JP5026940B2 - Gas sample chamber and concentration measuring apparatus provided with the gas sample chamber - Google Patents

Gas sample chamber and concentration measuring apparatus provided with the gas sample chamber Download PDF

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JP5026940B2
JP5026940B2 JP2007315739A JP2007315739A JP5026940B2 JP 5026940 B2 JP5026940 B2 JP 5026940B2 JP 2007315739 A JP2007315739 A JP 2007315739A JP 2007315739 A JP2007315739 A JP 2007315739A JP 5026940 B2 JP5026940 B2 JP 5026940B2
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sample chamber
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JP2009139215A (en
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芳郎 宮崎
純也 谷川
浩平 小椋
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Yazaki Corp
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Description

本発明は、例えば、二酸化炭素、水蒸気、一酸化炭素などの所定の気体の濃度を測定する濃度測定装置に用いられる気体サンプル室及びこの気体サンプル室を備えた濃度測定装置に関する。   The present invention relates to a gas sample chamber used for a concentration measuring device that measures the concentration of a predetermined gas such as carbon dioxide, water vapor, carbon monoxide, and the like, and a concentration measuring device including the gas sample chamber.

例えば、二酸化炭素、水蒸気、一酸化炭素などの所定の気体の濃度を測定する濃度測定装置には、従来から種々の気体サンプル室が用いられてきた。従来の気体サンプル室は、内部が密閉された筒状の本体部と、本体部の一端部に設けられた光源と、本体部の他端部に設けられた受光器と、前記本体部内に外部の雰囲気を強制的に供給する気体供給部と、を備えている。   For example, various gas sample chambers have conventionally been used for concentration measuring devices that measure the concentration of a predetermined gas such as carbon dioxide, water vapor, or carbon monoxide. A conventional gas sample chamber has a cylindrical main body with a sealed interior, a light source provided at one end of the main body, a light receiver provided at the other end of the main body, and an external device within the main body. And a gas supply unit for forcibly supplying the atmosphere.

本体部の内面は、鏡面に形成されている。光源は、例えば、赤外線を放射する。受光器は、赤外線センサと、この赤外線センサと光源との間に配置されて所定の波長の赤外線のみを透過させるフィルタと、を備えている。フィルタを透過する赤外線波長は、測定対象の気体に対する測定濃度範囲により定められている。即ち、フィルタを透過する赤外線波長は、測定対象の気体の測定範囲が０ｐｐｍから数千ｐｐｍオーダーであれば最も減衰し易い赤外線波長が選択されるなど、測定対象の気体の測定濃度範囲に応じて適切に選ばれている。気体供給部は、ポンプと配管などを備えており、本体部内に雰囲気を強制的に供給し、該本体部内の気体を強制的に排出する。   The inner surface of the main body is formed as a mirror surface. The light source emits infrared rays, for example. The light receiver includes an infrared sensor and a filter that is disposed between the infrared sensor and the light source and transmits only infrared rays having a predetermined wavelength. The infrared wavelength that passes through the filter is determined by the measured concentration range for the gas to be measured. That is, the infrared wavelength that passes through the filter depends on the measurement concentration range of the measurement target gas, such as the infrared wavelength that is most easily attenuated if the measurement range of the measurement target gas is on the order of 0 ppm to several thousand ppm. Appropriately selected. The gas supply unit includes a pump, piping, and the like, forcibly supplies an atmosphere into the main body, and forcibly discharges the gas in the main body.

前述した従来の気体サンプル室即ち濃度測定装置は、気体供給部が雰囲気を強制的に本体部内に供給し、フィルタを介して赤外線センサが受光した光源からの赤外線の強さを測定することで、前記雰囲気中の前述した測定対象の気体の濃度を測定する。   In the conventional gas sample chamber, that is, the concentration measuring device described above, the gas supply unit forcibly supplies the atmosphere into the main body unit, and measures the intensity of infrared rays from the light source received by the infrared sensor through the filter. The concentration of the measurement target gas in the atmosphere is measured.

しかしながら、前述した従来の気体サンプル室は、本体部内に強制的に雰囲気を供給する気体供給部を備えているので、装置自体が大型化する傾向であるとともに、気体供給部内に粉塵などの異物が蓄積されると、雰囲気を本体部内にスムーズに供給できなくなり、雰囲気中の測定対象の気体の濃度を正確に測定することが困難となる。   However, since the conventional gas sample chamber described above includes a gas supply unit that forcibly supplies an atmosphere into the main body, the apparatus itself tends to be large and foreign substances such as dust are present in the gas supply unit. If accumulated, the atmosphere cannot be smoothly supplied into the main body, and it becomes difficult to accurately measure the concentration of the gas to be measured in the atmosphere.

この種の問題を解決するために、例えば、特許文献１に示された気体サンプル室が提案されている。特許文献１に示された気体サンプル室は、一端部側に光源部を配設する第一の円筒体と、一端部側に検出部を配設する第二の円筒体と、を備えて、これらの第一及び第二の円筒体が、当該第一及び第二の円筒体の他端部側同士を嵌合するとともに、軸方向に相対的に移動可能となっている。   In order to solve this type of problem, for example, a gas sample chamber disclosed in Patent Document 1 has been proposed. The gas sample chamber shown in Patent Document 1 includes a first cylindrical body in which a light source unit is disposed on one end side, and a second cylindrical body in which a detection unit is disposed on one end side. These first and second cylindrical bodies are fitted to the other end sides of the first and second cylindrical bodies, and are relatively movable in the axial direction.

前述した第一及び第二の円筒体の周壁には、それぞれ、自然体流用孔を設けている。自然対流用孔は、前記第一及び第二の円筒体の相対的な移動範囲において、該第一及び第二の円筒体によって塞がることのない位置に設けられている。このように、自然体流用孔を設けることで、特許文献１に示された気体サンプル室は、気体供給部を設けることなく、前記第一及び第二の円筒体に雰囲気を出入り自在としている。
特開平１０−６２３３５号公報 A natural body flow hole is provided in each of the peripheral walls of the first and second cylindrical bodies described above. The natural convection hole is provided at a position that is not blocked by the first and second cylinders in the relative movement range of the first and second cylinders. Thus, by providing the natural body flow hole, the gas sample chamber shown in Patent Document 1 allows the atmosphere to freely enter and exit the first and second cylindrical bodies without providing a gas supply section.
Japanese Patent Laid-Open No. 10-62335

しかしながら、特許文献１に示された気体サンプル室は、第一及び第二の円筒体の周壁に設けられた自然体流用孔から光源からの光（赤外線）が洩れて、雰囲気中の測定対象の気体の濃度の測定感度が劣化するため、該自然体流用孔を小さくしなければならず、速やかに雰囲気を第一及び第二の円筒体内に導くことが困難となる傾向であった。このため、特許文献１に示された気体サンプル室は、雰囲気中の測定対象の気体の濃度を速やかに測定することが困難となる傾向であった。   However, the gas sample chamber shown in Patent Document 1 leaks light (infrared rays) from the light source from the natural body flow holes provided in the peripheral walls of the first and second cylindrical bodies, and the gas to be measured in the atmosphere. Since the measurement sensitivity of the concentration of the liquid deteriorates, the natural body use hole must be made small, and it tends to be difficult to quickly introduce the atmosphere into the first and second cylinders. For this reason, the gas sample chamber shown in Patent Document 1 tends to be difficult to quickly measure the concentration of the gas to be measured in the atmosphere.

したがって、本発明の目的は、雰囲気中の測定対象の気体の濃度を測定する感度を向上させることができ且つ速やかに測定することができる気体サンプル室及びこの気体サンプル室を備えた濃度測定装置を提供することにある。   Therefore, an object of the present invention is to provide a gas sample chamber capable of improving the sensitivity for measuring the concentration of the gas to be measured in the atmosphere and capable of measuring quickly, and a concentration measuring device including the gas sample chamber. It is to provide.

前記課題を解決し目的を達成するために、請求項１に記載された発明は、光源からの光を受光器に導く気体サンプル室において、筒状に形成された本体部と、前記本体部の一端部に配置された前記光源と、前記本体部の他端部に配置され且つ前記光源からの光を受光する前記受光器と、を備え、前記本体部の側壁が、互いに間隔をあけ且つ一部が重なる第１の壁及び第２の壁から構成されて、前記本体部の内外を連通する連通部を少なくとも一つ備えていることを特徴とする気体サンプル室である。   In order to solve the above-mentioned problems and achieve the object, the invention described in claim 1 is a gas sample chamber for guiding light from a light source to a light receiver. The light source disposed at one end and the light receiver disposed at the other end of the main body and receiving light from the light source, and the side walls of the main body are spaced apart from each other. The gas sample chamber is composed of a first wall and a second wall that overlap each other, and includes at least one communicating portion that communicates the inside and outside of the main body.

請求項２に記載された発明は、請求項１に記載の発明において、前記連通部が、前記側壁の前記光源から前記受光器に向かう光の光軸を挟んで互いに相対する箇所に設けられていることを特徴とするものである。   According to a second aspect of the present invention, in the first aspect of the present invention, the communication portion is provided at a location opposite to each other across an optical axis of light from the light source toward the light receiver on the side wall. It is characterized by being.

請求項３に記載された発明は、請求項２に記載の発明において、前記連通部が、前記側壁の上部に位置する箇所と、前記側壁の下部に位置する箇所とに設けられていることを特徴とするものである。   According to a third aspect of the present invention, in the invention of the second aspect, the communication portion is provided at a location located at an upper portion of the side wall and a location located at a lower portion of the side wall. It is a feature.

請求項４に記載された発明は、請求項１乃至請求項３のうちいずれか一項に記載の発明において、前記連通部が、前記第１の壁と前記第２の壁とのうち外側に位置する一方に設けられた開口部を備えていることを特徴とするものである。   According to a fourth aspect of the present invention, in the invention according to any one of the first to third aspects of the present invention, the communication portion is located outside of the first wall and the second wall. An opening provided on one of the positions is provided.

請求項５に記載された発明は、請求項１乃至請求項４のうちいずれか一項に記載の発明において、前記第１の壁と前記第２の壁との双方が、前記本体部の前記一端部から前記他端部方向に沿って外側に傾斜する第１傾斜部と、前記第１傾斜部に連なり且つ前記本体部の前記一端部から前記他端部方向に沿って内側に傾斜する第２傾斜部と、を有していることを特徴とするものである。   The invention described in claim 5 is the invention described in any one of claims 1 to 4, wherein both the first wall and the second wall are formed on the main body. A first inclined portion that inclines outward from the one end portion along the direction of the other end portion, and a first inclined portion that is continuous with the first inclined portion and inwardly extends from the one end portion of the main body portion along the other end portion direction. And 2 inclined portions.

請求項６に記載された発明は、請求項１乃至請求項５のうちいずれか一項に記載の発明において、前記第１の壁と前記第２の壁とのうち少なくとも一方が、これらの壁同士が互いに相対する対向面から突設した突出壁を有していることを特徴とするものである。   According to a sixth aspect of the present invention, in the invention according to any one of the first to fifth aspects, at least one of the first wall and the second wall is formed of these walls. It has the protrusion wall which protruded from the opposing surface mutually opposed, It is characterized by the above-mentioned.

請求項７に記載された発明は、一端部に光源を設け且つ他端部に該光源からの光を受光する受光器を設けた気体サンプル室と、前記受光器が受光した前記光源からの光の強さに基づいて前記気体サンプル室内の予め定められた気体の濃度を算出する濃度算出部と、を備えた濃度測定装置において、前記気体サンプル室として、請求項１乃至請求項６のうちいずれか一項に記載の気体サンプル室を備えたことを特徴とする濃度測定装置である。   According to a seventh aspect of the present invention, there is provided a gas sample chamber in which a light source is provided at one end and a light receiver for receiving light from the light source is provided at the other end, and light from the light source received by the light receiver. A concentration measurement device comprising: a concentration calculation unit that calculates a predetermined gas concentration in the gas sample chamber based on the strength of the gas sample chamber, wherein the gas sample chamber is any one of claims 1 to 6 A concentration measuring device comprising the gas sample chamber according to claim 1.

請求項１に記載された本発明によれば、筒状に形成されて一端部に光源が配され且つ他端部に該光源からの光を受光する受光器が配された本体部の側壁が、互いに間隔をあけ且つ一部が重なる第１の壁及び第２の壁から構成されて、本体部の内外を連通する連通部を少なくとも一つ備えているので、本体部外への光源からの光の洩れを低減できるとともに、本体部に雰囲気を出し入れ自在にできる。   According to the first aspect of the present invention, the side wall of the main body is formed in a cylindrical shape, the light source is disposed at one end, and the light receiver that receives light from the light source is disposed at the other end. The first wall and the second wall that are spaced apart from each other and partially overlap each other and have at least one communicating portion that communicates the inside and outside of the main body, so that the light source to the outside of the main body The light leakage can be reduced and the atmosphere can be taken into and out of the main body.

請求項２に記載された本発明によれば、複数の連通部が、光源から受光器に向かう光の光軸を挟んで互いに相対して設けられているので、本体部に雰囲気を速やかに出し入れ自在にできる。   According to the second aspect of the present invention, since the plurality of communicating portions are provided opposite to each other with the optical axis of light directed from the light source toward the light receiver, the atmosphere can be quickly taken in and out of the main body portion. You can do it freely.

請求項３に記載された本発明によれば、連通部が、側壁の上部に位置する箇所と、側壁の下部に位置する箇所とに設けられているので、煙突効果により本体部に雰囲気を更に速やかに出し入れ自在にできる。   According to the third aspect of the present invention, since the communication portion is provided at a location located at the upper portion of the side wall and a location located at the lower portion of the side wall, the atmosphere of the main body portion is further increased by the chimney effect. It can be taken in and out quickly.

請求項４に記載された本発明によれば、前記連通部が、前記第１の壁と前記第２の壁とのうち外側に位置する一方に設けられた開口部を備えているので、本体部に雰囲気を速やかに出し入れ自在にできる。   According to the fourth aspect of the present invention, the communication portion includes an opening provided on one of the first wall and the second wall located on the outer side. The atmosphere can be taken in and out quickly.

請求項５に記載された本発明によれば、第１の壁と第２の壁との双方が、本体部の一端部から他端部方向に沿って外側に傾斜する第１傾斜部と、該第１傾斜部に連なり且つ本体部の一端部から他端部方向に沿って内側に傾斜する第２傾斜部と、を有しているので、本体部外への光源からの光の洩れを低減することができる。   According to the present invention described in claim 5, both the first wall and the second wall are inclined to the outside along the direction of the other end from one end of the main body, A second inclined portion that is continuous with the first inclined portion and is inclined inwardly along the direction of the other end from one end of the main body, so that leakage of light from the light source to the outside of the main body is prevented. Can be reduced.

請求項６に記載された本発明によれば、第１の壁と第２の壁とのうち少なくとも一方が、これらの壁同士が互いに相対する対向面から突設した突出壁を有しているので、本体部外への光源からの光の洩れを更に低減することができる。   According to the present invention as set forth in claim 6, at least one of the first wall and the second wall has a protruding wall projecting from an opposing surface where these walls face each other. Therefore, the leakage of light from the light source to the outside of the main body can be further reduced.

請求項７に記載された本発明によれば、前述した気体サンプル室を備えているので、気体サンプル室の本体部外への光源からの光の洩れを低減できるとともに、該本体部に雰囲気を出し入れ自在にできる。   According to the seventh aspect of the present invention, since the gas sample chamber described above is provided, leakage of light from the light source to the outside of the main body portion of the gas sample chamber can be reduced, and an atmosphere can be provided to the main body portion. Can be freely put in and out.

以上説明したように請求項１に記載の本発明は、本体部が、当該本体部外への光源からの光の洩れを低減するとともに、当該本体部に雰囲気を出し入れ自在にするので、十分な強さの光を受光部に導くことができるとともに、雰囲気を速やかに本体部内に導くことができる。したがって、雰囲気中の測定対象の気体の濃度を測定する感度を向上させることができ且つ速やかに測定することができる。   As described above, the present invention according to claim 1 is sufficient because the main body portion reduces leakage of light from the light source to the outside of the main body portion and allows the atmosphere to be taken in and out of the main body portion. Intensity light can be guided to the light receiving section, and the atmosphere can be quickly guided into the main body section. Therefore, the sensitivity for measuring the concentration of the gas to be measured in the atmosphere can be improved and can be measured quickly.

請求項２に記載の本発明は、本体部に雰囲気を速やかに出し入れ自在にできる。したがって、雰囲気中の測定対象の気体の濃度を速やかに測定することができる。   According to the second aspect of the present invention, the atmosphere can be quickly taken into and out of the main body. Therefore, the concentration of the gas to be measured in the atmosphere can be measured quickly.

請求項３に記載の本発明は、煙突効果により本体部に雰囲気を更に速やかに出し入れ自在にできる。したがって、雰囲気中の測定対象の気体の濃度を更に速やかに測定することができる。   According to the third aspect of the present invention, the atmosphere can be taken into and out of the main body more quickly by the chimney effect. Therefore, the concentration of the gas to be measured in the atmosphere can be measured more quickly.

請求項４に記載の本発明は、本体部に雰囲気を出し入れ自在にするので、雰囲気を速やかに本体部内に導くことができる。したがって、雰囲気中の測定対象の気体の濃度を速やかに測定することができる。   According to the fourth aspect of the present invention, since the atmosphere can be taken into and out of the main body, the atmosphere can be quickly guided into the main body. Therefore, the concentration of the gas to be measured in the atmosphere can be measured quickly.

請求項５に記載の本発明は、本体部外への光源からの光の洩れを低減することができるので、十分な強さの光を受光器に導くことができる。したがって、雰囲気中の測定対象の気体の濃度を測定する感度を向上させることができる。   According to the fifth aspect of the present invention, since leakage of light from the light source to the outside of the main body can be reduced, light with sufficient intensity can be guided to the light receiver. Therefore, the sensitivity for measuring the concentration of the gas to be measured in the atmosphere can be improved.

請求項６に記載の本発明は、本体部外への光源からの光の洩れを更に低減することができるので、十分な強さの光を受光部に導くことができる。したがって、雰囲気中の測定対象の気体の濃度を測定する感度を更に向上させることができる。   According to the sixth aspect of the present invention, it is possible to further reduce the leakage of light from the light source to the outside of the main body, so that it is possible to guide light having a sufficient intensity to the light receiving portion. Therefore, the sensitivity for measuring the concentration of the gas to be measured in the atmosphere can be further improved.

請求項７に記載の本発明は、前述した気体サンプル室を備えているので、雰囲気中の測定対象の気体の濃度を測定する感度を向上させることができ且つ速やかに測定することができる。   Since the gas sample chamber described above is provided, the sensitivity of measuring the concentration of the gas to be measured in the atmosphere can be improved and measured quickly.

以下、本発明の一実施形態に係る濃度測定装置を、図１乃至図５を参照して説明する。   Hereinafter, a concentration measuring apparatus according to an embodiment of the present invention will be described with reference to FIGS. 1 to 5.

濃度測定装置１は、図２に示すように、濃度の測定対象の気体を含んだ雰囲気が充填される気体サンプル室２と、制御回路部３と、受光回路部４と、濃度算出部としてのマイクロコンピュータ（以下、μｃｏｍと記載する）５と、を備えている。   As shown in FIG. 2, the concentration measuring apparatus 1 includes a gas sample chamber 2 filled with an atmosphere containing a gas whose concentration is to be measured, a control circuit unit 3, a light receiving circuit unit 4, and a concentration calculating unit. And a microcomputer 5 (hereinafter referred to as μcom).

気体サンプル室２は、図１に示すように、本体部としての測定セル６と、光源７と、受光ユニット８とを備えている。   As shown in FIG. 1, the gas sample chamber 2 includes a measurement cell 6 as a main body, a light source 7, and a light receiving unit 8.

測定セル６は、筒状に形成されており、図示例では、図１中の奥行き方向の長さが１ｃｍ、前記奥行き方向に対し直交する幅方向の長さが５ｃｍ、前記奥行き方向と幅方向との双方に対し直交する厚み方向の長さが１ｃｍ程度の略四角筒状に形成されている。   The measurement cell 6 is formed in a cylindrical shape. In the illustrated example, the length in the depth direction in FIG. 1 is 1 cm, the length in the width direction orthogonal to the depth direction is 5 cm, and the depth direction and the width direction. The length in the thickness direction perpendicular to both of them is approximately a square cylinder having a length of about 1 cm.

測定セル６は、該測定セル６の長手方向、即ち前記幅方向に互いに相対する一対の対向壁２３ａ，２３ｂと、この一対の対向壁２３ａ，２３ｂ同士を連結する側壁２２と、を備えている。一対の対向壁２３ａ，２３ｂは、測定セル６の長手方向の一端部に一方の対向壁２３ａが位置し且つ他端部に他方の対向壁２３ｂが位置している。   The measurement cell 6 includes a pair of opposed walls 23a and 23b facing each other in the longitudinal direction of the measurement cell 6, that is, the width direction, and a side wall 22 connecting the pair of opposed walls 23a and 23b. . In the pair of opposing walls 23a and 23b, one opposing wall 23a is located at one end in the longitudinal direction of the measurement cell 6, and the other opposing wall 23b is located at the other end.

側壁２２は、４つの平坦な壁２２ａ，２２ｂ，２２ｃ，２２ｄから構成されており、これらの壁２２ａ，２２ｂ，２２ｃ，２２ｄのうち図１中の奥行き方向に沿って互いに相対する一対の壁２２ａ，２２ｂ（即ち側壁２２の互いに相対する箇所）には、それぞれ、連通部２６が設けられている。また、これら一対の壁２２ａ，２２ｂは、光源７から受光ユニット８の後述する受光器１２に向かう光の光軸を挟んで互いに相対している。   The side wall 22 includes four flat walls 22a, 22b, 22c, and 22d, and a pair of walls 22a that are opposed to each other along the depth direction in FIG. 1 among these walls 22a, 22b, 22c, and 22d. , 22b (that is, portions of the side wall 22 facing each other) are provided with communication portions 26, respectively. The pair of walls 22 a and 22 b are opposed to each other with an optical axis of light directed from the light source 7 toward a light receiver 12 (to be described later) of the light receiving unit 8.

連通部２６は、第１の壁２４と第２の壁２５とで構成されている。そして、本実施例では、各連通部２６を構成する第１の壁２４及び第２の壁２５が、測定セル６の互いに相対する壁２２ａ，２２ｂそれぞれを構成している。第１の壁２４は、図１及び図３に示すように、第２の壁２５より外側に配されている。第１の壁２４は、中央に矩形状の開口部２４ａが設けられている。この開口部２４ａは、壁２２ａ，２２ｂの全長に亘って設けられている。   The communication part 26 includes a first wall 24 and a second wall 25. In the present embodiment, the first wall 24 and the second wall 25 that constitute each communication portion 26 constitute walls 22 a and 22 b that face each other of the measurement cell 6. As shown in FIGS. 1 and 3, the first wall 24 is disposed outside the second wall 25. The first wall 24 has a rectangular opening 24a at the center. The opening 24a is provided over the entire length of the walls 22a and 22b.

第２の壁２５は、平板状に形成されており、第１の壁２４と間隔をあけ且つ平行に配されている。第２の壁２５は、第１の壁２４の開口部２４ａを塞ぐように配されているとともに、該開口部２４ａよりも大きく形成されている。即ち、第２の壁２５は、第１の壁２４と間隔をあけ且つ一部が重なるように配されている。   The second wall 25 is formed in a flat plate shape, and is arranged in parallel with the first wall 24 with a space therebetween. The second wall 25 is disposed so as to close the opening 24a of the first wall 24 and is formed larger than the opening 24a. That is, the second wall 25 is arranged so as to be spaced apart from the first wall 24 and partially overlap.

前述した構成の測定セル６は、側壁２２の図１中の奥行き方向に沿って、即ち光源７から受光ユニット８の後述する受光器１２に向かう光の光軸を挟んで互いに相対する各壁２２ａ，２２ｂに設けられた連通部２６が、当該測定セル６の内外を連通している。即ち、測定セル６の光源７から受光ユニット８の後述する受光器１２に向かう光の光軸を挟んで互いに相対する各壁２２ａ，２２ｂに設けられた連通部２６が、気体サンプル室２の内外を連通している。   The measuring cell 6 having the above-described configuration has the walls 22a opposed to each other across the optical axis of light along the depth direction in FIG. 1 of the side wall 22, that is, from the light source 7 toward the light receiver 12 described later of the light receiving unit 8. , 22 b communicate with the inside and outside of the measurement cell 6. That is, the communication portions 26 provided on the walls 22 a and 22 b facing each other across the optical axis of light directed from the light source 7 of the measurement cell 6 to the light receiver 12 described later of the light receiving unit 8 are provided inside and outside the gas sample chamber 2. Is communicated.

また、第１の壁２４と第２の壁２５とで構成された連通部２６（図２又は図３に示す）は、第１の壁２４と第２の壁２５との間隔が０．５ｍｍ〜２．０ｍｍ程度の、雰囲気中の粉塵などの気体浮遊粒子よりも遥かに大きく形成されている。そして、連通部２６は、雰囲気が通ることを許容して、測定セル６即ち気体サンプル室２の内外を雰囲気が移動自在となるようにしている。即ち、連通部２６を構成する第１の壁２４と第２の壁２５とによって、送風機やポンプなどを設けることなく、測定セル６内に雰囲気を速やかに導いて、当該測定セル６内の気体を速やかに雰囲気と等しくするものである。   Further, the communication portion 26 (shown in FIG. 2 or FIG. 3) constituted by the first wall 24 and the second wall 25 has an interval of 0.5 mm between the first wall 24 and the second wall 25. It is formed to be much larger than gas suspended particles such as dust in the atmosphere of about ~ 2.0 mm. The communication unit 26 allows the atmosphere to pass, and allows the atmosphere to move inside and outside the measurement cell 6, that is, the gas sample chamber 2. That is, the first wall 24 and the second wall 25 constituting the communication portion 26 can quickly introduce the atmosphere into the measurement cell 6 without providing a blower, a pump, or the like. Is quickly made equal to the atmosphere.

さらに、前述した測定セル６は、側壁２２の互いに相対する各壁２２ａ，２２ｂそれぞれに設けられた連通部２６を構成する第１の壁２４の開口部２４ａよりも第２の壁２５が大きく形成されるとともに、これらの第１の壁２４と第２の壁２５との一部が重なるように配されて、当該測定セル６外へ光源７からの光を洩れにくくしている。   Further, in the measurement cell 6 described above, the second wall 25 is formed to be larger than the opening 24 a of the first wall 24 that constitutes the communication portion 26 provided in each of the walls 22 a and 22 b facing each other of the side wall 22. At the same time, the first wall 24 and the second wall 25 are arranged so that they partially overlap each other, thereby making it difficult for light from the light source 7 to leak out of the measurement cell 6.

光源７は、測定セル６内で且つ当該測定セル６の一端部に位置する一方の対向壁２３ａに設けられている。光源７は、電圧が印加されることで、光としての赤外線を測定セル６の他端部に向かって放射する。光源として、例えば黒体炉、電球等が用いられる。   The light source 7 is provided on one opposing wall 23 a located in the measurement cell 6 and at one end of the measurement cell 6. The light source 7 emits infrared light as light toward the other end of the measurement cell 6 by applying a voltage. As the light source, for example, a black body furnace or a light bulb is used.

受光ユニット８は、図３及び図４に示すように、ユニット本体１１と、複数の受光器１２と、集光部材１３と、を備えている。ユニット本体１１即ち受光ユニット８は、測定セル６内で且つ当該測定セル６の他端部に位置する他方の対向壁２３ｂに設けられている。ユニット本体１１は、箱状に形成されている。なお、集光部材１３は、光源７が平行光である場合には省略可能である。   As shown in FIGS. 3 and 4, the light receiving unit 8 includes a unit main body 11, a plurality of light receivers 12, and a light collecting member 13. The unit main body 11, that is, the light receiving unit 8 is provided on the other opposing wall 23 b located in the measurement cell 6 and at the other end of the measurement cell 6. The unit main body 11 is formed in a box shape. The condensing member 13 can be omitted when the light source 7 is parallel light.

受光器１２は、図示例では、四つ設けられている。受光器１２は、それぞれ、赤外線センサ１４と、透過部材１５とを備えている。   In the illustrated example, four light receivers 12 are provided. Each of the light receivers 12 includes an infrared sensor 14 and a transmission member 15.

赤外線センサ１４は、ユニット本体１１に取り付けられている。複数の受光器１２の赤外線センサ１４は、同一平面上に配置されている。赤外線センサ１４は、光源７が発し且つ透過部材１５を透過した赤外線を受光し、この赤外線の熱を電気エネルギーに変換する。赤外線センサ１４は、赤外線の熱を電気エネルギーに変換して、センサ出力としてμｃｏｍ５に出力する。赤外線センサ１４として、例えば、焦電型、サーモパイル型のものが用いられる。   The infrared sensor 14 is attached to the unit main body 11. The infrared sensors 14 of the plurality of light receivers 12 are arranged on the same plane. The infrared sensor 14 receives infrared rays emitted from the light source 7 and transmitted through the transmission member 15 and converts the heat of the infrared rays into electric energy. The infrared sensor 14 converts infrared heat into electrical energy, and outputs it to the μcom 5 as a sensor output. As the infrared sensor 14, for example, a pyroelectric type or a thermopile type is used.

透過部材１５は、ユニット本体１１に取り付けられて、赤外線センサ１４と光源７との間に配置されている。複数の受光器１２の透過部材１５は、同一平面上に配置されている。透過部材１５は、それぞれ、光源７からの赤外線のうち予め定められた波長の赤外線のみを透過させて、当該透過させた波長の赤外線を赤外線センサ１４まで導く。複数の受光器１２の透過部材１５は、互いに透過させる赤外線の波長が異なる。透過部材１５は、例えば本実施形態では、図６にその透過率が示された二酸化炭素の濃度を測定するために用いられる際には、波長が４．２７μｍの赤外線のみを透過させる。   The transmission member 15 is attached to the unit body 11 and is disposed between the infrared sensor 14 and the light source 7. The transmission members 15 of the plurality of light receivers 12 are arranged on the same plane. Each of the transmitting members 15 transmits only infrared light having a predetermined wavelength out of infrared light from the light source 7 and guides the transmitted infrared light to the infrared sensor 14. The transmissive members 15 of the plurality of light receivers 12 have different wavelengths of infrared rays that are transmitted through each other. For example, in this embodiment, the transmissive member 15 transmits only infrared rays having a wavelength of 4.27 μm when used to measure the concentration of carbon dioxide whose transmittance is shown in FIG.

そして、透過部材１５を透過する赤外線の波長は、濃度測定装置１が濃度の測定対象とする気体に対する測定濃度範囲により定められる。つまり、透過部材１５を透過する赤外線波長は、測定範囲が０ｐｐｍから数千ｐｐｍオーダーであれば最も減衰し易い赤外線波長が選択されるなど、測定対象の気体の測定濃度範囲に応じて適切に選ばれている。なお、受光器１２は、二酸化炭素以外にも水蒸気、一酸化炭素を測定対象の気体とする。   And the wavelength of the infrared rays which permeate | transmit the permeation | transmission member 15 is defined by the measurement density | concentration range with respect to the gas which the density | concentration measuring apparatus 1 makes the measurement object of a density | concentration. That is, the infrared wavelength transmitted through the transmission member 15 is appropriately selected according to the measurement concentration range of the gas to be measured, such as the infrared wavelength that is most easily attenuated if the measurement range is on the order of 0 ppm to several thousand ppm. It is. The light receiver 12 uses water vapor and carbon monoxide as the measurement target gas in addition to carbon dioxide.

図示例では、一つの受光器１２は基準として用いられ、その透過部材１５が例えば大気中で全く減衰しない波長である１．５μｍ又は４．０μｍの赤外線を透過させる。また、他の一つの受光器１２は二酸化炭素の濃度を測定するために用いられ、その透過部材１５が例えば前述した二酸化炭素中で減衰しやすい波長である４．２７μｍの赤外線のみを透過させる。   In the illustrated example, one light receiver 12 is used as a reference, and its transmitting member 15 transmits infrared light having a wavelength of 1.5 μm or 4.0 μm which is not attenuated in the atmosphere, for example. The other light receiver 12 is used to measure the concentration of carbon dioxide, and the transmission member 15 transmits only infrared rays having a wavelength of 4.27 μm that is easily attenuated in carbon dioxide, for example.

更に他の受光器１２は水蒸気の濃度を測定するために用いられ、その透過部材１５が例えば前述した水蒸気中で減衰しやすい波長である１．９μｍの赤外線のみを透過させる。更に別の受光器１２は一酸化炭素の濃度を測定するために用いられ、その透過部材１５が例えば前述した一酸化炭素中で減衰しやすい波長である４．６４μｍの赤外線のみを透過させる。   Further, the other light receiver 12 is used for measuring the concentration of water vapor, and the transmitting member 15 transmits only infrared light having a wavelength of 1.9 μm which is easily attenuated in the water vapor, for example. Further, another light receiver 12 is used for measuring the concentration of carbon monoxide, and the transmission member 15 transmits only infrared rays having a wavelength of 4.64 μm which is easily attenuated in the above-described carbon monoxide, for example.

なお、前述した透過部材１５は、必ずしも前述した波長の赤外線のみを透過させるものでなくても良く、前述したように、測定対象の気体の測定濃度範囲に応じて、これらの気体の濃度測定に最適な波長の赤外線のみを透過させるものであれば良い。   Note that the transmission member 15 described above does not necessarily transmit only the infrared light having the wavelength described above, and as described above, according to the measurement concentration range of the gas to be measured, the concentration measurement of these gases can be performed. What is necessary is just to be able to transmit only infrared rays having the optimum wavelength.

そして、受光ユニット８は、互いに透過部材１５が透過させる赤外線の波長の異なる受光器１２を複数備えているので、複数の種類の気体の濃度を測定するために用いることができる。   Since the light receiving unit 8 includes a plurality of light receivers 12 having different infrared wavelengths that are transmitted by the transmission member 15, the light receiving unit 8 can be used to measure the concentrations of a plurality of types of gases.

なお、図６は、二酸化炭素に対する赤外線の透過率を示しており、図６中の横軸は赤外線の波長（μｍ）を示し、図６中の縦軸は赤外線の透過率（％）を示している。図６によれば、波長が４．２７μｍの赤外線の二酸化炭素中の透過率が、略零であることが示されており、波長が４．２７μｍの赤外線は、二酸化炭素中を殆ど透過しない（殆ど吸収されてしまう）ことが示されている。   6 shows the infrared transmittance for carbon dioxide, the horizontal axis in FIG. 6 indicates the wavelength of infrared rays (μm), and the vertical axis in FIG. 6 indicates the infrared transmittance (%). ing. FIG. 6 shows that the transmittance of infrared rays having a wavelength of 4.27 μm in carbon dioxide is substantially zero, and infrared rays having a wavelength of 4.27 μm hardly pass through carbon dioxide ( It is almost absorbed).

集光部材１３は、例えば３００度などの所定の角度の範囲の赤外線を集光して、透過部材１５つまり赤外線センサ１４に集中させる。すると、光源７から直接入射する赤外線以外にも、測定セル６の外壁６ａの内面で反射する赤外線も赤外線センサ１４に集めることができるので、赤外線の受光効率を良くすることができる。なお、集光部材１３として、フレーネルレンズ等を用いることができる。   The condensing member 13 condenses infrared rays in a predetermined angle range such as 300 degrees and concentrates the infrared rays on the transmitting member 15, that is, the infrared sensor 14. Then, in addition to the infrared rays directly incident from the light source 7, infrared rays reflected from the inner surface of the outer wall 6a of the measurement cell 6 can be collected in the infrared sensor 14, so that the infrared light receiving efficiency can be improved. Note that a Fresnel lens or the like can be used as the light collecting member 13.

制御回路部３は、図２に示すように、発振器１６、クロック分周回路１７、定電圧回路１８などを備えており、μｃｏｍ５の命令とおりに、所定の周波数で光源７を点滅させる。   As shown in FIG. 2, the control circuit unit 3 includes an oscillator 16, a clock frequency dividing circuit 17, a constant voltage circuit 18, and the like, and blinks the light source 7 at a predetermined frequency according to a command of μcom5.

受光回路部４は、図５に示すように、複数のアンプ１９と、切り換え器２０と、Ａ／Ｄ変換器２１とを備えている、アンプ１９は、それぞれ、受光器１２と１対１に対応して設けられている。アンプ１９は、対応する受光器１２の赤外線センサ１４からの信号を増幅して、切り換え器２０を介してＡ／Ｄ変換器２１に向かって出力する。Ａ／Ｄ変換器２１は、赤外線センサ１４からの信号をデジタル信号に変換して、μｃｏｍ５に向かって出力する。   As shown in FIG. 5, the light receiving circuit unit 4 includes a plurality of amplifiers 19, a switcher 20, and an A / D converter 21. The amplifiers 19 are in one-to-one correspondence with the light receivers 12. Correspondingly provided. The amplifier 19 amplifies the signal from the infrared sensor 14 of the corresponding light receiver 12 and outputs it to the A / D converter 21 via the switcher 20. The A / D converter 21 converts the signal from the infrared sensor 14 into a digital signal and outputs it to the μcom 5.

μｃｏｍ５は、制御回路部３及び受光回路部４と接続して、これらの動作を制御することで、濃度測定装置１全体の動作をつかさどる。μｃｏｍ５は、予め定められたプログラムに従って動作するコンピュータである。このμｃｏｍ５は、周知のように、予め定めたプログラムに従って各種の処理や制御などを行う中央演算処理装置（ＣＰＵ）、ＣＰＵのためのプログラム等を格納した読み出し専用のメモリであるＲＯＭ、各種のデータを格納するとともにＣＰＵの処理作業に必要なエリアを有する読み出し書き込み自在のメモリであるＲＡＭ等を有して構成している。   The μcom 5 is connected to the control circuit unit 3 and the light receiving circuit unit 4 and controls these operations, thereby controlling the operation of the concentration measuring apparatus 1 as a whole. μcom5 is a computer that operates according to a predetermined program. As is well known, this μcom 5 is a central processing unit (CPU) that performs various processes and controls in accordance with a predetermined program, a ROM that is a read-only memory storing a program for the CPU, and various data. And a RAM that is a readable / writable memory having an area necessary for processing operations of the CPU.

また、μｃｏｍ５には、濃度測定装置１自体がオフ状態の間も記憶内容の保持が可能な電気的消去／書き換え可能な読み出し専用のメモリが接続している。そして、このメモリには、濃度の算出に必要な後述する吸光係数、測定距離、濃度変換係数等の各種情報を記憶するとともに、算出した濃度を外部から読出可能に時系列的に記憶する。   In addition, the μcom 5 is connected to an electrically erasable / rewritable read-only memory capable of holding stored contents even when the concentration measuring apparatus 1 itself is in an OFF state. The memory stores various information such as an extinction coefficient, measurement distance, and concentration conversion coefficient, which will be described later, necessary for calculating the concentration, and stores the calculated concentration in a time series so that it can be read from the outside.

前述した構成の濃度測定装置１は、測定セル６の光源７から受光ユニット８の受光器１２に向かう光の光軸を挟んで互いに相対する一対の壁２２ａ，２２ｂそれぞれに設けられた連通部２６が、互いに間隔をあけ且つ一部が重なる第１の壁２４と第２の壁２５とで構成され且つ該第１の壁２４に設けられた開口部２４ａを備えている。この連通部２６によって、雰囲気が測定セル６の内外を移動自在となって、この測定セル６即ち気体サンプル室２内の気体を雰囲気と等しくする。そして、濃度測定装置１は、光源７を点滅させて、この光源７からの赤外線を各受光器１２の赤外線センサ１４で受光する。   In the concentration measuring apparatus 1 having the above-described configuration, the communication portion 26 provided on each of the pair of walls 22a and 22b facing each other across the optical axis of light directed from the light source 7 of the measurement cell 6 toward the light receiver 12 of the light receiving unit 8. Is provided with an opening 24a formed by the first wall 24 and the second wall 25 which are spaced apart from each other and partially overlap each other. The communication portion 26 allows the atmosphere to move freely inside and outside the measurement cell 6, so that the gas in the measurement cell 6, that is, the gas sample chamber 2 is made equal to the atmosphere. Then, the concentration measuring apparatus 1 blinks the light source 7 and receives the infrared light from the light source 7 by the infrared sensor 14 of each light receiver 12.

そして、濃度測定装置１のμｃｏｍ５は、赤外線センサ１４で受光した赤外線の強さなどに基づいて、予め定められた気体の雰囲気中の濃度を測定する。具体的には、濃度測定装置１のμｃｏｍ５は、基準として用いられる受光器１２の赤外線センサ１４で受光した赤外線の強さと、二酸化炭素、水蒸気及び一酸化炭素を測定するための受光器１２の赤外線センサ１４で受光した赤外線の強さとを比較して、測定対象の二酸化炭素、水蒸気及び一酸化炭素の濃度を測定する。このように、濃度測定装置１の気体サンプル室２は、光源７からの赤外線を受光器１２に導くように形成されている。   The μcom 5 of the concentration measuring apparatus 1 measures the concentration in a predetermined gas atmosphere based on the intensity of infrared rays received by the infrared sensor 14. Specifically, the μcom 5 of the concentration measuring apparatus 1 determines the intensity of infrared light received by the infrared sensor 14 of the light receiver 12 used as a reference, and the infrared light of the light receiver 12 for measuring carbon dioxide, water vapor, and carbon monoxide. The concentration of carbon dioxide, water vapor, and carbon monoxide to be measured is measured by comparing the intensity of infrared rays received by the sensor 14. As described above, the gas sample chamber 2 of the concentration measuring apparatus 1 is formed so as to guide the infrared rays from the light source 7 to the light receiver 12.

本実施形態によれば、筒状に形成されて一端部に光源７が配され且つ他端部に該光源７からの光を受光する受光器１２が配された測定セル６の側壁２２が、互いに間隔をあけ且つ一部が重なる第１の壁２４及び第２の壁２５から構成されて、測定セル６の内外を連通する連通部２６を少なくとも一つ備えている。   According to the present embodiment, the side wall 22 of the measurement cell 6 is formed in a cylindrical shape, the light source 7 is disposed at one end, and the light receiver 12 that receives light from the light source 7 is disposed at the other end. The first wall 24 and the second wall 25 that are spaced apart from each other and partially overlap each other are provided with at least one communication portion 26 that communicates the inside and outside of the measurement cell 6.

このため、測定セル６が、当該測定セル６外への光源７からの光の洩れを低減するとともに、当該測定セル６に雰囲気を出し入れ自在にすることができるので、十分な強さの光を受光部に導くことができるとともに、雰囲気を速やかに測定セル６内に導くことができる。したがって、雰囲気中の測定対象の気体の濃度を測定する感度を向上させることができ且つ速やかに測定することができる。   For this reason, the measurement cell 6 can reduce leakage of light from the light source 7 to the outside of the measurement cell 6 and can make the atmosphere in and out of the measurement cell 6 freely. While being able to guide to a light-receiving part, an atmosphere can be rapidly guided in the measurement cell 6. Therefore, the sensitivity for measuring the concentration of the gas to be measured in the atmosphere can be improved and can be measured quickly.

また、連通部２６が、光源７から受光ユニット８の受光器１２に向かう光の光軸を挟んで互いに相対する一対の壁２２ａ，２２ｂに設けられているので、測定セル６に雰囲気を速やかに出し入れ自在にできる。したがって、雰囲気中の測定対象の気体の濃度を速やかに測定することができる。   Moreover, since the communication part 26 is provided in a pair of walls 22a and 22b which oppose each other across the optical axis of the light which goes to the light receiver 12 of the light receiving unit 8 from the light source 7, the atmosphere in the measuring cell 6 can be quickly changed. Can be freely put in and out. Therefore, the concentration of the gas to be measured in the atmosphere can be measured quickly.

さらに、連通部２６が、第１の壁２４と第２の壁２５とのうち外側に位置する一方、即ち第１の壁２４に設けられた開口部２４ａを備えているので、測定セル６に雰囲気を速やかに出し入れ自在にできる。したがって、雰囲気を速やかに測定セル６内に導くことができ、雰囲気中の測定対象の気体の濃度を速やかに測定することができる。   Furthermore, since the communication part 26 is provided with one of the first wall 24 and the second wall 25 located outside, that is, the opening 24a provided in the first wall 24, the measurement cell 6 has The atmosphere can be taken in and out quickly. Therefore, the atmosphere can be quickly guided into the measurement cell 6 and the concentration of the gas to be measured in the atmosphere can be measured quickly.

また、前述した実施形態では、測定セル６の側壁２２の互いに相対する一対の壁２２ａ，２２ｂそれぞれに、互いに間隔をあけ且つ一部が重なる第１の壁２４と第２の壁２５とで構成されて、測定セル６の内外を連通する連通部２６を設けていた。しかしながら、本発明では、図７に示すように、測定セル６の側壁２２の互いに相対する一対の壁２２ａ，２２ｂそれぞれに、複数の連通部２６を設けていても良い。なお、図７において、前述した実施形態と同一部分には、同一符号を付して説明を省略する。   In the above-described embodiment, the pair of walls 22 a and 22 b facing each other on the side wall 22 of the measurement cell 6 includes the first wall 24 and the second wall 25 that are spaced apart and partially overlap each other. Thus, a communication portion 26 that communicates the inside and outside of the measurement cell 6 is provided. However, in the present invention, as shown in FIG. 7, a plurality of communication portions 26 may be provided on each of the pair of opposite walls 22 a and 22 b of the side wall 22 of the measurement cell 6. In FIG. 7, the same parts as those of the above-described embodiment are denoted by the same reference numerals and description thereof is omitted.

図７に示された場合では、測定セル６の側壁２２の互いに相対する一対の壁２２ａ，２２ｂそれぞれに、該測定セル６の幅方向に沿って複数の連通部２６が設けられている。複数の連通部２６は、それぞれ、第１の壁２８と第２の壁２９とで構成されており、図示例では、複数の連通部２６が、３つの第１の壁２８と、４つの第２の壁２９とで構成されている。そして、複数の連通部２６を構成する複数の第１の壁２８及び第２の壁２９は、測定セル６の互いに相対する一対の壁２２ａ，２２ｂそれぞれを構成している。   In the case shown in FIG. 7, a plurality of communication portions 26 are provided along the width direction of the measurement cell 6 on each of the pair of opposite walls 22 a and 22 b of the side wall 22 of the measurement cell 6. Each of the plurality of communication portions 26 includes a first wall 28 and a second wall 29, and in the illustrated example, the plurality of communication portions 26 include three first walls 28 and four first walls. And two walls 29. The plurality of first walls 28 and second walls 29 constituting the plurality of communication portions 26 constitute a pair of walls 22 a and 22 b facing each other of the measurement cell 6.

複数の第１の壁２８は、それぞれ、平板状に形成されており、測定セル６の長手方向、即ち幅方向に沿って互いに間隔をあけて配されている。また、複数の第１の壁２８は、それぞれ、複数の第２の壁２９の外側に間隔をあけるとともに、一部が重なるように配されている。   The plurality of first walls 28 are each formed in a flat plate shape, and are spaced apart from each other along the longitudinal direction of the measurement cell 6, that is, the width direction. In addition, the plurality of first walls 28 are arranged so as to be spaced apart from each other and overlap with each other on the outside of the plurality of second walls 29.

複数の第２の壁２９は、それぞれ、平板状に形成されており、複数の第１の壁２８と間隔をあけ且つ平行に配されている。そして、複数の第１の壁２８と、複数の第２の壁２９とで構成された各連通部２６が、測定セル６即ち気体サンプル室２の内外を連通している。   The plurality of second walls 29 are each formed in a flat plate shape, and are spaced apart from and parallel to the plurality of first walls 28. Each communication portion 26 configured by a plurality of first walls 28 and a plurality of second walls 29 communicates the inside and outside of the measurement cell 6, that is, the gas sample chamber 2.

そして、図７に示された場合では、測定セル６の側壁２２の互いに相対する各壁２２ａ，２２ｂそれぞれに、該測定セル６の幅方向に沿って設けられた複数の連通部２６それぞれが、互いに間隔をあけ且つ一部が重なる第１の壁２８と第２の壁２９とで構成されて、これら複数の連通部２６それぞれが測定セル６の内外を連通しているので、測定セル６に雰囲気を速やかに出し入れ自在にできる。このため、雰囲気中の測定対象の気体の濃度を速やかに測定することができる。   In the case shown in FIG. 7, each of the plurality of communication portions 26 provided along the width direction of the measurement cell 6 on each of the opposite walls 22 a and 22 b of the side wall 22 of the measurement cell 6, respectively. The first wall 28 and the second wall 29 which are spaced apart from each other and partially overlap each other, and each of the plurality of communicating portions 26 communicates with the inside and outside of the measuring cell 6. The atmosphere can be taken in and out quickly. For this reason, the density | concentration of the gas of the measuring object in atmosphere can be measured rapidly.

また、前述した実施形態では、測定セル６の側壁２２の互いに相対する各壁２２ａ，２２ｂそれぞれに、該測定セル６の幅方向に沿って複数の連通部２６を設けて、該複数の連通部２６それぞれが互いに間隔をあけ且つ一部が重なる第１の壁２８と第２の壁２９とで構成されていた。しかしながら、本発明では、図８に示すように、複数の連通部２６それぞれが互いに間隔をあけ且つ一部が重なる第１の壁３０と第２の壁３１とで構成されて、これらの第１の壁３０と第２の壁３１との双方が、第１傾斜部３２と第２傾斜部３３とを有していても良い。なお、図８において、前述した実施形態と同一部分には、同一符号を付して説明を省略する。   In the above-described embodiment, the plurality of communication portions 26 are provided along the width direction of the measurement cell 6 on each of the walls 22 a and 22 b facing each other of the side wall 22 of the measurement cell 6, so that the plurality of communication portions are provided. The first wall 28 and the second wall 29 overlap each other and partly overlap each other. However, in the present invention, as shown in FIG. 8, each of the plurality of communication portions 26 includes a first wall 30 and a second wall 31 that are spaced apart from each other and partially overlap each other. Both the wall 30 and the second wall 31 may have a first inclined portion 32 and a second inclined portion 33. In FIG. 8, the same parts as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is omitted.

図８に示された場合では、測定セル６の側壁２２の互いに相対する各壁２２ａ，２２ｂそれぞれに、該測定セル６の幅方向に沿って複数の連通部２６が設けられている。複数の連通部２６は、それぞれ、第１の壁３０と第２の壁３１とで構成されており、図示例では、複数の連通部２６が、２つの第１の壁３０ａ，３０ｂと、２つの第２の壁３１ａ，３１ｂとで構成されている。そして、複数の連通部２６を構成する複数の第１の壁３０ａ，３０ｂ及び第２の壁３１ａ，３１ｂは、測定セル６の互いに相対する一対の壁２２ａ，２２ｂそれぞれを構成している。   In the case shown in FIG. 8, a plurality of communication portions 26 are provided along the width direction of the measurement cell 6 on each of the opposite walls 22 a and 22 b of the side wall 22 of the measurement cell 6. Each of the plurality of communication portions 26 includes a first wall 30 and a second wall 31. In the illustrated example, the plurality of communication portions 26 include two first walls 30a and 30b, 2 It consists of two second walls 31a and 31b. The plurality of first walls 30 a and 30 b and the second walls 31 a and 31 b constituting the plurality of communication portions 26 constitute a pair of walls 22 a and 22 b facing each other of the measurement cell 6.

上記第１の壁３０ａは、測定セル６の一端部に位置する対向壁２３ａと連なるように設けられている。上記第１の壁３０ｂは、測定セル６の他端部に位置する対向壁２３ｂと連なるように設けられている。これら複数の第１の壁３０ａ，３０ｂには、それぞれ、測定セル６の一端部から他端部に向かうにしたがって外側に傾斜する第１傾斜部３２と、該第１傾斜部３２に連なり且つ測定セル６の一端部から他端部に向かうにしたがって内側に傾斜する第２傾斜部３３と、が設けられている。   The first wall 30 a is provided so as to be continuous with the facing wall 23 a located at one end of the measurement cell 6. The first wall 30b is provided so as to continue to the opposing wall 23b located at the other end of the measurement cell 6. Each of the plurality of first walls 30a and 30b includes a first inclined portion 32 that is inclined outwardly from one end portion to the other end portion of the measurement cell 6, and is connected to the first inclined portion 32 and is measured. A second inclined portion 33 that is inclined inward from one end portion of the cell 6 toward the other end portion is provided.

また、複数の第１の壁３０ａ，３０ｂは、一方の第１の壁３０ａの第１傾斜部３２及び第２傾斜部３３が一方の第２の壁３１ａより外側に位置するように配されるとともに、他方の第１の壁３０ｂの第１傾斜部３２及び第２傾斜部３３が他方の第２の壁３１ｂより内側に位置するように配されている。   Further, the plurality of first walls 30a and 30b are arranged such that the first inclined portion 32 and the second inclined portion 33 of the first wall 30a are located outside the one second wall 31a. At the same time, the first inclined portion 32 and the second inclined portion 33 of the other first wall 30b are arranged so as to be located inside the other second wall 31b.

複数の第２の壁３１ａ，３１ｂは、それぞれ、各第１の壁３０ａ，３０ｂと間隔をあけて配されている。複数の第２の壁３１ａ，３１ｂには、それぞれ、測定セル６の一端部から他端部に向かうにしたがって外側に傾斜する第１傾斜部３２と、該第１傾斜部３２に連なり且つ測定セル６の一端部から他端部に向かうにしたがって内側に傾斜する第２傾斜部３３と、が設けられている。複数の第２の壁３１ａ，３１ｂは、それぞれ、第１傾斜部３２及び第２傾斜部３３が複数設けられている。   The plurality of second walls 31a and 31b are respectively arranged at intervals from the first walls 30a and 30b. Each of the plurality of second walls 31a and 31b includes a first inclined portion 32 that is inclined outwardly from one end portion to the other end portion of the measurement cell 6, and a measurement cell that is connected to the first inclined portion 32 and is connected to the first inclined portion 32. 6 and a second inclined portion 33 that is inclined inwardly from the one end portion toward the other end portion. The plurality of second walls 31a and 31b are provided with a plurality of first inclined portions 32 and a plurality of second inclined portions 33, respectively.

また、複数の第２の壁３１ａ，３１ｂは、測定セル６の長手方向に沿って互いに間隔をあけるとともに、互いに近接した一方の第１傾斜部３２及び第２傾斜部３３同士が重なるように配されている。また、複数の第２の壁３１ａ，３１ｂは、それぞれ、他方の第１傾斜部３２及び第２傾斜部３３が、各第１の壁３０ａ，３０ｂの第１傾斜部３２及び第２傾斜部３３と、間隔をあけて重なるように配されている。即ち、これらの各第１の壁３０ａ，３０ｂと各第２の壁３１ａ，３１ｂとは、互いに間隔をあけ且つ一部が重なるように配されている。   Further, the plurality of second walls 31a and 31b are spaced from each other along the longitudinal direction of the measurement cell 6 and are arranged so that one of the first inclined portion 32 and the second inclined portion 33 that are close to each other overlap each other. Has been. The plurality of second walls 31a and 31b have the other first inclined portion 32 and the second inclined portion 33, respectively, and the first inclined portion 32 and the second inclined portion 33 of each of the first walls 30a and 30b. And it is arranged so as to overlap with a gap. That is, the first walls 30a and 30b and the second walls 31a and 31b are arranged so as to be spaced apart from each other and partially overlap each other.

そして、図８に示された場合では、測定セル６の側壁２２の互いに相対する各壁２２ａ，２２ｂそれぞれに、該測定セル６の幅方向に沿って設けられた複数の連通部２６それぞれが、互いに間隔をあけ且つ一部が重なる第１の壁３０と第２の壁３１とで構成されて、これらの第１の壁３０と第２の壁３１との双方が、第１傾斜部３２及び第２傾斜部３３を有している。   In the case shown in FIG. 8, each of the plurality of communication portions 26 provided along the width direction of the measurement cell 6 on each of the opposite walls 22 a and 22 b of the side wall 22 of the measurement cell 6, respectively. The first wall 30 and the second wall 31 are spaced apart from each other and partially overlap each other, and both the first wall 30 and the second wall 31 are connected to the first inclined portion 32 and A second inclined portion 33 is provided.

このため、測定セル６外への光源からの光の洩れを低減することができるので、十分な強さの光を受光器１２に導くことができる。したがって、雰囲気中の測定対象の気体の濃度を測定する感度を向上させることができる。   For this reason, since leakage of light from the light source to the outside of the measurement cell 6 can be reduced, light with sufficient intensity can be guided to the light receiver 12. Therefore, the sensitivity for measuring the concentration of the gas to be measured in the atmosphere can be improved.

また、図８に示された場合では、前述した複数の連通部２６それぞれが、互いに間隔をあけた第１の壁３０と第２の壁３１とで構成されているので、これら複数の連通部２６それぞれが測定セル６の内外を連通して、測定セル６に雰囲気を速やかに出し入れ自在にできる。このため、雰囲気中の測定対象の気体の濃度を速やかに測定することができる。   Further, in the case shown in FIG. 8, each of the plurality of communication portions 26 described above is composed of the first wall 30 and the second wall 31 that are spaced from each other. Each of the 26 communicates with the inside and outside of the measurement cell 6 so that the atmosphere can be quickly taken into and out of the measurement cell 6. For this reason, the density | concentration of the gas of the measuring object in atmosphere can be measured rapidly.

さらに、前述した実施形態では、測定セル６の側壁２２の互いに相対する各壁２２ａ，２２ｂそれぞれに、該測定セル６の幅方向に沿って複数の連通部２６を設けて、該複数の連通部２６それぞれを構成する互いに間隔をあけ且つ一部が重なる第１の壁３０と第２の壁３１との双方が、第１傾斜部３２及び第２傾斜部３３を有していた。   Furthermore, in the above-described embodiment, a plurality of communication portions 26 are provided along the width direction of the measurement cell 6 on each of the opposite walls 22a and 22b of the side wall 22 of the measurement cell 6, and the plurality of communication portions are provided. Both the first wall 30 and the second wall 31 that are spaced apart from each other and partially overlap each other included the first inclined portion 32 and the second inclined portion 33.

しかしながら、本発明では、図９に示すように、測定セル６の側壁２２の互いに相対する各壁２２ａ，２２ｂそれぞれに設けられた連通部２６が、互いに間隔をあけ且つ一部が重なる第１の壁３４と第２の壁３５とで構成されて、これらの第１の壁３４と第２の壁３５との双方に、当該第１の壁３４と第２の壁３５との互いに相対する（重なる）対向面の縁から突設された突出壁３６が設けられていても良い。なお、図９において、前述した実施形態と同一部分には、同一符号を付して説明を省略する。   However, in the present invention, as shown in FIG. 9, the communication portions 26 provided on the respective walls 22a, 22b of the side wall 22 of the measurement cell 6 which are opposed to each other are spaced apart from each other and partially overlap each other. The first wall 34 and the second wall 35 are opposed to each other (both the first wall 34 and the second wall 35). A protruding wall 36 protruding from the edge of the opposing surface may be provided. In FIG. 9, the same parts as those of the above-described embodiment are denoted by the same reference numerals and description thereof is omitted.

図９に示された場合では、測定セル６の側壁２２の互いに相対する各壁２２ａ，２２ｂそれぞれに、連通部２６が設けられており、該連通部２６が第１の壁３４と第２の壁３５とで構成されている。第１の壁３４は、中央に矩形状の開口部３４ａが各壁２２ａ，２２ｂの全長に亘って設けられるとともに、第２の壁３５より外側に位置するように配されている。第２の壁３５は、平板状に形成されており、第１の壁３４と間隔をあけ且つ平行に配されるとともに、第１の壁３４の開口部３４ａよりも大きく形成されて該開口部３４ａを塞ぐように配されている。これらの第１の壁３４と第２の壁３５とが、互いに間隔をあけ且つ一部が重なるように配されている。   In the case shown in FIG. 9, each of the walls 22 a and 22 b of the side wall 22 of the measurement cell 6 facing each other is provided with a communication portion 26, and the communication portion 26 is connected to the first wall 34 and the second wall 22. It consists of a wall 35. The first wall 34 is provided so that a rectangular opening 34 a is provided at the center over the entire length of each of the walls 22 a and 22 b, and is positioned outside the second wall 35. The second wall 35 is formed in a flat plate shape, is spaced from and parallel to the first wall 34, and is formed to be larger than the opening 34 a of the first wall 34. It is arranged so as to block 34a. The first wall 34 and the second wall 35 are arranged so as to be spaced apart from each other and partially overlap each other.

また、第１の壁３４と第２の壁３５との双方には、それぞれ、当該第１の壁３４と第２の壁３５との互いに相対する（重なる）対向面の縁から突設された突出壁３６が複数設けられている。複数の突出壁３６は、第１の壁３４の開口部３４ａの第２の壁３５と重なる両端部に設けられているとともに、第２の壁３５の第１の壁３４と重なる両端部に設けられている。即ち、複数の突出壁３６は、第１の壁３４と第２の壁３５とが互いに重なる部分に配されている。また、第１の壁３４から突出した突出壁３６と第２の壁３５から突出した突出壁３６とは、互いに間隔をあけて平行に配置されている。   Further, both the first wall 34 and the second wall 35 are respectively provided so as to protrude from the edges of the opposing surfaces of the first wall 34 and the second wall 35 facing (overlapping) with each other. A plurality of protruding walls 36 are provided. The plurality of protruding walls 36 are provided at both ends of the opening 34 a of the first wall 34 that overlap the second wall 35, and are provided at both ends of the second wall 35 that overlap the first wall 34. It has been. In other words, the plurality of protruding walls 36 are arranged in a portion where the first wall 34 and the second wall 35 overlap each other. Further, the protruding wall 36 protruding from the first wall 34 and the protruding wall 36 protruding from the second wall 35 are arranged in parallel with a space therebetween.

そして、図９に示された場合では、測定セル６の側壁２２の互いに相対する各壁２２ａ，２２ｂそれぞれに設けられた連通部２６を構成する互いに間隔をあけ且つ一部が重なるように配された第１の壁３４と第２の壁３５との双方に、これらの第１の壁３４と第２の壁３５との互いに相対する（重なる）対向面から突設した複数の突出壁３６が設けられているとともに、この複数の突出壁３６が、第１の壁３４と第２の壁３５とが互いに重なる部分に配されているので、前記連通部２６から測定セル６外に光源からの光を更に洩れにくくすることができる。   In the case shown in FIG. 9, the side walls 22 of the measurement cell 6 are arranged so as to be spaced apart from each other and partially overlap each other, which constitutes the communication portion 26 provided on each of the walls 22 a and 22 b facing each other. The first wall 34 and the second wall 35 are provided with a plurality of projecting walls 36 projecting from opposing surfaces of the first wall 34 and the second wall 35 facing each other (overlapping). Since the plurality of projecting walls 36 are arranged in a portion where the first wall 34 and the second wall 35 overlap each other, the communication portion 26 and the measurement cell 6 are connected to the measurement cell 6 from the light source. Light can be further prevented from leaking.

このため、測定セル６外への光源からの光の洩れを更に低減することができるので、十分な強さの光を受光器１２に導くことができる。したがって、雰囲気中の測定対象の気体の濃度を測定する感度を更に向上させることができる。   For this reason, the leakage of light from the light source to the outside of the measurement cell 6 can be further reduced, so that a sufficiently strong light can be guided to the light receiver 12. Therefore, the sensitivity for measuring the concentration of the gas to be measured in the atmosphere can be further improved.

また、図９に示された場合では、前述した連通部２６が、互いに間隔をあけた第１の壁３４と第２の壁３５とで構成され、更に、互いに間隔をあけ且つ前記壁３４，３５と間隔をあけて突出壁３６が設けられているので、前記連通部２６が測定セル６の内外を連通して、測定セル６に雰囲気を速やかに出し入れ自在にできる。このため、雰囲気中の測定対象の気体の濃度を速やかに測定することができる。   Further, in the case shown in FIG. 9, the communication portion 26 described above is composed of a first wall 34 and a second wall 35 that are spaced apart from each other, and is further spaced from each other and the walls 34, Since the projecting wall 36 is provided at a distance from 35, the communication portion 26 communicates the inside and outside of the measurement cell 6 so that the atmosphere can be quickly taken in and out of the measurement cell 6. For this reason, the density | concentration of the gas of the measuring object in atmosphere can be measured rapidly.

さらに、前述した実施形態では、測定セル６の側壁２２の互いに相対する各壁２２ａ，２２ｂそれぞれに設けられた連通部２６を構成する互いに間隔をあけ且つ一部が重なるように配された第１の壁３４と第２の壁３５との双方に、それぞれ、複数の突出壁３６が設けられていた。しかしながら、本発明では、図１０に示すように、第１の壁３４と第２の壁３５とにそれぞれ設けられた複数の突出壁３６に、それぞれ、第２突出壁３７が形成されていても良い。なお、図１０において、前述した実施形態と同一部分には、同一符号を付して説明を省略する。   Further, in the above-described embodiment, the first is arranged such that the communication portions 26 provided on the respective walls 22 a and 22 b of the measurement cell 6 facing each other are spaced apart from each other and partially overlap each other. A plurality of projecting walls 36 are provided on both the wall 34 and the second wall 35, respectively. However, in the present invention, as shown in FIG. 10, even if the second protruding walls 37 are respectively formed on the plurality of protruding walls 36 respectively provided on the first wall 34 and the second wall 35. good. In FIG. 10, the same parts as those of the above-described embodiment are denoted by the same reference numerals and description thereof is omitted.

図１０に示された場合では、第１の壁３４と第２の壁３５とが互いに重なる対向面の縁から突出した突出壁３６の先端から更に第２突出壁３７が突出している。第１の壁３４から凸の突出壁３６から突出した第２突出壁３７と、第２の壁３５から凸の突出壁３６から突出した第２突出壁３７とは、互いに平行に配置されているとともに、第１の壁及び第２の壁３４，３５の双方と平行に配置されている。   In the case shown in FIG. 10, the second protruding wall 37 further protrudes from the tip of the protruding wall 36 protruding from the edge of the facing surface where the first wall 34 and the second wall 35 overlap each other. The second projecting wall 37 projecting from the projecting projecting wall 36 from the first wall 34 and the second projecting wall 37 projecting from the projecting projecting wall 36 from the second wall 35 are arranged in parallel to each other. In addition, both the first wall and the second wall 34, 35 are arranged in parallel.

また、第１の壁３４から凸の突出壁３６から突出した第２突出壁３７と、第２の壁３５から凸の突出壁３６から突出した第２突出壁３７とは、互いに間隔をあけて重なっている。即ち、第１の壁及び第２の壁３４，３５と突出壁３６，３７とは、互いに間隔をあけて配置されている。   The second projecting wall 37 projecting from the projecting projecting wall 36 from the first wall 34 and the second projecting wall 37 projecting from the projecting projecting wall 36 from the second wall 35 are spaced apart from each other. overlapping. In other words, the first and second walls 34 and 35 and the projecting walls 36 and 37 are spaced from each other.

そして、図１０に示された場合では、測定セル６の側壁２２の互いに相対する各壁２２ａ，２２ｂそれぞれに設けられた連通部２６を構成する第１の壁及び第２の壁３４，３５と突出壁３６，３７とが、互いに間隔をあけ且つ一部が重なるように配されているので、前記連通部２６から測定セル６外に光源からの光を更に洩れにくくすることができる。   In the case shown in FIG. 10, the first wall and the second wall 34, 35 constituting the communication portion 26 provided in each of the walls 22 a, 22 b facing each other of the side wall 22 of the measurement cell 6, Since the protruding walls 36 and 37 are arranged so as to be spaced apart and partially overlap each other, it is possible to further prevent light from the light source from leaking from the communication portion 26 to the outside of the measurement cell 6.

このため、測定セル６外への光源からの光の洩れを更に低減することができるので、十分な強さの光を受光器１２に導くことができる。したがって、雰囲気中の測定対象の気体の濃度を測定する感度を向上させることができる。   For this reason, the leakage of light from the light source to the outside of the measurement cell 6 can be further reduced, so that a sufficiently strong light can be guided to the light receiver 12. Therefore, the sensitivity for measuring the concentration of the gas to be measured in the atmosphere can be improved.

また、図１０に示された場合では、測定セル６の側壁２２の互いに相対する各壁２２ａ，２２ｂそれぞれに設けられた連通部２６が、互いに間隔をあけた第１の壁３４と第２の壁３５とで構成され、更に、互いに間隔をあけ且つ前記第１の壁及び第２の壁３４，３５と間隔をあけて突出壁３６，３７が設けられているので、前記連通部２６が測定セル６の内外を連通して、測定セル６に雰囲気を速やかに出し入れ自在にできる。このため、雰囲気中の測定対象の気体の濃度を速やかに測定することができる。   Further, in the case shown in FIG. 10, the communication portions 26 provided on the respective walls 22 a and 22 b of the side wall 22 of the measurement cell 6 that are opposed to each other include the first wall 34 and the second wall that are spaced apart from each other. Further, since the projecting walls 36 and 37 are provided so as to be spaced apart from each other and spaced apart from the first and second walls 34 and 35, the communication portion 26 is measured. By connecting the inside and outside of the cell 6, the atmosphere can be quickly taken into and out of the measuring cell 6. For this reason, the density | concentration of the gas of the measuring object in atmosphere can be measured rapidly.

さらに、前述した実施形態では、測定セル６の側壁２２の図１中の奥行き方向に沿って相対する一対の壁２２ａ，２２ｂそれぞれに、連通部２６を設けて、該連通部２６が互いに間隔をあけ且つ一部が重なる第１の壁３４と第２の壁３５とで構成されていた。しかしながら、本発明では、図１１又は図１２に示すように、測定セル６の図中の上下方向、即ち測定セル６の厚み方向に沿って相対する一対の壁２２ｃ，２２ｄそれぞれに、連通部２６を設けて、該連通部２６が互いに間隔をあけ且つ一部が重なる第１の壁３８と第２の壁３９とで構成されていても良い。なお、図１１又は図１２において、前述した実施形態と同一部分には、同一符号を付して説明を省略する。   Furthermore, in the above-described embodiment, the communication portions 26 are provided on the pair of walls 22a and 22b facing each other along the depth direction in FIG. 1 of the side wall 22 of the measurement cell 6, and the communication portions 26 are spaced from each other. The first wall 34 and the second wall 35 which are open and partially overlap each other are formed. However, in the present invention, as shown in FIG. 11 or FIG. 12, the communication portion 26 is connected to each of the pair of walls 22 c and 22 d facing each other in the vertical direction of the measurement cell 6, that is, along the thickness direction of the measurement cell 6. The communication portion 26 may be formed of a first wall 38 and a second wall 39 that are spaced apart from each other and partially overlap each other. In FIG. 11 or FIG. 12, the same parts as those of the above-described embodiment are denoted by the same reference numerals and description thereof is omitted.

図１１又は図１２に示された場合では、測定セル６は、略四角筒状に形成されており、内面の四隅部分Ｃが、外側に向かって凸の曲面状に形成されている。測定セル６は、側壁２２の該測定セル６の図中の上下方向、即ち測定セル６の厚み方向に沿って相対する一対の壁２２ｃ，２２ｄそれぞれに、連通部２６が設けられており、該連通部２６が第１の壁３８と第２の壁３９とで構成されている。また、これら一対の壁２２ｃ，２２ｄは、前述した光源７から受光ユニット８の受光器１２に向かう光の光軸を挟んで互いに相対している。   In the case shown in FIG. 11 or FIG. 12, the measurement cell 6 is formed in a substantially rectangular tube shape, and the four corner portions C on the inner surface are formed in a curved surface convex toward the outside. The measurement cell 6 is provided with a communication portion 26 on each of a pair of walls 22c and 22d facing each other in the vertical direction in the drawing of the measurement cell 6 of the side wall 22, that is, along the thickness direction of the measurement cell 6. The communication portion 26 is composed of a first wall 38 and a second wall 39. The pair of walls 22c and 22d are opposed to each other with the optical axis of the light traveling from the light source 7 to the light receiver 12 of the light receiving unit 8 described above.

第１の壁３８は、中央に矩形状の開口部３８ａが各壁２２ａ，２２ｂの全長に亘って設けられるとともに、第２の壁３９より外側に位置するように配されている。第２の壁３９は、平板状に形成されており、第１の壁３８と間隔をあけ且つ平行に配されるとともに、第１の壁３８の開口部３８ａよりも大きく形成されて該開口部３８ａを塞ぐように配されている。そして、これらの第１の壁３８と第２の壁３９とが、互いに間隔をあけ且つ一部が重なるように配されている。   The first wall 38 is provided with a rectangular opening 38 a at the center over the entire length of each of the walls 22 a and 22 b, and is positioned outside the second wall 39. The second wall 39 is formed in a flat plate shape, is spaced apart from and parallel to the first wall 38, and is formed larger than the opening 38 a of the first wall 38. It is arranged so as to block 38a. The first wall 38 and the second wall 39 are arranged so as to be spaced apart from each other and partially overlap each other.

前述した構成の測定セル６は、図１２に示すように、側壁２２の該測定セル６の厚み方向に沿って相対する一対の壁２２ｃ，２２ｄそれぞれに設けられ且つ第１の壁３８と第２の壁３９とで構成された連通部２６が、当該測定セル６の内外を連通している。即ち、測定セル６の上下部に位置する各壁２２ｃ，２２ｄそれぞれに設けられ且つ第１の壁３８と第２の壁３９とで構成された連通部２６が、気体サンプル室２の内外を連通している。   As shown in FIG. 12, the measurement cell 6 having the above-described configuration is provided on each of the pair of walls 22c and 22d facing each other along the thickness direction of the measurement cell 6 on the side wall 22, and the first wall 38 and the second wall The communication portion 26 configured with the wall 39 communicates the inside and outside of the measurement cell 6. That is, the communication part 26 provided on each of the walls 22c and 22d located at the upper and lower portions of the measurement cell 6 and constituted by the first wall 38 and the second wall 39 communicates the inside and outside of the gas sample chamber 2. is doing.

そして、図１１又は図１２に示された場合では、第１の壁３８と第２の壁３９とで構成された連通部２６が、測定セル６の側壁２２の上部に位置する壁２２ｃ（即ち側壁２２の上部に位置する箇所）と、該測定セル６の下部に位置する壁２２ｄ（即ち側壁２２の下部に位置する箇所）とに設けられているので、前記連通部２６が測定セル６の内外を連通して、煙突効果により測定セル６に雰囲気を更に速やかに出し入れ自在にできる。このため、雰囲気中の測定対象の気体の濃度を更に速やかに測定することができる。   In the case shown in FIG. 11 or FIG. 12, the communication portion 26 constituted by the first wall 38 and the second wall 39 is the wall 22 c (that is, the upper portion of the side wall 22 of the measurement cell 6 (that is, A portion located at the upper part of the side wall 22) and a wall 22 d located at the lower part of the measurement cell 6 (that is, a part located at the lower part of the side wall 22). By connecting the inside and outside, the atmosphere can be taken into and out of the measuring cell 6 more quickly by the chimney effect. For this reason, the density | concentration of the gas of the measuring object in atmosphere can be measured still more rapidly.

また、図１１又は図１２に示された場合では、測定セル６が略四角筒状に形成されて、当該測定セル６の内面の四隅部分Ｃを外側に向かって凸の曲面状に形成することで、測定セル６内の四隅部分Ｃにおいて雰囲気を移動しやすくしている。   Further, in the case shown in FIG. 11 or FIG. 12, the measurement cell 6 is formed in a substantially rectangular tube shape, and the four corner portions C of the inner surface of the measurement cell 6 are formed in a convex curved shape toward the outside. Thus, the atmosphere is easily moved in the four corner portions C in the measurement cell 6.

さらに、図１１又は図１２に示された場合では、測定セル６の側壁２２の該測定セル６の厚み方向に沿って相対する一対の壁２２ｃ，２２ｄそれぞれに、互いに間隔をあけ且つ一部が重なる第１の壁３８と第２の壁３９とで構成されて、これらの第１の壁３８と第２の壁３９との間の空間Ｋが測定セル６の内外を連通する連通部２６を設けている。しかしながら、前記連通部２６はこれに限定されるものではなく、測定セル６の側壁２２の互いに相対する各壁２２ｃ，２２ｄそれぞれに、連通部２６を複数設けていても良い。また、前記第１の壁３８と第２の壁３９とのうち少なくとも一方が、これらの第１の壁３８と第２の壁３９との互いに相対する対向面に突出壁を有して、測定セル６外に光源からの光を洩れにくくしていても良い。   Furthermore, in the case shown in FIG. 11 or FIG. 12, a pair of walls 22c and 22d facing each other along the thickness direction of the measurement cell 6 on the side wall 22 of the measurement cell 6 are spaced apart from each other and partly The first wall 38 and the second wall 39 that overlap each other, and the space 26 between the first wall 38 and the second wall 39 has a communication portion 26 that communicates the inside and outside of the measurement cell 6. Provided. However, the communication part 26 is not limited to this, and a plurality of communication parts 26 may be provided on each of the walls 22c and 22d facing each other on the side wall 22 of the measurement cell 6. Further, at least one of the first wall 38 and the second wall 39 has a protruding wall on the opposing surface of the first wall 38 and the second wall 39, and measurement is performed. The light from the light source may be made difficult to leak outside the cell 6.

また、図１１又は図１２に示された場合では、前述したように測定セル６の側壁２２の互いに相対する各壁２２ｃ，２２ｄそれぞれに、連通部２６を複数設けて、更に、前記複数の連通部２６それぞれを構成する第１の壁３８と第２の壁３９との双方が、測定セル６の一端部から他端部方向に沿って外側に傾斜する第１傾斜部と、該第１傾斜部に連なり且つ測定セル６の一端部から他端部方向に沿って内側に傾斜する第２傾斜部とを有して、測定セル６外に光源からの光を洩れにくくしていても良い。   Further, in the case shown in FIG. 11 or FIG. 12, as described above, a plurality of communication portions 26 are provided on each of the opposite walls 22c and 22d of the side wall 22 of the measurement cell 6, and the plurality of communication portions are further provided. A first inclined portion in which both the first wall 38 and the second wall 39 constituting each of the portions 26 are inclined outward from one end portion of the measurement cell 6 along the other end portion, and the first inclined portion It is possible to have a second inclined portion that is continuous with the first portion and that is inclined inwardly along the direction of the other end from one end portion of the measurement cell 6 so that light from the light source is hardly leaked outside the measurement cell 6.

前述した実施形態では、光としての赤外線を用いている。しかしながら、本発明では、赤外線以外の種々の光を用いても良い。   In the embodiment described above, infrared rays are used as light. However, in the present invention, various light other than infrared light may be used.

また、前述した実施形態では、測定セル６が略四角筒状に形成されていた。しかしながら、本発明では、測定セル６の形状については、これに限定されるものではなく、円筒状や多角筒状のものであっても良く、測定セル６内において雰囲気を移動しやすい形状であれば、如何なる形状であっても良い。   In the above-described embodiment, the measurement cell 6 is formed in a substantially rectangular tube shape. However, in the present invention, the shape of the measurement cell 6 is not limited to this, and may be a cylindrical shape or a polygonal cylindrical shape, and may be a shape in which the atmosphere easily moves in the measurement cell 6. Any shape is possible.

さらに、前述した実施形態では、測定セル６の側壁２２のうち互いに相対する一対の壁２２ａ，２２ｂそれぞれに連通部２６を設けて、該連通部２６を互いに間隔をあけ且つ一部が重なる第１の壁２４と第２の壁２５とで構成して、これらの第１の壁２４と第２の壁２５との間の空間Ｋが測定セル６即ち気体サンプル室２の内外を連通している。しかしながら、本発明では、測定セル６の側壁２２のうち一つの壁のみに連通部２６を設けて、該連通部２６を構成する第１の壁２４と第２の壁２５との間の一対の空間Ｋが測定セル６、即ち気体サンプル室２の内外を連通しても良い。また、気体サンプル室２の内外を連通する空間Ｋは、気体サンプル室２内の雰囲気が移動しやすいように、少なくとも二箇所に設けられていることが好ましい。   Further, in the above-described embodiment, the communication portion 26 is provided on each of the pair of walls 22a and 22b facing each other among the side walls 22 of the measurement cell 6, and the communication portions 26 are spaced apart from each other and partially overlap each other. The wall K between the first wall 24 and the second wall 25 communicates the inside and outside of the measurement cell 6, that is, the gas sample chamber 2. . However, in the present invention, the communication portion 26 is provided only on one of the side walls 22 of the measurement cell 6, and a pair of the first wall 24 and the second wall 25 constituting the communication portion 26 is provided. The space K may communicate with the measurement cell 6, that is, the inside and outside of the gas sample chamber 2. Moreover, it is preferable that the space K communicating between the inside and outside of the gas sample chamber 2 is provided at least in two places so that the atmosphere in the gas sample chamber 2 can easily move.

また、前述した実施形態では、測定セル６の側壁２２の互いに相対する各壁２２ａ，２２ｂそれぞれに設けられた連通部２６を構成する互いに間隔をあけ且つ一部が重なる第１の壁３４と第２の壁３５との双方が、当該第１の壁３４と第２の壁３５との互いに相対する対向面から突設された突出壁３６を有していた。しかしながら、本発明では、前記第１の壁３４と第２の壁３５とのうち少なくとも一方が、突出壁３６を有していれば良い。   Further, in the above-described embodiment, the first wall 34 and the first wall 34 which are spaced apart from each other and partially overlap each other, which constitute the communication portion 26 provided on each of the walls 22 a and 22 b facing each other on the side wall 22 of the measurement cell 6. Both of the two walls 35 had a protruding wall 36 that protruded from the opposing surfaces of the first wall 34 and the second wall 35 facing each other. However, in the present invention, it is sufficient that at least one of the first wall 34 and the second wall 35 has the protruding wall 36.

さらに、前述した実施形態では、濃度測定装置１が二酸化炭素、水蒸気、一酸化炭素の濃度を測定している。しかしながら、本発明では、濃度測定装置１がＮＯx、ＳＯx、Ｈ2Ｓ、Ｏ3、ＣＨ4、ＮＯなどの二酸化炭素、水蒸気、一酸化炭素以外の種々の気体の濃度を測定しても良い。 Furthermore, in the embodiment described above, the concentration measuring device 1 measures the concentrations of carbon dioxide, water vapor, and carbon monoxide. However, in the present invention, even if the concentration measuring apparatus 1 measures the concentrations of various gases other than carbon dioxide such as NO x , SO x , H 2 S, O 3 , CH 4 , NO, water vapor, and carbon monoxide. good.

なお、前述した実施形態は本発明の代表的な形態を示したに過ぎず、本発明は、実施形態に限定されるものではない。即ち、本発明の骨子を逸脱しない範囲で種々変形して実施することができる。   In addition, embodiment mentioned above only showed the typical form of this invention, and this invention is not limited to embodiment. That is, various modifications can be made without departing from the scope of the present invention.

本発明の一実施形態に係る濃度測定装置の気体サンプル室の構成を模式的に示す斜視図である。It is a perspective view showing typically composition of a gas sample room of a concentration measuring device concerning one embodiment of the present invention. 図１に示された濃度測定装置の構成を示す説明図である。It is explanatory drawing which shows the structure of the density | concentration measuring apparatus shown by FIG. 図１中のＩＩＩ−ＩＩＩ線の断面を模式的に示す説明図である。It is explanatory drawing which shows typically the cross section of the III-III line | wire in FIG. 図３中のＩＶ−ＩＶ線の断面を模式的に示す説明図である。It is explanatory drawing which shows typically the cross section of the IV-IV line | wire in FIG. 図２に示された濃度測定装置の受光回路の構成を示す説明図である。It is explanatory drawing which shows the structure of the light-receiving circuit of the density | concentration measuring apparatus shown by FIG. 二酸化炭素の透過率を示したグラフである。It is the graph which showed the transmittance | permeability of the carbon dioxide. 図１に示された濃度測定装置の気体サンプル室の変形例の構成を模式的に示す説明図である。It is explanatory drawing which shows typically the structure of the modification of the gas sample chamber of the concentration measuring apparatus shown by FIG. 図１に示された濃度測定装置の気体サンプル室の別の変形例の構成を模式的に示す説明図である。It is explanatory drawing which shows typically the structure of another modification of the gas sample chamber of the concentration measuring apparatus shown by FIG. 図１に示された濃度測定装置の気体サンプル室の更に別の変形例の構成を模式的に示す断面図である。It is sectional drawing which shows typically the structure of another modification of the gas sample chamber of the concentration measuring apparatus shown by FIG. 図９に示された濃度測定装置の気体サンプル室の変形例の構成を模式的に示す断面図である。It is sectional drawing which shows typically the structure of the modification of the gas sample chamber of the concentration measuring apparatus shown by FIG. 図１０に示された濃度測定装置の気体サンプル室の更にまた別の変形例の構成を模式的に示す斜視図である。It is a perspective view which shows typically the structure of another modification of the gas sample chamber of the concentration measuring apparatus shown by FIG. 図１１中のＸＩＩ−ＸＩＩ線の断面を模式的に示す説明図である。It is explanatory drawing which shows typically the cross section of the XII-XII line | wire in FIG.

符号の説明Explanation of symbols

１ 濃度測定装置
２ 気体サンプル室
５ マイクロコンピュータ（濃度算出部）
６ 測定セル（本体部）
７ 光源
１２ 受光器
２２ 側壁
２４ 第１の壁
２５ 第２の壁
２６ 連通部
２８ 第１の壁
２９ 第２の壁
３０，３０ａ，３０ｂ 第１の壁
３１，３１ａ，３１ｂ 第２の壁
３２ 第１傾斜部
３３ 第２傾斜部
３４ 第１の壁
３５ 第２の壁
３６ 突出壁
３８ 第１の壁
３９ 第２の壁 1 Concentration measuring device 2 Gas sample chamber 5 Microcomputer (concentration calculator)
6 Measurement cell (main part)
7 Light source 12 Light receiver 22 Side wall 24 First wall 25 Second wall 26 Communication portion 28 First wall 29 Second wall 30, 30a, 30b First wall 31, 31a, 31b Second wall 32 Second 1 slope part 33 2nd slope part 34 1st wall 35 2nd wall 36 protrusion wall 38 1st wall 39 2nd wall

Claims (7)

光源からの光を受光器に導く気体サンプル室において、
筒状に形成された本体部と、前記本体部の一端部に配置された前記光源と、前記本体部の他端部に配置され且つ前記光源からの光を受光する前記受光器と、を備え、
前記本体部の側壁が、互いに間隔をあけ且つ一部が重なる第１の壁及び第２の壁から構成されて、前記本体部の内外を連通する連通部を少なくとも一つ備えていることを特徴とする気体サンプル室。 In the gas sample chamber that guides the light from the light source to the receiver,
A main body formed in a cylindrical shape, the light source disposed at one end of the main body, and the light receiver disposed at the other end of the main body and receiving light from the light source. ,
The side wall of the main body is composed of a first wall and a second wall that are spaced apart from each other and partially overlap each other, and includes at least one communication portion that communicates the inside and outside of the main body. Gas sample chamber. 複数の前記連通部が、前記光源から前記受光器に向かう光の光軸を挟んで互いに相対して設けられていることを特徴とする請求項１に記載の気体サンプル室。   2. The gas sample chamber according to claim 1, wherein the plurality of communication portions are provided to face each other across an optical axis of light traveling from the light source toward the light receiver. 前記連通部が、前記側壁の上部に位置する箇所と、前記側壁の下部に位置する箇所とに設けられていることを特徴とする請求項２に記載の気体サンプル室。   3. The gas sample chamber according to claim 2, wherein the communication portion is provided at a location located at an upper portion of the side wall and a location located at a lower portion of the side wall. 前記連通部が、前記第１の壁と前記第２の壁とのうち外側に位置する一方に設けられた開口部を備えていることを特徴とする請求項１乃至請求項３のうちいずれか一項に記載の気体サンプル室。   The said communication part is provided with the opening part provided in the one located in the outer side among the said 1st wall and the said 2nd wall, The Claim 1 thru | or 3 characterized by the above-mentioned. The gas sample chamber according to one item. 前記第１の壁と前記第２の壁との双方が、前記本体部の前記一端部から前記他端部方向に沿って外側に傾斜する第１傾斜部と、前記第１傾斜部に連なり且つ前記本体部の前記一端部から前記他端部方向に沿って内側に傾斜する第２傾斜部と、を有していることを特徴とする請求項１乃至請求項４のうちいずれか一項に記載の気体サンプル室。   Both the first wall and the second wall are connected to the first inclined portion, the first inclined portion inclined outward from the one end portion of the main body portion along the other end portion direction, and the first inclined portion. 5. The apparatus according to claim 1, further comprising: a second inclined portion that is inclined inward along the other end portion direction from the one end portion of the main body portion. The gas sample chamber as described. 前記第１の壁と前記第２の壁とのうち少なくとも一方が、これらの壁同士が互いに相対する対向面から突設した突出壁を有していることを特徴とする請求項１乃至請求項５のうちいずれか一項に記載の気体サンプル室。   The at least one of the first wall and the second wall has a projecting wall projecting from an opposing surface where these walls face each other. The gas sample chamber according to any one of 5. 一端部に光源を設け且つ他端部に該光源からの光を受光する受光器を設けた気体サンプル室と、前記受光器が受光した前記光源からの光の強さに基づいて前記気体サンプル室内の予め定められた気体の濃度を算出する濃度算出部と、を備えた濃度測定装置において、
前記気体サンプル室として、請求項１乃至請求項６のうちいずれか一項に記載の気体サンプル室を備えたことを特徴とする濃度測定装置。 A gas sample chamber provided with a light source at one end and a light receiver for receiving light from the light source at the other end, and the gas sample chamber based on the intensity of light from the light source received by the light receiver In a concentration measuring device comprising: a concentration calculating unit that calculates a predetermined gas concentration;
A concentration measuring apparatus comprising the gas sample chamber according to any one of claims 1 to 6 as the gas sample chamber.
JP2007315739A 2007-12-06 2007-12-06 Gas sample chamber and concentration measuring apparatus provided with the gas sample chamber Expired - Fee Related JP5026940B2 (en)

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