JP5033615B2 - Imprint substrate - Google Patents

Imprint substrate Download PDF

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Publication number
JP5033615B2
JP5033615B2 JP2007335505A JP2007335505A JP5033615B2 JP 5033615 B2 JP5033615 B2 JP 5033615B2 JP 2007335505 A JP2007335505 A JP 2007335505A JP 2007335505 A JP2007335505 A JP 2007335505A JP 5033615 B2 JP5033615 B2 JP 5033615B2
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JP
Japan
Prior art keywords
substrate
layer
resist
mold
nanoimprint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007335505A
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Japanese (ja)
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JP2009158729A (en
Inventor
博史 吉田
靖彦 多田
拓司 安藤
Original Assignee
株式会社日立製作所
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Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP2007335505A priority Critical patent/JP5033615B2/en
Publication of JP2009158729A publication Critical patent/JP2009158729A/en
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Publication of JP5033615B2 publication Critical patent/JP5033615B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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