JP5039506B2 - Sequence generation system, sequence generation method, and sequence generation program - Google Patents

Description

The present invention relates to a sequence generation system, a sequence generation method, and a sequence generation program for creating a sequence for controlling a process apparatus in an online communication system using data output from the process apparatus according to an online communication protocol.

  For example, in a semiconductor manufacturing process, a plurality of processes are sequentially performed on a semiconductor wafer substrate to form elements and wiring layers. In this process, many apparatuses such as an oxidation / diffusion apparatus, a CVD apparatus, a lithography apparatus, an etching apparatus, an ion implantation apparatus, and an inspection apparatus are used.

  Recently, a manufacturing management system (MES: Manufacturing Execution System) that links a computer and various devices via a network and centrally manages a production plan to a production process has been developed (for example, see Patent Document 1). ). With this manufacturing management system, product production is controlled in the semiconductor manufacturing line, and information such as product processing history information, measurement evaluation results, and facility operation information is collected and managed.

  Furthermore, an online management system that avoids the occurrence of defective products even when there is an error in setting processing conditions has been studied (see, for example, Patent Document 2). The online management system described in this document includes a central control unit that performs overall control based on collected data, and a device control unit that monitors and controls the device. The data relay unit receives device control information related to device control from the central control unit and the device control unit via the network. When the received two device control information matches, the device control unit stops device control if they do not match.

  In such communication of manufacturing equipment, online communication protocols (SECS-I, SECS-II, HSMS-SS, etc.) used in the semiconductor industry are used (see, for example, Patent Document 3).

In addition, a transaction trace device that collects transactions executed between a server and a client connected to a network and analyzes performance (for example, see Patent Document 4). In the transaction trace apparatus described in this document, a filter for collection is created by a filter creation unit according to an instruction from a trace control unit, and packet logs are collected by a line collection unit. In addition, the application log extraction unit extracts the application log from the packet log by sequence matching using the extraction filter including the sequence filter, analyzes using the analysis filter in the performance analysis unit, and displays the result in the graph display unit. Display a graph.
JP 7-40206 A (first page) JP 2000-343386 A (first page) JP 2001-306136 A (Claim 3) JP-A-9-128342 (first page)

However, manufacturers of various process devices used in a production line use various applications or general-purpose tools for realizing online communication for manufacturing management. As a result, there are various forms of communication format files provided by the device manufacturer to the semiconductor manufacturer. In this case, it is necessary to check the communication specifications of the apparatus and to construct an online communication system according to the confirmation, and creating a sequence used in this online communication system has been a heavy burden.

The present invention has been made to solve the above-described problems, and an object thereof is to efficiently use a sequence for controlling a process device in an online communication system using data output from the process device according to an online communication protocol. It is an object to provide a sequence generation system, a sequence generation method, and a sequence generation program.

In order to solve the above problems, the invention described in claim 1 is a rule information storage means for storing a rule symbol used in communication between a process device and a device online system that controls the process device online. A scenario information storage unit that associates and stores a function variable and a scenario code used in a device control sequence of a scenario that can be used in the device online system , and associates the scenario with a scenario code to realize the device control sequence of the scenario. A flow chart composed of functional blocks , a template storage unit that stores processing codes representing the contents of processing in the functional blocks, an analysis information storage unit that analyzes and records communication logs in a hierarchical manner, the process device, get the communication log between the device online system A log acquisition unit that detects a processing start symbol recorded in the protocol information storage unit in the communication log, registers a message code included in the communication log in an upper layer of the analysis information storage unit, and When the communication log is in the same nest structure as the preceding communication log, register in the same hierarchy as the preceding communication log in the analysis information storage means, and when the subsequent communication log is in the lower nested structure of the preceding communication log, Hierarchizing means for generating a hierarchical structure by generating a lower hierarchy associated with the hierarchy of the preceding communication log in the analysis information storage means and registering an ID code included in the communication log in the lower hierarchy; and the analysis information outputting a list of message codes stored in the storage means and said upper layer, displayed on the output unit the stored in the scenario information storing unit scenario , If the display scenario to said output means is selected to obtain a function variables associated with the scenario code of the selected from the scenario information storing unit scenario, the output by creating a list data of the functional variables A flowchart associated with the scenario code of the scenario is obtained from the template storage unit and output to the output means, and a message code corresponding to the processing code used in the functional block specified in the flowchart is obtained. The output means outputs the lower layer ID code associated with the upper layer message code selected by the output means from the analysis information storage means and outputs it to the output means. Scenario function variables used in the specified function block And stored in association with the ID code of the lower layer, using the ID code as a function variable included in the flow chart stored in the template storage unit, said device sequence generating means for generating a device control sequences for use in on-line system And the summary.

The invention according to claim 2 can be used in the apparatus online system , and a contract information storage means storing a contract symbol used in communication between the process device and the apparatus online system that controls the process apparatus online. A scenario information storage unit that associates and stores function variables and scenario codes used in the device control sequence of the scenario, and a flowchart that includes functional blocks in association with the scenario code to realize the device control sequence of the scenario ; A template storage unit that stores a processing code representing the processing contents in the functional block; an analysis information storage unit that analyzes and records a communication log; and a communication log between the process device and the device online system Log acquisition means and communication log A method of generating a sequence using a sequence generation system comprising a hierarchizing means for generating a hierarchical structure using and a sequence generating means for generating an apparatus control sequence, wherein the hierarchizing means , Detecting a processing start symbol recorded in the convention information storage means, registering a message code included in the communication log in an upper layer of the analysis information storage means, and the subsequent communication log having the same nested structure as the preceding communication log In the analysis information storage means, the previous communication log is registered in the same hierarchy as the preceding communication log. When the subsequent communication log is in a lower nested structure of the preceding communication log, the analysis information storage means stores the preceding communication log. A lower hierarchy associated with the hierarchy is generated, and an ID code included in the communication log is registered in the lower hierarchy to create a hierarchical structure. Form, said sequence generating means outputs a list of messages codes recorded the upper layer in the analysis information storing means and displayed on the output unit the stored in the scenario information storing unit scenario, the output means Is selected, the function variable associated with the scenario code of the selected scenario is acquired from the scenario information storage unit, the list data of the function variable is created and output to the output means The flowchart associated with the scenario code of the scenario is acquired from the template storage unit and output to the output means, and the flowchart
The message code corresponding to the processing code used in the functional block specified in the output block is output to the output means, and the lower layer ID code associated with the upper layer message code selected by the output means is analyzed. Obtained from the information storage means and output to the output means, and stores the function variable of the scenario used in the functional block specified by the output means and the lower layer ID code in association with each other, and stores them in the template storage unit The gist is to generate an apparatus control sequence to be used in the apparatus on- line system using an ID code as a function variable included in the flowchart.

The invention according to claim 3 can be used in the apparatus on-line system , and a contract information storage means storing a contract symbol used in communication between the process device and the apparatus online system that controls the process apparatus online. A scenario information storage unit that associates and stores function variables and scenario codes used in the device control sequence of the scenario, and a flowchart that includes functional blocks in association with the scenario code to realize the device control sequence of the scenario ; A template storage unit that stores a processing code representing the processing contents in the functional block; an analysis information storage unit that analyzes and records a communication log; and a communication log between the process device and the device online system Log acquisition means and communication log A program that generates a sequence using a sequence generation system that includes a hierarchization unit that generates a hierarchical structure and a sequence generation unit that generates an apparatus control sequence, the hierarchization unit in the communication log , Detecting a processing start symbol recorded in the convention information storage means, registering a message code included in the communication log in an upper layer of the analysis information storage means, and the subsequent communication log having the same nested structure as the preceding communication log In the analysis information storage means, the previous communication log is registered in the same hierarchy as the preceding communication log. When the subsequent communication log is in a lower nested structure of the preceding communication log, the analysis information storage means stores the preceding communication log. A hierarchy is generated by generating a lower hierarchy associated with the hierarchy and registering an ID code included in the communication log in the lower hierarchy. To function as a means for generating a granulation, said sequence generating means, and outputs a list of messages codes recorded the upper layer in the analysis information storing unit, the output unit the stored in the scenario information storing unit Scenario When the scenario displayed on the output means is selected, the function variable associated with the scenario code of the selected scenario is acquired from the scenario information storage unit, and the function variable list data is created. A message that is output to the output unit, acquires a flowchart associated with the scenario code of the scenario from the template storage unit, outputs the flowchart to the output unit, and corresponds to a processing code used in the functional block specified in the flowchart Before outputting the code to the output means and selected in the output means The lower layer ID code associated with the upper layer message code is obtained from the analysis information storage means and output to the output means, and the scenario function variables used in the functional block designated by the output means The ID code of the lower hierarchy is stored in association with each other, and the ID code is used as a function variable included in the flowchart stored in the template storage unit to function as a means for generating a device control sequence used in the device online system . This is the gist.

(Function)
According to invention of Claim 1, 2 or 3 , the sequence generation system acquires the communication log between apparatuses. Then, in the communication log, the processing start symbol recorded in the convention information storage unit is detected, and the message code included in the communication log is registered in the upper layer of the analysis information storage unit. Next, if the subsequent communication log is in the same nested structure as the preceding communication log, it is registered in the same hierarchy as the preceding communication log in the analysis information storage means, and the subsequent communication log is in a lower nested structure of the preceding communication log In the analysis information storage means, a lower hierarchy associated with the hierarchy of the preceding communication log is generated, and an ID code included in the communication log is registered in this lower hierarchy to generate a hierarchical structure. Then, a device control sequence is generated using the upper layer message code recorded in the analysis information storage means and the lower layer ID code associated with the upper layer. Thereby, even when various types of communication formats are used, the device control sequence can be efficiently generated by specifying the message code and ID code using the communication log.

According to the present invention, the sequence generation system displays a flowchart including processing blocks. Then, the message code used in the processing block specified by using the flowchart is acquired, and the ID code recorded in the lower layer associated with the upper layer is analyzed with respect to the upper layer in which the message code is recorded. Extract from the information storage means. Thereby, in a system in which a standardized communication protocol with a nested structure is used, a variable (ID code) used for a processing block constituting the flowchart can be efficiently specified using the communication log.

According to the present invention, when a plurality of lower hierarchies are extracted with respect to an upper hierarchy in which a message code used in a designated processing block is recorded, a process in which an ID code registered in the lower hierarchy is designated. Output as selection candidates for use in the block. Although many ID codes are included in communication logs related to various processes, ID codes used in flowcharts can be efficiently selected by narrowing selection candidates using a nested structure.

According to the present invention, a sequence generation system, a sequence generation method, and a sequence for efficiently creating a sequence for controlling a process device in an online communication system using data output from the process device according to an online communication protocol A generation program can be provided.

  Hereinafter, an embodiment embodying the present invention will be described with reference to FIGS. In the present embodiment, as shown in FIG. 1, a process device 50, a device online system 60, and a manufacturing execution system 70 are used in a semiconductor element manufacturing line. A sequence generation system, a sequence generation method, and a sequence generation program for generating a sequence used in the apparatus online system 60 will be described.

  The process apparatus 50 includes semiconductor manufacturing apparatuses such as a heating apparatus, a film forming apparatus, a lithography apparatus, and an etching apparatus. Each process apparatus 50 includes an interface that transmits and receives a message conforming to an online communication protocol (SECS: SEMI Equipment Communications Standard) used in the semiconductor industry, and transmits and receives data related to the apparatus state, wafer state, and the like. There are various communication formats defined by the device manufacturer of each process device 50.

  The device online system 60 executes device management processing on the process device 50 online. The apparatus online system 60 executes progress control / management, online scenario management / execution, recipe management, local processing, status management, apparatus state management, wafer state management, and the like. The device online system 60 also includes a communication interface conforming to the online communication protocol.

  The manufacturing execution system 70 is a computer system (MES) that manages and analyzes the process, equipment, conditions, and work data of each product flowing on the production line, and supports more efficient production such as quality improvement, yield improvement, and work error reduction. : Manufacturing Execution System). The manufacturing execution system 70 manages master data such as device definition, product definition, and manufacturing flow definition, and also executes process progress management and management processing of actual data of work results and equipment operation history.

  Furthermore, the log acquisition device 40 functions as a log acquisition unit, and acquires communication contents (communication log) transmitted and received between the process device 50 and the device online system 60 during a period in which the process is being executed. Then, the acquired communication content is recorded in the log file storage unit 42 as a log file.

  A sequence creation device FC is connected to the log acquisition device 40. The sequence creation device FC is a computer system that uses the log file acquired from the log acquisition device 40 to perform support processing for generating a sequence used in the device online system 60.

The sequence creation device FC includes an input unit configured from a keyboard, a pointing device, and the like, and an output unit configured from a display.
Further, the sequence creation device FC includes a control unit as a control unit configured by a CPU, a RAM, a ROM, and the like. This control unit executes processes described later (each process such as a registration stage to a higher hierarchy, a hierarchical structure generation stage, a sequence generation stage, and the like). The control unit of the sequence creation device FC functions as the converter 10 and the sequence construction tool 20 by executing the sequence generation program.

This converter 10 functions as a log conversion means, and converts log files of various formats conforming to the online communication protocol into SML format files that are industry standards. By using this SML format file, it can be used in the device online system 60. As shown in FIG. 2, the converter 10 includes a message extracting unit 111 and a hierarchizing unit 112.

The message extraction unit 111 detects the convention symbol in the message included in the log file and registers it in the extracted log storage unit 12.
The hierarchizing unit 112 identifies the structural relationship between the preceding message and the subsequent message included in the communication log, and generates a hierarchical structure. Specifically, when it is detected that the subsequent message is in the same nested structure as the preceding message, the subsequent message is registered in the same hierarchy as the preceding message in the log analysis result information storage unit. On the other hand, when the subsequent message is a message having a lower nested structure, the subsequent message is registered in a lower hierarchy associated with the hierarchy of the preceding message.

The converter 10 includes an extracted log storage unit 12, a log analysis result storage unit 13, and a convention symbol information storage unit 14.
The extraction log storage unit 12 records a filtering log file including messages extracted by filtering from the log file. This filtering log file is registered when an extraction process to be described later is executed.

  The log analysis result storage unit 13 functions as an analysis information storage unit, and stores log analysis files distributed in a hierarchical relationship based on the extracted communication log nest structure. This log analysis file is registered when a hierarchization process described later is executed. This log analysis file has a tree structure in which a plurality of directories are hierarchized. In each directory, messages constituting the filtering log file recorded in the extracted log storage unit 12 are stored.

  The convention symbol information storage unit 14 functions as convention information storage means, and stores data relating to conventions having a nested structure defined in the online communication protocol. In this rule, a message code (for example, “processing start symbol” indicating the start of processing), a format identifier, a format value, and the like are defined. The nested structure is expressed using tag symbols. In SECS, there are “S6F11” (Event Report Send), “S6F12” (Event Report Acknowledge), etc. as processing start symbols, and “<”, “>” are used as tag symbols.

  On the other hand, the sequence construction tool 20 functions as a sequence generation unit, and generates a sequence used in the apparatus online system 60 using a log analysis file recorded in the log analysis result storage unit 13. As shown in FIG. 3, the sequence construction tool 20 includes a scenario information storage unit 22, a template storage unit 23, a message correspondence table storage unit 24, and a sequence storage unit 25.

  The scenario information storage unit 22 stores a scenario specifying table related to a scenario that can be used in the device online system 60. In this scenario identification table, scenario code, scenario name, and function variable data are associated. In the present embodiment, the scenario includes “apparatus status report”, “port status report”, “lot status report”, “alarm report”, and the like.

In the scenario code data area, data relating to an identifier for specifying a scenario that can be used in the device online system 60 is recorded.
In the scenario name data area, data relating to the name of this scenario is recorded.
In the function variable data area, data for specifying a function variable used when using this scenario is recorded.

  The template storage unit 23 stores template data of a flowchart for realizing a scenario that can be used in the device online system 60. In this template data, a flowchart is associated with the scenario code.

In the scenario code data area, data relating to an identifier for specifying a scenario that can be used in the device online system 60 is recorded.
Image data for displaying a flowchart for realizing this scenario is recorded in the flowchart data area. This flowchart image data is composed of icons for displaying functional blocks (processing blocks) included in this flowchart.

  Each functional block icon holds data relating to a functional block code, a processing code, and link information. Here, the function block code is an identifier for specifying the function block. The processing code is data for specifying the processing content of this functional block, and corresponds to the message code used in the online communication protocol. The link information is data indicating the connection relationship between the functional blocks in the flowchart image data. By using the processing code and the link data, a sequence that can be executed by the device online system 60 can be generated.

  In the message correspondence table storage unit 24, an association record in which an ID code such as an event ID is associated with a function variable is recorded. The association record is registered when the ID code included in the communication log is selected for the function variable used in the function block in the sequence construction tool. Here, the ID code is an identifier for specifying the details of various processes in detail.

  The sequence storage unit 25 records sequence data determined by using the sequence construction tool 20. Specifically, a message code and an ID code used in a functional block constituting a flowchart for realizing a scenario are recorded.

  The sequence construction tool 20 includes a log message display unit 211, a scenario identification unit 212, a flowchart display unit 213, a block identification unit 214, a message matching unit 215, a lower layer expansion unit 216, a function variable list display unit 217, and a variable registration unit. 218, sequence registration means 219 is provided.

The log message display unit 211 displays a list of message codes of the highest layer in the log analysis file recorded in the log analysis result storage unit 13.
The scenario specifying unit 212 executes a process of displaying the scenario name recorded in the scenario information storage unit 22 on the output unit.

The flowchart display unit 213 displays the flowchart image recorded in the template storage unit 23 on the output unit.
The block specifying unit 214 executes processing for specifying the functional block selected in the flowchart image.

The message matching unit 215 executes processing for associating the identified functional block with the message of the highest layer.
The lower layer expansion means 216 executes a process of expanding to a lower hierarchy associated with the selected highest layer message and displaying it on the output means.

The function variable list display unit 217 displays a list of variables to be set in the function block on the output unit.
The variable registration unit 218 executes a process of specifying the selected function variable and storing it in the message correspondence table storage unit 24 in association with the ID code included in the expanded lower hierarchy.
The sequence registration unit 219 generates a sequence using the selected message code or ID code, and executes processing for recording in the sequence storage unit 25.

  Processing performed using the system configured as described above will be described with reference to FIGS. In the present embodiment, description will be made in the order of extraction processing (FIG. 4), hierarchization processing (FIG. 5), and sequence creation processing (FIG. 6).

(Extraction process)
First, the extraction process will be described with reference to FIG. This extraction process is executed prior to the sequence creation process. First, the log acquisition device 40 acquires a communication log during process execution between the process device 50 and the device online system 60 and records it in the log file storage unit 42. Then, the converter 10 of the sequence creation device FC specifies the processing target line for each communication log from the top of the log file recorded in the log file storage unit 42 and repeats the following processing.

  Here, first, the converter 10 of the sequence creation device FC executes the process of reading the communication log of the processing target row (step S1-1). Specifically, the message extraction unit 111 of the converter 10 acquires the message of the processing target line in the log file recorded in the log file storage unit 42.

  Then, the converter 10 of the sequence creation device FC executes confirmation processing for the presence or absence of a convention symbol in the communication log (step S1-2). Specifically, the message extraction unit 111 of the converter 10 searches whether or not the convention symbol recorded in the convention symbol information storage unit 14 is included in the read processing target line. When it is not possible to detect the convention symbol recorded in the convention symbol information storage unit 14 in the communication log (in the case of “NO” in step S1-2), the converter 10 of the sequence creation device FC uses this communication log (processing target row). Terminate the process.

  On the other hand, when a convention symbol is detected in the communication log (in the case of “YES” in step S1-2), the converter 10 of the sequence creation device FC executes a log recording process (step S1-3). Specifically, the message extraction unit 111 of the converter 10 records the message code and ID code included in the communication log of this processing target line in the filtering log file of the extraction log storage unit 12. In this case, if a communication log is already recorded in the filtering log file, it is recorded next to the registered communication log.

  Next, the converter 10 of the sequence creation device FC executes a process for determining whether or not there is a process start symbol in the communication log (step S1-4). Specifically, the message extraction unit 111 of the converter 10 determines whether or not the processing start symbol recorded in the convention symbol information storage unit 14 is included in the communication log of the processing target row.

  When the processing start symbol is included (in the case of “YES” in step S1-4), converter 10 of sequence creation device FC executes time information recording processing (step S1-5). Specifically, the message extraction unit 111 of the converter 10 records the time included in the processing target line in the extraction log storage unit 12 in association with the processing start symbol. The above processing is repeated for all lines of the log recorded in the log file storage unit 42.

(Tiering process)
Next, the hierarchization process will be described with reference to FIG. This process is repeatedly executed for each message line of the filtering log file recorded in the extraction log storage unit 12.

  First, the converter 10 of the sequence creation device FC executes a process for reading a processing target row of the hierarchization process (step S2-1). Specifically, the hierarchizing unit 112 of the converter 10 acquires the message of the processing target line in the filtering log file recorded in the extraction log storage unit 12.

  Next, the converter 10 of the sequence creation device FC executes a determination process for the process start symbol (step S2-2). Specifically, the hierarchizing unit 112 of the converter 10 determines whether or not the process start symbol recorded in the convention symbol information storage unit 14 is included. It is also possible to identify the processing start symbol depending on whether or not time information is recorded.

  If it is determined that it is a processing start symbol (in the case of “YES” in step S2-2), the converter 10 of the sequence creation device FC generates the highest hierarchy and executes a storage process (step S2-3). Specifically, the hierarchizing unit 112 of the converter 10 generates a directory of the highest hierarchy, and records data related to the message code and ID code included in the communication log of the processing target row in the log analysis result storage unit 13. .

  On the other hand, when it is not a processing start symbol (in the case of “NO” in step S2-2), converter 10 of sequence creation device FC executes a necessity determination process for generating a new hierarchy (step S2-4). Specifically, the hierarchizing means 112 of the converter 10 determines that it is necessary to generate a new hierarchy when the first convention symbol is detected or when all registered communication logs are completed in a nested structure. To do. In this case (in the case of “YES” in step S2-4), the converter 10 of the sequence creation device FC generates a lower hierarchy in the log analysis result storage unit 13 and executes a storage process (step S2-5). Specifically, the hierarchizing means 112 of the converter 10 generates a lower-level directory in association with the previously created hierarchy, and records data related to the message code and ID code included in the communication log of this processing target row. .

  On the other hand, when the communication log (subsequent communication log) of the processing target row is determined to be in the same hierarchy as the preceding communication log (in the case of “NO” in step S2-4), the converter 10 of the sequence creation device FC goes to the same hierarchy. Is stored (step S2-6). Specifically, the hierarchizing unit 112 of the converter 10 records the message code and ID code included in the communication log of the processing target row in a directory of the same hierarchy.

(Sequence creation process)
Next, the sequence creation process will be described with reference to FIGS.
First, the log message display unit 211 of the sequence construction tool 20 displays a list of message codes of the highest layer recorded in the log analysis file of the log analysis result storage unit 13 as shown in FIG. This is displayed on the display screen 530.

  On the other hand, the scenario specifying unit 212 outputs the scenario recorded in the scenario information storage unit 22 to the display of the sequence creation device FC. This scenario name is output to the scenario display screen 510 of the display as shown in FIG. Then, the user designates a scenario for which a sequence is to be created using a pointing device.

Then, the scenario specifying unit 212 acquires a function variable from the scenario information storage unit 22,
The function variable list display means 217 is supplied. In this case, the function variable list display means 217 creates the function variable list data acquired from the scenario specifying means 212 and outputs it to the display of the sequence creation device FC. This function variable list is output to a variable list display screen 515 of the display as shown in FIG.

  Further, the scenario specifying unit 212 supplies the scenario code of the designated scenario to the flowchart display unit 213. The flowchart display unit 213 extracts a flowchart image corresponding to the acquired scenario code from the template storage unit 23 and outputs it to the display of the sequence creation device FC. As shown in FIG. 6, this flowchart image is output to a template display screen 520 of the display.

  Then, the user designates a functional block in the flowchart image using a pointing device. In this case, the block specifying unit 214 acquires the function block code of the specified function block from the template storage unit 23. Then, the block identification unit 214 supplies the acquired processing code to the message matching unit 215. The message matching means 215 extracts and displays a message code corresponding to this processing code from the message list displayed on the log message list display screen 530.

  Then, the user designates a message code in the message list using the pointing device. In this case, the lower layer development means 216 acquires a lower layer having the designated message code in the upper layer from the log analysis result storage unit 13. Then, the lower hierarchy development means 216 outputs the acquired contents of the lower hierarchy to the display of the sequence creation device FC. The contents of this lower layer are output to a lower layer display screen 540 of the display as shown in FIG.

  Then, the user designates the log output to the lower layer display screen 540 and the function variable output to the variable list display screen 515 using the pointing device. In this case, the variable registration unit 218 records the ID code and the function variable included in the log in the message correspondence table storage unit 24 in association with each other. In the subsequent processing, when the same function variable is used, the lower layer expansion means 216 sets the ID code recorded in the message correspondence table storage unit 24 as a selection candidate.

  Then, the sequence registration unit 219 acquires the template specified by the scenario specifying unit 212 from the template storage unit 23, generates a sequence using the ID code specified by the variable registration unit 218 as a function variable, and the sequence storage unit 25. To record.

As described above, according to the present embodiment, the following effects can be obtained.
In the above embodiment, the converter 10 of the sequence creation device FC includes the message extraction unit 111. Then, the message extraction unit 111 of the converter 10 executes a process of reading the target line of the log file recorded in the log file storage unit 42 (step S1-1). When the convention symbol recorded in the convention symbol information storage unit 14 is detected (in the case of “YES” in step S1-2), the converter 10 of the sequence creation device FC executes a log recording process (step S1- 3). Thereby, even when the communication format in the online communication protocol differs depending on the device manufacturer, it is possible to acquire the message code and ID code necessary for creating various sequences.

In the above embodiment, the converter 10 of the sequence creation device FC includes the hierarchizing means 112. Then, the converter 10 reads the processing target row of the hierarchization process (step S2-1), and executes a determination process for the process start symbol (step S2-2). If it is determined that it is a processing start symbol (in the case of “YES” in step S2-2), the converter 10 of the sequence creation device FC generates the highest hierarchy and executes a storage process (step S2-3). If it is not a processing start symbol (“NO” in step S2-2), the converter 10 of the sequence creation device FC executes a process for determining whether or not to generate a new hierarchy (step S2-4). On the other hand, when it is determined that a new hierarchy needs to be generated (in the case of “YES” in step S2-4), the converter 10 of the sequence creation device FC generates a lower hierarchy and executes a storage process (step S2-5). ). On the other hand, when it is determined that the hierarchy is the same as that of the preceding message (in the case of “NO” in step S2-4), converter 10 of sequence creation device FC executes the storage process in the same hierarchy (step S2-6). Thereby, in various formats of the online communication protocol, various variables included in the processing contents can be expanded into a hierarchical structure. Therefore, a sequence can be efficiently created using this hierarchical structure.

  In the above embodiment, the sequence construction tool 20 of the sequence creation device FC includes the message matching unit 215. Then, the message matching unit 215 extracts and displays a message code corresponding to this processing code from the message list displayed on the log message list display screen 530. When the user designates a message code in the message list, the lower layer expansion means 216 acquires a lower layer having the specified message code in the upper layer from the log analysis result storage unit 13. Thereby, the variable used in a sequence can be specified using a hierarchical structure.

  In the above embodiment, when the user specifies the communication log output to the lower layer display screen 540 and the function variable output to the variable list display screen 515, the variable registration unit 218 is included in the communication log. The ID code and the function variable are recorded in the message correspondence table storage unit 24 in association with each other. In the subsequent processing, when the same function variable is used, the lower layer expansion means 216 sets the ID code recorded in the message correspondence table storage unit 24 as a selection candidate. Thereby, once set function variables can be reused in the subsequent sequence creation, and the efficiency of sequence creation can be improved.

In addition, you may change the said embodiment into the following aspects.
In the above embodiment, the log acquisition device 40 and the sequence creation device FC are connected. The method for transferring the log file recorded in the log acquisition device 40 is not limited to this, and the log file may be transferred via a data recording medium.

  In the above embodiment, the sequence creation device FC functions as the converter 10 and the sequence construction tool 20. In this case, the converter 10 and the sequence construction tool 20 can be configured as separate and independent devices. In this case, the log analysis file recorded in the log analysis result storage unit 13 of the converter 10 is provided to the sequence construction tool 20 via a network or a data recording medium.

  In the above embodiment, when the converter 10 of the sequence creation device FC detects the convention symbol recorded in the convention symbol information storage unit 14 (in the case of “YES” in step S1-2), the log recording process is executed. (Step S1-3). Prior to this processing, log file processing may be performed. In this case, the communication format of each device manufacturer is recorded in the communication format information storage unit of the sequence creation device FC. Further, in the communication format information storage unit, deletion area designation information for specifying an unnecessary part in sequence creation is held in each communication format. Then, pattern matching is performed by comparing the log file recorded in the log file storage unit 42 with the communication format recorded in the format information storage unit. Then, in the specified communication format, information not used for sequence creation is deleted. Thereby, an extraction process can be performed efficiently.

  In the above embodiment, the extraction process (FIG. 4) and the hierarchization process (FIG. 5) are executed separately. Instead, the extraction process and the hierarchization process may be executed continuously for each row.

1 is a schematic diagram of a system according to an embodiment of the present invention. Explanatory drawing of the functional block of a converter. Explanatory drawing of the functional block of a sequence construction tool. Explanatory drawing of the process sequence of one Embodiment of this invention. Explanatory drawing of the process sequence of one Embodiment of this invention. Explanatory drawing of the screen displayed on the output means of a sequence production apparatus.

Explanation of symbols

  FC ... sequence creation device, 10 ... converter, 111 ... message extraction means, 112 ... hierarchization means, 12 ... extraction log storage section, 13 ... log analysis result storage section, 14 ... convention symbol information storage section, 20 ... sequence construction tool , 22 ... Scenario information storage unit, 23 ... Template storage unit, 24 ... Message correspondence table storage unit, 25 ... Sequence storage unit, 211 ... Log message display means, 212 ... Scenario specification means, 213 ... Flowchart display means, 214 ... Block Identifying means, 215 ... Message matching means, 216 ... Lower layer developing means, 217 ... Function variable list display means, 218 ... Variable registration means, 219 ... Sequence registration means, 40 ... Log acquisition device, 42 ... Log file storage section, 50 ... Process device, 60 ... Device online system, 70 ... Made Execution system.

Claims (3)

A convention information storage means for storing a convention symbol used in communication between the process device and a device online system that controls the process device online ;
A scenario information storage unit that stores function variables and scenario codes used in association with a device control sequence of a scenario that can be used in the device online system ;
In order to realize the device control sequence of the scenario, in association with the scenario code, a flowchart composed of functional blocks, a template storage unit that stores processing codes representing the contents of processing in the functional blocks ,
Analysis information storage means for analyzing and logging communication logs and recording them;
Log acquisition means for acquiring a communication log between the process device and the device online system ;
In the communication log, a processing start symbol recorded in the convention information storage unit is detected, and a message code included in the communication log is registered in an upper layer of the analysis information storage unit,
If the subsequent communication log is in the same nest structure as the preceding communication log, register in the same hierarchy as the preceding communication log in the analysis information storage means,
If the subsequent communication log is in a lower nested structure of the preceding communication log, a lower hierarchy associated with the hierarchy of the preceding communication log is generated in the analysis information storage means, and an ID code included in the communication log is generated in this lower hierarchy A hierarchization means for generating a hierarchical structure by registering,
Outputting a list of the upper layer message codes recorded in the analysis information storage means;
The scenario stored in the scenario information storage unit is displayed on the output unit, and when the scenario displayed on the output unit is selected, the function variable associated with the scenario code of the scenario selected from the scenario information storage unit , Create list data of the function variable and output to the output means,
A flowchart associated with the scenario code of the scenario is acquired from the template storage unit and output to the output means,
A message code corresponding to a processing code used in the functional block specified in the flowchart is output to the output unit, and a lower layer ID code associated with the upper layer message code selected by the output unit is Obtained from the analysis information storage means and output to the output means ,
The function variable of the scenario used in the function block specified in the output means is stored in association with the lower layer ID code, and the ID code is used as the function variable included in the flowchart stored in the template storage unit. And a sequence generation means for generating a device control sequence used in the device online system. A convention information storage means for storing a convention symbol used in communication between the process device and a device online system that controls the process device online ;
A scenario information storage unit that stores function variables and scenario codes used in association with a device control sequence of a scenario that can be used in the device online system ;
In order to realize the device control sequence of the scenario, in association with the scenario code, a flowchart composed of functional blocks, a template storage unit that stores processing codes representing the contents of processing in the functional blocks ,
Analysis information storage means for analyzing and logging communication logs and recording them;
Log acquisition means for acquiring a communication log between the process device and the device online system ;
A hierarchization means for generating a hierarchical structure using a communication log;
A method of generating a sequence using a sequence generation system comprising sequence generation means for generating an apparatus control sequence,
The hierarchizing means
In the communication log, a processing start symbol recorded in the convention information storage unit is detected, and a message code included in the communication log is registered in an upper layer of the analysis information storage unit,
If the subsequent communication log is in the same nest structure as the preceding communication log, register in the same hierarchy as the preceding communication log in the analysis information storage means,
If the subsequent communication log is in a lower nested structure of the preceding communication log, a lower hierarchy associated with the hierarchy of the preceding communication log is generated in the analysis information storage means, and an ID code included in the communication log is generated in this lower hierarchy Create a hierarchical structure by registering
The sequence generation means outputs a list of the upper layer message codes recorded in the analysis information storage means,
The scenario stored in the scenario information storage unit is displayed on the output unit, and when the scenario displayed on the output unit is selected, the function variable associated with the scenario code of the scenario selected from the scenario information storage unit , Create list data of the function variable and output to the output means,
A flowchart associated with the scenario code of the scenario is acquired from the template storage unit and output to the output means,
A message code corresponding to a processing code used in the functional block specified in the flowchart is output to the output unit, and a lower layer ID code associated with the upper layer message code selected by the output unit is Obtained from the analysis information storage means and output to the output means ,
The function variable of the scenario used in the function block specified in the output means is stored in association with the lower layer ID code, and the ID code is used as the function variable included in the flowchart stored in the template storage unit. A sequence generation method for generating a device control sequence used in the device online system . A convention information storage means for storing a convention symbol used in communication between the process device and a device online system that controls the process device online ;
A scenario information storage unit that stores function variables and scenario codes used in association with a device control sequence of a scenario that can be used in the device online system ;
In order to realize the device control sequence of the scenario, in association with the scenario code, a flowchart composed of functional blocks, a template storage unit that stores processing codes representing the contents of processing in the functional blocks ,
Analysis information storage means for analyzing and logging communication logs and recording them;
Log acquisition means for acquiring a communication log between the process device and the device online system ;
A hierarchization means for generating a hierarchical structure using a communication log;
A program for generating a sequence using a sequence generation system comprising a sequence generation means for generating an apparatus control sequence,
The hierarchizing means is
In the communication log, a processing start symbol recorded in the convention information storage unit is detected, and a message code included in the communication log is registered in an upper layer of the analysis information storage unit,
If the subsequent communication log is in the same nest structure as the preceding communication log, register in the same hierarchy as the preceding communication log in the analysis information storage means,
If the subsequent communication log is in a lower nested structure of the preceding communication log, a lower hierarchy associated with the hierarchy of the preceding communication log is generated in the analysis information storage means, and an ID code included in the communication log is generated in this lower hierarchy To create a hierarchical structure by registering
The sequence generation means outputs a list of the upper layer message codes recorded in the analysis information storage means,
The scenario stored in the scenario information storage unit is displayed on the output unit, and when the scenario displayed on the output unit is selected, the function variable associated with the scenario code of the scenario selected from the scenario information storage unit , Create list data of the function variable and output to the output means,
A flowchart associated with the scenario code of the scenario is acquired from the template storage unit and output to the output means,
A message code corresponding to a processing code used in the functional block specified in the flowchart is output to the output unit, and a lower layer ID code associated with the upper layer message code selected by the output unit is Obtained from the analysis information storage means and output to the output means ,
The function variable of the scenario used in the function block specified in the output means is stored in association with the lower layer ID code, and the ID code is used as the function variable included in the flowchart stored in the template storage unit. A sequence generation program which functions as means for generating a device control sequence used in the device online system .

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