JP5034541B2 - 圧電振動子、発振器 - Google Patents

圧電振動子、発振器 Download PDF

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Publication number
JP5034541B2
JP5034541B2 JP2007034392A JP2007034392A JP5034541B2 JP 5034541 B2 JP5034541 B2 JP 5034541B2 JP 2007034392 A JP2007034392 A JP 2007034392A JP 2007034392 A JP2007034392 A JP 2007034392A JP 5034541 B2 JP5034541 B2 JP 5034541B2
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JP
Japan
Prior art keywords
thin film
piezoelectric thin
electrode
vibrating arm
piezoelectric
Prior art date
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Expired - Fee Related
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JP2007034392A
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English (en)
Japanese (ja)
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JP2008199439A (ja
JP2008199439A5 (cg-RX-API-DMAC7.html
Inventor
誠 古畑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2007034392A priority Critical patent/JP5034541B2/ja
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Publication of JP2008199439A5 publication Critical patent/JP2008199439A5/ja
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  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2007034392A 2007-02-15 2007-02-15 圧電振動子、発振器 Expired - Fee Related JP5034541B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007034392A JP5034541B2 (ja) 2007-02-15 2007-02-15 圧電振動子、発振器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007034392A JP5034541B2 (ja) 2007-02-15 2007-02-15 圧電振動子、発振器

Publications (3)

Publication Number Publication Date
JP2008199439A JP2008199439A (ja) 2008-08-28
JP2008199439A5 JP2008199439A5 (cg-RX-API-DMAC7.html) 2010-03-18
JP5034541B2 true JP5034541B2 (ja) 2012-09-26

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ID=39757974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007034392A Expired - Fee Related JP5034541B2 (ja) 2007-02-15 2007-02-15 圧電振動子、発振器

Country Status (1)

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JP (1) JP5034541B2 (cg-RX-API-DMAC7.html)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5549020A (en) * 1978-10-04 1980-04-08 Seiko Instr & Electronics Ltd Piezoelectric vibrator
JPS5699929U (cg-RX-API-DMAC7.html) * 1979-12-28 1981-08-06
JP4434537B2 (ja) * 2001-08-27 2010-03-17 パナソニック株式会社 圧電機能部品
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP2005249646A (ja) * 2004-03-05 2005-09-15 Matsushita Electric Ind Co Ltd 角速度センサ用音叉型振動子、この振動子を用いた角速度センサ及びこの角速度センサを用いた自動車

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Publication number Publication date
JP2008199439A (ja) 2008-08-28

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