;
Based on the brightness difference from the image of the first film, the second type foreign matter is specified, the feed coordinates in the transport direction of the first film that has captured the image of the first film, and the second type in the image A second foreign matter coordinate map creating step for creating a second foreign matter coordinate map indicating the position of the second kind foreign matter on the first film based on the position of the foreign matter;
The first foreign matter coordinate map and the second foreign matter coordinate map are compared with the same feed coordinates, and the second foreign matter coordinate map is arranged adjacent to each other in the width direction with the second type foreign matter as a center. A third foreign matter coordinate map is created by replacing the second type foreign matter with the first type foreign matter in the first foreign matter coordinate map with a first type foreign matter within a range of ½ or less of the distance of the matching magnetic detection unit. A third foreign matter coordinate map creating step,
The foreign matter inspection method according to claim 1, further comprising: The first film is a plurality of second films divided by a plurality of slits provided in the width direction,
Based on the positions of the plurality of slits provided in the width direction and the third foreign matter coordinate map, the second film containing the first type foreign matter is changed to the second film not containing the first type foreign matter. The foreign matter inspection method according to claim 3, wherein the evaluation is performed with a quality grade lower than that of the evaluation. The magnetic detection width in the width direction in which one magnetic detection unit can detect magnetism overlaps the magnetic detection width of a magnetic detection unit adjacent to the magnetic detection unit,
In the transport direction, within the predetermined range of the feed coordinates, when the adjacent magnetic detection unit detects a signal equal to or greater than the threshold value, the position coordinate in the width direction on the side of the magnetic detection unit that outputs a large signal is given. The foreign matter inspection method according to claim 1, wherein the first kind foreign matter is plotted on the first foreign matter coordinate map.   The foreign matter inspection method according to claim 1, wherein the magnetic detection unit is a fluxgate sensor. The foreign matter inspection method according to claim 1, wherein one magnetic detection unit outputs a signal equal to or greater than the threshold value with respect to the first kind foreign matter of 0.05 mm ² or more.   9. The foreign matter inspection method according to claim 1, wherein the first film passes through a magnetic field of a porcelain on the upstream side of the magnetic detection unit.   The foreign matter inspection method according to claim 9, wherein the first film passes through a process of an electrostatic removal device on the upstream side of the magnetic detection unit and on the downstream side of the magnetic porcelain. A foreign matter inspection apparatus that inspects foreign matter that may be included for a first film that is an object to be inspected in a transport direction from upstream to downstream,
A position detection device for detecting a feed coordinate in the transport direction of the first film;
A magnetic detection device that detects a plurality of magnetic detection unit signals arranged in a width direction orthogonal to the transport direction;
Based on the position in the width direction of the magnetic detection unit at which the signal value has reached a predetermined threshold, and the feed coordinates in the transport direction of the first film from which the signal from the magnetic detection unit has output the threshold, the first An analyzer for creating a first foreign matter coordinate map indicating the position of the first foreign matter on the film;
Foreign matter inspection apparatus having The first film further includes an image detection device that irradiates inspection light and detects an image of the first film,
The analysis device includes:
Based on the brightness difference from the image of the first film, the second type foreign matter is specified, the feed coordinates in the transport direction of the first film that has captured the image of the first film, and the second type in the image Based on the position of the foreign matter, create a second foreign matter coordinate map indicating the position of the second type foreign matter in the first film,
In the first foreign matter coordinate map, a second type foreign matter that overlaps a region where the first type foreign matter is present is determined as a first type foreign matter.
The foreign matter inspection apparatus according to claim 11. A traveling roll for transporting the first film in the transport direction from upstream to downstream;
A cutter roll for slitting the first film and dividing it into a plurality of second films;
On the upstream side of the cutter roll, the first film is an inspection object, and has a foreign matter inspection device that inspects foreign matter that may be contained in the first film,
The foreign matter inspection apparatus
A position detection device for detecting a feed coordinate in the transport direction of the first film;
A magnetic detection device that detects a plurality of magnetic detection unit signals arranged in a width direction orthogonal to the transport direction;
Based on the position in the width direction of the magnetic detection unit at which the signal value has reached a predetermined threshold, and the feed coordinates in the transport direction of the first film from which the signal from the magnetic detection unit has output the threshold, the first An analyzer for creating a first foreign matter coordinate map indicating the position of the first foreign matter on the film;
Slitter with. The foreign matter inspection apparatus
The first film further includes an image detection device that irradiates inspection light and detects an image of the first film,
The analysis device includes:
Based on the brightness difference from the image of the first film, the second type foreign matter is specified, the feed coordinates in the transport direction of the first film that has captured the image of the first film, and the second type in the image Based on the position of the foreign matter, create a second foreign matter coordinate map indicating the position of the second type foreign matter in the first film,
In the first foreign matter coordinate map, a second type foreign matter that overlaps a region where the first type foreign matter is present is determined as a first type foreign matter.
The slitter according to claim 13.

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